Service performance map driven compliant flight task mechanism design method

Abstract

The application discloses a service performance map driven compliant flight operation mechanism design method, comprising the following steps: obtaining a service performance index of a compliant flight operation. A theoretical performance map and a calculation model are constructed according to the service performance index and a theoretical performance index associated therewith. The calculation model is optimized to obtain a design model, and the associated experimental performance index is screened according to the service performance index and the theoretical performance index to construct an experimental performance map. The service performance index is tested and a service performance map is constructed. The service performance map is used as a full closed-loop feedback, the experimental performance map and the theoretical performance map are used as a semi-closed-loop feedback, and the design model is optimized. The above steps are repeated until the design optimization of the compliant flight operation mechanism is completed. Compared with the traditional technology, the application takes the statics performance, the dynamics performance and the reliability performance of the mechanism as the optimization target, designs the mechanism configuration and the scale parameter, and meets the design requirements of multiple performance indexes.

Description

Technical Field

[0001] This invention relates to the field of technology, and more specifically, to a design method for a compliant flight operation mechanism driven by service performance maps. Background Technology

[0002] In microelectronic equipment, the working mechanism, as the end effector performing precision operations, directly impacts the technical specifications of the entire equipment. Traditional rigid working mechanisms often suffer from vibration transmission and motion lag issues when dealing with the complex and ever-changing microelectronic manufacturing environment, making it difficult to meet the demands for high precision, high speed, and high flexibility. Therefore, compliant flying working mechanisms have emerged. Compliant flying working mechanisms utilize the elastic deformation of their components to complete the transmission and conversion of motion and force. They abandon the rigid kinematic pairs of traditional rigid mechanisms, employing flexible units as core components. This results in a more compact and lightweight structure, reducing the number of parts and installation costs, while improving system reliability and stability. Leveraging the characteristics of compliant mechanisms, vibration and impact are reduced through active or passive means, improving operational stability and precision, making them suitable as end effectors in microelectronic equipment. Optimizing the dimensional parameters to achieve optimal performance for compliant flying working mechanisms, and realizing service performance that meets expected requirements, remains a current technical challenge.

[0003] Existing technology discloses a stress-constrained topology optimization method for compliant mechanisms based on isogeometric analysis. This method includes defining the design domain of the compliant mechanism, initializing its design parameters, and expressing the geometric model of the compliant mechanism using NURBS curves based on these parameters. The design domain is discretized into a geometric analysis mesh, and the structural displacement function is solved. Density variables are introduced at control points to obtain control point densities, which are then smoothed. The normal equivalent stress at Gaussian integration points is calculated, and the maximum normal equivalent stress of the compliant mechanism is solved using the P-norm method. A topology optimization model is established based on the smoothed control point density, with the maximization of the compliant mechanism's output displacement as the objective function, the maximum normal equivalent stress, and the volume fraction of the compliant mechanism as constraints. The optimized topology optimization model is then solved using a moving asymptotic algorithm. The drawback of this approach is that, since multiple performance indicators are often contradictory, the above technical solution cannot effectively find the optimal balance point among these performance indicators.

[0004] Therefore, in light of the above requirements and the shortcomings of existing technologies, this application proposes a service performance map-driven design method for compliant flight operation mechanisms. Summary of the Invention

[0005] This invention provides a service performance map-driven design method for compliant flight operation mechanisms. The method optimizes the mechanism's static, dynamic, and reliability performance, and designs the mechanism's configuration and dimensional parameters to meet the design requirements of multiple performance indicators.

[0006] The primary objective of this invention is to solve the aforementioned technical problems. The technical solution of this invention is as follows:

[0007] The first aspect of this invention provides a design method for a compliant flight operation mechanism driven by service performance maps. This method includes the following steps:

[0008] S1. Conduct research on the compliant flight operation of microelectronic devices to obtain service performance indicators.

[0009] S2. Construct a theoretical performance map and a calculation model for the compliant flight operation mechanism based on the service performance indicators and their associated theoretical performance indicators.

[0010] S3. Optimize the calculation model to obtain the configuration and structural parameter design model. Select relevant experimental performance indicators based on service performance indicators and theoretical performance indicators, construct experimental performance spectrum, process prototypes and conduct tests.

[0011] S4. Install the prototype into a microelectronic device, test its service performance indicators, and construct a service performance map.

[0012] S5. Use the service performance map as a fully closed-loop feedback and the experimental performance map and theoretical performance map as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model.

[0013] S6. Repeat steps S2-S6 until the service performance map meets expectations, and complete the design optimization of the compliant flight operation mechanism.

[0014] Further, in steps S1 and S2, the service performance indicators include: production capacity, yield, stability and reliability. The theoretical performance indicators associated with the service performance indicators include: static performance indicators, dynamic performance indicators and reliability performance indicators. The calculation model constructed based on the theoretical performance indicators is: static performance indicator function f1, dynamic performance indicator function f2 and reliability performance indicator function f3.

[0015] Further, in step S2, the process of constructing the theoretical performance map includes:

[0016] S21. Establish a static model of the compliant flight operation mechanism and calculate its static performance indicators. Specifically, based on the finite element theory, simplify the compliant flight operation mechanism into a unit model composed of beam elements and hinge elements, establish the element stiffness matrix of each element, transform and combine the element stiffness matrices to obtain the overall stiffness matrix, and solve the displacement of each node based on the overall stiffness matrix and the force conditions of each node.

[0017] S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance index. Specifically, based on the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism based on the overall mass matrix and the overall stiffness matrix.

[0018] S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators. Specifically, obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether the maximum stress exceeds the allowable stress of the mechanism.

[0019] Furthermore, in step S3, the configuration and structural parameter design model is obtained by solving the Pareto front end after determining the optimization objective, constraints, design variables and their value ranges by the static performance index function f1, dynamic performance index function f2 and reliability performance index function f3, and then obtaining the result through a decision algorithm.

[0020] Furthermore, step S3 specifically includes the following steps:

[0021] S31. Based on the operational requirements of microelectronic equipment, determine the specific indicators of the service performance spectrum of the compliant mechanism.

[0022] S32. Based on specific indicators, determine the dimensional parameters that play a decisive role in the specific indicators as the dimensional parameters to be optimized; determine their optimization range based on the dimensional constraints during assembly.

[0023] S33. Based on the extracted dimensional parameters to be optimized, establish static performance index function f1, dynamic performance index function f2, and reliability performance index function f3.

[0024] S34. Normalization process, establish comprehensive performance index function f4, and use optimization algorithm to determine the final structural parameters.

[0025] Further, in step S32, the size parameter to be optimized is:

[0026] x l =[l1,l2,l3] T

[0027] x t =[t1,t2,t3,t4,t5,t6,t7,t8,t9] T

[0028] x R =[r1,r2,r3,r4,r5,r6] T

[0029] Where, x lThis represents the vector of length parameters to be optimized extracted by the mechanism, where l represents the length parameter to be optimized, and x represents the length parameter to be optimized. t The vector of thickness parameters to be optimized extracted by the mechanism, x R This represents the vector of flexible hinge radius parameters extracted by the mechanism, where t represents the thickness parameter to be optimized and r represents the flexible hinge radius parameter to be optimized.

[0030] Furthermore, in step S33, before establishing the static performance index function f1, the dynamic performance index function f2, and the reliability performance index function f3, it is necessary to convert the beam elements and hinge elements into element matrices. Specifically, establishing the static performance index function f1 requires converting the beam elements into element stiffness matrices in local coordinates.

[0031]

[0032] Among them, K i,j Let the local element stiffness matrix be the stiffness matrix between the i-th node and the j-th node. The following transformation formula is used to transform the local element stiffness matrix into global coordinates to obtain the global element stiffness matrix:

[0033]

[0034]

[0035] Where α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system, the element stiffness matrix in the global coordinate system in the transformation formula is expanded into the following 3n×3n matrix, resulting in:

[0036]

[0037] Where n is the number of nodes, the overall stiffness matrix K is obtained by superimposing the matrices of all expanded elements sequentially, and the displacement of each node is U = K. -1 F, where F represents the force at each node, and finally, the static performance index function f1 is the mechanism amplification ratio:

[0038]

[0039] Where, δ out δ represents the displacement at the output end of the mechanism. in The displacement is input to the mechanism.

[0040] Furthermore, to establish the dynamic performance index function f2, it needs to be calculated using the element mass matrix, which is:

[0041]

[0042] Based on the aforementioned transformation formula, and further expanded to a 3n×3n matrix in global coordinates, the overall mass matrix is ​​obtained by sequentially superimposing these matrices:

[0043]

[0044] det([K]-ω 2 [M])=0

[0045] Solving the above equations yields n characteristic solutions, where the characteristic values ​​are ω1, ω2, ..., ω. n The system has n natural frequencies, with the first natural frequency serving as the dynamic performance index function.

[0046] Furthermore, when establishing the reliability performance index function f3, it is necessary to calculate the relationship between the maximum stress and the maximum rotational deformation of the straight circular hinge, specifically:

[0047]

[0048] Where, σ max The maximum stress is represented by E, the elastic modulus of the material is represented by t, and the thickness of the straight circular hinge is represented by α. max Let σ represent the maximum rotatable deformation angle, and R represent the radius of the straight circular flexible hinge. The above formula determines the reliability of the mechanism by judging whether its maximum stress exceeds the allowable stress of the mechanism material, and uses the maximum stress as the reliability performance index function f3. max When ≤[σ], f3=1; when σ max When [σ] >, f3 = 0.

[0049] Further, steps S34 to S37 specifically involve: dividing the static performance index function f1 and the dynamic performance index function f2 into regional weight factors to obtain the comprehensive performance index function f4 = (w1f1 + w2f2)f3 of the compliant flight operation mechanism, where w1 represents the weight coefficient of the static performance index function and w2 represents the weight coefficient of the dynamic performance index function.

[0050] The intelligent optimization algorithm includes the following steps:

[0051] S35. For the comprehensive performance index function f4, the particle swarm optimization algorithm is used to perform single-objective optimization to obtain the optimal structural parameter x1.

[0052] S36. For the static performance index function f1, dynamic performance index function f2, and reliability performance index function f3, a multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameter x2.

[0053] S37. Compare the theoretical performance spectra corresponding to structural parameter x1 and structural parameter x2 to determine the final structural parameters.

[0054] Compared with the prior art, the beneficial effects of the technical solution of the present invention are:

[0055] This invention provides a service performance map-driven design method for compliant flight operation mechanisms. Based on the service performance map, static performance indicators, dynamic performance indicators, and reliability performance indicators are modeled. By using experimental performance maps and theoretical performance maps as semi-closed-loop feedback in the process, the optimized configuration and structural parameter design model can show the mutual influence and constraint relationships between various performance indicators, providing designers with all non-dominated solutions for multi-objective optimization, and determining the most suitable mechanism configuration and structural parameters for specific microelectronic equipment flight operations. Attached Figure Description

[0056] Figure 1 This is a flowchart illustrating the design method of a compliant flight operation mechanism driven by the service performance map of this invention.

[0057] Figure 2 This is a schematic diagram of a performance graph-driven design method in one embodiment of the present invention.

[0058] Figure 3 This is a schematic diagram of the compliant flight photography mechanism structure in one embodiment of the present invention.

[0059] Figure 4 This is a schematic diagram of the compliant flying crystal-piercing mechanism structure in one embodiment of the present invention.

[0060] Figure 5 This is a diagram showing the optimized parameters of a compliant flight shooting mechanism in one embodiment of the present invention.

[0061] Figure 6 This is a diagram showing the optimized parameters of the compliant flying crystal-piercing mechanism in one embodiment of the present invention.

[0062] Figure 7 This is a node diagram of a compliant flight shooting mechanism in one embodiment of the present invention. The numbers in the diagram are the serial numbers of each node in the simplified unit model of the compliant flight shooting mechanism.

[0063] Figure 8 This is a unit diagram of a compliant flight shooting mechanism in one embodiment of the present invention. The numbers in the diagram are the serial numbers of each unit in the simplified unit model of the compliant flight shooting mechanism.

[0064] Figure 9 This is a node diagram of a compliant flying crystal-piercing mechanism in one embodiment of the present invention. The numbers in the diagram are the serial numbers of each node in the simplified unit model of the compliant flying crystal-piercing mechanism.

[0065] Figure 10 This is a unit diagram of a compliant flying crystal-piercing mechanism in one embodiment of the present invention. The numbers in the diagram are the serial numbers of each unit in the simplified unit model of the compliant flying crystal-piercing mechanism.

[0066] Figure 11 This is a simplified mass-spring model diagram of a compliant flight shooting mechanism in one embodiment of the present invention.

[0067] Figure 12 This is a schematic diagram of the magnification mechanism of the compliant flight photography mechanism in one embodiment of the present invention. Detailed Implementation

[0068] To better understand the above-mentioned objectives, features, and advantages of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0069] Many specific details are set forth in the following description in order to provide a full understanding of the invention. However, the invention may also be practiced in other ways different from those described herein, and therefore the scope of protection of the invention is not limited to the specific embodiments disclosed below.

[0070] Example 1

[0071] like Figure 1 As shown, this invention provides a design method for a compliant flight operation mechanism driven by service performance maps. This method includes the following steps:

[0072] S1. Conduct research on the compliant flight operation of microelectronic devices to obtain service performance indicators.

[0073] S2. Construct a theoretical performance map and a calculation model for the compliant flight operation mechanism based on the service performance indicators and their associated theoretical performance indicators.

[0074] S3. Optimize the calculation model to obtain the configuration and structural parameter design model. Select relevant experimental performance indicators based on service performance indicators and theoretical performance indicators, construct experimental performance spectrum, process prototypes and conduct tests.

[0075] S4. Install the prototype into a microelectronic device, test its service performance indicators, and construct a service performance map.

[0076] S5. Use the service performance map as a fully closed-loop feedback and the experimental performance map and theoretical performance map as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model.

[0077] S6. Repeat steps S2-S6 until the service performance map meets expectations, and complete the design optimization of the compliant flight operation mechanism.

[0078] In steps S1 and S2, the service performance indicators include: production capacity, yield, stability, and reliability. The theoretical performance indicators associated with the service performance indicators include: static performance indicators, dynamic performance indicators, and reliability performance indicators. The calculation model constructed based on the theoretical performance indicators is: static performance indicator function f1, dynamic performance indicator function f2, and reliability performance indicator function f3.

[0079] It should be noted that, as Figure 2 As shown, the design of compliant mechanisms often requires consideration of multiple performance indicators simultaneously. These indicators are interconnected and mutually restrictive. For example, the static performance indicator of the mechanism's magnification ratio is inversely related to its dynamic performance indicator of the mechanism's first natural frequency; increasing the static performance indicator's magnification ratio will lead to a decrease in its dynamic performance indicator's first natural frequency. By adjusting design parameters and finding a balance point in the performance spectrum, the synergistic optimization of multiple performance indicators can be achieved.

[0080] In one specific embodiment, the compliant flight focusing mechanism needs to be assembled in Figure 3 In the LDI machine shown, the depth of field of the industrial camera in the LDI machine is 0.54mm. To meet its focusing requirements, the maximum stroke of the compliant flight focusing mechanism needs to reach more than 1.08mm. At the same time, in order to achieve the function of fast focusing, the first natural frequency of the compliant flight focusing mechanism should be above 350Hz.

[0081] In step S2, the process of constructing the theoretical performance map includes:

[0082] S21. Establish a static model of the compliant flight operation mechanism and calculate its static performance indicators. Specifically, based on the finite element theory, simplify the compliant flight operation mechanism into a unit model composed of beam elements and hinge elements, establish the element stiffness matrix of each element, transform and combine the element stiffness matrices to obtain the overall stiffness matrix, and solve the displacement of each node based on the overall stiffness matrix and the force conditions of each node.

[0083] S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance index. Specifically, based on the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism based on the overall mass matrix and the overall stiffness matrix.

[0084] S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators. Specifically, obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether the maximum stress exceeds the allowable stress of the mechanism.

[0085] In step S3, the configuration and structural parameter design model is obtained by solving the Pareto front end after determining the optimization objective, constraints, design variables and their value ranges by the static performance index function f1, dynamic performance index function f2 and reliability performance index function f3, and then obtaining the result through a decision algorithm.

[0086] Furthermore, step S3 specifically includes the following steps:

[0087] S31. Based on the operational requirements of microelectronic equipment, determine the specific indicators of the service performance spectrum of the compliant mechanism.

[0088] S32. Based on specific indicators, determine the dimensional parameters that play a decisive role in the specific indicators as the dimensional parameters to be optimized; determine their optimization range based on the dimensional constraints during assembly.

[0089] S33. Based on the extracted dimensional parameters to be optimized, establish static performance index function f1, dynamic performance index function f2, and reliability performance index function f3.

[0090] S34. Normalization process, establish comprehensive performance index function f4, and use optimization algorithm to determine the final structural parameters.

[0091] In step S32, in a specific embodiment, the structural parameters, flexible hinge parameters, and other important dimensional parameters of the compliant flight focusing mechanism are parameters to be optimized, such as... Figure 5 As shown, the size parameter to be optimized is:

[0092] x l =[l1,l2,l3] T

[0093] x t =[t1,t2,t3,t4,t5,t6,t7,t8,t9] T

[0094] x R =[r1,r2,r3,r4,r5,r6] T

[0095] Where, x l This represents the vector of length parameters to be optimized extracted by the mechanism, where l represents the length parameter to be optimized, and x represents the length parameter to be optimized. t The vector of thickness parameters to be optimized extracted by the mechanism, x R This represents the vector of flexible hinge radius parameters extracted by the mechanism, where t represents the thickness parameter to be optimized and r represents the flexible hinge radius parameter to be optimized.

[0096] In one specific embodiment, the dimensions of the compliant aircraft operating mechanism should be limited to 200*165*20mm. 3 Within.

[0097] It should be noted that, based on finite element theory, the compliant flight operation mechanism is simplified into a unit model composed of beam elements and hinge elements, as shown below. Figure 7 and Figure 8 As shown.

[0098] In step S33, before establishing the static performance index function f1, the dynamic performance index function f2, and the reliability performance index function f3, it is necessary to convert the beam elements and hinge elements into element matrices. Specifically, establishing the static performance index function f1 requires converting the beam elements into element stiffness matrices in local coordinates.

[0099]

[0100] Among them, K i,j Let the local element stiffness matrix be the stiffness matrix between the i-th node and the j-th node. The following transformation formula is used to transform the local element stiffness matrix into global coordinates to obtain the global element stiffness matrix:

[0101]

[0102]

[0103] Where α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system, the element stiffness matrix in the global coordinate system in the transformation formula is expanded into the following 3n×3n matrix, resulting in:

[0104]

[0105] Where n is the number of nodes, the overall stiffness matrix K is obtained by superimposing the matrices of all expanded elements sequentially, and the displacement of each node is U = K. -1 F, where F represents the force at each node, and finally, the static performance index function f1 is the mechanism amplification ratio:

[0106]

[0107] Where, δ out δ represents the displacement at the output end of the mechanism. in The displacement is input to the mechanism.

[0108] Furthermore, to establish the dynamic performance index function f2, it needs to be calculated using the element mass matrix, which is:

[0109]

[0110] According to the conversion formula and further expand it into a 3n×3n matrix in the global coordinates, and then obtain the overall mass matrix by successive superposition:

[0111]

[0112] det([K]-ω 2 [M])=0

[0113] By solving the above equation, n characteristic solutions can be obtained, where the characteristic values ω1, ω2, …, ω n represent the n natural frequencies of the system. Then, taking the first natural frequency as the dynamic performance index function

[0114] Furthermore, when establishing the reliability performance index function f3, it is necessary to calculate the relationship between the maximum stress and the maximum rotational deformation of the straight circular hinge. Specifically:

[0115]

[0116] where, σ max represents the maximum stress, E represents the elastic modulus of the material, t represents the thickness of the straight circular hinge, α max represents the maximum rotatable deformation angle, and R represents the radius of the straight circular flexible hinge; the above formula determines whether the mechanism is reliable by judging whether its maximum stress is greater than the allowable stress of the mechanism material, and takes the maximum stress as the reliability performance index function f3. When σ max ≤[σ], f3 = 1; when σ max >[σ], f3 = 0.

[0117] Example 2

[0118] Based on the above Example 1, combined with Figures 2-4 , this example elaborates in detail the specific process of optimizing the model by using the intelligent optimization algorithm in the present invention.

[0119] Furthermore, steps S34 to S37 are specifically: divide the static performance index function f1 and the dynamic performance index function f2 into regional weight factors, and obtain the comprehensive performance index function f4 = (w1f1 + w2f2)f3 of the compliant flight operation mechanism, where w1 represents the weight coefficient of the static performance index function, and w2 represents the weight coefficient of the dynamic performance index function.

[0120] It should be noted that the division of the regional weight factors is specifically: when f1 < 8, w1 = 0; when 8 < f1 < 12, w1 = 1; when f2 < 200, w2 = 0; when 200 < f2 < 300, w2 = 1; when 300 < f2 < 350, w2 = 1.2.

[0121] The intelligent optimization algorithm includes the following steps:

[0122] S35. For the comprehensive performance index function f4, the particle swarm optimization algorithm is used to perform single-objective optimization to obtain the optimal structural parameter x1.

[0123] S36. For the static performance index function f1, dynamic performance index function f2, and reliability performance index function f3, a multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameter x2.

[0124] S37. Compare the theoretical performance spectra corresponding to structural parameter x1 and structural parameter x2 to determine the final structural parameters.

[0125] In step S33, the kinetic energy, potential energy, and elastic potential energy of each component of the mechanism can be analyzed; the dynamic performance index function f2 of the mechanism can be established using the Lagrange equation method; and the simplified mass-spring diagram of the mechanism is shown below. Figure 11 As shown, the schematic diagram of the amplification mechanism is as follows. Figure 12 Show;

[0126] The equivalent kinetic energy of the mechanism is:

[0127]

[0128] Where n2 = 2, n3 = 2, n4 = 2, n5 = 2, and I2, I4, I5 represent the moments of inertia of M2, M4, and M5, respectively.

[0129] The dynamic equation of the system is:

[0130] in:

[0131]

[0132] F in Let y1 be the input force, and y2 be the displacement of node 2 in the y-direction. Then the natural frequency of the mechanism is:

[0133]

[0134] The first natural frequency is used as the dynamic performance index function f2;

[0135]

[0136] Example 3

[0137] Based on the above embodiments 1 and 2, as Figure 4 , Figure 6 , Figure 9 , Figure 10As shown, this embodiment uses the dimensional parameter optimization design of a compliant flying crystal-piercing mechanism as an example to illustrate the specific implementation steps of the present invention.

[0138] S1: Based on Figure 4 Investigate the compliant flight operation of microelectronic equipment and extract key service performance indicators;

[0139] S2: Select relevant theoretical performance indicators based on service performance indicators, derive the calculation model of the compliant flight operation mechanism, and construct a theoretical performance map;

[0140] S3: Determine the optimization objective, constraints, design variables and their value ranges, use intelligent algorithms to solve the Pareto front end, and obtain the optimal configuration and structural parameters through decision algorithms;

[0141] S4: Select relevant experimental performance indicators based on service performance indicators and theoretical performance indicators, process and test prototypes, and construct experimental performance maps;

[0142] S5: Install the prototype of the compliant flight operation mechanism on microelectronic equipment, test its service performance indicators, and construct a service performance map;

[0143] S6: The service performance map serves as the final closed-loop feedback, while the experimental performance map and theoretical performance map serve as semi-closed-loop feedback during the process, thus improving the configuration and structural parameter design model.

[0144] S7: Repeat S2-S6 until the expected service performance profile is achieved.

[0145] In the specific implementation process, the calculation of static performance indicators, dynamic performance indicators and reliability performance indicators in step S1 is basically similar to the process of establishing static performance indicator function f1, dynamic performance indicator function f2 and reliability performance indicator function f3 in step S23. The difference is that the calculation of static performance indicators, dynamic performance indicators and reliability performance indicators does not require extracting the structural parameters of the compliant aircraft operating mechanism as design variables. Instead, the static performance indicators, dynamic performance indicators and reliability performance indicators are directly calculated through the specific structural parameters of the compliant aircraft operating mechanism under the initial configuration.

[0146] In the specific implementation process, the specific steps for establishing the multi-objective optimization model in step S2 include:

[0147] S21: Based on the operational requirements of microelectronic equipment, determine the specific indicators of the service performance spectrum of the compliant mechanism.

[0148] To complete the crystal-piercing action, the compliant flying crystal-piercing mechanism must have a maximum stroke of 0.8 mm or more, and to achieve rapid crystal piercing, its first-order natural frequency should be above 600 Hz.

[0149] S22: Based on specific indicators, determine the dimensional parameters that play a decisive role in those indicators; based on dimensional constraints during assembly, determine their optimization range.

[0150] Extract the structural parameters, flexible hinge parameters, and other important dimensional parameters of the compliant flying crystal mechanism as parameters to be optimized, such as... Figure 6 As shown, the extracted parameters are

[0151] x l =[l1,l2,l3,l4,l5,l6] T (1)

[0152] x t =[t1,t2,t3,t4,t5,t6,t7,t8] T (2)

[0153] x R =[r1,r2,r3,r4,r5,r6] T (3)

[0154] S23: Based on the extracted dimensional parameters to be optimized, establish static performance index function f1, dynamic performance index function f2, and reliability performance index function f3.

[0155] S231: Establish the static performance index function f1 for the compliant flying crystal-piercing mechanism.

[0156] Based on finite element theory, the compliant flying crystal-piercing mechanism is simplified into a unit model composed of beam elements and hinge elements, as follows: Figure 9 and Figure 10 As shown;

[0157] Wherein, the element stiffness matrix of the beam element in local coordinates is

[0158]

[0159] Among them, K i,j Let be the local element stiffness matrix between the i-th node and the j-th node;

[0160] The local element stiffness matrix obtained in equation (4) is transformed into the global coordinate system to obtain the global element stiffness matrix. The transformation formula is as follows:

[0161]

[0162] in,

[0163]

[0164] Where α is the counterclockwise rotation angle from the local coordinate system to the global coordinate system;

[0165] The element stiffness matrix in the global coordinate system in equation (5) is expanded into the following 3n×3n matrix.

[0166]

[0167] Where n is the number of nodes;

[0168] By sequentially superimposing the matrices of all expanded elements, we obtain the overall stiffness matrix K, and the displacements of each node are:

[0169] U=K -1 F (8)

[0170] Where F represents the force at each node;

[0171] The mechanism magnification ratio is used as the static performance index function f1;

[0172]

[0173] Where, δ out δ represents the displacement at the output end of the mechanism. in For the mechanism to input end displacement;

[0174] S232: Establish the dynamic performance index function f2 for the compliant flying crystal-piercing mechanism.

[0175] The element mass matrix of the element is:

[0176]

[0177] The unit mass matrix of S1 is transformed to global coordinates and then expanded to a 3n×3n matrix. The matrix is ​​then superimposed to obtain the overall mass matrix.

[0178]

[0179] det([K]-ω 2 [M])=0 (12)

[0180] Solving the above equations yields n characteristic solutions, where the characteristic values ​​are ω1, ω2, ..., ω. n These represent the n natural frequencies of the system;

[0181] The first natural frequency is used as the dynamic performance index function f2;

[0182]

[0183] S233: Establish the reliability performance index function f3 of the compliant flying crystal stabbing mechanism.

[0184] During the deformation of the compliant flying crystal stabbing mechanism, stress concentration occurs at the flexible hinge. The stroke output of the mechanism increases as the rotational deformation of the flexible hinge increases. As the rotational deformation of the flexible hinge increases, the deformation stress also increases, and the deformation stress of the hinge will affect the service reliability of the mechanism. For a straight circular hinge, the relationship between its maximum stress and maximum rotational deformation is:

[0185]

[0186] Among them,

[0187]

[0188] Judge whether the mechanism is reliable by judging whether its maximum stress is greater than the allowable stress of the mechanism material;

[0189] Taking the maximum stress as the reliability performance index function f3, when σ max ≤[σ], f3 = 1, when σ max >[σ], f3 = 0;

[0190] S24: Normalize and establish the comprehensive performance index function f4.

[0191] Divide the performance index f1 into regional weight factors. For example: when f1 < 8, w1 = 0, when 8 < f1 < 12, w1 = 1; divide the performance index f2 into regional weight factors. For example: when f2 < 200, w2 = 0, when 200 < f2 < 300, w2 = 1, when 300 < f2 < 350, w2 = 1.2; obtain the comprehensive performance index function f4 of the compliant flying operation mechanism;

[0192] Among them;

[0193] f4 = (w1f1 + w2f2)f3 (17)

[0194] In the specific implementation process, in the step S3, the specific steps of the intelligent optimization algorithm include:

[0195] S31: Perform single-objective optimization on the comprehensive performance index function f4 using the particle swarm algorithm to obtain the optimal structural parameter x1.

[0196] S32: Perform multi-objective optimization on the static performance index function f1, the dynamic performance index function f2, and the reliability performance index function f3 using a multi-objective intelligent optimization algorithm to obtain the optimal structural parameter x2.

[0197] S33: Compare the theoretical performance spectra corresponding to structural parameter x1 and structural parameter x2 to determine the final structural parameters.

[0198] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. The icons depicting structural positional relationships in the accompanying drawings are for illustrative purposes only and should not be construed as limiting the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A design method for compliant flight operation mechanisms driven by service performance maps, characterized in that, Includes the following steps: S1. Conduct research on the compliant flight operation of microelectronic equipment and obtain service performance indicators; S2. Construct a theoretical performance map and a calculation model for the compliant flight operation mechanism based on the service performance indicators and their associated theoretical performance indicators; S3. Optimize the calculation model to obtain the configuration and structural parameter design model, select relevant experimental performance indicators based on service performance indicators and theoretical performance indicators, construct experimental performance spectrum, process prototype and conduct tests; S4. Install the prototype into the microelectronic equipment, test its service performance indicators and construct a service performance map; S5. Use the service performance map as a full closed-loop feedback, and the experimental performance map and theoretical performance map as semi-closed-loop feedback in the process to optimize the configuration and structural parameter design model. S6. Repeat steps S2-S5 until the service performance map meets expectations, completing the design optimization of the compliant flight operation mechanism; the construction process of the theoretical performance map includes: S21. Establish a static model of the compliant flight operation mechanism and calculate the static performance index. Specifically, based on the finite element theory, simplify the compliant flight operation mechanism into a unit model composed of beam elements and hinge elements, establish the element stiffness matrix of each element, transform and combine the element stiffness matrix to obtain the overall stiffness matrix, and solve the displacement of each node according to the overall stiffness matrix and the force conditions of each node. S22. Establish a dynamic model of the compliant flight operation mechanism and calculate the dynamic performance index. Specifically, based on the unit model, establish the unit mass matrix of each unit, transform and combine the unit mass matrices to obtain the overall mass matrix, and obtain the natural frequency of the mechanism based on the overall mass matrix and the overall stiffness matrix. S23. Establish a reliability model for the compliant flight operation mechanism and calculate reliability performance indicators. Specifically, obtain the maximum working stroke of the mechanism through stiffness calculation, calculate the maximum stress when the mechanism is at the maximum working stroke, and determine whether the maximum stress exceeds the allowable stress of the mechanism.

2. The design method for a compliant flight operation mechanism driven by service performance map according to claim 1, characterized in that, In steps S1 and S2, the service performance indicators include: production capacity, yield, stability, and reliability. The theoretical performance indicators associated with these service performance indicators include: static performance indicators, dynamic performance indicators, and reliability performance indicators. The calculation model constructed based on these theoretical performance indicators is: Static performance indicator function. Dynamic performance index function and reliability performance index function .

3. The design method for a compliant flight operation mechanism driven by service performance map according to claim 2, characterized in that, In step S3, the configuration and structural parameter design model is derived from the static performance index function. Dynamic performance index function and reliability performance index function After determining the optimization objective, constraints, design variables, and their value ranges, the Pareto front end is solved using a decision algorithm. Step S3 specifically includes the following steps: S31. Based on the operational requirements of microelectronic equipment, determine the specific indicators of the service performance spectrum of the compliant mechanism; S32. Based on specific indicators, determine the dimensional parameters that play a decisive role in the specific indicators as the dimensional parameters to be optimized; determine their optimization range based on the dimensional constraints during assembly. S33. Based on the extracted dimensional parameters to be optimized, establish a static performance index function. Dynamic performance index function Reliability performance index function ; S34. Normalization process, establishing a comprehensive performance index function. The final structural parameters are determined using an optimization algorithm.

4. The design method for a compliant flight operation mechanism driven by service performance map according to claim 3, characterized in that, In step S32, the size parameter to be optimized is: in, This represents the vector of length parameters to be optimized extracted by the mechanism. This represents the length parameter to be optimized. This represents the vector of thickness parameters to be optimized extracted by the mechanism. This represents the vector of flexible hinge radius parameters extracted by the mechanism for optimization. This represents the thickness parameter to be optimized. This represents the radius parameter of the flexible hinge to be optimized.

5. The design method for a compliant flight operation mechanism driven by service performance map according to claim 4, characterized in that, In step S33, the static performance index function is established. Dynamic performance index function Reliability performance index function Before that, it is necessary to convert the beam elements and hinge elements into element matrices, in which static performance index functions are established. The beam elements need to be converted into element stiffness matrices in local coordinates, specifically: in, For the first Node and the The local element stiffness matrix between nodes is transformed into the global element stiffness matrix in global coordinates: The global element stiffness matrix in the global coordinate system is extended as follows: From the matrix, we get: in, To find the number of nodes, the expanded matrices of all elements are superimposed sequentially to obtain the overall stiffness matrix K, where the displacements of each node are... ,in, The stress conditions at each node are analyzed, and finally, the mechanism magnification ratio is used as the static performance index function. : in, For the displacement of the mechanism's output end, This represents the displacement at the input end of the mechanism.

6. The design method for a compliant flight operation mechanism driven by service performance map according to claim 5, characterized in that, Step S34 specifically involves: converting the static performance index function... Dynamic performance index function By dividing the data into regional weighting factors, the comprehensive performance index function of the compliant flight operation mechanism is obtained. ,in, The weighting coefficients represent the static performance index function. The weighting coefficients represent the dynamic performance index function.

7. The design method for a compliant flight operation mechanism driven by service performance map according to claim 6, characterized in that, The optimization algorithm includes the following steps: S35, Regarding the comprehensive performance index function The particle swarm optimization algorithm is used for single-objective optimization to obtain the optimal structural parameters. ; S36, Static performance index function Dynamic performance index function Reliability performance index function A multi-objective intelligent optimization algorithm is used to perform multi-objective optimization to obtain the optimal structural parameters. ; S37. Structural parameters With structural parameters The corresponding theoretical performance spectra are compared to determine the final structural parameters.

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