A mode matching MEMS gyroscope temperature self-compensation control system and method

Abstract

The present invention relates to the technical field of MEMS gyroscopes, and in particular to a mode-matching MEMS gyroscope temperature self-compensation control system and method, the system comprising: a driving mode control subsystem for closed-loop control of the phase and amplitude of the MEMS gyroscope driving mode; a detection mode control subsystem for closed-loop control of the bandpass filter gain of the MEMS gyroscope detection mode, and matching the center frequency of the bandpass filter with the detection mode resonant frequency; wherein the driving mode control subsystem and the detection mode control subsystem are force-coupled via the Coriolis effect. The present invention adjusts the gain of the bandpass filter based on the real-time change of the detection mode quality factor, and matches the center frequency of the bandpass filter with the resonant frequency of the detection mode, thereby achieving the suppression and self-compensation of the gyroscope temperature drift.

Description

Technical Field

[0001] The present invention relates to the technical field of MEMS gyroscopes, and in particular to a mode matching MEMS gyroscope temperature self-compensation control system and method. Background Art

[0002] With the advancement of micro-electromechanical system (MEMS) technology, today's MEMS gyroscopes are widely used in consumer electronics, biomedicine, and unmanned driving due to their advantages such as small size, low energy consumption, easy integration, and high reliability. MEMS gyroscopes can measure angular velocity in real time and provide raw data for tracking and positioning of target platforms. Among high-precision gyroscopes, closed-loop force feedback control has attracted much attention from researchers due to its advantages such as large bandwidth and strong robustness. However, the resonant frequency and quality factor of MEMS gyroscopes will change with ambient temperature, and the lack of real-time compensation in the control system may cause significant drift in zero bias and scale factor, especially for mode-matched gyroscopes.

[0003] Although linear calibration and polynomial fitting are beneficial for suppressing the temperature drift of scale factor and zero bias, these post-calibration methods cannot fundamentally solve the problem. Phase compensation methods, such as modal offset and phase compensation phase-locked loop, can effectively suppress temperature drift, but cannot improve the stability of closed-loop control systems. In order to suppress temperature drift and enhance system robustness, in-situ dynamic adjustment based on Joule effect can be used to enhance the thermal stability of quality factor, but this operation will increase the complexity and noise of the system. In addition, previous force rebalancing control systems are mainly based on dual loops, namely orthogonal and in-phase control loops, which are relatively complex to implement. Therefore, designing a simple and easy-to-implement single-loop temperature self-compensation control system is the key to improving the thermal stability of MEMS gyroscopes.

[0004] Prior art 1: The Polytechnic University of Milan proposed a miniaturized gyroscope based on NEMS sensing. In terms of input reference rate, this method reduces the noise and temperature drift effects generated by the conversion of the rate into an electrical signal. In addition to achieving navigation-level performance in terms of noise (0.005° / hr) and zero bias instability (0.015° / hr), the gyroscope has an intrinsic drift of only 275μdps / K. After linear calibration, the zero bias is maintained within ±5mdps (5°C to 85°C), and the scale factor temperature drift is limited to ±1500ppm. High-precision gyroscopes often use modal matching technology, and experiments have shown that the modal matching voltage changes nonlinearly with temperature. Therefore, linear calibration may cause errors in the nonlinear region, affecting accuracy. The linear calibration method is usually calibrated based on a set of pre-measured data. If the temperature fluctuation exceeds the calibration range, the accuracy of the calibration result may be greatly reduced. In addition, linear calibration is generally statically calibrated at a specific temperature point, lacking the ability to dynamically respond to rapid temperature changes.

[0005] Prior art 2: In order to suppress temperature drift and enhance the robustness of the system, Peking University first used in-situ dynamic tuning based on the Joule effect to enhance the thermal stability of the MEMS gyroscope quality factor. By combining an active control loop, the drive voltage is monitored to adjust the dissipated energy of the resistor element connected to the mechanical structure, and the device damping is effectively adjusted in real time to stabilize the quality factor. The results show that within the temperature range of -40°C to +60°C, the relative change of the quality factor is significantly reduced by more than 3,000 times to -150ppm, and the zero-bias temperature drift is improved by more than 3 times. This technology requires the introduction of additional resistor elements and active control loops, which increases the complexity of the system. The tuning method based on the Joule effect relies on the energy dissipation of the resistor element, which will lead to an increase in the overall energy consumption of the system, especially in long-term operation or large temperature variation range. Over time, the resistor element may age due to long-term use, resulting in a weakening of the tuning effect, and the long-term stability and reliability of the system will be affected.

[0006] Therefore, in order to solve the above technical shortcomings, the present invention proposes a mode matching MEMS gyroscope temperature self-compensation control system and method. Summary of the invention

[0007] The purpose of the present invention is to provide a mode-matched MEMS gyroscope temperature self-compensation control system and method to address the above technical shortcomings, solve the temperature drift problem of the scale factor and zero bias, simplify the temperature compensation scheme and control loop, and reduce the difficulty of physical implementation.

[0008] To achieve the above object, the present invention provides the following solutions:

[0009] A mode-matching MEMS gyroscope temperature self-compensation control system comprises: a driving mode control subsystem and a detection mode control subsystem, wherein the driving mode control subsystem is used to perform closed-loop control on the phase and amplitude of the MEMS gyroscope driving mode, and the detection mode control subsystem is used to perform closed-loop control on the bandpass filter gain of the MEMS gyroscope detection mode, and to match the center frequency of the bandpass filter with the resonant frequency of the detection mode to achieve temperature self-compensation; wherein the driving mode control subsystem and the detection mode control subsystem are force-coupled through the Coriolis effect.

[0010] Optionally, the driving mode control subsystem includes a first DAC, a first voltage / force conversion module, a first capacitance / voltage conversion module, a first ADC, a minimum mean square demodulation module, an expandable fuzzy controller, and a first Cordic modulated sinusoidal signal generator connected in a loop.

[0011] Optionally, the detection mode control subsystem includes a second DAC, a second voltage / force conversion module, a second capacitance / voltage conversion module, a high-pass filter, a second ADC, a band-pass filter, and a second Cordic modulated sine signal generator, a multi-head minimum mean square demodulation module, and a low-pass filter connected in a loop, the band-pass filter is respectively connected to the second ADC and the multi-head minimum mean square demodulation module, and the multi-head minimum mean square demodulation module is respectively connected to the second Cordic modulated sine signal generator and the low-pass filter.

[0012] To further achieve the above object, the present invention also provides a mode matching MEMS gyroscope temperature self-compensation control method, comprising:

[0013] The real-time driving modal resonant frequency of the MEMS gyroscope is obtained through a driving closed loop;

[0014] Inputting the real-time driving modal resonant frequency into a preset nonlinear relationship model between the detection modal quality factor and the driving modal resonant frequency to obtain the real-time detection modal quality factor;

[0015] The bandpass filter gain in the detection mode control subsystem is compensated based on the real-time detection mode quality factor, and the detection mode resonant frequency is matched with the bandpass filter center frequency, thereby completing the temperature self-compensation control of the MEMS gyroscope.

[0016] Optionally, the nonlinear relationship model between the detection mode quality factor and the driving mode resonant frequency is constructed by respectively measuring the resonant frequency and quality factor curves of the dual modes with temperature using a temperature-controlled turntable, and then by linear fitting and least squares polynomial fitting, wherein the nonlinear relationship model between the detection mode quality factor and the driving mode resonant frequency is:

[0017]

[0018] In the formula, Q s To detect the modal quality factor in real time, f d is the driving mode resonant frequency, a i is the i-th polynomial coefficient, f d i is the i-th power of the driving modal resonant frequency, i=1,2,…,n.

[0019] Optionally, the transfer function and the sensitivity function of the detection mode control subsystem are combined in the process of compensating the bandpass filter gain in the detection mode control subsystem based on the real-time detection mode quality factor.

[0020] Optionally, the gain of the bandpass filter is:

[0021] k b=Q s0 / Q s

[0022] In the formula, k b is the gain of the bandpass filter, Q s0 is the detected modal quality factor at room temperature 20℃, Q s To detect the modal quality factor in real time;

[0023] The closed-loop transfer function and sensitivity function of the detection mode control subsystem are:

[0024]

[0025] Where T(s) is the closed-loop transfer function, D(s) is the open-loop transfer function, and S(s) is the sensitivity function.

[0026] Optionally, the open-loop transfer function of the detection mode control subsystem is:

[0027]

[0028] Where D(s) is the open-loop transfer function, F(s) and F b (s) are input force and feedback force respectively, k cv is the capacitance / voltage conversion coefficient, k vf is the voltage / force conversion coefficient, G s (s) is the detection modal transfer function, H(s) is the high-pass filter transfer function, B(s) is the band-pass filter transfer function, and s is a complex frequency domain variable.

[0029] Optionally, the detection mode transfer function in the detection mode control subsystem is:

[0030]

[0031] The high-pass filter transfer function in the detection mode control subsystem is:

[0032]

[0033] The transfer function of the bandpass filter in the detection mode control subsystem is:

[0034]

[0035] The low-pass filter transfer function in the detection mode control subsystem is:

[0036]

[0037] Where s is a complex frequency domain variable, m s 、c s and ks are the mass, damping force coefficient and elastic coefficient of the detected mode, G s (s) is the detection modal transfer function, H(s) is the high-pass filter transfer function, B(s) is the band-pass filter transfer function, L(s) is the low-pass filter transfer function, ω s is the natural angular frequency of the detection mode, Q s is the real-time detection modal quality factor, ω h is the high-pass filter cutoff frequency, ξ l and ω l is the damping ratio and cutoff frequency of the low-pass filter, k b ,ω b and Q b are the gain, center frequency and quality factor of the bandpass filter respectively.

[0038] The beneficial effects of the present invention are:

[0039] The present invention performs real-time compensation for the bandpass filter gain in the detection mode control subsystem by closed-loop controlling the driving mode resonant frequency, and matches the detection mode resonant frequency with the center frequency of the bandpass filter, thereby achieving temperature drift suppression and self-compensation, solving the temperature drift problem of the scale factor and the zero bias, simplifying the temperature compensation scheme and the control loop, and reducing the difficulty of physical implementation. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 A schematic diagram of the topological structure of a MEMS tuning fork mode matching gyroscope according to an embodiment of the present invention;

[0042] Figure 2 A diagram showing the composition of a detection and control circuit of a MEMS gyroscope according to an embodiment of the present invention;

[0043] Figure 3 It is a schematic diagram of the closed-loop control system structure of the MEMS gyroscope driving mode according to an embodiment of the present invention;

[0044] Figure 4 It is a schematic diagram of the closed-loop control system structure of the MEMS gyroscope detection mode according to an embodiment of the present invention;

[0045] Figure 5 is a curve diagram showing a linear change of the dual-mode resonant frequency with temperature according to an embodiment of the present invention;

[0046] Figure 6 is a linear variation curve of the quality factor of the dual mode according to an embodiment of the present invention with respect to temperature;

[0047] Figure 7 A curve diagram showing the change of phase margin with temperature with or without temperature self-compensation according to an embodiment of the present invention;

[0048] Figure 8 A curve diagram showing the change of gain margin with temperature with or without temperature self-compensation according to an embodiment of the present invention;

[0049] Fig. 9 A curve diagram showing changes in sensitivity margin with temperature with and without temperature self-compensation according to an embodiment of the present invention;

[0050] Fig.10 A bandwidth temperature drift variation curve diagram with and without temperature self-compensation according to an embodiment of the present invention;

[0051] Fig.11 A zero bias temperature drift variation curve diagram with and without temperature self-compensation according to an embodiment of the present invention;

[0052] Fig.12 The temperature drift variation curve of the scale factor with and without temperature self-compensation according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0053] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0054] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0055] The topology of the MEMS tuning fork mode matching gyroscope is as follows: Figure 1 As shown, the MEMS tuning fork mode matching gyroscope makes the resonant frequency of the driving mode equal to the resonant frequency of the detection mode by adjusting the electrostatic negative stiffness. Its detection and control circuit is a mixed digital-analog circuit. The analog circuit and the digital circuit are connected through DAC and ADC, as shown in Figure 2 shown.

[0056] The present embodiment provides a mode-matched MEMS gyroscope temperature self-compensation control system, comprising: a driving mode control subsystem and a detection mode control subsystem, wherein the driving mode control subsystem is used to perform closed-loop control on the phase and amplitude of the MEMS gyroscope driving mode, and the detection mode control subsystem is used to perform closed-loop control on the bandpass filter gain of the MEMS gyroscope detection mode, and to match the center frequency of the bandpass filter with the resonant frequency of the detection mode to achieve temperature self-compensation; wherein the driving mode control subsystem and the detection mode control subsystem are force-coupled via the Coriolis effect.

[0057] Specifically, the driving mode control subsystem in this embodiment is to achieve constant amplitude vibration of the driving mode, thereby generating a stable Coriolis force. The detection mode control subsystem is to achieve temperature compensation of zero bias and scale factor, thereby improving the accuracy and stability of detection. This embodiment performs real-time compensation for the bandpass filter gain in the detection mode control subsystem by closed-loop control of the driving mode resonant frequency, so that the detection mode resonant frequency matches the center frequency of the bandpass filter, achieves temperature drift suppression and self-compensation, solves the temperature drift problem of scale factor and zero bias, simplifies the temperature compensation scheme and control loop, and reduces the difficulty of physical implementation.

[0058] Furthermore, the structures of the driving mode control subsystem and the detection mode control subsystem are as follows:

[0059] The driving mode control subsystem includes a first DAC, a first voltage / force conversion module, a first capacitance / voltage conversion module, a first ADC, a minimum mean square demodulation module, an expandable fuzzy controller, and a first Cordic modulation sinusoidal signal generator connected in a loop.

[0060] The detection mode control subsystem includes a second DAC, a second voltage / force conversion module, a second capacitance / voltage conversion module, a high-pass filter, a second ADC, a band-pass filter, and a second Cordic modulated sine signal generator, a multi-head minimum mean square demodulation module, and a low-pass filter connected in a loop. The band-pass filter is respectively connected to the second ADC and the multi-head minimum mean square demodulation module, and the multi-head minimum mean square demodulation module is respectively connected to the second Cordic modulated sine signal generator and the low-pass filter.

[0061] Specifically, the closed-loop control systems of the driving mode and the detection mode in this embodiment are respectively as follows: Figure 3 and Figure 4 As shown, the closed-loop control system of the driving mode and the closed-loop control system of the detection mode both include an analog circuit and a digital circuit, and the analog circuit and the digital circuit are connected through a DAC and an ADC.

[0062] The closed-loop control system of the driving mode includes a DAC, a voltage / force conversion module, a capacitance / voltage conversion module, an ADC, a minimum mean square demodulation module, an expandable fuzzy controller, and a Cordic modulation sinusoidal signal generator that form a loop connection.

[0063] The closed-loop control system of the detection mode includes a DAC, a voltage / force conversion module, a capacitance / voltage conversion module, a high-pass filter, an ADC, a band-pass filter, a Cordic modulated sine signal generator and a multi-head minimum mean square demodulation module connected to the band-pass filter, and a low-pass filter connected after the multi-head minimum mean square demodulation module.

[0064] In this embodiment, the voltage / force conversion modules of the closed-loop control system of the driving mode and the closed-loop control system of the detection mode are both embedded with feedforward coupling compensation (FCC).

[0065] Figure 3 , Figure 4 In the equation, s is a complex frequency domain variable, V ac is the driving voltage amplitude, V p is the modal matching voltage, t is the time, ω d and ω s are the natural angular frequencies of the driving mode and the detection mode, Q d and Q s are the quality factors of the driving mode and the detection mode, respectively. cv is the capacitance / voltage conversion coefficient, k vf are voltage / force conversion coefficients, which are related to the sliding film drive and pressure film detection principles and circuit magnification. pc is the gain of the electric coupling compensation circuit, C p is the coupling capacitor, C pc is the compensation capacitor.

[0066] In this embodiment, the high-pass filter (HPF) is used to eliminate the low-frequency DC signal caused by the mismatch of the static capacitance of the detection comb teeth. The band-pass filter (BPF) in the Coriolis force frequency domain (f domain) is used as a closed-loop controller of the loop to filter out the force signal in the irrelevant frequency band, similar to the angular velocity frequency domain (f r domain) of the PI controller.

[0067] To further optimize the above technical solution, this embodiment also provides a mode matching MEMS gyroscope temperature self-compensation control method, including:

[0068] The real-time driving modal resonant frequency of the MEMS gyroscope is obtained through a driving closed loop;

[0069] The real-time driving modal resonant frequency is input into a preset nonlinear relationship model between the detection modal quality factor and the driving modal resonant frequency to obtain the real-time detection modal quality factor;

[0070] The bandpass filter gain in the detection mode control subsystem is compensated based on the real-time detection mode quality factor, and the detection mode resonant frequency is matched with the bandpass filter center frequency to complete the temperature self-compensation control of the MEMS gyroscope.

[0071] Furthermore, the nonlinear relationship model between the detection mode quality factor and the driving mode resonant frequency is constructed by using a temperature-controlled turntable to measure the resonant frequency and quality factor curves of the dual modes with temperature, and then by linear fitting and least squares polynomial fitting.

[0072] Furthermore, the transfer function and the sensitivity function of the detection mode control subsystem are combined in the process of compensating the bandpass filter gain in the detection mode control subsystem based on the real-time detection mode quality factor.

[0073] Specifically, this embodiment derives the open-loop and closed-loop transfer functions of the control system from the Coriolis force frequency domain. Figure 4 The gyro detection modal transfer function G in s The transfer functions of the first-order high-pass filter H(s), the second-order band-pass filter B(s), and the second-order low-pass filter L(s) are shown below:

[0074]

[0075]

[0076] Where s is a complex frequency domain variable. In the Coriolis force frequency domain, s = jω = j2πf, ω is the natural angular frequency, f is the natural frequency, and m s 、c s and k s are the mass, damping force coefficient and elastic coefficient of the detected mode, G s (s) is the detection modal transfer function, H(s) is the high-pass filter transfer function, B(s) is the band-pass filter transfer function, L(s) is the low-pass filter transfer function, ω s is the natural angular frequency of the detection mode, Q s is the real-time detection modal quality factor, ω h is the high-pass filter cutoff frequency, ξ l and ω l is the damping ratio and cutoff frequency of the low-pass filter, k b ,ω b and Q b are the gain, center frequency and quality factor of the bandpass filter, respectively, k b =Q s0 / Q s , Q s0is the detected modal quality factor at room temperature 20℃.

[0077] Define F(s) and F b (s) is the input force and feedback force, then the open-loop transfer function D(s) is:

[0078]

[0079] The closed-loop transfer function T(s) and sensitivity function S(s) can be obtained from the open-loop transfer function:

[0080]

[0081] Due to the mode matching, no phase shifter is used. At the same time, a feed-forward compensation circuit is used to suppress the electrical coupling. The amplitude and phase control of the driving mode is achieved by the least mean square (LMS) algorithm and a scalable fuzzy controller. For the sensing mode, narrow-band force rebalancing control is implemented by a simple BPF, and the complete force control can be achieved with only one loop.

[0082] First, the temperature-controlled turntable is used to measure the resonant frequency and quality factor of the dual modes with temperature. The linear relationship between the resonant frequency of the dual modes and temperature can be obtained through simple linear fitting. Then, based on the least squares polynomial fitting formula, the nonlinear relationship between the quality factor of the dual modes and temperature can be obtained. Similarly, the real-time detection modal quality factor Q s and the driving mode resonance frequency f d The nonlinear relationship is shown in (7).

[0083]

[0084] Among them, a i is the i-th polynomial coefficient, f d i is the i-th power of the driving modal resonant frequency, i = 1, 2, ..., n. To suppress temperature drift, the center frequency f of the BPF is b The resonant frequency f of the detection mode needs to be s Match, that is, f b =f s =f d Therefore, according to the driving mode resonant frequency f d Adjust the gain k of BPF in real time b , thus achieving f b With f s Match.

[0085] verify:

[0086] The gyro's various performance parameters are tested on a temperature-controlled turntable. Figure 5As shown in , after mode matching control, the resonant frequencies of the two modes are very close and change linearly with temperature. The relationship between them can be obtained by linear fitting. Figure 6 As shown in , the quality factor varies nonlinearly with temperature, and its relationship can be obtained by polynomial fitting. Figure 7 , 8 As shown in Figure 9, after the frequency response test of the gyroscope with and without self-compensation, the phase margin is between 40° and 70°, the gain margin is greater than 6dB, and the sensitivity margin is between 0dB and 6dB, so the control system is very stable. Fig.10 As shown in the figure, from -40℃ to 80℃, the bandwidth of the gyro without self-compensation and with self-compensation changes to 3.73Hz and 3.8Hz respectively, which are very close. The zero bias drift of the gyro with self-compensation function is reduced from 1320deg / h to 16deg / h, while the scale factor drift is reduced from 0.616mV / deg / s to 0.075mV / deg / s. The improvement effect is more than 80 times and 8 times respectively, as shown in the figure. Fig.11 and 12 shown.

[0087] This embodiment uses closed-loop control of the driving mode resonant frequency to compensate the bandpass filter gain in the detection mode control subsystem in real time, and matches the detection mode resonant frequency with the center frequency of the bandpass filter to achieve temperature drift suppression and self-compensation. Test results show that the temperature performance of key performance such as gyro zero bias and scale factor has been greatly improved.

[0088] The embodiments described above are only descriptions of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Without departing from the design spirit of the present invention, various modifications and improvements made to the technical solutions of the present invention by ordinary technicians in this field should all fall within the protection scope determined by the claims of the present invention.

Claims

1. A mode matching MEMS gyro temperature self-compensation control system, characterized in that: include: A driving mode control subsystem and a detection mode control subsystem, wherein the driving mode control subsystem is used to perform closed-loop control on the phase and amplitude of the MEMS gyroscope driving mode, and the detection mode control subsystem is used to perform real-time compensation for the bandpass filter gain in the MEMS gyroscope detection mode by controlling the resonance frequency of the driving mode in a closed loop, and to match the center frequency of the bandpass filter with the resonance frequency of the detection mode, so as to achieve temperature self-compensation; wherein the driving mode control subsystem and the detection mode control subsystem are force-coupled through the Coriolis effect; The driving mode control subsystem includes a first DAC, a first voltage / force conversion module, a first capacitance / voltage conversion module, a first ADC, a minimum mean square demodulation module, an expandable fuzzy controller, and a first Cordic modulation sine signal generator connected in a loop; The detection mode control subsystem includes a second DAC, a second voltage / force conversion module, a second capacitance / voltage conversion module, a high-pass filter, a second ADC, a band-pass filter, a second Cordic modulated sine signal generator, a multi-head minimum mean square demodulation module, and a low-pass filter connected in a loop. The band-pass filter is respectively connected to the second ADC and the multi-head minimum mean square demodulation module, and the multi-head minimum mean square demodulation module is respectively connected to the second Cordic modulated sine signal generator and the low-pass filter.

2. A method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope, the method being implemented based on the mode-matched MEMS gyroscope temperature self-compensation control system of claim 1, characterized in that: include: The real-time driving modal resonant frequency of the MEMS gyroscope is obtained through a driving closed loop; Inputting the real-time driving modal resonant frequency into a preset nonlinear relationship model between the detection modal quality factor and the driving modal resonant frequency to obtain the real-time detection modal quality factor; The bandpass filter gain in the detection mode control subsystem is compensated based on the real-time detection mode quality factor, and the bandpass filter center frequency is matched with the detection mode resonant frequency, thereby completing the temperature self-compensation control of the MEMS gyroscope.

3. The method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope according to claim 2, characterized in that: The nonlinear relationship model between the detection mode quality factor and the driving mode resonant frequency is constructed by using a temperature-controlled turntable to measure the resonant frequency and quality factor of the dual modes with temperature curves, and then by linear fitting and least squares polynomial fitting. The nonlinear relationship model between the detection mode quality factor and the driving mode resonant frequency is: In the formula, Q s To detect the modal quality factor in real time, f d is the driving mode resonant frequency, a i is the i-th polynomial coefficient, f d i is the i-th power of the driving modal resonant frequency, i=0,1,2,…,n.

4. The method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope according to claim 2, characterized in that: The transfer function and sensitivity function of the detection mode control subsystem are combined in the process of compensating the bandpass filter gain in the detection mode control subsystem based on the real-time detection mode quality factor.

5. The method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope according to claim 4, characterized in that: The gain of the bandpass filter is: k b =Q s0 / Q s In the formula, k b is the gain of the bandpass filter, Q s0 is the detected modal quality factor at room temperature 20℃, Q s To detect the modal quality factor in real time; The closed-loop transfer function and sensitivity function of the detection mode control subsystem are: Where T(s) is the closed-loop transfer function, D(s) is the open-loop transfer function, and S(s) is the sensitivity function.

6. The method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope according to claim 5, characterized in that: The open-loop transfer function of the detection mode control subsystem is: Where D(s) is the open-loop transfer function, F(s) and F b (s) are input force and feedback force respectively, k cv is the capacitance / voltage conversion coefficient, k vf is the voltage / force conversion coefficient, G s (s) is the detection modal transfer function, H(s) is the high-pass filter transfer function, B(s) is the band-pass filter transfer function, and s is a complex frequency domain variable.

7. The method for controlling the temperature self-compensation of a mode-matched MEMS gyroscope according to claim 6, characterized in that: The detection mode transfer function in the detection mode control subsystem is: The high-pass filter transfer function in the detection mode control subsystem is: The transfer function of the bandpass filter in the detection mode control subsystem is: The low-pass filter transfer function in the detection mode control subsystem is: Where s is a complex frequency domain variable, m s 、c s and k s are the mass, damping force coefficient and elastic coefficient of the detected mode, G s (s) is the detection modal transfer function, H(s) is the high-pass filter transfer function, B(s) is the band-pass filter transfer function, L(s) is the low-pass filter transfer function, ω s is the natural angular frequency of the detection mode, Q s is the real-time detection modal quality factor, ω h is the high-pass filter cutoff frequency, ξ l and ω l is the damping ratio and cutoff frequency of the low-pass filter, k b ,ω b and Q b are the gain, center frequency and quality factor of the bandpass filter respectively.

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