Metal target material processing and spraying device

Abstract

The invention discloses a metal target machining and spraying device, and belongs to the technical field of spraying devices, the metal target machining and spraying device comprises a spraying box, a clamping mechanism and a rotating mechanism are arranged on the two sides of the spraying box respectively, and the rotating mechanism comprises a rotating disc, a rotating shaft and a rotating frame; the spraying mechanism comprises a spraying cylinder and a spraying pump; and the driving mechanism comprises a driving motor, a driving shaft, a driving belt wheel and a driven belt wheel, and the same belt is installed on the driving belt wheel and the driven belt wheel in a transmission mode. The positioning mechanism is arranged to perform center positioning on the target material, the clamping mechanism is used for clamping the two ends of the target material, the situation that spraying is affected by shielding is avoided, the preheating mechanism is arranged to preheat the target material before spraying, and the temperature gradient can be reduced, so that the thermal stress is reduced, and the target material is prevented from cracking; and after preheating is completed, the shaking speed of the spraying barrel is increased by increasing the rotating speed of the target material, and the spraying pump is driven to operate, so that the spraying uniformity is guaranteed.

Description

Technical Field

[0001] The invention relates to the technical field of spraying devices, and in particular to a metal target material processing spraying device. Background Art

[0002] Metal targets are key materials used in physical vapor deposition processes and are mainly used in semiconductors, flat panel displays, solar cells and other fields. Metal targets play a vital role in the manufacturing process of integrated circuits, and their quality directly affects the performance and reliability of the final product. The purity of metal targets is usually very high, requiring 99.999% (5N) or even higher to ensure that the thin film formed by sputtering has the required electrical and physical properties. For example, in the semiconductor industry, with the reduction in chip size and the increase in performance requirements, the purity and quality requirements for metal targets are also constantly increasing. Metal targets are key materials used in physical vapor deposition processes such as magnetron sputtering. They are widely used in the electronics and information industries because of their specific electrical, thermal, optical and other properties.

[0003] The patent document with publication number CN115679239A discloses a spraying device for metal target material processing and production, which relates to the technical field of spraying device. The key points of its technical solution include a spray nozzle and a base. The base is provided with a receiving groove, and a moving block is movably connected to the base. The moving block and the receiving groove are rotatably connected with a locking cylinder, and the liner is horizontally placed between the two locking cylinders, and one of the locking cylinders moves close to the other locking cylinder until the liner is clamped by the two locking cylinders; a fixed plate, the fixed plate is fixedly connected to the top of the base, and a plurality of spray nozzles are arranged, and the spray nozzles are fixedly connected to the bottom of the fixed plate. When the spray nozzle works, the material is sprayed toward the liner, and the rotation of the two locking cylinders drives the liner to rotate, so that the material is evenly sprayed on the liner.

[0004] The above technical solution has the following problems when used:

[0005] 1) The target material is fixed by a locking cylinder, so that both ends of the target material are inserted into the locking cylinder during the spraying process, thereby blocking both ends of the target material and making it impossible to spray completely;

[0006] 2) Multiple spray nozzles are set up for spraying, but the spraying amount at the position directly below the spray nozzle and the position in the gap between the spray nozzles is different, which will cause the problem of uneven target material spraying;

[0007] 3) The metal target cannot be preheated, so the thermal stress generated during the spraying process causes the target to crack; therefore, we propose a metal target processing spraying device to solve this problem. Summary of the invention

[0008] The purpose of the present invention is to provide a metal target material processing spraying device to solve the problems raised in the above background technology.

[0009] In order to achieve the above object, the present invention adopts the following technical solutions:

[0010] Metal target material processing spraying device, including:

[0011] A spray box, wherein a clamping mechanism and a rotating mechanism are respectively arranged on both sides of the spray box, wherein the rotating mechanism comprises a turntable, a rotating shaft and a rotating frame, wherein the rotating shaft is fixedly connected between the turntable and the rotating frame, and the rotating shaft is rotatably connected to an inner wall of one side of the spray box, and a plurality of sliding frames are slidably sleeved on the outer side of the rotating frame, and a connecting column is fixedly connected to one side of the sliding frame;

[0012] A spraying mechanism, the spraying mechanism comprises a spraying barrel and a spraying pump, an impeller is rotatably installed in the spraying pump, one side of the impeller is fixedly connected to a pump shaft, the other end of the pump shaft is fixedly connected to a transmission shaft, the other end of the transmission shaft is fixedly connected to a round shell, the inner wall of the round shell is provided with a plurality of grooves adapted to the connecting column, and the bottom of the spraying barrel is connected to a plurality of nozzles;

[0013] A driving mechanism, the driving mechanism comprises a driving motor, a driving shaft, a driving pulley and a driven pulley, the driving pulley and the driven pulley are driven by a same belt, the driven pulley is fixedly sleeved on the outside of the rotating shaft, and the driving pulley is fixedly sleeved on the outside of the driving shaft, a plurality of rotating drums are fixedly sleeved on the outside of the driving shaft, a guide groove is provided on the outside of the rotating drum, a plurality of connecting plates are fixedly connected to the top of the spraying drum, a plug rod is fixedly connected to the top of the connecting plate, and the top of the plug rod is movably inserted in the corresponding guide groove;

[0014] The preheating mechanism comprises a mounting tube and a plasma emitter. Mounting shafts are fixedly mounted on both sides of the mounting tube. The two mounting shafts are rotatably connected to the inner walls of both sides of the spray box respectively, and the plasma emitter is fixedly mounted on the inner side of the mounting tube.

[0015] Preferably, one side of the spray barrel is connected to an inlet pipe, the outer side of the inlet pipe is slidably sleeved with a fixed pipe, the fixed pipe is fixedly installed on the outside of the spray box, the discharge port of the spray pump is connected to an outlet pipe, and the other end of the outlet pipe is connected to the fixed pipe.

[0016] Preferably, two mounting brackets are fixedly installed on one side of the spray box, the drive motor is fixedly installed on the top of one of the mounting brackets, and a rotating motor is fixedly installed on the top of the other mounting bracket, and the output shaft of the rotating motor is fixedly connected to one of the mounting shafts.

[0017] Preferably, a fixing frame is fixedly connected to the other side of the spray box, the fixing frame is rotatably sleeved on the outside of the transmission shaft, and the spray pump is fixedly installed on one side of the fixing frame;

[0018] A compression spring is fixedly connected to one side of the plurality of slide frames that is away from each other, and the other end of the compression spring is fixedly connected to the rotating frame.

[0019] Preferably, the clamping mechanism comprises a clamping cylinder, a clamping plate, a mounting plate and a driving plate, the clamping cylinder is fixedly mounted on one side of the spray box, and the output end of the clamping cylinder is fixedly connected to one side of the driving plate, and a plurality of pressure sensors are fixedly connected between the driving plate and the mounting plate, a circular shaft is fixedly connected to one side of the clamping plate, the mounting plate is rotatably sleeved on the outer side of the circular shaft, and a retaining ring is fixedly sleeved on the outer side of the circular shaft, and the retaining ring movably abuts against one side of the mounting plate;

[0020] A plurality of guide rods are fixedly connected to one side of the mounting plate, a plurality of guide holes are opened on one side of the driving plate and the spray box, and the guide rods are slidably connected in the corresponding guide holes;

[0021] A plurality of limiting wheels are rotatably mounted in the mounting plate, and the limiting wheels are movably abutted against one side of the mounting plate.

[0022] Preferably, a circular groove is provided on one side of the rotating disk and the clamping disk close to each other, and a first temperature sensor and a second temperature sensor are fixedly installed in the two circular grooves respectively;

[0023] A third temperature sensor and a humidity sensor are fixedly mounted on the top inner wall of the spray box, a controller is fixedly mounted on the top of the spray box, and the first temperature sensor, the second temperature sensor, the third temperature sensor and the humidity sensor are all electrically connected to the controller.

[0024] Preferably, a partition and a crossbeam are fixedly installed inside the spray box, the connecting plate is slidably sleeved on the outside of the crossbeam, and an arc-shaped hole is opened on the top of the partition, and the installation tube passes through the arc-shaped hole.

[0025] Preferably, it also includes a positioning mechanism, the positioning mechanism includes two positioning frames and two positioning cylinders, the output ends of the two positioning cylinders are fixedly connected to the corresponding positioning frames, and the two positioning frames are rotatably mounted with a plurality of positioning wheels on one side close to each other, and the two positioning cylinders are respectively fixedly mounted on the front and rear sides of the spray box;

[0026] A plurality of guide plates are fixedly connected to the sides of the two positioning frames that are away from each other, and a plurality of sliding holes are opened on the front and rear sides of the spray box, and the guide plates are slidably connected in the corresponding sliding holes.

[0027] Preferably, a through hole is opened on the front side of the spray box, and two slide rails are fixedly installed on the front side of the spray box, the outer sides of the two slide rails are slidably sleeved with the same sealing door, and a handle is fixedly installed on the front side of the sealing door.

[0028] The beneficial effects of the present invention are:

[0029] 1. In the present invention, the metal target material processing spraying device is connected with the coating supply pipe and the inlet of the spray pump, and the cylindrical target material to be sprayed is placed between the turntable and the clamping plate, and then the two positioning cylinders are started to drive the two positioning frames to approach each other, so that the positioning wheel abuts against the outside of the target material, and then the clamping cylinder is started to drive the driving plate to move to the left, and the driving plate drives the clamping plate to move to the left through the mounting plate, so that it is close to the turntable, so that the turntable and the clamping plate are tightly abutted against the two ends of the cylindrical target material to realize the clamping process, and the clamping pressure is detected by the pressure sensor. When the clamping pressure reaches the required value, the driving of the clamping cylinder feeding is stopped, and then the output ends of the two positioning cylinders are controlled to shrink, so as to drive the two positioning frames to move away from each other, and the handle is pulled down to drive the sealing door to seal the through hole, and the temperature and humidity in the spray box are monitored by the third temperature sensor and the humidity sensor;

[0030] 2. In the present invention, the metal target material processing spraying device emits plasma by starting the plasma emitter. The plasma contains a large number of charged particles. These particles obtain energy under the action of the electric field and move at a very high speed. When these high-energy particles collide with the surface of the target material, they will transfer kinetic energy to the atoms or molecules of the target material, thereby causing the temperature of the surface area of ​​the target material to rise, thereby starting the drive motor to drive the drive shaft to rotate slowly, and the drive shaft drives the rotating shaft to rotate slowly through the transmission of the driving pulley and the driven pulley, and the rotating shaft drives the target material to rotate through the turntable, thereby achieving uniform heating of the target material at different angles;

[0031] 3. In the present invention, the metal target material processing spraying device monitors the temperature of both ends of the target material through the first temperature sensor and the second temperature sensor. When the temperature of both ends of the target material reaches the required value, the plasma emitter is controlled by the controller to stop working, the rotating motor is controlled to start to drive the installation cylinder to flip, and the driving motor speed is controlled to increase, thereby increasing the rotation speed of the drive shaft, the rotating shaft and the target material. The rotating shaft rotates while driving the rotating frame to rotate. The rotating frame drives multiple slide frames to perform circular motion. The slide frames move away from each other under the action of centrifugal force and drive the connecting column to insert into the groove, so that the groove drives the round shell to rotate. The round shell drives the pump shaft and the impeller to rotate through the transmission shaft, so that the spray pump generates power through the rotation of the impeller, and the paint in the paint supply pipe is extracted and enters the spray barrel through the outlet pipe, the fixed pipe and the inlet pipe, and then sprayed from multiple nozzles to realize automatic spraying of the target material. At the same time, the rotating barrel is driven to rotate by the driving shaft, and the rotating barrel drives the connecting plate and the spray barrel to move back and forth left and right through the cooperation of the guide groove and the plug rod, so that the paint is sprayed evenly, avoiding the problem of inconsistent spraying uniformity of the nozzle gap;

[0032] 4. In the present invention, the metal target material processing spraying device controls the driving motor to stop running through the controller after the spraying is completed, thereby driving the driving shaft, impeller, turntable and target material to stop rotating at the same time, thereby avoiding uneven spraying caused by spraying when the target material rotates at a low speed;

[0033] 5. In the present invention, the metal target material processing spraying device is used to center the target material by setting a positioning mechanism, and clamps the two ends of the target material by a clamping mechanism to avoid obstruction affecting the spraying. The target material is preheated by a preheating mechanism before spraying, which can reduce the temperature gradient, thereby reducing thermal stress and preventing the target material from cracking. The temperature increase of the surface of the preheated target material helps to evenly diffuse and wetting the spray material on the surface of the target material. This uniform diffusion can significantly improve the bonding strength between the coating and the target material, making the coating less likely to crack. Preheating can remove moisture and volatile impurities on the surface of the substrate, while increasing the surface energy, which helps the adhesion of the coating. After the preheating is completed, the shaking speed of the spray barrel is increased by increasing the rotation speed of the target material and driving the spray pump to operate, thereby ensuring the uniformity of the spraying. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 This is a schematic diagram of the three-dimensional structure of the metal target material processing spraying device proposed by the present invention;

[0035] Figure 2 This is a schematic diagram of the three-dimensional structure of the metal target material processing spraying device proposed by the present invention from another perspective;

[0036] Figure 3 This is a schematic diagram of a top view and cross-section structure of the metal target material processing spraying device proposed by the present invention;

[0037] Figure 4 This is a schematic diagram of the front cross-sectional structure of the metal target material processing spraying device proposed by the present invention;

[0038] Figure 5 for Figure 4 A partial enlarged view of part A;

[0039] Figure 6 for Figure 4 A partial enlarged view of part B;

[0040] Figure 7 for Figure 4 A partial enlarged view of part C in the middle;

[0041] Figure 8 It is a three-dimensional structural schematic diagram of the driving mechanism and the spraying mechanism proposed by the present invention;

[0042] Fig. 9 This is a three-dimensional structural schematic diagram of the rotating drum and the insertion rod proposed by the present invention;

[0043] Fig.10 It is a three-dimensional structural schematic diagram of the clamping mechanism proposed by the present invention;

[0044] Fig.11 It is a three-dimensional structural schematic diagram of the spraying, driving pulley and driven pulley proposed by the present invention;

[0045] Fig.12 This is a schematic diagram of the three-dimensional structure of the rotating frame, sliding frame and round shell proposed in the present invention.

[0046] In the figure: 1. spray box; 101. sealing door; 102. slide rail; 103. handle; 104. partition; 2. spray barrel; 201. nozzle; 202. inlet pipe; 203. fixed pipe; 204. connecting plate; 205. crossbeam; 206. plug rod; 3. spray pump; 301. outlet pipe; 302. impeller; 303. pump shaft; 304. transmission shaft; 305. fixed frame; 306. round shell; 307. groove; 4. turntable; 401. first temperature sensor; 402. rotating shaft; 403. rotating frame; 404. compression spring; 405. connecting column; 406. sliding frame; 5. clamp Holding disk; 501, second temperature sensor; 502, circular shaft; 503, mounting disk; 504, pressure sensor; 505, driving disk; 506, guide rod; 507, clamping cylinder; 6, driving shaft; 601, rotating drum; 6011, guide groove; 602, driving motor; 603, driving pulley; 604, driven pulley; 7, plasma emitter; 701, mounting drum; 702, mounting shaft; 703, rotating motor; 8, positioning frame; 801, positioning wheel; 802, guide plate; 804, positioning cylinder; 9, third temperature sensor; 10, humidity sensor; 11, controller. DETAILED DESCRIPTION

[0047] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0048] Reference Figure 1 - Fig.12 , metal target material processing spraying device, including:

[0049] The spray box 1 is provided with a clamping mechanism and a rotating mechanism on both sides of the spray box 1. The rotating mechanism includes a turntable 4, a rotating shaft 402 and a rotating frame 403. The rotating shaft 402 is fixedly connected between the turntable 4 and the rotating frame 403, and the rotating shaft 402 is rotatably connected to an inner wall of one side of the spray box 1. A plurality of sliding frames 406 are slidably sleeved on the outer side of the rotating frame 403, and a connecting column 405 is fixedly connected to one side of the sliding frame 406.

[0050] The spraying mechanism includes a spraying barrel 2 and a spraying pump 3. An impeller 302 is rotatably installed in the spraying pump 3. A pump shaft 303 is fixedly connected to one side of the impeller 302. A transmission shaft 304 is fixedly connected to the other end of the pump shaft 303. A round shell 306 is fixedly connected to the other end of the transmission shaft 304. A plurality of grooves 307 adapted to the connecting column 405 are provided on the inner wall of the round shell 306. A plurality of nozzles 201 are connected to the bottom of the spraying barrel 2.

[0051] The driving mechanism includes a driving motor 602, a driving shaft 6, a driving pulley 603 and a driven pulley 604. The driving pulley 603 and the driven pulley 604 are driven by the same belt. The driven pulley 604 is fixedly sleeved on the outside of the rotating shaft 402, and the driving pulley 603 is fixedly sleeved on the outside of the driving shaft 6. A plurality of rotating drums 601 are fixedly sleeved on the outside of the driving shaft 6. A guide groove 6011 is provided on the outside of the rotating drum 601. A plurality of connecting plates 204 are fixedly connected to the top of the spraying cylinder 2. A plug rod 206 is fixedly connected to the top of the connecting plate 204. The top of the plug rod 206 is movably inserted into the corresponding guide groove 6011.

[0052] Preheating mechanism, the preheating mechanism includes a mounting tube 701 and a plasma emitter 7, mounting shafts 702 are fixedly installed on both sides of the mounting tube 701, the two mounting shafts 702 are rotatably connected to the inner walls of the spray box 1 on both sides, and the plasma emitter 7 is fixedly installed on the inner side of the mounting tube 701.

[0053] In this embodiment, one side of the spray barrel 2 is connected to an inlet pipe 202, and a fixed pipe 203 is slidably sleeved on the outer side of the inlet pipe 202. The fixed pipe 203 is fixedly installed on the outer side of the spray box 1. The discharge port of the spray pump 3 is connected to an outlet pipe 301, and the other end of the outlet pipe 301 is connected to the fixed pipe 203.

[0054] In this embodiment, two mounting frames are fixedly installed on one side of the spray box 1, and the driving motor 602 is fixedly installed on the top of one of the mounting frames. A rotating motor 703 is fixedly installed on the top of the other mounting frame. The output shaft of the rotating motor 703 is fixedly connected to one of the mounting shafts 702. A fixed frame 305 is fixedly connected to the other side of the spray box 1. The fixed frame 305 is rotatably sleeved on the outside of the transmission shaft 304, and the spray pump 3 is fixedly installed on one side of the fixed frame 305; a plurality of sliding frames 406 are fixedly connected to the side away from each other with a compression spring 404, and the other end of the compression spring 404 is fixedly connected to the rotating frame 403, and the compression spring 404 is used to balance the centrifugal force applied to the sliding frame 406 during circular motion.

[0055] In this embodiment, the clamping mechanism includes a clamping cylinder 507, a clamping plate 5, a mounting plate 503 and a driving plate 505. The clamping cylinder 507 is fixedly installed on one side of the spray box 1, and the output end of the clamping cylinder 507 is fixedly connected to one side of the driving plate 505, and a plurality of pressure sensors 504 are fixedly connected between the driving plate 505 and the mounting plate 503. A circular shaft 502 is fixedly connected to one side of the clamping plate, and the mounting plate 503 is rotatably sleeved on the outer side of the circular shaft 502, and a retaining ring is fixedly sleeved on the outer side of the circular shaft 502, and the retaining ring is movably abutted against one side of the mounting plate 503, thereby limiting the circular shaft 502.

[0056] A plurality of guide rods 506 are fixedly connected to one side of the mounting disk 503, a plurality of guide holes are provided on one side of the driving disk 505 and the spray box 1, and the guide rods 506 are slidably connected in the corresponding guide holes, so as to guide the mounting disk 503; a plurality of limit wheels are rotatably installed in the mounting disk 503, and the limit wheels are movably abutted against one side of the mounting disk 503, so as to limit the mounting disk 503, and a circular groove is provided on the side where the rotating disk 4 and the clamping disk 5 are close to each other, and a first temperature sensor 401 and a second temperature sensor 501 are fixedly installed in the two circular grooves respectively, so as to realize the monitoring of the temperature at both ends of the target material; a plurality of limit wheels are fixedly installed on the top inner wall of the spray box 1 A third temperature sensor 9 and a humidity sensor 10 are fixedly installed, and a controller 11 is fixedly installed on the top of the spray box 1. The first temperature sensor 401, the second temperature sensor 501, the third temperature sensor 9 and the humidity sensor 10 are all electrically connected to the controller 11, so as to realize the monitoring of the temperature and humidity inside the spray box 1. When the temperature and humidity do not meet the spraying requirements, the spraying work can be stopped by the controller 11. A partition 104 and a beam 205 are fixedly installed inside the spray box 1, and the connecting plate 204 is slidably sleeved on the outside of the beam 205, and an arc hole is opened on the top of the partition 104, and the mounting tube 701 passes through the arc hole.

[0057] In this embodiment, a positioning mechanism is also included, which includes two positioning frames 8 and two positioning cylinders 804. The output ends of the two positioning cylinders 804 are fixedly connected to the corresponding positioning frames 8, and a plurality of positioning wheels 801 are rotatably installed on the sides of the two positioning frames 8 that are close to each other. The two positioning cylinders 804 are respectively fixedly installed on the front and rear sides of the spray box 1; a plurality of guide plates 802 are fixedly connected on the sides of the two positioning frames 8 that are away from each other, and a plurality of sliding holes are provided on the front and rear sides of the spray box 1. The guide plates 802 are slidably connected in the corresponding sliding holes. A through hole is provided on the front side of the spray box 1, and two slide rails 102 are fixedly installed on the front side of the spray box 1. The outer sides of the two slide rails 102 are slidably sleeved with the same sealing door 101, and a handle 103 is fixedly installed on the front side of the sealing door 101.

[0058] In this embodiment, when in use, the coating supply pipe is connected with the inlet of the spray pump 3, the cylindrical target material to be sprayed is placed between the turntable 4 and the clamping plate 5, and then the two positioning cylinders 804 are started to drive the two positioning frames 8 to approach each other, so that the positioning wheel 801 abuts against the outside of the target material, and then the clamping cylinder 507 is started to drive the driving plate 505 to move to the left, and the driving plate 505 drives the clamping plate 5 to move to the left through the mounting plate 503, so that it is close to the turntable 4, so that the turntable 4 and the clamping plate 5 are closely abutted against the two ends of the cylindrical target material to realize the clamping process, and the clamping pressure is detected by the pressure sensor 504. When the clamping pressure reaches the required value, the driving of the clamping cylinder 507 is stopped, and then the output ends of the two positioning cylinders 804 are controlled to contract, so as to drive the two positioning frames 8 to move away from each other, and the handle 103 is pulled downward to drive the sealing door 101 to seal the through hole, and the temperature and humidity in the spray box 1 are monitored by the third temperature sensor 9 and the humidity sensor 10;

[0059] The plasma emitter 7 is started to emit plasma, which contains a large number of charged particles. These particles obtain energy under the action of the electric field and move at a very high speed. When these high-energy particles collide with the surface of the target material, they will transfer kinetic energy to the atoms or molecules of the target material, thereby causing the temperature of the surface area of ​​the target material to rise, thereby starting the drive motor 602 to drive the drive shaft 6 to rotate slowly, and the drive shaft 6 drives the rotating shaft 402 to rotate slowly through the transmission of the active pulley 603 and the driven pulley 604, and the rotating shaft 402 drives the target material to rotate through the turntable 4, thereby achieving uniform heating of the target material at different angles;

[0060] The temperature of both ends of the target is monitored by the first temperature sensor 401 and the second temperature sensor 501. When the temperature of both ends of the target reaches the required value, the plasma emitter 7 is controlled to stop working by the controller 11, the rotating motor 703 is controlled to start and drive the mounting tube 701 to flip, and the speed of the driving motor 602 is controlled to increase, thereby increasing the rotation speed of the driving shaft 6, the rotating shaft 402 and the target. The rotating shaft 402 rotates while driving the rotating frame 403 to rotate. The rotating frame 403 drives multiple slide frames 406 to perform circular motion. The slide frames 406 move away from each other under the action of centrifugal force, and drive the connecting column 405 to insert into the groove 307, so that the groove 307 drives the round shell 306 rotates, and the round shell 306 drives the pump shaft 303 and the impeller 302 to rotate through the transmission shaft 304, so that the spray pump 3 generates power through the rotation of the impeller 302, extracts the paint in the paint supply pipe, and enters the spray barrel 2 through the outlet pipe 301, the fixed pipe 203 and the inlet pipe 202, and then sprays out from multiple nozzles 201 to realize automatic spraying of the target material. At the same time, the rotating drum 601 is driven to rotate through the driving shaft 6, and the rotating drum 601 drives the connecting plate 204 and the spray barrel 2 to move back and forth left and right through the cooperation of the guide groove 6011 and the plug rod 206, so that the paint is sprayed evenly, avoiding the problem of inconsistent spraying uniformity in the gap between the nozzles 201;

[0061] After spraying is completed, the controller 11 controls the drive motor 602 to stop running, thereby driving the drive shaft 6, the impeller 302, the turntable 4 and the target material to stop rotating at the same time, thereby avoiding uneven spraying caused by spraying when the target material rotates at a low speed.

[0062] The metal target material processing spraying device provided by the present invention is introduced in detail above. Specific embodiments are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method of the present invention and its core idea. It should be pointed out that for ordinary technicians in this technical field, without departing from the principle of the present invention, several improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the scope of protection of the claims of the present invention.

Claims

1. A metal target material processing spraying device, characterized in that: include: A spray box (1), wherein a clamping mechanism and a rotating mechanism are respectively arranged on both sides of the spray box (1), wherein the rotating mechanism comprises a turntable (4), a rotating shaft (402) and a rotating frame (403), wherein the rotating shaft (402) is fixedly connected between the turntable (4) and the rotating frame (403), and the rotating shaft (402) is rotatably connected to an inner wall of one side of the spray box (1), and a plurality of sliding frames (406) are slidably sleeved on the outer side of the rotating frame (403), and a connecting column (405) is fixedly connected to one side of the sliding frame (406); A spraying mechanism, the spraying mechanism comprising a spraying barrel (2) and a spraying pump (3), an impeller (302) being rotatably mounted inside the spraying pump (3), a pump shaft (303) being fixedly connected to one side of the impeller (302), a transmission shaft (304) being fixedly connected to the other end of the pump shaft (303), a round shell (306) being fixedly connected to the other end of the transmission shaft (304), a plurality of grooves (307) being adapted to the connecting column (405) being provided on the inner wall of the round shell (306), and a plurality of nozzles (201) being connected to the bottom of the spraying barrel (2); A driving mechanism, the driving mechanism comprising a driving motor (602), a driving shaft (6), a driving pulley (603) and a driven pulley (604), the driving pulley (603) and the driven pulley (604) being driven by a same belt, the driven pulley (604) being fixedly sleeved on the outer side of the rotating shaft (402), and the driving pulley (603) being fixedly sleeved on the outer side of the driving shaft (6), a plurality of rotating cylinders (601) being fixedly sleeved on the outer side of the driving shaft (6), a guide groove (6011) being provided on the outer side of the rotating cylinder (601), a plurality of connecting plates (204) being fixedly connected to the top of the spraying cylinder (2), a plug rod (206) being fixedly connected to the top of the connecting plate (204), and the top end of the plug rod (206) being movably inserted into the corresponding guide groove (6011); A preheating mechanism, the preheating mechanism comprising a mounting tube (701) and a plasma emitter (7), mounting shafts (702) are fixedly mounted on both sides of the mounting tube (701), the two mounting shafts (702) are rotatably connected to the inner walls of the two sides of the spray box (1), and the plasma emitter (7) is fixedly mounted on the inner side of the mounting tube (701).

2. The metal target material processing spraying device according to claim 1, characterized in that: One side of the spray barrel (2) is connected to an inlet pipe (202), the outer side of the inlet pipe (202) is slidably sleeved with a fixed pipe (203), the fixed pipe (203) is fixedly installed on the outer side of the spray box (1), and the discharge port of the spray pump (3) is connected to an outlet pipe (301), and the other end of the outlet pipe (301) is connected to the fixed pipe (203).

3. The metal target material processing spraying device according to claim 1, characterized in that: Two mounting frames are fixedly mounted on one side of the spray box (1), the driving motor (602) is fixedly mounted on the top of one of the mounting frames, and a rotating motor (703) is fixedly mounted on the top of the other mounting frame, and the output shaft of the rotating motor (703) is fixedly connected to one of the mounting shafts (702).

4. The metal target material processing spraying device according to claim 1, characterized in that: A fixing frame (305) is fixedly connected to the other side of the spray box (1), the fixing frame (305) is rotatably sleeved on the outside of the transmission shaft (304), and the spray pump (3) is fixedly installed on one side of the fixing frame (305); A compression spring (404) is fixedly connected to one side of the plurality of sliding frames (406) that is away from each other, and the other end of the compression spring (404) is fixedly connected to the rotating frame (403).

5. The metal target material processing spraying device according to claim 1, characterized in that: The clamping mechanism comprises a clamping cylinder (507), a clamping plate (5), a mounting plate (503) and a driving plate (505); the clamping cylinder (507) is fixedly mounted on one side of the spray box (1), and the output end of the clamping cylinder (507) is fixedly connected to one side of the driving plate (505), and a plurality of pressure sensors (504) are fixedly connected between the driving plate (505) and the mounting plate (503); a circular shaft (502) is fixedly connected to one side of the clamping plate, the mounting plate (503) is rotatably sleeved on the outer side of the circular shaft (502), and a retaining ring is fixedly sleeved on the outer side of the circular shaft (502), and the retaining ring is movably abutted against one side of the mounting plate (503); A plurality of guide rods (506) are fixedly connected to one side of the mounting plate (503), a plurality of guide holes are opened on one side of the driving plate (505) and the spray box (1), and the guide rods (506) are slidably connected in the corresponding guide holes; A plurality of limiting wheels are rotatably mounted in the mounting plate (503), and the limiting wheels are movably abutted against one side of the mounting plate (503).

6. The metal target material processing spraying device according to claim 1, characterized in that: A circular groove is provided on one side of the rotating disk (4) and the clamping disk (5) close to each other, and a first temperature sensor (401) and a second temperature sensor (501) are fixedly installed in the two circular grooves respectively; A third temperature sensor (9) and a humidity sensor (10) are fixedly mounted on the top inner wall of the spray box (1), and a controller (11) is fixedly mounted on the top of the spray box (1); the first temperature sensor (401), the second temperature sensor (501), the third temperature sensor (9) and the humidity sensor (10) are all electrically connected to the controller (11).

7. The metal target material processing spraying device according to claim 1, characterized in that: A partition (104) and a crossbeam (205) are fixedly installed inside the spray box (1), the connecting plate (204) is slidably sleeved on the outside of the crossbeam (205), and an arc-shaped hole is opened on the top of the partition (104), and the installation tube (701) passes through the arc-shaped hole.

8. The metal target material processing spraying device according to claim 1, characterized in that: It also includes a positioning mechanism, the positioning mechanism includes two positioning frames (8) and two positioning cylinders (804), the output ends of the two positioning cylinders (804) are fixedly connected to the corresponding positioning frames (8), and a plurality of positioning wheels (801) are rotatably mounted on the sides of the two positioning frames (8) close to each other, and the two positioning cylinders (804) are respectively fixedly mounted on the front and rear sides of the spray box (1); A plurality of guide plates (802) are fixedly connected to the sides of the two positioning frames (8) that are away from each other, and a plurality of sliding holes are provided on the front and rear sides of the spray box (1), and the guide plates (802) are slidably connected in the corresponding sliding holes.

9. The metal target material processing spraying device according to claim 1, characterized in that: A through hole is provided on the front side of the spray box (1), and two slide rails (102) are fixedly installed on the front side of the spray box (1). The outer sides of the two slide rails (102) are slidably sleeved with a same sealing door (101), and a handle (103) is fixedly installed on the front side of the sealing door (101).

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