Light uniformizing assembly and speckle eliminating device comprising same

Abstract

The invention provides a dodging assembly and a speckle eliminating device comprising the same. The speckle eliminating device comprises a dodging assembly, a connecting part and an actuator. The dodging assembly comprises a diffusion surface and a reflection surface arranged at an opposite position. And one end of the connecting part is connected to the dodging assembly. The actuator enables the dodging assembly to move back and forth in the axial direction of the dodging assembly. The speckle eliminating device disclosed by the invention can simplify the structure, and is convenient to assemble, position and adjust the vibration path and direction of the moving part.

Description

Technical Field

[0001] The present disclosure relates to an optical component, and more particularly, to a light homogenizing component and a speckle elimination device comprising the same. Background Art

[0002] This section provides background information related to the present disclosure which is not necessarily prior art.

[0003] In the illumination and light combining system architecture of a laser projector, the speckle effect of the laser light source will cause light spots to appear on the screen. In the prior art, a diffuser is used in the illumination and light combining system. In order to achieve a better speckle elimination effect, the prior art makes the diffuser vibrate or rotate to achieve the effect of eliminating the speckle.

[0004] One prior art uses a wheel-shaped diffuser (Diffuser Wheel), which is rotated by a motor to achieve the effect of dispersing speckles. However, this structure is relatively large in size, and the motor produces relatively loud noise.

[0005] Chinese patent number CN112764297A discloses a dynamic diffuser assembly, including an upper moving part, a lower fixed part, four elastic support members and four groups of magnet coil groups, with a complex structure and difficult positioning. It is not easy to adjust the vibration path and direction of the moving part. U.S. Patent No. US20160306183 discloses an optical component for reducing speckle noise, disclosing three or four elastic components with complex structures and three or four groups of magnet coil groups. Chinese patent number CN113641061B discloses a beam speckle elimination device, including four relatively complex springs and two groups of magnet coil groups, which still does not solve the problems of difficult positioning and difficult adjustment of the vibration path and direction of the moving part.

[0006] Chinese patent CN215264354U discloses a speckle elimination device, which includes eight springs and four sets of magnet coils. In order to solve the problem that the horizontally arranged springs are difficult to maintain in the vertical direction, an arc-shaped protrusion is also set under the mounting seat to avoid positioning deviation in the vertical direction. Taiwan patent number TWI326793 discloses an integrating column adjustment device, which uses screws to adjust the integrating column. Taiwan patent number TWI308250 discloses an integrating column and an optical engine, which also uses screws to adjust the integrating column. Summary of the invention

[0007] In order to solve the above problems of the prior art, the present disclosure aims to provide a light homogenizing component and a speckle elimination device including the same, which can effectively solve the problems of the prior art such as complex structure, difficult positioning, and difficulty in adjusting the vibration path and direction of the moving part.

[0008] To achieve the above-mentioned purpose, the present disclosure provides a speckle elimination device, comprising: a light homogenizing component, a connecting mechanism, and an actuator. The light homogenizing component comprises a diffusion surface and a reflection surface arranged at a relative position. One end of the connecting mechanism is connected to the light homogenizing component. The actuator can move the light homogenizing component forward and backward along the axis of the light homogenizing component.

[0009] The present disclosure also provides a light homogenizing component, comprising: an elongated structure, a diffusion surface, and a reflection surface. The elongated structure comprises a light input end and a light output end. The diffusion surface faces the inner side of the elongated structure. The reflection surface faces the inner side of the elongated structure and is arranged at a position relative to the diffusion surface. The light homogenizing component can make the light beam entering through the light input end be emitted from the light output end.

[0010] Compared with the prior art, the speckle elimination device disclosed in the present invention can move the light homogenizing component forward and backward along the axis of the light homogenizing component by providing the actuator, which can simplify the structure, facilitate assembly positioning and adjustment of the vibration path and direction of the moving part, and effectively avoid the problems in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] The foregoing and other advantages of the present disclosure will become immediately apparent to those skilled in the art from the following detailed description, particularly when reference is made to the drawings described herein.

[0012] Figure 1A A schematic diagram showing the planar structure of a light homogenization component according to an embodiment of the present disclosure;

[0013] Figure 1B Display according to Figure 1A Schematic diagram of the cross-sectional structure along line AA';

[0014] Figure 2 A schematic diagram showing a light beam passing through a light homogenizing component and a vibration direction of the light homogenizing component according to an embodiment of the present disclosure;

[0015] Figure 3A A schematic diagram showing a planar structure of a light homogenization component according to another embodiment of the present disclosure;

[0016] Figure 3B Display according to Figure 3A Schematic diagram of the cross-sectional structure along line BB';

[0017] Figure 4A A schematic diagram showing a planar structure of a light homogenization component according to another embodiment of the present disclosure;

[0018] Figure 4B Shows a schematic diagram of the cross-sectional structure along line CC' in Figure A;

[0019] Figure 5 A schematic diagram showing the structure of a speckle elimination device according to an embodiment of the present disclosure;

[0020] Fig. 6A Display according to Figure 5 A schematic diagram of the cross-section structure of the speckle elimination device in FIG.

[0021] Figure 6B Display according to Figure 5 Schematic diagram of the vibration direction of the speckle elimination device;

[0022] Figure 7 Display according to Figure 5 A schematic structural diagram of the speckle elimination device from another perspective;

[0023] Figure 8 A schematic diagram showing the structure of a speckle elimination device according to another embodiment of the present disclosure;

[0024] Fig. 9 Display according to Figure 8 A schematic diagram of the cross-section structure of the speckle elimination device in FIG.

[0025] Fig.10 A schematic diagram showing the structure of a speckle elimination device according to another embodiment of the present disclosure;

[0026] Fig.11 Display according to Fig.10 A schematic diagram of the cross-section structure of the speckle elimination device in FIG.

[0027] Fig.12 A schematic diagram showing the structure of a speckle elimination device according to yet another embodiment of the present disclosure;

[0028] Fig.13 A schematic diagram showing the structure of a speckle elimination device according to yet another embodiment of the present disclosure;

[0029] Fig.14 Display according to Fig.13 A schematic structural diagram of the speckle elimination device from another perspective. DETAILED DESCRIPTION

[0030] In order to make the above and other purposes, features, and advantages of the present disclosure more obvious and easy to understand, the preferred embodiments of the present disclosure will be specifically cited below, and the accompanying drawings will be described in detail as follows. Furthermore, the directional terms mentioned in the present disclosure, such as up, down, top, bottom, front, back, left, right, inside, outside, side layer, periphery, center, horizontal, lateral, vertical, longitudinal, axial, radial, topmost or bottommost, etc., are only referenced to the directions of the attached drawings. Therefore, the directional terms used are used to illustrate and understand the present disclosure, but not to limit the present disclosure. In the drawings, units with similar structures are represented by the same reference numerals.

[0031] Figure 1A A schematic diagram showing the planar structure of a light homogenization component according to an embodiment of the present disclosure is shown. Figure 1B Display according to Figure 1A Schematic diagram of the cross-sectional structure along line AA'. Figure 2 A schematic diagram showing a light beam passing through the light homogenization component according to an embodiment of the present disclosure. Figures 1A to 2 The present disclosure provides a light homogenizing component 10, comprising a long structure LS, a diffusion surface DS and a reflection surface RS. The long structure LS comprises a light input end IE and a light output end OE. The diffusion surface DS faces the inner side of the long structure LS. The reflection surface RS is opposite to the diffusion surface DS and faces the inner side of the long structure LS, wherein the light homogenizing component 10 can make the light beam LB entering through the light input end IE be emitted from the light output end OE.

[0032] Specifically, refer to Figure 2 If the incident light beam LB is laser light, the multiple reflections of the light beam LB between the diffusion surface DS and the RS reflective surface, the beam expansion effect of the diffusion surface DS on the light beam LB, and the back and forth vibration of the light homogenizing component 10 in the direction parallel to the optical axis OA can achieve the effect of eliminating the speckle in the space of the laser beam, the effect of expanding the laser light and reducing the optical path difference, and the effect of homogenizing. Specifically, the rough surface structure of the diffusion surface DS itself can increase the randomness of the spatial distribution of the laser beam, thereby destroying the coherence of the laser. In addition, by making the diffusion surface vibrate back and forth, the randomness of the spatial distribution can be increased in the dimension of time, further destroying the coherence of the laser beam to achieve a better speckle elimination effect. The optical axis OA is defined as the extending axis between the light input end IE and the light output end OE of the light homogenizing component 10. The axial direction of the light homogenizing component 10 is parallel to the optical axis OA.

[0033] Specifically, the light beam LB traveling along the optical axis OA forms a light cone after passing through some optical components such as lenses, and is incident on the elongated structure LS at a preset angle. In one embodiment of the present disclosure, the light beam LB is reflected at least twice between the diffusion surface DS and the reflection surface RS, and then emitted from the light output end OE.

[0034] Specifically, the elongated structure LS is used to set a reflective surface and / or a diffusion surface so that the light beam LB entering the elongated structure LS along the optical axis OA can pass through. The shape of the opening of the elongated structure LS is determined according to the required light beam shape. Figure 1A In the disclosed embodiment, the elongated structure LS has a hollow structure and a rectangular light entrance end IE opening. The hollow structure of the elongated structure LS is used for setting a reflective surface and / or a diffusion surface. At least one diffusion surface and one reflective surface are set in the elongated structure LS, and the other two surfaces can be set as reflective surfaces or diffusion surfaces according to needs.

[0035] Specifically, the reflection surface RS is used to reflect the light beam LB entering the long structure LS. In one embodiment of the present disclosure, the reflection surface RS is a mirror surface.

[0036] Specifically, the diffusion surface DS is used to diffuse the light beam LB entering the elongated structure LS to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. The diffusion surface DS is, for example, a microlens array, a light diffusion component, or a reflective component with a microstructure surface. The elongated structure LS is, for example, an elongated hollow bracket. In another preferred embodiment, the diffusion surface DS and the reflective surface RS can be of equal or unequal lengths, and can be aligned or staggered. Specifically, Figure 1B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of different lengths. Figure 4B The embodiment shown is that the diffusion surface DS and the reflection surface RS are of equal length and aligned. Figure 3B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of equal length and are arranged alternately.

[0037] Specifically, in another embodiment, the light homogenizing component 10 includes four surfaces, at least one surface is provided as a diffusion surface, one surface is provided as a reflection surface, and the other two surfaces can be provided as reflection surfaces or diffusion surfaces according to requirements.

[0038] In one embodiment of the present disclosure, the light homogenizing component is an integrating rod.

[0039] Reference Figure 3A , 3B In one embodiment of the present disclosure, the integrating rod is solid. Figure 1A The long structure LS has a hollow structure. Figure 3A The elongated structure LS' of the light homogenizing component 10a is a solid transparent body, such as glass, quartz, or sapphire.

[0040] Specifically, the elongated structure LS' is used to set a reflective surface and / or a diffusion surface so that the light beam entering the elongated structure LS' along the optical axis OA can pass through. The elongated structure LS' determines the cross-sectional shape of the light input end IE according to the shape of the incident light beam, and determines the cross-sectional shape of the light output end OE according to the required light output beam shape. Figure 3A In the disclosed embodiment, the elongated structure LS' has a solid structure and a rectangular light-entering end IE cross section. The surface of the solid structure of the elongated structure LS' is used for setting a reflective surface and / or a diffusion surface. The solid transparent body of the elongated structure LS' is used for light beams to pass through. At least one diffusion surface and one reflective surface are set on the surface of the elongated structure LS', and the other two surfaces can be set as reflective surfaces or diffusion surfaces according to requirements.

[0041] Specifically, the reflection surface RS is used to reflect the light beam entering the long structure LS'. In one embodiment of the present disclosure, the diffusion surface DS is disposed outside the long structure LS'. In one embodiment of the present disclosure, the reflection surface RS is a mirror surface.

[0042] Specifically, the diffusion surface DS is used to diffuse the light beam entering the elongated structure LS' to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. In one embodiment of the present disclosure, the reflective surface RS is disposed outside the elongated structure LS'. The diffusion surface DS is, for example, a microlens array, a light diffusion component, or a reflective component with a microstructure surface. In another preferred embodiment, the diffusion surface DS and the reflective surface RS can be of equal or unequal lengths, and can be aligned or staggered. Specifically, Figure 1B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of different lengths. Figure 4B The embodiment shown is that the diffusion surface DS and the reflection surface RS are of equal length and aligned. Figure 3B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of equal length and are arranged alternately.

[0043] In one embodiment of the present disclosure, a microstructure is formed on the substrate surface of the diffusion surface of the light homogenizing element by nanoimprint, wafer-level lens or metalens.

[0044] Specifically, in another embodiment, the light homogenizing component 10a includes four surfaces, at least one of which is provided with a diffusion surface, one of which is provided with a reflection surface, and the other two surfaces can be provided with reflection surfaces or diffusion surfaces according to requirements.

[0045] Reference Figure 4A , 4B ,and Figure 1A The long structure LS or Figure 3A Specifically, in one embodiment, the light homogenizing component 10b is composed of four long thin sheets forming a long structure LS", for example, four glass sheets, four quartz sheets, or four sapphire sheets, at least one of which has a diffusion surface DS, and at least one of which has a reflection surface RS.

[0046] Specifically, the elongated structure LS' is provided with a reflective surface and / or a diffusion surface so that the light beam entering the elongated structure LS' along the optical axis OA can pass through. The elongated structure LS' determines the cross-sectional shape of the light input end IE according to the shape of the incident light beam, and determines the cross-sectional shape of the light output end OE according to the required light output beam shape. Figure 4AIn the disclosed embodiment, the elongated structure LS" has a hollow structure composed of four thin sheets and a rectangular light-entry end IE cross-section. At least one inner surface of the four thin sheets of the elongated structure LS" is provided with a diffusion surface, one inner surface is provided with a reflection surface, and the other two surfaces can be provided with reflection surfaces and / or diffusion surfaces. The hollow structure of the elongated structure LS" is used for allowing light beams to pass through. In a preferred embodiment, the inner surface of the elongated structure LS" includes at least one diffusion surface and one reflection surface, and the other two surfaces can be set as reflection surfaces or diffusion surfaces as required.

[0047] Specifically, the reflection surface RS is used to reflect the light beam entering the elongated structure LS". In one embodiment of the present disclosure, the diffusion surface DS is disposed on the inner surface of the elongated structure LS". In one embodiment of the present disclosure, the reflection surface RS is a mirror surface.

[0048] Specifically, the diffusion surface DS is used to diffuse the light beam entering the elongated structure LS" to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. In one embodiment of the present disclosure, the reflection surface RS is disposed on the inner surface of the elongated structure LS". The diffusion surface DS is, for example, a microlens array, a light diffusion component, or a reflective component with a microstructure surface. In another preferred embodiment, the diffusion surface DS and the reflection surface RS can be of equal or unequal lengths, and can be aligned or staggered. Specifically, Figure 1B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of different lengths. Figure 4B The embodiment shown is that the diffusion surface DS and the reflection surface RS are of equal length and aligned. Figure 3B The illustrated embodiment is one in which the diffusion surface DS and the reflection surface RS are of equal length and are arranged alternately.

[0049] Specifically, in another embodiment, the light homogenizing component 10a includes four surfaces, at least one surface is provided with a diffusion surface, one surface is provided with a reflection surface, and the other two surfaces can be provided with reflection surfaces or diffusion surfaces according to requirements.

[0050] Reference Figures 5 to 7 , which shows a speckle elimination device 100 disclosed in the present invention, including a light homogenizing component 10, a connecting mechanism 20 and an actuator 30. The light homogenizing component 10 includes a diffusion surface DS and a reflection surface RS. One end of the connecting mechanism 20 is connected to the light homogenizing component 10. The actuator 30 can move the light homogenizing component 10 forward and backward along the axial direction of the light homogenizing component 10 (for example, in a direction parallel to the optical axis OA in the figure).

[0051] The light homogenizing component 10 is as described above and will not be described again here.

[0052] Specifically, the connecting member 20 is used to connect the light homogenizing component 10 and a fixed point, such as an outer frame, to provide a restoring elastic force for the reciprocating vibration of the light homogenizing component 10. Specifically, one end of the connecting member 20 is connected to the light homogenizing component 10, which means that the connecting member 20 is directly or indirectly connected to the light homogenizing component 10. Indirect, for example, means that the light homogenizing component 10 is disposed on a supporting seat.

[0053] Specifically, the actuator 30 is used to drive the light homogenizing component 10 to reciprocate along the direction of its optical axis OA in cooperation with the connecting mechanism 20. Specifically, reciprocating vibration along the direction of the optical axis OA is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second or more set of actuators and connecting mechanisms to provide movement with more than two degrees of freedom, such as back and forth movement perpendicular to the axial direction of the light homogenizing component (e.g., perpendicular to the direction of the optical axis OA in the figure).

[0054] Specifically, the light homogenizing component 10 with the diffusion surface DS has the function of diffusing the light beam entering the elongated structure to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. The actuator 30 drives the light homogenizing component 10 to vibrate back and forth along its optical axis OA to enhance the effect of speckle elimination.

[0055] Specifically, depending on the type and size of the optical machine and the severity of the speckle, the vibration frequency of the actuator 30 disclosed herein is preferably greater than 0 Hz and less than 400 Hz, or a higher vibration frequency; the displacement of the light homogenizing component 11 is preferably greater than 0 mm and less than 5 mm, or a higher displacement, to effectively eliminate the speckle.

[0056] In one embodiment, the light homogenizing component 10 of the speckle elimination device 100 includes at least one reflective surface RS or at least one diffuser surface DS. Specifically, in another preferred embodiment, the light homogenizing component 10 may include 2, 3, or 4 or more surfaces, depending on the requirements. These surfaces may be selected from reflective surfaces or diffuser surfaces, and may be combined according to actual requirements.

[0057] In one embodiment of the present disclosure, the connecting member 20 is an elastic component.

[0058] In one embodiment of the present disclosure, the elastic element is a leaf spring.

[0059] Specifically, in one embodiment of the present disclosure, the plate-shaped spring is integrated with the elongated structure of the light homogenizing component 10 .

[0060] In one of the embodiments disclosed herein, the substrate surface of the diffusion surface of the light homogenizing component 10 has a microstructure. Specifically, the microstructure is, for example, a metalens structure (or super lens). It is a sub-wavelength columnar array microstructure, and the metalens surface of a columnar structure (also known as a nanofin, waveguide or antenna) with a specific array distribution can be used to flexibly and significantly adjust the optical properties of the incident light, such as the phase, amplitude and polarization. The diffusion surface of the light homogenizing component 10 with a metalens structure can have an excellent speckle elimination effect without vibrating the light homogenizing component 10. The metalens structure is generally a nano-component made of titanium dioxide material, and the size of the component is about 600 nanometers or other sub-wavelengths. It can be made using nanoimprint, wafer-level lens, etc. Wafer-level lens refers to the use of a wafer semiconductor process to make an optical component or microstructure.

[0061] Reference Fig. 6A , 6B In one embodiment of the present disclosure, the actuator 30 includes a magnet 32 ​​and a coil 34, and drives the light homogenizing component 10 to move through electromagnetic long-distance force. Figure 6B Specifically, when the coil 34 is energized, a magnetic field is induced with the N pole at the top and the S pole at the bottom, so that the N pole of the magnet 32 ​​is attracted and moves to the right (such as Figure 6B The light homogenizing component 10 moves to the right (in the direction of the arrow in the middle). At this time, the connecting mechanism 20 is deformed and elastic potential energy is accumulated. When the coil 34 is powered off, the induced magnetic field disappears, so that the connecting mechanism 20 releases the elastic force and the light homogenizing component rebounds to the left, and reciprocates in this way. This reciprocating movement, or vibration, is a movement with one degree of freedom, but the present disclosure is not limited to this. In another embodiment, the speckle elimination device can also be provided with a second set of actuators and connecting mechanisms to provide a second degree of freedom movement in a second direction, such as a back and forth movement perpendicular to the axis of the light homogenizing component.

[0062] In another embodiment of the present disclosure, the connecting member 20 is used to provide a flexible connection function. A flexible connection is relative to a rigid connection. In a rigid connection, there is no displacement between the relative connecting members. A flexible connection allows displacement between the connecting members, such as pivoting or connecting with elastic materials. In a preferred embodiment, the connecting member 20 is used not only to move the light homogenizing component 10 back and forth along the axial direction of the light homogenizing component (for example, in the direction parallel to the optical axis OA in the figure), but also to maintain the optical axis OA of the light homogenizing component 10 in the same direction. In another embodiment of the present disclosure, the connecting member 20 only provides a connection function, but does not provide an elastic restoring force. The actuator 30 includes a magnet 32 ​​and a coil 34, which drives the light homogenizing component 10 to move through electromagnetic long-distance force. Refer to Figure 6B Specifically, when the coil 34 is energized, a magnetic field is induced with the N pole at the top and the S pole at the bottom, so that the N pole of the magnet 32 ​​is attracted and moves to the right (such as Figure 6B Then, the current direction of the coil 34 is reversed to induce a reverse magnetic field, that is, a magnetic field with the N pole at the bottom and the S pole at the top, so that the N pole of the magnet 32 ​​is repelled and moves to the left (as shown by the arrow in the middle). Figure 6B The light homogenizing component 10 moves to the left, and reciprocates in this way.

[0063] The speckle elimination device in one embodiment of the present disclosure further includes an outer frame 40 , wherein one of the magnet 32 ​​and the coil 34 is disposed at the end of the light homogenizing component 10 , and the other is disposed at the end of the outer frame 40 , and the two correspond to each other.

[0064] Specifically, one end of the connecting mechanism 20 is fixed to the outer frame 40, and the other end is fixed to the light homogenizing component 10, wherein the outer frame 40 is a fixed component and the light homogenizing component 10 is a moving component. The connecting mechanism 20 can be used to provide positioning of the light homogenizing component 10 in the outer frame 40. In one embodiment of the present disclosure, the connecting mechanism 20 is a plate spring, which can be a "π"-shaped plate structure, which can limit the movement of the light homogenizing component 10 in the direction parallel to the optical axis OA, and is not easy to move in other directions to affect the optical effect. The plate spring can also provide an elastic restoring force between the fixed component and the moving component, so that the light homogenizing component 10 can reciprocate under the push of the actuator 30.

[0065] In one embodiment of the present disclosure, the actuator 30 is provided with a corresponding first part and a second part, which are magnets and coils that can be interchanged. The magnets and coils are a set of actuators that can drive the light homogenization component 10 to move through electromagnetic long-distance force. Similarly, the magnets and coils are, for example, voice coil motors, which use the voice coil motors to swing the diffuser at a small angle through plate springs, and have a simple structure and a smaller volume than the existing motor-rotating wheel-shaped diffuser structure.

[0066] In one embodiment of the present disclosure, the actuator 30 has a first part and a second part corresponding to each other, which are a magnetic conductive component and an electromagnet that can be interchanged. The magnetic conductive component and the electromagnet form a set of actuators that can drive the light homogenizing component 10 to move through electromagnetic long-distance force.

[0067] Reference Figure 8 and Fig. 9 In another embodiment of the present disclosure, Figures 5 to 7 The difference between the speckle elimination device 100 of the present embodiment and the present invention is that the light homogenizing component 10' of the speckle elimination device 100' of the present embodiment includes four surfaces including the reflection surface RS and the diffusion surface DS, while the light homogenizing component 10 of the speckle elimination device 100 only includes the reflection surface RS and the diffusion surface DS. In addition, the elongated structure LS of the light homogenizing component 10' of the speckle elimination device 100' of the present embodiment does not cover the entire light homogenizing component 10', so the magnet 32 ​​is directly disposed on the structure of the diffusion surface DS, which can further reduce the volume of the entire speckle elimination device 100'.

[0068] Specifically, Figures 1A to 4B The light homogenizing components 10, 10a, 10b shown can be used interchangeably with the light homogenizing components in the speckle elimination devices 100, 100', 100", 100'", 200 of the present disclosure as required.

[0069] Specifically, the connecting member 20 is used to connect the light homogenizing assembly 10 ′ and a fixed point, such as an outer frame, to provide a restoring elastic force for the reciprocating vibration of the light homogenizing assembly 10 ′.

[0070] Specifically, the actuator 30 is used to push the light homogenizing component 10' to reciprocate along the direction of its optical axis OA in cooperation with the connecting mechanism 20. Specifically, reciprocating vibration along the direction of the optical axis OA is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second or more set of actuators and connecting mechanisms to provide movement with more than two degrees of freedom, such as back and forth movement perpendicular to the axial direction of the light homogenizing component.

[0071] Specifically, the light homogenizing component 10' with the diffusion surface DS diffuses the light beam entering the elongated structure to achieve preliminary speckle elimination, beam expansion and light homogenization effects. The actuator 30 drives the light homogenizing component 10' to reciprocate along its optical axis OA to enhance the speckle elimination effect.

[0072] Specifically, depending on the type and size of the optical machine and the severity of the speckle, the vibration frequency of the actuator 30 disclosed herein is preferably greater than 0 Hz and less than 400 Hz, or a higher vibration frequency; the displacement of the light homogenizing component 11 is preferably greater than 0 mm and less than 5 mm, or a higher displacement, to effectively eliminate the speckle.

[0073] In one embodiment of the present disclosure, the four surfaces of the light homogenizing element 10' of the speckle elimination device 100' include at least one reflective surface RS or at least one diffuser surface DS. Specifically, these surfaces can be selected from reflective surfaces or diffuser surfaces and combined according to actual needs.

[0074] In one embodiment of the present disclosure, the connecting member 20 is an elastic component.

[0075] In one embodiment of the present disclosure, the elastic element is a leaf spring.

[0076] Specifically, in one embodiment of the present disclosure, the plate-shaped spring and the elongated structure of the light homogenizing component 10 ′ are integrated into one body.

[0077] In one embodiment of the present disclosure, a microstructure is formed on the substrate surface of the diffusion surface of the light homogenizing element 10 ′ by nanoimprint, wafer-level lens or metalens.

[0078] The vibration mode of the light homogenizing component 10' of the speckle elimination device 100' can be referred to Fig. 6A , 6B , which will not be described in detail here. This reciprocating movement, or vibration, is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second set of actuators and connecting parts to provide a second degree of freedom movement in a second direction, such as a back-and-forth movement perpendicular to the axial direction of the light homogenizing component.

[0079] The speckle elimination device in one embodiment of the present disclosure further includes an outer frame 40 , and one of the magnet 32 ​​and the coil 34 is disposed at the end of the light homogenizing component 10 ′, and the other is disposed at the end of the outer frame 40 , and the two correspond to each other.

[0080] Specifically, one end of the connecting mechanism 20 is fixed to the outer frame 40, and the other end is fixed to the light homogenizing component 10', wherein the outer frame 40 is a fixed component and the light homogenizing component 10' is a moving component. The connecting mechanism 20 can be used to provide positioning of the light homogenizing component 10' in the outer frame 40. In one embodiment of the present disclosure, the connecting mechanism 20 is a plate spring, which can be a "π"-shaped plate structure, which can limit the movement of the light homogenizing component 10' in the direction parallel to the optical axis OA, and is not easy to move in other directions to affect the optical effect. The plate spring can also provide an elastic restoring force between the fixed component and the moving component, so that the light homogenizing component 10' can reciprocate under the push of the actuator 30.

[0081] In one embodiment of the present disclosure, the actuator 30 is provided with a corresponding first part and a second part, which are magnets and coils that can be interchanged. The magnets and coils are a set of actuators that can drive the light homogenization component 10' to move through electromagnetic long-distance force. Similarly, the magnets and coils are, for example, voice coil motors, which use the voice coil motors to swing the diffuser at a small angle through plate springs. The structure is simple and the volume is smaller than the existing motor-rotating wheel-shaped diffuser structure.

[0082] In one embodiment of the present disclosure, the actuator 30 has a first part and a second part corresponding to each other, which are a magnetic conductive component and an electromagnet that can be interchanged. The magnetic conductive component and the electromagnet form a set of actuators that can drive the light homogenizing component 10' to move through electromagnetic long-distance force.

[0083] Reference Fig.10 and Fig.11 In another embodiment of the present disclosure, unlike the aforementioned speckle elimination device 100', the actuator 30' of the speckle elimination device 100" of the present embodiment includes two magnets 32 and a coil 34. The coil 34 is wound on the light homogenizing component 10'. The two magnets 32 are arranged at relative positions in the outer frame 40. The arrangement of the two magnets 32 can prevent the end of the light homogenizing component 10' from having unnecessary up and down swings to affect the light homogenizing effect.

[0084] Specifically, the connecting member 20 is used to connect the light homogenizing assembly 10 ′ and the outer frame to provide a restoring elastic force for the reciprocating vibration of the light homogenizing assembly 10 ′.

[0085] Specifically, the actuator 30' is used to push the light homogenizing component 10' to reciprocate along the direction of its optical axis OA in cooperation with the connecting mechanism 20. Specifically, reciprocating vibration along the direction of the optical axis OA is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second or more set of actuators and connecting mechanisms to provide movement with more than two degrees of freedom, such as back and forth movement perpendicular to the axial direction of the light homogenizing component.

[0086] Specifically, the light homogenizing component 10' with the diffusion surface DS diffuses the light beam entering the elongated structure to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. The actuator 30' drives the light homogenizing component 10' to reciprocate along its optical axis OA to enhance the effect of speckle elimination.

[0087] Specifically, depending on the type and size of the optical machine and the severity of the speckle, the vibration frequency of the actuator 30' disclosed herein is preferably greater than 0 Hz and less than 400 Hz, or a higher vibration frequency; the displacement of the light homogenizing component 11 is preferably greater than 0 mm and less than 5 mm, or a higher displacement, to effectively eliminate the speckle.

[0088] In one embodiment of the present disclosure, the four surfaces of the light homogenizing component 10' of the speckle elimination device 100" include at least one reflective surface RS or at least one diffuser surface DS. Specifically, these surfaces can be selected from reflective surfaces or diffuser surfaces and combined according to actual needs.

[0089] In one embodiment of the present disclosure, the connecting member 20 is an elastic component.

[0090] In one embodiment of the present disclosure, the elastic element is a leaf spring.

[0091] Specifically, in one embodiment of the present disclosure, the plate-shaped spring and the elongated structure of the light homogenizing component 10 ′ are integrated into one body.

[0092] In one embodiment of the present disclosure, a microstructure is formed on the substrate surface of the diffusion surface of the light homogenizing element 10 ′ by nanoimprint, wafer-level lens or metalens.

[0093] Vibration principle of the light homogenizing component 10' of the speckle elimination device 100" Fig. 6A , 6B Similarly, no further description is given here. This reciprocating movement, or vibration, is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second set of actuators and connecting parts to provide a second degree of freedom movement in a second direction, such as a back-and-forth movement perpendicular to the axial direction of the light homogenizing component.

[0094] Specifically, one end of the connecting mechanism 20 is fixed to the outer frame 40, and the other end is fixed to the light homogenizing component 10', wherein the outer frame 40 is a fixed component and the light homogenizing component 10' is a moving component. The connecting mechanism 20 can be used to provide positioning of the light homogenizing component 10' in the outer frame 40. In one embodiment of the present disclosure, the connecting mechanism 20 is a plate spring, which can be a "π"-shaped plate structure, which can limit the movement of the light homogenizing component 10' in the direction parallel to the optical axis OA, and is not easy to move in other directions to affect the optical effect. The plate spring can also provide an elastic restoring force between the fixed component and the moving component, so that the light homogenizing component 10' can reciprocate under the push of the actuator 30'.

[0095] In one embodiment of the present disclosure, the magnet and coil of the actuator 30' can be interchanged. The magnet and coil form a set of actuators, which can drive the light homogenizing component 10' to move through electromagnetic long-distance force. Similarly, the magnet and coil are, for example, voice coil motors, which use plate springs to make the diffuser swing at a small angle. The structure is simple and the volume is smaller than the existing motor rotating wheel diffuser structure.

[0096] Reference Fig.12 In one embodiment of the present disclosure, unlike the aforementioned speckle elimination device 100' or 100", the actuator 30" of the speckle elimination device 100'" of the present embodiment includes a piezoelectric component. Specifically, the piezoelectric component can be disposed on the outer frame 40 and push against the protrusion 12 of the light homogenizing component 10". The piezoelectric component is used to drive the light homogenizing component 10" to move through a plate spring, which has a simple structure and a smaller volume than the existing motor-rotating wheel-shaped diffuser structure.

[0097] Specifically, the connecting member 20 is used to connect the light homogenizing assembly 10 ″ and the outer frame 40 to provide a restoring elastic force for the reciprocating vibration of the light homogenizing assembly 10 ″.

[0098] Specifically, the actuator 30" is used to push the light homogenizing component 10" to perform reciprocating vibration along the optical axis OA direction in cooperation with the connecting mechanism 20. Specifically, the reciprocating vibration along the optical axis OA direction is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second or more set of actuators and connecting mechanisms to provide movement with more than two degrees of freedom, such as back and forth movement perpendicular to the axial direction of the light homogenizing component.

[0099] Specifically, the light homogenizing component 10" having the diffusion surface DS has the function of diffusing the light beam entering the elongated structure to achieve the effects of preliminary speckle elimination, beam expansion and light homogenization. The effect of speckle elimination can be enhanced by driving the light homogenizing component 10" to vibrate back and forth along the direction of its optical axis OA with the actuator 30".

[0100] Specifically, depending on the type and size of the optical machine and the severity of the speckle, the vibration frequency of the actuator 30" disclosed in the present invention is preferably greater than 0 Hz and less than 400 Hz, or a higher vibration frequency; the displacement of the light homogenizing component 11 is preferably greater than 0 mm and less than 5 mm, or a higher displacement, to effectively eliminate the speckle.

[0101] In one embodiment of the present disclosure, the four surfaces of the light homogenizing component 10" of the speckle elimination device 100 include at least one reflective surface RS or at least one diffuser surface DS. Specifically, these surfaces can be selected from reflective surfaces or diffuser surfaces and combined according to actual needs.

[0102] In one embodiment of the present disclosure, the connecting member 20 is an elastic component.

[0103] In one embodiment of the present disclosure, the elastic element is a leaf spring.

[0104] Specifically, in one embodiment of the present disclosure, the plate spring is integrated with the elongated structure of the light homogenizing component 10 ″. The protrusion 12 of the light homogenizing component 10 ″ is also integrated with the elongated structure.

[0105] In one embodiment of the present disclosure, a microstructure is formed on the substrate surface of the diffusion surface of the light homogenizing element 10" by nanoimprint, wafer-level lens or metalens.

[0106] The vibration mode of the light homogenizing component 10" of the speckle elimination device 100'" can be referred to Fig. 6A , 6B , which will not be described in detail here. This reciprocating movement, or vibration, is a movement with one degree of freedom, but the present disclosure is not limited thereto. In another embodiment, the speckle elimination device may also be provided with a second set of actuators and connecting parts to provide a second degree of freedom movement in a second direction, such as a back-and-forth movement perpendicular to the axial direction of the light homogenizing component.

[0107] The piezoelectric component in one embodiment of the present disclosure may be disposed on the light homogenizing component 10" or on the outer frame 40, and the present disclosure is not limited thereto.

[0108] Specifically, one end of the connecting member 20 is fixed to the outer frame 40, and the other end is fixed to the light homogenizing component 10", wherein the outer frame 40 is a fixed component and the light homogenizing component 10" is a movable component. The connecting member 20 can be used to provide positioning of the light homogenizing component 10" in the outer frame 40. In one embodiment of the present disclosure, the connecting member 20 is a plate spring, which can be a "π"-shaped plate structure, which can limit the movement of the light homogenizing component 10" in a direction parallel to the optical axis OA, and is not prone to movement in other directions that affect the optical effect. The plate spring can also provide an elastic restoring force between the fixed component and the movable component, so that the light homogenizing component 10" can vibrate back and forth under the push of the actuator 30".

[0109] Reference Fig.13 and Fig.14 In one embodiment of the present disclosure, unlike the aforementioned speckle elimination devices 100, 100', 100", 100'", the actuator 30'" of the speckle elimination device 200 of the present embodiment includes a motor 36 and a cam 38, which drives the light homogenizing component 10'" to reciprocate in a direction parallel to the optical axis OA through a connecting member 20'.

[0110] In one embodiment of the present disclosure, the speckle elimination device 200 further includes a supporting seat 50, and the light homogenizing component 10'" is disposed on the supporting seat 50. Specifically, the speckle elimination device 200 further includes an outer frame 40', the outer frame 40' has a slide groove 42 parallel to the optical axis OA, and the supporting seat 50 is configured to slide in the slide groove 42. Specifically, in one embodiment, the light homogenizing component 10'" is similar to the light homogenizing component 10b of FIG. 4, and is directly composed of a four-sided sheet structure without including other mechanical components.

[0111] Specifically, the actuator 30'" of the speckle elimination device 200 rotates the cam 38 with the motor 36, and drives the light homogenizing assembly 10'" to slide in the slide groove 42 through the connecting mechanism 20' to reciprocate in the direction parallel to the optical axis OA.

[0112] The present disclosure can be applied to the laser projector illumination light combining system architecture or other systems using laser light sources. The display component can be a digital light processing component (DLP), a three-chip liquid crystal display component (3LCD), or a liquid crystal on silicon (LCOS). Because the speckle effect of the laser light source will cause light spots to appear on the screen, the present disclosure vibrates the light homogenizing component in the illumination system to achieve the effect of eliminating the speckle.

[0113] Compared with the prior art, the speckle elimination device disclosed in the present invention can move the light homogenizing component forward and backward along its axis by providing the actuator, thereby simplifying the structure, facilitating assembly positioning and adjusting the vibration path and direction of the moving part, and effectively avoiding the problems in the prior art.

[0114] Although the disclosure has been shown and described with respect to one or more implementations, those skilled in the art will think of equivalent variations and modifications based on the reading and understanding of this specification and the accompanying drawings. This disclosure includes all such modifications and variations, and is limited only by the scope of the attached invention application. In particular, with respect to the various functions performed by the above-mentioned components, the terms used to describe such components are intended to correspond to any component (unless otherwise indicated) that performs the specified function of the component (e.g., it is functionally equivalent), even if the structure is not equivalent to the disclosed structure of the function in the exemplary implementation of the specification shown in this document. In addition, although the specific features of this specification have been disclosed with respect to only one of several implementations, such features can be combined with one or more other features of other implementations that are desired and advantageous for a given or specific application. Moreover, insofar as the terms "including", "having", "containing" or their variations are used in a specific embodiment or claim, such terms are intended to be included in a manner similar to the term "comprising".

[0115] The above are only preferred implementations of the present disclosure. It should be pointed out that a person skilled in the art can make several improvements and modifications without departing from the principles of the present disclosure, and these improvements and modifications should also be regarded as within the scope of protection of the present disclosure.

[0116] Explanation of symbols: 10, 10', 10", 10'", 10a, 10b light homogenizing assembly; 100, 100', 100", 100'", 200 speckle elimination device; 20, 20' connecting mechanism; 32 magnet; 36 motor; 40, 40' outer frame; AA', BB', CC' section lines; RS reflecting surface; LS, LS', LS" long structure; OA optical axis; 30, 30', 30", 30'" actuator; 34 coil; 38 cam; 50 bearing seat; DS diffusion surface; IE light input end; LB light beam; OE light output end.

Claims

1. A speckle elimination device, characterized in that: The speckle elimination device comprises: A light homogenizing component, comprising a diffusion surface and a reflection surface arranged at opposite positions; a connecting member, one end of which is connected to the light homogenizing component; and An actuator can move the light homogenizing component forward and backward along the axis of the light homogenizing component.

2. The speckle elimination device according to claim 1, characterized in that: The speckle elimination device further comprises a bearing seat, and the light homogenizing component is arranged on the bearing seat.

3. The speckle elimination device according to claim 1, characterized in that: The connecting member is an elastic component.

4. The speckle elimination device according to claim 1, characterized in that: The diffusion surface has a microstructure.

5. The speckle elimination device according to claim 1, characterized in that: The actuator satisfies one of the following conditions: (1) the actuator is a piezoelectric component; (2) the actuator includes a motor and a cam, and drives the light homogenizing component to move through the connecting mechanism; (3) the actuator is provided with a corresponding first part and a second part, including a magnet and a coil that are correspondingly interchangeable, and drives the light homogenizing component to move through an electromagnetic long-distance force; (4) the actuator is provided with a corresponding first part and a second part, including a magnetic conductive component and an electromagnet that are correspondingly interchangeable, and drives the light homogenizing component to move through an electromagnetic long-distance force; (5) the actuator can make the light homogenizing component move back and forth along an axis perpendicular to the light homogenizing component.

6. The speckle elimination device according to claim 1, characterized in that: The speckle elimination device further includes an outer frame, and the actuator includes a magnet and a coil that are interchangeable. One of the magnet and the coil is arranged at the end of the light homogenizing component, and the other of the magnet and the coil is arranged at the end of the outer frame, and the two correspond to each other.

7. A light homogenization component, characterized in that: The light homogenization component comprises: An elongated structure including a light input end and a light output end; a diffusion surface facing the inner side of the elongated structure; and A reflecting surface is facing the inner side of the elongated structure and is arranged at a position relative to the diffusion surface. The light homogenizing component can make the light beam entering through the light input end be emitted from the light output end.

8. The light homogenizing assembly according to claim 7, characterized in that: The light homogenizing component satisfies one of the following conditions: (1) the reflecting surface is a mirror surface; (2) the diffusing surface is arranged on the outside of the elongated structure; (3) the reflecting surface is arranged on the outside of the elongated structure.

9. The light homogenizing assembly according to claim 7, characterized in that: The light beam is reflected at least twice between the diffusion surface and the reflection surface and then emitted from the light emitting end.

10. The light homogenizing assembly according to claim 7, characterized in that: The light homogenizing component satisfies one of the following conditions: (1) the light homogenizing component is a hollow integrating rod or a solid integrating rod; (2) a microstructure is formed on the substrate surface of the diffusion surface of the light homogenizing component by nanoimprinting, wafer-level lens or superlens.

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