A cadmium telluride crystal annealing device

Abstract

The present invention provides a cadmium telluride crystal annealing device, which belongs to the technical field of annealing devices, and includes an annealing furnace and a feeding assembly arranged in the annealing furnace, and the inner walls of the openings at both ends of the annealing furnace are installed with outer sealing rings. In the invention, during the cadmium telluride annealing process, argon gas is used to reduce the biochemical dynamics of cadmium, inhibit the formation of new vacancy defects, and enable the crystal structure to maintain relatively better integrity. At the same time, the added chromium chloride, indium and aluminum are vaporized during the heating process to interact with the relevant elements in the crystal, so that the distribution of the elements inside the crystal is more uniform. Two groups of mounting seats are set to feed the crystals after annealing and the crystals to be annealed at the same time, so as to improve the continuity of the annealing process and thus improve the efficiency of annealing. In addition, the set limit frame limits and fixes the crystals entering the furnace body during the feeding process, and releases the fixation of the crystals after unloading, so as to abandon manual work to achieve rapid fixation of the cadmium telluride crystals.

Description

Technical Field

[0001] The present invention relates to the technical field of annealing devices, and in particular to a cadmium telluride crystal annealing device. Background Art

[0002] Cadmium telluride is an important II-VI compound semiconductor material with a zinc blende crystal structure. It has a direct transition band structure, a lattice constant of 0.6481nm, a bandgap of 1.5eV (25°C), a room temperature electron mobility of 1050Cm2 / (V s), a room temperature hole mobility of 80Cm2 / (V s), and an electron effective mass of 0.096.

[0003] In the prior art, cadmium telluride crystals are prone to problems such as uneven composition, Cd vacancies, Te precipitation phases, and structural performance defects during the growth process. These defects seriously affect the electrical properties of cadmium telluride crystals, and thus have an adverse effect on the efficiency of equipment such as photon CT detectors based on cadmium telluride crystals; however, traditional annealing devices cannot effectively suppress new vacancy defects generated during annealing, nor can they solve the problem of uneven crystal composition, which in turn affects the quality of subsequent cadmium telluride crystals. At the same time, cadmium telluride crystals need to be manually loaded and unloaded before and after annealing, which is inefficient. How to invent a cadmium telluride crystal annealing device to solve these problems has become an urgent problem for those skilled in the art. Summary of the invention

[0004] In order to make up for the above shortcomings, the present invention provides a cadmium telluride crystal annealing device, which aims to solve the problem that traditional annealing devices cannot effectively suppress new vacancy defects generated during the annealing process, and cannot well solve the problem of uneven crystal composition, thereby affecting the quality of subsequent cadmium telluride crystals.

[0005] The present invention is achieved in that:

[0006] The present invention provides a cadmium telluride crystal annealing device, comprising an annealing furnace and a feeding assembly arranged in the annealing furnace, the inner walls at the openings at both ends of the annealing furnace are equipped with outer sealing rings, the upper two inner walls of the annealing furnace are respectively equipped with a vacuum tube and an argon tube, an electric heating wire is installed inside the annealing furnace, the inner side walls at both ends of the annealing furnace are provided with positioning grooves, the inner wall of the positioning groove is equipped with an inner sealing ring, the bottom of the annealing furnace is equipped with a fixing seat, the two ends of the fixing seat are respectively equipped with a screw and a guide rod, and a motor is installed on the side wall of one end of the fixing seat close to the screw;

[0007] The feeding assembly includes a mounting seat, a first fixed rod, an outer sealing plate, a second fixed rod and an inner sealing plate. The two side walls of the mounting seat are fixedly connected to the first fixed rod and the second fixed rod respectively. The inner sealing plate is fixedly connected to one end of the second fixed rod of another feeding assembly. The two feeding assemblies share the same inner sealing plate. Three grooves are provided on the top of the mounting seat. Symmetrical sliders are installed on the side walls of the outer sealing plate. The inner wall of one of the sliders is threadedly connected to the outer wall of the screw rod, and the inner wall of the other slider is slidably connected to the outer wall of the guide rod.

[0008] Preferably, valves are installed at one end of the vacuum tube and the argon tube respectively, and the vacuum tube is externally connected to a vacuum pump.

[0009] Preferably, both ends of the screw are rotatably connected to the inner walls of the sliders outside the outer sealing plates of the two feeding assemblies respectively, and one end of the screw is fixedly connected to the output end of the motor.

[0010] Preferably, one side outer wall of the two outer sealing plates is sealed to the outer sealing rings in the outer side walls at both ends of the annealing furnace, and the outer wall of the inner sealing plate is sealed to the outer wall of the inner sealing ring.

[0011] By adopting the above technical solution, the cadmium telluride crystal is placed on the mounting seat before annealing, and the chromium chloride, indium and aluminum solid particles are placed in the grooves respectively, so that the cadmium telluride crystal can be unloaded after the annealing in the annealing furnace is completed, and the unannealed cadmium telluride can be loaded at the same time. During the annealing process, the subsequent cadmium telluride crystal can be placed on the mounting seat to wait for subsequent loading, thereby improving the continuity of the annealing process, thereby improving the annealing efficiency, and the cadmium telluride crystal is controlled by a motor during the process of entering and pushing out of the annealing furnace, thereby solving the problem of manual loading and unloading of the cadmium telluride crystal, avoiding operators being too close to the furnace body and being scalded by high temperature, and improving the safety of the operation process.

[0012] Preferably, two groups of symmetrical sealing grooves are formed on the outer walls of one side of the two outer sealing plates, a penetrating through groove is formed on one side of the sealing groove, and two groups of sliding rods slidably connected to the inner walls of the through groove are installed on the inner walls of both sides of the fixing seat.

[0013] Preferably, symmetrical sliding grooves are provided on the outer walls of both sides of the mounting seat, and limiting grooves are provided on the inner walls of the sliding grooves.

[0014] Preferably, the inner wall of the slide groove is slidably connected with a positioning block, the upper end of the positioning block is provided with an inclined surface, the bottom end of the positioning block is equipped with a limit block slidably connected to the inner wall of the limit groove, and one end of the limit block is equipped with a spring fixedly connected to the inner wall of the slide groove.

[0015] Preferably, a sealing rod is installed at one end of the limit block away from the spring, and a sealing gasket sealed to the sealing groove is installed at one end of the sealing rod.

[0016] Preferably, the upper outer wall of the mounting seat is provided with a receiving groove, the inner wall of the receiving groove is slidably connected to a limit frame, the lower end of the limit frame is provided with two positioning rods slidably connected to the inner wall of the slide groove, and one end of the positioning rod is slidably connected to the inclined surface of the positioning block.

[0017] By adopting the above technical scheme, in the process of unloading the annealed crystal, when one side of the mounting seat approaches the sliding rod on one side of the fixed seat, the sliding rod passes through the through groove and abuts against the sealing gasket. At this time, the mounting seat continues to move so that the sealing gasket and the sealing rod are fixed against the positioning block at one end, and the sealing gasket is separated from the seal of the sealing groove. In this process, the spring is squeezed and the positioning rods on both sides of the mounting seat slowly move downward along the inclined surface of the positioning block under the action of gravity, and contact the inner wall of the outer sealing plate and one side of the fixed seat. At this time, the limit frame enters the storage groove, and the limit on the cadmium telluride crystal is released, so that the cadmium telluride crystal can be quickly taken out, and in the subsequent process of re-entering the furnace body for annealing, the limit frame is moved up to limit it, and manual work is abandoned to achieve rapid fixation of the cadmium telluride crystal, further improving the speed of loading and unloading of cadmium telluride, and ensuring the efficiency of subsequent annealing.

[0018] The beneficial effects of the present invention are:

[0019] During the annealing process of cadmium telluride, argon is used to reduce the biochemical dynamics of cadmium, inhibit the formation of new vacancy defects, and enable the crystal structure to maintain relatively better integrity. At the same time, the added chromium chloride, indium and aluminum are vaporized during the heating process to interact with the relevant elements in the crystal, making the distribution of the elements inside the crystal more uniform. The two sets of mounting seats are set to load the crystals after annealing while loading the crystals to be annealed later, thereby improving the continuity of the annealing process and thus improving the efficiency of annealing.

[0020] The process of cadmium telluride crystals entering and exiting the annealing furnace is controlled by a motor, which solves the need for manual loading and unloading of cadmium telluride crystals, avoids operators being too close to the furnace body and being burned by high temperature, improves the safety of the operation process, and the set limit frame limits and fixes the crystals entering the furnace body during the loading process, and releases the fixation of the crystals after unloading, abandoning manual labor to achieve rapid fixation of cadmium telluride crystals, further improves the loading and unloading speed of cadmium telluride, and ensures the efficiency of subsequent annealing. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0022] Figure 1 It is a schematic structural diagram of a cadmium telluride crystal annealing device provided in an embodiment of the present invention;

[0023] Figure 2 It is a partial structural cross-sectional view of a cadmium telluride crystal annealing device provided in an embodiment of the present invention;

[0024] Figure 3 A cadmium telluride crystal annealing device provided in an embodiment of the present invention Figure 2 A magnified view of the structure of the middle A area;

[0025] Figure 4 is a half-section diagram of the structure of a cadmium telluride crystal annealing device provided in an embodiment of the present invention;

[0026] Figure 5 A cadmium telluride crystal annealing device provided in an embodiment of the present invention Figure 4 A magnified view of the structure of the middle B area;

[0027] Figure 6 A cadmium telluride crystal annealing device provided in an embodiment of the present invention Figure 4 A magnified view of the structure of the middle C region;

[0028] Figure 7 This is a cadmium telluride crystal annealing process data table provided in an embodiment of the present invention.

[0029] In the figure: 1. annealing furnace; 11. vacuum tube; 12. argon gas tube; 13. fixing seat; 131. sliding rod; 14. motor; 15. screw; 16. guide rod; 17. heating wire; 18. positioning groove; 2. outer sealing ring; 21. inner sealing ring; 3. mounting seat; 31. groove; 32. first fixing rod; 321. outer sealing plate; 322. sliding block; 33. second fixing rod; 331. inner sealing plate; 34. sliding groove; 341. limiting groove; 35. positioning block; 351. limiting block; 352. spring; 353. sealing rod; 354. sealing pad; 36. limiting frame; 361. positioning rod; 37. storage groove; 38. sealing groove; 381. through groove. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] Example, see Figure 1-Figure 7 A cadmium telluride crystal annealing device comprises an annealing furnace 1 and a feeding assembly arranged in the annealing furnace 1, outer sealing rings 2 are installed on the inner walls at the two ends of the opening of the annealing furnace 1, a vacuum tube 11 and an argon gas tube 12 are installed on the upper two inner walls of the annealing furnace 1, an electric heating wire 17 is installed inside the annealing furnace 1, positioning grooves 18 are provided on the inner walls of the two ends of the annealing furnace 1, an inner sealing ring 21 is installed on the inner wall of the positioning groove 18, a fixing seat 13 is installed at the bottom of the annealing furnace 1, a screw 15 and a guide rod 16 are installed at the two ends of the fixing seat 13, and a motor 14 is installed on the side wall of one end of the fixing seat 13 close to the screw 15;

[0032] The feeding assembly includes a mounting seat 3, a first fixed rod 32, an outer sealing plate 321, a second fixed rod 33 and an inner sealing plate 331. The two side walls of the mounting seat 3 are fixedly connected to the first fixed rod 32 and the second fixed rod 33 respectively. The inner sealing plate 331 is fixedly connected to one end of the second fixed rod 33 of another feeding assembly. The two feeding assemblies share the same inner sealing plate 331. Three grooves 31 are opened on the top of the mounting seat 3. Symmetrical sliders 322 are installed on the side walls of the outer sealing plate 321. The inner wall of one slider 322 is threadedly connected to the outer wall of the screw rod 15, and the inner wall of the other slider 322 is slidably connected to the outer wall of the guide rod 16.

[0033] Furthermore, valves are installed at one end of the vacuum tube 11 and the argon tube 12 respectively, the vacuum tube 11 is externally connected to a vacuum pump, the two ends of the screw 15 are rotatably connected to the inner walls of the outer sliders 322 of the outer sealing plates 321 in the two feeding assemblies respectively, one end of the screw 15 is fixedly connected to the output end of the motor 14, the outer walls of one side of the two outer sealing plates 321 are respectively sealed with the outer sealing rings 2 in the outer walls at both ends of the annealing furnace 1, and the outer wall of the inner sealing plate 331 is sealed with the outer wall of the inner sealing ring 21.

[0034] It should be noted that:

[0035] Before annealing, the annealing furnace 1 is evacuated through the vacuum tube 11, and during the annealing process, argon gas is introduced into the furnace body through the argon gas tube to form a positive pressure. Annealing is performed under argon pressure to reduce the biochemical dynamics of cadmium, which means that the difficulty of cadmium atoms detaching from the crystal surface and becoming gaseous atoms increases. Vacancies that are easily formed due to the sublimation of cadmium atoms during the annealing process are not easy to form, thereby effectively inhibiting the generation of new vacancy defects, so that the crystal structure can maintain relatively better integrity. At the same time, the precipitation of tellurium and cadmium that will appear in the growth process of cadmium telluride crystals leads to uneven components. The added chromium chloride, indium and aluminum are vaporized during the heating process to compensate for them, and interact with the relevant elements in the crystal, so that the distribution of the elements inside the crystal is more uniform, thereby improving the uneven component phenomenon caused by element precipitation, and making the crystal closer to the ideal state in terms of chemical composition. This can ultimately increase the resistivity of the cadmium telluride crystal from 108Ω·cm to 1010Ω·cm, thereby improving the quality of the cadmium telluride crystal after annealing;

[0036] Before annealing, the cadmium telluride crystal is placed on the mounting seat 3, and the chromium chloride, indium and aluminum solid particles are placed in the groove 31 respectively. The screw 15 is driven by the motor 14 to rotate, so that the mounting seat 3 on one side is moved into the annealing furnace 1, and the mounting seat 3 on the other side is moved out of the annealing furnace 1. In this process, the outer sealing plate 321 close to one side is separated from the sealing fixation on the one side of the annealing furnace 1, and the inner sealing plate 331 is separated from the fixing of the positioning groove 18 on the inner wall of one side of the annealing furnace 1, and is moved to the positioning groove 18 in the inner wall of the other side of the annealing furnace 1 for sealing and fixing. At the same time, the other outer sealing plate 321 at one end is separated from the fixing of the positioning groove 18 on the inner wall of the annealing furnace 1, and is moved to the positioning groove 18 in the inner wall of the other side of the annealing furnace 1 for sealing and fixing. The plate 321 and the outer wall of the other end of the annealing furnace 1 are sealed and fixed, so that the cadmium telluride crystals can be unloaded after the annealing of the annealing furnace 1 is completed, and the unannealed cadmium telluride can be loaded at the same time. During the annealing process, the subsequent cadmium telluride crystals can be placed on the mounting seat 3 to wait for subsequent loading, thereby improving the continuity of the annealing process, thereby improving the annealing efficiency, and the cadmium telluride crystals are controlled by the motor 14 during the process of entering and pushing out of the annealing furnace 1, which solves the need for manual loading and unloading of the cadmium telluride crystals, avoids operators being too close to the furnace body and being burned by high temperature, and improves the safety of the operation process.

[0037] Furthermore, two sets of symmetrical sealing grooves 38 are provided on the outer wall of one side of the two outer sealing plates 321, and a through groove 381 is provided on one side of the sealing groove. Two sets of sliding rods 131 slidably connected to the inner walls of the through groove 381 are installed on the inner walls of the fixed seat 13 on both sides. Symmetrical sliding grooves 34 are provided on the outer walls of the mounting seat 3 on both sides. A limiting groove 341 is provided on the inner wall of the sliding groove 34. A positioning block 35 is slidably connected to the inner wall of the sliding groove 34. An inclined surface is provided on the upper end of the positioning block 35, and a limiting groove 341 is provided on the bottom end of the positioning block 35. Block 351, one end of the limit block 351 is equipped with a spring 352 fixedly connected to the inner wall of the slide groove 34, the end of the limit block 351 away from the spring 352 is equipped with a sealing rod 353, one end of the sealing rod 353 is equipped with a sealing gasket 354 sealed and connected to the sealing groove 38, the upper outer wall of the mounting seat 3 is provided with a receiving groove 37, the inner wall of the receiving groove 37 is slidably connected to the limit frame 36, the lower end of the limit frame 36 is equipped with two positioning rods 361 slidably connected to the inner wall of the slide groove 34, one end of the positioning rod 361 is slidably connected to the inclined surface of the positioning block 35.

[0038] It should be noted that: in the process of unloading the annealed crystal, the mounting seat 3 inside the furnace body moves to one side. At this time, the sealing gasket 354 at one end of the sealing rod 353 on both sides of the mounting seat 3 is tightly pressed against the sealing groove 38 under the action of the spring 352 to ensure the sealing of the outer sealing plate 321, thereby avoiding gas leakage in the annealing furnace 1 during the annealing process. When one side of the mounting seat 3 approaches the sliding rod 131 on one side of the fixing seat 13, the sliding rod 131 passes through the through groove 381 and abuts against the sealing gasket 354. At this time, the mounting seat 3 continues to move so that the sealing gasket 354 and the sealing rod 353 are pressed against the positioning block 35 at one end for fixation, and at the same time, the sealing gasket 354 is tightly pressed against the positioning block 35 at one end. The sealing gasket 354 is separated from the sealing groove 38. During this process, the spring 352 is squeezed and the positioning rods 361 on both sides of the mounting seat 3 slowly move downward along the inclined surface of the positioning block 35 under the action of gravity, and contact the inner wall of the outer sealing plate 321 and one side of the fixing seat 13. At this time, the limit frame 36 enters the storage groove 37, and the limit on the cadmium telluride crystal is released, so that the cadmium telluride crystal can be quickly taken out, and in the subsequent process of re-entering the furnace body for annealing, the limit frame 36 is moved up to limit it, abandoning manual to achieve rapid fixation of the cadmium telluride crystal, further improving the speed of loading and unloading cadmium telluride, and ensuring the efficiency of subsequent annealing.

[0039] The working principle of this cadmium telluride crystal annealing device:

[0040] Before annealing, the cadmium telluride crystal is placed on the mounting seat 3, and the chromium chloride, indium and aluminum solid particles are placed in the groove 31 respectively. The screw 15 is driven by the motor 14 to rotate, so that the mounting seat 3 on one side is moved into the annealing furnace 1, and the mounting seat 3 on the other side is moved out of the annealing furnace 1. In this process, the outer sealing plate 321 close to one side is separated from the sealing fixation on the one side of the annealing furnace 1, and the inner sealing plate 331 is separated from the fixing of the positioning groove 18 on the inner wall of one side of the annealing furnace 1, and is moved to the positioning groove 18 in the inner wall of the other side of the annealing furnace 1 for sealing and fixing. At the same time, the other outer sealing plate 321 at one end is separated from the fixing of the positioning groove 18 on the inner wall of the annealing furnace 1, and is moved to the positioning groove 18 in the inner wall of the other side of the annealing furnace 1 for sealing and fixing. The plate 321 and the outer wall of the other end of the annealing furnace 1 are sealed and fixed, so that the cadmium telluride crystals can be unloaded after the annealing of the annealing furnace 1 is completed, and the unannealed cadmium telluride can be loaded at the same time. During the annealing process, the subsequent cadmium telluride crystals can be placed on the mounting seat 3 to wait for subsequent loading, thereby improving the continuity of the annealing process, thereby improving the annealing efficiency, and the cadmium telluride crystals are controlled by the motor 14 during the process of entering and pushing out of the annealing furnace 1, which solves the need for manual loading and unloading of the cadmium telluride crystals, avoids operators being too close to the furnace body and being burned by high temperature, and improves the safety of the operation process.

[0041] It should be noted that the specific model and specifications of the motor need to be selected and determined based on the actual specifications of the device, and the specific selection calculation method adopts the existing technology in this field, so it will not be described in detail.

[0042] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A cadmium telluride crystal annealing device, comprising an annealing furnace (1) and a loading assembly arranged in the annealing furnace (1), characterized in that: The inner walls at the openings at both ends of the annealing furnace (1) are provided with outer sealing rings (2), the upper inner walls of the annealing furnace (1) are provided with vacuum tubes (11) and argon gas tubes (12), respectively, the interior of the annealing furnace (1) is provided with electric heating wires (17), the inner walls at both ends of the annealing furnace (1) are provided with positioning grooves (18), the inner walls of the positioning grooves (18) are provided with inner sealing rings (21), the bottom of the annealing furnace (1) is provided with a fixing seat (13), the two ends of the fixing seat (13) are provided with screws (15) and guide rods (16), respectively, and a motor (14) is provided on the side wall of one end of the fixing seat (13) close to the screw (15); The feeding assembly comprises a mounting seat (3), a first fixing rod (32), an outer sealing plate (321), a second fixing rod (33) and an inner sealing plate (331), the two side walls of the mounting seat (3) are fixedly connected to the first fixing rod (32) and the second fixing rod (33) respectively, the inner sealing plate (331) is fixedly connected to one end of the second fixing rod (33) of another feeding assembly, the two feeding assemblies share the same inner sealing plate (331), three grooves (31) are provided on the top of the mounting seat (3), the side wall of the outer sealing plate (321) is provided with symmetrical sliders (322), the inner wall of one of the sliders (322) is threadedly connected to the outer wall of the screw rod (15), and the inner wall of the other slider (322) is slidably connected to the outer wall of the guide rod (16); The outer walls of both sides of the mounting seat (3) are provided with symmetrical sliding grooves (34), the inner walls of the sliding grooves (34) are provided with limiting grooves (341), the upper outer wall of the mounting seat (3) is provided with a receiving groove (37), the inner wall of the receiving groove (37) is slidably connected to a limiting frame (36), the lower end of the limiting frame (36) is provided with two positioning rods (361) slidably connected to the inner wall of the sliding groove (34), and one end of the positioning rod (361) is slidably connected to the inclined surface of the positioning block (35).

2. The cadmium telluride crystal annealing device according to claim 1, characterized in that: Valves are respectively installed at one end of the vacuum tube (11) and the argon gas tube (12), and the vacuum tube (11) is externally connected to a vacuum pump.

3. The cadmium telluride crystal annealing device according to claim 2, characterized in that: Both ends of the screw rod (15) are rotatably connected to the inner walls of the outer sliding blocks (322) of the outer sealing plates (321) of the two feeding assemblies, respectively, and one end of the screw rod (15) is fixedly connected to the output end of the motor (14).

4. The cadmium telluride crystal annealing device according to claim 3, characterized in that: One side outer wall of the two outer sealing plates (321) is respectively sealed to the outer sealing rings (2) in the outer side walls at both ends of the annealing furnace (1), and the outer wall of the inner sealing plate (331) is sealed to the outer wall of the inner sealing ring (21).

5. The cadmium telluride crystal annealing device according to claim 1, characterized in that: Two groups of symmetrical sealing grooves (38) are provided on the outer walls of one side of the two outer sealing plates (321), a penetrating through groove (381) is provided on one side of the sealing groove (38), and two groups of sliding rods (131) slidably connected to the inner walls of the through groove (381) are installed on the inner walls of both sides of the fixing seat (13).

6. The cadmium telluride crystal annealing device according to claim 1, characterized in that: A positioning block (35) is slidably connected to the inner wall of the slide groove (34), an inclined surface is provided at the upper end of the positioning block (35), a limiting block (351) slidably connected to the inner wall of the limiting groove (341) is installed at the bottom end of the positioning block (35), and a spring (352) fixedly connected to the inner wall of the slide groove (34) is installed at one end of the limiting block (351).

7. The cadmium telluride crystal annealing device according to claim 6, characterized in that: A sealing rod (353) is installed at one end of the limit block (351) away from the spring (352), and a sealing gasket (354) is installed at one end of the sealing rod (353) and is sealed to the sealing groove (38).

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