Cluster ultrasonic nozzle device capable of moving and cooling under vacuum

Abstract

The invention relates to a cluster ultrasonic nozzle device capable of moving and cooling under vacuum, which comprises a nozzle cavity, one side of the nozzle cavity is provided with an air inlet hole, the nozzle cavity is internally provided with an inner cavity, one side of the inner cavity is provided with an outlet, the outer part of the inner cavity is provided with a U-shaped outer cavity, and the outer part of the U-shaped outer cavity is provided with an air inlet hole; a nozzle body is installed on one side of the nozzle cavity and composed of a left plate body and a right plate body, the left plate body and the right plate body are symmetrically arranged, a spraying opening is formed between the left plate body and the right plate body, and gas penetrates through the outer cavity from the gas inlet hole, enters the inner cavity and is sprayed out from the spraying opening. According to the invention, gas is introduced into the inner cavity from the gas inlet hole, the outer part of the inner cavity is wrapped by the U-shaped outer cavity, and liquid nitrogen is introduced into the outer cavity through the second through hole, so that the gas in the inner cavity can be cooled, and the gas can be sprayed out from the nozzle of the nozzle at a certain temperature after being cooled.

Description

Technical Field

[0001] The invention relates to the technical field of nozzle devices, and in particular to a cluster ultrasonic nozzle device which can be moved and cooled under vacuum. Background Art

[0002] In recent years, with the rapid development of atomic manufacturing, the demand for new materials and new devices such as clusters, single-atom and single-molecule devices has been increasing. The preparation of clusters through beam sources has become the main means to meet the demand for atomic manufacturing materials. For example, we can sputter cluster atomic gas by magnetron sputtering, condense the atomic gas into clusters through gas phase condensation, and then focus the clusters into a beam through ultrasonic expansion and ion optical systems. Clusters suitable for processing are deposited during flight. During the deposition process, the gas needs to be ejected from the nozzle, but it is usually difficult to better cool the gas ejected from the nozzle, which increases the variability of the structure. Summary of the invention

[0003] The purpose of the present invention is to provide a cluster ultrasonic nozzle device which is movable and cooled under vacuum, and the gas ejected from the nozzle can be better cooled by adding an external cavity for storing liquid nitrogen for cooling at the nozzle.

[0004] In order to solve the above technical problems, the present invention provides a cluster ultrasonic nozzle device that can be moved and cooled under vacuum, comprising: a nozzle cavity, an air inlet hole is opened on one side of the nozzle cavity, an inner cavity is opened inside the nozzle cavity, an outlet is opened on one side of the inner cavity, a U-shaped outer cavity is opened outside the inner cavity, a nozzle body is installed on one side of the nozzle cavity, the nozzle body consists of a left plate body and a right plate body, the left plate body and the right plate body are symmetrically arranged, and a nozzle is formed between the two, wherein gas enters the inner cavity from the air inlet hole through the outer cavity and is ejected from the nozzle.

[0005] Furthermore, sealing plates are installed at both ends of the nozzle cavity, and the sealing plates are used to close the openings at both ends of the inner cavity.

[0006] Furthermore, the left plate and the right plate are each provided with four first through holes, the diameter of the first through holes is 5.2 mm, the left plate and the right plate are L-shaped, the left plate and the right plate are a piece of 304 stainless steel or alloy cut into a stainless steel plate with a length of 260 mm, a width of 25 mm, and a thickness of 5 mm, and the bending height distance is 17 mm.

[0007] Furthermore, the nozzle angle formed between the left plate body and the right plate body is 11-12 degrees.

[0008] Furthermore, a sealant is installed between the left plate body and the right plate body to prevent gas leakage from the side.

[0009] Furthermore, a bottom plate is provided on one side of the nozzle cavity, and a second through hole with a diameter of 6 mm is respectively provided at the upper left and upper right corners of the bottom plate, and the air inlet hole is opened in the middle position between the bottom plate and the inner cavity side wall.

[0010] Furthermore, four third through holes are opened on the bottom plate, the diameter of the third through holes is 5 mm, and the third through holes are used to install two brackets.

[0011] The beneficial effect of the present invention is that the gas in the inner cavity is cooled by passing the gas into the inner cavity from the air inlet hole, the outside of the inner cavity is wrapped by the U-shaped outer cavity, and liquid nitrogen is passed into the inner cavity through the second through hole, so that the gas in the inner cavity can be sprayed out from the nozzle outlet at a certain temperature after cooling. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention is further described below in conjunction with the accompanying drawings and embodiments.

[0013] Figure 1 is a stereoscopic view of a preferred embodiment of the nozzle cavity of the present invention;

[0014] Figure 2 is a half-section view of a preferred embodiment of the nozzle cavity of the present invention;

[0015] Figure 3 is a perspective view of a preferred embodiment of the nozzle body of the present invention;

[0016] Figure 4 is a bottom view of a preferred embodiment of the nozzle cavity of the present invention;

[0017] Figure 5 It is a stereoscopic diagram of a preferred embodiment of the first embodiment of the present invention.

[0018] In the figure:

[0019] 1. Nozzle cavity; 11. Air inlet; 12. Inner cavity; 13. Outlet; 14. Outer cavity; 15. Bottom plate; 16. Second through hole; 17. Third through hole; 18. Sealing plate; 19. Bracket;

[0020] 2. Nozzle body; 21. Left plate; 22. Right plate; 23. Nozzle; 24. First through hole; 25. Sealant;

[0021] 3. Driving mechanism; 31. Bellows; 32. Scale plate; 33. Position sensor; 34. Knife-edge flange; 35. Liquid nitrogen cooling tube; 36. Air intake pipe; 37. Limiting member. DETAILED DESCRIPTION

[0022] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, which only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention.

[0023] like Figure 1-5 As shown, a cluster ultrasonic nozzle device that can be moved and cooled under vacuum of the present invention comprises: a nozzle cavity 1, an air inlet hole 11 is opened on one side of the nozzle cavity 1, an inner cavity 12 is opened inside the nozzle cavity 1, an outlet 13 is opened on one side of the inner cavity 12, a U-shaped outer cavity 14 is opened outside the inner cavity 12, a nozzle body 2 is installed on one side of the nozzle cavity 1, the nozzle body 2 consists of a left plate body 21 and a right plate body 22, the left plate body 21 and the right plate body 22 are symmetrically arranged, and a nozzle 23 is formed between the two, wherein the gas enters the inner cavity 12 from the air inlet through the outer cavity 14 and is ejected from the nozzle 23.

[0024] By passing the gas into the inner cavity 12 from the air inlet 11, the outside of the inner cavity 12 is wrapped by the U-shaped outer cavity 14, and liquid nitrogen is passed into the outer cavity 14 through the second through hole 16, so that the gas in the inner cavity 12 can be cooled, so that the gas can be ejected from the nozzle outlet 23 of the nozzle at a certain temperature after cooling.

[0025] Sealing plates 18 are installed at both ends of the nozzle cavity 1, and the sealing plates 18 are used to close the openings at both ends of the inner cavity 12.

[0026] The inner cavity 12 is in a rectangular shape, and the sealing plates 18 are welded to both sides of the nozzle cavity 1 to seal both ends of the inner cavity 12. The length of the sealing plate 18 is 36 mm and the width is 31 mm.

[0027] A bottom plate 15 is provided on one side of the nozzle cavity 1, and a second through hole 16 with a diameter of 6 mm is provided at the upper left and upper right corners of the bottom plate 15 respectively. The air inlet hole 11 is provided in the middle position between the bottom plate 15 and the side wall of the inner cavity 12. Four third through holes 17 are provided on the bottom plate 15, and the third through holes 17 have a diameter of 5 mm. The third through holes 17 are used to install two brackets 19, and the brackets 19 are used to connect the external driving mechanism 3.

[0028] The bottom plate 15 is provided to seal one side of the nozzle cavity 1 to form a sealed rectangular parallelepiped, and the two second through holes 16 are used to pass nitrogen into the outer cavity 14 from the second through holes 16, and at the same time, the gas passes through the outer cavity 14 from the air inlet hole 11 on the bottom plate 15 and enters the inner cavity 12 from the corresponding air inlet hole 11 on the inner wall of the inner cavity 12.

[0029] Four first through holes 24 are provided on the left plate 21 and the right plate 22, and the diameter of the first through holes 24 is 5.2 mm. The left plate 21 and the right plate 22 are L-shaped. The left plate 21 and the right plate 22 are a piece of 304 stainless steel or alloy cut into a stainless steel plate with a length of 260 mm, a width of 25 mm, and a thickness of 5 mm. The bending height distance is 17 mm. The angle of the nozzle 23 formed between the left plate 21 and the right plate 22 is 11-12 degrees. A sealant 25 is installed between the left plate 21 and the right plate 22 to prevent gas leakage from the side.

[0030] By symmetrically installing the left plate 21 and the right plate 22 on both sides of the outlet 13, and using the sealant 25 to seal the nozzle cavity 1 and the left and right plates 22, gas leakage from the side can be better prevented. At this time, the gas can enter the nozzle from the outlet 13 and be ejected from the V-shaped nozzle 23 formed between the left plate 21 and the right plate 22.

[0031] Embodiment 1

[0032] The present invention installs the nozzle cavity 1 on the driving mechanism 3, and the driving mechanism 3 drives the bellows 31 on the top to move. The use example is as follows: the driving mechanism 3 can realize the forward and backward movement of the jet structure under a vacuum state, and the stroke is greater than 100 mm, and can try to feedback the position state of the jet structure. A scale plate 32 is provided on the driving structure, which moves with the bellows 31 and is used to feedback the specific position of the nozzle cavity 1 through the position sensor 33. The nozzle cavity 1 is connected to the driving mechanism 3 through a knife-edge flange 34, which can facilitate the replacement of different jet structures, and a limiter 37 is installed on the other side of the position sensor 33 to prevent the bellows 31 from exceeding the moving range and prevent the end of the bellows 31 from colliding.

[0033] The liquid nitrogen cooling tube 35 and the air intake pipe 36 on the nozzle cavity 1 are led out from the inside of the bellows 31 through the interface flange, ensuring the vacuum while enabling the cooling tube and the jet tube to move together with the jet structure, thereby enabling stable and reliable movement without causing damage to the capillary tube due to continuous bending of the internal tube.

[0034] Based on the above ideal embodiments of the present invention, the relevant staff can make various changes and modifications without departing from the technical concept of the present invention through the above description. The technical scope of the present invention is not limited to the contents of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum, characterized in that: include: A nozzle cavity (1), wherein an air inlet (11) is provided on one side of the nozzle cavity (1), an inner cavity (12) is provided inside the nozzle cavity (1), an outlet (13) is provided on one side of the inner cavity (12), a U-shaped outer cavity (14) is provided outside the inner cavity (12), a nozzle body (2) is installed on one side of the nozzle cavity (1), the nozzle body (2) is composed of a left plate (21) and a right plate (22), the left plate (21) and the right plate (22) are symmetrically arranged, and a nozzle (23) is formed between the two, wherein gas enters the inner cavity (12) from the air inlet through the outer cavity (14) and is ejected from the nozzle (23).

2. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 1, characterized in that: Sealing plates (18) are installed at both ends of the nozzle cavity (1), and the sealing plates (18) are used to close the openings at both ends of the inner cavity (12).

3. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 2, characterized in that: The left plate (21) and the right plate (22) are each provided with four first through holes (24), the diameter of the first through holes (24) being 5.2 mm, the left plate (21) and the right plate (22) being L-shaped, the left plate (21) and the right plate (22) being a piece of 304 stainless steel or alloy cut into a stainless steel plate with a length of 260 mm, a width of 25 mm, and a thickness of 5 mm, and a bending height distance of 17 mm.

4. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 3, characterized in that: The included angle of the nozzle (23) formed between the left plate (21) and the right plate (22) is 11-12 degrees.

5. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 4, characterized in that: A sealant (25) is installed between the left plate (21) and the right plate (22) to prevent gas from leaking from the side.

6. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 5, characterized in that: A bottom plate (15) is provided on one side of the nozzle cavity (1), and a second through hole (16) with a diameter of 6 mm is provided at the upper left and upper right corners of the bottom plate (15), respectively. The air inlet hole (11) is provided at a middle position between the bottom plate (15) and the side wall of the inner cavity (12).

7. A cluster ultrasonic nozzle device that can be moved and cooled under vacuum as claimed in claim 6, characterized in that: Four third through holes (17) are provided on the bottom plate (15), the diameter of the third through holes (17) is 5 mm, and the third through holes (17) are used to install two brackets (19).

Images