An elliptical ridge type waveguide laser and a preparation method thereof

Abstract

The application belongs to the technical field of semiconductor lasers, and discloses an elliptical ridge waveguide laser and a preparation method thereof. The elliptical ridge waveguide laser comprises a laser body, a ridge structure of the laser body is an elliptical ridge waveguide structure, and a top surface of the elliptical ridge waveguide structure is in an elliptical shape. The top surface of the elliptical ridge waveguide structure satisfies an elliptical equation, a distance between two foci of the top surface elliptical of the elliptical ridge waveguide structure is the same as a cavity length of the laser body, and a length of a minor axis of the top surface elliptical of the elliptical ridge waveguide structure is less than a width of a top surface of an epitaxial substrate of the laser body. The elliptical ridge waveguide structure is formed through photolithography and etching. The application solves the problems of high optical cavity gain, low threshold current, single-mode high power, and low polarization ratio laser manufacturing difficulty, and provides reliable technical support for commercial and industrial applications of high-power lasers.

Images