Epitaxial wafer cleaning device and method for LED street lamp production

Abstract

The invention discloses an epitaxial wafer cleaning device and method for LED street lamp production, and particularly relates to the technical field of street lamp production, the epitaxial wafer cleaning device comprises a base, a fixed cleaning mechanism is fixedly mounted in the middle of the top end of the base, a side fixing mechanism is arranged on the fixed cleaning mechanism, and a first conveying mechanism is fixedly mounted on one side of the top end of the base; a second conveying mechanism is fixedly mounted on the side, away from the first conveying mechanism, of the top end of the base. The fixed washing mechanism comprises two groups of first frames which are symmetrically distributed, the first frames are fixedly mounted in the middle of the top end of the base, and two fixed washing parts which are symmetrically distributed up and down are fixedly mounted between the two groups of first frames. And the upper surface and the lower surface of the substrate are synchronously cleaned, and the situation that the overall cleaning effect of the LED epitaxial wafer is affected due to the fact that the positioning part of the substrate cannot be cleaned can be prevented.

Description

Technical Field

[0001] The present invention relates to the technical field of street lamp production, and in particular to an epitaxial wafer cleaning device and method for producing LED street lamps. Background Art

[0002] LED street lights are an increasingly common choice in modern urban lighting. LED street lights have good energy-saving effects, long life, high brightness, environmental friendliness, low heat and strong adjustability. Due to their many advantages, they are widely used in urban roads, parks and courtyards, highways and parking lots. When producing LED street lamps, LED epitaxial wafers are needed. LED epitaxial wafers are one of the key materials for manufacturing LED (light emitting diode) devices. They are usually thin layers grown on semiconductor substrates through special processes. They are the core components of LED light sources and directly affect the performance, efficiency and life of LEDs. Among them, the substrate substrate needs to be cleaned during the production and processing of LED epitaxial wafers. The traditional LED epitaxial wafer cleaning method is to first position the substrate substrate, and then use a cleaning solution to clean it. After cleaning, the substrate substrate is removed for subsequent cleaning. However, this cleaning method makes it difficult to clean the positioning part of the substrate substrate, which will affect the overall cleaning effect of the LED epitaxial wafer. To this end, we propose an epitaxial wafer cleaning device and method for LED street lamp production to solve the above problems. Summary of the invention

[0003] The object of the present invention is to provide an epitaxial wafer cleaning device and method for LED street lamp production to solve the problems raised in the above background technology.

[0004] To achieve the above-mentioned object, the present invention provides the following technical solutions: an epitaxial wafer cleaning device for LED street lamp production, comprising a base, a fixed cleaning mechanism is fixedly installed at the middle of the top of the base, a side fixed mechanism is provided on the fixed cleaning mechanism, a first transport mechanism is fixedly installed at one side of the top of the base, and a second transport mechanism is fixedly installed at the side of the top of the base away from the first transport mechanism; The fixed-wash mechanism comprises two groups of first frames which are symmetrically distributed, wherein the first frames are fixedly installed at the middle of the top of the base, and two fixed-wash parts which are symmetrically distributed up and down are fixedly installed between the two groups of the first frames; The fixed and washing parts include two symmetrically distributed second frames, which are fixedly mounted on the corresponding first frames respectively. A plurality of evenly distributed rotating shafts are rotatably mounted on the first frames, and adjustment brackets are fixedly mounted on the inner ends of the rotating shafts. A plurality of groups of first fixed and second fixed transport parts with staggered distribution are arranged between the corresponding adjustment brackets.

[0005] As a preferred technical solution of the present invention, the first fixed transport member includes a first cleaning drum, which is rotatably installed between the corresponding two adjustment brackets, and the first cleaning drum is provided with a plurality of evenly distributed first cleaning grooves, and the outer end of the first cleaning drum is fixedly installed with a symmetrically distributed first disk, the outer movable sleeve of the first disk is provided with a first rubber ring, and the outer top movable sleeve of the first cleaning drum is provided with a first sealing drum, the inner wall of the first sealing drum is in contact with the outer wall of the first cleaning drum, and the first disk is movably clamped in the first sealing drum, and the top of the first sealing drum is fixedly installed with a first longitudinal frame, and the middle part of the top end of the first longitudinal frame is fixedly installed with a first longitudinal axis, and the outer sliding sleeve of the first longitudinal axis is provided with a first cross frame, and the two ends of the first cross frame are respectively slidably installed on the corresponding second frame, and the outer movable sleeve of the first longitudinal axis between the bottom end of the first cross frame and the top end of the first longitudinal frame is provided with a first spring.

[0006] As a preferred technical solution of the present invention, the second fixed transport member includes a second cleaning drum, which is rotatably installed between the corresponding two adjustment brackets, and the second cleaning drum is provided with a plurality of evenly distributed second cleaning grooves, and a symmetrically distributed second disk is fixedly installed in the middle of the outer side of the second cleaning drum, and a second rubber ring is provided on the outer movable sleeve of the second disk, and a second sealing sleeve is provided on the outer top movable sleeve of the second cleaning drum, and the inner wall of the second sealing sleeve contacts the outer wall of the second cleaning drum, and the second disk is movably clamped in the second sealing sleeve, and a second longitudinal frame is fixedly installed on the top of the second sealing sleeve, and a second longitudinal axis is fixedly installed in the middle of the top end of the second longitudinal frame, and a second cross frame is provided on the outer sliding sleeve of the second longitudinal axis, and the two ends of the second cross frame are respectively slidably installed on the corresponding second frames, and a second spring is provided on the outer movable sleeve of the second longitudinal axis between the bottom end of the second cross frame and the top end of the second longitudinal frame.

[0007] As a preferred technical solution of the present invention, the outer ends of the multiple rotating shafts are fixedly installed with transmission gears, the tops of the multiple adjacent transmission gears on the same side are meshed and connected with the first rack, the first rack is slidably installed on the outer side of the corresponding second frame, the bottoms of the multiple adjacent transmission gears on the same side are meshed and connected with the second rack, the second rack is slidably installed on the outer side of the corresponding second frame, the two ends of the first horizontal frame and the two ends of the second horizontal frame are respectively vertically installed with the corresponding second racks, and a first motor is fixedly installed on the end of one of the second frames, and the driving end of the first motor and the end of one of the rotating shafts are fixedly installed.

[0008] As a preferred technical solution of the present invention, a sealing rotating part is fixedly installed at one end of each of the first and second cleaning drums, a connecting head is fixedly installed in the middle of the sealing rotating part, and connecting main pipes are fixedly installed at the ends of each of the connecting heads.

[0009] As a preferred technical solution of the present invention, a sprocket transmission group is fixedly installed on the other end of the plurality of first cleaning drums and the second cleaning drum, and the sprocket transmission group includes a plurality of transmission sprockets corresponding to the first cleaning drum and the second cleaning drum and a transmission chain meshed on the outside of the plurality of transmission sprockets, and the transmission sprockets are respectively fixedly installed on the other end of the corresponding first cleaning drum and the second cleaning drum, and a second motor is fixedly installed on one of the second frames, and a driving end of the second motor and an end portion of the corresponding second cleaning drum are fixedly installed.

[0010] As a preferred technical solution of the present invention, the side fixing mechanism includes two groups of telescopic cylinders distributed symmetrically, and the telescopic cylinders are respectively fixedly mounted on the corresponding first frames, and the driving ends of each group of telescopic cylinders are fixedly mounted with a third frame, and both ends of the third frame are fixedly mounted on a rotating frame, and transmission wheels are rotatably mounted on the rotating frames, and the outer movable sleeves of the two transmission wheels are provided with side fixing rubber rings, and a third motor is fixedly mounted on the top of one of the rotating frames, and the driving end of the third motor and the shaft end of the corresponding transmission wheel are fixedly mounted.

[0011] As a preferred technical solution of the present invention, the first transport mechanism includes two groups of symmetrically distributed fourth frames, the fourth frames are fixedly installed on one side of the top end of the base, and transport shafts are rotatably installed on the top of the fourth frames, and transport wheels are fixedly installed on the ends of the transport shafts. Transport tapes are provided on the outer movable sleeves corresponding to the two transport wheels, and a fourth motor is fixedly installed on the top of one of the fourth frames, and the driving end of the fourth motor is fixedly installed on the end of the corresponding transport shaft, and a common drive shaft is fixedly installed between one group of the transport shafts.

[0012] As a preferred technical solution of the present invention, the structure of the second transport mechanism is the same as that of the first transport mechanism, and the second transport mechanism is fixedly installed on the top of the base away from the first transport mechanism through a fourth frame.

[0013] A method for using an epitaxial wafer cleaning device for LED street lamp production comprises the following steps: Step 1: adjust the spacing between the first fixed transport members and the second fixed transport members according to the thickness of the substrate substrate, control the first motor to start driving one of the rotating shafts to rotate, cooperate with the meshing connection of the first rack and the transmission gear, control the other multiple rotating shafts to rotate synchronously, and then control the multiple adjustment brackets to rotate, thereby driving the first fixed transport members and the second fixed transport members to rotate and descend, and adjust the spacing between the first fixed transport members (and the second fixed transport members) in the two fixed washers, so as to adapt to the support transmission clamping positioning of substrates with different thicknesses in the future; The transmission gear rotates and drives the second rack to move in the opposite direction of the moving direction of the first rack, thereby controlling the first horizontal frame and the second horizontal frame to drive the first and second sealing drums to move synchronously horizontally, and the moving distance is the same as the horizontal moving distance of the first sealing drum in the first fixed transport members and the second sealing drum in the second fixed transport members, and cooperates with the elastic force of the second spring to make the inner wall of the first sealing drum always contact with the outer wall of the first cleaning drum, and the inner wall of the second sealing drum always contact with the outer wall of the second cleaning drum, so that the first sealing drum blocks the first cleaning grooves at the top of the first cleaning drum, and the second sealing drum blocks the second cleaning grooves at the top of the second cleaning drum; Step 2: According to the different widths of the substrate, the telescopic cylinders on both sides are controlled to drive the corresponding side glue rings to move toward or away from each other, and the spacing between the side glue rings on both sides is flexibly adjusted to adapt to the side end positioning of substrates of different widths; Step 3, placing the substrate substrate to be cleaned on the transport tape, controlling the fourth motor in the first transport mechanism to start, driving the corresponding transport shaft to rotate, thereby controlling the transport wheel to drive the transport tape to transport, and automatically transporting the substrate substrate to between the first fixed transport parts and the second fixed transport parts in the two fixed washing parts, controlling the second motor to start to drive the corresponding second cleaning drum to rotate, cooperating with the transmission of the sprocket transmission group, driving the first cleaning drums and the second cleaning drums to rotate synchronously, supporting, clamping and transporting the substrate substrate between the first trays in the two fixed washing parts, and supporting, clamping and transporting the substrate substrate between the second trays in the two fixed washing parts; When the substrate substrate is supported, clamped and transferred between the plurality of first plates and the plurality of second plates, the side end of the substrate substrate contacts the side fixing glue ring, and the third motor is turned on to drive the corresponding transmission wheel to rotate, thereby controlling the side fixing glue ring to transmit, and positioning and transferring the side end of the substrate substrate; Control to start the cleaning liquid output system, the cleaning liquid is introduced into the corresponding multiple first cleaning drums and the second cleaning drums through the connecting main pipe and multiple connecting heads, and is evenly sprayed on the upper and lower surfaces of the substrate substrate supported, clamped and transported through the multiple first cleaning grooves at the bottom of the first cleaning drum and the multiple second cleaning grooves at the bottom of the second cleaning drum to perform synchronous cleaning; The positions of the second disk and the first disk are staggered, so when the substrate is clamped at the second disk, the original first disk clamping position can be cleaned, and when the substrate is clamped at the first disk, the original second disk clamping position can be cleaned, thereby preventing the substrate positioning part from being unable to be cleaned; Step 4: After the substrate substrate is cleaned, it is transferred to the transport tape in the second transport mechanism for automatic unloading of the substrate substrate, and the substrate substrate is further transported for subsequent processing.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. By setting up a fixed cleaning mechanism, it is convenient to support, clamp and transfer the substrate wafer between the two fixed cleaning parts, and simultaneously clean the upper and lower surfaces of the substrate wafer, and prevent the positioning part of the substrate wafer from not being able to be cleaned, which affects the overall cleaning effect of the LED epitaxial wafer.

[0015] 2. By setting the side fixing mechanism, the spacing between the side fixing glue rings on both sides can be flexibly adjusted to adapt to the side end positioning transmission of substrates of different widths and sizes, thereby improving the stability of the substrate during transmission.

[0016] 3. By setting up a fixed washing mechanism, the spacing between multiple first fixed transport parts and second fixed transport parts in the two fixed washing parts is adjusted to facilitate the subsequent support transmission clamping and positioning of substrates of different thicknesses, thereby improving the flexibility of the entire cleaning device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 It is a schematic diagram of the structure of the present invention.

[0019] Figure 2 It is a structural schematic diagram of the fixed washing mechanism in the present invention.

[0020] Figure 3 It is a schematic diagram of the structure of the fixed washing part in the present invention.

[0021] Figure 4 For the present invention Figure 3 Enlarged view of point A in the middle.

[0022] Figure 5 It is a schematic structural diagram of the first fixed transport member in the present invention.

[0023] Figure 6 It is a schematic structural diagram of the second fixed transport member in the present invention.

[0024] Figure 7 It is a schematic diagram of the structural connection between the first frame and the side fixing mechanism in the present invention.

[0025] Figure 8 For the present invention Figure 7 Enlarged view of point B in the middle.

[0026] Fig. 9 It is a structural schematic diagram of the first transportation mechanism in the present invention.

[0027] Fig.10 For the present invention Fig. 9 Enlarged view of point C in the middle.

[0028] In the figure: 1, base; 2, fixed washing mechanism; 3, side fixed mechanism; 4, first transport mechanism; 5, second transport mechanism; 21, first frame; 6, fixed washing member; 61, second frame; 62, rotating shaft; 63, adjusting bracket; 64, first fixed transport member; 65, second fixed transport member; 67, transmission gear; 671, first rack; 672, second rack; 673, first motor; 68, sealing rotating member; 681, connector; 682, connecting main pipe; 69, sprocket transmission group; 691, second motor; 641, first washing drum; 642, first washing tank; 643, first plate; 6431, first rubber ring; 644, first Sealing cylinder; 645, first longitudinal frame; 6451, first longitudinal axis; 6452, first transverse frame; 6453, first spring; 651, second cleaning drum; 652, second cleaning tank; 653, second plate; 6531, second rubber ring; 654, second sealing cylinder; 655, second longitudinal frame; 656, second longitudinal axis; 6561, second transverse frame; 6562, second spring; 31, telescopic cylinder; 32, third frame; 33, rotating frame; 34, transmission wheel; 35, side fixed rubber ring; 36, third motor; 41, fourth frame; 42, transport shaft; 43, transport wheel; 44, transport tape; 45, common drive shaft; 46, fourth motor. DETAILED DESCRIPTION

[0029] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0030] Example: Figure 1-10 As shown, the present invention provides an epitaxial wafer cleaning device for LED street lamp production, comprising a base 1, a fixed cleaning mechanism 2 is fixedly installed in the middle of the top of the base 1, a side fixed mechanism 3 is provided on the fixed cleaning mechanism 2, a first transport mechanism 4 is fixedly installed on one side of the top of the base 1, and a second transport mechanism 5 is fixedly installed on the side of the top of the base 1 away from the first transport mechanism 4; The fixed-wash mechanism 2 includes two symmetrically distributed groups of first frames 21, the first frames 21 are fixedly installed at the middle of the top of the base 1, and two fixed-wash parts 6 symmetrically distributed up and down are fixedly installed between the two groups of first frames 21; the fixed-wash part 6 includes two symmetrically distributed second frames 61, the second frames 61 are respectively fixedly installed on the corresponding first frames 21, and multiple uniformly distributed rotating shafts 62 are rotatably installed on the first frames 21, and the inner ends of the rotating shafts 62 are fixedly installed with adjustment brackets 63, and the multiple groups of corresponding adjustment brackets 63 are provided with staggered first fixed-transport parts 64 and second fixed-transport parts 65; The outer ends of the plurality of rotating shafts 62 are all fixedly mounted with transmission gears 67, and the tops of the plurality of adjacent transmission gears 67 on the same side are meshedly connected with first racks 671, and the first racks 671 are slidably mounted on the outer sides of the corresponding second racks 61; a first motor 673 is fixedly mounted on the end of one of the second racks 61, and the driving end of the first motor 673 is fixedly mounted on the end of one of the rotating shafts 62. When in use, the first motor 673 is controlled to be turned on to drive one of the rotating shafts 62 to rotate, and the meshing connection between the first rack 671 and the transmission gear 67 is coordinated to control the other plurality of rotating shafts 62 to rotate synchronously, and then the plurality of adjusting brackets 63 are controlled to rotate, thereby driving the plurality of first fixed transport members 64 and the second fixed transport members 65 to rotate and descend, and adjusting the spacing between the plurality of first fixed transport members 64 (and the second fixed transport members 65) in the two fixed washing members 6, so as to subsequently adapt to the support transmission clamping positioning of substrates of different thicknesses, thereby improving the flexibility of the entire cleaning device; The first fixed transport member 64 includes a first cleaning drum 641, which is rotatably mounted between the corresponding two adjustment brackets 63 to facilitate the rotation of the first cleaning drum 641. The first cleaning drum 641 is provided with a plurality of evenly distributed first cleaning slots 642. A symmetrically distributed first disk 643 is fixedly mounted on the outer end of the first cleaning drum 641. A first rubber ring 6431 is movably sleeved on the outer side of the first disk 643. By driving the plurality of first cleaning drums 641 in the two fixed washing members 6 to rotate, the plurality of first disks 643 and the first rubber ring 6431 in the two fixed washing members 6 are driven to rotate, and the substrate is supported, clamped and transported between the plurality of first disks 643 in the two fixed washing members 6. A first sealing cylinder 644 is movably sleeved on the top outer side of the first cleaning drum 641, and the inner wall of the first sealing cylinder 644 contacts the outer wall of the first cleaning drum 641. The first plate 643 is movably clamped in the first sealing cylinder 644. A first longitudinal frame 645 is fixedly installed on the top of the first sealing cylinder 644, and a first longitudinal axis 6451 is fixedly installed in the middle of the top of the first longitudinal frame 645. A first transverse frame 6452 is slidably sleeved on the outer side of the first longitudinal axis 6451. Both ends of the first transverse frame 6452 are slidably installed on the corresponding second frame 61 respectively. The first transverse frame 6452 is convenient for horizontal sliding on the second frame 61, and the first longitudinal axis 6451 can be vertically lifted and lowered on the first transverse frame 6452. A first spring 6453 is movably sleeved on the outer side of the first longitudinal axis 6451 between the bottom end of the first transverse frame 6452 and the top end of the first longitudinal frame 645.

[0031] The second fixed transport member 65 includes a second cleaning drum 651, which is rotatably mounted between the corresponding two adjustment brackets 63. The second cleaning drum 651 is provided with a plurality of evenly distributed second cleaning grooves 652. A symmetrically distributed second plate 653 is fixedly mounted on the middle of the outer side of the second cleaning drum 651. A second rubber ring 6531 is movably sleeved on the outer side of the second plate 653. By driving the plurality of second cleaning drums 651 in the two fixed wash members 6 to rotate, the plurality of second plates 653 and the second rubber rings in the two fixed wash members 6 are driven. 6531 rotates, and the substrate substrate is supported, clamped and transferred between the multiple second plates 653 in the two fixed cleaning parts 6. The positions of the second plates 653 and the first plates 643 are staggered, so that when the substrate substrate is clamped at the position of the second plate 653, the original clamping position of the first plate 643 can be cleaned, and when the substrate substrate is clamped at the first plate 643, the original clamping position of the second plate 653 can be cleaned, thereby preventing the substrate substrate positioning part from being unable to be cleaned, affecting the overall cleaning effect of the LED epitaxial wafer; A second sealing sleeve 654 is movably sleeved on the outer top of the second cleaning drum 651, the inner wall of the second sealing sleeve 654 contacts the outer wall of the second cleaning drum 651, the second plate 653 is movably clamped in the second sealing sleeve 654, a second longitudinal frame 655 is fixedly installed on the top of the second sealing sleeve 654, a second longitudinal axis 656 is fixedly installed in the middle of the top of the second longitudinal frame 655, a second transverse frame 6561 is slidably sleeved on the outer side of the second longitudinal axis 656, both ends of the second transverse frame 6561 are slidably installed on the corresponding second frame 61 respectively, the second transverse frame 6561 is convenient for horizontal sliding on the second frame 61, and the second longitudinal axis 656 can be vertically lifted and lowered on the second transverse frame 6561, a second spring 6562 is movably sleeved on the outer side of the second longitudinal axis 656 between the bottom end of the second transverse frame 6561 and the top end of the second longitudinal frame 655.

[0032] The bottoms of the adjacent multiple transmission gears 67 on the same side are meshed and connected with second racks 672, which are slidably mounted on the outer side of the corresponding second frame 61. The two ends of the first horizontal frame 6452 and the two ends of the second horizontal frame 6561 are respectively vertically mounted with the corresponding second racks 672. When the transmission gear 67 rotates, the second rack 672 is driven to move in the opposite direction of the moving direction of the first rack 671, thereby controlling the first horizontal frame 6452 and the second horizontal frame 6561 to drive the multiple first envelopes 644 and the second envelopes 654 to move horizontally synchronously, and the moving distance is the same as the multiple The first seal 644 in the first fixed transport member 64 and the second seal 654 in the second fixed transport member 65 move the same distance in the horizontal direction, and cooperate with the elastic force of the second spring 6562 to make the inner wall of the first seal 644 always contact with the outer wall of the first cleaning drum 641, and the inner wall of the second seal 654 always contact with the outer wall of the second cleaning drum 651, so that the first seal 644 blocks the multiple first cleaning grooves 642 at the top of the first cleaning drum 641, and the second seal 654 blocks the multiple second cleaning grooves 652 at the top of the second cleaning drum 651.

[0033] A sealing rotating member 68 is fixedly installed at one end of each of the multiple first cleaning drums 641 and the second cleaning drum 651, and a connecting head 681 is fixedly installed in the middle of the sealing rotating member 68. By setting the sealing rotating member 68, the rotational seal between the multiple first cleaning drums 641 and the second cleaning drum 651 and the connecting head 681 is not affected. A connecting main pipe 682 is fixedly installed at the end of each of the multiple connecting heads 681. When in use, the end of the connecting main pipe 682 is connected to the output port of the cleaning liquid output system to control the opening of the cleaning liquid output system. The cleaning liquid is introduced into the corresponding multiple first cleaning drums 641 and the second cleaning drum 651 through the connecting main pipe 682 and the multiple connecting heads 681, and is evenly sprayed on the upper and lower surfaces of the substrate substrate supported, clamped and transmitted through the multiple first cleaning grooves 642 at the bottom of the first cleaning drum 641 and the multiple second cleaning grooves 652 at the bottom of the second cleaning drum 651 for synchronous cleaning, thereby improving the cleaning efficiency and quality of the substrate substrate.

[0034] A sprocket transmission group 69 is fixedly installed on the other end of the multiple first cleaning drums 641 and the second cleaning drum 651. The sprocket transmission group 69 includes multiple transmission sprockets corresponding to the first cleaning drum 641 and the second cleaning drum 651 and a transmission chain meshed on the outside of the multiple transmission sprockets. The transmission sprockets are respectively fixedly installed on the other end of the corresponding first cleaning drum 641 and the second cleaning drum 651. A second motor 691 is fixedly installed on one of the second frames 61. The driving end of the second motor 691 and the end of the corresponding second cleaning drum 651 are fixedly installed. The second motor 691 is controlled to start and drive the corresponding second cleaning drum 651 to rotate, and cooperates with the transmission of the sprocket transmission group 69 to drive the multiple first cleaning drums 641 and the second cleaning drum 651 to rotate synchronously.

[0035] The side fixing mechanism 3 includes two groups of telescopic cylinders 31 distributed symmetrically, and the telescopic cylinders 31 are fixedly installed on the corresponding first frames 21 respectively. The driving end of each group of telescopic cylinders 31 is fixedly installed with a third frame 32, and both ends of the third frame 32 are fixedly installed on a rotating frame 33. A transmission wheel 34 is rotatably installed in the rotating frame 33, and the outer movable sleeves of the two transmission wheels 34 are provided with a side fixing rubber ring 35. A third motor 36 is fixedly installed on the top of one of the rotating frames 33, and the driving end of the third motor 36 is fixedly installed on the shaft end of the corresponding transmission wheel 34. When in use, according to the width of the substrate, According to the different widths, the telescopic cylinders 31 on both sides are controlled to open to drive the corresponding side glue rings 35 to move toward or away from each other, and the spacing between the side glue rings 35 on both sides is flexibly adjusted to adapt to the side end positioning of substrates of different widths. When the substrates are supported, clamped and transmitted between the multiple first plates 643 and the multiple second plates 653, the side ends of the substrates are in contact with the side glue rings 35, and the third motor 36 is turned on to drive the corresponding transmission wheel 34 to rotate, thereby controlling the side glue rings 35 to transmit, positioning and transmitting the side ends of the substrates, and improving the stability of the substrates during transmission.

[0036] The first transport mechanism 4 includes two groups of symmetrically distributed fourth frames 41, the fourth frames 41 are fixedly installed on one side of the top of the base 1, and the tops of the fourth frames 41 are rotatably installed with transport shafts 42, and the ends of the transport shafts 42 are fixedly installed with transport wheels 43, and the outer movable sleeves of the two transport wheels 43 are provided with transport tapes 44, and the top of one of the fourth frames 41 is fixedly installed with a fourth motor 46, and the driving end of the fourth motor 46 and the end of the corresponding transport shaft 42 are fixedly installed, and a common drive shaft 45 is fixedly installed between one group of transport shafts 42, and the fourth motor 46 is controlled to start, and the corresponding transport shaft 42 is driven to rotate, so as to control the transport wheel 43 to drive the transport tape 44 to transport, and the substrate substrate to be cleaned is placed on the transport tape 44, and the substrate substrate is automatically transported to between the first fixed transport parts 64 and the second fixed transport parts 65 in the two fixed washing parts 6, so as to automatically load the substrate substrate; The structure of the second transport mechanism 5 is the same as that of the first transport mechanism 4. The second transport mechanism 5 is fixedly installed on the top of the base 1 on the side away from the first transport mechanism 4 through the fourth frame 41. After the substrate wafer is cleaned, it is transferred to the transport tape 44 in the second transport mechanism 5 for automatic unloading of the substrate wafer, and the substrate wafer is continuously transported for subsequent processing of the substrate wafer.

[0037] A method for using an epitaxial wafer cleaning device for LED street lamp production comprises the following steps: Step 1: adjust the spacing between the first fixed transport members 64 and the second fixed transport members 65 according to the thickness of the substrate, control the first motor 673 to drive one of the rotating shafts 62 to rotate, cooperate with the meshing connection between the first rack 671 and the transmission gear 67, control the other multiple rotating shafts 62 to rotate synchronously, and then control the multiple adjustment brackets 63 to rotate, thereby driving the first fixed transport members 64 and the second fixed transport members 65 to rotate and descend, and adjust the spacing between the first fixed transport members 64 (and the second fixed transport members 65) in the two fixed washers 6, so as to adapt to the support transmission clamping positioning of substrates with different thicknesses in the future; When the transmission gear 67 rotates, it drives the second rack 672 to move in the opposite direction of the moving direction of the first rack 671, thereby controlling the first cross frame 6452 and the second cross frame 6561 to drive the first and second envelopes 644 and 654 to move horizontally and synchronously, and the moving distance is the same as the horizontal moving distance of the first envelopes 644 and the second envelopes 654 in the first fixed transport members 64 and the second envelopes 654 in the second fixed transport members 65, and the elastic force of the second spring 6562 is cooperated to make the inner wall of the first envelope 644 always contact with the outer wall of the first cleaning drum 641, and the inner wall of the second envelope 654 always contact with the outer wall of the second cleaning drum 651, so that the first envelope 644 blocks the first cleaning grooves 642 at the top of the first cleaning drum 641, and the second envelope 654 blocks the second cleaning grooves 652 at the top of the second cleaning drum 651; Step 2: According to the different widths of the substrate, the telescopic cylinders 31 on both sides are controlled to drive the corresponding side glue rings 35 to move toward or away from each other, and the spacing between the side glue rings 35 on both sides is flexibly adjusted to adapt to the side end positioning of substrates of different widths; Step 3, place the substrate substrate to be cleaned on the transport belt 44, control the fourth motor 46 in the first transport mechanism 4 to start, drive the corresponding transport shaft 42 to rotate, thereby control the transport wheel 43 to drive the transport belt 44 to transport, and automatically transport the substrate substrate to between the multiple first fixed transport parts 64 and the second fixed transport parts 65 in the two fixed washing parts 6, control the second motor 691 to start and drive the corresponding second cleaning drum 651 to rotate, cooperate with the transmission of the sprocket transmission group 69, drive the multiple first cleaning drums 641 and the second cleaning drum 651 to rotate synchronously, and the substrate substrate is supported, clamped and transported between the multiple first plates 643 in the two fixed washing parts 6, and the substrate substrate is supported, clamped and transported between the multiple second plates 653 in the two fixed washing parts 6; When the substrate substrate is supported, clamped and transferred between the plurality of first plates 643 and the plurality of second plates 653, the side end of the substrate substrate contacts the side fixing glue ring 35, and the third motor 36 is turned on to drive the corresponding transmission wheel 34 to rotate, thereby controlling the side fixing glue ring 35 to transmit, and positioning and transferring the side end of the substrate substrate; The cleaning liquid output system is controlled to start, and the cleaning liquid is introduced into the corresponding first cleaning drums 641 and the second cleaning drums 651 through the connecting main pipe 682 and the multiple connecting heads 681, and is evenly sprayed on the upper and lower surfaces of the substrate substrates supported, clamped and transported through the multiple first cleaning grooves 642 at the bottom of the first cleaning drum 641 and the multiple second cleaning grooves 652 at the bottom of the second cleaning drum 651, so as to perform synchronous cleaning; Since the positions of the second plate 653 and the first plate 643 are staggered, when the substrate is clamped at the position of the second plate 653, the original clamping position of the first plate 643 can be cleaned, and when the substrate is clamped at the first plate 643, the original clamping position of the second plate 653 can be cleaned, thereby preventing the positioning part of the substrate from being unable to be cleaned; Step 4: After the substrate substrate is cleaned, it is transferred to the transport tape 44 in the second transport mechanism 5 for automatic unloading of the substrate substrate, and the substrate substrate is further transported for subsequent processing of the substrate substrate.

[0038] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. An epitaxial wafer cleaning device for LED street lamp production, comprising a base (1), characterized in that: A fixing and washing mechanism (2) is fixedly mounted in the middle of the top of the base (1), a side fixing mechanism (3) is provided on the fixing and washing mechanism (2), a first transport mechanism (4) is fixedly mounted on one side of the top of the base (1), and a second transport mechanism (5) is fixedly mounted on the side of the top of the base (1) away from the first transport mechanism (4); The fixed-wash mechanism (2) comprises two symmetrically distributed groups of first frames (21), wherein the first frames (21) are fixedly mounted at the middle of the top end of the base (1), and two fixed-wash components (6) symmetrically distributed up and down are fixedly mounted between the two groups of the first frames (21); The fixed washing member (6) comprises two symmetrically distributed second frames (61), the second frames (61) being fixedly mounted on the corresponding first frames (21), a plurality of evenly distributed rotating shafts (62) being rotatably mounted on the first frames (21), an adjusting bracket (63) being fixedly mounted on the inner ends of the rotating shafts (62), and a plurality of groups of first fixed transport members (64) and second fixed transport members (65) being staggeredly distributed and arranged between the corresponding adjusting brackets (63).

2. The epitaxial wafer cleaning device for LED street lamp production according to claim 1, characterized in that: The first fixed transport member (64) comprises a first cleaning rotary drum (641), the first cleaning rotary drum (641) being rotatably mounted between two corresponding adjustment brackets (63), the first cleaning rotary drum (641) being provided with a plurality of evenly distributed first cleaning grooves (642), the outer end of the first cleaning rotary drum (641) being fixedly mounted with a symmetrically distributed first plate (643), the outer movable sleeve of the first plate (643) being provided with a first rubber ring (6431), the outer top movable sleeve of the first cleaning rotary drum (641) being provided with a first sealing drum (644), the inner wall of the first sealing drum (644) and the first cleaning rotary drum (641) being rotatably mounted with a first sealing drum (644), 1), the first disk (643) is movably engaged in the first sealing tube (644), a first longitudinal frame (645) is fixedly mounted on the top of the first sealing tube (644), a first longitudinal axis (6451) is fixedly mounted in the middle of the top of the first longitudinal frame (645), a first transverse frame (6452) is slidably sleeved on the outer side of the first longitudinal axis (6451), both ends of the first transverse frame (6452) are slidably mounted on the corresponding second frame (61), and a first spring (6453) is movably sleeved on the outer side of the first longitudinal axis (6451) between the bottom end of the first transverse frame (6452) and the top end of the first longitudinal frame (645).

3. The epitaxial wafer cleaning device for LED street lamp production according to claim 2, characterized in that: The second fixed transport member (65) comprises a second cleaning drum (651), the second cleaning drum (651) being rotatably mounted between two corresponding adjustment brackets (63), the second cleaning drum (651) being provided with a plurality of evenly distributed second cleaning grooves (652), a symmetrically distributed second plate (653) being fixedly mounted on the middle portion of the outer side of the second cleaning drum (651), a second rubber ring (6531) being movably sleeved on the outer side of the second plate (653), a second sealing drum (654) being movably sleeved on the outer top of the second cleaning drum (651), the inner wall of the second sealing drum (654) and the second cleaning drum ( The second disk (653) contacts the outer wall of the second frame (651), the second disk (653) is movably clamped in the second envelope (654), a second longitudinal frame (655) is fixedly installed on the top of the second envelope (654), a second longitudinal axis (656) is fixedly installed in the middle of the top of the second longitudinal frame (655), a second transverse frame (6561) is provided on the outer sliding sleeve of the second longitudinal axis (656), both ends of the second transverse frame (6561) are respectively slidably installed on the corresponding second frame (61), and a second spring (6562) is provided on the outer movable sleeve of the second longitudinal axis (656) between the bottom end of the second transverse frame (6561) and the top end of the second longitudinal frame (655).

4. The epitaxial wafer cleaning device for LED street lamp production according to claim 3, characterized in that: The outer ends of the plurality of rotating shafts (62) are all fixedly mounted with transmission gears (67); the tops of the plurality of adjacent transmission gears (67) on the same side are meshedly connected with first racks (671); the first racks (671) are slidably mounted on the outer side of the corresponding second frame (61); the bottoms of the plurality of adjacent transmission gears (67) on the same side are meshedly connected with second racks (672); the second racks (672) are slidably mounted on the outer side of the corresponding second frame (61); the two ends of the first horizontal frame (6452) and the two ends of the second horizontal frame (6561) are respectively vertically mounted with the corresponding second racks (672); a first motor (673) is fixedly mounted on the end of one of the second frames (61); and the driving end of the first motor (673) is fixedly mounted on the end of one of the rotating shafts (62).

5. The epitaxial wafer cleaning device for LED street lamp production according to claim 4, characterized in that: A sealing rotating member (68) is fixedly mounted on one end of each of the plurality of first cleaning rotating drums (641) and the second cleaning rotating drum (651), a connecting head (681) is fixedly mounted in the middle of the sealing rotating member (68), and a connecting main pipe (682) is fixedly mounted on the ends of the plurality of connecting heads (681).

6. The epitaxial wafer cleaning device for LED street lamp production according to claim 5, characterized in that: A sprocket drive group (69) is fixedly mounted on the other end of the plurality of first cleaning drums (641) and the second cleaning drum (651). The sprocket drive group (69) comprises a plurality of drive sprockets corresponding to the first cleaning drum (641) and the second cleaning drum (651) and a drive chain meshed on the outside of the plurality of drive sprockets. The drive sprockets are respectively fixedly mounted on the other end of the corresponding first cleaning drum (641) and the second cleaning drum (651). A second motor (691) is fixedly mounted on one of the second frames (61). The driving end of the second motor (691) is fixedly mounted on the end of the corresponding second cleaning drum (651).

7. The epitaxial wafer cleaning device for LED street lamp production according to claim 6, characterized in that: The side fixing mechanism (3) comprises two groups of telescopic cylinders (31) distributed symmetrically. The telescopic cylinders (31) are respectively fixedly mounted on the corresponding first frames (21). A third frame (32) is fixedly mounted on the driving end of each group of telescopic cylinders (31). Both ends of the third frame (32) are fixedly mounted on a rotating frame (33). A transmission wheel (34) is rotatably mounted in each of the rotating frames (33). Side fixing rubber rings (35) are provided on the outer movable sleeves of the two transmission wheels (34). A third motor (36) is fixedly mounted on the top end of one of the rotating frames (33). The driving end of the third motor (36) is fixedly mounted on the shaft end of the corresponding transmission wheel (34).

8. The epitaxial wafer cleaning device for LED street lamp production according to claim 7, characterized in that: The first transport mechanism (4) comprises two groups of symmetrically distributed fourth frames (41), the fourth frames (41) being fixedly mounted on one side of the top end of the base (1), the top of each of the fourth frames (41) being rotatably mounted with a transport shaft (42), the ends of the transport shaft (42) being fixedly mounted with a transport wheel (43), and outer movable sleeves of two corresponding transport wheels (43) being provided with a transport tape (44), the top of one of the fourth frames (41) being fixedly mounted with a fourth motor (46), the driving end of the fourth motor (46) being fixedly mounted with the end of the corresponding transport shaft (42), and a common drive shaft (45) being fixedly mounted between one group of the transport shafts (42).

9. The epitaxial wafer cleaning device for LED street lamp production according to claim 8, characterized in that: The structure of the second transport mechanism (5) is the same as that of the first transport mechanism (4). The second transport mechanism (5) is fixedly mounted on a side of the top of the base (1) away from the first transport mechanism (4) via a fourth frame (41).

10. A method for using the epitaxial wafer cleaning device for LED street lamp production according to claim 9, characterized in that: The steps include: Step 1: adjusting the spacing between the plurality of first fixed transport members (64) and the second fixed transport members (65) according to the thickness of the substrate substrate, controlling the first motor (673) to start and drive one of the rotating shafts (62) to rotate, cooperating with the meshing connection between the first rack (671) and the transmission gear (67), controlling the other plurality of rotating shafts (62) to rotate synchronously, and then controlling the plurality of adjustment brackets (63) to rotate, thereby driving the plurality of first fixed transport members (64) and the second fixed transport members (65) to rotate and descend, and adjusting the spacing between the plurality of first fixed transport members (64) (and the second fixed transport members (65)) in the two fixed wash members (6), so as to subsequently adapt to the support transmission clamping positioning of substrate substrates of different thicknesses; When the transmission gear (67) rotates, it drives the second rack (672) to move in the opposite direction of the moving direction of the first rack (671), thereby controlling the first horizontal frame (6452) and the second horizontal frame (6561) to drive the plurality of first envelopes (644) and the second envelopes (654) to move horizontally synchronously, and the moving distance is the same as the horizontal moving distance of the first envelopes (644) in the plurality of first fixed transport members (64) and the second envelopes (654) in the second fixed transport members (65), and cooperates with The elastic force of the second spring (6562) causes the inner wall of the first sealing cylinder (644) to always contact the outer wall of the first cleaning cylinder (641), and the inner wall of the second sealing cylinder (654) to always contact the outer wall of the second cleaning cylinder (651), so that the first sealing cylinder (644) blocks the multiple first cleaning grooves (642) at the top of the first cleaning cylinder (641), and the second sealing cylinder (654) blocks the multiple second cleaning grooves (652) at the top of the second cleaning cylinder (651); Step 2: According to the different widths of the substrates, the telescopic cylinders (31) on both sides are controlled to open to drive the corresponding side glue rings (35) to move towards or away from each other, and the spacing between the side glue rings (35) on both sides is flexibly adjusted to adapt to the side end positioning of substrates of different widths; Step 3, placing the substrate substrate to be cleaned on the transport tape (44), controlling the fourth motor (46) in the first transport mechanism (4) to start, driving the corresponding transport shaft (42) to rotate, thereby controlling the transport wheel (43) to drive the transport tape (44) to transport, and automatically transporting the substrate substrate to between the plurality of first fixed transport members (64) and the second fixed transport members (65) in the two fixed washing members (6), controlling the second motor (691) to start to drive the corresponding second washing drum (651) to rotate, cooperating with the transmission of the sprocket transmission group (69), driving the plurality of first washing drums (641) and the second washing drum (651) to rotate synchronously, and the substrate substrate is supported, clamped and transported between the plurality of first plates (643) in the two fixed washing members (6), and the substrate substrate is supported, clamped and transported between the plurality of second plates (653) in the two fixed washing members (6); When the substrate substrate is supported, clamped and transferred between the plurality of first disks (643) and the plurality of second disks (653), the side end of the substrate substrate contacts the side fixing glue ring (35), and the third motor (36) is turned on to drive the corresponding transmission wheel (34) to rotate, thereby controlling the side fixing glue ring (35) to transmit, thereby positioning and transferring the side end of the substrate substrate; Controlling and starting the cleaning liquid output system, the cleaning liquid is introduced into the corresponding plurality of first cleaning drums (641) and second cleaning drums (651) through the connecting main pipe (682) and the plurality of connecting heads (681), and is evenly sprayed onto the upper and lower surfaces of the substrate substrate that is supported, clamped and transported through the plurality of first cleaning grooves (642) at the bottom of the first cleaning drum (641) and the plurality of second cleaning grooves (652) at the bottom of the second cleaning drum (651), so as to perform synchronous cleaning; The positions of the second plate (653) and the first plate (643) are staggered, so that when the substrate is clamped at the position of the second plate (653), the original clamping position of the first plate (643) can be cleaned, and when the substrate is clamped at the first plate (643), the original clamping position of the second plate (653) can be cleaned, thereby preventing the positioning part of the substrate from being unable to be cleaned; Step 4: After the substrate substrate is cleaned, it is transferred to the transport tape (44) in the second transport mechanism (5) for automatic unloading of the substrate substrate, and the substrate substrate is further transported for subsequent processing of the substrate substrate.

Images