Amorphous alloy materials, elastic structures and six-dimensional force sensors

Abstract

The present invention provides an amorphous alloy material, an elastomeric structure and a six-dimensional force sensor. Specifically, the present invention provides an amorphous alloy material comprising Zr, Ta, V, Nb and M, wherein: M is Cr, Al, Ti or Hf. The present invention further provides the use of the amorphous alloy material of the present invention in a six-dimensional force sensor. The amorphous alloy material of the present invention has high yield strength, low Young's modulus and high elastic limit. When the amorphous alloy material of the present invention is used to prepare a six-dimensional force sensor, the six-dimensional force sensor has the advantages of high sensitivity, high precision, wide range and low crosstalk.

Description

Technical Field

[0001] The present invention belongs to the field of sensors and specifically relates to an amorphous alloy material, an elastic body structure and a six-dimensional force sensor. Background Art

[0002] As a key technical pillar in the field of modern engineering, the robotic arm system has played an indispensable role in many aspects such as industrial automation, medical surgical assistance, humanoid robots and aerospace engineering. Especially in the precision manufacturing environment of aerospace, due to the small workspace and the increasing complexity of tasks, more stringent requirements are placed on the performance of the robotic arm system. In order to meet these high-performance requirements, the robotic arm not only needs to have good collaboration, lightweight design and high-precision operation capabilities, but also needs to be equipped with advanced sensing technology to ensure its adaptability and reliability in complex environments. In particular, for the realization of dynamic decoupling of the end effector of the robotic arm and real-time monitoring and feedback of force and torque, high-performance six-dimensional force sensors are essential components. Such sensors must be able to provide excellent measurement accuracy, sufficient sensitivity, and strong overload protection capabilities, while also achieving miniaturization design and cost-effectiveness optimization, so as to further improve their overall performance and application scope.

[0003] As one of the important components of the six-dimensional force sensor, the elastomer needs to consider the balance between the sensor range and sensitivity during the design process. At present, elastomer materials are mainly divided into two categories: high-strength stainless steel and low-modulus aluminum alloy. For use scenarios with limited space and a wide measurement range, in order to ensure the stiffness and fatigue life of the sensor, the elastomer material is usually high-strength stainless steel. However, due to the inherent characteristics of crystalline materials, the sensitivity of stainless steel force sensors is often low, which greatly reduces the dynamic response speed of the sensor. In contrast, although the use of low-modulus aluminum alloy can significantly improve the sensitivity of the sensor, the lower yield strength of the material will lead to insufficient accuracy and stiffness of the sensor. At present, a high-performance elastomer material has not yet been developed to comprehensively improve the overall performance of the sensor.

[0004] Based on the above conditions, researchers are committed to improving the performance of six-dimensional force sensors through structural optimization and algorithm compensation. For example, CN107131986 discloses a double-hole parallel beam elastic body structure, which can effectively improve the sensitivity and linearity of the six-dimensional force sensor and reduce the inter-dimensional coupling and hysteresis of the sensor. However, the elastic body has a complex structure and redundant volume, which is bound to bring disadvantages such as high manufacturing cost and limited application scenarios.

[0005] CN109100073 discloses a six-dimensional force sensor based on strain inversion and a measurement method thereof. This prior art can achieve a high degree of decoupling of force and torque under a simple elastic body structure through algorithm compensation. However, the sensor measurement accuracy of this prior art is poor, the range and sensitivity are low, and this prior art does not disclose the specific composition of the isotropic material.

[0006] At present, there are not many studies on elastomeric materials for high-performance six-dimensional force sensors. For example, CN115060405A discloses that amorphous alloys can be used to prepare six-dimensional force sensors. However, the prior art adopts a non-radial three-beam structure and an aluminum alloy base, which greatly reduces the sensor stiffness and range of use, and leads to overall volume redundancy and complicated preparation process. In addition, the outer circular hub, inner circular hub and oblique beam of the elastomer are in the same plane, which easily causes high sensor crosstalk and large bending moment, thereby reducing the accuracy of the sensor.

[0007] Therefore, although the existing technology can improve some performances of the six-dimensional force sensor, there are still problems such as increased cost, complex manufacturing process and performance improvement bottlenecks. Summary of the invention

[0008] The object of the present invention is to provide an amorphous alloy material having high yield strength, low Young's modulus and high elastic limit.

[0009] Another object of the present invention is to provide an elastic body structure, which, when used in a six-dimensional force sensor, enables the six-dimensional force sensor to have the advantages of high sensitivity, high precision, wide range and low crosstalk.

[0010] Another object of the present invention is to provide a six-dimensional force sensor, which includes the elastic body structure of the present invention.

[0011] The above-mentioned object of the present invention is achieved through the following technical solutions.

[0012] In a first aspect, the present invention provides an amorphous alloy material comprising Zr, Ta, V, Nb and M, wherein:

[0013] The M is Cr, Al, Ti or Hf.

[0014] The inventors of the present application unexpectedly discovered that the amorphous alloy material having the composition of the present invention exhibits significantly superior comprehensive properties, and can have high yield strength, low Young's modulus and high elastic limit.

[0015] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is:

[0016] Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (0~7 and not equal to 0), that is, Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (greater than 0 and less than or equal to 7).

[0017] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is:

[0018] Zr: Ta: V: Nb: Cr=(40~55): (20~28): (10~20): (9~11): (3~6).

[0019] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Al, and the atomic ratio of Zr, Ta, V, Nb and Al is:

[0020] Zr: Ta: V: Nb: Al=(35~68): (15~31): (8~11): (8~11): (0~7 and not equal to 0), that is, Zr: Ta: V: Nb: Al=(35~68): (15~31): (8~11): (8~11): (greater than 0 and less than or equal to 7).

[0021] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Al, and the atomic ratio of Zr, Ta, V, Nb and Al is:

[0022] Zr: Ta: V: Nb: Al=(50~65): (15~25): (8~10): (8~11): (3~6).

[0023] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is:

[0024] Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (0~5 and not equal to 0), that is, Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (greater than 0 and less than or equal to 5).

[0025] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is:

[0026] Zr: Ta: V: Nb: Ti=(42~55): (18~23): (11~16): (11~17): (2~5).

[0027] Preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is:

[0028] Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (0~3 and not equal to 0), that is, Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (greater than 0 and less than or equal to 3).

[0029] More preferably, in the amorphous alloy material of the present invention, the amorphous alloy material comprises Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is:

[0030] Zr: Ta: V: Nb: Hf=(47~50): (20~25): (11~13): (11~13): (2~3).

[0031] In the present invention, the proportion of each element has a significant impact on the performance of the amorphous alloy. If the content of Cr or Ti is too much, it will not only make the material brittle, reduce its toughness and ductility, increase the difficulty of subsequent processing of the amorphous alloy, but also affect the solidification behavior of the alloy, thereby causing casting defects.

[0032] If the Al content is too high, it will not only cause the melt to be too viscous, thus affecting the quality consistency of the alloy, but may also introduce impurities or cause component segregation during the rapid cooling process.

[0033] If the Hf content is too high, the excess Hf will cause processing brittleness, resulting in cracks in the alloy during subsequent machining, while the tool wear rate is accelerated, which in turn leads to increased processing costs. In addition, the high melting point and thermal conductivity characteristics of Hf will change the cooling behavior of the alloy. During rapid cooling, Hf may cause uneven cooling rates and form large temperature gradients, which in turn cause thermal stress concentration and cracks.

[0034] The present invention does not impose any particular limitation on the method for preparing the amorphous alloy material of the present invention, and the amorphous alloy material may be prepared by conventional methods in the art, such as die casting.

[0035] In a second aspect, the present invention provides use of the amorphous alloy material of the present invention in a six-dimensional force sensor.

[0036] In a third aspect, the present invention provides an elastomeric structure, which is made of the amorphous alloy material of the present invention.

[0037] Preferably, the elastomer structure of the present invention includes an annular fixed mounting platform 3, a loading platform 1 located in the annular internal space of the fixed mounting platform, and three or more radial strain beams 2 arranged at intervals around the loading platform; wherein, one end of the radial strain beam 2 is connected to the loading platform 1, and the other end of the radial strain beam 2 is connected to the fixed mounting platform 3.

[0038] Preferably, in the elastic body structure of the present invention, the top surface of the loading platform 1 is 2-10 mm higher than the top surface of the fixed mounting platform 3. This height difference effectively reduces the crosstalk between dimensions of the elastic body when it is loaded with forces in different directions.

[0039] Preferably, in the elastomer structure described in the present invention, three or more fine grooves 5 are provided on the fixed mounting platform 3, each of which is located close to the connection between the radial strain beam and the fixed mounting platform 3, and its extension direction is perpendicular to the radial direction of the radial strain beam 3; more preferably, the width of the fine groove 5 is 0.5 to 1 mm. Further preferably, the width of the fine groove 5 is 0.5 to 0.8 mm. The fine groove is used to isolate the stress generated by the thread on the fixed mounting platform, and through CNC milling or water jet cutting, it effectively avoids the change of material properties caused by high temperature during wire cutting.

[0040] Preferably, in the elastomer structure described in the present invention, evenly distributed threaded holes 6 are provided on the fixed mounting platform 3 and the loading platform 1 for installing and loading the sensor; more preferably, the threaded holes 6 and the fine grooves 5 located on the fixed mounting platform 3 are arranged at intervals around the circumference of the annular fixed mounting platform 3.

[0041] Preferably, in the elastic body structure of the present invention, the radial strain beams may be a rectangular parallelepiped structure. The three radial strain beams may be evenly distributed around the center of the elastic body, with an angle of 120°, and their radial extension lines intersect at the center of the elastic body.

[0042] Preferably, in the elastic body structure described in the present invention, the short side length of each rectangular surface of the radial strain beam is at least 4 mm to facilitate the installation of the resistance strain gauge.

[0043] In some embodiments of the present invention, the top surfaces of the fixed mounting platform 3 and the loading platform 1 of the elastomeric structure of the present invention are not on the same horizontal plane (the loading platform is higher than the fixed mounting platform), and the two are connected by three radial strain beams 2; a stepped groove 7 is provided at the junction of the bottom surface of the radial strain beam 2 and the bottom surface of the fixed mounting platform 3; a fine groove 5 is provided on the fixed mounting platform, and the position of the fine groove 5 is close to the connection between the radial strain beam and the fixed mounting platform 3, and its extension direction is perpendicular to the radial direction of the strain beam 2; threaded holes are evenly distributed on the fixed mounting platform 3 and the loading platform 1, which are used for the installation and loading of sensors respectively, wherein the threaded holes of the fixed mounting platform 3 and the fine grooves 5 are staggered around the circumference of the annular fixed mounting platform 3.

[0044] Preferably, in the elastic body structure described in the present invention, the depth of the stepped groove is at least 0.3 mm, which is used for arranging signal lines.

[0045] In a fourth aspect, the present invention provides a six-dimensional force sensor, which includes the elastic body structure of the present invention, a resistance strain gauge and a built-in circuit; wherein,

[0046] The resistance strain gauge 9 is arranged on at least one surface of each radial strain beam 2 of the elastic structure, and the resistance strain gauges 9 are connected through the built-in circuit 8 to form a Wheatstone bridge circuit.

[0047] The use principle of the six-dimensional force sensor of the present invention is as follows:

[0048] The resistance strain gauge is installed on the specific surface of the radial strain beam of the amorphous alloy elastic body, where the resistance strain gauges are connected by a built-in circuit to form a Wheatstone bridge circuit. The fixed mounting platform and the test fixture of the elastic body are connected by bolts to fix the six-dimensional force sensor. The excitation voltage is passed, and the loading platform and the loading motor of the elastic body are connected by bolts. The sensor is loaded with forces or torques X in different directions through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V). Refer to the calibration specification GB / T 43199-2023 and calculate the X-axis force sensor in different directions according to the corresponding formula. ij -Y ij The data can be used to obtain technical indicators such as the range, sensitivity, linear deviation, repeatability deviation, hysteresis, zero drift, crosstalk, and calibration coefficient of the amorphous alloy six-dimensional force sensor.

[0049] In some embodiments of the present invention, the installation position of the resistance strain gauge is confirmed by finite element simulation, and is preferably installed in an area with uniform strain and concentrated stress.

[0050] In some embodiments of the present invention, two resistance strain gauges are installed on each surface of the radial strain beam, and a total of 24 resistance strain gauges are installed on 12 planes of the three strain beams.

[0051] In some embodiments of the present invention, the resistance strain gauge is preferably a single straight strain gauge, a strain rosette, a shear strain gauge or a full-bridge gauge, and its installation direction and type are longitudinal, transverse, positive 45°, and negative 45° according to different situations, and are used to measure longitudinal, transverse, positive 45° shear strain and negative 45° shear strain, respectively.

[0052] In some embodiments of the present invention, the excitation voltage is 5V to 12V.

[0053] In the present invention, the six-dimensional force sensor has different ranges. Preferably, Fx is 50-1200 N, Fy is 50-1200 N, Fz is 50-2000 N, Mx is 0-12 N∙m, My is 0-8 N∙m, and Mz is 0-60 N∙m.

[0054] In the present invention, the sensitivity of the six-axis force sensor has a desired range. The sensitivity in different directions is defined as the full-scale output analog quantity in that direction. Preferably, the sensitivity of the six-axis force sensor of the present invention is 2.0-3.0 mV / V.

[0055] In the present invention, the repeatability of the six-axis force sensor has a desired range. Preferably, the repeatability of the six-axis force sensor of the present invention is less than 0.2% FS

[0056] In the present invention, the linear error of the six-axis force sensor has a desired range. Preferably, the linear error of the six-axis force sensor of the present invention is lower than 0.25% FS.

[0057] In the present invention, the hysteresis of the six-axis force sensor has a desired range. Preferably, the hysteresis of the six-axis force sensor of the present invention is lower than 0.3% FS.

[0058] In the present invention, the zero drift of the six-axis force sensor has a desired range. Preferably, the zero drift of the six-axis force sensor of the present invention is lower than 0.02% FS.

[0059] In the present invention, the crosstalk of the six-axis force sensor has a desired range. Preferably, the crosstalk of the six-axis force sensor of the present invention is less than 1% FS.

[0060] The present invention has the following beneficial effects:

[0061] (1) The amorphous alloy material of the present invention exhibits excellent elastic behavior and thermal stability, and can simultaneously possess high yield strength, low Young's modulus, and high elastic limit. The present invention successfully solves the problem of the difficulty in reconciling stiffness and sensitivity in traditional sensors, ensures effective control of sensor signal drift during temperature changes and long-term use, and further improves sensor accuracy.

[0062] The six-dimensional force sensor manufactured by the amorphous alloy material of the present invention can increase the measuring range by at least 2 times and the sensitivity by more than 3 times without relying on algorithm compensation or other subsequent processing.

[0063] (2) The elastic body structure of the present invention adopts a stepped boss-shaped elastic body structure, which can realize structural self-decoupling. The amorphous alloy elastic body structure of the present invention is compact. The present invention uses a fine groove with a width of 0.5 to 1 mm to divide the bolt stress, which can realize CNC integrated processing and ensure processing efficiency and processing quality.

[0064] The elastic body structure of the present invention ensures that the six-dimensional force sensor has the characteristics of high sensitivity, wide range and low crosstalk, as well as high precision and stability.

[0065] (3) The sensor of the present invention does not require overloaded structural parts such as a base, but only utilizes the mechanical properties of the material itself to improve sensor performance. The technical solution of the present invention not only enhances the rigidity of the sensor body, broadens the range of use, and optimizes the volume of the sensor, but also has a simple preparation process and can be combined with other sensor optimization technologies. BRIEF DESCRIPTION OF THE DRAWINGS

[0066] The embodiments of the present invention are described in detail below with reference to the accompanying drawings, wherein:

[0067] Figure 1 The X-ray diffraction patterns of the amorphous alloy materials prepared in Examples 1 to 8 of the present invention are shown;

[0068] Figure 2 The X-ray diffraction patterns of the materials prepared in Comparative Examples 1 to 5 of the present invention are shown;

[0069] Figure 3 A schematic front view showing an elastomeric structure according to a specific embodiment of the present invention;

[0070] Figure 4 A bottom schematic diagram showing an elastomeric structure according to a specific embodiment of the present invention;

[0071] Figure 5 A schematic diagram showing the structure of a six-dimensional force sensor according to a specific embodiment of the present invention is shown;

[0072] Figure 6A schematic diagram of installing a resistance strain gauge according to a specific embodiment of the present invention is shown;

[0073] Figure 7 A schematic diagram showing a bridge circuit connection principle of a resistance strain gauge according to a specific embodiment of the present invention is shown;

[0074] Description of reference numerals:

[0075] 1- loading platform; 2- radial strain beam; 3- fixed mounting platform; 4- wire outlet hole; 5- fine groove; 6- threaded hole; 7- stepped groove; 8- built-in circuit board; 9- resistance strain gauge; 10- signal line. DETAILED DESCRIPTION

[0076] The present invention is further described in detail below in conjunction with specific embodiments. The given examples are only for illustrating the present invention, but not for limiting the scope of the present invention.

[0077] This section generally describes the materials and test methods used in the experiments of the present invention. Although many materials and operating methods used to achieve the purpose of the present invention are well known in the art, the present invention is still described as detailed as possible. It is clear to those skilled in the art that in the context, unless otherwise specified, the raw materials and operating methods used in the present invention are well known in the art.

[0078] Figure 1 The X-ray diffraction patterns of the amorphous alloy materials prepared in Examples 1 to 8 of the present invention are shown. As shown in the figure, the cross section of the amorphous alloy plate is subjected to X-ray diffraction using a Rigaku X-ray diffractometer equipped with a Cu-Kα radiation source, and its diffuse diffraction peak confirms the amorphous structure of the material.

[0079] Figure 2 The X-ray diffraction patterns of the materials prepared in Comparative Examples 1 to 5 of the present invention are shown. As shown in the figure, the cross section of the alloy plate is subjected to X-ray diffraction using a Rigaku X-ray diffractometer equipped with a Cu-Kα radiation source, and its sharp Bragg diffraction peaks indicate that the material has been crystallized.

[0080] Figures 3-4The schematic diagram of the structure of the elastomer structure of the present invention is shown, wherein the amorphous alloy elastomer is a stepped boss-shaped structure. Characteristic components are arranged on the amorphous alloy elastomer: a loading platform 1, a radial strain beam 2 and a fixed mounting platform 3. The top surfaces of the fixed mounting platform 3 and the loading platform 1 are not on the same horizontal plane, and the loading platform 1 is 2 mm higher than the fixed mounting platform 3. This height difference effectively reduces the inter-dimensional crosstalk of the elastomer when it is loaded by forces in different directions. The fixed mounting platform 3 and the loading platform 1 are connected by three radial strain beams 2, which are evenly distributed around the center of the elastomer with an angle of 120°, and their radial extension lines intersect at the center of the elastomer. The radial strain beam is a rectangular parallelepiped, and the width of each face (i.e., the length of the short side) is 4 mm, which is convenient for the installation of the resistance strain gauge. The surface where the loading platform 1 is located is the upper end of the elastomer, and its positive normal is +Fx, and the remaining directions are determined according to the right-hand rule. A stepped groove 7 is arranged at the junction of the radial strain beam 2 and the bottom surface of the fixed mounting platform 3, and the depth of the groove is at least 0.3 mm, which is used for signal line arrangement. A fine groove 5 perpendicular to the radial direction of the radial strain beam 2 is provided on the fixed mounting platform 3. The position of the fine groove 5 is close to the connection between the radial strain beam and the fixed mounting platform 3, and its extension direction is perpendicular to the radial direction of the strain beam 2. The width of the fine groove ranges from 0.5 to 1 mm, which is used to isolate the stress generated by the thread on the fixed mounting platform. The fine groove can be processed by CNC milling or water jet cutting, which effectively avoids the change of material properties caused by high temperature during wire cutting. Threaded holes 6 are evenly distributed on the fixed mounting platform 3 and the loading platform 1, which are used for the installation and loading of sensors respectively, wherein the threaded holes 6 of the fixed mounting platform 3 and the fine grooves 5 are staggered around the circumference. A wire outlet hole 4 is provided at the bottom end of the fixed mounting platform 3 for transmitting the built-in signal of the sensor to an external device.

[0081] Figures 5-6The characteristic structural schematic diagram of the six-dimensional force sensor of the present invention is shown. The characteristic components of the six-dimensional force sensor are composed of an amorphous alloy elastomer, a resistance strain gauge 9, and a built-in circuit (built-in circuit board 8, signal line 10). The resistance strain gauge 9 is installed on a specific surface of the radial strain beam 2. The specific surface is confirmed by finite element simulation. Specifically, the specific surface is an area with uniform strain and concentrated stress. Two resistance strain gauges 9 are installed on each surface of the radial strain beam 2, and a total of 24 resistance strain gauges 9 are installed. The type of the resistance strain gauge 9 is a single straight strain gauge, a strain flower, a shear strain gauge or a full bridge gauge. The installation direction and type are respectively along the longitudinal, transverse, positive 45°, and negative 45° according to different situations, and are used to measure the longitudinal, transverse, positive 45° shear strain and negative 45° shear strain respectively. Every four specific resistance strain gauges 9 are connected by a signal line 10 to form a Wheatstone bridge circuit. Each circuit is equipped with a built-in circuit board 8 for signal amplification and regulation. The built-in circuit board 8 is installed on the inner wall of the fixed mounting table 3. The six-dimensional force sensor is fixed by bolting the fixed mounting platform 3 of the elastic body and the test fixture. The excitation voltage of 5V to 12V is passed, and the loading platform 1 of the elastic body and the loading motor are connected by bolts. The sensor is loaded with forces or torques X in different directions through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V). Refer to the calibration specification GB / T 43199-2023 and calculate the X-axis force sensor in different directions according to the corresponding formula. ij -Y ij The data can be used to obtain technical indicators such as the range, sensitivity, linear deviation, repeatability deviation, hysteresis, zero drift, crosstalk, and calibration coefficient of the amorphous alloy six-dimensional force sensor.

[0082] Figure 7 The six-dimensional force sensor of the present invention can output six-dimensional signal measurement, wherein each signal channel is composed of four resistance strain gauges and an excitation voltage V 0 When the sensor is working, the resistance strain gauge undergoes elastic deformation, and the metal grid inside it undergoes strain resistance effect, which causes the bridge to be unbalanced and eventually outputs an analog signal V e Taking the direction 1 channel composed of R11, R12, R13, and R14 as an example, when the elastic body is strained, the resistance of R11 and R13 remains unchanged, and the resistance of R12 and R13 changes to ΔR11 and ΔR13, and the output signal is V e1 Similarly, the output signals of the other five channels of the six-axis force sensor are V e2 、V e3 、V e4 、V e5 and Ve6 Through the matrix operation [F]=[C][V], where [V] is the output signal of the six channels and [C] is the calibration coefficient matrix of the sensor, the actual force value of the amorphous alloy six-dimensional force sensor in six dimensions can be obtained.

[0083] Example 1

[0084] In this embodiment, a zirconium-tantalum-vanadium-niobium-chromium amorphous alloy plate Zr is prepared by die casting. 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 , and further prepared it into an elastomeric structure.

[0085] Amorphous alloy plate Zr 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 The preparation method comprises the following steps:

[0086] According to the mass ratio of the alloying elements, the raw materials of the alloying elements are polished to remove the surface oxide layer, ultrasonically cleaned with ethanol, and then accurately weighed and placed in the crucible of the vacuum arc furnace. Furthermore, the vacuum arc furnace cavity is evacuated to a vacuum of not less than 3×10 -3 Pa vacuum degree to ensure an oxygen-free environment in the equipment. Then, a high-purity inert gas (99.99% argon) is introduced for arc ignition. Finally, the alloy is fully melted by the arc generated by the electrode rod, and the alloy ingot is turned over more than five times during the process to ensure uniform alloy composition. Finally, two alloy ingots with a mass of 150g each are obtained. Subsequently, the alloy ingot is moved to a copper mold with a fixed diameter (the diameter of the copper mold is 30 mm). After the alloy ingot is melted by the arc, the molten metal liquid is sucked into the copper mold by a mechanical pump under the pressure difference between the cavity and the copper mold. After the metal rod is cooled, it can be taken out. The preparation of alloy rods is to facilitate uniform heating in the subsequent die-casting process. Next, the die-casting mold is thoroughly inspected and cleaned, and its surface is cleaned with metal polishing paste and alcohol. The alloy rod is placed in a quartz tube, and the quartz tube and mold are installed, and then cooling circulating water is introduced into the high vacuum die-casting machine. The die-casting cavity is evacuated to 6 × 10 -3 Pa, melt the alloy by induction heating, and use an infrared thermometer to continuously monitor the temperature of the molten metal. When the temperature of the molten metal reaches at least 2187℃, the molten metal is immediately injected into the prepared mold. Under the action of water cooling and pressure difference (>10 6 K / s), the alloy liquid is quickly cooled to form a dense amorphous alloy plate. Finally, the vacuum system is turned off and the metallic glass plate is allowed to cool naturally for about 5 minutes, then the equipment is opened and the plate is taken out.

[0087] like Figure 1 As shown, the amorphous state of the plate is confirmed by X-ray diffraction, that is, there is no obvious diffraction peak. Table 1 shows the Zr 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 Mechanical properties and sensitivity properties of elastomeric materials prepared from amorphous alloys.

[0088] Example 2

[0089] In this embodiment, Zr is prepared by die casting. 41.059 Ta 26.904 V 19.117 Nb 9.378 Cr 3.542 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic percentage: Zr 41.059%, Ta 26.904%, V19.117%, Nb 9.378% and Cr 3.542%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2258°C.

[0090] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 41.059 Ta 26.90 4 V 19.117 Nb 9.378 Cr 3.542 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0091] Example 3

[0092] In this embodiment, Zr is prepared by die casting. 52.4 Ta 24.2 V 8.7 Nb 8.7 Al 6 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic proportion: Zr 52.4%, Ta 24.2%, V 8.7%, Nb 8.7% and Al 6%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2145°C.

[0093] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 52.4 Ta 24.2V 8.7 Nb 8.7 Al 6 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0094] Example 4

[0095] In this embodiment, Zr is prepared by die casting. 60.95 Ta 15.265 V 9.72 Nb 10.344 Al 3.721 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic proportion: Zr 60.95%, Ta 15.265%, V9.72%, Nb 10.344% and Al 3.721%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2078°C.

[0096] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 60.95 Ta 15.26 5 V 9.72 Nb 10.344 Al 3.721 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0097] Example 5

[0098] In this embodiment, Zr is prepared by die casting. 42.083 Ta 22.976 V 15.344 Nb 16.732 Ti 2.865 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic proportion: Zr 42.083%, Ta 22.976%, V15.344%, Nb 16.732% and Ti 2.865%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2250°C.

[0099] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 42.083 Ta 22.97 6 V 15.344 Nb 16.732 Ti 2.865 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0100] Example 6

[0101] In this embodiment, Zr is prepared by die casting. 53 Ta 20 V 11 Nb 11 Ti 5 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic percentage: Zr 53%, Ta 20%, V 11%, Nb 11% and Ti 5%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2173°C.

[0102] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 53 Ta 20 V 11 Nb 11 Ti 5 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0103] Example 7

[0104] In this embodiment, Zr is prepared by die casting. 47.628 Ta 24.711 V 12.385 Nb 12.732 Hf 2.544 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic proportion: Zr 47.628%, Ta 24.711%, V12.385%, Nb 12.732% and Hf 2.544%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2257°C.

[0105] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 47.628 Ta 24.71 1 V 12.385 Nb 12.732 Hf 2.544 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0106] Example 8

[0107] In this embodiment, Zr is prepared by die casting. 49.34 Ta 24.84 V 11.37Nb 11.45 Hf 3 Amorphous alloy plate, and further prepared into an elastomeric structure. The alloy material is composed of the following elements in atomic percentage: Zr 49.34%, Ta 24.84%, V11.37%, Nb 11.45% and Hf 3%. The preparation and characterization steps of the alloy plate in this embodiment refer to Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2252°C.

[0108] The X-ray diffraction pattern of the alloy material prepared in this embodiment is as follows: Figure 1 As shown. Zr in this embodiment 49.34 Ta 24.84 V 11.37 Nb 11.45 Hf 3 The mechanical properties and sensitivity properties of the elastomeric material prepared from the alloy are shown in Table 1.

[0109] Example 9

[0110] This embodiment uses zirconium, tantalum, vanadium, niobium, chromium amorphous alloy as the elastomer to prepare the six-dimensional force sensor of this embodiment.

[0111] Figures 5-6 FIG. 1 shows a schematic diagram of the structure of the amorphous alloy six-dimensional force sensor of this embodiment, wherein the amorphous alloy elastomer is made of the amorphous alloy material of embodiment 1. 51.372 Ta 22.546 V 10.495 Nb 10.104 Cr 5.483 The amorphous alloy plate has a thickness of 10 mm, a length of 32 mm, a width of 32 mm, a yield strength of 2300 MPa, and a Young's modulus of 99.8 GPa.

[0112] The stepped boss-shaped elastomer structure is modeled, and finite element simulation is performed according to the performance parameters of the amorphous alloy to determine the specific size and position of the loading platform 1, radial strain beam 2, fixed mounting platform 3, outlet hole 4, fine groove 5, threaded hole 6, stepped groove 7 and other structures in the amorphous alloy elastomer, and then completed by CNC milling. The top surfaces of the fixed mounting platform 3 and the loading platform 1 are not on the same horizontal plane, wherein the loading platform 1 is 2 mm higher than the fixed mounting platform 3. This height difference effectively reduces the inter-dimensional crosstalk of the elastomer when it is loaded by forces in different directions. The fixed mounting platform 3 and the loading platform 1 are connected by three radial strain beams 2, which are evenly distributed around the center of the elastomer with an angle of 120°, and their radial extension lines intersect at the center of the elastomer. The radial strain beam is a cuboid, and the width of each face (i.e., the length of the short side) is 4.3 mm, so as to facilitate the installation of the resistance strain gauge 9. The resistance strain gauge 9 is installed on a specific surface of the radial strain beam 2, which is confirmed by finite element simulation. Specifically, the specific surface is an area with uniform strain and concentrated stress. Two resistance strain gauges 9 are installed on each surface of the radial strain beam 2, and a total of 24 resistance strain gauges 9 are installed. The type of resistance strain gauge 9 is a single straight strain gauge, and its installation direction is longitudinal, transverse, positive 45°, and negative 45° according to different situations, respectively, and is used to measure longitudinal, transverse, positive 45° shear strain and negative 45° shear strain. Every four specific resistance strain gauges 9 are connected by signal lines 10 to form a Wheatstone bridge circuit. Each circuit is equipped with a built-in circuit board 8 for signal amplification and regulation. The built-in circuit board 8 is installed on the inner wall of the fixed mounting platform 3. The surface where the loading platform 1 is located is the upper end of the elastic body, and its positive normal is +Fx, and the remaining directions are determined according to the right-hand rule. A stepped groove 7 is provided at the junction of the radial strain beam 2 and the bottom section of the fixed mounting platform 3. The depth of the groove is 0.3mm, which is used for the arrangement of the signal line 10. A fine groove 5 perpendicular to the radial strain beam 2 is provided on the fixed mounting platform 3, and the width of the fine groove ranges from 0.5 mm, which is used to isolate the stress generated by the thread on the fixed mounting platform. The fine groove can be processed by CNC milling, which effectively avoids the change of material properties caused by high temperature during wire cutting. Threaded holes 6 are evenly distributed on the fixed mounting platform 3 and the loading platform 1, which are used for the installation and loading of the sensor respectively, wherein the threaded holes 6 of the fixed mounting platform 3 are staggered with the fine groove 5 around the circumference. A wire outlet hole 4 is provided at the bottom end of the fixed mounting platform 3, which is used to transmit the built-in signal of the sensor to an external device.

[0113] Figure 7 The six-dimensional force sensor of this embodiment can output six-dimensional signal measurement, where each signal channel consists of four resistance strain gauges and an excitation voltage V 0When the sensor is working, the resistance strain gauge undergoes elastic deformation, and the metal grid inside it undergoes strain resistance effect, which causes the bridge to be unbalanced and eventually outputs an analog signal V e Taking the direction 1 channel composed of R11, R12, R13, and R14 as an example, when the elastic body is strained, the resistance of R11 and R13 remains unchanged, and the resistance of R12 and R13 changes to ΔR11 and ΔR13, and the output signal is V e1 Similarly, the output signals of the other five channels of the six-axis force sensor are V e2 、V e3 、V e4 、V e5 and V e6 Through the matrix operation [F]=[C][V], where [V] is the output signal of the six channels and [C] is the calibration coefficient matrix of the sensor, the actual force value of the amorphous alloy six-dimensional force sensor in six dimensions can be obtained.

[0114] The six-dimensional force sensor is fixed by bolting the fixed mounting platform 3 of the elastic body and the test fixture. The excitation voltage 12V is passed, and the loading platform 1 of the elastic body and the loading motor are connected by bolts. The sensor is loaded with forces or torques X in different directions through the loading motor and the test fixture. ij (N, N∙m), obtain the analog signal Y of the sensor in different directions ij (mV / V), as shown in Table 2. Refer to the calibration specification GB / T 43199-2023 and calculate the X and V of the six-axis force sensor in six directions according to the corresponding formula. ij -Y ij The data can be used to obtain the technical indicators of the amorphous alloy six-dimensional force sensor, such as range, sensitivity, linear deviation, repeatability deviation, hysteresis, zero drift, crosstalk, calibration coefficient [C], etc., as shown in Table 3.

[0115] Comparative Example 1

[0116] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 42%, Ta 28%, V 8%, Nb 10%, and Cr 12%.

[0117] The preparation and characterization steps of the alloy plate in this comparative example refer to those of Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2273°C.

[0118] The Zr 42 Ta 28 V 8 Nb 10 Cr 12 The alloy has a yield strength of 1050 MPa and a Young's modulus of 195 GPa. Figure 2 As shown in Table 1, X-ray diffraction can confirm that the plate has obvious crystallization and limited forming ability. This indicates that the material has a large number of defects such as crystal planes and phase changes. Through calibration tests, the sensitivity of the elastomer can be obtained, as shown in Table 1.

[0119] Comparative Example 2

[0120] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 40%, Ta 23%, V 11%, Nb 8%, and Al 18%.

[0121] The preparation and characterization steps of the alloy plate in this comparative example refer to those of Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 1983°C.

[0122] The Zr in this comparative example 40 Ta 23 V 11 Nb 8 Al 18 The alloy has a yield strength of 985 MPa and a Young's modulus of 211 GPa. Figure 2 As shown in Table 1, X-ray diffraction can confirm that the plate has obvious crystallization and limited forming ability. This indicates that the material has a large number of defects such as crystal planes and phase changes. Through calibration tests, the sensitivity of the elastomer can be obtained, as shown in Table 1.

[0123] Comparative Example 3

[0124] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 46%, Ta 27%, V 10%, Nb 8%, and Ti 9%.

[0125] The preparation and characterization steps of the alloy plate in this comparative example refer to those of Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2227°C.

[0126] The Zr in this comparative example 46 Ta 27 V 10 Nb 8 Ti 9 The alloy has a yield strength of 1000 MPa and a Young's modulus of 240 GPa. Figure 2 As shown in Table 1, X-ray diffraction can confirm that the plate has obvious crystallization and limited forming ability. This indicates that the material has a large number of defects such as crystal planes and phase changes. Through calibration testing, the sensitivity of the elastomer can be obtained, as shown in Table 1.

[0127] Comparative Example 4

[0128] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 52%, Ta 20%, V 11%, Nb 11%, and Hf 6%.

[0129] The preparation and characterization steps of the alloy plate in this comparative example refer to those of Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2204°C.

[0130] The Zr 52 Ta 20 V 11 Nb 11 Hf 6 The alloy has a yield strength of 930 MPa and a Young's modulus of 205 GPa. Figure 2 As shown in Table 1, X-ray diffraction can confirm that the plate has obvious crystallization and limited forming ability. This indicates that the material has a large number of defects such as crystal planes and phase changes. Through calibration tests, the sensitivity of the elastomer can be obtained, as shown in Table 1.

[0131] Comparative Example 5

[0132] This comparative example shows an alloy elastomer, wherein the alloy material is composed of the following elements in atomic percentages: Zr 55%, Ta 20%, V 15%, and Nb 10%.

[0133] The preparation and characterization steps of the alloy plate in this comparative example refer to those of Example 1, except that the molten metal is injected into the mold after the induction temperature reaches 2177°C.

[0134] The Zr 55 Ta 20 V 15 Nb 10 The alloy has a yield strength of 1050 MPa and a Young's modulus of 228 GPa. Figure 2 As shown in Table 1, X-ray diffraction can confirm that the plate has obvious crystallization and limited forming ability. This indicates that the material has a large number of defects such as crystal planes and phase changes. Through calibration tests, the sensitivity of the elastomer can be obtained, as shown in Table 1.

[0135] Comparative Example 6

[0136] In this comparative example, a commercial elastomer material (17-4PH stainless steel) is used to prepare a six-dimensional force sensor elastomer, and the performance of the six-dimensional force sensor elastomer of the comparative example is compared with the amorphous alloy six-dimensional force sensor of the present invention. Among them, the yield strength of 17-4PH stainless steel is about 1200 MPa and the Young's modulus is about 220 GPa.

[0137] The performance test was carried out by referring to the same steps as Example 9. The sensitivity of the commercial six-dimensional force sensor in this comparative example was lower than 1.02 mV / V, the linear deviation was 1.5%FS, the repeatability deviation was 2.0%FS, the hysteresis was 1.5%FS, the zero drift was 0.25%FS, the crosstalk was 4.0%FS, and the comprehensive accuracy was 2.0%FS, which was far inferior to the amorphous alloy six-dimensional force sensor of the present invention.

[0138] Table 1 shows the mechanical properties and sensitivity properties of the elastomeric materials of the examples of the present invention and the comparative examples.

[0139] Table 1

[0140]

[0141] Table 2 shows the calibration test data of the amorphous alloy six-dimensional force sensor according to Example 9 of the present invention.

[0142] Table 2

[0143]

[0144]

[0145] Table 3 shows the performance indicators of the amorphous alloy six-dimensional force sensor of Example 9 of the present invention.

[0146] Table 3

[0147]

Claims

1. An amorphous alloy material for an elastic body structure of a six-dimensional force sensor, which is composed of Zr, Ta, V, Nb and Cr, and the atomic ratio of Zr, Ta, V, Nb and Cr is: Zr: Ta: V: Nb: Cr=(35~68): (15~31): (8~20): (8~11): (0~7 and not equal to 0); or It is composed of Zr, Ta, V, Nb and Ti, and the atomic ratio of Zr, Ta, V, Nb and Ti is: Zr: Ta: V: Nb: Ti=(42~57): (18~27): (11~17): (11~17): (0~5 and not equal to 0); or It is composed of Zr, Ta, V, Nb and Hf, and the atomic ratio of Zr, Ta, V, Nb and Hf is: Zr: Ta: V: Nb: Hf=(45~65): (20~35): (11~15): (11~15): (0~3 and not equal to 0).

2. Use of the amorphous alloy material according to claim 1 in a six-dimensional force sensor.

3. An elastic structure made of the amorphous alloy material according to claim 1.

4. The elastic body structure according to claim 3, comprising an annular fixed mounting platform, a loading platform located in the annular inner space of the fixed mounting platform, and three or more radial strain beams arranged at intervals around the loading platform; wherein, One end of the radial strain beam is connected to the loading platform, and the other end of the radial strain beam is connected to the fixed mounting platform.

5. The elastomeric structure according to claim 4, wherein: The fixed mounting platform is provided with three or more thin grooves, each of which is located close to the connection between the radial strain beam and the fixed mounting platform, and its extending direction is perpendicular to the radial direction of the radial strain beam, and the width of the thin groove is 0.5-1 mm.

6. A six-dimensional force sensor, comprising the elastic body structure, a resistance strain gauge and a built-in circuit according to any one of claims 3 to 5; wherein: The resistance strain gauge is arranged on at least one surface of each radial strain beam of the elastic body structure, and the resistance strain gauges are connected through the built-in circuit to form a Wheatstone bridge circuit.

Images