A planar ultrasonic rotary drive motor based on PCB technology and its preparation method

Abstract

The present invention provides a planar ultrasonic rotary drive motor based on PCB technology and a preparation method thereof, including: step S1, drawing a three-dimensional model of a PCB board; step S2, preparing a first circular PCB board and a second circular PCB board according to the three-dimensional model of the PCB board; step S3, bonding a first piezoelectric ceramic ring and a second piezoelectric ceramic ring to both ends of the first circular PCB board to form a first stator, and bonding a third piezoelectric ceramic ring and a fourth piezoelectric ceramic ring to both ends of the second circular PCB board to form a second stator; step S4, filling solder between the piezoelectric ceramic rings and welding and fixing; step S5, grinding the protruding solder; step S6, processing a rotor and bonding friction layer materials on the upper and lower surfaces; step S7, placing the first stator, the second stator and the rotor parallelly and coaxially assembling, and placing a plurality of bearings between the first stator and the second stator and fixing to obtain the planar ultrasonic rotary drive motor. The beneficial effects are that the present invention can reduce the volume, realize mass production, improve the versatility and improve the flexibility.

Description

Technical Field

[0001] The present invention relates to the technical field of intelligent micro-devices, and more particularly, to a planar ultrasonic rotary drive motor based on PCB technology and a preparation method thereof. Background Art

[0002] For quality inspection in the food industry, medical diagnosis in the medical field, and remote sensing and telemetry in the aerospace field, it is often necessary to collect spectral information of multiple spectral bands of a target scene or sample, compare and fuse them, and effectively achieve target recognition, classification, and tracking, etc. These requirements cannot be achieved by single-band imaging systems. At the same time, with the rapid development of the Internet of Things, miniaturization and integration of spectral imaging systems have become a development trend.

[0003] The filter wheel type spectral imaging system has advantages such as simple structure, no loss of spatial resolution, and low cost. However, most of the existing filter wheels use electromagnetic drive motors, which are difficult to meet the miniaturization requirements. Compared with traditional electromagnetic motors, ultrasonic motors have the advantages of small volume, compact structure, and immunity to electromagnetic interference, and are expected to have broad application scenarios in the field of micro-miniature spectral imaging.

[0004] The principle of an ultrasonic motor is to utilize the inverse piezoelectric effect of piezoelectric materials to cause the elastic stator to vibrate in the ultrasonic frequency band, and obtain torque and motion through the frictional coupling between the rotor and the elastic stator to drive the motor. The structure of existing ultrasonic motors is mainly of the solid shaft type, and the main representative is the USR series developed by Shinsei Corporation in Japan. Such motors can achieve a relatively large output torque, but it is difficult to meet the requirements of special application scenarios such as spectral imaging, robots, medical devices, and high-end automobiles.

[0005] Compared with traditional solid shaft type motors, hollow ultrasonic motors can freely install optical components such as filter chips and polarization chips, greatly improving the space utilization rate, facilitating system assembly and integration, and further enabling the integration and chipization of the system. However, when the volume of the hollow ultrasonic motor is reduced, the central hole of the traditional mechanical stator structure is relatively large, and the stator web size is relatively short, resulting in problems such as incomplete separation of stator vibration modes, low stator stiffness and strength, small stator vibration amplitude, and low flexibility. Summary of the Invention

[0006] The technical problems to be solved by the present invention are to reduce the volume, achieve mass production, improve versatility, and improve flexibility. To overcome the defects of the above prior art (or related art), the present invention provides a planar ultrasonic rotary drive motor based on PCB technology and a preparation method thereof.

[0007] The present invention provides a planar ultrasonic rotary drive motor based on PCB technology, comprising:

[0008] A first stator, the first stator includes a coaxially arranged first piezoelectric ceramic ring, a second piezoelectric ceramic ring and a first circular PCB board. The first piezoelectric ceramic ring and the second piezoelectric ceramic ring are respectively fixed at both ends of the first circular PCB board. A plurality of first through holes and first threaded holes are formed through the first circular PCB board. Each of the first threaded holes is arranged in a circumferential array with the axis of the first circular PCB board as the center;

[0009] A second stator, the second stator includes a coaxially arranged third piezoelectric ceramic ring, a fourth piezoelectric ceramic ring and a second circular PCB board. The third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring are respectively fixed at both ends of the second circular PCB board. A plurality of second through holes and second threaded holes are formed through the second circular PCB board. Each of the second threaded holes is arranged in a circumferential array with the axis of the second circular PCB board as the center. The number of each of the second through holes is the same as that of each of the first through holes and their positions correspond one by one. The number of each of the second threaded holes is the same as that of each of the first threaded holes and their positions correspond one by one;

[0010] A rotor, arranged between the first stator and the second stator;

[0011] A plurality of bearings whose quantity is adapted to each of the first threaded holes or each of the second threaded holes are arranged between the first stator and the second stator. The outer peripheral walls of each of the bearings are abutted against the outer peripheral wall of the rotor to limit the rotor. The first stator and the second stator are fixed by bolts sequentially passing through each of the first threaded holes, each of the bearings and each of the second threaded holes.

[0012] Compared with the prior art, a planar ultrasonic rotary drive motor based on PCB technology of the present invention has the following advantages:

[0013] In the present invention, a hollow structure of a double stator and a single rotor is proposed. While reducing the volume of the motor, it ensures that the motor has sufficient torque. And with the first circular PCB board and the second circular PCB board as substrates, the first piezoelectric ceramic ring and the second piezoelectric ceramic ring are fixed at both ends of the first circular PCB board by reflow soldering, and the third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring are fixed at both ends of the second circular PCB board by reflow soldering. Compared with the pasted fixing of traditional stators, it can realize batch production and improve reliability. Moreover, the planar ultrasonic rotary drive motor in the present invention can customize electrodes of different sizes according to the different inner diameters of the first stator and the second stator, based on the particle beam, wiring width and spacing of the piezoelectric ceramic rings. Different-sized optical elements can be installed in the motor to construct related devices, improving the versatility and flexibility.

[0014] In a possible implementation, three first through-holes are formed in the first circular PCB board, and three second through-holes are formed in the second circular PCB board. Each of the first through-holes and each of the second through-holes are used for the input of an excitation source, corresponding to SIN, COS, and GND respectively.

[0015] In a possible implementation, the polarization directions between the first piezoelectric ceramic ring, the second piezoelectric ceramic ring, the third piezoelectric ceramic ring, and the fourth piezoelectric ceramic ring are opposite to each other. There is a 90-degree phase difference between the sine wave signals applied to the first piezoelectric ceramic ring and the second piezoelectric ceramic ring by the excitation source and the sine wave signals applied to the third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring, so as to generate two orthogonal vibration modes on the first stator and the second stator.

[0016] In a possible implementation, four groups of electrodes are symmetrically arranged at both ends of the first circular PCB board and the second circular PCB board. Each group of electrodes is electrically connected through the first through-hole or the second through-hole. The four groups of electrodes correspond to SIN, GND, COS, and GND respectively, so that the traveling waves generated by the first stator and the second stator drive the rotor in the same direction.

[0017] In a possible implementation, five first through-holes are formed in the first circular PCB board, and five second through-holes are formed in the second circular PCB board. Each of the first through-holes and each of the second through-holes are used for the input of an excitation source, corresponding to SIN, COS, -SIN, -COS, and GND respectively.

[0018] In a possible implementation, the polarization directions of the first piezoelectric ceramic ring, the second piezoelectric ceramic ring, the third piezoelectric ceramic ring, and the fourth piezoelectric ceramic ring are the same at GND. The excitation source applies an independent sine wave signal to the first piezoelectric ceramic ring, the second piezoelectric ceramic ring, the third piezoelectric ceramic ring, and the fourth piezoelectric ceramic ring respectively to generate four independent vibration modes.

[0019] In a possible implementation, eight groups of electrodes are symmetrically arranged at both ends of the first circular PCB board and the second circular PCB board. Each group of electrodes is electrically connected through the first through-hole or the second through-hole. The eight groups of electrodes correspond to SIN, GND, COS, GND, -SIN, GND, -COS, and GND respectively, so that the traveling waves generated by the first stator and the second stator drive the rotor in the same direction.

[0020] In a possible implementation manner, each of the first through holes is distributed in a circumferential array along the axial direction of the first circular PCB board, and each of the second through holes is distributed in a circumferential array along the axial direction of the second circular PCB board.

[0021] In a possible implementation manner, three first threaded holes are provided on the first circular PCB board, and three second threaded holes are provided on the second circular PCB board.

[0022] The present invention also provides a method for manufacturing a planar ultrasonic rotary drive motor based on PCB technology, which is applied to the planar ultrasonic rotary drive motor based on PCB technology as described above, and includes the following steps:

[0023] Step S1, draw the 3D models of the first circular PCB board and the second circular PCB board;

[0024] Step S2, import the 3D models of the PCB boards into Altium Designer and perform wiring operations and circuit board processing operations in sequence to obtain the first circular PCB board provided with a plurality of first threaded holes and the second circular PCB board provided with a plurality of second threaded holes;

[0025] Step S3, use a dispensing machine to bond the first piezoelectric ceramic ring and the second piezoelectric ceramic ring to both ends of the first circular PCB board to form a first stator, and bond the third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring to both ends of the second circular PCB board to form a second stator;

[0026] Step S4, use a stencil to fill solder between the first piezoelectric ceramic ring and the second piezoelectric ceramic ring and between the third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring, and then use reflow soldering technology to solder and fix the first piezoelectric ceramic ring, the second piezoelectric ceramic ring, the third piezoelectric ceramic ring and the fourth piezoelectric ceramic ring;

[0027] Step S5, grind the protruding solder to be flush with the surface of the piezoelectric ceramic ring at the same position;

[0028] Step S6, process the rotor, and bond a layer of friction layer material on the upper and lower surfaces of the rotor;

[0029] Step S7, place the first stator, the second stator and the rotor parallelly and coaxially assemble them, place a plurality of bearings between the first stator and the second stator, and fix them by sequentially passing bolts through each of the first threaded holes, each of the bearings and each of the second threaded holes to obtain a planar ultrasonic rotary drive motor.

[0030] Compared with the prior art, the method for manufacturing a planar ultrasonic rotary drive motor based on PCB technology of the present invention has the following advantages:

[0031] In the present invention, the three-dimensional model of the PCB board is drawn through step S1, the wiring and circuit board processing are carried out through step S2, the bonding of the piezoelectric ceramic ring is carried out through step S3, the welding and fixing of the piezoelectric ceramic ring are carried out through step S4, the polishing of the solder is carried out through step S5, the processing of the rotor is carried out through step S6, and the assembly and fixing of the first stator, the second stator and the rotor are carried out through step S7. A hollow structure with a double stator and a single rotor is adopted, which reduces the volume of the motor while ensuring sufficient torque of the motor. Description of the Drawings

[0032] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0033] Figure 2 is a top view of the two-phase excitation-driven planar ultrasonic motor of the present invention;

[0034] Figure 3 is a left view of the two-phase and four-phase excitation-driven planar ultrasonic motor of the present invention;

[0035] Figure 4 is a top view of the four-phase excitation-driven planar ultrasonic motor of the present invention;

[0036] Figure 5 is a flow chart of the steps of the present invention;

[0037] Description of the reference numerals: 1, the first stator; 11, the first piezoelectric ceramic ring; 12, the second piezoelectric ceramic ring; 13, the first circular PCB board; 14, the first through hole; 15, the first threaded hole; 2, the second stator; 21, the third piezoelectric ceramic ring; 22, the fourth piezoelectric ceramic ring; 23, the second circular PCB board; 24, the second through hole; 25, the second threaded hole; 3, the rotor; 4, the bearing; 5, the bolt. Detailed Embodiments

[0038] First of all, those skilled in the art should understand that these embodiments are only used to explain the technical principles of the embodiments of the present invention and are not intended to limit the protection scope of the embodiments of the present invention. Those skilled in the art can make adjustments according to needs to adapt to specific application scenarios.

[0039] The present invention will be further described in detail below with reference to the drawings and specific embodiments.

[0040] See Figure 1, an embodiment of the present invention discloses a planar ultrasonic rotary drive motor based on PCB technology. With a circular PCB board as the substrate, it adopts a hollow structure of double stator and single rotor. Among them, compared with the paste fixation of traditional stators, the piezoelectric ceramic ring is fixed on the circular PCB board by reflow soldering as the stator. This mechanism has the advantages of small size, light weight, batch production, long life, high reliability, etc., and is expected to have a broad application scenario in the field of micro-spectroscopic imaging.

[0041] Continue to refer to Figure 1 , the planar ultrasonic rotary motor proposed by the present invention is composed of two stators, a rotor 3 and a pre-tightening device. The two stators and the rotor 3 are coaxially placed. The first piezoelectric ceramic ring 11, the second piezoelectric ceramic ring 12, and the first circular PCB board 13 form the first stator 1; the third piezoelectric ceramic ring 21, the fourth piezoelectric ceramic ring 22, and the second circular PCB board 23 form the second stator 2; 3 bolts 5 and a bearing 4 form the pre-tightening device; the bearing 4 is used to prevent the rotor 3 from moving radially. In order to make the double-sided piezoelectric ceramic rings on the same stator form a traveling wave with the same driving direction, the piezoelectric ceramic rings are respectively welded on the front and back of the circular PCB board by reflow soldering, and the polarization directions of the piezoelectric ceramic rings are opposite at symmetrical positions.

[0042] Refer to Figure 2 and Figure 3 , for two-phase excitation drive, 6 hole positions and 3 arc-shaped slot positions are reserved on the first circular PCB board 13 and the second circular PCB board 23. Among them, the first through hole 14 and the second through hole 24 are used for the input of the excitation source, corresponding to SIN, COS and GND respectively. The first threaded hole 15 and the second threaded hole 25 are respectively installed with three bolts 5 to fix each part of the rotating mechanism together.

[0043] Refer to Figure 3 and Figure 4 , for four-phase excitation drive, a total of 8 hole positions are reserved on the first circular PCB board 13 and the second circular PCB board 23. Among them, the first through hole 14 and the second through hole 24 are used for the input of the excitation source, corresponding to SIN, COS, -SIN, -COS and GND respectively. The first threaded hole 15 and the second threaded hole 25 are respectively installed with three bolts 5 to fix each part of the rotating mechanism together.

[0044] Continue to refer to Figure 1 and Figure 2, in a planar ultrasonic rotary drive motor driven by two-phase excitation, the piezoelectric ceramic rings are grouped in sets of four, and the polarization directions of adjacent two rings are opposite. In this way, two orthogonal vibration modes can be generated on the stator. The excitation signals applied to the piezoelectric ceramic rings are usually two sine wave signals with a 90-degree phase difference. These two signals respectively correspond to the two orthogonal vibration modes. By adjusting the phase and amplitude of these two sine wave signals, an elliptical motion trajectory can be synthesized on the driving feet of the stator to realize the drive of the rotor 3.

[0045] Continue to refer to Figure 1 , the piezoelectric ceramic rings are usually polarized in sets of four, and the polarization directions of adjacent four piezoelectric ceramic rings are opposite at the GND electrode. This configuration allows two orthogonal vibration modes to be generated on the stator, and these two modes can be synthesized into an elliptical motion trajectory by adjusting the phase and amplitude, so as to realize the drive of the rotor 3.

[0046] Continue to refer to Figure 3 and Figure 4 , in a planar ultrasonic rotary drive motor driven by four-phase excitation, the polarization directions of all piezoelectric ceramic rings are the same at the GND electrode. In this way, four independent vibration modes can be generated on the stator. The excitation signals applied to the piezoelectric ceramic rings are four independent sine wave signals, each signal corresponding to a piezoelectric ceramic ring and can be independently controlled. By independently controlling the phase and amplitude of these four sine wave signals, more complex vibration modes can be generated on the stator, so as to realize the drive of the rotor 3.

[0047] Continue to refer to Figure 1 and Figure 2 , in the rotary mechanism driven by two-phase drive excitation, the PCB board wiring method is as follows: taking "two piezoelectric ceramics + one solder electrode" as a minimum excitation unit, applying excitation signals to both ends of the two piezoelectric ceramic rings, and the middle solder electrode is grounded. The electrodes are symmetrically arranged on the front and back sides of the circular PCB board, and the corresponding front and back electrodes are connected through the first through hole 14 or the second through hole 24, and the electrodes are arranged at equal distances. Four electrodes are regarded as a group, and their excitations correspond to SIN, GND, COS, GND respectively; at the same time, to make the traveling waves generated by the two stators drive the rotor 3 in the same direction, it is necessary to have a 180° phase difference between the traveling waves generated by the stators. This phase difference can be achieved through the wiring method, that is, the stators are placed mirror-image, and when wiring, the SIN and COS drive signals of the first stator 1 are respectively connected to the COS and SIN drive signals of the second stator 2.

[0048] Continue to refer to Figure 3 and Figure 4, in the rotating mechanism driven by four-phase drive excitation, the PCB board wiring method is as follows: circular PCB boards are symmetrically placed with electrodes on both the front and back sides. The corresponding positive and negative electrodes are connected through the first through-hole 14 or the second through-hole 24, and the electrodes are equally spaced. Eight electrodes are regarded as a group, and their excitations correspond to SIN, GND, COS, GND, -SIN, GND, -COS, GND respectively; at the same time, to drive the rotor 3 in the same direction by the traveling waves generated by the two stators, it is necessary for the traveling waves generated between the stators to have a phase difference of 180°. This phase difference can be achieved through the wiring method, that is, the stators are placed mirror-symmetrically. When wiring, the SIN, COS, -COS, -SIN drive signals of the first stator 1 are respectively connected to the COS, SIN, -SIN, -COS drive signals of the second stator 2.

[0049] See Figure 5 , the embodiment of the present invention also discloses a method for manufacturing a planar ultrasonic rotary drive motor based on PCB technology, including the following steps:

[0050] Step S1, use SolidWorks to draw the 3D models of the PCB boards of the first circular PCB board 13 and the second circular PCB board 23;

[0051] Step S2, import the 3D models of the PCB boards into Altium Designer and perform wiring operations and circuit board processing operations in sequence to obtain the first circular PCB board 13 and the second circular PCB board 23;

[0052] Step S3, use a dispensing machine to bond the first piezoelectric ceramic ring 11 and the second piezoelectric ceramic ring 12 to both ends of the first circular PCB board 13 to form the first stator 1, and bond the third piezoelectric ceramic ring 21 and the fourth piezoelectric ceramic ring 22 to both ends of the second circular PCB board 23 to form the second stator 2;

[0053] Step S4, use a stencil to fill solder between the first piezoelectric ceramic ring 11 and the second piezoelectric ceramic ring 12 and between the third piezoelectric ceramic ring 21 and the fourth piezoelectric ceramic ring 22, and then use reflow soldering technology to weld and fix the first piezoelectric ceramic ring 11, the second piezoelectric ceramic ring 12, the third piezoelectric ceramic ring 21 and the fourth piezoelectric ceramic ring 22;

[0054] Step S5, grind the protruding solder to be flush with the surface of the piezoelectric ceramic ring at the same position to ensure uniform contact between the upper surface of the piezoelectric ceramic ring and the rotor 3;

[0055] Step S6, process the rotor 3 and bond a layer of friction layer material such as nitrile rubber, polytetrafluoroethylene, etc. on the upper and lower surfaces of the rotor 3;

[0056] Step S7: Place the first stator 1, the second stator 2, and the rotor 3 parallel to each other and assemble them coaxially. Fix them by sequentially passing bolts 5 through each first threaded hole 15, each bearing 4, and each second threaded hole 25. The pre-tightening force is such that the rotor 3 can rotate freely without longitudinal movement, and finally, the assembly of the planar ultrasonic rotary drive motor is completed. Embodiment 1

[0057] This embodiment proposes a preparation method for a two-phase excitation drive ultrasonic motor mechanism, which specifically includes the following steps:

[0058] Step 1: The stator substrate is a PCB circuit board with an outer diameter of Φ34 mm, an inner diameter of Φ19 mm, and a thickness of 3 mm. The PCB circuit board has 3 threaded holes with an inner diameter of Φ2 mm and a depth of 3 mm, 3 circular ring slots with a depth of 3 mm, and 3 excitation input holes with an inner diameter of Φ1 mm and a depth of 3 mm. According to the above dimensions and referring to Figure 2 and 3 's structure diagram, use SolidWorks to draw the 3D model of the PCB board;

[0059] Step 2: Import the 3D model of the PCB board into Altium Designer, and complete the wiring operation and PCB circuit board processing according to the above-described wiring method for the two-phase excitation drive PCB board;

[0060] Step 3: In the designated positions of the reserved slots on the front and back sides of the PCB circuit board, use a dispensing machine to bond the piezoelectric ceramic rings in the d 33 polarization mode;

[0061] Step 4: Use a stencil to fill solder between the two piezoelectric ceramic ring particles, and then use the reflow soldering technology to weld the piezoelectric ceramic rings to the PCB circuit board;

[0062] Step 5: Grind the protruding solder down to be flush with the upper surface of the piezoelectric ceramic ring to ensure uniform contact between the upper surface of the piezoelectric ceramic ring and the rotor 3;

[0063] Step 6: Use a 3D printing device to prepare a rotor 3 with an outer diameter of Φ25 mm, an inner diameter of Φ19 mm, a thickness of 2 mm, and with slots, and bond a layer of polytetrafluoroethylene-based material on the upper and lower surfaces of the rotor 3;

[0064] Step 7: First, install 3 M2 screws with a length of 12.5 mm in the threaded holes of the two stators. Horizontally place a first stator 1, then place 3 bearings 4 at the positions of 3 corresponding threaded holes, place the rotor 3 coaxially with the first stator 1, and mirror-place the second stator 2. The pre-tightening force is such that the rotor 3 can rotate freely without longitudinal movement, and complete the assembly of the rotating mechanism with a size of Φ34 mm × 12.5 mm. Example Two

[0065] This example presents a preparation method for a four-phase excitation-driven ultrasonic motor mechanism, which specifically includes the following steps:

[0066] Step 1: The stator substrate is a PCB circuit board with an outer diameter of Φ34 mm, an inner diameter of Φ19 mm, and a thickness of 3 mm. The PCB circuit board has 3 threaded holes with an inner diameter of Φ2 mm and a depth of 3 mm, 3 circular grooves with a depth of 3 mm, and 3 excitation input holes with an inner diameter of Φ1 mm and a depth of 3 mm. According to the above dimensions and referring to the structure diagrams of Figure 3 and 4 a 3D model of the PCB board is drawn using SolidWorks;

[0067] Step 2: Import the 3D model of the PCB board into Altium Designer, and complete the wiring operation and PCB circuit board processing according to the above-described wiring method for the two-phase excitation-driven PCB board;

[0068] Step 3: In the specified positions of the reserved slots on the front and back sides of the PCB circuit board, use a dispensing machine to bond the piezoelectric ceramic rings in the d 33 polarization mode;

[0069] Step 4: Use a stencil to fill solder between the two piezoelectric ceramic ring particles, and then use reflow soldering technology to weld the piezoelectric ceramic rings to the PCB circuit board;

[0070] Step 5: Grind the protruding solder down to be flush with the upper surface of the piezoelectric ceramic ring to ensure uniform contact between the upper surface of the piezoelectric ceramic ring and the rotor 3;

[0071] Step 6: Use a 3D printing device to prepare a rotor 3 with an outer diameter of Φ25 mm, an inner diameter of Φ19 mm, a thickness of 2 mm and with grooves, and bond a layer of polytetrafluoroethylene-based material on the upper and lower surfaces of the rotor 3;

[0072] Step 7: First, install 3 M2 screws with a length of 12.5 mm in the threaded holes of the two stators. Horizontally place a first stator 1, then place 3 bearings 4 at the positions of the 3 corresponding threaded holes, and place the rotor 3 coaxially with the first stator 1. Mirror-image place the second stator 2. The pre-tightening force is such that the rotor 3 can rotate freely without longitudinal movement, and complete the assembly of the rotating mechanism with a size of Φ34 mm × 12.5 mm.

[0073] In the description of the present invention, the descriptions referring to terms such as "one embodiment", "some embodiments", "in this embodiment", "specific examples", or "some examples", etc. mean that the specific features, structures, materials, or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in a suitable manner in any one or more embodiments or examples. In addition, without contradiction, those skilled in the art can combine and combine the different embodiments or examples described in this specification and the features of different embodiments or examples.

[0074] As described above, it is only the specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.

Claims

1. A preparation method of a planar ultrasonic rotary drive motor based on PCB technology, characterized in that, It includes the following steps: Step S1, draw the 3D models of the first circular PCB board (13) and the second circular PCB board (23); Step S2, import the 3D models of the PCB boards into Altium Designer and perform wiring operations and circuit board processing operations in sequence to obtain the first circular PCB board (13) with a plurality of first threaded holes (15) and the second circular PCB board (23) with a plurality of second threaded holes (25); Step S3, use a dispensing machine to bond the first piezoelectric ceramic ring (11) and the second piezoelectric ceramic ring (12) to both ends of the first circular PCB board (13) to form the first stator (1), and bond the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22) to both ends of the second circular PCB board (23) to form the second stator (2); Step S4, use a stencil to fill solder between the first piezoelectric ceramic ring (11) and the second piezoelectric ceramic ring (12) and between the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22), and then use reflow soldering technology to solder and fix the first piezoelectric ceramic ring (11), the second piezoelectric ceramic ring (12), the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22); Step S5, grind the protruding solder until it is flush with the surface of the piezoelectric ceramic ring at the same position; Step S6, process the rotor (3) and bond a layer of friction layer material to the upper and lower surfaces of the rotor (3); Step S7, place the first stator (1), the second stator (2) and the rotor (3) parallelly and assemble them coaxially, place a plurality of bearings (4) between the first stator (1) and the second stator (2), and fix them by sequentially passing bolts (5) through each of the first threaded holes (15), each of the bearings (4) and each of the second threaded holes (25) to obtain a planar ultrasonic rotary drive motor; When the planar ultrasonic rotary drive motor is a two-phase excitation planar ultrasonic rotary drive motor, the polarization directions between the first piezoelectric ceramic ring (11), the second piezoelectric ceramic ring (12), the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22) are opposite to each other, and there is a 90-degree phase difference between the sine wave signals applied to the first piezoelectric ceramic ring (11) and the second piezoelectric ceramic ring (12) and the sine wave signals applied to the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22), so as to generate two orthogonal vibration modes on the first stator (1) and the second stator (2); When the planar ultrasonic rotary drive motor is a four-phase excited planar ultrasonic rotary drive motor, the polarization directions of the first piezoelectric ceramic ring (11), the second piezoelectric ceramic ring (12), the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22) at GND are the same. The excitation source applies an independent sine wave signal to the first piezoelectric ceramic ring (11), the second piezoelectric ceramic ring (12), the third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22) respectively to generate four independent vibration modes.

2. A planar ultrasonic rotary drive motor based on PCB technology, characterized in that, Manufactured by the manufacturing method of the planar ultrasonic rotary drive motor based on PCB technology as described in claim 1, including: A first stator (1), the first stator (1) includes a coaxially arranged first piezoelectric ceramic ring (11), a second piezoelectric ceramic ring (12) and a first circular PCB board (13). The first piezoelectric ceramic ring (11) and the second piezoelectric ceramic ring (12) are respectively fixed at both ends of the first circular PCB board (13). A plurality of through first through holes (14) and first threaded holes (15) are provided on the first circular PCB board (13). Each of the first threaded holes (15) is arranged in a circumferential array with the axis of the first circular PCB board (13) as the center. A second stator (2), the second stator (2) includes a coaxially arranged third piezoelectric ceramic ring (21), a fourth piezoelectric ceramic ring (22) and a second circular PCB board (23). The third piezoelectric ceramic ring (21) and the fourth piezoelectric ceramic ring (22) are respectively fixed at both ends of the second circular PCB board (23). A plurality of through second through holes (24) and second threaded holes (25) are provided on the second circular PCB board (23). Each of the second threaded holes (25) is arranged in a circumferential array with the axis of the second circular PCB board (23) as the center. The number of each of the second through holes (24) is the same as that of each of the first through holes (14) and their positions correspond one by one. The number of each of the second threaded holes (25) is the same as that of each of the first threaded holes (15) and their positions correspond one by one. A rotor (3), arranged between the first stator (1) and the second stator (2); A plurality of bearings (4) whose quantity is adapted to each of the first threaded holes (15) or each of the second threaded holes (25), arranged between the first stator (1) and the second stator (2). The outer peripheral walls of each of the bearings (4) are in contact with the outer peripheral wall of the rotor (3) to limit the rotor (3). The first stator (1) and the second stator (2) are fixed by bolts (5) passing through each of the first threaded holes (15), each of the bearings (4) and each of the second threaded holes (25) in sequence. When the planar ultrasonic rotary driving motor is a two-phase excitation planar ultrasonic rotary driving motor, three first through holes (14) are formed in the first circular PCB board (13), and three second through holes (24) are formed in the second circular PCB board (23). Each of the first through holes (14) and each of the second through holes (24) are used for the input of the excitation source, corresponding to SIN, COS, and GND respectively; When the planar ultrasonic rotary driving motor is a four-phase excitation planar ultrasonic rotary driving motor, five first through holes (14) are formed in the first circular PCB board (13), and five second through holes (24) are formed in the second circular PCB board (23). Each of the first through holes (14) and each of the second through holes (24) are used for the input of the excitation source, corresponding to SIN, COS, -SIN, -COS, and GND respectively.

3. The planar ultrasonic rotary drive motor based on PCB technology according to claim 2, wherein When the planar ultrasonic rotary driving motor is a two-phase excitation planar ultrasonic rotary driving motor, four groups of electrodes are symmetrically arranged at both ends of the first circular PCB board (13) and the second circular PCB board (23). Each group of electrodes is electrically connected through the first through hole (14) or the second through hole (24). The four groups of electrodes correspond to SIN, GND, COS, and GND respectively, so that the traveling waves generated by the first stator (1) and the second stator (2) drive the rotor (3) in the same direction.

4. The planar ultrasonic rotary drive motor based on PCB technology according to claim 2, wherein When the planar ultrasonic rotary driving motor is a four-phase excitation planar ultrasonic rotary driving motor, eight groups of electrodes are symmetrically arranged at both ends of the first circular PCB board (13) and the second circular PCB board (23). Each group of electrodes is electrically connected through the first through hole (14) or the second through hole (24). The eight groups of electrodes correspond to SIN, GND, COS, GND, -SIN, GND, -COS, and GND respectively, so that the traveling waves generated by the first stator (1) and the second stator (2) drive the rotor (3) in the same direction.

5. The planar ultrasonic rotary drive motor based on PCB technology according to claim 2, characterized in that, Each of the first through holes (14) is circumferentially arrayed along the axial direction of the first circular PCB board (13), and each of the second through holes (24) is circumferentially arrayed along the axial direction of the second circular PCB board (23).

6. The planar ultrasonic rotary drive motor based on PCB technology according to claim 2, wherein Three first threaded holes (15) are formed in the first circular PCB board (13), and three second threaded holes (25) are formed in the second circular PCB board (23).

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