A multi-wavelength laser frequency doubling device and system

Abstract

The application relates to the technical field of OLED laser repair, in particular to a multi-wavelength laser frequency multiplication device and system, wherein the multi-wavelength laser frequency multiplication device comprises a first light path, a second light path, a third light path and a fourth light path; a first conversion assembly for selectively sending second-wavelength laser into the fourth light path is arranged between a first doubling frequency crystal and a third doubling frequency crystal; a second conversion assembly for selectively sending third-wavelength laser into the third light path is arranged after the third doubling frequency crystal; a third conversion assembly and a second doubling frequency crystal are arranged in sequence on the fourth light path. The multi-wavelength laser frequency multiplication device can solve the problem that the existing laser repair device for OLED panel repair is difficult to simultaneously repair multiple types of defects, thereby improving the repair efficiency.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of OLED laser repair, in particular to a multi-wavelength laser frequency multiplication device and system. BACKGROUND

[0002] The existing laser repair process for OLED panel repair generally generates laser to irradiate defects and repairs defects based on the ablation effect of laser on defects.

[0003] However, the device of the existing laser repair process for OLED panel repair can generally only generate single-wavelength laser to repair single defects on the OLED panel, and it is difficult to repair multiple types of defects at the same time, and the repair efficiency is low.

[0004] Therefore, the prior art needs to be improved and developed. SUMMARY

[0005] The purpose of the present application is to provide a multi-wavelength laser frequency multiplication device and system, aiming at solving the problem of low repair efficiency caused by the difficulty of the existing laser repair device for OLED panel repair in simultaneously repairing multiple types of defects.

[0006] In a first aspect, the present application provides a multi-wavelength laser frequency multiplication device for repairing defects on an OLED panel, comprising a first optical path, a second optical path, a third optical path and a fourth optical path.

[0007] A laser source, a first second-harmonic generation crystal and a third-harmonic generation crystal are sequentially arranged on the first optical path, and the laser source is used to emit first-wavelength laser;

[0008] A first conversion assembly for selectively sending second-wavelength laser into the fourth optical path is arranged between the first second-harmonic generation crystal and the third-harmonic generation crystal, and the wavelength of the second-wavelength laser is 1 / 2 of the wavelength of the first-wavelength laser;

[0009] A second conversion assembly for selectively sending third-wavelength laser into the third optical path is arranged after the third-harmonic generation crystal, and the wavelength of the third-wavelength laser is 1 / 3 of the wavelength of the first-wavelength laser;

[0010] A third conversion assembly and a second second-harmonic generation crystal are sequentially arranged on the fourth optical path, and the third conversion assembly is used to selectively send the second-wavelength laser into the second optical path.

[0011] The multi-wavelength laser frequency multiplication device provided by the present application can output one, two, three or four lasers with different wavelengths, so as to repair single defects suitable for specific wavelength laser, or simultaneously repair multiple defects suitable for different wavelength lasers, thereby improving the repair efficiency, and being highly targeted and flexible.

[0012] Optionally, the first conversion assembly comprises:

[0013] a first dichroic mirror, configured to transmit the first-wavelength laser and reflect the second-wavelength laser to send the second-wavelength laser into a fourth light path;

[0014] a first movement mechanism, connected with the first dichroic mirror, configured to drive the first dichroic mirror to move to enter or exit the first light path.

[0015] Optionally, the first conversion assembly further comprises:

[0016] a first mirror, connected with the first movement mechanism, configured to reflect the first-wavelength laser and the second-wavelength laser to send the first-wavelength laser and the second-wavelength laser into the fourth light path;

[0017] the first movement mechanism is further configured to drive the first mirror to move to enter or exit the first light path.

[0018] Optionally, the end of the first light path, the end of the second light path, and the end of the third light path are each provided with a second attenuator;

[0019] the second attenuator is configured to measure and adjust the power of the laser on the corresponding light path.

[0020] Optionally, the second attenuator comprises, in sequence, a half-wave plate, a polarization beam splitter, and a detection assembly;

[0021] the angle between the half-wave plate and the corresponding light path is adjustable;

[0022] the polarization beam splitter is configured to transmit and reflect the laser on the corresponding light path to the detection assembly;

[0023] the detection assembly is configured to measure the power of the laser on the corresponding light path;

[0024] the second attenuator further comprises a driving mechanism connected with the half-wave plate, the driving mechanism being configured to drive the half-wave plate to rotate to adjust the angle between the half-wave plate and the corresponding light path.

[0025] Optionally, the detection assembly comprises, in sequence, a beam-reducing mirror, a first filter, and a power meter.

[0026] Optionally, the detection assembly is further configured to measure the irradiation angle of the laser on the corresponding light path;

[0027] the detection assembly further comprises, in sequence, a first beam splitter, a fourth mirror, a first focusing mirror, a second filter, and a PSD sensor;

[0028] the first beam splitter is arranged between the polarization beam splitter and the beam-reducing mirror, and is configured to transmit and reflect the laser on the corresponding light path to the fourth mirror;

[0029] the fourth mirror is configured to reflect the laser on the corresponding light path to the first focusing mirror.

[0030] Optionally, a first attenuator is provided between the laser source and the first double frequency crystal;

[0031] The first attenuator is used to measure and adjust the power of the laser light of the first wavelength.

[0032] In a second aspect, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path, a second optical path, a third optical path, and a fourth optical path;

[0033] A laser source, a first double frequency crystal and a triple frequency crystal are sequentially arranged on the first optical path, and the laser source is used to emit a laser of a first wavelength;

[0034] A first dichroic mirror is provided between the first double-frequency crystal and the triple-frequency crystal for transmitting only the second wavelength laser light into the fourth optical path, wherein the wavelength of the second wavelength laser light is 1 / 2 of the wavelength of the first wavelength laser light;

[0035] A second dichroic mirror is provided after the frequency tripling crystal for sending only the third wavelength laser into the third optical path, wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser;

[0036] A second beam splitter, a second double frequency crystal and a third dichroic mirror are successively arranged on the fourth optical path. The second beam splitter is used to send the second wavelength laser into the second optical path. The third dichroic mirror is used to only transmit the fourth wavelength laser. The wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser.

[0037] The multi-wavelength laser frequency doubling device provided in the present application enables each optical path to output only one wavelength of laser light, and can simultaneously repair four defects that are respectively adapted to the four wavelengths of laser light based on four wavelengths of laser light, thereby improving the repair efficiency.

[0038] In a third aspect, the present application provides a multi-wavelength laser frequency doubling system for repairing defects on an OLED panel and for adjusting the power of a laser for repairing the defects, comprising a first optical path, a second optical path, a third optical path, and a fourth optical path;

[0039] A laser source, a first double frequency crystal and a triple frequency crystal are sequentially arranged on the first optical path, and the laser source is used to emit a laser of a first wavelength;

[0040] A first conversion component for selectively sending a second wavelength laser into a fourth optical path is provided between the first doubled frequency crystal and the tripled frequency crystal, wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser;

[0041] The second conversion assembly is arranged after the third harmonic crystal and is used for optionally sending the third wavelength laser into the third light path, and the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser;

[0042] The third conversion assembly and the second second-harmonic crystal are sequentially arranged on the fourth light path, and the third conversion assembly is used for optionally sending the second wavelength laser into the second light path;

[0043] The second attenuator is arranged at the end of the first light path, the end of the second light path and the end of the third light path, and the third attenuator is arranged between the third conversion assembly and the second second-harmonic crystal, and the second attenuator and the third attenuator are used for measuring and adjusting the power of the laser on the corresponding light path, and each includes a half-wave plate, a polarization beam splitter and a detection assembly arranged in sequence;

[0044] The angle between the half-wave plate and the corresponding light path is adjustable; the polarization beam splitter is used for transmitting and reflecting the laser on the corresponding light path to the detection assembly;

[0045] The detection assembly is used for measuring the power of the laser on the corresponding light path;

[0046] The second attenuator and the third attenuator each further include a driving mechanism connected with the half-wave plate, and the driving mechanism is used for driving the half-wave plate to rotate to adjust the angle between the half-wave plate and the corresponding light path;

[0047] The multi-wavelength laser frequency multiplication system further includes a controller, and the controller is used for measuring the power of the laser on the corresponding light path according to the detection assembly, and controlling the driving mechanism to drive the half-wave plate to rotate to adjust the angle between the half-wave plate and the corresponding light path according to the power of the laser on the corresponding light path, so as to adjust the power of the laser on the corresponding light path reflected by the polarization beam splitter to reach a target value.

[0048] The multi-wavelength laser frequency multiplication system provided by the application can output specific one, two, three or four lasers with different wavelengths, so that a single defect suitable for a specific wavelength laser can be repaired, or multiple defects suitable for different wavelength lasers can be repaired at the same time, the repair efficiency can be improved, the specificity is strong and the flexibility is high.

[0049] As can be seen from the above, the application provides a multi-wavelength laser frequency multiplication device and system, wherein the multi-wavelength laser frequency multiplication device provided by the application can output specific one, two, three or four lasers with different wavelengths, so that a single defect suitable for a specific wavelength laser can be repaired, or multiple defects suitable for different wavelength lasers can be repaired at the same time, the repair efficiency can be improved, the specificity is strong and the flexibility is high.

[0050] Other features and advantages of the present application will be set forth in the description that follows, and in part will be apparent from the description, or can be learned by practice of the application. The purposes and other advantages of the present application will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings. BRIEF DESCRIPTION OF DRAWINGS

[0051] Figure 1 A structure schematic view of a multi-wavelength laser frequency multiplication device provided by an embodiment of the present application.

[0052] Figure 2 A path schematic view of a first optical path provided by an embodiment of the present application.

[0053] Figure 3 A path schematic view of a third optical path and a fourth optical path provided by an embodiment of the present application.

[0054] Figure 4 A path schematic view of a second optical path provided by an embodiment of the present application.

[0055] Figure 5 A structure schematic view of a first conversion assembly provided by an embodiment of the present application.

[0056] Figure 6 A structure schematic view of a second conversion assembly provided by an embodiment of the present application.

[0057] Figure 7 A structure schematic view of a third conversion assembly provided by an embodiment of the present application.

[0058] Figure 8 A structure schematic view of a second attenuator provided by an embodiment of the present application.

[0059] Figure 9 A structure schematic view of a detection assembly provided by an embodiment of the present application.

[0060] Figure 10 A structure schematic view of another multi-wavelength laser frequency multiplication device provided by an embodiment of the present application.

[0061] Figure 11 A structure schematic view of a multi-wavelength laser frequency multiplication device in one case provided by an embodiment of the present application.

[0062] Figure 12 A structure schematic view of a multi-wavelength laser frequency multiplication device in another case provided by an embodiment of the present application.

[0063] Figure 13 An electric control block diagram of a multi-wavelength laser frequency multiplication system provided by an embodiment of the present application.

[0064] Label description: 1, second attenuator; 2, first attenuator; 3, output window; 4, fast mirror pair; 5, fifth mirror; 6, second focusing mirror; 7, collimating mirror; 8, shutter; 9, third attenuator; 10, input window; 11, laser source; 12, first frequency doubling crystal; 13, third harmonic crystal; 14, first conversion assembly; 141, first dichroic mirror; 142, first motion mechanism; 143, first mirror; 15, second conversion assembly; 151, second dichroic mirror; 152, second motion mechanism; 153, second mirror; 41, third conversion assembly; 411, second beam splitter; 412, third motion mechanism; 413, third mirror; 42, second frequency doubling crystal; 43, third dichroic mirror; 101, half-wave plate; 102, polarizing beam splitter; 103, detection assembly; 1031, beam-reducing mirror; 1032, first filter; 1033, optical power meter; 1034, first beam splitter; 1035, fourth mirror; 1036, first focusing mirror; 1037, second filter; 1038, PSD sensor; 104, driving mechanism; 100, first optical path; 200, second optical path; 300, third optical path; 400, fourth optical path. DETAILED DESCRIPTION

[0065] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all embodiments. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present application.

[0066] It should be noted that: similar labels and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of the present application, the terms "first", "second" and the like are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0067] In a first aspect, as shown in Figure 1 , Figure 2 , Figure 3 and Figure 4 indicate, the present application provides a multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, comprising a first optical path 100, a second optical path 200, a third optical path 300 and a fourth optical path 400.

[0068] The first light path 100 is sequentially provided with a laser source 11, a first doubling crystal 12 and a third doubling crystal 13, and the laser source 11 is configured to emit first wavelength laser;

[0069] The first doubling crystal 12 and the third doubling crystal 13 are provided with a first conversion assembly 14 for selectively sending second wavelength laser into the fourth light path 400, and the second wavelength laser has a wavelength of 1 / 2 of the first wavelength laser.

[0070] The third doubling crystal 13 is provided with a second conversion assembly 15 for selectively sending third wavelength laser into the third light path 300, and the third wavelength laser has a wavelength of 1 / 3 of the first wavelength laser.

[0071] The fourth light path 400 is sequentially provided with a third conversion assembly 41 and a second doubling crystal 42, and the third conversion assembly 41 is configured to selectively send the second wavelength laser into the second light path 200.

[0072] Specifically, in the light path of the present application, “first” refers to the order of the device on the light path being irradiated by the laser along the light path, and “second” refers to the order of the device on the light path being irradiated by the laser along the light path.

[0073] More specifically, the first wavelength laser input into the first doubling crystal 12 will produce a nonlinear optical effect to generate second wavelength laser, and at the same time, the first doubling crystal 12 will transmit part of the first wavelength laser, so after the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first doubling crystal 12, and the first doubling crystal 12 simultaneously outputs the first wavelength laser and the second wavelength laser to the first conversion assembly 14.

[0074] More specifically, the first wavelength laser input into the third doubling crystal 13 will produce a nonlinear optical effect to generate third wavelength laser, and at the same time, the third doubling crystal 13 will transmit part of the first wavelength laser, so after the first wavelength laser passes through the first conversion assembly 14, the first wavelength laser passes through the third doubling crystal 13, and the third doubling crystal 13 simultaneously outputs the first wavelength laser and the third wavelength laser to the second conversion assembly 15.

[0075] More specifically, the second wavelength laser input into the second doubling crystal 42 will produce a nonlinear optical effect to generate fourth wavelength laser, and at the same time, the second doubling crystal 42 will transmit part of the second wavelength laser, so when the second wavelength laser irradiates the second doubling crystal 42, the second doubling crystal 42 simultaneously outputs the second wavelength laser and the fourth wavelength laser, and the fourth wavelength laser has a wavelength of 1 / 4 of the first wavelength laser.

[0076] More specifically, in the present application, the first conversion component 14 can optionally transmit the second wavelength laser light into the fourth optical path 400. In the case where the first conversion component 14 transmits the second wavelength laser light into the fourth optical path 400, there are two implementations: the first conversion component 14 transmits both the first wavelength laser light and the second wavelength laser light into the fourth optical path 400; and the first conversion component 14 transmits the first wavelength laser light and transmits the second wavelength laser light into the fourth optical path 400. The implementation in which the first conversion component 14 transmits both the first wavelength laser light and the second wavelength laser light into the fourth optical path 400 can be implemented based on a reflective mirror included in the first conversion component 14, and the implementation in which the first conversion component 14 transmits the first wavelength laser light and transmits the second wavelength laser light into the fourth optical path 400 can be implemented based on a dichroic mirror included in the first conversion component 14. Similarly, for the case where the second conversion component 15 sends the third wavelength laser into the third optical path 300, there are two implementation modes: the second conversion component 15 sends both the first wavelength laser and the third wavelength laser into the third optical path 300, and the second conversion component 15 transmits the first wavelength laser and sends the third wavelength laser into the third optical path 300.

[0077] More specifically, when the first conversion component 14 only sends the second wavelength laser into the fourth optical path 400, for the case where the third conversion component 41 sends the second wavelength laser into the second optical path 200, there are two implementation methods: the third conversion component 41 sends the second wavelength laser into the second optical path 200, and the third conversion component 41 allows the second wavelength laser to be irradiated along the fourth optical path 400 while sending the second wavelength laser into the second optical path 200; when the first conversion component 14 sends the first wavelength laser and the second wavelength laser into the fourth optical path 400 together, for the case where the third conversion component 41 sends the second wavelength laser into the second optical path 200, there are two implementation methods: the third conversion component 41 sends the first wavelength laser and the second wavelength laser into the second optical path 200 together, and the third conversion component 41 allows the first wavelength laser and the second wavelength laser to be irradiated along the fourth optical path 400 while sending the first wavelength laser and the second wavelength laser into the second optical path 200 together.

[0078] like Figure 1 As shown, more specifically, in an embodiment in which the first conversion component 14 only sends the second wavelength laser light into the fourth optical path 400, the second conversion component 15 only sends the third wavelength laser light into the third optical path 300, and the third conversion component 41 simultaneously sends the second wavelength laser light into the second optical path 200 while irradiating the second wavelength laser light along the fourth optical path 400:

[0079] After the laser source 11 emits a laser beam of the first wavelength, the laser beam of the first wavelength passes through the first double-frequency crystal 12, which generates a laser beam of the second wavelength. The laser beam of the first wavelength and the laser beam of the second wavelength are irradiated toward the first conversion component 14 together. The first conversion component 14 sends the laser beam of the second wavelength into the fourth optical path 400. The laser beam of the first wavelength passes through the first conversion component 14 and passes through the triple-frequency crystal 13. The triple-frequency crystal 13 generates a laser beam of the third wavelength. The laser beam of the first wavelength and the laser beam of the third wavelength are irradiated toward the second conversion component 15 together. The second conversion component 15 sends the laser beam of the third wavelength into the third optical path 300. The laser beam of the first wavelength passes through the second conversion component 15 and is output along the first optical path 100.

[0080] The second wavelength laser light entering the fourth optical path 400 is sent into the second optical path 200 by the third conversion component 41 and output along the second optical path 200;

[0081] The third wavelength laser light sent into the third optical path 300 is output along the third optical path 300;

[0082] The second wavelength laser irradiated along the fourth optical path 400 by the third conversion component 41 passes through the second doubled frequency crystal 42 , and the second doubled frequency crystal 42 generates a fourth wavelength laser. The fourth wavelength laser and the second wavelength laser are output along the fourth optical path 400 together.

[0083] In this embodiment, it is only necessary to set an optical device such as a dichroic mirror after the second doubled frequency crystal 42 to only allow the fourth wavelength laser to continue to irradiate along the fourth optical path 400, so that the first wavelength laser, the second wavelength laser, the third wavelength laser and the fourth wavelength laser can be output along the first optical path 100, the second optical path 200, the third optical path 300 and the fourth optical path 400 respectively. Therefore, the present application can simultaneously repair the defect types that are suitable for the four wavelengths of laser light, thereby improving the repair efficiency.

[0084] like Figure 11 As shown, more specifically, in an embodiment in which the first conversion component 14 only sends the second wavelength laser light into the fourth optical path 400, the second conversion component 15 sends both the first wavelength laser light and the third wavelength laser light into the third optical path 300, and the third conversion component 41 does not send the second wavelength laser light into the second optical path 200:

[0085] After the laser source 11 emits the first wavelength laser, the first wavelength laser passes through the first doubling frequency crystal 12, the first doubling frequency crystal 12 generates the second wavelength laser, the first wavelength laser and the second wavelength laser jointly irradiate the first conversion assembly 14, the first conversion assembly 14 sends the second wavelength laser into the fourth optical path 400, the first wavelength laser passes through the first conversion assembly 14 and passes through the third doubling frequency crystal 13, the third doubling frequency crystal 13 generates the third wavelength laser, the first wavelength laser and the third wavelength laser jointly irradiate the second conversion assembly 15, the second conversion assembly 15 sends the first wavelength laser and the third wavelength laser into the third optical path 300;

[0086] The first wavelength laser and the third wavelength laser sent into the third optical path 300 are all output along the third optical path 300;

[0087] The second wavelength laser entering the fourth optical path 400 passes through the second doubling frequency crystal 42, the second doubling frequency crystal 42 generates the fourth wavelength laser, and the fourth wavelength laser and the second wavelength laser jointly output along the fourth optical path 400.

[0088] In the embodiment, only the optical device such as a dichroic mirror that allows only the third wavelength laser to continue to irradiate along the third optical path 300 is arranged after the second conversion assembly 15 in the third optical path 300, and the optical device such as a dichroic mirror that allows only the fourth wavelength laser to continue to irradiate along the fourth optical path 400 is arranged after the second doubling frequency crystal 42, so that the third wavelength laser and the fourth wavelength laser are output along the third optical path 300 and the fourth optical path 400 respectively, and therefore the application can simultaneously repair defects suitable for the two kinds of wavelengths according to needs, thereby improving the repair efficiency.

[0089] In addition, there are other embodiments in which the types of lasers sent into the corresponding optical paths by the first conversion assembly 14, the second conversion assembly 15 and the third conversion assembly 41 are different from the above embodiments, and the optical paths along which the lasers of various wavelengths irradiate are also different, which will not be described here.

[0090] As can be seen from the above embodiments, the application only needs to reasonably arrange the first conversion assembly 14, the second conversion assembly 15 and the third conversion assembly 41 to send lasers with specific wavelengths into corresponding optical paths, and make the specific wavelength lasers continue to irradiate along the original optical path, and arrange optical devices that allow only specific wavelength lasers to pass in the specific optical path, so as to output one, two, three or four lasers with different wavelengths as needed, thereby being able to repair a single defect suitable for a specific wavelength laser, or simultaneously repair multiple defects suitable for lasers of different wavelengths, thereby improving the repair efficiency, being highly targeted and flexible.

[0091] The multi-wavelength laser frequency doubling device provided by the application can output specific one, two, three or four lasers with different wavelengths, so as to repair a single defect suitable for a specific wavelength laser or simultaneously repair multiple defects suitable for different wavelength lasers, improve the repair efficiency, and be highly targeted and flexible.

[0092] Preferably, the multi-wavelength laser frequency doubling device further comprises an optical path adjusting structure for configuring the optical paths, and the optical path adjusting structure comprises:

[0093] three second focusing mirrors 6 respectively arranged before the first-second frequency doubling crystal 12, before the second frequency doubling crystal 42 and before the third frequency doubling crystal 13;

[0094] three collimating mirrors 7 respectively arranged after the first-second frequency doubling crystal 12, after the second frequency doubling crystal 42 and after the third frequency doubling crystal 13;

[0095] The second focusing mirror 6 and the collimating mirror 7 are used for making the laser on the corresponding optical path output in parallel.

[0096] More preferably, the optical path adjusting structure further comprises:

[0097] two fifth mirrors 5 respectively arranged between the third conversion assembly 41 and the second frequency doubling crystal 42 and after the second conversion assembly 15 on the third optical path 300, and used for making the laser on the corresponding optical path output in parallel.

[0098] More preferably, the optical path adjusting structure further comprises:

[0099] four fast mirror pairs 4 respectively arranged after the second conversion assembly 15 on the first optical path 100, after the third conversion assembly 41 on the second optical path 200, after the fifth mirror 5 on the third optical path 300 and after the second frequency doubling crystal 42, and used for adjusting the distance between the lasers on the optical paths.

[0100] Preferably, an input window 10 is arranged between the laser source 11 and the first-second frequency doubling crystal 12, and used for making the first wavelength laser pass through and output the first wavelength laser to the first-second frequency doubling crystal 12.

[0101] As shown in the figure, in some preferred embodiments, the first conversion assembly 14 comprises: Figure 5

[0102] a first dichroic mirror 141 used for transmitting the first wavelength laser and reflecting the second wavelength laser to send it into the fourth optical path 400;

[0103] a first motion mechanism 142 connected with the first dichroic mirror 141 and used for driving the first dichroic mirror 141 to move to enter or exit the first optical path 100. ​

[0104] Specifically, the dichroic mirror is an optical device having a transmission effect on one wavelength of laser and a reflection effect on another wavelength of laser. In the present application, the first dichroic mirror 141 can transmit the first wavelength laser and reflect the second wavelength laser. Therefore, the first movement mechanism 142 drives the first dichroic mirror 141 to enter the first optical path 100, which corresponds to the embodiment that the first conversion assembly 14 transmits the first wavelength laser and sends the second wavelength laser into the fourth optical path 400. In this embodiment, the first conversion assembly 14 can cooperate with other conversion assemblies and crystals to realize that each wavelength laser is output along each optical path, respectively. The first movement mechanism 142 drives the first dichroic mirror 141 to be separated from the first optical path 100, which corresponds to the embodiment that the first conversion assembly 14 allows the first wavelength laser and the second wavelength laser to continue to irradiate along the first optical path 100. In this embodiment, the first conversion assembly 14 can not output laser along the second optical path 200 and the fourth optical path 400 without repairing the defects adapted to the second wavelength laser and the fourth wavelength laser, thereby avoiding the waste of laser energy.

[0105] In this embodiment, the multi-wavelength laser frequency doubling device of the present application can cooperate with other conversion assemblies and crystals to realize that each wavelength laser is output along each optical path, respectively, and can not output laser along the second optical path 200 and the fourth optical path 400 without repairing the defects adapted to the second wavelength laser and the fourth wavelength laser, thereby avoiding the waste of laser energy.

[0106] In some preferred embodiments, the first conversion assembly 14 further comprises:

[0107] The first mirror 143 is connected with the first movement mechanism 142 and is used for reflecting the first wavelength laser and the second wavelength laser to send them into the fourth optical path 400.

[0108] The first movement mechanism 142 is further used for driving the first mirror 143 to move to enter or be separated from the first optical path 100.

[0109] Specifically, the first mirror 143 can reflect the first wavelength laser and the second wavelength laser, thus the embodiment of the first movement mechanism 142 driving the first mirror 143 to move to enter the first light path 100 corresponds to the embodiment of the first conversion assembly 14 sending the first wavelength laser and the second wavelength laser into the fourth light path 400 together, in which the first conversion assembly 14 can not generate the laser output along the first light path 100 and the third light path 300 without repairing the defects adapted to the first wavelength laser and the third wavelength laser, thereby avoiding the waste of laser energy; the embodiment of the first movement mechanism 142 driving the first mirror 143 to move to exit the first light path 100 corresponds to the embodiment of the first conversion assembly 14 allowing the first wavelength laser and the second wavelength laser to continue to irradiate along the first light path 100, in which the first conversion assembly 14 can not generate the laser output along the second light path 200 and the fourth light path 400 without repairing the defects adapted to the second wavelength laser and the fourth wavelength laser, thereby avoiding the waste of laser energy.

[0110] In this embodiment, the multi-wavelength laser frequency doubling device of the present application can not generate the laser output along the light path corresponding to the specific type of defects without repairing the defects of the specific type, thereby avoiding the waste of laser energy.

[0111] As shown in Figure 6 , preferably, the second conversion assembly 15 comprises:

[0112] the second dichroic mirror 151 is used for transmitting the first wavelength laser and reflecting the third wavelength laser to send it into the third light path 300;

[0113] the second movement mechanism 152 is connected with the second dichroic mirror 151 and is used for driving the second dichroic mirror 151 to move to enter or exit the first light path 100.

[0114] More preferably, the first conversion assembly 14 further comprises:

[0115] the second mirror 153 is connected with the second movement mechanism 152 and is used for reflecting the first wavelength laser and the third wavelength laser to send it into the third light path 300;

[0116] the second movement mechanism 152 is further used for driving the second mirror 153 to move to enter or exit the first light path 100.

[0117] As shown in Figure 7 , preferably, the third conversion assembly 41 comprises:

[0118] the second beam splitter 411 is used for transmitting the second wavelength laser and reflecting the second wavelength laser to send it into the second light path 200;

[0119] The third motion mechanism 412 is connected to the second beam splitter 411 , and is used to drive the second beam splitter 411 to move so as to enter or exit the fourth optical path 400 .

[0120] More preferably, the third conversion component 41 further includes:

[0121] A third reflector 413 is connected to the third motion mechanism 412 and is used to reflect the second wavelength laser light to send it into the second optical path 200;

[0122] The third motion mechanism 412 is further configured to drive the third reflective mirror 413 to move so as to enter or exit the fourth optical path 400 .

[0123] like Figure 12 As shown, in an embodiment in which the first motion mechanism 142 only drives the first reflector 143 to move so as to make it enter the first optical path 100, and the third motion mechanism 412 drives the second beam splitter 411 and the third reflector 413 to move so as to make them leave the fourth optical path 400:

[0124] After the laser source 11 emits a first wavelength laser, the first wavelength laser passes through the first doubled frequency crystal 12, and the first doubled frequency crystal 12 generates a second wavelength laser. The first wavelength laser and the second wavelength laser are irradiated toward the first conversion component 14 together. The first conversion component 14 sends both the first wavelength laser and the second wavelength laser into the fourth optical path 400. The first wavelength laser and the second wavelength laser that enter the fourth optical path 400 pass through the second doubled frequency crystal 42, and the second doubled frequency crystal 42 generates a second wavelength laser and a fourth wavelength laser. The first wavelength laser, the second wavelength laser, and the fourth wavelength laser are output together along the fourth optical path 400.

[0125] In this embodiment, it is only necessary to set an optical device such as a dichroic mirror after the second doubled frequency crystal 42 that only allows the fourth wavelength laser to continue to irradiate along the fourth optical path 400, so that the fourth wavelength laser can be output along the fourth optical path 400. Therefore, the present application can output only one wavelength of laser when only one type of defect needs to be output, thereby performing targeted repairs and avoiding waste of laser energy.

[0126] In other embodiments where the first conversion assembly 14, the second conversion assembly 15, and the third conversion assembly 41 feed different optical devices into corresponding optical paths, the number and type of laser light output by the multi-wavelength laser frequency doubling device of the present application will also be different, which will not be described in detail here. Therefore, based on the first motion mechanism 142, the second motion mechanism 152, and the third motion mechanism 412, the present application can reasonably feed the corresponding optical devices into the corresponding optical paths as needed, so that each optical path can output or not output laser light of the corresponding wavelength as needed, thereby being able to repair one or more defects that are suitable for different types of laser light.

[0127] In some preferred embodiments, the first light path 100, the second light path 200 and the third light path 300 are all provided with a second attenuator 1;

[0128] The second attenuator 1 is used for measuring and adjusting the power of the laser on the corresponding light path.

[0129] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a second attenuator 1 on each light path, which can detect and adjust the laser power of each light path, so as to realize the closed-loop control of the laser power output by each light path.

[0130] Preferably, a third attenuator 9 is arranged between the third conversion assembly 41 and the second doubling crystal 42;

[0131] The third attenuator 9 is used for measuring and adjusting the power of the laser on the fourth light path 400.

[0132] In this embodiment, the multi-wavelength laser frequency doubling device of the present application is provided with a third attenuator 9 on the fourth light path 400, which can detect and adjust the laser power of the fourth light path 400, so as to realize the closed-loop control of the laser power output by the fourth light path 400; and since the fourth wavelength laser output by the fourth light path 400 generally has a shorter wavelength, and the optical device used for adjusting the power of the laser with a shorter wavelength has a higher cost, in this embodiment, the present application is provided with a third attenuator 9 between the third conversion assembly 41 and the second doubling crystal 42, which can measure and adjust the laser power of the fourth light path 400 before the second doubling crystal 42 generates the fourth wavelength laser with a shorter wavelength, so as to save the cost.

[0133] As shown in FIG. 1, in some preferred embodiments, the second attenuator 1 comprises a half-wave plate 101, a polarization splitting plate 102 and a detection assembly 103 arranged in sequence; Figure 8

[0134] The angle between the half-wave plate 101 and the corresponding light path is adjustable; the polarization splitting plate 102 is used for transmitting and reflecting the laser irradiated along the corresponding light path to the detection assembly 103;

[0135] The detection assembly 103 is used for measuring the power of the laser on the corresponding light path;

[0136] The second attenuator 1 further comprises a driving mechanism 104 connected with the half-wave plate 101, which is used for driving the half-wave plate 101 to rotate to adjust the angle between the half-wave plate 101 and the corresponding light path.

[0137] ​Specifically, the polarization beam splitter 102 can convert the laser on the light path where the polarization beam splitter 102 is located into two mutually perpendicular polarized lights based on transmission and reflection, so that the polarization beam splitter 102 can reflect the laser on the light path where the polarization beam splitter 102 is located to the detection assembly 103, so that the detection assembly 103 can detect the power of the polarized light converted by the laser, and the power of the laser on the light path where the second attenuator 1 is located can be calculated from the power of the polarized light converted by the laser, so that the application can detect the power of the laser on the light path where the second attenuator 1 is located based on the detection assembly 103.

[0138] More specifically, when the half-wave plate 101 and the polarization beam splitter 102 are arranged on the light path together, the polarization direction of the laser transmitted by the half-wave plate 101 can be changed by only rotating the half-wave plate 101 to change the angle between the half-wave plate 101 and the light path where the half-wave plate 101 is located, so that the proportion of the polarized light transmitted by the polarization beam splitter 102 changes, thereby the power of the laser transmitted by the polarization beam splitter 102 can be adjusted, and thus the power of the laser on the corresponding light path can be adjusted by arranging the half-wave plate 101 and the polarization beam splitter 102.

[0139] More specifically, the detection assembly 103 can detect the power of the laser reflected by the polarization beam splitter 102, so that the application can calculate the power of the laser transmitted by the polarization beam splitter 102, i.e. the power of the laser output by the second attenuator 1, according to the power of the laser detected by the detection assembly 103 and the angle between the polarization beam splitter 102 and the light path where the polarization beam splitter 102 is located, and the power of the laser output by the second attenuator 1 is positively correlated with the power of the laser on the light path where the second attenuator 1 is located, so that the application can only control the driving mechanism 104 to drive the half-wave plate 101 to rotate to adjust the angle between the half-wave plate 101 and the light path where the half-wave plate 101 is located according to the power of the laser on the light path where the second attenuator 1 is located, so as to adjust the power of the laser output by the second attenuator 1, thereby adjusting the power of the laser on the light path where the second attenuator 1 is located, thereby realizing closed-loop control of the power of the laser output on the light path where the second attenuator 1 is located.

[0140] In this embodiment, the multi-wavelength laser frequency doubling device of the application is provided with the half-wave plate 101, the polarization beam splitter 102 and the detection assembly 103, so as to realize closed-loop control of the power of the laser on the light path where the second attenuator 1 is located, thereby improving the power adjustment precision of the laser on each light path.

[0141] Preferably, the fourth light path 400 is sequentially provided with the third dichroic mirror 43 and the detection assembly 103 at the end of the fourth light path 400;

[0142] The third dichroic mirror 43 is used for transmitting the fourth wavelength laser and reflecting the second wavelength laser to the detection assembly.

[0143] In this embodiment, the multi-wavelength laser frequency doubling device of the application is provided with a third dichroic mirror 43, which can realize detection of the second-wavelength laser power and can realize that the fourth light path 400 only outputs the fourth-wavelength laser.

[0144] As shown in the figure, in some preferred embodiments, the detection assembly 103 comprises a beam-reducing mirror 1031, a first filter 1032 and an optical power meter 1033 arranged in sequence. Figure 9

[0145] In this embodiment, the multi-wavelength laser frequency doubling device of the application is provided with a detection assembly 103 comprising a beam-reducing mirror 1031, a first filter 1032 and an optical power meter 1033, which can realize power detection of the laser reflected by the polarization beamsplitter 102.

[0146] In some preferred embodiments, the detection assembly 103 is further used for measuring the irradiation angle of the laser on the corresponding light path;

[0147] The detection assembly 103 further comprises a first beam splitter 1034, a fourth reflecting mirror 1035, a first focusing mirror 1036, a second filter 1037 and a PSD sensor 1038 arranged in sequence;

[0148] The first beam splitter 1034 is arranged between the polarization beamsplitter 102 and the beam-reducing mirror 1031 and is used for transmitting and reflecting the laser on the corresponding light path to the fourth reflecting mirror 1035;

[0149] The fourth reflecting mirror 1035 is used for reflecting the laser on the corresponding light path to the first focusing mirror 1036.

[0150] Specifically, the first beam splitter 1034 can cooperate with the fourth reflecting mirror 1035 to send the laser on the corresponding light path to the first focusing mirror 1036 without affecting the detection of the laser power by the optical power meter 1033, so that the PSD sensor 1038 can detect the angle of the laser irradiated along the corresponding light path.

[0151] In this embodiment, the multi-wavelength laser frequency doubling device of the application can make the PSD sensor 1038 detect the angle of the laser irradiated along the corresponding light path without affecting the detection of the laser power by the optical power meter 1033, which facilitates subsequent adjustment of the angle of the laser irradiated along the corresponding light path.

[0152] Preferably, all the second attenuators 1 are provided with optical shutters 8 for controlling the output of the laser on the corresponding light path.

[0153] More preferably, each optical shutter 8 is provided with an output window 3 for outputting the laser on the corresponding light path, and each output window 3 is provided with an optical coating for transmitting only the laser of a single wavelength corresponding to the output window 3.​

[0154] Specifically, the output window 3 arranged on the first light path 100 corresponds to the first wavelength laser, the output window 3 arranged on the second light path 200 corresponds to the second wavelength laser, the output window 3 arranged on the third light path 300 corresponds to the third wavelength laser, and the output window 3 arranged on the fourth light path 400 corresponds to the fourth wavelength laser.

[0155] In this embodiment, the present application can make each light path output only one wavelength of laser, so that the defect repair effect is better when repairing the defects suitable for the laser based on any wavelength laser.

[0156] In some preferred embodiments, a first attenuator 2 is arranged between the laser source 11 and the first second harmonic crystal 12.

[0157] The first attenuator 2 is used for measuring and adjusting the power of the first wavelength laser.

[0158] In this embodiment, the multi-wavelength laser frequency multiplication device of the present application is arranged with a first attenuator 2 between the laser source 11 and the first second harmonic crystal 12, which can preliminarily detect and adjust the laser power emitted by the laser source 11, so as to further improve the power adjustment accuracy of the laser of each light path in cooperation with the second attenuator 1 arranged on each light path.

[0159] In a second aspect, as shown in the accompanying drawings, the present application provides a multi-wavelength laser frequency multiplication device for repairing defects on an OLED panel, comprising a first light path 100, a second light path 200, a third light path 300 and a fourth light path 400. Figure 10

[0160] The first light path 100 is sequentially arranged with a laser source 11, a first second harmonic crystal 12 and a third harmonic crystal 13, and the laser source 11 is used for emitting a first wavelength laser.

[0161] A first dichroic mirror 141 is arranged between the first second harmonic crystal 12 and the third harmonic crystal 13, which is used for sending only a second wavelength laser into the fourth light path 400, and the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser.

[0162] A second dichroic mirror 151 is arranged after the third harmonic crystal 13, which is used for sending only a third wavelength laser into the third light path 300, and the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser.

[0163] ​The second beam splitter 411 is used for sending the second wavelength laser into the second light path 200.

[0164] Specifically, the second wavelength laser transmitted by the first doubling frequency crystal 12 to the first dichroic mirror 141 is reflected by the first dichroic mirror 141 and sent into the fourth light path 400, the first wavelength laser transmitted by the first doubling frequency crystal 12 to the first dichroic mirror 141 is irradiated to the third harmonic generation crystal 13 through the first dichroic mirror 141, the third wavelength laser transmitted by the third harmonic generation crystal 13 to the second dichroic mirror 151 is reflected by the second dichroic mirror 151 and sent into the third light path 300, the first wavelength laser transmitted by the third harmonic generation crystal 13 to the second dichroic mirror 151 passes through the second dichroic mirror 151, so that the first light path 100 only outputs the first wavelength laser, and the third light path 300 only outputs the third wavelength laser; the second wavelength laser sent into the fourth light path 400 and reflected by the second beam splitter 411 enters the second light path 200, so that the second light path 200 only outputs the second wavelength laser; the second wavelength laser sent into the fourth light path 400 and transmitted by the second beam splitter 411 is irradiated to the second doubling frequency crystal 42, the second wavelength laser transmitted by the second doubling frequency crystal 42 is reflected by the third dichroic mirror 43 and leaves the fourth light path 400, and the fourth wavelength laser transmitted by the second doubling frequency crystal 42 passes through the third dichroic mirror 43, so that the fourth light path 400 only outputs the fourth wavelength laser. Therefore, the multi-wavelength laser frequency multiplication device provided by the application can make each light path output only one wavelength of laser, and can simultaneously repair four kinds of defects respectively adapted to four kinds of wavelength lasers based on the four kinds of wavelength lasers, thereby improving the repair efficiency.

[0165] In a third aspect, as shown in the accompanying drawings, Figure 13 The application provides a multi-wavelength laser frequency multiplication system for repairing defects on an OLED panel and adjusting the power of the laser for repairing defects, comprising a first light path 100, a second light path 200, a third light path 300 and a fourth light path 400.

[0166] The laser source 11 is used for emitting a first wavelength laser.

[0167] A first conversion assembly 14 is arranged between the first doubling frequency crystal 12 and the third harmonic generation crystal 13 and is used for selectively sending a second wavelength laser into the fourth light path 400, the wavelength of the second wavelength laser being 1 / 2 of the wavelength of the first wavelength laser.

[0168] A second conversion component 15 is provided after the frequency tripling crystal 13 for optionally sending a third wavelength laser into the third optical path 300 , wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser;

[0169] The fourth optical path 400 is provided with a third conversion component 41 and a second double frequency crystal 42 in sequence. The third conversion component 41 is used to optionally send the second wavelength laser into the second optical path 200.

[0170] A second attenuator 1 is provided at the end of the first optical path 100, the end of the second optical path 200, and the end of the third optical path 300. A third attenuator 9 is provided between the third conversion component 41 and the second doubled frequency crystal 42. The second attenuator 1 and the third attenuator 9 are both used to measure and adjust the power of the laser on the corresponding optical path, and each includes a half-wave plate 101, a polarization beam splitter 102, and a detection component 103, which are arranged in sequence.

[0171] The angle between the half-wave plate 101 and the corresponding optical path is adjustable;

[0172] The polarization beam splitter 102 is used to transmit and reflect the laser light on the corresponding optical path toward the detection component 103;

[0173] The detection component 103 is used to measure the power of the laser on the corresponding optical path;

[0174] The second attenuator 1 and the third attenuator 9 also include a driving mechanism 104 connected to the half-wave plate 101, and the driving mechanism 104 is used to drive the half-wave plate 101 to rotate to adjust the angle between the half-wave plate 101 and the corresponding optical path;

[0175] The multi-wavelength laser frequency doubling system also includes a controller (not shown), which is used to measure the power of the laser on the corresponding optical path based on the detection component 103, and control the driving mechanism 104 to drive the half-wave plate 101 to rotate according to the power of the laser on the corresponding optical path to adjust the angle between the half-wave plate 101 and the corresponding optical path, thereby adjusting the power of the laser on the corresponding optical path reflected by the polarization beam splitter 102 to reach a target value.

[0176] The multi-wavelength laser frequency doubling system provided in the present application can output one, two, three or four specific lasers with different wavelengths, so that a single defect adapted to a specific wavelength laser can be repaired, or multiple defects adapted to lasers of different wavelengths can be repaired at the same time, thereby improving the repair efficiency, being highly targeted and flexible; and the present application can realize closed-loop control of the laser power of each optical path based on the second attenuator 1 and the third attenuator 9, thereby improving the power adjustment accuracy of the laser on each optical path.

[0177] From the above, the application provides a multi-wavelength laser frequency doubling device and system, wherein the multi-wavelength laser frequency doubling device provided by the application can output specific one, two, three or four lasers with different wavelengths, so as to repair a single defect suitable for a specific wavelength laser, or simultaneously repair multiple defects suitable for different wavelength lasers, improve repair efficiency, and be highly targeted and flexible.

[0178] In the embodiments provided in the application, it should be understood that, in this document, relationship terms such as first and second are used only to distinguish one entity or operation from another, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations.

[0179] The above only describes the embodiments of the application and is not used to limit the protection scope of the application. The application can have various modifications and changes for those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. A multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, characterized in that: It comprises a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first conversion component (14) is provided between the first frequency doubling crystal (12) and the frequency tripling crystal (13) for selectively sending a second wavelength laser into the fourth optical path (400), wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component (15) is provided after the frequency tripling crystal (13) for selectively sending a third wavelength laser into the third optical path (300), wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component (41) and a second doubled frequency crystal (42) are successively arranged on the fourth optical path (400), and the third conversion component (41) is used to selectively send the second wavelength laser into the second optical path (200); The first conversion component (14) comprises: a first dichroic mirror (141) for transmitting the first wavelength laser light and reflecting the second wavelength laser light to send it into a fourth optical path (400); a first motion mechanism (142), connected to the first dichroic mirror (141), and configured to drive the first dichroic mirror (141) to move so as to enter or exit the first optical path (100); The first conversion component (14) further comprises: a first reflecting mirror (143), connected to the first motion mechanism (142), and configured to reflect the first wavelength laser and the second wavelength laser to send them into a fourth optical path (400); The first motion mechanism (142) is also used to drive the first reflector (143) to move so as to enter or exit the first optical path (100).

2. The multi-wavelength laser frequency doubling device according to claim 1, characterized in that: A second attenuator (1) is provided at the end of the first optical path (100), the end of the second optical path (200), and the end of the third optical path (300); The second attenuator (1) is used to measure and adjust the power of the laser on the corresponding optical path.

3. The multi-wavelength laser frequency doubling device according to claim 2, characterized in that: The second attenuator (1) comprises a half-wave plate (101), a polarization beam splitter (102) and a detection component (103) which are arranged in sequence; The angle between the half-wave plate (101) and the corresponding optical path is adjustable; The polarization beam splitter (102) is used to transmit and reflect the laser light on the corresponding optical path toward the detection component (103); The detection component (103) is used to measure the power of the laser on the corresponding optical path; The second attenuator (1) further comprises a driving mechanism (104) connected to the half-wave plate (101), wherein the driving mechanism (104) is used to drive the half-wave plate (101) to rotate so as to adjust the angle between the half-wave plate (101) and the corresponding optical path.

4. The multi-wavelength laser frequency doubling device according to claim 3, characterized in that: The detection component (103) comprises a beam reducer (1031), a first optical filter (1032) and an optical power meter (1033) which are arranged in sequence.

5. The multi-wavelength laser frequency doubling device according to claim 4, characterized in that: The detection component (103) is also used to measure the irradiation angle of the laser on the corresponding optical path; The detection assembly (103) further comprises a first beam splitter (1034), a fourth reflector (1035), a first focusing mirror (1036), a second filter (1037) and a PSD sensor (1038) which are arranged in sequence; The first beam splitter (1034) is arranged between the polarization beam splitter (102) and the beam reducer (1031), and is used for transmitting and reflecting the laser light on the corresponding optical path toward the fourth reflector (1035); The fourth reflecting mirror (1035) is used to reflect the laser light on the corresponding optical path toward the first focusing mirror (1036).

6. The multi-wavelength laser frequency doubling device according to claim 1, characterized in that: A first attenuator (2) is provided between the laser source (11) and the first frequency doubling crystal (12); The first attenuator (2) is used to measure and adjust the power of the first wavelength laser.

7. A multi-wavelength laser frequency doubling device for repairing defects on an OLED panel, characterized in that: It comprises a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first dichroic mirror (141) is provided between the first frequency doubling crystal (12) and the frequency tripling crystal (13) for sending only the second wavelength laser light into the fourth optical path (400), wherein the wavelength of the second wavelength laser light is 1 / 2 of the wavelength of the first wavelength laser light; A second dichroic mirror (151) is provided after the frequency tripling crystal (13) for sending only the third wavelength laser light into the third optical path (300), wherein the wavelength of the third wavelength laser light is 1 / 3 of the wavelength of the first wavelength laser light; A second beam splitter (411), a second double frequency crystal (42), and a third dichroic mirror (43) are sequentially arranged on the fourth optical path (400); the second beam splitter (411) is used to send the second wavelength laser into the second optical path (200); the third dichroic mirror (43) is used to transmit only the fourth wavelength laser; the wavelength of the fourth wavelength laser is 1 / 4 of the wavelength of the first wavelength laser; Also includes: The first dichroic mirror (141) is used to transmit the first wavelength laser and reflect the second wavelength laser to send it into the fourth optical path (400); a first motion mechanism (142), connected to the first dichroic mirror (141), and configured to drive the first dichroic mirror (141) to move so as to enter or exit the first optical path (100); a first reflecting mirror (143), connected to the first motion mechanism (142), and configured to reflect the first wavelength laser and the second wavelength laser to send them into a fourth optical path (400); The first motion mechanism (142) is also used to drive the first reflector (143) to move so as to enter or exit the first optical path (100).

8. A multi-wavelength laser frequency doubling system for repairing defects on an OLED panel and for adjusting the power of the laser used to repair the defects, characterized in that: It comprises a first optical path (100), a second optical path (200), a third optical path (300) and a fourth optical path (400); A laser source (11), a first double frequency crystal (12) and a triple frequency crystal (13) are sequentially arranged on the first optical path (100), wherein the laser source (11) is used to emit laser light of a first wavelength; A first conversion component (14) is provided between the first frequency doubling crystal (12) and the frequency tripling crystal (13) for selectively sending a second wavelength laser into the fourth optical path (400), wherein the wavelength of the second wavelength laser is 1 / 2 of the wavelength of the first wavelength laser; A second conversion component (15) is provided after the frequency tripling crystal (13) for selectively sending a third wavelength laser into the third optical path (300), wherein the wavelength of the third wavelength laser is 1 / 3 of the wavelength of the first wavelength laser; A third conversion component (41) and a second doubled frequency crystal (42) are successively arranged on the fourth optical path (400), and the third conversion component (41) is used to selectively send the second wavelength laser into the second optical path (200); A second attenuator (1) is provided at the end of the first optical path (100), the end of the second optical path (200), and the end of the third optical path (300); a third attenuator (9) is provided between the third conversion component (41) and the second doubled frequency crystal (42); the second attenuator (1) and the third attenuator (9) are both used to measure and adjust the power of the laser on the corresponding optical path, and both include a half-wave plate (101), a polarization beam splitter (102), and a detection component (103) which are arranged in sequence; The angle between the half-wave plate (101) and the corresponding optical path is adjustable; The polarization beam splitter (102) is used to transmit and reflect the laser light on the corresponding optical path toward the detection component (103); The detection component (103) is used to measure the power of the laser on the corresponding optical path; The second attenuator (1) and the third attenuator (9) also each include a driving mechanism (104) connected to the half-wave plate (101), wherein the driving mechanism (104) is used to drive the half-wave plate (101) to rotate so as to adjust the angle between the half-wave plate (101) and the corresponding optical path; The multi-wavelength laser frequency doubling system further includes a controller, the controller being configured to measure the power of the laser on the corresponding optical path according to the detection component (103), and to control the driving mechanism (104) to drive the half-wave plate (101) to rotate according to the power of the laser on the corresponding optical path, so as to adjust the angle between the half-wave plate (101) and the corresponding optical path, so as to adjust the power of the laser on the corresponding optical path reflected by the polarization beam splitter (102) to reach a target value; The first conversion component (14) comprises: a first dichroic mirror (141) for transmitting the first wavelength laser light and reflecting the second wavelength laser light to send it into a fourth optical path (400); a first motion mechanism (142), connected to the first dichroic mirror (141), and configured to drive the first dichroic mirror (141) to move so as to enter or exit the first optical path (100); The first conversion component (14) further comprises: a first reflecting mirror (143), connected to the first motion mechanism (142), and configured to reflect the first wavelength laser and the second wavelength laser to send them into a fourth optical path (400); The first motion mechanism (142) is also used to drive the first reflector (143) to move so as to enter or exit the first optical path (100).

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