A FOUP automatic handling device that avoids wafer damage

Abstract

The present invention discloses a FOUP automatic handling device that avoids damage to wafers, comprising a main shell, a cover-sealed protective mechanism and a self-clamping picking mechanism. The cover-sealed protective mechanism is arranged on the main shell in a structural state that can be flipped open and closed. When it is in the unfolded state, it performs a cover-sealed docking operation with the FOUP, and when it is closed, it performs a closed covering and protective treatment on the wafer. The self-clamping picking mechanism is arranged in a horizontal state on the left side of the main shell. It adopts a dual mode of adsorption locking and clamping limit to perform an automated fixing operation during wafer picking, and it cooperates with the sliding position adjustment to perform an automatic wafer picking operation. The FOUP automatic handling device that avoids damage to wafers realizes a closed covering and protection of the wafers, reduces the contamination and damage caused by the contact between the wafers and the external environment during transportation, and also avoids accidental slipping during the picking process through the dual modes of adsorption locking and clamping limit.

Description

Technical Field

[0001] The present invention relates to the technical field related to FOUP wafer transportation, and in particular to a FOUP automatic transportation device that avoids damaging wafers. Background Art

[0002] As a container, the front-opening wafer FOUP is used to protect, transport and store wafers during the semiconductor manufacturing process. Compared with other wafer carriers, the front-opening wafer FOUP has significant advantages. Its design reduces the impurities generated by wafer displacement friction, that is, it reduces wafer contamination and loss during transportation and storage. When in use, the front-opening wafer FOUP requires automated handling equipment to perform automated wafer picking and placing operations in the front-opening wafer FOUP.

[0003] After searching for the invention patent number CN111916381B, a wafer dispensing box material retrieval auxiliary mechanism is disclosed, which includes a mounting horizontal plate, a connecting plate fixed to the left top surface of the top surface of the mounting horizontal plate, and side fixing plates fixed to the front and rear of the top surface of the connecting plate. The inner side walls of the two side fixing plates are formed with front and rear corresponding placement grooves, and the wafers are placed in the corresponding two placement grooves. The present invention can automatically push the wafer outward, making it easier for the grasping mechanism to directly grasp it without touching other wafers. Even if there is a certain error in the material retrieval, it will not touch other wafers, ensuring the processing effect.

[0004] The FOUP wafer handling equipment used in the above-mentioned patents and prior art still has certain shortcomings, such as:

[0005] 1. In the aforementioned patent, the gripping and adsorption block moves to the bottom of the wafer, and the suction cup in the gripping and adsorption block contacts and adsorbs the wafer. However, the gripping method described above relies on single adsorption fixation and cannot achieve clamping and limiting of the wafer. As a result, the gripping method described above is not stable and firm enough. In actual gripping and handling operations, it is easy for the wafer to fall off accidentally due to loose adsorption, causing damage to the wafer.

[0006] 2. The above-mentioned patent adopts an open gripping method, and wafer handling operations are performed in an open state. This is similar to the existing method for picking up wafers from front-opening wafer pods. It is impossible to provide closed covering protection during wafer handling. In other words, it is impossible to reduce the contact between wafers and the external environment during handling, making the wafers susceptible to contamination and damage during handling.

[0007] Therefore, we propose a FOUP automatic handling device that avoids damaging wafers, so as to solve the above problems. Summary of the Invention

[0008] The purpose of the present invention is to provide a FOUP automatic handling device that avoids damage to wafers, so as to solve the problem proposed in the above background technology that the wafers cannot be clamped and limited, and closed covering protection cannot be performed during wafer transportation, causing damage to the wafers.

[0009] To achieve the above-mentioned object, the present invention provides the following technical solution: a FOUP automatic handling device that avoids damage to wafers, comprising:

[0010] A main housing, the right end of which is fixed to the execution end of the robotic arm by bolts;

[0011] Also includes:

[0012] A cover-type protective mechanism, which is vertically symmetrically arranged about the horizontal center axis of the main housing, and is arranged on the main housing in a flip-open and closable structure. When in the expanded state, the cover-type protective mechanism performs a cover-type docking operation with the FOUP, and when in the closed state, it provides a closed cover and protective treatment for the wafer;

[0013] The self-clamping picking mechanism is arranged horizontally on the left side of the main shell cover. It adopts the dual methods of adsorption locking and clamping limit to perform automatic fixing operations in wafer picking, and it cooperates with the sliding position adjustment to perform automatic wafer picking operations.

[0014] Preferably, a main track of an integrated structure is provided in the middle of the shell cavity of the main shell cover, and a main rack portion of an integrated structure is provided on the right groove wall of the narrow part of the "convex" shaped sliding groove in the main track.

[0015] Preferably, the enclosed protective mechanism includes a secondary housing, a shift plate, and a transmission rod; the secondary housing is movably stuck in the housing cavity of the primary housing at one end thereof close to the primary housing, and the secondary housing forms a flip structure on the primary housing; an integrated secondary track is provided in the middle of the housing cavity of the secondary housing, and an integrated secondary rack is provided on the right side of the narrow portion of the convex chute in the secondary track, and a support portion in the secondary track is assisted by a shaft column to form a rotating structure on the support portion in the main track;

[0016] The shaft column end of the bracket part in the auxiliary track is fixedly connected to one end of the shifting plate by a bolt, and the other end of the shifting plate is connected to the end of the transmission rod in a sliding manner.

[0017] Preferably, the transmission rod and the shift plate are arranged in an inclined state, the transmission rod forms a sliding structure on the shell cavity wall of the main shell cover, and the end of the transmission rod away from the shift plate is fixedly connected to the connecting frame of the pneumatic telescopic cylinder by bolts, and the pneumatic telescopic cylinder is fixedly installed on the right shell wall of the main shell cover by bolts.

[0018] Preferably, the self-clamping picking mechanism includes a "U"-shaped bracket, an active plate, a main clamping column, a suction cup member and an auxiliary clamping column, the upper sides of the two longitudinal frames in the "U"-shaped bracket are slidably connected to the active plate, and the lower side of the left end of the active plate is fixedly connected to the movable seat by bolts, and the movable seat and the active plate form a synchronous sliding structure, and the middle part of the movable seat is provided with a main clamping column that can telescopically slide;

[0019] Among them, the "U"-shaped bracket has "L"-shaped limiting grooves on both the front and rear side groove walls at the left end of the longitudinal frame, and the longitudinal groove path in the "L"-shaped limiting groove is set in an inclined state;

[0020] Wherein, a suction cup is fixedly connected to the middle part of the longitudinal frame of the "U"-shaped bracket, and the suction cup is connected to the middle air passage of the longitudinal frame of the "U"-shaped bracket;

[0021] Among them, a driven plate is slidably connected in the groove cavity of the right section of the longitudinal frame in the "U"-shaped bracket, and a secondary clamping column is fixedly connected to the upper side of the right end of the driven plate by bolts, and the secondary clamping column and the driven plate form a synchronous sliding structure.

[0022] Preferably, strip-shaped limiting grooves are provided on the front and rear sides of the movable seat, the right side wall of the movable seat is fixedly connected to the rod body part of the piston rod by bolts, and the two piston rods in the movable seat are movably inserted into the air passages on both sides of the longitudinal frame in the "U"-shaped bracket.

[0023] Preferably, a reset spring is installed at the connection between the movable seat and the main clamping column, and the middle part of the main clamping column is fixedly connected with a vertical pin rod member by a bolt, and the pin rod member is movably inserted through the strip limit groove, and the pin rod member is connected to the "L"-shaped limit groove in a sliding manner.

[0024] Preferably, a gear member is rotatably connected in the groove cavity of the right section of the longitudinal frame in the "U"-shaped bracket, and the upper end of the gear member is meshed and connected with the rack-shaped groove cavity wall in the active plate, and the lower end of the gear member is meshed and connected with the rack-shaped frame cavity wall in the driven plate, and the rack-shaped frame cavity wall in the driven plate and the rack-shaped groove cavity wall in the active plate are arranged in opposite directions.

[0025] Preferably, the right end bend of the "U"-shaped bracket is fixedly connected to the housing seat by bolts, and a worm gear is connected to the upper housing cavity of the housing seat through a bearing-assisted rotation, and driving wheels are fixedly installed at both ends of the shaft column in the worm gear by bolts;

[0026] The left side of the worm wheel is meshed with a worm member, and the worm member is assisted by a bearing to form a rotating structure in the upper shell cavity of the housing seat, and the lower end of the worm member is fixedly connected to the output end of the servo motor by a bolt, and the servo motor is fixedly installed in the lower shell cavity of the housing seat by bolts;

[0027] Among them, the front and rear sides of the lower end of the shell seat are both rotatably connected with driven wheels, and the shell seat forms a sliding structure on the main track with the assistance of the driving wheel and the driven wheel.

[0028] Preferably, the roller portion in the driving wheel and the roller portion in the driven wheel are pressed and stuck in the "convex" sliding groove in the main track, and the gear portion in the driving wheel and the gear portion in the driven wheel are connected to the main rack portion in a meshing manner.

[0029] Compared with the prior art, the present invention has the following beneficial effects: the FOUP automatic handling equipment that avoids damage to wafers realizes closed covering protection for wafers, reduces the risk of contamination and damage to wafers caused by contact with the external environment during handling, and ensures the stability and firmness of wafers during picking up through the dual methods of adsorption locking and clamping limit, thus preventing accidental slipping during the picking process;

[0030] 1. It is equipped with a main shell and a sub-shell. The sub-shell is symmetrically arranged about the horizontal center axis of the main shell. When the sub-shell is flipped and unfolded, its end closest to the main shell is movably stuck in the shell cavity of the main shell, so that the two sub-shells and the main shell form a complete protective cover. When picking wafers from a FOUP, the FOUP box opening is sealed and protected. This is different from the traditional open wafer picking operation and reduces the entry of contaminants during picking.

[0031] Furthermore, the transmission rod and the paddle are arranged in an inclined state. Through the sliding cooperation between the transmission rod and the paddle, the auxiliary track forms a flip structure on the main track. Even if the auxiliary shell covers form a flip structure on the main shell covers, when the auxiliary shell covers are flipped and folded, the upper and lower auxiliary shell covers are folded and fitted together to form a complete protective box. When the wafers are picked up and transported, closed covering protection is achieved for the wafers, reducing the contamination and damage caused by contact between the wafers and the external environment during transportation. In addition, through all-round covering protection, the wafers are prevented from being damaged by collision during transportation.

[0032] 2. Equipped with a main clamping column and a secondary clamping column. After the main clamping column slides out on the movable seat, it is driven by the movable seat to slide synchronously. Through the meshing action between the rack-shaped groove cavity wall in the active plate, the gear member and the rack-shaped frame cavity wall in the driven plate, the driven plate drives the secondary clamping column to slide, and the secondary clamping column and the main clamping column move in the opposite direction to achieve the clamping and limiting operation of the wafer. Cooperating with the suction cup member, the wafer is adsorbed and locked. The dual methods of adsorption locking and clamping limit ensure the stability and firmness of the wafer during picking, and avoid accidental slipping during the picking process.

[0033] Furthermore, driven by the piston rod, the movable seat drives the main clamping column to slide, and through the mutual cooperation between the pin rod, the "L"-shaped limit groove and the strip limit groove, the main clamping column is driven to slide out and slide along with the movable seat. Through the meshing action between the rack-shaped groove cavity wall in the active plate, the gear member and the rack-shaped frame cavity wall in the driven plate, the auxiliary clamping column slides synchronously with the driven plate. Through the setting of the linkage structure, the automatic clamping limit operation is realized, thereby ensuring the automation performance during operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] Figure 1 It is a schematic diagram of the front view structure of the present invention;

[0035] Figure 2 This is a schematic side view of the three-dimensional structure of the present invention;

[0036] Figure 3 This is a schematic side view of the three-dimensional structure of the enclosed protection mechanism of the present invention;

[0037] Figure 4 This is a schematic diagram of the three-dimensional structure of the main housing and the auxiliary housing separated from each other in a side view according to the present invention;

[0038] Figure 5 This is a side view of the three-dimensional structure of the connection between the transmission rod and the pneumatic telescopic cylinder of the present invention;

[0039] Figure 6 This is a schematic top view of the three-dimensional structure of the self-gripping picking mechanism of the present invention;

[0040] Figure 7 This is a schematic diagram of the front cross-sectional three-dimensional structure of the connection between the "U"-shaped bracket and the piston rod of the present invention;

[0041] Figure 8 This is a schematic diagram of the front cross-sectional three-dimensional structure of the connection between the "U"-shaped bracket and the suction cup member of the present invention;

[0042] Figure 9 This is a schematic diagram of a bottom-view cross-sectional three-dimensional structure of the active plate and the driven plate connected to each other in the present invention;

[0043] Figure 10 This is a schematic diagram of the top-view cross-sectional three-dimensional structure of the connection between the "U"-shaped bracket and the movable seat of the present invention;

[0044] Figure 11 This is a schematic diagram of the side cross-sectional three-dimensional structure of the connection between the "U"-shaped bracket and the shell base of the present invention;

[0045] Figure 12 This is a schematic diagram of the front cross-sectional three-dimensional structure of the connection between the housing seat and the worm gear of the present invention;

[0046] Figure 13 This is a schematic top-down sectional view of the three-dimensional structure of the connection between the driving wheel and the main track of the present invention.

[0047] In the figure: 1. main housing; 101. main track; 102. main rack; 2. cover-type protective mechanism; 3. self-gripping picking mechanism; 4. auxiliary housing; 401. auxiliary track; 402. auxiliary rack; 5. paddle member; 6. transmission rod; 7. pneumatic telescopic cylinder; 8. "U"-shaped bracket; 801. "L"-shaped limit groove; 9. active plate; 10. movable seat; 1001. strip limit groove; 11. main clamping column; 1101. pin rod member; 12. suction cup member; 13. driven plate; 14. auxiliary clamping column; 15. piston rod; 16. reset spring; 17. gear member; 18. housing seat; 19. worm gear member; 20. active wheel; 21. worm member; 22. servo motor; 23. driven wheel. DETAILED DESCRIPTION

[0048] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0049] See also Figure 1-13 The present invention provides a technical solution: a FOUP automatic handling device that avoids damaging wafers, including a main shell cover 1, a cover-type protective mechanism 2 and a self-clamping picking mechanism 3.

[0050] The FOUP automatic handling device that avoids damaging the wafer is used for the automatic picking operation of the wafer in the FOUP. First, the automatic handling device is aligned with the box opening of the FOUP. The self-clamping picking mechanism 3 is arranged horizontally on the left side of the main shell 1. It is arranged in a sliding structure. The sliding position is adjusted by the self-clamping picking mechanism 3 to correspond to the wafer to be picked up. Then, the self-clamping picking mechanism 3 is operated to insert into the FOUP. The cover-type protection mechanism 2 is arranged symmetrically about the horizontal center axis of the main shell 1. It is in a flip-opening and closing structure on the main shell 1. The cover-type protective mechanism 2 is set in a vertical state when in the unfolded state, and the cover-type protective mechanism 2 is flipped and unfolded to perform a cover-type docking with the FOUP, so that the self-clamping picking mechanism 3 is inserted into the lower side of the wafer to be picked up, and then the self-clamping picking mechanism 3 adopts a dual mode of adsorption locking and clamping limit to perform an automatic fixing operation during wafer picking, and finally the wafer is taken out of the FOUP. The cover-type protective mechanism 2 is set in a horizontal state when in the closed state, and the cover-type protective mechanism 2 is flipped and folded to perform a closed covering and protection treatment on the wafer;

[0051] When operating the self-clamping pickup mechanism 3 to adjust the sliding position, specifically, according to the attached Figure 1、 Figure 2 、 Figure 3 、 Figure 11 、 Figure 12 and Figure 13 As shown, after the main housing 1 is installed, its right end frame is clamped and fixed to the execution end of the robot arm by bolts (the above-mentioned robot arm is an existing automated robot arm, which is a prior art and is not described in detail in the drawings of the specification). The movement of the wafer automatic handling equipment is controlled by the robot arm, corresponding to the box opening of the FOUP;

[0052] Since the cross section of the main track 101 is a "concave" groove structure, it is arranged in an integrated structure in the middle of the shell cavity of the main shell cover 1 and is arranged in a vertical upward state, the cross section of the auxiliary track 401 is a "concave" groove structure, it is arranged in an integrated structure in the middle of the shell cavity of the auxiliary shell cover 4 and is arranged in a vertical upward state, and it is arranged in an adaptive state corresponding to the main track 101, and since the front and rear side groove walls of the main track 101 are both provided with a through "convex" chute, the narrowness of the "convex" chute is greater than the width of the "convex" chute. The right side groove wall is provided with a main rack portion 102 of an integrated structure, and the front and rear side groove walls of the auxiliary rail 401 are both provided with a through "convex" chute, wherein the right side groove wall of the narrow part of the "convex" chute is provided with an auxiliary rack portion 402 of an integrated structure, and the specifications and dimensions of the main rack portion 102 are the same as those of the auxiliary rack portion 402. When the auxiliary housing 4 is flipped and unfolded, the auxiliary rail 401 is adapted to be connected to the main rail 101, and the auxiliary rack portion 402 is adapted to be connected to the main rack portion 102;

[0053] Since the servo motor 22 is fixedly installed in the lower shell cavity of the shell seat 18 by bolts after placement, it is arranged in a vertical upward state. Since the upper and lower ends of the worm member 21 are fixedly clamped with bearings, it is placed in the upper shell cavity of the shell seat 18 after placement, and its two ends are movably plugged into the shell cavity walls on both sides with bearings, and its lower end is fixedly connected to the output end of the servo motor 22 by bolts. When the servo motor 22 is started to operate, the worm member 21 rotates in the upper shell cavity of the shell seat 18 with the assistance of the bearings;

[0054] Since a shaft column is inserted through the middle of the worm wheel 19 and fixedly connected by bolts, wherein both ends of the shaft column are fixedly clamped with bearings, the worm wheel 19 is placed in the upper shell cavity of the shell seat 18 after being installed, wherein the two ends of the shaft column are respectively movably inserted through the shell walls on both sides and extend outward with bearings, and are arranged in a movable positioning state. Moreover, since the left side of the worm wheel 19 is meshedly connected with the worm member 21, after the worm member 21 is driven to rotate, the meshing action between the worm member 21 and the worm wheel 19 causes the worm wheel 19 to rotate in the upper shell cavity of the shell seat 18 with the assistance of the bearings;

[0055] Since driving wheels 20 are provided at both ends of the shaft column of the worm gear 19, the driving wheels 20 are sleeved and fixed to the ends of the shaft column of the worm gear 19 by bolts after installation, the driving wheels 20 are driven to rotate synchronously when the worm gear 19 rotates;

[0056] Since an open notch is provided in the middle of the side wall of the secondary housing 4 close to the main housing 1, the secondary housing 4 is connected to the housing cavity of the main housing 1 through the notch. The notch assists the self-gripping and picking mechanism 3 to slide from the housing cavity of the main housing 1 to the housing cavity of the secondary housing 4 for position adjustment.

[0057] Since the driving wheel 20 is composed of a roller portion and a gear portion coaxially therewith, the specifications and dimensions of the driven wheel 23 are the same as those of the driving wheel 20, and are also composed of a roller portion and a gear portion coaxially therewith. It is arranged in a corresponding state to the driving wheel 20. In addition, since driven wheels 23 are provided on both the front and rear sides of the lower end of the shell seat 18, a bearing is fixedly connected to the center of the roller portion in the driven wheel 23. After placement, the roller portion and the bearing are sleeved on the shell wall column at the lower end of the shell seat 18. After the shell seat 18 is placed, it is movably stuck in the groove cavity of the main track 101, so that the roller portion in the driving wheel 20 and the roller portion in the driven wheel 23 are pressed against the "convex" stuck in the main track 101. shaped chute, and the gear portion in the driving wheel 20 and the gear portion in the driven wheel 23 are connected with the main rack portion 102 in a meshing manner. With the assistance of the driving wheel 20 and the driven wheel 23, the shell seat 18 is positioned in the main track 101 in an active state. When the driving wheel 20 rotates, the gear portion in the driving wheel 20 and the main rack portion 102 or the auxiliary rack portion 402 engage with each other, so that the driving wheel 20 rolls and slides along the "convex" chute in the main track 101 or the "convex" chute in the auxiliary track 401. At the same time, the driven wheel 23 operates in the same way as the driving wheel 20, rotates at the lower end of the shell seat 18, and cooperates with the driving wheel 20 to assist the shell seat 18 in displacement and sliding;

[0058] Since the right end of the horizontal frame of the "U"-shaped bracket 8 is provided with a bent portion of an integrated structure, the shell seat 18 is clamped and fixedly connected to the right end bent portion of the "U"-shaped bracket 8 by bolts after placement, and is arranged in a vertical state. When the shell seat 18 is driven to move, the "U"-shaped bracket 8 is driven to move synchronously, that is, the sliding position adjustment operation of the self-clamping picking mechanism 3 is completed, so that the self-clamping picking mechanism 3 corresponds to the wafer to be picked up;

[0059] When the self-gripping picking mechanism 3 is inserted into the FOUP, specifically, according to the attached Figure 1 、 Figure 2 、 Figure 3 and Figure 6As shown, the sub-shell cover 4 is symmetrically arranged with respect to the horizontal center axis of the main shell cover 1. When the cover-sealed protective mechanism 2 is in the expanded state, the end of the sub-shell cover 4 close to the main shell cover 1 is movably stuck in the shell cavity of the main shell cover 1. The upper and lower sub-shell covers 4 are combined with the main shell cover 1 to form a complete protective shell cover, which is adapted to the FOUP. In addition, since the main clamping column 11 in the self-clamping and picking mechanism 3 is in a retracted state when not performing the clamping limit operation, the upper end side wall thereof is flush with the upper side plate wall of the active plate 9 in the retracted state, that is, it does not affect the insertion of the self-clamping and picking mechanism 3 into the lower side of the wafer. The automatic handling equipment is driven by the robot arm to dock with the FOUP and move, so that the self-clamping and picking mechanism 3 is inserted into the lower side of the wafer to be picked up. The complete protective shell cover combined with the sub-shell cover 4 and the main shell cover 1 is correspondingly sealed at the box mouth of the FOUP for protective treatment.

[0060] When the wafer is picked up by the self-gripping pickup mechanism 3 and the fixed operation is performed automatically, specifically, according to the attached Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 and Figure 10 As shown, the "U"-shaped bracket 8 is divided into two parts, a transverse frame and a longitudinal frame, wherein three air passages are sequentially opened in the longitudinal frame, wherein the air passages are connected to the air supply equipment through external pipes (the above-mentioned air supply equipment is prior art and is not described in the drawings of the specification). Since the piston rods 15 are symmetrically arranged about the horizontal central axis of the movable seat 10, the two piston rods 15 in the movable seat 10 are movably plugged into the air passages on both sides of the longitudinal frame of the "U"-shaped bracket 8, that is, after the piston rods 15 are installed, the plug parts thereof are placed in the air passages of the longitudinal frame of the "U"-shaped bracket 8 for sealing and fitting connection. Air is sucked through the air passages on both sides of the "U"-shaped bracket 8, so that a negative pressure cavity is formed in the air passage, driving the piston rods 15 to contract and slide in the air passage.

[0061] After the piston rod 15 is installed, the rod body portion thereof is movable and penetrates the airway wall and extends outward, and the end portion of the rod body portion is plugged into and fixedly connected to the right side wall of the movable seat 10 by means of bolts. When the piston rod 15 is driven to slide, it pulls the movable seat 10 to move synchronously.

[0062] Since the longitudinal section of the movable seat 10 is a "convex"-shaped structure, it is fixedly connected to the lower left end of the active plate 9 by bolts, and the longitudinal section of the movable seat 10 and the active plate 9 form an "I"-shaped structure. The movable seat 10 is placed in the groove cavity at the left end of the longitudinal frame of the "U"-shaped bracket 8 and is arranged in a movable positioning state. After being pulled, the movable seat 10 slides in the groove cavity at the left end of the longitudinal frame of the "U"-shaped bracket 8. The movable seat 10 and the active plate 9 form a synchronous sliding structure, driving the active plate 9 to move synchronously.

[0063] Since "L"-shaped limiting grooves 801 are provided on the front and rear side walls of the left end of the longitudinal frame of the "U"-shaped bracket 8, the "L"-shaped limiting groove 801 is divided into two parts, a transverse groove and a longitudinal groove, wherein the longitudinal groove is arranged in an inclined state. Moreover, since the front and rear sides of the movable seat 10 are provided with a through-state strip limiting groove 1001, the length dimension of the strip limiting groove 1001 is equal to the height dimension of the longitudinal groove in the "L"-shaped limiting groove 801, and the two are arranged correspondingly, the length dimension of the transverse groove in the "L"-shaped limiting groove 801 is adapted to the maximum sliding distance dimension of the movable seat 10. Furthermore, since the pin rod 1101 is vertically inserted through the middle of the main clamping column 11 after being placed, both ends are arranged to extend outward, and the two are fixedly connected by bolts. When the movable seat 10 is connected together, the pin rod 1101 is installed and movably passes through the strip limiting groove 1001, and is connected in a sliding manner. The pin rod 1101 is movably inserted in the "L"-shaped limiting groove 801 and is connected in a sliding manner. When the movable seat 10 is driven to slide initially, the pin rod 1101 slides along the inclined longitudinal groove in the "L"-shaped limiting groove 801 and slides along the strip limiting groove 1001, so that the main clamping column 11 is driven by the lifting of the pin rod 1101 and extends and slides on the movable seat 10. When the movable seat 10 is continuously driven to slide, the pin rod 1101 slides along the transverse groove in the "L"-shaped limiting groove 801, keeping the main clamping column 11 in an extended state and slidingly displacing with the movable seat 10;

[0064] After the main clamping column 11 is placed, it is movably clamped in the middle groove cavity of the movable seat 10, and its upper end is connected to the plate body of the active plate 9 in a movably penetrating manner. In addition, a reset spring piece 16 is installed at the connection between the movable seat 10 and the main clamping column 11. The reset spring piece 16 is arranged in a "V"-shaped structure, and a sliding groove is provided at both ends thereof, and a "T"-shaped limit bolt is slidably connected to the left and right ends thereof. After the reset spring piece 16 is placed, the middle part is fixedly connected to the lower side wall of the main clamping column 11 by a bolt, and the "T"-shaped limit bolt movably passes through the sliding groove at its end and is threadedly fixed to the groove cavity wall of the movable seat 10. With the assistance of the reset spring piece 16, the main clamping column 11 is movably positioned in the middle groove cavity of the movable seat 10. When the main clamping column 11 is driven, it slides out in the middle part of the movable seat 10, causing the reset spring piece 16 to be squeezed and elastically deformed.

[0065] Since the upper sides of the two longitudinal frames in the "U"-shaped bracket 8 are both provided with active plates 9, the active plates 9 are arranged in a "mouth"-shaped frame-shaped plate frame structure, and after being placed, they are movably carded in the upper groove cavity of the longitudinal frame in the "U"-shaped bracket 8, and since the lower groove cavity wall at the right end of the active plate 9 is arranged in a rack-shaped structure, wherein the rack-shaped groove cavity wall is meshed and connected with the upper end of the gear member 17, and since the middle part of the gear member 17 is fixedly carded with a bearing, it is placed at the overlap of the active plate 9 and the driven plate 13 after being placed, and the upper end is movably inserted In the lower groove cavity at the right end of the active plate 9, and its associated bearing is sleeved on the right section groove cavity wall column of the longitudinal frame of the "U"-shaped bracket 8, when the movable seat 10 continues to slide, it drives the extended main clamping column 11 to slide synchronously, and drives the active plate 9 to slide on the upper side of the longitudinal frame of the "U"-shaped bracket 8. When the active plate 9 slides, the gear part 17 is driven to rotate in the right section groove cavity of the longitudinal frame of the "U"-shaped bracket 8 through the meshing action between the rack-shaped groove cavity wall of the active plate 9 and the gear part 17;

[0066] Since the driven plate 13 is arranged in a "U"-shaped frame plate frame structure, after it is placed, it is movably plugged into the right section groove cavity of the longitudinal frame body in the "U"-shaped bracket 8, and its left section plate body and the right section plate body of the active plate 9 are arranged in an upper and lower overlapping state. Moreover, since one side frame cavity wall of the driven plate 13 is arranged in a rack-shaped structure, the lower end of the gear member 17 is movably inserted into the frame cavity of the driven plate 13 after it is placed, and its lower end is meshed and connected with the rack-shaped frame cavity wall in the driven plate 13. Furthermore, since the rack-shaped frame cavity wall in the driven plate 13 and the rack-shaped groove cavity wall in the active plate 9 are arranged in opposite directions, when the gear member 17 is driven to rotate, the meshing action between the rack-shaped frame cavity wall in the driven plate 13 and the gear member 17 drives the driven plate 13 to slide in the right section groove cavity of the longitudinal frame body in the "U"-shaped bracket 8, and its sliding direction is opposite to the sliding direction of the movable seat 10.

[0067] Since a through-type sliding groove is provided on the upper side wall of the right section of the longitudinal frame of the "U"-shaped bracket 8, the lower end of the auxiliary clamping column 14 is clamped and fixedly connected to the right end of the driven plate 13 by bolts after being installed, and the upper end thereof is movably inserted through the sliding groove of the longitudinal frame of the "U"-shaped bracket 8 and is arranged in an outwardly protruding state. When the driven plate 13 is driven to slide, the auxiliary clamping column 14 and the driven plate 13 form a synchronous sliding structure;

[0068] Since the main clamping column 11 is cylindrical and is provided with a rubber retaining ring on its outer side, when the main clamping column 11 is extended, its upper end is arranged beyond the plate body of the active plate 9. Since the auxiliary clamping column 14 is cylindrical and is provided with a rubber retaining ring on its outer side, it is arranged in a corresponding state with the main clamping column 11. After the auxiliary clamping column 14 slides in the opposite direction to the main clamping column 11, it clamps and limits the wafer.

[0069] Since the suction cup member 12 is arranged in a funnel-shaped structure, it is symmetrically arranged about the vertical central axis of the longitudinal frame of the "U"-shaped bracket 8. After being placed, the suction cup member 12 is stuck and fixedly connected in the middle groove cavity of the longitudinal frame of the "U"-shaped bracket 8. It is connected to the middle air channel of the longitudinal frame of the "U"-shaped bracket 8. The suction process is carried out through the middle air channel of the "U"-shaped bracket 8, so that a negative pressure cavity is formed in the air channel. The wafer is adsorbed and locked by the suction cup member 12, and the clamping operation of the wafer is completed in cooperation with the main clamping column 11 and the auxiliary clamping column 14.

[0070] When operating the cover-sealed protection mechanism 2 to cover and protect the wafer, specifically, according to the attached Figure 2 、 Figure 3 、 Figure 4 and Figure 5 As shown, after the wafer is picked up and fixed by the self-clamping picking mechanism 3, the self-clamping picking mechanism 3 is operated to move the wafer to the initial position of the main housing cover 1. Since the output end of the pneumatic telescopic cylinder 7 is fixedly connected to the connecting frame, it is clamped and fixedly connected to the right outer shell wall of the main housing cover 1 by bolts after installation, and is arranged in a parallel state with the transmission rod 6. Since the transmission rod 6 is movably inserted through the shell cavity wall of the main housing cover 1 after installation, it is arranged in a vertical state. The end of the transmission rod facing away from the paddle member 5 is fixedly connected to the connecting frame of the pneumatic telescopic cylinder 7 by bolts. The pneumatic telescopic cylinder 7 is started to extend and operate, causing the transmission rod 6 to slide on the shell cavity wall of the main housing cover 1.

[0071] Because the other end of the paddle plate member 5 is provided with a through-shaped sliding groove, the transmission rod 6 is plugged into one end of the paddle plate member 5 and is fixedly connected with a pin by bolts. After the rear end is installed, the end portion is movably clamped on the paddle plate member 5, and the pin is movably inserted through the sliding groove in the paddle plate member 5. In addition, because the transmission rod 6 and the paddle plate member 5 are arranged in an inclined state, the two paddle plates 5 on the same sub-rail 401 are arranged in the same inclined direction, and the inclined direction of the paddle plate member 5 in the upper sub-rail 401 is opposite to the inclined direction of the paddle plate member 5 in the lower sub-rail 401. The combination of the two forms an "eight"-shaped structure. After the transmission rod 6 is driven to slide, the end portion of the transmission rod 6 slides on the other end of the paddle plate member 5, and the transmission rod 6 pulls the paddle plate member 5 to move;

[0072] Since the four corners of the upper and lower front and rear of the left side wall of the main rail 101 are vertically provided with bracket parts of an integrated structure, wherein the bracket parts are fixedly clamped with bearings, the front and rear of the left side wall of the auxiliary rail 401 near one end of the main shell 1 are vertically provided with bracket parts of an integrated structure, wherein the bracket parts are plugged into and fixedly connected with a horizontal shaft column by bolts, and since after the auxiliary shell 4 located above is placed, the two bracket parts of the auxiliary rail 401 respectively correspond to the two upper bracket parts of the main rail 101, the bracket part in the auxiliary rail 401 and the bracket part in the main rail 101 are movably clamped together, so that the shaft column of the bracket part in the auxiliary rail 401 can be movably inserted through the bearing of the bracket part in the main rail 101, after the auxiliary shell 4 located below is placed, the two bracket parts of the auxiliary rail 401 respectively correspond to the two lower bracket parts of the main rail 101, and the placement method of the auxiliary shell 4 located below is the same as that of the auxiliary shell 4 located above;

[0073] After the shifting plate 5 is placed, one end thereof is sleeved and fixedly connected to the end of the shaft column of the bracket part of the secondary rail 401 by means of bolts. When the shifting plate 5 is pulled, the shaft column of the bracket part of the secondary rail 401 is driven to move, so that the bracket part of the secondary rail 401 is assisted by the shaft column to rotate on the bracket part of the main rail 101, that is, the secondary housing 4 is turned over and folded on the main housing 1.

[0074] Since the upper and lower sides of the horizontal frame of the "U"-shaped bracket 8 are vertically provided with integrated baffle portions, wherein the baffle portions are adapted to the notch portions in the secondary housing 4, when the cover-sealed protective mechanism 2 is in the folded state, the upper and lower secondary housings 4 are folded and fitted together, and the notch portions in the secondary housing 4 are engaged with the baffle portions in the "U"-shaped bracket 8 to block them, forming a complete protective box, which encloses the self-clamping picking mechanism 3 in a closed manner;

[0075] This is the entire working process of the FOUP automatic handling equipment to avoid damaging the wafer. The contents not described in detail in this specification belong to the existing technology known to professional and technical personnel in this field.

[0076] The standard parts used in the present invention can all be purchased from the market, and special-shaped parts can be customized according to the description in the specification and the drawings. The specific connection methods of each part adopt conventional means such as mature bolts, rivets, welding, etc. in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology, and the circuit connection adopts the conventional connection method in the existing technology, which will not be described in detail here.

[0077] Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments, or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A FOUP automatic handling device for preventing wafer damage, comprising: A main housing (1), the right end of which is fixedly mounted on the execution end of the robotic arm by means of bolts; It is characterized by further comprising: A cover-sealed protective mechanism (2), wherein the cover-sealed protective mechanism (2) is symmetrically arranged about the horizontal center axis of the main shell (1), and the cover-sealed protective mechanism (2) is arranged on the main shell (1) in a structural state capable of being flipped open and closed, and the cover-sealed protective mechanism (2) comprises a sub-shell (4), a paddle (5) and a transmission rod (6), and the sub-shell (4) forms a flip structure on the main shell (1). When the sub-shell (4) is in a flipped and unfolded state, one end thereof close to the main shell (1) is movably stuck in the shell cavity of the main shell (1), so that the two sub-shells (4) and the main shell (1) are combined to form a complete protective cover shell, and a cover-sealed protective treatment is performed on the FOUP box mouth when the FOUP picks up the wafer. When the sub-shell (4) is in a flipped and folded state, the upper and lower sub-shells (4) are folded and attached together to form a complete protective box, and a closed covering protection is performed on the wafer when the wafer is picked up and transported; A secondary track (401) of an integrated structure is provided in the middle of the housing cavity of the secondary housing (4), the shaft column end of the bracket portion in the secondary track (401) is fixedly connected to one end of the shift plate (5) by a bolt, and the other end of the shift plate (5) is connected to the end of the transmission rod (6) in a sliding manner; A self-clamping picking mechanism (3) is provided in a horizontal state on the left side of the main housing (1), and adopts a dual mode of adsorption locking and clamping limiting to perform an automated fixing operation in wafer picking, and cooperates with the sliding position adjustment to perform an automatic wafer picking operation.

2. The FOUP automatic transport device for avoiding wafer damage according to claim 1, characterized in that: A main track (101) of an integrated structure is provided in the middle of the shell cavity of the main shell cover (1), and a main rack portion (102) of an integrated structure is provided on the right side groove wall of the narrow portion of the "convex" shaped sliding groove in the main track (101).

3. The FOUP automatic transport device for avoiding wafer damage according to claim 1, characterized in that: The right side groove wall of the narrow portion of the "convex" shaped chute in the auxiliary track (401) is provided with an integrated auxiliary rack portion (402), and the bracket portion in the auxiliary track (401) is assisted by a shaft column to form a rotating structure on the bracket portion in the main track (101).

4. The FOUP automatic transport device for avoiding wafer damage according to claim 3, characterized in that: The transmission rod (6) and the shift plate member (5) are arranged in an inclined state, and the transmission rod (6) forms a sliding structure on the shell cavity wall of the main shell cover (1). The end of the transmission rod (6) facing away from the shift plate member (5) is fixedly connected to the connecting frame of the pneumatic telescopic cylinder (7) by means of bolts, and the pneumatic telescopic cylinder (7) is fixedly mounted on the right shell wall of the main shell cover (1) by means of bolts.

5. The FOUP automatic transport device for avoiding wafer damage according to claim 1, characterized in that: The self-clamping picking mechanism (3) comprises a "U"-shaped bracket (8), an active plate (9), a main clamping column (11), a suction cup (12) and an auxiliary clamping column (14), wherein the upper sides of the two longitudinal frames in the "U"-shaped bracket (8) are slidably connected to the active plate (9), and the lower side of the left end of the active plate (9) is fixedly connected to the movable seat (10) by bolts, and the movable seat (10) and the active plate (9) form a synchronous sliding structure, and a main clamping column (11) capable of telescopic sliding is provided in the middle of the movable seat (10); Wherein, an "L"-shaped limiting groove (801) is provided on both the front and rear groove walls of the left end of the longitudinal frame body of the "U"-shaped bracket (8), and the longitudinal groove path in the "L"-shaped limiting groove (801) is arranged in an inclined state; The middle part of the longitudinal frame of the "U"-shaped bracket (8) is fixedly connected with a suction cup member (12), and the suction cup member (12) is connected to the middle air passage of the longitudinal frame of the "U"-shaped bracket (8); A driven plate (13) is slidably connected in the groove cavity of the right section of the longitudinal frame of the "U"-shaped bracket (8), and a secondary clamping column (14) is fixedly connected to the upper side of the right end of the driven plate (13) by bolts, and the secondary clamping column (14) and the driven plate (13) form a synchronous sliding structure.

6. The FOUP automatic transport device for avoiding wafer damage according to claim 5, characterized in that: The movable seat (10) is provided with a strip-shaped limiting groove (1001) on both the front and rear sides. The right side wall of the movable seat (10) is fixedly connected to the rod body of the piston rod (15) by bolts, and the two piston rods (15) in the movable seat (10) are respectively movably inserted into the air passages on both sides of the longitudinal frame in the "U"-shaped bracket (8).

7. The FOUP automatic transport device for avoiding wafer damage according to claim 6, characterized in that: A reset spring (16) is installed at the connection between the movable seat (10) and the main clamping column (11), and a vertical pin member (1101) is fixedly connected to the middle of the main clamping column (11) by bolts, and the pin member (1101) movably penetrates the strip-shaped limiting groove (1001), and the pin member (1101) is connected to the "L"-shaped limiting groove (801) in a sliding manner.

8. The FOUP automatic transport device for avoiding wafer damage according to claim 5, characterized in that: A gear member (17) is rotatably connected in the groove cavity of the right section of the longitudinal frame body in the "U"-shaped bracket (8), and the upper end of the gear member (17) is meshed and connected with the rack-shaped groove cavity wall in the active plate (9), and the lower end of the gear member (17) is meshed and connected with the rack-shaped frame cavity wall in the driven plate (13), and the rack-shaped frame cavity wall in the driven plate (13) and the rack-shaped groove cavity wall in the active plate (9) are arranged in opposite directions.

9. The FOUP automatic transport device for avoiding wafer damage according to claim 5, characterized in that: The right end bend of the "U"-shaped bracket (8) is fixedly connected to the housing seat (18) by bolts, and the upper housing cavity of the housing seat (18) is connected to a worm wheel (19) through a bearing-assisted rotation, and both ends of the central axis of the worm wheel (19) are fixedly mounted with a driving wheel (20) by bolts; The left side of the worm wheel (19) is meshedly connected with a worm member (21), and the worm member (21) is assisted by a bearing to form a rotating structure in the upper shell cavity of the shell seat (18), and the lower end of the worm member (21) is fixedly connected to the output end of the servo motor (22) by a bolt, and the servo motor (22) is fixedly installed in the lower shell cavity of the shell seat (18) by a bolt; The front and rear sides of the lower end of the shell seat (18) are both rotatably connected to driven wheels (23), and the shell seat (18) forms a sliding structure on the main track (101) with the assistance of the driving wheel (20) and the driven wheel (23).

10. The FOUP automatic transport device for avoiding wafer damage according to claim 9, characterized in that: The roller portion in the driving wheel (20) and the roller portion in the driven wheel (23) are both pressed and stuck in the "convex" shaped sliding groove in the main track (101), and the gear portion in the driving wheel (20) and the gear portion in the driven wheel (23) are both connected to the main rack portion (102) in a meshing manner.

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