Magnetic suspension robot and semiconductor production equipment

Abstract

The invention relates to the field of mechanical arms, and provides a magnetic suspension robot and semiconductor production equipment, and the magnetic suspension robot comprises an operation platform which is provided with a stator assembly; the manipulator comprises a mechanical arm and a mounting seat, the mechanical arm is mounted on the mounting seat, and the mounting seat is provided with a magnet; the mounting base moves on the operation platform through cooperation of the magnet and the stator assembly. In order to overcome the defects that in the prior art, movement is limited and cleanliness is low, according to the magnetic suspension robot, a stator assembly is arranged on an operation platform, a magnet is arranged on a mounting base of a mechanical arm, the stator assembly and the operation platform form magnetic suspension after being powered on, and the mechanical arm is made to be magnetically suspended on the operation platform; and by controlling electrical parameters of the stator assembly and controlling translation and rotation of the manipulator, the moving freedom degree of the manipulator is improved, dust is prevented from being generated in the moving process of the manipulator, and the cleanliness is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of manipulators, and in particular to a magnetic suspension robot and semiconductor production equipment. Background Art

[0002] Robots are intelligent machines that can perform programmed tasks and can work semi-autonomously or fully autonomously. The definition of robots covers everything from simple automated devices to highly complex artificial intelligence systems. They are usually controlled by programming to perform a range of tasks, including operations, movement, etc.

[0003] As a kind of intelligent machine, robots have broad prospects for development and application. They can not only improve production efficiency, but also play an important role in many fields such as medical care, education, and home. With the continuous advancement of technology, robots will show their unique value in more fields in the future.

[0004] However, the range of movement of existing robots is limited by tracks and they cannot move freely. The robot's mechanical arm will inevitably produce mechanical friction during movement, which in turn generates dust. This limits their use in industries with high cleanliness requirements. Summary of the invention

[0005] The present invention provides a magnetic levitation robot and semiconductor production equipment, which are used to solve the defects of limited movement and low cleanliness in the prior art, realize magnetic levitation movement of a robot arm on an operating platform, have greater freedom of movement, and no dust caused by mechanical friction during the movement process.

[0006] The present invention provides a magnetic levitation robot, comprising: An operating platform, wherein the operating platform is provided with a stator assembly; A manipulator, the manipulator comprises a manipulator arm and a mounting seat, the manipulator arm is mounted on the mounting seat, and the mounting seat is provided with a magnet; the mounting seat moves the manipulator arm on the operating platform through the cooperation of the magnet and the stator assembly.

[0007] The magnetic levitation robot provided according to the present invention further includes a lifting mechanism, and the operating platform is installed on the lifting mechanism for adjusting the height of the operating platform.

[0008] According to the magnetic levitation robot provided by the present invention, the stator assembly includes a first coil layer and a second coil layer which are stacked, the first coil layer includes a plurality of parallel transverse coils, the second coil layer includes a plurality of parallel longitudinal coils, and the transverse coils and the longitudinal coils are arranged perpendicular to each other.

[0009] According to the magnetic levitation robot provided by the present invention, the stator assembly is also provided with a reading head array, the surface of the mounting seat opposite to the stator assembly is provided with a grating, the reading head array is arranged between the first coil layer and the second coil layer, and the reading head array is suitable for sensing the grating to obtain the position of the mounting seat.

[0010] According to the magnetic levitation robot provided by the present invention, the operating platform is provided with a plurality of the stator assemblies, the plurality of the stator assemblies are arranged flat on the same plane, and two adjacent stator assemblies are detachably connected.

[0011] According to the magnetic levitation robot provided by the present invention, the sizes of the stator assemblies are the same.

[0012] According to the magnetic levitation robot provided by the present invention, the magnetic levitation robot includes a plurality of the manipulators, each of the manipulators cooperates with the stator assembly to move on the operating platform, and the plurality of manipulators work as mechanical arms simultaneously.

[0013] According to the magnetic levitation robot provided by the present invention, the mechanical arm is a polar coordinate mechanical arm or a horizontal multi-joint mechanical arm.

[0014] The present invention provides a semiconductor production equipment, comprising the above-mentioned magnetic levitation robot, wherein the magnetic levitation robot is used for transporting semiconductors.

[0015] According to the semiconductor production equipment provided by the present invention, the robot arm includes a U-shaped clamp, and the U-shaped clamp is used to clamp the wafer.

[0016] The magnetic levitation robot provided by the present invention is configured with a stator assembly on an operating platform and a magnet on a mounting seat of a manipulator. After power is supplied to the stator assembly, the stator assembly forms magnetic levitation with the operating platform, so that the manipulator is magnetically suspended on the operating platform. The electrical parameters of the stator assembly are controlled to control the translation and rotation of the manipulator, thereby improving the freedom of movement of the manipulator, avoiding dust generation during the movement of the manipulator, and improving the cleanliness.

[0017] Furthermore, in the semiconductor production equipment provided by the present invention, since it is equipped with the magnetic levitation robot as described above, it also has the various advantages as described above. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the present invention or the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1is a schematic structural diagram of a magnetic levitation robot provided by an embodiment of the present invention; Figure 2 is a schematic structural diagram of a stator assembly of a magnetic levitation robot provided in an embodiment of the present invention; Figure 3 It is a schematic diagram of the structure of the grating of the magnetic levitation robot provided in an embodiment of the present invention.

[0020] Reference numerals: 100, operating platform; 110, stator assembly; 111, first coil layer; 1110, transverse coil; 112, second coil layer; 1120, longitudinal coil; 113, read head array; 200, manipulator; 210, mounting base; 211, magnet; 212, grating; 220, manipulator arm; 230, U-shaped clamp; 300. Lifting mechanism. DETAILED DESCRIPTION

[0021] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0022] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore cannot be understood as limitations on the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0023] In the description of the embodiments of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "connected" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the embodiments of the present invention can be understood according to specific circumstances.

[0024] In the embodiments of the present invention, unless otherwise clearly specified and limited, the first feature being "above" or "below" the second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0025] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0026] Magnetic levitation technology is a technology that uses magnetic force to overcome gravity to levitate objects. The full name is Electromagnetic Levitation (EML or EMS), which is a widely used high-tech technology. It mainly uses magnetic force to offset the gravity of objects and achieve the suspended state of objects. Magnetic levitation technology is not only used in the field of transportation, such as maglev trains, but also widely used in scientific experiments, medical equipment, industrial manufacturing and other fields.

[0027] In the field of transportation, maglev trains are a typical application of maglev technology. Maglev trains use electromagnetic force to achieve non-contact suspension and guidance between the track. This unique operation mode makes maglev trains have the advantages of high speed, low noise, and less friction. Maglev trains usually use electromagnetic force generated by linear motors to pull the trains. This design greatly improves the operating efficiency and energy utilization of the trains.

[0028] Combine the following Figure 1 It should be understood that the following description is only an illustrative embodiment of the present invention and does not constitute a limitation on the present invention.

[0029] like Figure 1As shown, the present invention provides a magnetic levitation robot, including: an operating platform 100 and a manipulator 200, the operating platform 100 is provided with a stator assembly 110; the manipulator 200 includes a mechanical arm 220 and a mounting seat 210, the mechanical arm 220 is installed on the mounting seat 210, and the mounting seat 210 is provided with a magnet 211; the mounting seat 210 moves on the operating platform 100 through the cooperation of the magnet 211 and the stator assembly 110.

[0030] That is to say, after the stator assembly 110 is energized, it forms a magnetic suspension structure with the magnet 211, so that the manipulator 200 is magnetically suspended on the operating platform 100, and the translation and degree rotation of the manipulator 200 on the operating platform 100 are realized by controlling the power gain and loss position, sequence, current size, etc. of the stator assembly 110. In the working process, there is a gap between the mounting seat 210 and the operating platform 100, and the movement of the manipulator 200, that is, the movement of the mounting seat 210 relative to the operating platform 100, and the rotation of the mechanical arm 220 relative to the mounting seat 210 do not affect each other. In other words, while the mounting seat 210 moves relative to the operating platform 100, the mechanical arm 220 can rotate relative to the mounting seat 210. In addition, the mounting seat 210 can also rotate relative to the platform while moving relative to the platform, which is more flexible.

[0031] The manipulator 200 and the operating platform 100 use a magnetic suspension structure of a magnet 211 and a stator assembly 110 to move relative to each other, thereby avoiding wear during movement, thereby reducing dust generation, and improving service life and cleanliness. Among them, the operating platform 100 is a smooth planar structure, and the manipulator 200 can rotate and move arbitrarily on the operating platform 100, which is wider and more flexible than the existing movement trajectory of the manipulator 200.

[0032] In addition, the mechanical arm 220 and the mounting base 210 can adopt a detachable connection structure, and different mechanical arm 220 structures can be adopted based on different objects to be grasped and moved. In addition, multiple mechanical arms 220 can also be installed on the mounting base 210, for example, two mechanical arms 220 are installed on the mounting base 210.

[0033] Continuing to refer to the figure, in one embodiment of the present invention, the magnetic levitation robot further includes a lifting mechanism 300 , and the operating platform 100 is mounted on the lifting mechanism 300 for adjusting the height of the operating platform 100 .

[0034] The lifting mechanism 300 drives the operation platform 100 and the robot 200 on the operation platform 100 to move up and down. The lifting mechanism 300 can move simultaneously with the movement of the robot 200 during the lifting process.

[0035] For example, the lifting mechanism 300 includes a guide rail and a driving mechanism, the operating platform 100 is mounted on the guide rail and driven by the driving mechanism so that the operating platform 100 slides up and down along the guide rail. The driving mechanism can be a motor driving a gear rack, or the driving mechanism can be a telescopic cylinder.

[0036] Furthermore, if Figure 2 As shown, in another embodiment of the present invention, the stator assembly 110 includes a first coil layer 111 and a second coil layer 112 which are stacked, the first coil layer 111 includes a plurality of parallel transverse coils 1110, the second coil layer 112 includes a plurality of parallel longitudinal coils 1120, and the transverse coils 1110 and the longitudinal coils 1120 are arranged perpendicular to each other.

[0037] In this embodiment, the stator assembly 110 is composed of a winding consisting of a first coil layer 111 and a second coil layer 112, wherein the first coil layer 111 includes at least two mutually parallel transverse coils 1110, each of which is arranged at an equal interval and electrically connected to each other, and each of which is insulated, and the second coil layer 112 includes at least two mutually parallel longitudinal coils 1120, each of which is arranged at an equal interval and electrically connected to each other, and each of which is insulated. The transverse coils 1110 and the longitudinal coils 1120 are perpendicular to each other, each of which extends transversely in the same plane to form the first coil layer 111, and each of which extends longitudinally in the same plane to form the second coil layer 112.

[0038] In this embodiment, the first coil layer 111 and the second coil layer 112 are stacked in the vertical direction, and the first coil layer 111 is located above the second coil layer 112. The first coil layer 111 corresponds to the transverse direction, and the second coil layer 112 corresponds to the longitudinal direction, that is, the transverse coil 1110 and the longitudinal coil 1120 are energized, which can respectively affect the movement of the magnet 211 in the transverse and longitudinal directions and the longitudinal direction. When the mounting base 210 needs to move transversely, the current of the first coil layer 111 is controlled, and when the mounting base 210 needs to move longitudinally, the current of the second coil layer 112 is controlled, thereby realizing any movement of the mounting base 210 on the operating platform 100.

[0039] For example, the magnetic levitation robot includes a control system, which is electrically connected to each coil. The control system individually controls the power gain and loss, current size and other parameters of each coil, thereby realizing the translation and rotation of the manipulator 200, and can also control the movement speed of the manipulator 200.

[0040] like Figure 3As shown, in another embodiment of the present invention, the stator assembly 110 is further provided with a reading head array 113, and the surface of the mounting seat 210 opposite to the stator assembly 110 is provided with a grating 212, and the reading head array 113 is arranged between the first coil layer 111 and the second coil layer 112, and the reading head array 113 is suitable for sensing the grating 212 to obtain the position of the mounting seat 210.

[0041] In this embodiment, the stator assembly 110 is composed of a first coil layer 111, a second coil layer 112 and a reading head array 113. The reading head array 113 is composed of a plurality of regularly arranged reading heads. The reading head array 113 is laid out to form a plane, which is parallel to the plane where the first coil layer 111 and the second coil layer 112 are located. In this embodiment, a reading head is arranged in a space enclosed by two adjacent transverse coils 1110 and two adjacent longitudinal coils 1120, and a reading head may also be arranged at the intersection of the transverse coil 1110 and the longitudinal coil 1120 at the edge position.

[0042] A reading head array 113 is arranged on the winding composed of the first coil layer 111 and the second coil layer 112, covering the entire movement area of ​​the mounting seat 210. A grating 212 is arranged on the mounting seat 210. During the movement of the mounting seat 210, the grating 212 can reach the reading head and be sensed by the reading head, thereby obtaining the actual movement position of the mounting seat 210. In this example, the grating 212 adopts a ring grating 212 scale, which can cover multiple reading heads at the same time. During the movement process, the data fed back by different reading heads can be compared and calculated to achieve precise control.

[0043] In addition, in other embodiments of the present invention, the operating platform 100 is provided with a plurality of stator assemblies 110, and the plurality of stator assemblies 110 are laid flat on the same plane, and two adjacent stator assemblies 110 are detachably connected. In this embodiment, the operating platform 100 is composed of a plurality of stator assemblies 110, and the number of stator assemblies 110 is selected based on the required area of ​​the operating platform 100. The stator assemblies 110 are detachably connected, and the laying plane is ensured to be the same plane.

[0044] Of course, based on the moving range of the manipulator 200, multiple stator assemblies 110 can be spliced ​​into different shapes and presented on the operating platform 100. For example, multiple stator assemblies 110 can be spliced ​​into polygons such as squares and rectangles or irregular shapes.

[0045] Two adjacent stator assemblies 110 may be connected by a detachable structure such as bolts or snaps.

[0046] Specifically, in an optional embodiment of the present invention, the sizes of the stator assemblies 110 are the same. The structures of the stator assemblies 110 are the same, and the stator assemblies 110 are rectangular with equal sizes, which is conducive to controlling the range of splicing.

[0047] Continuing to refer to the figure, in another optional embodiment of the present invention, the magnetic levitation robot also includes a plurality of manipulators 200, and the plurality of manipulators 200 cooperate with the stator assembly 110 to move on the operating platform 100, and the plurality of manipulators 200 work simultaneously. In this embodiment, a plurality of manipulators 200 can be placed on the operating platform 100 at the same time, such as the first manipulator, the second manipulator ... the Nth manipulator, and the plurality of manipulators 200 do not interfere with each other, and the control system uniformly adjusts the electrical parameters of the stator assembly 110, and each mounting seat 210 can move on the operating platform 100 at the same time, thereby realizing that the plurality of manipulators 200 work simultaneously without interference.

[0048] Among them, each robot hand 200 can be replaced with a different type of robot arm 220 to cooperate with actual work.

[0049] For example, each stator assembly 110 has the same structure, the first coil layer 111 includes a transverse coil 1110, and the second coil layer 112 includes a longitudinal coil 1120. Each mounting seat 210 has the same structure, and includes 9*9 magnets 211 arranged horizontally and vertically. The larger the area of ​​the magnet 211, the greater the thrust.

[0050] The present invention also provides a semiconductor production device, including the magnetic levitation robot of the above embodiment, and the magnetic levitation robot is used for transporting semiconductors.

[0051] In another embodiment of the present invention, the robot arm 220 includes a U-shaped clamp 230, and the U-shaped clamp 230 is used to clamp the wafer.

[0052] The magnetic levitation robot provided by the present invention is configured by arranging a stator assembly 110 on an operating platform 100 and a magnet 211 on a mounting seat 210 of a manipulator 200. After the stator assembly 110 is energized, it forms magnetic levitation with the operating platform 100, so that the manipulator 200 is magnetically suspended on the operating platform 100. By controlling the electrical parameters of the stator assembly 110, the translation and rotation of the manipulator 200 are controlled, thereby improving the freedom of movement of the manipulator 200, avoiding dust generation during the movement of the manipulator 200, and improving the cleanliness.

[0053] The magnetic levitation robot of the present invention has no limit on the number of mechanical arms 220, and can have multiple manipulators 200. And the mechanical arms 220 can be in the form of a cylindrical coordinate system or in the form of a horizontal multi-joint. The mechanical arms 220 on each manipulator 200 are independent of each other, and there is no mutual interference problem. The manipulator 200 and the mounting seat 210 are magnetically suspended, without contact and friction, and the cleanliness will be higher. The movement path of the manipulator 200 in magnetic suspension on the operating platform 100 is more arbitrary, and the path can be planned in real time according to demand to work or avoid.

[0054] Furthermore, in the semiconductor production equipment provided by the present invention, since it is equipped with the above-mentioned magnetic levitation robot, it also has the above-mentioned various advantages.

[0055] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A magnetic levitation robot, characterized in that: include: An operating platform, wherein the operating platform is provided with a stator assembly; A manipulator, the manipulator comprises a manipulator arm and a mounting seat, the manipulator arm is mounted on the mounting seat, and the mounting seat is provided with a magnet; the mounting seat moves on the operating platform through the cooperation between the magnet and the stator assembly.

2. The magnetic levitation robot according to claim 1, characterized in that: It also includes a lifting mechanism, on which the operating platform is mounted, for adjusting the height of the operating platform.

3. The magnetic levitation robot according to claim 1, characterized in that: The stator assembly includes a first coil layer and a second coil layer which are stacked, wherein the first coil layer includes a plurality of parallel transverse coils, and the second coil layer includes a plurality of parallel longitudinal coils, wherein the transverse coils and the longitudinal coils are arranged perpendicular to each other.

4. The magnetic levitation robot according to claim 3, characterized in that: The stator assembly is also provided with a reading head array, and the surface of the mounting seat opposite to the stator assembly is provided with a grating. The reading head array is arranged between the first coil layer and the second coil layer, and the reading head array is suitable for sensing the grating to obtain the position of the mounting seat.

5. The magnetic levitation robot according to claim 4, characterized in that: The operating platform is provided with a plurality of the stator assemblies, and the plurality of the stator assemblies are arranged flat on the same plane, and two adjacent stator assemblies are detachably connected.

6. The magnetic levitation robot according to claim 5, characterized in that: The stator assemblies have the same size.

7. The magnetic levitation robot according to any one of claims 1 to 5, characterized in that: The magnetic levitation robot comprises a plurality of manipulators, each of which cooperates with the stator assembly to move on the operating platform, and the plurality of manipulators work simultaneously.

8. The magnetic levitation robot according to any one of claims 1 to 5, characterized in that: The robotic arm is a polar coordinate robotic arm or a horizontal multi-joint robotic arm.

9. A semiconductor production equipment, characterized in that: The magnetic levitation robot comprises the magnetic levitation robot as described in any one of claims 1 to 8, wherein the magnetic levitation robot is used for transporting semiconductors.

10. The semiconductor production equipment according to claim 9, characterized in that The robot arm comprises a U-shaped clamping jaw, and the U-shaped clamping jaw is used for clamping a wafer.

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