Silicon resonator and silicon piezoresistive watch core hybrid integrated system, aircraft and measurement method

Abstract

The application provides a silicon resonance and silicon piezoresistance watch core mixed integration system, an aircraft and a measurement method, the system comprising a silicon resonance unit, a silicon piezoresistance unit, an air path control module and an information processing circuit, the silicon resonance unit comprising a silicon resonance watch core, a support structure, a resonance regulation module and a first air path shielding integrated structure, the silicon resonance watch core being arranged on the support structure and connected with the resonance regulation module, and the first air path shielding integrated structure seal cover being arranged on the silicon resonance watch core, the support structure and the resonance regulation module and being in communication with a first to-be-measured channel; the silicon piezoresistance unit comprising two or more silicon piezoresistance watch cores, a piezoresistance regulation module and a second air path shielding integrated structure, the silicon piezoresistance watch cores being connected with the piezoresistance regulation module, and the second air path shielding integrated structure seal cover being arranged on the silicon piezoresistance watch cores and the piezoresistance regulation module and being in communication with a second to-be-measured channel. The technical scheme of the application is applied to solve the technical problem that high performance and low cost of a multi-channel system are difficult to be considered in the prior art.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of pressure sensing, in particular to a silicon resonant and silicon piezoresistive meter core hybrid integrated system, an aircraft and a measuring method. BACKGROUND

[0002] The atmospheric sensing system is a sensing device for obtaining flight atmospheric data such as flight speed, aerodynamic angle, static pressure, air pressure and height, and is an indispensable key device for flight control, engine control, navigation and post-analysis of modern aircraft when flying in the atmosphere, which directly affects the safety and stable flight of the aircraft. New weapon equipment puts forward the coupling requirements of high performance, low cost and miniaturization for multi-channel atmospheric sensing systems. In order to realize high performance design, the atmospheric sensing system generally adopts high-performance vibration cylinder and silicon resonant pressure sensor integrated design to ensure the precision of pressure measurement, and then obtain high-precision atmospheric parameters. However, although the vibration cylinder and silicon resonant pressure sensor have high precision, they are expensive and bulky, which leads to high cost and large size of the multi-channel atmospheric sensing system, and cannot meet the requirements of new weapon equipment. At the same time, although the existing atmospheric sensing system based on silicon piezoresistive sensor integration has low cost and small size, it has low precision and poor stability, which cannot meet the requirements of new weapon equipment. SUMMARY

[0003] The present application provides a silicon resonant and silicon piezoresistive meter core hybrid integrated system, an aircraft and a measuring method, which can solve the technical problem that the multi-channel system cannot simultaneously have high performance and low cost in the prior art.

[0004] According to an aspect of the present application, a silicon resonant and silicon piezoresistive meter core hybrid integrated system is provided, which comprises:

[0005] The silicon resonant unit comprises a silicon resonant meter core, a support structure, a resonant control module and a first gas path shielding integrated structure. The support structure and the resonant control module are designed in an integrated manner. The silicon resonant meter core is arranged on the support structure and connected with the resonant control module. The first gas path shielding integrated structure is a metal cover body. The first gas path shielding integrated structure sealing cover is arranged on the silicon resonant meter core, the support structure and the resonant control module. The first gas path shielding integrated structure has a first gas nozzle on it, which is used for communication with a first to-be-measured channel. The first gas path shielding integrated structure is also used for electromagnetic shielding.

[0006] One or more silicon piezoresistance units, each silicon piezoresistance unit comprising two or more silicon piezoresistance cores, a piezoresistance conditioning module and a second gas path shielding integrated structure, the silicon piezoresistance core being connected with the piezoresistance conditioning module, the second gas path shielding integrated structure being a metal cover body, the second gas path shielding integrated structure sealing cover being arranged on the silicon piezoresistance core and the piezoresistance conditioning module, the second gas path shielding integrated structure having a second gas nozzle for communicating with a second to-be-measured channel, the second gas path shielding integrated structure also being used for electromagnetic shielding;

[0007] A gas path control module, the gas path control module comprising a valve and a program-controlled switch matched with the valve, the first gas path shielding integrated structure and the second gas path shielding integrated structure being connected through the valve, and the plurality of second gas path shielding integrated structures being connected through the valve, the opening and closing of the valve being controlled through the program-controlled switch;

[0008] An information processing circuit, the information processing circuit comprising a pre-processing unit and an information acquisition unit, the pre-processing unit being connected with the resonance control module and the piezoresistance conditioning module respectively, and being used for pre-processing the measurement signals output by the resonance control module and the piezoresistance conditioning module, the information acquisition unit being connected with the pre-processing unit, and being used for acquiring the pre-processed measurement signals.

[0009] Further, the ranges of the plurality of silicon piezoresistance cores in the same silicon piezoresistance unit are different.

[0010] Further, the information processing circuit further comprises a fault management unit, the fault management unit being connected with the information acquisition unit, and being used for judging whether each silicon piezoresistance core in the same silicon piezoresistance unit is faulty according to the signals acquired by the information acquisition unit, and eliminating the measurement signals of the silicon piezoresistance core which is faulty.

[0011] Further, the information processing circuit further comprises a self-calibration unit, the self-calibration unit being connected with the program-controlled switch and the information acquisition unit respectively, and being used for controlling all the valves to be opened through the program-controlled switch when the system is powered on each time, acquiring the measurement signals of the silicon resonance core and the silicon piezoresistance core through the information acquisition unit, taking the measurement signal of the silicon resonance core as a reference, correcting the measurement signal of the silicon piezoresistance core, and closing all the valves through the program-controlled switch after the correction.

[0012] According to another aspect of the present application, a kind of aircraft is provided, and the aircraft comprises the silicon resonance and silicon piezoresistance core hybrid integrated system proposed in the foregoing of the present application.

[0013] According to still another aspect of the present application, a kind of measurement method applying the silicon resonance and silicon piezoresistance core hybrid integrated system proposed in the foregoing of the present application is provided, and the measurement method comprises:

[0014] After the silicon resonance meter core and the silicon piezoresistive meter core are mixed and integrated, the self-calibration unit controls all valves to be opened through a program-controlled switch, and the measurement signals of the silicon resonance meter core and the silicon piezoresistive meter core are acquired through the information acquisition unit;

[0015] The measurement signal of the silicon piezoresistive meter core is corrected to zero based on the measurement signal of the silicon resonance meter core;

[0016] After the correction, the self-calibration unit controls all valves to be closed through a program-controlled switch;

[0017] The silicon resonance unit and each silicon piezoresistive unit are used to measure the corresponding to-be-measured channels respectively.

[0018] The technical scheme of the application provides a silicon resonance and silicon piezoresistive meter core mixed and integrated system, an aircraft and a measurement method, the system is based on existing silicon resonance meter cores and silicon piezoresistive meter cores, and innovatively mixes and integrates the two types of meter cores to form a multi-channel sensing system, the integration of the meter core level combines multi-meter core information integration processing, compared with multi-sensor level integration, the space occupation of the sensor shell, sensor circuit, sensor internal gap and the gap between large-size sensors is reduced, the multi-meter cores can be integrated in a matrix on a circuit, and the system volume is greatly reduced; the high-precision and high-stability characteristics of the silicon resonance meter core are used to periodically or before use calibrate and correct the silicon piezoresistive meter core, and the high precision of the multi-channel system can be realized; compared with using silicon resonance meter cores for all channels, the volume, weight and cost can be effectively reduced, and compared with using silicon piezoresistive meter cores for all channels, the measurement precision and stability can be effectively improved. In the case that only one high-precision and high-stability silicon resonance meter core is used in the multi-channel system, the performance of the silicon piezoresistive meter core measurement channel is significantly improved, the high-precision, high-reliability, miniaturization and low-cost measurement of the multi-channel pressure is realized, it is simple and practical, easy to implement and effective, and has high feasibility, and can meet the coupling requirements of new-type weapon equipment on the high performance, low cost and miniaturization of the atmospheric sensing system, and can expand the application field of the system. BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings included to provide a further understanding of the embodiments of the application, constitute a part of the specification and serve to explain the principles of the application together with the text. Obviously, the accompanying drawings in the following description only show some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0020] Figure 1 The structure block diagram of the silicon resonance and silicon piezoresistive meter core mixed and integrated system provided by the specific embodiment of the application is shown. DETAILED DESCRIPTION

[0021] It should be noted that the embodiments and features of the embodiments in the present application can be combined with each other in the case of no conflict. The technical solutions in the embodiments of the present application will be described clearly and completely in combination with the drawings of the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The description of the at least one example embodiment is actually only illustrative, but not as any limitation on the present application and its application or use. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor are within the scope of protection of the present application.

[0022] It should be noted that the terms used herein are only intended to describe specific embodiments, and are not intended to limit the exemplary embodiments according to the present application. As used herein, the singular form is intended to include the plural form, unless the context clearly indicates otherwise, and it should also be understood that when the terms "comprise" and / or "include" are used in the specification, there is a reference to the presence of a feature, step, operation, device, component and / or combinations thereof.

[0023] Unless specifically stated otherwise, the relative arrangements of the components and steps illustrated in these embodiments and the numerical expressions and values set forth herein are not limiting of the scope of the application. Also, it is to be understood that the various features, steps, and components described herein can be combined in various ways, and that the description and drawings merely illustrate specific applications of the principles of the application. Moreover, it should be noted that the language used in the specification has been principally selected for readability and instructional purposes and can not have been selected to delineate or circumscribe the patent rights of the application. Accordingly, the present application is not limited to the language described herein, but rather is limited only by the contents of the claims.

[0024] In the field of pressure sensing technology, silicon resonant sensors have the characteristics of high precision, high stability, large volume and high cost. The silicon resonant meter core is a pressure sensitive chip of the silicon resonant sensor and does not contain a conditioning circuit. The silicon piezoresistive sensor has the characteristics of small volume, low cost, medium and low precision, and obvious time drift. The silicon piezoresistive meter core is a pressure sensitive chip of the silicon piezoresistive sensor and does not contain a conditioning circuit. As shown in Figure 1 According to a specific embodiment of the present application, a silicon resonant and silicon piezoresistive meter core hybrid integrated system is provided, which comprises:

[0025] The silicon resonance unit comprises a silicon resonance meter core, a support structure, a resonance control module and a first gas path shielding integrated structure, the support structure is integrally designed with the resonance control module, the silicon resonance meter core is arranged on the support structure and connected with the resonance control module, the first gas path shielding integrated structure is a metal cover body, a first gas nozzle is arranged on the first gas path shielding integrated structure and used for being communicated with a first to-be-measured channel, and the first gas path shielding integrated structure is also used for electromagnetic shielding.

[0026] The one or more silicon piezoresistance units each comprise two or more silicon piezoresistance meter cores, a piezoresistance control module and a second gas path shielding integrated structure, the silicon piezoresistance meter cores are connected with the piezoresistance control module, the second gas path shielding integrated structure is a metal cover body, a second gas nozzle is arranged on the second gas path shielding integrated structure and used for being communicated with a second to-be-measured channel, and the second gas path shielding integrated structure is also used for electromagnetic shielding.

[0027] The gas path control module comprises a valve and a program-controlled switch matched with the valve, the first gas path shielding integrated structure and the second gas path shielding integrated structure and the plurality of second gas path shielding integrated structures are connected through the valve, and the opening and closing of the valve are controlled through the program-controlled switch.

[0028] The information processing circuit comprises a preprocessing unit and an information acquisition unit, the preprocessing unit is connected with the resonance control module and the piezoresistance control module and used for preprocessing measurement signals output by the resonance control module and the piezoresistance control module, and the information acquisition unit is connected with the preprocessing unit and used for acquiring the preprocessed measurement signals.

[0029] The silicon resonance unit comprises a silicon resonance meter core, a support structure, a resonance control module and a first gas path shielding integrated structure, the support structure is integrally designed with the resonance control module, the silicon resonance meter core is arranged on the support structure and connected with the resonance control module, the first gas path shielding integrated structure is a metal cover body, a first gas nozzle is arranged on the first gas path shielding integrated structure and used for being communicated with a first to-be-measured channel, and the first gas path shielding integrated structure is also used for electromagnetic shielding.

[0030] By using the configuration mode, a silicon resonance and silicon piezoresistive watch core mixed integration system is provided, which is based on an existing silicon resonance watch core and a silicon piezoresistive watch core, and innovatively mixes and integrates the two watch cores to form a multi-channel sensing system. The watch core level integration combines multi-watch core information integration processing, and compared with multi-sensor level integration, reduces the occupation of space by a sensor shell, a sensor circuit, a sensor internal gap and a gap between large-size sensors, and the multi-watch cores can be integrated in a matrix on a circuit, thereby greatly reducing the system volume. By using the high precision and high stability characteristics of the silicon resonance watch core, the silicon piezoresistive watch core is calibrated and corrected regularly or before use, and high precision of the multi-channel system can be realized. Compared with using silicon resonance watch cores in all channels, the volume, weight and cost can be effectively reduced, and compared with using silicon piezoresistive watch cores in all channels, the measurement precision and stability can be effectively improved. In the multi-channel system, only one high-precision and high-stability silicon resonance watch core is used, the performance of the silicon piezoresistive watch core measurement channel is significantly improved, high-precision, high-reliability, miniaturization and low-cost measurement of the multi-channel pressure are realized, and the mixed integration system is simple, practical, easy to implement and effective, and has high feasibility, and can meet the coupling requirements of new-type weapon equipment on the high performance, low cost and miniaturization of the atmospheric sensing system, and can expand the application field of the system. Compared with the prior art, the technical scheme of the present application can solve the technical problem that the high performance and low cost of the multi-channel system are difficult to be considered in the prior art.

[0031] In order to improve the measurement accuracy, two or more silicon piezoresistive watch cores with different ranges are miniaturized and integrated in the embodiment of the present application, and a single silicon piezoresistive unit is formed by sharing a metal cover for air communication, and the pressure measurement of one channel is realized, and the volume is small and the cost is low. The ranges of the multiple silicon piezoresistive watch cores in the same silicon piezoresistive unit are different. The measurement results of the small-range silicon piezoresistive watch core are mainly used in the low-pressure section, and the measurement results of the large-range silicon piezoresistive watch core are mainly used in the high-pressure section. The combination of measurement can improve the accuracy of pressure measurement in the whole range (the measurement accuracy of the pressure sensor is generally a percentage of the whole range, and the use of one sensor to measure the whole range will cause the absolute value of the measurement error of the low-pressure section to be large). At the same time, the two or more silicon piezoresistive watch cores constitute redundancy in hardware, and the reliability of pressure measurement can be improved by combining fault management software, and the system can work normally when individual cores fail.

[0032] Further, in the embodiment of the present application, the information processing circuit further comprises a fault management unit connected with the information acquisition unit, for judging whether each silicon piezoresistance core in the same silicon piezoresistance unit is faulty according to the signal collected by the information acquisition unit, and eliminating the measurement signal of the faulty silicon piezoresistance core. In addition, the information processing circuit further comprises a self-calibration unit connected with the program-controlled switch and the information acquisition unit respectively, for controlling all valves to be opened by the program-controlled switch and obtaining the measurement signal of the silicon resonator core and the silicon piezoresistance core by the information acquisition unit when the system is powered on each time, taking the measurement signal of the silicon resonator core as a reference to correct the zero of the measurement signal of the silicon piezoresistance core, and controlling all valves to be closed by the program-controlled switch after the correction. By zero correction, the measurement accuracy of the silicon piezoresistance core can be improved by taking advantage of the high accuracy and good stability of the silicon resonator core, and the valves are closed after correction, and each valve measures the pressure of the connected channel. In addition, the information processing circuit further comprises a power supply unit for converting the external power supply to the circuit board to supply power to each part through the circuit board. By multi-core fault management and online fast self-calibration, the reliability and maintainability of the system can be improved.

[0033] That is, in the embodiment of the present application, the information processing circuit not only carries each sensing unit, but also integrates functions such as silicon resonator sensing information acquisition, silicon piezoresistance sensing information acquisition, power conversion, information preprocessing, pressure calculation, fault management, self-calibration, etc. Then the information processing circuit board installed with multiple sensing units is reliably installed on a miniaturized controllable gas path module (gas path control module) to realize the connection and control of the gas paths between the sensing units and the sealed connection of the electrical signals. Finally, the cover structure is installed to seal the structure and realize the integrated packaging of the multi-channel sensing system.

[0034] Further, in order to improve the stability of the silicon piezoresistance core (core) during long-term use, in the embodiment of the present application, the external gas path structure is connected with the gas path of the silicon resonator core and the gas path of the silicon piezoresistance core respectively at regular intervals or before use, and three pressures in the range of the product range are controlled by the external pressure controller respectively. The software corrects the scale factor of the silicon piezoresistance core according to the set specific algorithm and the measurement value of the silicon resonator core as a reference to realize online fast self-calibration of the system and ensure the measurement accuracy stability of the system during long-term use.

[0035] In summary, the application integrates one silicon resonant watch core, multiple silicon piezoresistive watch cores and a multi-core information processing circuit to form a multi-channel sensing system. The silicon resonant watch core realizes stable closed-loop resonance through a resonance control module to complete sensitive measurement of one channel pressure. The silicon piezoresistive watch core realizes amplification and conditioning through a signal conditioning module, and two or more silicon piezoresistive watch cores are combined to complete sensitive measurement of one channel pressure. On one hand, the measurement precision is improved by range combination and segmented measurement, and on the other hand, the reliability is improved by redundancy. The information of each core in the system is uniformly collected and processed. When the system is powered on or at a specific stage, the zero correction of the silicon piezoresistive watch core is performed according to the preset program or external instruction and based on the silicon resonant watch core. The multi-channel multi-core system is managed according to the core redundancy setting of each measurement channel, the channel pressure fault monitoring and the multi-channel system pressure prediction, so as to ensure the normal operation of the system when a short-time fault occurs in an individual core or channel. The scale factor correction of the silicon piezoresistive watch core is performed based on the silicon resonant watch core through an external pressure source, so as to realize online rapid self-calibration of the system and ensure the measurement precision of the system.

[0036] According to another aspect of the application, a flying vehicle is provided, which comprises the silicon resonant and silicon piezoresistive watch core hybrid integrated system as described above. Since the silicon resonant and silicon piezoresistive watch core hybrid integrated system as described above can significantly improve the performance of the silicon piezoresistive watch core measurement channel, realize high-precision, high-reliability, miniaturization and low-cost measurement of multi-channel pressure, is simple and practical, easy to implement and effective, has strong feasibility, and can meet the coupling requirements of new-type weapon equipment on the high performance, low cost and miniaturization of atmospheric sensing systems, the application of the silicon resonant and silicon piezoresistive watch core hybrid integrated system to the flying vehicle can significantly improve the performance of the flying vehicle.

[0037] According to still another aspect of the application, a measurement method using the silicon resonant and silicon piezoresistive watch core hybrid integrated system as described above is provided, which comprises:

[0038] After the silicon resonant and silicon piezoresistive watch core hybrid integrated system is powered on, the self-calibration unit controls all valves to be opened through a program-controlled switch, and the measurement signals of the silicon resonant watch core and the silicon piezoresistive watch core are acquired through an information acquisition unit.

[0039] The measurement signals of the silicon piezoresistive watch core are corrected based on the measurement signals of the silicon resonant watch core.

[0040] After the correction, the self-calibration unit controls all valves to be closed through a program-controlled switch.

[0041] The silicon resonant unit and each silicon piezoresistive unit are used to measure the corresponding to-be-measured channels.

[0042] In order to have a further understanding of the application, the following describes the application in detail with reference to the accompanying drawings. Figure 1The hybrid integrated system and measurement method of the present invention will be described in detail.

[0043] like Figure 1 As shown, one silicon resonant sensing unit and four silicon piezoresistive sensing units are mounted on an information processing circuit board and connected to a controllable pneumatic circuit module to form a miniaturized multi-channel pressure measurement system. Before use, the silicon resonant unit is calibrated, and a calibration model is established to obtain the correspondence between its output electrical signal and the sensed pressure, achieving high-precision measurement of one pressure channel. The silicon piezoresistive elements are also calibrated, and calibration models for two silicon piezoresistive elements are established to obtain the correspondence between their output electrical signals and the sensed pressure, establishing a combined measurement model. The pressure values ​​sensed by the two silicon piezoresistive elements are judged: when both sensed pressure values ​​are less than the set lower boundary of the segment, the output pressure value of that channel uses the pressure value sensed by the smaller range element; when both sensed pressure values ​​are greater than the upper boundary of the segment, the output pressure value of that channel uses the pressure value sensed by the larger range element; when both sensed pressure values ​​are between the lower and upper boundaries of the segment, the output pressure value of that channel uses the average of the two element sensed pressure values. High-precision measurement of one pressure channel is achieved through segmentation.

[0044] Each time the multi-channel system is powered on, the switches between the air paths of each channel are automatically opened to connect the air paths. Using the pressure measured by the silicon resonant unit as a reference, the zero point of the measurement result of the silicon piezoresistive unit is corrected. After correction, the switches are closed, and the pressure of each connected channel is measured. The air paths of the silicon resonant unit and the silicon piezoresistive unit are connected together periodically through an external air path structure. The three pressures within the product range are controlled by an external pressure controller. A self-calibration algorithm model is established. Using the pressure measured by the silicon resonant unit as a reference, the silicon piezoresistive unit is self-calibrated to correct the scaling factor of the silicon piezoresistive unit.

[0045] Using only one high-precision, high-stability silicon resonant core in a multi-channel system, high-precision and high-reliability pressure measurement of 5 channels is achieved. Compared with a system where all 5 channels use silicon resonant units, the cost and size are significantly reduced.

[0046] In summary, this invention provides a hybrid integrated system of silicon resonant and silicon piezoresistive sensors, an aircraft, and a measurement method. This system innovatively integrates existing silicon resonant and silicon piezoresistive sensors to form a multi-channel sensing system. The sensor-level integration, combined with multi-sensor information integration and processing, reduces the space occupied by sensor housings, sensor circuits, internal sensor gaps, and gaps between large-size sensors compared to multi-sensor level integration. Multiple sensors can be matrix-integrated on the circuit, significantly reducing the system size. Utilizing the high precision and stability of the silicon resonant sensor, periodic or pre-use calibration of the silicon piezoresistive sensor enables high precision in the multi-channel system. Compared to using silicon resonant sensors for all channels, this effectively reduces volume, weight, and cost; compared to using silicon piezoresistive sensors for all channels, it effectively improves measurement accuracy and stability. This hybrid integrated system significantly improves the performance of the silicon piezoresistive sensor's measurement channels in a multi-channel system using only a single high-precision, high-stability silicon resonant sensor core. It achieves high-precision, high-reliability, miniaturized, and low-cost multi-channel pressure measurement, is simple and practical, easy and effective to implement, and highly feasible. It can meet the coupling requirements of new weapon systems for atmospheric sensing systems in terms of high performance, low cost, and miniaturization, and can expand the system's application areas. Compared with existing technologies, the technical solution of this invention can solve the technical problem of the difficulty in simultaneously achieving high performance and low cost in existing multi-channel systems.

[0047] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0048] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore should not be construed as limiting the scope of protection of this invention.

[0049] The above merely provides the preferred embodiments of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various modifications and changes. Any modifications, equivalent replacements, improvements, etc. made within the principles and technical scope of the present application shall fall into the scope of the present application.

Claims

1. A hybrid integrated system of silicon resonator and silicon piezoresistive watch core, characterized in that, The system includes: A silicon resonant unit includes a silicon resonant core, a support structure, a resonance control module, and a first air path shielding integrated structure. The support structure and the resonance control module are integrated. The silicon resonant core is disposed on the support structure and connected to the resonance control module. The first air path shielding integrated structure is a metal cover. The first air path shielding integrated structure is sealed on the silicon resonant core, the support structure, and the resonance control module. The first air path shielding integrated structure has a first air nozzle for communicating with a first test channel. The first air path shielding integrated structure is also used for electromagnetic shielding. One or more silicon piezoresistive units, each of the silicon piezoresistive units including two or more silicon piezoresistive cores, a piezoresistive conditioning module, and a second gas path shielding integrated structure. The silicon piezoresistive cores are connected to the piezoresistive conditioning module. The second gas path shielding integrated structure is a metal cover. The second gas path shielding integrated structure is sealed on the silicon piezoresistive cores and the piezoresistive conditioning module. The second gas path shielding integrated structure has a second gas nozzle for communicating with a second test channel. The second gas path shielding integrated structure is also used for electromagnetic shielding. A pneumatic circuit control module includes a valve and a programmable switch that works with the valve. The first pneumatic circuit shielding integrated structure and the second pneumatic circuit shielding integrated structure, as well as multiple second pneumatic circuit shielding integrated structures, are connected through the valve. The programmable switch controls the opening and closing of the valve. An information processing circuit includes a preprocessing unit and an information acquisition unit. The preprocessing unit is connected to the resonant control module and the piezoresistive conditioning module, respectively, and is used to preprocess the measurement signals output by the resonant control module and the piezoresistive conditioning module. The information acquisition unit is connected to the preprocessing unit and is used to acquire the preprocessed measurement signals.

2. The system according to claim 1, characterized in that, Multiple silicon piezoresistive cells within the same silicon piezoresistive unit have different measuring ranges.

3. The system according to claim 2, characterized in that, The information processing circuit also includes a fault management unit, which is connected to the information acquisition unit and is used to determine whether each silicon piezoresistive core in the same silicon piezoresistive unit has failed based on the signal acquired by the information acquisition unit, and to discard the measurement signal of the silicon piezoresistive core that has failed.

4. The system according to claim 3, characterized in that, The information processing circuit also includes a self-calibration unit, which is connected to the programmable switch and the information acquisition unit respectively. The self-calibration unit is used to control all the valves to open through the programmable switch each time the system is powered on, acquire the measurement signals of the silicon resonant meter core and the silicon piezoresistive meter core through the information acquisition unit, perform zero-point correction on the measurement signal of the silicon piezoresistive meter core based on the measurement signal of the silicon resonant meter core, and control all the valves to close through the programmable switch after correction.

5. An aircraft, characterized in that, The aircraft includes a hybrid integrated system of silicon resonator and silicon piezoresistive core as described in any one of claims 1 to 4.

6. A measurement method using a hybrid integrated system of silicon resonant and silicon piezoresistive elements as described in any one of claims 1 to 4, characterized in that, The measurement method includes: After the integrated system of silicon resonant and silicon piezoresistive cores is powered on, the self-calibration unit controls all valves to open via a programmable switch and acquires the measurement signals of the silicon resonant and silicon piezoresistive cores via the information acquisition unit. Using the measurement signal of the silicon resonant meter core as a reference, the measurement signal of the silicon piezoresistive meter core is zero-point corrected; After correction, the self-calibration unit controls all the valves to close via the programmable switch; The silicon resonant unit and each of the silicon piezoresistive units are used to measure the corresponding channel under test.

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