Gas flowability testing method and system for ultra-high temperature filtration systems

Abstract

The present invention belongs to the field of gas detection technology, and in particular, relates to a gas flowability test method and system for an ultra-high temperature filtration system, which is based on a ceramic honeycomb and includes: selecting a number of pressure test points in the filtration system; for each pressure test point, installing a pressure sensing unit in the open inner flow channel on the dust-containing side of the ceramic honeycomb, the pressure sensing unit is used to measure the pressure of the filtration system on the dust-containing side; determining the gas flowability state according to the set values ​​of the inlet pressure and outlet pressure of the filtration system, the measured values ​​of each pressure test point, and the degree of deviation between different measured values, the gas flowability state is used to determine the timing of starting a backflush device for cleaning, and shutting down to complete cleaning. The present invention provides a targeted test method for realizing the gas flowability state in a filtration system, and the test results are effectively associated with the operation of the backflush device to achieve precise control of the cleaning timing of the filtration system.

Description

Technical Field

[0001] The invention belongs to the technical field of gas detection, and in particular relates to a gas flowability testing method and system for an ultra-high temperature filtration system. Background Art

[0002] In the reduction step of the Siemens process, trichlorosilane is chemically reduced at high temperature to generate polysilicon, accompanied by the byproduct silicon tetrachloride. Due to the complexity of the reaction conditions, such as temperature fluctuations and uneven reaction rates, some amorphous silicon may be produced; silicon tetrachloride can be recovered and converted through the cold hydrogenation step so that it can be used again in production, forming a closed loop. During the operation of the cold hydrogenation device, due to rapid phase changes or insufficient reaction time, the silicon particles that have not reacted fully may aggregate to form fine silicon powder. Amorphous silicon and fine silicon powder are easily accumulated in purification towers, heat exchangers, storage tanks and other equipment.

[0003] In order to effectively recover silicon powder in the tail gas of the reduction section and the cold hydrogenation reaction, a honeycomb multi-channel wall flow silicon carbide filter element is designed in the existing process. The relevant technology is disclosed in the Chinese invention patent "Ultra-high temperature ceramic honeycomb and its application in silicon powder collection in polysilicon process" with announcement number CN116655388B. The single ceramic honeycomb disclosed therein includes a substrate and a filter membrane. The substrate adopts a multi-channel wall flow fluid model. The filter membrane is evenly sprayed on the open inner flow channel surface of the dust-containing side of the honeycomb through plasma spraying technology, which can effectively intercept all fine silicon powder below 1 micron.

[0004] The above-mentioned ceramic honeycomb needs to be cleaned by using a backflush device. The high-pressure backflush gas is introduced into the clean side of the filter element at a supersonic speed through a venturi to remove the filter cake formed on the filter membrane. At present, the above-mentioned cleaning work for the filter cake often adopts the time interval method. According to the process operating conditions, such as the exhaust gas flow rate, the concentration of silicon powder, and empirical data, the rate of filter cake accumulation is determined, and the timed backflush cycle is set accordingly. Combined with the operating conditions, the time interval is regularly adjusted. This method is relatively simple to implement, but it often leads to the situation where the backflush frequency is too high or insufficient. Summary of the invention

[0005] The present invention provides a method and system for testing the gas flowability of an ultra-high temperature filtration system, which can effectively solve the problems in the background technology.

[0006] To achieve the above object, the technical solution of the present invention is as follows:

[0007] The gas flow test method of the ultra-high temperature filtration system is based on ceramic honeycomb, including:

[0008] Select several pressure test points in the filtration system;

[0009] For each of the pressure test points, a pressure sensing unit is installed in the open inner flow channel on the dust-containing side of the ceramic honeycomb, and the pressure sensing unit is used to obtain the measured value of the pressure of the filtration system on the dust-containing side;

[0010] Determining a gas flowability state based on the set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each of the pressure test points, and the degree of deviation between different measured values, wherein the gas flowability state is used to determine when to start the backflush device for cleaning and when to shut it down to complete cleaning;

[0011] One end of the pressure sensing unit is fixedly arranged relative to the inner flow channel of the opening to form a fixed installation end, and the other end generates different degrees of elastic deformation under different pressure conditions;

[0012] The degree of the elastic deformation is sensed by a pressure sensing sheet in the fixed installation end.

[0013] Further, the gas flowability state is determined according to the set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each of the pressure test points, and the degree of deviation between different measured values, including:

[0014] Setting a pressure threshold according to set values ​​of an inlet pressure and an outlet pressure of the filtration system;

[0015] Calculating an average value of the measured values ​​of each of the pressure test points, and revising the average value according to the degree of deviation;

[0016] The revised average value is continuously compared with the pressure threshold, and the comparison result is used as the judgment result of the gas flowability state.

[0017] Furthermore, the degree of deviation is represented by the variance or standard deviation of each of the measured values.

[0018] Furthermore, setting the pressure threshold includes:

[0019] After each cleaning of the backflush device is completed, the value of the outlet pressure is collected in real time;

[0020] Calculating a first difference between the set value of the inlet pressure and the real-time value of the outlet pressure, and calculating a second difference between the set value of the inlet pressure and the set value of the outlet pressure;

[0021] The first difference and the second difference are compared, and the pressure threshold is adjusted according to the comparison result.

[0022] Furthermore, the first difference and the second difference are compared, and the pressure threshold is adjusted according to the comparison result, using the following formula:

[0023] ;

[0024] in, is the first difference, is the second difference, is the adjusted pressure threshold, is the pressure threshold before adjustment, is the degree of deviation, is the adjustment coefficient, which is used to control the threshold adjustment range.

[0025] Furthermore, the adjustment coefficient is dynamically adjusted according to the degree of deviation, and the adjustment formula is as follows:

[0026] ;

[0027] in, is the initial value of the adjustment coefficient set by the system, is an exponentially decreasing function of the degree of deviation.

[0028] Furthermore, when the temperature in the dust-containing side reaches a set range, the pressure sensing unit is activated.

[0029] Furthermore, a pressure sensing unit fault assessment mechanism is established, the assessment mechanism comprising:

[0030] Draw a curve showing the average value changing over time in a coordinate system as a reference curve;

[0031] Determine two parallel boundary curves with set upper and lower intervals based on the reference curve, and the range between the two boundary curves is the tolerance range;

[0032] A curve of the measurement value of each pressure sensing unit changing with time is synchronously drawn in the same coordinate system, and when the change curve exceeds the tolerance range, it is determined that the pressure sensing unit is faulty.

[0033] Gas flow test system for ultra-high temperature filtration system, based on ceramic honeycomb installation, including:

[0034] A plurality of pressure sensing units are installed at a plurality of pressure test points of the filter system, and the pressure sensing units are used to obtain the measured value of the pressure of the filter system on the dust-containing side;

[0035] A control module, which determines a gas flowability state according to the set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each of the pressure test points, and the degree of deviation between different measured values, wherein the gas flowability state is used to determine when to start the backflush device for cleaning and when to shut it down to complete the cleaning;

[0036] One end of the pressure sensing unit is fixedly arranged relative to the inner flow channel of the opening to form a fixed installation end, and the other end generates different degrees of elastic deformation under different pressure conditions;

[0037] The degree of the elastic deformation is sensed by a pressure sensing sheet in the fixed installation end.

[0038] The technical solution of the present invention can achieve the following technical effects:

[0039] The present invention provides a targeted testing method and system for realizing the gas flowability state in a filtration system, and the test results are effectively correlated with the operation of a back-blowing device to realize precise control of the cleaning timing of the filtration system. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0041] Figure 1 A flow chart of a method for testing the gas flowability of an ultra-high temperature filtration system;

[0042] Figure 2 A schematic diagram of an installation of a pressure sensing unit;

[0043] Figure 3 Flow chart for determining gas flowability status;

[0044] Figure 4 A flowchart for setting stress thresholds;

[0045] Figure numerals: 01, open inner flow channel; 011, side wall; 02, fixed installation end; 03, spring; 04, pressure-bearing end; 05, dust-containing side; 06, clean side. DETAILED DESCRIPTION

[0046] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items.

[0048] Embodiment 1:

[0049] like Figure 1 As shown, the gas flow test method of the ultra-high temperature filtration system is based on a ceramic honeycomb and includes:

[0050] S1: Select several pressure test points in the filtration system;

[0051] S2: For each pressure test point, a pressure sensing unit is installed in the open inner flow channel on the dust-containing side of the ceramic honeycomb. The pressure sensing unit is used to obtain the measured value of the pressure of the filtration system on the dust-containing side;

[0052] S3: The gas flowability status is determined based on the set values ​​of the inlet pressure and outlet pressure of the filtration system, the measured values ​​of each pressure test point, and the degree of deviation between different measured values. The gas flowability status is used to determine when to start the backflush device for cleaning and when to shut it down to complete cleaning.

[0053] This embodiment provides a targeted testing method for realizing the gas flowability status in the filter system, and the test results are effectively correlated with the operation of the backflush device to achieve precise control of the cleaning timing of the filter system.

[0054] Specifically, in this embodiment, the pressure sensing unit is installed with the help of an open inner flow channel on one side of the ceramic honeycomb, which reduces the difficulty of installation and can minimize the risk of installing additional structures in a high-temperature environment; when the filter membrane is not blocked, the pressure difference between the dusty side and the clean side is certain according to the inlet pressure and outlet pressure in the design data, and is often controlled within a certain pressure difference range; but when the filter membrane is blocked to a certain extent, since the gas supply and pressure source are constant, the gas flow rate passing through the filter membrane into the clean side is reduced, which will inevitably increase the pressure on the dusty side, thereby increasing the measured value of the pressure test point.

[0055] Of course, since the filtration system has a certain filtration area, there is often a certain difference in the pressure difference between multiple measurement values. Therefore, in this embodiment, both the measurement value of the measurement point and the degree of deviation between different measurement values ​​are considered to comprehensively realize the judgment of the gas flowability state, so that the judgment result is more comprehensive and accurate. Through data monitoring of multiple pressure test points, early signals of local blockage can be captured to avoid data distortion; the gas flowability state is directly related to the start and stop of the backflush device to ensure that the cleaning operation is carried out at the best time.

[0056] The ceramic honeycomb used in this embodiment can withstand ultra-high temperatures, and its multi-channel structure provides good protection for each pressure sensing unit.

[0057] like Figure 2 As shown in the figure, the local structure of the ceramic honeycomb and the corresponding dusty side 05 and clean side 06 are shown. One end of the pressure sensing unit is fixedly arranged relative to the open inner flow channel 01 to form a fixed installation end 02, and the other end produces different degrees of elastic deformation under different pressure conditions; the degree of elastic deformation is sensed by the pressure sensing sheet in the fixed installation end 02.

[0058] In this embodiment, the fixed setting of the pressure sensing unit relative to the open inner flow channel 01 is specifically set to be against and fit with the innermost side of the open inner flow channel 01. The side wall 011 of the open inner flow channel 01 is filtered through a filter membrane. Due to the setting of the opening, the installation action can be simple and easy. The fixed installation end 02 of the pressure sensing unit can protect the pressure sensing sheet in a high temperature environment, and the related wiring harness used also needs to be heat-insulated. In this preferred solution, the other end of the pressure sensing unit includes a spring 03 and a pressure-receiving end 04 used in conjunction. The pressure-receiving end 04 is used to sense and transmit pressure through a relatively large area, and the spring 03 is used to produce deformation under the push of the pressure-receiving end 04. This specific structural combination can achieve the purpose of producing different degrees of elastic deformation under pressure. Due to the stability of the flow channel, the stable operation of the pressure sensing unit can be ensured, and the displacement or damage caused by vibration or high temperature environment can be reduced; in addition to the spring 03, the metal bellows can also be used in the installation scenario of the open inner flow channel, so it is also within the protection scope of the present invention.

[0059] Elastic deformation directly reflects the pressure conditions and can quickly capture small changes in airflow pressure in the filtration system. The pressure sensing unit provides real-time elastic deformation feedback under different pressure conditions to form continuous pressure monitoring data, avoiding misjudgment caused by single-point measurement lag. The pressure sensing sheet accurately records the deformation amount to ensure data reliability.

[0060] As a preferred embodiment of the above, Figure 3As shown, the gas flow status is determined according to the set values ​​of the inlet pressure and outlet pressure of the filtration system, the measured values ​​of each pressure test point, and the degree of deviation between different measured values, including:

[0061] A1: Set the pressure threshold according to the set values ​​of the inlet pressure and outlet pressure of the filtration system; when setting the pressure threshold, mainly consider the difference between the set values ​​of the inlet pressure and the outlet pressure;

[0062] A2: Calculate the average value of the measured values ​​at each pressure test point, and revise the average value according to the degree of deviation; the average value of the measured values ​​at multiple pressure test points can be used to obtain the overall data representing the status of the entire filtration system. The average value will be revised according to the continuous changes such as the use time and aging degree of the system. On the one hand, the abnormal values ​​can be taken into account instead of being directly eliminated, which can more comprehensively reflect the overall operating status of the filtration system, including the impact of potential local problems or sudden abnormalities; on the other hand, it can also increase the real-time adaptability of the system. Through deviation revision, the impact of abnormal values ​​on the average value is reasonably limited, ensuring that the overall data truly reflects the system status. The revised average value not only takes into account local abnormalities, but also can dynamically adapt to the aging of the system and changes in the operating environment;

[0063] A3: Continue to compare the revised average value with the pressure threshold, and use the comparison result as the judgment result of the gas flow status. When the average value is greater than or equal to the pressure threshold, the backflush device can be started for cleaning.

[0064] In this preferred solution, by setting reasonable thresholds, dynamically revising average values, and triggering cleaning logic in real time, accurate monitoring of the gas flow status of the filtration system is achieved, ensuring that the cleaning device operates efficiently at the best time, while taking into account the comprehensiveness of the data, thereby improving the operating efficiency and reliability of the filtration system.

[0065] In the above embodiment, after the set values ​​of the inlet pressure and the outlet pressure are determined, the pressure threshold is often a fixed value, while the average value and its revised value are dynamically changing values. The design of judging the cleaning time by comparing the pressure threshold and the revised value has the following technical advantages:

[0066] It can ensure the consistency of the cleaning judgment benchmark and avoid false triggering or cleaning delay caused by threshold fluctuations. The average value and its revised value dynamically reflect the real-time status of the system, including pressure distribution, aging trend and local anomalies, and can keenly capture early signals of blockage or abnormal operation. In the implementation process, when the degree of deviation between different measured values ​​is large, it can be said that there is a certain degree of unevenness in the entire filtration system. In this working state, the revision of the average value is to obtain a revised value by appropriate amplification, so that it tends to be closer to the pressure threshold, and the cleaning work is started more sensitively to ensure that each part can work efficiently; on the contrary, when the degree of deviation between different measured values ​​is small, it can be said that the entire filtration system is in a relatively uniform and stable state. In this working state, the revision of the average value is to obtain a revised value by appropriate reduction, so that it tends to be further away from the pressure threshold, and the cleaning work is started relatively slowly to reduce the consumption of cleaning energy. Among them, the degree of deviation is expressed by the variance or standard deviation of each measurement value.

[0067] As a preferred embodiment of the above, Figure 4 As shown, in order to achieve more accurate testing purposes, set the pressure threshold, including:

[0068] B1: After each backflush device is cleaned, the outlet pressure value is collected in real time;

[0069] B2: Calculating a first difference between a set value of the inlet pressure and a real-time value of the outlet pressure, and calculating a second difference between the set value of the inlet pressure and the set value of the outlet pressure;

[0070] B3: Compare the first difference and the second difference, and adjust the pressure threshold according to the comparison result.

[0071] In the above preferred scheme, the first difference reflects the pressure difference state of the current filtration system after cleaning, and is a direct manifestation of the actual operating state of the system. If the change in the relative relationship between the first difference and the second difference is smaller, it means that the current state of the equipment is closer to the design state. Otherwise, it means that the degree of change in the equipment state is greater with the use of the equipment.

[0072] Based on this situation, the pressure threshold needs to be adjusted to ensure that the benchmark for cleaning startup is suitable for the current state of the device. In the implementation process, by dynamically adjusting the pressure threshold, it can be ensured that the cleaning trigger benchmark is closely fitted to the actual state of the device. With the use of the device, it can be specifically manifested as the first difference being greater than the second difference. The reason is that no matter what cleaning method is used, it is inevitable that the fluidity of the ceramic honeycomb will gradually deteriorate until it needs to be replaced. Of course, the abnormal situation caused by equipment damage is not within the scope of consideration of this embodiment. The damage referred to here includes damage to the substrate of the ceramic honeycomb and damage to the filter membrane. This kind of damage can be preliminarily judged when the first difference is less than the second difference; based on the above-mentioned size relationship, the specific adjustment is: according to the increase in the gap between the first difference and the second difference, adjust the degree of reduction of the pressure threshold, that is, when the gap between the two differences becomes larger and larger, the pressure threshold is reduced smaller and smaller, thereby increasing the frequency of cleaning.

[0073] As a preferred embodiment of the above, the first difference and the second difference are compared, and the pressure threshold is adjusted according to the comparison result, using the following formula:

[0074] ;

[0075] in, is the first difference, is the second difference, is the adjusted pressure threshold, is the pressure threshold before adjustment, is the degree of deviation, It is an adjustment coefficient used to control the threshold adjustment range and is set according to device sensitivity, usage requirements, or specific rules.

[0076] By dynamically adjusting the pressure threshold, the cleaning trigger benchmark is ensured to closely match the actual status of the device. The calculation can monitor the degree of deviation of equipment status in real time, and the formula ensures the smoothness of threshold changes.

[0077] As a specific example of the above specific rule, the adjustment coefficient is dynamically adjusted according to the degree of deviation, and the adjustment formula is as follows:

[0078] ;

[0079] in, is the initial value of the adjustment coefficient set by the system, is an exponentially decreasing function of the degree of deviation.

[0080] When the degree of deviation is small, the exponential function is close to 1, and the adjustment coefficient remains close to the baseline value, ensuring the system's sensitive response to small deviations; when the degree of deviation is large, the exponential function decreases rapidly and the adjustment coefficient gradually decreases, thereby limiting the adjustment range and avoiding excessive adjustment that may lead to system instability; the characteristics of the exponential decreasing function ensure that the adjustment coefficient changes smoothly and avoids large threshold adjustments caused by sudden changes in the degree of deviation.

[0081] As a preferred embodiment of the above embodiment, when the temperature in the dusty side reaches a set range, the pressure sensing unit is started to ensure the stability of its operation.

[0082] In order to further ensure the stability of system operation, a pressure sensing unit fault assessment mechanism is established. The assessment mechanism includes:

[0083] C1: Draw a curve of the average value changing over time in the coordinate system as the reference curve;

[0084] C2: Determine two parallel boundary curves with set upper and lower spacings based on the reference curve, and the range between the two boundary curves is the tolerance range;

[0085] C3: Synchronously draw the change curve of the measurement value of each pressure sensing unit over time in the same coordinate system. When the change curve exceeds the tolerance range, it is determined that the pressure sensing unit is faulty.

[0086] The reference curve provides a reference state for system operation, ensuring a clear comparison standard for fault detection, and changes adaptively with the real-time state; the tolerance range can be set according to the ratio, such as ±10%, and can be selected according to specific needs.

[0087] Embodiment 2:

[0088] Gas flow test system for ultra-high temperature filtration system, based on ceramic honeycomb installation, including:

[0089] A plurality of pressure sensing units are installed at a plurality of pressure test points of the filtration system, and the pressure sensing units are used to obtain the measured value of the pressure of the filtration system on the dust-containing side;

[0090] A control module determines a gas flow status according to set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each pressure test point, and the degree of deviation between different measured values, and the gas flow status is used to determine when to start the backflush device for cleaning and when to shut it down to complete the cleaning;

[0091] One end of the pressure sensing unit is fixedly arranged relative to the open inner flow channel 01 to form a fixed installation end 02, and the other end produces different degrees of elastic deformation under different pressure conditions; the degree of elastic deformation is sensed by the pressure sensing sheet in the fixed installation end 02.

[0092] The technical effects achieved by this embodiment are the same as those of the first embodiment and will not be described again here.

[0093] The above shows and describes the basic principles, main features and advantages of the present invention. It should be understood by those skilled in the art that the present invention is not limited to the above embodiments. The above embodiments and descriptions are only for explaining the principles of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which fall within the scope of the present invention to be protected. The scope of protection of the present invention is defined by the attached claims and their equivalents.

Claims

1. A method for testing the gas flowability of an ultra-high temperature filtration system, characterized in that: Based on ceramic honeycomb, including: Select several pressure test points in the filtration system; For each of the pressure test points, a pressure sensing unit is installed in the open inner flow channel on the dust-containing side of the ceramic honeycomb, and the pressure sensing unit is used to obtain the measured value of the pressure of the filtration system on the dust-containing side; The gas flowability state is determined according to the set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each of the pressure test points, and the degree of deviation between different measured values, including: The pressure threshold is set according to the set values ​​of the inlet pressure and the outlet pressure; the average value of each of the measured values ​​is calculated, and the average value is revised according to the degree of deviation; the revised average value is continuously compared with the pressure threshold, and the comparison result is used as the judgment result of the gas flowability state; The gas flowability status is used to determine when the backflush device is activated to perform cleaning, and when it is closed to complete cleaning; One end of the pressure sensing unit is fixedly arranged relative to the inner flow channel of the opening to form a fixed installation end, and the other end generates different degrees of elastic deformation under different pressure conditions; The fixed installation end senses the degree of elastic deformation through a pressure sensing sheet; Setting the pressure threshold comprises: collecting the value of the outlet pressure in real time after each backflush device cleaning is completed; calculating a first difference between the set value of the inlet pressure and the real-time value of the outlet pressure, and a second difference between the set value of the inlet pressure and the set value of the outlet pressure; and adjusting the pressure threshold using the following formula: ； is the first difference, is the second difference, is the adjusted pressure threshold, is the pressure threshold before adjustment, is the degree of deviation, is the adjustment coefficient, which is used to control the threshold adjustment amplitude.

2. The method for testing the gas flowability of an ultra-high temperature filtration system according to claim 1, characterized in that: The degree of deviation is represented by the variance or standard deviation of each of the measured values.

3. The method for testing the gas flowability of an ultra-high temperature filtration system according to claim 1, characterized in that: The adjustment coefficient is dynamically adjusted according to the degree of deviation, and the adjustment formula is as follows: ； in, is the initial value of the adjustment coefficient set by the system, is an exponentially decreasing function of the degree of deviation.

4. The method for testing the gas flowability of an ultra-high temperature filtration system according to claim 1, characterized in that: When the temperature in the dusty side reaches a set range, the pressure sensing unit is activated.

5. The method for testing gas flowability of an ultra-high temperature filtration system according to claim 1, characterized in that: A pressure sensing unit fault assessment mechanism is established, the assessment mechanism comprising: Draw a curve showing the average value changing over time in a coordinate system as a reference curve; Determine two parallel boundary curves with set upper and lower intervals based on the reference curve, and the range between the two boundary curves is the tolerance range; A curve of the measurement value of each pressure sensing unit changing with time is synchronously drawn in the same coordinate system, and when the change curve exceeds the tolerance range, it is determined that the pressure sensing unit is faulty.

6. A gas flowability testing system for an ultra-high temperature filtration system, using the gas flowability testing method for an ultra-high temperature filtration system as claimed in claim 1, characterized in that: Installation based on ceramic honeycomb, including: A plurality of pressure sensing units are installed at a plurality of pressure test points of the filter system, and the pressure sensing units are used to obtain the measured value of the pressure of the filter system on the dust-containing side; A control module, which determines a gas flowability state according to the set values ​​of the inlet pressure and the outlet pressure of the filtration system, the measured values ​​of each of the pressure test points, and the degree of deviation between different measured values, wherein the gas flowability state is used to determine when to start the backflush device for cleaning and when to shut it down to complete the cleaning; One end of the pressure sensing unit is fixedly arranged relative to the inner flow channel of the opening to form a fixed installation end, and the other end generates different degrees of elastic deformation under different pressure conditions; The degree of the elastic deformation is sensed by a pressure sensing sheet in the fixed installation end.

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