Setting support device and setting support program

Abstract

The invention provides a setting assisting device and a setting assisting program for a measuring device, which can improve the measuring accuracy of pins even if the shapes of the front ends of the pins are different. A setting unit (31c) of a setting assistance device (1) for a measurement device has a tool for measuring a predetermined measurement target as a measurement item, and accepts designation of a measurement region and designation of a target region for specifying the measurement target in the measurement region in accordance with selection of the tool. A tool including a measurement region for measuring a measurement object and a filter parameter is set in accordance with the specification of the measurement region and the size of the object region and / or the representative height in the object region. A symbol corresponding to the target region is displayed on the height image, a measurement target corresponding to the filter parameter in the measurement region is identified on the basis of the setting of the tool, and measurement of the tool is performed on the basis of a measurement value of the identified measurement target.

Description

Technical Field

[0001] The present disclosure relates to a setting support device and a setting support program for a measurement device that performs measurement of a measurement object. Background Art

[0002] For example, the pin terminal bending inspection device disclosed in Patent Document 1 is configured to obtain an image of a pin mounted on a circuit board or a pin provided on a connector plug while irradiating illumination light to the pin, and to determine whether the pin is good or bad based on the amount of bending of the pin calculated based on the obtained image. In Patent Document 1, the amount of bending of the pin is defined as the amount of displacement of the center position of the pin tip from the center position of the pin root.

[0003] However, when the pin is optically measured as in Patent Document 1, the image obtained by photographing the pin is likely to contain noise, and it is sometimes difficult to accurately capture the shape of the pin. In addition, as another example, when the flaw on the surface of an object is optically measured, it is sometimes difficult to accurately capture the shape of the flaw because the flaw itself has a fine shape. Depending on the object to be measured, the distinction between the part that should be the object and the part that should be the noise is different. As a result, the accuracy of the pin tip position and the flaw measurement may be reduced.

[0004] Patent Document 1: Japanese Patent Application Laid-Open No. 11-040307 Summary of the invention

[0005] The present disclosure has been made in view of this point, and an object of the present disclosure is to improve the measurement accuracy of a measurement object by easily performing the setting for distinguishing a portion to be a target and a portion to be noise according to a measurement object.

[0006] In order to achieve the above-mentioned purpose, a setting auxiliary device of a measuring device involved in one embodiment of the present invention comprises: a receiving unit, which receives shape data; a setting unit, which sets one or more measurement elements and measurement items using the one or more measurement elements; an execution unit, which executes the measurement of the measurement items set by the setting unit on the shape data received by the receiving unit; and a screen generating unit, which generates a display screen, the display screen having a two-dimensional display and / or a three-dimensional display of a height image based on the shape data received by the receiving unit, and a display area for displaying the one or more measurement elements on the height image, including a result display element representing the result of the measurement performed by the execution unit.

[0007] The setting unit has a tool for measuring a predetermined measurement object as the measurement item, and accepts the designation of a measurement area and the designation of an object area for determining the measurement object within the measurement area on the height image in response to the selection of the tool, and sets the tool including the measurement area and filtering parameters for measuring the measurement object based on the designation of the measurement area, the size of the object area and / or the representative height in the object area.

[0008] The screen generator displays a symbol corresponding to the target area on the height image. The execution unit determines a measurement target corresponding to the filter parameter in the measurement area based on the setting of the tool, and executes the measurement of the tool based on the measurement value of the determined measurement target.

[0009] According to this configuration, when setting the tool, by accepting the designation of the measurement area and the designation of the target area for determining the measurement object within the measurement area, the division between the portion to be the object and the portion to be the noise can be easily set according to the measurement object.

[0010] In another aspect of the present disclosure, a setting support program of a measuring device that can be executed by a processing device is a prerequisite. The setting support program of the measuring device causes the processing device to perform the following processing: receiving shape data; setting one or more measurement elements and measurement items using the one or more measurement elements; performing measurement of the measurement items on the shape data; and generating a display screen having a height image based on the shape data that is displayed in two dimensions and / or three dimensions, and displaying a display area of ​​the one or more measurement elements on the height image, including a result display element indicating the result of the measurement, and causing the processing device to perform the following processing: corresponding to the selection of a tool for measuring a predetermined measurement object, receiving the designation of a measurement area and the designation of an object area for determining the measurement object in the measurement area on the height image, setting a tool including a measurement area for measuring the measurement object and a filter parameter according to the designation of the measurement area, the size of the object area, and / or the representative height in the object area; and displaying a symbol corresponding to the object area on the height image, determining the measurement object corresponding to the filter parameter in the measurement area based on the setting of the tool, and performing measurement of the tool based on the measurement value of the determined measurement object.

[0011] As described above, according to the present disclosure, by easily performing the setting for distinguishing the portion to be the target and the portion to be the noise according to the measurement object, it is possible to improve the measurement accuracy for the measurement object. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1It is a diagram for explaining the structure of the setting support device of the measurement device according to the first embodiment of the present invention.

[0013] Figure 2 This is a diagram for explaining the structure of a setting support device of a measurement device according to Embodiment 2 of the present invention.

[0014] Figure 3 This is a block diagram of a setting support device for a measuring device.

[0015] Figure 4 This is a flowchart showing an example of the processing flow during setting.

[0016] Figure 5 It is a three-dimensional image of the object to be measured.

[0017] Figure 6 It is a plan view of the object to be measured.

[0018] Figure 7 FIG. 1 is a diagram showing an example of a reference image for pattern matching.

[0019] Figure 8 This is a diagram for explaining a case where a pattern matching process is performed on an input image.

[0020] Fig. 9 It is a diagram showing a user interface screen for two-dimensionally displaying and three-dimensionally displaying a measurement object.

[0021] Fig.10 This is a diagram showing a user interface screen for specifying a reference plane.

[0022] Fig.11 This is a diagram showing a user interface screen for specifying a measurement area.

[0023] Fig.12 It is a diagram for explaining the operation of designating a plurality of measurement areas.

[0024] Fig.13 This is a status indicating that the specified operation of the measurement area is completed. Fig. 9 .

[0025] Fig.14 This is equivalent to explaining the case of measuring objects of other shapes. Fig.12 .

[0026] Fig.15 This is a diagram showing a window for setting a pin tool.

[0027] Fig.16 This is a diagram showing an origin specifying window.

[0028] Fig.17 This is a diagram for explaining the method of specifying the origin.

[0029] Fig.18 This is a diagram showing another example of the origin specifying window.

[0030] Fig.19 This is an example of a CSV file for specifying the center coordinates of each measurement area.

[0031] Fig. 20 This is a conceptual diagram of the case where local coordinates are transformed into global coordinates.

[0032] Fig.21 This is a diagram for explaining the method of transforming the center position coordinates of the local coordinates into the center position of the global coordinates.

[0033] Fig. 22 The diagram shows a plurality of pins having different tip shapes.

[0034] Fig.23 This is a diagram showing an example of a screen display when accepting the designation of an initial value.

[0035] Fig.24 This is a flowchart showing an example of the measurement process flow.

[0036] Fig.25 This figure shows the result display screen.

[0037] Fig.26 This is a diagram for explaining the difference in display manner between the case where the XY position of the pin tip is outside the tolerance range and the case where it is within the tolerance range.

[0038] Fig. 27 This is a flowchart showing the processing flow after tool selection.

[0039] Fig.28 This is a schematic diagram for explaining the processing contents of the scar tool.

[0040] Fig.29 This is a diagram showing a window for a flaw tool when specifying the largest flaw.

[0041] Fig.30 This is a diagram showing a window for the flaw tool when the inspection size is specified.

[0042] Fig.31 This is a diagram for explaining the processing contents of the fine flaw tool.

[0043] Fig.32 This is a diagram showing a window for a fine flaw tool in a case where the largest flaw is specified.

[0044] Fig.33 This is a diagram showing a window for a fine flaw tool when the inspection size is specified.

[0045] Fig.34 This is a flowchart showing an example of the processing flow when the measuring device is operated. DETAILED DESCRIPTION

[0046] Hereinafter, the setting support device of the measuring device and the setting support program of the measuring device according to the embodiment of the present invention will be described in detail with reference to the accompanying drawings. In addition, the following description of the preferred embodiments is essentially only illustrative and is not intended to limit the present invention, its application or its use.

[0047] Figure 1 1 is a diagram for explaining the structure of a setting support device 1 of a measuring device according to Embodiment 1 of the present invention. In Embodiment 1, a setting support device for a measuring device (hereinafter, simply referred to as a "setting support device") 1 is different from a measuring device 100 that is set by the setting support device 1. For example, there is a case where the setting support device 1 and the measuring device 100 are installed in different places, or a user of the setting support device 1 is different from a user who uses the measuring device 100 on site, and Embodiment 1 can be applied in such a case.

[0048] The setting support device 1 of the first embodiment includes a measuring head 2, a processing device 3, a display unit 4, and an operation unit 5. In the processing device 3, the measurement setting information is stored in a storage medium 6, and the measurement setting information can be read into the measuring device 100 via the storage medium 6. The storage medium 6 is composed of, for example, a semiconductor memory, a hard disk drive, an optical disk, etc. After the measurement setting information generated by the processing device 3 is stored in the storage medium 6, the storage medium 6 is removed from the processing device 3 and connected to the measuring device 100, thereby enabling the measuring device 100 to read the measurement setting information stored in the storage medium 6. In the first embodiment, the storage medium 6 may be omitted, and the setting support device 1 and the measuring device 100 may be connected via a communication line, and the measuring device 100 may read the measurement setting information generated by the processing device 3 via the communication line. The communication line may be a wired system or a wireless system. In the case of the first embodiment, during operation, an image of the measuring object is obtained by another measuring head (not shown) of the measuring device 100, and measurement is performed.

[0049] Figure 2 This is a diagram for explaining the structure of a setting support device 1 of a measurement device according to Embodiment 2 of the present invention. In Embodiment 2, the measurement device 100 is used in a state where it is connected to the setting support device 1. For example, the measurement device 100 and the setting support device 1 are connected via a communication line 101, and communication is possible between the measurement device 100 and the setting support device 1. The communication line may be a wired system or a wireless system.

[0050] Similar to the first embodiment, the setting support device 1 of the second embodiment includes a measuring head 2, a processing device 3, a display unit 4, and an operation unit 5. In the case of the second embodiment, the measuring device 100 is connected to the measuring head 2, so the measuring head 2 may be included as the measuring device 100. When used, the measuring head 2 acquires an image of the measuring object and performs measurement. In this case, the setting support device 1 can perform measurement settings using the measuring head 2 included in the measuring device 100. Without being limited to this, the measuring head 2 may also be a part of the setting support device 1.

[0051] Thus, the embodiment of the setting assistance device 1 is various, and the setting assistance device 1 may be used in embodiments other than the above-mentioned embodiments 1 and 2. The setting assistance device 1 of the embodiment 1 has the same effect as the setting assistance device 1 of the embodiment 2. The display unit 4 may not be included as a component constituting the setting assistance device 1. In addition, the setting assistance device 1 may be a setting assistance device 1 in which the display unit 4 and the processing device 3 are integrated. In addition, the setting assistance device 1 may be a setting assistance device 1 in which the operation unit 5 and the processing device 3 are integrated.

[0052] (Structure of the measuring head)

[0053] Figure 3 2 is a block diagram of the setting support device 1 . Figure 3 is with Figure 1 The measurement head 2 is connected to the processing device 3. Although not shown in the figure, Figure 2 In the second embodiment shown, the measuring head 2 is connected to the measuring device 100, and the measuring device 100 is connected to the setting support device 1. Therefore, the measuring head 2 is connected to the setting support device 1 via the measuring device 100, but the shape data acquired by the measuring head 2 can be received by the setting support device 1 via the measuring device 100.

[0054] The measuring head 2 is a device that captures the measuring object W and generates shape data, and is composed of, for example, a profilometer, a structured illumination three-dimensional camera, a stereo camera, or other device that can obtain three-dimensional shape data. The measuring object W measured by the measuring head 2 is not particularly limited, and for example, devices, instruments, components, devices, units, etc. having pins can be cited. More specifically, a circuit substrate provided with one or more pins, a connector plug provided with one or more pins, or an electrical device having a circuit substrate or a connector plug can be cited. In addition, the measuring object W can also be a component that is manufactured by cutting, molding, etc. and has a flat or curved surface. The measuring object W can be a component that does not have a pin, etc.

[0055] The measurement object W may be stationary or may be conveyed in a predetermined direction by, for example, a conveyor A. At a site where a plurality of measurement objects W are conveyed in sequence, the conveyed measurement objects W may be measured in sequence by the measuring head 2 .

[0056] The measuring head 2 includes a light projecting element 20, an imaging element 21, a light projection and reception control unit 22, a setting storage unit 23, a profile generating unit 24, and a head-side communication unit 25. The light projecting element 20 is composed of, for example, an LED (Light Emitting Diode) or the like, and is arranged so as to face the measuring object W and irradiate illumination light to the measuring object W. The imaging element 21 is composed of, for example, an image sensor such as a CMOS (Complementary Metal-Oxide-Semiconductor), and is arranged so as to face the measuring object W, receives light reflected from the measuring object W, generates a signal corresponding to the amount of light received, and outputs the signal to the profile generating unit 24.

[0057] The projection and receiving light control unit 22 is a part that controls the projection element 20 and the imaging element 21. The setting storage unit 23 is a part that stores the setting information of projection and receiving light. The setting information of projection and receiving light includes, for example, the light emission amount and light emission timing of the projection element 20, the imaging timing, exposure time and gain of the imaging element 21. The projection and receiving light setting information stored in the setting storage unit 23 can be prepared by the setting auxiliary device 1 and sent to the measuring head 2 in the case of embodiment 1, and can be prepared by the setting auxiliary device 1 or the measuring device 100 and sent to the measuring head 2 in the case of embodiment 2. In either case, the projection and receiving light setting information can be pre-stored in the setting storage unit 23, and the projection and receiving light control unit 22 controls the projection element 20 and the imaging element 21 based on the projection and receiving light setting information stored in the setting storage unit 23.

[0058] The contour generating unit 24 is a part that generates shape data based on the signal related to the light receiving amount distribution sent from the imaging element 21, and is composed of, for example, a processor. A plane coordinate system (local coordinates) is predetermined in the measuring head 2. The shape data generated by the contour generating unit 24 can be composed of plane position information according to the plane coordinate system predetermined by the measuring head 2 and height information corresponding to each plane position in the plane coordinate system. For example, as plane position information according to the plane coordinate system, the shape data can be composed of each XY coordinate of a point array arranged in a grid shape and a Z coordinate corresponding to each point array. Each point array constituting the shape data is arranged in a grid shape in the XY direction, so it is arranged at equal intervals in the X direction and arranged at equal intervals in the Y direction. The interval of the point array in the X direction may be the same as or different from the interval of the point array in the Y direction. Such shape data is called a distance image or a height image, and by processing the height information as brightness information, image processing for two-dimensional images can be applied. In addition to the plane position information and the height information, the shape data may also include brightness information corresponding to each plane position.

[0059] The head side communication unit 25 is composed of a communication module and a communication interface that can communicate with the body side communication unit 30 of the processing device 3. The shape data generated by the outline generation unit 24 is transmitted to the processing device 3 via the head side communication unit 25. In addition, the setting information of the projection and reception of light is received via the head side communication unit 25.

[0060] The processing device 3 is composed of, for example, a desktop or notebook personal computer. The processing device 3 has a main body side communication unit 30, a processor 31, and a storage device 32. The main body side communication unit 30 is composed of a communication module and a communication interface that can communicate with the head side communication unit 25 of the measuring head 2. The shape data generated by the contour generation unit 24 of the measuring head 2 is received by the main body side communication unit 30. Therefore, the main body side communication unit 30 is an example of a receiving unit of the present invention. The shape data is not limited to the data generated by the measuring head 2, and can be, for example, three-dimensional CAD data. In the case of CAD data, for example, it can be received by the main body side communication unit 30 via a communication line such as the Internet.

[0061] The processor 31 includes, for example, a central processing unit (CPU), a ROM (read only memory), a RAM (random access memory), etc. The ROM stores, for example, a system program, etc. The ROM is used as a work area when the central processing unit executes various processes.

[0062] The storage device 32 stores a setting auxiliary program for the measuring device that can be executed by the processing device 3 (hereinafter referred to as "setting auxiliary program"). The setting auxiliary program can be distributed in a state stored in a storage medium B such as an optical disk or a semiconductor memory, or can be distributed through, for example, the Internet line. Regardless of the distribution method, the setting auxiliary program can be stored in the storage device 32, that is, installed.

[0063] The processor 31 can constitute a height image generating unit 31a, a receiving unit 31b, a setting unit 31c, an execution unit 31d, and a screen generating unit 31e by executing a setting auxiliary program stored in the storage device 32. The height image generating unit 31a, the receiving unit 31b, the setting unit 31c, the execution unit 31d, and the screen generating unit 31e can be constituted by a combination of hardware and software. In addition, a part of the height image generating unit 31a, the receiving unit 31b, the setting unit 31c, the execution unit 31d, and the screen generating unit 31e can be constituted by one or more different processors (not shown). The other processor can also be set in a place different from the processor 31. By executing the setting auxiliary program by the processor 31, the processing device 3 can execute each of the processes described later.

[0064] The setting unit 31c is a part that performs processing for setting one or more measurement elements and measurement items using the one or more measurement elements when setting is performed by the setting support device 1. The execution unit 31d is a part that performs measurement of the measurement items set by the setting unit 31c on the shape data received by the main body side communication unit 30 when performing measurement after setting, and the execution unit 31d performs processing for measuring the measurement items on the shape data.

[0065] The setting assistance program may be stored in a ROM or the like instead of the storage device 32 or in addition to the storage device 32. In addition, the processor 31 may directly read the setting assistance program from the storage medium B and execute it. The setting assistance program may also be stored in a so-called cloud server, in which case the setting assistance device 1 accesses the cloud server to perform setting assistance.

[0066] The operation unit 5 is composed of, for example, a keyboard, a mouse, various pointing devices, etc. The operation unit 5 is connected to the receiving unit 31b of the processor 31. The user's operation state on the operation unit 5 is received by the receiving unit 31b. In this way, it is possible to detect what kind of operation the user has performed.

[0067] The display unit 4 is composed of, for example, a liquid crystal display panel, an organic EL (Electro Luminescence) panel, etc. The display unit 4 is connected to the screen generation unit 31e of the processor 31. The data constituting the display screen generated by the screen generation unit 31e is sent to the display unit 4 and displayed on the display unit 4.

[0068] The storage device 32 is provided with a tool storage unit 32a. The tool storage unit 32a stores a plurality of measuring tools (e.g., measuring tool 1, measuring tool 2, etc.) for performing various measurements. The measuring tools include a pin tool for measuring a pin as a measurement item, and also include a tool for measuring height, a tool for measuring flatness, and the like.

[0069] Furthermore, the storage device 32 is provided with a registered image storage unit 32b, an image synthesis setting storage unit 32c, and a measurement setting storage unit 32d. The registered image storage unit 32b stores images of the measurement object W captured in advance. The image synthesis setting storage unit 32c stores setting information such as whether or not to perform synthesis processing of the height image. The measurement setting storage unit 32d stores measurement elements, measurement items, and the like.

[0070] Figure 4 1 is a flowchart showing the flow of processing when the setting support device 1 performs setting. When performing setting, the user operates the operation unit 5, so that the setting unit 31c can execute processing for setting measurement elements and measurement items using the measurement elements. The following specifically describes the setting process.

[0071] This flowchart starts when the user performs a setting execution operation. Figure 5 and Figure 6 The measurement object W is shown as an example in FIG. The measurement object W includes a substrate W1 , a plurality of pins W2 provided so as to protrude upward from the substrate W1 , and a protrusion W3 protruding from an edge of the substrate W1 .

[0072] When the user performs the setting execution operation, the measuring head 2 is caused to capture an image of the measurement object W, and the main body side communication unit 30 receives the shape data generated by the outline generation unit 24 of the measuring head 2. This process is a process of receiving the shape data.

[0073] Then, in step SA1, the setting of the height image is accepted. In step SA1, the height image generation unit 31a reads the presence or absence of the height image synthesis processing stored in the image synthesis setting storage unit 32c, and in the case of the height image synthesis processing, the height image synthesis processing is performed using the shape data. In this way, the height image is obtained, and the obtained height image is temporarily stored. In the case of no height image synthesis processing, the height image synthesis processing is not performed. In addition, in step SA1, the IP address of the measuring head 2 can also be specified.

[0074] In step SA2, register Figure 7The reference image 200 for pattern matching is an image obtained by capturing the measurement object W from above by the measuring head 2 and is used when the height image input at the time of initial setting is positioned at a predetermined position and predetermined inclination.

[0075] In this step SA2, the designation of the alignment region 201 in the reference image 200 for pattern matching is received from the user. In a state where the screen generation unit 31e causes the display unit 4 to display the reference image 200 for pattern matching, the user operates the operation unit 5 to designate the alignment region 201. The designation operation of the alignment region 201 is received by the receiving unit 31b. In this embodiment, the alignment region 201 is designated in a manner including a protrusion W3 having a characteristic shape when viewed from above. The reference image 200 for pattern matching and the alignment region 201 are stored in a state of association in the registration image storage unit 32b.

[0076] For example, when input is Figure 8 When the height image (input image 210) shown on the left side of Figure 7 The pattern matching is performed by using the reference image 200 and the position alignment area 201 for pattern matching shown in FIG. Figure 8 As shown on the right side of FIG. , the input image 210 is rotated and moved in the X direction or the Y direction as needed, which can be Figure 7 The reference image 200 for pattern matching shown matches. In addition, pattern matching may not be performed, and when pattern matching is not performed, step SA2 can be omitted.

[0077] In step SA3, if Fig. 9 As shown, the screen generation unit 31e generates a setting display screen 220 for displaying an image for setting, and displays it on the display unit 4. The setting display screen 220 includes a three-dimensional display area 221 for three-dimensionally displaying a height image of the measurement object W and a two-dimensional display area 223 for two-dimensionally displaying a height image of the measurement object W. The screen generation unit 31e generates a user interface screen capable of simultaneously performing a three-dimensional display of the height image and a two-dimensional display of the height image. In this way, the screen generation unit 31e performs processing for generating various display screens. In addition, the screen generation unit 31e may generate a user interface screen capable of only performing a three-dimensional display of the height image and a two-dimensional display of the height image, or the screen generation unit 31e may generate a user interface screen capable of switching between a three-dimensional display of the height image and a two-dimensional display of the height image.

[0078] In step SA4, it is determined whether the user has selected a pin tool from a plurality of measuring tools. When selecting a measuring tool, the screen generation unit 31e generates a user interface screen for selecting the measuring tool and displays it on the display unit 4. In the user interface screen for selecting the measuring tool, various measuring tools can be selected in addition to the pin tool, and the user can select the desired measuring tool by operating the operation unit 5. Other measuring tools may also include a flaw tool for measuring flaws such as dents on the surface of the measuring object W formed with a plane or a curved surface, and a fine flaw tool for measuring flaws finer than the dents. In the present embodiment, the setting unit 31c has a pin tool for measuring a pin as one of the measuring items, and in the pin tool, a pin can be set as a measuring element, and the setting of the measuring item using the pin can be performed. When the pin tool is selected through the receiving unit 31b, the setting unit 31c becomes a state in which the pin tool is selected. On the other hand, when the measuring tool other than the pin tool is selected through the receiving unit 31b, the setting unit 31c becomes a state in which the measuring tool other than the pin tool (referred to as other tools) is selected.

[0079] If a tool other than the pin tool is selected, the result of determination in step SA4 is "No", and the process proceeds to step SA5 to perform other tool processing. Other tools may also include scar tools and micro-scar tools. If the pin tool is selected, the result of determination in step SA4 is "Yes", and the process proceeds to step SA6.

[0080] In step SA6, the setting unit 31c receives the designation of the reference plane. The reference plane is a measurement element, and in this embodiment, the measurement items using the pin and the reference plane can be set. Specifically, the screen generation unit 31e generates the following Fig.10 The user interface screen 230 for specifying the reference plane as shown in FIG. 1 is displayed on the display unit 4. The user interface screen 230 for specifying the reference plane is provided with an image display area 231 that displays a height image of the measurement object W in two dimensions, a tool name display area 232, and an operation instruction area 233. "Pin tool" is displayed as the selected tool name in the tool name display area 232. Since the operation steps for specifying the reference plane are displayed in the operation instruction area 233, the user can perform the operation of specifying the reference plane while viewing the operation steps displayed in the operation instruction area 233.

[0081] The hollow arrow represented by the symbol 231a in the image display area 231 is the pointer of the mouse included in the operation unit 5. By the user operating the operation unit 5, the pointer 231a can be moved on the image (the image displayed in the image display area 231) in which the height image is displayed in two dimensions. The user performs an operation of sequentially specifying at least three points on the height image through the pointer 231a. For example, when the upper surface of the substrate W1 of the measurement object W is used as the reference plane, by moving the pointer 231a to any part of the upper surface of the substrate W1 and clicking, the part is designated as the first point for specifying the plane, and the X coordinate and Y coordinate of the first point are obtained. That is, the user specifies the X coordinate and Y coordinate of the point for specifying the reference plane. Repeat this operation to specify the second point and the third point on the upper surface of the substrate W1. The designation of these first to third points is accepted by the setting unit 31c. The setting unit 31c can also accept the designation of the fourth, fifth, ... points.

[0082] By specifying three or more points during setting, a plane obtained by fitting the height of each pixel at a position determined by the X-coordinates and Y-coordinates of at least three points specified during setting can be determined as a reference plane during measurement. And the height from the reference plane can be used as a measurement value. In addition to the height from the reference plane, it can also be set to use the Z coordinate of the height image (the height of the measuring head 2) itself as a measurement value.

[0083] In step SA7, the setting unit 31c receives the designation of the measurement area in response to the selection of the pin tool. Specifically, the screen generating unit 31e generates the following Fig.11 The user interface screen 240 for specifying the measurement area as shown in the figure is displayed on the display unit 4. The user interface screen 240 for specifying the measurement area includes an image display area 241 that displays a height image of the measurement object W in two dimensions, a designation method selection area 242, an arrangement designation area 243, a shape designation area 244, and an operation description area 245. In the designation method selection area 242, it is possible to select whether to specify the measurement area as "area" or "arrangement". In the case where the measurement area is specified as "arrangement", multiple measurement areas exist within a certain range, and the arrangement of the measurement areas arranged within the existing range is specified. Specifically, the number of row directions and the number of column directions of the measurement areas arranged within the existing range are respectively specified in the arrangement designation area 243. In this way, the arrangement of multiple measurement areas arranged within the existing range can be determined. The setting unit 31c receives the designation in the designation method selection area 242 and the designation in the arrangement designation area 243.

[0084] In the shape designation area 244, the shape of the measurement area can be designated. Examples of the shape of the measurement area include a circle and a rectangle. When the measurement area is designated as "array", the shape of the measurement area is designated for all of the plurality of measurement areas. Thus, the setting unit 31c receives the designation of the shape of the measurement area in the shape designation area 244.

[0085] When the measurement area is designated as "arrangement", the setting unit 31c determines the existence range of the plurality of measurement areas based on the user's designation of three points on the height image. The operation steps for designating the existence range of the measurement area are displayed in the operation explanation area 245, indicating that the operation of sequentially designating three points is sufficient. The user can perform the operation of determining the existence range of the measurement area while viewing the operation steps displayed in the operation explanation area 245.

[0086] Specifically, Fig.12 When the height image of the measurement object W is displayed two-dimensionally as shown in the image display area 241A, the user operates the pointer 241a through the operation unit 5 in the same manner as when specifying the reference plane to sequentially specify points P1, P2, and P3. The order of specifying points P1, P2, and P3 is set to Fig.11 The order in which the measurement area is displayed in the operation explanation area 245 is shown. When the points P1, P2, and P3 are specified, the screen generation unit 31e generates a rectangular frame B1 having the points P1, P2, and P3 as vertices and displays it in the image display area 241B. By specifying the points P1, P2, and P3, even if the existence range of the measurement area is inclined relative to the horizontal line of the screen, a rectangular frame B1 having an inclination angle corresponding to the inclination can be generated.

[0087] Simultaneously with or after the rectangular frame B1 is displayed, as shown in the image display area 241C, the screen generator 31e generates area frames C0 to C8 indicating the position, size, and shape of the measurement area and displays them in the image display area 241C. The area frames C0 to C8 correspond to the measurement area, and the user can understand the size, position, etc. of the measurement area by observing the area frames C0 to C8.

[0088] In this example, it is shown that Fig.11 In the arrangement designation area 243 shown in FIG. 1 , the number of rows is designated as 3 and the number of columns is designated as 3. Therefore, in Fig.12The area frames C0 to C8 representing the nine measurement areas are automatically displayed in the image display area 241C. In the initial setting, the intervals of the area frames C0 to C8 in the row direction and the intervals of the area frames C0 to C8 in the column direction are set to be equal intervals. Specifically, the intervals of the area frames C0 to C8 in the row direction are set to the intervals that divide the size of the rectangular frame B1 in the row direction equally, and the intervals of the area frames C0 to C8 in the column direction are set to the intervals that divide the size of the rectangular frame B1 in the column direction equally.

[0089] As shown in this example, the number of pins W2 of the measurement object W is 8, which may be different from the number specified in the arrangement designation area 243. In this case, as shown in the image display area 241D, the user operates the operation unit 5 to delete the area frame C5, and changes the positions of the area frames C3 and C4 so that the pin W2 enters. In this way, the user can delete any one or more area frames among the area frames C0 to C8 and move any one or more area frames by operating the operation unit 5. The setting unit 31c receives the designation of the area frame to be deleted and the movement of the area frame.

[0090] The size of the measurement area at the time of initial setting is set so that adjacent measurement areas do not touch each other. The size of the measurement area at the time of initial setting can be changed to correspond to the size of the actual existence area of ​​the pin W2. The user operates the operation unit 5, for example, selects the area frame C0, and drags the area frame C0 in the direction of making it smaller and larger, thereby changing the size of the area frame C0 to an arbitrary size. Since the thickness of multiple pins W2 is the same in many cases, when the size of the area frame C0 is changed, the screen generation unit 31e changes the size of other area frames C1 to C4, C6 to C8 to the same size as the area frame C0 and displays them in the image display area 241D. In this way, for example, the size of other area frames C1 to C4, C6 to C8 is changed in conjunction with the change in the size of the area frame C0.

[0091] The change in the size of the area frames C1 to C4 and C6 to C8 is accepted by the setting unit 31c. That is, when the setting unit 31c accepts the change in the size of any one of the plurality of measurement areas arranged in the existing range, that is, the first measurement area (e.g., area frame C0), and accepts the change in the size of the first measurement area, the size of the other measurement areas (e.g., area frames C1 to C8) is set to the changed size of the first measurement area. In this way, the sizes of the plurality of area frames C0 to C8 can be changed uniformly, thereby reducing the burden on the user during setting.

[0092] If the position and size of the area frames C0 to C8 are changed by the user's operation, the center coordinates of each measurement area are changed. When the position and size of the area frames C0 to C8 are determined, the setting unit 31c determines the center coordinates of each measurement area.

[0093] When the setting of the area frames C0 to C8 is completed, the process proceeds to step SA8. Fig.13 As shown, in the three-dimensional display area 221, the area frames C0 to C8 (except the area frame C5) are displayed in a three-dimensional shape having a length in the height direction of the pin W2, and in the two-dimensional display area 223, the area frames C0 to C8 (except the area frame C5) are displayed in a plane. Thus, the user can easily determine whether the settings of the area frames C0 to C8 correspond to the measurement object W. After confirmation, the position, shape, and size of the area frames C0 to C8 can also be corrected.

[0094] Sometimes the arrangement of the pin W2 of the measuring object W is different from Figure 5 as well as Figure 6 different. Fig.14 The image display area 241E that two-dimensionally displays the height image of the measurement object W is shown. In this case, the origin of the local coordinates and the center coordinates of each measurement area are specified. The center coordinates of each measurement area can be input through a CSV file or the like, for example.

[0095] That is, when setting Fig.14 When the measurement area of ​​the measurement object W is shown, the screen generation unit 31e generates the following Fig.15 The pin tool setting window 250 shown in the figure is displayed on the display unit 4. The pin tool setting window 250 includes a reference plane designation unit 251 for designating the reference plane, a measurement area designation unit 252 for designating the measurement area, a pin tip shape designation unit 253, a pin height upper limit input unit 254, a pin height lower limit input unit 255, and an extraction size input unit 256. When the user operates the edit button of the measurement area designation unit 252, the screen generation unit 31e generates Fig.16 The origin designation window 260 is shown and displayed on the display unit 4. The origin designation window 260 includes an X-axis designation unit 261 for designating a straight line of the X axis, a Y-axis designation unit 262 for designating a straight line of the Y axis, an origin position designation unit 263 for designating an origin position, and an inclination designation unit 264 for designating an inclination of coordinates.

[0096] Fig.17 It is to explain the use Fig.16 The origin designation window 260 shown is a diagram showing the procedure for designating the origin. Fig.17 The figure on the left side of is a case where two straight lines, the straight line on the X axis and the straight line on the Y axis, are specified. Fig.16The X-axis designation unit 261 designates a straight line of the X-axis, and the Y-axis designation unit 262 designates a straight line of the Y-axis. The intersection of the designated two straight lines is designated as the origin.

[0097] Fig.17 The figure shown on the right side of is a case where a straight line and a point on the X-axis are specified. In this case, the screen generation unit 31e generates the following Fig.18 The origin specifying window 260 shown in FIG. 1 is displayed on the display unit 4. In the origin specifying window 260, a point specifying unit 265 for specifying a point is provided instead of the Y-axis specifying unit 262. Fig.18 The X-axis designation unit 261 designates a straight line of the X-axis, and the point designation unit 265 designates a point. A straight line perpendicular to the X-axis and passing through the designated point is set as the Y-axis, and the origin is designated by the Y-axis and the designated X-axis straight line. The designated origin is the origin in the local coordinates, which can be displayed, for example, on Fig.14 The image display areas 241E and 241F are shown.

[0098] After the origin is specified as described above, the center coordinates of each measurement area are specified based on the origin. The method of specifying the center coordinates of each measurement area is not particularly limited, and for example, the following method can be used: Fig.19 The CSV file is specified as shown in the figure. In this CSV file, as an example, the measurement area numbers include 0 to 8, and the X coordinates and Y coordinates of each measurement area are included in a state associated with the number of the measurement area. Fig.19 The CSV file shown is a representation of Fig.14 The image display area 241E shows a file of the position of the pin W2 of the measurement object W.

[0099] The setting unit 31c reads the CSV file to set the center coordinates of each measurement area. Fig.14 As shown, the screen generator 31e generates area frames C0 to C8 based on the center coordinates of the respective measurement areas and displays them in the image display area 241F. The sizes of the area frames C0 to C8 can be changed as described above.

[0100] After the setting unit 31c receives the designation of the reference plane, if the center coordinates of each measurement area are set as local coordinates, the setting unit 31c switches the local coordinates to global coordinates. Fig. 20 As shown, the L origin (the origin of the local coordinates) is set to the G origin (the origin of the global coordinates), the LX axis (the X axis of the local coordinates) is set to the GX axis (the X axis of the global coordinates), and the LY axis (the Y axis of the local coordinates) is set to the GY axis (the Y axis of the global coordinates). Fig.21 As shown, the center position L(X, Y) of the local coordinates is transformed into the center position G(X, Y) of the global coordinates.

[0101] exist Figure 4 In step SA9 shown in FIG. 1 , the setting unit 31 c receives the designation of the tip shape of the pin W2 of the measurement object W in response to the selection of the pin tool. As the tip shape of the pin W2, for example, Fig. 22 As shown, there are cones (including cones, pyramids, etc.) D1, truncated cones (truncated cones) D2, flat surfaces D3, curved surfaces (including circular and hemispherical surfaces) D4, etc. When the tip shape is a cone or a truncated cone, the pin shape is cylindrical, and when the tip shape is a pyramid or a truncated cone, the pin shape is prismatic.

[0102] When specifying the tip shape of the pin W2, it can be determined by Fig.15 The pin tool setting is performed by the pin tip shape designation unit 253 of the pin tool setting window 250 shown in FIG. In the pin tip shape designation unit 253, the user can designate a cone, a frustum, a flat surface, or a curved surface (hereinafter also referred to as a circle) by operating the operation unit 5. The pin tip shape designated by the pin tip shape designation unit 253 is received by the setting unit 31c and included in the setting content as information related to the pin tip shape.

[0103] The setting unit 31c has a tool for measuring the pin as a measurement item, and corresponding to the selection of the pin tool, accepts the designation of a reference plane, the designation of a measurement area of ​​the pin, and the designation of the front end shape of the pin, and executes the processing of setting the tool for measuring the pin based on the acceptance of the designation of the reference plane, the designation of the measurement area of ​​the pin, and the designation of the front end shape of the pin.

[0104] Here, the measurement by the execution unit 31d is described. The execution unit 31d obtains the measurement value in the measurement area by using a different algorithm according to the tip shape of the pin based on the setting of the pin tool by the setting unit 31c, and performs the measurement of the pin tool based on the measurement value. When the execution unit 31d obtains the measurement value from the reference plane in the measurement area, the measurement value can be obtained by using a different algorithm according to the tip shape of the pin. That is, the execution unit 31d obtains the tip height of the pin as the measurement value by using a different algorithm according to the tip shape of the pin.

[0105] When the tip of the pin is a cone, the execution unit 31d applies an algorithm that uses the maximum height of the measurement area as the tip height of the pin. In addition, when the tip of the pin is a frustum or a truncated cone, the execution unit 31d applies an algorithm that sets the maximum height of the central area in the measurement area as the tip height of the pin. In addition, when the tip of the pin is a flat surface, the execution unit 31d applies an algorithm that uses the average height of the central area in the measurement area as the tip height of the pin. In addition, when the tip of the pin is a circle, the execution unit 31d applies an algorithm that uses the average height of the first n% of the height of the measurement area as the tip height of the pin. n can be set to any value, for example, it can be set to 5, 10, etc. n can also be changed by the user.

[0106] The execution unit 31d can obtain the position of the tip of the pin as a measurement value by using different algorithms according to the shape of the tip of the pin. When the tip of the pin is a cone, the execution unit 31d applies an algorithm that uses the position of the maximum height in the measurement area as the center position of the tip of the pin. In addition, when the tip of the pin is a frustum or a truncated cone, the execution unit 31d applies an algorithm that uses the maximum height position of the central area in the measurement area as the center position of the tip of the pin. In addition, when the tip of the pin is a flat surface, the execution unit 31d applies an algorithm that uses the center of gravity position of the measurement area as the center position of the tip of the pin. In addition, when the tip of the pin is a circle, the execution unit 31d applies an algorithm that uses the center of gravity position of the first n% of the height of the measurement area as the center position of the tip of the pin.

[0107] In this way, the execution unit 31d performs measurement by applying different algorithms to each tip shape of the pin. Which algorithm to use is set during the setting. Fig.15 When the pin tip shape designation unit 253 in the embodiment specifies a cone, the algorithm for finding the tip height in the case of the cone and the algorithm for finding the center position of the tip in the case of the cone are automatically set by the setting unit 31c, so the algorithm setting operation by the user is not required. In addition, the algorithm applied in the case of the cone can also be set by the user.

[0108] In addition, when a frustum is specified by the pin tip shape specifying unit 253, an algorithm for finding the tip height in the case of a frustum and an algorithm for finding the center position of the tip in the case of a frustum are automatically set by the setting unit 31c. In addition, when a flat surface is specified by the pin tip shape specifying unit 253, an algorithm for finding the tip height in the case of a flat surface and an algorithm for finding the center position of the tip in the case of a flat surface are automatically set by the setting unit 31c. In addition, when a circle is specified by the pin tip shape specifying unit 253, an algorithm for finding the tip height in the case of a circle and an algorithm for finding the center position of the tip in the case of a circle are automatically set by the setting unit 31c. In addition, the algorithm for finding the center position of the tip may be set to the center position of the region above a predetermined height threshold regardless of the tip shape. In addition, the above algorithm is an example, and other algorithms may also be used.

[0109] As mentioned above, when Figure 4 When step SA9 is completed, the process proceeds to step SA10. In step SA10, the setting unit 31c receives the setting of the extraction conditions of the pin candidates in the image and the setting of various filters. Specifically, the user can use the following Fig.15 The pin tool setting window 250 shown here is used to perform various settings.

[0110] Here, the case where the execution unit 31d extracts pin candidates is described. After the execution unit 31d performs binarization processing on the shape data using a preset threshold value, the area extracted by performing spot processing is used as a pin candidate area, and filtering processing is performed on the pin candidate area. The threshold for binarization processing can also be determined by the setting unit 31c based on each representative height of each measurement area. The setting unit 31c estimates the upper and lower limits of the height of the pin candidate based on the distribution of each representative height such as frequency distribution, and sets them as the upper and lower thresholds for binarization processing. When the upper and lower limits of the height are set as the thresholds for binarization processing, the execution unit 31d extracts pixels having a height between the upper and lower thresholds in each measurement area in the shape data as pin candidate areas. Next, the execution unit 31d identifies each pixel extracted by the binarization processing as a pin candidate area by performing spot processing on the extracted pixels.

[0111] After the binarization process, the execution unit 31d calculates the surface, perimeter, and position of the contour of the region extracted by the speckle process, and performs filtering based on the calculated area, perimeter, and contour position. As the filtering process, the execution unit 31d can perform shape filtering using the shape of the pin candidate region as the object of filtering, height filtering using the height of the pin candidate region as the object of filtering, and size filtering using the size of the pin candidate region as the object of filtering.

[0112] For example, the threshold for binarization is set by the setting unit 31c in step SA10. After the binarization, the noise contained in the shape data sometimes appears as a beard-like shape, so it is necessary to correctly distinguish it from the pin shape. In order to correctly distinguish the noise from the pin shape, after the pin candidate area is extracted by the binarization, the area whose height from the reference plane is between the upper threshold and the lower threshold is extracted, and the extracted area is subjected to a shrinkage process to remove the noise (height filtering process). In the case where the area of ​​the pin candidate area is too small, the execution unit 31d does not adopt it as a pin candidate area (size filtering process). In the case where the perimeter of the pin candidate area is too long, the execution unit 31d does not adopt it as a pin candidate area (shape filtering process). In addition, in the case where the contour position of the pin candidate area is too far away from the set shape, it is not adopted as a pin candidate area.

[0113] In addition, the setting unit 31c receives the designation of the upper threshold and the lower threshold for binarization processing. When the setting unit 31c obtains the upper threshold and the lower threshold for binarization processing based on each representative height of each measurement area, it uses the obtained upper threshold and the lower threshold as initial values ​​and displays them on the display. Fig.15 The pin height upper limit input section 254 and the pin height lower limit input section 255 of the pin tool setting window 250 are shown. The setting section 31c receives a designation of changing the numerical values ​​of the upper and lower thresholds displayed in the pin height upper limit input section 254 and the pin height lower limit input section 255, respectively.

[0114] The setting unit 31c Fig.15 The extraction size input unit 256 of the pin tool setting window 250 shown in the figure receives the designation of the extraction size for the size filtering process. The execution unit 31d performs the size filtering process of using the area larger than the extraction size received by the setting unit 31c as the pin candidate area and not using the area smaller than the extraction size as the pin candidate. Fig.15 As shown, the setting unit 31c accepts the designation of the position of the cursor, the designation of the numerical value, or both. At this time, when the setting unit 31c accepts the designation of the position in the measurement area on the two-dimensional display area 222, the screen generation unit 31e generates a screen for displaying a symbol having a size corresponding to the extraction size at the position in the designated measurement area. The symbol is, for example, a rectangular or circular frame line. When the setting unit 31c accepts the designation of the change of the extraction size by designating the position of the cursor or the designation of the numerical value, the screen generation unit 31e generates a screen in which the symbol whose size is changed according to the change designation is displayed in the measurement area on the two-dimensional display area 222. As a result, the size of the extraction size can be intuitively grasped, so that the setting of the extraction size for size filtering processing becomes easy.

[0115] The extracted size for size filtering can also be transferred to Figure 4 In step SA9, if Fig.23 The designation of the initial value is accepted as shown. In order to input the initial value, the extraction size setting window 400 is displayed at the front. In the extraction size setting window 400, a guide 401 is displayed to guide the user on what adjustments should be made, and a cursor or a numeric box 402 for accepting the extraction size is displayed. When the designation of the position is accepted on the two-dimensional display area 222, a rectangular symbol 222a corresponding to the predetermined extraction size with the designated position as the center is overlapped and displayed on the two-dimensional display area 222. The mouse pointer 222b, the center 222c of the rectangular symbol 222a, etc. are also displayed in the window 400. When the initial value of the extraction size is set and the OK button is pressed, it is transferred to Figure 4 The adjustment of the extraction size is also performed by accepting the Fig.15 The operation is performed by specifying the position of the cursor shown, specifying a value, or both.

[0116] In progress Figure 4 After step SA10, the process proceeds to step SA11. In step SA11, after the above-mentioned setting is completed, the execution unit 31d executes the measurement. Fig.24 The details of step SA11 are shown. Fig.24 In step SB1 of the flowchart, the execution unit 31d reads the X coordinates and Y coordinates of at least three points specified during setting, extracts the height of each pixel at the position determined by these X coordinates and Y coordinates, and determines the plane obtained by fitting the heights of the extracted three points as the reference plane.

[0117] In step SB2, the execution unit 31d applies the set pin candidate extraction conditions and shape filters, size filters, height filters, etc. to each measurement area specified during setting. Therefore, the execution unit 31d extracts pixels with a height above a certain height from the reference plane, identifies a pixel block by speckle processing and sets it as a pin candidate area, and obtains the shape of the spot based on the area, perimeter, etc. of the pin candidate area. The execution unit 31d determines that the spots whose shapes are far from the general pin shape of a circle or rectangle are noise and removes them. In addition, the execution unit 31d also removes the spots whose sizes are less than a predetermined size as noise.

[0118] In step SB3, the execution unit 31d determines the tip shape of the pin specified during setting. Specifically, the execution unit 31d reads the setting content of the pin tool, obtains the information related to the tip shape of the pin contained in the read setting content, and determines whether the tip shape of the pin specified during setting is a cone, a hammer table, a flat surface, or a circle based on the obtained information. In the case where it is determined in step SB3 that the tip shape of the pin specified during setting is a cone, the process proceeds to step SB4. In step SB4, the algorithm for the case where the tip shape of the pin is a cone is applied, and the execution unit 31d calculates the maximum height of the measurement area, and uses the calculated maximum height of the measurement area as the tip height of the pin. In step SB5, the XY position that becomes the maximum height of the measurement area calculated in step SB4 is determined. The determined position is the XY position of the tip of the pin. Thereafter, the process proceeds to step SB6.

[0119] If it is determined in step SB3 that the tip shape of the pin specified at the time of setting is a frustum, the process proceeds to step SB7. In step SB7, the algorithm for the case where the tip shape of the pin is a frustum is applied, and the execution unit 31d calculates the maximum height of the center area, and sets the calculated maximum height of the center area as the tip height of the pin. In step SB8, the XY position that becomes the maximum height of the center area calculated in step SB8 is determined. The determined position is the XY position of the tip of the pin. Thereafter, the process proceeds to step SB6.

[0120] If it is determined in step SB3 that the tip shape of the pin specified at the time of setting is a flat surface, the process proceeds to step SB9. In step SB9, the algorithm for when the tip shape of the pin is a flat surface is applied, and the execution unit 31d calculates the average height of the central area, and the calculated average height of the central area is set as the tip height of the pin. In step SB10, the XY position that becomes the average height of the central area calculated in step SB9 is determined. The determined position is the XY position of the tip of the pin. Thereafter, the process proceeds to step SB6.

[0121] If it is determined in step SB3 that the tip shape of the pin specified at the time of setting is circular, the process proceeds to step SB11. In step SB11, the algorithm for the case where the tip shape of the pin is circular is applied, and the execution unit 31d calculates the average height of the first n% of the height of the measurement area, and sets the calculated average height as the tip height of the pin. In step SB12, the XY position of the center of gravity of the first n% of the height of the measurement area is determined. The determined position is the XY position of the tip of the pin. Thereafter, the process proceeds to step SB6.

[0122] As described above, by using different algorithms to obtain the measurement value of each pin according to the tip shape of the pin, a measurement simulation can be performed. Figure 1 The processing device 3 shown in the figure may also be executed by Figure 2 The measurement device 100 shown is performed by Figure 2 When the measurement device 100 shown executes a measurement simulation, the result of the measurement simulation may be sent to the processing device 3 and acquired by the processing device 3. Based on the result of the measurement simulation, for example, the conditions during imaging, the size and position of the measurement area, etc. may be corrected.

[0123] In step SB6, the execution unit 31d applies a measured value filter to remove the portion of the offset in the height direction and the offset in the XY position that is larger than the reference value as noise. At this time, the execution unit 31d may also specify a tolerance range relative to the reference value of the height and a tolerance range relative to the reference value of the XY position to perform a check to determine whether the height and the XY position are within the tolerance range. The specification of the tolerance range is accepted by the setting unit 31c.

[0124] when Fig.24 At the end of the flowchart shown, enter Figure 4 In step SA12 of the flowchart shown in FIG. 1 , the measurement result is displayed. When the measurement result is displayed, the screen generation unit 31e generates a result display screen 300 ( Fig.25 The result display screen 300 includes a three-dimensional display area 301 for three-dimensionally displaying the height image of the measurement object W and a two-dimensional display area 302 for two-dimensionally displaying the height image of the measurement object W. The screen generation unit 31e generates a user interface screen capable of performing three-dimensional display and two-dimensional display at the same time.

[0125] exist Fig.25In the example shown, the pin W2a provided near the left front corner is tilted beyond the tolerance range. In this case, the screen generator 31e displays the measurement area C6 including the pin W2a as the measurement element whose measurement value is determined to be not within the tolerance range in a different form from the case where the execution unit 31d determines that the measurement value is within the tolerance range in the three-dimensionally displayed height image or the two-dimensionally displayed image. Specifically, the color representing the measurement area C6 including the pin W2a whose measurement value is not within the tolerance range is set to a color different from the color representing the measurement areas C0 to C5, C7, and C8 including the pin W2 whose measurement value is determined to be within the tolerance range. In addition, by changing the type of line surrounding the measurement area, or by applying shading or filling to the measurement area and changing the type or color of the shading or filling, the measurement area including the measurement element determined to be not within the tolerance range and the measurement area determined to be within the tolerance range can also be displayed in different forms. In addition, by adding characters or symbols to the measurement area including the measurement element determined to be not within the tolerance range, a display form different from that of the measurement area determined to be within the tolerance range can also be achieved. The screen displaying the measurement area including the measurement elements determined to be outside the tolerance range and the measurement area determined to be within the tolerance range in different forms may be displayed in only one of the three-dimensional display area 301 and the two-dimensional display area 302 , or may be displayed in both.

[0126] In summary, the result display screen 300 has a display area that displays a height image based on the shape data received by the main body side communication unit 30 in two dimensions and three dimensions, and displays one or more measurement elements on the height image. In addition, the result display screen 300 includes result display elements that represent the result of the measurement performed by the execution unit 31d, such as a line surrounding the measurement area, a shadow applied to the measurement area, and a fill, so that the user can easily understand whether the height and position of the pin are within the tolerance range by simply observing the three-dimensional display area 301 and the two-dimensional display area 302.

[0127] In this embodiment, for example, a plurality of three-dimensional images are preloaded, and the user can sequentially display the three-dimensional display area 301 by switching the loaded three-dimensional images. By switching and displaying the loaded images, the user can check whether the XYZ position offset, θ angle offset, and tilt offset can be correctly followed while observing the three-dimensional images.

[0128] like Fig.26As shown in the enlarged view in the figure, the result display screen 300 can identifiably display the situation where the XY position of the front end of the pin is outside the tolerance range (the figure on the left) and the situation where it is within the tolerance range (the figure on the right). Pin W2a is a pin that is tilted beyond the tolerance range, and the XY position of its front end is determined as point P10, and point P10 is displayed on the result display screen 300. The measurement area C6 is displayed as a semi-transparent cylinder in the result display screen 300. The straight line (center line) L1 passing through the center of the measurement area C6 is also displayed on the result display screen 300. The center line L1 is a reference for measurement based on the reference value. By observing the result display screen 300, the user can easily understand the deviation of point P10 from the straight line L1, its deviation amount, and the direction of the deviation. In this way, the screen generation unit 31e generates a result display screen 300 that displays the reference based on the reference value measurement and the deviation amount of pin W2a relative to the reference as result display elements.

[0129] On the other hand, Fig.26 In the figure on the right side of , the measured value of the pin W2 is within the tolerance range, so the point P11 indicating the XY position of the tip of the pin W2 is located on the center line L2 of the measurement area C7. Fig.26 The color and line type of the circle S1 surrounding the upper end of the measurement area C6 may be different from the color and line type of the circle S2 surrounding the upper end of the measurement area C7 on the result display screen 300. To make it clearer that the measurement is outside the tolerance range, the color of the circle S1 may be set to red, for example.

[0130] exist Fig.26 In the display screen 300, the height of the tip of the pin is expressed as a numerical value. That is, the screen generation unit 31e obtains the measured value of the height of the tip of each pin obtained by the execution unit 31d, and generates a result display screen 300 in which the obtained measured value is displayed in a state associated with the pin. For example, for each pin, lead lines L3 and L4 are generated with the tip of the pin as the starting point, and the measured value is displayed in association with the lead lines L3 and L4, respectively. In this way, the user can easily understand the height of each pin.

[0131] In addition, the screen generation unit 31e can also generate a display screen that displays the distance between the point P10 at the tip of the pin and the center line L1. For example, a lead line L5 starting from the point P10 at the tip of the pin is generated for each pin, and the distance is displayed in association with the lead line L5. Both the height and the distance of separation of the pin can be displayed, or only one of them can be displayed.

[0132] The measured values ​​can be displayed in the form of a list, for example. That is, the screen generator 31e can identify a plurality of pins by numbers, display the numbers in a table, and generate a list in which the measured values ​​of the pins identified by the numbers are displayed next to the numbers, and display the list on the display unit 4. The measured values ​​displayed in the list may be both the height and the XY position of the pin, or only one of them. The generated list can also be output to the outside.

[0133] Although it is not a necessary structure, the setting auxiliary device 1 may also have a source code generation function and a function of importing the generated source code into the user's inspection program. That is, the setting auxiliary device 1 is capable of generating setting auxiliary information, which includes text code (source code), library, and reference shape data, etc. The setting auxiliary device 1 generates a text code including a plurality of processing program information and measurement elements and measurement items set during setting. The generated text code is associated with the library and the reference shape data, respectively. The setting auxiliary device 1 outputs the mutually associated text code, library, and reference shape data as setting auxiliary information to the user's inspection program. Thus, the user can use the source code generated by the setting auxiliary device 1 to perform measurement and inspection.

[0134] In addition, not only source code can be imported, but also execution libraries corresponding to various inspection tools and communications for acquiring three-dimensional images by communicating with the measuring head 2 can be imported. In addition, libraries for simply displaying three-dimensional images can be imported. In addition, set registration images can also be imported.

[0135] (Various measurement tools)

[0136] When selecting a measuring tool, the screen generation unit 31e generates a user interface screen for selecting the measuring tool and displays it on the display unit 4. In the user interface screen for selecting the measuring tool, various measuring tools can be selected in addition to the pin tool. The user can select a desired measuring tool ( Fig. 27 Step SA5'). By preparing measurement objects and filter processing corresponding to the measurement tools in advance for each of the various measurement tools, the optimal setting can be easily achieved even for the measurement object W that is difficult to measure except for the optimal setting, so that measurement becomes easy.

[0137] The object of measurement of the pin tool is the representative height of the pin tip region in each measurement region, and when using a reference plane, it is the representative height of the pin tip region from the reference plane. The object of measurement of the pin tool may also include a representative position of the pin tip region.

[0138] The measurement objects of the flaw tool include the presence or absence of flaws with a certain depth from the reference surface, the presence or absence of flaws with a certain height from the reference surface, the number of flaws, the total area of ​​all flaws, etc. The measurement objects of the flaw tool may also include the maximum depth of a concave flaw and the maximum height of a convex flaw. Furthermore, the measurement objects of the flaw tool may also include the areas, maximum depths, and maximum heights of the detected flaws.

[0139] The measurement object of the micro-scar tool is the scar level indicating the degree of scars in each segmented area in the measurement area, the presence or absence of scars with a certain scar level or above, the number of scars, the total area of ​​all scars, etc. The scar level is obtained based on a certain concave-convex change between each segmented area and its surrounding area. In addition, the size of the segmented area corresponds to the size of the scar to be detected. The measurement object of the micro-scar tool can also include the area of ​​each detected scar and the representative scar level.

[0140] (Acceptance of the area for filter setting)

[0141] When accepting the settings of various filters in various measuring tools, the height image is displayed in step SA8', and the designation of the area and position of at least one filter parameter on the height image is accepted (step SA9'). Then, the symbol corresponding to the extraction size is overlapped and displayed on the height image. When accepting the change of the extraction size, the symbol size on the height image is also changed according to the change of the extraction size.

[0142] In step SA10', the extraction conditions / various filters are specified. Then, the process proceeds to steps SA11' and SA12'. Steps SA11' and SA12' are similar to Figure 4 Steps SA11 and SA12 shown are the same.

[0143] In step SA10', for example, the extraction size of the pin tool corresponds to the minimum detection size used as the candidate area of ​​the pin front end. By adjusting the extraction size so that the symbol on the height image is consistent with the smallest pin front end area, the pin front end area and noise can be optimally divided.

[0144] The extraction size of the flaw tool corresponds to the definition of the flaw area for finding the maximum depth of the dent or the maximum height of the convex. By adjusting the extraction size in a manner that includes the largest flaw area, it is possible to set a depth threshold and a height threshold that best divide the flaw area from the noise. For example, when extracting a free-form surface that fits the height image from the height image of the measured object as a reference surface, by adjusting the extraction size, the followability of the free-form surface changes according to the size of the flaw. If the extraction size is reduced, the free-form surface that also fits the large flaw is extracted as the reference surface. In this case, if the differential height image is obtained by obtaining the difference between the height image of the measured object and the reference surface, it is unlikely that the large flaw will be reflected. On the other hand, if the extraction size is increased, the large flaw is not followed, and the free-form surface that fits the part other than the large flaw is extracted as the reference surface. In this case, when the differential height image is obtained by obtaining the difference between the height image of the measured object and the reference surface, the large flaw is reflected.

[0145] The extraction size of the fine flaw tool corresponds to the size of the flaw region to be detected. By adjusting the extraction size so as to include the largest flaw region to be detected, the flaw region and noise can be optimally separated. As with the flaw tool, by adjusting the extraction size, the followability of the free surface extracted as a reference surface to the flaw changes according to the flaw size. In addition, the size of the flaw region to be detected can correspond to the size of the segmented region used to obtain the flaw level.

[0146] (Scar Tool)

[0147] Using a cross section showing a height image Fig.28 The processing content of the flaw tool is explained. The reference plane is obtained by performing a reference plane extraction process of extracting a free-form surface corresponding to the extraction size from the height image of the measured object. The difference between the height image of the measured object and the reference plane is obtained, and a differential height image is obtained. The position of the flaw area is designated on the differential height image. If the flaw corresponding to the flaw area is a concave flaw, the maximum depth of the flaw area is obtained, and the depth threshold is obtained as a filter parameter, i.e., a detection threshold, based on the maximum depth. Moreover, if the flaw corresponding to the flaw area is a convex flaw, the maximum height of the flaw area is obtained, and the height threshold is obtained as a filter parameter, i.e., a detection threshold, based on the maximum height. The flaw area is changed by changing the extraction size, and the detection threshold is then obtained again. In the candidate area of ​​the flaw, if the maximum depth or maximum height in the candidate area is above the detection threshold, it is adopted as a flaw, and the area that does not meet the requirement is not adopted as a flaw.

[0148] like Fig.29As shown, the screen generation unit 31e can display a window 410 for the flaw tool on the display unit 4, and select a flaw type on the window 410 for the flaw tool. In the window 410 for the flaw tool, a flaw type input unit 411 is provided for selecting a flaw type. The flaw types include, for example, concave-convex flaws, dents, convex flaws, etc. When concave-convex flaws are selected through the flaw type input unit 411, both dents and convex flaws are detection objects. If a dent is selected through the flaw type input unit 411, the dent is the detection object, and the convex flaw is excluded from the detection object. When a convex flaw is selected through the flaw type input unit 411, the convex flaw is the detection object, but the dent is excluded from the detection object. The selection operation on the window 410 for the flaw tool, etc., is accepted by the acceptance unit 31b.

[0149] In the window 410 for the flaw tool, an upper limit number input unit 412 is provided for inputting the upper limit number of flaws to be detected. In the upper limit number input unit 412, the upper limit number of flaws to be detected can be accepted and set. When a candidate area of ​​flaws exceeding the upper limit number of flaws to be detected is detected, a detection threshold value not exceeding the upper limit number of flaws to be detected is automatically set. The area of ​​the candidate area of ​​flaws can be included in the filter parameters. Fig.29 By checking the box 413, candidate regions between the upper and lower limits of the area of ​​the candidate regions of the scar are adopted, and other candidate regions are not adopted. Fig.29 FIG. 4 shows a case where the largest flaw among the displayed flaws is designated by the mouse pointer 414. Fig.30 In the case where the detection size is adjusted to match the size of the scar, Fig.30 The detection threshold is optimized.

[0150] (Micro-wrinkle tool)

[0151] A mode using a differential height image and a method showing the difference in the flaw level according to the size of the segmented area Fig.31 , the processing content of the fine flaw tool is explained. The receiving unit 31b receives the designation of the position of the flaw area on the differential height image. In addition to corresponding to the followability of the flaw size when extracting a free curved surface fitted to the height image from the height image of the measured object as a reference surface, the extracted size can also correspond to the size of the segmented area. The average height in the segmented area is calculated, and the flaw level of the segmented area is calculated based on the difference with the surrounding segmented areas. Fig.32The window 420 for the fine flaw tool generated by the display screen generating unit 31e and displayed on the display unit 4 is provided with an upper limit number input unit 421 for inputting the upper limit of the number of flaws to be detected, a flaw level lower limit input unit 422 for inputting the lower limit of the flaw level, a flaw amount lower limit input unit 423 for inputting the lower limit of the flaw amount, and a segment size input unit 424 for inputting the segment size. The selection operation on the window 420 for the fine flaw tool is accepted by the accepting unit 31b.

[0152] In the micro-scar tool, the scars that are smaller than the segmented area are averaged and difficult to reflect in the scar level. In addition, the scars that are larger than the segmented size are difficult to express as the difference with the surrounding segmented area and difficult to reflect in the scar level. Therefore, the scars corresponding to the size of the segmented area are easily reflected in the scar level. By setting the lower limit of the scar level, the area above the lower limit of the scar level becomes the candidate area of ​​the scar. Moreover, according to the lower limit of the scar amount, the area of ​​the candidate area of ​​the scar can be included in the filtering parameters. Candidate areas above the lower limit of the scar amount are used, and candidate areas less than the lower limit of the scar amount are not used. Fig.32 In the case where the detection size is adjusted to match the size of the scar, Fig.33 The detection threshold is optimized.

[0153] (When using)

[0154] Fig.34 1 is a flowchart showing the processing flow when the measuring device 100 is used. In step SC1, it is determined whether the measuring device 100 satisfies a predetermined trigger condition. If the trigger condition is satisfied, the process proceeds to step SC2. In step SC2, the measuring device 100 obtains shape data from the measuring head 2 according to the setting content set at the time of setting. In step SC3, the measuring device 100 performs alignment of the height image based on the reference image. In step SC4, the measuring device 100 and the measuring head 2 are aligned. Fig.34 The process shown in the flowchart of is similarly performed on each measurement area. In step SC5, it is determined whether the measured value is within the tolerance range. In step SC6, the measured value obtained in step SC4 and the determination result of step SC5 are output to an external device such as a PLC (programmable logic controller). Here, in the case where the tolerance determination of step SC5 is not performed, in step SC6, the measured value obtained in step SC4 is output to the external device. In step SC7, it is determined whether the inspection is completed.

[0155] The above-described embodiments are merely illustrative in all respects and should not be interpreted as limiting. Moreover, all modifications and changes within the scope of the equivalents of the scope of the claims are within the scope of the present invention.

[0156] Industrial Applicability

[0157] As described above, the setting support device and the setting support program of the measurement device of the present disclosure can be used, for example, when measuring a pin or the like which is a measurement object.

[0158] Explanation of symbols

[0159] 1 Setting auxiliary device,

[0160] 3. Processing device,

[0161] 4Display unit,

[0162] 31c Setting unit,

[0163] 31d Executive Department,

[0164] 31e Screen generation unit.

Claims

1. A setting auxiliary device for a measuring device, characterized in that: The setting auxiliary device comprises: a receiving unit that receives shape data; A setting unit that sets one or more measurement elements and measurement items using the one or more measurement elements; an execution unit that executes measurement of the measurement item set by the setting unit on the shape data received by the receiving unit; as well as a screen generating unit that generates a display screen having a display area that displays a height image based on the shape data received by the receiving unit in two dimensions and / or three dimensions and displays the one or more measurement elements on the height image, and includes a result display element that indicates a result of the measurement performed by the executing unit, The setting unit includes a tool for measuring a predetermined measurement object as the measurement item, receives designation of a measurement area and designation of an object area for determining the measurement object within the measurement area on the height image in response to selection of the tool, and sets the tool including the measurement area and filter parameters for measuring the measurement object based on the designation of the measurement area, the size of the object area, and / or the representative height in the object area. The screen generator displays a symbol corresponding to the target area on the height image. The execution unit determines a measurement target corresponding to the filter parameter in the measurement area based on the setting of the tool, and executes the measurement of the tool based on a measurement value of the determined measurement target.

2. The setting auxiliary device of the measuring device according to claim 1, characterized in that: The setting unit accepts the designation of the reference plane and sets a tool for measuring the pin according to the acceptance of the designation of the reference plane. The execution unit obtains a measurement value from the reference plane in the measurement area.

3. The setting auxiliary device of the measuring device according to claim 1, characterized in that: The setting unit receives a change designation of the size of the target area and sets a tool including a filter parameter according to the size of the target area. The screen generator displays a symbol corresponding to the change in the size of the target area on the height image.

4. The setting auxiliary device of the measuring device according to claim 1, characterized in that: The setting unit includes a tool for measuring a pin as the measurement item, and sets a tool including a filter parameter corresponding to the size of the target area. The execution unit specifies, based on the setting of the tool, a region in the measurement region that is larger than the filter parameter as the measurement target.

5. The setting auxiliary device for a measuring device according to claim 1, characterized in that: The setting unit sets a plurality of measurement areas corresponding to the pins, The execution unit obtains a representative height and a representative position of the pin tip in each of the plurality of measurement areas as the measurement of the tool.

6. The setting auxiliary device for a measuring device according to claim 1, characterized in that: The setting unit includes a tool for measuring a flaw as the measurement item, and sets a tool including a filter parameter corresponding to at least one of a representative depth or a representative height from a reference surface in the target area. The execution unit determines, based on the setting of the tool, a region of the measurement region that is deeper than the filter parameter as the measurement target.

7. The setting auxiliary device for a measuring device according to claim 6, characterized in that: The execution unit obtains the number of flaws and the size of the flaws in the measurement area as the measurement of the tool.

8. The setting auxiliary device for a measuring device according to claim 7, characterized in that: The execution unit further obtains a representative flaw depth or a representative flaw height in the measurement region as the measurement of the tool.

9. The setting auxiliary device for a measuring device according to claim 1, characterized in that: The setting unit includes a tool for measuring fine flaws as the measurement item, and a tool for setting a filter parameter corresponding to the size of the target area. The execution unit determines, based on the setting of the tool, an area of ​​the measurement area having a size close to the filter parameter as the measurement target.

10. The setting auxiliary device for a measuring device according to claim 9, characterized in that: The execution unit obtains the number of flaws and the size of the flaws in the measurement area as the measurement of the tool.

11. The setting auxiliary device for a measuring device according to claim 10, characterized in that: The execution unit further obtains a flaw level in the measurement area as the measurement of the tool.

12. The setting auxiliary device for a measuring device according to claim 1, characterized in that: The setting unit receives a designation of a reference value for measuring the pin, and sets a tool for measuring the pin in accordance with the acceptance of the designation of the reference value for measuring the pin. The execution unit executes measurement of the tool based on the measurement value and the reference value.

13. The setting auxiliary device of the measuring device according to claim 1, characterized in that: The execution unit performs binarization processing using a preset threshold value on the shape data, sets a region extracted by performing speckle processing as a pin candidate region, and performs filtering processing on the pin candidate region.

14. The setting auxiliary device for a measuring device according to claim 13, characterized in that: The execution unit executes, as the filtering process, a shape filtering process using the shape of the pin candidate region as a filtering target.

15. The setting auxiliary device of the measuring device according to claim 13, characterized in that: The execution unit executes, as the filtering process, a height filtering process using the height of the pin candidate region as a filtering target.

16. The setting auxiliary device for a measuring device according to claim 13, characterized in that: The execution unit executes, as the filtering process, a size filtering process using the size of the pin candidate region as a filtering target.

17. The setting auxiliary device for a measuring device according to claim 2, characterized in that: The setting unit switches from local coordinates to global coordinates when receiving the designation of the reference plane.

18. The setting auxiliary device for a measuring device according to claim 1, characterized in that: The setting unit determines the existence ranges of the plurality of measurement areas based on the designation of three points on the height image by a user.

19. The setting auxiliary device for a measuring device according to claim 18, characterized in that: The setting unit receives designation of the number of the measurement areas in the row direction, the number of the measurement areas in the column direction, and the shape of the measurement areas arranged in the existing range.

20. The setting auxiliary device of the measuring device according to claim 18, characterized in that: The setting unit receives a change in the size of any one of the plurality of measurement areas arranged in the existence range, namely, a first measurement area, and when receiving the change in the size of the first measurement area, sets the sizes of the other measurement areas to the changed size of the first measurement area.

21. The setting auxiliary device of the measuring device according to claim 2, characterized in that: The screen generator generates a display screen that displays a measurement reference based on a reference value and an amount of deviation of the pin from the reference as the result display elements.

22. The setting auxiliary device of the measuring device according to claim 21, characterized in that: The setting unit receives a designation of a tolerance range for the reference value, The execution unit determines whether the measured value is within the tolerance range. The screen generator displays the measurement region including the measurement element whose measurement value is determined by the execution unit to be outside the tolerance range in a different form from the case where the measurement value is determined to be within the tolerance range in a height image displayed three-dimensionally.

23. A setting support program for a measuring device executable by a processing device, characterized in that: The processing device is caused to perform the following processing: receiving shape data; Setting one or more measurement elements and measurement items using the one or more measurement elements; executing measurement of the measurement item on the shape data; as well as generating a display screen having a display area for two-dimensionally displaying and / or three-dimensionally displaying a height image based on the shape data and displaying the one or more measurement elements on the height image, including a result display element indicating a result of the measurement, And, the processing device is caused to perform the following processing: Corresponding to the selection of a tool for measuring a predetermined measurement object, receiving, on the height image, a designation of a measurement area and a designation of an object area for determining the measurement object within the measurement area, and setting a tool including a measurement area for measuring the measurement object and a filter parameter according to the designation of the measurement area, the size of the object area and / or a representative height in the object area; as well as A symbol corresponding to the object area is displayed on the height image, a measurement object corresponding to the filter parameter in the measurement area is determined based on the setting of the tool, and measurement of the tool is performed based on a measurement value of the determined measurement object.

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