Chip corrosion real-time monitoring method

Abstract

The invention discloses a real-time monitoring method for chip corrosion, belongs to the technical field of micro-nano preparation, and mainly relates to the problem of real-time automatic monitoring of micro-nano chip corrosion. According to the method, the corrosion process of the chip is monitored and controlled in real time through an automatic system, the system is composed of an upper computer, an image acquisition device, a liquid processing unit, a lower computer controller and other hardware, and the method comprises the steps that the image acquisition device and the upper computer are connected, microscopic images are captured in real time, and the upper computer sends instructions to the lower computer through a serial port; the lower computer executes the movement operation of the liquid treatment unit, the upper computer monitors the corrosion process in real time and carries out corresponding treatment, after the set corrosion time is reached, the system automatically stops corrosion and starts to execute cleaning operation, and after cleaning is completed, the upper computer receives feedback of the lower computer, confirms that the corrosion and cleaning processes are finished, and uses the protection cover to protect the system. According to the chip corrosion real-time monitoring method disclosed by the embodiment 1 of the invention, the automation degree of corrosion monitoring is improved, and the precision and efficiency of chip processing are ensured.

Description

Technical Field

[0001] The invention belongs to the field of micro-nano preparation technology, and in particular relates to a real-time monitoring method for chip corrosion. Background Art

[0002] With the rapid development of micro-nano processing technology, micro-nano chips have shown great application potential in the fields of biomedicine, information technology, sensors, etc. Its miniaturization and integration characteristics not only significantly improve the performance of equipment, but also reduce production costs and enhance portability. However, the preparation process of micro-nano chips is complicated and involves sophisticated processing technology, among which the corrosion step is one of the key links that determine the performance and quality of the chip.

[0003] In the traditional micro-nano chip preparation process, the etching process usually includes two methods: wet etching and dry etching. Wet etching uses chemical solutions to selectively dissolve materials, while dry etching removes materials through means such as plasma or reactive ion beams. These two methods play an important role in achieving high-precision and complex structure micro-nano chip manufacturing.

[0004] At present, these traditional etching processes usually rely on manual monitoring and have a low degree of automation, especially the ability to monitor in real time during the etching process is very limited. Therefore, there is significant room for improvement in the existing chip etching process in terms of achieving automated real-time monitoring and improving production consistency. Summary of the invention

[0005] In view of the defects of the prior art, the present invention provides a real-time monitoring method for chip corrosion, which is used to solve the problems of reliance on manual monitoring in traditional corrosion processes, low degree of automation, and especially very limited ability to monitor in real time during the corrosion process.

[0006] To achieve the above objectives and other related objectives, the present invention provides a chip corrosion real-time monitoring method, comprising:

[0007] Step 1: Connect the image acquisition device to the host computer and establish communication with the slave controller. Connect the image acquisition device to the host computer and start the program by key operation to capture the microscopic image of the chip corrosion process in real time and transmit the image data to the host computer. The slave computer receives the instructions sent by the host computer through serial communication to ensure data transmission and instruction synchronization.

[0008] Step 2: The host computer sends instructions to the lower computer through the serial port to execute the movement operation of the liquid handling unit. The user presses the button representing the start, triggering the host computer to send instructions to the lower computer controller through the serial port. After receiving the instructions from the host computer, the lower computer controls the stepper motor through PWM to drive the precise movement of the liquid handling unit (including the etching liquid and the cleaning liquid) to ensure that the etching liquid reaches the chip surface smoothly. After each operation is completed, the lower computer returns status feedback to ensure the accurate positioning and processing of the chip during the etching and cleaning process.

[0009] Step 3: The host computer monitors the corrosion process in real time and takes corresponding measures. The user presses the button to start monitoring, and the host computer starts to monitor the chip corrosion process and collect microscopic images during the corrosion process. The program uses a multi-threading mechanism to synchronize image processing and motion control to ensure the capture of real-time images during the corrosion process.

[0010] Step 4: When the set etching time is reached, the system automatically stops etching and starts cleaning. The user presses the button representing stop or the upper computer automatically sends a stop command. After receiving the command, the lower computer controls the motor to move the liquid handling unit through a timing control mechanism similar to the etching stage, so that it moves accurately to the chip position and performs the cleaning operation to ensure that the cleaning liquid can thoroughly clean the chip.

[0011] Step 5: After cleaning is completed, the host computer receives feedback from the lower computer to confirm that the corrosion and cleaning process has ended. The system stores the image data during the corrosion process through the host computer, and turns off the image acquisition device and motion actuator to complete the entire automated monitoring process.

[0012] Step 6. Protect the system with a protective cover. After the corrosion and cleaning process is completed, cover the experimental device with a protective cover. The protective cover is designed to protect the entire system from dust, dirt and other environmental factors, while maintaining the cleanliness and intact condition of the equipment when not in use.

[0013] The beneficial effects of the present invention are:

[0014] The present invention provides a real-time monitoring method for chip corrosion. The system can collect and analyze microscopic images in real time during the corrosion process through the coordinated work of an upper computer and a lower computer, thereby effectively improving the accuracy and consistency of the corrosion process and solving the problems of low automation level and insufficient real-time monitoring in the prior art.

[0015] The present invention also provides an experimental device for real-time monitoring of chip corrosion, comprising:

[0016] An optical microscope system to magnify the corroded area of ​​the chip and provide a clear image so that the host computer can accurately monitor the progress of corrosion;

[0017] A chip fixing unit is used to fix the chip to be etched, ensure the chip is in a stable position during the entire etching process, and keep it aligned with the optical system of the microscope and the image acquisition device to obtain a high-quality image;

[0018] The liquid handling and motion control unit is used to store the liquid required for corrosion and cleaning, and cooperates with the system's motion actuator to perform corrosion and cleaning operations on the chip according to predetermined steps.

[0019] A protective cover is used to cover the entire monitoring system when the system is not in operation to protect the equipment from dust and other environmental factors. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 A flowchart of a chip corrosion real-time monitoring method provided in Example 1 of the present invention;

[0021] Figure 2 A system overall structure block diagram of a chip corrosion real-time monitoring method provided in Example 1 of the present invention; DETAILED DESCRIPTION

[0022] In order to make the technical solutions and advantages of the present invention more clearly understood, the present invention is described in detail below in conjunction with the accompanying drawings and specific embodiments. The described embodiments are part of the embodiments of the present invention, rather than all of the embodiments. The terms used in the following embodiments of the present application are only for the purpose of describing specific embodiments and are not intended to be limiting of the present application.

[0023] The present invention provides a real-time monitoring method for chip corrosion. The system consists of a PC, an image acquisition device, a microscope, a lower computer main control module, an electric control translation stage and its supporting components, a protective cover, etc. The flow chart is as follows Figure 1 As shown, the specific steps include the following steps.

[0024] Step S10: Connect the image acquisition device to the host computer to capture microscopic images in real time.

[0025] Step S20: The upper computer sends instructions to the lower computer through the serial port to execute the movement operation of the liquid processing unit.

[0026] Step S30: The host computer monitors the corrosion process in real time and takes corresponding measures.

[0027] Step S40: When the set corrosion time is reached, the system automatically stops corrosion and starts cleaning operation.

[0028] Step S50: After the cleaning is completed, the upper computer receives feedback from the lower computer to confirm that the corrosion and cleaning process has ended.

[0029] Step S60: Use a protective cover to protect the system.

[0030] In summary, the above are only preferred embodiments of the present invention and are not intended to limit the protection scope of the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip corrosion real-time monitoring method, characterized in that: The steps include: Step 1: Connect the image acquisition device to the host computer to capture the microscopic image in real time; Step 2: The upper computer sends instructions to the lower computer through the serial port to execute the movement operation of the liquid handling unit; Step 3: The host computer monitors the corrosion process in real time and takes corresponding measures; Step 4: When the set corrosion time is reached, the system automatically stops corrosion and starts cleaning operation; After step 5 cleaning is completed, the upper computer receives feedback from the lower computer to confirm that the corrosion and cleaning process has ended; Step 6: Protect the system with a protective cover.

2. A chip corrosion real-time monitoring method according to claim 1, characterized in that: The step 1 is to connect the image acquisition device to the host computer, start the program by key operation, and capture the microscopic image of the chip corrosion process in real time, and transmit the image data to the host computer. The lower computer receives the command sent by the host computer through serial communication to ensure data transmission and command synchronization.

3. A chip corrosion real-time monitoring method according to claim 1, characterized in that: The step 2 means that the user presses the button representing the start, triggering the upper computer to send instructions to the lower computer controller through the serial port. After receiving the upper computer instruction, the lower computer controls the stepper motor through PWM to drive the precise movement of the liquid processing unit (including the corrosive liquid and the cleaning liquid) to ensure that the corrosive liquid reaches the chip surface smoothly. After each operation is completed, the lower computer returns status feedback to ensure the accurate positioning and processing of the chip during the corrosion and cleaning process.

4. A chip corrosion real-time monitoring method according to claim 1, characterized in that: Step 3 means that the user presses the button to start monitoring, and the host computer starts to monitor the chip corrosion process and collects microscopic images during the corrosion process. The program uses a multi-threading mechanism to synchronize image processing and motion control to ensure the capture of real-time images during the corrosion process.

5. A chip corrosion real-time monitoring method according to claim 1, characterized in that: The step 4 means that the user presses a button representing stop or the upper computer automatically sends a stop command. After receiving the command, the lower computer controls the motor to move the liquid processing unit through a timing control mechanism similar to the corrosion stage, so that it moves accurately to the chip position and performs a cleaning operation to ensure that the cleaning liquid can thoroughly clean the chip.

6. A chip corrosion real-time monitoring method according to claim 1, characterized in that: The step 5 means that the system stores the image data in the corrosion process through the host computer, and closes the image acquisition device and the motion actuator to complete the entire automatic monitoring process.

7. A chip corrosion real-time monitoring method according to claim 1, characterized in that: Step 6 is to cover the experimental device with a protective cover after the corrosion and cleaning process is completed. The protective cover is designed to protect the entire system from dust, dirt and other environmental factors, while maintaining the cleanliness and intact condition of the equipment when not in use.

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