Method for fabricating periodic structures on dielectric crystal surfaces at room temperature using femtosecond laser combined with ion implantation

Abstract

The application discloses a method for preparing a dielectric crystal surface periodic structure at room temperature by combining femtosecond laser with ion implantation, and belongs to the technical field of integrated optics. The method comprises the following steps: bombarding a dielectric crystal surface by metal ions to form an implantation layer; focusing femtosecond laser on the surface of the implantation layer of the dielectric crystal to lower the position of the dielectric crystal; and moving the position of the dielectric crystal to engrave lines on the surface of the implantation layer to obtain a surface periodic structure. The method realizes preparation of a dielectric crystal material surface periodic structure at room temperature, and is simple in operation and can realize large-scale preparation and popularization and application of a surface periodic structure.

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