Detection device and defect detection equipment

Abstract

The invention relates to a detection device and defect detection equipment, the detection device comprises a support, a light source assembly and a shooting module, the light source assembly comprises a first light source and a second light source, and the first light source and the second light source are arranged on the support in a staggered manner; the shooting module is movably arranged on the support so as to move to the position aligned with the first light source and the position aligned with the second light source. In the detection device, the first light source and the second light source respectively provide illumination for the shooting module, so that the shooting module can obtain different shooting effects, and possible defects of the workpiece can be fully detected. Moreover, the shooting module can move to the position aligned with the first light source and the shooting module can move to the position aligned with the second light source, so that two shooting modules do not need to be arranged to correspond to different light sources respectively, the structure of the detection device is simplified, and the cost of the detection device is reduced. The detection equipment comprises the detection device, and is simple in structure and low in cost.

Description

Technical Field

[0001] The present application relates to the technical field of defect detection, and in particular to a detection device and defect detection equipment. Background Art

[0002] In the processing and production process, semi-finished products and finished products are usually inspected for defects before they are assembled or before they are shipped to screen out defective products. Currently, visual inspection is mainly performed by using visual detectors such as cameras in combination with light sources. However, for visual inspection, different types of light sources have different lighting effects, and a single light source is difficult to meet the inspection requirements, which needs to be improved urgently. Summary of the invention

[0003] Based on this, it is necessary to provide a detection device and defect detection equipment to address the problem that a single light source is difficult to meet the detection requirements when using vision for defect detection.

[0004] On one hand, the present application provides a detection device, which includes a bracket, a light source assembly and a shooting module. The light source assembly includes a first light source and a second light source, and the first light source and the second light source are staggered and arranged on the bracket; the shooting module is movably provided on the bracket to move to a position corresponding to the first light source and a position corresponding to the second light source.

[0005] In one embodiment, the first light source and the second light source are arranged sequentially in a first direction, and the shooting module is movably disposed on the bracket along the first direction; the light source assembly also includes a third light source, the first light source is provided with a hollow light-transmitting area, and the third light source is movably disposed on the bracket along the first direction to move to a position aligned with and staggered with the hollow light-transmitting area.

[0006] In one embodiment, the first light source includes a plurality of lighting components, which are evenly spaced in a circumferential direction around a reference axis and together form the hollow light-transmitting area; when the shooting module is aligned with the first light source, the optical axis of the shooting module coincides with the reference axis.

[0007] In one embodiment, the lighting component is rotatably disposed on the bracket to adjust the light output angle.

[0008] In one embodiment, the optical axis of the camera module extends along a second direction, the second direction intersects the first direction, and the first light source, the second light source, and the third light source are disposed at different positions along the second direction.

[0009] In one embodiment, the bracket includes a connecting plate and a support member, a plurality of the support members are arranged on the connecting plate at intervals along the second direction, and each of the support members extends along the first direction; the shooting module, the first light source and the third light source are respectively arranged on different support members, and the second light source is arranged on the connecting plate.

[0010] In one of the embodiments, the first light source is configured as a combined bar light source; and / or the second light source is configured as a coaxial light source; and / or the third light source is configured as a stripe light source.

[0011] In one embodiment, the first light source, the second light source and the third light source are configured as light sources of different types.

[0012] In one of the embodiments, the shooting module and the light source assembly corresponding to the shooting module for providing lighting are recorded as a shooting module, and a plurality of the shooting modules are arranged on the bracket at intervals.

[0013] In one embodiment, the bracket includes a carrying plate and a gantry, the light source assembly and the shooting module are both arranged on the carrying plate, the gantry is provided with a receiving groove, the gantry is also provided with a first slide rail, the number of the first slide rails is at least two and they are respectively arranged on both sides of the receiving groove, the carrying plate slides in cooperation with the first slide rail; the detection device also includes a first driving unit, the first driving unit is at least partially arranged in the receiving groove and connected to the carrying plate to drive the carrying plate to slide.

[0014] On the other hand, the present application further provides a defect detection device, which includes a transfer device and the detection device as described above, wherein the transfer device is used to carry a workpiece and move the workpiece into a detection range of the detection device.

[0015] In the above detection device, the first light source and the second light source respectively provide illumination for the shooting module, so that the shooting module can obtain different shooting effects, so as to fully detect the possible defects of the workpiece. In addition, the shooting module can move to a position aligned with the first light source and the shooting module can move to a position aligned with the second light source, so there is no need to set two shooting modules corresponding to different light sources, which simplifies the structure of the detection device and reduces the cost of the detection device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] FIG. 1 is an axial schematic diagram of a detection device provided in one embodiment of the present application.

[0017] FIG. 2 is an axial schematic diagram of a bracket, a light source assembly and a camera module in the detection device shown in FIG. 1 .

[0018] FIG. 3 is a side view of the camera module and the first light source in the detection device shown in FIG. 2 when aligned.

[0019] FIG. 4 is a side view of the camera module and the second light source in the detection device shown in FIG. 2 when aligned.

[0020] FIG. 5 is an axial schematic diagram of the first light source in the detection device shown in FIG. 2 .

[0021] 6 is a side view of the detection device shown in FIG. 2 when the shooting module is aligned with the first light source and the third light source is aligned with the hollow light-transmitting area.

[0022] FIG. 7 is a side view of the lighting component of the first light source shown in FIG. 5 after adjusting the lighting angle.

[0023] FIG. 8 is an axial schematic diagram of the bracket in the detection device shown in FIG. 2 .

[0024] FIG. 9 is a side view of the bracket shown in FIG. 8 .

[0025] FIG. 10 is a side view of the detection device shown in FIG. 1 .

[0026] FIG. 11 is a front view of the bracket and the first driving unit in the detection device shown in FIG. 1 .

[0027] FIG. 12 is a front view of the bracket, the first driving unit and the second driving unit in the detection device shown in FIG. 1 .

[0028] FIG. 13 is a schematic diagram of the axial side of the bracket and each driving unit in the detection device shown in FIG. 2 .

[0029] FIG. 14 is an axial schematic diagram of the connecting plate and the purge member in the detection device shown in FIG. 2 .

[0030] FIG. 15 is an axial schematic diagram of a defect detection device provided in one embodiment of the present application.

[0031] FIG. 16 is an axial schematic diagram of the transfer device in the defect detection equipment shown in FIG. 15 .

[0032] FIG. 17 is an axial schematic diagram of the transfer member in the transfer device shown in FIG. 16 .

[0033] 1. Defect detection device; 10. Detection device; 11. Camera module; 100. Bracket; 110. Connecting plate; 120. Support member; 121. First support member; 121a. Second slide rail; 122. Second support member; 123. Third support member; 123a. Third slide rail; 124. Fourth support member; 124a. Vertical plate; 125. Fifth support member; 130. Carrying plate; 140. Gantry; 141. First slide rail; 142. Receiving groove; 150. First support plate; 160. Second support plate; 170. Mounting frame; 200. Light source assembly; 210. First light source; 211. Hollow light-transmitting area; 212. Illuminating member; 220. Second light source; 230. Third light source; 300. Camera module; 410. First drive unit element; 411, first driver; 412, first screw rod; 413, first connecting seat; 420, second driver unit; 421, second driver; 422, second screw rod; 423, second connecting seat; 430, third driver unit; 431, third driver; 432, third screw rod; 433, third connecting seat; 434, transmission belt; 440, fourth driver unit; 441, cylinder body; 442, slider; 500, purge member; 510, purge hole; 20, transfer device; 21, drive platform; 22, transfer member; 22a, frame; 22b, connecting beam; 22c, fixture; 30, base; O, reference axis; O1, first axis; O2, second axis; L1, optical axis; S1, first direction; S2, second direction; S3, third direction. DETAILED DESCRIPTION

[0034] In order to make the above-mentioned purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present application, so the present application is not limited by the specific embodiments disclosed below.

[0035] In the description of the present application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is based on the orientation or position relationship shown in the accompanying drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0036] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the features. In the description of this application, if the term "plurality" appears, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0037] In this application, unless otherwise clearly specified and limited, if the terms "installed", "connected", "connected", "fixed" and the like appear, these terms should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integrated connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to the specific circumstances.

[0038] In the present application, unless otherwise clearly specified and limited, if there is a description that a first feature is "above" or "below" a second feature, etc., or similar descriptions appear, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature being "above", "above" and "above" the second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. The first feature being "below", "below" and "below" the second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0039] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only implementation method.

[0040] Referring to FIGS. 1 to 4 , a detection device 10 provided in an embodiment of the present application is used to detect defects of a workpiece, and the above defects may include but are not limited to scratches, grooves, uneven surfaces or dirt. The detection device 10 includes a bracket 100, a light source assembly 200 and a shooting module 300. The shooting module 300 is used to shoot an image of the workpiece, and the light source assembly 200 provides lighting for the shooting module 300 to improve the accuracy of the shooting module 300 in acquiring the image. The light source assembly 200 includes a first light source 210 and a second light source 220, and the first light source 210 and the second light source 220 are staggered and arranged on the bracket 100. The shooting module 300 is movably arranged on the bracket 100 to move to a position aligned with the first light source 210 and a position aligned with the second light source 220. It can be understood that, as shown in FIG. 3 , when the shooting module 300 is aligned with the first light source 210, the first light source 210 is used to provide lighting for the shooting of the shooting module 300. As shown in FIG. 4 , when the shooting module 300 and the second light source 220 are aligned, the second light source 220 is used to provide lighting for shooting of the shooting module 300 .

[0041] In the above-mentioned detection device 10, the first light source 210 and the second light source 220 respectively provide illumination for the shooting module 300, so that the shooting module 300 can obtain different shooting effects, so as to fully detect the defects that may exist in the workpiece. In addition, the shooting module 300 can move to a position aligned with the first light source 210 and the shooting module 300 can move to a position aligned with the second light source 220, so there is no need to set two shooting modules 300 to correspond to different light sources, which simplifies the structure of the detection device 10 and reduces the cost of the detection device 10. It should be understood that the first light source 210 and the second light source 220 can be configured as different types of light sources. It should be noted that the type of light source can be distinguished according to the shooting effect obtained by the shooting module 300 when the light source provides illumination. In short, when different types of light sources are used to provide illumination for the shooting module 300, the shooting module 300 can obtain different shooting effects.

[0042] Furthermore, the first light source 210 and the second light source 220 can be one of the light sources such as a coaxial light source, a bar light source, a stripe light source, a dome light source, a backlight light source, a point light source, a low-angle light source, a surface light source, a line scan light source, a structured light source, and an AOI special light source. For example, the first light source 210 can be configured as a combined bar light source, and through the illumination of the combined bar light source, it is easy to show local minor defects (such as scratches and bump defects). The second light source 220 can be configured as a coaxial light source. The lighting method of the coaxial light source has the characteristics of uniform lighting and high contrast, which is easy to clearly show dirt, damage, bubbles, product contours, etc. on the product surface. Of course, the first light source 210 and the second light source 220 can also be configured as other different types of light sources according to needs.

[0043] The light source assembly 200 is not limited to only two light sources. For example, please continue to refer to Figures 3 and 4. In one embodiment, the light source assembly 200 also includes a third light source 230. The first light source 210, the second light source 220 and the third light source 230 provide lighting for the shooting module 300 respectively, which can enrich the shooting effect of the shooting module 300 and facilitate the full detection of possible defects in the workpiece. Further, the third light source 230 can also be a coaxial light source, a strip light source, a stripe light source, a dome light source, a backlight light source, a point light source, a low-angle light source, a surface light source, a line scan light source, a structured light source and an AOI special light source. For example, the third light source 230 can be configured as a stripe light source. The stripe light source can provide a high-contrast stripe pattern, so that the small details on the surface of the workpiece are clearly visible, which helps to measure and identify surface defects or shape changes. The stripe light source can be used for structured light illumination, which can project a specific stripe pattern. By analyzing the deformation or offset of the stripes on the surface of the workpiece, the three-dimensional shape and contour information of the object can be obtained, which is convenient for 3D two-sided and detection. In one embodiment, the first light source 210 , the second light source 220 , and the third light source 230 may be configured as light sources of different types.

[0044] The first light source 210 and the second light source 220 are arranged in sequence in the first direction S1, and the camera module 300 is movably disposed on the bracket 100 along the first direction S1, so that the camera module 300 moves to a position aligned with the first light source 210 and to a position aligned with the second light source 220. The first light source 210 is provided with a hollow light-transmitting area 211. The third light source 230 is movably disposed on the bracket 100 along the first direction S1, so as to move to a position aligned with and staggered from the hollow light-transmitting area 211. In this embodiment, the third light source 230 and the camera module 300 may have substantially parallel movement trajectories, so that the third light source 230 moves to a position aligned with the camera module 300. In addition, the first light source 210 is provided with a hollow light-transmitting area 211, and since the hollow light-transmitting area 211 is substantially hollow, when the first light source 210 is turned off, the first light source 210 will not affect the shooting of the camera module 300. Thus, the third light source 230 is allowed to provide illumination at a position aligned with the first light source 210 , thereby reducing the volume of the detection device 10 .

[0045] It should be noted that most commonly used illumination light sources (such as the above-mentioned coaxial light, combined strip light source and stripe light source, etc.) allow the shooting light of the shooting module 300 to pass through for shooting, but if the shooting light of the shooting module 300 passes through two light sources as described above at the same time, there is a problem of limited shooting effect. Therefore, in order to avoid the longitudinal overlap of the two light sources, each light source is usually set to be staggered from each other, so that the detection device 10 has a large structure volume. In the present application, since the third light source 230 can move along the first direction S1, the third light source 230 can avoid the hollow light-transmitting area 211, that is, avoid the first light source 210 that is providing illumination, and reduce the negative effect of the third light source 230 blocking the illumination provided by the first light source 210. Further, some light sources (such as the first light source 210) allow the shooting light of the shooting module 300 to pass through unimpeded when in use (that is, have the above-mentioned hollow light-transmitting area 211), so this type of light source can be set on a side relatively close to the shooting module 300, and at this time, this type of light source will basically not have a negative impact on the other light source overlapping with it. That is to say, when the third light source 230 is aligned with the hollow light-transmitting area 211 and the first light source 210 is turned off, the first light source 210 will basically not affect the lighting of the third light source 230. When the first light source 210 provides lighting, the third light source 230 can be moved away to reduce the impact on the lighting of the first light source 210. This arrangement allows the first light source 210 and the third light source 230 arranged longitudinally to provide lighting independently without affecting each other. It should be further explained that the above-mentioned light source that allows the shooting light of the shooting module 300 to pass through unimpeded usually has a similar lighting effect, so the third light source 230 usually does not use this type of light source. Therefore, if the third light source 230 is fixed below the first light source 210 in the reference direction, the third light source 230 will affect the lighting effect of the first light source 210. Of course, this embodiment does not strictly limit the third light source 230 to not having a hollow light-transmitting area, and can be adjusted according to actual needs.

[0046] For example, referring to FIG. 5 and FIG. 6 , in one embodiment, the first light source 210 includes a plurality of lighting components 212, and the plurality of lighting components 212 are evenly spaced in the circumferential direction around the reference axis O, and enclose the hollow light-transmitting area 211 as described above. When the camera module 300 is aligned with the first light source 210, the optical axis L1 of the camera module 300 coincides with the reference axis O. The alignment of the third light source 230 with the first light source 210 refers to that the projection of the third light source 230 along the reference axis O at least partially overlaps with the hollow light-transmitting area 211.

[0047] To facilitate understanding of the lighting of the light source assembly 200, the following describes the situations in which each light source included in the light source assembly 200 is used to provide lighting.

[0048] 3 , when the first light source 210 is used to provide illumination, the camera module 300 can be moved to a position aligned with the first light source 210. At this time, the third light source 230 can be moved to a position aligned with the second light source 220 to stagger with the first light source 210 to avoid reflection and refraction of illumination light and shooting light.

[0049] 4 , when the second light source 220 is used to provide illumination, the camera module 300 can be moved to a position aligned with the second light source 220. Similarly, the third light source 230 can be moved to a position aligned with the first light source 210 to stagger with the second light source 220 to avoid reflecting or refracting the illumination light and the camera light.

[0050] Please refer to Fig. 6, when the third light source 230 is used to provide illumination, the camera module 300 can be moved to a position aligned with the first light source 210. At this time, the projection of the third light source 230 along the reference axis O at least partially overlaps with the hollow light-transmitting area 211, the first light source 210 is in a closed state, and the hollow light-transmitting area 211 allows the shooting light to pass through unimpeded, so the third light source 230 can fully and effectively provide illumination.

[0051] It should be noted that the above briefly describes the positions of the components when the first light source 210, the second light source 220 and the third light source 230 provide lighting, but the embodiments of the present application do not limit the timing of each light source providing lighting and can be flexibly set according to actual needs.

[0052] In one embodiment, the lighting component 212 can be a bar light source, that is, the first light source 210 is a combined bar light source as described above, and multiple bar light sources are combined for lighting. Referring to FIG. 7 , the lighting component 212 is rotatably arranged on the bracket 100 to adjust the light output angle. For example, the lighting light provided by each lighting component 212 can be adjusted to intersect at the same position on the reference axis O to form a highlighted area to improve the lighting effect. The lighting direction of the lighting component 212 is shown in the reference number L2 in FIG. 7 . Of course, each lighting component 212 can also be adjusted to have different light output angles according to needs, which is not limited here. It should be understood that the drawings in the specification show that the number of lighting components 212 is 4, but the number of lighting components 212 is not limited thereto, and the number of lighting components 212 can be set to 2, 3, 4, 5, 6, 7, 8, 10 and 12, etc. according to needs.

[0053] Please refer to FIG. 2 again. In one embodiment, the optical axis L1 of the camera module 300 extends along the second direction S2, and the second direction S2 intersects the first direction S1. The first light source 210, the second light source 220, and the third light source 230 are disposed at different positions in the second direction S2 to fully utilize the space and make the detection device 10 more compact.

[0054] Furthermore, the first direction S1 and the second direction S2 are perpendicular to each other.

[0055] Referring to FIG. 2 , FIG. 8 and FIG. 9 , in one embodiment, the bracket 100 includes a connecting plate 110 and a supporting member 120, a plurality of supporting members 120 are arranged at intervals on the connecting plate 110 along the second direction S2, and each supporting member 120 extends along the first direction S1. The shooting module 300, the first light source 210 and the third light source 230 are respectively arranged on different supporting members 120, and the second light source 220 is arranged on the connecting plate 110. The plurality of supporting members 120 are arranged on the connecting plate 110 along the second direction S2, so that the shooting module 300, the first light source 210, the second light source 220 and the third light source 230 can be arranged at intervals in the second direction S2 to make full use of the installation space on the connecting plate 110. Each supporting member 120 extends along the first direction S1, which is convenient for the shooting module 300 and the third light source 230 to move along the first direction S1 on the one hand, and also convenient for the first light source 210 and the second light source 220 to be staggered in the first direction S1 on the other hand.

[0056] 8 and 9 , the plurality of support members 120 can be divided into a first support member 121, a second support member 122, and a third support member 123, which are sequentially arranged along the second direction S2. The camera module 300 is movably disposed on the first support member 121, the first light source 210 is disposed on the second support member 122, and the third light source 230 is movably disposed on the third support member 123.

[0057] Further, as shown in FIG9 , one end of the first support member 121 is connected to the connecting plate 110, and the other end extends in a direction perpendicular to the connecting plate 110 in a direction away from the connecting plate 110 (i.e., direction S1). A second slide rail 121a is provided on the first support member 121, and the second slide rail 121a extends along the first direction S1 and is provided on the top surface of the first support member 121. The shooting module 300 slidably cooperates with the second slide rail 121a. One end of the third support member 123 is connected to the connecting plate 110, and the other end extends in a direction perpendicular to the connecting plate 110 in a direction away from the connecting plate 110 (i.e., direction S1). A third slide rail 123a is provided on the third support member 123, and the third slide rail 123a is provided on the bottom surface of the third support member 123 along the first direction S1.

[0058] Please refer to FIG. 8 and FIG. 10. In one embodiment, the camera module 300 and the light source assembly 200 corresponding to the camera module 300 are recorded as the camera module 11, and a plurality of camera modules 11 are arranged at intervals on the bracket 100. That is, the bracket 100 is provided with a plurality of camera modules 300 and a plurality of light source assemblies 200, and the plurality of light source assemblies 200 respectively provide lighting for the plurality of camera modules 300. Further, the bracket 100 further includes a first support plate 150 and a second support plate 160, and the plurality of camera modules 300 are arranged on the first support plate 150. The number of the first support members 121 is multiple, and the first support plate 150 is slidably matched with the plurality of first support members 121. When the first support plate 150 slides relative to the first support member 121, it can drive the plurality of camera modules 300 to move synchronously, so as to move to different workstations and simultaneously perform camera inspection on a plurality of workpieces, and the inspection efficiency is high. Similarly, the number of the second support member 122 and the third support member 123 can also be multiple to improve the stability of the support. The plurality of third light sources 230 are disposed on the second support plate 160 , and the second support plate 160 is slidably matched with the plurality of third support members 123 .

[0059] Please continue to refer to Figure 8. In one embodiment, the bracket 100 also includes a mounting frame 170, which is disposed on the first support plate 150. The shooting module 300 is disposed on the mounting frame 170. The mounting frame 170 can support the shooting module 300 to be placed in a preset posture, so as to facilitate shooting and detecting the workpiece facing the workpiece.

[0060] Please refer to FIG. 12 . In one embodiment, the bracket 100 further includes a carrier plate 130 and a gantry 140 . The light source assembly 200 and the camera module 300 are both disposed on the carrier plate 130 . The gantry 140 is provided with a receiving slot 142 . The gantry 140 is also provided with a first slide rail 141 . The number of the first slide rails 141 is at least two and they are respectively disposed on both sides of the receiving slot 142 . The carrier plate 130 and the first slide rails 141 are slidably matched. The detection device 10 further includes a first driving unit 410 . The first driving unit 410 is at least partially disposed in the receiving slot 142 and connected to the carrier plate 130 to drive the carrier plate 130 to slide. By providing the first slide rails 141 on both sides of the receiving slot 142 , the stability of the movement of the carrier plate 130 can be improved. It can be understood that the plurality of camera modules 11 are all disposed on the carrier plate 130 . Therefore, the carrier plate 130 has a higher load, so that the stability of the movement of the carrier plate 130 can be improved. Furthermore, the first driving unit 410 is disposed in the receiving groove 142 , which can reduce the structural size of the detection device 10 .

[0061] The first slide rail 141 can be extended along the third direction S3, that is, the first driving unit 410 drives the carrier plate 130 and the camera module 300 and the light source assembly 200 disposed on the carrier plate 130 to move along the third direction S3. The third direction S3 intersects with both the first direction S1 and the second direction S2. Further, the first direction S1, the second direction S2 and the third direction S3 are arranged perpendicular to each other.

[0062] As shown in FIG10 , a plurality of camera modules 11 are disposed on opposite sides of the gantry 140. Further, the detection device 10 may include two carrier plates 130 and two first drive units 410, the two carrier plates 130 are disposed on opposite sides of the gantry 140, and the two first drive units 410 may be disposed in the receiving groove 142 and respectively drive the two carrier plates 130 to move along the third direction S3.

[0063] Referring to FIG. 2 and FIG. 12 , in one embodiment, the connecting plate 110 is movably disposed on the supporting plate 130 along the second direction S2. Further, the detection device 10 further includes a second driving unit 420, which is disposed on the supporting plate 130 and connected to the connecting plate 110 to drive the connecting plate 110 and the shooting module 300 and the light source assembly 200 disposed on the connecting plate 110 to move along the second direction S2.

[0064] Please refer to FIG. 2 , in one embodiment, the detection device 10 further includes a third driving unit 430 and a fourth driving unit 440, and the bracket 100 further includes a fourth support member 124 and a fifth support member 125, the third driving unit 430 is disposed on the fourth support member 124, and the fourth driving unit 440 is disposed on the fifth support member 125. The third driving unit 430 is connected to the first support plate 150 to drive the first support plate 150 and the plurality of camera modules 300 disposed on the first support plate 150 to move along the first direction S1. The fourth driving unit 440 is connected to the second support plate 160 to drive the second support plate 160 and the plurality of third light sources 230 disposed on the second support plate 160 to move along the first direction S1.

[0065] Please refer to FIG. 11 . In one embodiment, the first driving unit 410 can drive the carrier plate 130 to move by means of a screw nut. Further, the first driving unit 410 includes a first driver 411, a first screw rod 412 and a first connecting seat 413. The first driver 411 and the first screw rod 412 are both arranged in the receiving groove 142. The first connecting seat 413 partially extends out of the receiving groove 142 and is connected to the carrier plate 130. The first driver 411 is connected to the end of the first screw rod 412 to drive the first screw rod 412 to rotate around its own axis. The first screw rod 412 passes through the first connecting seat 413 and meshes with the first connecting seat 413. The first connecting seat 413 is connected to the carrier plate 130. Thus, when the first screw rod 412 rotates, it can drive the first connecting seat 413 to move axially. The first screw rod 412 can be extended along the third direction S3, and the first screw rod 412 is used to drive the first connecting seat 413 to move along the third direction S3.

[0066] Please refer to FIG. 12 . Similar to the first driving unit 410 , the second driving unit 420 includes a second driver 421 , a second screw rod 422 and a second connection seat 423 . The second driver 421 and the second screw rod 422 are arranged on the bearing plate 130 , and the second connection seat 423 is connected to the connection plate 110 . The second driver 421 is connected to the end of the second screw rod 422 to drive the second screw rod 422 to rotate around its own axis. In addition, the second screw rod 422 passes through the second connection seat 423 and engages with the second connection seat 423 . Thus, when the second screw rod 422 rotates, it can drive the second connection seat 423 to move axially. The second screw rod 422 can be extended along the second direction S2 , and the second screw rod 422 is used to drive the second connection seat 423 to move along the third direction.

[0067] Please refer to FIG. 13 . In one embodiment, the third driving unit 430 may also be driven by a screw nut. That is, the third driving unit 430 includes a third driver 431, a third screw 432 and a third connection seat 433. The third connection seat 433 is connected to the first support plate 150. The third screw 432 passes through the third connection seat 433 and engages with the third connection seat 433. The third driver 431 is connected to the end of the third screw 432 to drive the third screw 432 to rotate around its own axis. Thus, when the third screw 432 rotates, it can drive the third connection seat 433 to move axially. The third screw 432 can be extended along the first direction S1, and the third screw 432 is used to drive the third connection seat 433 to move along the first direction S1.

[0068] 9, further, in order to simplify the size of the detection device 10 in the first direction S1, the third driver 431 and the third screw rod 432 can be connected by a transmission belt 434, so that the third driver 431 can be arranged side by side instead of being coaxially arranged. Furthermore, the fourth support member 124 is provided with a vertical plate 124a, and the vertical plate 124a is extended along the second direction S2 to support the third driver 431.

[0069] Please continue to refer to FIG. 13. In one embodiment, the fourth driving unit 440 can be directly driven by a linear driver, for example, the fourth driving unit 440 can be driven by a cylinder or an electric push rod. Further, the fourth driving unit 440 includes a cylinder 441 and a slider 442. The cylinder 441 is extended along the first direction S1, and the cylinder 441 can drive the slider 442 to slide along the first direction S1. The slider 442 is connected to the second support plate 160 to drive the second support plate 160 to move along the first direction S1.

[0070] Please refer to FIG. 14 . In one embodiment, the detection device 10 further includes a purge member 500, which is disposed on the connecting plate 110. The purge member 500 is provided with a purge hole 510, which faces the workpiece to be inspected. The purge member 500 is also used to connect with a positive pressure generator (not shown in the figure, the same below), which is used to input positive pressure purge wind to the purge member 500, and the purge hole 510 guides the purge wind to blow toward the workpiece to be inspected, thereby removing dust and other debris on the surface of the workpiece and improving the accuracy of the shooting detection.

[0071] Please refer to FIG. 15 , an embodiment of the present application further provides a defect detection device, which includes a transfer device 20 and a detection device 10, wherein the transfer device is used to carry a workpiece and move the workpiece to the detection range of the detection device 10. Furthermore, the transfer device can also adjust the position according to the movement of the shooting module 300. For example, when the shooting module 300 moves to a position aligned with the first light source 210, the transfer device can move the workpiece to a position aligned with the first light source 210. When the shooting module 300 moves to a position aligned with the second light source 220, the transfer device can move the workpiece to a position aligned with the second light source 220.

[0072] Furthermore, the defect detection equipment 1 also includes a base 30, and the detection device 10 and the transfer device are both arranged on the base 30, wherein the detection device 10 can be mounted on the transfer device to facilitate the detection of the workpiece carried by the transfer device.

[0073] Please refer to FIG. 16 and FIG. 17. In one embodiment, the transfer device 20 includes a driving platform 21 and a transfer member 22. The transfer member 22 is used to carry the workpiece. The driving platform 21 is connected to the transfer member 22. The driving platform 21 can drive the transfer member 22 to move along the first direction S1, that is, the driving platform 21 can transport the workpiece along the first direction S1 by driving the transfer member 22 to move along the first direction S1. With such a configuration, when the camera module 300 switches the light source along the first direction S1, the transfer device 20 can drive the workpiece to move in accordance with the movement of the camera module 300, so that the workpiece can always be within the field of view of the camera module 300.

[0074] Please refer to Figure 17. Further, the transfer member 22 includes a frame 22a, a connecting beam 22b and a plurality of fixtures 22c. Among them, the frame 22a is connected to the driving platform 21, and the driving platform 21 drives the transfer member 22 to move along the first direction S1 as a whole by driving the frame 22a to move. The connecting beam 22b is rotatably connected to the frame 22a around the first axis O1, and each fixture 22c is rotatably connected to the connecting beam 22b around the second axis O2, and the first axis O1 intersects with the second axis O2. In this way, multiple workpieces fixed by the fixture 22c can be rotated around the first axis O1 synchronously to enrich the angular position of the workpiece in the field of view of the shooting module 300 and improve the detection effect. In addition, each fixture 22c rotates around the second axis O2 and the connecting beam 22b respectively, that is, each fixture 22c can also rotate around the second axis O2 to further enrich the posture of the workpiece in the field of view of the shooting module 300 and improve the detection effect.

[0075] In one embodiment, the angular position of the connecting beam 22 b and / or the fixture 22 c may be adjusted according to different positions of the shooting module 300 to perform targeted detection on detail areas of the workpiece.

[0076] Further, the first axis O1 may be perpendicular to the second axis O2, the first axis O1 may be parallel to the third direction S3, and the second axis O2 may be parallel to a plane formed by the first direction S1 and the second direction S2.

[0077] As shown in FIG. 16 , in one embodiment, the transfer device 20 may include a plurality of transfer members 22, and the plurality of transfer members 22 are all connected to the driving platform 21 so as to move in the same direction (i.e., the first direction S1) under the drive of the driving platform 21. The racks 22a of each transfer member can be rotated to a position where the jigs 22c face each other, and at this time, the two jigs 22c facing each other transfer the workpiece to each other. For example, taking the jig 22c vacuum adsorbing the workpiece to fix it as an example, when the two jigs 22c face each other, the two jigs 22c can respectively adsorb the opposite sides of the workpiece, and at this time, one of the jigs 22c releases the workpiece and can transfer the workpiece to the other jig 22c.

[0078] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0079] The above-described embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be construed as limiting the scope of the patent application. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent application shall be subject to the attached claims.

Claims

1. A detection device, characterized in that: The detection device comprises: Bracket; A light source assembly, the light source assembly comprising a first light source and a second light source, the first light source and the second light source are staggered and arranged on the bracket; A shooting module is movably disposed on the bracket to move to a position aligned with the first light source and a position aligned with the second light source.

2. The detection device according to claim 1, characterized in that: The first light source and the second light source are arranged sequentially in a first direction, and the shooting module is movably disposed on the bracket along the first direction; The light source assembly further includes a third light source. The first light source is provided with a hollow light-transmitting area. The third light source is movably provided on the bracket along the first direction to move to a position aligned with and offset from the hollow light-transmitting area.

3. The detection device according to claim 2, characterized in that: The first light source includes a plurality of lighting components, which are evenly spaced in a circumferential direction around a reference axis and enclose a hollow light-transmitting area; when the shooting module is aligned with the first light source, the optical axis of the shooting module coincides with the reference axis.

4. The detection device according to claim 3, characterized in that: The lighting component is rotatably arranged on the bracket to adjust the light output angle.

5. The detection device according to claim 2, characterized in that: The optical axis of the shooting module extends along a second direction, the second direction intersects the first direction, and the first light source, the second light source and the third light source are arranged at different positions along the second direction.

6. The detection device according to claim 5, characterized in that: The bracket includes a connecting plate and a supporting member, a plurality of supporting members are arranged on the connecting plate at intervals along the second direction, and each supporting member extends along the first direction; The shooting module, the first light source and the third light source are respectively arranged on different supporting members, and the second light source is arranged on the connecting plate.

7. The detection device according to claim 2, characterized in that: The first light source is configured as a combined bar light source; and / or The second light source is configured as a coaxial light source; and / or The third light source is configured as a stripe light source.

8. The detection device according to any one of claims 2 to 7, characterized in that: The first light source, the second light source and the third light source are configured as light sources of different types.

9. The detection device according to any one of claims 1 to 7, characterized in that: The shooting module and the light source assembly corresponding to the shooting module for providing lighting are recorded as a shooting module, and a plurality of the shooting modules are arranged on the bracket at intervals.

10. The detection device according to claim 1, characterized in that: The bracket includes a bearing plate and a gantry, the light source assembly and the shooting module are both arranged on the bearing plate, the gantry is provided with a receiving groove, the gantry is also provided with a first slide rail, the number of the first slide rails is at least two and they are respectively arranged on both sides of the receiving groove, and the bearing plate is slidably matched with the first slide rail; The detection device further includes a first driving unit, which is at least partially disposed in the receiving groove and connected to the supporting plate to drive the supporting plate to slide.

11. A defect detection device, characterized in that: The defect detection equipment comprises a transfer device and a detection device according to any one of claims 1 to 10, wherein the transfer device is used to carry a workpiece and move the workpiece into a detection range of the detection device.

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