Gyroscope structure, chip, gyroscope and electronic equipment

Abstract

A gyroscope structure, a chip, a gyroscope and an electronic device, the gyroscope structure comprises a substrate and a structural layer, the structural layer comprises an anchor point, a first elastic structure, a second elastic structure, a third elastic structure, a lever, a first mass block and a second mass block, the anchor point is connected with the substrate, the third elastic structure is used for connecting the anchor point with the lever, and the second elastic structure is used for connecting the first mass block and the second mass block. The first elastic structure is used for connecting the lever with the first mass block, and the second elastic structure is used for connecting the lever with the second mass block. Therefore, the orthogonality problem caused by micromachining manufacturing can be inhibited and counteracted through torsion of the first lever, and the precision and the stability of the gyroscope are improved.

Description

Technical Field

[0001] The embodiments of the present application relate to the technical field of sensors, and in particular to a gyroscope structure, a chip, a gyroscope, and an electronic device. Background Art

[0002] A gyroscope is a type of sensor that can sense the angular velocity in space. By integrating the angular velocity, information such as the rotation angle, the attitude of the carrier, and the moving coordinate system can be obtained. The gyroscope technology manufactured by micromachining, also known as the micro electromechanical system (MEMS) gyroscope, has the advantages of small size, low cost, and low power consumption.

[0003] The MEMS gyroscope uses the physical principle of the Coriolis force to sense the angular velocity. That is, on the basis of controlling the mass block structure to perform a linear motion, an angular velocity input is set in the direction orthogonal to the linear motion direction, and a Coriolis force will be generated in the third orthogonal axis direction. Generally, the mode of the mechanical resonator is used as the realization of the linear motion, that is, the driving mode, and another mechanical mode is used to realize the Coriolis force detection, that is, the detection mode. Therefore, by reasonably detecting the mechanical displacement of the mass block caused by the Coriolis force, the angular velocity information can be obtained.

[0004] According to the principle of the Coriolis effect, the driving mode and the detection mode should be strictly orthogonal, that is, the mechanical displacement generated in the third orthogonal axis direction only comes from the Coriolis effect caused by the angular velocity input. However, there are always some non-ideality in the structural and dimensional parameters in micromachining manufacturing, resulting in the driving and detection modes not being able to ensure strict orthogonality, and the displacement of the driving mode will be projected onto the detection mode, destroying the accuracy and stability of the gyroscope. Summary of the Invention

[0005] The embodiments of the present application provide a gyroscope structure for avoiding the orthogonality problem caused by structural manufacturing errors and improving the accuracy and stability of the gyroscope. The embodiments of the present application also provide corresponding chips, gyroscopes, and electronic devices.

[0006] In the first aspect of the present application, a gyroscope structure is provided. The gyroscope structure includes a substrate and a first structural layer. The first structural layer includes a fixed anchor, a first elastic structure, a second elastic structure, a first lever, a third elastic structure, a first mass, and a second mass. Among them, the fixed anchor is connected to the substrate, the third elastic structure is used to connect the fixed anchor to the first lever, the first elastic structure is used to connect the first lever to the first mass, and the second elastic structure is used to connect the first lever to the second mass; the first mass and the second mass are mirror-symmetrical along a first center line, and the first center line is perpendicular to the torque direction of the first lever.

[0007] The first structural layer in this application is a symmetric structure, which is not only symmetric left and right but also symmetric up and down. Based on the top view of the first structural layer, the first center line is located exactly in the middle of the left and right sides of the first structural layer, and the second center line is located exactly in the middle of the upper and lower sides of the first structural layer.

[0008] In this application, the third elastic structure has the freedom to twist around the first center line, that is, the freedom to rotate in the Y-axis direction. Therefore, the first lever will also rotate in the Y-axis direction. At this time, the moment direction of the first lever is the X-axis direction. No matter how the shape of the first lever changes, the moment direction of the first lever is the X-axis direction; the first center line can also be in the same plane as the first lever. When the first center line is perpendicular to the X-axis direction and the first mass block and the second mass block are mirror-symmetric along the first center line, it can be determined that the first center line is located in the middle position between the left and right sides of the first structural layer, and the second center line is the same.

[0009] In this application, the connection method between the fixed anchor point and the substrate is a fixed connection, thereby fixedly connecting the entire first structural layer to the substrate. The process method for connecting the fixed anchor point to the substrate can be a bonding process, such as gold-silicon bonding, aluminum-germanium bonding, anodic bonding, fusion bonding, and glass (glass-frit) bonding, etc.

[0010] In this application, the first elastic structure and the second elastic structure have the displacement freedom in the X-axis direction and have a large displacement stiffness in the Y-axis direction. For example, the displacement stiffness of the first elastic structure and the second elastic structure in the Y-axis direction is more than twice that in the X-axis direction, that is, the first elastic structure can support the first mass block to displace in the X-axis direction but restricts the first mass block to displace in the Y-axis direction, and the second elastic structure supports the second mass block to displace in the X-axis direction but restricts the second mass block to displace in the Y-axis direction. The third elastic structure has the freedom to twist around the first center line, that is, the freedom to rotate in the Y-axis direction. At the same time, the third elastic structure has a large rotational stiffness in the X-axis and Z-axis directions. For example, the rotational stiffness of the third elastic structure in the X-axis direction is more than twice that in the Y-axis direction, that is, the third elastic structure can support the first lever to rotate in the Y-axis direction but restricts the first lever to rotate in the X-axis direction and also restricts the first lever to rotate in the Z-axis direction. The third elastic structure can specifically be a straight beam or a folded beam along the Y-axis, etc.

[0011] In this application, when using the gyroscope structure provided by the embodiments of this application, the gyroscope structure is installed on a target object. When the target object rotates or turns around the Y-axis in space, an angular velocity input will be generated, and this angular velocity input will also be transmitted to the first structural layer. Since both the first direction and the second direction are perpendicular to the first center line, it shows that both the first direction and the second direction are along the X-axis direction. When the first mass block is subjected to a driving force along the first direction, the first elastic structure has no constraint in the X-axis direction, so that the first mass block will also displace along the first direction. Similarly, when the second mass block is subjected to a driving force along the second direction, the second elastic structure has no constraint in the X-axis direction, so that the second mass block will also displace along the second direction. Due to the Coriolis effect, on the basis of the displacement along the X-axis, an angular velocity input of the Y-axis is superimposed, and the first mass block and the second mass block will also generate two displacements in opposite directions in the Z-axis direction. By detecting the displacement amounts of the first mass block and the second mass block in the Z-axis direction, the horizontal axis angular velocity information can be obtained.

[0012] In this application, the structural force balance of the first mass block and the second mass block in the Z-axis direction is achieved by the first lever in the first structural layer twisting around the first center line. The moment of inertia caused by the manufacturing errors of the first elastic structure and the second elastic structure on the first mass block and the second mass block can be suppressed and canceled out by the twisting of the first lever around the Y-axis, reducing the orthogonal angular velocity.

[0013] In the first aspect, the gyroscope structure includes a substrate and a structural layer. The structural layer includes an anchor point, a first elastic structure, a second elastic structure, a third elastic structure, a lever, a first mass block, and a second mass block. Among them, the anchor point is connected to the substrate, and the third elastic structure is used to connect the anchor point and the lever. The first elastic structure is used to connect the lever and the first mass block, and the second elastic structure is used to connect the lever and the second mass block. Therefore, the orthogonal problem caused by the structural manufacturing error of the elastic structure caused by micromachining manufacturing can be suppressed and canceled out by the twisting of the first lever, improving the accuracy and stability of the gyroscope.

[0014] In a possible implementation manner of the first aspect, the gyroscope structure further includes a detection electrode. The detection electrode is located between the substrate and the first structural layer. The detection electrode is used to output a detection electrical signal based on the displacement of the first mass block along the third direction and the displacement of the second mass block along the fourth direction. The third direction is perpendicular to the first center line, and the third direction is perpendicular to the first direction and located in different planes. The third direction is opposite to the fourth direction.

[0015] In this possible implementation, the first detection electrode and the first mass form a first parallel-plate capacitor, and the second detection electrode and the second mass form a second parallel-plate capacitor. Under the input of angular velocity, the differential detection displacement caused by the Coriolis force will increase the distance between the plates of the first parallel-plate capacitor and decrease the distance between the plates of the second parallel-plate capacitor. Therefore, a differential capacitance change is directly generated, and this change can be read through an electrical signal amplifier to output a detection electrical signal, improving the feasibility of the solution.

[0016] In a possible implementation of the first aspect, the first structural layer further includes a first driving structure and a second driving structure. The first driving structure is connected to the substrate and coupled to the first mass, and the second driving structure is connected to the substrate and coupled to the second mass. The first driving structure is configured to drive the first mass to displace in a first direction, and the second driving structure is configured to drive the second mass to displace in a second direction. The first direction is perpendicular to the first center line, and the first direction is opposite to the second direction.

[0017] In this possible implementation, both the first driving structure and the second driving structure include driving fixed comb teeth and a comb structure. The driving fixed comb teeth and the comb structure are connected to the substrate. When a DC and an AC signal are applied to the driving fixed comb teeth, the electrostatic force generated within the first driving structure will drive the first mass and the first elastic structure to displace in the first direction along the X-axis, and the electrostatic force generated within the second driving structure will drive the second mass and the second elastic structure to displace in the second direction along the X-axis, improving the feasibility of the solution.

[0018] In a possible implementation of the first aspect, the first driving structure and the second driving structure are mirror-symmetric along the first center line.

[0019] In this possible implementation, the symmetric first driving structure and second driving structure are beneficial to the processing and manufacturing of the entire first structural layer, reducing the complexity of the process flow.

[0020] In a possible implementation of the first aspect, the first structural layer further includes a first driving detection structure and a second driving detection structure. The first driving detection structure is connected to the substrate and coupled to the first mass, and the second driving detection structure is connected to the substrate and coupled to the second mass. The first driving detection structure is configured to convert the first displacement signal generated by the displacement of the first mass into a first electrical signal for output, and the second driving detection structure is configured to convert the second displacement signal generated by the displacement of the second mass into a second electrical signal for output.

[0021] In this possible implementation, both the first driving and detecting structure and the second driving and detecting structure include driving and detecting comb teeth and comb structures. The driving and detecting comb teeth and the comb structures are connected to the substrate. The driving and detecting comb teeth can convert the mechanical displacement signals of the first mass block and the second mass block along the X-axis into the first electrical signal and the second electrical signal for output. The first electrical signal and the second electrical signal serve as feedback signals, and after passing through circuit links such as phase shift and amplification, they are returned to the driving comb teeth to realize the closed-loop oscillation of the driving mode, improving the feasibility of the solution.

[0022] In a possible implementation of the first aspect, the first driving and detecting structure and the second driving and detecting structure are mirror-symmetrical along the first center line.

[0023] In this possible implementation, the symmetrical first driving and detecting structure and the second driving and detecting structure are beneficial to the processing and manufacturing of the entire first structural layer, reducing the complexity of the process flow.

[0024] In a possible implementation of the first aspect, the first elastic structure and the second elastic structure are mirror-symmetrical along the first center line.

[0025] In this possible implementation, the first elastic structure and the second elastic structure are also mirror-symmetrical along the first center line, making the entire first structural layer mirror-symmetrical along the first center line, improving the feasibility of the solution.

[0026] In a possible implementation of the first aspect, the number of the first elastic structures is at least two, and the number of the second elastic structures is at least two.

[0027] In this possible implementation, the number of the first elastic structures and the second elastic structures can both be multiple, improving the feasibility of the solution.

[0028] In a possible implementation of the first aspect, the third elastic structure is located at the center of the first lever.

[0029] In this possible implementation, the first lever is connected to the third elastic structure along the center point of the first structural layer in the X-axis direction. At this time, when the first lever twists around the first center line, the displacements of both ends of the first lever along the Z-axis direction (which can also be understood as the force transmission ratio) are 1:1, achieving torsional symmetry.

[0030] In a possible implementation of the first aspect, the first elastic structure is a spring or a folded beam, the second elastic structure is a spring or a folded beam, and the third elastic structure is a spring, a straight beam or a folded beam.

[0031] In this possible implementation, there are various possible implementations for the first elastic structure, the second elastic structure and the third elastic structure, improving the feasibility of the solution.

[0032] In a possible implementation of the first aspect, the first structural layer further includes a fourth elastic structure for connecting the first mass block and the second mass block.

[0033] In this possible implementation, when the first mass block and the second mass block move in opposite directions along the X-axis direction, the fourth elastic structure has the same displacement amplitude, that is, the fourth elastic structure participates in the reverse displacement of the first mass block and the second mass block, providing displacement stiffness. When the first mass block and the second mass block move in the same direction along the X-axis direction, the fourth elastic structure has no displacement, or the displacement is much smaller than the case where the first mass block and the second mass block move in opposite directions along the X-axis direction, that is, the fourth elastic structure does not participate in the same-direction displacement of the first mass block and the second mass block and does not provide displacement stiffness. Therefore, due to the introduction of the fourth elastic structure, there is a difference in the stiffness of the displacements of the first mass block and the second mass block in different directions, and since stiffness is related to the modal frequency, there is a difference in the modal frequencies of the first mass block and the second mass block, thereby reducing the common-mode error.

[0034] In a possible implementation of the first aspect, the first lever includes a bent portion, and the third elastic structure is used to connect the fixed anchor point to the bent portion.

[0035] In this possible implementation, due to the existence of the fixed anchor point, the first lever can bend or deform in cooperation with the position of the fixed anchor point. The fixed anchor point is connected to the bent portion through the third elastic structure, so that the fixed anchor point does not increase the area of the first structural layer, realizing the miniaturization of the gyroscope structure.

[0036] In a possible implementation of the first aspect, the number of the first levers is two, and the two first levers are mirror-symmetrical along the second center line, and the second center line is parallel to the moment direction of the first lever.

[0037] In this possible implementation, the number of the first levers in the first structural layer can also be multiple, improving the feasibility of the solution.

[0038] In a possible implementation of the first aspect, the gyroscope structure further includes a second structural layer, a first coupling structure, and a second coupling structure; the second structural layer is mirror-symmetrical to the first structural layer along the third center line, the third center line is parallel to the moment direction of the first lever, the first coupling structure is used to connect the first structural layer and the second structural layer, and the second coupling structure is used to connect the first structural layer and the second structural layer.

[0039] In this possible implementation, the double-differential motion form and displacement detection form formed by the four mass blocks in the first structural layer and the second structural layer can further eliminate the common-mode error and reduce the deterioration of accuracy and stability caused by the inconsistent spacing of the detection capacitors brought about by the bonding process.

[0040] In a possible implementation of the first aspect, the first coupling structure includes a fifth elastic structure, a sixth elastic structure, a seventh elastic structure, and a second lever. Among them, the seventh elastic structure is used to connect the fixed anchor point to the second lever, the fifth elastic structure is used to connect the second lever to the first structural layer, and the sixth elastic structure is used to connect the second lever to the second structural layer.

[0041] In this possible implementation, the first coupling structure and the second coupling structure are used to couple the first structural layer and the second structural layer, realizing a double-differential motion form and displacement detection form, which improves the feasibility of the solution.

[0042] In a possible implementation of the first aspect, the fixed anchor point includes a first anchor point, a second anchor point, a third anchor point, and a fourth anchor point. The first anchor point is connected to the first structural layer, the second anchor point is connected to the second structural layer, the third anchor point is connected to the first coupling structure, and the fourth anchor point is connected to the second coupling structure.

[0043] In this possible implementation, the fixed anchor point can be decoupled into multiple anchor points, which improves the feasibility of the solution.

[0044] In a possible implementation of the first aspect, the fifth elastic structure and the sixth elastic structure are mirror-symmetrical along the third center line.

[0045] In this possible implementation, the fifth elastic structure and the sixth elastic structure are also mirror-symmetrical along the third center line, making the entire gyroscope structure mirror-symmetrical along the second center line, which improves the feasibility of the solution.

[0046] In a possible implementation of the first aspect, the seventh elastic structure is located at the center of the second lever.

[0047] In this possible implementation, the second lever connects the seventh elastic structure along the center point of the gyroscope structure in the Y-axis direction. At this time, when the second lever twists around the X-axis direction, the displacements (which can also be understood as the force transfer ratio) of both ends of the second lever along the Z-axis direction are 1:1, realizing torsional symmetry. When the second lever twists around the Z-axis direction, the displacements of both ends of the second lever along the X-axis direction are also 1:1, realizing torsional symmetry.

[0048] In a possible implementation of the first aspect, the first coupling structure and the second coupling structure are mirror-symmetrical along the first center line.

[0049] In this possible implementation, the first coupling structure is also mirror-symmetrical with the second coupling structure along the first center line, making the entire gyroscope structure mirror-symmetrical along the first center line, which improves the feasibility of the solution.

[0050] The second aspect of the present application provides a gyroscope structure, which includes a substrate, a first structural layer, a second structural layer, a first coupling structure, and a second coupling structure. The first structural layer includes a fixed anchor, a first elastic structure, a second elastic structure, a first lever, a third elastic structure, a first mass, and a second mass. Among them, the fixed anchor is connected to the substrate, the third elastic structure is used to connect the fixed anchor to the first lever, the first elastic structure is used to connect the first lever to the first mass, and the second elastic structure is used to connect the first lever to the second mass; the first mass and the second mass are mirror-symmetrical along a first center line, and the first center line is perpendicular to the torque direction of the first lever. The second structural layer is mirror-symmetrical to the first structural layer along a second center line, the second center line is parallel to the torque direction of the first lever, the first coupling structure is used to connect the first structural layer to the second structural layer, and the second coupling structure is used to connect the first structural layer to the second structural layer.

[0051] The third aspect of the present application provides a chip, which includes the gyroscope structure and the packaging structure in the first aspect or any possible implementation manner of the first aspect. The packaging structure is used to enclose the first structural layer in a sealed cavity.

[0052] In a possible implementation manner of the third aspect, the vacuum degree of the sealed cavity is less than or equal to 100 Pa.

[0053] The fourth aspect of the present application provides a gyroscope, which includes the gyroscope structure and an application-specific integrated circuit in the first aspect or any possible implementation manner of the first aspect. The application-specific integrated circuit is electrically connected to the gyroscope structure, and the application-specific integrated circuit is used to provide a driving signal to the gyroscope structure.

[0054] The fifth aspect of the present application provides an electronic device, which includes the gyroscope structure and a calculation unit in the first aspect or any possible implementation manner of the first aspect. The calculation unit is used to determine angular velocity information based on the output data of the gyroscope structure. Description of the Drawings

[0055] Figure 1 and Figure 2 is a schematic diagram of the driving mode and detection mode of the gyroscope;

[0056] Figure 3 is a schematic diagram of an embodiment of the first structural layer provided by an embodiment of the present application;

[0057] Figure 4 is a schematic diagram of an embodiment of the gyroscope structure provided by an embodiment of the present application;

[0058] Figure 5 is a schematic diagram of another embodiment of the first structural layer provided by an embodiment of the present application;

[0059] Figure 6 Schematic diagram of the driving mode of the gyroscope structure provided by the embodiment of the present application;

[0060] Figure 7 and Figure 8 Schematic diagram of the detection mode of the gyroscope structure provided by the embodiment of the present application;

[0061] Figure 9 Schematic diagram of another embodiment of the gyroscope structure provided by the embodiment of the present application;

[0062] Figure 10 Schematic diagram of an embodiment of the first structural layer and the second structural layer provided by the embodiment of the present application;

[0063] Figure 11 Schematic diagram of another driving mode of the gyroscope structure provided by the embodiment of the present application;

[0064] Figure 12 and Figure 13 Schematic diagram of another detection mode of the gyroscope structure provided by the embodiment of the present application;

[0065] Figures 14 to 16 Schematic diagram of the embodiment of the chip provided by the embodiment of the present application;

[0066] Figure 17 Schematic diagram of the embodiment of the electronic device and the gyroscope provided by the embodiment of the present application. Detailed implementation manners

[0067] The following describes the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Those of ordinary skill in the art can know that with the development of technology and the emergence of new scenarios, the technical solutions provided by the embodiments of the present application are equally applicable to similar technical problems.

[0068] The terms "first", "second", etc. in the specification, claims and above-mentioned drawings of the present application are used to distinguish similar objects, and do not have to be used to describe a specific order or sequence. It should be understood that such used data can be interchanged under appropriate circumstances so that the embodiments described here can be implemented in an order different from that shown or described here. In addition, the terms "include" and "have" and any variations thereof are intended to cover non-exclusive inclusion. For example, a process, method, system, product or device that includes a series of steps or units does not have to be limited to those steps or units clearly listed, but may include other steps or units not clearly listed or inherent to these processes, methods, products or devices.

[0069] As used herein, the term "exemplary" means "serving as an example, embodiment, or illustration". Any embodiment described herein as "exemplary" should not necessarily be construed as superior or better than other embodiments.

[0070] In addition, for a better illustration of the present application, numerous specific details are given in the following detailed description. Those skilled in the art should understand that the present application can also be implemented without some of these specific details. In some instances, methods, means, elements, and circuits well-known to those skilled in the art are not described in detail so as to highlight the gist of the present application.

[0071] The application scenarios related to the embodiments of the present application are illustrated by way of example below.

[0072] A gyroscope is a type of sensor that can sense the angular velocity in space. By integrating the angular velocity, information such as the rotation angle, carrier attitude, and motion coordinate system can be obtained. It can be used in scenarios such as navigation, motion, and attitude sensing, and is widely applied in fields such as consumer terminals, automotive electronics, and aviation equipment.

[0073] A gyroscope manufactured by the technology of gyroscopes fabricated through micromachining, also known as a microelectromechanical system (MEMS) gyroscope, specifically involves fabricating an MEMS chip through micromachining technology and further packaging it to obtain an MEMS gyroscope. MEMS gyroscopes have advantages such as small size, low cost, and low power consumption. Micromachining technology generally forms an MEMS gyroscope based on planar structure etching. A horizontal axis gyroscope with a planar structure can detect and obtain roll angle and pitch angle, which is beneficial to the miniaturization of a three-axis gyroscope and a six-axis inertial measurement unit (IMU).

[0074] An MEMS gyroscope uses the physical principle of the Coriolis force to sense the angular velocity. That is, on the basis of controlling the mass block structure to perform linear motion, an angular velocity input is set in the direction orthogonal to this linear motion, and a Coriolis force will be generated in the third orthogonal axis direction. Generally, the mode of a mechanical resonator is used as the realization of the linear motion, that is, the drive mode, and another mechanical mode is used to realize the Coriolis force detection, that is, the detection mode. Therefore, by reasonably detecting the mechanical displacement of the mass block caused by the Coriolis force, the angular velocity information can be obtained.

[0075] Among them, the mode is the inherent vibration characteristic of the structural system. The mechanical mode represents the resonant motion of the mass-elastic structure. The driving mode specifically refers to the resonant motion of the mass-elastic structure designed in the MEMS gyroscope, which is used to realize the linear vibration of the mass. The detection mode also specifically refers to another resonant motion of the mass-elastic structure designed in the MEMS gyroscope, which is used to realize the detection of the Coriolis force.

[0076] The formula for the Coriolis force is F = -2mΩ × v, where m is the mass of the object, v is the linear velocity of the object, and Ω is the rotational angular velocity of the object. In addition, F, v, and Ω all have directions, and the "×" in the formula is the vector cross product. F, v, and Ω are perpendicular to each other in pairs. Therefore, by detecting the mechanical displacement of the mass caused by the Coriolis force in a reasonable way, the angular velocity information can be obtained.

[0077] As Figure 1 shown, according to the principle of the Coriolis effect, the driving mode and the detection mode should be strictly orthogonal, that is, the mechanical displacement generated in the direction of the third orthogonal axis (Z-axis) only comes from the Coriolis effect caused by the angular velocity input. However, there are always some non-ideality of structural and dimensional parameters in micromachining manufacturing, resulting in the inability to ensure strict orthogonality between the driving and detection modes. As Figure 2 shown, the displacement of the driving mode will project onto the detection mode. When the detection mode detects the Coriolis force, it also detects the projection of the driving mode, causing the phase difference between the orthogonal angular velocity signal and the actual angular velocity to be 90° or 270°, which destroys the accuracy and stability of the gyroscope. For the MEMS horizontal axis gyro based on the linear vibration principle, the orthogonal angular velocity is particularly sensitive to the non-ideality of micromachining manufacturing. The structural manufacturing errors include parameters such as the out-of-plane capacitance distance and the etching error of the elastic structure beam. The orthogonal angular velocity can reach ±10 5 degrees per second (dps), far exceeding the range of ±10 3 dps of the gyroscope.

[0078] Therefore, the control of orthogonal coupling seriously affects the accuracy of the MEMS horizontal axis gyroscope and the wafer yield rate of the MEMS chip. Based on this, the embodiments of the present application provide a gyroscope structure to avoid the orthogonal problem caused by the elastic structure of the structural manufacturing error and improve the accuracy and stability of the gyroscope. The embodiments of the present application also provide corresponding chips, gyroscopes, and electronic devices. The following will be described in detail respectively.

[0079] The gyroscope structure provided by the embodiments of the present application will be described below in combination with the above application scenarios.

[0080] As Figure 3As shown in the figure, an embodiment of the present application provides a gyroscope structure. An embodiment of the gyroscope structure includes a substrate 100 and a first structural layer 300. The first structural layer 300 includes a fixed anchor 301, a first elastic structure 304, a second elastic structure 314, a first lever 303, a third elastic structure 302, a first mass 305, and a second mass 315.

[0081] Among them, the fixed anchor 301 is connected to the substrate 100. The third elastic structure 302 is used to connect the fixed anchor 301 and the first lever 303. The first elastic structure 304 is used to connect the first lever 303 and the first mass 305. The second elastic structure 314 is used to connect the first lever 303 and the second mass 315. The first mass 305 and the second mass 315 are mirror-symmetrical along a first center line. In addition, the first center line is perpendicular to the torque direction of the first lever 303.

[0082] To better illustrate the gyroscope structure provided by the embodiment of the present application, a three-dimensional rectangular coordinate system is established based on the top view of the first structural layer 300. The three-dimensional rectangular coordinate system includes an X-axis, a Y-axis, and a Z-axis that are orthogonal to each other.

[0083] Exemplarily, the first structural layer 300 is a symmetric structure, which is not only symmetric left and right but also symmetric up and down. That is, the first structural layer 300 is mirror-symmetrical along the first center line and also mirror-symmetrical along a second center line. The second center line is parallel to the torque direction of the first lever 303. That is, based on the top view of the first structural layer 300, the first center line is located exactly in the middle of the left and right sides of the first structural layer 300, and the first center line is parallel to the Y-axis. That is, the first center line is the central axis of the gyroscope structure in the X-axis direction. The second center line is located exactly in the middle of the upper and lower sides of the first structural layer 300, and the second center line is parallel to the X-axis. That is, the second center line is the central axis of the gyroscope structure in the Y-axis direction.

[0084] In addition, the third elastic structure 302 has a degree of freedom of torsion about the first center line, that is, a degree of freedom of rotation about the Y-axis direction. Therefore, the first lever 303 will also rotate about the Y-axis direction. At this time, the torque direction of the first lever 303 is the X-axis direction. Regardless of how the shape of the first lever 303 changes, the torque direction of the first lever 303 is the X-axis direction. The first center line can also be in the same plane as the first lever 303. When the first center line is perpendicular to the X-axis direction and the first mass 305 and the second mass 315 are mirror-symmetrical along the first center line, it can be determined that the first center line is Figure 3 the position shown, and the second center line is the same.

[0085] Exemplarily, the number of the fixed anchor points 301 can be multiple or can be coupled into one, that is, the anchor points at multiple different positions form a complete fixed anchor point 301 through the connecting structural members. In the embodiments of the present application, an example is given with the number of the fixed anchor points 301 being two. Similarly, the number of the third elastic structures 302 can be multiple or can be one. In the embodiments of the present application, the number of the third elastic structures 302 is also two, and the number of the third elastic structures 302 is the same as the number of the fixed anchor points 301.

[0086] Exemplarily, the fixed anchor point 301 includes a first sub-anchor point (above the first lever) and a second sub-anchor point (below the first lever), and the third elastic structure 302 includes a first sub-elastic structure (above the first lever) and a second sub-elastic structure (below the first lever). The first sub-anchor point and the second sub-anchor point are mirror-symmetrical along the second center line. Both the first sub-anchor point and the second sub-anchor point are connected to the base 100, and the connection method is a fixed connection, thereby fixedly connecting the entire first structural layer 300 to the base 100. The process method for connecting the first sub-anchor point and the second sub-anchor point to the base 100 can be a bonding process, such as gold-silicon bonding, aluminum-germanium bonding, anodic bonding, fusion bonding, and glass (glass-frit) bonding, etc. The first sub-elastic structure and the second sub-elastic structure respectively connect the first sub-anchor point and the second sub-anchor point to the first lever 303. The first lever 303 is located on the second center line, that is, in the exact middle of the upper and lower sides of the first structural layer 300.

[0087] Exemplarily, elastic structures such as the first elastic structure 304, the second elastic structure 314, and the third elastic structure 302 can specifically be springs or other structures that can provide degrees of freedom of movement. For example, the first elastic structure 304 is a spring or a folded beam, the second elastic structure 314 is a spring or a folded beam, and the third elastic structure 302 is a spring, a straight beam, or a folded beam. The number of the first elastic structures 304 is at least two, and the number of the second elastic structures 314 is at least two. In the embodiments of the present application, an example is given with the number of both the first elastic structures 304 and the second elastic structures 314 being four. The four first elastic structures 304 connect the first lever 303 to the first mass block 305, and the four second elastic structures 314 connect the first lever 303 to the second mass block 315. The four first elastic structures 304 and the four second elastic structures 314 are also mirror-symmetrical along the first center line.

[0088] Among them, the first elastic structure 304 and the second elastic structure 314 have displacement freedom in the X-axis direction and have relatively large displacement stiffness in the Y-axis direction. For example, the displacement stiffness of the first elastic structure 304 and the second elastic structure 314 in the Y-axis direction is more than twice that in the X-axis direction. That is, the first elastic structure 304 can support the first mass block 305 to displace along the X-axis (it can support displacement in either direction along the X-axis), but restricts the first mass block 305 from displacing along the Y-axis. The second elastic structure 314 supports the second mass block 315 to displace along the X-axis, but restricts the second mass block 315 from displacing along the Y-axis.

[0089] The third elastic structure 302 has the freedom to twist around the first center line, that is, the freedom to rotate around the Y-axis direction. At the same time, the third elastic structure 302 has relatively large rotational stiffness in the X-axis and Z-axis directions. For example, the rotational stiffness of the third elastic structure 302 in the X-axis direction is more than twice that in the Y-axis direction. That is, the third elastic structure 302 can support the first lever 303 to rotate around the Y-axis direction, but restricts the first lever 303 from rotating around the X-axis direction and also restricts the first lever 303 from rotating around the Z-axis direction. At this time, the moment direction of the first lever 303 can also be determined to be the X-axis direction. The third elastic structure 302 can specifically be a straight beam or a folded beam along the Y-axis, etc.

[0090] Optionally, the third elastic structure 302 is located at the center of the first lever 303, that is, the first lever 303 is connected to the third elastic structure 302 at the center point in the X-axis direction along the first structural layer 300. At this time, when the first lever 303 twists around the first center line, the displacements (which can also be understood as the force transfer ratio) of both ends of the first lever 303 along the Z-axis direction are 1:1.

[0091] It should be understood that the first structural layer 300 can also be not completely symmetric. For example, the first elastic structure 304 and the second elastic structure 314 are not mirror-symmetric along the first center line, and the first sub-anchor point and the second sub-anchor point are not mirror-symmetric along the second center line. In addition, the number of the first elastic structure 304 and the second elastic structure 314 can also be only one each, or the first elastic structure 304 and the second elastic structure 314 are coupled into one elastic structure, as long as the connection relationships between the various components are satisfied and their corresponding functions are realized. Factors such as symmetry and the number of components are not limited in the embodiments of the present application.

[0092] When using the gyroscope structure provided by the embodiments of the present application, the gyroscope structure is installed on a target object. When the target object rotates or turns around the Y-axis in space, an angular velocity input will be generated, and this angular velocity input will also be transmitted to the first structural layer 300. Since both the first direction and the second direction are perpendicular to the first center line and lie in the same plane, it shows that both the first direction and the second direction are along the X-axis direction. When the first mass block 305 is subjected to a driving force along the first direction, the first elastic structure 304 has no constraint in the X-axis direction, so that the first mass block 305 will also displace along the first direction. Similarly, when the second mass block 315 is subjected to a driving force along the second direction, the second elastic structure 314 has no constraint in the X-axis direction, so that the second mass block 315 will also displace along the second direction. Due to the Coriolis effect, on the basis of the displacement along the X-axis, with the angular velocity input of the Y-axis superimposed, the first mass block 305 and the second mass block 315 will also generate two displacements in opposite directions in the Z-axis direction. By detecting the displacement amounts of the first mass block 305 and the second mass block 315 in the Z-axis direction, the horizontal axis angular velocity information can be obtained.

[0093] Refer to together Figure 1 and Figure 2 , for example, the structural manufacturing error can be reflected as the etching error around the Y-axis that may exist in the first elastic structure 304 and the second elastic structure 314. If there is no such error, when the first mass block 305 and the second mass block 315 move along the X-axis, there is no displacement component in other directions. However, due to factors such as micro-nano level processing errors, there is an etching error around the Y-axis in the first elastic structure 304 and the second elastic structure 314. When the first mass block 305 and the second mass block 315 move along the X-axis, due to the existence of the moment of inertia, there will also be displacement in the Z-axis direction. At this time, the displacement results detected for the first mass block 305 and the second mass block 315 in the Z-axis direction will have errors. The angular velocity output further generated based on the displacement caused by this error is called the orthogonal angular velocity. Because the orthogonal angular velocity has a 90° phase difference from the signal caused by the actual angular velocity input, the orthogonal angular velocity is very sensitive to the structural manufacturing error, usually reaching an angular velocity of tens of thousands of degrees per second, far higher than the measurement range of general gyroscopes, which affects the accuracy and stability of the sensor system. In the embodiments of the present application, on the basis of realizing the horizontal axis gyroscopic effect through the torsion of the first lever 303 in the first structural layer 300 around the first center line, the structural force balance of the first mass block 305 and the second mass block 315 in the Z-axis direction is simultaneously realized. The moments of inertia of the first mass block 305 and the second mass block 315 caused by the structural manufacturing errors of the first elastic structure 304 and the second elastic structure 314 can be suppressed and offset by the torsion of the first lever 303 around the Y-axis, reducing the orthogonal angular velocity. Therefore, the gyroscope structure provided by the embodiments of the present application can reduce the sensitivity to the structural manufacturing error in the MEMS chip processing, improving the yield rate and production efficiency.

[0094] exist Figure 3 Based on the gyroscope structure shown in Figure 4 As shown, another embodiment of the gyroscope structure provided in the embodiment of the present application further includes a detection electrode 200, such as Figure 5 As shown, the number of first levers 303 in the first structural layer 300 is two, and the two first levers 303 are mirror-symmetrical along the second center line. The first structural layer 300 also includes a fourth elastic structure 309, a first driving structure 306, a first driving detection structure 307, a second driving structure 316 and a second driving detection structure 317.

[0095] The detection electrode 200 is located between the substrate 100 and the first structural layer 300, that is, the substrate 100, the detection electrode 200 and the first structural layer 300 are stacked in sequence. The detection electrode 200 is used to output a detection electrical signal based on the displacement of the first mass block 305 along the third direction and the displacement of the second mass block 315 along the fourth direction. The third direction is perpendicular to the first center line and the third direction is perpendicular to the first direction, that is, the third direction is along the Z-axis direction, and the third direction is opposite to the fourth direction.

[0096] Exemplarily, the fixed anchor point 301 includes a first sub-anchor point (located above the first lever) and a second sub-anchor point (located below the first lever), the third elastic structure 302 includes a first sub-elastic structure (located above the first lever) and a second sub-elastic structure (located below the first lever), and the first lever 303 includes a first sub-lever (located above the second center line) and a second sub-lever (located below the second center line). The first sub-elastic structure is used to connect the first sub-anchor point with the first sub-lever, and the second sub-elastic structure is used to connect the second sub-anchor point with the second sub-lever. Similarly, there is a symmetrical first elastic structure 304 for connecting the second sub-lever with the first mass block 305, and the second elastic structure 314 is used to connect the second sub-lever with the second mass block 315. Both the first sub-lever and the second sub-lever are used to twist around the first center line. At this time, the entire first structural layer 300 is mirror-symmetrical along the second center line.

[0097] Optionally, the first lever 303 includes a curved portion, and the third elastic structure 302 is used to connect the fixed anchor point 301 to the curved portion. Due to the presence of the fixed anchor point 301, the first lever 303 can be bent or deformed in accordance with the position of the fixed anchor point 301, and the fixed anchor point 301 is connected to the curved portion through the third elastic structure 302, so that the fixed anchor point 301 does not increase the area of ​​the first structural layer 300, thereby achieving miniaturization of the gyroscope structure.

[0098] It should be understood that the curved portion may be Figure 5The straight-line bending shown can also be arc bending or trapezoidal bending, etc. No matter what shape the bent part is, it will not change the moment direction of the first lever 303.

[0099] The first driving structure 306, the second driving structure 316, the first driving detection structure 307, and the second driving detection structure 317 are all connected to the substrate 100. The connection process method can be a bonding process, such as Au-Si bonding, Al-Ge bonding, anodic bonding, fusion bonding, and glass (glass-frit) bonding, etc. The first driving structure 306 and the first driving detection structure 307 are both coupled to the first mass block 305, and the second driving structure 316 and the second driving detection structure 317 are both coupled to the second mass block 315.

[0100] Optionally, the first driving structure 306 and the second driving structure 316 are mirror-symmetrical along the first center line, and the first driving detection structure 307 and the second driving detection structure 317 are also mirror-symmetrical along the first center line. The symmetrical structure is beneficial to the processing and manufacturing of the entire first structural layer and reduces the complexity of the process flow.

[0101] Among them, the first driving structure 306 is used to drive the first mass block 305 to displace along the first direction, and the second driving structure 316 is used to drive the second mass block 315 to displace along the second direction. The first driving detection structure 307 is used to convert the first displacement signal generated by the displacement of the first mass block 305 into a first electrical signal for output, and the second driving detection structure 317 is used to convert the second displacement signal generated by the displacement of the second mass block 315 into a second electrical signal for output.

[0102] Specifically, both the first driving structure 306 and the second driving structure 316 include driving fixed comb teeth 3061 and comb structures 308. The driving fixed comb teeth 3061 and the comb structures 308 are connected to the substrate 100. When a DC and an AC signal are applied to the driving fixed comb teeth 3061, the electrostatic force generated in the first driving structure 306 will drive the first mass block 305 and the first elastic structure 304 to displace along the first direction on the X-axis, and the electrostatic force generated in the second driving structure 316 will drive the second mass block 315 and the second elastic structure 314 to displace along the second direction on the X-axis.

[0103] Both the first driving detection structure 307 and the second driving detection structure 317 include driving detection comb teeth 3071 and comb structures 308. The driving detection comb teeth 3071 and the comb structures 308 are connected to the substrate 100. The driving detection comb teeth 3071 can convert the mechanical displacement signals of the first mass block 305 and the second mass block 315 along the X-axis into a first electrical signal and a second electrical signal for output. The first electrical signal and the second electrical signal are used as feedback signals, and after passing through circuit links such as phase shift and amplification, they are returned to the driving comb teeth to achieve closed-loop oscillation of the driving mode.

[0104] Optionally, the first structural layer 300 further includes a fourth elastic structure 309 for connecting the first mass block 305 and the second mass block 315, and the fourth elastic structure 309 is used to increase the reverse displacement stiffness of the first mass block 305 and the second mass block 315.

[0105] Specifically, the fourth elastic structure 309 is a folded beam structure connecting the first mass block 305 and the second mass block 315. The fourth elastic structure 309 has a displacement degree of freedom in the X-axis direction, that is, the fourth elastic structure 309 can support the first mass block 305 and the second mass to displace along the X-axis. When the first mass block 305 and the second mass block 315 move in opposite directions along the X-axis direction, that is, the driving mode of the gyroscope structure, the fourth elastic structure 309 has the same displacement amplitude, that is, the fourth elastic structure 309 participates in the reverse displacement of the first mass block 305 and the second mass block 315 and provides displacement stiffness. When the first mass block 305 and the second mass block 315 move in the same direction along the X-axis direction, the fourth elastic structure 309 has no displacement, or the displacement is much smaller than the case where the first mass block 305 and the second mass block 315 move in opposite directions along the X-axis direction, that is, the fourth elastic structure 309 does not participate in the same-direction displacement of the first mass block 305 and the second mass block 315 and does not provide displacement stiffness. Therefore, due to the introduction of the fourth elastic structure, there is a difference in stiffness between the reverse displacement and the same-direction displacement of the first mass block and the second mass block. Since stiffness is related to the modal frequency, there is a difference in the modal frequencies of the first mass block and the second mass block, thereby reducing the common-mode error.

[0106] The first elastic structure 304, the second elastic structure 314, the first mass block 305, and the second mass block 315 in the embodiments of the present application, and their connection forms are symmetrically arranged along the first center line. This symmetrical arrangement can realize the driving mode of the differential linear motion of the mass blocks, that is, the two mass blocks displace in opposite directions along the X-axis. And there are a same-direction mode and a reverse mode in the symmetrical arrangement. Since both ends of the fourth elastic structure 309 are respectively connected to the first mass block 305 and the second mass block 315, the stiffness of the driving mode can be increased, that is, the same-direction mode (parasitic mode) and the reverse mode (driving mode) are distinguished, reducing the sensitivity of the gyroscope structure to external vibrations.

[0107] As Figure 6 shown, when using the gyroscope structure provided by the embodiments of the present application, when the first mass block 305 displaces along the first direction and the second mass block 315 displaces along the second direction, that is, the driving displacement. As Figure 7As shown, due to the Coriolis effect, an angular velocity input along the Y-axis is superimposed on the displacement along the X-axis. According to the right-hand rule of the physical principle of Coriolis acceleration, the first mass block 305 and the second mass block 315 generate displacements in two opposite directions along the Z-axis, that is, the detected displacements. Specifically, the first mass block 305 is displaced along the third direction, and the second mass block 315 is displaced along the fourth direction. The third direction is perpendicular to the first center line and lies in different planes, that is, both the third direction and the fourth direction are along the Z-axis direction. The driving displacement is modulated by the resonant frequency of the driving mode. Therefore, the Coriolis force and the detected displacement are also modulated by the resonant frequency of the driving mode. It should be understood that the above Figure 6 and Figure 7 The solid-line frames in represent the original positions of the first mass block 305 and the second mass block 315, that is, the positions when no displacement occurs.

[0108] As Figure 8 shown, the number of detection electrodes 200 is also two. The first detection electrode 201 is located under the first mass block 305, and the second detection electrode 202 is located under the second mass block 315, that is, the first detection electrode 201 and the second detection electrode 202 are also mirror-symmetrical along the first center line. The first detection electrode 201 and the first mass block 305 form a first planar capacitor, and the second detection electrode 202 and the second mass block 315 form a second planar capacitor. Under the input of angular velocity, the differential detected displacement caused by the Coriolis force (the displacements of the first mass block 305 and the second mass block 315 along the Z-axis direction) will increase the distance between the first planar capacitor and decrease the distance between the second planar capacitor. Therefore, a differential capacitance change is directly generated, and this change can be read through an electrical signal amplifier to output a detection electrical signal. The detected displacement and the detection electrical signal are both linearly related to the input angular velocity. Therefore, the input angular velocity can be deduced by detecting either the displacement or the detection electrical signal.

[0109] It should be understood that the functions of the first driving structure 306, the second driving structure 316, the first driving and detecting structure 307, the second driving and detecting structure 317, and the detection electrode 200 can also be realized in other ways, that is, the gyroscope structure may not include the above structures, and the embodiments of the present application do not limit this.

[0110] In summary, the first driving structure 306 and the second driving structure 316 can drive the first mass block 305 and the second mass to perform differential oscillating motion along the X-axis direction. The first elastic structure 304 and the second elastic structure 314 provide displacement degrees of freedom along the X-axis direction to achieve the driving mode. The fourth elastic structure 309 provides mechanical coupling between the first mass block 305 and the second mass block 315 in the driving mode. When the angular velocity is input along the Y-axis direction, the detection electrode 200 can output an electrical signal of the differential displacement of the first mass block 305 and the second mass block 315 in the Z-axis direction, which can suppress the common-mode error. The third elastic structure 302 provides a torsional degree of freedom about the Y-axis. The two first levers 303 provide mechanical coupling between the first mass block 305 and the second mass block 315 in the detected displacement. On the basis of realizing the horizontal-axis gyroscopic effect, the structural force balance of the first mass block 305 and the second mass block 315 in the Z-axis direction is achieved at the same time. The substrate 100, the detection electrode 200, and the first structural layer 300 together constitute an implementation form of a horizontal-axis gyroscope, which has the function of detecting the horizontal-axis angular velocity.

[0111] In addition, the gyroscope structure provided by the embodiment of the present application does not require a frame structure, does not occupy the area of the mass block, and improves the sensitivity of the gyroscope structure. Moreover, the coupling degree of the two mass blocks is relatively high, avoiding the problem of resonant frequency splitting.

[0112] On the basis of the gyroscope structure shown in Figure 5 , as shown in Figure 9 , another embodiment of the gyroscope structure provided by the embodiment of the present application further includes a second structural layer 310, a first coupling structure 320, and a second coupling structure 330.

[0113] Among them, as shown in Figure 10 , the second structural layer 310 is mirror-symmetrical to the first structural layer 300 along the third center line, and the third center line is parallel to the moment direction of the first lever 303. The first coupling structure 320 is used to connect the first structural layer 300 and the second structural layer 310, and the second coupling structure 330 is used to connect the first structural layer 300 and the second structural layer 310.

[0114] Specifically, based on the top view of the gyroscope structure, the first center line is located exactly in the middle of the left and right sides of the first structural layer 300, and also in the middle of the left and right sides of the second structural layer 310. The first center line is parallel to the Y-axis, that is, the first center line is the central axis of the gyroscope structure along the X-axis direction. The third center line is located exactly in the middle of the first structural layer 300 and the second structure. The third center line is parallel to the X-axis, that is, the third center line is the central axis of the gyroscope structure along the Y-axis direction. When the third center line is parallel to the X-axis direction, the moment direction of the third center line and the first lever 303 is in the same plane, and the second structural layer 310 and the first structural layer 300 are mirror-symmetrical along the third center line, it can be determined that the third center line is Figure 10 the position shown.

[0115] Exemplarily, at this time, the fixed anchor points include a first anchor point 3011, a second anchor point 3012, a third anchor point 3013, and a fourth anchor point 3014. The first anchor point 3011 is connected to the first structural layer 300, the second anchor point 3012 is connected to the second structural layer 310, the third anchor point 3013 is connected to the first coupling structure 320, and the fourth anchor point 3014 is connected to the second coupling structure 330.

[0116] In addition, the first anchor point 3011 includes a first sub-anchor point (located above the second center line) and a second sub-anchor point (located below the second center line). The second anchor point 3012 includes a third sub-anchor point (close to the first structural layer) and a fourth sub-anchor point (far from the first structural layer). At this time, the second sub-anchor point and the third sub-anchor point can be coupled into one anchor point (located at the center point of the entire gyroscope structure).

[0117] Correspondingly, at this time, the number of the first levers 303 is four, the number of the first elastic structures 304 and the second elastic structures is eight each, and the number of the third elastic structures 302 is two. The specific connection relationship can refer to the corresponding description of the above embodiments, and the embodiments of the present application will not be elaborated here.

[0118] Since the second structural layer 310 and the first structural layer 300 are mirror-symmetrical along the third center line, the specific structure of the second structural layer 310 is the same as that of the first structural layer 300 (without considering the mirror image), and the embodiments of the present application will not be elaborated here. At this time, the gyroscope structure includes four mass blocks, namely a mass block 305A, a mass block 305B, a mass block 305C, and a mass block 305D. Among them, the mass block 305A is the first mass block 305 in the first structural layer 300, the mass block 305B is the second mass block 315 in the first structural layer 300, the mass block 305C is the second mass block 315 in the second structural layer 310, and the mass block 305D is the first mass block 305 in the second structural layer 310.

[0119] Further, the first coupling structure 320 includes a fifth elastic structure 325, a sixth elastic structure 321, a seventh elastic structure 323, a third anchor 3013, and a second lever 322. Among them, the third anchor 3013 is connected to the substrate 100. The seventh elastic structure 323 is used to connect the third anchor 3013 to the second lever 322. The fifth elastic structure 325 is used to connect the second lever 322 to the first structural layer 300. The sixth elastic structure 321 is used to connect the second lever 322 to the second structural layer 310. The fifth elastic structure 325 is used to support the displacement of the second lever 322 in the fifth direction. The sixth elastic structure 321 is used to support the displacement of the second lever 322 in the fifth direction. The seventh elastic structure 323 is used to support the second lever 322 to twist around the third center line. The fifth direction is perpendicular to the first direction and lies in the same plane, that is, the fifth direction is the Y-axis direction.

[0120] Specifically, the third anchor 3013 is connected to the substrate 100. The connection process method can be a bonding process, such as gold-silicon bonding, aluminum-germanium bonding, anodic bonding, fusion bonding, and glass (glass-frit) bonding, etc. The second lever 322 is connected to the third anchor 3013 through the seventh elastic structure 323, connected to the first structural layer 300 through the fifth elastic structure 325, and connected to the second structural layer 310 through the sixth elastic structure 321, thereby realizing the coupling of the first structural layer 300 and the second structural layer 310.

[0121] Among them, the fifth elastic structure 325 and the sixth elastic structure 321 have displacement freedom in the Y-axis direction and have relatively large displacement stiffness in the X-axis direction. For example, the displacement stiffness of the fifth elastic structure 325 and the sixth elastic structure 321 in the X-axis direction is more than 2 times that in the Y-axis direction. That is, the fifth elastic structure 325 and the sixth elastic structure 321 can support the second lever 322 to displace relative to the first mass 305 in the Y-axis direction, but limit the displacement of the second lever 322 relative to the first mass 305 in the X-axis direction of the elastic structure.

[0122] The seventh elastic structure 323 has the freedom to twist around the third center line, that is, the freedom to twist around the X-axis direction. At the same time, the seventh elastic structure 323 also has the freedom to twist around the Z-axis direction and has relatively large rotational stiffness in the Y-axis direction. For example, the rotational stiffness of the seventh elastic structure 323 in the Y-axis direction is more than 2 times that in the X-axis direction and the Z-axis direction. That is, the seventh elastic structure 323 can support the second lever 322 to rotate around the X-axis direction and the Z-axis direction, but limit the rotation of the second lever 322 around the Y-axis direction. The third elastic structure 302 can specifically be a straight beam or a folded beam along the X-axis, etc.

[0123] Optionally, the fifth elastic structure 325 and the sixth elastic structure 321 are mirror-symmetrical along the third center line, and the seventh elastic structure 323 is located at the center of the second lever 322, that is, the second lever 322 is connected to the seventh elastic structure 323 along the center point of the gyroscope structure in the Y-axis direction. At this time, when the second lever 322 twists around the X-axis direction, the displacements (which can also be understood as the force transmission ratios) of both ends of the second lever 322 along the Z-axis direction are 1:1.

[0124] Optionally, the second coupling structure 330 and the first coupling structure 320 are mirror-symmetrical along the first center line. The specific structure of the second coupling structure 330 is the same as that of the first coupling structure 320 (without considering mirroring). The second coupling structure 330 includes an elastic structure 331, an elastic structure 335, a lever 332, an elastic structure 333, and a fourth anchor point 3014. The specific connection relationship and characteristics are not elaborated in this embodiment of the present application. When the second coupling structure 330 and the first coupling structure 320 are not mirror-symmetrical along the first center line, the specific components and connection methods of the second coupling structure 330 are also the same as those of the first coupling structure 320, except that the positional relationship of the second coupling structure 330 may change and does not satisfy mirror symmetry.

[0125] In the embodiment of the present application, the first coupling structure 320 and the second coupling structure 330 couple the first structural layer 300 and the second structural layer 310 to realize the double-differential motion of the four mass blocks along the X-axis direction, and its driving mode is as Figure 11 shown, that is, the mass block 305A and the mass block 305B in the first structural layer 300 form a set of differential motions, and the mass block C and the mass block D in the first structural layer 300 form another set of differential motions. At the same time, the two sets of differential motions are in opposite directions, and the mass block 305A and the mass block 305C form a differential positive drive, and the mass block 305B and the mass block 305D form a differential negative drive.

[0126] At the same time, as Figure 12 shown, the first coupling structure 320 and the second coupling structure 330 also realize the double-differential motion of the four mass blocks along the Z-axis direction, that is, the mass block 305A in the first structural layer 300 and the mass block 305C in the second structural layer 310 form a set of differential detection displacements, and their displacement directions along the Z-axis are both the third direction. The mass block B in the first structural layer 300 and the mass block D in the second structural layer 310 form another set of differential detection displacements, and their displacement directions along the Z-axis are both the fourth direction.

[0127] It should be understood that the solid-line frames in the above Figure 11 and Figure 12 represent the original positions of the first structural layer 300 and the second structural layer 310, that is, the positions when no displacement occurs.

[0128] Further, in combination with the formula of the Coriolis force, the displacement detected by the two sets of differential detection is reversed, and its detection mode is as Figure 13 shown. At this time, the number of detection electrodes 200 is four, and the four detection electrodes 200 are respectively located below the four mass blocks, that is, the detection electrode 2A is located below the mass block 305A, the detection electrode 2B is located below the mass block 305B, the detection electrode 2C is located below the mass block 305C, and the detection electrode 2D is located below the mass block 305D, forming a double-differential capacitance output. The detection electrode 2A, the mass block 305A, the detection electrode 2B, and the mass block 305B form a set of differential detection capacitors, and the detection electrode 2C, the mass block 305C, the detection electrode 2D, and the mass block 305D form a set of differential detection capacitors. The detection electrode 2A and the detection electrode 2C are positive for differential detection, and the detection electrode 2B and the detection electrode 2D are negative for differential detection.

[0129] It should be understood that based on the Figure 10 first structural layer and the second structural layer shown, the gyroscope structure provided by the embodiments of the present application can also couple more third structural layers, fourth structural layers, etc. through more coupling structures. For example, the gyroscope structure includes 8 mass blocks or 16 mass blocks, etc. The embodiments of the present application do not limit this.

[0130] Through the differential positive and negative drive signal configurations as Figure 11 shown, the four mass blocks can perform double-differential motion along the X-axis direction, thereby realizing the closed-loop oscillation of the drive mode. As Figure 12 shown, based on the Coriolis force, the four mass blocks can perform double-differential motion along the Z-axis direction. The four mass blocks perform double-differential motion along the X-axis, that is, the drive displacement. According to the right-hand rule, the displacement of the four mass blocks generated by the Coriolis force in the Z direction is also double-differential motion, that is, the detection displacement. At the same time, the double-differential motion form and displacement detection form of the four mass blocks can further eliminate the common-mode error and reduce the deterioration of accuracy and stability caused by the inconsistent spacing of the detection capacitors brought by the bonding process.

[0131] The gyroscope structure provided by the embodiments of the present application is introduced above. Next, the related devices provided by the embodiments of the present application will be introduced with reference to the drawings.

[0132] As Figure 14 shown, the embodiments of the present application also provide a chip, which is a MEMS chip. The chip includes the gyroscope structure and the packaging structure described in the above Figures 3 to 13 partial embodiments. The gyroscope structure includes a substrate 100, a detection electrode 200, and a first structural layer 300 stacked in sequence.

[0133] Optionally, the encapsulation structure is a cover plate 400, which is connected to the first structural layer 300 or the substrate 100. The cover plate 400 is used to enclose the first structural layer 300 in a sealed cavity, and the sealed cavity is a vacuum.

[0134] Optionally, as Figure 15 shown, the encapsulation structure includes a cover plate 500 and an encapsulation base 600. The cover plate 500 is connected to the encapsulation base 600, and the gyroscope structure is placed on the encapsulation base 600. At this time, the encapsulation structure can enclose the entire gyroscope structure in a sealed cavity, and the sealed cavity is a vacuum.

[0135] Optionally, as Figure 16 shown, the encapsulation structure includes a first cover plate 400, a second cover plate 500 and an encapsulation base 600, that is, the encapsulation structure is Figure 14 and Figure 15 a combined form of. The first cover plate 400 is used to enclose the first structural layer 300 in a first sealed cavity, and the first sealed cavity is a vacuum. The second cover plate 500 is connected to the encapsulation base 600, and the gyroscope structure is placed on the encapsulation base 600. At this time, the second cover plate 500 and the encapsulation base 600 can enclose the entire gyroscope structure in a second sealed cavity, and the second sealed cavity can be a vacuum or not.

[0136] Among them, in the above Figures 14 - 16 possible implementation manners, if it is required that the sealed cavity is a vacuum, the vacuum degree of the sealed cavity is less than or equal to 100 Pa.

[0137] The embodiment of the present application also provides an electronic device, which includes the gyroscope structure described in the above Figures 3 to 13 partial embodiments, or includes the chip described in the above Figures 14 to 16 partial embodiments, and a calculation unit. It should be understood that encapsulating the gyroscope structure described in the above Figures 3 to 13 partial embodiments can form the chip described in the above Figures 14 to 16 partial embodiments. The embodiment of the present application takes the example that both the electronic device or the gyroscope includes the gyroscope structure, but the gyroscope structure can be understood as the above chip, and the embodiment of the present application will not be elaborated.

[0138] The electronic device can be any electronic device that needs to be equipped with a gyroscope. For example, the electronic device is used as a carrier, and the gyroscope structure is used as a part of the sensor on the carrier to measure the roll and pitch rotation angular velocities of the carrier in the inertial space. By integration, the attitude of the carrier can be obtained, providing the functions of attitude angle perception and alignment. The electronic device can be a communication device (base station, microwave device, antenna device) or a mobile terminal (mobile phone, tablet computer), etc. The gyroscope structure can also be used for measuring the earth rotation speed and finding the north.

[0139] In addition, the gyroscope structure can also be packaged together with components such as a Z-axis gyroscope and a triaxial accelerometer as an inertial measurement unit. At this time, the electronic device serves as a carrier, and the gyroscope structure serves as a part of the inertial measurement unit on the carrier, and is used to obtain navigation information such as the spatial attitude, speed, and position of the carrier. The electronic device can be an intelligent vehicle, an industrial device, a mobile robot, an aviation device, or the like.

[0140] Exemplarily, as Figure 17 shown, the electronic device 400 includes the gyroscope 410 provided in the embodiments of the present application. The gyroscope 410 is a horizontal-axis gyroscope, and the gyroscope 410 includes the Figures 3 to 13 gyroscope structure 411 described in some of the above Figures 14 to 16 embodiments, or includes the chip described in some of the above embodiments, and an application-specific integrated circuit (ASIC) 412. The embodiments of the present application do not limit the packaging form of the gyroscope 410.

[0141] Among them, the application-specific integrated circuit 412 is electrically connected to the gyroscope structure 411. The application-specific integrated circuit 412 is used to provide a driving signal to the gyroscope structure 411 to enable the first mass block and the second mass block to displace along the X axis. After the detection electrode of the gyroscope structure 411 outputs a detection electrical signal, the application-specific integrated circuit 412 resolves the detection electrical signal to obtain output data. At this time, the calculation unit 420 further operates on the output data to obtain the final angular velocity information of the electronic device 400.

[0142] Those of ordinary skill in the art can realize that the structural units of the examples described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or by a combination of computer software and electronic hardware. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. A professional technician can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of the embodiments of the present application.

[0143] In several embodiments provided in the present application, it should be understood that the disclosed structure can be implemented in other ways. For example, the above-described embodiments are merely illustrative. For example, the division of the structure may have other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another structure, or some features can be ignored. Some or all of the structures can be selected according to actual needs to achieve the purpose of the solution of this embodiment. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be an indirect coupling or communication connection through some interfaces, structures or units, and can be in electrical, mechanical or other forms.

[0144] In addition, each structure in the embodiments of the present application can be integrated into one structure, or each structure can exist physically alone, or two or more structures can be integrated into one structure.

[0145] The above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A gyroscope structure, characterized in that, it includes a substrate and a first structural layer. The first structural layer includes a fixed anchor, a first elastic structure, a second elastic structure, a first lever, a third elastic structure, a first mass, and a second mass. Among them, the fixed anchor is connected to the substrate, the third elastic structure is used to connect the fixed anchor to the first lever, the first elastic structure is used to connect the first lever to the first mass, and the second elastic structure is used to connect the first lever to the second mass; the first mass and the second mass are mirror-symmetrical along a first center line, and the first center line is perpendicular to the torque direction of the first lever.

2. The gyroscope structure according to claim 1, characterized in that, the gyroscope structure further includes a detection electrode. The detection electrode is located between the substrate and the first structural layer. The detection electrode is used to output a detection electrical signal based on the displacement of the first mass along a third direction and the displacement of the second mass along a fourth direction. The third direction is perpendicular to the first center line and is in different planes, and the third direction is opposite to the fourth direction.

3. The gyroscope structure according to claim 1 or 2, characterized in that, the first structural layer further includes a first driving structure and a second driving structure. The first driving structure is connected to the substrate and is coupled to the first mass. The second driving structure is connected to the substrate and is coupled to the second mass; the first driving structure is used to drive the first mass to displace along the first direction, and the second driving structure is used to drive the second mass to displace along the second direction. The first direction is perpendicular to the first center line, and the first direction is opposite to the second direction.

4. The gyroscope structure according to claim 3, characterized in that, the first driving structure and the second driving structure are mirror-symmetrical along the first center line.

5. The gyroscope structure according to any one of claims 1-4, characterized in that, the first structural layer further includes a first driving detection structure and a second driving detection structure. The first driving detection structure is connected to the substrate and is coupled to the first mass. The second driving detection structure is connected to the substrate and is coupled to the second mass; the first driving detection structure is used to convert the first displacement signal generated by the displacement of the first mass into a first electrical signal for output, and the second driving detection structure is used to convert the second displacement signal generated by the displacement of the second mass into a second electrical signal for output.

6. The gyroscope structure according to claim 5, characterized in that, the first driving detection structure and the second driving detection structure are mirror-symmetrical along the first center line.

7. The gyroscope structure according to any one of claims 1-6, characterized in that, the first elastic structure and the second elastic structure are mirror-symmetrical along the first center line.

8. The gyroscope structure according to any one of claims 1-7, characterized in that, The number of the first elastic structures is at least two, and the number of the second elastic structures is at least two.

9. The gyroscope structure according to any one of claims 1-8, wherein, the third elastic structure is located at the center of the first lever.

10. The gyroscope structure according to any one of claims 1-9, wherein, the first elastic structure is a spring or a folded beam, the second elastic structure is a spring or a folded beam, and the third elastic structure is a spring, a straight beam or a folded beam.

11. The gyroscope structure according to any one of claims 1-10, wherein, the first structural layer further includes a fourth elastic structure for connecting the first mass block and the second mass block.

12. The gyroscope structure according to any one of claims 1-11, wherein, the first lever includes a bent portion, and the third elastic structure is used for connecting the fixed anchor point and the bent portion.

13. The gyroscope structure according to any one of claims 1-12, wherein, the number of the first levers is two, and the two first levers are mirror-symmetrical along a second center line parallel to the torque direction of the first lever.

14. The gyroscope structure according to any one of claims 1-13, wherein, the gyroscope structure further includes a second structural layer, a first coupling structure and a second coupling structure; the second structural layer is mirror-symmetrical to the first structural layer along a third center line parallel to the torque direction of the first lever, the first coupling structure is used for connecting the first structural layer and the second structural layer, and the second coupling structure is used for connecting the first structural layer and the second structural layer.

15. The gyroscope structure according to claim 14, wherein, the first coupling structure includes a fifth elastic structure, a sixth elastic structure, a seventh elastic structure and a second lever, wherein, the seventh elastic structure is used for connecting the fixed anchor point and the second lever, the fifth elastic structure is used for connecting the second lever and the first structural layer, and the sixth elastic structure is used for connecting the second lever and the second structural layer.

16. The gyroscope structure according to claim 14 or 15, wherein, the fixed anchor point includes a first anchor point, a second anchor point, a third anchor point and a fourth anchor point, the first anchor point is connected to the first structural layer, the second anchor point is connected to the second structural layer, the third anchor point is connected to the first coupling structure, and the fourth anchor point is connected to the second coupling structure.

17. The gyroscope structure according to any one of claims 14-16, wherein, the fifth elastic structure and the sixth elastic structure are mirror-symmetrical along the third center line.

18. The gyroscope structure according to any one of claims 14-17, wherein, the seventh elastic structure is located at the center of the second lever.

19. The gyroscope structure according to any one of claims 14-18, wherein, The first coupling structure and the second coupling structure are mirror-symmetrical along the first center line.

20. A chip, characterized in that it includes the gyroscope structure and the packaging structure according to any one of claims 1-19, and the packaging structure is used to enclose the first structural layer in a sealed cavity.

21. The chip according to claim 20, characterized in that the vacuum degree of the sealed cavity is less than or equal to 100 Pa.

22. A gyroscope, characterized in that it includes the gyroscope structure and the application-specific integrated circuit according to any one of claims 1-19, the application-specific integrated circuit is electrically connected to the gyroscope structure, and the application-specific integrated circuit is used to provide a driving signal to the gyroscope structure.

23. An electronic device, characterized in that it includes the gyroscope structure and the calculation unit according to any one of claims 1-19, and the calculation unit is used to determine the angular velocity information based on the output data of the gyroscope structure.

Images