Seed layer double-sided sputtering device for manufacturing heat sink

Abstract

The present application discloses a seed layer double-sided sputtering device for manufacturing a heat sink, including a clamping device; each clamping device at least includes: a film carrier plate, a supporting mask and a locking rod; the film carrier plate is provided with a plurality of film carrier grooves, and one side opening of the film carrier grooves extends to the side wall of the film carrier plate; the bottom edges located on both sides of the openings of the film carrier grooves are provided with film carrier steps to support the supporting mask; the supporting mask is arranged in the film carrier grooves; the opposite two sides of the supporting mask have external edges that cooperate with the film carrier steps; the supporting mask is provided with a film covering hole for accommodating a substrate, and a mask grid supporting the substrate is provided at the bottom of the film covering hole; every two supporting masks are mutually buckled to clamp and cover the substrate; every two film carrier plates are mutually buckled to constrain the two supporting masks to maintain a buckled state; the mutually buckled film carrier plates are hinged by a rotating shaft, the rotating shaft is located on the side of the film carrier plate away from the opening of the film carrier groove, and the locking rod is located on the side of the film carrier plate away from the rotating shaft; so as to complete the clamping of the substrate and complete the double-sided sputtering molding of the seed layer.

Description

Technical Field

[0001] The present application relates to the technical field of heat sink manufacturing, and in particular to a double-sided sputtering device for a seed layer of a heat sink. Background Art

[0002] Heat sinks are common heat dissipation devices in electronic devices. They are used to quickly conduct and release the heat generated by the heating element to the heat dissipation device or environment, thereby ensuring the normal operation and stable performance of the equipment. With the trend of high performance and miniaturization of electronic equipment, heat dissipation issues are becoming more and more important, and heat sink technology has therefore been widely used and continuously developed. The heat sink structure includes metal layers on both sides and an intermediate insulating layer. In order to improve the bonding force between the metal layer and the insulating layer, promote uniform nucleation of the metal layer, and improve the deposition quality of the metal layer, it is necessary to pre-set a seed layer on the surface of both sides of the insulating layer.

[0003] In the prior art, the seed layer of the heat sink can be formed by PVD sputtering. During the process of sputtering the seed layer on the substrate as an insulating layer, a device is required to clamp the substrate to complete the sputtering of the seed layer. The existing sputtering clamping device can generally only meet the single-sided sputtering. If the double-sided seed layer sputtering of the substrate is to be achieved, the sputtering clamping device carrying the substrate must be removed from the sputtering device in turn, and the mask plate must be removed in turn and the substrates must be turned over one by one and then re-fixed and installed.

[0004] In the large-scale batch production process, single-sided sputtering leads to a lot of waste of time, manpower and resources, seriously slowing down production efficiency and increasingly unable to meet the rapidly growing market demand.

[0005] Therefore, there is an urgent need for a double-sided sputtering device for a seed layer used in manufacturing a heat sink to solve the above problems. Summary of the invention

[0006] In view of the defects in the prior art, the present application proposes a double-sided sputtering device for a seed layer for manufacturing a heat sink, so as to complete the clamping of the substrate and the double-sided sputtering molding of the seed layer.

[0007] To solve the above problems, the embodiment of the present application provides a double-sided sputtering device for a seed layer for manufacturing a heat sink, including a clamping device;

[0008] Each clamping device at least comprises: a film carrier plate, a film support mask and a locking rod; the film carrier plate is provided with a plurality of film carrier slots, one side of the film carrier slots openings extending to the side wall of the film carrier plate; film carrier steps are provided at the bottom edges on both sides of the film carrier slot openings for supporting the film support mask; the film support mask is arranged in the film carrier slot; the opposite sides of the film support mask have external edges matching the film carrier steps; the film support mask is provided with a film covering hole for accommodating a substrate, and a mask grid for supporting the substrate is provided at the bottom of the film covering hole;

[0009] In the clamping device: every two support masks are buckled together to clamp and cover the substrate; every two film carrier plates are buckled together to constrain the two support masks to maintain a buckled state;

[0010] The film-carrying plates that are interlocked with each other are hinged via a rotating shaft, the rotating shaft is located on a side of the film-carrying plate away from the film-carrying slot opening, and the locking rod is located on a side of the film-carrying plate away from the rotating shaft.

[0011] In a possible embodiment, a clamping groove is provided on the side wall of the locking rod, and the clamping groove is used to clamp the film-carrying plates that are engaged with each other and are away from the rotating shaft.

[0012] Among them, a plurality of mutually parallel guide grooves are arranged at the matching position between the surface of the film carrier plate and the clamping groove, and the extension direction of the guide grooves intersects with the axial direction of the rotating shaft; guide protrusions matching with the guide grooves are arranged on the opposite side walls of the clamping groove.

[0013] In a possible embodiment, the bottom edges on both sides of the opening of the film carrier slot are provided with film carrier steps, and the outer edges of the opposite sides of the support mask have interference fit or snap fit.

[0014] In a possible embodiment, the present invention further comprises: a coating cabin; a lifting hole is provided at the center of the bottom plate in the coating cabin, and a lifting sleeve is provided in the lifting hole;

[0015] A fixing frame for fixing the clip device is provided on the top of the lifting sliding sleeve;

[0016] An observation cabin is embedded in the body of the coating cabin, and a monitoring camera for monitoring the sputtering situation in the coating cabin is arranged in the observation cabin;

[0017] A lifting mechanism and a steering mechanism connected to the lifting sleeve are arranged below the coating cabin to respectively drive the lifting sleeve to reciprocate and rotate along its own central axis.

[0018] In a possible embodiment, the observation cabin is cylindrical, and includes an outer cabin body, a rotating wall, and an inner cabin body which are coaxially sleeved in sequence from outside to inside;

[0019] The outer cabin body is integrally formed with the coating cabin, a first window is provided on one side of the outer cabin body close to the interior of the coating cabin, and a surveillance camera is installed at the center of the inner bottom surface of the outer cabin body;

[0020] The inner cabin cover is arranged outside the surveillance camera, the bottom opening of the inner cabin is sealedly connected to the inner bottom surface of the outer cabin, a second window made of a transparent material is arranged at the side wall of the inner cabin corresponding to the first window, and the top surface of the inner cabin extends circumferentially to be sealedly connected to the top opening of the outer cabin;

[0021] The rotating wall is arranged between the inner cabin body and the outer cabin body, and a plurality of movable windows are evenly distributed along the circumference of the rotating wall, and transparent window sheets are detachably installed in the movable windows; the rotating wall is rotatably connected to the outer cabin body, and the rotating wall rotates to switch different movable windows between the first window and the second window.

[0022] In a possible embodiment, a top port of the rotating wall is provided with a plurality of window openings, which are communicated with the top wall of the movable window so that the transparent window sheets in the movable window can be replaced through the window openings.

[0023] In a possible embodiment, the top end and the bottom end of the rotating wall are rotatably connected to the parts extending circumferentially from the bottom surface of the outer cabin body and the top surface of the inner cabin body, respectively.

[0024] In a possible embodiment, a driving device is further included, and the driving device is used to drive the rotating wall to rotate along its central axis to switch different movable windows between the first window and the second window;

[0025] An external gear is sleeved on the outer periphery of the rotating wall, and a transmission hole is penetrated through the outer cabin body corresponding to the external gear, and the transmission hole is used for the power output end of the driving device to extend into and mesh with the external gear.

[0026] In a possible embodiment, the lifting mechanism includes a lifting motor, a lifting screw rod and a lifting nut which are sequentially connected in transmission, and the bottom end of the lifting sleeve is rotatably connected to the lifting nut;

[0027] The steering mechanism comprises a steering motor, a steering worm and a steering turbine which are sequentially connected in transmission. The inner ring of the steering turbine cooperates with the outer wall of the lifting sleeve to drive the lifting sleeve to rotate around its own central axis.

[0028] In a possible embodiment, the fixed frame includes a bottom crossbar, a top crossbar and side vertical bars;

[0029] The bottom cross bar is fixedly connected to the top of the lifting sliding sleeve, and a side vertical rod is provided at each end of the bottom cross bar, and the two ends of the top cross bar are slidably connected to a side vertical rod respectively;

[0030] Among them, a first limiting groove is provided on the bottom cross bar, and a second limiting groove is provided on the top cross bar. The first limiting groove is used to cooperate with one side of the rotating shaft of the clip device, and the second limiting groove is used to cooperate with the locking rod in the clip device.

[0031] Compared with the prior art, this application has the following advantages and beneficial effects:

[0032] (1) The present application can realize double-sided sputtering of the substrate, avoiding the need to remove the substrate and turn it over for secondary sputtering after single-sided sputtering. In the process of industrial mass production, it can save a lot of time and help improve production efficiency.

[0033] (2) The film carrier plate can be quickly opened or closed by rotating the film carrier plate, through the support mask being symmetrically arranged on the film carrier plate along the rotating axis, so that the support masks on the film carrier plates at symmetrical positions on both sides of the rotating axis can also be opened or closed accordingly; at the opening and closing ends of the two film carrier plates that are locked together, the film carrier plates are kept closed by installing locking rods; the heat sink substrate is clamped by the two mutually locked film carrier plates, so that the double-sided seed layer of the heat sink substrate can be sputtered; at the same time, it has the beneficial effect of facilitating the placement and removal of the heat sink substrate, and the beneficial effect of achieving the double-sided seed layer of the heat sink substrate.

[0034] (3) When carrying out mass production, the number of heat sink substrates to be sputtered in a single time can be increased by simply increasing the number of film loading slots on a single film carrier and / or increasing the number of film coating holes on a support mask; at the same time, the fixing or loosening of all heat sink substrates can be completed by simply installing or removing a locking rod, so as to remove the heat sink substrate that has completed double-sided sputtering and replace it with a new heat sink substrate to be sputtered, thereby greatly improving the sputtering efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0036] Figure 1 It is a top view of the film carrier plate;

[0037] Figure 2 for Figure 1 A cross-sectional view along the A-A' direction;

[0038] Figure 3 is a top view of the support mask;

[0039] Figure 4 for Figure 3 Cross-sectional view along the B-B' direction;

[0040] Figure 5 It is a top view of the supporting mask and the film carrier plate in the matching state;

[0041] Figure 6 for Figure 5 Sectional view along the C-C' direction;

[0042] Figure 7 It is a front view of the locking rod and the film carrier plate in a pre-connected state;

[0043] Figure 8 A top view of the locking rod and the film carrier plate in a pre-connected state;

[0044] Fig. 9 This is a schematic diagram of the structure of the coating cabin;

[0045] Fig.10 This is the structural explosion diagram of the observation cabin;

[0046] Fig.11 It is a structural schematic diagram of the connection between the lifting structure, the steering mechanism and the lifting sleeve;

[0047] Fig.12 It is a structural diagram of a fixed frame.

[0048] Description of main component symbols:

[0049] 011, film-carrying plate; 0111, film-carrying through groove; 0112, film-carrying step; 0113, guide groove;

[0050] 012, support mask; 0121, external edge; 0122, lamination hole; 0123, mask grid;

[0051] 013. Rotating shaft;

[0052] 014, locking rod; 0141, clamping groove; 0142, guide protrusion;

[0053] 1. Coating cabin; 11. Lifting hole; 12. Lifting sleeve; 13. Fixing frame; 131. Bottom cross bar; 1311. First limiting groove; 132. Side vertical bar; 133. Top cross bar; 1331. Second limiting groove;

[0054] 2. Observation cabin; 21. Surveillance camera; 22. Outer cabin; 221. First window; 222. Transmission hole; 23. Rotating wall; 231. Movable window; 232. Transparent window; 233. Sheet-changing port; 234. External gear; 24. Inner cabin; 241. Second window; 25. Driving device;

[0055] 3. Lifting mechanism; 31. Lifting motor; 32. Lifting screw rod; 33. Lifting nut;

[0056] 4. Steering mechanism; 41. Steering motor; 42. Steering worm; 43. Steering turbine. DETAILED DESCRIPTION

[0057] In the following, various embodiments of the present disclosure will be described more fully. The present disclosure may have various embodiments, and adjustments and changes may be made therein. However, it should be understood that there is no intention to limit the various embodiments of the present disclosure to the specific embodiments disclosed herein, but rather the present disclosure should be understood to cover all adjustments, equivalents and / or alternatives that fall within the spirit and scope of the various embodiments of the present disclosure.

[0058] Hereinafter, the terms "include" or "may include" that may be used in various embodiments of the present disclosure indicate the presence of disclosed functions, operations, or elements, and do not limit the addition of one or more functions, operations, or elements. In addition, as used in various embodiments of the present disclosure, the terms "include", "have", and their cognates are intended only to indicate specific features, numbers, steps, operations, elements, components, or a combination of the foregoing, and should not be understood as first excluding the presence of one or more other features, numbers, steps, operations, elements, components, or a combination of the foregoing or the possibility of adding one or more features, numbers, steps, operations, elements, components, or a combination of the foregoing.

[0059] In various embodiments of the present disclosure, the expression "or" or "at least one of A or / and B" includes any combination or all combinations of the words listed at the same time. For example, the expression "A or B" or "at least one of A or / and B" may include A, may include B, or may include both A and B.

[0060] The expressions (such as "first", "second", etc.) used in the various embodiments of the present disclosure may modify the various constituent elements in the various embodiments, but may not limit the corresponding constituent elements. For example, the above expressions do not limit the order and / or importance of the elements. The above expressions are only used for the purpose of distinguishing one element from other elements. For example, the first user device and the second user device indicate different user devices, although both are user devices. For example, without departing from the scope of the various embodiments of the present disclosure, the first element may be referred to as the second element, and similarly, the second element may also be referred to as the first element.

[0061] It should be noted that if it is described that one component element is “connected” to another component element, the first component element may be directly connected to the second component element, and a third component element may be “connected” between the first component element and the second component element. Conversely, when one component element is “directly connected” to another component element, it can be understood that there is no third component element between the first component element and the second component element.

[0062] The term “user” used in various embodiments of the present disclosure may indicate a person using an electronic device or a device (eg, an artificial intelligence electronic device) using the electronic device.

[0063] The terms used in the various embodiments of the present disclosure are only used for the purpose of describing specific embodiments and are not intended to limit the various embodiments of the present disclosure. As used herein, the singular form is intended to also include the plural form, unless the context clearly indicates otherwise. Unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meaning as the meanings commonly understood by ordinary technicians in the field to which the various embodiments of the present disclosure belong. The terms (such as the terms defined in the generally used dictionary) will be interpreted as having the same meaning as the contextual meaning in the relevant technical field and will not be interpreted as having an idealized meaning or an overly formal meaning, unless clearly defined in the various embodiments of the present disclosure.

[0064] Embodiment 1:

[0065] like Figures 1 to 8 As shown, this embodiment provides a double-sided sputtering device for a seed layer for manufacturing a heat sink, comprising: a clamping device;

[0066] Each clamping device at least comprises: a film carrier plate 011, a film support mask 012 and a locking rod 014; the film carrier plate 011 is provided with a plurality of film support slots 0111, one side of the film support slots 0111 is opened to extend to the side wall of the film carrier plate 011; film support steps 0112 are provided at the bottom edges of both sides of the opening of the film support slots 0111, for supporting the film support mask 012; the film support mask 012 is arranged in the film carrier slots 0111; the opposite sides of the film support mask 012 are provided with external edges 0121 matched with the film support steps 0112; the film support mask 012 is provided with a film covering hole 0122 for accommodating a substrate, and a mask grid 0123 for supporting the substrate is provided at the bottom of the film covering hole 0122;

[0067] In the clamping device: every two support masks 012 are buckled together to clamp and cover the substrate; every two film carrier plates 011 are buckled together to constrain the two support masks 012 to maintain the buckled state;

[0068] The film carrying plates 011 that are interlocked with each other are hinged via a shaft 013 . The shaft 013 is located on a side of the film carrying plate 011 away from the opening of the film carrying slot 0111 . The locking rod 014 is located on a side of the film carrying plate 011 away from the shaft 013 .

[0069] The support mask 012 is symmetrically arranged on the film carrier plate 011 along the rotation axis 013. The film carrier plate 011 can be quickly opened or buckled by rotating the film carrier plate 011, so that the support masks 012 at symmetrical positions on the film carrier plates 011 on both sides of the rotation axis 013 can also be opened or buckled accordingly; at the same time, at the open and closed ends of the two buckled film carrier plates 011, the film carrier plates 011 are kept closed by adding locking rods 014, which has the beneficial effect of facilitating the placement and removal of the heat sink substrate.

[0070] When carrying out mass production, the number of heat sink substrates for single sputtering can be increased by only increasing the number of film-carrying slots 0111 on the single film-carrying plate 011 and / or increasing the number of coating holes 0122 on the support mask 012; at the same time, the fixing or loosening of all heat sink substrates can be completed by only installing or removing a locking rod 014, thereby greatly improving the sputtering efficiency.

[0071] Furthermore, a clamping groove 0141 is provided on the side wall of the locking rod 014, and the clamping groove 0141 is used to clamp the film carrier plates 011 that are interlocked with each other and away from the side of the rotating shaft 013;

[0072] Among them, a plurality of mutually parallel guide grooves 0113 are provided at the matching position between the surface of the film carrier plate 011 and the clamping groove 0141, and the extension direction of the guide groove 0113 intersects with the axial direction of the rotating shaft 013; guide protrusions 0142 matching with the guide grooves 0113 are provided on the opposite side walls of the clamping groove 0141.

[0073] If the joint between the clamping groove 0141 and the film carrier plate 011 is a smooth surface, when the staff holds the locking rod 014 and wants to lift the entire clamping device, the locking rod 014 is likely to fall off; therefore, in this embodiment, a guide groove 0113 is specially added to cooperate with the guide protrusion 0142, which can enhance the binding force and avoid loosening; at the same time, the guide groove 0113 is tilted, and when the staff habitually holds the locking rod 014 to lift the clamping device, the tilted guide groove 0113 will provide higher friction, further avoiding loosening.

[0074] Furthermore, the bottom edges of the two sides of the opening of the film carrier slot 0111 are provided with film carrier steps, and the outer edges of the two opposite sides of the support mask have interference fit or snap fit. Through the interference fit of the two, when the locking rod 014 is removed and the film carrier plate 011 is opened, the buckled support mask 012 can be naturally driven to open, further simplifying the steps of removing the heat sink substrate and improving the usability of the device.

[0075] Embodiment 2:

[0076] like Figures 9 to 12 As shown, this embodiment is implemented on the basis of embodiment 1, and further comprises a coating cabin 1, one side of the coating cabin 1 is open, and a door is hingedly connected to the open side of the coating cabin 1; a lifting hole 11 is provided at the center of the bottom plate of the coating cabin 1, and a lifting sleeve 12 is provided in the lifting hole 11;

[0077] A fixing frame 13 for fixing the clip device is provided on the top of the lifting sleeve 12;

[0078] An observation cabin 2 is embedded in the cabin body of the coating cabin 1, and a monitoring camera 21 for monitoring the sputtering situation in the coating cabin 1 is arranged in the observation cabin 2;

[0079] A lifting mechanism 3 and a steering mechanism 4 connected to the lifting sleeve 12 are provided below the coating chamber 1 to respectively drive the lifting sleeve 12 to reciprocate and rotate along its own central axis.

[0080] An observation cabin 2 with a monitoring camera 21 is embedded in the body of the coating cabin 1, so that the sputtering situation in the coating cabin 1 can be timely understood through the observation cabin 2, and the heat sink substrate in the coating cabin 1 can be intelligently identified by an external host through the monitoring camera 21 to detect whether the coating result is uniform and whether the quality is up to standard; if the heat sink substrate has uneven coating, the host can control the lifting mechanism 3 and the steering mechanism 4 to adjust the height, rotation angle and rotation speed of the fixed frame 13 for installing the clamping device, so as to adjust the height, angle and rotation speed of the heat sink substrate; improve the uniformity of sputtering coating through adjustment actions such as position angle and rotation speed, so as to avoid quality differences in the heat sink substrate at some positions.

[0081] The rest of Example 2 is the same as Example 1, so it will not be repeated here.

[0082] Embodiment 3:

[0083] like Fig. 9 and Fig.10 As shown, this embodiment is implemented on the basis of embodiment 2, the observation cabin 2 is cylindrical, and the observation cabin 2 includes an outer cabin body 22, a rotating wall 23, and an inner cabin body 24 which are coaxially sleeved in sequence from outside to inside;

[0084] The outer cabin body 22 is integrally formed with the coating cabin 1. A first window 221 is provided on one side of the outer cabin body 22 close to the interior of the coating cabin 1. A monitoring camera 21 is installed at the center of the inner bottom surface of the outer cabin body 22.

[0085] The inner cabin 24 is covered on the outside of the surveillance camera 21, the bottom opening of the inner cabin 24 is sealed and connected to the inner bottom surface of the outer cabin 22, a second window 241 made of a transparent material is provided at the side wall of the inner cabin 24 corresponding to the first window 221, and the top surface of the inner cabin 24 extends circumferentially to be sealed and connected to the top opening of the outer cabin 22;

[0086] The rotating wall 23 is arranged between the inner cabin body 24 and the outer cabin body 22. A plurality of movable windows 231 are evenly distributed along the circumference of the rotating wall 23. A transparent window sheet 232 is detachably installed in the movable window 231. The rotating wall 23 is rotatably connected to the outer cabin body 22. The rotating wall 23 rotates to switch different movable windows 231 between the first window 221 and the second window 241.

[0087] Furthermore, a plurality of film changing ports 233 are provided at the top end of the rotating wall 23 . The film changing ports 233 are connected to the top wall of the movable window 231 , so that the transparent window sheet 232 in the movable window 231 can be replaced through the film changing ports 233 .

[0088] Furthermore, the top end and the bottom end of the rotating wall 23 are rotatably connected to the parts extending circumferentially from the bottom surface of the outer cabin body 22 and the top surface of the inner cabin body 24 respectively.

[0089] Furthermore, it also includes a driving device 25, which is used to drive the rotating wall 23 to rotate along its central axis to switch different active windows 231 between the first window 221 and the second window 241;

[0090] An outer gear 234 is sleeved on the outer periphery of the rotating wall 23 , and a transmission hole 222 is formed through the outer housing 22 corresponding to the outer gear 234 . The transmission hole 222 is used for the power output end of the driving device 25 to extend into and mesh with the outer gear 234 .

[0091] The outer cabin body 22 is integrally formed with the coating cabin 1, and the monitoring camera 21 is installed on the bottom surface of the outer cabin body 22, which is convenient for wiring inside the bottom surface of the outer cabin body 22 and inside the coating cabin 1 to connect the monitoring camera 21 to the host; the first cabin on the outer cabin body 22 is a through hole, and the inner cabin body 24 with a transparent second window 241 covers the outside of the monitoring camera 21 to play a protective role; and the rotating wall 23 is set to prevent the observation window from covering the second window 241 by the scattered metal atoms when sputtering coating occurs in the coating cabin 1, thereby hindering the normal operation of the monitoring camera 21; therefore, a plurality of movable windows 231 are set on the rotating wall 23, and when the first movable window 231 is contaminated and covered by the scattered metal atoms, the rotating wall 23 can be rotated to switch another clean movable window 231 between the first window 221 and the second window 241 to continue to play a protective role; and so on, the number of movable windows 231 can be set as appropriate according to actual conditions.

[0092] Meanwhile, a replacement opening 233 for replacing the transparent window 232 is provided at the top of the rotating wall 23 , so that the transparent window 232 contaminated by the scattered technical atoms can be replaced from the movable window 231 after several sputtering coatings are completed.

[0093] The rest of Example 3 is the same as Example 2, so it will not be repeated here.

[0094] Embodiment 4:

[0095] like Fig. 9 and Fig.11 As shown, this embodiment is implemented on the basis of embodiment 2 or 3, the lifting mechanism 3 includes a lifting motor 31, a lifting screw rod 32 and a lifting nut 33 which are sequentially connected in transmission, and the bottom end of the lifting sleeve 12 is rotatably connected to the lifting nut 33;

[0096] The steering mechanism 4 includes a steering motor 41, a steering worm 42, and a steering turbine 43 which are sequentially connected in transmission. The inner ring of the steering turbine 43 cooperates with the outer wall of the lifting sleeve 12 to drive the lifting sleeve 12 to rotate around its own central axis.

[0097] The height of the fixed frame 13 is adjusted by the lifting mechanism 3, and then the height of the heat sink substrate is adjusted; the fixed frame 13 is driven to rotate by the steering mechanism 4 to adjust the angle and speed of the heat sink substrate; the combination of the two can work together on the lifting sleeve 12 to achieve full adjustment of the fixed frame 13. It can effectively avoid the occurrence of dead angles during the sputtering process, which will lead to poor final coating quality of some heat sink substrates.

[0098] The rest of Example 4 is the same as Example 2 or 3, so it will not be repeated here.

[0099] Embodiment 5:

[0100] like Fig.12 As shown, this embodiment is implemented on the basis of any one of Embodiments 2 to 4, and the fixed frame 13 includes a bottom crossbar 131, a top crossbar 133 and a side vertical bar 132;

[0101] The bottom cross bar 131 is fixedly connected to the top of the lifting sleeve 12, and a side vertical bar 132 is provided at each end of the bottom cross bar 131, and the two ends of the top cross bar 133 are slidably connected to a side vertical bar 132 respectively;

[0102] Among them, a first limiting groove 1311 is provided on the bottom cross bar 131, and a second limiting groove 1331 is provided on the top cross bar 133. The first limiting groove 1311 is used to cooperate with one side of the rotating shaft 013 of the clip device, and the second limiting groove 1331 is used to cooperate with the locking rod 014 in the clip device.

[0103] The clamping device is clamped by the first limiting groove 1311 and the second limiting groove 1331, which has a simple and practical structure and is quick and convenient to operate; the top cross bar 133 is slidably connected with the side vertical bar 132, and the clamping device can be fixed under the action of gravity and the second limiting groove 1331, avoiding the redundant clamping structure that causes complex structure and complicated operation.

[0104] The rest of Example 5 is the same as Examples 2 to 4, so it will not be repeated here.

[0105] Those skilled in the art will appreciate that the accompanying drawings are merely schematic diagrams of a preferred implementation scenario, and the modules or processes in the accompanying drawings are not necessarily required for implementing the present invention.

[0106] Those skilled in the art will appreciate that the modules in the device in the implementation scenario can be distributed in the device in the implementation scenario according to the implementation scenario description, or can be changed accordingly and located in one or more devices different from the implementation scenario. The modules in the above implementation scenario can be combined into one module, or can be further split into multiple sub-modules.

[0107] The above serial numbers of the present invention are only for description and do not represent the advantages or disadvantages of the implementation scenarios.

[0108] The above disclosure is only a few specific implementation scenarios of the present invention, but the present invention is not limited thereto, and any changes that can be conceived by those skilled in the art should fall within the protection scope of the present invention.

Claims

1. A double-sided sputtering device for a seed layer for manufacturing a heat sink, characterized in that: include: Clip device; Each of the clamping devices at least comprises: a film carrier plate, a film support mask and a locking rod; the film carrier plate is provided with a plurality of film carrier slots, one side opening of the film carrier slots extending to the side wall of the film carrier plate; film carrier steps are provided at the bottom edges on both sides of the film carrier slot openings for supporting the film support mask; the film support mask is arranged in the film carrier slot; the opposite sides of the film support mask have external edges matching the film carrier steps; the film support mask is provided with a film covering hole for accommodating a substrate, and a mask grid for supporting the substrate is provided at the bottom of the film covering hole; In the clamping device: every two of the support masks are buckled together to clamp and cover the substrate; every two of the film carrier plates are buckled together to constrain the two support masks to maintain a buckled state; The film-carrying plates that are interlocked are hinged via a rotating shaft, the rotating shaft is located on a side of the film-carrying plate away from the opening of the film-carrying slot, and the locking rod is located on a side of the film-carrying plate away from the rotating shaft so that the film-carrying plates that are interlocked are kept interlocked; The side wall of the locking rod is provided with a clamping groove, and the clamping groove is used to clamp the film-carrying plates that are interlocked with each other and are away from the rotating shaft; Wherein, a plurality of guide grooves are provided at the position where the surface of the film carrier plate and the clamping groove cooperate, and the angle between the extending direction of the guide groove and the axial direction of the rotating shaft is an acute angle; guide protrusions cooperating with the guide grooves are provided on the opposite side walls of the clamping groove; Also includes coating cabin; A lifting hole is provided at the center of the bottom plate of the coating cabin, and a lifting sleeve is provided in the lifting hole; A fixing frame for fixing the clip device is provided on the top of the lifting sleeve; An observation cabin is embedded in the cabin body of the coating cabin, and a monitoring camera for monitoring the sputtering situation in the coating cabin is arranged in the observation cabin; A lifting mechanism and a steering mechanism connected to the lifting sleeve are provided below the coating cabin to respectively drive the lifting sleeve to reciprocate and rotate along its own central axis.

2. The seed layer double-sided sputtering device for manufacturing a heat sink according to claim 1, characterized in that: The bottom edges of the two sides of the opening of the film-carrying through groove are provided with film-carrying steps, and the outer edges of the two opposite sides of the supporting mask are provided with interference fit or snap fit.

3. The seed layer double-sided sputtering device for manufacturing a heat sink according to claim 1, characterized in that: The observation cabin comprises an outer cabin body, a rotating wall and an inner cabin body which are sequentially sleeved from the outside to the inside; The outer cabin body is integrally formed with the coating cabin, a first window is provided on a side of the outer cabin body close to the interior of the coating cabin, and the monitoring camera is installed at the center of the inner bottom surface of the outer cabin body; The inner cabin cover is arranged outside the surveillance camera, the bottom opening of the inner cabin is sealed and connected to the inner bottom surface of the outer cabin, the side wall of the inner cabin is provided with a second window made of a transparent material at a position corresponding to the first window, and the top surface of the inner cabin extends circumferentially to be sealed and connected to the top opening of the outer cabin; The rotating wall is arranged between the inner cabin body and the outer cabin body, and a plurality of movable windows are evenly distributed along the circumference of the rotating wall, and transparent window sheets are detachably installed in the movable windows; the rotating wall is rotatably connected to the outer cabin body, and the rotating wall rotates to switch different movable windows between the first window and the second window.

4. The seed layer double-sided sputtering device for manufacturing a heat sink according to claim 3, characterized in that: The top port of the rotating wall is provided with a plurality of window changing ports, and the window changing ports are communicated with the top wall of the movable window, so that the transparent window in the movable window can be replaced through the window changing ports.

5. The seed layer double-sided sputtering device for manufacturing a heat sink according to claim 3, characterized in that: The top end and the bottom end of the rotating wall are rotatably connected to the bottom surface of the outer cabin body and the top surface of the inner cabin body respectively, which extend circumferentially.

6. The seed layer double-sided sputtering device for manufacturing a heat sink according to claim 3, characterized in that: It also includes a driving device, the driving device is used to drive the rotating wall to rotate along its own central axis to switch different movable windows between the first window and the second window; An external gear is sleeved on the outer periphery of the rotating wall, and a transmission hole is penetrated through the outer cabin body corresponding to the external gear, and the transmission hole is used for the power output end of the driving device to extend into and mesh with the external gear.

7. The double-sided sputtering device for a seed layer for manufacturing a heat sink according to any one of claims 1 to 6, characterized in that: The lifting mechanism comprises a lifting motor, a lifting screw rod and a lifting nut which are sequentially connected in transmission, and the bottom end of the lifting sleeve is rotatably connected to the lifting nut; The steering mechanism comprises a steering motor, a steering worm and a steering turbine which are sequentially connected in transmission. The inner ring of the steering turbine cooperates with the outer wall of the lifting sleeve to drive the lifting sleeve to rotate around its own central axis.

8. The double-sided sputtering device for a seed layer for manufacturing a heat sink according to any one of claims 1 to 6, characterized in that: The fixed frame includes a bottom cross bar, a top cross bar and side vertical bars; The bottom cross bar is fixedly connected to the top of the lifting sleeve, and two ends of the bottom cross bar are respectively provided with a side vertical bar, and two ends of the top cross bar are respectively slidably connected to one side vertical bar; Among them, the bottom cross bar is provided with a first limiting groove, and the top cross bar is provided with a second limiting groove, the first limiting groove is used to cooperate with the side of the rotating shaft of the clip device, and the second limiting groove is used to cooperate with the locking rod in the clip device.

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