A method for rapid loading and unloading of semiconductor factories

Abstract

The present invention discloses a method for rapid loading and unloading materials in a semiconductor factory, belonging to the field of automation technology. A material management server detects the unloading signal of machine A in real time, obtains information about the processed materials, and determines the location of the next station, machine B. The server generates unloading and unloading tasks and dispatches AGVs. Based on priority sorting and an electronic map, the AGVs perform efficient transportation and loading and unloading operations of materials from machine A to B. This solves the technical problem of reducing the waiting time of on-site machines. It can efficiently manage material priorities, ensure that high-priority tasks are executed first, reduce the complexity of task allocation, avoid conflicts between AGVs on routes, improve the safety and efficiency of the entire scheduling process, avoid machine downtime caused by unsynchronized loading and unloading, speed up material loading and unloading, thereby reducing machine idle time and improving overall production efficiency.

Description

Technical Field

[0001] The invention belongs to the field of automation technology, and in particular relates to a method for rapid loading and unloading of semiconductor factories. Background Art

[0002] In modern industrial production, production machines operate by extracting wafers. That is, the machine extracts materials from a front-opening unified pod (FOUP) and places them inside the machine for production. After production is completed, the materials are placed back into the original FOUP. This results in the FOUP remaining in its original position after the machine is finished producing. On-site automated transportation is performed in the following manner: when the production machine is idle, an AGV (Automated Guided Vehicle) is selected to transport the FOUP to the machine. After the machine is finished producing, the AGV is operated to remove the FOUP and transport it to an idle machine for the next process or a shelf in the temporary storage area. After the AGV removes the materials, a new FOUP is selected to be transported to the current machine.

[0003] Deficiencies of existing technology:

[0004] 1. During the material transportation and unloading process on the machine, loading cannot be carried out, which will cause the on-site machine to wait for materials for a long time.

[0005] 2. AGV path and task allocation are not optimal, resulting in low transportation efficiency. Summary of the Invention

[0006] The purpose of the present invention is to provide a method for rapid loading and unloading of materials in a semiconductor factory, which solves the technical problem of reducing the waiting time of on-site machines.

[0007] To achieve the above object, the present invention adopts the following technical solutions:

[0008] A method for rapid loading and unloading of semiconductor materials in a semiconductor factory comprises the following steps:

[0009] Step 1: After machine A completes production, it generates a material unloading signal. After the material management server detects and obtains the material unloading signal, it executes the following steps 2 to 8;

[0010] Step 2: Obtain information about processed materials from machine A;

[0011] Step 3: Determine the next station, machine B, based on the information of the processed material;

[0012] Step 4: Obtain the site location information from the electronic map. The site location information includes the location information of machine A, the location information of material storage location C of machine A, and the location information of material storage location D of the next station machine B;

[0013] Step 5: Generate unloading tasks, including information about processed materials and site location information;

[0014] Step 6: Obtain the information of the unprocessed materials in material storage C, calculate the priority scores according to the process attributes, sort them, select the unprocessed materials with the highest priority as the materials to be processed, and record the priority scores of the materials to be processed;

[0015] Step 7: Generate a loading task, including the information of the material to be processed and the site location information, and mark the priority score of the material to be processed as the priority score of the loading task;

[0016] Step 8: Package the loading and unloading tasks into the same batch of task packages, and mark the priority score of the loading task as the priority score of the task package;

[0017] Send the task packages to the task scheduling server in batches, and the task scheduling server executes the following steps 9 to 10;

[0018] Step 9: Add the task packages to the task list and sort them according to the priority score. Select the task package ranked first in the task list and send it to the AGV. Based on the site location information in the task package, formulate the AGV's execution route, which will first go to the material storage location C.

[0019] Step 10: All AGVs upload their location information to the task scheduling server in real time, and the task scheduling server generates scheduling information;

[0020] Step 11: The task scheduling server randomly selects an idle AGV, namely AGV_C, and sends the highest priority task package and scheduling information in the task list to AGV_C. AGV_C executes the task according to the execution route and scheduling information in the task package.

[0021] Preferably, when executing step 4, the electronic map is a factory electronic map preset in the material management server, each machine is configured with a unique material storage location, and the geographical location of each machine and the geographical location of each material storage location are marked in the electronic map.

[0022] Preferably, when executing step 6, the following steps are specifically included:

[0023] Step 6-1: The material management server obtains information about all unprocessed materials from the material storage location C;

[0024] Step 6-2: Obtain the process attributes of each unprocessed material, including the placement time T i 、Emergency i and priority O i ;

[0025] Step 6-3: Calculate the priority score for each unprocessed material using the following priority formula:

[0026]

[0027] Among them, P i is the priority score of the i-th unprocessed material; E i is the urgency of the i-th unprocessed material; i is the production sequence of the i-th unprocessed material. The lower the value, the higher the priority of the production sequence. i is the placement time of the i-th unprocessed material. The larger the value, the longer the placement time. w1, w2, and w3 are all weight coefficients.

[0028] Step 6-4: Assign priority score P to all unprocessed materials i Sort by

[0029] Step 6-5: Select the unprocessed material with the highest priority score as the material to be processed;

[0030] Step 6-6: Record the priority score of the material to be processed and mark it as the priority of the loading task.

[0031] Preferably, when executing step 9, specifically, a task list is established, after obtaining a batch of task packages, the task packages are added to the task list and sorted according to the priority scores of the batch of task packages;

[0032] Select the task package ranked first, and formulate the AGV execution route based on the site location information in the task package. The execution route is to go to material storage C first, then to machine A, and finally to material storage D.

[0033] Preferably, when executing step 10, the following steps are specifically included:

[0034] Step 10-1: All AGVs upload their current location information to the task scheduling server in real time, and the system records the current location and motion status of each AGV;

[0035] Step 10-2: The task scheduling server calculates the estimated time T for each AGV to enter the next path segment based on the AGV's location information. m,k ;T m,k is the time of the mth AGV on the kth path segment;

[0036] Step 10-3: According to the length d of the path segment k and the AGV's travel speed v m , calculate the travel time T of each AGV in each path segment m,k ;dk is the length of the kth path segment; v m is the driving speed of the mth AGV;

[0037] Step 10-4: Assign a time window to each AGV on each path:

[0038] TW m =[T m,start ,T m,end ];

[0039] TW m represents the time window of the mth AGV in a certain path segment; T m,start Indicates the time when the mth AGV starts to enter the path segment, T m,end Indicates the time when the mth AGV leaves the path segment;

[0040] Ensure that the time windows of all AGVs do not overlap:

[0041]

[0042] TW j represents the time window of the jth AGV in a certain path segment, where m≠j;

[0043] Step 10-5: According to the arrangement of the time window, adjust the travel time of each AGV and generate the scheduling information of each AGV.

[0044] Preferably, when executing step 11, the following steps are specifically included:

[0045] Step 11-1: AGV_C goes to material storage C and takes out the materials to be processed;

[0046] Step 11-2: AGV_C goes to machine A, removes the processed material and places the material to be processed;

[0047] Step 11-3: AGV_C goes to material storage D to store the processed materials.

[0048] The fast loading and unloading method for a semiconductor factory described in the present invention solves the technical problem of reducing the waiting time of on-site machines. The present invention can efficiently manage the material priority by calculating the priority of each material. The loading and unloading tasks are combined and packaged into task packages of the same batch. The priority scores of the task packages are reasonably set to ensure that high-priority tasks can be executed first. At the same time, AGV scheduling generates the optimal route based on the site location information of the task package, reducing the complexity of task allocation. Dynamic scheduling is performed through the real-time location information of the AGV, and the travel time of each AGV on the path segment is calculated in real time. An independent time window is allocated to each AGV to avoid conflicts between AGVs on the route, thereby improving the safety and efficiency of the entire scheduling process. When completing the material exchange task, the machine shutdown and waiting caused by asynchronous loading and unloading is avoided. Through reasonable task planning and AGV scheduling, the speed of material loading and unloading is accelerated, thereby reducing the idle time of the machine and improving overall production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 It is the main flow chart of the present invention;

[0050] Figure 2 A flowchart of the route when the AGV of the present invention performs a task;

[0051] Figure 3 Schematic diagram of the path segments of the AGV of the present invention under two schemes. DETAILED DESCRIPTION

[0052] like Figure 1-Figure 3 A method for rapid loading and unloading of semiconductor materials in a semiconductor factory is shown, comprising the following steps:

[0053] Step 1: After machine A completes production, it generates a material unloading signal. After the material management server detects and obtains the material unloading signal, it executes the following steps 2 to 8;

[0054] Step 2: Obtain information about processed materials from machine A;

[0055] Step 3: Determine the next station, machine B, based on the information of the processed material;

[0056] Step 4: Obtain the site location information from the electronic map. The site location information includes the location information of machine A, the location information of material storage location C of machine A, and the location information of material storage location D of the next station machine B;

[0057] The electronic map is a factory electronic map preset in the material management server. Each machine is configured with a unique material storage location, and the geographical location of each machine and each material storage location is marked on the electronic map.

[0058] In this embodiment, the factory electronic map records the location of each machine and each material storage location, and marks the distance between each device.

[0059] Step 5: Generate unloading tasks, including information about processed materials and site location information;

[0060] Step 6: Obtain the information of the unprocessed materials in material storage C, calculate the priority scores according to the process attributes, sort them, select the unprocessed materials with the highest priority as the materials to be processed, and record the priority scores of the materials to be processed;

[0061] The specific steps include:

[0062] Step 6-1: The material management server obtains information about all unprocessed materials from the material storage location C;

[0063] Step 6-2: Obtain the process attributes of each unprocessed material, including the placement time T i 、Emergency i and priority O i ;

[0064] In this embodiment, the process attributes of the material are set according to the order information of the material, including the placement time T of the material in the storage place. i This parameter is generated by the material management server: when the material is stored in the material storage C, the material management server starts timing and records the storage time of the material in the material storage C. When the material is taken away from the material storage C, the material management server stops timing.

[0065] Placement time T i The larger it is, the higher its contribution to the priority score.

[0066] Urgency E i Set according to order information;

[0067] Priority O i A sorting number that represents the production order of the material, which is sorted on a first-come, first-served basis.

[0068] Step 6-3: Calculate the priority score for each unprocessed material using the following priority formula:

[0069]

[0070] Among them, P i is the priority score of the i-th unprocessed material; E i is the urgency of the i-th unprocessed material; iis the production sequence of the i-th unprocessed material. The lower the value, the higher the priority of the production sequence. i is the placement time of the i-th unprocessed material. The larger the value, the longer the placement time. w1, w2, and w3 are all weight coefficients.

[0071] Step 6-4: Assign priority score P to all unprocessed materials i Sort by

[0072] Step 6-5: Select the unprocessed material with the highest priority score as the material to be processed;

[0073] Step 6-6: Record the priority score of the material to be processed and mark it as the priority of the loading task.

[0074] Step 7: Generate a loading task, including the information of the material to be processed and the site location information, and mark the priority score of the material to be processed as the priority score of the loading task;

[0075] Step 8: Package the loading and unloading tasks into the same batch of task packages, and mark the priority score of the loading task as the priority score of the task package;

[0076] Send the task packages to the task scheduling server in batches, and the task scheduling server executes the following steps 9 to 10;

[0077] Step 9: Add the task packages to the task list and sort them according to the priority score. Select the task package ranked first in the task list and send it to the AGV. Based on the site location information in the task package, formulate the AGV's execution route, which will first go to the material storage location C.

[0078] When executing step 9, specifically, a task list is created. After obtaining a batch of task packages, the task packages are added to the task list and sorted according to their priority scores.

[0079] Select the task package ranked first, and formulate the AGV execution route based on the site location information in the task package. The execution route is to go to material storage C first, then to machine A, and finally to material storage D.

[0080] like Figure 2The figure shows two driving route diagrams of a single AGV, wherein path segments L1, L2, and L3 are the routes formulated in this embodiment, which are recorded as the material exchange transport routes, while path segments L4, L5, L6, and L7 are the conventional transport routes in the prior art, which are recorded as the conventional routes. It can be seen that in the conventional route, machine A will have a long standby time, during which processing cannot be carried out, while the material exchange transport route in this embodiment avoids the entire standby time, so that machine A can load materials immediately after unloading, and its loading time can achieve a fixed value, thereby speeding up the production efficiency of machine A.

[0081] Tables 1 to 6 below are data tables for three application scenarios in this embodiment, with different distances between machine A, material storage location C, and material storage location D:

[0082]

[0083] Table 1

[0084]

[0085] Table 2

[0086]

[0087] Table 3

[0088]

[0089] Table 4

[0090]

[0091]

[0092] Table 5

[0093]

[0094] Table 6

[0095] As can be seen from Tables 1 to 6, in Scenario 1, when calculating the AGV transport time and material loading time, when the normal transport distance per segment is higher than the exchange material transport distance, the overall transport time is saved by 30 seconds and the material loading time is saved by 50 seconds.

[0096] In scenario 2, the AGV transport time and material loading time are calculated. When the data of each segment of the normal transport distance is the same as the exchange material transport distance, the overall transport time is saved by 15s and the material loading time is saved by 38s.

[0097] In scenario 3, the AGV transport time and material loading time are calculated. When the normal transport distance is lower than the exchange material transport distance for each segment, the overall transport time is saved by 0s and the material loading time is saved by 23s.

[0098] The total time for the materials to be processed to be loaded onto the machine for the material exchange transport route adopted in this embodiment is fixed and is less than the total time for the materials to be processed to be loaded onto the machine for the conventional transport route. This greatly improves production efficiency and reduces the time that machine A is in standby state to a minimum.

[0099] Step 10: All AGVs upload their location information to the task scheduling server in real time, and the task scheduling server generates scheduling information;

[0100] The specific steps include:

[0101] Step 10-1: All AGVs upload their current location information to the task scheduling server in real time, and the system records the current location and motion status of each AGV;

[0102] Step 10-2: The task scheduling server calculates the estimated time T for each AGV to enter the next path segment based on the AGV's location information. i,k ;

[0103] Step 10-3: According to the length d of the path segment k and the AGV's travel speed v i , calculate the travel time T of each AGV in each path segment i,k ;

[0104] In this embodiment, the AGV's travel speed v i It is a fixed speed. The driving speed of each AGV may be different. The driving time T is calculated by the speed formula i,k :

[0105]

[0106] Step 10-4: Assign a time window to each AGV on each path:

[0107] TW i =[T i,start ,T i,end ];

[0108] In this embodiment, TW i Represents the time window of the i-th AGV in a certain path segment;

[0109] T i,start Indicates the time when the i-th AGV starts to enter the path segment;

[0110] T i,endIndicates the time when the i-th AGV leaves the path segment;

[0111] The path segment represents the route of the AGV from one station to another. The distance d of each route path is k It will be pre-marked on the electronic map.

[0112] Ensure that the time windows of all AGVs do not overlap:

[0113]

[0114] TW j It represents the time window of the j-th AGV in a certain path segment. The time windows of the i-th AGV and the j-th AGV cannot have intersections, ensuring that they will not occupy the same path in the same time period.

[0115] Step 10-5: According to the arrangement of the time window, adjust the travel time of each AGV and generate the scheduling information of each AGV.

[0116] T m,k is the time it takes for the mth AGV to be on the kth path segment; d k is the length of the kth path segment; v m is the driving speed of the mth AGV;

[0117] TW m represents the time window of the mth AGV in a certain path segment; T m,start Indicates the time when the mth AGV starts to enter the path segment, T m,end Indicates the time when the mth AGV leaves the path segment;

[0118] TW j represents the time window of the jth AGV in a certain path segment, where m≠j;

[0119] In this embodiment, the time taken by each AGV on each path segment is first calculated using the speed formula:

[0120] That is, using the formula Calculate the travel time T of the i-th AGV i,k , and then determine the time window of each AGV on each path segment.

[0121] Then schedule according to the time window of each AGV. Take two AGVs as an example:

[0122] AGV1 and AGV2 need to process tasks simultaneously, and both pass through path segment L1 between material storage C and machine A, with a path distance of 10 meters. AGV1's speed is 1 m / s, and AGV2's speed is 0.8 m / s.

[0123] According to the speed formula, it can be calculated that AGV1 takes 10 seconds to pass through path segment L1, and AGV2 takes 12 seconds to pass through path segment L1.

[0124] According to the near time window, if AGV1 enters path segment L1 at t = 0, its time window is [0, 10], which means that AGV1 occupies this path segment between t = 0 and t = 10.

[0125] AGV2 can only enter after AGV1 leaves. Therefore, the time window of AGV2 is [10, 22.5], ensuring that the two will not conflict.

[0126] Step 11: The task scheduling server randomly selects an idle AGV, namely AGV_C, and sends the task package with the highest priority in the task list and the scheduling information to AGV_C. AGV_C then executes the task according to the execution route and scheduling information in the task package.

[0127] The specific steps include:

[0128] Step 11-1: AGV_C goes to material storage C and takes out the materials to be processed;

[0129] Step 11-2: AGV_C goes to machine A, removes the processed material and places the material to be processed;

[0130] Step 11-3: AGV_C goes to material storage D to store the processed materials.

[0131] The fast loading and unloading method for a semiconductor factory described in the present invention solves the technical problem of reducing the waiting time of on-site machines. The present invention can efficiently manage the material priority by calculating the priority of each material. The loading and unloading tasks are combined and packaged into task packages of the same batch. The priority scores of the task packages are reasonably set to ensure that high-priority tasks can be executed first. At the same time, AGV scheduling generates the optimal route based on the site location information of the task package, reducing the complexity of task allocation. Dynamic scheduling is performed through the real-time location information of the AGV, and the travel time of each AGV on the path segment is calculated in real time. An independent time window is allocated to each AGV to avoid conflicts between AGVs on the route, thereby improving the safety and efficiency of the entire scheduling process. When completing the material exchange task, the machine shutdown and waiting caused by asynchronous loading and unloading is avoided. Through reasonable task planning and AGV scheduling, the speed of material loading and unloading is accelerated, thereby reducing the idle time of the machine and improving overall production efficiency.

Claims

1. A method for rapid loading and unloading of semiconductor factories, characterized by: The steps include: Step 1: After machine A completes production, it generates a material unloading signal. After the material management server detects and obtains the material unloading signal, it executes the following steps 2 to 8; Step 2: Obtain information about processed materials from machine A; Step 3: Determine the next station, machine B, based on the information of the processed material; Step 4: Obtain the site location information from the electronic map. The site location information includes the location information of machine A, the location information of material storage location C of machine A, and the location information of material storage location D of the next station machine B; Step 5: Generate unloading tasks, including information about processed materials and site location information; Step 6: Obtain the information of the unprocessed materials in material storage C, calculate the priority scores according to the process attributes, sort them, select the unprocessed materials with the highest priority as the materials to be processed, and record the priority scores of the materials to be processed; Step 7: Generate a loading task, including the information of the material to be processed and the site location information, and mark the priority score of the material to be processed as the priority score of the loading task; Step 8: Package the loading and unloading tasks into the same batch of task packages, and mark the priority score of the loading task as the priority score of the task package; Send the task packages to the task scheduling server in batches, and the task scheduling server executes the following steps 9 to 10; Step 9: Add the task packages to the task list and sort them according to the priority score. Select the task package ranked first in the task list and send it to the AGV. Based on the site location information in the task package, formulate the AGV's execution route, which will first go to the material storage location C. Step 10: All AGVs upload their location information to the task scheduling server in real time, and the task scheduling server generates scheduling information; Step 11: The task scheduling server randomly selects an idle AGV, namely AGV_C, and sends the highest priority task package and scheduling information in the task list to AGV_C. AGV_C executes the task according to the execution route and scheduling information in the task package.

2. A semiconductor factory rapid loading and unloading method according to claim 1, characterized in that: When executing step 4, the electronic map is a factory electronic map preset in the material management server. Each machine is configured with a unique material storage location, and the geographical location of each machine and each material storage location is marked on the electronic map.

3. The semiconductor factory rapid loading and unloading method according to claim 1, characterized in that: When executing step 6, the specific steps include: Step 6-1: The material management server obtains information about all unprocessed materials from the material storage location C; Step 6-2: Obtain the process attributes of each unprocessed material, including the placement time T i 、Emergency i and priority O i ; Step 6-3: Calculate the priority score for each unprocessed material using the following priority formula: Among them, P i is the priority score of the i-th unprocessed material; E i is the urgency of the i-th unprocessed material; i is the production sequence of the i-th unprocessed material. The lower the value, the higher the priority of the production sequence. i is the placement time of the i-th unprocessed material. The larger the value, the longer the placement time. w1, w2, and w3 are all weight coefficients. Step 6-4: Assign priority score P to all unprocessed materials i Sort by Step 6-5: Select the unprocessed material with the highest priority score as the material to be processed; Step 6-6: Record the priority score of the material to be processed and mark it as the priority of the loading task.

4. The semiconductor factory rapid loading and unloading method according to claim 1, characterized in that: When executing step 9, specifically, a task list is created. After obtaining a batch of task packages, the task packages are added to the task list and sorted according to their priority scores. Select the task package ranked first, and formulate the AGV execution route based on the site location information in the task package. The execution route is to go to material storage C first, then to machine A, and finally to material storage D.

5. The semiconductor factory rapid loading and unloading method according to claim 1, characterized in that: When executing step 10, the following steps are specifically included: Step 10-1: All AGVs upload their current location information to the task scheduling server in real time, and the system records the current location and motion status of each AGV; Step 10-2: The task scheduling server calculates the estimated time T for each AGV to enter the next path segment based on the AGV's location information. m,k ;T m,k is the time of the mth AGV on the kth path segment; Step 10-3: According to the length d of the path segment k and the AGV's travel speed v m , calculate the travel time T of each AGV in each path segment m,k ;d k is the length of the kth path segment; v m is the driving speed of the mth AGV; Step 10-4: Assign a time window to each AGV on each path: TW m =[T m,start ,T m,end ]; TW m represents the time window of the mth AGV in a certain path segment; T m,start Indicates the time when the mth AGV starts to enter the path segment, T m,end Indicates the time when the mth AGV leaves the path segment; Ensure that the time windows of all AGVs do not overlap: TW j represents the time window of the jth AGV in a certain path segment, where m≠j; Step 10-5: According to the arrangement of the time window, adjust the travel time of each AGV and generate the scheduling information of each AGV.

6. The semiconductor factory rapid loading and unloading method according to claim 1, characterized in that: When executing step 11, the following steps are specifically included: Step 11-1: AGV_C goes to material storage C and takes out the materials to be processed; Step 11-2: AGV_C goes to machine A, removes the processed material and places the material to be processed; Step 11-3: AGV_C goes to material storage D to store the processed materials.

Images