High-order resonance fluid generation device

Abstract

A high-order resonance fluid generation device, comprising a base plate, a piezoelectric plate, a spacing portion and a diaphragm, wherein the piezoelectric plate and the base plate form an actuator; the end of the spacing portion that is close to the actuator is connected to the actuator, the spacing portion and the actuator enclose a groove portion, of which the end facing away from the actuator is provided with an opening, and the diaphragm is connected to the end of the spacing portion that faces away from the actuator, thereby forming a chamber among the actuator, the groove portion and the diaphragm; when the actuator is excited by an electrical signal to vibrate, the vibration energy is transmitted to the diaphragm, and on one hand, when the actuator vibrates, a fluid in the chamber is driven to generate a change in pressure, and then the diaphragm is caused to vibrate and the energy is transmitted to the diaphragms, and more importantly, the energy is directly transmitted to the diaphragms by means of mechanical coupling formed between the actuator and the diaphragm, thereby realizing a higher flow output; and at least one hole portion is formed at each of at least two anti-node positions or areas adjacent to the anti-node positions of the vibration of the diaphragm, such that the utilization rate of the vibration energy is higher.

Description

High-order resonance fluid generating device Technical Field

[0001] The present invention relates to the field of fluid control technology, and in particular to a high-order resonance fluid generating device. Background Art

[0002] In recent years, as 3C terminal products have continued to develop rapidly towards intelligence and thinness, the thermal load of internal electronic devices has gradually increased, and efficient heat dissipation has become a hot topic of research. Placing a microfluid generator with a piezoelectric transducer as an actuator as a heat dissipation device in the internal space of the terminal product is believed to be able to generate greater thermal benefits, but this also puts forward new requirements for the structural performance of such heat dissipation devices themselves.

[0003] The fluid pump disclosed in the Chinese patent with publication number CN102597520A declares a gas generating device using a piezoelectric transducer as an actuator. Even if the actuator is small, it can obtain sufficient amplitude during the bending vibration process, thereby ensuring the output performance of the fluid pump; the blower disclosed in the Chinese patent with publication number CN108317093A similarly declares a gas generating device using a resonant piezoelectric transducer as an actuator; in addition, in order to further improve the structural compactness and miniaturization of the piezoelectric-driven gas generating device, in the process of technological iteration, there are also a vertically supported micro piezoelectric pump disclosed in the Chinese patent with publication number CN209838655U and a staggered support structure and gas control device of a piezoelectric micropump disclosed in the Chinese patent with patent number CN213063904U.

[0004] The aforementioned patent documents all share the same or similar gas generation principles, and the basic components of the gas generating devices, fluid pumps, blowers, micro-piezoelectric pumps, or fluid generating devices described are also the same or similar. They all include at least a piezoelectric actuator, a deformable flexible plate (also known as a resonant plate, flexible plate, thin-walled portion, etc.) positioned relative to the actuator with a gap between them, located at or near the center of the actuator, and sidewalls that, together with the actuator and the flexible plate, define a chamber. The actuator is elastically supported on the sidewalls by a support portion, and the flexible plate is provided with a drainage hole for fluid flow relative to the central region of the actuator. The actuator is supported planarly or perpendicularly on the sidewalls. The actuator vibrates under external excitation, and the vibration of the actuator causes pressure fluctuations in the gas in the gap between the actuator and the flexible plate, causing resonance in the flexible plate centered around the drainage hole. This substantially increases the vibration amplitude, thereby increasing the flow rate.

[0005] However, in this structure, the actuator's vibration energy is transmitted to the flexible plate through fluctuations in gas pressure within the gap, forcing the flexible plate to resonate. Due to aerodynamic damping, the vibration energy transmitted via fluid-structure coupling suffers significant losses, resulting in low energy transfer efficiency. Furthermore, the effective working space of the resonant system is primarily concentrated in the gap region corresponding to the central, high-amplitude region of the piezoelectric actuator and flexible plate. Vibration energy outside this central, high-amplitude region is not effectively utilized, resulting in low overall energy utilization. This structure also exhibits limited gap volume change, resulting in poor flow output performance. Therefore, it cannot meet the requirements for use as a heat sink.

[0006] Summary of the Invention

[0007] The technical problem to be solved by the present invention is: in order to solve the deficiencies in the prior art, a high-order resonant fluid generating device is provided.

[0008] The technical solution adopted by the present invention to solve the technical problem is: a high-order resonance fluid generating device, comprising:

[0009] A substrate having at least one piezoelectric sheet bonded to one or both surfaces in the thickness direction, the piezoelectric sheet and the substrate forming an actuator, the actuator having a first principal surface and a second principal surface disposed opposite each other in the thickness direction, the piezoelectric sheet causing the actuator to vibrate under the stimulation of an electrical signal;

[0010] a spacer, the first main surface and / or the second main surface being bonded with the spacer, the spacer being connected to the actuator at one end thereof close to the actuator, and the spacer and the actuator forming a groove having an opening at one end thereof facing away from the actuator;

[0011] and a diaphragm fixedly connected to an end of the spacer away from the actuator and covering the opening of the groove, so that a chamber is formed between the actuator, the groove and the diaphragm, and a hole portion communicating with the chamber is penetrated in a region of the diaphragm opposite to the chamber;

[0012] When the actuator vibrates under the excitation of an electrical signal, it transfers vibration energy to the diaphragm to cause the diaphragm to vibrate in a high-order resonance mode with at least two antinodes, and at least one hole portion is formed at at least one antinode position A of the diaphragm vibration or in the vicinity of the antinode position A.

[0013] Furthermore, at least one hole is formed at each of at least two antinode positions A of the diaphragm vibration or in the vicinity of the antinode position A.

[0014] Furthermore, at least one hole is formed at each antinode position A of the diaphragm vibration or at a region adjacent to the antinode position A.

[0015] Furthermore, the spacer is an annular structure, the inner peripheral wall of the spacer and the actuator form an annular groove, and the end of the spacer away from the actuator is fully or partially engaged with the diaphragm on an annular path around the groove.

[0016] Furthermore, the spacer portion has multiple spacers, each of which is joined to the first main surface or the second main surface. The multiple spacers are spaced apart along a circular path around the chamber to form the groove portion with the actuator, and the end of the spacer facing away from the actuator is fully or partially joined to the diaphragm.

[0017] Furthermore, the piezoelectric sheet is in a ring-shaped structure with a hole running through the center, and the hole is arranged opposite to the cavity.

[0018] Furthermore, the diaphragm is made of a polymer material, or a composite material of a polymer material and a metal material.

[0019] Furthermore, the vibration of the high-order resonance mode generated by the diaphragm is the vibration of the second-order resonance mode, the vibration of the third-order resonance mode, the vibration of the fourth-order resonance mode, the vibration of the fifth-order resonance mode, the vibration of the sixth-order resonance mode, the vibration of the seventh-order resonance mode, the vibration of the eighth-order resonance mode or the vibration of the ninth-order resonance mode.

[0020] Furthermore, it also includes an adapter for fixed connection with the terminal product;

[0021] The adapter is elastically connected to the area on the diaphragm opposite the spacer, the actuator or the spacer;

[0022] Alternatively, the adapter is fixedly connected to a node position of vibration of the actuator.

[0023] The following options are available for adapters:

[0024] Solution 1: The adapter includes a frame portion for fixed connection to the terminal product:

[0025] The frame portion is provided with a plurality of elastic arms having elasticity, and one end of the elastic arm facing away from the frame portion is fixedly connected to the area on the diaphragm opposite to the spacer portion, the actuator or the spacer portion.

[0026] Furthermore, a central opening is provided through the middle of the frame;

[0027] The actuator is at least partially located in the central opening, one end of the elastic arm is connected to the inner peripheral wall of the central opening, and the other end is fixedly connected to the outer peripheral wall of the actuator or the outer peripheral wall of the partition.

[0028] Furthermore, a central opening portion is passed through the middle position of the frame portion, and all the holes are arranged opposite to the central opening portion;

[0029] The actuator is located above the central opening. One end of the elastic arm is fixedly connected to the frame, and the other end is connected to an end of the actuator close to the frame.

[0030] Solution 2: The adapter includes a retaining portion for fixedly connecting to the terminal product;

[0031] The retaining portion is engaged at a node position of vibration of the actuator, and the retaining portion is engaged at a side of the actuator facing away from the diaphragm;

[0032] The number of the retaining portion is one or two or more retaining portions are spaced apart.

[0033] Option three, the adapter includes a diaphragm extension portion, the diaphragm extension portion includes a fixed portion and an elastic suspension portion, the fixed portion is used to be fixedly connected to the terminal product, and the fixed portion surrounds the outer periphery of the diaphragm, one end of the suspension portion is connected to the inner peripheral wall of the fixed portion, and the other end is connected to the outer peripheral wall of the diaphragm, so that the diaphragm is elastically supported on the fixed portion in the horizontal direction through the cantilever portion.

[0034] Furthermore, there are multiple suspension parts, and an opening is formed between two adjacent suspension parts.

[0035] Furthermore, the diaphragm extension portion is integrally formed with the diaphragm.

[0036] Option 4, the adapter includes a diaphragm supporting portion, which is arranged on the side of the diaphragm facing away from the substrate, and the diaphragm supporting portion includes a fixed supporting portion and a plurality of cantilever portions arranged at intervals, and the fixed supporting portion is used to be fixedly connected to the terminal product and is located on the outside of the outer peripheral wall of the spacer portion, one end of the cantilever portion is connected to the fixed supporting portion, and the other end is connected to the area of ​​the diaphragm facing away from the substrate and opposite to the spacer portion, so that the diaphragm is elastically supported on the fixed portion in the horizontal direction through the cantilever portion.

[0037] The beneficial effects of the present invention are:

[0038] 1) In the high-order resonant fluid generating device of the present invention, the diaphragm is fixedly connected to the actuator through the spacer, and the vibration of the actuator causes the diaphragm to vibrate, and this process is accompanied by energy transfer; the vibration energy generated by the actuator under the excitation of the external electrical signal, on the one hand, drives the fluid in the chamber to produce pressure changes when the actuator vibrates, thereby causing the diaphragm to vibrate and transfer the energy to the diaphragm; more importantly, the energy is directly transferred to the diaphragm through the mechanical coupling formed by the actuator and the diaphragm. Compared with the existing technology that only relies on the fluid to transfer vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, it can cause the diaphragm to generate a larger amplitude to achieve a higher flow output; under the same amplitude requirement, it can reduce the input power of the actuator, reduce heat, and improve energy utilization, product stability and service life.

[0039] 2) In the high-order resonant fluid generating device of the present invention, the actuator generates vibrations under external excitation and transmits the vibration energy to the diaphragm, thereby prompting the diaphragm to generate vibrations in a high-order resonant mode with at least two antinodes. At least two antinode positions or adjacent areas of the diaphragm vibration are respectively formed with at least one hole portion. At this time, the effective working space of the cavity between the actuator and the diaphragm is not mainly concentrated in the central area of ​​the diaphragm, but extends to a larger area than the central area, and the utilization rate of the vibration energy is higher.

[0040] 3) The diaphragm of the high-order resonant fluid generating device of the present invention is composed of a polymer material, or a composite material composed of a polymer material and other metal materials; compared with the metal flexible plate used in the prior art, the diaphragm structure has a higher elastic strain limit and is easy to obtain a larger amplitude, which is particularly suitable for application scenarios with high requirements for flow output, such as heat dissipation of smart 3C terminal products.

[0041] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] The present invention will be further described below with reference to the accompanying drawings and examples.

[0043] FIG1 is a schematic diagram of the structure of the groove formed by the spacer and the base plate in Example 1;

[0044] FIG2 is a schematic structural diagram of a spacer and a piezoelectric sheet in Example 1, arranged on the same side surface of a substrate in the thickness direction;

[0045] 3 is a schematic structural diagram of an actuator in Example 1 in which both main surfaces of the actuator are provided with spacers coupled to the substrate, and a piezoelectric sheet is provided on either side of the substrate in the thickness direction;

[0046] FIG4 is a schematic structural diagram of the actuator in Example 1 in which piezoelectric sheets and spacers are provided on both main surfaces of the actuator, and the spacers are bonded to the piezoelectric sheets;

[0047] FIG5 is a schematic structural diagram of an actuator in Example 1 in which spacers are provided on both main surfaces thereof, with the spacers on one side bonded to the piezoelectric sheet and the spacers on the other side bonded to the substrate;

[0048] FIG6 is a schematic diagram showing that the holes discharge fluid relatively independently during operation;

[0049] FIG7 is a schematic diagram showing that the holes are relatively independent of each other in the working process to absorb the fluid;

[0050] FIG8 is a schematic diagram of the structure of the fluid generating device and the vibration state of the diaphragm in Example 1 when the diaphragm is in the third-order resonance mode;

[0051] FIG9 is a schematic diagram of an explosion of the fluid generating device in Example 1 when the diaphragm is in a third-order resonance mode;

[0052] FIG10 is an exploded schematic diagram of the fluid generating device in Example 1 when the diaphragm is in a third-order resonance mode from another perspective;

[0053] FIG11 is a schematic structural diagram of the diaphragm in Example 1, which is deformed in a convex manner in one direction under the second-order resonance mode;

[0054] FIG12 is a schematic structural diagram of the diaphragm in Example 1, which is deformed in a convex manner in another direction under the second-order resonance mode;

[0055] FIG13 is a schematic structural diagram of the diaphragm in Example 1, which is deformed convexly in one direction in a fourth-order resonance mode;

[0056] FIG14 is a schematic structural diagram of the diaphragm in Example 1, which is deformed in a convex manner in another direction under the fourth-order resonance mode;

[0057] FIG15 is a schematic structural diagram of a square diaphragm in Example 1, wherein the short sides thereof are fixed at both sides and the diaphragm is deformed in a convex direction in a second-order resonance mode;

[0058] FIG16 is a schematic structural diagram of the square diaphragm in Example 1, which is convexly deformed in another direction under the second-order resonance mode when both sides of the short sides are fixed;

[0059] FIG17 is a schematic structural diagram of a square diaphragm in Example 1, wherein the short sides and long sides are fixed and the diaphragm is deformed in one direction in a second-order subresonance mode;

[0060] FIG18 is a schematic structural diagram of the square diaphragm in Example 1, which is deformed in a convex manner in another direction under the second-order resonant mode when both the short and long sides are fixed;

[0061] FIG19 is a schematic structural diagram of a square diaphragm in Example 1, wherein the short sides and long sides are fixed and the diaphragm is deformed in a convex direction in a higher-order resonance mode;

[0062] FIG20 is a schematic structural diagram of the square diaphragm in Example 1, which is deformed convexly in another direction under a higher-order resonance mode when both the short and long sides are fixed;

[0063] FIG21 is a schematic structural diagram of a plurality of spacers arranged at intervals in Example 2;

[0064] FIG22 is a schematic diagram of a fluid generating device in Example 3;

[0065] FIG23 is a schematic structural diagram of a fluid generating device with a planar support structure having a frame portion in Example 4;

[0066] FIG24 is a schematic structural diagram of a fluid generating device with a vertical support structure having a frame portion in Example 4;

[0067] FIG25 is a schematic structural diagram of a fluid generating device with a holding portion in Example 5;

[0068] FIG26 is a schematic structural diagram of a fluid generating device with a diaphragm extension portion in Example 6;

[0069] FIG27 is a schematic diagram showing a structure in which a plurality of openings are formed at intervals along the circumference of the diaphragm on the suspension portion in Example 6;

[0070] FIG28 is a schematic structural diagram of a fluid generating device having a diaphragm support portion in Example 7;

[0071] FIG29 is a schematic structural diagram of the diaphragm support portion in Example 7;

[0072] In the figure: 1. substrate;

[0073] 2. Piezoelectric sheet, 2-1, cavity;

[0074] 3. Spacer, 3-1. Groove, 31. Spacer;

[0075] 4, diaphragm, 41, hole;

[0076] 5. Chamber;

[0077] 6. Frame, 61. Elastic arm, 62. Central opening;

[0078] 7. Maintaining department;

[0079] 8. Diaphragm extension portion, 81. Fixing portion, 82. Suspension portion, 83. Opening portion;

[0080] 9. Diaphragm support portion, 91. Fixed support portion, 92. Cantilever portion;

[0081] 10. Actuator, 10-1. First main surface, 10-2. Second main surface;

[0082] A. Antinode position, A1, central antinode, A2, annular antinode. DETAILED DESCRIPTION

[0083] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that illustrate the basic structure of the present invention only in a schematic manner. Therefore, they only show components relevant to the present invention, and directions and references (e.g., up, down, left, right, etc.) may be used solely to facilitate the description of features in the drawings. The following detailed description is therefore not to be taken in a limiting sense, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0084] Example 1, a high-order resonant fluid generating device, which can be used as a fan, includes: a substrate 1, a piezoelectric sheet 2, a spacer 3, and a diaphragm 4;

[0085] As shown in Figures 1 to 20, at least one piezoelectric sheet 2 is bonded to one or both surfaces of a substrate 1 in the thickness direction. The piezoelectric sheet 2 may be a piezoelectric ceramic sheet. The piezoelectric sheet 2 and the substrate 1 constitute an actuator 10. The actuator 10 has a first main surface 10-1 and a second main surface 10-2 that are arranged opposite to each other in the thickness direction. The piezoelectric sheet 2 causes the actuator 10 to vibrate under the stimulation of an electrical signal.

[0086] The substrate 1 may be, but is not limited to, circular, rectangular, polygonal or elliptical, etc. In this embodiment, taking the substrate 1 in the shape of a circular plate as an example, a single piezoelectric piece 2 can be bonded to any side surface of the substrate 1 in the thickness direction to form a piezoelectric single-chip actuator 10; or two piezoelectric pieces 2 are respectively arranged on the two side surfaces of the substrate 1 in the thickness direction to form a piezoelectric dual-chip actuator 10; or multiple piezoelectric pieces 2 are arranged on the same side surface of the substrate 1 in the thickness direction to form a composite multilayer piezoelectric actuator 10, etc. The piezoelectric piece 2 causes the actuator 10 to vibrate under the excitation of an external periodic electrical signal.

[0087] The first main surface 10 - 1 and / or the second main surface 10 - 2 are joined with a spacer 3 , which is connected to the actuator 10 at one end thereof close to the actuator 10 , and the spacer 3 and the actuator 10 form a groove 3 - 1 having an opening at one end facing away from the actuator 10 .

[0088] Specifically:

[0089] The spacer 3 can be joined to one side or both sides of the surface in the thickness direction of the substrate 1 constituting the actuator 10. At this time, it is not difficult to understand that the spacer 3 can be joined to one side surface of the substrate 1 in the thickness direction, or to the other side surface of the substrate 1 in the thickness direction, as shown in Figures 1 and 2. Of course, when there are multiple spacers 3 at the same time, for example, the fluid generating device of the present application can have the function of bidirectional operation. At this time, spacers 3 need to be set on both main surfaces of the actuator 10. The spacers 3 can be respectively set on both sides of the surface in the thickness direction of the substrate 1, as shown in Figure 3; under this structure, when the spacer 3 and the piezoelectric sheet 2 are set on the same side surface of the substrate 1 in the thickness direction, the piezoelectric sheet 2 is located in the groove 3-1 of the spacer 3, and at the same time, the spacer 3 has a height protruding from the surface of the piezoelectric sheet 2, as shown in Figures 2 and 3; when the spacer 3 and the piezoelectric sheet 2 are respectively set on both sides of the surface in the thickness direction of the substrate 1, they are not subject to this restriction; the joining between the spacer 3 and the substrate 1 can be bonding or integrally formed.

[0090] In addition, the spacer 3 can also be joined to the side surface of the piezoelectric piece 2 constituting the actuator 10 that is away from the actuator 10. Under this structure, it is not difficult to understand that when the actuator 10 constitutes the piezoelectric single-chip actuator 10 described above, the spacer 3 can be joined to the side surface of the piezoelectric piece 2 constituting the piezoelectric single-chip actuator 10 that is away from the substrate 1; when the actuator 10 constitutes the piezoelectric dual-chip actuator 10 described above, the spacer 3 can be joined to the side surface of the piezoelectric piece 2 on either side of the piezoelectric dual-chip actuator 10 that is away from the substrate 1. Of course, when there are multiple spacers 3 at the same time, for example, the fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 10-1 and the second main surface 10-2 of the actuator 10 need to be provided with a spacer 3. The spacer 3 can be respectively provided on the side surface of the piezoelectric pieces 2 on both sides of the piezoelectric dual-chip actuator 10 that are away from the substrate 1, as shown in Figure 4.

[0091] In addition, it is not difficult to understand that when multiple spacers 3 exist at the same time, the above-mentioned joining methods of the spacers 3 can also be combined with each other. For example, the fluid generating device of the present application can have a bidirectional working function. At this time, the first main surface 10-1 and the second main surface 10-2 of the actuator 10 need to be provided with spacers 3, wherein there is at least one spacer 3 joined to the side surface of the piezoelectric piece 2 constituting the actuator 10 facing away from the actuator 10, and there is also at least one spacer 3 joined to the side of the substrate 1 facing away from the actuator 10, as shown in Figure 5; under this structure, the joining between the spacer 3 and the substrate 1 can be bonding or integrally formed.

[0092] Of course, the joining method of the spacer 3 is not limited to this. The joining method of the spacer 3 follows the principle that the end of the spacer 3 close to the actuator 10 is connected to the actuator 10, and the spacer 3 and the actuator 10 form a groove 3-1 with an opening at the end facing away from the actuator 10.

[0093] In this embodiment, the actuator 10 is configured as a piezoelectric single-chip actuator 10, with one spacer 3, and the spacer 3 is bonded to the surface of the substrate 1 on the side where the second main surface 10-2 of the actuator 10 is located, for ease of understanding.

[0094] The spacer 3 is bonded to the surface of the substrate 1 on the side where the second main surface 10-2 is located. The end of the spacer 3 close to the substrate 1 is connected to the substrate 1, and the spacer 3 and the substrate 1 form a groove 3-1 with an opening at the end facing away from the substrate 1, as shown in Figure 1; the bonding between the spacer 3 and the substrate 1 can be adhesive or integrally formed. The spacer 3 is an annular structure, so that the inner peripheral wall of the spacer 3 itself encloses the groove 3-1.

[0095] The end portion of the spacer 3 close to the substrate 1 is joined to the surface of the substrate 1 on the side where the second main surface 10-2 is located, and the diaphragm 4 is connected to the end of the spacer 3 facing away from the substrate 1, so that the vibration of the actuator 10 can directly drive the spacer 3 and the diaphragm 4 to vibrate, so as to transfer the vibration energy to the diaphragm 4 through mechanical coupling.

[0096] The diaphragm 4 is connected to the end of the spacer 3 facing away from the substrate 1 and covers the opening of the groove 3-1, so that a cavity 5 is formed between the substrate 1, the groove 3-1 and the diaphragm 4. A hole 41 is penetrated in the area of ​​the diaphragm 4 opposite to the cavity 5 and communicates with the cavity 5.

[0097] Thus, the diaphragm 4 is fixedly connected to the actuator 10 through the spacer 3, and the vibration of the actuator 10 causes the diaphragm 4 to vibrate, and this process is accompanied by energy transfer. The vibration energy generated by the actuator 10 under the stimulation of the external electrical signal, on the one hand, is transferred to the diaphragm 4 by causing the fluid in the chamber 5 to produce pressure changes when the actuator 10 vibrates, thereby causing the diaphragm 4 to vibrate. More importantly, the energy is directly transferred to the diaphragm 4 through the mechanical coupling formed by the actuator 10 and the diaphragm 4. Compared with the existing technology that relies solely on the fluid to transfer vibration energy, the energy transfer efficiency is higher. Under the same excitation conditions, it can cause the diaphragm 4 to produce a larger amplitude to achieve a higher flow output. Under the same amplitude requirement, it can reduce the input power of the actuator 10, reduce heat generation, and improve energy utilization, product stability and service life.

[0098] When the actuator 10 vibrates under the excitation of an electrical signal, it transfers vibration energy to the diaphragm 4 to cause the diaphragm 4 to generate vibration in a high-order resonance mode with at least two antinodes. The vibration in the high-order resonance mode generated by the diaphragm 4 may be, but is not limited to, vibration in the second-order resonance mode, vibration in the third-order resonance mode, vibration in the fourth-order resonance mode, vibration in the fifth-order resonance mode, vibration in the sixth-order resonance mode, vibration in the seventh-order resonance mode, vibration in the eighth-order resonance mode, or vibration in the ninth-order resonance mode. At least one hole 41 is formed in at least one antinode position A of the vibration of the diaphragm 4 or in the vicinity of the antinode position A. The vicinity of the antinode position A refers to an area close to the side of the antinode position A but not including the antinode position A in the interval between the node position and the antinode position A of the vibration of the diaphragm 4.

[0099] In this embodiment, the at least one hole 41 is not limited to being formed at at least one antinode position A of the vibration of the diaphragm 4 or in the vicinity of the antinode position A. Alternatively, at least one hole 41 may be formed at each of at least two antinode positions A of the vibration of the diaphragm 4 or in the vicinity of the antinode position A. Alternatively, at least one hole 41 may be formed at each antinode position A of the vibration of the diaphragm 4 or in the vicinity of the antinode position A.

[0100] During operation, the piezoelectric piece 2 causes the actuator 10 to vibrate under the stimulation of the electrical signal, and transfers the vibration energy to the diaphragm 4, so as to cause the diaphragm 4 to vibrate in a high-order resonant mode with at least two antinodes. The holes 41 formed at at least one antinode position A of the vibration of the diaphragm 4 or in the adjacent area of ​​the antinode position A independently inhale and discharge the fluid during operation. When the area where the hole 41 is located is deformed toward the side away from the actuator 10, the local volume of the area corresponding to the hole 41 in the chamber 5 increases, the pressure decreases, and the external fluid enters the chamber 5 along the hole 41, as shown in Figure 7; and when the area where the hole 41 is located is deformed toward the side of the actuator 10, the local volume of the area corresponding to the hole 41 in the chamber 5 decreases, the pressure increases, and the fluid sucked into the chamber 5 in the previous process is discharged from the chamber 5 along the hole 41 with a certain momentum. The fluid with a certain momentum forms a jet after flowing out of the hole 41 and can draw in the surrounding fluid, further increasing the output flow rate, as shown in Figure 6, and so on.

[0101] It should be noted that, under this structure, the height of the chamber 5 in the thickness direction of the actuator 10 may be greater than the sum of the respective maximum displacements of the actuator 10 and the diaphragm 4 when they vibrate and deform toward each other, so as to avoid motion interference between the actuator 10 and the diaphragm 4 during the vibration process and make full use of the vibration energy. In addition, under this structure, if the height of the chamber 5 is too large, the fluid pressure and flow rate discharged from the chamber 5 by the hole 41 will be reduced, thereby affecting the formation of the jet, or even making it impossible to form a jet, and thus unable to entrain the surrounding fluid, thereby resulting in a reduction in the final output flow rate. Preferably, the height of the chamber 5 in the thickness direction of the actuator 10 is not greater than 20 times the sum of the respective maximum displacements of the actuator 10 and the diaphragm 4 when they vibrate and deform toward each other.

[0102] The vibration generated by the diaphragm 4 can be a centrally symmetrical vibration mode. For example, when the diaphragm 4 vibrates in a first-order resonance mode, the vibration displacement at the center of the diaphragm 4 is the largest. Since there is only one central antinode A1, its effective working space is mainly concentrated in the area of ​​the chamber 5 opposite to the central antinode A1 of the actuator 10 and the diaphragm 4, while the vibration energy in the area outside the central antinode A1 of the actuator 10 and the diaphragm 4 is not effectively utilized, resulting in low overall energy utilization.

[0103] This situation can be effectively improved when the diaphragm 4 vibrates in a high-order resonance mode, because in the high-order centrosymmetric resonance mode, the diaphragm 4 not only has a central antinode A1, but also has annular antinodes A2 surrounding the central antinode A1 at a position further outward from the central antinode A1. The number of annular antinodes A2 is related to the order of the resonance mode.

[0104] The spacer 3 is an annular structure. The inner peripheral wall of the spacer 3 and the substrate 1 enclose an annular groove 3-1. The end of the spacer 3 facing away from the substrate 1 is fully or partially engaged with the diaphragm 4 along an annular path around the groove 3-1.

[0105] When the end of the annular spacer 3 facing away from the substrate 1 is completely engaged with the diaphragm 4 along the annular path around the groove 3-1:

[0106] The diaphragm 4 vibrates in a third-order resonance mode, and the antinode positions A can be respectively a central antinode A1 and an annular antinode A2. The diaphragm 4 has a central antinode A1 at the central position, and an annular antinode A2 surrounding the central antinode A1 is further outward of the central antinode A1. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is only provided in the central antinode A1 or in the vicinity of the central antinode A1, or only in the annular antinode A2 or in the vicinity of the annular antinode A2, a higher output flow rate can be obtained. Of course, preferably, the hole portion 41 is provided in the central antinode A1 and the annular antinode A2 or in the vicinity of the annular antinode A2. The adjacent areas are provided with holes 41 at the same time, as shown in FIG8 to FIG10 (curve W1 in FIG8 represents the extreme position state of the areas where the holes 41 are located when the diaphragm 4 vibrates and deforms in the first direction, while curve W2 represents the extreme position state of the areas where the holes 41 are located when the diaphragm 4 vibrates and deforms in the second direction opposite to the first direction). The effect achieved is that the effective working space of the chamber 5 between the actuator 10 and the diaphragm 4 is no longer mainly concentrated in the central area of ​​the diaphragm 4, but extends to a larger area than the central area, thereby improving the utilization rate of the vibration energy.

[0107] The vibration generated by the diaphragm 4 can also be a vibration of a higher-order resonance mode other than the centrally symmetrical vibration mode; for example, when the diaphragm 4 vibrates in the second-order resonance mode, there are two axially symmetrically distributed antinodes. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole 41 is only provided at one of the antinode positions A or the adjacent area, a higher output flow rate can be obtained. Of course, preferably, the hole 41 is provided at the two axially symmetrical antinode positions A or the adjacent area of ​​the antinode position A at the same time, as shown in Figures 11 and 12, where "+" indicates that the diaphragm 4 is convexly deformed in one direction, "-" indicates that the diaphragm 4 is convexly deformed in the other direction, and the "area circled by a long line and a double short line" is shown. Indicates the area where the antinode position A is located; when the diaphragm 4 vibrates in the fourth-order resonance mode, there are four antinodes distributed axially symmetrically. Similarly, at this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is only provided at one of the antinode positions A or the adjacent area, a higher output flow rate can be obtained. Preferably, the holes 41 are provided at the four antinode positions A or the adjacent areas distributed axially symmetrically, as shown in Figures 13 and 14. The effect that can be achieved is that the effective working space of the chamber 5 between the actuator 10 and the diaphragm 4 is no longer mainly concentrated in the central area of ​​the diaphragm 4, but is extended to a larger area than the central area, thereby improving the utilization rate of the vibration energy.

[0108] The actuator 10 generates vibration under external excitation and transmits the vibration energy to the diaphragm 4, thereby causing the diaphragm 4 to vibrate. The resonance mode of the coordinated vibration of the actuator 10 and the diaphragm 4 is related to the structural shape of the substrate 1, the structural shape of the diaphragm 4 and the connection method between the two; the above factors do not constitute a limitation on the scope of protection of the claims of the present invention. The substrate 1 can be but is not limited to circular, rectangular, polygonal or elliptical, etc., the shape of the diaphragm 4 can also be but is not limited to circular, rectangular, polygonal or elliptical, etc., and the spacer 3 connected between the substrate 1 and the diaphragm 4 can also be but is not limited to a circular ring structure, a rectangular ring structure, a polygonal ring structure or an elliptical ring structure, etc.

[0109] As far as the diaphragm 4 is concerned, the diaphragm 4 may be rectangular, and the short sides of the diaphragm 4 are fixedly connected to the substrate 1 through the spacers 3, while the long sides of the diaphragm 4 are not fixed:

[0110] When the diaphragm 4 vibrates in the second-order resonance mode, there are two antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is only provided at one of the antinode positions A or the area adjacent to the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are provided at both antinode positions A distributed along the long side or the area adjacent to the antinode position A, as shown in Figures 15 and 16.

[0111] When the diaphragm 4 vibrates in the third-order resonance mode, there are three antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole 41 is set at only one of the antinode positions A or the adjacent area of ​​the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole 41 is set at the three antinode positions A or the adjacent area of ​​the antinode position A distributed along the long side.

[0112] For another example, still only referring to the diaphragm 4, the diaphragm 4 is rectangular, and both the short side and the long side of the diaphragm 4 are fixedly connected to the substrate 1 through the spacer 3:

[0113] When the diaphragm 4 vibrates in the second-order resonance mode, there are two antinodes distributed along the long side. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole portion 41 is only provided at one of the antinode positions A of the diaphragm 4 or in the vicinity of the antinode position A, a higher output flow rate can be obtained. Of course, preferably, the hole portions 41 are provided at both antinode positions A distributed along the long side of the diaphragm 4 or in the vicinity of the antinode position A, as shown in Figures 17 and 18.

[0114] When the diaphragm 4 vibrates in a higher-order resonance mode, there is also a resonance mode with six antinodes as shown in Figures 19 and 20. At this time, since the vibration displacement of the diaphragm 4 is significantly increased compared with the prior art, even if the hole 41 is only set at one of the antinode positions A or the adjacent area of ​​the antinode position A, a higher output flow rate can be obtained. Of course, it is preferred to set the hole 41 at the six antinode positions A or the adjacent areas at the same time.

[0115] Diaphragm 4 can be made of a metal film, such as copper foil, titanium foil, or stainless steel foil. Preferably, diaphragm 4 is made of a polymer material, such as PET, PI, PPS, PEI, FEP, or other polymer films, or a composite material composed of a polymer and other metal materials, such as PI copper-clad laminate / film, PET copper-clad laminate / film, PET nickel-plated laminate / film, or carbon fiber metal composite laminate / film. Both polymer materials and composite materials of polymer and other materials exhibit light weight and high elastic strain limits compared to metal materials. The ultimate amplitude during resonance is typically much higher than that of metal materials, making them particularly suitable for applications with high flow output requirements, such as heat dissipation in smart 3C terminal products.

[0116] Example 2

[0117] As shown in Figure 21, the difference between Example 2 and Example 1 is that the spacer 3 has a plurality of spacers 31, and the spacers 31 are all bonded to the surface on the side where the second main surface 10-2 of the substrate 1 is located by bonding or integral molding. The spacer 31 is connected to the substrate 1 at one end close to the substrate 1, and the plurality of spacers 31 are spaced apart and distributed around the annular path to form a groove 3-1 with the actuator 10. The end of the spacer 31 facing away from the actuator 10 is fully or partially bonded to the diaphragm 4 on the annular path around the groove 3-1.

[0118] That is, the substrate 1, the diaphragm 4 and the spacer 3 form a chamber 5, and the spacer 3 forms the inner wall of the chamber 5. The inner wall of the chamber 5 can be closed and has no channel connected to the outside, and the spacer 3 is an annular structure; the inner wall of the chamber 5 can also be open, and the gaps between the multiple spacers 31 arranged at intervals form channels connected to the outside, and the channels connect the chamber 5.

[0119] Although, when the volume of the chamber 5 increases, external gas can enter the chamber 5 through the above-mentioned channel and flow toward the center of the chamber 5, when the volume of the chamber 5 decreases, the gas entering the chamber 5 from the above-mentioned channel reverses its flow direction before reaching the area opposite to and adjacent to the hole 41 in the chamber 5, and flows out of the chamber 5 along the original route. Therefore, it will not have a substantial impact on the suction and discharge of the gas from the hole 41, or the impact is very small, so the inner wall of the chamber 5 can be open.

[0120] Example 3

[0121] As shown in Figure 22, the difference between Example 3 and Example 1 or 2 is that the piezoelectric piece 2 is an annular structure with a cavity 2-1 running through the center, and the cavity 2-1 is arranged opposite to the chamber 5; the effect brought about by this is that the vibration displacement of the area where the actuator 10 is opposite to the cavity 2-1 of the piezoelectric piece 2 is much larger than the displacement at the periphery. At this time, if the effective vibration area of ​​the diaphragm 4 is also set to correspond to the cavity 2-1 of the piezoelectric piece 2, the diaphragm 4 can also produce a larger displacement after being excited. Thereby, the chamber 5 can obtain a larger volume change, which can further increase the output flow rate to meet application requirements.

[0122] Example 4

[0123] As shown in Figures 23 and 24, the difference between Example 4 and Example 1, 2 or 3 is that it further includes an adapter for fixedly connecting to the terminal product;

[0124] The adapter is connected to the area on the diaphragm 4 opposite to the spacer 3, the actuator 10 or the spacer 3 or elastically;

[0125] The adapter includes a frame portion 6 for fixed connection to the terminal product:

[0126] The frame portion 6 is provided with a plurality of elastic arms 61 with elasticity, and one end of the elastic arm 61 facing away from the frame portion 6 is fixedly connected to the actuator 10, the spacer 3 or the area on the diaphragm 4 relative to the spacer 3; thereby, the functional components consisting of the actuator 10, the spacer 3 and the diaphragm 4 are elastically supported on the frame portion 6 in a substantially unconstrained manner, and the elastic support does not hinder the vibration of the various components constituting the functional components; the frame portion 6 is fixedly connected to the terminal product equipped with the fluid generating device.

[0127] As shown in Figure 23, the actuator 10 can be supported on the frame 6 in a planar supporting manner. A central opening 62 is passed through the middle position of the frame 6. The actuator 10 is at least partially located in the central opening 62, which can reduce the overall thickness. One end of the elastic arm 61 is connected to the inner peripheral wall of the central opening 62, and the other end is fixedly connected to the outer peripheral wall of the actuator 10 or the outer peripheral wall of the partition 3 or the outer peripheral wall of the diaphragm 4.

[0128] As shown in Figure 24, the actuator 10 can also be supported on the frame 6 in a vertical supporting manner. A central opening 62 is provided in the middle of the frame 6, and at least the hole 41 of the diaphragm 4 is exposed at the central opening 62. The central opening 62 and the hole 41 are arranged opposite to each other. The actuator 10 is located above the central opening 62, and one end of the elastic arm 61 is closely connected to the frame 6, and the other end is connected to the end of the actuator 10 close to the frame 6.

[0129] Example 5

[0130] As shown in FIG25 , the difference between Example 5 and Example 1, 2 or 3 is that: it further includes an adapter for fixedly connecting to the terminal product;

[0131] The adapter is fixedly connected to the node position of the vibration of the actuator 10;

[0132] The adapter includes a retaining portion 7 for fixed connection with the terminal product;

[0133] The retaining portion 7 is engaged at the node position of the vibration of the actuator 10, and the retaining portion 7 is engaged at the side of the actuator 10 away from the diaphragm 4; when the piezoelectric sheet 2 is located on the side of the substrate 1 away from the spacer 3, the retaining portion 7 can be engaged at the node position of the vibration of the piezoelectric sheet 2, and the retaining portion 7 has one or two or more retaining portions 7 spaced apart, and the side of the retaining portion 7 away from the substrate 1 is fixedly connected to the terminal product equipped with the fluid generating device; this makes it convenient for customers to install the fluid generating device in a fixed form on the terminal product, which can improve the stability of the structure.

[0134] Example 6

[0135] As shown in Figures 26 and 27, the difference between Example 6 and Example 1, 2, or 3 is that the adapter includes a diaphragm extension portion 8, which includes a fixed portion 81 and an elastic suspension portion 82. The fixed portion 81 is used to be fixedly connected to the terminal product and surrounds the outer periphery of the diaphragm 4. One end of the suspension portion 82 is connected to the inner peripheral wall of the fixed portion 81, and the other end is connected to the outer peripheral wall of the diaphragm 4, so that the diaphragm 4 is elastically supported on the fixed portion 81 in the horizontal direction through the cantilever portion 92.

[0136] There are a plurality of hanging portions 82 , and an opening 83 is formed between two adjacent hanging portions 82 .

[0137] Preferably, the diaphragm extension portion 8 is integrally formed with the diaphragm 4; the fixing portion 81 is fixedly connected to the terminal product equipped with the fluid generating device, thereby facilitating the customer to elastically install the fluid generating device on the terminal product, thereby improving the compactness of the structure and reducing the thickness.

[0138] Example 7

[0139] As shown in Figures 28 to 29, the difference between Example 7 and Example 1, 2 or 3 is that the adapter includes a diaphragm support portion 9, which is arranged on the side of the diaphragm 4 facing away from the substrate 1. The diaphragm support portion 9 includes a fixed support portion 91 and a plurality of cantilever portions 92 arranged at intervals. The cantilever portions 92 can be distributed at intervals along the circumference of the chamber 5. The fixed support portion 91 is used for fixed connection with the terminal product and is located on the outside of the outer peripheral wall of the partition portion 3. One end of the cantilever portion 92 is connected to the fixed support portion 91, and the other end is connected to the area of ​​the diaphragm 4 facing away from the substrate 1 and opposite to the partition portion 3, so that the diaphragm 4 is elastically supported on the fixed support portion 91 in the vertical direction through the cantilever portion 92; the fixed support portion 91 is fixedly connected to the terminal product equipped with the fluid generating device, so that the customer can flexibly install the fluid generating device on the terminal product, which can improve the compactness of the structure and reduce the thickness.

[0140] The above description of the preferred embodiments of the present invention is intended to serve as a guide. Based on the above description, relevant personnel are fully capable of making various changes and modifications without departing from the technical scope of this invention. The technical scope of this invention is not limited to the contents of the specification and must be determined according to the scope of the claims.

Claims

1. A high-order resonant fluid generating device, characterized in that: include: A substrate (1) having at least one piezoelectric sheet (2) bonded to one or both surfaces in a thickness direction, the piezoelectric sheet (2) and the substrate (1) forming an actuator (10), the actuator (10) having a first main surface (10-1) and a second main surface (10-2) arranged opposite to each other in the thickness direction, the piezoelectric sheet (2) causing the actuator (10) to vibrate under the stimulation of an electrical signal; A spacer (3), the first main surface (10-1) or / and the second main surface (10-2) being joined with the spacer, the spacer (3) being connected to the actuator (10) at one end close to the actuator (10), and the spacer (3) and the actuator (10) forming a groove (3-1) having an opening at one end facing away from the actuator (10); and a diaphragm (4) fixedly connected to an end of the spacer (3) away from the actuator (10) and covering the opening of the groove (3-1), so that a chamber (5) is formed between the actuator (10), the groove (3-1) and the diaphragm (4), and a hole (41) communicating with the chamber (5) is penetrated in a region of the diaphragm (4) opposite to the chamber (5); When the actuator (10) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the diaphragm (4), thereby causing the diaphragm (4) to generate vibrations in a high-order resonance mode having at least two antinodes, and at least one hole portion (41) is formed at at least one antinode position (A) of the vibration of the diaphragm (4) or in an area adjacent to the antinode position (A).

2. The high-order resonant fluid generating device according to claim 1, characterized in that: At least one hole portion (41) is formed at at least two antinode positions (A) of the vibration of the diaphragm (4) or in the vicinity of the antinode position (A).

3. The high-order resonant fluid generating device according to claim 1, characterized in that: At least one hole portion (41) is formed at each antinode position (A) of the vibration of the diaphragm (4) or in the vicinity of the antinode position (A).

4. The high-order resonant fluid generating device according to claim 1, characterized in that: The spacer (3) is an annular structure, the inner peripheral wall of the spacer (3) and the actuator (10) enclose an annular groove (3-1), and the end of the spacer (3) away from the actuator (10) is fully or partially engaged with the diaphragm (4) on an annular path around the groove (3-1).

5. The high-order resonant fluid generating device according to claim 1, characterized in that: The spacer portion (3) has a plurality of spacers (31), each of which is joined to the first main surface (10-1) or the second main surface (10-2). The plurality of spacers (31) are spaced and distributed along an annular path around the chamber (5) to enclose the groove portion (3-1) with the actuator (10), and one end of the spacer (31) facing away from the actuator (10) is fully or partially joined to the diaphragm (4).

6. The high-order resonant fluid generating device according to claim 1, characterized in that: The piezoelectric sheet (2) is in the form of an annular structure with a cavity (2-1) running through the center, and the cavity (2-1) is arranged opposite to the chamber (5).

7. The high-order resonant fluid generating device according to claim 1, characterized in that: The diaphragm (4) is made of a polymer material, or a composite material consisting of a polymer material and a metal material.

8. The high-order resonant fluid generating device according to claim 1, characterized in that: The vibration of the high-order resonance mode generated by the diaphragm (4) is vibration of the second-order resonance mode, vibration of the third-order resonance mode, vibration of the fourth-order resonance mode, vibration of the fifth-order resonance mode, vibration of the sixth-order resonance mode, vibration of the seventh-order resonance mode, vibration of the eighth-order resonance mode or vibration of the ninth-order resonance mode.

9. The high-order resonant fluid generating device according to any one of claims 1 to 8, characterized in that: Also included is an adapter for fixed connection with a terminal product; The adapter is elastically connected to a region on the diaphragm (4) that is opposite to the spacer (3), the actuator (10) or the spacer (3); Alternatively, the adapter is fixedly connected to a node position of vibration of the actuator (10).

10. The high-order resonant fluid generating device according to claim 9, characterized in that: The adapter comprises a frame portion (6) for fixedly connecting to the terminal product: The frame portion (6) is provided with a plurality of elastic arms (61) having elasticity, and one end of the elastic arm (61) facing away from the frame portion (6) is fixedly connected to a region on the diaphragm (4) opposite to the spacer portion (3), the actuator (10) or the spacer portion (3).

11. The high-order resonant fluid generating device according to claim 10, characterized in that: A central opening (62) passes through the middle of the frame (6); The actuator (10) is at least partially located in the central opening (62); one end of the elastic arm (61) is connected to the inner peripheral wall of the central opening (62), and the other end is fixedly connected to the outer peripheral wall of the actuator (10) or the outer peripheral wall of the spacer (3).

12. The high-order resonant fluid generating device according to claim 10, characterized in that: A central opening (62) passes through the middle of the frame (6), and all the holes (41) are arranged opposite to the central opening (62); The actuator (10) is located above the central opening (62); one end of the elastic arm (61) is fixedly connected to the frame (6), and the other end is connected to an end of the actuator (10) close to the frame (6).

13. The high-order resonant fluid generating device according to claim 9, characterized in that: The adapter comprises a retaining portion (7) for fixedly connecting to the terminal product; The retaining portion (7) is engaged at a node position of vibration of the actuator (10), and the retaining portion (7) is engaged at a side of the actuator (10) facing away from the diaphragm (4); The retaining portion (7) comprises one or two or more retaining portions which are arranged at intervals.

14. The high-order resonant fluid generating device according to claim 9, characterized in that: The adapter includes a diaphragm extension portion (8), and the diaphragm extension portion (8) includes a fixed portion (81) and an elastic suspension portion (82), wherein the fixed portion (81) is used to be fixedly connected to the terminal product, and the fixed portion (81) surrounds the outer periphery of the diaphragm (4), one end of the suspension portion (82) is connected to the inner peripheral wall of the fixed portion (81), and the other end is connected to the outer peripheral wall of the diaphragm (4), so that the diaphragm (4) is elastically supported on the fixed portion (81) in the horizontal direction through the cantilever portion (92).

15. The high-order resonant fluid generating device according to claim 14, characterized in that: There are a plurality of suspension parts (82), and an opening part (83) is formed between two adjacent suspension parts (82).

16. The high-order resonant fluid generating device according to claim 14, characterized in that: The diaphragm extension portion (8) is integrally formed with the diaphragm (4).

17. The high-order resonant fluid generating device according to claim 9, characterized in that: The adapter comprises a diaphragm support portion (9), wherein the diaphragm support portion (9) is arranged on the side of the diaphragm (4) facing away from the substrate (1), and the diaphragm support portion (9) comprises a fixed support portion (91) and a plurality of cantilever portions (92) arranged at intervals, wherein the fixed support portion (91) is used for fixed connection with the terminal product and is located on the outer side of the outer peripheral wall of the spacer portion (3), one end of the cantilever portion (92) is connected to the fixed support portion (91), and the other end is connected to the area of ​​the diaphragm (4) facing away from the substrate (1) and opposite to the spacer portion (3), so that the diaphragm (4) is elastically supported on the fixed portion (81) in the horizontal direction through the cantilever portion (92).

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