Resist cleaning equipment and cleaning method

Abstract

The invention discloses resist cleaning equipment and a cleaning method. The resist cleaning equipment comprises an equipment main body, a water tank; a conveying unit; a filtering unit; the filtering unit comprises supporting rings which are symmetrically arranged; the filter screen is fixedly arranged on the outer walls of the supporting rings, and a filtering channel is formed between the symmetrically arranged supporting rings; the filter screen is provided with a plurality of closed-loop structures; the closed-loop structure is composed of four rod parts which are connected in sequence, the two opposite rod parts located on the different sides of the axis of the supporting ring have the same length, and the two connected rod parts have different lengths; in the working state, the conveying unit drives the circuit board to be cleaned in the water tank, and cleaning liquid circulates in the water tank through the filtering unit, so that an anti-corrosion film on the circuit board is intercepted by the filtering net; after filtering is finished, one supporting ring rotates, so that the closed-loop structure is in a parallelogram shape, and the anti-corrosion film is separated from the filter screen. The problems that the filter screen in the cleaning equipment is blocked and is not easy to clean in the cleaning process can be solved.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to an anti-etching agent cleaning device. Background Art

[0002] During the production process, circuit boards need to be etched to remove unnecessary copper from the circuit boards. Before etching, a layer of anti-corrosion film needs to be applied to the corresponding positions on the circuit boards to protect the copper circuits. After etching, the anti-corrosion film needs to be removed. Alkaline washing is used to remove the anti-corrosion film. Generally, sodium hydroxide / sodium carbonate solution is used for removal.

[0003] In the prior art, the washed anti-corrosion film and solution will enter the drum for filtration. The drum is equipped with a filter screen, and the filter residue (anti-corrosion film and copper residue, etc.) will be intercepted on the filter screen, gradually agglomerated, and attached to the inner wall of the filter hole; due to the continuous accumulation of filter residue, the filter screen may be blocked and difficult to clean, resulting in a decrease in filtration efficiency and even causing the production line to stop.

[0004] Therefore, it is necessary to provide a new resist cleaning device and cleaning method to solve the above problems existing in the prior art. Summary of the invention

[0005] The object of the present invention is to provide an anti-corrosion agent cleaning device and a cleaning method for cleaning a circuit board, which can improve the problem that the filter screen in the cleaning device is blocked and difficult to clean during the cleaning process.

[0006] To achieve the above object, the technical solution of the present invention is as follows: A resist cleaning device, comprising a device body; A water tank, arranged on the main body of the device, for placing a cleaning liquid for cleaning the circuit board; The conveying unit is arranged on the equipment body and is used for conveying the circuit board to the water tank.

[0007] A filtering unit, disposed on the device body and connected to the water tank; The filter unit comprises a symmetrically arranged support ring, and the symmetrically arranged support ring is movably arranged on the device body; A filter screen is fixedly arranged on the outer wall of the support ring, and a filter channel is formed between the symmetrically arranged support rings; the filter screen has a plurality of closed-loop structures to form rectangular filter holes on the filter screen; the closed-loop structure is composed of four rods connected in sequence, and two opposite rods located on different sides of the axis of the support ring have the same length, and two connected rods have different lengths; In the working state, the conveying unit drives the circuit board to be cleaned in the water tank, and the cleaning liquid circulates in the water tank through the filtering unit, so that the anti-corrosion film on the circuit board is intercepted by the filter net; after the filtering is completed, one of the support rings rotates to make the closed-loop structure into a parallelogram, so that the anti-corrosion film can be separated from the filter net.

[0008] Optionally, the two support rings have different heights in the vertical direction, so that the filter screen is arranged at an angle; A plurality of support rods are arranged between the two support rings, one end of the support rod is movably arranged on one of the support rings, the other end is movably arranged on the other support ring, and the support rod is connected to the filter screen; The support ring rotates to tilt the support rod, and the closed-loop structure of the filter screen is deformed to clean the anti-corrosion film attached to the filter screen.

[0009] Optionally, a secondary filtration system is also included, and the secondary filtration system includes: The transfer member has a filtering end and a collecting end, wherein the height of the collecting end in the vertical direction is higher than the height of the filtering end in the vertical direction; A conveying assembly, disposed on the transfer member, for conveying the anti-corrosion film to the collection end; The secondary filter screen is vertically arranged and detachably arranged at the filtering end for secondary filtering.

[0010] Optionally, the transmission component includes: A driving member is rotatably disposed on the filter end and has a height difference with the filter end, and a side wall of the driving member has a rotating plate; A conveyor belt is arranged on the transfer member, and a rotating shaft of the conveyor belt is connected to the driving member through a gear; The driving member and the conveyor belt are placed on both sides of the secondary filter screen; Wherein, the cleaning liquid contacts the rotating plate after passing through the secondary filter screen, so that the driving member rotates, thereby driving the conveyor belt to move, and the anti-corrosion film moves to the collection end.

[0011] Optionally, a first interception member is fixedly provided at the filter end, the first interception member is inclined to form a concave structure with the end surface of the conveyor belt, a first interception plate is fixedly provided at the end of the first interception member, and one end of the first interception plate is in contact with the end surface of the conveyor belt; A second intercepting member is fixedly provided at the collecting end, and the second intercepting member is inclined to form a convex structure with the end face of the conveyor belt. A second intercepting plate is fixedly provided at the end of the second intercepting member, and one end of the second intercepting plate is in contact with the end face of the conveyor belt to transfer the anti-corrosion film on the conveyor belt.

[0012] Optionally, a receiving member is provided on the device body, and the receiving member is in an "L" shape to receive the filtered anti-corrosion membrane.

[0013] Optionally, a water receiving bucket is provided at the bottom of the filter unit, the water tank includes a first cleaning tank and a second cleaning tank, the first cleaning tank and the second cleaning tank are both connected to the water receiving bucket, and the side walls of the first cleaning tank and the second cleaning tank are both provided with drainage ports; The conveying unit comprises a conveying member, on which a first conveying channel is provided. The first conveying channel has a fork to convey the circuit board to the first cleaning tank and / or the second cleaning tank.

[0014] Optionally, the conveying member is provided with two second conveying channels, and the two second conveying channels are both connected to the first conveying channel to form the bifurcation, and extend to the first cleaning tank and the second cleaning tank respectively; A steering member is disposed in the first conveying channel, and the steering member changes direction after contacting the circuit board, so that the circuit board is conveyed to the first cleaning tank and / or the second cleaning tank.

[0015] A cleaning method, applicable to resist cleaning equipment, comprises the following steps: The circuit board is placed on the conveying unit; The conveying unit transfers the circuit board to the water tank so that the circuit board is cleaned by the cleaning liquid; The circuit board is transferred to the outside of the water tank; The cleaning liquid in the water tank is transferred to the filtering unit for filtering; The filtered cleaning liquid is transferred back to the water tank; The circuit board is cleaned cyclically according to the above steps.

[0016] Optionally, the water tank includes a first cleaning tank and a second cleaning tank, and the conveying member is provided with two second conveying channels; When the conveying unit transfers the circuit board to the water tank, the circuit board enters the corresponding second conveying channel to enter the first cleaning tank or the second cleaning tank.

[0017] The beneficial effects of the resist cleaning device and cleaning method provided by the present invention include at least: 1. The filter holes of the filter net are set to be rectangular, and the support ring can rotate. The rotation of the support ring drives the filter holes to deform. When the filter holes are deformed, the anti-corrosion membrane structure attached to the filter holes is destroyed, and thus detached from the filter holes, reducing the possibility of the filter holes being blocked and facilitating cleaning; 2. Set up a two-stage filtration system to filter the cleaning liquid twice to improve the filtration effect; 3. Set up the first cleaning tank and the second cleaning tank to ensure that there is always a cleaning tank in working condition, thereby improving the cleaning efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 A schematic diagram of the main structure of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 2 A front view of the main structure of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 3 A top view of the main structure of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 4 It is a development diagram of a filter screen in a non-tilted state of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 5 It is a development diagram of a filter screen in a tilted state of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 6 A schematic diagram of a connection method between a support rod and a support ring in a resist cleaning device and a cleaning method according to an embodiment of the present invention; Figure 7 for Figure 2 Enlarged view of part A; Figure 8 A schematic diagram of a secondary cleaning device structure of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Fig. 9 A schematic diagram of the positions of a first pipeline and a second pipeline of a resist cleaning device and a cleaning method according to an embodiment of the present invention; Fig.10 for Figure 3 Enlarged view of part B.

[0019] Reference numerals: 100, equipment body; 200, water tank; 210, first cleaning tank; 220, second cleaning tank; 230, drain; 240, first pipeline; 250, second pipeline; 300, conveying unit; 310, conveying member; 311, first conveying channel; 312, second conveying channel; 313, steering member; 321, first side wall; 322, second side wall; 323, third side wall; 324, fourth side wall; 325, fifth side wall; 326, sixth side wall; 400, filter unit; 410, support ring; 420, filter screen; 421, closed loop structure ; 422, first rod; 423, second rod; 424, filter hole; 430, support rod; 440, rotating groove; 450, rotating ball; 500, secondary filtration system; 510, transfer member; 511, filter end; 512, collection end; 520, transmission component; 521, driving member; 522, conveyor belt; 523, rotating plate; 524, connecting gear; 525, baffle; 530, secondary filter; 541, first intercepting member; 542, first intercepting plate; 551, second intercepting member; 552, second intercepting plate; 600, receiving member; 700, water receiving bucket. DETAILED DESCRIPTION

[0020] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the present invention belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0021] The specific implementation modes of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0022] refer to Figure 1 , Figure 2 and Figure 3. An embodiment of the present invention provides an anti-corrosion cleaning device for cleaning a circuit board to remove an anti-corrosion film, wherein the anti-corrosion cleaning device includes a device body 100, the device body 100 is placed on the ground, and parts are arranged inside the device body 100 to clean the circuit board; the anti-corrosion cleaning device also includes a water tank 200, a conveying unit 300 and a filtering unit 400, wherein the water tank 200, the conveying unit 300 and the filtering unit 400 are all arranged in the device body 100, the water tank 200 is used to place a cleaning liquid for cleaning the circuit board, the circuit board is cleaned in the water tank 200, and the conveying unit 300 is used to convey the circuit board so that the circuit board is transported to the water tank 200. The filter unit 400 is connected to the water tank 200 and is used to filter the cleaning liquid, thereby separating the cleaning liquid and the anti-corrosion film in the cleaning liquid; the height direction of the equipment body 100 after being placed on the ground is defined as the vertical direction, wherein a water receiving bucket 700 is provided at the bottom of the filter unit 400, and the water receiving bucket 700 is used to receive the cleaning liquid passing through the filter unit 400, and a water pump is fixedly provided in the water receiving bucket 700, and the fixing method thereof can be bonding, clamping or bolting, etc. In this embodiment, the two are fixedly connected by bolting, and the water pump is connected to the water tank 200 by a first pipe 240, so as to facilitate the transfer of the cleaning liquid in the water receiving bucket 700 to the water tank 200 again.

[0023] Reference Figure 1 , Figure 2 and Figure 3 The filter unit 400 includes symmetrically arranged support rings 410. In the present embodiment, two support rings 410 are selected, and both support rings 410 are movably arranged on the device body 100. Specifically, a bracket is fixedly arranged on the inner wall of the device body 100, and the fixing method thereof can be bonding, clamping or bolting, etc. In the present embodiment, the two are fixedly connected by bolting, and the bracket has an arc-shaped portion, and the support ring 410 is rotatably arranged on the arc-shaped portion of the bracket, so that the support member is arranged inside the device body 100 and can rotate around its own axis inside the device body 100; the support ring 4 10 is fixedly provided with a filter screen 420 on the outside, and the fixing method thereof may be bonding, clamping or bolting, etc. In the present embodiment, the two are fixedly connected by bonding, and the two support rings 410 and the filter screen 420 together form a filtering channel of a cylindrical structure. During the filtering process of the cleaning liquid, the cleaning liquid flows from one of the support rings 410 to the filter screen 420, and the cleaning liquid flows out from the filter screen 420 and enters the water receiving bucket 700. The anti-corrosion film in the cleaning liquid is intercepted by the filter screen 420. In addition, the two support rings 410 have different heights in the vertical direction, so that the filter screen 420 is tilted.

[0024] When the anti-corrosion film accumulates too much and the cleaning liquid separates from the anti-corrosion film, the anti-corrosion film will clump or agglomerate, and the agglomerated part will be discharged according to the inclined filter screen 420. The agglomerated anti-corrosion film will adhere to the inner wall of the filter hole 424 on the filter screen 420, causing the filter hole 424 to be blocked; in order to facilitate the cleaning of the agglomerated anti-corrosion film blocked on the inner wall of the filter hole 424, refer to Figure 1 , Figure 4 and Figure 5The filter net 420 has a plurality of closed-loop structures 421, and the closed-loop structures 421 form rectangular filter holes 424 on the filter net 420. At the same time, the closed-loop structures 421 are composed of four rods connected in sequence, and the rods are made of flexible material, such as nylon material, so that the closed-loop structures 421 surround the filter holes 424, wherein the two opposite rods located on different sides of the axis of the support ring 410 have the same length, and the two connected rods have different lengths. Here, the longer rod is defined as the first rod 422, and the shorter rod is defined as the first rod 422. The rod portion is defined as the second rod 423, wherein the length direction of the first rod 422 can be parallel to the axis direction of the support ring 410, or the length direction of the second rod 423 can be parallel to the axis direction of the support ring 410. In this embodiment, the length direction of the first rod 422 is parallel to the axis direction of the support ring 410; two adjacent closed-loop structures 421 along the axial direction of the support ring 410 share a second rod 423, and two adjacent closed-loop structures 421 around the axis of the support ring 410 share a first rod 422, so that multiple closed-loop structures 421 can be connected to the support ring 410. The structures 421 are together wrapped into a cylindrical shape and form a filtering channel; in this way, the filtering hole 424 formed by the closed-loop structure 421 is rectangular. In the actual working process, one of the support rings 410 is controlled to rotate so that the filtering hole 424 formed by the closed-loop structure 421 is inclined and formed into a parallelogram. It is worth noting that in the actual use process, the state of the filtering hole 424 cannot be changed into a standard parallelogram. Here, it is described with the plane state of the filter net 420 unfolded. In the actual use process, the support ring 410 rotates, and the shape of the filtering hole 424 is bound to be deformed. At this time, the parallelogram is used as a reference. When the filtering is completed, the support ring 410 is rotated in the opposite direction to make the closed-loop structure 421 tilt in the opposite direction. At this time, the agglomerated anti-corrosion film attached to the inner wall of the filtering hole 424 is separated from the filtering hole 424 due to the structural change of the filtering hole 424, so as to facilitate cleaning. At the same time, due to the inclined setting of the filtering channel, the agglomerated anti-corrosion film separated from the filtering hole 424 can be transferred to the outside of the filtering channel along the inclined direction of the filtering channel.In order to facilitate the transfer of the anti-corrosion film, two support rings 410 are set to keep rotating during the filtration process. Two motors are fixed on the top of the equipment body 100. The fixing method can be bonding, clamping or bolting. In this embodiment, the two are fixedly connected by bolting, and the key on the rotating shaft of the motor is connected to the driving gear. The outer wall of the support ring 410 is provided with a driven tooth. The driving gear meshes with the driven tooth, thereby driving the support ring 410 to rotate. At the same time, the two motors correspond to the two support rings 410 respectively. During the filtration process, the two motors run synchronously to make the two support rings 410 rotate synchronously. When it is needed When the shape of the closed-loop structure 421 is to be changed, one of the motors stops running, and the other motor rotates forward or reversely to change the shape of the closed-loop structure 421. In the working state, the conveying unit 300 first drives the circuit board to be cleaned in the water tank 200. After the cleaning liquid passes through the filter unit 400, it forms a cycle in the water tank 200, so that the anti-corrosion film on the circuit board is intercepted by the filter 420. After the filtration is completed, or when cleaning is required, the two support rings 410 both stop rotating. After stopping rotating, one of the support rings 410 rotates to make the closed-loop structure 421 a parallelogram, so that the anti-corrosion film is separated from the filter 420. ;

[0025] In order to facilitate the fixing of the filter screen 420 on the support ring 410, refer to Figure 1 , Figure 2 and Figure 6 A plurality of support rods 430 are arranged between the two support rings 410, one end of the support rod 430 is movably arranged on one of the support rings 410, and the other end is movably arranged on the other support ring 410, and a buckle is fixedly arranged on the side wall of the support rod 430 in an integrated manner, and the filter net 420 is inserted into the buckle so that the filter net 420 is fixed on the support rod 430. In order to drive the support rod 430 to rotate during the rotation of the support ring 410, a rotating groove 440 is opened on the side wall of the support ring 410, and a rotating ball 450 is fixedly arranged on the end of the support rod 430, the shape of the rotating groove 440 is adapted to the shape of the rotating ball 450, and the rotating ball 450 can move in the rotating groove 440, At the same time, it will not disengage from the rotating groove 440. During the rotation of the support ring 410, the rotating ball 450 can move in the rotating groove 440 to adapt to the movement of the support ring 410, that is, the support rod 430 can move in any direction on the support ring 410, so that the support rod 430 can adapt to the rotation of the two support rings 410. During operation, the two support rings 410 rotate synchronously, driving the inclined support rod 430 to move, thereby driving the filter to move, one of the support rings 410 rotates, and the other support ring 410 does not move. At this time, the support rod 430 is inclined along the radial direction of the support ring 410, and the closed-loop structure 421 on the filter screen 420 is deformed, thereby facilitating the cleaning of the anti-corrosion film attached to the filter screen 420.

[0026] In addition, the resist cleaning device also includes a secondary filtration system 500, referring to Figure 2 , Figure 7 and Figure 8, wherein the secondary filtration system 500 includes a transfer member 510, a transmission assembly 520 and a secondary filter screen 530, wherein the transfer member 510 is arranged at the bottom of the filter screen 420 and the support ring 410, and there is a certain gap between the transfer member 510 and the filter screen 420, and the transfer member 510 has a filtering end 511 and a collecting end 512, and the transfer member 510 is inclined so that the height of the collecting end 512 in the vertical direction is higher than the height of the filtering end 511 in the vertical direction. In addition, the transfer member 510 is fixed with a stopper at both ends of the support ring 410 along the axial direction by an integral molding method. The baffle 525 is used to limit the flow direction of the cleaning liquid. The conveying assembly 520 is arranged on the transfer member 510 to convey the anti-corrosion film to the collection end 512. At the same time, a frame is arranged on the outer edge of the secondary filter screen 530. The secondary filter screen 530 is fixed to the frame by bonding. The secondary filter screen 530 is arranged vertically and detachably arranged at the filter end 511 for secondary filtration. During the filtration process, the cleaning liquid passing through the filter screen 420 flows to the transfer member 510. Since the transfer member 510 is arranged at an angle, the cleaning liquid flows to the transfer member 510. The liquid flows on the transfer member 510 to the secondary filter screen 530, and is filtered twice through the secondary filter screen 530. At the same time, the baffle 525 prevents the cleaning liquid from axially separating from the transfer member 510 along the support ring 410. In this embodiment, the transmission component 520 includes a driving member 521 and a conveyor belt 522, wherein the driving member 521 and the conveyor belt 522 are respectively arranged on both sides of the secondary filter screen 530, and the driving member 521 is rotatably arranged at the filter end 511. Specifically, the side wall of the transfer member 510 close to the filter end 511 is fixedly provided with a connecting plate by bolt fixing, and the driving member 521 is rotatably arranged on the rotating plate through a rotating shaft, and the rotating plate is tilted so that there is a height difference between the axis of the driving member 521 and the lowest point of the filter end 511. At the same time, the side wall of the driving member 521 has a rotating plate 523, and a plurality of rotating plates 523 are arranged, and the plurality of rotating plates 523 are evenly distributed around the axis of the driving member 521. Since there is a height difference between the axis of the driving member 521 and the lowest point of the filter end 511, the cleaning liquid will contact the rotating plate 523 after passing through the secondary filter screen 530, driving the rotating plate 523 to move, thereby driving the driving member 521 to rotate;The conveyor belt 522 is arranged on the conveying member, and the transmission belt has two rotating shafts, which are respectively arranged at the filtering end 511 and the conveying end. A gear is rotatably arranged on the baffle plate 525, which is defined as a connecting gear 524, and the rotating shaft of the conveyor belt 522 and the driving member 521 are connected through the connecting gear 524. Specifically, a plurality of mutually meshing connecting gears 524 are rotatably arranged on the connecting plate through the rotating shaft, wherein the two connecting gears 524 at the edge are respectively rotatably connected with the driving member 521 and the rotating shaft, so that when the driving member 521 rotates, the rotating shaft can be driven to rotate, thereby driving The conveyor belt 522 moves from the filter end 511 toward the collection end 512. The side wall of the rotating shaft is provided with a component that cooperates with the conveyor belt 522 to drive the conveyor belt 522 to move. For example, a protrusion is provided on the side wall of the transmission belt, and a groove corresponding to the protrusion is provided on the transmission belt to drive the conveyor belt 522 to move. During the working process, the cleaning liquid falls to the middle of the conveyor belt 522 after passing through the filter screen 420. Under the action of its own gravity, the cleaning liquid flows toward the filter. In this process, the conveyor belt 522 can be attached with an anti-corrosion film and drive it to move toward the collection end 512. ;

[0027] In addition, in order to facilitate the cleaning of the anti-corrosion film, refer to Figure 2 , Figure 7 and Figure 8The filter end 511 is fixedly provided with a first intercepting member 541, which is inclined to form a concave structure with the end surface of the conveyor belt 522. The end of the first intercepting member 541 is fixedly provided with a first intercepting plate 542, which can be fixed by bonding, clamping or bolting. In this embodiment, the two are fixedly connected by bolting, and one end of the first intercepting plate 542 is in contact with the end surface of the conveyor belt. The first intercepting plate 542 is made of rubber, and the first intercepting plate 542 is in contact with the conveyor belt. The end of the conveyor belt 522 is set in a pointed shape, so that the anti-corrosion film will not contact the transfer member 510 on the conveyor belt 522 in the direction toward the filtering end 511, thereby facilitating the transportation of the anti-corrosion film to the collecting end 512; the collecting end 512 is fixedly provided with a second intercepting member 551, and the fixing method thereof can be bonding, clamping or bolting, etc. In this embodiment, the two are fixedly connected by bolting, and the second intercepting member 551 is set obliquely to form a convex structure with the end face of the conveyor belt 522, and the end of the second intercepting member 551 The second interception plate 552 is fixedly set, and its fixing method can be bonding, clamping or bolting. In this embodiment, the two are fixedly connected by bolting. At the same time, the end surface of the second interception plate 552 in contact with the conveyor belt 522 is set in a sharp angle. The second interception member 551 is made of rubber material, so that the anti-corrosion film of the conveyor belt 522 can be transferred to the second interception member 551 by the second interception plate 552 at the second interception member 551. At the same time, the second interception member 551 is set obliquely, which is convenient for the anti-corrosion film to be transferred from the second interception member In addition, a receiving member 600 is provided on the equipment body 100, and the receiving member 600 is "L"-shaped, and a receiving groove is provided on the receiving member 600, and the positions of the receiving grooves correspond to the support ring 410 and the second intercepting member 551 respectively, so that the anti-corrosion film transferred from different positions to the outside of the equipment body 100 can be received by the receiving groove, and the position of the water receiving bucket 700 corresponds to the position of the filter end 511, so that the cleaning liquid can enter the water receiving bucket 700 after passing through the filter end 511, which is convenient for the circulation process.

[0028] Reference Figure 3 , Fig. 9 and Fig.10The water tank 200 includes a first cleaning tank 210 and a second cleaning tank 220. The first cleaning tank 210 and the second cleaning tank 220 are both connected to the water receiving bucket 700, and two water pumps are arranged in the water receiving bucket 700. The two water pumps are respectively connected to the bottom of the first cleaning tank 210 and the second cleaning tank 220 through a first pipe 240, and are used to transfer the cleaning liquid in the water receiving bucket 700 to the first cleaning tank 210 or the second cleaning tank 220. At the same time, the side walls of the first cleaning tank 210 and the second cleaning tank 220 are both provided with a drain port 230, and a control valve is arranged at the water opening, and the drain port is provided with a control valve. A second pipe 250 is fixedly arranged at the port 230 by bolts, and one end of the second pipe 250 passes through the support ring 410 and extends into the filter channel. When the control valve is opened, the cleaning liquid in the first cleaning tank 210 and the second cleaning tank 220 can enter the filter screen 420 through the second pipe 250; at the same time, the conveying unit 300 includes a conveying member 310, and a first conveying channel 311 is opened on the conveying member 310, and the first conveying channel 311 has a fork, and at the same time, two second conveying channels 312 are opened on the conveying member 310, and the second conveying channels 312 and The first conveying channel 311 is connected, and a fork is formed at the connection point, which is convenient for conveying the circuit board to the first cleaning tank 210 or the second cleaning tank 220. The first conveying channel 311 and the second conveying channel 312 are both provided with rollers that rotate through the rotating shaft. A motor is fixedly provided on the conveying member 310 by bolts. An extension rod is keyed to the rotating shaft of the motor, and one end of the extension rod is keyed to the roller to drive the roller to move, thereby driving the circuit board to move in the first conveying channel 311 and the second conveying channel 312. A steering member 313 is provided in the first conveying channel 311. , the steering member 313 changes direction after contacting the circuit board, so that the circuit board is conveyed to the first cleaning tank 210 and / or the second cleaning tank 220; specifically, the end of the first conveying channel 311 is triangular, and has a first side wall 321 and a second side wall 322, the steering member 313 has a pointed end, so that the side wall of the steering member 313 forms a third side wall 323 and a fourth side wall 324, and the steering member 313 is rotatably disposed in the first conveying channel 311 through a rotating shaft, and the second conveying channel 312 is connected to the first conveying channel 311. A fifth side wall 325 and a sixth side wall 326 are provided;Wherein, in the initial state, the steering member 313 is deflected, the first side wall 321 is flush with the third side wall 323 and on the same vertical plane, and the third side wall 323 is parallel to the fourth side wall 324, and there is a certain angle between the fifth side wall 325 and the sixth side wall 326. At this time, the circuit board moves to the fork and contacts the steering member 313, and enters one of the second conveying channels 312. When the circuit board moves to the fifth side wall 325, since there is a certain angle between the fifth side wall 325 and the sixth side wall 326, the movement direction of the circuit board is deflected under the restriction of the sixth side wall 326. Since the length of the fifth side wall 325 is greater than the length of the third side wall 323, and the length difference between the two is less than the length of the circuit board, the deflection of the movement direction of the circuit board will drive the steering member 313 to rotate, and the circuit board continues to enter the second conveying channel 312. After the steering member 313 rotates, the fourth side wall 324 The fourth side wall 324 is flush with the second side wall 322 and is in the same vertical plane. The fifth side wall 325 in the other second conveying channel 312 is parallel. At this time, the next circuit board enters the other second conveying channel 312, so that the two adjacent circuit boards can reach the first cleaning tank 210 or the second cleaning tank 220 respectively. In the actual cleaning process, the cleaning liquid in the first cleaning tank 210 and the second cleaning tank 220 circulates respectively, so that in the cleaning process, there is always a cleaning tank for cleaning the circuit board. At the same time, when the circuit board enters the first cleaning tank 210 or the second cleaning tank 220, it can be directly passed into the first cleaning tank 210 or the second cleaning tank 220, or it can be placed by a manipulator. In this embodiment, a manipulator is set in the equipment body 100, and the manipulator clamps the circuit board in the second conveying channel to the first cleaning tank 210 or the second cleaning tank 220. ;

[0029] The present application also discloses a cleaning method, which is applicable to the above-mentioned resist cleaning device, comprising the following steps: Step 1: Place the circuit board on the conveying unit 300 and place the circuit board in the first conveying channel 311. The motor is started to drive the roller to rotate, thereby driving the circuit board to move in the first conveying channel 311 and the second conveying channel 312. Step 2: The conveying unit 300 transfers the circuit board to the water tank 200, and the robot is started. According to the content of the cleaning liquid in the first cleaning tank 210 and the second cleaning tank 220, the circuit board in the second conveying channel 312 is clamped to the corresponding first cleaning tank 210 or the second cleaning tank 220, so that the circuit board is cleaned by the cleaning liquid; Step 3: The robot moves the cleaned circuit board to the outside of the water tank 200; Step 4: The cleaning liquid in the water tank 200 is transferred to the filter unit 400 for filtration. Specifically, the cleaning liquid in the first cleaning tank 210 or the second cleaning tank 220 is transferred to the filter screen 420 through the control valve and the second pipe 250, and is filtered at the filter screen 420; Step 5: The cleaning liquid is filtered twice at the filter unit 400 to separate the cleaning liquid from the anti-corrosion membrane. The filtered cleaning liquid flows into the water receiving bucket 700 and is transferred back to the water tank 200 by the water pump. Step 6: During the cleaning process of the circuit board, the cleaning cycle is repeated according to the above steps.

[0030] The above steps are not limited to the above order. For example, step three and step four can be interchanged or performed simultaneously.

[0031] The implementation principle of the anti-corrosion cleaning device and cleaning method of the embodiment of the present application is as follows: a circuit board is placed on the conveying unit 300, and the circuit board is placed in the first conveying channel 311. The motor is started to drive the roller to rotate, thereby driving the circuit board to move in the first conveying channel 311 and the second conveying channel 312. The conveying unit 300 transfers the circuit board to the water tank 200, and the manipulator is started. According to the content of the cleaning liquid in the first cleaning tank 210 and the second cleaning tank 220, the circuit board in the second conveying channel 312 is clamped to the corresponding first cleaning tank 210 or the second cleaning tank 220, so that the circuit board is cleaned by the cleaning liquid, and the manipulator drives the cleaning to be completed. The circuit board is transferred to the outside of the water tank 200, and the cleaning liquid in the water tank 200 is transferred to the filter unit 400 for filtration. Specifically, the cleaning liquid in the first cleaning tank 210 or the second cleaning tank 220 is transferred to the filter screen 420 through the control valve and the second pipe 250, and filtered at the filter screen 420. The cleaning liquid undergoes two filtrations at the filter unit 400 to separate the cleaning liquid and the anti-corrosion membrane. The filtered cleaning liquid flows into the water receiving bucket 700 and is transferred back to the water tank 200 through a water pump. During the filtration process, the anti-corrosion membrane attached to the filter hole 424 is deformed through the deformation of the filter screen 420, thereby separating from the filter screen 420.

[0032] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A resist cleaning device, characterized in that: It includes a device body (100); A water tank (200), arranged on the device body (100), for placing a cleaning liquid for cleaning circuit boards; A conveying unit (300), arranged on the device body (100), and used for conveying the circuit board to the water tank (200); A filtering unit (400) is disposed on the device body (100) and connected to the water tank (200); The filter unit (400) comprises a symmetrically arranged support ring (410), and the symmetrically arranged support ring (410) is movably arranged on the device body (100); The filter screen (420) is fixedly arranged on the outer wall of the support ring (410) and is symmetrically arranged between the support rings (410) to form a filter channel; the filter screen (420) has a plurality of closed-loop structures (421) to form rectangular filter holes (424) on the filter screen (420); the closed-loop structure (421) is composed of four rods connected in sequence, two opposite rods located on different sides of the axis of the support ring (410) have the same length, and two connected rods have different lengths; In a working state, the conveying unit (300) drives the circuit board to be cleaned in the water tank (200), and the cleaning liquid circulates in the water tank (200) through the filtering unit (400), so that the anti-corrosion film on the circuit board is intercepted by the filter net (420); after the filtering is completed, one of the support rings (410) rotates, so that the closed-loop structure (421) is in the shape of a parallelogram, so that the anti-corrosion film is separated from the filter net (420).

2. The resist cleaning device according to claim 1, characterized in that: The two support rings (410) have different heights in the vertical direction, so that the filter screen (420) is arranged at an incline; A plurality of support rods (430) are arranged between the two support rings (410), one end of the support rod (430) is movably arranged on one of the support rings (410), and the other end is movably arranged on the other support ring (410), and the support rod (430) is connected to the filter screen (420); The support ring (410) rotates to tilt the support rod (430), and at the same time the closed-loop structure (421) of the filter screen (420) is deformed to clean the anti-corrosion film attached to the filter screen (420).

3. The resist cleaning equipment according to claim 1, characterized in that: The invention also comprises a secondary filtration system (500), wherein the secondary filtration system (500) comprises: The transfer member (510) has a filtering end (511) and a collecting end (512), wherein the height of the collecting end (512) in the vertical direction is higher than the height of the filtering end (511) in the vertical direction; A conveying assembly (520), disposed on the transfer member (510), for conveying the anti-corrosion film to the collecting end (512); The secondary filter screen (530) is vertically arranged and detachably arranged on the filtering end (511) for secondary filtering.

4. The resist cleaning equipment according to claim 3, characterized in that: The transmission component (520) includes: A driving member (521) is rotatably disposed on the filter end (511) and has a height difference with the filter end (511); a side wall of the driving member (521) has a rotating plate (523); A conveyor belt (522) is arranged on the transfer member (510), and a rotating shaft of the conveyor belt (522) is connected to the driving member (521) via a gear; The driving member (521) and the conveyor belt (522) are placed on both sides of the secondary filter screen (530); The cleaning liquid contacts the rotating plate (523) after passing through the secondary filter screen (530), causing the driving member (521) to rotate, thereby driving the conveyor belt (522) to move, and causing the anti-corrosion film to move to the collecting end (512).

5. The resist cleaning equipment according to claim 4, characterized in that: The filter end (511) is fixedly provided with a first intercepting member (541), the first intercepting member (541) is arranged in an inclined manner, and forms a concave structure with the end surface of the conveyor belt (522), and a first intercepting plate (542) is fixedly provided at the end of the first intercepting member (541), and one end of the first intercepting plate (542) is in contact with the end surface of the conveyor belt (522); The collecting end (512) is fixedly provided with a second intercepting member (551), and the second intercepting member (551) is arranged at an angle to form a convex structure with the end face of the conveyor belt (522). A second intercepting plate (552) is fixedly provided at the end of the second intercepting member (551), and one end of the second intercepting plate (552) is in contact with the end face of the conveyor belt (522) to transfer the anti-corrosion film on the conveyor belt (522).

6. The resist cleaning device according to any one of claims 1 to 5, characterized in that: The device body (100) is provided with a receiving member (600), and the receiving member (600) is in an "L" shape to receive the filtered anti-corrosion membrane.

7. The resist cleaning equipment according to claim 1, characterized in that: A water receiving bucket (700) is provided at the bottom of the filter unit (400); the water tank (200) comprises a first cleaning tank (210) and a second cleaning tank (220); the first cleaning tank (210) and the second cleaning tank (220) are both connected to the water receiving bucket (700); and the side walls of the first cleaning tank (210) and the second cleaning tank (220) are both provided with drainage ports (230); The conveying unit (300) comprises a conveying member (310), the conveying member (310) being provided with a first conveying channel (311), the first conveying channel (311) having a fork for conveying the circuit board to the first cleaning tank (210) and / or the second cleaning tank (220).

8. The resist cleaning equipment according to claim 7, characterized in that: The conveying member (310) is provided with two second conveying channels (312), and the two second conveying channels (312) are both connected to the first conveying channel (311) to form the bifurcation, and extend to the first cleaning tank (210) and the second cleaning tank (220) respectively; A steering member (313) is provided in the first conveying channel (311), and the steering member (313) changes direction after contacting the circuit board, so that the circuit board is conveyed to the first cleaning tank (210) and / or the second cleaning tank (220).

9. A cleaning method, characterized in that: The resist cleaning device according to claim 8 comprises the following steps: The circuit board is placed on the conveying unit (300); The conveying unit (300) transfers the circuit board to the water tank (200) so that the circuit board is cleaned by the cleaning liquid; The circuit board is transferred to the outside of the water tank (200); The cleaning liquid in the water tank (200) is transferred to the filtering unit (400) for filtering; The filtered cleaning liquid is transferred back to the water tank (200); The circuit board is cleaned cyclically according to the above steps.

10. The cleaning method according to claim 9, characterized in that: The water tank (200) comprises a first cleaning tank (210) and a second cleaning tank (220), and the conveying member (310) is provided with two second conveying channels (312); When the conveying unit (300) transfers the circuit board to the water tank (200), the circuit board enters the corresponding second conveying channel (312) to enter the first cleaning tank (210) or the second cleaning tank (220).

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