Electric field sensor assembly and electric field type detection method

Abstract

The present invention provides an electric field sensor component and an electric field type detection method, comprising an electric field sensor and a data processing unit, wherein: the electric field sensor includes a dynamic induction electrode and a static induction electrode, the dynamic induction electrode including a first signal generation component that generates a direct current signal, a first signal output component that outputs a direct current signal, and a first charge induction component that senses charge; the static induction electrode includes at least a second charge induction component that senses charge, and a second signal output component that outputs an alternating current signal; the data processing unit receives the direct current signal and the alternating current signal, and obtains a direct current voltage value and an alternating current voltage value, respectively, and determines the current electric field type based on a comparison result of the direct current voltage value and the alternating current voltage value. The present invention can simultaneously obtain direct current and alternating current signals, achieve good detection of direct current and alternating electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor.

Description

Technical Field

[0001] The present invention relates to an electric field sensor, in particular to an electric field sensor component and an electric field type detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nanofabrication technologies, MEMS electric field sensors based on charge sensing principles have become a hot topic in research and application due to their advantages such as small size, low cost, easy integration, and mass production. Existing MEMS electric field sensors operate based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration, the sensor modulates the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the magnitude of the electric field to detect the measured electric field.

[0004] However, existing MEMS electric field sensors can usually only sense one type of electrical signal, resulting in a narrow detection frequency band of the MEMS electric field sensor and reduced sensitivity to electric field detection. Summary of the Invention

[0005] In response to the shortcomings of the above problems, the present invention provides an electric field sensor component and electric field type detection method that can simultaneously obtain DC current signals and AC current signals, achieve good detection of DC electric fields and AC electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor.

[0006] To achieve the above objectives, in a first aspect, the present invention provides an electric field sensor assembly, comprising an electric field sensor and at least one data processing unit connected thereto, wherein:

[0007] The electric field sensor includes at least one dynamic sensing electrode and at least one static sensing electrode, wherein:

[0008] The dynamic sensing electrode includes a first signal generating component for generating at least one direct current signal according to an excitation signal, a first signal output component for outputting the direct current signal, and a first charge sensing component for sensing charges in a current electric field, wherein the first signal generating component and the first signal output component are both attached to a portion of the first charge sensing component;

[0009] The static sensing electrode comprises at least a second charge sensing component for sensing charges in the current electric field, and a second signal output component for outputting an AC current signal according to the sensed charges, wherein the second signal output component is attached to a portion of the second charge sensing component;

[0010] The data processing part receives the DC current signal and the AC current signal, and obtains a DC voltage value and an AC voltage value respectively, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0011] In one embodiment, the electric field sensor further includes a substrate, the substrate including a recessed area and a solid portion surrounding the outside of the recessed area, wherein the first portion of the first charge sensing component and the first portion of the second charge sensing component are both attached to the solid portion, the second portion of the first charge sensing component and the second portion of the second charge sensing component are both located on the recessed area, and the first signal generating component, the first signal output component, and the second signal output component are all located above the solid portion.

[0012] In one embodiment, the first charge induction component and the second charge induction component each include a base portion and a metal electrode, wherein a first region of the base portion is attached to the solid portion, a second region of the base portion is located on the recessed region, and the metal electrode is attached to the second region;

[0013] The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a part of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a part of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a and the piezoelectric lower electrode b.

[0014] In one embodiment, the static sensing electrode further includes a second signal generating component, which receives a displacement of the second charge sensing component when sensing charges in the current electric field and converts the displacement into the AC current signal, wherein:

[0015] The second signal generating component is attached to a portion of the second charge inducing component.

[0016] In one embodiment, the second signal generating component includes at least one piezoelectric upper electrode c, a piezoelectric layer b and at least one piezoelectric lower electrode c, the piezoelectric lower electrode c is attached to a portion of the first region and a portion of the second region, the piezoelectric upper electrode c is attached to at least a portion of the piezoelectric lower electrode c, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode c and the piezoelectric lower electrode c.

[0017] In one embodiment, a shielding electrode is further included between the dynamic induction electrode and the static induction electrode, wherein both ends of the shielding electrode are attached to the solid portion and are arranged above the recessed area.

[0018] In one embodiment, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0019] The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0020] In one embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor;

[0021] The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonant frequency of the electric field sensor;

[0022] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to, or less than 50% of the self-resonant frequency of the electric field sensor.

[0023] In one embodiment, the data processing portion includes at least an excitation module, a first calculation module, a second calculation module, and a third calculation module, wherein:

[0024] The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal;

[0025] The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value;

[0026] The second calculation module is connected to the second signal output component, receives the input AC current signal, and converts the AC current signal into an AC voltage value;

[0027] The third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0028] In one embodiment, the data processing portion includes a first data processing component, a second data processing component, and a third data processing component, wherein the first data processing component and the second data processing component are both connected to the third data processing component, wherein:

[0029] The first data processing component includes an excitation module and a first calculation module, wherein:

[0030] The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal;

[0031] The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value;

[0032] The second data processing component includes a second computing module, wherein:

[0033] The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value;

[0034] The third data processing component includes a third computing module, wherein:

[0035] The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

[0036] In a second aspect, the present invention further provides an electric field type detection method, which is applied to the above-mentioned electric field sensor assembly and comprises the following steps:

[0037] The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field;

[0038] Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0039] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0040] Compared with the prior art, the present invention has one of the following advantages:

[0041] Through the dynamic sensing electrodes and the static sensing electrodes, DC current signals and AC current signals can be obtained simultaneously. Compared with the existing MEMS electric field sensors that can only obtain one current signal, this can achieve good detection of DC electric field and AC electric field, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor;

[0042] When the dynamic induction electrode and the static induction electrode have the same structure, they can be replaced as needed;

[0043] By comparing the DC current value with the AC current value, the electric field can be detected and the type of the current electric field can be accurately determined. BRIEF DESCRIPTION OF THE DRAWINGS

[0044] Figure 1 Schematic diagram of the structure of the first embodiment of the broadband electric field sensor assembly in the present invention;

[0045] Figure 2 for Figure 1 A structural diagram of a first embodiment of a medium electric field sensor;

[0046] Figure 3 for Figure 2 sectional view of

[0047] Figure 4 for Figure 1 Schematic diagram of the structure of the excitation module;

[0048] Figure 5 for Figure 1 A schematic diagram of the structure of the first calculation module;

[0049] Figure 6 for Figure 1 A schematic diagram of the structure of the second computing module;

[0050] Figure 7 2 is a structural diagram of a second embodiment of the electric field sensor of the present invention;

[0051] Figure 8 FIG3 is a structural diagram of a third embodiment of an electric field sensor in the present invention;

[0052] Figure 9 FIG4 is a structural diagram of a fourth embodiment of an electric field sensor in the present invention;

[0053] Figure 10 FIG1 is a structural diagram of a fifth embodiment of an electric field sensor in the present invention;

[0054] Figure 11 1 is a structural diagram of a sixth embodiment of an electric field sensor in the present invention;

[0055] Figure 12Schematic diagram of the structure of a second embodiment of the broadband electric field sensor assembly of the present invention;

[0056] Figure 13 Flowchart of the electric field type detection method of the present invention.

[0057] The main reference numerals are as follows:

[0058] 1-Electric field sensor; 2-Substrate; 200-Insulating layer a; 201-Substrate layer; 202-Depression area; 3-Dynamic sensing electrode; 300-Piezoelectric upper electrode a; 301-Piezoelectric layer a; 302-Piezoelectric lower electrode a; 303-Extraction electrode a; 304-Insulating layer b; 305-Piezoelectric upper electrode b; 306-Piezoelectric lower electrode b; 4-Static sensing electrode; 400-Piezoelectric upper electrode c; 401-Piezoelectric lower electrode c; 402-Extraction electrode Pole b; 403-piezoelectric upper electrode d; 404-piezoelectric lower electrode d; 5-base layer; 6-first region; 7-second part a; 8-second part b; 9-metal electrode; 10-shielding electrode; 11-data processing part; 1101-excitation module; 1102-first calculation module; 1103-second calculation module; 1104-third calculation module; 12-first data processing part; 13-second data processing part; 14-third data processing part. DETAILED DESCRIPTION

[0059] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0060] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0061] Example 1

[0062] like Figures 1 to 6As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing part 11 connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic induction electrode 3, a static induction electrode 4, and a shielding electrode 10, wherein the dynamic induction electrode 3 and the static induction electrode 4 are fixed on the left and right sides of the substrate 2 respectively, and the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 to separate the dynamic induction electrode 3 from the static induction electrode 4. Part of the dynamic induction electrode 3 is attached to the solid part, and the other part is located in the recessed area 202, and is used to obtain a DC current signal of the current electric field based on the excitation signal. Part of the static induction electrode 4 is attached to the solid part, and the other part is located in the recessed area 202, and is used to sense the charge in the current electric field and output an AC current signal based on the induced charge. The shielding electrode 10 faces the top of the electric field sensor 1 and is used to shield interference signals.

[0063] Specifically, the substrate 2 includes a solid portion and a recessed area 202. The recessed area 202 is formed by a local area of the top end surface of the substrate 2 being recessed toward the bottom end surface thereof, and the solid portion surrounds the outside of the recessed area 202 to form a frame-like structure.

[0064] Preferably, the shape of the substrate 2 , the shape of the recessed area 202 , and the shape of the solid portion are all square structures.

[0065] Furthermore, the physical portion is composed of a stacked insulating layer a200 and a substrate layer 201. The insulating layer a200 is used to isolate signals, and the material of the insulating layer a200 is not limited to silicon dioxide, silicon nitride, and composite materials of silicon dioxide and silicon nitride. The substrate layer 201 can be made of dielectric materials such as silicon-based materials, glass, ceramics, or organic materials, or metals and metal alloys.

[0066] Specifically, the dynamic sensing electrode 3 includes a piezoelectric electrode assembly a (i.e., a first signal generating assembly) that generates a DC current signal based on an excitation signal, an extraction electrode a (i.e., a first signal output assembly) for outputting the DC current signal, and a sensing electrode assembly a (i.e., a first charge sensing assembly) for sensing the charge in the current electric field. The piezoelectric electrode assembly a and the extraction electrode a are both part of the attached sensing electrode assembly a. The sensing electrode assembly a is connected to the piezoelectric electrode assembly a and the extraction electrode a, respectively, and the piezoelectric electrode assembly a is connected to the extraction electrode a. Part of the sensing electrode assembly a is attached to the solid portion, and the other part is located above the recessed area 202. The piezoelectric electrode assembly a is attached to part of the sensing electrode assembly a.

[0067] Furthermore, the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal, and the DC current signal is connected to the first calculation module 1102 in the data processing part 11 through the lead-out electrode a303 and the transmission line.

[0068] Specifically, the static sensing electrode 4 includes a sensing electrode assembly b (i.e., a second charge sensing assembly) for sensing charge in the current electric field, and an extraction electrode b402 (i.e., a second signal output assembly) for outputting an AC current signal based on the sensed charge. The sensing electrode assembly b is connected to the extraction electrode b402. A portion of the sensing electrode assembly b is attached to the solid portion, while another portion is located in the recessed area 202. The extraction electrode b402 is attached to a portion of the sensing electrode assembly b.

[0069] Furthermore, the AC current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and the AC current signal is connected to the second calculation module 1103 in the data processing part 11 through the extraction electrode b402 via the transmission line.

[0070] Specifically, the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 and is spaced apart from the dynamic induction electrode 3 and the static induction electrode 4 , respectively. Both ends of the shielding electrode 10 are attached to the solid portion and are positioned above the recessed area 202 .

[0071] A shielding electrode facing the top of the electric field sensor is provided between the dynamic sensing electrode and the static sensing electrode to shield interference signals. When sensing AC current signals, the defect of being unable to accurately detect due to interference between the electric field frequency and the sensing electrode frequency can be solved.

[0072] In this embodiment, both the sensing electrode assembly a and the sensing electrode assembly b include a base portion 5 and a metal electrode 9. The first region 6 of the base portion 5 is attached to the top end surface of the insulating layer a200. The second region of the base portion 5 is located above the recessed region 202. The metal electrode 9 is attached to a portion of the second region.

[0073] Furthermore, the piezoelectric electrode assembly a is connected to the extraction electrode a303 through the first region 6. The piezoelectric electrode assembly a includes a piezoelectric upper electrode a300, a piezoelectric upper electrode b305, a piezoelectric layer a301, a piezoelectric lower electrode a302, and a piezoelectric lower electrode b306, wherein the piezoelectric lower electrode a302 and the piezoelectric lower electrode b306 are arranged side by side and are both attached to a portion of the first region 6 and a portion of the second region, the piezoelectric upper electrode a300 and the piezoelectric upper electrode b305 are arranged side by side, the piezoelectric upper electrode a300 is attached to at least a portion of the piezoelectric lower electrode a302, the piezoelectric upper electrode b305 is attached to at least a portion of the piezoelectric lower electrode b306, and the piezoelectric layer a301 is sandwiched between the piezoelectric upper electrode a300, the piezoelectric upper electrode b305, the piezoelectric lower electrode a302, and the piezoelectric lower electrode b306.

[0074] In the above embodiment, further, the second region includes a second portion a7 and a second portion b8, wherein the second portion b8 is farther away from the first region 6 than the second portion a7, and the metal electrode 9 is attached to the second portion b8.

[0075] In this embodiment, further, the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302 constitute the input end of the excitation signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line, and the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 constitute the output end of the vibration signal, and are connected to the excitation module 1101 in the data processing part 11 through a transmission line.

[0076] The extraction electrode a303 is connected to the first calculation module 1102 in the data processing part 11 through a transmission line, and the extraction electrode b402 is connected to the second calculation module 1103 in the data processing part 11 through a transmission line.

[0077] In this embodiment, further, the shielding electrode 10 is composed of a base layer, or a base layer and a metal electrode covering the base layer.

[0078] When sensing electrode assembly a reciprocates up and down under the influence of the current electric field, sensing electrode assembly a and shielding electrode 10 are not in the same plane, generating differential induction between the two, thereby outputting a differential signal. When sensing electrode assembly a is stationary, the top end surface of sensing electrode assembly a and the top end surface of shielding electrode 10 are in the same plane.

[0079] For example, when the base layer is made of a highly conductive silicon-based material, the base layer can achieve a signal shielding effect. When the base layer is made of a non-highly conductive silicon-based material, the metal electrode 9 covering it can achieve a signal shielding effect.

[0080] Optionally, the piezoelectric electrode assembly a further includes an insulating layer b304, which is interposed between the piezoelectric lower electrode a302 and the base portion 5, and between the piezoelectric lower electrode b306 and the base portion 5, for signal isolation. The material of the insulating layer b304 is not limited to silicon dioxide, silicon nitride, or a composite material of silicon dioxide and silicon nitride.

[0081] Alternatively, the metal electrode 9 can be made of a metal or alloy such as Ti, Pt, Al, Ag, Cr, Cu, Au, or Mo. The base portion 5 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals, or organic materials, or metal and metal alloy materials. The piezoelectric layer can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, or modified lead titanate. The base portion 5 can be shaped in a straight beam, a folded beam, a U-shaped beam, a serpentine beam, a crab beam, or the like.

[0082] In this embodiment, when the base layer 5 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402 can be achieved without setting up a transmission line.

[0083] In another embodiment, when the base layer 5 is made of a non-highly conductive material, a transmission line is embedded in the base layer 5, the piezoelectric electrode is connected to the lead-out electrode through the transmission line, and the metal electrode 9 is connected to the lead-out electrode through the transmission line, thereby realizing signal transmission between the metal electrode 9 and the lead-out electrode a303, the piezoelectric electrode assembly a and the lead-out electrode a303, and the metal electrode 9 and the lead-out electrode b402.

[0084] In addition, in the electric field sensor 1 provided in this embodiment, the metal electrode 9 is the core component of the electric field sensor 1, which is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 5 has a certain elasticity. After the metal electrode 9 is attached to the top surface of the base portion 5, when the current electric field changes drastically, the metal electrode 9 can not only sense the charge in the current electric field, but also, under the influence of the current electric field, the metal electrode 9 can move back and forth in the upper position of the recessed area 202 and the interior of the recessed area 202 in the up and down directions. Among them, when the metal electrode 9 is located above the recessed area 202, the amount of charge induced on the surface of the metal electrode 9 is greater than the amount of charge induced on the surface of the metal electrode 9 when the metal electrode 9 is located inside the recessed area 202. At the same time, when the metal electrode 9 is located above the recessed area 202, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 9 is located inside the recessed area 202.

[0085] Specifically, the data processing part 11 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0086] Furthermore, the data processing unit 11 is connected to the extraction electrode a303 and the extraction electrode b402 via transmission lines. The data processing unit 11 is also connected to the input end of the excitation signal formed by the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302, and the output end of the vibration signal formed by the piezoelectric upper electrode b305 and the piezoelectric lower electrode b306 via transmission lines. The data processing unit 11 includes an excitation module 1101, a first calculation module 1102, a second calculation module 1103, and a third calculation module 1104, wherein:

[0087] The excitation module 1101 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode assembly a to vibrate;

[0088] The first calculation module 1102 receives the DC current signal input from the electrode a303 and obtains a DC voltage value;

[0089] The second calculation module 1103 receives the AC current signal input from the extraction electrode b402 and obtains the AC voltage value;

[0090] The third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0091] Furthermore, the excitation module 1101 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode assembly a.

[0092] Furthermore, the excitation module 1101 includes an excitation signal generating unit, a phase shift filter, a signal amplifier, and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, which then vibrates and outputs a vibration signal based on the excitation signal. The vibration signal receiver receives the vibration signal output by the piezoelectric electrode assembly a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode assembly a generates maximum vibration.

[0093] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode a300 through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode a302 through a transmission line.

[0094] Furthermore, the first calculation module 1102 includes an I / V conversion unit, an amplification unit, a phase shift filter, and a coherent demodulator, wherein:

[0095] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0096] The amplifying unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0097] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0098] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0099] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0100] Furthermore, the second calculation module 1103 includes an I / V conversion unit, an amplification unit, a filter, and an amplitude extraction unit. The AC current signal is converted by the sensing electrode assembly b based on the charge induced in the current electric field and input into the second calculation module 1103 via the extraction electrode b402 and the transmission line, wherein:

[0101] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0102] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0103] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0104] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0105] Optionally, the phase-shift filter may convert the AC voltage signal into a square wave signal, a half-wave signal, or a full-wave signal according to settings.

[0106] Furthermore, the third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0107] In addition, in this embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor.

[0108] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the dynamic induction electrode is f≤0.5×f1.

[0109] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonant frequency of the electric field sensor.

[0110] Exemplarily, assuming that the resonant frequency of the electric field sensor is f1, the frequency of the electric field detected by the static induction electrode is f≥0.5×f1.

[0111] The alternating current signal detected by the static sensing electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0112] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≥0.5×f1.

[0113] The alternating current signal detected by the static sensing electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0114] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0115] The alternating current signal detected by the static sensing electrode is an alternating current signal having a frequency less than 50% of the self-resonant frequency of the electric field sensor.

[0116] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0117] Example 2

[0118] like Figure 7 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4, and a shielding electrode 10. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0119] The static sensing electrode 4 also includes a piezoelectric electrode component b (i.e., a second signal generating component). The piezoelectric electrode component b receives the displacement of the sensing electrode component b (i.e., the second charge sensing component) when sensing the charge in the current electric field, and transfers the displacement into an AC current signal. The piezoelectric electrode component b (i.e., the second signal generating component) is connected to the lead-out electrode b402.

[0120] Furthermore, the piezoelectric electrode assembly b includes a piezoelectric upper electrode c400, a piezoelectric layer b, and a piezoelectric lower electrode c401. The piezoelectric lower electrode c401 is attached to a portion of the first portion and a portion of the second portion a. The piezoelectric upper electrode c400 is attached to a portion of the piezoelectric lower electrode c401, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c400 and the piezoelectric lower electrode c401. The piezoelectric upper electrode c400 and the piezoelectric lower electrode c401 constitute a signal output terminal, which is connected to the extraction electrode b402. This allows the AC current signal obtained by the static sensing electrode 4 to be input into the second calculation module of the data processing unit via the output terminal, the extraction electrode b402, and the transmission line. The second calculation module then converts the AC current signal into a corresponding AC voltage value.

[0121] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0122] Example 3

[0123] like Figure 8 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4, and a shielding electrode 10. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0124] The static sensing electrode 4 also includes a piezoelectric electrode component b (i.e., a second signal generating component). The piezoelectric electrode component b receives the displacement of the sensing electrode component b (i.e., the second charge sensing component) when sensing the charge in the current electric field, and transfers the displacement into an AC current signal. The piezoelectric electrode component b (i.e., the second signal generating component) is connected to the lead-out electrode b402.

[0125] Furthermore, the piezoelectric electrode assembly b includes a piezoelectric upper electrode c400, a piezoelectric layer b, a piezoelectric lower electrode c401, a piezoelectric upper electrode d403 and a piezoelectric lower electrode d404, wherein the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404 are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode c400 and the piezoelectric upper electrode d403 are arranged side by side, the piezoelectric upper electrode c400 is attached to a part of the piezoelectric lower electrode c401, the piezoelectric upper electrode d403 is attached to a part of the piezoelectric lower electrode d404, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode c400, the piezoelectric upper electrode d403, the piezoelectric lower electrode c401 and the piezoelectric lower electrode d404.

[0126] The upper piezoelectric electrode d403 and the lower piezoelectric electrode d404 form the input end for the excitation signal and are connected to the excitation module in the data processing unit 11 via a transmission line. The upper piezoelectric electrode c400 and the lower piezoelectric electrode c401 form the signal output end, which is connected to the extraction electrode b402. This allows the AC current signal obtained by the static induction electrode 4 to be input into the second calculation module of the data processing unit through the extraction electrode b402 and the transmission line. The second calculation module then converts the AC current signal into a corresponding AC voltage value.

[0127] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0128] In this embodiment, since the dynamic induction electrode and the static induction electrode have the same structure, they can be replaced as needed.

[0129] For example, when sensing a DC current signal, the sensing electrode assembly a in the dynamic sensing electrode 3 does not generate vibration, and the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal. At this time, if the sensing electrode assembly b in the static sensing electrode 4 is damaged, the dynamic sensing electrode 3 and the static sensing electrode 4 can be replaced without affecting the use of the electric field sensor.

[0130] Example 4

[0131] like Figure 9 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor 1 and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, and a static sensing electrode 4. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0132] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the first embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the first embodiment.

[0133] Example 5

[0134] like Figure 10 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, and a static sensing electrode 4. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the second embodiment in that:

[0135] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the second embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the second embodiment.

[0136] Example 6

[0137] like Figure 11 As shown, this embodiment provides an electric field sensor assembly, including an electric field sensor and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, and a static sensing electrode 4. The difference between the electric field sensor 1 in this embodiment and the electric field sensor 1 in the third embodiment is:

[0138] The electric field sensor 1 in this embodiment does not include the shielding electrode in the electric field sensor 1 in the second embodiment, and other structures and principles are the same as those of the electric field sensor 1 in the third embodiment.

[0139] Example 7

[0140] like Figure 12 As shown, this embodiment provides an electric field sensor assembly, comprising the electric field sensor 1 of any one of the above-mentioned embodiments 1 to 6, a first data processing part 12 and a second data processing part 13 connected to the electric field sensor 1, and a third data processing part 14 connected to the first data processing part 12 and the second data processing part 13, respectively, wherein:

[0141] The first data processing unit 12 is connected via a transmission line to the input terminal formed by the piezoelectric upper electrode a and the piezoelectric lower electrode a of the dynamic induction electrode 3, for inputting an excitation signal to the piezoelectric electrode assembly a. The first data processing unit 12 is also connected via a transmission line to the output terminal formed by the piezoelectric upper electrode b and the piezoelectric lower electrode b of the dynamic induction electrode 3, for receiving the vibration signal output by the piezoelectric electrode assembly a. The first data processing unit 12 is connected via a transmission line to the lead-out electrode a of the dynamic induction electrode 3, for receiving the DC current signal output by the dynamic induction electrode 3 and obtaining a DC voltage value. The second data processing unit 13 is connected via a transmission line to the lead-out electrode b of the static induction electrode 4, for receiving the AC current signal output by the static induction electrode 4 and obtaining an AC voltage value. The third data processing unit 14 is connected via a transmission line to the first data processing unit 12 and the second data processing unit 13, for comparing the DC voltage value with the AC voltage value and determining the current electric field type based on the comparison result.

[0142] Specifically, the first data processing unit 12 includes an excitation module and a first calculation module. The excitation module inputs an excitation signal to the piezoelectric electrode assembly a, driving the piezoelectric electrode assembly a to vibrate, and receives the vibration signal output by the piezoelectric electrode assembly a. The first calculation module receives the DC current signal input by the dynamic sensing electrode 3 and obtains a DC voltage value.

[0143] The structures and principles of the excitation module and the first calculation module in this embodiment are the same as those of the excitation module and the first calculation module in the first embodiment.

[0144] Specifically, the second data processing part 13 includes a second calculation module, wherein the second calculation module receives the AC current signal input by the static induction electrode 4 and obtains an AC voltage value.

[0145] The structure and principle of the second calculation module in this embodiment are the same as those of the second calculation module in the first embodiment.

[0146] Specifically, the third data processing part 14 includes a third calculation module, wherein the third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0147] The structure and principle of the third calculation module in this embodiment are the same as those of the third calculation module in the first embodiment.

[0148] In the above embodiment, the first data processing part 12 , the second data processing part 13 and the third data processing part 14 may also be solidified on the same circuit board.

[0149] For example, in Examples 1 to 4, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0150] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values and AC voltage values at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point based on the comparison results of the DC voltage values and AC voltage values at the same sensing time point.

[0151] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0152] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0153] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0154] Furthermore, in Examples 1 through 4, when the current electric field undergoes a dramatic change, the metal electrodes in both the dynamic induction electrode 3 and the static induction electrode 4 sense the charge in the current electric field to generate a charge signal. This charge signal is input via the extraction electrode into the data processing unit, or the first data processing unit 12 and the second data processing unit 13, thereby obtaining the corresponding electric field value.

[0155] Example 8

[0156] like Figure 13 As shown, this embodiment provides an electric field type detection method, which is applied to the electric field sensor assembly described in the first and fourth embodiments, and includes the following steps:

[0157] S101. Setting the induction time of the current electric field.

[0158] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a DC current signal and an AC current signal corresponding to each induction time point in the induction time period.

[0159] Optionally, the induction time of the current electric field is set to the current induction time according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0160] S102 : driving the piezoelectric electrode assembly a in the piezoelectric electrode assembly a to vibrate.

[0161] Specifically, an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the data processing part in Examples 1 to 6 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal; or an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 7 to drive the piezoelectric electrode assembly a to vibrate and receive the vibration signal.

[0162] S103: Obtain a direct current signal and an alternating current signal of the current electric field.

[0163] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a in response to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field. Alternatively, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when receiving the charge induced by the sensing electrode assembly b in the current electric field.

[0164] Optionally, the DC current signal includes a DC current signal in the current electric field obtained at a set sensing time point, or each DC current signal in the current electric field obtained during a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained at a set sensing time point, or each AC current signal in the current electric field obtained during a set sensing time period.

[0165] S104 , obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively.

[0166] Specifically, the first calculation module and the second calculation module in Examples 1 to 6 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 7 receives the DC current signal and obtains the DC voltage value, and the second calculation module in the second data processing part receives the AC current signal and obtains the AC voltage value.

[0167] Optionally, the DC voltage value includes a DC current value in the current electric field obtained at a set sensing time point, or each DC current value in the current electric field obtained during a set sensing time period. The AC voltage value includes an AC voltage value in the current electric field obtained at a set sensing time point, or each AC voltage value in the current electric field obtained during a set sensing time period.

[0168] S105 . Determine the current electric field type according to the comparison result between the DC voltage value and the AC voltage value.

[0169] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in Embodiments 1 to 7, and the current electric field type is determined according to the comparison result.

[0170] For example, in Examples 1 to 7, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0171] For example, in Examples 1 to 7, after the first and second calculation modules respectively input multiple DC voltage values and AC voltage values at the same sensing time point into the third calculation module, the third calculation module determines the electric field type at each sensing time point based on a comparison result of the DC voltage values and AC voltage values at the same sensing time point. Here,

[0172] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0173] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0174] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0175] The above description is merely a preferred embodiment of the present invention and is intended to be illustrative rather than restrictive of the present invention. Those skilled in the art will appreciate that many changes, modifications, and even equivalents may be made to the present invention within the spirit and scope of the claims, all of which fall within the scope of protection of the present invention.

Claims

1. An electric field sensor assembly, characterized in that: The device comprises an electric field sensor and at least one data processing part connected thereto, wherein: The electric field sensor includes at least one dynamic sensing electrode, at least one static sensing electrode and a substrate, wherein: The substrate includes a recessed area and a solid portion surrounding the outside of the recessed area; The dynamic sensing electrode includes a first signal generating component for generating at least one direct current signal according to an excitation signal, a first signal output component for outputting the direct current signal, and a first charge sensing component for sensing charges in a current electric field, wherein the first signal generating component and the first signal output component are both attached to a portion of the first charge sensing component; When sensing a DC current signal, the first charge sensing component does not generate vibration, and the DC current signal is obtained by converting the vibration generated by the first signal generating component according to the excitation signal; The first charge induction component and the second charge induction component each include a base portion and a metal electrode. A first region of the base portion is attached to the solid portion, a second region of the base portion is located on the recessed region, and the metal electrode is attached to the second region. The base portion has a certain degree of elasticity. When a current electric field undergoes a drastic change, the metal electrode senses the charge in the current electric field and, under the influence of the current electric field, reciprocates up and down between a position above the recessed region and an interior of the recessed region, and outputs an AC current signal based on the induced charge. The static induction electrode includes at least a second charge induction component for sensing charge in the current electric field, and a second signal output component for outputting an AC current signal based on the induced charge. The second signal output component is attached to a portion of the second charge induction component. The data processing part receives the DC current signal and the AC current signal, and obtains a DC voltage value and an AC voltage value respectively, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

2. The electric field sensor assembly according to claim 1, wherein: The first portion of the first charge induction component and the first portion of the second charge induction component are both attached to the physical portion, the second portion of the first charge induction component and the second portion of the second charge induction component are both located on the recessed area, and the first signal generating component, the first signal output component, and the second signal output component are all located above the physical portion.

3. The electric field sensor assembly according to claim 2, wherein: The first signal generating component includes a piezoelectric upper electrode a, a piezoelectric upper electrode b, a piezoelectric layer a, a piezoelectric lower electrode a and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode a and the piezoelectric lower electrode b are arranged side by side and are both attached to part of the first area and part of the second area, the piezoelectric upper electrode a and the piezoelectric upper electrode b are arranged side by side, the piezoelectric upper electrode a is attached to at least a part of the piezoelectric lower electrode a, the piezoelectric upper electrode b is attached to at least a part of the piezoelectric lower electrode b, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a, the piezoelectric upper electrode b, the piezoelectric lower electrode a and the piezoelectric lower electrode b.

4. The electric field sensor assembly according to claim 1, wherein: The static sensing electrode further includes a second signal generating component, which receives a displacement of the second charge sensing component when sensing charges in the current electric field and converts the displacement into the AC current signal, wherein: The second signal generating component is attached to a portion of the second charge inducing component.

5. The electric field sensor assembly according to claim 4, characterized in that The second signal generating component includes at least one piezoelectric upper electrode c, a piezoelectric layer b and at least one piezoelectric lower electrode c. The piezoelectric lower electrode c is attached to part of the first area and part of the second area. The piezoelectric upper electrode c is attached to at least a part of the piezoelectric lower electrode c, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode c and the piezoelectric lower electrode c.

6. The electric field sensor assembly according to any one of claims 1 to 5, characterized in that: The invention further comprises a shielding electrode disposed between the dynamic induction electrode and the static induction electrode, wherein both ends of the shielding electrode are attached to the solid portion and are arranged above the recessed area.

7. The electric field sensor assembly according to claim 6, wherein: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

8. The electric field sensor assembly according to claim 1, wherein: The electric field frequency detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the electric field sensor; The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonant frequency of the electric field sensor; The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to, or less than 50% of the self-resonant frequency of the electric field sensor.

9. The electric field sensor assembly according to claim 1, wherein: The data processing part includes at least an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value; The second calculation module is connected to the second signal output component, receives the input AC current signal, and converts the AC current signal into an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

10. The electric field sensor assembly according to claim 1, wherein: The data processing part includes a first data processing component, a second data processing component and a third data processing component, wherein the first data processing component and the second data processing component are both connected to the third data processing component, wherein: The first data processing component includes an excitation module and a first calculation module, wherein: The excitation module is connected to the first signal generating component, inputs the excitation signal thereto to drive the first signal generating component to vibrate, and receives the generated vibration signal; The first calculation module is connected to the first signal output component, receives the input DC current signal, and converts the DC current signal into a DC voltage value; The second data processing component includes a second computing module, wherein: The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value; The third data processing component includes a third computing module, wherein: The third calculation module receives the DC voltage value and the AC voltage value, and determines the current electric field type according to a comparison result of the DC voltage value and the AC voltage value.

11. A method for detecting electric field type, applied to the electric field sensor assembly according to any one of claims 1 to 10, characterized in that: The following steps are involved: The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field; Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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