Spectral plane imaging detection system and method

Abstract

The invention relates to a spectral plane imaging detection system and method. The system comprises a light source used for emitting exciting light; the light splitting and combining element is used for receiving the exciting light from the light source, guiding the exciting light from the light source to the lens, receiving the target object detection light from the lens and guiding the target object detection light to the optical filter; the lens is used for adjusting the exciting light incident to the target object, the exciting light reflected by the target object and the target object detection light excited by the target object; the target object comprises a photoluminescent material; the optical filter is used for filtering the exciting light reflected by the target object and transmitting the target object detection light; the line spectrum scanning module is used for carrying out line scanning on the target object so as to obtain a line scanning spectrum of the target object; the line scanning spectrum of the target object comprises the photoluminescence spectrum of each point of the target object. According to the detection system and method, the product surface, the material characteristics and the like can be analyzed on the basis of the obtained photoluminescence spectrum, and the quality, defect concentration, doping conditions and the like of the material are obtained.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a spectrum imaging detection system and method. Background Art

[0002] Currently, wide bandgap materials such as third-generation semiconductor gallium nitride (GaN) and silicon carbide (SiC) are used in the fields of semiconductor high-integration circuits, new display MicroLed (Micro Light Emitting Diode Display), etc. With the development of third-generation semiconductor technology, the technology for detecting third-generation semiconductor materials has emerged.

[0003] In the detection of product quality and defects formed by third-generation semiconductor materials, the conventional method requires physical crimping of each die (bare chip) of the wafer and then power-on testing.

[0004] However, this detection method requires additional probe crimping and high-precision alignment, so it is very difficult. Summary of the invention

[0005] Based on this, it is necessary to provide a spectrum imaging detection system and method that can obtain product surface information and material-related information without the need for additional probe crimping and high-precision alignment to address the above technical problems.

[0006] In a first aspect, the present application provides a spectrum imaging detection system, comprising:

[0007] A light source, used to emit excitation light to a target object; the target object includes a photoluminescent material;

[0008] A line spectrum scanning module performs line scanning on the target object and obtains the spectrum data of the target object's detection light;

[0009] The line spectrum scanning module scans line by line along the target direction, sampling one line each time to obtain the line spectrum of the detection light in the target area of ​​the target object;

[0010] The line spectrum scanning module includes a color separation element, and the line spectrum of the detection light of the target area of ​​the target object is split and imaged into a surface spectrum by the color separation element;

[0011] After the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object.

[0012] In one embodiment, the line spectrum scanning module includes:

[0013] A lens receives and adjusts the target detection light excited by the excitation light;

[0014] The slit receives the target detection light regulated by the lens and allows the target area detection light to pass through;

[0015] The first lens receives the target area detection light after being screened by the slit, and collimates the target area detection light, thereby converting the divergent light into parallel light;

[0016] The color separation element is further used to receive the target area detection light collimated by the first lens, and to perform color separation on the target area detection light, so that the photoluminescence light of each point of the target object is spatially separated according to different wavelengths;

[0017] The second lens converges the light separated by the color separation element, and converges the light of the same wavelength in the photoluminescence light of each point of the target object to the same point;

[0018] The sensor receives the light converged by the second lens and is used for imaging the photoluminescence spectrum of the detection light of the target object.

[0019] In one embodiment, the spectrum imaging detection system further includes: a filter, located between the lens and the slit, for filtering out the excitation light reflected by the target and detecting the light through the target.

[0020] In one embodiment, the spectrum imaging detection system further includes: a light splitting and combining element, which receives the excitation light and guides the excitation light to the target object, and receives the detection light from the target object and transmits it to the line spectrum scanning module; the light splitting and combining element is located between the lens and the filter.

[0021] In one embodiment, the color separation element is a prism, a gradient filter, or a wedge filter.

[0022] In one embodiment, the system further includes a light homogenizer, which is located at the emission end of the light source and is used to receive the excitation light emitted by the light source and perform light homogenization on the light intensity of the excitation light.

[0023] In one embodiment, the system further includes a collimator, which is located at the output end of the light homogenizer and is used to receive the homogenized excitation light and adjust the emission angle of the excitation light to be perpendicular to the surface of the target object.

[0024] In a second aspect, the present application also provides a spectrum imaging detection method, comprising:

[0025] The light source emits excitation light to the target object;

[0026] The line spectrum scanning module scans the target line by line along the target direction and obtains the spectrum data of the target detection light; each scan samples a line to obtain the line spectrum of the target area detection light, and the line spectrum is split to form a surface spectrum matrix M r×n , where r is the line resolution of the line scan camera and n is the number of spectral channels;

[0027] After the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object;

[0028] Perform spectral analysis on each pixel of the target object to obtain the defect location point of the target object to be tested.

[0029] In one embodiment, obtaining the spectral data of the target detection light includes:

[0030] Receive and adjust the target detection light excited by the excitation light of the target through the lens;

[0031] receiving the target detection light regulated by the lens through the slit and limiting the target detection light, thereby allowing the target area detection light to pass through;

[0032] The target area detection light filtered by the slit is received by the first lens, and the target area detection light is collimated, thereby converting the divergent light into parallel light;

[0033] Using a color separation element to receive the target area detection light collimated by the first lens, and color separation of the target area detection light, so that the photoluminescence light of each point of the target object is separated in space according to different wavelengths;

[0034] The light separated by the color separation element is converged by the second lens, and the light of the same wavelength in the photoluminescence light of each point of the target object is converged to the same point;

[0035] The sensor receives the light converged by the second lens, thereby obtaining the line spectrum of the detection light of the target area.

[0036] In one of the embodiments, after the light source emits excitation light to the target, and the line spectrum scanning module scans the target line by line along the target direction, it also includes: receiving the excitation light through the light-splitting and light-combining element and guiding the excitation light to the target, and receiving the target detection light from the lens through the light-splitting and light-combining element; after receiving and adjusting the target detection light excited by the excitation light through the lens, it also includes: filtering out the excitation light reflected by the target through a filter and transmitting the target detection light.

[0037] The above-mentioned spectrum imaging detection system and method, through the spectrum imaging detection system including a light source and a line spectrum scanning module, utilizes the characteristic that the surface of the third-generation semiconductor material can produce a photoluminescence effect through the excitation light emitted by the light source, and based on the hyperspectral imaging principle of the line spectrum scanning module, performs spectral imaging on the surface of the same target such as the third-generation semiconductor material in a continuous spectral band, integrates the target's spatial, illumination and spectral triple information, thereby forming a three-dimensional data cube (spectral cube), in which two dimensions correspond to space (X and Y), and the third dimension corresponds to the spectrum (wavelength), thereby realizing detection imaging that integrates spectrum acquisition and target imaging. Based on the obtained photoluminescence spectrum of the third-generation semiconductor material, the product surface, material characteristics, etc. are analyzed to obtain the quality, defect concentration and doping status of the material. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the related technologies, the drawings required for use in the embodiments or the related technical descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] FIG1 is a schematic diagram of a spectrum imaging detection system in one embodiment;

[0040] FIG2 is a top view of a target object in one embodiment;

[0041] FIG3 is a schematic diagram of the working principle of a linear spectrum scanning module in one embodiment;

[0042] FIG4 is a schematic diagram of a scanning area of ​​the target object in FIG3 ;

[0043] FIG5 is a schematic diagram of a surface spectrum obtained by scanning a target area of ​​the target object shown in FIG3 in one embodiment;

[0044] FIG6 is a schematic diagram showing the principle of scanning a target object to obtain a spectral image in one embodiment;

[0045] FIG. 7 is a spectral response curve of a point whose coordinates of a target object are Q(a, b) in one embodiment;

[0046] FIG8 is a schematic diagram of a flow chart of a spectrum imaging detection method in one embodiment;

[0047] FIG9 is a schematic flow chart of a spectrum imaging detection method in yet another embodiment;

[0048] FIG. 10 is a schematic flow chart of a spectrum imaging detection method in yet another embodiment. DETAILED DESCRIPTION

[0049] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention, so the present invention is not limited by the specific embodiments disclosed below.

[0050] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0051] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0052] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0053] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0054] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0055] Please refer to Figures 1 to 3 at the same time. Figure 1 shows a schematic diagram of a spectrum imaging detection system in an embodiment of the present invention, Figure 2 is a top view of a target object 4, and Figure 3 is a schematic diagram of the working principle of a line spectrum scanning module in an embodiment. An embodiment of the present invention provides a spectrum imaging detection system, including:

[0056] The light source 1 is used to emit excitation light to the target object 4; the target object 4 includes a photoluminescent material.

[0057] Line spectrum scanning module 6, line spectrum scanning module 6 can scan line by line along the target direction, each scan can use the excitation light to perform line scanning on the target area 43 of the target object, and then obtain the line scanning spectrum of the target area detection light, so as to collect the line spectrum of the target object detection light of the target object 4 by line scanning, the line spectrum scanning module includes a color separation element, the line spectrum of the target area detection light of the target object is imaged as a surface spectrum by the color separation element, after the line by line scanning is completed, the line by line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target object 4; the three-dimensional hyperspectral data cube of the target object 4 includes the photoluminescence spectrum data of each pixel point of the target object. Through this scheme, both the surface image data of the target object and the spectrum data of the target object can be obtained.

[0058] Among them, photoluminescence (PL) is an important spectral detection technology, which is widely used in the detection and characterization of semiconductor materials. Its basic principle is to analyze the optical properties, defects and impurities of the material by exciting the semiconductor material to emit light (usually fluorescence or phosphorescence). The third-generation semiconductor materials usually have wide bandgap characteristics. Taking GaN as an example, its bandgap width is about 3.4eV. According to the basic formula of the relationship between photon energy and frequency, when the wavelength is greater than about 365nm, the material can be excited to emit light, which is generally called photoluminescence (PL).

[0059] The line spectrum scanning module 6 can scan line by line along the target direction by moving the line spectrum scanning module 6 or by moving the target object 4. The target direction is the direction set when performing line scanning, not a fixed direction, as long as line by line scanning can be achieved. For example, the arrow direction in FIG3 is the camera scanning direction, which is the target direction.

[0060] For example, the target object may be a MicroLed panel, the surface of which includes LED lamp beads with third-generation semiconductor materials. The physical properties such as consistency, thickness, concentration, etc. of the material or defect identification can be determined based on the intensity and spectral characteristic information of the PL excitation light obtained by exciting the surface of the third-generation semiconductor material with the excitation light.

[0061] Specifically, please refer to FIG. 1 again and FIG. 2 at the same time. The excitation light emitted by the light source 1 is irradiated onto the target 4, wherein the target is also referred to as DUT (DEVICE UNDER TEST). For example, the DUT is a MicroLed panel, and the LED (Light Emitting Diode) lamp beads on the MicroLed panel are illuminated due to the photoluminescence effect. From the top view of the target 4 in FIG. 2, it can be seen that the area 42 selected by the frame line in the target 4 is the area scanned by the line spectrum scanning module. In this area, the excitation light excites and illuminates the LED lamp beads 41. The reason why the LED lamp beads are illuminated is that the excitation light emitted by the laser will produce a photoluminescence effect on the third-generation semiconductor material on the LED lamp beads. It can be understood that the excitation light emitted by the light source 1 here selects the excitation wavelength for the material of the LED lamp beads 41. For different material surfaces, it is necessary to replace different excitation light sources to match different excitation wavelengths, and select different filters.

[0062] Furthermore, the light emitted after the LED on the MicroLed panel is illuminated by the photoluminescence effect is called target detection light, which is received by the line spectrum scanning module 6, wherein the line spectrum scanning module 6 can perform a line scan on the target 4 to obtain the line scanning spectrum of the target 4; the line scanning spectrum of the target 4 includes the photoluminescence spectrum of each point of the target 4.

[0063] At this time, if there are defects in the product material (such as dislocations, impurities, thickness, etc.), the photoluminescence spectrum obtained by the excitation light usually has different spectral characteristics. When the excitation spectrum information of each point of the product is obtained, the product surface, material characteristics, etc. can be analyzed.

[0064] The above-mentioned spectrum imaging detection system, through a spectrum imaging detection system including a light source and a line spectrum scanning module, utilizes the characteristic that the excitation light emitted by the light source on the surface of the third-generation semiconductor material can produce a photoluminescence effect, and based on the hyperspectral imaging principle of the line spectrum scanning module, performs spectral imaging on the surface of the same target such as the third-generation semiconductor material in a continuous spectral band, integrates the target's spatial, illumination and spectral triple information, thereby forming a three-dimensional data cube (spectral cube), in which two dimensions correspond to space (X direction and Y direction), and the third dimension corresponds to the spectrum (wavelength), thereby realizing detection imaging that integrates spectrum acquisition and target imaging. Based on the obtained photoluminescence spectrum of the third-generation semiconductor material, the product surface, material characteristics, etc. are analyzed to obtain the material quality, defect concentration and doping conditions, etc.

[0065] 3 to 5 , FIG3 shows a schematic diagram of the working principle of a linear spectrum scanning module in an embodiment of the present invention, FIG4 is a schematic diagram of the scanning area of ​​the target object in FIG3 , and FIG5 is a schematic diagram of the surface spectrum of the target object obtained by scanning the target object shown in FIG3 . In some embodiments, the line spectrum scanning module includes: a lens 611 that receives and adjusts the target detection light of the target 4 excited by the excitation light; a slit 612, including a rectangular through hole (the hole shape is not limited, depending on different detection needs), receives the target detection light adjusted by the lens 611; the slit 612 can limit the target detection light, thereby allowing the target area detection light to pass through; a first lens 613, receives the target area detection light filtered by the slit 612, collimates the target area detection light, thereby converting the divergent light into parallel light; a color separation element 614, receives the target area detection light collimated by the first lens 613, and performs color separation on the target area detection light, so that the photoluminescence light of each point of the target 4 is separated in space according to different wavelengths; a second lens 615, converges the light separated by the color separation element 614, and converges the light of the same wavelength in the photoluminescence light of each point of the target 4 to the same point; a sensor 62, receives the light converged by the second lens 615, and is used to image the photoluminescence spectrum of the target detection light. The lens 611, the slit 612, the first lens 613, the color separation element 614 and the second lens 615 constitute a focusing lens module 61. The arrow direction in FIG3 is the camera scanning direction.

[0066] Exemplarily, the target area 43 is a line scanning area. In one embodiment, the photoluminescence signal emitted by the target area 43 when excited by the excitation light, i.e., the target detection light of the target area, is incident on the slit 612 via the lens 611, and the target detection light of the target area passing through the slit 612 is incident on the first lens 613, and is converged on the color separation element 614 through the first lens 613. The color separation element 614 separates the received light, and after passing through the second lens 615, the light of the same wavelength is converged on the same point of the sensor 62.

[0067] For example, please refer to FIG. 3 and FIG. 4 , FIG. 4 shows a top view of the area to be scanned of the target object 4, wherein the target area 43 is the area currently being scanned. Specifically, when the target moves, the corresponding target area 43 moves; or when the line spectrum scanning module moves, the acquired target area 43 moves accordingly. At this time, the acquired target detection light enters the line spectrum scanning module, that is, enters the hyperspectral optical system, and the light of different wavelengths is dispersed by the color separation element 614, and then focused by the second lens 615 to reach the sensor 62 for imaging. Assuming that the number of camera spectral channels is n, each time the target area 43 of the target object 4 is imaged by line scanning, a surface image matrix M (r×n) will be obtained, where r is the line resolution of the line scanning camera. Through hyperspectral line scanning imaging, each time a single row image of the optical system is acquired, matrix data of dimension r×n will be generated.

[0068] In one embodiment, as shown in FIG5 , FIG5 shows a surface spectrum 10 obtained after scanning the target area 43 of the target object by the line spectrum scanning module. The image corresponding to row image-1 is the detection result of the target area 43 in the spectrum or in the optical channel with a wavelength of 300 nm; the image corresponding to row image-2 is the detection result of the target area 43 in the spectrum or in the optical channel with a wavelength of 301 nm; and so on, the image corresponding to row image-8 is the detection result of the target area 43 in the spectrum or in the optical channel with a wavelength of (N+1) nm.

[0069] Furthermore, after scanning the target object line by line, the data scanned line by line are combined, and a plane object (imaging width and height X×Y) will obtain a three-dimensional data of spatial resolution × spectral dimension (X×Y×n), as shown in FIG6 , which is a schematic diagram of the principle of scanning the target object 4 to obtain a spectral image, that is, imaging the target object under n spectra, wherein a point Q (a, b) on the target object 4 located in the (x, y) coordinate system is scanned by the line spectrum scanning module 6 to obtain a set of wavelength distributions from λ1 to λ nspectral response data. Similarly, each point on the target will obtain a set of spectral response data Array_s. For example, in the imaging data in Figure 6, the spectral response curve of the coordinate point Q (a, b) is shown in Figure 7, where the horizontal axis represents the wavelength in nm; the vertical axis represents the intensity of photoluminescence, and the dotted line represents the main wavelength. It can be seen that the main wavelength of point Q is 620nm and the half-wave width FWHM is 26nm. Thus, the main luminous wavelength of the entire surface of the target under the excitation condition or the main wavelength response of the entire surface can be obtained. It can be understood that under the excitation condition, the characteristics of the entire surface of the target, such as the full width of half wave (Full Widthat Half Maxima, FWHM), intensity, distribution and other characteristics can be obtained in the imaging, so that it can be used for structural inhomogeneity, impurity distribution or defect analysis of the material. Exemplarily, please refer to FIG. 3 at the same time. The line spectrum scanning module 6 performs a line scan on the target 4 and obtains the spectral data of the target detection light; the line spectrum scanning module 6 scans line by line along the target direction, samples one line each time it scans, and obtains the line spectrum of the target area detection light; the line spectrum scanning module 6 includes a color separation element 614, and the line spectrum of the target area detection light is imaged as a surface spectrum 10 by the color separation element 614; after the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target 4. As shown in FIG. 6, after the line spectrum scanning module 6 performs a line scan on the target 4, each wavelength channel obtains an image of the target 4, such as image 411 is an image of the target 4 in a channel with a wavelength of λ1 obtained after the target 4 is scanned line by line, ..., image 412 is an image of the target 4 in a channel with a wavelength of λ (lambda) obtained after the target 4 is scanned line by line, ..., image 413 is an image of the target 4 in a channel with a wavelength of λ obtained after the target 4 is scanned line by line. n The combination of the images of the target object 4 in the channel, the images 411, ..., the images 412, ..., and the images 413 is a three-dimensional hyperspectral image of the target object 4, and the three-dimensional hyperspectral image includes a three-dimensional hyperspectral data cube of the target object 4. The three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object.

[0070] For example, the maximum value of the half-wavelength full width (FWHM) of the spectrum can reflect the quality and defects of the target object; the quality, defect concentration, doping status, etc. of the target object can be analyzed through the main wavelength and luminescence intensity. Based on the third-generation semiconductor excitation luminescence spectrum width (full width at half maximum (FWHM) of the luminescence peak) is generally only a few dozen nm, that is, in practical applications, we can specify the collection / processing of data in a specified wavelength range, which will improve the data processing speed and accuracy.

[0071] The present invention is applied to the field of MicroLED detection. After completing the mass transfer, the product is stimulated to emit light through the principle of photoluminescence to complete the product quality detection. After sampling, the spectral characteristics of the product detection light are analyzed. Different from other detection fields, the product of this application is in the field of MicroLED detection. After sampling, the following aspects need to be considered:

[0072] Material quality and purity analysis: High-quality single-crystal materials usually have narrower spectral widths, indicating fewer defects and impurities. For example, the PL spectral width of high-quality GaN materials is usually in the range of tens of millielectronvolts (meV).

[0073] Defects and impurities: Defects (such as dislocations, impurities, etc.) can lead to the formation of local energy levels, which can cause spectrum broadening. The higher the defect density, the wider the PL spectrum tends to be.

[0074] Temperature: An increase in temperature leads to an increase in lattice vibrations, which in turn causes phonon scattering, resulting in an increase in the spectral width. Generally, the PL spectral width increases with increasing temperature.

[0075] The above excitation characteristics can be used in conjunction with this detection method for defect detection.

[0076] In actual detection, different wavebands can be selected for detection, usually within the range of tens of nm, such as 400-450nm, etc., depending on the product substrate material. This field uses a relatively narrow excitation light spectrum, which has a higher precision after grating splitting, thereby improving the accuracy of defect detection.

[0077] In this embodiment, the line spectrum scanning module traverses the area (X×Y) of the target object, images the target object, and obtains M X×Y×n Data set. Performing spectral analysis on each point of Array_s can obtain the dominant wavelength information and light intensity distribution information of each point. The dominant wavelength information and light intensity distribution information can be used to analyze the physical characteristics of the target object. For example, the full width half maximum (FWHM) of the spectrum can reflect the quality and defects of the material. The quality, defect concentration, doping status, etc. of the product material can be analyzed by the dominant wavelength and luminous intensity. Similarly, each M x×y That is, the surface characteristics of the target object at wavelength n, which can be used for surface defect detection.

[0078] Please refer to Figure 1 again. In one embodiment, the spectrum imaging detection system also includes: a light splitting and combining element 2, which receives the excitation light and guides the excitation light to the lens 611, and receives the target detection light from the lens 611; a filter 5, which is located between the light splitting and combining element 2 and the slit 612, and is used to filter out the excitation light reflected by the target and pass the target detection light. In practical applications, in order to integrate the light source with the line spectrum scanning module, it is necessary to set up a light splitting and combining element to guide the emission light and the detection light. In other usage scenarios, the light source can also be external, and the light emitted by the light source can be directly incident on the target without passing through the lens.

[0079] Exemplarily, the excitation light emitted by the light source 1 is incident on the light splitting and combining element 2, and is incident on the lens 611 after being transmitted through the light splitting and combining element 2, and is irradiated onto the target object 4 through the lens, wherein the target object 4 may be an LED lamp bead on a MicroLed panel. The light emitted after the LED lamp bead on the MicroLed panel is illuminated by the photoluminescence effect is called the target detection light, which is received by the lens 611, but at the same time, the light reflected by the excitation light irradiating the MicroLed panel is also received by the lens 611, and these two beams of light are reflected onto the filter 5 after passing through the light splitting and combining element 2. The filter 5 filters out the reflected excitation light and transmits the target detection light generated by the photoluminescence effect. The target detection light generated by the photoluminescence is then received by the slit 612, and the target detection light of the target area passing through the slit 612 is incident on the first lens 613, and is converged onto the color separation element 614 through the first lens 613. The color separation element 614 separates the received light, and after passing through the second lens 615, the light of the same wavelength converges to the same point of the sensor 62. The line spectrum scanning module 6 performs line scanning on the target 4, thereby obtaining a line scanning spectrum of the target 4; the line scanning spectrum of the target 4 includes the photoluminescence spectrum of each point of the target 4.

[0080] It can be understood that for different material surfaces, it is necessary to replace different excitation light sources 1 to match different excitation wavelengths, and select different filters 5.

[0081] In one embodiment, the color separation element is a prism or a gradient filter or a wedge filter.

[0082] In this example, the spectral splitting described is obtained by prism splitting. It can be understood that other splitting methods, such as gradient filters (wedge filters), can also be used to obtain hyperspectral splitting imaging, so that a beam of light can be divided into multiple beams, and light of different wavelengths can be dispersed and then focused to the camera sensor for imaging. Each time the optical system collects a single line of images, N image data will be generated.

[0083] In this embodiment, through a gradient filter (wedge filter) or a prism spectroscopic scheme, the one-dimensional data obtained by line scanning can be simultaneously converted into determinant array data under multiple spectra, and then the area array imaging under different spectra is obtained by line scanning. There is no restriction on the wavelength range passed, so the spectral channel formed is not restricted.

[0084] In one embodiment, the spectrum imaging detection system further includes a light homogenizer 7, which is located between the light source 1 and the light splitting and combining element 2, and is used to receive the excitation light emitted by the light source 1 and perform light homogenization processing on the light intensity of the excitation light.

[0085] Exemplarily, the homogenizer 7 used is a quartz homogenizing fiber. The quartz homogenizing fiber is integrated with the light source, i.e., the laser, so that the laser output light generates a flat-top distribution light spot with a diameter of 7 mm at a working distance of 10 cm, and the uniformity of the light spot reaches more than 90%, so that the lamp beads at different positions in the light spot can be excited by the light of the same power.

[0086] For example, please refer to Figure 1 again. The excitation light emitted by the light source 1 is homogenized by the light homogenizer and then incident on the light splitting and light combining element 2. The light splitting and light combining element 2 receives and transmits the homogenized excitation light. The excitation light is then adjusted by the lens 611 and incident on the target 4, exciting the target 4 to generate a photoluminescence signal, i.e., the target detection light; the target detection light is incident on the light splitting and light combining element 2 after passing through the lens 611, and at the same time, the excitation light reflected by the target 4 is also incident on the light splitting and light combining element 2 through the lens 611. The light splitting and light combining element 2 reflects the target detection light and the excitation light reflected by the target 4 onto the filter 5, and the filter 5 filters out the excitation light and transmits the target detection light, thereby performing a line scan on the target 4 through the line spectrum scanning module 6 to obtain a line scan spectrum of the target 4; the line scan spectrum of the target 4 includes the photoluminescence spectrum of each point of the target.

[0087] In this embodiment, in order to ensure that the intensity of the excitation light emitted by the light source can be evenly distributed when irradiating the target object, a homogenizer is used to perform light homogenization processing, so that the light intensity reaches a relatively uniform state on the surface of the target object, thereby avoiding differences in excitation effects caused by uneven light intensity and improving the accuracy and reliability of measurement.

[0088] In one embodiment, the spectrum imaging detection system further includes a collimator 8, which is located between the light homogenizer 7 and the light splitting and combining element 2, and is used to receive the excitation light emitted by the light source 1 and adjust the emission angle of the excitation light to be perpendicular to the surface of the target object 4.

[0089] For example, please refer to Figure 1 again. The excitation light emitted by the light source 1 is collimated by the collimator and then incident on the light-splitting and light-combining element 2. The light-splitting and light-combining element 2 receives and transmits the collimated excitation light. The excitation light is then adjusted by the lens 611 and incident on the target 4, exciting the target 4 to generate a photoluminescence signal, i.e., the target detection light; the target detection light is incident on the light-splitting and light-combining element 2 after passing through the lens 611, and at the same time, the excitation light reflected by the target 4 is also incident on the light-splitting and light-combining element 2 through the lens 611. The light-splitting and light-combining element 2 reflects the target detection light and the excitation light reflected by the target 4 onto the filter 5, and the filter 5 filters out the excitation light and transmits the target detection light. Thus, the line spectrum scanning module 6 scans the target object 4 line by line along the target direction. Each time the scanning is performed, the line spectrum of the target area 43 can be obtained after line scanning of the target area 43 using the excitation light. The line spectrum is imaged as a surface spectrum by the color separation element. After the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target object 4; the three-dimensional hyperspectral data cube of the target object 4 includes the photoluminescence spectrum of each point of the target object.

[0090] In this embodiment, the purpose of collimating the excitation light is to ensure that the light beam of the excitation light source can illuminate the surface of the target object perpendicularly. If there is an angle between the light beam and the surface of the material, the incident angle of the photon will no longer be uniform, which will cause the propagation path of the photon inside the material and the excitation effect to change. Through the collimation process, the light beam can be incident on the surface of the material at a perpendicular angle, thereby ensuring the consistency and repeatability of the excitation effect.

[0091] In one embodiment, the spectrum imaging detection system further includes a light homogenizer 7 and a collimator 8 .

[0092] For example, please refer to Figure 1 again. The excitation light emitted by the light source 1 is homogenized by the homogenizer and then incident on the collimator. After being collimated by the collimator, it is incident on the light splitting and light combining element 2. The light splitting and light combining element 2 receives and transmits the excitation light that has been homogenized and collimated. The excitation light is then adjusted by the lens 611 and incident on the target 4, exciting the target 4 to generate a photoluminescence signal, i.e., the target detection light; the target detection light is incident on the light splitting and light combining element 2 after passing through the lens 611, and at the same time, the excitation light reflected by the target 4 is also incident on the light splitting and light combining element 2 through the lens 611. The light splitting and light combining element 2 reflects the target detection light and the excitation light reflected by the target 4 onto the filter 5, and the filter 5 filters out the excitation light and transmits the target detection light. Thus, the target 4 is line scanned by the line spectrum scanning module 6 to obtain the line scanning spectrum of the target 4; the line scanning spectrum of the target 4 includes the photoluminescence spectrum of each point of the target.

[0093] In this embodiment, a light source (higher than or equal to the band gap energy) that can excite the target object is selected to illuminate the surface for excitation. After homogenization and collimation, the light intensity is made relatively uniform on the surface of the target object, thereby avoiding differences in excitation effects due to uneven light intensity and improving the accuracy and reliability of measurement; and the excitation light is collimated so that the light beam of the excitation light source can illuminate the surface of the target object perpendicularly, thereby ensuring the consistency and repeatability of the excitation effect.

[0094] Based on the same inventive concept, the embodiment of the present application also provides a spectrum imaging detection method applied to the above spectrum imaging detection system, including the following steps 802 to 806. Among them:

[0095] Step 802: The light source emits excitation light to the target object.

[0096] Step 804: the line spectrum scanning module scans the target object line by line along the target direction and obtains the spectrum data of the target object detection light; each scan samples a line to obtain the line spectrum of the target area detection light of the target object, and the line spectrum is split to form a surface spectrum matrix M r×n , where r is the line resolution of the line scan camera and n is the number of spectral channels.

[0097] Step 806, after the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channels to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object.

[0098] Step 808 , performing spectral analysis on each pixel point of the target object to obtain the defect location point of the target object to be tested.

[0099] For example, please refer to FIG. 1 at the same time, control the light source 1 to emit excitation light to the target 4; the target 4 includes a photoluminescent material. And control the line spectrum scanning module 6 to scan line by line along the target direction. Each time the line spectrum scanning module 6 scans, the line scanning spectrum of the target area detection light obtained by line scanning the target area 43 of the target with the excitation light is obtained; the surface spectrum of the target detection light of the target 4 is collected by scanning line by line to form a three-dimensional hyperspectral data cube of the target 4; the three-dimensional hyperspectral data cube of the target 4 includes the photoluminescence spectrum of each point of the target 4.

[0100] Specifically, the line spectrum scanning module 6 used in the present application includes a line scanning camera, which scans and processes the target object 4 line by line, completes one line of analysis at a time, and each scan can form n images of data for spectral analysis, and can obtain the main wavelength information and light intensity distribution information of each point of the target object 4, thereby quickly determining the defect location and defect type of the product.

[0101] In this embodiment, by exciting the LED lamp beads formed by the third-generation semiconductor material, the photoluminescence signal of the LED is obtained as the target detection light, so that the surface information and material-related information of the target object can be obtained without the need for additional probe crimping or high-precision alignment, thereby realizing non-contact detection of the target product. In addition, by using a line spectrum scanning module, the spectrum surface imaging detection method of this embodiment can realize surface spectrum + surface imaging through one non-contact imaging, thereby realizing the detection of product surface defects, material characteristics and physical properties.

[0102] In this application, line scanning is adopted for collection, and scanning and processing are performed line by line. One line of analysis is completed in one scan, realizing sampling and analysis from line spectrum to surface spectrum imaging. Each scan can form n image data for spectral analysis, and the main wavelength information and light intensity distribution information of each point can be obtained, so as to quickly determine the defect location and defect type of the product, and can take into account both spatial resolution and the number of spectral channels, and can simultaneously obtain high-precision spectrum surface information.

[0103] In an exemplary embodiment, as shown in FIG9 , obtaining the spectral data of the target detection light includes steps 902 to 912. Among them:

[0104] Step 902 , receiving and adjusting the target detection light excited by the excitation light of the target through the lens.

[0105] Step 904 , receiving the target object detection light adjusted by the lens through the slit, and limiting the target object detection light, thereby allowing the target area detection light to pass through.

[0106] Step 906: receiving the target area detection light after being filtered by the slit through the first lens, and collimating the target area detection light, thereby converting the divergent light into parallel light.

[0107] Step 908: using a color separation element to receive the target area detection light collimated by the first lens, and performing color separation on the target area detection light, so that the photoluminescence light of each point of the target object is spatially separated according to different wavelengths.

[0108] Step 910, converge the light separated by the color separation element through a second lens, and converge the light of the same wavelength in the photoluminescence light of each point of the target object to the same point.

[0109] Step 912: Receive the light converged by the second lens through the sensor, so as to obtain the line spectrum of the detection light of the target area.

[0110] Exemplarily, please refer to FIG3 at the same time. FIG3 shows the working process of the line spectrum scanning module 6, please refer to FIG4 at the same time, the target object 4 (DUT) is divided into n rows for successive line scanning, each imaging is a sampling of a row, each row is imaged as a surface through spectral imaging, thereby realizing spectral imaging sampling from line to surface. Exemplarily, the target object 4 is controlled to move or the line spectrum scanning module 6 is controlled to move, wherein the target object 4 (DUT) is divided into n rows for successive line scanning, each imaging is a sampling of a row, as shown in FIG4, at this time the sampled target area is the line scanning area, that is, the target object target area 43, and the target object detection light excited in the target object target area 43 passes through the focusing lens module 61 to obtain the surface spectrum 10 shown in FIG5.

[0111] Further, for each line scan of the target 4, the scanning imaging process is described as follows: the target detection light excited in the target area 43 of the target object is converged to the slit 612 located between the lens 611 and the first lens 613 through the lens 611, and is incident on the first lens 613 located between the slit 612 and the color separation element 614 through the slit 612. The target detection light of the target area 43 of the target object is converged to the color separation element 614 located between the first lens 613 and the second lens 615 through the first lens 613, and the light of the color separation element 614 is color-separated so that the photoluminescence light of each point of the target object 4 is spatially separated according to different wavelengths. The light separated by the color separation element 614 is focused by the second lens 615, and each wavelength of the photoluminescence light of each point of the target area 43 of the target object is imaged to a specific position of the sensor 62, so that the photoluminescence spectrum imaging of the target detection light of the target area 43 of the target object is obtained through the sensor 62. By controlling the target object 4 to move or the line spectrum scanning module 6 to move and repeating the above process, imaging from line scanning to full surface scanning of the target object 4 can be achieved, as shown in FIG6 .

[0112] In an exemplary embodiment, the color separation element 614 is a prism or a gradient filter or a wedge filter.

[0113] Alternatively, the color separation element 614 is a gradient filter or a wedge filter. By using a prism, a gradient filter or a wedge filter to split light, a beam of light can be divided into multiple beams, and light of different wavelengths can be dispersed and then focused to the sensor of the camera for imaging, thereby obtaining hyperspectral spectroscopic imaging. Each time the optical system collects a single line of images, N image data will be generated.

[0114] In this embodiment, through a gradient filter (wedge filter) or a prism spectroscopic scheme, the one-dimensional data obtained by line scanning can be simultaneously converted into determinant array data under multiple spectra, and then the area array imaging under different spectra is obtained by line scanning. There is no restriction on the wavelength range passed, so the spectral channel formed is not restricted.

[0115] In an exemplary embodiment, the light source emits excitation light to the target, and after the line spectrum scanning module scans the target line by line along the target direction, it also includes: receiving the excitation light through a light-splitting and light-combining element and guiding the excitation light to the target, and receiving the target detection light from the lens through the light-splitting and light-combining element; after receiving and adjusting the target detection light excited by the excitation light through the lens, it also includes: filtering out the excitation light reflected by the target through a filter and passing the target detection light.

[0116] In an exemplary embodiment, the excitation light is received by the light-splitting and light-combining element 2 and guided to the front of the lens 611, including: the light intensity of the excitation light emitted by the light source 1 is homogenized by a light homogenizer 7 located between the light source 1 and the light-splitting and light-combining element 2.

[0117] Exemplarily, the light homogenizer 7 is a quartz homogenizing fiber. The quartz homogenizing fiber is integrated with the light source, i.e., the laser, so that the laser output light generates a flat-top distribution light spot with a diameter of 7 mm at a working distance of 10 cm, and the uniformity of the light spot reaches more than 90%, so that the lamp beads at different positions in the light spot can be excited by the light of the same power.

[0118] Please refer to FIG. 1 at the same time, the light source 1 is controlled to emit excitation light, and the excitation light passes through the light homogenizer 7 to homogenize the light intensity of the excitation light, and the homogenized excitation light passes through the light splitting and light combining element 2 and the lens 611 and is incident on the target 4, exciting the photoluminescent material of the target 4 to generate the target detection light; the target detection light and the excitation light reflected by the target are guided to the filter 5 through the light splitting and light combining element 2 to filter out the excitation light reflected by the target 4 and pass the target detection light. Therefore, after the target detection light is incident on the line spectrum scanning module 6, the line spectrum scanning module 6 is controlled to perform line scanning on the target 4 to obtain the line scanning spectrum of the target 4; the line scanning spectrum of the target 4 includes the photoluminescence spectrum of each point of the target 4.

[0119] In this embodiment, in order to ensure that the intensity of the excitation light emitted by the light source can be evenly distributed when irradiating the target object, a homogenizer is used to perform light homogenization processing, so that the light intensity reaches a relatively uniform state on the surface of the target object, thereby avoiding differences in excitation effects caused by uneven light intensity and improving the accuracy and reliability of measurement.

[0120] In an exemplary embodiment, after homogenizing the light intensity of the excitation light by a homogenizer located between the light source and the light splitting and combining element, it also includes: receiving the excitation light by a collimator located between the homogenizer and the light splitting and combining element, and adjusting the emission angle of the excitation light to be perpendicular to the surface of the target object.

[0121] Exemplarily, please refer to FIG. 1 again, and control the light source 1 to emit excitation light. After the excitation light passes through the collimator 8, the luminous angle is adjusted to be perpendicular to the surface of the target 4. The collimated excitation light passes through the light-splitting and light-combining element 2 and the lens 611 and is incident on the target 4, exciting the photoluminescent material of the target 4 to generate the target detection light; the target detection light and the excitation light reflected by the target are guided to the filter 5 via the light-splitting and light-combining element 2 to filter out the excitation light reflected by the target 4 and pass the target detection light. Thus, after the target detection light is incident on the line spectrum scanning module 6, the line spectrum scanning module 6 is controlled to perform a line scan on the target 4 to obtain the line scan spectrum of the target 4; wherein the line scan spectrum of the target 4 includes the photoluminescence spectrum of each point of the target 4.

[0122] In this embodiment, the excitation light is collimated to ensure that the light beam of the excitation light source can illuminate the surface of the target object perpendicularly. If there is an angle between the light beam and the surface of the material, the incident angle of the photon will no longer be uniform, which will cause the propagation path of the photon inside the material and the excitation effect to change. Through the collimation process, the light beam can be incident on the surface of the material at a perpendicular angle, thereby ensuring the consistency and repeatability of the excitation effect.

[0123] In an exemplary embodiment, as shown in FIG. 10 , the embodiment of the present application further provides another spectrum imaging detection method, including the following steps 1002 to 1026 .

[0124] Step 1002: a light source emits excitation light to a target object; and a line spectrum scanning module scans the target object line by line along a target direction.

[0125] Step 1004: homogenize the intensity of the excitation light emitted by the light source by using a light homogenizer located between the light source and the light splitting and combining element.

[0126] Step 1006, receiving the excitation light through a collimator located between the light homogenizer and the light splitting and combining element, and adjusting the emission angle of the excitation light to be perpendicular to the surface of the target object.

[0127] Step 1008 , receiving the excitation light through the light-splitting and light-combining element and guiding the excitation light to the target object, and receiving the target object detection light from the lens through the light-splitting and light-combining element.

[0128] Step 1010 , receiving and adjusting the target detection light excited by the excitation light of the target through the lens.

[0129] Step 1012: filter out the excitation light reflected by the target object through a filter and detect the light through the target object.

[0130] Step 1014 , receiving the target object detection light adjusted by the lens through the slit, and limiting the target object detection light, thereby allowing the target area detection light to pass through.

[0131] Step 1016, receiving the target area detection light after being filtered by the slit through the first lens, and collimating the target area detection light, thereby converting the divergent light into parallel light.

[0132] Step 1018, using a prism or a gradient filter or a wedge filter to receive the target area detection light collimated by the first lens, and performing color separation on the target area detection light, so that the photoluminescence light of each point of the target object is spatially separated according to different wavelengths.

[0133] Step 1020, converge the light separated by the prism or the gradient filter through a second lens, and converge the light of the same wavelength in the photoluminescence light of each point of the target object to the same point.

[0134] Step 1022, the sensor receives the light converged by the second lens, thereby obtaining the line spectrum of the target area detection light; each scan sampling line, the line spectrum of the target area detection light of the target object is obtained, and the line spectrum is split to form a surface spectrum matrix M r×n , where r is the line resolution of the line scan camera and n is the number of spectral channels.

[0135] Step 1024, after the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channels to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object.

[0136] Step 1026, performing spectral analysis on each pixel point of the target object to obtain the defect location point of the target object to be tested.

[0137] In this embodiment, light excitation is used for contactless emission wavelength detection and surface defect detection of third-generation semiconductor materials (such as GaN, SiC or related doped materials, etc.). Specifically, the characteristic that the spectrum formed by excitation is different from the standard spectrum if there are quality defects such as different concentrations or doping in the material is utilized, and the difference is judged by comparing the spectrum curve (compared with the excitation spectrum of the standard sample). If the spectrum of the target object is different from the spectrum of the standard sample, it indicates that the object being tested, i.e., the target object, has defects.

[0138] It should be understood that, although the various steps in the flowcharts involved in the above-mentioned embodiments are displayed in sequence according to the indication of the arrows, these steps are not necessarily executed in sequence according to the order indicated by the arrows. Unless there is a clear explanation in this article, the execution of these steps does not have a strict order restriction, and these steps can be executed in other orders. Moreover, at least a part of the steps in the flowcharts involved in the above-mentioned embodiments can include multiple steps or multiple stages, and these steps or stages are not necessarily executed at the same time, but can be executed at different times, and the execution order of these steps or stages is not necessarily to be carried out in sequence, but can be executed in turn or alternately with other steps or at least a part of the steps or stages in other steps.

[0139] The technical features of the above embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0140] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the present application. It should be noted that, for a person of ordinary skill in the art, several modifications and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the attached claims.

Claims

1. A spectrum imaging detection system, characterized in that: include: A light source, used to emit excitation light to a target object; the target object includes a photoluminescent material; A line spectrum scanning module performs line scanning on the target object and obtains spectrum data of the detection light of the target object; The line spectrum scanning module scans line by line along the target direction, sampling one line each time scanning, and obtains the line spectrum of the detection light of the target area of ​​the target object; The line spectrum scanning module includes a color separation element, and the line spectrum of the target area detection light is split and imaged into a surface spectrum by the color separation element; After the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channel to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object.

2. The spectrum imaging detection system according to claim 1, characterized in that: The line spectrum scanning module comprises: A lens receives and adjusts the target detection light excited by the excitation light; A slit, receiving the target object detection light adjusted by the lens; and allowing the target area detection light to pass through; A first lens receives the target area detection light after being filtered by the slit, and collimates the target area detection light, thereby converting the divergent light into parallel light; The color separation element is further used to receive the target area detection light collimated by the first lens, and to perform color separation on the target area detection light, so that the photoluminescence light of each point of the target object is spatially separated according to different wavelengths; A second lens is used to converge the light separated by the color separation element, and converge the light of the same wavelength in the photoluminescence light of each point of the target object to the same point; The sensor receives the light converged by the second lens and is used for imaging the photoluminescence spectrum of the target detection light.

3. The spectrum imaging detection system according to claim 2, characterized in that: The spectrum imaging detection system also includes: The filter is located between the lens and the slit, and is used to filter out the excitation light reflected by the target and detect the light through the target.

4. The spectrum imaging detection system according to claim 3, characterized in that: The spectrum imaging detection system also includes: A light splitting and combining element receives the excitation light and guides the excitation light to the target object, and receives the detection light from the target object and transmits it to the line spectrum scanning module; The light splitting and combining element is located between the lens and the filter.

5. The spectrum imaging detection system according to claim 1, characterized in that: The color separation element is a prism, a gradient filter or a wedge filter.

6. The spectrum imaging detection system according to claim 1, characterized in that: The system further comprises a light homogenizer, which is located at the transmitting end of the light source and is used for receiving the excitation light emitted by the light source and performing light homogenization processing on the light intensity of the excitation light.

7. The spectrum imaging detection system according to claim 6, characterized in that: The system further comprises a collimator, which is located at the output end of the light homogenizer and is used for receiving the homogenized excitation light and adjusting the emission angle of the excitation light to be perpendicular to the surface of the target object.

8. A spectrum imaging detection method, characterized in that: For detecting a target comprising a photoluminescent material, the method comprises: The light source emits excitation light to the target object; The line spectrum scanning module scans the target object line by line along the target direction and obtains the spectrum data of the target detection light; each scan samples a line to obtain the line spectrum of the target area detection light of the target object, and the line spectrum is split to form a surface spectrum matrix M r×n , where r is the line scan camera resolution and n is the number of spectral channels; After the line-by-line scanning is completed, the line-by-line scanned data is extracted and combined according to the spectral channels to form a three-dimensional hyperspectral data cube of the target object; the three-dimensional hyperspectral data cube of the target object includes the photoluminescence spectrum data of each pixel point of the target object; Perform spectral analysis on each pixel of the target object to obtain the defect location point of the target object to be tested.

9. The method according to claim 8, characterized in that The acquiring of the spectral data of the target object detection light comprises: receiving and adjusting the target detection light excited by the excitation light from the target through a lens; receiving the target detection light regulated by the lens through the slit and limiting the target detection light, thereby allowing the target area detection light to pass through; Receiving the target area detection light after being filtered by the slit through the first lens, and collimating the target area detection light, thereby converting the divergent light into parallel light; Using a color separation element to receive the target area detection light collimated by the first lens, and color separation the target area detection light, so that the photoluminescence light of each point of the target object is separated in space according to different wavelengths; Converging the light separated by the color separation element through a second lens, and converging the light of the same wavelength in the photoluminescence light of each point of the target object to the same point; The light rays converged by the second lens are received by the sensor, thereby obtaining the line spectrum of the detection light of the target area.

10. The method according to claim 9, characterized in that After the light source emits excitation light to the target object and the line spectrum scanning module scans the target object line by line along the target direction, the method further includes: receiving the excitation light through a light-splitting and light-combining element and directing the excitation light to the target object, and receiving the target object detection light from the lens through a light-splitting and light-combining element; After receiving and adjusting the target object detection light excited by the excitation light through the lens, the method further includes: The excitation light reflected by the target is filtered out through a filter and the detection light is transmitted through the target.

Images