Yttria-alumina transition layer composite ceramic and preparation method and application thereof

Abstract

The application discloses a yttrium oxide-aluminum oxide transition layer composite ceramic and a preparation method and application thereof, wherein a certain amount of aluminum oxide powder, transition mixed powder and yttrium oxide powder are sequentially laid from bottom to top in a forming die of a cold isostatic pressing machine, then the powder raw materials in the forming die are uniformly pressed by adopting a cold isostatic pressing process to obtain a formed ceramic green body; and then the formed ceramic green body is machined into a designed shape and then sintered to obtain a composite ceramic with the aluminum oxide part as an aluminum oxide base material, the transition mixed powder as a transition layer and the yttrium oxide part as a coating layer; the transition layer can reduce the gap of the combination interface of the yttrium oxide and the aluminum oxide, seamlessly connects the interface and is more compact; in addition, the aluminum oxide particles and the yttrium oxide powder particles in the transition layer are uniformly mixed and embedded with each other, significantly improve the mechanical locking between the materials and have stronger binding force; and the problems of poor binding force and easy peeling of the yttrium oxide etching-resistant protective coating in the prior art are solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of composite ceramic preparation, in particular to a yttria-alumina transition layer composite ceramic and a preparation method and application thereof. BACKGROUND

[0002] With the rapid development of integrated circuit technology, plasma etching technology has gradually become an etching technology widely used in nanometer integrated circuit manufacturing and micro-nano manufacturing processes. With the increase of the energy of fluorine-containing plasma in the etching gas, high-energy fluorine-containing plasma will erode the related alumina ceramic parts in the cavity, shortening the service life of the alumina ceramic parts. At the same time, the fluorides generated in the corrosion process are difficult to volatilize and deposit on the wafer surface, which also increases the pollution of the wafer. Therefore, the plasma etching resistance of the related alumina ceramic parts in the etching machine cavity becomes crucial.

[0003] At present, yttria material is widely used in etching-resistant coatings due to its excellent plasma etching resistance and relatively economical production cost. The bonding strength between yttria and the substrate is an important performance indicator of the etching-resistant coating. However, the existing technology often uses atmospheric plasma spraying method to prepare yttria etching-resistant coating. The bonding strength of the yttria coating prepared by this method and the substrate is poor, and the coating is prone to peeling. SUMMARY

[0004] In view of the deficiencies in the prior art, the present application discloses a yttria-alumina transition layer composite ceramic and a preparation method and application thereof, thereby solving or at least alleviating one or more of the above problems and other problems in the prior art.

[0005] The present application discloses a preparation method of a yttria-alumina transition layer composite ceramic, comprising the following steps:

[0006] S1, raw material selection: using alumina powder and yttria powder;

[0007] S2, adding a certain amount of raw materials: in the forming die of the cold isostatic pressing machine, a certain amount of alumina powder, transition mixed powder and yttria powder are sequentially laid from bottom to top to form a raw material arrangement with yttria powder on the upper layer, transition mixed powder on the transition layer and alumina powder on the lower layer; the transition mixed powder is a mixture of alumina powder and yttria powder;

[0008] S3, repeating step S2 n times until the raw material fills the entire forming die; wherein n>0;

[0009] S4, placing the filled forming die into the cold isostatic pressing machine for cold isostatic pressing forming to obtain a formed ceramic green body;

[0010] S5, obtaining at least one yttria-alumina transition layer composite ceramic green body by machining the shaped ceramic green body, and processing the yttria-alumina transition layer composite ceramic green body into a designed shape, the alumina part as an alumina base material, the transition mixed powder as a transition layer, and the yttria part as a coating layer;

[0011] S6, transferring the yttria-alumina transition layer composite ceramic green body obtained in step S5 to a high-temperature sintering furnace for sintering, and naturally cooling to room temperature in the furnace to obtain a yttria-alumina transition layer composite ceramic.

[0012] Preferably, in the laying process of the alumina powder, the transition mixed powder and the yttria powder in step S2, the following steps are included:

[0013] S201, adding alumina powder: adding a certain amount of alumina powder into the forming mold of the cold isostatic pressing machine, and vibrating and compacting the alumina powder in the forming mold;

[0014] S202, adding transition mixed powder: the transition mixed powder is a mixture of alumina powder and yttria powder; in the transition mixed powder, the mass ratio m of the alumina powder to the yttria powder is (3-7):(7-3); adding the transition mixed powder into the forming mold of the cold isostatic pressing machine, and vibrating and compacting the transition mixed powder in the forming mold to form a transition layer;

[0015] S203, adding yttria powder: adding a certain amount of yttria powder into the forming mold of the cold isostatic pressing machine, and vibrating and compacting the alumina powder in the forming mold.

[0016] Preferably, in step S202, a scale one and a scale two are respectively arranged near the upper and lower ends of the forming mold, and the transition layer is located between the scale one and the scale two of the forming mold.

[0017] Preferably, in step S202, the thickness of the transition layer is 1mm.

[0018] Preferably, in step 4, the pressure of cold isostatic pressing is 120MPa, and the pressure holding time is 30s.

[0019] Preferably, in step 1, the average particle size of the alumina powder is 57μm, and the average particle size of the yttria powder is 38μm.

[0020] Preferably, in the step 5, when n=0, the number of the obtained yttria-alumina transition layer composite ceramic green bodies is 1; when n=1, the number of the obtained yttria-alumina transition layer composite ceramic green bodies is 2; when n=2, the number of the obtained yttria-alumina transition layer composite ceramic green bodies is 3; and so on, when n=n, the number of the obtained yttria-alumina transition layer composite ceramic green bodies is n+1.

[0021] Preferably, in the step 6, the sintering process of the high-temperature sintering furnace comprises the following steps:

[0022] S601: the temperature is raised at a rate of 200℃ / h to 300℃, and the temperature is kept for 2h; then the temperature is raised at a rate of 200℃ / h to 400℃, and the temperature is kept for 2h; then the temperature is raised at a rate of 200℃ / h to 500℃, and the temperature is kept for 2h; then the temperature is raised at a rate of 200℃ / h to 1650℃, and the temperature is kept for 2h; when the temperature is 300℃ to 500℃, the yttria-alumina transition layer composite ceramic green body is deaerated in the furnace, that is, the binder in the yttria granulated powder and the alumina granulated powder is decomposed and discharged;

[0023] S602: the temperature is lowered at a rate of 2℃ / min from 1650℃ to 1000℃, and then the furnace is naturally cooled to room temperature.

[0024] Further, the application provides a yttria-alumina composite ceramic prepared by the preparation method of the yttria-alumina transition layer composite ceramic.

[0025] The yttria-alumina composite ceramic prepared by the application has excellent bonding strength, and meets the application requirements of the alumina ceramic parts, especially the use requirements of the alumina ceramic parts in the inner cavity of the etching machine.

[0026] In addition, the application also provides the application of the yttria-alumina composite ceramic as the alumina ceramic part in the inner cavity of the etching machine.

[0027] The application has the following beneficial effects:

[0028] The technical scheme provides a yttria-alumina transition layer composite ceramic and a preparation method and application thereof, wherein a certain amount of alumina powder, transition mixed powder and yttria powder are sequentially laid from bottom to top in a forming die of a cold isostatic pressing machine, then the powder raw materials in the forming die are uniformly pressed by adopting a cold isostatic pressing process, the powder raw materials are compressed in volume and air holes are discharged, and a formed ceramic green body with uniform structure and high density is obtained; then the formed ceramic green body is machined into a designed shape and then sintered, so that the strength is further improved, and a composite ceramic with the alumina part as an alumina base material, the transition mixed powder as a transition layer and the yttria part as a coating layer is obtained, the transition layer of the composite ceramic is a mixture of the alumina powder and the yttria powder, the transition layer can reduce the gap of the yttria and the alumina combination interface, the interface is seamlessly connected, and the transition layer is more dense; in addition, the alumina powder and the yttria powder are uniformly mixed in the transition layer, the particles are embedded in each other, the mechanical locking between the materials is significantly improved, and the bonding force is stronger; the problems of poor bonding force and easy peeling of the yttria etching-resistant protective coating in the prior art are solved, and the protection function of the alumina base material is strengthened. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the specific embodiments of the present disclosure, the drawings required to be used in the specific embodiments will be briefly introduced below. In all the drawings, various elements or parts are not necessarily drawn according to the actual scale.

[0030] Figure 1 It is a structure schematic diagram of a forming die in the cold isostatic pressing machine of the present application;

[0031] Figure 2 It is a ceramic green body diagram of the present application;

[0032] Figure 3 It is a yttria-alumina transition layer composite ceramic diagram after sintering of the present application;

[0033] Figure 4 It is an interface morphology diagram of the yttria coating and the transition layer in the yttria-alumina composite ceramic prepared in example 1 of the present application;

[0034] Figure 5 It is an interface morphology diagram of the alumina base material and the transition layer in the yttria-alumina composite ceramic prepared in example 1 of the present application;

[0035] Figure 6 It is an interface morphology diagram of the transition layer in the yttria-alumina composite ceramic prepared in example 1 of the present application. DETAILED DESCRIPTION

[0036] The embodiments of the technical solutions of the present disclosure will be described in detail below with reference to the drawings. The following embodiments are only used to more clearly illustrate the technical solutions of the present disclosure, and therefore only serve as examples, and cannot limit the protection scope of the present disclosure.

[0037] It should be noted that, unless otherwise specified, the technical terms or scientific terms used in the present application should be understood as the general meanings understood by the skilled in the art to which the present application belongs.

[0038] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements indicated must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0039] In addition, the terms "first", "second", and the like are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0040] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood in a broad sense, for example, it can be fixed connection, or detachable connection, or integral; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0041] In the present application, unless otherwise explicitly specified and limited, the first feature "on" or "under" the second feature can be that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be that the first feature is directly above or obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be that the first feature is directly below or obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0042] The preparation method of the yttria-alumina transition layer composite ceramic provided in embodiments 1-3 of the present application, and the specific parameters of the preparation process of the yttria-alumina transition layer composite ceramic are shown in Table 1.

[0043] The preparation method of the yttria-alumina transition layer composite ceramic, comprising:

[0044] S1, raw material selection: alumina powder and yttria powder are used; wherein the alumina powder is a commercial alumina granulation powder with a particle size of 2-90 μm, and the average particle size is 57 μm; the yttria powder is a commercial yttria granulation powder with a particle size of 21-64 μm, and the average particle size is 38 μm;

[0045] S2, adding a certain amount of raw materials: a certain amount of alumina powder, transition mixed powder and yttria powder are sequentially laid from bottom to top in the forming die of the cold isostatic pressing machine, and the raw material arrangement in the forming die is that the upper layer is yttria powder, the transition layer is transition mixed powder, and the lower layer is alumina powder; the laying process of the alumina powder, the transition mixed powder and the yttria powder is as follows:

[0046] S201, adding alumina powder: a certain amount of alumina powder is added to the forming die of the cold isostatic pressing machine, and the alumina powder in the forming die is vibrated and compacted;

[0047] S202, adding transition mixed powder: the transition mixed powder is a mixture of alumina powder and yttria powder; in the transition mixed powder, the mass ratio m of the alumina powder to the yttria powder is (3-7):(7-3), i.e. the mass ratio m of the alumina powder to the yttria powder is 0.429-2.333; the transition mixed powder is added to the forming die of the cold isostatic pressing machine, and the transition mixed powder in the forming die is vibrated and compacted to form a transition layer; the thickness of the transition layer is 1 mm; a scale one and a scale two are respectively arranged on the forming die near the upper and lower ends thereof, and the transition layer is located between the scale one and the scale two of the forming die; as shown in Figure 1 ;

[0048] S203, adding yttria powder: a certain amount of yttria powder is added to the forming die of the cold isostatic pressing machine, and the alumina powder in the forming die is vibrated and compacted;

[0049] S3, repeating step S2 n times until the raw material fills the entire forming die; wherein n≥0;

[0050] S4, placing the filled forming die into the cold isostatic pressing machine for cold isostatic pressing; the pressure of the cold isostatic pressing is 120 MPa, and the pressure holding time is 30 s, to obtain a formed ceramic green body; as shown in Figure 2As shown; the powder raw material in the forming mold is uniformly pressed by cold isostatic pressing process, the powder raw material is compressed and the air holes are discharged, and the formed ceramic green body with uniform structure and high density can be obtained;

[0051] S5, the formed ceramic green body is obtained by machining at least one yttria-alumina transition layer composite ceramic green body, and the yttria-alumina transition layer composite ceramic green body is machined into a designed shape, the alumina part is used as an alumina base material, the transition mixed powder is used as a transition layer, and the yttria part is used as a coating; when n=0, the number of obtained yttria-alumina transition layer composite ceramic green bodies is 1; when n=1, the number of obtained yttria-alumina transition layer composite ceramic green bodies is 2; when n=2, the number of obtained yttria-alumina transition layer composite ceramic green bodies is 3; and when n=n, the number of obtained yttria-alumina transition layer composite ceramic green bodies is n+1;

[0052] S6, the yttria-alumina transition layer composite ceramic green body obtained in step S5 is transferred to a high-temperature sintering furnace for sintering, and after natural cooling to room temperature in the furnace, a yttria-alumina transition layer composite ceramic is obtained; as Figure 3 As shown, since the shrinkage of yttria is too large during sintering, it can be found that the yttria after sintering is conical; wherein, the sintering process of the high-temperature sintering furnace includes the following steps:

[0053] S601: the heating rate is 200℃ / h, the temperature is raised to 300℃, and the holding time is 2h; then the temperature is raised to 400℃ at a heating rate of 200℃ / h, and the holding time is 2h; then the temperature is raised to 500℃ at a heating rate of 200℃ / h, and the holding time is 2h; then the temperature is raised to 1650℃ at a heating rate of 200℃ / h, and the holding time is 2h; when the temperature is 300℃ to 500℃, the yttria-alumina transition layer composite ceramic green body is degassed in the furnace, that is, the binder in the yttria granulated powder and the alumina granulated powder is decomposed and discharged;

[0054] S602: the cooling rate is 2℃ / min, the temperature is lowered from 1650℃ to 1000℃, and then the furnace is naturally cooled to room temperature.

[0055] In step S2, the alumina powder, the transition mixed powder and the yttria powder are respectively added quantitatively. The "quantitative" here refers to the amount of raw materials designed by the skilled person according to the subsequent cold isostatic pressing, green body machining and sintering processes. The "quantitative" here can be adjusted by the skilled person according to the raw material amount of different products, so as to finally ensure that the desired yttria-alumina transition layer composite ceramic can be obtained after the green body machining and sintering processes. For example, in an embodiment, a quantitative amount of alumina powder is first added to the forming mold of the cold isostatic pressing machine, and the ratio of the added volume of the alumina powder to the volume of the inner cavity of the forming mold is 1:2. The alumina powder in the forming mold is vibrated and compacted. Then, the transition mixed powder is added to the forming mold of the cold isostatic pressing machine, and the transition mixed powder in the forming mold is vibrated and compacted. The thickness of the transition layer formed by the vibrated and compacted transition mixed powder is 1 mm. Then, a quantitative amount of yttria powder is added to the forming mold of the cold isostatic pressing machine, so that the yttria powder fills the remaining volume of the forming mold. The yttria powder in the forming mold is vibrated and compacted. The filled forming mold is placed in the cold isostatic pressing machine for cold isostatic pressing to obtain a formed ceramic green body. Subsequently, the formed ceramic green body is machined into a designed shape to obtain a yttria-alumina transition layer composite ceramic green body, i.e., the alumina part serves as an alumina base material, the transition mixed powder serves as a transition layer, and the yttria part serves as a coating. Of course, this embodiment is only an example of obtaining one yttria-alumina composite ceramic green body. The skilled person can also reasonably adjust the amount of raw materials according to the actual shape of the product and the proportion of the materials, so as to obtain one or more yttria-alumina transition layer composite ceramic green bodies after cold isostatic pressing.

[0056] In the preparation of the yttria-alumina transition layer composite ceramic, the transition layer needs to be located between the scale one and the scale two of the forming mold. If the transition layer is located outside the scale one and the scale two of the forming mold, the amount of the lower layer alumina powder or the upper layer yttria powder will be small, which cannot be machined into a yttria-alumina transition layer composite ceramic green body alone. In this case, the bonding strength between yttria and alumina is crossed. Therefore, the transition layer needs to be located between the scale one and the scale two of the forming mold.

[0057] Comparative Example 1

[0058] Comparative Example 1 is used as a blank control group. The preparation process is the same as that of Examples 1-3, except that no transition mixed powder is added in Comparative Example 1, i.e., no transition layer described in Examples 1-3 is added between the lower layer alumina powder and the upper layer yttria powder.

[0059] The performance test is shown in Table 1.

[0060] Test standards:

[0061] (1) The bonding strength between the alumina substrate and the yttria coating in the yttria-alumina transition layer composite ceramic was tested according to the standards of ASTM C1583 / D4541 / D7234 / D7522, ISO 4624 / 16276-1, EN 1542 / 12004-2, AS / NZS 1580.408.

[0062] Table 1

[0063]

[0064]

[0065] As can be seen from the comparison of Examples 1-3, when the mass ratio m of the alumina powder and the yttria powder is gradually adjusted from 3:7 to 1:1 in the preparation of the transition mixed powder, the bonding strength between the alumina substrate and the yttria coating in the finally prepared yttria-alumina transition layer composite ceramic gradually increases; when the mass ratio m of the alumina powder and the yttria powder is gradually adjusted from 1:1 to 7:3, the bonding strength between the alumina substrate and the yttria coating in the finally prepared yttria-alumina transition layer composite ceramic gradually decreases; and the bonding strength first increases and then decreases with the gradual increase of m. Specifically, the yttria powder and the alumina powder are sintered at a high temperature according to a certain ratio, and yttrium aluminum garnet (Y3Al5O12) with high mechanical strength and stable physical and chemical properties is formed through solid-phase reaction between the oxides. 12 The relative molecular mass of yttria (Y2O3) is 225.81, and the relative molecular mass of alumina (Al2O3) is 101.96; the relative molecular mass ratio of yttria to alumina in the formation of yttrium aluminum garnet is: 225.81x3:101.96x5=677.43:509.8=1.3:1; therefore, when the mass ratio m of the alumina powder and the yttria powder is 1:1, it is closest to 1.3:1; although the transition mixed powder cannot form yttrium aluminum garnet crystals under the process conditions of the present technical solution, the embedded part of the contact between the alumina particles and the yttria particles will form a grain boundary, the mechanical lock formed by which is more compact, and the number of embedded points formed under this ratio is more, so that the bonding force is better; when the mass ratio m is 7:3 or 3:7, the number of embedded points of the transition mixed powder is reduced, and the bonding force is also correspondingly small. Mechanical lock refers to the bonding force formed by the concave-convex or shape matching of the surfaces of two or more materials to realize the connection of the composite material; it is a mechanical and physical action on the interface of two or more phases, and the strength of the interface mainly depends on the number of surface lock points, i.e. the surface roughness and the shear yield strength of the material.

[0066] It is worth noting that, as can be seen from the comparison of Examples 1-3 and Comparative Example 1, the bonding strength of the yttria-alumina transition layer composite ceramic prepared by the present technical solution is significantly better than that of the yttria coating prepared by the process without adding transition mixed powder to form a transition layer, and is far better than the bonding strength of the yttria coating prepared by the prior art (i.e., the bonding strength of the yttria coating prepared on the alumina substrate by the plasma spraying process is 11.7 MPa), which lays a foundation for the application of the yttria-alumina transition layer composite ceramic in etching machines as related alumina ceramic parts.

[0067] As shown in FIG. 1, an interface morphology diagram of the yttria coating and the transition layer in the yttria-alumina transition layer composite ceramic prepared in Example 1 can be found that the yttria coating and the yttria component in the transition layer are connected in one piece, and a large number of alumina component inclusions appear at the junction of the yttria coating and the transition layer and in the transition layer. Figure 4 As shown in FIG. 2, an interface morphology diagram of the alumina substrate and the transition layer in the yttria-alumina transition layer composite ceramic prepared in Example 1 can be found that there is a clear interface between the alumina substrate and the transition layer, and part of the alumina component in the alumina substrate and the transition layer is connected, at the same time, a large number of yttria component inclusions appear on the side of the alumina substrate, and part of the yttria component inclusions on the side of the alumina substrate are connected with the yttria component in the transition layer. Figure 5 As shown in FIG. 3, a morphology diagram of the transition layer in the yttria-alumina transition layer composite ceramic prepared in Example 1 can be found that the alumina component is irregularly point-shaped and disorderedly inlaid in the yttria component, and part of the alumina components at different points are connected. Figure 6

[0068] In summary, by setting a transition layer between the alumina substrate and the yttria coating, and the transition layer being composed of alumina powder and yttria powder mixed in a certain proportion, part of the alumina component in the transition layer is connected with the alumina substrate, and part of the yttria component in the transition layer is irregularly point-shaped and disorderedly inlaid in the alumina substrate; a large number of alumina components in the transition layer are irregularly point-shaped and disorderedly inlaid in the yttria component in the transition layer, and part of the alumina components at different points are also in a connected state, and the yttria component in the transition layer is connected in one piece with the yttria coating; due to the addition of the transition layer, the yttria coating and the alumina substrate are tightly connected together through the transition layer to improve the bonding strength between the yttria coating and the alumina substrate. As shown in Table 1, the bonding strength of the yttria-alumina transition layer composite ceramic prepared in Example 1 reaches 32.97 MPa, indicating that the above inlaid phenomenon in the yttria coating, the transition layer and the alumina substrate effectively improves the bonding strength of the yttria-alumina composite ceramic.

[0069] ​The above examples are only used to illustrate the technical solutions of the present disclosure, rather than limit the same; although the present disclosure has been described in detail with reference to the foregoing examples, it should be understood by those of ordinary skill in the art that the technical solutions recorded in the foregoing examples can still be modified, or some or all of the technical features thereof can be replaced equivalently; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the examples of the present disclosure, and they should all be included in the scope of the claims and the specification of the present disclosure.

Claims

1. A method for producing a yttria-alumina transition layer composite ceramic, characterized by, Comprising the following steps: S1, raw material selection: adopting alumina powder and yttrium oxide powder; the average particle size of the alumina powder is 57 μm, and the average particle size of the yttrium oxide powder is 38 μm; S2, adding a quantitative raw material: sequentially laying a quantitative alumina powder, a transition mixed powder and a yttrium oxide powder from bottom to top in a forming die of a cold isostatic pressing machine to form a raw material arrangement in which an upper layer is the yttrium oxide powder, a transition layer is the transition mixed powder, and a lower layer is the alumina powder; the transition mixed powder is a mixture of the alumina powder and the yttrium oxide powder, and the mass ratio of the alumina powder to the yttrium oxide powder in the transition mixed powder is 1:1; S3, repeating step S2 n times until the raw material fills the entire forming die; wherein n≥0; S4, placing the filled forming die into the cold isostatic pressing machine for cold isostatic pressing to obtain a formed ceramic green body; the pressure of the cold isostatic pressing is 120 MPa, and the pressure holding time is 30 s; S5, obtaining at least one yttrium oxide-alumina transition layer composite ceramic green body by machining the formed ceramic green body, and processing the yttrium oxide-alumina transition layer composite ceramic green body into a designed shape, wherein the alumina part serves as an alumina base material, the transition mixed powder serves as a transition layer, and the yttrium oxide part serves as a coating layer; S6, moving the yttrium oxide-alumina transition layer composite ceramic green body obtained in step S5 to a high-temperature sintering furnace for sintering, and naturally cooling to room temperature after the sintering process to obtain a yttrium oxide-alumina transition layer composite ceramic; the transition mixed powder cannot form yttrium-aluminum garnet crystals; the sintering process of the high-temperature sintering furnace comprises the following steps: S601: the heating rate is 200℃ / h, the temperature is raised to 300℃, the holding time is 2h; then the temperature is raised to 400℃ at a heating rate of 200℃ / h, the holding time is 2h; then the temperature is raised to 500℃ at a heating rate of 200℃ / h, the holding time is 2h; then the temperature is raised to 1650℃ at a heating rate of 200℃ / h, the holding time is 2h; when the temperature is 300℃ to 500℃, the yttrium oxide-alumina transition layer composite ceramic green body is degassed in the furnace, that is, the binder in the yttrium oxide granulated powder and the alumina granulated powder is decomposed and discharged; S602: the cooling rate is 2℃ / min, the temperature is lowered from 1650℃ to 1000℃, and then naturally cooled to room temperature in the furnace; The yttrium oxide coating and the yttrium oxide component in the transition layer are connected in one piece, and the embedding points of the alumina component appear at the junction of the yttrium oxide coating and the transition layer and in the transition layer; there is an obvious interface between the alumina base material and the transition layer, part of the alumina component in the transition layer is connected with the alumina base material, and at the same time, the embedding points of the yttrium oxide component appear on the side of the alumina base material, and the embedding points of part of the yttrium oxide component on the side of the alumina base material are connected with the yttrium oxide component in the transition layer.

2. The preparation method of the yttrium oxide-alumina transition layer composite ceramic according to claim 1, characterized in that: In the step S2, the laying process of the alumina powder, the transition mixed powder and the yttrium oxide powder comprises the following steps: S201, adding alumina powder: adding a certain amount of alumina powder into a forming die of a cold isostatic pressing machine, and vibrating and compacting the alumina powder in the forming die; S202, adding transition mixed powder: the transition mixed powder is a mixture of alumina powder and yttrium oxide powder; adding the transition mixed powder into the forming die of the cold isostatic pressing machine, and vibrating and compacting the transition mixed powder in the forming die to form a transition layer; S203, adding yttrium oxide powder: adding a certain amount of yttrium oxide powder into the forming die of the cold isostatic pressing machine, and vibrating and compacting the alumina powder in the forming die.

3. The preparation method of the yttrium oxide-alumina transition layer composite ceramic according to claim 2, characterized in that: In the step S202, the forming die is provided with scale one and scale two near the upper and lower ends thereof, and the transition layer is located between the scale one and the scale two of the forming die.

4. The preparation method of the yttrium oxide-alumina transition layer composite ceramic according to claim 2, characterized in that: In the step S202, the thickness of the transition layer is 1 mm.

5. The preparation method of the yttrium oxide-alumina transition layer composite ceramic according to claim 1, characterized in that: In the step S202, when n=0, the number of the obtained yttrium oxide-alumina transition layer composite ceramic green bodies is 1; when n=1, the number of the obtained yttrium oxide-alumina transition layer composite ceramic green bodies is 2; when n=2, the number of the obtained yttrium oxide-alumina transition layer composite ceramic green bodies is 3; and when n=n, the number of the obtained yttrium oxide-alumina transition layer composite ceramic green bodies is n+1.

6. A yttrium oxide-alumina composite ceramic prepared by the preparation method of the yttrium oxide-alumina transition layer composite ceramic according to any one of claims 1-5.

7. Use of the yttrium oxide-alumina composite ceramic according to claim 6 as an alumina ceramic part in an inner cavity of an etching machine.

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