Piezoelectric micropump and electronic equipment

Abstract

The invention discloses a piezoelectric micropump and electronic equipment. The piezoelectric micropump comprises a driving assembly and a pump body assembly, the pump body assembly is connected with the driving assembly, and the driving assembly drives the pump body assembly to move so as to achieve suction and discharge of fluid; the driving assembly comprises a piezoelectric plate and a deformation plate, the piezoelectric plate and the deformation plate are connected in a stacked mode, and one of the piezoelectric plate and the deformation plate is connected with the pump body assembly. The piezoelectric plate comprises a body part, a first electrode area and a second electrode area, the first electrode area is arranged on the first side face of the body part, and the second electrode area is arranged on the second side face of the body part; and the material of the body part is the same as that of the deformation sheet.

Description

Technical Field

[0001] The present application relates to the technical field of electronic products, and more specifically, to a piezoelectric micro pump and electronic equipment. Background Art

[0002] With the development of science and technology and the improvement of living standards, various electronic products have gradually entered thousands of households and become people's daily necessities; piezoelectric micropumps are installed in many electronic products, such as smart phones, laptops, home appliances, etc. Piezoelectric micropumps can effectively cool down devices because they drive liquid circulation.

[0003] However, existing piezoelectric micropumps generally have the following problems: 1) insufficient driving capability; 2) high processing precision requirements and manufacturing difficulties, especially when it comes to the bonding of metal and polymer films, the manufacturing process requirements are very high; 3) insufficient valve reliability and long-term working performance.

[0004] In view of this, a new technical solution needs to be proposed to solve at least one of the above technical problems. Summary of the invention

[0005] An object of the present application is to provide a new technical solution for piezoelectric micropumps and electronic devices.

[0006] According to a first aspect of the present application, a piezoelectric micropump is provided, the piezoelectric micropump comprising:

[0007] Drive components;

[0008] A pump body assembly, wherein the pump body assembly is connected to the drive assembly, and the drive assembly drives the pump body assembly to move so as to achieve the suction and discharge of the fluid;

[0009] The driving assembly includes a piezoelectric sheet and a deformation sheet, the piezoelectric sheet and the deformation sheet are stacked and connected, and one of the piezoelectric sheet and the deformation sheet is connected to the pump body assembly;

[0010] The piezoelectric sheet includes a main body, a first electrode area and a second electrode area. The first electrode area is arranged on a first side surface of the main body, and the second electrode area is arranged on a second side surface of the main body. The material of the main body is the same as that of the deformable sheet.

[0011] Optionally, an area of ​​the first electrode region is smaller than an area of ​​the second electrode region.

[0012] Optionally, a ratio of an area of ​​the first electrode region to an area of ​​the second electrode region is greater than or equal to 0.5.

[0013] Optionally, the shape of the first electrode region is the same as the shape of the second electrode region.

[0014] Optionally, the thickness of the piezoelectric sheet is greater than the thickness of the deformable sheet.

[0015] Optionally, the ratio of the thickness of the piezoelectric sheet to the thickness of the deformable sheet is less than or equal to 2.

[0016] Optionally, the pump body assembly includes a valve plate, and the valve plate includes a valve seat, a valve sheet and a cantilever beam; two valve sheets are arranged at intervals, and any valve sheet is connected to the valve seat through at least two cantilever beams;

[0017] The cantilever beam has a first end, a second end and a cantilever portion, the first end is connected to the valve plate, the second end is connected to the valve seat, and the cantilever portion is located between the first end and the second end.

[0018] Optionally, any one of the valve plates is connected to the valve seat via at least three cantilever beams.

[0019] Optionally, the curvature of the inner side of the first end portion is greater than the curvature of the outer side thereof; and the width of the first end portion is 1.2 to 2 times the width of the cantilever portion.

[0020] Optionally, the curvature of the inner side of the second end portion is smaller than the curvature of the outer side thereof; and the width of the second end portion is 1.2 to 2 times the width of the cantilever portion.

[0021] According to a second aspect of the present application, an electronic device is provided, wherein the electronic device comprises the piezoelectric micropump as described in the first aspect.

[0022] For the piezoelectric micropump provided in the embodiment of the present application, since the material of the main body of the piezoelectric sheet is the same as that of the deformation sheet, it is beneficial to simplify the structure of the drive component, reduce the manufacturing process requirements and processing accuracy requirements of the drive component, reduce the processing difficulty of the drive component, simplify the manufacturing process flow, and thus reduce the processing cost.

[0023] Other features and advantages of the present application will become apparent from the following detailed description of exemplary embodiments of the present application with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the application and, together with the description, serve to explain the principles of the application.

[0025] Figure 1 is a schematic diagram of the overall structure of a piezoelectric micropump according to an embodiment of the present application;

[0026] Figure 2 is a schematic diagram of the exploded structure of a piezoelectric micropump according to an embodiment of the present application;

[0027] Figure 3 is a schematic structural diagram of one side of a piezoelectric sheet in a piezoelectric micropump according to an embodiment of the present application;

[0028] Figure 4 It is a schematic structural diagram of a valve plate in a piezoelectric micropump according to an embodiment of the present application.

[0029] Description of reference numerals:

[0030] 1. Piezoelectric micro pump; 11. Piezoelectric sheet; 110. Main body; 111. First electrode area; 112. Second electrode area; 12. Deformable sheet; 13. Valve plate; 131. Valve seat; 132. Valve sheet; 133. Cantilever beam; 1331. First end; 1332. Second end; 1330. Cantilever part; 14. Bottom plate; 141. First connecting hole; 142. Second connecting hole; 15. First pressing plate; 151. Third connecting hole; 152. Fourth connecting hole; 16. Second pressing plate; 161. Fifth connecting hole; 162. Sixth connecting hole; 17. Glue layer; 18. Coating; 19. Cavity plate; 190. Cavity hole. DETAILED DESCRIPTION

[0031] Various exemplary embodiments of the present application will now be described in detail with reference to the accompanying drawings. It should be noted that unless otherwise specifically stated, the relative arrangement of components and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application.

[0032] The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the present application, its application, or uses.

[0033] Technologies, methods, and equipment known to ordinary technicians in the relevant art may not be discussed in detail, but where appropriate, the technologies, methods, and equipment should be considered as part of the specification.

[0034] In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not limiting. Therefore, other examples of the exemplary embodiments may have different values.

[0035] It should be noted that like reference numerals and letters refer to similar items in the following figures, and therefore, once an item is defined in one figure, it need not be further discussed in subsequent figures.

[0036] Reference Figure 1-Figure 4As shown, according to one embodiment of the present application, a piezoelectric micropump 1 is provided. The piezoelectric micropump 1 comprises a driving component and a pump body component, wherein the pump body component is connected to the driving component, and the driving component drives the pump body component to move to achieve fluid suction and discharge;

[0037] The driving component includes a piezoelectric sheet 11 and a deformable sheet 12, wherein the piezoelectric sheet 11 and the deformable sheet 12 are stacked and connected, and one of the piezoelectric sheet 11 and the deformable sheet 12 is connected to the pump body component;

[0038] The piezoelectric sheet 11 includes a main body 110 , a first electrode region 111 and a second electrode region 112 . The first electrode region 111 is disposed on a first side surface of the main body 110 , and the second electrode region 112 is disposed on a second side surface of the main body 110 . The material of the main body 110 is the same as that of the deformable sheet 12 .

[0039] In the piezoelectric micropump 1 provided in the embodiment of the present application, the driving component includes a piezoelectric sheet 11 and a deformable sheet 12, wherein the piezoelectric sheet 11 includes a main body 110 and a first electrode area 111 and a second electrode area 112 respectively arranged on both sides of the main body 110; the material of the main body 110 is the same as that of the deformable sheet 12. For example, the main body 110 and the deformable sheet 12 are both made of piezoelectric ceramics; for example, the piezoelectric sheet 11 and the deformable sheet 12 are formed into an integrated structure by a sintering process. Among them, the main body 110 as a piezoelectric sheet is coated with a metal electrode on its surface, specifically, the main body 110 has a first side surface and a second side surface arranged opposite to each other, wherein the first side surface is coated with a first electrode area 111, and the second side surface is coated with a second electrode area 112; the first electrode area 111 and the second electrode area 112 can be, for example, thin-layer silver electrodes.

[0040] In the piezoelectric micropump 1 provided in the embodiment of the present application, when a voltage is applied to the piezoelectric sheet 11, the piezoelectric sheet 11 will deform under the action of the electric field, and this deformation will drive the deformable sheet 12 attached thereto to bend or stretch together, thereby generating a driving force; and the deformations generated by the piezoelectric sheet 11 and the deformable sheet 12 are not equal, so that the driving force of the driving component is stronger. When the driving component including the piezoelectric sheet 11 and the deformable sheet 12 is bent forward, the volume of the pump body component increases, and the pressure of the fluid in the cavity of the pump body component decreases, and the fluid is sucked into the cavity of the pump body component; when the driving component including the piezoelectric sheet 11 and the deformable sheet 12 is bent in the reverse direction, the volume of the pump body component decreases, and the pressure of the fluid in the cavity of the pump body component increases, and the fluid in the cavity of the pump body component is squeezed out. By continuously applying a voltage signal to the piezoelectric sheet 11, the driving component including the piezoelectric sheet 11 and the deformable sheet 12 will continuously repeat the above bending and stretching actions, thereby realizing continuous delivery of the fluid.

[0041] For the piezoelectric micro pump 1 provided in the embodiment of the present application, since the material of the main body 110 of the piezoelectric sheet 11 is the same as that of the deformable sheet 12; for example, the main body 110 of the piezoelectric sheet 11 and the deformable sheet 12 are both made of piezoelectric ceramics; therefore, it is beneficial to simplify the structure of the drive assembly, reduce the manufacturing process requirements and processing accuracy requirements of the drive assembly, reduce the difficulty of processing and manufacturing the drive assembly, simplify the manufacturing process flow, and thus reduce the processing cost. In addition, the overall height of the drive assembly is reduced, which is more suitable for thin consumer electronic devices. For example, for mobile phone micro pumps, the total thickness of the drive assembly is 0.1mm. In addition, the piezoelectric sheet 11 and the deformable sheet 12 of the same material are connected to form the drive assembly, which is beneficial to improve the reliability and performance of the drive assembly. For example, when the main body 110 of the piezoelectric sheet 11 and the deformable sheet 12 are both made of piezoelectric ceramics, the charge transfer and polarization between the piezoelectric sheet 11 and the deformable sheet 12 can be enhanced, thereby improving the piezoelectric effect.

[0042] Reference Figure 1 , Figure 2 As shown, in one embodiment, the area of ​​the first electrode region 111 is smaller than the area of ​​the second electrode region 112 .

[0043] In this specific example, the area of ​​the first electrode region 111 is not equal to the area of ​​the second electrode region 112, and the piezoelectric film 11 has natural asymmetry, which enables the piezoelectric film 11 to have an initial internal driving force, thereby making it easier to stimulate its bending shape and optimize the piezoelectric performance of the piezoelectric film 11, thereby maximizing the function of the driving component.

[0044] Reference Figure 1 , Figure 2 As shown, in one embodiment, the ratio of the area of ​​the first electrode region 111 to the area of ​​the second electrode region 112 is greater than or equal to 0.5.

[0045] If the ratio of the area of ​​the first electrode region 111 to the area of ​​the second electrode region 112 is less than 0.5, the difference between the two areas is too large, which is not conducive to the deformation of the piezoelectric film 11 when it is powered on. Therefore, in this specific example, the ratio of the area of ​​the first electrode region 111 to the area of ​​the second electrode region 112 is in the range of 0.5 to 1; further, the ratio of the area of ​​the first electrode region 111 to the area of ​​the second electrode region 112 is preferably about 0.8.

[0046] In one embodiment, the shape of the first electrode region 111 is the same as the shape of the second electrode region 112 .

[0047] In this specific example, the shape of the first electrode area 111 is consistent with the shape of the second electrode area 112, for example, the first electrode area 111 and the second electrode area 112 are both circular, or the first electrode area 111 and the second electrode area 112 are both square; in this way, the piezoelectric film 11 has better consistency and less performance loss.

[0048] Reference Figure 1 As shown, in one embodiment, the thickness of the piezoelectric sheet 11 is greater than the thickness of the deformation sheet 12 .

[0049] In this specific example, the thickness of the piezoelectric sheet 11 is greater than the thickness of the deformable sheet 12 , which is more conducive to the piezoelectric sheet 11 driving the deformable sheet 12 to bend or stretch together to deform.

[0050] Reference Figure 1 As shown, in one embodiment, the ratio of the thickness of the piezoelectric sheet 11 to the thickness of the deformable sheet 12 is less than or equal to 2.

[0051] In this specific example, the thickness of the piezoelectric sheet 11 is within 2 times the thickness of the deformable sheet 12, for example, about 1.5 times. This enables the piezoelectric sheet 11 and the deformable sheet 12 to bend back and forth to a greater extent to generate a driving force to drive the fluid in the cavity of the pump assembly to circulate.

[0052] Reference Figure 2 , Figure 4 As shown, in one embodiment, the pump body assembly includes a valve plate 13, and the valve plate 13 includes a valve seat 131, a valve sheet 132 and a cantilever beam 133; two valve sheets 132 are arranged at intervals, and any valve sheet 132 is connected to the valve seat 131 through at least two cantilever beams 133;

[0053] The cantilever beam 133 has a first end 1331 , a second end 1332 and a cantilever portion 1330 , wherein the first end 1331 is connected to the valve plate 132 , the second end 1332 is connected to the valve seat 131 , and the cantilever portion 1330 is located between the first end 1331 and the second end 1332 .

[0054] In this specific example, when the driving assembly including the piezoelectric sheet 11 and the deformation sheet 12 bends forward, the volume of the pump body assembly increases and the pressure of the fluid in the cavity of the pump body assembly decreases. At this time, the inlet valve corresponding to one of the valve sheets 132 (hereinafter referred to as the first valve sheet 132) opens, and the fluid is sucked into the cavity of the pump body assembly; when the driving assembly including the piezoelectric sheet 11 and the deformation sheet 12 bends reversely, the volume of the pump body assembly decreases and the pressure of the fluid in the cavity of the pump body assembly increases. At this time, the outlet valve corresponding to the other valve sheet 132 (hereinafter referred to as the second valve sheet 132) opens, and the fluid in the cavity of the pump body assembly is squeezed out.

[0055] Further, refer to Figure 2 As shown, the pump body assembly also includes a bottom plate 14, a first pressure plate 15 and a second pressure plate 16; wherein the bottom plate 14, the first pressure plate 15, the valve plate 13 and the second pressure plate 16 are stacked and gradually approach the drive assembly. The bottom plate 14 is provided with a first connecting hole 141 and a second connecting hole 142 to connect the external fluid circulation channel; the first pressure plate 15 is provided with a third connecting hole 151 and a fourth connecting hole 152, wherein the third connecting hole 151 is provided corresponding to the first valve plate 132, the fourth connecting hole 152 is provided corresponding to the second valve plate 132, and the aperture of the third connecting hole 151 is smaller than the aperture of the fourth connecting hole 152; the second pressure plate 16 is provided with a fifth connecting hole 161 and a sixth connecting hole 162, wherein the fifth connecting hole 161 is provided corresponding to the first valve plate 132, the sixth connecting hole 162 is provided corresponding to the second valve plate 132, and the aperture of the fifth connecting hole 161 is larger than the aperture of the sixth connecting hole 162.

[0056] In addition, refer to Figure 2 As shown, the piezoelectric micro pump 1 also includes a connecting component, which is arranged between the driving component and the pump body component; one of the piezoelectric sheet 11 and the deformation sheet 12 is connected to the pump body component through the connecting component. The connecting component includes a glue layer 17, a coating 18 and a cavity plate 19, which are stacked and gradually away from the driving component; wherein the cavity plate 19 is provided with a cavity hole 190 to provide a vibration space for the driving component; the coating 18 can prevent the fluid in the cavity of the pump body component from contacting the driving component.

[0057] Reference Figure 4 As shown, in one embodiment, any valve plate 132 is connected to the valve seat 131 via at least three cantilever beams 133 .

[0058] In this specific example, each valve disc 132 is connected to the valve seat 131 via at least three cantilever beams 133 , so that a stable valve structure can be formed to prevent the valve disc 132 from being eccentric and unbalanced.

[0059] Reference Figure 4As shown, in one embodiment, the curvature of the inner side of the first end portion 1331 is greater than the curvature of the outer side thereof; the width of the first end portion 1331 is 1.2 to 2 times the width of the cantilever portion 1330 .

[0060] And, refer to Figure 4 As shown, in one embodiment, the curvature of the inner side of the second end portion 1332 is smaller than the curvature of the outer side thereof; the width of the second end portion 1332 is 1.2 to 2 times the width of the cantilever portion 1330 .

[0061] Among them, the inner side of the first end 1331 is the side of the first end 1331 close to the valve plate 132, and the outer side of the first end 1331 is the side of the first end 1331 away from the valve plate 132; the inner side of the second end 1332 is the side of the second end 1332 close to the valve plate 132, and the outer side of the second end 1332 is the side of the second end 1332 away from the valve plate 132.

[0062] In this specific example, the starting end (first end 1331) of the valve is set to have a large curvature on the inside and a small curvature on the outside; the ending end (second end 1332) of the valve is set to have a small curvature on the inside and a large curvature on the outside; and the width of the first end 1331 and the width of the second end 1332 are both 1.2 to 2 times the width of the cantilever portion 1330. The above design helps to reduce the stress gradient and stress amplitude at the starting end and the ending end, greatly improving the reliability and fatigue resistance of the valve, thereby ensuring the pump performance of the piezoelectric micropump and the reliability of long-term operation.

[0063] According to another embodiment of the present application, an electronic device is provided, wherein the electronic device includes the piezoelectric micropump 1 as described above.

[0064] The above embodiments focus on the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. Considering the simplicity of the text, they will not be repeated here.

[0065] Although some specific embodiments of the present application have been described in detail by way of example, it should be understood by those skilled in the art that the above examples are only for illustration, not for limiting the scope of the present application. It should be understood by those skilled in the art that the above embodiments may be modified without departing from the scope and spirit of the present application. The scope of the present application is defined by the appended claims.

Claims

1. A piezoelectric micropump, characterized in that: The piezoelectric micropump comprises: Drive components; A pump body assembly, wherein the pump body assembly is connected to the drive assembly, and the drive assembly drives the pump body assembly to move so as to achieve the suction and discharge of the fluid; The driving component comprises a piezoelectric sheet (11) and a deformation sheet (12), wherein the piezoelectric sheet (11) and the deformation sheet (12) are stacked and connected, and one of the piezoelectric sheet (11) and the deformation sheet (12) is connected to the pump body component; The piezoelectric sheet (11) comprises a main body (110), a first electrode area (111) and a second electrode area (112); the first electrode area (111) is arranged on a first side surface of the main body (110), and the second electrode area (112) is arranged on a second side surface of the main body (110); the material of the main body (110) is the same as that of the deformable sheet (12).

2. The piezoelectric micropump according to claim 1, characterized in that: The area of ​​the first electrode region (111) is smaller than the area of ​​the second electrode region (112).

3. The piezoelectric micropump according to claim 2, characterized in that: The ratio of the area of ​​the first electrode region (111) to the area of ​​the second electrode region (112) is greater than or equal to 0.

5.

4. The piezoelectric micropump according to claim 1, characterized in that: The shape of the first electrode region (111) is the same as the shape of the second electrode region (112).

5. The piezoelectric micropump according to claim 1, characterized in that: The thickness of the piezoelectric sheet (11) is greater than the thickness of the deformation sheet (12).

6. The piezoelectric micropump according to claim 5, characterized in that: The ratio of the thickness of the piezoelectric sheet (11) to the thickness of the deformation sheet (12) is less than or equal to 2.

7. The piezoelectric micropump according to claim 1, characterized in that: The pump body assembly comprises a valve plate (13), wherein the valve plate (13) comprises a valve seat (131), a valve sheet (132) and a cantilever beam (133); two valve sheets (132) are arranged at intervals, and any one of the valve sheets (132) is connected to the valve seat (131) via at least two cantilever beams (133); The cantilever beam (133) has a first end (1331), a second end (1332) and a cantilever portion (1330), wherein the first end (1331) is connected to the valve plate (132), the second end (1332) is connected to the valve seat (131), and the cantilever portion (1330) is located between the first end (1331) and the second end (1332).

8. The piezoelectric micropump according to claim 7, characterized in that: Any one of the valve plates (132) is connected to the valve seat (131) via at least three cantilever beams (133).

9. The piezoelectric micropump according to claim 7, characterized in that: The curvature of the inner side of the first end portion (1331) is greater than the curvature of the outer side thereof; and the width of the first end portion (1331) is 1.2 to 2 times the width of the cantilever portion (1330).

10. The piezoelectric micropump according to claim 7, characterized in that: The curvature of the inner side of the second end portion (1332) is smaller than the curvature of the outer side thereof; and the width of the second end portion (1332) is 1.2 to 2 times the width of the cantilever portion (1330).

11. An electronic device, characterized in that: The electronic device comprises a piezoelectric micropump (1) as claimed in any one of claims 1 to 10.

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