Micro-LED laser mass transfer and release material and preparation method thereof

By using polymer resins and auxiliary materials containing azophenyl groups, the problem of insufficient high temperature and acid and alkali resistance in traditional Micro LED huge transfer technology is solved, and efficient Micro LED laser huge transfer is achieved, which improves the chip transfer yield and comprehensive performance of the material.

CN119490721APending Publication Date: 2025-02-21SHENZHEN SAMCIEN NEW MATERIALS TECHNOLOGY CO LTD
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Patent Information

Application Number
CN202411633244.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-11-15
Publication Date
2025-02-21

AI Technical Summary

Technical Problem

Traditional Micro LED massive transfer technology faces the problems of chip offset caused by high temperature, insufficient material high temperature resistance and poor acid and alkali resistance, which affects transfer accuracy and production efficiency.

Method used

The polymer resin containing azophenyl groups is used as the main component of the Micro LED laser massive transfer and release material. The resin is prepared by radical polymerization, and the auxiliary material resin and auxiliary agent (plasticizer, leveling agent and capacity enhancement The dosage of each component is controlled within a specific range.

Benefits of technology

The high temperature and acid and alkali resistance of the material are achieved, ensuring the firm bonding between the chip and the material, defect-free bonding, and achieving low-energy threshold laser release, improving the high transfer yield of the chip.

✦ Generated by Eureka AI based on patent content.

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Abstract

The invention provides a Micro-LED (Light Emitting Diode) laser mass transfer and release material and a preparation method thereof. The Micro-LED laser mass transfer and release material is prepared from the following components in parts by weight: 10 to 40 parts of azobenzene group-containing polymer resin, 2.5 to 20 parts of auxiliary material resin, 30 to 80 parts of solvent, 0.1 to 2 parts of plasticizer, 0.05 to 2 parts of flatting agent and 1 to 20 parts of bulking agent. By designing the specific composition of the Micro-LED laser mass transfer and release material, the Micro-LED laser mass transfer and release material with excellent performance is prepared, and the Micro-LED laser mass transfer and release material has high temperature resistance and acid and alkali resistance, can be firmly bonded with a chip, can be subjected to defect-free bonding, can realize low-energy threshold laser release, and has good application prospects. Therefore, the high transfer yield of the chip is realized.
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Description

Technical Field

[0001] The present invention belongs to the technical field of Micro-LED materials, and specifically relates to a Micro-LED laser mass transfer release material and a preparation method thereof, and more specifically relates to a Micro-LED laser mass transfer release material of a polymer resin containing an azobenzene group and a preparation method thereof. Background Art

[0002] With the rapid development of display technology, Micro LED, as a new display technology, is widely regarded as a strong competitor for the next generation of display technology due to its advantages such as high brightness, low power consumption, long life and fast response time. Among them, mass transfer technology is a key step in achieving high-density integration, and its efficiency and precision directly affect the performance and cost of the final product.

[0003] Traditional Micro LED mass transfer technology faces some challenges. For example, after transferring the chip to the laser release layer, etching will generate high temperatures. At this time, the chip on the release layer is prone to offset, which not only affects the transfer accuracy, but also reduces production efficiency. In addition, the material's insufficient high temperature resistance during the etching process limits its application in high temperature environments. In the manufacturing process of Micro LED, it also involves the use of chemical solvents such as acids and alkalis for cleaning and processing. These chemicals place higher requirements on the acid and alkali resistance of the material.

[0004] Therefore, it is necessary to develop Micro-LED laser mass transfer release materials that are resistant to high temperatures, acids and alkalis, can be firmly bonded to chips, have defect-free bonding, and can achieve low-energy threshold laser release. Summary of the invention

[0005] In view of the deficiencies of the prior art, the purpose of the present invention is to provide a Micro-LED laser mass transfer release material and a preparation method thereof, and more specifically to a Micro-LED laser mass transfer release material of a polymer resin containing azobenzene groups and a preparation method thereof. The present invention designs the specific composition of the Micro-LED laser mass transfer release material, and further prepares a Micro-LED laser mass transfer release material with excellent performance by using a polymer resin containing azobenzene groups. The Micro-LED laser mass transfer release material has high temperature resistance and acid and alkali resistance, can be firmly bonded to the chip, has defect-free bonding, and can achieve low-energy threshold laser release, thereby achieving a high transfer yield of the chip.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, the present invention provides a Micro-LED laser mass transfer release material, wherein the Micro-LED laser mass transfer release material comprises the following combination of parts by weight:

[0008]

[0009] The monomers forming the polymer resin containing azobenzene groups include monomers containing nitrogen benzene groups and monomers containing carbon-carbon double bonds;

[0010] The molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond is ≥0.15:1.

[0011] The present invention designs the specific composition of the Micro-LED laser mass transfer release material, further uses a polymer resin containing azobenzene groups, and uses the polymer resin containing azobenzene groups, auxiliary resins and additives (plasticizers, leveling agents and compatibilizers) to prepare a Micro-LED laser mass transfer release material with excellent performance. The Micro-LED laser mass transfer release material has high temperature resistance and acid and alkali resistance, can be firmly bonded to the chip, has defect-free bonding, and can achieve low-energy threshold laser release, thereby achieving a high transfer yield of the chip.

[0012] In the present invention, a Micro-LED laser mass transfer release material with excellent performance is prepared by controlling the amount of the polymer resin containing azobenzene groups within a specific range. If the amount of the polymer resin containing azobenzene groups is too small, the prepared Micro-LED laser mass transfer release material chip cannot be fully released; if the amount of the polymer resin containing azobenzene groups is too large, the prepared Micro-LED laser mass transfer release material is prone to excessive gas generation during release, causing the chip to splash or rebound.

[0013] The present invention further controls the molar ratio of the monomer containing nitrogen benzene groups and the monomer containing carbon-carbon double bonds that form the polymer resin containing azobenzene groups within a specific range, thereby preparing a Micro-LED laser mass transfer release material with excellent performance. If the molar ratio of the monomer containing nitrogen benzene groups and the monomer containing carbon-carbon double bonds is too small, the heat resistance of the prepared Micro-LED laser mass transfer release material is poor, and the chip transfer rate is low.

[0014] At the same time, the present invention controls the amount of auxiliary resin within a specific range to prepare a Micro-LED laser mass transfer release material with excellent performance. If the amount of auxiliary resin is too little, the prepared Micro-LED laser mass transfer release material cannot be bonded during the chip transfer process, and the Micro-LED laser mass transfer cannot be achieved; if the amount of auxiliary resin is too much, the prepared Micro-LED laser mass transfer release material chip cannot be fully released.

[0015] It should be noted that, in the present invention, the polymer resin containing azobenzene groups is prepared by free radical polymerization of components including monomers containing nitrogen-containing benzene groups and monomers containing carbon-carbon double bonds. The specific preparation method is as follows:

[0016] Using free radical polymerization, under nitrogen protection, a monomer containing a nitrogen-containing benzene group and a monomer containing a carbon-carbon double bond are added into a three-necked flask according to the designed amount and an appropriate amount of cyclohexanone. The reaction is carried out at 70°C for 8 hours with a stirring rate of 100 rpm. After the reaction is completed, the reaction solution is poured into a large amount of ethanol to precipitate the product, which is then filtered and dried to obtain a polymer product.

[0017] In the present invention, the weight proportion of the polymer resin containing azobenzene groups in the Micro-LED laser mass transfer release material can be 10 parts, 12 parts, 15 parts, 18 parts, 20 parts, 23 parts, 26 parts, 27 parts, 30 parts, 33 parts, 36 parts, 38 parts or 40 parts, etc.

[0018] The weight proportions of the auxiliary resin in the Micro-LED laser mass transfer release material may be 2.5 parts, 4 parts, 6 parts, 8 parts, 10 parts, 12 parts, 14 parts, 16 parts, 18 parts or 20 parts, etc.

[0019] The weight proportions of the solvent in the Micro-LED laser mass transfer release material may be 30 parts, 35 parts, 40 parts, 45 parts, 50 parts, 55 parts, 60 parts, 65 parts, 70 parts, 75 parts or 80 parts, etc.

[0020] The weight proportion of the plasticizer in the Micro-LED laser mass transfer release material can be 0.1 parts, 0.2 parts, 0.4 parts, 0.6 parts, 0.8 parts, 1 parts, 1.2 parts, 1.4 parts, 1.6 parts, 1.8 parts or 2 parts, etc.

[0021] The weight proportion of the leveling agent in the Micro-LED laser mass transfer release material can be 0.5 parts, 0.6 parts, 0.7 parts, 0.8 parts, 0.9 parts, 1 parts, 1.1 parts, 1.2 parts, 1.4 parts, 1.6 parts, 1.8 parts or 2 parts, etc.

[0022] The weight proportion of the compatibilizer in the Micro-LED laser mass transfer release material can be 1 part, 2 parts, 4 parts, 6 parts, 8 parts, 10 parts, 12 parts, 14 parts, 16 parts, 18 parts or 20 parts, etc.

[0023] The following are preferred technical solutions of the present invention, but are not intended to limit the technical solutions provided by the present invention. Through the following preferred technical solutions, the objectives and beneficial effects of the present invention can be better achieved and realized.

[0024] As a preferred technical solution of the present invention, the nitrogen-containing phenyl group monomer is selected from N-(4-phenylazophenyl) maleimide, 4-[(4-methylphenyl) azo] phenyl maleimide, 2-[(4-hydroxyphenyl) azo] -2-methyl maleimide, 4-[(4-ethoxyphenyl) azo] phenyl maleimide, 3-[(4-chlorophenyl) azo] -3-methyl maleimide, 4-[(4-methylphenyl) azo] phenyl methacrylate, 4-[(4-hydroxyphenyl) azo] -2-methyl maleimide, Any one or a combination of at least two of 2-[(4-hydroxyphenyl)azo]phenyl acrylate, 2-[(4-ethoxyphenyl)azo]-2-methylacrylate, 4-[(4-chlorophenyl)azo]phenyl methacrylate, 2-[(4-nitrophenyl)azo]-2-ethylacrylate, 4-[(4-methylphenyl)azo]-5-norbornene, 2-[(4-hydroxyphenyl)azo]-3-norbornene, and 3-[(4-ethoxyphenyl)azo]-2-norbornene.

[0025] Preferably, the monomer containing a carbon-carbon double bond is selected from any one of styrene, p-methylstyrene, α-methylstyrene, 2-vinylnaphthalene, 4-(trifluoromethyl)styrene, benzyl methacrylate, n-butyl methacrylate, isobutyl methacrylate, isobutyl acrylate, 2-ethylethyl acrylate, 2-ethylhexyl methacrylate, β-hydroxyethyl(propyl) methacrylate or methyl ethylacrylate, or a combination of at least two thereof.

[0026] Preferably, the molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond is (0.5-15):1, for example, it can be 0.5:1, 0.8:1, 1:1, 2:1, 4:1, 6:1, 8:1, 10:1, 12:1 or 15:1, and more preferably (0.8-10):1.

[0027] The present invention further improves the comprehensive performance of the Micro-LED laser mass transfer release material by further designing the molar ratio of the monomer containing nitrogen benzene group and the monomer containing carbon-carbon double bond within a specific range.

[0028] Preferably, the weight proportion of the polymer resin containing azobenzene groups in the Micro-LED laser mass transfer release material is 15-30 parts, for example, it can be 15 parts, 16 parts, 17 parts, 18 parts, 19 parts, 20 parts, 21 parts, 22 parts, 23 parts, 24 parts, 25 parts, 26 parts, 27 parts, 28 parts, 29 parts or 30 parts, etc.

[0029] As a preferred technical solution of the present invention, the auxiliary resin is selected from any one or a combination of at least two of 1,3-phenylene tetrakis(2,6-dimethylphenyl)phosphate (condensation polymer), polystyrene, polyvinyl chloride, poly-1-butene, acrylonitrile-styrene copolymer, maleic acid butylene glycol-styrene copolymer, maleic anhydride-2-2-ethylethyl ester-styrene copolymer, vinyl acetate-styrene copolymer, acrylonitrile-butadiene-styrene copolymer, styrene-butadiene-styrene copolymer, methyl methacrylate-butadiene-styrene terpolymer, styrene acrylic resin, acrylic acid-acrylic ether copolymer, acrylate-butylene glycol acrylate or terpolymer acrylic acid ester.

[0030] Preferably, the weight proportion of the auxiliary resin in the Micro-LED laser mass transfer release material is 5-15 parts, for example, it can be 5 parts, 6 parts, 7 parts, 8 parts, 9 parts, 10 parts, 11 parts, 12 parts, 13 parts, 14 parts or 15 parts, etc.

[0031] As a preferred technical solution of the present invention, the solvent is selected from any one of ketone solvents, aromatic hydrocarbon solvents, ether solvents, amide solvents, dimethyl sulfoxide, and decalin, or a combination of at least two thereof.

[0032] Preferably, the ketone solvent includes any one of acetone, butanone, cyclohexanone and isophorone, or a combination of at least two thereof.

[0033] Preferably, the aromatic hydrocarbon solvent includes toluene and / or trimethylbenzene.

[0034] Preferably, the ether solvent includes any one of dioxane, 1,3-dioxolane, 2,2,4,4,5,5-hexamethyl-1,3-dioxolane, 2,2-dimethoxy-4-(trifluoromethyl)-1,3-dioxolane ether, tetrahydrofuran or a fluorinated hexacyclic coordination ether, or a combination of at least two thereof.

[0035] Preferably, the amide solvent includes dimethylformamide and / or N,N-dimethylacetamide.

[0036] It should be noted that the solvents in the Micro-LED laser mass transfer release material of the present invention are further preferably a combination of ≤4 types (for example, it can be 1, 2, 3 or 4 types).

[0037] As a preferred technical solution of the present invention, the plasticizer includes any one of di(2-ethylhexyl) phthalate, dibutyl phthalate, dimethyl adipate, acetyl tributyl citrate, dioctyl phthalate, epoxy soybean oil or propylene carbonate, or a combination of at least two thereof.

[0038] Preferably, the weight proportion of the plasticizer in the Micro-LED laser mass transfer release material is 0.5-1 part, for example, it can be 0.5 part, 0.6 part, 0.7 part, 0.8 part, 0.9 part or 1 part, etc.

[0039] As a preferred technical solution of the present invention, the leveling agent includes any one of an acrylic leveling agent, a fluorocarbon leveling agent or an organic silicon leveling agent, or a combination of at least two thereof.

[0040] Preferably, the acrylic leveling agent comprises a polyester-modified polydimethylsiloxane solution (xylene solvent) having an acrylate functional group (such as the acrylic leveling agent with product model BD-3371 produced by Hangzhou Bold Silicone Co., Ltd.).

[0041] Preferably, the fluorocarbon leveling agent comprises fluorocarbon modified polyolefin wax.

[0042] Preferably, the organosilicon leveling agent includes polyether-modified siloxane and / or polyether-modified polydimethylsiloxane.

[0043] Preferably, the weight proportion of the leveling agent in the Micro-LED laser mass transfer release material is 0.2-1.5 parts, for example, it can be 0.2 parts, 0.3 parts, 0.4 parts, 0.5 parts, 0.6 parts, 0.7 parts, 0.8 parts, 0.9 parts, 1 parts, 1.1 parts, 1.2 parts, 1.3 parts, 1.4 parts or 1.5 parts, etc.

[0044] As a preferred technical solution of the present invention, the compatibilizer includes any one of maleic anhydride styrene, maleic anhydride butadiene, polyvinyl alcohol, glycidyl methacrylate, sodium xylene sulfonate or polydimethylsiloxane, or a combination of at least two thereof.

[0045] Preferably, the weight proportion of the leveling agent in the Micro-LED laser mass transfer release material is 3-8 parts, for example, it can be 3 parts, 3.5 parts, 4 parts, 4.5 parts, 5 parts, 5.5 parts, 6 parts, 6.5 parts, 7 parts, 7.5 parts or 8 parts, etc.

[0046] As a preferred technical solution of the present invention, the Micro-LED laser mass transfer release material includes the following combination of parts by weight:

[0047]

[0048] The monomers forming the polymer resin containing azobenzene groups include monomers containing nitrogen benzene groups and monomers containing carbon-carbon double bonds;

[0049] The molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond is ≥ (0.15-20):1.

[0050] In a second aspect, the present invention provides a method for preparing the Micro-LED laser mass transfer release material as described in the first aspect, the preparation method comprising the following steps:

[0051] The components of the Micro-LED laser mass transfer and release material are mixed evenly to obtain the Micro-LED laser mass transfer and release material.

[0052] As a preferred technical solution of the present invention, the preparation method comprises the following steps:

[0053] (1) mixing a polymer resin containing an azobenzene group, an auxiliary resin and a portion of a solvent to obtain a mixture;

[0054] (2) Mixing the mixed material with the plasticizer, the leveling agent, the compatibilizer and the remaining solvent to obtain the Micro-LED laser mass transfer release material.

[0055] It should be noted that the present invention does not have any special restrictions on the mixing methods in step (1) and step (2), and any mixing methods commonly used in the art are applicable, including but not limited to stirring. At the same time, the present invention does not have any special restrictions on the stirring speed, and any stirring speed commonly used in the art is applicable, including but not limited to 100 to 300 rpm, such as 100 rpm, 120 rpm, 150 rpm, 180 rpm, 200 rpm, 230 rpm, 250 rpm, 270 rpm or 300 rpm, etc.

[0056] As a preferred technical solution of the present invention, step (2) further includes a post-treatment step after the mixing, and the post-treatment method includes standing and filtering.

[0057] In the present invention, the filter elements used in the filtration process are 5 μm filter elements, 1 μm filter elements, 0.45 μm filter elements, and 0.2 μm filter elements.

[0058] Compared with the prior art, the present invention has the following beneficial effects:

[0059] (1) The present invention designs the specific composition of the Micro-LED laser mass transfer release material, further uses a polymer resin containing azobenzene groups, uses the polymer resin containing azobenzene groups, auxiliary resins and additives (plasticizers, leveling agents and compatibilizers), and controls the amount of each component within a specific range, thereby preparing a Micro-LED laser mass transfer release material with excellent performance. The Micro-LED laser mass transfer release material has high temperature resistance and acid and alkali resistance, can be firmly bonded to the chip, has defect-free bonding, and can achieve low-energy threshold laser release, thereby achieving a high transfer yield of the chip. The glass transition temperature is 116-145°C, the 100-grid grade after natron is 4B or 5B, the 100-grid grade after acid natron is 4B or 5B, and the chip transfer yield is 97.89-99.99%.

[0060] (2) The present invention further improves the comprehensive performance of the Micro-LED laser mass transfer release material by further designing the molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond to be (0.5-15):1, wherein the glass transition temperature is 116-145°C, the 100 grid grade after natron is 5B, the 100 grid grade after acid natron is 5B, and the chip transfer yield is 98.99-99.99%. BRIEF DESCRIPTION OF THE DRAWINGS

[0061] Figure 1 This is a schematic diagram of the accuracy of the Micro-LED device after Micro-LED laser mass transfer using the Micro-LED laser mass transfer release material provided in Example 1 of the present invention. DETAILED DESCRIPTION

[0062] The technical solution of the present invention is further described below in conjunction with the accompanying drawings and through specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0063] The sources of some components in the following examples and comparative examples are as follows:

[0064] Auxiliary resin:

[0065] 1,3-Phenylene tetrakis(2,6-dimethylphenyl)phosphate (condensation polymer): Japan Daihachi Chemical Industry Co., Ltd. (originally imported from Japan), product specification: PX-200.

[0066] Polystyrene: 100 mmol of styrene, 0.5 mmol of AIBN and 125 mL of cyclohexanone were added to a round-bottom flask, and nitrogen substitution was performed. The mixture was stirred and reacted at 80° C. and 100 rpm for 2 hours to obtain polystyrene.

[0067] ABS: 20 mmol acrylonitrile (A), 30 mmol butadiene (B) and 50 mmol styrene (S) were added to a round-bottom flask in sequence, and 200 mL cyclohexanone was added. The atmosphere was replaced with nitrogen and stirred at 80°C and 100 rpm for 3 hours to obtain ABS.

[0068] Poly-1-butene: 100 mmol of 1-butene and 0.2 mmol of AIBN were added to a round-bottom flask, and nitrogen substitution was performed. The mixture was stirred and reacted at 80° C. and 100 rpm for 1 hour to obtain poly-1-butene.

[0069] Styrene-acrylic acid copolymer: 60 mmol of styrene and 40 mmol of methyl methacrylate were added to a round-bottom flask in sequence, and 100 mL of cyclohexanone was added. The mixture was replaced with nitrogen and stirred at 80°C and 100 rpm for 2 hours to obtain a styrene-acrylic acid copolymer.

[0070] Leveling agent:

[0071] Acrylate functional polyester modified polydimethylsiloxane solution: Hangzhou Baoerde Silicone Co., Ltd.; product model: BD-3371;

[0072] Fluorocarbon modified polyolefin wax: Guangzhou Shunrun New Material Technology Co., Ltd.; FCF-203;

[0073] Polyether modified siloxane: Shanghai Jiader Chemical Technology Co., Ltd.; 8030F;

[0074] Polyether modified polydimethylsiloxane: Dowsil; DOWSIL TM Q4-3669 and DOWSIL TM 5562;

[0075] Compatibilizer:

[0076] Polydimethylsiloxane: Suzhou Yaco Technology Co., Ltd.; product number is E0300;

[0077] Polyvinyl alcohol: McLean; CAS number: 9002-89-5.

[0078] Preparation Examples 1-11, Comparative Preparation Example 1

[0079] Preparation Examples 1-11 and Comparative Preparation Example 1 respectively provide a polymer resin containing an azobenzene group, and the preparation method of the polymer resin containing an azobenzene group is as follows:

[0080] Using free radical polymerization, under nitrogen protection, the monomer containing nitrogen phenyl group and the monomer containing carbon-carbon double bond were added into a three-necked flask according to the designed amount of each monomer in Table 1 and cyclohexanone (300 mL), and reacted at 70°C for 8 hours with a stirring rate of 100 rpm. After the reaction, the reaction solution was poured into a large amount of ethanol to precipitate the product, and the polymer product was filtered and dried;

[0081] Among them, the above preparation examples and the specific selection of the nitrogen-containing phenyl group monomer and the monomer containing a carbon-carbon double bond in the preparation examples, and the molar ratio of the nitrogen-containing phenyl group monomer and the monomer containing a carbon-carbon double bond are shown in Table 1 below, wherein the molar amount of the monomer containing a carbon-carbon double bond is 1 mol:

[0082] Table 1

[0083]

[0084] Example 1-Example 15, Comparative Example 1-Comparative Example 4

[0085] Example 1 to Example 15 and Comparative Example 1 to Comparative Example 4 respectively provide a Micro-LED laser mass transfer release material and a preparation method thereof. The Micro-LED laser mass transfer release material includes components in parts by weight as shown in Table 2-3.

[0086] The preparation method of the above-mentioned Micro-LED laser mass transfer release material is as follows:

[0087] (1) adding azobenzene group-containing polymer resin and auxiliary resin into a stirring kettle, slowly stirring at a speed of 100 rpm, adding part of the solvent (60% of all solvents) thereto and mixing, adjusting the speed to 150 rpm and stirring for 4 hours, then increasing the speed to 200 rpm and continuing stirring for 4 hours to obtain a mixture;

[0088] (2) Add plasticizer, leveling agent, compatibilizer and remaining solvent to the mixture in step (1), adjust the speed to 250 rpm and stir for 24 hours, then increase the speed to 300 rpm, continue stirring for 24 hours, let it stand for 24 hours, and then use a filter element with a pore size of 5 μm, a filter element with a pore size of 1 μm, a filter element with a pore size of 0.45 μm, and a filter element with a pore size of 0.2 μm in turn to filter and obtain the Micro-LED laser mass transfer release material.

[0089] Table 2

[0090]

[0091]

[0092] Table 3

[0093]

[0094]

[0095] The performance of the Micro-LED laser mass transfer release materials provided in the above embodiments and comparative examples was tested, and the specific testing method is as follows:

[0096] Glass transition temperature: According to the national standard GB / T 15022.2~5, a differential scanning calorimeter was used for testing, and the experimental conditions were set as follows: heating rate 5°C / min, nitrogen atmosphere, temperature range -20 to 250°C;

[0097] 100-grid grade after natron: After spin coating and drying the Micro-LED laser mass transfer release material provided in the above embodiments and comparative examples (spin coating thickness is 4 μm), soak it in 40% KOH@60℃@10min, dry it again, and then perform 100-grid test according to GB / T 9286-2021;

[0098] 100-grid grade after acid soaking: After spin coating and drying the Micro-LED laser mass transfer release material provided in the above embodiments and comparative examples (spin coating thickness is 4 μm), soak it in 37% HCl @ 60 ° C @ 5 min, dry it again, and then perform a 100-grid test according to GB / T 9286-2021;

[0099] Chip transfer yield: calculate the ratio of chips that can light up after transfer to the total transferred chips;

[0100] The schematic diagram of the accuracy of the Micro-LED device after the Micro-LED laser mass transfer using the Micro-LED laser mass transfer release material provided in Example 1 of the present invention is as follows: Figure 1 As shown. Figure 1 It can be seen that the device arrangement matrix is ​​very regular, and no chip distortion or offset is found, indicating that it has high precision.

[0101] The specific test data are shown in Table 4 below.

[0102] Table 4

[0103]

[0104]

[0105] The present invention designs the specific composition of the Micro-LED laser mass transfer release material, further uses a polymer resin containing azobenzene groups, uses the polymer resin containing azobenzene groups, auxiliary resins and additives (plasticizers, leveling agents and compatibilizers), and controls the amount of each component within a specific range, thereby preparing a Micro-LED laser mass transfer release material with excellent performance. The Micro-LED laser mass transfer release material has high temperature resistance and acid and alkali resistance, can be firmly bonded to the chip, has defect-free bonding, and can achieve low-energy threshold laser release, thereby achieving a high transfer yield of the chip. The glass transition temperature is 116-145°C, the 100-grid grade after natron is 4B or 5B, the 100-grid grade after acid natron is 4B or 5B, and the chip transfer yield is 97.89-99.99%.

[0106] The present invention optimizes the dosage range of each component of the Micro-LED laser mass transfer release material and controls the molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond to be (0.5-15):1, thereby further improving the comprehensive performance of the Micro-LED laser mass transfer release material, the glass transition temperature of which is 116-145°C, the 100 grid grade after natron is 5B, the 100 grid grade after acid natron is 5B, and the chip transfer yield is 98.99-99.99%.

[0107] It can be seen from Example 4, Examples 9-11 and Comparative Example 3 that the present invention prepares a Micro-LED laser mass transfer release material with excellent performance by controlling the molar ratio of monomers containing nitrogen benzene groups and monomers containing carbon-carbon double bonds within a specific range.

[0108] It can be seen from Example 4, Examples 12-15 and Comparative Examples 1-2 that the present invention prepares a Micro-LED laser mass transfer release material with excellent performance by controlling the amount of the polymer resin containing azobenzene groups within a specific range.

[0109] In summary, the present invention designs the specific composition of the Micro-LED laser mass transfer release material, further uses azobenzene group-containing polymer resin, and uses the azobenzene group-containing polymer resin, auxiliary resin and auxiliary agents (plasticizer, leveling agent and compatibilizer), and controls the amount of each component within a specific range, thereby preparing a Micro-LED laser mass transfer release material with excellent performance. The Micro-LED laser mass transfer release material has high temperature resistance and acid and alkali resistance, can be firmly bonded to the chip, has defect-free bonding, and can achieve low-energy threshold laser release, thereby achieving a high transfer yield of the chip.

[0110] The applicant declares that the present invention illustrates the detailed process flow of the present invention through the above-mentioned embodiments, but the present invention is not limited to the above-mentioned detailed process flow, that is, it does not mean that the present invention must rely on the above-mentioned detailed process flow to be implemented. Those skilled in the art should understand that any improvement of the present invention, equivalent replacement of various raw materials of the product of the present invention, addition of auxiliary components, selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

Claims

1. A Micro-LED laser mass transfer release material, characterized in that: The Micro-LED laser mass transfer release material comprises the following combination of parts by weight: The monomers forming the polymer resin containing azobenzene groups include monomers containing nitrogen benzene groups and monomers containing carbon-carbon double bonds; The molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond is ≥0.15:

1.

2. The Micro-LED laser mass transfer release material according to claim 1, characterized in that: The nitrogen-containing phenyl group monomer is selected from N-(4-phenylazophenyl) maleimide, 4-[(4-methylphenyl) azo] phenyl maleimide, 2-[(4-hydroxyphenyl) azo]-2-methyl maleimide, 4-[(4-ethoxyphenyl) azo] phenyl maleimide, 3-[(4-chlorophenyl) azo]-3-methyl maleimide, 4-[(4-methylphenyl) azo] phenyl methacrylate, 4-[(4-hydroxyphenyl) azo] phenyl maleimide, ]phenyl acrylate, 2-[(4-ethoxyphenyl)azo]-2-methylacrylate, 4-[(4-chlorophenyl)azo]phenyl methacrylate, 2-[(4-nitrophenyl)azo]-2-ethylacrylate, 4-[(4-methylphenyl)azo]-5-norbornene, 2-[(4-hydroxyphenyl)azo]-3-norbornene, 3-[(4-ethoxyphenyl)azo]-2-norbornene, or a combination of at least two thereof; Preferably, the monomer containing a carbon-carbon double bond is selected from any one or a combination of at least two of styrene, p-methylstyrene, α-methylstyrene, 2-vinylnaphthalene, 4-(trifluoromethyl)styrene, benzyl methacrylate, n-butyl methacrylate, isobutyl methacrylate, isobutyl acrylate, 2-ethylethyl acrylate, 2-ethylhexyl methacrylate, β-hydroxyethyl(propyl) methacrylate or methyl ethylacrylate; Preferably, the molar ratio of the monomer containing nitrogen benzene group to the monomer containing carbon-carbon double bond is (0.5-15):1, more preferably (0.8-10):1; Preferably, the weight proportion of the polymer resin containing azobenzene groups in the Micro-LED laser mass transfer release material is 15-30 parts.

3. The Micro-LED laser mass transfer release material according to claim 1 or 2, characterized in that: The auxiliary resin is selected from any one or a combination of at least two of 1,3-phenylene tetrakis(2,6-dimethylphenyl)phosphate (condensation polymer), polystyrene, polyvinyl chloride, poly-1-butene, acrylonitrile-styrene copolymer, maleic acid butylene glycol-styrene copolymer, maleic anhydride-2-2-ethylethyl ester-styrene copolymer, vinyl acetate-styrene copolymer, acrylonitrile-butadiene-styrene copolymer, styrene-butadiene-styrene copolymer, methyl methacrylate-butadiene-styrene terpolymer, styrene acrylic resin, acrylic acid-acrylic ether copolymer, acrylate-butylene glycol acrylate or terpolymer acrylic acid ester; Preferably, the weight proportion of the auxiliary resin in the Micro-LED laser mass transfer release material is 5-15 parts.

4. The Micro-LED laser mass transfer release material according to any one of claims 1 to 3, characterized in that: The solvent is selected from any one of ketone solvents, aromatic hydrocarbon solvents, ether solvents, amide solvents, dimethyl sulfoxide, and decalin, or a combination of at least two thereof; Preferably, the ketone solvent includes any one of acetone, butanone, cyclohexanone, and isophorone, or a combination of at least two thereof; Preferably, the aromatic hydrocarbon solvent includes toluene and / or trimethylbenzene; Preferably, the ether solvent includes any one or a combination of at least two of dioxane, 1,3-dioxolane, 2,2,4,4,5,5-hexamethyl-1,3-dioxolane, 2,2-dimethoxy-4-(trifluoromethyl)-1,3-dioxolane ether, tetrahydrofuran or fluorinated hexacyclic coordination ether; Preferably, the amide solvent includes dimethylformamide and / or N,N-dimethylacetamide.

5. The Micro-LED laser mass transfer release material according to any one of claims 1 to 4, characterized in that: The plasticizer includes any one of di(2-ethylhexyl) phthalate, dibutyl phthalate, dimethyl adipate, acetyl tributyl citrate, dioctyl phthalate, epoxy soybean oil or propylene carbonate, or a combination of at least two thereof; Preferably, the weight proportion of the plasticizer in the Micro-LED laser mass transfer release material is 0.5-1 part.

6. The Micro-LED laser mass transfer release material according to any one of claims 1 to 5, characterized in that: The leveling agent includes any one of an acrylic leveling agent, a fluorocarbon leveling agent or an organic silicon leveling agent or a combination of at least two thereof; Preferably, the weight proportion of the leveling agent in the Micro-LED laser mass transfer release material is 0.2-1.5 parts.

7. The Micro-LED laser mass transfer release material according to any one of claims 1 to 6, characterized in that: The compatibilizer includes any one or a combination of at least two of maleic anhydride styrene, maleic anhydride butadiene, polyvinyl alcohol, glycidyl methacrylate, sodium xylene sulfonate or polydimethylsiloxane; Preferably, the weight proportion of the leveling agent in the Micro-LED laser mass transfer release material is 3-8 parts.

8. A method for preparing a Micro-LED laser mass transfer release material according to any one of claims 1 to 7, characterized in that: The preparation method comprises the following steps: The components of the Micro-LED laser mass transfer and release material are mixed evenly to obtain the Micro-LED laser mass transfer and release material.

9. The preparation method according to claim 8, characterized in that: The preparation method comprises the following steps: (1) mixing a polymer resin containing an azobenzene group, an auxiliary resin and a portion of a solvent to obtain a mixture; (2) Mixing the mixed material with the plasticizer, the leveling agent, the compatibilizer and the remaining solvent to obtain the Micro-LED laser mass transfer release material.

10. The preparation method according to claim 8 or 9, characterized in that: Step (2) also includes a post-processing step after the mixing, and the post-processing method includes standing and filtering.