An air conditioning system

Abstract

The application discloses an air conditioning system, comprising: a return air inlet, a fresh air inlet, an air outlet; a temperature regulating branch, capable of regulating the temperature of air introduced from the air inlet of the temperature regulating branch and discharging the air from the air outlet of the temperature regulating branch, the air outlet of the temperature regulating branch being connected to the air outlet; a humidity regulating branch, the air inlet of the humidity regulating branch being used for introducing air from the temperature regulating branch, and the humidity regulating branch being capable of regulating the humidity of the introduced air and discharging the air from the air outlet; and the air inlet of the temperature regulating branch being capable of obtaining air from the return air inlet, the fresh air inlet and the air outlet of the humidity regulating branch. By separately arranging the humidity regulating branch, the temperature of the air is not affected during the humidity regulating process, and interference between the temperature regulating and the humidity regulating is effectively avoided, so that the air conditioning system can effectively solve the problem that the temperature regulating process and the humidity regulating process interfere with each other and the temperature regulating and humidity regulating effect is poor.

Description

Technical Field

[0001] This invention relates to the field of air conditioning technology, and more specifically, to an air conditioning system. Background Technology

[0002] High-precision temperature and humidity controlled cleanrooms are commonly used in industrial fields such as microelectronics and precision instruments. Strictly controlling parameters such as temperature and humidity accuracy, cleanliness, noise, and pressure within the cleanroom manufacturing environment is crucial for improving product yield.

[0003] In typical cleanroom air conditioning systems, the return air is first mixed with the fresh air, then dehumidified and cooled by cooling coils. It is then heated and humidified by heaters (e.g., heat exchange coils, electric heaters) and humidifiers (e.g., wet film humidifiers, electric steam humidifiers) until the ideal airflow is reached before being delivered into the room. However, humidity control and temperature control can interfere with each other, making precise temperature and / or humidity control difficult.

[0004] In the process of realizing this invention, the inventors discovered that the prior art has at least the following problems: the temperature regulation process and the humidity regulation process of the air conditioning system interfere with each other, resulting in poor temperature and humidity regulation effects. Summary of the Invention

[0005] In view of this, the purpose of the present invention is to provide an air conditioning system that can effectively solve the problem of poor temperature and humidity control due to mutual interference between the temperature and humidity control processes of the air conditioning system.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] An air conditioning system, comprising:

[0008] Return air vent, fresh air vent, supply air vent;

[0009] The temperature-regulating branch can regulate the temperature of the air introduced into the air inlet of the temperature-regulating branch and discharge it from the air outlet of the temperature-regulating branch, and the air outlet of the temperature-regulating branch is connected to the air supply outlet.

[0010] The humidity regulating branch has an air inlet for introducing air from the temperature regulating branch, and the humidity of the introduced air is adjusted before the humidity is discharged from the air outlet of the humidity regulating branch; the air inlet of the temperature regulating branch can obtain air from the return air inlet, the fresh air inlet and the air outlet of the humidity regulating branch.

[0011] When applying the above-mentioned air conditioning system, the heating of the temperature-regulating branch and the humidification of the humidification branch are controlled according to the temperature and humidity requirements of the target chamber. The air outlet of the humidification branch supplies air to the temperature-regulating branch to adjust the humidity of the supply air branch, ensuring that the temperature and humidity of the supply air outlet meet the requirements. In this air conditioning system, the temperature-regulating branch is connected between the supply air outlet and the return air outlet for temperature control. Then, a separate humidification branch is set up, which draws air from the temperature-regulating branch, humidifies it, and returns it to the air inlet of the temperature-regulating branch to achieve humidification, thus achieving the final temperature and humidity control. By setting up a separate humidification branch, the temperature of the air body is avoided during the humidification process, thereby effectively avoiding interference between temperature and humidity control. In summary, this air conditioning system can effectively solve the problem of mutual interference between the temperature and humidity control processes in air conditioning systems, resulting in poor temperature and humidity control effects.

[0012] In some technical solutions, the temperature regulating branch includes a first heat exchange device and a first electric heater; the first heat exchange device includes a first heat exchange channel and a second heat exchange channel that can exchange heat with each other, the outlet of the first heat exchange channel is connected to the first electric heater; the second heat exchange channel is used to connect to an external fluid.

[0013] In some technical solutions, the air inlet of the humidity regulating branch is connected between the first heat exchange device and the first electric heater.

[0014] In some technical solutions, a fan for airflow is also included, the fan being connected between the first heat exchange device and the first electric heater, and the air inlet of the humidification branch being connected between the fan and the first electric heater.

[0015] In some technical solutions, the humidity control branch includes a second heat exchange device as a dehumidification device and a humidifier as a humidification device; the second heat exchange device includes a third heat exchange channel and a fourth heat exchange channel that can exchange heat with each other, the third heat exchange channel being connected to the humidifier; the fourth heat exchange channel, the compressor, the condenser, and the throttling device are connected in series to form a mechanical compression refrigeration system.

[0016] In some technical solutions, a controller is also included. The inlet end of the second heat exchange channel is connected to a second electric heater. A first temperature sensor is provided between the second electric heater and the inlet of the second heat exchange channel. The controller can control the start / stop and / or opening degree of the second electric heater, and / or control the flow rate of the second heat exchange channel, based on the difference between the detected value of the first temperature sensor and the first target temperature value. A second temperature sensor is also included for monitoring the outlet air temperature of the first heat exchange channel. The controller can set the first target temperature value based on the difference between the second temperature sensor and the second target temperature value.

[0017] In some technical solutions, the temperature control branch further includes a third electric heater, which is connected between the first electric heater and the air outlet. A third temperature sensor is provided between the third electric heater and the first electric heater. It also includes a fourth temperature sensor for detecting the temperature near the air outlet. The controller controls the opening degree and / or start / stop of the first electric heater and the third electric heater based on the third temperature sensor and the fourth temperature sensor. The detection accuracy of the third temperature sensor is higher than that of the second temperature sensor.

[0018] In some technical solutions, a humidity sensor is also included for detecting the humidity of the air near the air outlet. The controller can adjust the humidity adjustment power of the humidity adjustment module of the humidity adjustment branch according to the humidity sensor. The humidity adjustment module includes a dehumidification function device and a humidification function device.

[0019] In some technical solutions, a fifth temperature sensor is also included for detecting the temperature of the air outlet of the humidification branch. A fourth electric heater is provided between the air outlet of the humidification branch and the humidification module. The controller can control the fourth electric heater according to the detection value of the fifth temperature sensor.

[0020] In some technical solutions, the fresh air inlet is equipped with a filter. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a connection diagram of an air conditioning system provided in an embodiment of the present invention;

[0023] Figure 2 This is a control schematic diagram of a mechanical compression refrigeration system provided in an embodiment of the present invention;

[0024] Figure 3 The diagram illustrates the air handling process of an air conditioning system provided in an embodiment of the present invention, which performs ultra-high precision temperature and humidity regulation under the conditions of one embodiment (fresh air condition is 21°C, 40%RH, and supply air setpoint is 25°C, 55%RH).

[0025] The following labels are shown in the attached diagram:

[0026] 10—Air conditioning system, 11—Return air vent, 12—Fresh air vent, 13—Supply air vent, 14—Temperature control branch, 15—Humidity control branch;

[0027] 101 – Filter, 102 – First heat exchanger, 103 – Fan, 104 – First electric heater, 105 – Third electric heater, 106 – Second heat exchanger, 107 – Humidifier, 108 – Fourth electric heater, 109 – Fourth temperature sensor, 110 – Humidity sensor, 111 – Third temperature sensor, 112 – Electric water valve, 113 – Fifth temperature sensor, 114 – Second electric heater, 115 – First temperature sensor, 116 – Second temperature sensor, 20 – Mechanical compression refrigeration system, 201 – Compressor, 202 – Condenser, 203 – Throttling device, 30 – Controller.

[0028] The dashed lines represent control signal lines. Detailed Implementation

[0029] This invention discloses an air conditioning system to effectively solve the problem of poor temperature and humidity control in air conditioning systems.

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0031] Please see Figures 1-3 , Figure 1 This is a connection diagram of an air conditioning system provided in an embodiment of the present invention; Figure 2 This is a control schematic diagram of a mechanical compression refrigeration system provided in an embodiment of the present invention; Figure 3 The diagram illustrates the air handling process of an air conditioning system provided in an embodiment of the present invention, which performs ultra-high precision temperature and humidity regulation under the conditions of one embodiment (fresh air condition is 21°C, 40%RH, and supply air setpoint is 25°C, 55%RH).

[0032] In some embodiments, an air conditioning system 10 is provided, which can also be called a constant temperature and humidity air conditioning system 10 when it can achieve constant temperature and humidity control. Further, it can be a high-precision constant temperature and humidity air conditioning system 10 for small clean rooms.

[0033] In some embodiments, an air conditioning system 10 is provided, which mainly includes a return air inlet 11, a fresh air inlet 12, a supply air outlet 13, a temperature regulating branch 14, and a humidity regulating branch 15, for controlling the temperature and humidity of a target chamber, wherein the target chamber is generally a clean room.

[0034] The return air vent 11 is used to connect to the target chamber to obtain gas from it, while the supply air vent 13 is used to supply gas to the target chamber. For a target chamber requiring constant temperature and humidity, the temperature and humidity of the return air vent 11 and the supply air vent 13 must be equal or nearly equal to meet the requirements. To facilitate airflow within the target chamber, the return air vent 11 and the supply air vent 13 are generally located at opposite ends of the target chamber.

[0035] The fresh air inlet 12 is used to draw air from the external environment of the target chamber as fresh air. The external environment of the target chamber generally refers to the atmospheric environment. Considering that the atmospheric environment is prone to impurities, a filter 101, specifically a high-efficiency filter, can be installed in the fresh air inlet 12. The return air inlet 11, fresh air inlet 12, and supply air inlet 13 are all for the convenience of limiting subsequent connections and do not necessarily exist as ports.

[0036] The temperature-regulating branch 14 regulates the temperature of the air introduced through its inlet and discharges it through its outlet. The outlet of the temperature-regulating branch 14 connects to the air supply outlet 13 to deliver temperature-controlled air. The heating method of the temperature-regulating branch 14 to achieve temperature control can be set as needed. The specific temperature control level can be adjusted according to the target chamber temperature. Generally, the heating module of the temperature-regulating branch 14 can be an external heat exchange module, an electric heating module, or a combination of both.

[0037] The humidity regulating branch 15 has an air inlet for introducing air from the temperature regulating branch 14, and can regulate the humidity of the introduced air before it is discharged from the air outlet. The air inlet of the temperature regulating branch 14 can obtain air from the return air inlet 11, the fresh air inlet 12, and the air outlet of the humidity regulating branch 15. Other structures can be set between the air inlet of the temperature regulating branch 14 and the return air inlet 11, the fresh air inlet 12, and the air outlet of the humidity regulating branch 15 to indirectly obtain air, or they can be directly connected through channels to directly obtain air. For example, the air inlet of the temperature regulating branch 14, the return air inlet 11, the fresh air inlet 12, and the air outlet of the humidity regulating branch 15 can be connected through a four-way structure or a four-way valve, so that the air from the return air inlet 11, the fresh air inlet 12, and the air outlet of the humidity regulating branch 15 is mixed and supplied to the temperature regulating branch 14.

[0038] The air inlet of the humidity regulating branch 15 is used to introduce air from the temperature regulating branch 14. It can be located upstream or downstream of the heating module of the temperature regulating branch 14, or it can be introduced from between the heating modules when multiple heating modules are installed.

[0039] The humidity control branch 15 includes a humidity control module, such as a dehumidification module or a humidification module. The dehumidification module does not necessarily require complete dehumidification; it may reduce humidity. Humidity control refers to changing the humidity of the airflow. The humidity control branch 15 adjusts the humidity through the humidity control module to meet the expected humidity requirements. Specifically, humidity control can be based on the humidity at the air outlet 13, or it can be based on the difference between the humidity at the air outlet 13 and the humidity in the target chamber.

[0040] In some embodiments, when the air conditioning system 10 is applied, the heating of the temperature-regulating branch 14 and the humidification of the humidification branch 15 are controlled according to the temperature and humidity requirements of the target chamber. The air outlet of the humidification branch 15 supplies air to the temperature-regulating branch 14 to adjust the humidity of the air supply branch, so that the temperature and humidity of the air outlet 13 meet the requirements. In the air conditioning system 10, the temperature-regulating branch 14 is connected between the air outlet 13 and the return air outlet 11 for temperature control. Then, a separate humidification branch 15 is set up to obtain air from the temperature-regulating branch 14, perform humidification, and return to the air inlet of the temperature-regulating branch 14 to achieve humidification, thereby achieving final temperature and humidity control. By setting up a separate humidification branch 15, the air temperature is avoided during the humidification process, thus effectively avoiding interference between temperature and humidity control. In summary, the air conditioning system 10 can effectively solve the problem of mutual interference between the temperature-regulating and humidification processes in the air conditioning system 10, resulting in poor temperature and humidity control effects.

[0041] In some embodiments, the temperature-regulating branch 14 may include a first heat exchange device 102 and a first electric heater 104. The first heat exchange device 102 includes a first heat exchange channel and a second heat exchange channel capable of exchanging heat with each other. The outlet of the first heat exchange channel is connected to the first electric heater. The second heat exchange channel is used to connect to an external fluid. This allows the external fluid to enter the first heat exchange device 102 through the second heat exchange channel, first exchanging heat with the airflow. This heat exchange is mainly used to initially reduce the temperature deviation between the airflow and the target chamber. Then, it enters the first electric heater 104 through the first heat exchange channel, where the first electric heater 104 further precisely controls the temperature to further reduce the temperature deviation between the airflow and the target chamber. The first heat exchange device 102 and the second heat exchange device 106 (described later) may be plate heat exchangers, tubular heat exchangers, or coil heat exchangers. The first heat exchange device 102 and the second heat exchange device 106 may use the same heat exchange structure or different heat exchange structures.

[0042] In some embodiments, the air inlet of the humidification branch 15 can be connected between the first heat exchange device 102 and the first electric heater. This allows the air to undergo preliminary temperature regulation through the first heat exchange channel of the first heat exchange device 102 before being supplied to the humidification branch 15. This avoids excessive temperature fluctuations at the air inlet of the humidification branch 15, making humidification easier. The air inlet of the humidification branch 15 is connected to the upstream end of the first electric heater 104. Compared to connecting it to the downstream end, this reduces the heating power of the first electric heater 104 and simplifies temperature regulation. Furthermore, the humidification branch 15 does not require high accuracy in the inlet air temperature; therefore, the fluid after preliminary temperature regulation by the first heat exchange device 102 is sufficient for use. It should be noted that, for better description of the relationship, the terms "upstream end" and "downstream end" are used in this context. Specifically, along the fluid (liquid, air, etc.) flow direction, the outlet end corresponds to the downstream end, while the inlet end corresponds to the upstream end.

[0043] In some embodiments, the system may further include a fan 103 for driving airflow. The fan 103 may be connected to the temperature regulating branch 14, while the air inlet of the humidity regulating branch 15 may be connected to the downstream end of the fan 103. This allows the fan 103 to simultaneously generate suction force on the return air inlet 11, the fresh air inlet 12, and the air outlet of the humidity regulating branch 15 when it is operating. In this case, the fan 103 may be located at the upstream or downstream end of the first heat exchange channel.

[0044] In some embodiments, the fan 103 can be connected between the first heat exchange device 102 and the first electric heater to better ensure the stability of the air pressure at the air outlet 13. Furthermore, the air inlet of the humidification branch 15 can be connected between the fan 103 and the first electric heater.

[0045] In some embodiments, the humidity control branch 15 may include a second heat exchange device 106 as a dehumidification device and a humidifier 107 as a humidification device. In this case, the second heat exchange device 106 is equivalent to a dehumidification module, and the humidifier 107 is equivalent to a humidification module. The humidifier 107 is generally an electric humidifier 107.

[0046] The second heat exchange device 106 includes a third heat exchange channel and a fourth heat exchange channel capable of exchanging heat with each other, wherein the third heat exchange channel is connected to the humidifier 107. Generally speaking: as shown in the attached... Figure 1 As shown, the humidifier 107 is located at the downstream end of the third heat exchange channel, dehumidifying first and then humidifying, which allows for more precise humidity control; alternatively, the humidifier 107 can be located at the upstream end of the third heat exchange channel, which can reduce the power of the mechanical compression refrigeration system 20.

[0047] The fourth heat exchange channel, compressor 201, condenser 202, and throttling device 203 are connected in series to form a mechanical compression refrigeration system 20. In this case, the fourth heat exchange channel acts as an evaporator, absorbing heat from the third heat exchange channel to cause water vapor in the third heat exchange channel to condense and liquefy, thereby achieving a dehumidification effect. The specific configuration of the mechanical compression refrigeration system 20 can also refer to current compression refrigeration air conditioners.

[0048] In some embodiments, the system also includes a controller 30, which obtains the temperature and / or humidity of some location points to control the dehumidification module and humidification module of the humidity control branch 15 and the temperature control module of the temperature control branch 14, respectively. This control can be comprehensive or it can be a control of only some of the structures.

[0049] In some embodiments, a heating device can be connected to the inlet end of the second heat exchange channel to achieve heating and temperature regulation. Of course, a second electric heater 114 can be connected to the inlet end of the second heat exchange channel as the aforementioned heating device. Through heating, the fluid temperature in the second heat exchange channel can be better controlled, thereby more accurately controlling the air temperature at the outlet of the first heat exchange channel.

[0050] In some embodiments, a first temperature sensor 115 may be provided between the second electric heater 114 and the inlet of the second heat exchange channel to control the start / stop and / or power of the second electric heater 114 through the first temperature sensor 115, so as to achieve online temperature regulation.

[0051] For example, the controller 30 can control the fluid temperature and / or flow rate in the second heat exchange channel based on the difference between the detected value of the first temperature sensor 115 and the first target temperature value. Accordingly, an electric water valve 112 can be connected in series in the second heat exchange channel.

[0052] Specifically, the controller 30 can control the start / stop and / or opening degree of the second electric heater 114 based on the difference between the detection value of the first temperature sensor 115 and the first target temperature value, where the opening degree refers to the magnitude of the heating power, and / or control the flow rate of the second heat exchange channel (by controlling the electric water valve 112).

[0053] The first target temperature value can be set manually or based on the temperature of a certain node. Specifically, a second temperature sensor 116 can be set to monitor the temperature of the air outlet of the first heat exchange channel. The controller 30 can set the first target temperature value based on the difference between the second temperature sensor 116 and the second target temperature value. The second target temperature value can be a set value or the temperature value of the air outlet 13.

[0054] In some embodiments, the temperature control branch 14 preferably further includes a third electric heater 105, which is connected between the first electric heater 104 and the air outlet 13 for more precise temperature control. This allows the minimum adjustment difference of the heating power of the third electric heater 105 to be less than the minimum adjustment difference of the heating power of the first electric heater 104, i.e., the former is more precise.

[0055] In some embodiments, a third temperature sensor 111 may be provided between the third electric heater 105 and the first electric heater 104. The detection accuracy of the third temperature sensor 111 is higher than that of the second temperature sensor 116, so as to facilitate more precise temperature control.

[0056] In some embodiments, a fourth temperature sensor 109 for detecting the temperature near the air outlet 13 may be further provided. This sensor can be located at the air outlet 13 or at a position near the target chamber where the air outlet 13 is located, to reflect the temperature of the air outlet 13. However, considering the uniformity of the overall temperature in the target chamber, the fourth temperature sensor 109 can be located at any position within the target chamber. The controller 30 can control the opening degree and / or start / stop of the first electric heater 104 and / or the third electric heater 105 based on the detection values ​​of the third temperature sensor 111 and the fourth temperature sensor 109. The detection accuracy of the third temperature sensor 111 and the fourth temperature sensor 109 is higher than that of the second temperature sensor 116. In practical use, the heating power (opening degree) of the first electric heater 104 can be controlled based on the detection value of the third temperature sensor 111 to reduce deviation; the heating power of the third electric heater 105 can be controlled based on the detection values ​​of the third temperature sensor 111 and the fourth temperature sensor 109 to further reduce deviation, thereby achieving high-precision temperature control.

[0057] In some embodiments, a humidity sensor 110 may be included for detecting the humidity of the air near the air outlet 13. This can be done directly or indirectly. Considering the uniformity of the overall humidity in the target chamber, the humidity sensor 110 can be placed at any location within the target chamber. The controller 30 can adjust the humidity control power of the humidity control module in the humidity control branch 15 based on the humidity sensor 110. This adjustment can include adjusting the dehumidification power and / or humidification power of the dehumidification module. Whether to select humidification or dehumidification depends on the relative humidity of the fresh air to the target chamber. If the former has a higher humidity, a dehumidification device is generally used; if the former has a lower humidity, a humidification device is generally used; if the former is uncertain, both a dehumidification device and a humidification device are generally used simultaneously. In specific applications, the humidity control module may include a dehumidification device and / or a humidification device. The dehumidification device may be like the second heat exchange device 106 described above, and the humidification device may be like the electrically heated dehumidification device described above.

[0058] In some embodiments, considering that the humidification branch 15 requires cooling and dehumidification, the air temperature will decrease significantly, resulting in large fluctuations in the air temperature, which is detrimental to the temperature regulation of the temperature regulation branch 14. Therefore, a fourth electric heater 108 can be provided on the humidification branch 15. The fourth electric heater 108 is arranged between the air outlet of the humidification branch 15 and the humidification module. For example, a second heat exchange device 106, a humidifier 107, and a fourth electric heater 108 are arranged sequentially along the airflow direction on the humidification branch 15. Furthermore, a fifth temperature sensor 113 is included for detecting the air outlet temperature of the humidification branch 15. The controller 30 can then control the fourth electric heater 108 based on the detection value of the fifth temperature sensor 113 (113). This ensures that the air outlet temperature of the humidification branch 15 is close to the temperature of the return air outlet 11, thereby reducing interference with the temperature regulation branch 14.

[0059] In some embodiments, such as Figure 1 The diagram shows a schematic representation of a high-precision constant temperature and humidity air conditioning system (hereinafter referred to as "air conditioning system 10"). This high-precision constant temperature and humidity air conditioning system is used to control the temperature of a target chamber, which is a cleanroom. In some embodiments, in the following description, temperature refers to dry-bulb temperature, and humidity refers to relative humidity. High-precision constant temperature and humidity means that the deviation of the temperature in the cleanroom from the target value T is within ±0.05℃ (degrees Celsius), and the deviation of the humidity from the target value D is within 3%RH (RH is a unit of relative humidity, representing the ratio of absolute humidity in the air to saturated absolute humidity at the same temperature and pressure); for example: T ±0.02℃, D ±2%RH.

[0060] The air in the target chamber mixes with the air from the fresh air and humidity control branches through the connected return air vent 11. The mixed air enters the first heat exchange channel of the first heat exchange device 102 for isohumidified cooling, and then is powered by the fan 103 (in the calculation, it can be assumed that all the electrical power of the main fan 103 is converted into mechanical energy and no heat is transferred to the cold air). At the outlet of the fan 103, the air is divided into two parts. Most of the air is heated by the first electric heater 104 and the third electric heater 105 before being sent into the target chamber. The air completes the ultra-high precision temperature regulation in stages in this branch.

[0061] The controller 30 monitors the detection value of the first temperature sensor 115 (with an accuracy within ±0.04℃) and adjusts the opening of the second electric heater 114 to maintain the cooling water temperature entering the second heat exchange channel of the first heat exchange device 102 within a set high-precision fluctuation range. It also adjusts the high-precision electric water valve 112 (with an accuracy within 1%) to achieve high-precision regulation of the cooling water volume in the second heat exchange channel. The mixed air exchanges heat with the high-precision cooling water through the first heat exchange channel, achieving high-precision fine-tuning of the temperature while cooling down, ensuring that the temperature difference between the air temperature after passing through the first heat exchange device 102 (i.e., the detection value of the second temperature sensor 116 (with an accuracy within ±0.04℃)) and the target temperature is within ±0.1℃. The cleanroom airflow is a fixed value, and the heat generated by the fan 103 is also constant under stable airflow conditions. The air is heated after passing through the fan 103, but this does not affect the temperature fluctuation accuracy.

[0062] The controller 30 adjusts the opening of the first electric heater 104 and the third electric heater 105 based on the detection values ​​of the third temperature sensor 111 (accuracy within ±0.01℃) and the fourth temperature sensor 109 (accuracy within ±0.01℃, which can be placed in the target chamber), so that the temperature difference between the air temperature after passing through and the target temperature is within the range of ±0.07℃ and ±0.05℃ respectively, thus completing the ultra-high precision adjustment of the air supply temperature.

[0063] Another small portion of the air passes through the outlet of fan 103, then sequentially through the third heat exchange channel of the second heat exchange device 106, the humidifier 107, and the fourth electric heater 108, before mixing with the air from the other two branches and entering the aforementioned cycle. The controller 30 adjusts the opening of the throttling device 203 and the frequency of the compressor 201 in the mechanical compression refrigeration system 20 based on the detection value of the high-precision humidity sensor 110 placed in the target chamber. This controls the evaporation temperature of the refrigerant in the fourth heat exchange channel of the second heat exchange device 106 to change the dehumidification rate, and adjusts the electric heating opening of the humidifier 107 to change the humidification rate. By changing the humidification and dehumidification rates, ultra-high precision humidity control is achieved. It is worth noting that the controller 30 sets the opening of the throttling device 203, the frequency of the compressor 201, and the opening of the humidifier 107 within a certain adjustment range, ensuring that the throttling device 203, compressor 201, and humidifier 107 avoid on / off cycles and maintain high adjustment accuracy. The controller 30 adjusts the opening of the fourth electric heater 108 according to the detection value of the fifth temperature sensor 113, so that the air supply temperature of the humidity control branch is consistent with the target temperature, thus avoiding interference with the temperature control branch.

[0064] The fresh air branch utilizes the negative pressure difference between the inlet pressure of the fan 103 and the external pressure to allow fresh air to enter the device inlet through the filter 101.

[0065] Figure 2 The diagram shows the structure of the mechanical compression refrigeration system 20, which realizes the cooling and dehumidification function of the second heat exchange device 106. The mechanical compression refrigeration system 20 includes a fourth heat exchange channel of the second heat exchange device 106 as a refrigerant evaporator, a compressor 201, a condenser 202, and a throttling device 203. The refrigerant completes the refrigeration cycle in the above four components, so that the surface temperature of the second heat exchange device 106 is lower than the dew point temperature of the humid air at the outlet of the fan 103. At this time, water vapor in the air condenses and precipitates, and the humidity of the air decreases.

[0066] The air conditioning system 10 performs an air handling process with ultra-high precision temperature and humidity control under the conditions of one embodiment (fresh air condition is 21°C, 40%RH, supply air setpoint condition is 25°C, 55%RH), such as... Figure 3 As shown. Figure 3 Points A through H in the diagram correspond to Figure 1The air conditions at points A to H. Since no personnel stay in cleanroom R for extended periods, the fresh air is mainly used to maintain a slight positive pressure. The required fresh air volume for the cleanroom can be calculated using the air change rate method, i.e., the air volume at point E (21℃, 40%RH) is 250 CMH (m³ / h). When the air temperature and humidity in the cleanroom reach the target range, since there is almost no moisture load in the cleanroom, the main factor affecting the humidity comes from the humidity of the fresh air. Based on the fresh air and indoor temperature and humidity conditions, the air volume of the humidity control branch is calculated, i.e., the air volume at point F is 300 CMH. Based on the unidirectional airflow velocity requirements of the cleanroom, the required air volume is calculated, i.e., the air volume at point A (25℃, 55%RH) is 18000 CMH. The air from points D, E, and F, after mixing, is cooled to point B via the first heat exchanger 102, then heated to point A' via fan 103, and further heated to point A' via electric heaters 104 and 105. The supplied air absorbs sensible heat in the cleanroom to reach point D. During this process, the sensible heat load is very small, and the moisture load is negligible. Figure 3 Points A and D can be approximated as the same point; the process from point C to point A only involves temperature control of the air, while the humidity remains constant, meaning points A, C, and D lie on the same isohyet; compared to the supply and return air volume of the cleanroom, the fresh air and humidity-controlled branch air volume are very small, therefore the air state at point C after the air from points E, F, and D is mixed can also be approximated as point D. Figure 3 Points A, C, and D in the diagram are represented by the same point;

[0067] The air intake at point A' in the humidity control branch is cooled and dehumidified to point H, then heated and humidified at the isohumidity line to point G, and then heated at point G to point F. The moisture content at point C, after mixing with points D, E, and F, is equal to that at point D. Therefore, point J, after mixing with points E and F, is also located on the same isohumidity line as point D. Since the temperature setpoint at point F is equal to the temperature control target value at the supply air point A, point F is on the isotherm line of point A. Find a point F on the isotherm line of point A, connect points E and F, and intersect the isohumidity line of point A at point J. Since the air volume ratio of points E and F is 6:5, and the length ratio of EJ to FJ is also 6:5, the parameters of the air state at point F can be determined.

[0068] The air conditioning system 10 integrates temperature and humidity control into a single unit, significantly reducing its space requirements. This system features two independent branches that regulate the temperature and humidity of the cleanroom air supply, minimizing interference between the two branches. Furthermore, by using high-precision, fast-response sensors, valves, and other devices for feedback and adjustment, and by setting the valve and device openings within a high-precision adjustment range, it achieves highly precise temperature and humidity control of the cleanroom air. In addition, by separating sensible and latent heat processing, the air conditioning system 10 reduces the volume of the cooling coils. Utilizing the pressure distribution characteristics of the inlet and outlet of the fan 103, the humidity control and fresh air branches can provide airflow without the need for a separate fan 103, further reducing the space occupied by the air conditioning system 10 and achieving integration of the temperature and humidity control modules.

[0069] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0070] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. An air conditioning system, characterized in that, include: Return air inlet (11), fresh air inlet (12), air supply outlet (13); The temperature regulating branch (14) can regulate the temperature of the air introduced into the air inlet of the temperature regulating branch (14) and discharge it from the air outlet of the temperature regulating branch (14). The air outlet of the temperature regulating branch (14) is connected to the air supply outlet (13). The humidity regulating branch (15) has an air inlet for introducing air from multiple heating modules of the temperature regulating branch (14), and the humidity regulating branch (15) can adjust the humidity of the introduced air before it is discharged from the air outlet; the air inlet of the temperature regulating branch (14) can obtain air from the return air inlet (11), the fresh air inlet (12) and the air outlet of the humidity regulating branch (15) so that the air from the fresh air inlet (12) and the air outlet of the humidity regulating branch (15) are mixed and the humidity is equal to that of the air from the return air inlet (11); The temperature regulating branch (14) includes a first heat exchange device (102) and a first electric heater (104), and the air inlet of the humidity regulating branch (15) is connected between the first heat exchange device (102) and the first electric heater (104).

2. The air conditioning system according to claim 1, characterized in that, The first heat exchange device (102) includes a first heat exchange channel and a second heat exchange channel that can exchange heat with each other. The outlet of the first heat exchange channel is connected to the first electric heater (104); the second heat exchange channel is used to connect to an external fluid.

3. The air conditioning system according to claim 2, characterized in that, It also includes a fan (103) for airflow, the fan (103) being connected between the first heat exchange device (102) and the first electric heater (104), and the air inlet of the humidification branch being connected between the fan and the first electric heater (104).

4. The air conditioning system according to claim 3, characterized in that, The humidity control branch (15) includes a second heat exchange device (106) as a dehumidification device and a humidifier (107) as a humidification device; the second heat exchange device (106) includes a third heat exchange channel and a fourth heat exchange channel that can exchange heat with each other, the third heat exchange channel being connected to the humidifier (107); the fourth heat exchange channel, the compressor (201), the condenser (202) and the throttling device (203) are connected in series to form a mechanical compression refrigeration system (20).

5. The air conditioning system according to any one of claims 2-4, characterized in that, It also includes a controller (30), the inlet end of the second heat exchange channel is connected to a second electric heater (114), and a first temperature sensor (115) is provided between the second electric heater and the inlet of the second heat exchange channel; the controller can control the start and stop and / or opening degree of the second electric heater (114) and / or control the flow rate of the second heat exchange channel according to the difference between the detection value of the first temperature sensor (115) and the first target temperature value; it also includes a second temperature sensor (116) for monitoring the outlet air temperature of the first heat exchange channel, and the controller (30) can set the first target temperature value according to the difference between the second temperature sensor (116) and the second target temperature value.

6. The air conditioning system according to claim 5, characterized in that, The temperature control branch (14) also includes a third electric heater (105), which is connected between the first electric heater (104) and the air outlet. A third temperature sensor (111) is provided between the third electric heater (105) and the first electric heater (104). It also includes a fourth temperature sensor (109) for detecting the temperature near the air outlet. The controller (30) controls the opening degree and / or start / stop of the first electric heater (104) and the third electric heater (105) according to the third temperature sensor (111) and the fourth temperature sensor (109). The detection accuracy of the third temperature sensor (111) is higher than that of the second temperature sensor (116).

7. The air conditioning system according to claim 6, characterized in that, It also includes a humidity sensor (110) for detecting the humidity of the air near the air outlet, and the controller (30) can adjust the humidity adjustment power of the humidity adjustment module of the humidity adjustment branch (15) according to the humidity sensor (110); the humidity adjustment module includes a dehumidification function device and a humidification function device.

8. The air conditioning system according to claim 7, characterized in that, It also includes a fifth temperature sensor (113) for detecting the outlet temperature of the humidification branch (15), and a fourth electric heater (108) is provided between the outlet of the humidification branch (15) and the humidification module. The controller can control the fourth electric heater (108) according to the detection value of the fifth temperature sensor (113).

9. The air conditioning system according to claim 8, characterized in that, The fresh air inlet (12) is equipped with a filter.

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