A transportation device for integrated circuit production

Abstract

The present invention relates to the technical field of transportation devices, and more specifically discloses a transportation device for integrated circuit production, including a positioning and conveying component, one side of the inner side of the positioning and conveying component is movably connected with an exhaust component, and the other side of the inner side of the positioning and conveying component is fixedly connected with an exhaust component, the exhaust component includes an exhaust groove, one side of the exhaust groove is fixedly connected with a positioning strip, the inner side of the exhaust groove is provided with a filter screen, and the bottom of the filter screen is fixedly connected with a first square tube of different diameters; during the operation of the exhaust component and the exhaust component of the present invention, the airflow generated by the air pump blowing toward the inner side of the transmission belt during use will suck the parts debris and dust located on the top of the transmission belt into the exhaust groove, and then the second positioning semicircular ring rotates under the positioning of the rotating positioning block, and then the exhaust component can be pulled out as a whole, and then the filter screen can be cleaned.

Description

Technical Field

[0001] The present invention relates to the technical field of transportation devices, and more particularly to a transportation device for integrated circuit production. Background Art

[0002] An integrated circuit is a microelectronic device or component. It integrates elements such as transistors, diodes, resistors, capacitors, and inductors required for the circuit, as well as wiring interconnections, on a small piece or several small pieces of semiconductor wafers or dielectric substrates through a specific process, and then encapsulates them in a package to form a micro-structure with the required circuit functions.

[0003] In the process of integrated circuit production, the transportation link is one of the key links to ensure the smooth progress of the entire production process. In the entire integrated circuit production process, the main equipment in the transportation link is: a conveyor belt, which is used to transport wafers, integrated circuits, or other materials between production lines.

[0004] When the existing transportation devices for integrated circuit production are in use, there are some deficiencies as follows:

[0005] During the existing integrated circuit transportation process, when used for the transportation of integrated circuits or the transportation of core parts of integrated circuits, during the operation of the conveyor belt, the integrated circuits or core parts of integrated circuits located on the conveyor belt will, during the start-up of the conveyor belt, due to inertia, have a small relative displacement with the conveyor belt, which will cause friction to the integrated circuits or core parts of integrated circuits. Therefore, during the transportation process, it will cause certain scratches on the surface of the integrated circuits or core parts of integrated circuits, which is not conducive to ensuring the integrity of the integrated circuits or core parts of integrated circuits. And after being transported to the designated position, it is necessary to use scraping equipment or pushing equipment to push the integrated circuits or core parts of integrated circuits located outside the conveyor belt to the designated position. However, during the pushing process, the integrated circuits or core parts of integrated circuits will slide on the conveyor belt, which will cause scratches to some of the integrated circuits or core parts of integrated circuits, making it inconvenient to ensure the integrity of the integrated circuits or core parts of integrated circuits and the integrity of the appearance of the integrated circuits or core parts of integrated circuits. Summary of the Invention

[0006] In order to overcome the above-mentioned defects of the prior art, the present invention provides a transportation device for integrated circuit production to solve the problems existing in the above-mentioned background art.

[0007] The present invention provides the following technical solution: A transportation device for integrated circuit production, including a positioning and conveying component, on one side inside the positioning and conveying component, an air extraction component is movably clamped, on the other side inside the positioning and conveying component, an exhaust component is fixedly connected. The air extraction component includes an air extraction groove, on one side of the air extraction groove, a positioning strip is fixedly connected, inside the air extraction groove, a filter screen is arranged, at the bottom of the filter screen, a first stepped square pipe is fixedly connected, and at the bottom of the first stepped square pipe, a gas guiding component is fixedly connected.

[0008] Further, the positioning and conveying component includes a first servo motor, on the front of the first servo motor, a sealing back plate is fixedly connected, on the front of the sealing back plate, a U-shaped positioning block is fixedly connected, the output shaft of the first servo motor is in transmission connection with a transmission block, at the bottom of the U-shaped positioning block, a support leg is fixedly connected, on the other side of the U-shaped positioning block, a guiding and positioning block is fixedly connected, outside the transmission block, a transmission belt is movably sleeved, and on the front and back of the inner side of the transmission belt, convex guiding grooves are opened.

[0009] Further, the gas guiding component includes a gas guiding pipe, on one side of the gas guiding pipe, a second servo motor is fixedly connected, the output shaft of the second servo motor is in transmission connection with a rotating shaft, outside the rotating shaft, a fan blade is fixedly connected, on the other side outside the gas guiding pipe, a first positioning ring is fixedly connected, and on the front and back of the gas guiding pipe, first L-shaped square pipes are fixedly connected.

[0010] Further, the exhaust component includes an exhaust groove, on the front and back of the top of the exhaust groove, convex sliding blocks are fixedly connected, on one side of the bottom of the exhaust groove, a limiting plate is fixedly connected, at the bottom inside the exhaust groove, a second stepped square pipe is fixedly connected, at the bottom of the second stepped square pipe, a second L-shaped square pipe is fixedly connected, inside the second L-shaped square pipe, an exhaust pipe is fixedly connected, on one side of the exhaust pipe, an air pump is fixedly connected, and on one side of the air pump, a sealing and positioning component is fixedly connected.

[0011] Further, the sealing and positioning component includes an air extraction pipe, on one side outside the air extraction pipe, a second positioning ring is fixedly connected, outside the second positioning ring, a first positioning semi-ring is fixedly sleeved, on the top of the first positioning semi-ring, a first fastening and positioning plate is fixedly connected, at the bottom of the first positioning semi-ring, a rotating positioning block is movably clamped, at the bottom of the rotating positioning block, a second positioning semi-ring is fixedly connected, outside the second positioning semi-ring, a second fastening and positioning block is fixedly connected, outside the second positioning semi-ring, a positioning square plate is fixedly connected, and inside the positioning square plate, a positioning bolt is movably connected.

[0012] Further, there is a tolerance fit between the cross-sectional dimensions of the positioning strip and the square guide groove. The top of the limiting plate and the bottom of the air extraction groove are on the same plane. The fan blades are grouped in threes, and two on the front and back of the first L-shaped square tube are grouped as one set. The number of groups of the fan blades is the same as that of the first L-shaped square tube. The position of the fan blades is at the central position between two first L-shaped square tubes. The top of the first reducing square tube and the bottom of the filter net cooperate with each other. Square holes are provided on the front and back of the gas guide tube. There is a tolerance fit between the size of the square holes in the gas guide tube and the size of the first L-shaped square tube, and welding treatment is carried out.

[0013] Further, the diameter of the exhaust pipe and the diameter of the gas guide tube cooperate with each other. The back of the exhaust groove is fixedly connected to the front of the sealing back plate. There is a tolerance fit between the cross-sectional dimensions of the convex guide groove and the convex slider. The width at the top of the exhaust groove is the same as the width of the transmission belt. The width of the exhaust groove is the same as the width of the air extraction groove.

[0014] Further, the outer diameter of the second positioning ring is the same as the outer diameter of the first positioning ring. The diameter of the air extraction pipe is the same as the diameter of the gas guide tube. There is a tolerance fit between the inner diameter of the first positioning semi-circular ring and the outer diameter of the second positioning ring. There is a tolerance fit between the diameters of the openings on both sides of the first positioning semi-circular ring and the outer diameter of the air extraction pipe. The inner diameter and the diameters of the openings on both sides of the second positioning semi-circular ring are the same as the inner diameter and the diameters of the openings on both sides of the first positioning semi-circular ring.

[0015] Further, the top of the second tight fixing block and the top of the second positioning semi-circular ring are on the same plane. The front of the first tight fixing plate and the front of the first positioning semi-circular ring are on the same plane. The front of the second tight fixing block is parallel to the back of the positioning square plate. Threaded holes are provided on the fronts of the second tight fixing block and the first tight fixing plate. The internal threads of the first tight fixing plate and the second tight fixing block cooperate with the external threads of the positioning bolt.

[0016] The technical effects and advantages of the present invention:

[0017] 1. During the use of the present invention, the first servo motor works to drive the transmission block to rotate, and then drives the transmission belt to transmit, so as to achieve the purpose of conveying integrated circuits or core parts of integrated circuits. Then, the air pump works to extract the air inside the air extraction groove through the gas guiding pipe, the first L-shaped square pipe and the first reducing square pipe. Then, since the transmission belt covers the top of the air extraction groove, the gas will extract air through the air holes on the outer side of the transmission belt. If there is an integrated circuit or a core part of an integrated circuit on the top of the transmission belt at the top of the air extraction groove at this time, the flow of the gas generates a downward suction force, so that the integrated circuit or the core part of the integrated circuit is adsorbed on the outer side of the transmission belt, avoiding the situation that the integrated circuit or the core part of the integrated circuit located on the top of the transmission belt generates relative displacement with the transmission belt due to its own inertia during the conveying process, and scratches occur, ensuring the integrity of the appearance of the integrated circuit or the core part of the integrated circuit.

[0018] 2. When the integrated circuit or the core part of the integrated circuit located on the outer side of the transmission belt moves to the top of the exhaust groove driven by the transmission belt, the air pump extracts the air in the air extraction groove and blows it into the exhaust groove through the exhaust pipe, the second L-shaped square pipe and the second reducing square pipe, so that the air passes from the inner side of the transmission belt through the air holes of the transmission belt to the outer side of the transmission belt. Then, through the fixation of the convex slider and the convex guiding groove, the situation that the transmission belt is not attached to the exhaust groove due to the blowing of the gas is avoided, ensuring the seal between the transmission belt and the exhaust groove, so that the gas can only be discharged through the air holes on the outer side of the transmission belt, and the integrated circuit or the core part of the integrated circuit located on the top of the exhaust groove will be blown up by the gas. At this time, the integrated circuit or the core part of the integrated circuit pushed by the pushing device is suspended on the top of the transmission belt. Therefore, it effectively avoids the friction between the integrated circuit or the core part of the integrated circuit and the transmission belt when the pushing or scraping device operates, ensuring the integrity of the appearance of the integrated circuit or the core part of the integrated circuit and the integrity of the product.

[0019] 3. During the operation of the air extraction component and the exhaust component of the present invention, during the use process, the airflow blowing towards the inner side of the transmission belt generated by the operation of the air pump will suck the part debris and dust on the top of the transmission belt into the air extraction groove, and effectively remove the part debris and dust on the top of the transmission belt under the filtration of the filter screen. Then, by rotating the positioning bolt, the positioning bolt leaves the first tight fixing plate, and then the first positioning semi-ring and the second positioning semi-ring are separated. Then, the second positioning semi-ring rotates under the positioning of the rotating positioning block, and then the whole air extraction component can be taken out, and then the filter screen can be cleaned.

[0020] 4. During the use of the present invention, the second servo motor works to drive the rotation of the rotating shaft, which in turn drives the rotation of the fan blades, generating an air flow moving towards the sealing and positioning component. Subsequently, it can cooperate with the sealing and positioning component to effectively enhance the suction force inside the air extraction groove and the blown air flow inside the exhaust groove, ensuring the fixation and blowing of the integrated circuit or the core components of the integrated circuit. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a schematic diagram of the overall structure of the present invention.

[0022] Figure 2 It is a schematic diagram of the structure of the positioning and conveying component of the present invention.

[0023] Figure 3 It is a schematic sectional view of the positioning and conveying component of the present invention.

[0024] Figure 4 It is a schematic diagram of the structure of the air extraction component of the present invention.

[0025] Figure 5 It is a schematic sectional view of the air extraction component of the present invention.

[0026] Figure 6 It is a schematic sectional view of the gas guiding component of the present invention.

[0027] Figure 7 It is a schematic diagram of the structure of the exhaust component of the present invention.

[0028] Figure 8 It is a schematic diagram of the structure of the sealing and positioning component of the present invention.

[0029] The reference numerals are: 1, positioning and conveying assembly; 101, first servo motor; 102, U-shaped positioning block; 103, driving block; 104, support leg; 105, guiding and positioning block; 106, sealing back plate; 107, transmission belt; 108, convex guiding groove; 109, square guiding groove; 2, air extraction assembly; 201, air extraction groove; 202, positioning strip; 203, filter net; 204, first reducing square pipe; 205, gas guiding assembly; 2051, gas guiding pipe; 2052, second servo motor; 2053, rotating shaft; 2054, fan blade; 2055, first positioning ring; 2056, first L-shaped square pipe; 3, exhaust assembly; 301, exhaust groove; 302, convex sliding block; 303, limiting plate; 304, second reducing square pipe; 305, second L-shaped square pipe; 306, exhaust pipe; 307, air pump; 308, sealing and positioning assembly; 3081, air extraction pipe; 3082, second positioning ring; 3083, first positioning semi-circular ring; 3084, first fastening and positioning plate; 3085, rotating positioning block; 3086, second positioning semi-circular ring; 3087, second fastening and positioning block; 3088, positioning square plate; 3089, positioning bolt. Detailed implementation manners

[0030] Next, the technical solutions in the present invention will be clearly and completely described in conjunction with the accompanying drawings in the present invention. In addition, the forms of each structure described in the following implementation manners are merely examples, and the transport device for integrated circuit production involved in the present invention is not limited to the structures described in the following implementation manners. All other implementation manners obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0031] Referring to Figures 1 to 8 , the present invention provides a transport device for integrated circuit production, including a positioning and conveying assembly 1. One side inside the positioning and conveying assembly 1 is movably clamped with an air extraction assembly 2, and the other side inside the positioning and conveying assembly 1 is fixedly connected with an exhaust assembly 3. The air extraction assembly 2 includes an air extraction groove 201. One side of the air extraction groove 201 is fixedly connected with a positioning strip 202. A filter net 203 is arranged inside the air extraction groove 201. The bottom of the filter net 203 is fixedly connected with a first reducing square pipe 204. The bottom of the first reducing square pipe 204 is fixedly connected with a gas guiding assembly 205.

[0032] In a preferred embodiment, the positioning and conveying assembly 1 includes a first servo motor 101. A sealing backplate 106 is fixedly connected to the front of the first servo motor 101. A U-shaped positioning block 102 is fixedly connected to the front of the sealing backplate 106. The output shaft of the first servo motor 101 is in transmission connection with a transmission block 103. A support leg 104 is fixedly connected to the bottom of the U-shaped positioning block 102. A guiding positioning block 105 is fixedly connected to the other side of the U-shaped positioning block 102. A transmission belt 107 is movably sleeved on the outside of the transmission block 103. Convex guiding grooves 108 are formed on the front and back of the inner side of the transmission belt 107.

[0033] In a preferred embodiment, the gas guiding assembly 205 includes a gas guiding pipe 2051. A second servo motor 2052 is fixedly connected to one side of the gas guiding pipe 2051. The output shaft of the second servo motor 2052 is in transmission connection with a rotating shaft 2053. A fan blade 2054 is fixedly connected to the outside of the rotating shaft 2053. A first positioning ring 2055 is fixedly connected to the other side of the outside of the gas guiding pipe 2051. First L-shaped square pipes 2056 are fixedly connected to the front and back of the gas guiding pipe 2051; during the use process, the second servo motor 2052 works to drive the rotating shaft 2053 to rotate, and then drives the fan blade 2054 to rotate, generating an air flow moving towards the sealing and positioning assembly 308. Then, it can cooperate with the sealing and positioning assembly 308 to effectively enhance the suction force inside the air extraction groove 201 and the blown air flow inside the exhaust groove 301, ensuring the fixation and blowing of the integrated circuit or the core parts of the integrated circuit; during the use process, the first servo motor 101 works to drive the transmission block 103 to rotate and then drives the transmission belt 107 to transmit, so as to achieve the purpose of conveying the integrated circuit or the core parts of the integrated circuit. Then, the air pump 307 works to extract the air inside the air extraction groove 201 through the gas guiding pipe 2051, the first L-shaped square pipe 2056 and the first reducing square pipe 204. Then, since the transmission belt 107 covers the top of the air extraction groove 201, the gas will extract air through the air holes on the outside of the transmission belt 107. If there is an integrated circuit or the core parts of the integrated circuit on the top of the transmission belt 107 at the top of the air extraction groove 201 at this time, the flowing gas generates a downward suction force, so that the integrated circuit or the core parts of the integrated circuit are adsorbed on the outside of the transmission belt 107, avoiding the situation that the integrated circuit or the core parts of the integrated circuit on the top of the transmission belt 107 generate relative displacement with the transmission belt 107 due to its own inertia during the conveying process and causing scratches, ensuring the integrity of the appearance of the integrated circuit or the core parts of the integrated circuit.

[0034] In a preferred embodiment, the exhaust assembly 3 includes an exhaust groove 301. Convex sliders 302 are fixedly connected to the front and back of the top of the exhaust groove 301. A limiting plate 303 is fixedly connected to one side of the bottom of the exhaust groove 301. A second reducing square pipe 304 is fixedly connected to the bottom of the inner side of the exhaust groove 301. A second L-shaped square pipe 305 is fixedly connected to the bottom of the second reducing square pipe 304. An exhaust pipe 306 is fixedly connected to the inner side of the second L-shaped square pipe 305. An air pump 307 is fixedly connected to one side of the exhaust pipe 306. A sealing and positioning assembly 308 is fixedly connected to one side of the air pump 307. When the integrated circuit or the core component of the integrated circuit located outside the conveyor belt 107 moves to the top of the exhaust groove 301 driven by the conveyor belt 107, the air pump 307 extracts the air from the air extraction groove 201 and blows it into the exhaust groove 301 through the exhaust pipe 306, the second L-shaped square pipe 305, and the second reducing square pipe 304, so that the air passes from the inner side of the conveyor belt 107 to the outside of the conveyor belt 107 through the air holes of the conveyor belt 107. Then, through the fixation of the convex sliders 302 and the convex guide grooves 108, the situation that the conveyor belt 107 is not in contact with the exhaust groove 301 due to the blowing of the gas is avoided, ensuring the seal between the conveyor belt 107 and the exhaust groove 301 so that the gas can only be discharged through the air holes on the outside of the conveyor belt 107, causing the integrated circuit or the core component of the integrated circuit located at the top of the exhaust groove 301 to be blown up. At this time, the integrated circuit or the core component of the integrated circuit pushed by the pushing device is suspended above the conveyor belt 107. Therefore, effectively, the friction between the integrated circuit or the core component of the integrated circuit and the conveyor belt 107 during the operation of the pushing or scraping device is avoided, ensuring the integrity of the appearance of the integrated circuit or the core component of the integrated circuit and the integrity of the product.

[0035] In a preferred embodiment, the sealing and positioning assembly 308 includes an air extraction pipe 3081. On one side outside the air extraction pipe 3081, a second positioning ring 3082 is fixedly connected. A first positioning semi-circular ring 3083 is fixedly sleeved outside the second positioning ring 3082. At the top of the first positioning semi-circular ring 3083, a first tightening and positioning plate 3084 is fixedly connected. At the bottom of the first positioning semi-circular ring 3083, a rotating positioning block 3085 is movably clamped. At the bottom of the rotating positioning block 3085, a second positioning semi-circular ring 3086 is fixedly connected. On the outside of the second positioning semi-circular ring 3086, a second tightening and positioning block 3087 is fixedly connected. On the outside of the second positioning semi-circular ring 3086, a positioning square plate 3088 is fixedly connected. Inside the positioning square plate 3088, a positioning bolt 3089 is movably connected. During the operation of the air extraction assembly 2 and the exhaust assembly 3, during use, the airflow blowing towards the inside of the transmission belt 107 generated by the operation of the air pump 307 will suck the part debris, dust, etc. on the top of the transmission belt 107 into the air extraction groove 201. And under the filtration of the filter net 203, the part debris and dust on the top of the transmission belt 107 are effectively removed. Then, by rotating the positioning bolt 3089 to make the positioning bolt 3089 leave the first tightening and positioning plate 3084, the first positioning semi-circular ring 3083 and the second positioning semi-circular ring 3086 are separated. Then, under the positioning of the second positioning semi-circular ring 3086 and the rotating positioning block 3085, rotation occurs. Then, the entire air extraction assembly 2 can be pulled out, and then the filter net 203 can be cleaned.

[0036] In a preferred embodiment, the cross-sectional dimension of the positioning strip 202 and the cross-sectional dimension of the square guiding groove 109 have a tolerance fit. The top of the limiting plate 303 and the bottom of the air extraction groove 201 are on the same plane. The fan blades 2054 are grouped in threes, and the two on the front and back of the first L-shaped square pipe 2056 are grouped as one group. The number of groups of the fan blades 2054 is the same as the number of groups of the first L-shaped square pipe 2056. The position where the fan blades 2054 are located is at the central position between the two first L-shaped square pipes 2056. The top of the first reducing square pipe 204 and the bottom of the filter net 203 cooperate with each other. Square holes are provided on both the front and back of the gas guiding pipe 2051. The size of the square holes of the gas guiding pipe 2051 and the size of the first L-shaped square pipe 2056 have a tolerance fit and are welded.

[0037] In a preferred embodiment, the diameter of the exhaust pipe 306 and the diameter of the gas guiding pipe 2051 cooperate with each other. The back of the exhaust groove 301 is fixedly connected to the front of the sealing back plate 106. The cross-sectional dimension of the convex guiding groove 108 and the cross-sectional dimension of the convex slider 302 have a tolerance fit. The width at the top of the exhaust groove 301 is the same as the width of the transmission belt 107. The width of the exhaust groove 301 is the same as the width of the air extraction groove 201.

[0038] In a preferred embodiment, the outer diameter of the second positioning ring 3082 is the same as the outer diameter of the first positioning ring 2055, the diameter of the air extraction pipe 3081 is the same as the diameter of the gas guiding pipe 2051, there is a tolerance fit between the inner diameter of the first positioning semi-circular ring 3083 and the outer diameter of the second positioning ring 3082, there is a tolerance fit between the diameter of the openings on both sides of the first positioning semi-circular ring 3083 and the outer diameter of the air extraction pipe 3081, and the inner diameter and the diameters of the openings on both sides of the second positioning semi-circular ring 3086 are the same as the inner diameter and the diameters of the openings on both sides of the first positioning semi-circular ring 3083.

[0039] In a preferred embodiment, the top of the second tight fixing positioning block 3087 and the top of the second positioning semi-circular ring 3086 are on the same plane, the front surface of the first tight fixing positioning plate 3084 and the front surface of the first positioning semi-circular ring 3083 are on the same plane, the front surface of the second tight fixing positioning block 3087 and the back surface of the positioning square plate 3088 are parallel to each other, threaded holes are provided on the front surfaces of the second tight fixing positioning block 3087 and the first tight fixing positioning plate 3084, and the internal threads of the first tight fixing positioning plate 3084 and the second tight fixing positioning block 3087 cooperate with the external threads of the positioning bolt 3089.

[0040] The working principle of the present invention: During the use process, the first servo motor 101 works to drive the transmission block 103 to rotate, and then drives the transmission belt 107 to transmit, so as to achieve the purpose of conveying integrated circuits or core parts of integrated circuits. Then, the air pump 307 works to extract the air inside the air extraction groove 201 through the gas guiding pipe 2051, the first L-shaped square pipe 2056 and the first reducing square pipe 204. Then, since the transmission belt 107 covers the top of the air extraction groove 201, the gas will extract air through the air holes on the outer side of the transmission belt 107. If there is an integrated circuit or a core part of an integrated circuit on the top of the transmission belt 107 at the top of the air extraction groove 201 at this time, the downward suction force generated by the gas flow will cause the integrated circuit or the core part of the integrated circuit to be adsorbed on the outer side of the transmission belt 107, avoiding the situation that the integrated circuit or the core part of the integrated circuit on the top of the transmission belt 107 generates relative displacement with the transmission belt 107 due to its own inertia during the conveying process and producing scratches, and ensuring the integrity of the appearance of the integrated circuit or the core part of the integrated circuit.

[0041] When the integrated circuit or the core component of the integrated circuit located outside the conveyor belt 107 moves to the top of the exhaust slot 301 driven by the conveyor belt 107, the air pump 307 extracts the air in the air extraction slot 201, which will be blown into the exhaust slot 301 through the exhaust pipe 306, the second L-shaped square pipe 305 and the second reducing square pipe 304. As a result, the air is discharged from the inner side of the conveyor belt 107 to the outer side of the conveyor belt 107 through the air holes of the conveyor belt 107. Then, through the fixation of the convex slider 302 and the convex guide groove 108, the situation that the conveyor belt 107 is not in contact with the exhaust slot 301 due to the blowing of the gas is avoided, ensuring the seal between the conveyor belt 107 and the exhaust slot 301, so that the gas can only be discharged through the air holes on the outer side of the conveyor belt 107. The integrated circuit or the core component of the integrated circuit located at the top of the exhaust slot 301 will be blown up by the gas. At this time, the integrated circuit or the core component of the integrated circuit pushed by the pushing device is suspended above the conveyor belt 107. Therefore, it effectively avoids the friction between the integrated circuit or the core component of the integrated circuit and the conveyor belt 107 when the pushing or scraping device is running, ensuring the integrity of the appearance of the integrated circuit or the core component of the integrated circuit and the integrity of the product;

[0042] During the operation of the air extraction component 2 and the exhaust component 3, during the use process, the airflow blowing towards the inner side of the conveyor belt 107 generated by the operation of the air pump 307 will suck the part debris and dust located on the top of the conveyor belt 107 into the air extraction slot 201. And under the filtration of the filter net 203, the part debris and dust on the top of the conveyor belt 107 are effectively removed. Then, by rotating the positioning bolt 3089 to make the positioning bolt 3089 leave the first tight fixing plate 3084, the first positioning semi-ring 3083 and the second positioning semi-ring 3086 are separated. Then, under the positioning of the second positioning semi-ring 3086 and the rotating positioning block 3085, the second positioning semi-ring 3086 rotates. Then the whole air extraction component 2 can be pulled out, and then the filter net 203 can be cleaned;

[0043] During the use process, the second servo motor 2052 works to drive the rotating shaft 2053 to rotate, which in turn drives the fan blade 2054 to rotate, generating an airflow moving towards the sealing and positioning component 308. Subsequently, it can cooperate with the sealing and positioning component 308 to effectively enhance the suction force inside the air extraction slot 201 and the blowing airflow inside the exhaust slot 301, ensuring the fixation and blowing up of the integrated circuit or the core component of the integrated circuit.

[0044] The following points should be noted: First, in the description of this application, it should be noted that unless otherwise specified and defined, the terms "installation", "connection", and "coupling" should be understood in a broad sense, which can be mechanical connection or electrical connection, or the communication inside two components, and can be directly connected. The terms "upper", "lower", "left", "right", etc. are only used to represent relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may change;

[0045] Second, in the drawings of the disclosed embodiments of the present invention, only the structures related to the disclosed embodiments are involved. For other structures, reference can be made to the general design. Without conflict, the same embodiment and different embodiments of the present invention can be combined with each other;

[0046] Finally, the above are only the preferred embodiments of the present invention and are not used to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A transport device for integrated circuit production, characterized in that: It comprises a positioning and conveying component (1), one side of the inner side of the positioning and conveying component (1) is movably connected with an exhaust component (2), the other side of the inner side of the positioning and conveying component (1) is fixedly connected with an exhaust component (3), the exhaust component (2) comprises an exhaust groove (201), one side of the exhaust groove (201) is fixedly connected with a positioning strip (202), a filter screen (203) is arranged on the inner side of the exhaust groove (201), the bottom of the filter screen (203) is fixedly connected with a first reducing square tube (204), and the bottom of the first reducing square tube (204) is fixedly connected with a gas guide component (205); The gas guide assembly (205) comprises a gas guide tube (2051), one side of the gas guide tube (2051) is fixedly connected to a second servo motor (2052), the output shaft of the second servo motor (2052) is drivingly connected to a rotating shaft (2053), the outer side of the rotating shaft (2053) is fixedly connected to a fan blade (2054), the other side of the outer side of the gas guide tube (2051) is fixedly connected to a first positioning ring (2055), and the front and back sides of the gas guide tube (2051) are fixedly connected to a first L-shaped square tube (2056); The exhaust assembly (3) comprises an exhaust groove (301), the front and back sides of the top of the exhaust groove (301) are fixedly connected to a convex sliding block (302), one side of the bottom of the exhaust groove (301) is fixedly connected to a limiting plate (303), the bottom of the inner side of the exhaust groove (301) is fixedly connected to a second square tube (304) of different diameters, the bottom of the second square tube (304) of different diameters is fixedly connected to a second L-shaped square tube (305), the inner side of the second L-shaped square tube (305) is fixedly connected to an exhaust pipe (306), one side of the exhaust pipe (306) is fixedly connected to an air pump (307), and one side of the air pump (307) is fixedly connected to a sealing positioning assembly (308).

2. The integrated circuit production transport device according to claim 1, characterized in that: The positioning and conveying assembly (1) comprises a first servo motor (101), the front side of the first servo motor (101) is fixedly connected to a sealing back plate (106), the front side of the sealing back plate (106) is fixedly connected to a U-shaped positioning block (102), the output shaft of the first servo motor (101) is transmission-connected to a transmission block (103), the bottom of the U-shaped positioning block (102) is fixedly connected to a supporting leg (104), the other side of the U-shaped positioning block (102) is fixedly connected to a guide positioning block (105), the outer side of the transmission block (103) is movably sleeved with a transmission belt (107), and the front and back sides of the inner side of the transmission belt (107) are both provided with convex guide grooves (108).

3. The integrated circuit production transport device according to claim 2, characterized in that: The sealing positioning assembly (308) comprises an exhaust pipe (3081), a second positioning ring (3082) is fixedly connected to one side of the outer side of the exhaust pipe (3081), a first positioning semicircular ring (3083) is fixedly sleeved on the outer side of the second positioning ring (3082), a first fastening positioning plate (3084) is fixedly connected to the top of the first positioning semicircular ring (3083), a rotating positioning block (3085) is movably clamped on the bottom of the first positioning semicircular ring (3083), a second positioning semicircular ring (3086) is fixedly connected to the bottom of the rotating positioning block (3085), a second fastening positioning block (3087) is fixedly connected to the outer side of the second positioning semicircular ring (3086), a positioning square plate (3088) is fixedly connected to the outer side of the second positioning semicircular ring (3086), and a positioning bolt (3089) is movably connected to the inner side of the positioning square plate (3088).

4. The integrated circuit production transport device according to claim 2, characterized in that: The cross-sectional dimensions of the positioning strip (202) and the cross-sectional dimensions of the square guide groove (109) are matched with each other in tolerance; the top of the limit plate (303) and the bottom of the air extraction groove (201) are on the same plane; the fan blades (2054) are grouped in three, and two of the front and back sides of the first L-shaped square tube (2056) are grouped in one group; the number of groups of the fan blades (2054) is the same as the number of groups of the first L-shaped square tube (2056); the fan blades (2054) are located at the center position between the two first L-shaped square tubes (2056); the top of the first reducing square tube (204) and the bottom of the filter screen (203) are matched with each other; square holes are provided on the front and back sides of the gas guide tube (2051); the size of the square hole of the gas guide tube (2051) and the size of the first L-shaped square tube (2056) are matched with each other in tolerance and are welded.

5. The integrated circuit production transport device according to claim 2, characterized in that: The diameter of the exhaust pipe (306) matches the diameter of the gas guide pipe (2051), the back side of the exhaust groove (301) is fixedly connected to the front side of the sealing back plate (106), the cross-sectional dimensions of the convex guide groove (108) match the cross-sectional dimensions of the convex slider (302) with a tolerance, the width of the top of the exhaust groove (301) is the same as the width of the transmission belt (107), and the width of the exhaust groove (301) is the same as the width of the exhaust groove (201).

6. The integrated circuit production transport device according to claim 3, characterized in that: The outer diameter of the second positioning ring (3082) is the same as the outer diameter of the first positioning ring (2055), the diameter of the exhaust pipe (3081) is the same as the diameter of the gas guide pipe (2051), the inner diameter of the first positioning semicircular ring (3083) and the outer diameter of the second positioning ring (3082) have a tolerance match, the diameter of the openings on both sides of the first positioning semicircular ring (3083) and the outer diameter of the exhaust pipe (3081) have a tolerance match, and the inner diameter and the diameter of the openings on both sides of the second positioning semicircular ring (3086) are the same as the inner diameter and the diameter of the openings on both sides of the first positioning semicircular ring (3083).

7. The integrated circuit production transport device according to claim 3, characterized in that: The top of the second tightening positioning block (3087) and the top of the second positioning semicircular ring (3086) are on the same plane, the front of the first tightening positioning plate (3084) and the front of the first positioning semicircular ring (3083) are on the same plane, the front of the second tightening positioning block (3087) and the back of the positioning square plate (3088) are parallel to each other, the front of the second tightening positioning block (3087) and the first tightening positioning plate (3084) are both provided with threaded holes, and the inner threads of the first tightening positioning plate (3084) and the second tightening positioning block (3087) cooperate with the outer threads of the positioning bolt (3089).

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