Heater with vacuum adsorption and edge purging functions

Abstract

The invention provides a heater with vacuum adsorption and edge purging functions. The heater comprises a heating disc and a heating disc handle. The upper surface of the heating plate is provided with a plurality of air exhaust holes and a plate surface vacuum adsorption runner; the heating disc is internally provided with a heating disc internal edge purging runner located at the upper layer and a heating disc internal vacuum adsorption runner located at the lower layer; and the heating disc internal vacuum adsorption flow channel is communicated with the disc surface vacuum adsorption flow channel through the plurality of air exhaust holes to form a double-layer structure. A side wall internal vacuum adsorption flow channel and a side wall internal edge purging flow channel are formed in the side wall of the heating plate handle in the axial direction; the upper surface of the heating plate handle is provided with two circumferential branch runners which are communicated with the purging runner at the inner edge of the side wall; the two circumferential branch runners are communicated with the purging runner on the inner edge of the heating plate through two axial holes; and the side wall internal vacuum adsorption flow channel is communicated with the heating disc internal vacuum adsorption flow channel through a collecting hole.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to thin film deposition equipment. Background Art

[0002] For thin film deposition equipment that requires the vacuum adsorption function, after the machine has been running for a period of time, thin film will be deposited on the edge of the heating plate. To avoid this phenomenon, the heating plate is usually cleaned and replaced regularly to solve the problem of film growth on the edge of the heating plate. This also increases the maintenance time of the machine, and there are risks in the cleaning process of the heating plate, which will increase the cost of the machine. Summary of the invention

[0003] In order to provide a heater having both vacuum adsorption and edge purging functions, the heater of the present invention comprises a heating plate and a heating plate handle located below the center of the heating plate and supporting the heating plate.

[0004] The upper surface of the heating plate has a plurality of exhaust holes and a plate surface vacuum adsorption flow channel; the interior of the heating plate has an internal edge purge flow channel of the heating plate located in the upper layer and an internal vacuum adsorption flow channel of the heating plate located in the lower layer; the internal vacuum adsorption flow channel of the heating plate is connected with the plate surface vacuum adsorption flow channel through the plurality of exhaust holes to form a double-layer structure.

[0005] The axial direction of the side wall of the heating disk handle is provided with a side wall internal vacuum adsorption flow channel and a side wall internal edge purge flow channel; the upper surface of the heating disk handle is provided with two circumferential branch flow channels, which are connected to the side wall internal edge purge flow channel; the two circumferential branch flow channels are connected to the heating disk internal edge purge flow channel through two axial holes; the side wall internal vacuum adsorption flow channel is connected to the heating disk internal vacuum adsorption flow channel through a collecting hole.

[0006] In one embodiment, when vacuum adsorption is performed, the gas between the wafer and the upper surface of the heating plate passes through the plate surface vacuum adsorption flow channel, and enters the internal vacuum adsorption flow channel of the heating plate through the multiple exhaust holes, and finally converges to the internal vacuum adsorption flow channel of the side wall through the collecting hole and is extracted from the bottom outlet of the internal vacuum adsorption flow channel of the side wall; when edge purge is performed, the purge gas enters the internal edge purge flow channel of the side wall from the bottom air inlet of the internal edge purge flow channel of the side wall, enters the internal edge purge flow channel of the heating plate through the two circumferential branch flow channels and the two axial holes, and the purge gas flows out from the outlet at the side edge of the heating plate through the diversion of the internal edge purge flow channel of the heating plate.

[0007] In one embodiment, the disk surface vacuum adsorption flow channel includes a plurality of annular flow channels and a plurality of radial flow channels located between adjacent annular flow channels and used to connect adjacent annular flow channels; the plurality of annular flow channels include at least an outer annular flow channel, a middle annular flow channel, and an inner annular flow channel in order of radius from large to small; the plurality of exhaust holes distributed equidistantly are opened on the middle annular flow channel and at the intersection with the radial flow channels; the upper port of the exhaust hole is connected to the disk surface vacuum adsorption flow channel, and the lower port of the exhaust hole is connected to the vacuum adsorption flow channel inside the heating disk.

[0008] In one embodiment, the vacuum adsorption flow channel inside the heating plate has a plurality of circumferential flow channels and a plurality of converging flow channels connecting the plurality of circumferential flow channels; the two ends of each of the circumferential flow channels are respectively connected to the lower ports of the two exhaust holes; one end of the converging flow channel is connected to the middle part of the circumferential flow channel, and the other end is connected to the collecting hole; the gas is drawn into the circumferential flow channel through the exhaust holes, and converges into the collecting hole through the converging flow channel.

[0009] In one embodiment, the upper port of the collecting hole is connected to the vacuum adsorption flow channel inside the heating plate, and the lower port of the collecting hole is connected to the vacuum adsorption flow channel inside the side wall.

[0010] In one embodiment, the upper port of the vacuum adsorption channel inside the side wall is opened on the upper surface of the heating plate handle and is connected to the collecting hole, and the lower port of the vacuum adsorption channel inside the side wall is opened on the lower end flange surface of the heating plate handle, and the lower port of the vacuum adsorption channel inside the side wall is the bottom air outlet.

[0011] In one embodiment, one ends of the two circumferential branch flow channels are respectively connected to the lower ports of the two axial holes, and the other ends are connected to each other and to the purge flow channel at the inner edge of the side wall.

[0012] In one embodiment, the purge channel at the inner edge of the heating plate includes a converging channel and a diverting channel, and the converging channel is connected to the upper ports of the two axial holes to converge the two purge gases from the two axial holes into one purge gas and enter the diverting channel.

[0013] In one embodiment, the converging flow channel includes two circumferential branch flow channels and a radial converging flow channel, one end of the two circumferential branch flow channels are respectively connected to one end of the radial converging flow channel, the other ends of the two circumferential branch flow channels are respectively connected to the upper ports of the two axial holes, and the other end of the radial converging flow channel is connected to the diversion flow channel.

[0014] In one embodiment, the diversion channel includes a plurality of diversion branches, each of which diverts the purge gas into two parts, and the plurality of diversion branches are distributed along a plurality of concentric rings, and the plurality of diversion branches are configured to double in number as the ring radius increases, so that the purge gas is continuously diverted until the purge gas is blown to the edge of the heating plate. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The above invention content and the following specific embodiments of the present invention will be better understood when read in conjunction with the accompanying drawings. It should be noted that the accompanying drawings are only examples of the claimed invention. In the accompanying drawings, the same reference numerals represent the same or similar elements.

[0016] Figure 1 A schematic diagram of a heater according to an embodiment of the present invention is shown;

[0017] Figure 2 A cross-sectional view of a heater according to an embodiment of the present invention is shown;

[0018] Figure 3 A cross-sectional view of a heating plate according to an embodiment of the present invention is shown;

[0019] Figure 4 A schematic diagram showing a disk surface vacuum adsorption flow channel according to an embodiment of the present invention;

[0020] Figure 5 A schematic diagram of an air extraction hole according to an embodiment of the present invention is shown;

[0021] Figure 6 A schematic diagram of a vacuum adsorption flow channel inside a heating plate according to an embodiment of the present invention is shown;

[0022] Figure 7 A schematic diagram of a collection hole according to an embodiment of the present invention is shown;

[0023] Fig. 8A An overall schematic diagram of a heating plate handle having a vacuum adsorption flow channel inside a side wall according to an embodiment of the present invention is shown;

[0024] Figure 8B A perspective view showing a heating plate handle having a vacuum adsorption flow channel inside a side wall according to an embodiment of the present invention;

[0025] Fig. 9 A partial perspective view showing a heater according to an embodiment of the present invention;

[0026] Fig.10 A schematic diagram of the internal edge purge flow channel of a heating plate according to an embodiment of the present invention is shown;

[0027] Fig.11AAn overall schematic diagram of a heating plate handle according to an embodiment of the present invention is shown;

[0028] Fig. 11B Shows an internal perspective view of a heating plate handle according to an embodiment of the present invention;

[0029] Fig.12 A schematic diagram showing the connection between the inner edge purge channel of the side wall and the inner edge purge channel of the heating plate according to an embodiment of the present invention;

[0030] Fig.13 A schematic diagram showing the two-in-one merging of purge gases inside a heating plate according to an embodiment of the present invention;

[0031] Fig.14 A schematic diagram of a purge flow channel at the inner edge of a heating plate according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0032] The detailed features and advantages of the present invention are described in detail in the specific embodiments below, and the content is sufficient to enable any person skilled in the art to understand the technical content of the present invention and implement it accordingly, and according to the description, claims and drawings disclosed in this specification, those skilled in the art can easily understand the relevant purposes and advantages of the present invention. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, many specific details will be included in the following description. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description.

[0033] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0035] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, channels, components, regions, layers and / or parts, these components, channels, components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, channels, components, regions, layers and / or parts. In addition, the terms "first", "second", "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0036] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0037] In some embodiments, numbers describing the number of components and attributes are used. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise specified, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the setting of such numerical values ​​is as accurate as possible within the feasible range.

[0038] At the same time, the present application uses specific words to describe the embodiments of the present application. For example, "one embodiment", "an embodiment", and / or "some embodiments" refer to a certain feature, structure or characteristic related to at least one embodiment of the present application. Therefore, it should be emphasized and noted that "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more in different positions in this specification does not necessarily refer to the same embodiment. In addition, some features, structures or characteristics in one or more embodiments of the present application can be appropriately combined.

[0039] Figure 1 The overall schematic diagram of a heater according to an embodiment of the present invention is shown. The heater of the present invention comprises a heating plate 101 and a heating plate handle 102. The heating plate handle 102 is located below the center of the heating plate and supports the heating plate 101. The edge of the heating plate has an air outlet 103, and the purge gas is blown out from the air outlet 103.

[0040] Figure 2FIG. 2 shows a cross-sectional view of a heater according to an embodiment of the present invention. The heating plate has vacuum adsorption and edge purging functions. Figure 1 and Figure 2 As shown, the upper surface of the heating plate has a plate surface vacuum adsorption flow channel 201. The interior of the heating plate has two layers of flow channels, the upper layer of which is the internal edge purge flow channel 202 of the heating plate, which is used to purge the edge of the heating plate to prevent the deposition of a film on the edge of the heating plate and realize the edge purge function; the lower layer of which is the internal vacuum adsorption flow channel 203 of the heating plate, which is connected to the plate surface vacuum adsorption flow channel 201 to realize the vacuum adsorption function.

[0041] The side wall of the heating disk handle has an internal vacuum adsorption channel 204 and an internal edge purge channel 205 in the axial direction of the side wall.

[0042] When the vacuum adsorption function is enabled, the gas between the wafer and the surface of the heating plate passes through the plate surface vacuum adsorption flow channel 201 on the upper surface of the heating plate, and passes through multiple exhaust holes (see Figure 4 ) enters the vacuum adsorption flow channel 203 inside the heating plate, and finally gathers into the vacuum adsorption flow channel 204 inside the side wall of the heating plate handle, and is drawn out through the bottom outlet of the vacuum adsorption flow channel 204 inside the side wall, thus realizing the vacuum adsorption function. The gas flow direction is shown by the downward arrow on the left.

[0043] When the edge purge function is enabled, the purge gas enters the heating plate from the air inlet at the bottom of the edge purge channel 205 inside the side wall of the heating plate handle, passes through the branching of the edge purge channel 202 inside the heating plate, and finally flows out through the air outlet 103 at the side edge of the heating plate, playing the role of edge purge. The gas flow direction is shown by the upward arrow on the right.

[0044] Figure 3 A cross-sectional view of a heating plate according to an embodiment of the present invention is shown, wherein the position of the purge channel 202 at the inner edge of the heating plate is higher than the vacuum adsorption channel 203 inside the heating plate, thus realizing a layered design of the two.

[0045] Figure 4A schematic diagram of a disk surface vacuum adsorption flow channel according to an embodiment of the present invention is shown. The disk surface vacuum adsorption flow channel 201 includes a plurality of annular flow channels and a plurality of radial flow channels located between adjacent annular flow channels and used to connect adjacent annular flow channels. The plurality of annular flow channels include at least an outer annular flow channel, an intermediate annular flow channel, and an inner annular flow channel in order from large to small radius. A plurality of equally spaced exhaust holes 401 are provided on the intermediate annular flow channel and at the intersection with the radial flow channel. The exhaust hole 401 is a connecting channel between the disk surface vacuum adsorption flow channel 201 and the vacuum adsorption flow channel 203 inside the heating disk, wherein the upper port thereof is connected to the disk surface vacuum adsorption flow channel 201, and the lower port is connected to the vacuum adsorption flow channel 203 inside the heating disk. The air flowing through the disk surface vacuum adsorption flow channel 201 is drawn from the exhaust hole 401 into the vacuum adsorption flow channel 203 inside the heating disk.

[0046] Figure 5 A schematic diagram of an air extraction hole according to an embodiment of the present invention is shown. In one embodiment, the number of the plurality of air extraction holes 401 is four.

[0047] Figure 6 A schematic diagram of the internal vacuum adsorption flow channel of the heating plate according to an embodiment of the present invention is shown. In order to ensure the concentric distribution of the temperature of the heating plate, the internal flow channel is distributed in an annular shape. The internal vacuum adsorption flow channel of the heating plate has a plurality of circumferential flow channels 601, and a plurality of converging flow channels 602 connecting the circumferential flow channels. The two ends of the circumferential flow channels are respectively connected to the lower ports of the two exhaust holes 401. One end of the converging flow channel 602 is connected to the middle part of the circumferential flow channel 601, and the other end is connected to the collecting hole 603. The gas is drawn into the circumferential flow channel 601 through the exhaust hole, and finally converges into the collecting hole 603 through the converging flow channel 602.

[0048] Figure 7 The schematic diagram of the collecting hole according to an embodiment of the present invention is shown. The collecting hole 603 is an axial hole, the upper end of which is connected to the vacuum adsorption flow channel inside the heating plate, and the lower end is connected to the vacuum adsorption flow channel inside the side wall of the heating plate handle.

[0049] Fig. 8A An overall schematic diagram of a heating disk handle having a vacuum adsorption flow channel inside a side wall according to an embodiment of the present invention is shown. Figure 8B FIG. 2 shows a perspective view of a heating plate handle having a vacuum adsorption flow channel inside the side wall according to an embodiment of the present invention. Fig. 8A and 8B As shown, the side wall of the heating disk handle has a first axially through-going long hole, i.e., the side wall internal vacuum adsorption flow channel 204, which penetrates the side wall of the heating disk handle. The upper port 801 of the side wall internal vacuum adsorption flow channel 204 is on the upper surface of the heating disk handle and communicates with the collecting hole 603, and the lower port is on the lower end flange surface 802 of the heating disk handle, and the lower port is the final air exhaust port (i.e., the aforementioned bottom air outlet).

[0050] Fig. 9 FIG. 1 is a partial perspective view of a heater according to an embodiment of the present invention. The so-called partial perspective view refers to a perspective view that only sees through each vacuum adsorption flow channel. Fig. 9 It can be seen that the double-layer structure is composed of the vacuum adsorption channel on the surface of the heating plate and the vacuum adsorption channel inside the heating plate.

[0051] The so-called "double-layer structure" refers to a structure in which the vacuum adsorption channel on the disk surface and the vacuum adsorption channel inside the heating disk are combined. If a single-layer vacuum adsorption channel is used (for example, there is no vacuum adsorption channel inside the heating disk), there is a defect, that is, the air extraction hole must inevitably be arranged in the central area of ​​the heating disk, which will cause the airflow to take away the central heat, making the center temperature of the heating disk lower and the edge higher, which will cause the heater to break. The double-layer structure design of the present invention only needs to ensure that the collecting hole at the bottom of the double-layer structure is aligned with the upper port of the vacuum adsorption channel inside the side wall of the heating disk handle. Therefore, the air extraction hole of the vacuum adsorption channel on the disk surface can be set at a position away from the central area of ​​the heating disk.

[0052] Fig.10 A general schematic diagram of a purge channel at the inner edge of a heating plate according to an embodiment of the present invention is shown. Fig.10 The vacuum adsorption channel on the heating plate surface is removed from the heating plate view, and only the purge channel on the inner edge of the heating plate is displayed to better reflect the purge channel on the inner edge of the heating plate.

[0053] The aforementioned vacuum adsorption is to draw gas away from the heating plate, which is opposite to the vacuum adsorption function. The edge purge is to send gas to the gas outlet 1002 to purge the edge 1001 of the heating plate.

[0054] Fig.11A An overall schematic diagram of a heating plate handle according to an embodiment of the present invention is shown. Fig. 11B FIG. 2 shows a perspective view of the interior of a heating plate handle according to an embodiment of the present invention. Fig.11A and Fig. 11B As shown, there is a second axially extending long hole inside the side wall of the heating disk handle, i.e., a purge channel 205 at the inner edge of the side wall. The purge gas enters the purge channel 205 at the inner edge of the side wall from the bottom air inlet hole of the lower end flange surface of the heating disk handle and reaches the contact surface 1101 between the heating disk handle and the heating disk (the upper surface of the heating disk handle).

[0055] In one embodiment, the purge channel at the inner edge of the side wall and the vacuum adsorption channel at the inner side wall are independent of each other and are located on both sides of the side wall.

[0056] Since the internal flow channel of the edge purge passes through the heating disk handle area, in order to ensure the concentric temperature of the heating disk, the purge gas is divided into two from the upper surface 1101 of the heating disk handle to form two circumferential branch flow channels 1102 to enter the interior of the heating disk. The two circumferential branch flow channels are two parts of the same circle, which structurally ensure the concentric temperature of the heating disk.

[0057] Fig.12 A schematic diagram showing the connection between the side wall inner edge purge channel 205 and the heating plate inner edge purge channel 202 according to an embodiment of the present invention is shown. Fig.13 FIG. 2 is a schematic diagram showing the two-in-one merging of the purge gas inside the heating plate according to an embodiment of the present invention. Fig.12 and Fig.13 As shown, two circumferential branch flow channels 1102 located on the upper surface 1101 of the heating disk handle are connected to the converging flow channel 1202 of the inner edge purge flow channel 202 of the heating disk through the axial hole 1201. One end of the circumferential branch flow channel is connected to one end of another circumferential branch flow channel and is connected to the inner edge purge flow channel of the side wall. The other end of the circumferential branch flow channel is connected to the axial hole 1201.

[0058] Fig.14 A schematic diagram of the edge purge flow channel inside the heating plate according to an embodiment of the present invention is shown, wherein the blue flow channel is the edge purge flow channel. After the edge purge gas enters the interior of the heating plate, the purge gas flow channel is generally distributed in a circular ring shape (circumferential distribution), and the structure ensures the concentricity of the heating plate temperature as much as possible.

[0059] The purge flow channel at the inner edge of the heating plate includes a converging flow channel 1202 and a diverging flow channel 1401. The converging flow channel 1202 is used to gather the purge gas delivered from the axial hole 1201 and enter the diverging flow channel 1401.

[0060] The converging flow channel 1202 includes two circumferential branch flow channels and a radial converging flow channel. One end of the two circumferential branch flow channels is respectively connected to one end of the radial converging flow channel, the other end of the two circumferential branch flow channels is respectively connected to the upper ports of the two axial holes, and the other end of the radial converging flow channel is connected to the diverting flow channel 1401.

[0061] The diversion channel 1401 includes multiple diversion branches, each of which diverts the purge gas into two parts. The multiple diversion branches are distributed along multiple concentric rings, and the multiple diversion branches are configured to double in number as the ring radius increases, so that the purge gas is continuously diverted until the purge gas is blown to the edge of the heating plate (in the form of an outlet hole).

[0062] In one embodiment, the purge flow channel at the inner edge of the heating plate adopts a combination of a ring and a broken line. The ring ensures that the temperature distribution is concentric as much as possible. The last section of the flow channel adopts a broken line method that combines a long and a short straight line (i.e., the long straight line after the P3 node and the last short straight line). The broken line can shorten the flow channel length and reduce the heat loss at the edge.

[0063] For each node (airflow bifurcation point, such as P1, P2, P3), they are all located at the vertices of a regular N (N is an even number) polygon, and the number of nodes at the next level is twice the number of nodes at the previous level (for example: P3 has 8 nodes, P2 has 4 nodes, and P1 has 2 nodes).

[0064] Before the purge gas enters each node, it passes through a short straight flow channel along the radius of the heating plate.

[0065] To determine the position of each node, first determine the position of the outermost node (for example, the 16 P4 nodes in this example), and then group the adjacent nodes in pairs. In terms of orientation, the upper-level node is located in the middle of the adjacent nodes in the same group of the lower level (for example, in the figure, the position of P4 is determined first, and after the P4 nodes are grouped in pairs, the position of the P3 node is determined, and each P3 node is located in the middle of two P4 nodes).

[0066] The size of the circumscribed circle of the regular N-gon where each node is located (i.e., the distance between each node and the central axis of the heating disk) is determined according to the actual demand for temperature distribution.

[0067] The above requirements ensure that the final outflow of the purge gas is along the radius of the heating plate, and each outlet is evenly distributed along the circumference, thus ensuring that the purge gases in each path are uniform and the degree of mutual interference is minimized.

[0068] In specific implementation, the entire heating plate is divided into three layers. The upper surface of the first layer has a plate surface vacuum adsorption flow channel, and the lower surface has a heating plate internal edge purge flow channel; the second layer has a heating plate internal vacuum adsorption flow channel; the third layer has no gas flow channel and is the back of the heating plate. The three layers are pressed together under high temperature to realize the heating plate structure design with multi-layer flow channels.

[0069] The terms and expressions used above are for descriptive purposes only, and the present invention should not be limited to these terms and expressions. The use of these terms and expressions does not mean to exclude any equivalent features of the illustrations and descriptions (or parts thereof), and it should be recognized that various modifications that may exist should also be included in the scope of the claims. Other modifications, changes and substitutions may also exist. Accordingly, the claims should be deemed to cover all such equivalents.

[0070] Similarly, it should be noted that in order to simplify the description of the disclosure of this application and thus facilitate the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, multiple features are sometimes combined into one embodiment, drawing or description thereof. However, this disclosure method does not mean that the features required by the object of this application are more than the features mentioned in the claims.

[0071] Similarly, it should be pointed out that although the present invention has been described with reference to the current specific embodiments, ordinary technicians in this technical field should realize that the above embodiments are only used to illustrate the present invention, and various equivalent changes or substitutions may be made without departing from the spirit of the present invention. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present invention, they will fall within the scope of the claims of this application.

Claims

1. A heater with vacuum adsorption and edge purge functions, characterized in that: The heater comprises a heating plate and a heating plate handle located below the center of the heating plate and supporting the heating plate; The upper surface of the heating plate has a plurality of air extraction holes and a plate surface vacuum adsorption flow channel; the interior of the heating plate has a heating plate internal edge purge flow channel located at the upper layer and a heating plate internal vacuum adsorption flow channel located at the lower layer; the heating plate internal vacuum adsorption flow channel is connected with the plate surface vacuum adsorption flow channel through the plurality of air extraction holes to form a double-layer structure; The axial direction of the side wall of the heating disk handle is provided with a side wall internal vacuum adsorption flow channel and a side wall internal edge purge flow channel; the upper surface of the heating disk handle is provided with two circumferential branch flow channels, which are connected to the side wall internal edge purge flow channel; the two circumferential branch flow channels are connected to the heating disk internal edge purge flow channel through two axial holes; the side wall internal vacuum adsorption flow channel is connected to the heating disk internal vacuum adsorption flow channel through a collecting hole.

2. The heater according to claim 1, characterized in that When performing vacuum adsorption, the gas between the wafer and the upper surface of the heating plate passes through the plate surface vacuum adsorption flow channel, and enters the internal vacuum adsorption flow channel of the heating plate through the multiple exhaust holes, and finally converges to the internal vacuum adsorption flow channel of the side wall through the collecting hole and is extracted from the bottom outlet of the internal vacuum adsorption flow channel of the side wall; when performing edge purge, the purge gas enters the internal edge purge flow channel of the side wall from the bottom air inlet of the internal edge purge flow channel of the side wall, enters the internal edge purge flow channel of the heating plate through the two circumferential branch flow channels and the two axial holes, and the purge gas flows out from the outlet at the side edge of the heating plate through the diversion of the internal edge purge flow channel of the heating plate.

3. The heater according to claim 1, characterized in that The disk surface vacuum adsorption flow channel includes a plurality of annular flow channels and a plurality of radial flow channels located between adjacent annular flow channels and used to connect adjacent annular flow channels; the plurality of annular flow channels include at least an outer annular flow channel, a middle annular flow channel, and an inner annular flow channel in order of radius from large to small; the plurality of exhaust holes distributed equidistantly are opened on the middle annular flow channel and at the intersection with the radial flow channels; the upper port of the exhaust hole is connected to the disk surface vacuum adsorption flow channel, and the lower port of the exhaust hole is connected to the vacuum adsorption flow channel inside the heating disk.

4. The heater according to claim 1, characterized in that The vacuum adsorption flow channel inside the heating plate has multiple circumferential flow channels and multiple converging flow channels connecting the multiple circumferential flow channels; the two ends of each of the circumferential flow channels are respectively connected to the lower ports of the two exhaust holes; one end of the converging flow channel is connected to the middle part of the circumferential flow channel, and the other end is connected to the collecting hole; the gas is drawn into the circumferential flow channel through the exhaust holes, and converges into the collecting hole through the converging flow channel.

5. The heater according to claim 1, characterized in that The upper port of the collecting hole is communicated with the vacuum adsorption flow channel inside the heating plate, and the lower port of the collecting hole is communicated with the vacuum adsorption flow channel inside the side wall.

6. The heater according to claim 1, characterized in that The upper port of the vacuum adsorption channel inside the side wall is opened on the upper surface of the heating plate handle and is connected with the collecting hole. The lower port of the vacuum adsorption channel inside the side wall is opened on the lower end flange surface of the heating plate handle. The lower port of the vacuum adsorption channel inside the side wall is the bottom air outlet.

7. The heater according to claim 1, characterized in that One ends of the two circumferential branch flow channels are respectively connected to the lower ports of the two axial holes, and the other ends are connected to each other and to the purge flow channel at the inner edge of the side wall.

8. The heater according to claim 1, characterized in that The purge channel at the inner edge of the heating plate includes a converging channel and a diverting channel. The converging channel is connected to the upper ports of the two axial holes to converge the two purge gases from the two axial holes into one purge gas and enter the diverting channel.

9. The heater according to claim 8, characterized in that The converging flow channel includes two circumferential branch flow channels and a radial converging flow channel, one end of the two circumferential branch flow channels are respectively connected to one end of the radial converging flow channel, the other ends of the two circumferential branch flow channels are respectively connected to the upper ports of the two axial holes, and the other end of the radial converging flow channel is connected to the diversion flow channel.

10. The heater according to claim 8, characterized in that The diversion flow channel includes a plurality of diversion branches, each of which diverts the purge gas into two parts. The plurality of diversion branches are distributed along a plurality of concentric rings, and the plurality of diversion branches are configured to double in number as the ring radius increases, so that the purge gas is continuously diverted until the purge gas is blown to the edge of the heating plate.

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