Chip precision crimping hydraulic system for semiconductor industry

Abstract

The invention relates to the technical field of precision hydraulic systems, and particularly discloses a chip precision crimping hydraulic system for the semiconductor industry, which comprises an oil tank, a first pump body, a servo motor, a first pressure sensor, an oil path block, a servo proportional valve, an electromagnetic directional valve, a hydraulic cylinder and a second pressure sensor, an oil inlet of the servo proportional valve is connected with an oil outlet of the first pump body, an oil outlet of the servo proportional valve is connected with a port P of the electromagnetic directional valve, a port T of the electromagnetic directional valve is connected with the oil tank, and a port A and a port B of the electromagnetic directional valve are connected with the two ends of the hydraulic cylinder respectively; the first pressure sensor is connected to the oil outlet end of the first pump body, and the second pressure sensor is connected to the oil inlet end of the servo proportional valve. According to the application, the output oil pressure of the hydraulic system can be kept constant, so that the stress accuracy provided for the pressure head at the end part of each hydraulic cylinder reaches + / -0.5%, and the silver sintering quality is improved.

Description

Technical Field

[0001] The present application relates to the technical field of precision hydraulic systems, and in particular to a chip precision crimping hydraulic system for the semiconductor industry. Background Art

[0002] Nanosilver sintering is a low-temperature sintering technology developed in the late 1980s, that is, a method of interconnecting power semiconductor devices and substrates by applying pressure to nanosilver paste at a relatively low temperature. Nanosilver particles diffuse between solids under a certain temperature and pressure, and finally form a microscopic porous structure. Sintered silver is available in paste, dot coating, printing, and film forms. Different products and processes correspond to different sintered silver materials. Nanosilver sintering can obtain a sintered silver chip connection interface with high temperature resistance (>700°C) and high thermal conductivity (240 W / m·K) under low temperature (<300°C) conditions. It is one of the most suitable interface connection technologies for wide bandgap semiconductor module packaging, a key technology in silicon carbide module packaging, and the most widely used technology at present.

[0003] Among them, pressure is the core factor affecting the quality of silver sintering. The pressure directly affects the void ratio, thermal conductivity, push-pull force and thickness of the silver layer after sintering. Therefore, how to provide accurate and stable sintering pressure is the key to ensure product quality.

[0004] There are three main types of pressure heads for existing nanosilver sintering equipment: 1. Integral pressure head, which is to press down with a whole plate, pressing dozens of chips at the same time; due to the influence of the flatness of the mold plate and the product fixture and the thickness tolerance of the chip itself, using a whole steel plate to squeeze at the same time will cause some chips to be subjected to greater force, some chips to be subjected to less force, and the force of each chip is uneven; those subjected to greater force may crack or even break, and those subjected to less force will have insufficient sintering strength. 2. Integral pressure head + soft die head, that is, adding a layer of soft rubber die head to the lower part of the integral pressure head. This structure can slightly reduce the impact of the small force on some chips. However, the following problems still exist: the rubber die head is not durable, easy to damage, and the force on the surfaces of different chips is still uneven. 3. Pneumatic multi-pressure head technology, that is, the customized high-pressure cylinder is driven by high-pressure gas. The pressure head is set at the end of the high-pressure cylinder. A single chip corresponds to a single pressure head, and the actual pressure is changed by changing the gas pressure. The advantages of this solution are: it can ensure the force on each chip; the disadvantages of this solution are: gas is easily compressed, and the air pressure is difficult to control accurately under high pressure conditions (above 10MPA); the input gas source is the factory gas source, and the overall air pressure fluctuation of the factory gas source will affect the output gas source, and then affect the pressure head pressure.

[0005] Therefore, a precision crimping hydraulic system that can accurately control the pressure of the crimping head is required to ensure the sintering effect of each chip. Summary of the invention

[0006] In order to make the pressure control of each pressing head more precise, the present application provides a chip precision crimping hydraulic system for the semiconductor industry.

[0007] The present application provides a chip precision crimping hydraulic system for the semiconductor industry using the following technical solutions: A chip precision crimping hydraulic system for the semiconductor industry, comprising: an oil tank, a first pump body, a servo motor, a first pressure sensor, an oil circuit block, a servo proportional valve, an electromagnetic reversing valve, a hydraulic cylinder and a second pressure sensor, wherein the servo motor is connected to the first pump body, the oil inlet of the first pump body is connected to the oil tank, a plurality of oil circuit blocks are provided, each of which is provided with a servo proportional valve and an electromagnetic reversing valve, the oil inlet of the servo proportional valve is connected to the oil outlet of the first pump body, the oil outlet of the servo proportional valve is connected to the P port of the electromagnetic reversing valve, the T port of the electromagnetic reversing valve is connected to the oil tank, and the A port and the B port of the electromagnetic reversing valve are respectively connected to the two ends of the hydraulic cylinder; The first pressure sensor is connected to the oil outlet end of the first pump body, and the first pressure sensor is electrically connected to the servo motor; a second pressure sensor is arranged on each of the oil circuit blocks, and the second pressure sensor is connected to the oil inlet end of the servo proportional valve, and the second pressure sensor is electrically connected to the servo proportional valve.

[0008] By adopting the above technical solution, the first pressure sensor can detect the oil pressure at the oil outlet end of the first pump body, and then the first pump body can be adjusted by adjusting the servo motor according to the detection result, so that the oil pressure at the oil outlet end of the first pump body is maintained at a constant value, the second pressure sensor can detect the oil pressure at the oil inlet end of the servo proportional valve, and then the servo proportional valve can adjust the oil pressure to the required size according to the detection result, thereby keeping the output oil pressure of the hydraulic system constant, and can improve the force accuracy of the pressure head at the end of the hydraulic cylinder, the accuracy can reach ±0.5%, which helps to ensure the quality of silver sintering.

[0009] Optionally, the hydraulic cylinder is provided with multiple ones, a mounting block is provided on one side of the oil circuit block, a first oil chamber and a second oil chamber are provided in the mounting block, a plurality of first oil holes connected with the first oil chamber and a plurality of second oil holes connected with the second oil chamber are opened on the mounting block, the first oil chamber is connected to the A port of the electromagnetic reversing valve, the second oil chamber is connected to the B port of the electromagnetic reversing valve, and the two ends of the hydraulic cylinder are respectively connected to the first oil hole and the second oil hole.

[0010] By adopting the above technical solution, one oil circuit block can control multiple hydraulic cylinders at the same time, so that multiple chips can be pressurized at the same time, thereby sintering multiple chips at the same time, which helps to improve the working efficiency of the silver sintering process.

[0011] Optionally, the oil outlet end of the first pump body is connected to a high-pressure filter.

[0012] By adopting the above technical solution, impurities in the oil can be filtered out, system components can be protected, and stable operation of the hydraulic system can be ensured.

[0013] Optionally, an accumulator is provided on the oil circuit block, and the accumulator is connected to the oil inlet end of the servo proportional valve.

[0014] By adopting the above technical solution, the accumulator can play a role in stabilizing pressure, balancing the pressure fluctuation and pulsation of the hydraulic system, and ensuring that the system can operate stably within the set pressure range.

[0015] Optionally, a cooling motor and a second pump body are provided on the oil tank, the cooling motor and the second pump body are connected, the oil inlet and oil outlet of the second pump body are connected to the oil tank, and a cooler for cooling the oil is provided on the pipeline between the oil outlet of the second pump body and the oil tank.

[0016] By adopting the above technical solution, the second pump body can make the oil in the oil tank circulate, and the cooler can cool the oil, thereby avoiding the oil temperature in the oil tank from being too high, and ensuring the use effect of the oil.

[0017] Optionally, the outer sides of the servo motor and the cooling motor are both covered with sound insulation covers.

[0018] By adopting the above technical solution, the noise during the operation of the servo motor and the cooling motor can be reduced, and the working environment can be improved.

[0019] Optionally, the oil outlet of the second pump body is connected to an oil inlet pipe, and the oil tank is connected to an oil return pipe. Both the oil inlet pipe and the oil return pipe pass through a cooler. A cooling pipe for heat exchange is arranged inside the sound insulation cover, and both ends of the cooling pipe are respectively connected to one end of the oil inlet pipe passing through the cooler and one end of the oil return pipe passing through the cooler.

[0020] By adopting the above technical scheme, the cooler can cool the oil in the oil inlet pipe and the oil return pipe, so that the oil in the oil tank can first be cooled through the oil inlet pipe and then flow into the cooling pipe inside the sound insulation cover. The oil in the cooling pipe exchanges heat with the hot air in the sound insulation cover to take away part of the heat, thereby accelerating the heat dissipation of the servo motor and the cooling motor; the oil after heat exchange flows into the oil return pipe for another cooling treatment to cool the oil after heat exchange, and then the oil flows into the oil tank again to complete the cooling of the oil in the oil tank; the setting of the cooling pipe can accelerate the heat dissipation of the servo motor and the cooling motor, thereby reducing the influence of the setting of the sound insulation cover on the heat dissipation effect of the servo motor and the cooling motor; since the heat dissipation of the servo motor and the cooling motor is achieved by circulating oil, there is no need to dissipate heat through other coolants, which is more convenient.

[0021] Optionally, the cooling tube is a copper tube.

[0022] By adopting the above technical solution, the copper tube has strong thermal conductivity, which can enhance the heat exchange effect between the oil in the cooling tube and the hot air inside the sound insulation cover, thereby enhancing the heat dissipation capacity.

[0023] Optionally, the cooling pipe is arranged in a spiral shape.

[0024] By adopting the above technical solution, the flow path of the oil in the cooling pipe can be extended, the heat exchange time can be extended, and the oil in the cooling pipe can be in more complete contact with the hot air in the sound insulation cover, thereby enhancing the heat exchange effect.

[0025] Optionally, the cooling pipe is provided with multiple sections, and a first collecting pipe and a second collecting pipe are provided in the soundproof cover, and the two ends of the cooling pipe are respectively connected to the first collecting pipe and the second collecting pipe, the first collecting pipe is connected to one end of the oil inlet pipe passing through the cooler, and the second collecting pipe is connected to one end of the oil return pipe passing through the cooler.

[0026] By adopting the above technical solution, while ensuring the circulation of oil, the length of the cooling pipe can be shortened, thereby avoiding the cooling pipe being too long which would cause the heat exchange effect at the end of the cooling pipe to be seriously weakened, which helps to ensure the heat exchange effect of the cooling pipe, thereby enhancing the heat dissipation capacity of the servo motor and the cooling motor.

[0027] In summary, this application includes the following beneficial technical effects: 1. The first pressure sensor can detect the oil pressure at the starting end of the hydraulic system, and adjust the oil pressure by controlling the first pump body through the servo motor, so as to maintain the oil pressure at the starting end of the hydraulic system at a constant value; the second pressure sensor can detect the oil pressure at the end of the hydraulic system, and adjust the oil pressure by the servo proportional valve, so as to adjust the oil pressure at the end of the hydraulic system to the required value; therefore, with the cooperation of the first pressure sensor and the second pressure sensor, the oil pressure output by the hydraulic system can be kept constant, thereby ensuring that the force accuracy of the pressure head provided to the end of each hydraulic cylinder reaches ±0.5%, which helps to ensure the quality of silver sintering.

[0028] 2. The setting of the soundproof cover can reduce the noise generated by the servo motor and cooling motor during operation, which helps to improve the working environment.

[0029] 3. The oil in the oil tank can not only circulate and cool down to ensure the working effect of the oil; the cooled oil can also flow into the cooling pipe to exchange heat with the hot air in the sound insulation cover, thereby accelerating the heat dissipation of the servo motor and the cooling motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 It is the hydraulic principle diagram of Example 1 of the present application; Figure 2 It is a schematic diagram of the overall structure of Example 1 of the present application; Figure 3 It is a structural schematic diagram of one viewing angle of Example 1 of the present application; Figure 4 is a structural schematic diagram of another viewing angle of Example 1 of the present application; Figure 5 is a cross-sectional view of the cooler in Example 1 of the present application; Figure 6 is a schematic diagram of the structure of Example 2 of the present application; Figure 7 This is a schematic diagram of the structure of Example 2 of the present application without the box body; Figure 8 This is a schematic diagram of the structure of Example 2 of the present application after the box body and one of the sound insulation covers are hidden.

[0031] Figure numerals: 1. oil tank; 2. first pump body; 3. servo motor; 4. first pressure sensor; 5. oil circuit block; 6. servo proportional valve; 7. solenoid reversing valve; 8. hydraulic cylinder; 9. second pressure sensor; 10. high-pressure filter; 11. accumulator; 12. cooling motor; 13. second pump body; 14. cooler; 141. box; 142. heat pipe; 143. heat sink; 144. fan; 15. return oil filter; 16. pressure gauge; 17. oil gauge; 18. soundproof cover; 19. oil inlet pipe; 20. oil return pipe; 21. cooling pipe; 22. first collecting pipe; 23. second collecting pipe. DETAILED DESCRIPTION

[0032] The following combination Figure 1-Figure 8 This application is described in further detail.

[0033] Embodiment 1, The present application embodiment discloses a chip precision crimping hydraulic system for the semiconductor industry. Figure 1 The chip precision crimping hydraulic system for the semiconductor industry includes an oil tank 1, a first pump body 2, a servo motor 3, a first pressure sensor 4, an oil circuit block 5, a servo proportional valve 6, an electromagnetic reversing valve 7, a hydraulic cylinder 8 and a second pressure sensor 9. An oil gauge 17 is provided on the oil tank 1 to display the amount of oil in the oil tank 1. The first pump body 2 is a gear pump, and in other embodiments, it can also be a plunger pump or a vane pump. The first pump body 2 and the servo motor 3 are both fixedly connected to the top wall of the oil tank 1, and the servo motor 3 and the first pump body 2 are connected by a coupling, so that the servo motor 3 can drive the first pump body 2 to operate. The oil inlet of the first pump body 2 is connected to the oil tank 1, so that the first pump body 2 can pump the oil in the oil tank 1.

[0034] Reference Figure 2 and Figure 3 The first pressure sensor 4 is fixedly connected to the oil outlet of the first pump body 2, and the first pressure sensor 4 is electrically connected to the servo motor 3. The first pressure sensor 4 can detect the oil pressure at the oil outlet of the first pump body 2, thereby controlling the output of the first pump body 2 by controlling the servo motor 3, and ensuring that the oil pressure at the oil outlet of the first pump body 2 is stable at 30MPa.

[0035] Furthermore, a high-pressure filter 10 is fixedly connected to the oil outlet end of the first pump body 2, so that impurities in the oil can be filtered out, thereby ensuring the stable operation of the hydraulic system.

[0036] Reference Figure 1 and Figure 4, multiple oil circuit blocks 5 are provided, and all are fixedly connected to the top wall of the oil tank 1. A servo proportional valve 6 and an electromagnetic reversing valve 7 are fixedly connected to each oil circuit block 5. The servo proportional valve 6 is used to adjust the oil pressure. The oil inlet of the servo proportional valve 6 is connected to the oil outlet of the first pump body 2, the oil outlet of the servo proportional valve 6 is connected to the P port (oil inlet) of the electromagnetic reversing valve 7, and the T port (oil return port) of the electromagnetic reversing valve 7 is connected to the oil tank 1. The A port of the electromagnetic reversing valve 7 is connected to the inside of one end of the cylinder body of the hydraulic cylinder 8, and the B port of the electromagnetic reversing valve 7 is connected to the other end of the hydraulic cylinder 8. Therefore, the oil in the oil tank 1 can be sent to the oil circuit block 5 by the first pump body 2 after being filtered by the high-pressure filter 10, and then flow into the hydraulic cylinder 8 after passing through the servo proportional valve 6 and the electromagnetic reversing valve 7. Since the pressure in the chambers at both ends of the hydraulic cylinder 8 is different, the piston rod of the hydraulic cylinder 8 can be driven to move; the pressure head at the end of the piston rod presses against the chip, applying the required pressure to the chip, thereby ensuring the sintering pressure of the chip and enhancing the sintering effect.

[0037] There are multiple second pressure sensors 9, and the number is the same as the number of oil circuit blocks 5. Each second pressure sensor 9 is fixedly connected to the corresponding oil circuit block 5, and the second pressure sensor 9 is connected to the oil inlet end of the servo proportional valve 6. The second pressure sensor 9 is electrically connected to the servo proportional valve 6, so the oil pressure at the inlet of the servo proportional valve 6 is detected by the second pressure sensor 9, and then the oil pressure is adjusted to the required size by the servo proportional valve 6, which can better ensure the stability of the oil pressure at the output end of the hydraulic system, thereby ensuring that the force accuracy provided to each pressure head reaches ±0.5%.

[0038] Furthermore, an accumulator 11 is fixedly connected to the oil circuit block 5, and the accumulator 11 is connected to the oil inlet end of the servo proportional valve 6. The accumulator 11 can balance the pressure fluctuation and pulsation of the hydraulic system to ensure that the system can operate stably within the set pressure range.

[0039] The oil inlet end of the servo proportional valve 6 is also connected to a pressure gauge 16 for displaying the oil circuit pressure.

[0040] Since there are usually multiple chips connected to the substrate, in order to be able to press multiple chips at the same time and sinter them, thereby improving work efficiency, multiple hydraulic cylinders 8 are provided in this embodiment. Multiple hydraulic cylinders 8 are divided into two groups, corresponding to two oil circuit blocks 5 respectively. A mounting block is fixedly connected to one side of the oil circuit block 5, and the interior of the mounting block is provided with a first oil chamber and a second oil chamber arranged at intervals. The first oil chamber is connected to the A port of the electromagnetic reversing valve 7, and the second oil chamber is connected to the B port of the electromagnetic reversing valve 7. The mounting block is provided with multiple first oil holes connected to the first oil chamber, and the mounting block is also provided with multiple second oil holes connected to the second oil chamber, and the number of the first oil holes and the second oil holes is the same; each first oil hole corresponds to a hydraulic cylinder 8, and each second oil hole corresponds to a hydraulic cylinder 8; the first oil hole and the second oil hole are respectively connected to the chambers inside the two ends of the hydraulic cylinder 8. Therefore, one oil circuit block 5 in the hydraulic system can make multiple hydraulic cylinders 8 act synchronously, and the pressure applied by the pressure head at the end of each hydraulic cylinder 8 is the same, so that pressure is applied to multiple chips at the same time, which helps to improve the work efficiency of the silver sintering process.

[0041] In order to cool down the oil in the hydraulic system, a cooling motor 12 and a second pump body 13 are fixedly connected to the oil tank 1, and the cooling motor 12 and the second pump body 13 are connected by a coupling. The second pump body 13 is a gear pump, and in other embodiments, it can also be a plunger pump or a vane pump. The oil inlet and the oil outlet of the second pump body 13 are both connected to the oil tank 1, so the cooling motor 12 drives the second pump body 13 to operate, which can make the oil in the oil tank 1 circulate. A cooler 14 and a return oil filter 15 are provided on the pipeline between the oil outlet of the second pump body 13 and the oil tank 1. The cooler 14 is used to cool down the circulating oil, and the return oil filter 15 is used to filter out impurities in the oil.

[0042] Reference Figure 5 The cooler 14 includes a housing 141, a heat dissipation pipe 142, a heat sink 143 and a fan 144. The housing 141 is fixedly arranged on one side of the oil tank 1. The heat dissipation pipe 142 is arranged in the housing 141, and the heat dissipation pipe 142 is connected to the pipeline between the second pump body 13 and the oil tank 1. The heat sink 143 is arranged in the housing 141, and the heat sink 143 is fixedly connected to the outside of the heat dissipation pipe 142 to increase the heat exchange area. The fan 144 is fixedly connected to the housing 141, and the air outlet of the fan 144 faces the heat sink 143 and the heat dissipation pipe 142. Therefore, the second pump body 13 can deliver the oil in the oil tank 1 into the heat dissipation pipe 142, and the fan 144 in the box body 141 blows air to the heat dissipation pipe 142 to accelerate the heat exchange between the heat dissipation pipe 142 and the air, thereby accelerating the heat dissipation of the oil in the heat dissipation pipe 142; then the oil after the heat dissipation flows into the oil tank 1 again, thereby realizing the circulation of the oil and cooling the oil in the oil tank 1 to avoid the oil temperature being too high.

[0043] The implementation principle of Example 1 is as follows: the oil in the oil tank 1 is drawn out by the first pump body 2, filtered by the high-pressure filter 10, and flows into the first pressure sensor 4. Under the detection of the first pressure sensor 4, the first pump body 2 can be adjusted by adjusting the servo motor 3, so that the pressure at the oil outlet of the first pump body 2 is constant at 30MPa. Then the filtered oil flows into the accumulator 11, and flows into the servo proportional valve 6 after the pressure stabilization treatment of the accumulator 11. Under the detection of the second pressure sensor 9, the servo proportional valve 6 adjusts the pressure of the oil to the required size. Then the oil flows into the electromagnetic reversing valve 7, and then flows into one end of the hydraulic cylinder 8 through the first oil chamber and the first oil hole in the mounting block, and the oil at the other end of the hydraulic cylinder 8 flows back to the oil tank 1 through the second oil hole, the second oil chamber and the T port of the electromagnetic reversing valve 7, thereby applying a constant pressure to the piston in the hydraulic cylinder 8, so that the pressure head at the end of the hydraulic cylinder 8 applies a constant pressure to the chip, ensuring the sintering pressure of silver sintering, thereby ensuring the sintering effect.

[0044] Embodiment 2, Reference Figure 6 The difference between this embodiment and embodiment 1 is that the outer sides of the servo motor 3 and the cooling motor 12 in this embodiment are fixedly connected with a sound insulation cover 18, so that the servo motor 3 and the cooling motor 12 in the working state can be subjected to noise reduction treatment, thereby reducing the noise in the working environment.

[0045] Reference Figure 7 and Figure 8 Since a soundproof cover 18 is provided on the outside of the motor, the soundproof cover 18 seals the outside of the motor, which will affect the heat dissipation of the motor. In order to reduce the influence of the soundproof cover 18 on the heat dissipation effect of the motor, an oil inlet pipe 19, an oil return pipe 20 and a cooling pipe 21 are provided in this embodiment. The cooler 14 in this embodiment includes a box body 141, a heat sink 143 and a fan 144. The oil inlet pipe 19 and the oil return pipe 20 are both passed through the box body 141; the heat sink 143 is provided in the box body 141 and fixedly connected to the outside of the oil inlet pipe 19 and the oil return pipe 20; the air outlet of the fan 144 faces the heat sink 143, so that the oil inlet pipe 19 and the oil return pipe 20 located in the box body 141 can be cooled.

[0046] The inner sides of the two soundproof covers 18 are fixedly connected with cooling pipes 21, which are copper pipes. Oil can circulate in the cooling pipes 21, thereby taking away the heat in the hot air in the soundproof cover 18 and enhancing the heat dissipation of the servo motor 3 and the cooling motor 12. The oil inlet pipe 19 is passed through the box body 141, one end of the oil inlet pipe 19 is connected to the oil outlet of the second pump body 13, and the other end of the oil inlet pipe 19 is connected to the ends of the two cooling pipes 21 at the same time; the end of the cooling pipe 21 away from the oil inlet pipe 19 is connected to the return oil pipe 20, and the return oil pipe 20 is connected to the oil tank 1 after passing through the box body 141. Therefore, the second pump body 13 can deliver the oil in the oil tank 1 into the oil inlet pipe 19. The oil in the oil inlet pipe 19 is cooled and dissipated in the box body 141. The cooled oil flows into the cooling pipe 21 inside the sound insulation cover 18. The oil in the cooling pipe 21 exchanges heat with the hot air inside the sound insulation cover 18, so that part of the heat is taken away by the oil; then the oil in the cooling pipe 21 after heat exchange flows into the return oil pipe 20 for further cooling and dissipation. The cooled oil flows into the oil tank 1, thereby ensuring the heat dissipation of the oil in the oil tank 1 and accelerating the heat dissipation of the servo motor 3 and the cooling motor 12 inside the sound insulation cover 18.

[0047] The cooling pipe 21 is arranged in a spiral shape, so that the flow path of the oil can be extended, so that the oil can more fully exchange heat with the hot air in the sound insulation cover 18, which helps to enhance the heat exchange effect.

[0048] Furthermore, the cooling pipe 21 in each soundproof cover 18 is provided with multiple sections. The first collecting pipe 22 and the second collecting pipe 23 are also fixedly connected in the soundproof cover 18. The first collecting pipe 22 and the second collecting pipe 23 are respectively located on both sides, and the first collecting pipe 22 and the second collecting pipe 23 are both arranged vertically. One end of the cooling pipe 21 is connected to the first collecting pipe 22, and the end of the first collecting pipe 22 away from the cooling pipe 21 is connected to the end of the oil inlet pipe 19 passing through the box 141; the other end of the cooling pipe 21 is connected to the second collecting pipe 23, and the end of the second collecting pipe 23 away from the cooling pipe 21 is connected to the end of the return oil pipe 20 passing through the box 141. Therefore, the oil in the oil inlet pipe 19 can flow into the cooling pipe 21 through the first collecting pipe 22, and after the oil is heat exchanged in the cooling pipe 21, it flows into the return oil pipe 20 through the second collecting pipe 23, thereby realizing the circulation of the oil. Since the cooling pipe 21 is provided with multiple sections, the flow path of the oil in each cooling pipe 21 can be shortened, thereby preventing the flow path from being too long and causing the heat exchange effect to be weakened.

[0049] The implementation principle of Example 2 is as follows: the second pump body 13 extracts the oil in the oil tank 1, and then transports the oil to the oil inlet pipe 19. The oil in the oil inlet pipe 19 can be cooled in the box 141; the oil after cooling flows into the cooling pipe 21 through the first manifold 22, and the oil in the cooling pipe 21 exchanges heat with the hot air in the soundproof cover 18, thereby taking away part of the heat inside the soundproof cover 18 and accelerating the heat dissipation of the servo motor 3 and the cooling motor 12. The oil after heat exchange flows into the return oil pipe 20 through the second manifold 23, and the oil in the return oil pipe 20 is cooled again in the box 141. The cooled oil flows into the oil tank 1 again, thereby realizing the circulation of the oil in the oil tank 1 and dissipating the heat of the oil in the oil tank 1.

[0050] The above are optional embodiments of the present application, and are not intended to limit the protection scope of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the protection scope of the present application.

Claims

1. A chip precision crimping hydraulic system for the semiconductor industry, characterized in that: include: An oil tank (1), a first pump body (2), a servo motor (3), a first pressure sensor (4), an oil circuit block (5), a servo proportional valve (6), an electromagnetic reversing valve (7), a hydraulic cylinder (8) and a second pressure sensor (9), wherein the servo motor (3) is connected to the first pump body (2), an oil inlet of the first pump body (2) is connected to the oil tank (1), a plurality of oil circuit blocks (5) are provided, each of the oil circuit blocks (5) is provided with a servo proportional valve (6) and an electromagnetic reversing valve (7), an oil inlet of the servo proportional valve (6) is connected to an oil outlet of the first pump body (2), an oil outlet of the servo proportional valve (6) is connected to a P port of the electromagnetic reversing valve (7), a T port of the electromagnetic reversing valve (7) is connected to the oil tank (1), and an A port and a B port of the electromagnetic reversing valve (7) are respectively connected to two ends of the hydraulic cylinder (8); The first pressure sensor (4) is connected to the oil outlet end of the first pump body (2), and the first pressure sensor (4) is electrically connected to the servo motor (3); each of the oil circuit blocks (5) is provided with a second pressure sensor (9), and the second pressure sensor (9) is connected to the oil inlet end of the servo proportional valve (6), and the second pressure sensor (9) is electrically connected to the servo proportional valve (6).

2. According to claim 1, a chip precision crimping hydraulic system for the semiconductor industry is characterized by: The hydraulic cylinder (8) is provided in plurality, a mounting block is provided on one side of the oil circuit block (5), a first oil chamber and a second oil chamber are provided in the mounting block, a plurality of first oil holes connected to the first oil chamber and a plurality of second oil holes connected to the second oil chamber are provided on the mounting block, the first oil chamber is connected to the A port of the electromagnetic reversing valve (7), the second oil chamber is connected to the B port of the electromagnetic reversing valve (7), and both ends of the hydraulic cylinder (8) are connected to the first oil hole and the second oil hole respectively.

3. According to claim 1, a chip precision crimping hydraulic system for the semiconductor industry is characterized by: The oil outlet end of the first pump body (2) is connected to a high-pressure filter (10).

4. According to claim 1, a chip precision crimping hydraulic system for the semiconductor industry is characterized by: An accumulator (11) is provided on the oil circuit block (5), and the accumulator (11) is connected to the oil inlet end of the servo proportional valve (6).

5. According to claim 1, a chip precision crimping hydraulic system for the semiconductor industry is characterized by: The oil tank (1) is provided with a cooling motor (12) and a second pump body (13), the cooling motor (12) and the second pump body (13) are connected, the oil inlet and the oil outlet of the second pump body (13) are both connected to the oil tank (1), and a cooler (14) for cooling the oil is provided on the pipeline between the oil outlet of the second pump body (13) and the oil tank (1).

6. A chip precision crimping hydraulic system for the semiconductor industry according to claim 5, characterized in that: The outer sides of the servo motor (3) and the cooling motor (12) are both provided with sound insulation covers (18).

7. A chip precision crimping hydraulic system for the semiconductor industry according to claim 6, characterized in that: The oil outlet of the second pump body (13) is connected to an oil inlet pipe (19), and the oil tank (1) is connected to an oil return pipe (20). Both the oil inlet pipe (19) and the oil return pipe (20) pass through the cooler (14). A cooling pipe (21) for heat exchange is arranged inside the soundproof cover (18), and two ends of the cooling pipe (21) are respectively connected to one end of the oil inlet pipe (19) passing through the cooler (14) and one end of the oil return pipe (20) passing through the cooler (14).

8. The chip precision crimping hydraulic system for the semiconductor industry according to claim 7, characterized in that: The cooling tube (21) is a copper tube.

9. The chip precision crimping hydraulic system for the semiconductor industry according to claim 7, characterized in that: The cooling pipe (21) is arranged in a spiral shape.

10. A chip precision crimping hydraulic system for the semiconductor industry according to claim 9, characterized in that: The cooling pipe (21) is provided with multiple sections. A first collecting pipe (22) and a second collecting pipe (23) are provided in the soundproof cover (18). Both ends of the cooling pipe (21) are respectively connected to the first collecting pipe (22) and the second collecting pipe (23). The first collecting pipe (22) is connected to one end of the oil inlet pipe (19) passing through the cooler (14), and the second collecting pipe (23) is connected to one end of the oil return pipe (20) passing through the cooler (14).

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