Load impedance acquisition device and radio frequency power supply system

Abstract

The invention provides a load impedance acquisition device and a radio frequency power supply system. The load impedance acquisition device comprises a signal acquisition unit, a first arithmetic unit, a signal valuing unit and a second arithmetic unit. The signal acquisition unit is used for acquiring a voltage waveform signal and a current waveform signal of a radio frequency signal output to a load by a radio frequency power supply; the first operation unit is connected with the signal acquisition unit, and the first operation unit is at least used for performing operation according to the voltage waveform signal and the current waveform signal to obtain a voltage square signal and a current square signal; the signal value taking unit is connected with the first operation unit, and the signal value taking unit is at least used for obtaining a voltage square value of the voltage square signal and obtaining a current square value of the current square signal; and the second operation unit is connected with the signal valuing unit and is at least used for performing operation according to the voltage square value and the current square value so as to obtain an impedance module value of the load. The impedance condition of the load can be quickly determined.

Description

Technical Field

[0001] The present application relates to the field of radio frequency technology, and in particular to a load impedance acquisition device and a radio frequency power supply system having the load impedance acquisition device. Background Art

[0002] At present, with the development of RF power technology, the application of RF power is becoming more and more extensive. When the RF power is output to the load, the RF power and the load need to be impedance matched. Among them, determining the impedance of the load is of great significance for the impedance matching between the RF power and the load. Therefore, when the RF power outputs RF signals, how to quickly determine the impedance of the load in order to quickly complete impedance matching and achieve the best output effect has become a problem that needs to be considered. Summary of the invention

[0003] The present application provides a load impedance acquisition device and a radio frequency power supply system, which can quickly determine the impedance of the load.

[0004] In a first aspect, a load impedance acquisition device is provided, the load impedance acquisition device comprising a signal acquisition unit, a first operation unit, a signal value unit and a second operation unit. The signal acquisition unit is used to connect to the output path of the RF power supply to obtain the voltage waveform signal and the current waveform signal of the RF signal output by the RF power supply to the load. The first operation unit is connected to the signal acquisition unit, and the first operation unit is at least used to perform operations based on the voltage waveform signal and the current waveform signal to obtain a voltage square signal and a current square signal. The signal value unit is connected to the first operation unit, and the signal value unit is at least used to obtain the voltage square value of the voltage square signal and the current square value of the current square signal. The second operation unit is connected to the signal value unit, and the second operation unit is at least used to perform operations based on the voltage square value and the current square value to obtain the impedance modulus value of the load. Wherein, the voltage waveform signal and the current waveform signal are both sine waves.

[0005] In a possible implementation manner, the first operation unit is used to perform a square operation on the voltage waveform signal to obtain the voltage square signal, and to perform a square operation on the current waveform signal to obtain the current square signal. The second operation unit is used to perform a division operation on the voltage square value and the current square value to obtain a first operation value, and to perform a square root operation on the first operation value to obtain the impedance modulus value of the load.

[0006] In a possible implementation manner, the first operation unit is further used to perform a multiplication operation on the voltage waveform signal and the current waveform signal to obtain a phase product signal. The signal value acquisition unit is further used to obtain a phase product value of the phase product signal. The second operation unit is further used to perform an operation based on at least the voltage square value, the current square value, and the phase product value to obtain a waveform phase angle between the voltage waveform signal and the current waveform signal.

[0007] In a possible implementation, the second operation unit is used to perform multiplication and square root operations on the voltage square value and the current square value in sequence to obtain a second operation value, and to perform division operations on the phase product value and the second operation value to obtain a third operation value, and to perform inverse trigonometric function operations on the third operation value to obtain the waveform phase angle.

[0008] In a possible implementation, the load impedance acquisition device further includes a signal phase shifting unit, the signal phase shifting unit is connected between the signal acquisition unit and the first operation unit, and the signal phase shifting unit is used to phase shift the voltage waveform signal or the current waveform signal by 1 / 4 of the cycle time of the radio frequency signal. The second operation unit is used to perform an inverse sine function operation on the third operation value to obtain the waveform phase angle.

[0009] In a possible implementation manner, the load impedance acquisition device further includes a signal determination unit, the signal determination unit is connected to both the signal acquisition unit and the second operation unit, and the signal determination unit is used to determine the sign of the waveform phase angle between the voltage waveform signal and the current waveform signal. The second operation unit is used to perform an arccosine function operation on the third operation value, and obtain the waveform phase angle according to the sign of the waveform phase angle determined by the signal determination unit.

[0010] In a possible implementation, the load impedance acquisition device further includes a third operation unit, which is connected to the second operation unit, and is used to perform operations based on the impedance modulus of the load and the waveform phase angle to obtain the impedance value of the load.

[0011] In a possible implementation, the impedance value of the load includes a real part and an imaginary part, and the impedance value of the load is the sum of the real part of the impedance value of the load and the imaginary part of the impedance value of the load. The real part of the impedance value of the load is the product of the impedance modulus of the load and the cosine value of the waveform phase angle, and the imaginary part of the impedance value of the load is the product of the impedance modulus of the load, the sine value of the waveform phase angle, and the imaginary unit.

[0012] In a possible implementation, the signal value acquisition unit includes a first filter and a second filter, wherein the first filter and the second filter are both connected between the first operation unit and the second operation unit, the first filter is used to filter out the AC component of the voltage square signal to obtain the voltage square value, and the second filter is used to filter out the AC component of the current square signal to obtain the current square value.

[0013] In a second aspect, a radio frequency power supply system is also provided, the radio frequency power supply system comprising a radio frequency power supply and a load impedance acquisition device. The load impedance acquisition device comprises a signal acquisition unit, a first operation unit, a signal value unit and a second operation unit. The signal acquisition unit is used to connect to the output path of the radio frequency power supply to obtain the voltage waveform signal and the current waveform signal of the radio frequency signal output by the radio frequency power supply to the load. The first operation unit is connected to the signal acquisition unit, and the first operation unit is at least used to perform operations according to the voltage waveform signal and the current waveform signal to obtain a voltage square signal and a current square signal. The signal value unit is connected to the first operation unit, and the signal value unit is at least used to obtain the voltage square value of the voltage square signal and the current square value of the current square signal. The second operation unit is connected to the signal value unit, and the second operation unit is at least used to perform operations according to the voltage square value and the current square value to obtain the impedance modulus value of the load. Wherein, the voltage waveform signal and the current waveform signal are both sine waves.

[0014] The load impedance acquisition device and radio frequency power supply system of the present application, by setting a first operation unit to obtain a voltage square signal and a current square signal according to a voltage waveform signal and a current waveform signal, and then by setting a second operation unit to obtain the voltage square value and the current square value corresponding to the voltage square signal and the current square signal, can quickly calculate the impedance modulus value of the load, quickly determine the impedance condition of the load, facilitate rapid completion of impedance matching, and achieve the best output effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0016] Figure 1 Schematic diagram of a load impedance acquisition device in an embodiment of the present application.

[0017] Figure 2 FIG. 4 is a schematic diagram of a first computing unit in an embodiment of the present application.

[0018] Figure 3FIG. 4 is a schematic diagram of a second computing unit in an embodiment of the present application.

[0019] Figure 4 It is a schematic diagram of the load impedance acquisition device in another embodiment of the present application.

[0020] Figure 5 It is a schematic diagram of the load impedance acquisition device in another embodiment of the present application.

[0021] Figure 6 Schematic diagram of the load impedance acquisition device in yet another embodiment of the present application.

[0022] Figure 7 Schematic diagram of a signal value acquisition unit in an embodiment of the present application.

[0023] Figure 8 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application.

[0024] Description of reference numerals: 1000, RF power system, RF, RF power, RFS, RF signal, 10, load impedance acquisition device, 100, signal acquisition unit, Vs, voltage waveform signal, Is, current waveform signal, 200, first operation unit, 210, first operator, Vq, voltage square signal, 220, second operator, Iq, current square signal, 230, third operator, VIq, phase product signal, 300, signal value acquisition unit, 310, first filter, V1, voltage square value, 32 0. Second filter, I1. Current square value, 330. Third filter, VI1. Phase product value, 400. Second operation unit, 410. Fourth operation unit, OP1. First operation value, 420. Fifth operation unit, |Z|. Impedance modulus value, 430. Sixth operation unit, OP2. Second operation value, 440. Seventh operation unit, OP3. Third operation value, 450. Eighth operation unit, θ. Waveform phase angle, 500. Signal phase shift unit, 600. Signal determination unit, 700. Third operation unit, RL. Load. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] In the description of the embodiments of the present application, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0027] In the following, the terms "first", "second", "third", "fourth", etc. are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, a feature defined as "first", "second", "third", "fourth", etc. may explicitly or implicitly include one or more of the feature. In the description of the embodiments of the present application, unless otherwise specified, "multiple" means two or more.

[0028] In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such process, method, product, or device.

[0029] See also Figure 1 , Figure 1 FIG. 1 is a schematic diagram of a load impedance acquisition device in an embodiment of the present application. Figure 1 As shown, the present application provides a load impedance acquisition device 10, which includes a signal acquisition unit 100, a first operation unit 200, a signal value unit 300, and a second operation unit 400. The signal acquisition unit 100 is used to connect to the output path of the radio frequency power supply RF to obtain the voltage waveform signal Vs and the current waveform signal Is of the radio frequency signal output by the radio frequency power supply RF to the load RL. The first operation unit 200 is connected to the signal acquisition unit 100, and the first operation unit 200 is at least used to perform operations according to the voltage waveform signal Vs and the current waveform signal Is to obtain the voltage square signal Vq and the current square signal Iq. The signal value unit 300 is connected to the first operation unit 200, and the signal value unit 300 is at least used to obtain the voltage square value V1 of the voltage square signal Vq and the current square value I1 of the current square signal Iq. The second operation unit 400 is connected to the signal value unit 300, and the second operation unit 400 is at least used to perform operations according to the voltage square value V1 and the current square value I1 to obtain the impedance modulus value |Z| of the load RL. Wherein, the voltage waveform signal Vs and the current waveform signal Is are both sine waves.

[0030] Therefore, the load impedance acquisition device 10 in the present application, by setting the first operation unit 200 to obtain the voltage square signal Vq and the current square signal Iq according to the voltage waveform signal Vs and the current waveform signal Is, and then by setting the second operation unit 400 to obtain the voltage square value V1 and the current square value I1 corresponding to the voltage square signal Vq and the current square signal Iq, can quickly calculate the impedance modulus |Z| of the load RL, quickly determine the impedance condition of the load RL, facilitate rapid completion of impedance matching, and achieve the best output effect.

[0031] The current waveform signal Is reflects the current component of the radio frequency signal, and the voltage waveform signal Vs reflects the voltage component of the radio frequency signal.

[0032] The waveform of the voltage waveform signal Vs and the waveform of the current waveform signal Is may both be sine waves or cosine waves.

[0033] Please also read Figure 2 , Figure 3 , Figure 2 is a schematic diagram of a first computing unit in an embodiment of the present application, Figure 3 FIG. 1 is a schematic diagram of a second computing unit in an embodiment of the present application. Figure 2 , Figure 3 As shown, the first operation unit 200 is used to perform a square operation on the voltage waveform signal Vs to obtain a voltage square signal Vq, and to perform a square operation on the current waveform signal Is to obtain a current square signal Iq. The second operation unit 400 is used to perform a division operation on the voltage square value V1 and the current square value I1 to obtain a first operation value OP1, and to perform a square root operation on the first operation value OP1 to obtain an impedance modulus value |Z| of the load RL.

[0034] Therefore, in the load impedance acquisition device 10 in the present application, the voltage square signal Vq is the product of the voltage waveform signal Vs and the voltage waveform signal Vs, that is, the voltage square signal Vq is specifically obtained by performing a square operation on the voltage waveform signal Vs by the first operation unit 200. The current square signal Iq is the product of the current square value I1 and the current square value I1, that is, the current square signal Iq is specifically obtained by performing a square operation on the current waveform signal Is by the first operation unit 200. Then, the impedance modulus |Z| of the load RL can be quickly obtained by performing the above operation on the voltage square value V1 and the current square value I1 by the second operation unit 400.

[0035] like Figure 2 , Figure 3As shown, the first operation unit 200 is also used to perform multiplication operation on the voltage waveform signal Vs and the current waveform signal Is to obtain the phase product signal VIq. The signal value acquisition unit 300 is also used to obtain the phase product value VI1 of the phase product signal VIq. The second operation unit 400 is also used to perform operation based on at least the voltage square value V1, the current square value I1 and the phase product value VI1 to obtain the waveform phase angle θ between the voltage waveform signal Vs and the current waveform signal Is.

[0036] Therefore, in the load impedance acquisition device 10 in the present application, the phase product signal VIq is the product of the voltage waveform signal Vs and the current waveform signal Is, that is, the phase product signal VIq is specifically obtained by multiplying the voltage waveform signal Vs and the current waveform signal Is by the first operation unit 200. Furthermore, the second operation unit 400 can also quickly determine the waveform phase angle θ between the voltage waveform signal Vs and the current waveform signal Is according to the voltage square value V1, the current square value I1 and the phase product value VI1.

[0037] like Figure 3 As shown, the second operation unit 400 is used to perform multiplication and square root operations on the voltage square value V1 and the current square value I1 in sequence to obtain a second operation value OP2, and to perform division operations on the phase product value VI1 and the second operation value OP2 to obtain a third operation value OP3, and to perform inverse trigonometric function operations on the third operation value OP3 to obtain a waveform phase angle θ.

[0038] Therefore, in the load impedance acquisition device 10 in the present application, the waveform phase angle θ is specifically calculated based on the trigonometric function value related to the waveform phase angle θ, the voltage square value V1 and the current square value I1.

[0039] Specifically, the phase product value VI1 can be |V|×|I|×cosθ or |V|×|I|×sinθ, where |V| is the effective value of voltage, |I| is the effective value of current, and cosθ and sinθ are the cosine value or sine value of the waveform phase angle θ between the voltage waveform signal Vs and the current waveform signal Is. The voltage square value V1 corresponds to |V| 2 , which is the square of the effective value of the voltage, and the square value of the current I1 corresponds to |I| 2 , that is, the square of the effective value of the current, then the second operation value OP2 corresponds to |V|×|I|, and the third operation value OP3 is cosθ or sinθ. By performing inverse trigonometric function operation on the third operation value OP3, the waveform phase angle θ can be obtained.

[0040] Please refer again Figure 1 .like Figure 1 , Figure 2As shown, the first operation unit 200 may include a first operator 210, a second operator 220 and a third operator 230. The first operator 210, the second operator 220 and the third operator 230. The first operator 210 is used to perform a square operation on the voltage waveform signal Vs to obtain a voltage square signal Vq; the second operator 220 is used to perform a square operation on the current waveform signal Is to obtain a current square signal Iq; the third operator 230 is used to perform a multiplication operation on the voltage waveform signal Vs and the current waveform signal Is to obtain a phase product signal VIq.

[0041] like Figure 1 , Figure 3 As shown, the second operation unit 400 may include a fourth operator 410, a fifth operator 420, a sixth operator 430, a seventh operator 440 and an eighth operator 450. The fourth operator 410 is used to perform a division operation on the voltage square value V1 and the current square value I1 to obtain a first operation value OP1; the fifth operator 420 is used to perform a square root operation on the first operation value OP1 to obtain an impedance modulus value |Z| of the load RL; the sixth operator 430 is used to perform a multiplication and a square root operation on the voltage square value V1 and the current square value I1 in sequence to obtain a second operation value OP2; the seventh operator 440 is used to perform a division operation on the phase product value VI1 and the second operation value OP2 to obtain a third operation value OP3; the eighth operator 450 is used to perform an inverse trigonometric function operation on the third operation value OP3 to obtain a waveform phase angle θ.

[0042] Please also read Figure 4 , Figure 4 FIG. 1 is a schematic diagram of a load impedance acquisition device in another embodiment of the present application. Figure 3 , Figure 4 As shown, the load impedance acquisition device 10 further includes a signal phase shift unit 500, which is connected between the signal acquisition unit 100 and the first operation unit 200. The signal phase shift unit 500 is used to phase shift the voltage waveform signal Vs or the current waveform signal Is by 1 / 4 of the cycle time of the radio frequency signal. The second operation unit 400 is used to perform an inverse sine function operation on the third operation value OP3 to obtain a waveform phase angle θ.

[0043] Therefore, the load impedance acquisition device 10 in the present application sets the signal phase shift unit 500 to shift the voltage waveform signal Vs or the current waveform signal Is by 1 / 4 of the cycle time of the RF signal, so that the third operation value OP3 is sinθ, without considering the lead and lag of the voltage waveform signal Vs and the current waveform signal Is, and then the second operation unit 400 performs an inverse sine function operation on the third operation value OP3, so that the waveform phase angle θ can be obtained.

[0044] Please also read Figure 5 , Figure 5 FIG. 1 is a schematic diagram of a load impedance acquisition device in another embodiment of the present application. Figure 3 , Figure 5 As shown, the load impedance acquisition device 10 further includes a signal determination unit 600, which is connected to both the signal acquisition unit 100 and the second operation unit 400, and the signal determination unit 600 is used to determine the sign of the waveform phase angle θ between the voltage waveform signal Vs and the current waveform signal Is. The second operation unit 400 is used to perform an arccosine function operation on the third operation value OP3, and obtain the waveform phase angle θ according to the sign of the waveform phase angle θ determined by the signal determination unit 600.

[0045] Therefore, the load impedance acquisition device 10 in the present application needs to perform impedance matching from time to time during the process of the RF power supply RF outputting the RF signal to the load RL to avoid damage to the RF power supply RF due to large reflected power. Therefore, the waveform phase angle θ is generally small, and the corresponding value of the sine function is also small when the waveform phase angle θ is small. The waveform phase angle θ obtained by performing an inverse sine function operation on the third operation value OP3 may not be accurate enough. Therefore, the voltage waveform signal Vs or the current waveform signal Is is not phase-shifted, so that the third operation value OP3 is cosθ, and the sign of the waveform phase angle θ between the voltage waveform signal Vs and the current waveform signal Is is determined by setting a signal determination unit 600, and then the third operation value OP3 is inversely cosine-operated by the second operation unit 400, and the waveform phase angle θ can be obtained more accurately according to the sign of the waveform phase angle θ determined by the signal determination unit 600.

[0046] Please also read Figure 6 , Figure 6 FIG. 1 is a schematic diagram of a load impedance acquisition device in another embodiment of the present application. Figure 6 As shown, the load impedance acquisition device 10 also includes a third operation unit 700, which is connected to the second operation unit 400, and is used to perform operations according to the impedance modulus |Z| of the load RL and the waveform phase angle θ to obtain the impedance value of the load RL.

[0047] Therefore, the load impedance acquisition device 10 in the present application, by setting the third operation unit 700, can quickly obtain the impedance value of the load RL according to the impedance modulus |Z| and the waveform phase angle θ of the load RL, further determine the impedance condition of the load RL, and more conveniently complete impedance matching quickly to achieve the best output effect.

[0048] In one or more embodiments, the impedance value of the load RL includes a real part and an imaginary part, and the impedance value of the load RL is the sum of the real part of the impedance value of the load RL and the imaginary part of the impedance value of the load RL. The real part of the impedance value of the load RL is the product of the impedance modulus value |Z| of the load RL and the cosine value of the waveform phase angle θ, and the imaginary part of the impedance value of the load RL is the product of the impedance modulus value |Z| of the load RL, the sine value of the waveform phase angle θ, and the imaginary unit.

[0049] Therefore, the load impedance acquisition device 10 in the present application can obtain the real part and the imaginary part of the impedance value of the load RL respectively according to the impedance modulus |Z|, the waveform phase angle θ and the imaginary unit of the load RL, and further determine the impedance value of the load RL.

[0050] Specifically, the impedance value Z=R+X×j of the load RL is taken as an example for explanation, wherein R is the real part of the impedance value of the load RL, X is the imaginary part of the impedance value of the load RL, and j is an imaginary unit, then R=|Z|×cosθ, X=|Z|×sinθ.

[0051] Please also read Figure 7 , Figure 7 FIG. 1 is a schematic diagram of a signal value acquisition unit in an embodiment of the present application. Figure 1 , Figure 7 As shown, the signal value acquisition unit 300 includes a first filter 310 and a second filter 320. The first filter 310 and the second filter 320 are both connected between the first operation unit 200 and the second operation unit 400. The first filter 310 is used to filter out the AC component of the voltage square signal Vq to obtain the voltage square value V1, and the second filter 320 is used to filter out the AC component of the current square signal Iq to obtain the current square value I1.

[0052] Therefore, the load impedance acquisition device 10 in the present application can acquire the voltage square value V1 corresponding to the square of the voltage effective value and the current square value I1 corresponding to the square of the current effective value by correspondingly setting the first filter 310 and the second filter 320.

[0053] like Figure 1 , Figure 7 As shown, the signal value unit 300 further includes a third filter 330, which is connected between the first operation unit 200 and the second operation unit 400. The third filter 330 is used to filter out the AC component of the phase product signal VIq to obtain the phase product value VI1.

[0054] Furthermore, the first filter 310, the second filter 320 and the third filter 330 may be connected to corresponding operators in the first operation unit 200 and corresponding operators in the second operation unit 400 according to input signals and output values, which will not be described in detail herein.

[0055] In one or more embodiments, the signal acquisition unit 100 may include a first signal acquisition circuit and a second signal acquisition circuit, wherein the first signal acquisition circuit and the second signal acquisition circuit are used to be connected to the output path of the radio frequency power supply RF. The first signal acquisition circuit is used to acquire the voltage waveform signal Vs, and the second signal acquisition circuit is used to acquire the current waveform signal Is.

[0056] Further, the first signal acquisition circuit may include a resistor voltage-dividing acquisition circuit connected between the output path of the radio frequency power supply RF and the ground, the resistor voltage-dividing acquisition circuit includes two resistors connected in series, and the connection point between the two resistors is used to output the voltage waveform signal Vs. The first signal acquisition circuit may also include a capacitor voltage-dividing acquisition circuit connected between the output path of the radio frequency power supply RF and the ground, the capacitor voltage-dividing acquisition circuit includes two capacitors connected in series, and the connection point between the two capacitors is used to output the voltage waveform signal Vs. The first signal acquisition circuit may also include a voltage sensor or other devices that can be used to acquire the voltage waveform signal Vs.

[0057] Furthermore, the second signal acquisition circuit may include a current transformer connected in the output path of the RF power supply RF, that is, a current transformer connected between the RF power supply RF and the load RL. The second signal acquisition circuit may also include a current sensor or other devices that can be used to obtain the current waveform signal Is.

[0058] In some embodiments, one or more of the first operation unit 200, the second operation unit 400 and the third operation unit 700 can be an integrated operator, or an operation circuit composed of electronic devices such as operational amplifiers, diodes, capacitors, resistors, etc., or a central processing unit (CPU), a microcontrol unit (MCU), a digital signal processor (DSP), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices. The present application is not limited to this, as long as the corresponding operation can be completed.

[0059] The load impedance acquisition device 10 of the present application, through the above structure, can quickly calculate the impedance modulus |Z| of the load RL, and then can quickly calculate the impedance value of the load RL, so as to quickly determine the impedance condition of the load RL, facilitate rapid completion of impedance matching, and achieve the best output effect.

[0060] See also Figure 8 , Figure 8 FIG. 1 is a schematic diagram of a radio frequency power supply system in an embodiment of the present application. Figure 8 As shown, the present application further provides a radio frequency power supply system 1000, and the radio frequency power supply system 1000 includes a radio frequency power supply RF and a load impedance acquisition device 10 in any of the aforementioned embodiments.

[0061] Please refer again Figure 1 .like Figure 1 As shown, the load impedance acquisition device 10 includes a signal acquisition unit 100, a first operation unit 200, a signal value unit 300 and a second operation unit 400. The signal acquisition unit 100 is used to connect to the output path of the radio frequency power supply RF to obtain the voltage waveform signal Vs and the current waveform signal Is of the radio frequency signal output by the radio frequency power supply RF to the load RL. The first operation unit 200 is connected to the signal acquisition unit 100, and the first operation unit 200 is at least used to perform operations according to the voltage waveform signal Vs and the current waveform signal Is to obtain the voltage square signal Vq and the current square signal Iq. The signal value unit 300 is connected to the first operation unit 200, and the signal value unit 300 is at least used to obtain the voltage square value V1 of the voltage square signal Vq and the current square value I1 of the current square signal Iq. The second operation unit 400 is connected to the signal value unit 300, and the second operation unit 400 is at least used to perform operations according to the voltage square value V1 and the current square value I1 to obtain the impedance modulus value |Z| of the load RL. Wherein, the voltage waveform signal Vs and the current waveform signal Is are both sine waves.

[0062] The more specific structure of the load impedance acquisition device 10 can refer to the relevant content of the load impedance acquisition device 10 in any of the aforementioned embodiments, which will not be repeated here.

[0063] like Figure 1 , Figure 8 As shown, the radio frequency power supply RF can be used to output a radio frequency signal to the load RL to provide electrical energy to the load RL.

[0064] The load impedance acquisition device 10 and the RF power supply system 1000 of the present application, through the above structure, can quickly calculate the impedance modulus |Z| of the load RL, and then can quickly calculate the impedance value of the load RL, so as to quickly determine the impedance condition of the load RL, facilitate rapid completion of impedance matching, and achieve the best output effect.

[0065] The above description is only a specific implementation of the present application, but the protection scope of the present application is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed in the present application, which should be included in the protection scope of the present application; in the absence of conflict, the embodiments of the present application and the features in the embodiments can be combined with each other. Therefore, the protection scope of the present application shall be based on the protection scope of the claims.

Claims

1. A load impedance acquisition device, characterized in that: include: A signal acquisition unit, used to be connected to the output path of the radio frequency power supply to obtain a voltage waveform signal and a current waveform signal of the radio frequency signal output by the radio frequency power supply to the load; a first operation unit connected to the signal acquisition unit, the first operation unit being at least used to perform operation according to the voltage waveform signal and the current waveform signal to obtain a voltage square signal and a current square signal; a signal value obtaining unit, connected to the first operation unit, the signal value obtaining unit being used at least to obtain a voltage square value of the voltage square signal and to obtain a current square value of the current square signal; a second operation unit connected to the signal value obtaining unit, the second operation unit being at least used to perform operation according to the square value of the voltage and the square value of the current to obtain the impedance modulus value of the load; Wherein, the voltage waveform signal and the current waveform signal are both sine waves.

2. The load impedance acquisition device according to claim 1, characterized in that: The first operation unit is used to perform a square operation on the voltage waveform signal to obtain the voltage square signal, and to perform a square operation on the current waveform signal to obtain the current square signal; The second operation unit is used for performing a division operation on the square value of the voltage and the square value of the current to obtain a first operation value, and performing a square root operation on the first operation value to obtain an impedance modulus value of the load.

3. The load impedance acquisition device according to claim 1, characterized in that: The first operation unit is further used to perform a multiplication operation on the voltage waveform signal and the current waveform signal to obtain a phase product signal; The signal value obtaining unit is further used to obtain the phase product value of the phase product signal; The second operation unit is further configured to perform operation at least according to the voltage square value, the current square value and the phase product value to obtain a waveform phase angle between the voltage waveform signal and the current waveform signal.

4. The load impedance acquisition device according to claim 3, characterized in that: The second operation unit is used to perform multiplication and square root operations on the voltage square value and the current square value in sequence to obtain a second operation value, and to perform division operations on the phase product value and the second operation value to obtain a third operation value, and to perform inverse trigonometric function operations on the third operation value to obtain the waveform phase angle.

5. The load impedance acquisition device according to claim 4, characterized in that: The load impedance acquisition device further includes a signal phase shifting unit, which is connected between the signal acquisition unit and the first operation unit, and is used to phase shift the voltage waveform signal or the current waveform signal by 1 / 4 of the cycle time of the radio frequency signal; The second operation unit is used for performing an arcsine function operation on the third operation value to obtain the waveform phase angle.

6. The load impedance acquisition device according to claim 4, characterized in that: The load impedance acquisition device further includes a signal determination unit, the signal determination unit is connected to both the signal acquisition unit and the second operation unit, and the signal determination unit is used to determine the sign of the waveform phase angle between the voltage waveform signal and the current waveform signal; The second operation unit is used to perform an arc cosine function operation on the third operation value, and obtain the waveform phase angle according to the sign of the waveform phase angle determined by the signal determination unit.

7. The load impedance acquisition device according to claim 3, characterized in that: The load impedance acquisition device further includes a third operation unit, which is connected to the second operation unit and is used for performing operation according to the impedance modulus value of the load and the waveform phase angle to obtain the impedance value of the load.

8. The load impedance acquisition device according to claim 3, characterized in that: The impedance value of the load includes a real part and an imaginary part, and the impedance value of the load is the sum of the real part of the impedance value of the load and the imaginary part of the impedance value of the load; The real part of the impedance value of the load is the product of the impedance modulus of the load and the cosine value of the waveform phase angle, and the imaginary part of the impedance value of the load is the product of the impedance modulus of the load, the sine value of the waveform phase angle and the imaginary unit.

9. The load impedance acquisition device according to claim 1, characterized in that: The signal value acquisition unit includes a first filter and a second filter, both of which are connected between the first operation unit and the second operation unit, the first filter is used to filter out the AC component of the voltage square signal to obtain the voltage square value, and the second filter is used to filter out the AC component of the current square signal to obtain the current square value.

10. A radio frequency power supply system, characterized in that: It comprises a radio frequency power supply and a load impedance acquisition device as described in any one of claims 1 to 9.

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