A multi-pin chip capacitor testing device and system
By using relay modules and drivers in a multi-pin chip capacitor test device, and reducing the antenna effect by setting the instrument and chip-side relays, the problems of inconvenient operation and low testing efficiency in switching the pins to be tested in the prior art are solved, and efficient and accurate testing is achieved.
Patent Information
- Application Number
- CN202411446699.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-16
- Publication Date
- 2025-05-27
- Estimated Expiration
- 2044-10-16
AI Technical Summary
The existing multi-pin electronic component testing method based on LCR instruments is inconvenient to operate when switching the pins to be tested, and the test efficiency and accuracy are low.
A multi-pin chip capacitor test device is used, which includes several relay modules and drivers. The pins to be tested are switched by controlling the on-off of the relay module, and a relay is provided on the instrument and chip ends to reduce the antenna effect.
It achieves the effect of faster switching speed, more convenient operation, less control difficulty and higher testing efficiency. At the same time, it ensures measurement accuracy in high-frequency, high-speed and high-precision application scenarios and reduces costs.
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Figure CN119269890B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the field of electronic component testing, and particularly to a multi-pin chip capacitor testing device and system. Background Art
[0002] A multi-layer ceramic capacitor (hereinafter referred to as MLCC) is a chip capacitor component, which is formed by laminating ceramic dielectric films printed with electrodes (inner electrodes) in a staggered manner, sintering them at a high temperature once to form a ceramic chip, and then sealing metal layers (outer electrodes) at both ends of the ceramic chip.
[0003] The prior art mainly uses the four-terminal pair (4TP) self-balancing bridge method based on an LCR meter (an instrument for measuring inductance, capacitance, and resistance) to test the capacitance of MLCC. Please refer to Figure 1 , Figure 1 which is a schematic diagram of the principle of testing capacitance using the self-balancing bridge method. The input terminals of the LCR meter include the Hc terminal, the Hp terminal, the Lc terminal, and the Lp terminal. During the test, the Hc terminal and the Hp terminal of the LCR meter are connected to the first terminal of the capacitor under test (DUT) (or the positive electrode of a polarized capacitor), and the Lc terminal and the Lp terminal are connected to the second terminal of the capacitor under test (DUT) (or the negative electrode of a polarized capacitor). According to the reading of the LCR meter, the impedance Z of the capacitor under test (DUT) can be calculated, and finally the capacitance of the capacitor under test (DUT) can be calculated based on the impedance Z.
[0004] For this existing test method based on an LCR meter, when testing an MLCC with multiple pairs of pins, it is necessary to frequently switch the pins of the MLCC connected to the Hc terminal and the Hp terminal of the LCR meter. Regarding the problem of how to automatically switch the pins to be tested, the prior art usually fixes the Hc terminal and the Hp terminal of the LCR meter on a moving slide table and controls the position of the moving slide table through a motor, so that the Hc terminal and the Hp terminal of the LCR meter slide to the position of the target pin, making the Hc terminal and the Hp terminal of the LCR meter electrically connected to the specified pin to be tested. This existing test method for multi-pin electronic components based on a moving slide table is inconvenient for operating the switching of the pins to be tested, and both the test efficiency and the test accuracy are relatively low. Summary of the Invention
[0005] Based on this, the object of the present invention is to provide a multi-pin electronic component testing device, which has the advantages of fast switching speed, convenient operation, low control difficulty, high test efficiency, small occupied space, and low cost.
[0006] The present invention provides a multi-pin chip capacitor testing device, comprising: a plurality of relay modules and a driver; each of the relay modules has a first end for connecting a pair of pins to be tested of the chip capacitor to be tested, and a second end for connecting to the input end of an LCR meter; the driver controls the relay module corresponding to the target pin to be tested to close and controls the relay modules corresponding to other pins to be tested to open when testing the specified target pin to be tested.
[0007] By controlling the on / off of the relay modules to switch the pins to be tested, the present invention has a faster switching speed, more convenient operation, lower control difficulty and higher testing efficiency compared with the existing pin switching method based on a moving slide table.
[0008] Further, the relay module specifically includes a meter-end relay and a chip-end relay connected in series; the meter-end relay is close to the LCR meter, and the chip-end relay is close to the chip capacitor to be tested; when the driver controls the relay module to close, it controls the meter-end relay and the chip-end relay to close simultaneously; when the driver controls the relay module to open, it controls the meter-end relay and the chip-end relay to open simultaneously, so as to weaken the influence of the antenna effect and improve the testing accuracy.
[0009] Further, the multi-pin chip capacitor testing device further includes a probe card, a chip-end relay board and a meter-end relay board; the probe card is used for mounting the chip capacitor to be tested; the chip-end relay board is used for mounting the chip-end relay; the meter-end relay board is used for mounting the meter-end relay.
[0010] Further, the probe card and the chip-end relay board are stacked to save space.
[0011] Further, the meter-end relay and the chip-end relay, and between the chip-end relay and the pins to be tested of the chip capacitor to be tested are electrically connected through SMB coaxial connectors.
[0012] Further, the meter-end relay is electrically connected to an external LCR meter through a BNC coaxial connector.
[0013] Further, both the meter-end relay and the chip-end relay are coaxial relays.
[0014] Further, the impedance of each signal transmission line on the chip-end relay board and the meter-end relay board is equal.
[0015] Further, the multi-pin chip capacitor testing device further includes: a base, a fixed guide rail, a lifting slider, a servo motor, and a mounting platform; the fixed guide rail is vertically installed on the base; the lifting slider is slidably installed on the fixed guide rail; the output end of the servo motor is in transmission connection with the lifting slider for controlling the height of the lifting slider; the mounting platform is installed on the top of the lifting slider; the probe card is installed on the mounting platform; and the chip-end relay board is installed on the probe card.
[0016] Based on the same inventive concept, the present invention further provides a multi-pin chip capacitor testing system, including: an LCR meter, a chip capacitor to be tested, and any one of the above multi-pin chip capacitor testing devices; the chip capacitor to be tested is provided with a plurality of pairs of pins to be tested; each pair of pins to be tested of the chip capacitor to be tested is respectively connected to the input end of the LCR meter through a relay module of the multi-pin chip capacitor testing device.
[0017] The present invention has the following technical effects: 1. By controlling the on-off of the relay module to switch the pins to be tested, the present invention has a faster switching speed, more convenient operation, lower control difficulty, and higher testing efficiency compared with the existing pin switching method based on a moving slide table. 2. By setting the meter-end relay and the chip-end relay, the present invention reduces the influence of relay capacitance and antenna effect, ensures the measurement accuracy in high-frequency, high-speed, and high-precision application scenarios, and balances the requirements of cost reduction and measurement efficiency improvement. The present invention uses coaxial relays and coaxial connectors, and optimizes the PCB design to achieve impedance matching, ensuring the transmission stability and reliability of the test signal and further improving the testing accuracy. 3. By setting the stacked probe card and the chip-end relay board, the present invention greatly reduces the space occupied by the measurement device, adapting to the application scenario with limited space for the testing station.
[0018] For better understanding and implementation, the present invention will be described in detail below with reference to the accompanying drawings. Description of the Drawings
[0019] Figure 1 It is a schematic diagram of the principle of testing the capacitance of a self-balancing bridge method;
[0020] Figure 2 It is a module schematic diagram of the multi-pin chip capacitor testing system according to Embodiment 1 of the present invention;
[0021] Figure 3 It is a module schematic diagram of the multi-pin chip capacitor testing system according to Embodiment 2 of the present invention;
[0022] Figure 4 It is a module schematic diagram of the multi-pin chip capacitor testing system according to Embodiment 3 of the present invention;
[0023] Figure 5 This is a partial structural schematic diagram of the multi-pin chip capacitor testing device according to Embodiment 3 of the present invention. Specific embodiments
[0024] The embodiments of the technical solutions of the present application will be described in detail below with reference to the accompanying drawings. The following embodiments are only used to illustrate the technical solutions of the present application more clearly, so they are only examples and cannot be used to limit the protection scope of the present application.
[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion.
[0026] In the description of the embodiments of this application, technical terms such as "first" and "second" are only used to distinguish different objects and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity, specific order or primary-secondary relationship of the indicated technical features. In the description of the embodiments of this application, the terms "multiple" and "several" refer to more than two (including two). Similarly, "multiple groups" and "several groups" refer to more than two groups (including two groups), and "multiple pairs" and "several pairs" refer to more than two pairs (including two pairs).
[0027] In the description of the embodiments of this application, the term "and / or" is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this article generally represents an "or" relationship between the associated objects before and after.
[0028] In the description of the embodiments of this application, unless otherwise clearly specified and limited, technical terms such as "installation", "connection", "connection", and "fixation" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can also be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of this application can be understood according to specific circumstances.
[0029] References to "embodiments" in this specification mean that specific features, structures, or characteristics described in connection with the embodiments can be included in at least one embodiment of the present application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment each time, nor are they independent or alternative embodiments mutually exclusive of other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.
[0030] Regarding the problem of how to automatically switch the pins to be tested, the present invention adopts a solution that is completely different from the existing switching method using a moving slide table. In the present invention, multiple pairs of pins of the chip capacitor (MLCC) to be tested are connected in parallel with the input end of the LCR meter through a relay module. When switching the pins to be tested, it is only necessary to disconnect the relay modules corresponding to other pins and close the relay module corresponding to the target pin, so that the input end of the LCR meter can be electrically connected to the target pin, with a faster switching speed, more convenient operation, lower control difficulty, and higher test efficiency.
[0031] Example 1
[0032] Please refer to Figure 2 , Figure 2 which is a schematic diagram of the modules of the multi-pin chip capacitor test system according to Embodiment 1 of the present invention. The multi-pin chip capacitor test system according to Embodiment 1 of the present invention includes an LCR meter 1, a test device 2, and a chip capacitor 3 to be tested. The test device 2 is the multi-pin chip capacitor test device of the present invention. The pins to be tested of the chip capacitor 3 to be tested are all connected to the input end of the LCR meter 1 through the test device 2.
[0033] Specifically, the chip capacitor 3 to be tested is a multi-pin polarized capacitor, and its pins to be tested include n pairs of positive pins HC1 / HP1, HC2 / HP2,..., HCn / HPn and a pair of negative pins LC / LP. The chip capacitor 3 to be tested is equivalent to n polarized capacitors with unconnected positive electrodes and parallel-connected negative electrodes.
[0034] Specifically, the input end of the LCR meter 1 includes an Hc terminal, an Hp terminal, an Lc terminal, and an Lp terminal. The test device 2 includes n relay modules S1 to Sn, and a driver (not shown in the figure) for controlling the on / off of the relay modules. A pair of negative pins LC / LP of the chip capacitor 3 to be tested are respectively electrically connected to the Lc terminal and the Lp terminal of the LCR meter. The i-th pair of positive pins HCi / HPi of the chip capacitor 3 to be tested are respectively electrically connected to the Hc terminal and the Hp terminal of the LCR meter through the i-th relay module Si; i is any integer in the range of [1, n].
[0035] When it is necessary to test the i-th pair of positive pins of the chip capacitor 3 to be tested, the driver of the testing device 2 controls the i-th relay module Si to close and controls other relay modules to open, so that the specified i-th pair of positive pins is electrically connected to the Hc terminal and the Hp terminal of the LCR meter. The LCR meter 1 can test the capacitance corresponding to the i-th pair of positive pins through the self-balancing bridge method.
[0036] When it is necessary to replace the pins to be tested, the driver only needs to control the relay module corresponding to the target pin to close and control other relay modules to open to complete the switching. Compared with the existing switching method using a moving slide table, the switching speed of the present invention is faster, the operation is more convenient, the control difficulty is lower, and the test efficiency is higher.
[0037] According to the working principle of the present invention, it can be deduced that the multi-pin chip capacitor testing device of the present invention can also be used to test non-polar capacitors. Since non-polar capacitors do not distinguish between positive pins and negative pins, in the embodiment of testing non-polar capacitors, the positive pin can be replaced by the pin to be tested equivalent to the first end of the capacitor in the circuit, and the negative pin can be replaced by the pin to be tested equivalent to the second end of the capacitor in the circuit.
[0038] In this embodiment, since the chip capacitor 3 to be tested has only one pair of negative pins LC / LP, it is not necessary to switch the pins to be tested connected to the Lc terminal and the Lp terminal of the LCR meter when switching the pins to be tested. In other embodiments, the chip capacitor to be tested may be provided with multiple pairs of negative pins. At this time, each pair of negative pins of the chip capacitor 3 to be tested is also connected to the Lc terminal and the Lp terminal of the LCR meter through a relay module. The driver can also switch the target negative pins connected to the Lc terminal and the Lp terminal of the LCR meter by controlling the on / off of the corresponding relay module.
[0039] Example 2
[0040] After the relay module is adopted in the present invention, a new relay capacitance is introduced. Frequent opening / closing of the relay module also enhances the influence of the antenna effect, resulting in a decrease in test accuracy. Although reducing the frequency of opening / closing of the relay module can reduce the influence of the antenna effect, it also decreases the pin switching speed and affects the test efficiency. Although increasing the number of test stations or LCR meters can ensure the test efficiency, the cost is extremely high.
[0041] For the above problems, please refer to Figure 3 , Figure 3It is a module schematic diagram of the multi-pin chip capacitor test system according to Embodiment 2 of the present invention. In this embodiment, each relay module Si of the test device 2 specifically includes: a meter-end relay Si0 and a chip-end relay Si1 connected in series between the input end of the LCR meter 1 and the pins to be tested of the chip capacitor 3 to be tested; the meter-end relay Si0 is close to the LCR meter 1, and the chip-end relay Si1 is close to the chip capacitor 3 to be tested; i is any integer within the range of [1,n].
[0042] In addition, the meter-end relay is close to the LCR meter, and the chip-end relay is close to the chip capacitor to be tested, which means that in the circuit connection relationship, the input end of the LCR meter is connected to the meter-end relay, the meter-end relay is connected to the chip-end relay, and the chip-end relay is connected to the pins to be tested of the chip capacitor to be tested, and it does not mean "close" in the spatial position.
[0043] When the driver of the test device 2 controls the i-th relay module Si to close, the driver controls the i-th meter-end relay Si0 and the i-th chip-end relay Si1 to close simultaneously, so that the connection between the i-th positive pin HCi / HPi and the Hc end and Hp end of the LCR meter 1 is conducted. When the driver of the test device 2 controls the i-th relay module Si to disconnect, the driver controls the i-th meter-end relay Si0 and the i-th chip-end relay Si1 to disconnect simultaneously, so that the connection between the i-th positive pin HCi / HPi and the Hc end and Hp end of the LCR meter 1 is disconnected. i is any integer within the range of [1,n]. In this embodiment, by setting the meter-end relay and the chip-end relay, under the condition that the switching speed does not decrease and the cost does not increase significantly, the influence of the antenna effect is weakened, and the test accuracy is ensured.
[0044] Example 3
[0045] Please refer to Figure 4 , Figure 4 It is a module schematic diagram of the multi-pin chip capacitor test device according to Embodiment 3 of the present invention.
[0046] In order to facilitate the replacement of the chip capacitor 3 to be tested, as well as the installation of relays and the design of wiring, the test device 2 further includes: a probe card 201, a chip-end relay board 202, and a meter-end relay board 203. The chip capacitor 3 to be tested is installed on the probe card 201, and its pins to be tested are electrically connected to the printed wires on the probe card 201. The chip-end relays S11~Sn1 are all installed on the chip-end relay board 202. The meter-end relays S10~Sn0 are all installed on the meter-end relay board 203.
[0047] Further, due to limited test stations and to save space, the probe card 201 and the chip - end relay board 202 are stacked. Specifically, please refer to Figure 5 , Figure 5 which is a partial structural schematic diagram of the multi - pin chip capacitor testing device according to Embodiment 3 of the present invention. The chip - end relay board 202 is arranged on the upper layer of the probe card 201. To facilitate the staff to replace the chip capacitor 3 to be tested installed on the probe card 201, an opening 202a is provided in the chip - end relay board 202, so that the staff can replace the chip capacitor 3 to be tested installed on the lower - layer probe card 201 through the opening 202a.
[0048] Further, a relay indicator light (not shown in the figure) is also provided on the chip - end relay board 202 and / or the meter - end relay board 203, which is used to indicate the on - off states of the n meter - end relays S10 - Sn0 and / or the n chip - end relays S11 - Sn1, facilitating the staff to observe and debug.
[0049] Further, the application scenario of the present invention is a high - speed and high - frequency scenario. To improve the test accuracy, both the meter - end relay and the chip - end relay are coaxial relays, specifically reed coaxial relays with high insulation, an impedance of 50Ω, and normal operation of the contacts at a frequency of 1Mhz. Please refer to Figure 4 , the Hc terminal and the Hp terminal of the LCR meter are connected to the meter - end relay on the meter - end relay board 203 through a BNC (Bayonet Neill - Concelman) coaxial connector; the i - th meter - end relay Si0 on the meter - end relay board 203 is connected to the corresponding i - th chip - end relay Si1 on the chip - end relay board 202 through an SMB coaxial connector; i is any integer in the range of [1, n]. The chip - end relay on the chip - end relay board 202 is connected to the probe card 201 through an SMB coaxial connector, so that the chip - end relay is connected to the corresponding pin to be tested through the SMB coaxial connector and the printed wire on the probe card 201. The coaxial relay has sensitive switching, excellent isolation and protection performance. The wire of the coaxial connector is coated with an electromagnetic shielding layer, which can effectively isolate the internal signal and external electromagnetic interference, and has good impedance matching, which can effectively reduce the reflection and attenuation of the signal during transmission. The present invention adopts coaxial relays and coaxial connectors, effectively improving the signal transmission quality and thus improving the test accuracy.
[0050] In this embodiment, the wire length of the SMB coaxial connector is 0.5 - 1.5m, which is convenient for quick plugging and unplugging.
[0051] Furthermore, in order to improve the test accuracy, the present invention performs impedance matching when designing the PCB routing of the chip-end relay board 202 and the instrument-end relay board 203, so that the impedance of each signal transmission line on the chip-end relay board 202 and the instrument-end relay board 203 is equal and maintained at 50Ω, further ensuring the transmission stability and reliability of the test signal and improving the test accuracy.
[0052] In this embodiment, the chip-end relay board 202 and the instrument-end relay board 203 are PCB boards made of FR-4 material.
[0053] Furthermore, in an actual automated test scenario, after a test device 2 completes a round of testing on all the pins to be tested, the test device 2 needs to change its position to perform data synchronization or other processes. Therefore, the test device 2 of the present invention also has a height adjustment function. Figure 5 The testing device 2 further includes: a base 211 , a fixed guide rail 212 , a reinforcing rib 212 a , a lifting slider 213 , a servo motor 214 and a mounting platform 215 .
[0054] The base 211 is installed on the ground or a workbench. The fixed guide rail 212 is vertically installed on the base 211. In order to improve the stability of the fixed guide rail 212 installed on the base 211, a reinforcing rib 212a is also provided between the fixed guide rail 212 and the base 211. The lifting slider 213 is slidably installed on the fixed guide rail 212, and can slide up and down within the range limited by the fixed guide rail 212, thereby changing the height. The output end of the servo motor 214 is transmission-connected with the lifting slider 213, and is used to control the height of the lifting slider 213. The mounting platform 215 is a fiberglass board, which is mounted on the top of the lifting slider 213 and can change the height following the lifting slider 213. The probe card 201 is embedded and installed on the mounting platform 215. The chip-end relay board 202 is installed on the upper layer of the probe card 201.
[0055] Obviously, the relative positions of the lifting slider 213, the mounting platform 215, the probe card 201 and the chip-end relay board 202 are fixed, and the four change height synchronously. In this embodiment, when the test starts, the servo motor 214 controls the height of the lifting slider 213 to drop, and the mounting platform 215, the probe card 201 and the chip-end relay board 202 drop in height synchronously; after the test is completed, the servo motor 216 controls the height of the lifting slider 213 to rise, and the mounting platform 215, the probe card 201 and the chip-end relay board 202 rise in height synchronously, so that the staff can intuitively understand the status of the test device 2 through the height, and it is also convenient to perform other processes such as data synchronization after the test is completed.
[0056] The present invention has the following technical effects: 1. By controlling the on / off of the relay module to switch the pins to be tested, the present invention has a faster switching speed, more convenient operation, lower control difficulty, and higher test efficiency compared with the existing pin switching method based on a moving stage. Experiments have proved that the time taken to switch the pins to be tested in the present invention is less than 5 ms, and the switching speed is extremely fast. 2. By setting the meter-end relay and the chip-end relay, the present invention reduces the influence of relay capacitance and antenna effect, ensures the measurement accuracy in high-frequency, high-speed, and high-precision application scenarios, and balances the requirements of cost reduction and measurement efficiency improvement. The present invention uses coaxial relays and coaxial connectors, and optimizes the PCB design to achieve impedance matching, ensuring the transmission stability and reliability of test signals and further improving the test accuracy. Experiments have proved that the test device of the present invention has excellent repeatability in multiple tests of 6-electrode chip capacitors, and the repeat test error is within 0.3%; when measuring a chip capacitor with a true capacitance value of 220 pF, the measurement error is less than 3 pF. 3. By setting a stacked probe card and a chip-end relay board, the present invention greatly reduces the space occupied by the measurement device, adapting to the application scenario with limited space for the test station.
[0057] The above-described embodiments merely represent several implementation manners of the present invention. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the invention patent. It should be noted that for those of ordinary skill in the art, without departing from the concept of the present invention, several modifications and improvements can still be made, and the present invention also intends to include these changes and modifications.
Claims
1. A multi-pin chip capacitor testing device, characterized in that: include: Several relay modules and drivers; Each of the relay modules has a first end for connecting a pair of pins to be tested of the capacitor of the chip to be tested, and a second end for connecting an input end of an LCR meter; The driver, when testing a designated target pin to be tested, controls the relay module corresponding to the target pin to be tested to close, and controls the relay modules corresponding to other pins to be tested to open; The relay module specifically includes an instrument-end relay and a chip-end relay connected in series; the instrument-end relay is close to the LCR meter, and the chip-end relay is close to the capacitor of the chip to be tested; When the driver controls the relay module to close, the instrument-end relay and the chip-end relay are controlled to close simultaneously; when the driver controls the relay module to open, the instrument-end relay and the chip-end relay are controlled to open simultaneously.
2. The multi-pin chip capacitor testing device according to claim 1, characterized in that: It also includes a probe card, a chip-end relay board and an instrument-end relay board; the probe card is used to install the chip capacitor to be tested; the chip-end relay board is used to install the chip-end relay; the instrument-end relay board is used to install the instrument-end relay.
3. The multi-pin chip capacitor testing device according to claim 2, characterized in that: The probe card and the chip end relay board are stacked.
4. The multi-pin chip capacitor testing device according to claim 3, characterized in that: The instrument-end relay and the chip-end relay, as well as the chip-end relay and the pin to be tested of the chip capacitor to be tested, are electrically connected via an SMB coaxial connector.
5. The multi-pin chip capacitor testing device according to claim 4, characterized in that: The meter-end relay is electrically connected to an external LCR meter via a BNC coaxial connector.
6. The multi-pin chip capacitor testing device according to claim 5, characterized in that: The instrument-end relay and the chip-end relay are both coaxial relays.
7. The multi-pin chip capacitor testing device according to claim 6, characterized in that: The impedance of each signal transmission line on the chip-side relay board and the instrument-side relay board is equal.
8. The multi-pin chip capacitor testing device according to any one of claims 2 to 7, characterized in that: It also includes: a base, a fixed guide rail, a lifting slider, a servo motor and a mounting platform; the fixed guide rail is vertically installed on the base; the lifting slider is slidably installed on the fixed guide rail; the output end of the servo motor is transmission-connected with the lifting slider for controlling the height of the lifting slider; the mounting platform is installed on the top of the lifting slider; the probe card is installed on the mounting platform; and the chip-end relay board is installed on the probe card.
9. A multi-pin chip capacitance test system, characterized in that: include: An LCR meter, a chip capacitor to be tested, and a multi-pin chip capacitor testing device according to any one of claims 1 to 8; The chip capacitor to be tested is provided with a plurality of pins to be tested; Each pin to be tested of the chip capacitor to be tested is connected to the input end of the LCR meter through a relay module of the multi-pin chip capacitor testing device.
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