Simulation graphics contour optimization method, device, storage medium and electronic equipment

Abstract

The present application discloses a simulation graphic contour optimization method, device, storage medium and electronic device, wherein the simulation graphic contour optimization method comprises obtaining an OPC simulation graphic, and dividing the OPC simulation graphic into a sparse area and a dense area according to a preset strategy; extracting the first contour vertex of the sparse area and the second contour vertex of the dense area; inserting discrete points between two adjacent first contour vertices to form a first contour graphic; discarding a number of second contour vertices to form a second contour graphic; connecting the first contour graphic and the second contour graphic to obtain a target simulation contour graphic. This scheme can improve the accuracy of OPC verification.

Description

Technical Field

[0001] The embodiments of the present application relate to the field of semiconductor technology, and specifically to a simulation graphic contour optimization method, device, storage medium and electronic device. Background Art

[0002] In the process of semiconductor manufacturing mask publishing, Optical Proximity Correction (OPC) technology has been widely used. The most widely used OPC method is the model-based OPC correction method, which obtains the simulation graphics through simulation calculation of the OPC model, and then verifies the OPC simulation graphics and the original design graphics to obtain the potential imaging error of the simulation graphics, so as to pre-correct the original design graphics to compensate for the distortion or deformation of the graphics caused by the optical proximity effect.

[0003] Before OPC verification, a simulation graphic is obtained through OPC simulation, and a simulation graphic file consisting of continuous discrete coordinate points is output. Then, the simulation graphic file is subjected to subsequent OPC verification steps based on the discrete point placement measuring device to obtain the imaging error. Since the simulation graphic file is used to verify the OPC results, it is equivalent to expressing the contour trajectory of the simulation graphic in the form of discrete points. The problem with this method is that if the discreteness of the contour coordinate points of the simulation graphic is too sparse, the accuracy of the OPC verification will be reduced. If the discreteness of the contour coordinate points of the simulation graphic is too dense, there will be too many point coordinates, which will increase the OPC verification time and affect the efficiency of OPC verification. Summary of the invention

[0004] The embodiments of the present application provide a simulation graphic contour optimization method, device, storage medium and electronic device, which can improve the accuracy of OPC verification.

[0005] In a first aspect, an embodiment of the present application provides a method for optimizing a simulation graphic contour, comprising:

[0006] Acquire an OPC simulation graph, and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy;

[0007] Extracting a first contour vertex of the sparse area and a second contour vertex of the dense area;

[0008] Inserting discrete points between two adjacent vertices of the first contour to form a first contour figure;

[0009] Discarding a number of the second contour vertices to form a second contour graph;

[0010] The first contour graphic and the second contour graphic are connected to obtain a target simulation contour graphic.

[0011] In the simulation graphic contour optimization method provided in the embodiment of the present application, inserting discrete points between two first contour vertices to form a first contour graphic includes:

[0012] forming a curve between two adjacent vertices of the first contour;

[0013] Discrete points are inserted between two adjacent first contour vertices based on the curve to form a first contour graph.

[0014] In the simulation graphic contour optimization method provided in the embodiment of the present application, inserting discrete points between two adjacent first contour vertices based on the curve to form a first contour graphic includes:

[0015] Fitting the curve using a preset curve fitting function to generate a fitting curve;

[0016] inserting a discrete point between two adjacent first contour vertices according to the fitting curve to add a new first contour vertex between the two adjacent first contour vertices;

[0017] All of the first contour vertices are connected in sequence to form a first contour graph.

[0018] In the simulation graphic contour optimization method provided in the embodiment of the present application, the discarding of a plurality of second contour vertices to form a second contour graphic includes:

[0019] Selecting a second contour vertex from a plurality of second contour vertices as a base point;

[0020] Forming a vector line segment between the base point and each of the remaining vertices of the second contour;

[0021] A plurality of the vector line segments are traversed, and a plurality of the second contour vertices are discarded based on the traversal result to form a second contour graph.

[0022] In the simulation graphics contour optimization method provided in the embodiment of the present application, the traversing of the plurality of vector line segments and discarding the plurality of second contour vertices based on the traversal results to form a second contour graphic includes:

[0023] Sequentially obtain the projection length of each of the vector line segments in the horizontal direction or the vertical direction;

[0024] Comparing each of the projection lengths with a preset threshold respectively;

[0025] According to the comparison result, it is determined to discard a number of the second contour vertices to form a second contour graph.

[0026] In the simulation graphic contour optimization method provided in the embodiment of the present application, the step of determining to discard a number of the second contour vertices according to the comparison result to form a second contour graphic includes:

[0027] When the projection length is less than or equal to the preset threshold, discarding the corresponding second contour vertex;

[0028] When the projection length is greater than the preset threshold, retaining the corresponding second contour vertex;

[0029] The base point and the retained second contour vertices are connected in sequence to form a second contour graph.

[0030] In the simulation graphic contour optimization method provided in the embodiment of the present application, the extracting the first contour vertex of the sparse area and the second contour vertex of the dense area includes:

[0031] Obtaining a coordinate set of discrete points of the OPC simulation graph;

[0032] Extracting contour vertices of the OPC simulation graph based on the coordinate set;

[0033] Taking the contour vertex located in the sparse area as the first contour vertex;

[0034] The contour vertex located in the dense area is used as the second contour vertex.

[0035] In a second aspect, an embodiment of the present application provides a simulation graphic contour optimization device, comprising:

[0036] A graph division unit, used for acquiring an OPC simulation graph and dividing the OPC simulation graph into a sparse area and a dense area according to a preset strategy;

[0037] A vertex extraction unit, used for extracting a first contour vertex of the sparse area and a second contour vertex of the dense area;

[0038] A vertex insertion unit, used for inserting discrete points between two adjacent vertices of the first contour to form a first contour figure;

[0039] A vertex discarding unit, used for discarding a number of the second contour vertices to form a second contour graph;

[0040] The graphic connection unit is used to connect the first contour graphic and the second contour graphic to obtain a target simulation contour graphic.

[0041] In a third aspect, the present application provides a storage medium storing a plurality of instructions suitable for loading by a processor to execute any of the above-mentioned simulation graphic contour optimization methods.

[0042] In a fourth aspect, the present application provides an electronic device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements any of the above-described simulation graphic contour optimization methods when executing the computer program.

[0043] In summary, the simulation graphics contour optimization method provided by the embodiment of the present application adopts the method of obtaining the OPC simulation graphics, and dividing the OPC simulation graphics into sparse areas and dense areas according to a preset strategy; extracting the first contour vertex of the sparse area and the second contour vertex of the dense area; inserting discrete points between two adjacent first contour vertices to form a first contour graph; discarding several second contour vertices to form a second contour graph; connecting the first contour graph and the second contour graph to obtain the target simulation contour graph. This scheme can insert discrete points between the first contour vertices in the sparse area and add new first contour vertices, thereby avoiding the problem that the discreteness of the first contour vertices in the sparse area is too sparse, resulting in a decrease in the accuracy of OPC verification. At the same time, several second contour vertices in the dense area are discarded to reduce the number of second contour vertices in the dense area, thereby avoiding the problem that the discreteness of the second contour vertices in the dense area is too dense, resulting in too many point coordinates, which increases the OPC verification time and affects the efficiency of OPC verification. That is, this scheme can improve the efficiency of OPC verification while improving the accuracy of OPC verification. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0045] Figure 1 It is a schematic diagram of the application scenario of the simulation graphic contour optimization method provided in the embodiment of the present application.

[0046] Figure 2 It is a flow chart of the simulation graphic contour optimization method provided in the embodiment of the present application.

[0047] Figure 3 It is a schematic diagram of the area division of the OPC simulation graph provided in the embodiment of the present application.

[0048] Figure 4It is a schematic diagram of the OPC simulation graphic provided in the embodiment of the present application formed into a target simulation contour graphic after optimization.

[0049] Figure 5 It is a structural schematic diagram of a simulation graphic contour optimization device provided in an embodiment of the present application.

[0050] Figure 6 It is a schematic diagram of the structure of an electronic device provided in an embodiment of the present application. DETAILED DESCRIPTION

[0051] Exemplary embodiments will be described in detail herein, examples of which are shown in the accompanying drawings. When the following description refers to the drawings, the same numbers in different drawings represent the same or similar elements unless otherwise indicated. The implementations described in the following exemplary embodiments do not represent all implementations consistent with the present application. Instead, they are merely examples of devices and methods consistent with some aspects of the present application as detailed in the appended claims.

[0052] It should be noted that, in this article, the terms "include", "comprises" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "includes a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element. In addition, components, features, and elements with the same name in different embodiments of the present application may have the same meaning or different meanings, and their specific meanings need to be determined by their explanation in the specific embodiment or further combined with the context of the specific embodiment.

[0053] It should be understood that the specific embodiments described herein are only used to explain the present application and are not used to limit the present application.

[0054] In the subsequent description, the suffixes such as "module", "component" or "unit" used to represent elements are only used to facilitate the description of the present application, and have no specific meanings. Therefore, "module", "component" or "unit" can be used in a mixed manner.

[0055] In the description of the present application, it should be noted that the terms "upper", "lower", "left", "right", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present application. In addition, terms such as "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0056] Before OPC verification, a simulation graphic is obtained through OPC simulation, and a simulation graphic file consisting of continuous discrete coordinate points is output. Then, the simulation graphic file is subjected to subsequent OPC verification steps based on the discrete point placement measuring device to obtain the imaging error. Since the simulation graphic file is used to verify the OPC results, it is equivalent to expressing the contour trajectory of the simulation graphic in the form of discrete points. The problem with this method is that if the discreteness of the contour coordinate points of the simulation graphic is too sparse, the accuracy of the OPC verification will be reduced. If the discreteness of the contour coordinate points of the simulation graphic is too dense, there will be too many point coordinates, which will increase the OPC verification time and affect the efficiency of OPC verification.

[0057] Based on this, an embodiment of the present application provides a simulation graphic contour optimization method, device, storage medium and electronic device. Specifically, the simulation graphic contour optimization device can be integrated in an electronic device, and the electronic device can be a server or a terminal or other device; wherein the terminal can include a mobile phone, a wearable smart device, a tablet computer, a laptop computer, and a personal computer (PC), etc.; the server can be a single server or a server cluster composed of multiple servers, and can be a physical server or a virtual server.

[0058] For example, Figure 1 As shown, after acquiring the OPC simulation graphic, the electronic device can divide the OPC simulation graphic into a sparse area and a dense area according to a preset strategy, and then extract the first contour vertices of the sparse area and the second contour vertices of the dense area, and then insert discrete points between two adjacent first contour vertices to form a first contour graphic, and then discard several second contour vertices to form a second contour graphic; finally, the first contour graphic and the second contour graphic are connected to obtain the target simulation contour graphic.

[0059] The technical solutions shown in the present application will be described in detail below through specific embodiments. It should be noted that the description order of the following embodiments is not intended to limit the priority order of the embodiments.

[0060] See also Figure 2, Figure 2 : is a flow chart of a simulation graphic contour optimization method provided in an embodiment of the present application. The specific flow of the simulation graphic contour optimization method can be as follows:

[0061] 101. Obtain an OPC simulation graph, and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy.

[0062] OPC simulation graphics are graphic models formed by photolithography technology in the semiconductor manufacturing process. In the specific implementation process, special simulation software (such as Cadence, Mentor Graphics, etc.) can be used to generate OPC simulation graphics.

[0063] Generally speaking, in an OPC simulation graph, the contour vertices far from the corner are relatively sparse, while the contour vertices near the corner are relatively dense. Therefore, in a specific implementation process, the corner of the OPC simulation graph is used as a boundary, and the part of the OPC simulation graph far from the corner is divided into a sparse area, and the part of the OPC simulation graph near the corner is divided into a dense area. In some embodiments, it can be as follows Figure 3 As shown, the OPC simulation graph is divided into a sparse area and two dense areas with the corner of the OPC simulation graph as the boundary.

[0064] It can be understood that the contour vertex refers to a key point on the boundary of a graphic that can represent the shape characteristics of the graphic.

[0065] 102. Extract first contour vertices of the sparse area and second contour vertices of the dense area.

[0066] Specifically, the coordinate set of the discrete points of the OPC simulation graph can be obtained first, and then the contour vertices of the OPC simulation graph can be extracted based on the coordinate set. Finally, the contour vertices located in the sparse area are used as the first contour vertices, and the contour vertices located in the dense area are used as the second contour vertices.

[0067] In the specific implementation process, the contour can be extracted from the OPC simulation graphics using a graphics processing algorithm (such as edge detection, contour tracking algorithm, etc.). After the contour is extracted, the coordinates of the discrete points on the contour are obtained. Generally, these points can be represented as a series of (x, y) coordinate pairs to form a coordinate set.

[0068] In some embodiments, after obtaining the coordinate set, a contour extraction algorithm (such as a chain code algorithm, a convex hull algorithm, etc.) can be applied to process the coordinate set of discrete points to identify and extract the contour vertices of the OPC simulation graph. In another embodiment, the coordinate set can also be traversed to determine whether each discrete point is a contour vertex. For example, geometric features such as normal direction and angle change can be used to make a judgment to ensure that the extracted contour vertices can accurately reflect the shape of the OPC simulation graph.

[0069] 103. Insert discrete points between two adjacent first contour vertices to form a first contour figure.

[0070] In some embodiments, a curve may be formed between two adjacent first contour vertices; and then discrete points are inserted between the two adjacent first contour vertices based on the curve to form a first contour graph.

[0071] Specifically, a preset curve fitting function can be used to fit the curve to generate a fitting curve; then, discrete points are inserted between two adjacent first contour vertices according to the fitting curve to add new first contour vertices between the two adjacent first contour vertices; finally, all the first contour vertices are connected in sequence to form a first contour figure.

[0072] It is understandable that fitting the curve using a preset curve fitting function can generate a smooth fitting curve, and then a discrete point located between two adjacent first contour vertices can be inserted on the fitting curve. It should be noted that the number of discrete points inserted between every two adjacent first contour vertices can be increased or decreased according to actual conditions, and the embodiments of the present application do not limit it.

[0073] The preset curve fitting function may be a linear function, a polynomial function, an exponential function, etc. In the specific implementation process, a suitable curve fitting function may be selected according to the characteristics of the data. When fitting the curve, an algorithm such as the least squares method may be used.

[0074] 104. Discard a number of second contour vertices to form a second contour graph.

[0075] Specifically, a second contour vertex can be selected from several second contour vertices as a base point; then a vector line segment is formed between the base point and each of the remaining second contour vertices; finally, several vector line segments are traversed, and several second contour vertices are discarded based on the traversal results to form a second contour figure.

[0076] In some embodiments, after forming the vector line segment, the projection length of each vector line segment in the horizontal direction or the vertical direction can be obtained in turn; then each projection length is compared with a preset threshold value; finally, according to the comparison result, it is determined to discard a number of second contour vertices to form a second contour graph. Wherein, when the projection length is less than or equal to the preset threshold value, the corresponding second contour vertex is discarded; when the projection length is greater than the preset threshold value, the corresponding second contour vertex is retained; the base point and the retained second contour vertex are connected in turn to form a second contour graph.

[0077] For example, after selecting a second contour vertex as a base point from a number of second contour vertices, the remaining second contour vertices can be the first vertex, the second vertex, the third vertex, and so on. Starting from the base point, a vector line segment can be formed with each second contour vertex. If the projection of the vector line segment formed by the base point and the first vertex in the horizontal or vertical direction is less than or equal to the preset threshold, the first vertex can be discarded, otherwise, the first vertex needs to be retained. Similarly, if the projection of the vector line segment formed by the base point and the second vertex in the horizontal or vertical direction is less than or equal to the preset threshold, the second vertex can be discarded, otherwise, the second vertex needs to be retained. By analogy, if the projection of the vector line segment formed by the base point and the nth vertex in the horizontal or vertical direction is less than or equal to the preset threshold, the nth vertex can be discarded, otherwise, the nth vertex needs to be retained. The vertex that is finally retained is used as the new second contour vertex, and the base point and the retained second contour vertex are connected in sequence to form a second contour figure.

[0078] Among them, the preset threshold can be set according to actual conditions, and the embodiments of the present application do not limit it.

[0079] 105. Connect the first contour graphic and the second contour graphic to obtain a target simulation contour graphic.

[0080] In the process of connecting the first contour graphic and the second contour graphic, a variety of graphic connection techniques can be used. For example, linear interpolation, Bezier curves, or spline curves can be used to smoothly connect the edges of the two contour graphics. In this way, it can be ensured that the target simulation contour graphic maintains visual continuity and consistency.

[0081] In some embodiments, the connection process may include the following steps: first, determine the edge vertices of the first contour figure and the second contour figure; then, select a suitable connection method based on the positions of these vertices; then, apply the selected method to generate connecting line segments or curves between the two contour figures; finally, adjust the parameters of the connecting line segments or curves to ensure that they transition smoothly, thereby forming a coherent target simulation contour figure.

[0082] In some embodiments, the target simulation contour graph formed by the OPC simulation graph after the simulation graph contour optimization method provided by the embodiment of the present application can be as follows: Figure 4 shown.

[0083] In summary, the simulation graphics contour optimization method provided by the embodiment of the present application adopts the method of obtaining the OPC simulation graphics, and dividing the OPC simulation graphics into sparse areas and dense areas according to a preset strategy; extracting the first contour vertex of the sparse area and the second contour vertex of the dense area; inserting discrete points between two adjacent first contour vertices to form a first contour graphic; discarding a number of second contour vertices to form a second contour graphic; connecting the first contour graphic and the second contour graphic to obtain the target simulation contour graphic. This scheme can insert discrete points between the first contour vertices in the sparse area and add new first contour vertices, thereby avoiding the problem that the discreteness of the first contour vertices in the sparse area is too sparse, resulting in a decrease in the accuracy of OPC verification. At the same time, a number of second contour vertices in the dense area are discarded to reduce the number of second contour vertices in the dense area, thereby avoiding the problem that the discreteness of the second contour vertices in the dense area is too dense, resulting in too many point coordinates, which increases the OPC verification time and affects the efficiency of OPC verification. That is, this scheme can improve the efficiency of OPC verification while improving the accuracy of OPC verification.

[0084] In order to better implement the simulation graphic contour optimization method provided in the embodiment of the present application, the embodiment of the present application also provides a simulation graphic contour optimization device. The meanings of the terms are the same as those in the above-mentioned simulation graphic contour optimization method, and the specific implementation details can refer to the description in the method embodiment.

[0085] See also Figure 5 , Figure 5 201 is a schematic diagram of the structure of the simulation graph outline optimization device provided in the embodiment of the present application. The simulation graph outline optimization device may include a graph division unit 201, a vertex extraction unit 202, a vertex insertion unit 203, a vertex discarding unit 204 and a graph connection unit 205.

[0086] The graph division unit 201 is used to obtain the OPC simulation graph and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy;

[0087] A vertex extraction unit 202, used to extract first contour vertices of a sparse area and second contour vertices of a dense area;

[0088] A vertex insertion unit 203, used for inserting discrete points between two adjacent first contour vertices to form a first contour graph;

[0089] A vertex discarding unit 204, used for discarding a plurality of second contour vertices to form a second contour graph;

[0090] The graphic connection unit 205 is used to connect the first outline graphic and the second outline graphic to obtain a target simulation outline graphic.

[0091] The specific implementation of each of the above units can refer to the above-mentioned embodiment of the simulation graphic contour optimization method, which will not be described one by one here.

[0092] In summary, the simulation graphic contour optimization device provided by the embodiment of the present application can obtain the OPC simulation graphic through the graphic division unit 201, and divide the OPC simulation graphic into a sparse area and a dense area according to a preset strategy; the vertex extraction unit 202 extracts the first contour vertex of the sparse area and the second contour vertex of the dense area; the vertex insertion unit 203 inserts discrete points between two adjacent first contour vertices to form a first contour graphic; the vertex discarding unit 204 discards several second contour vertices to form a second contour graphic; the graphic connection unit 205 connects the first contour graphic and the second contour graphic to obtain the target simulation contour graphic. This solution can insert discrete points between the first contour vertices in the sparse area and add new first contour vertices, thereby avoiding the problem that the discreteness of the first contour vertices in the sparse area is too sparse, resulting in a decrease in the accuracy of OPC verification. At the same time, several second contour vertices in the dense area are discarded to reduce the number of second contour vertices in the dense area, thereby avoiding the problem that the discreteness of the second contour vertices in the dense area is too dense, resulting in too many point coordinates, which increases the OPC verification time and affects the OPC verification efficiency. That is, this solution can improve the accuracy of OPC verification while improving the efficiency of OPC verification.

[0093] The present application also provides an electronic device, in which the simulation graphic contour optimization device of the present application can be integrated, such as Figure 6 As shown, it shows a schematic diagram of the structure of the electronic device involved in the embodiment of the present application, specifically:

[0094] The electronic device may include one or more processors 301 of processing cores and one or more computer-readable storage media memories 302 and other components. Those skilled in the art will appreciate that Figure 6 The electronic device structure shown in the figure does not constitute a limitation on the electronic device, and may include more or fewer components than shown in the figure, or combine certain components, or arrange the components differently.

[0095] The processor 301 is the control center of the electronic device, which uses various interfaces and lines to connect various parts of the entire electronic device, and executes various functions of the electronic device and processes data by running or executing the software program and / or the present application stored in the memory 302, and calling the data stored in the memory 302, so as to monitor the electronic device as a whole. Optionally, the processor 301 may include one or more processing cores; preferably, the processor 301 may integrate an application processor and a modem processor, wherein the application processor mainly processes the operation storage medium, user interface and application program, etc., and the modem processor mainly processes wireless communication. It is understandable that the above-mentioned modem processor may not be integrated into the processor 301.

[0096] The memory 302 can be used to store software programs and the present application. The processor 301 executes various functional applications and data processing by running the software programs and the present application stored in the memory 302. The memory 302 may mainly include a program storage area and a data storage area, wherein the program storage area may store an operating storage medium, an application required for at least one function, etc.; the data storage area may store data created according to the use of the electronic device, etc. In addition, the memory 302 may include a high-speed random access memory, and may also include a non-volatile memory, such as at least one disk storage device, a flash memory device, or other volatile solid-state storage devices. Accordingly, the memory 302 may also include a memory controller to provide the processor 301 with access to the memory 302.

[0097] Although not shown, the electronic device may further include a display unit, an input unit, a power supply, etc., which will not be described in detail herein. Specifically in this embodiment, the processor 301 in the electronic device will load the executable files corresponding to the processes of one or more application programs into the memory 302 according to the following instructions, and the processor 301 will run the application programs stored in the memory 302, thereby realizing various functions, as follows:

[0098] Obtain an OPC simulation graph, and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy;

[0099] Extracting the first contour vertex of the sparse area and the second contour vertex of the dense area;

[0100] Inserting discrete points between two adjacent first contour vertices to form a first contour figure;

[0101] A plurality of second contour vertices are discarded to form a second contour figure;

[0102] The first contour graphic and the second contour graphic are connected to obtain a target simulation contour graphic.

[0103] A person of ordinary skill in the art will appreciate that all or part of the steps in the various methods of the above embodiments may be completed by instructions, or by controlling related hardware through instructions. The instructions may be stored in a computer-readable storage medium and loaded and executed by a processor.

[0104] To this end, an embodiment of the present application provides a storage medium in which a plurality of instructions are stored, and the instructions can be loaded by a processor to execute the steps in any method provided in the embodiment of the present application. For example, the instructions can execute the following steps:

[0105] Obtain an OPC simulation graph, and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy;

[0106] Extracting the first contour vertex of the sparse area and the second contour vertex of the dense area;

[0107] Inserting discrete points between two adjacent first contour vertices to form a first contour figure;

[0108] A plurality of second contour vertices are discarded to form a second contour figure;

[0109] The first contour graphic and the second contour graphic are connected to obtain a target simulation contour graphic.

[0110] The specific implementation of the above operations can be found in the previous embodiments, which will not be described in detail here.

[0111] The storage medium may include: a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk, etc.

[0112] Since the instructions stored in the storage medium can execute the steps in any method provided in the embodiments of the present application, the beneficial effects that can be achieved by any method provided in the embodiments of the present application can be achieved. Please refer to the previous embodiments for details and will not be repeated here.

[0113] The above respectively introduces in detail the simulation graphic contour optimization method, device, storage medium and electronic device provided by the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the core idea of ​​the present application; at the same time, for technical personnel in this field, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A method for optimizing the contour of a simulation graphic, characterized in that: include: Acquire an OPC simulation graph, and divide the OPC simulation graph into a sparse area and a dense area according to a preset strategy; Extracting a first contour vertex of the sparse area and a second contour vertex of the dense area; Inserting discrete points between two adjacent vertices of the first contour to form a first contour figure; Selecting a second contour vertex from a plurality of second contour vertices as a base point; Forming a vector line segment between the base point and each of the remaining vertices of the second contour; Traversing a plurality of the vector line segments, and sequentially obtaining the projection length of each of the vector line segments in the horizontal direction or the vertical direction; Comparing each of the projection lengths with a preset threshold respectively; Determine, according to the comparison result, to discard a number of the second contour vertices to form a second contour graph; The first contour graphic and the second contour graphic are connected to obtain a target simulation contour graphic.

2. The simulation graphics contour optimization method according to claim 1, characterized in that: The step of inserting a discrete point between two of the first contour vertices to form a first contour graph includes: forming a curve between two adjacent vertices of the first contour; Discrete points are inserted between two adjacent first contour vertices based on the curve to form a first contour graph.

3. The simulation graphics contour optimization method according to claim 2, characterized in that: The step of inserting discrete points between two adjacent vertices of the first contour based on the curve to form a first contour graph includes: Fitting the curve using a preset curve fitting function to generate a fitting curve; inserting a discrete point between two adjacent first contour vertices according to the fitting curve to add a new first contour vertex between the two adjacent first contour vertices; All of the first contour vertices are connected in sequence to form a first contour graph.

4. The simulation graphics contour optimization method according to claim 1, characterized in that: The step of determining to discard a number of the second contour vertices according to the comparison result to form a second contour graph includes: When the projection length is less than or equal to the preset threshold, discarding the corresponding second contour vertex; When the projection length is greater than the preset threshold, retaining the corresponding second contour vertex; The base point and the retained second contour vertices are connected in sequence to form a second contour graph.

5. The simulation graphics contour optimization method according to claim 1, characterized in that: The extracting the first contour vertex of the sparse area and the second contour vertex of the dense area includes: Obtaining a coordinate set of discrete points of the OPC simulation graph; Extracting contour vertices of the OPC simulation graph based on the coordinate set; Taking the contour vertex located in the sparse area as the first contour vertex; The contour vertex located in the dense area is used as the second contour vertex.

6. A simulation graphic contour optimization device, characterized in that: include: A graph division unit, used for acquiring an OPC simulation graph and dividing the OPC simulation graph into a sparse area and a dense area according to a preset strategy; A vertex extraction unit, used for extracting a first contour vertex of the sparse area and a second contour vertex of the dense area; A vertex insertion unit, used for inserting discrete points between two adjacent vertices of the first contour to form a first contour figure; A vertex discarding unit is used to select a second contour vertex from a plurality of second contour vertices as a base point; form a vector line segment between the base point and each of the remaining second contour vertices; traverse the plurality of vector line segments and sequentially obtain the projection length of each vector line segment in the horizontal direction or the vertical direction; and compare each projection length with a preset threshold value; Determine, according to the comparison result, to discard a number of the second contour vertices to form a second contour graph; The graphic connection unit is used to connect the first contour graphic and the second contour graphic to obtain a target simulation contour graphic.

7. A storage medium, characterized in that: The storage medium stores a plurality of instructions, and the instructions are suitable for being loaded by a processor to execute the simulation graphic contour optimization method according to any one of claims 1 to 5.

8. An electronic device, characterized in that: The method comprises a memory, a processor and a computer program stored in the memory and executable on the processor, wherein when the processor executes the computer program, the simulation graphic contour optimization method as described in any one of claims 1 to 5 is implemented.

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