Broadband electric field sensor assembly and electric field detection method

Abstract

The present invention provides a broadband electric field sensor assembly and electric field detection method, wherein: the electric field sensor includes a substrate, a dynamic sensing electrode, a static sensing electrode, and a shielding electrode; the substrate includes a solid area and a recessed area; the dynamic sensing electrode and the static sensing electrode are spaced apart; the shielding electrode is located between the dynamic sensing electrode and the static sensing electrode; wherein a portion of the dynamic sensing electrode and the static sensing electrode are attached to the solid area, and another portion is located in the recessed area, respectively obtaining a DC current signal and an AC current signal of the current electric field; the shielding electrode faces the top of the electric field sensor and is used to shield interference signals; the data processing portion is used to obtain DC voltage values and AC voltage values, and to determine the current electric field type based on a comparison result between the two. The present invention can shield interference signals and, when sensing AC current signals, solves the problem of inaccurate detection due to interference between the electric field frequency and the sensing electrode frequency.

Description

Technical Field

[0001] The present invention relates to an electric field sensor, in particular to a broadband electric field sensor component and an electric field detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nanofabrication technologies, MEMS electric field sensors based on charge sensing principles have become a hot topic in research and application due to their advantages such as small size, low cost, easy integration, and mass production. Existing MEMS electric field sensors operate based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration, the sensor modulates the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the magnitude of the electric field to detect the measured electric field.

[0004] However, existing MEMS electric field sensor chips all detect electric field strength through resonance. MEMS detection chips need to be used in resonance. When detecting AC electric fields, the frequency of the electric field and the frequency of the chip will interfere with each other, resulting in the AC current signal being unable to be detected. Summary of the Invention

[0005] In response to the shortcomings of the above problems, the present invention provides a wide-band electric field sensor component and electric field detection method that can shield interference signals and solve the problem of inaccurate detection caused by interference between the electric field frequency and the sensing electrode frequency when sensing AC current signals.

[0006] To achieve the above objectives, in a first aspect, the present invention provides a broadband electric field sensor assembly, comprising an electric field sensor and at least one data processing unit connected thereto, wherein:

[0007] The electric field sensor includes a substrate, at least one dynamic sensing electrode, at least one static sensing electrode, and at least one shielding electrode. The substrate includes a solid area and a recessed area. The dynamic sensing electrode and the static sensing electrode are spaced apart, and the shielding electrode is located between the dynamic sensing electrode and the static sensing electrode. Part of the dynamic sensing electrode is attached to the solid area, and another part is located in the recessed area, for obtaining at least one direct current signal of the current electric field. Part of the static sensing electrode is attached to the solid area, and another part is located in the recessed area, for obtaining at least one alternating current signal of the current electric field. The shielding electrode faces the top of the electric field sensor and is used to shield interference signals.

[0008] The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0009] In one embodiment, the shielding electrode is spaced apart from the dynamic sensing electrode and the static sensing electrode, respectively, wherein both ends of the shielding electrode are attached to the solid area and are arranged above the recessed area.

[0010] In one embodiment, the dynamic sensing electrode includes a sensing electrode component a and a piezoelectric electrode component a, wherein a portion of the sensing electrode component a is attached to the solid area and another portion is located on the recessed area, and the piezoelectric electrode component a is attached to a portion of the sensing electrode component a;

[0011] The static sensing electrode includes a sensing electrode component b and a piezoelectric electrode component b. A portion of the sensing electrode component b is attached to the solid area, and another portion is located on the recessed area. The piezoelectric electrode component b is attached to a portion of the sensing electrode component b.

[0012] In one embodiment, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion and a metal electrode, a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a portion of the second portion;

[0013] The piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of the first portion and a partial area of the second portion, and an extraction electrode a attached to a partial area of the first portion, wherein the piezoelectric electrode a is connected to the extraction electrode a through the first portion, and the extraction electrode a is connected to the metal electrode through the base portion;

[0014] The piezoelectric electrode assembly b includes at least an extraction electrode b attached to a partial area of the first portion.

[0015] In one embodiment, the second portion includes a second portion a and a second portion b, wherein the second portion b is farther away from the first portion than the second portion a, and the metal electrode is attached to the second portion b;

[0016] The piezoelectric electrode a includes a piezoelectric upper electrode a, a piezoelectric layer a and a piezoelectric lower electrode a, wherein the piezoelectric lower electrode a is attached to a partial area of the first part and a partial area of the second part a, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a and the piezoelectric lower electrode a.

[0017] In one embodiment, the piezoelectric electrode assembly b also includes a piezoelectric electrode b attached to a partial area of the first part and a partial area of the second part, wherein the piezoelectric electrode b includes a piezoelectric upper electrode b, a piezoelectric layer b and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode b is attached to a partial area of the first part and a partial area of the second part b, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b and the piezoelectric lower electrode b.

[0018] In one embodiment, the DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal;

[0019] The AC current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charge induced by the sensing electrode assembly b in the current electric field.

[0020] In one embodiment, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0021] The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0022] In one embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the broadband electric field sensor;

[0023] The electric field frequency detected by the static induction electrode is greater than 50% of the self-resonant frequency of the broadband electric field sensor;

[0024] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to, or less than 50% of the self-resonant frequency of the electric field sensor.

[0025] In one embodiment, the data processing portion includes at least an excitation module, a first calculation module, a second calculation module, and a third calculation module, wherein:

[0026] The excitation module inputs the excitation signal to the dynamic sensing electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal;

[0027] The first calculation module receives the DC current signal input by the dynamic sensing electrode and obtains a DC voltage value;

[0028] The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value;

[0029] The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0030] In a second aspect, the present invention further provides an electric field detection method, which is applied to the above-mentioned broadband electric field sensor assembly, comprising the following steps:

[0031] The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field;

[0032] Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0033] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0034] Compared with the prior art, the present invention has one of the following advantages:

[0035] A shielding electrode facing the top of the electric field sensor is provided between the dynamic sensing electrode and the static sensing electrode to shield interference signals. This can solve the problem of inaccurate detection caused by interference between the electric field frequency and the sensing electrode frequency when sensing AC current signals.

[0036] When the sensing electrode assembly a moves up and down under the influence of the current electric field, the shielding electrode is in a stationary state. The sensing electrode assembly a and the shielding electrode are not in the same plane, and differential induction is formed between the two, thereby outputting a differential signal.

[0037] Through dynamic induction electrodes and static induction electrodes, DC current signals and AC current signals can be obtained simultaneously. Compared with existing MEMS electric field sensors that can only obtain one current signal, it can achieve good detection of DC electric fields and AC electric fields, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 Schematic diagram of the structure of the first embodiment of the broadband electric field sensor assembly in the present invention;

[0039] Figure 2 for Figure 1 A structural diagram of a first embodiment of a medium electric field sensor;

[0040] Figure 3 for Figure 2 sectional view of

[0041] Figure 4 for Figure 1 Schematic diagram of the structure of the excitation module;

[0042] Figure 5 for Figure 1 A schematic structural diagram of the first computing module in FIG.

[0043] Figure 6 for Figure 1 A schematic diagram of the structure of the second calculation module;

[0044] Figure 7 2 is a structural diagram of a second embodiment of the electric field sensor of the present invention;

[0045] Figure 8 FIG3 is a structural diagram of a third embodiment of an electric field sensor in the present invention;

[0046] Figure 9 Schematic diagram of the structure of a second embodiment of the broadband electric field sensor assembly of the present invention;

[0047] Figure 10 Flowchart of the electric field detection method of the present invention.

[0048] The main reference numerals are as follows:

[0049] 1-Electric field sensor; 2-Substrate; 200-Insulating layer a; 201-Substrate layer; 202-Recessed area; 3-Dynamic sensing electrode; 300-Piezoelectric upper electrode a; 301-Piezoelectric layer a; 302-Piezoelectric lower electrode a; 303-Lead-out electrode a; 304-Insulating layer b; 4-Static sensing electrode; 400-Piezoelectric upper electrode b; 401-Piezoelectric lower electrode b; 402-Lead-out electrode b; 5-Base layer; 6-First part; 7-Second part a; 8-Second part b; 9-Metal electrode; 10-Shielding electrode; 11-Data processing part; 1101-Excitation module; 1102-First calculation module; 1103-Second calculation module; 1104-Third calculation module; 12-First data processing part; 13-Second data processing part; 14-Third data processing part. DETAILED DESCRIPTION

[0050] To make the objectives, technical solutions, and advantages of the present invention more clear, the technical solutions of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0051] In the description of the present invention, it should be understood that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it can be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0052] Example 1

[0053] like Figures 1 to 6 As shown, this embodiment provides a broadband electric field sensor assembly, including an electric field sensor 1 and a data processing unit 11 connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic induction electrode 3, a static induction electrode 4, and a shielding electrode 10, wherein the dynamic induction electrode 3 and the static induction electrode 4 are fixed on the left and right sides of the substrate 2 respectively, and the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4, separating the dynamic induction electrode 3 from the static induction electrode 4. Part of the dynamic induction electrode 3 is attached to the solid area, and the other part is located on the recessed area 202, for obtaining at least one direct current signal of the current electric field. Part of the static induction electrode 4 is attached to the solid area, and the other part is located on the recessed area 202, for obtaining at least one alternating current signal of the current electric field. The shielding electrode 10 faces the top of the electric field sensor 1 to shield interference signals.

[0054] Specifically, the substrate 2 includes a solid area and a recessed area 202. The recessed area 202 is formed by a local area of the top end surface of the substrate 2 being recessed toward the bottom end surface thereof, and the solid area surrounds the outside of the recessed area 202 to form a frame-like structure.

[0055] Preferably, the shape of the substrate 2 , the shape of the recessed area 202 , and the shape of the solid area are all square structures.

[0056] Furthermore, the physical region is composed of a stacked insulating layer a200 and a substrate layer 201. The insulating layer a200 is used to isolate signals, and the material of the insulating layer a200 is not limited to silicon dioxide, silicon nitride, and composite materials of silicon dioxide and silicon nitride. The substrate layer 201 can be made of dielectric materials such as silicon-based materials, glass, ceramics, or organic materials, or metals and metal alloys.

[0057] Specifically, the dynamic sensing electrode 3 includes a sensing electrode assembly a and a piezoelectric electrode assembly a. A portion of the sensing electrode assembly a is attached to the solid area, while another portion is located above the recessed area 202. The piezoelectric electrode assembly a is attached to a portion of the sensing electrode assembly a. The DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a in response to the excitation signal.

[0058] Specifically, the static sensing electrode 4 includes a sensing electrode assembly b and a piezoelectric electrode assembly b. A portion of the sensing electrode assembly b is attached to the solid area, while another portion is located in the recessed area 202. The piezoelectric electrode assembly b is attached to a portion of the sensing electrode assembly b. The AC current signal is converted by the sensing electrode assembly b based on the charge induced in the current electric field.

[0059] Specifically, the shielding electrode 10 is located between the dynamic induction electrode 3 and the static induction electrode 4 and is spaced apart from the dynamic induction electrode 3 and the static induction electrode 4 , respectively. Both ends of the shielding electrode 10 are attached to the solid area and are positioned above the recessed area 202 .

[0060] In this embodiment, both the sensing electrode assembly a and the sensing electrode assembly b include a base portion 5 and a metal electrode 9. The first portion 6 of the base portion 5 is attached to the top end surface of the insulating layer a200. The second portion of the base portion 5 is located above the recessed area 202. The metal electrode 9 is attached to a portion of the second portion.

[0061] Furthermore, the piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of the first part 6 and a partial area of the second part, and a lead-out electrode a303 attached to a partial area of the first part 6, wherein the piezoelectric electrode a is connected to the lead-out electrode a303 through the first part 6, and the lead-out electrode a303 is connected to the metal electrode 9 through the base layer 5.

[0062] The piezoelectric electrode assembly b includes an extraction electrode b attached to a partial area of the first portion 6 .

[0063] In the above embodiment, further, the second portion includes a second portion a7 and a second portion b8, wherein the second portion b8 is farther away from the first portion 6 relative to the second portion a7, and the metal electrode 9 is attached to the second portion b8.

[0064] In this embodiment, the piezoelectric electrode a further includes two piezoelectric upper electrodes a300, a piezoelectric layer a301, and two piezoelectric lower electrodes a302. The piezoelectric lower electrodes a302 are attached to a portion of the first portion 6 and a portion of the second portion a7. The piezoelectric upper electrode a300 is attached to at least a portion of the piezoelectric lower electrode a302, and the piezoelectric layer a301 is sandwiched between the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302. One piezoelectric upper electrode a300 and one piezoelectric lower electrode a302 constitute the input end of the excitation signal and are connected to the data processing unit 11 via a transmission line. The other piezoelectric upper electrode a300 and the other piezoelectric lower electrode a302 constitute the output end of the vibration signal and are connected to the data processing unit 11 via a transmission line.

[0065] In this embodiment, further, the shielding electrode 10 is composed of a base layer, or a base layer and a metal electrode covering the base layer.

[0066] When sensing electrode assembly a reciprocates up and down under the influence of the current electric field, sensing electrode assembly a and shielding electrode 10 are not in the same plane, generating differential induction between the two, thereby outputting a differential signal. When sensing electrode assembly a is stationary, the top end surface of sensing electrode assembly a and the top end surface of shielding electrode 10 are in the same plane.

[0067] For example, when the base layer is made of a highly conductive silicon-based material, the base layer can shield the signal. When the base layer is made of a non-highly conductive silicon-based material, the metal electrode covering the base layer can shield the signal.

[0068] In addition, the piezoelectric electrode a optionally further includes an insulating layer b304, which is sandwiched between the piezoelectric lower electrode a302 and the base portion 5 for signal isolation. The material of the insulating layer b304 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride.

[0069] Alternatively, the metal electrode can be made of a metal or alloy such as Ti, Pt, Al, Ag, Cr, Cu, Au, or Mo. The base portion 5 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals, or organic materials, or metal and metal alloy materials. The piezoelectric layer can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, or modified lead titanate. The base portion 5 can be shaped in a variety of ways, including a straight beam, a folded beam, a U-shaped beam, a serpentine beam, or a crab beam.

[0070] In this embodiment, when the base portion 5 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 9 and the lead-out electrode, and between the piezoelectric electrode and the lead-out electrode can be achieved without providing a transmission line.

[0071] In another embodiment, when the base layer 5 is made of a non-highly conductive material, a transmission line is embedded in the base layer 5, the piezoelectric electrode is connected to the lead-out electrode through the transmission line, and the metal electrode 9 is connected to the lead-out electrode through the transmission line, thereby realizing signal transmission between the metal electrode 9 and the lead-out electrode, and between the piezoelectric electrode and the lead-out electrode.

[0072] In addition, in the broadband electric field sensor 1 provided in this embodiment, the metal electrode 9 is the core component of the electric field sensor 1, which is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 5 has a certain elasticity. After the metal electrode 9 is attached to the top surface of the base portion 5, when the current electric field changes drastically, the metal electrode 9 can not only sense the charge in the current electric field, but also, under the influence of the current electric field, the metal electrode 9 can move back and forth in the upper position of the recessed area 202 and the interior of the recessed area 202 in the up and down directions. Among them, when the metal electrode 9 is located above the recessed area 202, the amount of charge induced on the surface of the metal electrode 9 is greater than the amount of charge induced on the surface of the metal electrode 9 when the metal electrode 9 is located inside the recessed area 202. At the same time, when the metal electrode 9 is located above the recessed area 202, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 9 is located inside the recessed area 202.

[0073] In addition, when the current electric field changes dramatically, causing the base portion 5 to move back and forth in the up and down directions, a displacement will be generated. This displacement can be input into the piezoelectric electrode through the base portion 5 made of a highly conductive material or a transmission line placed in the base portion 5.

[0074] In addition, in this embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the broadband electric field sensor.

[0075] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the electric field frequency f detected by the dynamic induction electrode is: f≤0.5×f1.

[0076] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor.

[0077] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the electric field frequency f detected by the static induction electrode is: f≥0.5×f1.

[0078] The alternating current signal detected by the static sensing electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0079] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≥0.5×f1.

[0080] The alternating current signal detected by the static sensing electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0081] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0082] The alternating current signal detected by the static sensing electrode is an alternating current signal having a frequency less than 50% of the self-resonant frequency of the electric field sensor.

[0083] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0084] Specifically, the data processing part 11 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0085] Furthermore, the data processing unit 11 is connected to the extraction electrode a303 and the extraction electrode b via transmission lines. The data processing unit 11 is also connected to the piezoelectric upper electrode a300 and the piezoelectric lower electrode a302 in the dynamic sensing electrode 3 via transmission lines. The data processing unit 11 includes an excitation module 1101, a first calculation module 1102, a second calculation module 1103, and a third calculation module 1104, wherein:

[0086] The excitation module 1101 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode a in the piezoelectric electrode assembly a to vibrate;

[0087] The first calculation module 1102 receives the DC current signal input from the dynamic induction electrode 3 via the lead-out electrode a303 and obtains a DC voltage value;

[0088] The second calculation module 1103 receives the AC current signal input from the static induction electrode 4 via the lead-out electrode b and obtains an AC voltage value;

[0089] The third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0090] Furthermore, the excitation module 1101 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode a in the piezoelectric electrode assembly a.

[0091] Furthermore, the excitation module 1101 includes an excitation signal generating unit, a phase shift filter, a signal amplifier, and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, and the piezoelectric electrode a vibrates according to the excitation signal and outputs a vibration signal. The vibration signal receiver receives the vibration signal output by the piezoelectric electrode a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode a generates the maximum vibration.

[0092] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode a300 through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode a302 through a transmission line.

[0093] Furthermore, the first calculation module 1102 includes an I / V conversion unit, an amplification unit, a phase shift filter, and a coherent demodulator, wherein:

[0094] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0095] The amplifying unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0096] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0097] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0098] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0099] Furthermore, the second calculation module 1103 includes an I / V conversion unit, an amplification unit, a filter, and an amplitude extraction unit. The AC current signal is converted by the sensing electrode assembly b based on the charge induced in the current electric field and input into the second calculation module 1103 through the extraction electrode b and the transmission line, wherein:

[0100] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0101] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0102] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0103] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0104] Optionally, the phase-shift filter may convert the AC voltage signal into a square wave signal, a half-wave signal, or a full-wave signal according to settings.

[0105] Furthermore, the third calculation module 1104 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0106] Example 2

[0107] like Figure 7 As shown, this embodiment provides a broadband electric field sensor assembly, including an electric field sensor and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4, and a shielding electrode 10. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0108] In the static sensing electrode 4, the piezoelectric electrode b further includes a piezoelectric upper electrode b400, a piezoelectric layer b, and a piezoelectric lower electrode b401. The piezoelectric lower electrode b401 is attached to a portion of the first portion and a portion of the second portion a. The piezoelectric upper electrode b400 is attached to at least a portion of the piezoelectric lower electrode b401, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b400 and the piezoelectric lower electrode b401. The piezoelectric upper electrode b400 and the piezoelectric lower electrode b401 form a signal output terminal, which is connected to the extraction electrode b402. This allows the AC current signal obtained by the static sensing electrode 4 to be input into the second calculation module of the data processing unit through the extraction electrode b402 and the transmission line, where the second calculation module converts the AC current signal into a corresponding AC voltage value.

[0109] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0110] Example 3

[0111] like Figure 8 As shown, this embodiment provides a broadband electric field sensor assembly, including an electric field sensor 1 and a data processing unit connected thereto. The electric field sensor 1 includes a substrate 2, a dynamic sensing electrode 3, a static sensing electrode 4, and a shielding electrode 10. The electric field sensor 1 in this embodiment differs from the electric field sensor 1 in the first embodiment in that:

[0112] In the static sensing electrode 4, the piezoelectric electrode b further comprises two piezoelectric upper electrodes b400, a piezoelectric layer b, and two piezoelectric lower electrodes b401. The piezoelectric lower electrodes b401 are attached to portions of the first portion and the second portion a. The piezoelectric upper electrode b400 is attached to at least a portion of the piezoelectric lower electrode b401, and the piezoelectric layer b is sandwiched between the piezoelectric upper and lower electrodes b400 and b401. The piezoelectric upper electrode b400 and the piezoelectric lower electrode b401 form a signal output terminal, which is connected to the extraction electrode b402. This allows the AC current signal obtained by the static sensing electrode 4 to be input into the second calculation module of the data processing unit via the extraction electrode b402 and the transmission line, where the second calculation module converts the AC current signal into a corresponding AC voltage value.

[0113] Furthermore, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the induced charge in the current electric field.

[0114] In this embodiment, since the dynamic induction electrode 3 and the static induction electrode 4 have the same structure, they can be replaced as needed. When the static induction electrode 4 is replaced with the dynamic induction electrode 3, one piezoelectric upper electrode b400 and one piezoelectric lower electrode b401 constitute the input end of the excitation signal and are connected to the data processing part via a transmission line to receive the excitation signal input by the data processing part. Another piezoelectric upper electrode b400 and another piezoelectric lower electrode b401 constitute the output end of the vibration signal and are connected to the data processing part via a transmission line to input the vibration signal to the data processing part. At the same time, the vibration generated by the piezoelectric electrode b under the drive of the excitation signal is also converted into a DC current signal and input into the data processing part through the lead-out electrode a and the transmission line.

[0115] In addition, in the above-mentioned embodiments 1 to 3, the DC current signal output by the electric field sensor 1 is the current real-time DC current signal obtained by the dynamic induction electrode 3 , and the AC current signal output is the current real-time AC current signal obtained by the static induction electrode 4 .

[0116] After setting the sensing time period and each sensing time point, the electric field sensor 1 in the first to third embodiments can output a DC current signal and an AC current signal corresponding to each sensing time point within the sensing time period.

[0117] Example 4

[0118] like Figure 9As shown, this embodiment provides a broadband electric field sensor assembly, comprising the electric field sensor 1 of any one of the above-mentioned embodiments 1 to 3, a first data processing part 12 and a second data processing part 13 connected to the electric field sensor 1, and a third data processing part 14 connected to the first data processing part 12 and the second data processing part 13, respectively, wherein:

[0119] The first data processing unit 12 is connected via a transmission line to the input terminal of the excitation signal, which is composed of a piezoelectric upper electrode a and a piezoelectric lower electrode a, in the dynamic induction electrode 3. The first data processing unit 12 is connected via a transmission line to the lead electrode a in the dynamic induction electrode 3. The first data processing unit 12 is connected via a transmission line to receive the DC current signal output by the dynamic induction electrode 3 and obtain a DC voltage value. The second data processing unit 13 is connected via a transmission line to the lead electrode b in the static induction electrode 4. The second data processing unit 13 receives the AC current signal output by the static induction electrode 4 and obtains an AC voltage value. The third data processing unit 14 is connected via a transmission line to the first data processing unit 12 and the second data processing unit 13. The third data processing unit 14 is connected via a transmission line to the first data processing unit 12 and the second data processing unit 13. The third data processing unit 14 compares the DC voltage value with the AC voltage value and determines the current electric field type based on the comparison result.

[0120] Specifically, the first data processing part 12 includes an excitation module and a first calculation module, wherein the excitation module inputs an excitation signal to the piezoelectric electrode a to drive the piezoelectric electrode a to vibrate, and the first calculation module receives a DC current signal input from the dynamic induction electrode 3 and obtains a DC voltage value.

[0121] The structures and principles of the excitation module and the first calculation module in this embodiment are the same as those of the excitation module and the first calculation module in the first embodiment.

[0122] Specifically, the second data processing part 13 includes a second calculation module, wherein the second calculation module receives the AC current signal input by the static induction electrode 4 and obtains an AC voltage value.

[0123] The structure and principle of the second calculation module in this embodiment are the same as those of the second calculation module in the first embodiment.

[0124] Specifically, the third data processing part 14 includes a third calculation module, wherein the third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0125] The structure and principle of the third calculation module in this embodiment are the same as those of the third calculation module in the first embodiment.

[0126] In the above embodiment, the first data processing part 12 , the second data processing part 13 and the third data processing part 14 may also be solidified on the same circuit board.

[0127] For example, in Examples 1 to 4, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0128] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values and AC voltage values at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point based on the comparison results of the DC voltage values and AC voltage values at the same sensing time point.

[0129] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0130] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0131] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0132] Furthermore, in Examples 1 through 4, when the current electric field undergoes a dramatic change, the metal electrodes in both the dynamic induction electrode 3 and the static induction electrode 4 sense the charge in the current electric field to generate a charge signal. This charge signal is input via the extraction electrode into the data processing unit, or the first data processing unit 12 and the second data processing unit 13, thereby obtaining the corresponding electric field value.

[0133] Example 5

[0134] like Figure 10 As shown, this embodiment provides an electric field detection method, which is applied to the broadband electric field sensor assembly described in the first and fourth embodiments, and includes the following steps:

[0135] S101. Setting the induction time of the current electric field.

[0136] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a DC current signal and an AC current signal corresponding to each induction time point in the induction time period.

[0137] Optionally, the induction time of the current electric field is set to the current induction time according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0138] S102 : driving the piezoelectric electrode a in the piezoelectric electrode assembly a to vibrate.

[0139] Specifically, an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the data processing part in Examples 1 to 3 to drive the piezoelectric electrode a to vibrate and receive the vibration signal; or an excitation signal can be input to the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 4 to drive the piezoelectric electrode a to vibrate and receive the vibration signal.

[0140] S103: Obtain a direct current signal and an alternating current signal of the current electric field.

[0141] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode a in the piezoelectric electrode assembly a in response to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field. Alternatively, the alternating current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when receiving the charge induced by the sensing electrode assembly b in the current electric field.

[0142] Optionally, the DC current signal includes a DC current signal in the current electric field obtained at a set sensing time point, or each DC current signal in the current electric field obtained during a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained at a set sensing time point, or each AC current signal in the current electric field obtained during a set sensing time period.

[0143] S104 , obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal, respectively.

[0144] Specifically, the first calculation module and the second calculation module in Examples 1 to 3 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 4 receives the DC current signal and obtains the DC voltage value, and the second calculation module in the second data processing part receives the AC current signal and obtains the AC voltage value.

[0145] Optionally, the DC voltage value includes a DC current value in the current electric field obtained at a set sensing time point, or each DC current value in the current electric field obtained during a set sensing time period. The AC voltage value includes an AC voltage value in the current electric field obtained at a set sensing time point, or each AC voltage value in the current electric field obtained during a set sensing time period.

[0146] S105 . Determine the current electric field type according to a comparison result between the DC voltage value and the AC voltage value.

[0147] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in Embodiments 1 to 5, and the current electric field type is determined according to the comparison result.

[0148] For example, in Examples 1 to 5, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0149] For example, in Examples 1 to 5, after the first and second calculation modules respectively input multiple DC voltage values and AC voltage values at the same sensing time point into the third calculation module, the third calculation module determines the electric field type at each sensing time point based on the comparison results of the DC voltage values and AC voltage values at the same sensing time point. Here,

[0150] If the electric field type corresponding to the multiple sensing time points is a DC electric field, determining that the current electric field in the sensing time period is a DC electric field;

[0151] If the electric field type corresponding to the multiple sensing time points is an AC electric field, determining that the current electric field in the sensing time period is an AC electric field;

[0152] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which AC electric fields and DC fields switch between each other.

[0153] The above description is merely a preferred embodiment of the present invention and is intended to be illustrative rather than restrictive of the present invention. Those skilled in the art will appreciate that many changes, modifications, and even equivalents may be made to the present invention within the spirit and scope of the claims, all of which fall within the scope of protection of the present invention.

Claims

1. A broadband electric field sensor assembly, characterized in that: The device comprises an electric field sensor and at least one data processing part connected thereto, wherein: The electric field sensor includes a substrate, at least one dynamic sensing electrode, at least one static sensing electrode, and at least one shielding electrode. The substrate includes a solid area and a recessed area. The dynamic sensing electrode and the static sensing electrode are spaced apart, and the shielding electrode is located between the dynamic sensing electrode and the static sensing electrode. Part of the dynamic sensing electrode is attached to the solid area, and another part is located in the recessed area, for obtaining at least one direct current signal of the current electric field. Part of the static sensing electrode is attached to the solid area, and another part is located in the recessed area, for obtaining at least one alternating current signal of the current electric field. The shielding electrode faces the top of the electric field sensor and is used to shield interference signals. The dynamic sensing electrode includes a sensing electrode assembly a and a piezoelectric electrode assembly a, wherein the piezoelectric electrode assembly a is attached to a portion of the sensing electrode assembly a, and a DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal; When the sensing electrode assembly a reciprocates up and down under the influence of the current electric field, the shielding electrode is in a stationary state, the sensing electrode assembly a and the shielding electrode are not in the same plane, and differential induction is formed between the two, thereby outputting a differential signal; The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

2. The broadband electric field sensor assembly according to claim 1, wherein: The shielding electrode is spaced apart from the dynamic induction electrode and the static induction electrode respectively, wherein both ends of the shielding electrode are attached to the solid area and are arranged above the recessed area.

3. The broadband electric field sensor assembly according to claim 2, wherein: A portion of the sensing electrode assembly a is attached to the solid area, and another portion is located on the recessed area; The static sensing electrode includes a sensing electrode component b and a piezoelectric electrode component b. A portion of the sensing electrode component b is attached to the solid area, and another portion is located on the recessed area. The piezoelectric electrode component b is attached to a portion of the sensing electrode component b.

4. The broadband electric field sensor assembly according to claim 3, wherein: The sensing electrode assembly a and the sensing electrode assembly b each include a base portion and a metal electrode, wherein a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a portion of the second portion; The piezoelectric electrode assembly a includes a piezoelectric electrode a attached to a partial area of the first portion and a partial area of the second portion, and an extraction electrode a attached to a partial area of the first portion, wherein the piezoelectric electrode a is connected to the extraction electrode a through the first portion, and the extraction electrode a is connected to the metal electrode through the base portion; The piezoelectric electrode assembly b includes at least an extraction electrode b attached to a partial area of the first portion.

5. The broadband electric field sensor assembly according to claim 4, characterized in that: The second portion includes a second portion a and a second portion b, wherein the second portion b is farther away from the first portion than the second portion a, and the metal electrode is attached to the second portion b; The piezoelectric electrode a includes a piezoelectric upper electrode a, a piezoelectric layer a and a piezoelectric lower electrode a, wherein the piezoelectric lower electrode a is attached to a partial area of the first part and a partial area of the second part a, the piezoelectric upper electrode a is attached to at least a portion of the piezoelectric lower electrode a, and the piezoelectric layer a is sandwiched between the piezoelectric upper electrode a and the piezoelectric lower electrode a.

6. The broadband electric field sensor assembly according to claim 5, characterized in that: The piezoelectric electrode assembly b also includes a piezoelectric electrode b attached to a partial area of the first part and a partial area of the second part, wherein the piezoelectric electrode b includes a piezoelectric upper electrode b, a piezoelectric layer b and a piezoelectric lower electrode b, wherein the piezoelectric lower electrode b is attached to a partial area of the first part and a partial area of the second part b, the piezoelectric upper electrode b is attached to at least a portion of the piezoelectric lower electrode b, and the piezoelectric layer b is sandwiched between the piezoelectric upper electrode b and the piezoelectric lower electrode b.

7. The broadband electric field sensor assembly according to any one of claims 1 to 6, characterized in that: The DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal; The AC current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charge induced by the sensing electrode assembly b in the current electric field.

8. The broadband electric field sensor assembly according to claim 7, characterized in that: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

9. The broadband electric field sensor assembly according to claim 1, wherein: The electric field frequency detected by the dynamic sensing electrode is less than 50% of the self-resonant frequency of the broadband electric field sensor; The electric field frequency detected by the static induction electrode is greater than 50% of the self-resonant frequency of the broadband electric field sensor; The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to, or less than 50% of the self-resonant frequency of the electric field sensor.

10. The broadband electric field sensor assembly according to claim 1, wherein: The data processing part includes at least an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module inputs the excitation signal to the dynamic sensing electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal; The first calculation module receives the DC current signal input by the dynamic sensing electrode and obtains a DC voltage value; The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

11. An electric field detection method, applied to the broadband electric field sensor assembly according to any one of claims 1 to 10, characterized in that: The following steps are involved: The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field; Obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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