Planar motor rotor based on flat coil

Abstract

The invention provides a planar motor rotor based on a flat coil, and particularly belongs to the technical field of planar motors manufactured by integrated circuits. The output performance can be improved by improving the slot fullness rate of the coil, and meanwhile, the heat dissipation capability of the coil is also ensured due to the fact that heat dissipation of the coil mainly adopts conduction heat dissipation and the flat wire is adopted; and the inductance of the coil is reduced by the flat coil, so that the coil has important significance for improving the response performance of equipment. The motor comprises a rotor frame shell and a flat coil module, and further comprises magnets and a water cooling assembly. The inner side of the mover frame shell is provided with two groups of water-cooling pipe placing grooves and two groups of coil group placing grooves which are arranged in a staggered manner, water-cooling assemblies are arranged in the water-cooling pipe placing grooves, flat coil modules are arranged in the coil group placing grooves, and the mover frame shell is fixedly arranged on the top surface of the magnet; the number of the flat coil modules is four, and each flat coil module is composed of three flat coils.

Description

Technical Field

[0001] The invention relates to a planar motor mover based on a flat coil, and in particular belongs to the technical field of planar motors manufactured by integrated circuits. Background Art

[0002] Magnetic levitation planar motors are widely used in ultra-precision machining and semiconductor manufacturing, such as EUV lithography. For dynamic coil planar motors, the mover module is composed of multiple coils, and the Lorentz force generated by passing current through the coils drives the mover of the planar motor to move.

[0003] The key technical indicators among them are the output performance and heat dissipation performance of the coil; improving the output performance can meet the requirements of the load of the precision metering device above the lithography system, and can also increase the acceleration in the lithography system, so as to meet the requirements of rapid acceleration and deceleration in the motion state; and currently the coil groups in the mover platform all use ordinary circular coils as the Lorentz force generating components, and the use of circular coils has insufficient slot fill rate, so its output performance still has room for improvement. Summary of the invention

[0004] The object of the present invention is to provide a planar motor mover based on a flat coil to solve the problem of poor heat dissipation and inductance of the coil, which causes the coil to be unfavorable for the response of the device.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is as follows: the invention includes a mover frame housing and a flat coil module, and also includes a magnet and a water cooling component; a water cooling pipe placement groove and a coil group placement groove are provided on the inner side of the mover frame housing, and two groups of water cooling pipe placement grooves and coil group placement grooves are alternately arranged, a water cooling component is arranged in the water cooling pipe placement groove, and a flat coil module is arranged in the coil group placement groove, and the mover frame housing is fixedly arranged on the top surface of the magnet;

[0006] Furthermore, by supplying three-phase electricity to the three flat coils, Lorentz force is generated under the action of the magnetic field to drive the planar motor rotor, and the rotor is cooled by a reserved water cooling component.

[0007] There are four groups of flat coil modules, each group of flat coil modules is composed of three flat coils, and the cross section of each flat coil is a rectangular structure;

[0008] Furthermore, by setting up a flat coil with a rectangular cross-section, the slot fill rate of the flat coil is improved, which can achieve an increase in thrust and current density, which means that the use of a flat coil can enable the mover to produce a greater output, which can not only improve the mover's ability to carry high-precision measuring equipment, but also improve the mover platform's own response capability to switching of motion states.

[0009] Each flat coil is a runway-shaped structure when viewed from above. The length and width of the flat coil are set according to the magnetic pole pitch. The overall size of each flat coil is 112*28.2*7.2 mm. The gap in the middle of each flat coil is 5.3 mm. The overall size of each flat coil module is 112.*84.6*7.2 mm.

[0010] Furthermore, by arranging the flat coil in a racetrack-shaped structure, the contact area between the flat coil and the mover frame housing is increased, thereby improving the heat dissipation performance of the flat coil.

[0011] The mover frame shell is made of bakelite, and the size of the mover frame shell is 115*88*17 mm

[0012] Furthermore, by adopting bakelite as the material, the mover frame housing has good acid resistance, mechanical properties and heat resistance, and reduces the weight and ensures the heat dissipation effect.

[0013] The beneficial effects of the present invention are:

[0014] 1. The output performance can be improved by increasing the coil slot full rate. Since the heat dissipation of the coil is mainly through conduction heat dissipation, the use of flat wires can also ensure the heat dissipation capacity of the coil; and the flat coil reduces the inductance of the coil, which is of great significance to improving the response performance of the equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the cross-section of the movable frame housing of the present invention;

[0016] Figure 2 It is a schematic diagram of the structure of a single group of flat coils of the present invention;

[0017] Figure 3 It is a schematic diagram of the structure of a single flat coil of the present invention;

[0018] Figure 4 It is a schematic diagram of the cross-sectional structure of the flat coil of the present invention;

[0019] Figure 5 It is a schematic diagram of the top-sectional structure of the movable frame housing of the present invention;

[0020] Figure 6 It is a schematic diagram of the three-dimensional design of the mover frame housing and the flat coil module of the present invention;

[0021] Figure 7 It is a schematic diagram of the front view structure of the mover frame housing, the mover frame housing and the magnet of the present invention;

[0022] Figure 8 It is a schematic diagram of the top view structure of the mover frame housing, the mover frame housing and the magnet of the present invention;

[0023] Fig. 9 It is a schematic diagram of the cross-sectional structure of an ordinary round wire coil. DETAILED DESCRIPTION

[0024] The following will be combined with the attached Figure 1-9 , clearly and completely describe the technical solutions in the embodiments.

[0025] Specific implementation method 1: Figure 5-6 As shown, the planar motor rotor is composed of a rotor frame housing 1 and a flat coil module 2. The flat coil module 2 is provided in four groups, and each group of the flat coil module 2 is provided with three flat coils. Figure 7-8 As shown, three-phase electricity is passed through the three flat coils, and the Lorentz force is generated under the action of the magnetic field generated by the magnet 5 to drive the planar motor mover;

[0026] A three-phase flat coil is used to provide the main electromagnetic driving force. A single flat coil is in the shape of a racetrack. The length and width of the flat coil are set according to the magnetic pole pitch. The overall size of a single flat coil is 112*28.2*7.2mm. The gap between a single flat coil is 5.3mm. The overall size of a group of three-phase flat coils is 112.*84.6*7.2mm.

[0027] The use of flat coils can achieve an increase in thrust. The core reason is that the coil slot fill rate is increased, that is, the coil current density is increased.

[0028] If a normal round wire coil is used, the cross section of the round wire coil is as follows Fig. 9 As shown, there are many gaps in the round wire coil, and its slot filling rate is much smaller than that of the planar motor rotor using flat coils. The cross section of the flat coil is as follows: Figure 4 As shown, this means that the use of flat coils is far superior to the use of round coils in terms of current density, which means that the use of flat coils can make the mover produce greater output, which can not only improve the mover's ability to carry high-precision measuring equipment, but also improve the mover platform's own responsiveness to motion state switching;

[0029] Secondly, the use of the flat coil module 2 can improve the heat dissipation performance. For the heat dissipation performance of the flat coil module 2, the flat coil module 2 needs to be fixed in the mover frame housing 1 without flowing air. Therefore, the heat dissipation of the flat coil module 2 mainly relies on conduction heat dissipation rather than convection heat dissipation. In the determination of conduction heat dissipation performance, the larger the contact area of ​​conduction, the stronger the heat dissipation performance. The flat coil module 2 has a regular shape, such as Figure 1-3As shown, when the flat coil module 2 is placed in the coil group placement slot 4, the contact area between each other is close to 100%, while for ordinary round wire coils, the contact area between each coil is small and the conductive heat dissipation performance is poor. The water cooling assembly arranged in the water cooling pipe placement slot 3 can complete the heat dissipation operation of the flat coil module 2;

[0030] Finally, the use of flat coil module 2 can effectively reduce the coil inductance, because the use of flat wire can effectively reduce the number of coil turns. From the expression of inductance, it can be seen that when the overall size of the coil does not change (that is, the cross-sectional area of ​​the coil and the length of the coil do not change), the reduction in the number of coil turns can effectively reduce the inductance of the coil.

[0031]

[0032] In formula (1), L is the inductance (unit: Henry, H), μ is the vacuum magnetic permeability, N is the number of turns of the coil, A is the cross-sectional area of ​​the coil, and l is the length of the coil;

[0033] Therefore, reducing the coil inductance can improve the current response capability. Each coil can be regarded as a model of a resistor and an inductor in series, such as Figure 5 As shown;

[0034] Therefore, the current passing through the coil can be expressed as follows. Assuming that the current passing through is in the zero initial state, the current expression passing through the coil is as follows:

[0035]

[0036] As time approaches infinity, the current approaches the steady-state value The time it takes for the current to reach 90% of its steady-state value is defined as the response time t is , so we can get the following equation:

[0037]

[0038] After simplification, we can get;

[0039] When the inductance decreases, the response time of the current can be reduced, allowing it to quickly approach the steady-state current; this means that a planar motor actuator using a flat coil can improve its responsiveness to the switching of motion states during lithography.

[0040] The above is only a preferred embodiment of the present invention and does not limit the present invention in any form. Although the present invention has been disclosed as a preferred embodiment as above, it is not used to limit the present invention. Any technician familiar with this profession can make some changes or modify the technical contents disclosed above into equivalent embodiments without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent replacement and improvement made to the above embodiments without departing from the content of the technical solution of the present invention, based on the technical essence of the present invention, within the spirit and principles of the present invention, still fall within the protection scope of the technical solution of the present invention.

Claims

1. A planar motor based on a flat coil, comprising a motor frame housing (1) and a flat coil module (2), characterized in that: Also includes a magnet (5) and a water cooling assembly; A water cooling pipe placement groove (3) and a coil group placement groove (4) are provided on the inner side of the mover frame housing (1); two groups of the water cooling pipe placement grooves (3) and the coil group placement grooves (4) are alternately arranged; a water cooling assembly is arranged in the water cooling pipe placement groove (3); a flat coil module (2) is arranged in the coil group placement groove (4); and the mover frame housing (1) is fixedly arranged on the top surface of the magnet (5).

2. A planar motor mover based on a flat coil according to claim 1, characterized in that: Four groups of flat coil modules (2) are provided, each group of flat coil modules (2) is composed of three flat coils, and the cross section of each flat coil is a rectangular structure.

3. A planar motor mover based on a flat coil according to claim 2, characterized in that: Each flat coil is arranged in a racetrack-shaped structure when viewed from above, and the length and width of the flat coil are arranged according to the magnetic pole pitch.

4. A planar motor mover based on a flat coil according to claim 1, characterized in that: The mover frame housing (1) is made of bakelite, and the size of the mover frame housing (1) is 115*88*17 mm.

5. A planar motor mover based on a flat coil according to claim 2, characterized in that: The overall size of each flat coil is 112*28.2*7.2 mm, the middle gap of each flat coil is 5.3 mm, and the overall size of each group of flat coil modules (2) is 112.*84.6*7.2 mm.

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