Film sticking machine and film sticking method

Abstract

The invention discloses a film sticking machine and a film sticking method. The film pasting method comprises the following steps that firstly, a substrate is placed on a bearing platform, a film layer is placed on a conveying device, then the bearing platform and the conveying device are driven to move mutually, the bearing platform and the conveying device are made to be close to each other, and therefore the film layer and the substrate are driven to be close to each other; and then the positioning device is used for assisting in positioning the substrate and the film layer, and finally the pressing device is controlled to fit the substrate and the film layer. According to the film pasting method provided by the embodiment of the invention, the conveying device and the bearing platform are driven to move relative to each other, and the positioning device is used for assisting the precise positioning of the substrate and the film layer, so that the pasting precision of the film layer and the substrate after being pressed by the pressing device is improved, and the defects of the substrate and the film layer are reduced.

Description

Technical Field

[0001] The present application relates to the technical field of mechanical film pasting, and in particular to a film pasting machine and a film pasting method. Background Art

[0002] During the packaging process of the sequencing chip, the film layer needs to be bonded to the substrate. In the related art, the bonding accuracy of the film layer and the substrate is low, which easily leads to defects after the film layer and the substrate are bonded. Therefore, how to improve the bonding accuracy of the film layer and the substrate to reduce the defects of the sequencing chip has become a technical problem to be solved. Summary of the invention

[0003] The invention provides a film sticking machine and a film sticking method.

[0004] The laminating machine of the embodiment of the present application includes a carrying platform, a conveying device, a positioning device and a pressing device. The carrying platform is used to carry a substrate. The conveying device is arranged on one side of the carrying platform. The conveying device is used to convey a film layer. The conveying device and the carrying platform can move relative to each other so that the conveying device and the carrying platform are close to or away from each other. The positioning device is arranged on one side of the carrying platform. The positioning device is used to assist in positioning the substrate and the film layer when the carrying platform and the conveying device are close to each other. The pressing device is movably arranged on the carrying platform. The pressing device is used to laminat the substrate and the film layer during the movement.

[0005] In the laminating machine of the embodiment of the present application, the positioning device assists in the precise positioning of the substrate and the film layer through the relative movement of the conveying device and the carrying platform, thereby improving the laminating accuracy between the film layer and the substrate, thereby reducing the defects of the sequencing chip.

[0006] The film pasting method of the embodiment of the present application comprises the following steps:

[0007] placing the substrate on a carrying platform;

[0008] placing the film layer on a conveying device;

[0009] Driving the carrying platform and the conveying device to move relative to each other, so that the carrying platform and the conveying device are close to each other, thereby driving the film layer and the substrate to be close to each other;

[0010] Using positioning devices to assist in positioning the substrate and the film layer;

[0011] The pressing device is controlled to laminate the substrate and the film layer.

[0012] In this way, by driving the conveying device and the carrying platform to move relative to each other, the positioning device is used to assist in the precise positioning of the substrate and the film layer, thereby improving the fitting accuracy of the film layer and the substrate after being pressed by the pressing device, thereby reducing defects in the substrate and the film layer.

[0013] In some embodiments, placing the substrate on the carrying platform includes: laminating the substrate to the carrying platform.

[0014] In this way, the substrate and the carrying platform are closely connected, the connection area between the substrate and the carrying platform is large, and the substrate is closely connected more stably.

[0015] In some embodiments, a first installation position is provided on the carrying platform, and a first ventilation hole is provided at the first installation position.

[0016] In this way, the first installation position enables the substrate to be fitted and connected to the carrying platform, the connection area between the substrate and the carrying platform is large, and the substrate is fitted more stably.

[0017] In some embodiments, attaching the substrate to the carrying platform includes: forming a negative pressure through the first vent hole, so as to absorb the substrate to the first installation position by using the negative pressure.

[0018] Thus, the substrate is attached to the carrying platform by negative pressure adsorption, so that the substrate can be stably fixed on the carrying platform and can be protected from damage caused by external mechanical forces. In addition, the substrate attached by negative pressure adsorption is easy to take and place.

[0019] In some embodiments, there are multiple first ventilation holes, and the multiple first ventilation holes are arranged in an array.

[0020] In this way, the plurality of first vent holes can cause the substrate to be subjected to a uniform adsorption force, so that the substrate is stably adsorbed on the carrying platform.

[0021] In some embodiments, the carrying platform includes a first surface and a first side surface connected to the first surface, the first surface is formed with a first installation position, and the first vent hole extends from the first surface to the first side surface.

[0022] In this way, the gas in the first vent hole can be extracted from the first side surface, so that a negative pressure is formed on the first surface, and the substrate is adsorbed through the first vent hole.

[0023] In certain embodiments, an area of ​​the first mounting location is configured to be larger than an area of ​​the substrate.

[0024] In this way, the first installation position can be suitable for substrates of different sizes, thereby increasing the applicability of the first installation position.

[0025] In certain embodiments, placing the film layer on the delivery device includes: laminating the film layer to the delivery device.

[0026] In this way, the film layer is closely connected to the conveying device, the connection area between the film layer and the conveying device is large, and the film layer is closely connected more stably.

[0027] In some embodiments, a second mounting position is provided on the conveying device, and a second vent hole is provided on the second mounting position.

[0028] In this way, the second installation position enables the film layer to be closely connected to the conveying device, the connection area between the film layer and the conveying device is large, and the film layer is closely connected more stably.

[0029] In certain embodiments, attaching the film layer to the delivery device includes: forming negative pressure through the second vent hole, so as to absorb the film layer to the second installation position by using the negative pressure.

[0030] In this way, the film layer is adhered to the conveying device by negative pressure adsorption, so that the film layer can be stably fixed on the conveying device and can be protected from damage caused by external mechanical forces; in addition, the film layer adhered by negative pressure adsorption is easy to take and put.

[0031] In some embodiments, there are multiple second ventilation holes, and the multiple second ventilation holes are arranged in an array.

[0032] In this way, the plurality of second vent holes can cause the film layer to be subjected to uniform adsorption force, so that the film layer can be stably adsorbed on the conveying device.

[0033] In certain embodiments, the delivery device includes a second surface and a second side surface connected to the second surface, the second surface is formed with a second mounting position, and the second vent hole extends from the second surface to the second side surface.

[0034] In this way, the gas in the second vent hole can be extracted from the second side surface, so that a negative pressure is formed on the second surface, and the film layer is adsorbed through the second vent hole.

[0035] In certain embodiments, the area of ​​the second mounting location is configured to be larger than the area of ​​the membrane layer.

[0036] In this way, the second installation position can be suitable for film layers of different sizes, thereby increasing the applicability of the second installation position.

[0037] In certain embodiments, the second mounting location is in contact with at least a portion of the membrane layer.

[0038] In this way, after the film layer and the substrate are positioned, the film layer protrudes from the edge of the conveying device, which facilitates the lamination of the film layer and the substrate.

[0039] In some embodiments, the conveying device includes a rotating shaft and a mounting member rotatably connected to the rotating shaft, the mounting member is used to place the film layer, and the conveying device is flipped between a first position and a second position through the rotating shaft. When the mounting member is in the first position, it is away from the supporting platform, and when the mounting member is in the second position, it is close to the supporting platform.

[0040] In this way, the conveying device can be reciprocated between the first position and the second position, thereby conveying the film layer multiple times.

[0041] In some embodiments, driving the carrying platform and the conveying device to move relative to each other includes: controlling the mounting member to flip around the rotation axis from a first position away from the carrying platform to a second position close to the carrying platform.

[0042] In this way, the mounting member can be reciprocated between the first position and the second position, thereby transporting the film layer multiple times.

[0043] In some embodiments, when the conveying device is in the second position, the extension plane of the mounting member is inclined relative to the base plate.

[0044] In this way, when the conveying device is in the second position, the edge of the film layer can contact the substrate, while the conveying device does not contact the substrate, so the conveying device will not affect the lamination of the film layer and the substrate.

[0045] In some embodiments, when the conveying device is in the second position, the angle formed between the extension plane of the mounting member and the carrying platform is 0° to 10°.

[0046] When the above angle range is met, the distance between the film layer and the substrate is relatively close, so that the film layer and the substrate are precisely positioned.

[0047] In some embodiments, the positioning device includes a camera module and a display screen electrically connected to the camera module. The camera module is installed on one side of the carrying platform, the shooting field of the camera module is toward the carrying platform, and the display screen displays the image captured by the camera module.

[0048] In this way, the camera module fixes the alignment viewing angle and presents it on the display screen, through which the positioning accuracy can be accurately judged.

[0049] In some embodiments, a positioning device is used to assist in positioning the substrate and the film layer, including:

[0050] The positions of the substrate and the film layer are photographed by a camera module;

[0051] Using a display screen to display images of the substrate and the film layer;

[0052] Based on the image displayed on the display screen, the position of the carrying platform and / or the conveying device is adjusted to align the first positioning reference of the substrate with the second positioning reference of the film layer, thereby positioning the substrate and the film layer.

[0053] In this way, the camera module fixes the alignment viewing angle and presents it on the display screen, through which the positioning accuracy can be accurately judged.

[0054] In some embodiments, there are multiple camera modules and multiple display screens, and the camera modules and the display screens are arranged in a one-to-one correspondence. The multiple camera modules are used to capture different positions of the substrate.

[0055] In this way, multiple positioning references of the substrate and the film layer can be imaged at the same time to determine whether the positioning references meet the alignment standards, thereby improving the bonding accuracy.

[0056] In some embodiments, the number of camera modules and display screens are both two, the two camera modules are respectively a first camera module and a second camera module, the two display screens are respectively a first display screen and a second display screen, the field of view of the first camera module covers a first end of the film layer, the field of view of the second camera module covers a second end of the film layer opposite to the first end, the first positioning reference and the second positioning reference are both multiple and one-to-one corresponding, part of the second positioning reference is located at the first end, and part of the second positioning reference is located at the second end;

[0057] Based on the image displayed on the display screen, adjusting the position of the carrying platform and / or the conveying device so that the first positioning reference of the substrate is aligned with the second positioning reference of the film layer, including:

[0058] Based on the first display screen displaying the first image taken by the first camera module and the second display screen displaying the second image taken by the camera module, the position of the carrying platform and / or the conveying device is adjusted to align the first positioning reference with the corresponding second positioning reference.

[0059] In this way, the two positioning references of the substrate and the film layer can be imaged simultaneously to determine whether the positioning references meet the alignment standards.

[0060] In certain embodiments, the conveying device is provided with a light-transmitting window to expose the second end of the film layer, and when the conveying device is located close to the supporting platform, the light-transmitting window is within the field of view of the second camera module.

[0061] In this way, the second camera module and the display screen can clearly image the positioning reference of the second end of the substrate and the film layer through the light-transmitting window, and determine whether the positioning reference of the second end of the substrate and the film layer meets the alignment standard.

[0062] In certain embodiments, the light-transmitting window comprises a through hole opened in the delivery device.

[0063] In this way, the through hole can enable the second camera module and the display screen to clearly image the positioning reference of the second end of the substrate and the film layer.

[0064] In some embodiments, adjusting the position of the carrying platform and / or the conveying device includes:

[0065] The control driving device drives the carrying platform to complete at least one of the following movements, so as to drive the carrying platform to move and adjust the position of the substrate:

[0066] moving in a first direction;

[0067] moving in a second direction;

[0068] The device rotates in a plane formed by a first direction and a second direction, wherein the first direction and the second direction are perpendicular to each other.

[0069] In this way, the position of the substrate relative to the film layer can be changed by the movement of the carrying platform, so that the substrate and the film layer are accurately positioned.

[0070] In certain embodiments, the lamination device includes a lamination roller;

[0071] Controlling the laminating device to laminate the substrate and the film layer includes:

[0072] The pressing roller is rolled from one side of the conveying device to the other side of the conveying device to press the film layer onto the substrate.

[0073] In this way, the pressing roller can make the substrate and the film layer fit tightly together.

[0074] In some embodiments, before controlling the laminating device to laminate the substrate and the film layer, the laminating method further comprises:

[0075] Remove the release film attached to the film layer.

[0076] In this way, the colloid on the film layer is exposed, and the film layer is firmly attached to the substrate through the colloid.

[0077] In some embodiments, the conveying device can rotate between a first position and a second position relative to the carrying platform, the conveying device is away from the carrying platform when in the first position, and is close to the carrying platform when in the second position;

[0078] Removing the release film attached to the film layer, including:

[0079] moving the conveying device from the second position to the first position;

[0080] When the conveying device is in the first position, the release film attached to the film layer is removed.

[0081] In this way, it is convenient to tear off the release film from the film layer without affecting the position of the substrate on the carrying platform.

[0082] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0083] The above and / or additional aspects and advantages of the present invention will become apparent and easily understood from the description of the embodiments in conjunction with the following drawings, in which:

[0084] Figure 1 It is a structural schematic diagram of a film laminating machine according to an embodiment of the present application;

[0085] Figure 2 is a top view of a film laminating machine according to an embodiment of the present application;

[0086] Figure 3 It is a partial three-dimensional schematic diagram of a film laminating machine according to an embodiment of the present application;

[0087] Figure 4 It is a top view of the cooperation between the mounting part and the film layer of the film laminating machine according to the embodiment of the present application;

[0088] Figure 5 is a schematic diagram of a film layer according to an embodiment of the present application;

[0089] Figure 6 is a schematic diagram of a substrate according to an embodiment of the present application;

[0090] Figure 7 is a schematic diagram of a film layer and a substrate after being bonded together according to an embodiment of the present application;

[0091] Figure 8 It is a schematic diagram of the movement of the driving device of the film laminating machine according to the embodiment of the present application driving the carrying platform;

[0092] Fig. 9 It is a schematic flow chart of a film pasting method according to an embodiment of the present application;

[0093] Fig.10 is a film laminating process diagram of a film laminating machine according to an embodiment of the present application;

[0094] Fig.11 It is a schematic flow chart of a film pasting method according to an embodiment of the present application;

[0095] Fig.12 It is a schematic flow chart of a film pasting method according to an embodiment of the present application;

[0096] Fig.13 It is a schematic flow chart of the film pasting method according to the embodiment of the present application.

[0097] Explanation of reference numerals: 100, laminating machine; 10, carrying platform; 101, first surface; 102, first side; 11, first mounting position; 12, first vent hole; 121, first sub-hole; 122, second sub-hole; 20, conveying device; 21, first position; 22, second position; 23, rotating shaft; 24, mounting member; 241, second surface; 242, second side; 25, second mounting position; 26, second vent hole; 261, third sub-hole; 262, fourth sub-hole; 27, light-transmitting window; 28, through hole; 30, positioning device ; 31. camera module; 311. first camera module; 312. second camera module; 32. display screen; 321. first display screen; 322. second display screen; 33. hanger; 40. pressing device; 41. pressing roller; 50. driving device; 200. substrate; 201. circular hole; 202. first positioning reference; 300. film layer; 301. first end; 302. second end; 303. fluid channel; 304. circular arc; 305. second positioning reference; X, first direction; Y, second direction; Z, third direction; Q, rotation direction. DETAILED DESCRIPTION

[0098] The embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0099] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0100] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or mutual communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0101] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0102] The disclosure below provides many different embodiments or examples to realize different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or reference letters in different examples, and this repetition is for the purpose of simplicity and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific examples of processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0103] See also Figure 1 The laminating machine 100 of the embodiment of the present application includes a carrying platform 10, a conveying device 20, a positioning device 30 and a pressing device 40. The carrying platform 10 is used to carry a substrate 200. The conveying device 20 is arranged on one side of the carrying platform 10. The conveying device 20 is used to convey a film layer 300. The conveying device 20 and the carrying platform 10 can move relative to each other so that the conveying device 20 and the carrying platform 10 are close to or away from each other. The positioning device 30 is arranged on one side of the carrying platform 10. The positioning device 30 is used to assist in positioning the substrate 200 and the film layer 300 when the carrying platform 10 and the conveying device 20 are close to each other. The pressing device 40 is movably arranged on the carrying platform 10. The pressing device 40 is used to laminat the substrate 200 and the film layer 300 during the movement.

[0104] In the laminating machine 100 of the embodiment of the present application, the positioning device 30 assists the substrate 200 and the film layer 300 in precise positioning through the relative movement of the conveying device 20 and the carrying platform 10, thereby improving the laminating accuracy of the film layer 300 and the substrate 200, thereby reducing defects in the product to be laminated.

[0105] The carrying platform 10 can provide support for the substrate 200, and the surface shape of the carrying platform 10 is not strictly limited. Exemplarily, the carrying platform 10 can be a roughly rectangular plate-shaped structure. During the use of the film laminating machine 100, the positioning device 30 can be located above the carrying platform 10, the conveying device 20 can be located between the carrying platform 10 and the positioning device 30, and the distance of the conveying device 20 relative to the carrying platform 10 can be adjusted according to actual needs, and the pressing device 40 can make the substrate 200 and the film layer 300 tightly fit.

[0106] In the embodiment of the present application, the substrate 200 may be a rigid sheet-like part, and the substrate 200 is difficult to deform. It should be understood that the use of the substrate does not affect the structure and use of the film laminating machine in the embodiment of the present application. Exemplarily, the substrate 200 may be a biochip substrate or a sequencing chip substrate, but is not limited thereto. The film layer 200 may be a flexible sheet-like part, and the film layer 200 may be deformed during the process of being attached to the substrate 200.

[0107] Specifically, the pressing device 40 can be a roller for rolling pressing, or a plate-like structure for pressing pressing. The pressing device 40 can roll along the length direction of the carrying platform 10 , or move up and down along the height direction of the carrying platform 10 .

[0108] See also Figure 2 In some embodiments, the carrying platform 10 is provided with a first installation position 11 , and the first installation position 11 is used to adhere to and fix the substrate 200 .

[0109] In this way, the first installation position 11 enables the substrate 200 to be closely connected to the carrying platform 10 , the connection area between the substrate 200 and the carrying platform 10 is large, and the substrate 200 is closely connected more stably.

[0110] Specifically, the shape of the first installation position 11 can be rectangular, circular, elliptical, etc. Exemplarily, the first installation position 11 can form a groove, and after the substrate 200 is placed in the groove, the upper surface of the substrate 200 is slightly higher than the upper surface of the carrying platform 10, which facilitates the smooth progress of the bonding operation. The size of the first installation position 11 can be set according to the size of the substrate 200.

[0111] Please refer again Figure 2In some embodiments, the first installation position 11 is provided with a first vent hole 12 , and the first vent hole 12 is used to form a negative pressure to adsorb the substrate 200 .

[0112] In this way, the substrate 200 is attached to the carrying platform 10 by negative pressure adsorption, so that the substrate 200 can be stably fixed on the carrying platform 10 and can be protected from damage caused by external mechanical forces. In addition, the substrate 200 attached by negative pressure adsorption is easy to take and place.

[0113] Specifically, the first vent hole 12 can be connected to a negative pressure device. When the negative pressure device is turned on, the first vent hole 12 can form negative pressure, thereby adsorbing the substrate 200 on the carrying platform 10; when the negative pressure device is turned off, the substrate 200 can be removed from the carrying platform 10.

[0114] See also Figure 2 In some embodiments, the number of the first ventilation holes 12 is multiple, and the multiple first ventilation holes 12 are arranged in an array.

[0115] In this way, the plurality of first vent holes 12 can cause the substrate 200 to be subjected to a uniform adsorption force, so that the substrate 200 is stably adsorbed on the carrying platform 10 .

[0116] Specifically, the size and number of the first vent holes 12 can be set according to actual needs. During the bonding process between the substrate 200 and the film layer 300, the substrate 200 is adsorbed by the plurality of first vent holes 12, so that the substrate 200 is not easily displaced. The arrangement of the plurality of first vent holes 12 includes, but is not limited to, a matrix arrangement and an oblique matrix arrangement.

[0117] During the use of the film laminating machine 100 , all of the first vent holes 12 may form negative pressure, or only part of the first vent holes 12 may form negative pressure.

[0118] See also Figure 2 and Figure 3 In some embodiments, the carrying platform 10 includes a first surface 101 and a first side surface 102 connected to the first surface, the first surface 101 is formed with a first installation position 11, and the first vent hole 12 extends from the first surface 101 to the first side surface 102.

[0119] In this way, the gas in the first vent holes 12 can be extracted from the first side surface 102 , so that a negative pressure is formed on the first surface 101 , and the substrate 200 is adsorbed through the first vent holes 12 .

[0120] Specifically, the first vent hole 12 on the first surface 101 is attached to the substrate 200, and the first vent hole 12 on the first side surface 102 can be connected to the air pipe, so that the gas in the first vent hole 12 is extracted through the air pipe. The structure of the first vent hole 12 between the first surface 101 and the first side surface 102 can be curved or bent, and the structure of the first vent hole 12 is not limited. The first vent hole 12 may include a first sub-hole 121 and a second sub-hole 122, the first sub-hole 121 is connected to the second sub-hole 122, the first sub-hole 121 passes through the first surface 101, and the second sub-hole 122 passes through the first side surface 102. As an embodiment, the aperture of the second sub-hole 122 may be larger than the aperture of the first sub-hole 121, and the second sub-hole 122 may be provided with a threaded hole to facilitate the second sub-hole 122 to be threadedly connected to the air pipe.

[0121] See also Figure 2 In some embodiments, the area of ​​the first mounting location 11 is configured to be larger than the area of ​​the substrate 200 .

[0122] In this way, the first installation position 11 can be suitable for substrates 200 of different sizes, thereby increasing the applicability of the first installation position 11 .

[0123] Specifically, when the shape of the first installation position 11 is rectangular, the length of the first installation position 11 can be greater than the length of the substrate 200, and the width of the first installation position 11 can be greater than the width of the substrate 200; when the shape of the first installation position 11 is circular, the diameter of the first installation position 11 can be greater than the length of the diagonal of the substrate 200.

[0124] See also Figure 1 In some embodiments, the conveying device 20 can rotate between a first position 21 and a second position 22 relative to the carrying platform 10. When the conveying device 20 is in the first position 21, it is away from the carrying platform 10, and when the conveying device 20 is in the second position 22, it is close to the carrying platform 10.

[0125] In this way, the conveying device 20 can convey the film layer 300 from the first position 21 to the second position 22 , so that the film layer 300 is bonded to the substrate 200 .

[0126] Specifically, when the conveying device 20 is at the first position 21 , the film layer 300 can be placed on the conveying device 20 , and when the conveying device 20 moves to the second position 22 , the film layer 300 can be positioned and bonded to the substrate 200 .

[0127] Of course, in other embodiments, the conveying device 20 can move between the first position 21 and the second position 22 relative to the carrying platform 10 .

[0128] Please refer again Figure 1In some embodiments, the conveying device 20 includes a rotating shaft 23 and a mounting member 24 rotatably connected to the rotating shaft 23 , the mounting member 24 is used to place the film layer 300 , and the conveying device 20 is flipped between the first position 21 and the second position 22 through the rotating shaft 23 .

[0129] In this way, the conveying device 20 can achieve reciprocating motion between the first position 21 and the second position 22, thereby conveying the film layer 300 multiple times.

[0130] Specifically, the rotating shaft 23 may be a cylinder, and the mounting member 24 may be a plate-like structure. The rotating shaft 23 may be connected to the end of the mounting member 24, and the mounting member 24 may rotate around the center of the rotating shaft 23. In some embodiments, the rotating shaft 23 and the mounting member 24 may be an integral structure, or may be connected by bolts. The conveying device 20 conveys the film layer 300 from the first position 21 to the second position 22 in a counterclockwise manner. After the film layer 300 is attached to the substrate 200, the conveying device 20 rotates clockwise from the second position 22 to the first position 21 to reset.

[0131] See also Figure 1 and Figure 4 In some embodiments, the mounting member 24 is provided with a second mounting position 25 , and when the conveying device 20 is in the first position 21 , the second mounting position 25 faces away from the carrying platform 10 , and when the conveying device 20 is in the second position 22 , the second mounting position 25 faces the carrying platform 10 .

[0132] In this way, the second installation position 25 enables the film layer 300 to be closely connected to the conveying device 20 , the connection area between the film layer 300 and the conveying device 20 is large, and the film layer 300 is closely connected more stably.

[0133] Specifically, the shape of the second installation position 25 can be rectangular, circular, elliptical, etc., and the size of the second installation position 25 can be set according to the size of the film layer 300 .

[0134] See also Figure 4 In some embodiments, the second installation position 25 is provided with a second vent hole 26 , and the second vent hole 26 is used to form a negative pressure to adsorb the film layer 300 .

[0135] In this way, the film layer 300 is adhered to the conveying device 20 by negative pressure adsorption, so that the film layer 300 can be stably fixed on the conveying device 20 and can be protected from damage caused by external mechanical forces; in addition, the film layer 300 adhered by negative pressure adsorption is easy to take and place.

[0136] Specifically, the second vent 26 can be connected to a negative pressure device. When the negative pressure device is turned on, the second vent 26 can form a negative pressure, thereby adsorbing the film layer 300 on the conveying device 20. When the negative pressure device is turned off, the film layer 300 can be removed from the conveying device 20. The negative pressure device of the first vent 12 and the negative pressure device of the second vent 26 can be the same negative pressure device, and the same negative pressure device can distribute the airflow of the first vent 12 and the second vent 26 through a valve.

[0137] See also Figure 4 In some embodiments, the number of the second ventilation holes 26 is multiple, and the multiple second ventilation holes 26 are arranged in an array.

[0138] In this way, the plurality of second vent holes 26 can cause the film layer 300 to be subjected to a uniform adsorption force, so that the film layer 300 is stably adsorbed on the conveying device 20 .

[0139] Specifically, the size and number of the second vent holes 26 can be set according to actual needs. When the conveying device 20 flips from the first position 21 to the second position 22, the plurality of second vent holes 26 are used to absorb the film layer 300, so that the film layer 300 is not easily displaced. The arrangement of the plurality of second vent holes 26 includes, but is not limited to, a matrix arrangement and an oblique matrix arrangement.

[0140] During the use of the film laminating machine 100, all of the second vent holes 26 may form negative pressure, or only part of the second vent holes 26 may form negative pressure.

[0141] See also Figure 3 In some embodiments, the mounting member 24 includes a second surface 241 and a second side surface 242 connected to the second surface 241 , the second surface 241 is formed with a second mounting position 25 , and the second vent hole 26 extends from the second surface 241 to the second side surface 242 .

[0142] In this way, the gas in the second vent holes 26 can be extracted from the second side surface 242 , so that a negative pressure is formed on the second surface 241 , and the film layer 300 is adsorbed through the second vent holes 26 .

[0143] Specifically, the second vent hole 26 on the second surface 241 is attached to the adsorption film layer 300, and the second vent hole 26 on the second side surface 242 can be connected to the air pipe, so that the gas in the second vent hole 26 is extracted through the air pipe. The structure of the second vent hole 26 between the second surface 241 and the second side surface 242 can be curved or bent, and the structure of the second vent hole 26 is not limited. The second vent hole 26 may include a third sub-hole 261 and a fourth sub-hole 262, the third sub-hole 261 is connected to the fourth sub-hole 262, the third sub-hole 261 passes through the second surface 241, and the fourth sub-hole 262 passes through the second side surface 242. As an embodiment, the aperture of the fourth sub-hole 262 may be larger than the aperture of the third sub-hole 261, and the fourth sub-hole 262 may be provided with a threaded hole to facilitate the fourth sub-hole 262 to be threadedly connected to the air pipe.

[0144] See also Figure 4 In some embodiments, the area of ​​the second mounting location 25 is configured to be larger than the area of ​​the film layer 300 .

[0145] In this way, the second installation position 25 can be suitable for film layers 300 of different sizes, thereby increasing the applicability of the second installation position 25 .

[0146] Specifically, when the shape of the second installation position 25 is a rectangle, the length of the second installation position 25 can be greater than the length of the film layer 300, and the width of the second installation position 25 can be greater than the width of the film layer 300; when the shape of the second installation position 25 is a circle, the diameter of the second installation position 25 can be greater than the length of the diagonal of the film layer 300.

[0147] Please refer again Figure 4 In some embodiments, the second mounting location 25 is in contact with at least a portion of the film layer 300 .

[0148] In this way, after the film layer 300 and the substrate 200 are positioned, the film layer 300 protrudes from the edge of the conveying device 20 , making it easier to fit the film layer 300 and the substrate 200 .

[0149] Specifically, the positioning reference of the film layer 300 can be set at a portion protruding from the edge of the conveying device 20 , so as to facilitate the alignment of the substrate 200 and the film layer 300 .

[0150] See also Figure 1 In some embodiments, when the conveying device 20 is in the second position 22 , the extension plane of the mounting member 24 is tilted relative to the base plate 200 .

[0151] In this way, when the conveying device 20 is at the second position 22 , the edge of the film layer 300 can contact the substrate 200 , while the conveying device 20 does not contact the substrate 200 , so the conveying device 20 does not affect the lamination of the film layer 300 and the substrate 200 .

[0152] Specifically, the tilt angle of the film layer 300 relative to the substrate 200 can be adjusted by adjusting the tilt angle of the conveying device 20 relative to the carrying platform 10 when the conveying device 20 is at the second position 22 .

[0153] See also Figure 1 In some embodiments, when the conveying device 20 is in the second position 22, the angle formed between the extension plane of the mounting member 24 and the carrying platform 10 is 0° to 10°.

[0154] When the above angle range is satisfied, the distance between the film layer 300 and the substrate 200 is relatively short, so that the film layer 300 and the substrate 200 are precisely positioned.

[0155] It can be understood that the smaller the angle formed between the extension plane of the mounting member 24 and the supporting platform 10, the more precise the alignment of the film layer 300 and the substrate 200. The angle formed between the extension plane of the mounting member 24 and the supporting platform 10 can be 1°, 3°, 5°, 7°, 9°, etc.

[0156] Of course, in other embodiments, when the conveying device 20 is in the second position 22 , the extension plane of the mounting member 24 may also be arranged parallel to the base plate 200 .

[0157] Please refer again Figure 1 In some embodiments, the positioning device 30 includes a camera module 31 and a display screen 32 electrically connected to the camera module 31. The camera module 31 is installed on one side of the supporting platform 10. The shooting field of view of the camera module 31 is toward the supporting platform 10. The display screen 32 is used to display the image captured by the camera module 31.

[0158] In this way, the camera module 31 fixes the alignment viewing angle and presents it on the display screen 32, through which the positioning accuracy can be accurately determined.

[0159] Specifically, the camera module 31 and the display screen 32 can be installed on the hanger 33. When the operator is adjusting the position, he can observe the real-time imaging of the positioning reference of the substrate 200 and the film layer 300 on the display screen 32. When the positioning references of the upper and lower bonding materials are observed to reach the alignment standard on the display screen 32, the film bonding action can be started. The camera module 31 includes but is not limited to a camera, that is, a positioning camera for collecting image position information, including a CCD camera.

[0160] See also Figure 1 In some embodiments, there are multiple camera modules 31 and multiple display screens 32 , and the camera modules 31 and the display screens 32 are arranged in a one-to-one correspondence. The multiple camera modules 31 are used to capture different positions of the substrate 200 .

[0161] In this way, multiple positioning references of the substrate 200 and the film layer 300 can be imaged at the same time to determine whether the positioning references meet the alignment standards, thereby improving the bonding accuracy.

[0162] Specifically, the positions of the multiple camera modules 31 and the multiple display screens 32 on the hanger 33 can be adjusted according to actual needs. The number of camera modules 31 and the display screens 32 can be two, three or four, etc., and the positioning references of the substrate 200 and the film layer 300 can also be two, three or four, etc. By observing the multiple display screens 32, the multiple positioning references of the substrate 200 and the film layer 300 are aligned to ensure the accuracy of the fitting.

[0163] Please refer again Figure 1 In some embodiments, the number of camera modules 31 and the number of display screens 32 are both two, and the two camera modules 31 are respectively a first camera module 311 and a second camera module 312. The field of view covering film layer 300 of the first camera module 311 has a first end 301, and the field of view covering film layer 300 of the second camera module 312 has a second end 302 opposite to the first end 301.

[0164] In this way, the two positioning references of the substrate 200 and the film layer 300 can be imaged simultaneously to determine whether the positioning references meet the alignment standard.

[0165] Exemplary, combined Figure 5 , Figure 6 and Figure 7 The membrane layer 300 is provided with a fluid channel 303. The widths at both ends of the fluid channel 303 in the length direction are smaller than the width in the middle of the fluid channel 303. The two ends of the fluid channel 303 form arcs 304. The substrate 200 is provided with a circular hole 201 connected to the fluid channel 303. The circular hole 201 is used to allow the reagent solution to enter from one end of the fluid channel 303 and flow out from the other end, so that the reagent solution can flow in the chip.

[0166] In some embodiments, the positioning reference of the film layer 300 can be an arc 304 located on the film layer 300, and the positioning reference of the substrate 200 can be a circular hole 201 located on the substrate 200. The arc 304 of the film layer 300 is aligned with the circular hole 201 of the substrate 200 through two camera modules 31 to achieve precise fitting of the film layer 300 and the substrate 200.

[0167] See also Figure 1 In some embodiments, the conveying device 20 is provided with a light-transmitting window 27 to expose the second end 302 of the film layer 300 , and when the conveying device 20 is in a position close to the supporting platform 10 , the light-transmitting window 27 is in the field of view of the second camera module 312 .

[0168] In this way, the second camera module 312 and the display screen 32 can clearly image the positioning reference of the second end 302 of the substrate 200 and the film layer 300 through the light-transmitting window 27 to determine whether the positioning reference of the second end 302 of the substrate 200 and the film layer 300 meets the alignment standard.

[0169] Specifically, the light-transmitting window 27 may be a hollow structure or may be made of a light-transmitting material. The shape of the light-transmitting window 27 includes but is not limited to a circle, a rectangle, etc. The position and number of the light-transmitting windows 27 on the conveying device 20 may be adjusted according to the size of the substrate 200 and the film layer 300 and the position of the alignment reference. When the film layer 300 is placed on the conveying device 20, the second end 302 of the film layer 300 is located at the position of the light-transmitting window 27. When the conveying device 20 is in the second position 22, light is irradiated onto the carrying platform 10 through the light-transmitting window 27, illuminating the substrate 200 on the carrying platform 10 and the film layer 300 on the conveying device 20, so as to provide a lighting environment with sufficient brightness when the second camera module 312 collects image information of the positioning reference of the second end 302 of the substrate 200 and the film layer 300, so that the second camera module 312 can clearly and accurately collect the position image information of the positioning reference of the second end 302 of the substrate 200 and the film layer 300.

[0170] Please refer again Figure 1 In some embodiments, the light-transmitting window 27 includes a through hole 28 opened on the conveying device 20.

[0171] In this way, the through hole 28 can enable the second camera module 312 and the display screen 32 to clearly image the positioning reference of the substrate 200 and the second end 302 of the film layer 300 .

[0172] Specifically, the through hole 28 can be a circular hole or a square hole. The number of the through holes 28 can be one, two, three, etc. The size of the through hole 28 can be set according to the size of the positioning reference of the second end 302 of the membrane layer 300 .

[0173] Of course, in other embodiments, the positioning device 30 may be a mechanical positioning device 30 or other positioning devices 30. For example, the positioning device 30 may include a positioning shaft, which may pass through the substrate 200 and the film layer 300, so as to position the substrate 200 and the film layer 300.

[0174] Please refer again Figure 1 In some embodiments, the laminating device 40 includes a pressing roller 41 , which can roll from one side of the conveying device 20 to the other side of the conveying device 20 to press the film layer 300 onto the substrate 200 .

[0175] In this way, the pressing roller 41 can make the substrate 200 and the film layer 300 tightly fit together.

[0176] Specifically, the pressure roller 41 can be made of elastic material, including but not limited to silicone, foam, etc. The length of the pressure roller 41 is greater than or equal to the width of the film layer 300, so that the film layer 300 can be fully pressed during the pressing process. In some embodiments, when the conveying device 20 is in the second position 22, the pressure roller 41 can roll from the end away from the rotating shaft 23 to the end close to the rotating shaft 23. After the film layer 300 and the substrate 200 are well attached, the pressure roller 41 rolls and resets from the end close to the rotating shaft 23 to the end away from the rotating shaft 23. When the conveying device 20 is in the second position 22, the distance between the conveying device 20 and the substrate 200 is greater than the height of the pressure roller 41 on the carrying platform 10, so as to prevent the conveying device 20 from affecting the movement of the pressure roller 41.

[0177] Of course, in other embodiments, the laminating device 40 may include a translation block, and the translation block may move relative to the carrying platform 10 , so as to laminate the film layer 300 and the substrate 200 .

[0178] See also Figure 1 In some embodiments, the film laminating machine 100 further includes a driving device 50 connected to the carrying platform 10 , and the driving device 50 is used to drive the carrying platform 10 to move so as to adjust the position of the carrying platform 10 .

[0179] In this way, the driving device 50 drives the carrying platform 10 to move, so as to adjust the position of the substrate 200 relative to the film layer 300 , so that the positioning references of the substrate 200 and the film layer 300 are aligned.

[0180] Specifically, the driving device 50 may be a cylinder, or a combination of a motor and a screw rod, or a combination of a motor and a belt.

[0181] The “position” mentioned above can be the position of the center of the object, or it can be the various postures of the object when the center of the object remains unchanged. That is to say, the position of the carrying platform 10 can refer to the center position of the carrying platform 10, or it can refer to the posture of the carrying platform 10. Exemplarily, the carrying platform 10 can be moved along the first direction X to change the center position of the carrying platform 10; or the center position of the carrying platform 10 can be kept unchanged, and one end of the carrying platform 10 can be rotated downward around the center, and the other end of the carrying platform 10 can be rotated upward around the center, so that the carrying platform 10 is tilted, thereby changing the posture of the carrying platform 10.

[0182] See also Figure 8In some embodiments, the driving device 50 can drive the carrying platform 10 to complete at least one of the following movements: moving along the first direction X; moving along the second direction Y; rotating in the plane XY formed by the first direction X and the second direction Y, and the first direction X and the second direction Y are perpendicular. For example, the carrying platform 10 can move along the first direction X and the second direction Y at the same time; for another example, the carrying platform 10 can move along the second direction Y and the second direction Y at the same time.

[0183] In this way, the position of the substrate 200 relative to the film layer 300 can be changed by the movement of the carrying platform 10 , so that the substrate 200 and the film layer 300 are precisely positioned.

[0184] Specifically, the first direction X may be the length direction of the carrying platform 10, and the second direction Y may be the width direction of the carrying platform 10. When the carrying platform 10 can rotate within the plane XY, Figure 8 As shown, the carrying platform 10 rotates along the rotation direction Q, thereby changing its own position, and further driving the substrate 200 to rotate, so that the substrate 200 is easily positioned with the film layer 300 .

[0185] Of course, in other embodiments, the driving device 50 can drive the carrying platform 10 to move along the third direction Z. The first direction X, the second direction Y and the third direction Z are perpendicular to each other. When the carrying platform 10 rotates in the plane XY, the carrying platform 10 can rotate around the third direction Z.

[0186] In other embodiments, a portion of the supporting platform 10 close to the first end 301 of the film layer 300 remains stationary, and a portion of the supporting platform 10 away from the first end 301 of the film layer 300 can be rotated upward along a third direction Z, so that the supporting platform 10 is tilted and the substrate 200 is parallel to the film layer 300, which facilitates precise positioning and bonding of the substrate 200 and the film layer 300.

[0187] The present application also discloses a film pasting method, and the features of the film pasting machine 100 of any of the above embodiments are applicable to the film pasting method of the embodiment of the present application. The film pasting method of the embodiment of the present application will be described in detail below.

[0188] See also Fig. 9 The film pasting method of the embodiment of the present application comprises the following steps:

[0189] S10, placing the substrate 200 on the carrying platform 10;

[0190] S20, placing the film layer 300 on the conveying device 20;

[0191] S30, driving the carrying platform 10 and the conveying device 20 to move relative to each other, so that the carrying platform 10 and the conveying device 20 are close to each other, thereby driving the film layer 300 and the substrate 200 to be close to each other;

[0192] S40, using the positioning device 30 to assist in positioning the substrate 200 and the film layer 300;

[0193] S50 , controlling the laminating device 40 to laminate the substrate 200 and the film layer 300 .

[0194] In this way, by driving the conveying device 20 and the carrying platform 10 to move relative to each other, the positioning device 30 is used to assist the substrate 200 and the film layer 300 in precise positioning, thereby improving the fitting accuracy of the film layer 300 and the substrate 200 after being pressed by the pressing device 40, thereby reducing defects of the substrate 200 and the film layer 300.

[0195] Specifically, in some embodiments, in steps S10 and S20, the substrate 200 can be sucked by a robot with a suction cup and placed on the carrying platform 10, or the film layer 300 can be sucked by a robot and placed on the conveying device 20. In step S30, a power device such as a motor or a cylinder can be used to drive at least one of the carrying platform 10 and the conveying device 20 to move, so that the carrying platform 10 and the conveying device 20 move relative to each other.

[0196] See also Fig.10 In some embodiments, placing the substrate 200 on the carrying platform 10 (step S10 ) includes: laminating the substrate 200 to the carrying platform 10 .

[0197] In this way, the substrate 200 is bonded and connected to the carrying platform 10, the connection area between the substrate 200 and the carrying platform 10 is large, and the substrate 200 is bonded more stably. Specifically, the substrate 200 can be bonded to the carrying platform 10 by vacuum adsorption.

[0198] See also Figure 2 In some embodiments, the step of attaching the substrate 200 to the carrier platform 10 includes: forming a negative pressure through the first vent hole 12 to absorb the substrate 200 to the first installation position 11 by using the negative pressure.

[0199] In this way, the substrate 200 is attached to the carrying platform 10 by negative pressure adsorption, so that the substrate 200 can be stably fixed on the carrying platform 10 and can be protected from damage caused by external mechanical forces. In addition, the substrate 200 attached by negative pressure adsorption is easy to take and place.

[0200] Specifically, the opening and closing of the negative pressure device can be controlled by a button. When the button of the negative pressure device is turned on, the first vent 12 can form a negative pressure, thereby adsorbing the substrate 200 on the carrying platform 10; when the button of the negative pressure device is turned off, the negative pressure in the first vent 12 disappears, and the substrate 200 can be removed from the carrying platform 10.

[0201] See also Fig.10 In some embodiments, placing the film layer 300 on the conveying device 20 (step S20 ) includes: laminating the film layer 300 to the conveying device 20 .

[0202] In this way, the film layer 300 is attached to the conveying device 20, the connection area between the film layer 300 and the conveying device 20 is large, and the film layer 300 is attached more stably. Specifically, the film layer 300 can be attached to the conveying device 20 by vacuum adsorption.

[0203] See also Figure 4 In some embodiments, the step of attaching the film layer 300 to the conveying device 20 includes: forming a negative pressure through the second vent hole 26 to absorb the film layer 300 to the second installation position 25 by using the negative pressure.

[0204] In this way, the film layer 300 is adhered to the conveying device 20 by negative pressure adsorption, so that the film layer 300 can be stably fixed on the conveying device 20 and can be protected from damage caused by external mechanical forces; in addition, the film layer 300 adhered by negative pressure adsorption is easy to take and place.

[0205] Specifically, the opening and closing of the negative pressure device can be controlled by a button. When the button of the negative pressure device is turned on, the second vent 26 can form a negative pressure, thereby adsorbing the film layer 300 on the conveying device 20. When the button of the negative pressure device is turned off, the negative pressure in the second vent 26 disappears, and the film layer 300 can be removed from the conveying device 20.

[0206] See also Fig.10 In some embodiments, driving the carrying platform 10 and the conveying device 20 to move relative to each other (step S30) includes controlling the mounting member 24 to flip around the rotation axis 23 from a first position 21 away from the carrying platform 10 to a second position 22 close to the carrying platform 10.

[0207] In this way, the mounting member 24 can be reciprocated between the first position 21 and the second position 22 , thereby transporting the film layer 300 multiple times.

[0208] Specifically, in some embodiments, the movement of the mounting member 24 can be controlled in a manual mode or in an automatic mode. For example, when the movement of the mounting member 24 is in a manual mode, the rotation button is manually adjusted to control the angle at which the mounting member 24 flips around the rotating shaft 23. When the automatic mode is used, in order to prevent the accidental start, the work start button can be pressed with both hands at the same time, and the mounting member 24 can be automatically flipped under the drive of the power device.

[0209] See also Fig.11 In some embodiments, the positioning device 30 is used to assist the positioning of the substrate 200 and the film layer 300 (step S40), including:

[0210] S41, photographing the positions of the substrate 200 and the film layer 300 by the camera module 31;

[0211] S42, using the display screen 32 to display images of the substrate 200 and the film layer 300;

[0212] S43, based on the image displayed on the display screen 32, adjust the position of the carrying platform 10 and / or the conveying device 20 to align the first positioning reference 202 of the substrate 200 with the second positioning reference 305 of the film layer 300, so as to position the substrate 200 and the film layer 300.

[0213] In this way, the camera module 31 fixes the alignment viewing angle and presents it on the display screen 32, through which the positioning accuracy can be accurately determined.

[0214] Specifically, in step S41 and step S42 , the camera module 31 can perform real-time imaging of the positions of the substrate 200 and the film layer 30 , and correspondingly, the display screen 32 can display the image captured by the camera module 31 in real time.

[0215] In step S43, the position of the carrying platform 10 and / or the conveying device 20 is adjusted, which may be the position of the carrying platform 10, the position of the conveying device 20, or the position of both the carrying platform 10 and the conveying device 20. The "position" mentioned above may be the position of the center of the object, or may be the various postures of the object when the center of the object remains unchanged. In other words, the position of the carrying platform 10 and / or the conveying device 20 may refer to the center position of the carrying platform 10 and / or the conveying device 20, or may refer to the posture of the carrying platform 10 and / or the conveying device 20. Exemplarily, the carrying platform 10 may be moved along the first direction X, thereby changing the center position of the carrying platform 10; or the center position of the carrying platform 10 may be kept unchanged, and one end of the carrying platform 10 may be rotated downward around the center, and the other end of the carrying platform 10 may be rotated upward around the center, so that the carrying platform 10 is tilted, thereby changing the posture of the carrying platform 10.

[0216] See also Fig.10 In some embodiments, based on the image displayed on the display screen 32, the position of the carrying platform 10 and / or the conveying device 20 is adjusted so that the first positioning reference 202 of the substrate 200 is aligned with the second positioning reference 305 of the film layer 300 (step S43), including:

[0217] Based on the first display screen 321 displaying the first image taken by the first camera module 311 and the second display screen 322 displaying the second image taken by the second camera module 312, the position of the carrying platform 10 and / or the conveying device 20 is adjusted to align the first positioning reference 202 with the corresponding second positioning reference 305.

[0218] In this way, the two positioning references of the substrate 200 and the film layer 300 can be imaged simultaneously to determine whether the positioning references meet the alignment standard.

[0219] Specifically, the first camera module 311 can perform real-time imaging of the positions of the first end 301 of the substrate 200 and the film layer 30, and correspondingly, the first display screen 321 can display in real time the first image captured by the first camera module 311; the second camera module 312 can perform real-time imaging of the positions of the second end 302 of the substrate 200 and the film layer 30, and correspondingly, the second display screen 322 can display in real time the second image captured by the second camera module 312. The first positioning reference 202 of the substrate 200 and the second positioning reference 305 of the film layer 300 can be judged and adjusted by observing the display screen 32 with the naked eye, or an automated visual alignment system can be introduced for judgment and adjustment.

[0220] Exemplary, combined Figure 5 , Figure 6 and Figure 7 The membrane layer 300 is provided with a fluid channel 303. The widths at both ends of the fluid channel 303 in the length direction are smaller than the width in the middle of the fluid channel 303. The two ends of the fluid channel 303 form arcs 304. The substrate 200 is provided with a circular hole 201 connected to the fluid channel 303. The circular hole 201 is used to allow the reagent solution to enter from one end of the fluid channel 303 and flow out from the other end, so that the reagent solution can flow in the chip.

[0221] In some embodiments, the first positioning reference 202 of the substrate 200 can be a circular hole 201 located on the substrate 200, and the second positioning reference 305 of the film layer 300 can be an arc 304 located on the film layer 300. The arc 304 of the film layer 300 is aligned with the circular hole 201 of the substrate 200 through two camera modules 31 to achieve precise fitting of the film layer 300 and the substrate 200.

[0222] See also Figure 8In some embodiments, adjusting the position of the carrying platform 10 and / or the conveying device 20 (step S43) includes:

[0223] The control driving device 50 drives the carrying platform 10 to complete at least one of the following movements, so as to drive the carrying platform 10 to move and adjust the position of the substrate 200:

[0224] Moving along a first direction X;

[0225] Moving along a second direction Y;

[0226] The first direction X and the second direction Y rotate in a plane formed by the first direction X and the second direction Y, and the first direction X and the second direction Y are perpendicular to each other.

[0227] In this way, the position of the substrate 200 relative to the film layer 300 can be changed by the movement of the carrying platform 10 , so that the substrate 200 and the film layer 300 are precisely positioned.

[0228] Specifically, the first positioning reference 202 of the substrate 200 and the second positioning reference 305 of the film layer 300 can be aligned by manually adjusting the fine-tuning knobs in the first direction X, the second direction Y and the rotation direction Q.

[0229] See also Fig.10 In some embodiments, controlling the laminating device 40 to laminate the substrate 200 and the film layer 300 (step S50) includes:

[0230] The pressing roller 41 is rolled from one side of the conveying device 20 to the other side of the conveying device 20 to press the film layer 300 onto the substrate 200 .

[0231] In this way, the pressing roller 41 can make the substrate 200 and the film layer 300 tightly fit together.

[0232] Specifically, in some embodiments, the film laminating machine 100 can adopt a manual mode or an automatic mode. When the film laminating machine 100 adopts the automatic mode, both hands press the work start button at the same time, and the pressure roller 41 automatically rolls from the end away from the rotating shaft 23 to the end close to the rotating shaft 23. After the film layer 300 and the substrate 200 are bonded, the pressure roller 41 automatically returns to the initial position.

[0233] See also Fig.12 In some embodiments, before controlling the laminating device 40 to laminate the substrate 200 and the film layer 300, the laminating method further includes:

[0234] S44, removing the release film attached to the film layer 300.

[0235] In this way, the colloid on the film layer 300 is exposed, and the film layer 300 is firmly attached to the substrate 200 through the colloid.

[0236] Specifically, the release film may be directly torn off from the film layer 300 by hand, or a robot may be used to tear off the release film from the film layer 300.

[0237] See also Fig.13 In some embodiments, removing the release film attached to the film layer 300 (step S44) includes:

[0238] S441, moving the conveying device 20 from the second position 22 to the first position 21;

[0239] S442 , when the conveying device 20 is at the first position 21 , removing the release film attached to the film layer 300 .

[0240] In this way, it is convenient to tear off the release film from the film layer 300 without affecting the position of the substrate 200 on the carrying platform 10 .

[0241] Specifically, in some embodiments, in the manual mode, the work start button is pressed by both hands at the same time, and the conveying device 20 automatically moves from the second position 22 to the first position 21.

[0242] In one embodiment, the application process of the film laminating machine 100 of the embodiment of the present application can be as follows: place the substrate 200 on the carrying platform 10 and turn on the vacuum button, place the film layer 300 on the conveying device 20 in the first position 21 and turn on the vacuum button, select the manual mode of the film laminating machine 100, press the work start button with both hands at the same time, the conveying device 20 automatically flips around the rotating shaft 23 to the second position 22, and manually adjust the fine-tuning knobs in the first direction X, the second direction Y and the rotation direction Q so that the driving device 50 drives the carrying platform 10 to move relative to the conveying device 20. The camera module 31 and the display screen 32 are real-time images of the positioning reference of the substrate 200 and the film layer 300. When the display screen 32 shows the positioning reference, the camera module 31 and the display screen 32 are used to perform real-time imaging. After observing that the positioning references of the substrate 200 and the film layer 300 are aligned, both hands press the work start button again at the same time, the conveying device 20 returns to the first position 21, and the release film on the film layer 300 is torn off from the colloid by hand, and then the laminating machine mode is selected as the automatic mode, and both hands press the work start button at the same time, the conveying device 20 automatically flips to the second position 22, and the pressure roller 41 rolls from the end away from the rotating shaft 23 to the end close to the rotating shaft 23 to press the substrate 200 and the film layer 300 together. After the substrate 200 and the film layer 300 are laminated, the pressure roller 41 is reset, and at the same time, the vacuum adsorption is completely closed and the conveying device 20 automatically returns to the first position 21, and the laminated substrate 200 is removed from the supporting platform 10, and then the next cycle is carried out.

[0243] In the description of this specification, the description with reference to the terms "one embodiment", "certain embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0244] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A film pasting method, characterized in that: include: placing the substrate on a carrying platform; placing the film layer on a conveying device; Driving the carrying platform and the conveying device to move relative to each other, so that the carrying platform and the conveying device are close to each other, thereby driving the film layer and the substrate to be close to each other; Using a positioning device to assist in positioning the substrate and the film layer; The laminating device is controlled to laminate the substrate and the film layer.

2. The film pasting method according to claim 1, characterized in that: Placing the substrate on the carrying platform includes: laminating the substrate to the carrying platform; Optionally, a first installation position is provided on the carrying platform, and a first vent hole is provided at the first installation position; Optionally, the step of laminating the substrate to the carrying platform comprises: forming a negative pressure through the first vent hole, so as to absorb the substrate to the first installation position by using the negative pressure; Optionally, there are a plurality of the first ventilation holes, and the plurality of the first ventilation holes are arranged in an array; Optionally, the carrying platform includes a first surface and a first side surface connected to the first surface, the first surface is formed with the first installation position, and the first vent hole extends from the first surface to the first side surface; Optionally, an area of ​​the first mounting location is configured to be larger than an area of ​​the substrate.

3. The film pasting method according to claim 1 or 2, characterized in that: The step of placing the film layer on the conveying device comprises: Laminating the film layer to the conveying device; Optionally, a second installation position is provided on the conveying device, and a second vent hole is provided on the second installation position; Optionally, the step of laminating the film layer to the delivery device comprises: forming a negative pressure through the second vent hole, so as to utilize the negative pressure to adsorb the film layer to the second installation position; Optionally, there are multiple second ventilation holes, and the multiple second ventilation holes are arranged in an array.

4. The film pasting method according to claim 3, characterized in that: The conveying device comprises a second surface and a second side surface connected to the second surface, the second surface is formed with the second installation position, and the second vent hole extends from the second surface to the second side surface; Optionally, the area of ​​the second mounting position is configured to be larger than the area of ​​the membrane layer; Optionally, the second mounting position is in contact with at least a portion of the film layer; Optionally, the conveying device comprises a rotating shaft and a mounting member rotatably connected to the rotating shaft, the mounting member is used to place the film layer, the conveying device is flipped between a first position and a second position by the rotating shaft, the mounting member is away from the carrying platform when in the first position, and is close to the carrying platform when in the second position; Optionally, driving the carrying platform and the conveying device to move relative to each other comprises: Controlling the mounting member to flip around the rotating shaft from a first position away from the carrying platform to a second position close to the carrying platform; Optionally, when the conveying device is in the second position, the extension plane of the mounting member is tilted relative to the base plate; Optionally, when the conveying device is in the second position, the angle formed between the extension plane of the mounting member and the bearing platform is 0° to 10°.

5. The film attaching method according to any one of claims 1 to 4, characterized in that: The positioning device includes a camera module and a display screen electrically connected to the camera module, wherein the camera module is installed on one side of the carrying platform, the shooting field of the camera module faces the carrying platform, and the display screen displays the image shot by the camera module; Optionally, the using of a positioning device to assist in positioning the substrate and the film layer comprises: photographing the positions of the substrate and the film layer by means of the camera module; Using the display screen to display images of the substrate and the film layer; Based on the image displayed on the display screen, adjusting the position of the carrying platform and / or the conveying device so that the first positioning reference of the substrate is aligned with the second positioning reference of the film layer, thereby positioning the substrate and the film layer; Optionally, the number of the camera modules and the display screen are both multiple, the camera modules are arranged in a one-to-one correspondence with the display screen, and the multiple camera modules are used to photograph different positions of the substrate; Optionally, the number of the camera modules and the display screen are both two, the two camera modules are respectively a first camera module and a second camera module, the two display screens are respectively a first display screen and a second display screen, the field of view of the first camera module covers the first end of the film layer, the field of view of the second camera module covers the second end of the film layer opposite to the first end, the first positioning reference and the second positioning reference are both multiple and one-to-one corresponding, part of the second positioning reference is located at the first end, and part of the second positioning reference is located at the second end; The adjusting the position of the carrying platform and / or the conveying device based on the image displayed on the display screen so as to align the first positioning reference of the substrate with the second positioning reference of the film layer comprises: Based on the first display screen displaying the first image captured by the first camera module and the second display screen displaying the second image captured by the camera module, adjusting the position of the carrying platform and / or the conveying device so that the first positioning reference is aligned with the corresponding second positioning reference; Optionally, the conveying device is provided with a light-transmitting window to expose the second end of the film layer, and when the conveying device is in a position close to the carrying platform, the light-transmitting window is within the field of view of the second camera module; Optionally, the light-transmitting window comprises a through hole opened in the conveying device; Optionally, adjusting the position of the carrying platform and / or the conveying device comprises: The control driving device drives the carrying platform to complete at least one of the following movements, so as to drive the carrying platform to move and adjust the position of the substrate: moving in a first direction; moving in a second direction; The device rotates within a plane formed by a first direction and a second direction, wherein the first direction and the second direction are perpendicular to each other.

6. The film attaching method according to any one of claims 1 to 5, characterized in that: The pressing device comprises a pressing roller; The controlling lamination device to laminate the substrate and the film layer comprises: Rolling the pressing roller from one side of the conveying device to the other side of the conveying device to press the film layer onto the substrate; Optionally, before controlling the laminating device to laminate the substrate and the film layer, the laminating method further comprises: removing the release film attached to the film layer; Optionally, the conveying device can rotate between a first position and a second position relative to the carrying platform, the conveying device being away from the carrying platform when in the first position, and being close to the carrying platform when in the second position; The removing of the release film attached to the film layer comprises: moving the conveying device from the second position to the first position; When the conveying device is at the first position, the release film attached to the film layer is removed.

7. A film laminating machine, characterized in that: include: A carrying platform, the carrying platform is used to carry the substrate; and A conveying device, the conveying device is arranged on one side of the carrying platform, the conveying device is used to convey the film layer, and the conveying device and the carrying platform can move relative to each other so that the conveying device and the carrying platform are close to or away from each other; A positioning device, the positioning device is arranged on one side of the carrying platform, and the positioning device is used to assist in positioning the substrate and the film layer when the carrying platform and the conveying device are close to each other; and A pressing device is movably arranged on the carrying platform, and is used to stick the substrate and the film layer together during movement.

8. The film laminating machine according to claim 7, characterized in that: The carrying platform is provided with a first installation position, and the first installation position is used to adhere to the substrate and fix the substrate; Optionally, the first installation position is provided with a first vent hole, and the first vent hole is used to form a negative pressure to adsorb the substrate; Optionally, there are a plurality of the first ventilation holes, and the plurality of the first ventilation holes are arranged in an array; Optionally, the carrying platform includes a first surface and a first side surface connected to the first surface, the first surface is formed with the first installation position, and the first vent hole extends from the first surface to the first side surface; Optionally, it is characterized in that the area of ​​the first mounting position is configured to be larger than the area of ​​the substrate; Optionally, the conveying device can rotate between a first position and a second position relative to the carrying platform, the conveying device being away from the carrying platform when in the first position, and being close to the carrying platform when in the second position; Optionally, the conveying device comprises a rotating shaft and a mounting member rotatably connected to the rotating shaft, the mounting member is used to place the film layer, and the conveying device is flipped between the first position and the second position through the rotating shaft; Optionally, the mounting member is provided with a second mounting position, and when the conveying device is in the first position, the second mounting position faces away from the carrying platform, and when the conveying device is in the second position, the second mounting position faces the carrying platform; Optionally, the second installation position is provided with a second vent hole, and the second vent hole is used to form a negative pressure to adsorb the film layer; Optionally, the number of the second ventilation holes is multiple, and the multiple second ventilation holes are arranged in an array; Optionally, the mounting member includes a second surface and a second side surface connected to the second surface, the second surface is formed with the second mounting position, and the second vent hole extends from the second surface to the second side surface; Optionally, the area of ​​the second mounting position is configured to be larger than the area of ​​the membrane layer; Optionally, the second mounting position is in contact with at least a portion of the film layer; Optionally, when the conveying device is in the second position, the extension plane of the mounting member is tilted relative to the base plate; Optionally, when the conveying device is in the second position, the angle formed between the extension plane of the mounting member and the bearing platform is 0° to 10°.

9. The film laminating machine according to any one of claims 7 or 8, characterized in that: The positioning device includes a camera module and a display screen electrically connected to the camera module, wherein the camera module is installed on one side of the carrying platform, the shooting field of the camera module faces the carrying platform, and the display screen is used to display the image shot by the camera module; Optionally, the number of the camera modules and the display screen are both multiple, the camera modules are arranged in a one-to-one correspondence with the display screen, and the multiple camera modules are used to photograph different positions of the substrate; Optionally, the number of the camera modules and the display screen are both two, the two camera modules are respectively a first camera module and a second camera module, the field of view of the first camera module covers a first end of the film layer, and the field of view of the second camera module covers a second end of the film layer opposite to the first end; Optionally, the conveying device is provided with a light-transmitting window to expose the second end of the film layer, and when the conveying device is in a position close to the carrying platform, the light-transmitting window is within the field of view of the second camera module; Optionally, the light-transmitting window comprises a through hole opened on the conveying device.

10. The film laminating machine according to claim 9, characterized in that: The laminating device comprises a pressing roller, which can roll from one side of the conveying device to the other side of the conveying device to press the film layer onto the substrate; Optionally, the film laminating machine further comprises a driving device connected to the carrying platform, wherein the driving device is used to drive the carrying platform to move so as to adjust the position of the carrying platform; Optionally, the driving device can drive the carrying platform to complete at least one of the following movements: moving in a first direction; moving in a second direction; The device rotates within a plane formed by a first direction and a second direction, wherein the first direction and the second direction are perpendicular to each other.

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