Shape and position reference piece and manufacturing method of multi-surface common-body optical element

Abstract

The invention relates to the technical field of optical element manufacturing, in particular to a form and position reference part and a manufacturing method of a polyhedral integrated optical element, and the manufacturing method of the polyhedral integrated optical element comprises the steps that a blank and the form and position reference part are provided, and the blank comprises a positioning part and a main body part which are connected; determining a target coordinate of the target multi-surface common-body optical element in the reference space coordinate system; the positioning part is arranged in the positioning groove so that the blank can be fixed to the base; determining basic coordinates of the blank in the reference space coordinate system; determining the processing amount according to the difference between the basic coordinate and the target coordinate, and processing the blank based on the processing amount to obtain an initial multi-surface common-body optical element; and by taking the target ball as a detection reference datum, sequentially carrying out relative position detection and surface shape error detection on a plurality of surfaces of the initial multi-surface common-body optical element, and carrying out iterative processing until the multi-surface common-body optical element is obtained. The manufacturing difficulty of the multi-surface common-body optical element is at least reduced.

Description

Technical Field

[0001] The invention belongs to the technical field of optical element manufacturing, and in particular relates to a form and position reference part and a manufacturing method of a multi-faceted co-body optical element. Background Art

[0002] Complex multi-faceted co-body optical elements refer to multiple aspheric surfaces, free-form surfaces and other complex optical surfaces processed on the same optical substrate in a certain positional relationship. When the multi-faceted co-body optical element is manufactured, each optical surface is optically aligned, which effectively reduces the number of optical elements that need to be adjusted in the system, reduces the complexity of system assembly, and the integrated structure is conducive to achieving high stability of the system. Therefore, multi-faceted co-body optical elements are widely used in precision optoelectronic equipment with compact structure and mass production.

[0003] Multifaceted co-body optical elements are formed in one piece and do not require assembly, thus greatly reducing the complexity of optical system assembly and adjustment. However, the multifaceted one-piece forming greatly increases the difficulty of processing. It is necessary to ensure that multiple faces are in the right position during the processing, otherwise it will affect the performance of the optical system. Multifaceted co-body optical elements need to be processed and tested continuously to accurately determine the relative posture of multiple faces, which poses new challenges to existing manufacturing methods. Therefore, it is urgent to study a form and position reference that can run through the processing and testing process of multifaceted co-body optical elements, fundamentally solving the problem of unified reference coordinate system for processing and testing during the manufacturing process of multifaceted co-body optical elements, so as to reduce the manufacturing difficulty of multifaceted co-body optical elements. Summary of the invention

[0004] In view of this, the invention aims to provide a form and position reference component and a method for manufacturing a multi-faceted co-body optical element, which at least helps to reduce the difficulty of manufacturing the multi-faceted co-body optical element.

[0005] To achieve the above object, the technical solution created by the present invention is implemented as follows: The invention provides a form and position reference component, which is used to provide a reference for the processing and detection of multi-faceted co-solid optical elements. The form and position reference component includes: a base, the base has a positioning surface and a positioning groove for fixing the blank, the positioning groove is arranged on the positioning surface; a plurality of reference rods, the plurality of reference rods are arranged at intervals on the outer circle of the positioning groove; a target ball, the target ball is arranged at the end of the reference rod away from the base.

[0006] In some embodiments, the number of reference rods is at least three.

[0007] In some embodiments, the reference rods are of different lengths.

[0008] In some embodiments, when the blank is fixed on the base, the target ball is higher than the top surface of the blank.

[0009] On the other hand, the present invention provides a method for manufacturing a polyhedral co-solid optical element, comprising: providing a blank and the above-mentioned form and position reference part, the blank comprising a positioning portion and a main body portion connected to each other; establishing a reference space coordinate system according to the relative positions between a plurality of target balls, and determining the target coordinates of the target polyhedral co-solid optical element in the reference space coordinate system; setting the positioning portion in a positioning groove to fix the blank on a base; determining the basic coordinates of the blank in the reference space coordinate system; determining a processing amount according to the difference between the basic coordinates and the target coordinates, and processing the blank based on the processing amount to obtain an initial polyhedral co-solid optical element; using the target ball as a detection reference, sequentially performing relative position detection and surface shape error detection of multiple faces of the initial polyhedral co-solid optical element, and performing iterative processing until the polyhedral co-solid optical element is obtained.

[0010] In some embodiments, the multi-faceted co-solid optical element is an interactive off-axis three-mirror system.

[0011] In some embodiments, providing a form and position reference part further includes: analyzing the degrees of freedom existing on multiple faces of the target multi-faceted co-solid optical element to determine the degrees of freedom required to be controlled on the multiple faces; and obtaining the form and position reference part according to the degrees of freedom and blank design.

[0012] In some embodiments, determining the basic coordinates includes: using a three-coordinate measuring machine to measure the relative spatial positions of the blank and the form and position reference component to determine the basic coordinates.

[0013] Compared with the prior art, the invention can achieve the following beneficial effects: the embodiment of the invention provides a form and position reference part that runs through the entire manufacturing process of a multi-faceted co-body optical element, defines a reference space coordinate system with the form and position reference part, and unifies the coordinate system for processing and detecting the multi-faceted co-body optical element, thereby solving the problem of transmitting the complex form and position relationship of multiple faces during the processing and detection of the multi-faceted co-body optical element; specifically, when processing the multi-faceted co-body optical element, first provide a form and position reference part, establish a reference space coordinate system based on the form and position reference part, determine the spatial position of each face of the multi-faceted co-body optical element to be processed, and then use the form and position reference part as the processing reference to perform integrated processing of the multi-faceted co-body optical element, and use the form and position reference part as the detection reference to perform form and position detection of the multi-faceted co-body optical element. In this way, the relative position relationship and surface shape of each face of the multi-faceted co-body optical element can be effectively controlled, the manufacturing difficulty of the multi-faceted co-body optical element can be reduced, and it is beneficial to improve the optical imaging performance of the multi-faceted co-body optical element. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] The drawings constituting part of the present invention are used to provide a further understanding of the present invention. The exemplary embodiments and descriptions of the present invention are used to explain the present invention and do not constitute an improper limitation on the present invention. In the drawings: Figure 1A schematic diagram of the structure of the form and position reference member described in the embodiment of the present invention; Figure 2 A schematic diagram of the structure of the blank described in the embodiment of the present invention; Figure 3 A schematic diagram of the structure in which the blank according to the embodiment of the present invention is arranged on the form and position reference part; Figure 4 A schematic diagram of the structure of a multi-faceted co-body optical element according to an embodiment of the present invention; Figure 5 A schematic diagram of the structure of an interactive off-axis three-mirror system according to an embodiment of the present invention; Figure 6 The present invention is a schematic structural diagram of an M-type off-axis three-mirror system according to an embodiment of the present invention.

[0015] Explanation of the reference numerals: 5, base; 10, blank; 4, positioning groove; 3, reference rod; 2, target ball seat; 7, primary mirror; 8, secondary mirror; 9, tertiary mirror; 11, exit surface. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical solution and advantages of the invention more clear, the invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the invention and do not constitute a limitation of the invention.

[0017] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

[0018] In the description of the invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing the invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the invention. In addition, the terms "first", "second", etc. are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description of the invention, unless otherwise specified, the meaning of "multiple" is two or more.

[0019] In the description of the invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the invention can be understood according to specific circumstances.

[0020] The present invention will be described in detail below with reference to the accompanying drawings and in combination with embodiments.

[0021] refer to Figure 1 The invention provides a form and position reference part, which is used to provide a reference for the processing and detection of a multi-faceted co-body optical element. The form and position reference part includes: a base 5, which has a positioning surface and a positioning groove 4 for fixing a blank 10, and the positioning groove 4 is arranged on the positioning surface; a plurality of reference rods 3, which are arranged at intervals on the outer ring of the positioning groove 4; a target ball 1, which is arranged at the end of the reference rod 3 away from the base 5. The spatial positions and relative positional relationships of the multiple faces of the multi-faceted co-body optical element can be described and transmitted by the form and position reference part, so that the surface shape and spatial position of each face of the multi-faceted co-body optical element can meet the design requirements.

[0022] In some embodiments, the number of reference rods 3 is at least 3, and a reference space coordinate system can be defined by using at least 3 non-coplanar target balls 1. In some examples, the number of reference rods 3 is 4, and it is more reasonable to use 4 reference rods 3. If the number of reference rods 3 is increased, more placement space is required, which also increases the difficulty of data processing. Four reference rods 3 are correspondingly provided with four target balls 1, and a reference space coordinate system is defined by using four non-coplanar target balls 1. When the multifaceted co-solid optical element is set in a fixed position in the reference space coordinate system, the coordinates of each face of the multifaceted co-solid optical element in the reference space coordinate system are unique.

[0023] In some embodiments, the lengths of the reference rods 3 are different, so that the target balls 1 are not coplanar.

[0024] In some embodiments, when the blank 10 is fixed on the base 5, the target sphere 1 is higher than the top surface of the blank 10. In this way, it is convenient to use an interferometer or other equipment in conjunction with the target sphere to detect the multi-faceted co-body optical element.

[0025] In some embodiments, the base 5 of the form and position reference member involved in the embodiments of the present invention can be a flat plate with high parallelism, and its size requirements can bear the multi-faceted co-body element and the reference rod 3. The positioning groove 4 is used to ensure the positioning accuracy when the multi-faceted co-body optical element is repeatedly fixed on the base 5. Specifically, the shape of the blank 10 can be determined according to the shape of the multi-faceted co-body optical element, and the positioning groove 4 matching the blank 10 can be turned on the base 5. In some examples, one end of the reference rod 3 can have a thread, and the base 5 has a screw hole for setting the reference rod 3, and the threaded end of the reference rod 3 is screwed into the corresponding screw hole.

[0026] In some embodiments, the end of the reference rod 3 away from the base has a target ball seat 2, and the target ball 1 is set on the target ball seat 2. The target ball 1 can be used as a mechanical reference in the processing of the multi-faceted co-body optical element, and can also be used as an optical reference in the detection process of the multi-faceted co-body optical element. A reference space coordinate system is established using multiple non-coplanar target balls, so that the spatial positions of multiple faces of the multi-faceted co-body optical element can be described and transmitted using shape and position reference parts. The shape and position reference parts serve as the processing reference datum of each face, ensuring that the relative spatial postures of multiple faces are accurately controlled during the processing.

[0027] On the other hand, the present invention provides a method for manufacturing a polyhedral co-body optical element, comprising: providing a blank 10 and the above-mentioned form and position reference part, the blank 10 comprising a positioning portion and a main body connected to each other; establishing a reference space coordinate system according to the relative positions between multiple target balls 1, and determining the target coordinates of the target polyhedral co-body optical element in the reference space coordinate system; setting the positioning portion in the positioning groove 4 to fix the blank 10 on the base 5; determining the basic coordinates of the blank 10 in the reference space coordinate system; determining the processing amount according to the difference between the basic coordinates and the target coordinates, and processing the blank 10 based on the processing amount to obtain an initial polyhedral co-body optical element; using the target ball 1 as a detection reference, sequentially performing relative position detection and surface shape error detection of multiple faces of the initial polyhedral co-body optical element, and performing iterative processing until the polyhedral co-body optical element is obtained.

[0028] The blank 10 is a blank workpiece used for processing a multi-faceted co-body optical element. The step of determining the basic coordinates of the blank 10 in the reference space coordinate system is to obtain the relative position relationship between the form and position reference part and the blank 10 by measuring the geometric quantity. In some embodiments, determining the basic coordinates includes: using a three-coordinate measuring machine to measure the relative spatial position of the blank 10 and the form and position reference part to determine the basic coordinates.

[0029] The embodiment of the present invention ensures that the relative spatial position relationship between the blank 10 and the form and position reference part remains unchanged during the processing, and the form and position reference part is used as the processing reference during the processing of the multi-faceted co-body optical element; after the processing is completed, the form and position reference part is used as the detection reference to perform relative position and surface shape error detection of multiple faces of the multi-faceted co-body optical element, and then iterative processing is performed until a multi-faceted co-body optical element that meets the requirements is obtained.

[0030] In some embodiments, the multifaceted co-convergent optical element may be an off-axis three-mirror system. Figure 4 and Figure 5 , the multi-faceted co-body optical element is an interactive off-axis three-mirror system. In other examples, reference Figure 6 The multi-faceted co-body optical element can also be an M-type off-axis three-mirror system.

[0031] In some embodiments, providing a form and position reference part further includes: analyzing the degrees of freedom existing on multiple faces of the target multi-faceted co-solid optical element to determine the degrees of freedom required to be controlled on the multiple faces; and designing a form and position reference part based on the degrees of freedom and the blank 10 .

[0032] In some examples, the degrees of freedom include at least the following: each surface has 6 degrees of freedom, which can be translation in the x direction, translation in the y direction, translation in the z direction, tilt in the x direction, tilt in the y direction, and rotation; the degrees of freedom of the relative position relationship between each two optical surfaces include the angle between the two optical surfaces and the position deviation of the two optical surfaces. It should be noted that the above degrees of freedom are only examples, and different polyhedral co-solid optical elements have different degrees of freedom. Therefore, the present invention does not limit the number of degrees of freedom of the polyhedral co-solid optical element.

[0033] Considering the problems of insufficient space for the clamping mechanism due to the compactness of the system adjustment and optical system, the compact off-axis three-mirror system can be processed as a common component. Figures 1 to 5 , the following takes the multi-faceted co-body optical element as an interactive off-axis three-mirror system as an example, and the manufacturing method of the multi-faceted co-body optical element according to the present invention is described in detail, as follows: Step 1, designing a co-body form according to a specific interactive off-axis three-mirror system, and manufacturing a blank structure of a multi-faceted co-body optical element, namely, a blank 10; Step 2: Analyze the degrees of freedom of multiple faces of the target multi-faceted common optical element, design a form and position reference part according to the degrees of freedom and their quantity, and use the space coordinate system established by the form and position reference part as the reference space coordinate system in the processing process; Step 3: The blank 10 is mounted and fixed on the form and position reference part, and the spatial relative position of the blank 10 and the form and position reference part is measured by using a three-dimensional coordinate measuring machine, that is, the coordinates of the blank 10 in the reference space coordinate system are obtained, and the coordinates of the blank 10 in the reference space coordinate system are used as the basic coordinates; Step 4: during the processing, ensure that the relative spatial position relationship between the blank 10 and the form and position reference part remains unchanged, use the form and position reference part as the processing reference, and process each surface of the multi-faceted co-body optical element in sequence until the processing of the initial multi-faceted co-body optical element is completed; Step five, using the shape and position reference part as a detection reference, the relative position and surface error detection of multiple faces of the initial multi-faceted co-body optical element are carried out in turn, and the processing is iterated until the multi-faceted co-body optical element is completed. The multi-faceted co-body element may include an incident surface 6, a primary mirror 7, a secondary mirror 8, a tertiary mirror 9 and an exit surface 11.

[0034] It should be noted that the method for detecting a multi-faceted co-solid optical element in an embodiment of the present invention can be a target sphere-based computational hologram (CGH), that is, a coordinated shape and position detection based on multi-region computational holography. The multi-region computational hologram includes a reference area and a main area, and can detect four target spheres and an optical surface at the same time. The main area detects the optical surface to obtain the surface shape error, and the reference area detects the four target spheres to obtain the position error between the optical surface and the ideal position. Therefore, the shape and position error of the optical surface can be obtained based on the detection result.

[0035] It should be understood that the various forms of processes shown above can be used to reorder, add or delete steps. For example, the steps described in the disclosure of the present invention can be performed in parallel, sequentially or in different orders, as long as the desired results of the technical solution disclosed in the present invention can be achieved, and this document does not limit this.

[0036] The above specific implementations do not constitute a limitation on the protection scope of the present invention. It should be understood by those skilled in the art that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modification, equivalent substitution and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A form and position reference component, characterized in that: The shape and position reference part is used to provide a reference for the processing and detection of the multi-faceted co-body optical element, and the shape and position reference part includes: A base, the base having a positioning surface and a positioning groove for fixing the blank, the positioning groove being arranged on the positioning surface; A plurality of reference rods, wherein the plurality of reference rods are arranged at intervals on the outer circle of the positioning groove; A target ball is arranged at the end of the reference rod away from the base.

2. The form and position reference component according to claim 1, characterized in that: The number of the reference rods is at least 3.

3. The form and position reference component according to claim 1, characterized in that: The reference rods have different lengths.

4. The form and position reference component according to claim 1, characterized in that: When the blank is fixed on the base, the target ball is higher than the top surface of the blank.

5. A method for manufacturing a multifaceted co-existing optical element, characterized in that: include: Providing a blank and a form and position reference member as claimed in any one of claims 1 to 4, wherein the blank comprises a positioning portion and a main body portion connected to each other; Establishing a reference space coordinate system according to the relative positions of the plurality of target balls, and determining the target coordinates of the target multi-faceted co-solid optical element in the reference space coordinate system; The positioning portion is arranged in the positioning groove to fix the blank on the base; Determining the basic coordinates of the blank in the reference space coordinate system; Determine a processing amount according to a difference between the base coordinates and the target coordinates, and process the blank based on the processing amount to obtain an initial multi-faceted co-body optical element; Taking the target sphere as a detection reference, relative position detection and surface error detection of multiple faces of the initial multi-faceted co-body optical element are performed in sequence, and after iterative processing, a multi-faceted co-body optical element is obtained.

6. The method for manufacturing a multifaceted co-solid optical element according to claim 5, characterized in that: The multi-faceted co-body optical element is an interactive off-axis three-mirror system.

7. The method for manufacturing a multifaceted co-solid optical element according to claim 5, characterized in that: Providing the shape and position reference component also includes: analyzing the degrees of freedom existing on multiple faces of the target multi-faceted co-body optical element to determine the degrees of freedom required to be controlled on the multiple faces; The form and position reference part is obtained according to the degree of freedom and the blank design.

8. The method for manufacturing a multifaceted co-solid optical element according to claim 5, characterized in that: Determining the basic coordinates includes: using a three-coordinate measuring machine to measure the relative spatial position of the blank and the form and position reference part to determine the basic coordinates.

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