Socket-based mems gas sensor batch test system and method

Abstract

The invention discloses a socket-based mems gas sensor batch test system and method, the system comprises a plurality of test bottom plates, an upper computer module and a data display module, and each test bottom plate is provided with a single-chip microcomputer master control module, a plurality of socket socket modules, a multiplexing module, a communication module and an isolation operational amplifier module; the plurality of socket socket modules are electrically connected with the input end of the multiplexing module, the output end of the multiplexing module is electrically connected with the input end of the isolation operational amplifier module, the output end of the isolation operational amplifier module is electrically connected with the input end of the single-chip microcomputer main control module, and the communication modules on the two adjacent test base plates are electrically connected with each other; the single-chip microcomputer master control modules on the plurality of test base plates are all in communication connection with the upper computer module, and the data display module is in communication connection with the upper computer module. The problem that an existing semiconductor gas sensor electrical performance detection system is mainly suitable for TO packaged gas sensors, and the structural characteristics of the existing semiconductor gas sensor electrical performance detection system are not completely suitable for mems gas sensors is solved.

Description

Technical Field

[0001] The invention relates to the technical field of MEMS gas sensor testing, and in particular to a MEMS gas sensor batch testing system and method based on a socket. Background Art

[0002] MEMS gas sensor is a common gas detection device, which is widely used in various fields and application scenarios, such as indoor air quality monitoring, industrial safety monitoring, fire warning systems and medical applications. In order to ensure the performance and reliability of MEMS gas sensors and effectively screen out good and bad products during the production process, they need to be tested comprehensively and accurately. Currently, a patent discloses a semiconductor gas sensor electrical performance detection system. The system realizes batch detection of multiple semiconductor gas sensors by integrating multiple test jacks. However, this system is mainly suitable for TO-packaged gas sensors, and its structural characteristics are not completely suitable for MEMS gas sensors, resulting in insufficient accuracy in detecting MEMS gas sensors. Summary of the invention

[0003] In view of the above defects, the present invention proposes a socket-based MEMS gas sensor batch testing system and method, which aims to solve the problem that the existing semiconductor gas sensor electrical performance detection system integrates multiple test sockets to achieve batch detection of multiple semiconductor gas sensors, but this system is mainly suitable for TO-packaged gas sensors, and its structural characteristics are not fully suitable for MEMS gas sensors.

[0004] To achieve this object, the present invention adopts the following technical solutions:

[0005] The socket-based MEMS gas sensor batch testing system includes several test baseboards, a host computer module and a data display module. The test baseboard is provided with a single-chip microcomputer main control module, several socket modules, a multiplexing module, a communication module and an isolation amplifier module;

[0006] The plurality of socket modules are electrically connected to the input end of the multiplexing module, the output end of the multiplexing module is electrically connected to the input end of the isolation amplifier module, the output end of the isolation amplifier module is electrically connected to the input end of the single-chip main control module, and the socket module is used to be electrically connected to the MEMS gas sensor to be tested;

[0007] The communication modules on two adjacent test base plates are electrically connected to each other, the single-chip main control modules on several test base plates are all communicatively connected to the host computer module, and the data display module is communicatively connected to the host computer module.

[0008] Preferably, a serial port conversion module is also provided on the test baseboard, the input end of the serial port conversion module is electrically connected to the output end of the single-chip main control module, and the output end of the serial port conversion module is electrically connected to the input end of the host computer module.

[0009] Preferably, a power supply module is also provided on the test baseboard, and the power supply module is used to supply power to the single-chip main control module, the socket module, the multiplexing module, the communication module, the isolation amplifier module and the serial port conversion module.

[0010] Another aspect of the present application provides a socket-based batch testing method for MEMS gas sensors, the method comprising the following steps:

[0011] Step S1: Connect several MEMS gas sensors to be tested to the corresponding socket modules on the test base plate respectively;

[0012] Step S2: starting the power supply module to supply power to the single-chip main control module, the socket module, the multiplexing module, the communication module, the isolation amplifier module and the serial port conversion module;

[0013] Step S3: a plurality of MEMS gas sensors to be tested transmit analog signals of gas data collected by each of them to the multiplexing module, and the multiplexing module collects analog signals of gas data collected by a plurality of MEMS gas sensors to be tested;

[0014] Step S4: transmitting the analog signals of the gas data collected by the several mems gas sensors to be tested to the isolation amplifier module for amplification and conditioning, so as to obtain the analog signals of the gas data collected by the several mems gas sensors to be tested after processing;

[0015] Step S5: inputting the analog signals of the gas data collected by the several mems gas sensors to be tested after processing into the single-chip main control module, the single-chip main control module receives the analog signals of the gas data collected by the several mems gas sensors to be tested, and performs analog / digital conversion on the analog signals of the gas data collected by the several mems gas sensors to be tested, to obtain the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and outputs the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested after processing;

[0016] Step S6: transmitting the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to the host computer module through the serial port conversion module, and the host computer module receives and analyzes the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to obtain the output characteristic curves of the several mems gas sensors to be tested;

[0017] Step S7: displaying the output characteristic curves of the several mems gas sensors to be tested through the data display module to complete the testing of the several mems gas sensors to be tested.

[0018] Preferably, in step S5, the single-chip main control module processes the original ADC values ​​of the gas data collected by the MEMS gas sensors to be tested, which specifically includes the following sub-steps:

[0019] Step S51: constructing a data storage library in the single-chip microcomputer main control module;

[0020] Step S52: storing the original ADC values ​​of the gas data collected by the several MEMS gas sensors to be tested in the data storage library in sequence.

[0021] Preferably, in step S6, the host computer module analyzes and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to obtain the output characteristic curves of the several mems gas sensors to be tested, which specifically includes the following sub-steps:

[0022] Step S61: converting the original ADC values ​​of the gas data collected by the mems gas sensors to be tested after processing to obtain corresponding conversion values, wherein the conversion formula of the original ADC value of the gas data collected by the mems gas sensors to be tested is as follows:

[0023]

[0024] Where, Rref represents the resistance value; S represents the maximum value of ADC;

[0025] Step S62: Generate a corresponding output characteristic curve according to the corresponding conversion value.

[0026] The technical solution provided by the embodiments of the present application may have the following beneficial effects:

[0027] In this solution, several socket modules are set on the test baseboard, several mems gas sensors to be tested are connected to the corresponding socket modules, and batch detection of multiple mems gas sensors is achieved under the cooperation of the multiplexing module, communication module, isolation amplifier module, host computer module and data display module. Compared with the existing test jacks suitable for TO packaged gas sensors, this solution adopts a socket module, which has structural characteristics that match various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the test system, reduce test errors caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor detection. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of one embodiment of a socket-based MEMS gas sensor batch testing system in the present invention;

[0029] Figure 2 It is a schematic diagram of one embodiment of a socket-based MEMS gas sensor batch testing system in the present invention.

[0030] Among them, 1. Test baseboard; 2. Host computer module; 3. Data display module; 11. Single chip microcomputer main control module; 12. Socket module; 13. Multiplexing module; 14. Communication module; 15. Isolation amplifier module; 16. Serial port conversion module; 17. Power supply module. DETAILED DESCRIPTION

[0031] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals represent the same or similar elements or elements having the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0032] The socket-based MEMS gas sensor batch test system includes several test baseboards 1, a host computer module 2 and a data display module 3. The test baseboard 1 is provided with a single-chip microcomputer main control module 11, several socket modules 12, a multiplexing module 13, a communication module 14 and an isolation amplifier module 15;

[0033] The socket modules 12 are all electrically connected to the input end of the multiplexing module 13, the output end of the multiplexing module 13 is electrically connected to the input end of the isolation amplifier module 15, the output end of the isolation amplifier module 15 is electrically connected to the input end of the single-chip main control module 11, and the socket module 12 is used to be electrically connected to the MEMS gas sensor to be tested;

[0034] The communication modules 14 on two adjacent test base plates 1 are electrically connected to each other, the single-chip main control modules 11 on several test base plates 1 are all communicatively connected to the host computer module 2 , and the data display module 3 is communicatively connected to the host computer module 2 .

[0035] The socket-based mems gas sensor batch testing system of this solution, in this embodiment, as Figure 1As shown, when it is necessary to test the performance of 64 mems gas sensors and perform a single board test, the 64 mems gas sensors to be tested are respectively connected to the corresponding socket modules 12 on one of the test baseboards 1, and the 64 mems gas sensors to be tested transmit the analog signals of the gas data collected by each of them to the multiplexing module 13. The multiplexing module 13 is used to collect the analog signals of the gas data collected by several mems gas sensors to be tested. The multiplexing module 13 can expand one ADC acquisition channel of the single-chip main control module 11 into 64 ADC acquisition channels, and each ADC acquisition channel corresponds to a mems gas sensor to be tested. The analog signal of the gas data collected by the mems gas sensor to be tested outputted from the multiplexing module 13 passes through the isolation operational amplifier module 15 and then to the single-chip microcomputer main control module 11. This is because the resistance range of the mems gas sensor is 100K to 20M or even higher, and the output resistance impedance is too high, resulting in the A / D interface of the single-chip microcomputer main control module 11 being unable to collect data normally. Therefore, the analog signal of the gas data collected by the mems gas sensor needs to be amplified and conditioned by the isolation operational amplifier module 15. The single-chip main control module 11 is used to receive analog signals of gas data collected by several mems gas sensors to be tested, and perform analog / digital conversion on the analog signals of gas data collected by several mems gas sensors to be tested to obtain original ADC values ​​of gas data collected by several mems gas sensors to be tested, and process the original ADC values ​​of gas data collected by several mems gas sensors to be tested. In this embodiment, the single-chip main control module 11 performs analog / digital conversion on the analog signals of gas data collected by 64 mems gas sensors to be tested to obtain original ADC values ​​of gas data collected by 64 mems gas sensors to be tested, and summarizes these data, which can make the data more concise, efficient and stable. Since the single-chip main control modules 11 on the test base plates 1 are all communicatively connected with the host computer module 2, the host computer module 2 is used to receive and analyze the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested after processing, and obtain the output characteristic curves of the several mems gas sensors to be tested. In this embodiment, the host computer module 2 can receive the processed original ADC values ​​of the gas data collected by 64 mems gas sensors to be tested, and analyze them to obtain the output characteristic curves of the 64 mems gas sensors to be tested.Since the data display module 3 is communicatively connected with the host computer module 2, the data display module 3 is used to display the output characteristic curves of several mems gas sensors to be tested. In this embodiment, the data display module 3 can display the output characteristic curves of 64 mems gas sensors to be tested. The staff determines whether these mems gas sensors to be tested are of high quality based on their output characteristic curves.

[0036] Further explanation, such as Figure 2 As shown, when the performance of more than 64 MEMS gas sensors needs to be tested, multi-board testing can be selected, that is, these MEMS gas sensors to be tested can be connected to the socket modules 12 on the multiple test base boards 1 for testing. In the multi-board testing process, since the communication modules 14 on the two adjacent test base boards 1 are electrically connected to each other, the communication modules 14 are used to exchange data with each of the test base boards 1, so as to realize fast and accurate data exchange between the two adjacent test base boards 1. This real-time data exchange is crucial for multi-sensor parallel testing, which can ensure the synchronization and consistency of the test results.

[0037] In this solution, several socket modules 12 are set on the test base plate 1, several mems gas sensors to be tested are connected to the corresponding socket modules 12, and batch detection of multiple mems gas sensors is achieved under the cooperation of the multiplexing module 13, the communication module 14, the isolation amplifier module 15, the host computer module 2 and the data display module 3. Compared with the existing test sockets suitable for TO packaged gas sensors, this solution adopts the socket module 12, which has the structural characteristics of matching various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the test system, reduce the test error caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor detection.

[0038] Preferably, a serial port conversion module 16 is also provided on the test base board 1, the input end of the serial port conversion module 16 is electrically connected to the output end of the single-chip main control module 11, and the output end of the serial port conversion module 16 is electrically connected to the input end of the host computer module 2.

[0039] In this embodiment, the single-chip main control module 11 transmits the gas data collected by the several MEMS gas sensors to be tested to the host computer module 2 through the serial port conversion module 16 after processing. Since the single-chip main control module 11 usually performs serial communication through TTL level, its level range is generally 0V to 3.3V or 5V. The host computer module 2 usually communicates through the USB interface, and its internal signal standard is different from the TTL level. Therefore, the serial port conversion module 16 can convert the TTL level signal output by the single-chip main control module 11 into a signal level that can be recognized by the USB interface, thereby realizing communication between the two.

[0040] Preferably, a power supply module 17 is also provided on the test base board 1, and the power supply module 17 is used to supply power to the single-chip main control module 11, the socket module 12, the multiplexing module 13, the communication module 14, the isolation amplifier module 15 and the serial port conversion module 16.

[0041] In this embodiment, the output voltage of the power module 17 is 12V, 5V and 3.3V, wherein the voltage of 3.3V can supply power to the single-chip main control module 11, the socket module 12, the communication module 14 and the isolation amplifier module 15, so that the single-chip main control module 11, the socket module 12, the communication module 14 and the isolation amplifier module 15 can operate normally. The voltage of 5V supplies power to the multiplexing module 13, so that the multiplexing module 13 can operate normally. The voltage of 12V can supply power to the serial port conversion module 16, so that the serial port conversion module 16 can operate normally.

[0042] Another aspect of the present application provides a socket-based batch testing method for MEMS gas sensors, the method comprising the following steps:

[0043] Step S1: Connect several MEMS gas sensors to be tested to the corresponding socket modules 12 on the test base plate 1 respectively;

[0044] Step S2: starting the power supply module 17 to supply power to the single-chip main control module 11, the socket module 12, the multiplexing module 13, the communication module 14, the isolation amplifier module 15 and the serial port conversion module 16;

[0045] Step S3: a plurality of MEMS gas sensors to be tested transmit analog signals of gas data collected by each of them to the multiplexing module 13, and the multiplexing module 13 collects analog signals of gas data collected by a plurality of MEMS gas sensors to be tested;

[0046] Step S4: transmitting the analog signals of the gas data collected by the several mems gas sensors to be tested to the isolation amplifier module 15 for amplification and conditioning, so as to obtain the analog signals of the gas data collected by the several mems gas sensors to be tested after processing;

[0047] Step S5: inputting the analog signals of the gas data collected by the several mems gas sensors to be tested after processing into the single-chip main control module 11, the single-chip main control module 11 receives the analog signals of the gas data collected by the several mems gas sensors to be tested, and performs analog / digital conversion on the analog signals of the gas data collected by the several mems gas sensors to be tested, to obtain the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and outputs the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested after processing;

[0048] Step S6: transmitting the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to the host computer module 2 through the serial port conversion module 16; the host computer module 2 receives and analyzes the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and obtains the output characteristic curves of the several mems gas sensors to be tested;

[0049] Step S7: The output characteristic curves of the several mems gas sensors to be tested are displayed through the data display module 3 to complete the testing of the several mems gas sensors to be tested.

[0050] The socket-based batch testing method of mems gas sensors of this scheme realizes batch testing of multiple mems gas sensors by connecting several mems gas sensors to be tested to the corresponding socket modules 12 on the test base plate 1, and with the cooperation of the multiplexing module 13, the communication module 14, the isolation amplifier module 15, the host computer module 2 and the data display module 3. Compared with the existing test jacks suitable for TO packaged gas sensors, this scheme adopts the socket module 12, which has the structural characteristics of matching various interfaces on the mems gas sensor chip, has higher compatibility and stability, can ensure that the mems gas sensor chip can be stably and reliably connected to the test system, reduce the test error caused by interface mismatch or poor contact, and further improve the accuracy of mems gas sensor detection.

[0051] Preferably, in step S5, the single-chip main control module 11 processes the original ADC values ​​of the gas data collected by the MEMS gas sensors to be tested, which specifically includes the following sub-steps:

[0052] Step S51: constructing a data storage library in the single-chip main control module 11;

[0053] Step S52: storing the original ADC values ​​of the gas data collected by the several MEMS gas sensors to be tested in the data storage library in sequence.

[0054] In this embodiment, when it is necessary to process the original ADC values ​​of the gas data collected by 64 mems gas sensors to be tested, these original ADC values ​​can be stored in sequence in the positions corresponding to the first 128 bytes in the data storage library in the single-chip main control module 11. By storing the original ADC values ​​of the gas data collected by several mems gas sensors to be tested, it is conducive to better management of data.

[0055] Preferably, in step S6, the host computer module 2 analyzes and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to obtain the output characteristic curves of the several mems gas sensors to be tested, which specifically includes the following sub-steps:

[0056] Step S61: converting the original ADC values ​​of the gas data collected by the mems gas sensors to be tested after processing to obtain corresponding conversion values, wherein the conversion formula of the original ADC value of the gas data collected by the mems gas sensors to be tested is as follows:

[0057]

[0058] Where, Rref represents the resistance value; S represents the maximum value of ADC;

[0059] Step S62: Generate a corresponding output characteristic curve according to the corresponding conversion value.

[0060] In this embodiment, the single-chip main control module 11 includes a 12-bit ADC submodule. At this time, Rref is 100kohm and S is 4096. The original ADC value of the gas data collected by the mems gas sensor to be tested is converted by the above conversion formula to obtain the response resistance value of the host computer module 2. The output characteristic curve of the mems gas sensor to be tested is obtained by calculation, which can intuitively reflect the detection performance of the mems gas sensor to be tested.

[0061] In addition, each functional unit in each embodiment of the present invention may be integrated into a processing module, or each unit may exist physically separately, or two or more units may be integrated into one module. The above-mentioned integrated module may be implemented in the form of hardware or in the form of a software functional module. If the integrated module is implemented in the form of a software functional module and sold or used as an independent product, it may also be stored in a computer-readable storage medium.

[0062] Although the embodiments of the present invention have been shown and described above, it is to be understood that the above embodiments are exemplary and are not to be construed as limitations of the present invention. A person skilled in the art may change, modify, replace and vary the above embodiments within the scope of the present invention.

Claims

1. A socket-based batch test system for mems gas sensors, characterized by: It includes several test baseboards, host computer modules and data display modules, wherein the test baseboard is provided with a single-chip microcomputer main control module, several socket modules, a multiplexing module, a communication module and an isolation amplifier module; The plurality of socket modules are electrically connected to the input end of the multiplexing module, the output end of the multiplexing module is electrically connected to the input end of the isolation amplifier module, the output end of the isolation amplifier module is electrically connected to the input end of the single-chip main control module, and the socket module is used to be electrically connected to the MEMS gas sensor to be tested; The communication modules on two adjacent test base plates are electrically connected to each other, the single-chip main control modules on several test base plates are all communicatively connected to the host computer module, and the data display module is communicatively connected to the host computer module.

2. The socket-based MEMS gas sensor batch testing system according to claim 1, characterized in that: The test baseboard is also provided with a serial port conversion module, the input end of the serial port conversion module is electrically connected to the output end of the single-chip main control module, and the output end of the serial port conversion module is electrically connected to the input end of the host computer module.

3. The socket-based MEMS gas sensor batch testing system according to claim 2, characterized in that: The test baseboard is also provided with a power supply module, and the power supply module is used to supply power to the single-chip main control module, the socket module, the multiplexing module, the communication module, the isolation amplifier module and the serial port conversion module.

4. A socket-based batch testing method for mems gas sensors, applied to a socket-based batch testing system for mems gas sensors as claimed in any one of claims 1 to 3, characterized in that: The method comprises the following steps: Step S1: Connect several MEMS gas sensors to be tested to the corresponding socket modules on the test base plate respectively; Step S2: starting the power supply module to supply power to the single-chip main control module, the socket module, the multiplexing module, the communication module, the isolation amplifier module and the serial port conversion module; Step S3: a plurality of MEMS gas sensors to be tested transmit analog signals of gas data collected by each of them to the multiplexing module, and the multiplexing module collects analog signals of gas data collected by a plurality of MEMS gas sensors to be tested; Step S4: transmitting the analog signals of the gas data collected by the several mems gas sensors to be tested to the isolation amplifier module for amplification and conditioning, so as to obtain the analog signals of the gas data collected by the several mems gas sensors to be tested after processing; Step S5: inputting the analog signals of the gas data collected by the several mems gas sensors to be tested after processing into the single-chip main control module, the single-chip main control module receives the analog signals of the gas data collected by the several mems gas sensors to be tested, and performs analog / digital conversion on the analog signals of the gas data collected by the several mems gas sensors to be tested, to obtain the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested, and outputs the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested after processing; Step S6: transmitting the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to the host computer module through the serial port conversion module, and the host computer module receives and analyzes the processed original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to obtain the output characteristic curves of the several mems gas sensors to be tested; Step S7: displaying the output characteristic curves of the several mems gas sensors to be tested through the data display module to complete the testing of the several mems gas sensors to be tested.

5. The socket-based MEMS gas sensor batch testing method according to claim 4, characterized in that: In step S5, the single-chip main control module processes the original ADC values ​​of the gas data collected by the MEMS gas sensors to be tested, which specifically includes the following sub-steps: Step S51: constructing a data storage library in the single-chip microcomputer main control module; Step S52: storing the original ADC values ​​of the gas data collected by the several MEMS gas sensors to be tested in the data storage library in sequence.

6. The socket-based MEMS gas sensor batch testing method according to claim 5, characterized in that: In step S6, the host computer module analyzes and processes the original ADC values ​​of the gas data collected by the several mems gas sensors to be tested to obtain the output characteristic curves of the several mems gas sensors to be tested, which specifically includes the following sub-steps: Step S61: converting the original ADC values ​​of the gas data collected by the mems gas sensors to be tested after processing to obtain corresponding conversion values, wherein the conversion formula of the original ADC value of the gas data collected by the mems gas sensors to be tested is as follows: Where, Rref represents the resistance value; S represents the maximum value of ADC; Step S62: Generate a corresponding output characteristic curve according to the corresponding conversion value.

Images