An angular velocity sensor

Abstract

The present invention relates to the technical field of angular velocity sensors, and provides an angular velocity sensor, which includes a cover plate, a shell, an isolator, an angular velocity detection element, an electronic module and a demodulation module. The shell includes a main body and a stepped cavity. The stepped cavity includes a first cavity, a second cavity and a third cavity that are sequentially connected in a first direction. The cross-sectional areas of the first cavity, the second cavity and the third cavity decrease sequentially. The third cavity is arranged at the bottom of the stepped cavity. An internal circuit is arranged on the inner wall of the shell; an isolator is arranged in the first cavity, and a boss is arranged on the isolator; the angular velocity detection element is fixedly connected to the boss; the electronic module is arranged in the second cavity; the demodulation module is arranged in the third cavity; the angular velocity detection element, the electronic module and the demodulation module are all electrically connected to the internal circuit. The angular velocity sensor of the embodiment of the present invention arranges the angular velocity detection element, the isolator, the electronic module and the demodulation module in the stepped cavity from top to bottom in sequence. This vertical layout can improve space utilization.

Description

Technical Field

[0001] The present invention relates to the technical field of angular velocity sensors, and in particular to an angular velocity sensor. Background Art

[0002] As an inertial sensor, gyroscopes are widely used to measure the angular velocity of various carriers and are crucial for the carrier's attitude measurement and control, navigation and guidance systems. With the development of technology, micromechanical gyroscopes have gradually become the mainstream choice due to their low cost, stable performance, strong environmental adaptability, and personalized customization. They are especially widely used in industrial drones such as surveying and mapping, logistics, and inspection, intelligent driving, commercial aerospace, and unmanned ships. However, traditional discrete quartz micromechanical gyroscopes have a complex structure, resulting in a large overall size, making them difficult to integrate into application scenarios with strict size requirements. Summary of the invention

[0003] The present invention provides a small-volume angular velocity sensor, which is used to solve the defect that the angular velocity sensor in the prior art is large in volume.

[0004] The present invention provides an angular velocity sensor, comprising:

[0005] Cover plate;

[0006] A housing, the housing comprising a main body and a stepped cavity, the cover plate being connected to the housing so as to seal the stepped cavity, the stepped cavity comprising a first cavity, a second cavity and a third cavity sequentially connected in a first direction, the cross-sectional areas of the first cavity, the second cavity and the third cavity decreasing sequentially, the third cavity being arranged at the bottom of the stepped cavity, and an internal circuit being arranged on the inner wall of the housing;

[0007] An isolating member, the isolating member is arranged in the first cavity, and a boss is provided on the isolating member;

[0008] An angular velocity detection member, the angular velocity detection member is fixedly connected to the boss;

[0009] an electronic module, wherein the electronic module is disposed in the second cavity;

[0010] A demodulation module, wherein the demodulation module is disposed in the third cavity;

[0011] The angular velocity detection element, the electronic module and the demodulation module are all electrically connected to the internal circuit.

[0012] In some embodiments, two groups of first electrode plates are arranged at intervals on a side of the angular velocity detecting member facing away from the boss, two groups of second electrode plates are arranged at intervals on the isolating member, the two groups of first electrode plates correspond to the two groups of second electrode plates one by one and are connected by gold wires, a first step portion is provided in the first cavity, a third electrode plate is provided on the first step portion, and the isolating member is connected to the third electrode plate by conductive silver glue.

[0013] In some embodiments, a plurality of groups of fourth electrode plates are provided on the bottom wall of the second cavity, the opening of the third cavity is formed on the bottom wall of the second cavity, the fourth electrode plates and the opening of the third cavity are spaced apart in a second direction, the second direction is orthogonal to the first direction, the electronic module is electrically connected to the fourth electrode plates, and a portion of the demodulation module extends into the second cavity.

[0014] In some embodiments, four groups of fifth electrode plates are provided on the bottom wall of the second cavity, and the four groups of fifth electrode plates are respectively arranged around the opening of the third cavity, the demodulation module is electrically connected to the fifth electrode plates, and the demodulation module is fixedly connected to the bottom wall of the third cavity.

[0015] In some embodiments, the angular velocity sensor includes a shielding ring, which is disposed between the cover plate and the main body, and the cover plate and the main body are both connected to the shielding ring by welding.

[0016] In some embodiments, a first protrusion is provided on a surface of the cover plate that cooperates with the shell, and the first protrusion can extend into the shielding ring.

[0017] In some embodiments, a second protrusion is disposed on the first protrusion, and the second protrusion can extend between two groups of the first electrode plates.

[0018] In some embodiments, a sixth electrode plate is disposed on the inner circumferential wall of the first cavity, a seventh electrode plate is disposed on the end surface where the shell and the cover plate cooperate, and both the sixth electrode plate and the seventh electrode plate are grounded.

[0019] In some embodiments, the housing is provided with a plurality of first holes extending along the first direction, first wires are provided in the first holes, and the internal circuit includes the first wires;

[0020] And / or, a plurality of second holes extending along the second direction are provided in the shell, second wires are provided in the second holes, and the internal circuit includes the second wires.

[0021] In some embodiments, a shielding electrode plate is provided on a side of the isolation member facing away from the boss, and the shielding electrode plate is grounded.

[0022] The angular velocity sensor of the embodiment of the present invention arranges the angular velocity detection element, the isolation element, the electronic module and the demodulation module in the stepped cavity from top to bottom in sequence. Compared with the planar layout, this vertical layout can improve the space utilization rate. In addition, an internal circuit is arranged on the inner wall of the shell, which not only reduces the number and complexity of external wiring, avoids signal interference and increased power consumption caused by long-distance wiring, but also makes full use of the space inside the shell, so that the components can be arranged compactly, further reducing the volume of the angular velocity sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a schematic diagram of the cross-sectional structure of the angular velocity sensor provided by the present invention.

[0025] Figure 2 It is a schematic diagram of the top view of the angular velocity sensor provided by the present invention, wherein the isolation member is partially cut to show the electronic module and the demodulation module.

[0026] Reference numerals:

[0027] 100, angular velocity sensor; 1, housing; 10, stepped cavity; 11, first cavity; 111, first step portion; 1111, third electrode plate; 1112, conductive silver paste; 1113, positioning mark; 112, sixth electrode plate; 12, second cavity; 121, fourth electrode plate; 122, fifth electrode plate; 13, third cavity; 14, seventh electrode plate; 15, first hole; 16, second hole; 17, body;

[0028] 2. angular velocity detection member; 21. first electrode plate; 3. isolating member; 31. boss; 32. second electrode plate; 33. supporting portion; 34. shielding electrode plate; 35. eighth electrode plate; 4. electronic module; 5. demodulation module; 6. shielding ring; 7. cover plate; 71. first protruding portion; 72. second protruding portion;

[0029] 8. The first axis. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] like Figure 1 and Figure 2 As shown, an embodiment of the present invention discloses an angular velocity sensor 100 , including a housing 1 , a cover plate 7 , an isolating element 3 , an angular velocity detecting element 2 , an electronic module 4 and a demodulating module 5 .

[0032] The shell 1 includes a main body 17 and a stepped cavity 10. The cover plate 7 is connected to the shell 1 to seal the stepped cavity 10. The stepped cavity 10 includes a first cavity 11, a second cavity 12 and a third cavity 13 which are connected in sequence in a first direction. The cross-sectional areas of the first cavity 11, the second cavity 12 and the third cavity 13 decrease in sequence. The third cavity 13 is arranged at the bottom of the stepped cavity 10. An internal circuit is arranged on the inner wall of the shell 1.

[0033] The isolation member 3 is disposed in the first cavity 11 , and a boss 31 is disposed on the isolation member 3 .

[0034] The angular velocity detecting member 2 is fixedly connected to the boss 31 .

[0035] The electronic module 4 is disposed in the second cavity 12 .

[0036] The demodulation module 5 is disposed in the third cavity 13 .

[0037] The angular velocity detection element 2, the electronic module 4 and the demodulation module 5 are all electrically connected to the internal circuit.

[0038] For example, Figure 1 As shown, in order to make the technical solution of the present application easier to understand, the technical solution of the present application is further described below by taking the first direction being consistent with the up-down direction as an example, wherein the up-down direction is as shown in FIG. Figure 1 shown.

[0039] The housing 1 is an LCC tube housing, and the first cavity 11, the second cavity 12 and the third cavity 13 are arranged in sequence from top to bottom.

[0040] The lower surface of the angular velocity detection member 2 is fixedly connected to the boss 31 , and the angular velocity detection member 2 includes an angular velocity detection sensitive unit.

[0041] The electronic module 4 includes electronic components adapted to the demodulation module 5 , such as resistors and capacitors, etc. The demodulation module 5 is used to process the signal from the angular velocity detection element 2 .

[0042] The isolator 3 is provided with a plurality of hollow structures arranged at intervals, so that when the housing 1 vibrates and the temperature changes outside the housing 1, causing the housing 1 to be deformed by thermal stress, the isolator 3 can provide a certain elastic deformation space, thereby reducing the direct impact of these external forces on the angular velocity detector 2. The material of the isolator 3 has the same or similar thermodynamic properties as the material of the angular velocity detector 2, thereby effectively reducing the stress generated by the mismatch of thermal expansion coefficients of different materials and reducing the risk of detection failure of the angular velocity detector 2 due to the fracture of the connection between the boss 31 and the angular velocity detector 2.

[0043] An internal circuit is provided in the inner wall of the housing 1. For example, a hole is punched in the inner wall of the housing 1, and then a wire is arranged in the hole to form the internal circuit. This wiring method can effectively utilize the space inside the housing 1 and effectively reduce the volume of the angular velocity sensor 100.

[0044] The angular velocity detection element 2, the electronic module 4 and the demodulation module 5 are all connected to the corresponding internal circuits so that the angular velocity sensor 100 can operate normally. The angular velocity sensor 100 of the embodiment of the present invention optimizes the wiring structure by routing the wires in the inner wall of the housing 1, thereby reducing the risk of signal interference.

[0045] The angular velocity sensor 100 of the embodiment of the present invention arranges the angular velocity detection element 2, the isolator 3, the electronic module 4 and the demodulation module 5 in the stepped cavity 10 from top to bottom. Compared with the planar layout, this vertical layout can improve the space utilization. In addition, an internal circuit is arranged on the inner wall of the housing 1, which not only reduces the number and complexity of external wiring, avoids signal interference and increased power consumption caused by long-distance wiring, but also makes full use of the space inside the housing 1, so that each component can be arranged compactly, further reducing the volume of the angular velocity sensor 100.

[0046] Therefore, the angular velocity sensor 100 according to the embodiment of the present invention has the advantages of small size and the like.

[0047] In some embodiments, two groups of first electrode plates 21 arranged at intervals are provided on a side of the angular velocity detection member 2 facing away from the boss 31, two groups of second electrode plates 32 are provided on the isolation member 3, the two groups of first electrode plates 21 correspond to the two groups of second electrode plates 32 one by one and are connected by gold wires, a first step portion 111 is provided in the first cavity 11, a third electrode plate 1111 is provided on the first step portion 111, and the isolation member 3 is connected to the third electrode plate 1111 through a conductive silver glue 1112.

[0048] For example, Figure 1As shown, the side of the angular velocity detector 2 facing away from the boss 31 is the upper surface of the angular velocity detector 2. Two groups of first electrode plates 21 are arranged at intervals in the left-right direction on the upper surface of the angular velocity detector 2, one group is for driving signals and the other is for detection signals.

[0049] The upper surface of the isolating member 3 is provided with two groups of second electrode plates 32 arranged at intervals, and the left and right edges of the lower surface of the isolating member 3 are provided with two groups of eighth electrode plates 35 corresponding to the positions of the second electrode plates 32. A first step portion 111 is formed at the connection between the first cavity 11 and the second cavity 12, and two groups of third electrode plates 1111 arranged at intervals are provided on the first step portion 111. The eighth electrode plate 35 is bonded and connected to the third electrode plate 1111 through a conductive silver glue 1112, so that the electrical signal is conducted. Since the conductive silver glue 1112 is elastic, it undergoes elastic deformation when subjected to external force, and absorbs and stores energy in the process. When the external force disappears, the conductive silver glue 1112 gradually returns to its original state and releases the stored energy. Therefore, due to the damping characteristics of the conductive silver glue 1112, part of the mechanical energy of the vibration of the housing 1 can be converted into heat energy or other forms of energy dissipation, thereby reducing the influence of the vibration of the housing 1 on the angular velocity detection member 2.

[0050] The first electrode plate 21 is electrically connected to the second electrode plate 32 through gold wire bonding, the second electrode plate 32 is electrically connected to the eighth electrode plate 35 through the side wall electrode of the isolation member 3, and the eighth electrode plate 35 is electrically connected to the third electrode plate 1111 through the conductive silver paste 1112. Thus, the signal detected by the angular velocity detection member 2 can be transmitted to the third electrode plate 1111 through the first electrode plate 21, and then transmitted to the demodulation module 5.

[0051] In other embodiments, two groups of spaced-apart support portions 33 are provided at the bottom of the isolation member 3, and only two groups of support portions 33 are in contact with the first step portion 111 of the shell 1. The two groups of support portions 33 are arranged at both ends of the isolation member 3. Thus, a smaller contact area can reduce the possibility of external vibration and noise being transmitted through the shell 1 to the inside of the shell 1, thereby reducing the impact of external interference on the angular velocity detection member 2.

[0052] Alternatively, if Figure 2 As shown, a positioning mark 1113 is provided on the first step portion 111 to facilitate installation of the isolation member 3 and ensure installation accuracy.

[0053] In some embodiments, a plurality of fourth electrode plates 121 are provided on the bottom wall of the second cavity 12, an opening of the third cavity 13 is formed on the bottom wall of the second cavity 12, the fourth electrode plates 121 and the opening of the third cavity 13 are arranged at intervals in a second direction, the second direction is orthogonal to the first direction, and the electronic module 4 is electrically connected to the fourth electrode plate 121.

[0054] For example, in order to make the technical solution of the present application easier to understand, the technical solution of the present application is further described below by taking the second direction being consistent with the left-right direction as an example, wherein the left-right direction is as follows: Figure 1 shown.

[0055] The top end of the demodulation module 5 extends into the second cavity 12, that is, the size of the third cavity 13 in the vertical direction is smaller than the size of the demodulation chip in the vertical direction. Therefore, the demodulation module 5 and the gold wire bonded between the demodulation module 5 and the fifth electrode plate 122 can utilize the space of the second cavity 12, thereby reducing the size of the third cavity 13 in the vertical direction, and further reducing the size of the angular velocity sensor 100 in the vertical direction.

[0056] In some embodiments, four groups of fifth electrode plates 122 are provided on the bottom wall of the second cavity 12, and the four groups of fifth electrode plates 122 are respectively arranged around the opening of the third cavity 13, and the demodulation module 5 is electrically connected to the fifth electrode plates 122 through gold wire bonding, and the demodulation module 5 is fixedly connected to the bottom wall of the third cavity 13.

[0057] For example, Figure 1 As shown, the third cavity 13 is square in shape, and four groups of fifth electrode plates 122 are arranged on the four walls of the bottom wall of the second cavity 12 close to the third cavity 13, and each electrode plate of the four groups of fifth electrode plates 122 is electrically connected to the demodulation module 5, and the bottom of the demodulation module 5 is bonded or welded to the third cavity 13. Thus, not only a reliable electrical connection between the demodulation module 5 and the electrode plates is ensured, but also the demodulation module 5 is fixed in the third cavity 13, thereby enhancing the stability and reliability of the demodulation module 5.

[0058] In some embodiments, the angular velocity sensor 100 includes a shielding ring 6 , which is disposed between the cover plate 7 and the main body 17 , and the cover plate 7 and the main body 17 are both connected to the shielding ring 6 by welding.

[0059] like Figure 1 As shown, the cover plate 7 and the shielding ring 6 are both made of metal, and the cover plate 7, the shielding ring 6 and the main body 17 are welded together to form a whole, so that the internal space of the housing 1 is completely isolated from the external environment. Therefore, the angular velocity sensor 100 of the embodiment of the present invention has good sealing performance, and can effectively prevent the intrusion of external moisture, dust and other pollutants, thereby improving the adaptability of the angular velocity sensor 100 under harsh environmental conditions, and further improving the reliability and service life of the angular velocity sensor 100.

[0060] In some embodiments, a first protrusion 71 is provided on a surface of the cover plate 7 that cooperates with the housing 1 , and the first protrusion 71 can extend into the shielding ring 6 .

[0061] In some embodiments, a second protrusion 72 is disposed on the first protrusion 71 , and the second protrusion 72 can extend between the two groups of first electrode plates 21 .

[0062] For example, the cover plate 7 is made of metal, and the lower surface of the cover plate 7 has two protrusions, one large and one small, namely a larger first protrusion 71 and a smaller second protrusion 72, wherein the size of the first protrusion 71 is smaller than the size of the shielding ring 6. When the cover plate 7 is installed on the housing 1, the first protrusion 71 can be embedded in the middle area of ​​the shielding ring 6, thereby enhancing the shielding effect of the signal. At this time, the second protrusion 72 extends between the two groups of first electrode plates 21, thereby being able to Figure 1 The gold wire connecting the first electrode plate 21 and the second electrode plate 32 on the left side Figure 1 The gold wires connected to the first electrode plate 21 and the second electrode plate 32 on the right are separated to isolate signal crosstalk between the two groups of gold wires and avoid signal coupling between the two groups of gold wires and electrodes in space, which is beneficial to reduce the overall noise of the angular velocity sensor 100 and improve the overall performance of the angular velocity sensor 100.

[0063] In some embodiments, a sixth electrode plate 112 is disposed on the inner wall of the first cavity 11, and a seventh electrode plate 14 is disposed on the end surface where the shell 1 and the cover plate 7 cooperate. Both the sixth electrode plate 112 and the seventh electrode plate 14 are grounded.

[0064] For example, Figure 1 As shown, the sixth electrode plate 112 is connected to the seventh electrode plate 14, and the seventh electrode plate 14 is connected to the shielding ring 6, so that the sixth electrode plate 112, the seventh electrode plate 14, the shielding ring 6 and the cover plate 7 are connected to form a signal shielding layer, thereby preventing external signals from entering the shell 1 from above the shell 1 and interfering with the normal operation of the angular velocity detection component 2.

[0065] In some embodiments, a plurality of first holes 15 extending along a first direction are disposed in the housing 1 , first wires are disposed in the first holes 15 , and the internal circuit includes the first wires.

[0066] In some embodiments, a plurality of second holes 16 extending along the second direction are disposed in the housing 1 , second wires are disposed in the second holes 16 , and the internal circuit includes the second wires.

[0067] For example, Figure 1As shown, a plurality of first holes 15 extending in the up-down direction are provided in the housing 1, and a first wire is arranged in the first hole 15 according to design requirements. A plurality of second holes 16 extending in the left-right direction are provided in the housing 1, and a second wire is arranged in the second hole 16 according to design requirements. Thus, the first hole 15 and / or the second hole 16 with an appropriate distance can be selected for wiring according to design requirements, which reduces the need for external wiring on the one hand, and effectively avoids signal interference and increased power consumption caused by long-distance wiring on the other hand, further improving the performance and reliability of the angular velocity sensor 100.

[0068] It can be understood that each component in the stepped cavity 10 is connected to a corresponding port of the internal circuit according to design requirements.

[0069] In some embodiments, a shielding electrode plate 34 is provided on the side of the isolating member 3 facing away from the boss 31, and the shielding electrode plate 34 is grounded. The side of the isolating member 3 facing away from the boss 31 is the lower surface of the isolating member 3, and a shielding electrode plate 34 is provided on the lower surface of the isolating member 3. Since the internal space of the shell 1 is limited and the distances between different signals are close, sensitive signals are easily affected by other signals inside the shell 1. For example, there are high-frequency signals in the resistors, capacitors and circuits of the demodulation module 5 of the electronic module 4, and these high-frequency signals have strong interference with the sensitive signals on the angular velocity detection member 2. Therefore, a large-area shielding electrode is designed on the back of the isolating member 3, and it is grounded to form a signal shielding layer, thereby shielding the influence of the high-frequency signals of the electronic module 4 and the demodulation module 5 below the angular velocity detection member 2 on the angular velocity detection member 2.

[0070] Optionally, the shielding electrode is a zinc-plated layer, a gold-plated layer, a nickel-plated layer, etc.

[0071] On the outer side of the shell 1, the junction of two adjacent walls is rounded, or a notch with a fan-shaped cross section is provided at the junction, so as to prevent the shell 1 from being damaged or cracked when subjected to force or impact vibration.

[0072] In the stepped cavity 10 inside the shell 1 , the junction between two adjacent walls is rounded to increase the structural strength of the junction and avoid cracking at the junction of the walls inside the shell 1 .

[0073] Optionally, the sensitive axis of the angular velocity detection sensitive unit is the extension direction of the first axis 8, that is, Figure 2 The direction perpendicular to the left and right directions.

[0074] Optionally, the demodulation module 5 adopts an integrated design, including a closed-loop control circuit at the driving end, a signal modulation circuit at the detection end, a main control unit and ADC and DAC processing control circuit parts, and has SPI and I2C communication functions.

[0075] The angular velocity sensor 100 of the embodiment of the present invention connects the sixth electrode plate 112, the seventh electrode plate 14, the shielding ring 6 and the cover plate 7 to form a signal shielding layer above the angular velocity detection element 2, thereby preventing external signals from entering the shell 1 from above the shell 1 to interfere with the normal operation of the angular velocity detection element 2. The second protrusion 72 can extend between the gold wires connecting the two groups of first electrode plates 21 and the second electrode plates 32, thereby avoiding the interference of the two groups of gold wires on the angular velocity detection element 2. A shielding electrode plate 34 is provided on the lower surface of the isolation member 3, thereby shielding the influence of the high-frequency signals of the electronic module 4 and the demodulation module 5 below the angular velocity detection element 2 on the angular velocity detection element 2. Therefore, the angular velocity sensor 100 of the embodiment of the present invention performs all-round noise reduction on the angular velocity detection element 2, thereby improving the accuracy of the angular velocity sensor 100.

[0076] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. An angular velocity sensor, characterized in that: include: Cover plate (7); A housing (1), the housing (1) comprising a main body (17) and a stepped cavity (10), the cover plate (7) being connected to the housing (1) so as to seal the stepped cavity (10), the stepped cavity (10) comprising a first cavity (11), a second cavity (12) and a third cavity (13) which are connected in sequence in a first direction, the cross-sectional areas of the first cavity (11), the second cavity (12) and the third cavity (13) decreasing in sequence, the third cavity (13) being arranged at the bottom of the stepped cavity (10), and an internal circuit being arranged on the inner wall of the housing (1); An isolating member (3), the isolating member (3) being arranged in the first cavity (11), the isolating member (3) being provided with a boss (31), the isolating member (3) being provided with a plurality of hollow structures arranged at intervals, and the bottom of the isolating member (3) being provided with two groups of support portions (33) arranged at intervals; An angular velocity detection component (2), the angular velocity detection component (2) being fixedly connected to the boss (31); an electronic module (4), the electronic module (4) being arranged in the second cavity (12); A demodulation module (5), the demodulation module (5) being arranged in the third cavity (13); The angular velocity detection element (2), the electronic module (4) and the demodulation module (5) are all electrically connected to the internal circuit; Two groups of first electrode plates (21) arranged at intervals are provided on a side of the angular velocity detection member (2) facing away from the boss (31), and two groups of second electrode plates (32) arranged at intervals are provided on an upper surface of the isolation member (3), the two groups of the first electrode plates (21) and the two groups of the second electrode plates (32) corresponding one to one and connected via gold wires; The left and right edges of the lower surface of the isolation member (3) are provided with two groups of eighth electrode plates (35) corresponding to the positions of the second electrode plates (32); a first step portion (111) is provided at the connection between the first cavity (11) and the second cavity (12); two groups of third electrode plates (1111) arranged at intervals are provided on the first step portion (111); and the eighth electrode plates 35 are connected to the third electrode plates (1111) via conductive silver glue (1112); The angular velocity sensor comprises a shielding ring (6), wherein the shielding ring (6) is arranged between the cover plate (7) and the main body (17), and the cover plate (7) and the main body (17) are both welded to the shielding ring (6); A first protrusion (71) is provided on a surface of the cover plate (7) that cooperates with the housing (1), and the first protrusion (71) can extend into the shielding ring (6); A second protrusion (72) is provided on the first protrusion (71), and the second protrusion (72) is capable of extending between two groups of the first electrode plates (21) so as to separate the two gold wires connecting the first electrode plate (21) and the second electrode plate (32); A shielding electrode plate (34) is provided on a side of the isolation member (3) facing away from the boss (31), and the shielding electrode plate (34) is grounded.

2. The angular velocity sensor according to claim 1, characterized in that A plurality of groups of fourth electrode plates (121) are provided on the bottom wall of the second cavity (12); an opening of the third cavity (13) is formed on the bottom wall of the second cavity (12); the fourth electrode plates (121) and the opening of the third cavity (13) are arranged at intervals in a second direction, the second direction being orthogonal to the first direction; the electronic module (4) is electrically connected to the fourth electrode plates (121); and a portion of the demodulation module (5) extends into the second cavity (12).

3. The angular velocity sensor according to claim 1, characterized in that: Four groups of fifth electrode plates (122) are provided on the bottom wall of the second cavity (12), and the four groups of fifth electrode plates (122) are respectively arranged around the opening of the third cavity (13), the demodulation module (5) is electrically connected to the fifth electrode plates (122), and the demodulation module (5) is fixedly connected to the bottom wall of the third cavity (13).

4. The angular velocity sensor according to claim 1, characterized in that: A sixth electrode plate (112) is provided on the inner peripheral wall of the first cavity (11), a seventh electrode plate (14) is provided on the end surface of the housing (1) that cooperates with the cover plate (7), and both the sixth electrode plate (112) and the seventh electrode plate (14) are grounded.

5. The angular velocity sensor according to claim 2, characterized in that: The housing (1) is provided with a plurality of first holes (15) extending along the first direction, a first wire is provided in the first hole (15), and the internal circuit includes the first wire; And / or, a plurality of second holes (16) extending along the second direction are provided in the housing (1), second wires are provided in the second holes (16), and the internal circuit includes the second wires.

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