A feeding and discharging mechanism and wafer slicing device

Abstract

The application provides a feeding and discharging mechanism and a scribing device. The feeding and discharging mechanism comprises a first mounting seat and a second mounting seat which are arranged at intervals along a first direction, and the length direction of the first mounting seat and the second mounting seat is parallel to a second direction, wherein the second direction is perpendicular to the first direction. A first lifting support part and a second lifting support part are arranged at intervals on the first mounting seat along the second direction, and the first lifting support part and the second lifting support part are used for supporting or adsorbing a first side edge of a stretcher, the stretcher is tightly stretched with a carrier film, and the carrier film carries a workpiece; a third lifting support part and a fourth lifting support part are arranged at intervals on the second mounting seat along the second direction, and the third lifting support part and the fourth lifting support part are used for supporting or adsorbing a second side edge of the stretcher. The first lifting support part, the second lifting support part, the third lifting support part and the fourth lifting support part are also configured to be synchronously lifted. The application improves the feeding and discharging efficiency of the workpiece, and finally improves the scribing efficiency.

Description

Technical Field

[0001] This application relates to the field of semiconductor device manufacturing, specifically to a loading / unloading mechanism and a dicing device. Background Technology

[0002] like Figures 1 to 2 As shown, during the dicing process of the dicing machine on the workpiece 400 (such as a wafer), the worktable suction cup 100 (hereinafter referred to as the suction cup) holds the stretcher 200. A carrier film 300 (blue film or UV film) is stretched on the stretcher 200, and the workpiece 400 is supported on the carrier film 300. The suction cup 100 provides a relatively flat dicing reference surface. The suction cup 100 includes a magnetic adsorption area A and a vacuum adsorption area B. The stretcher 200 is adsorbed in the magnetic adsorption area A of the suction cup 100, and the workpiece 400 to be diced needs to be aligned with the vacuum adsorption area B of the suction cup.

[0003] Currently, before graffiti is performed, the scaffold 200 needs to be manually and accurately placed onto the suction cup 100. However, the magnetic adsorption area A of the suction cup 100 relies on multiple magnets 101 (e.g., Figure 1 The eight suction cups provide magnetic attraction. When manually placing the bandage 200, it is difficult to place the bandage 200 in the appropriate position on the suction cup in one go. It is necessary to adjust the placement position multiple times, which is time-consuming and laborious. Summary of the Invention

[0004] To solve the above-mentioned technical problems, this application provides a loading and unloading mechanism, which adopts the following technical solution:

[0005] A loading and unloading mechanism, comprising:

[0006] A first mounting base and a second mounting base are spaced apart along a first direction, the length direction of the first mounting base and the second mounting base is parallel to the second direction, wherein the second direction is perpendicular to the first direction;

[0007] A first lifting support and a second lifting support are installed at intervals along the second direction on the first mounting base. The first lifting support and the second lifting support are used to cooperate in supporting or adsorbing the first side of the tension frame. A bearing membrane is stretched inside the tension frame, and the workpiece is carried on the bearing membrane.

[0008] A third lifting support and a fourth lifting support are installed at intervals along the second direction on the second mounting base. The third lifting support and the fourth lifting support are used to cooperate in supporting or adsorbing the second side of the stretcher. The second side is opposite to the first side.

[0009] The first, second, third, and fourth lifting support sections are also configured to lift synchronously.

[0010] In some embodiments, the first lifting support and the second lifting support are positionally adjustable mounted on the first mounting seat along a second direction; the third lifting support and the fourth lifting support are positionally adjustable mounted on the second mounting seat along the second direction.

[0011] In some embodiments, the first lifting support comprises a first lifting driving member and a first bearing plate connected to a driving end of the first lifting driving member, the first bearing plate is used to support and adsorb a first corner of one end of a first side of the stretcher; the second lifting support comprises a second lifting driving member and a second bearing plate connected to a driving end of the second lifting driving member, the second bearing plate is used to support and adsorb a second corner of the other end of the first side of the stretcher; the third lifting support comprises a third lifting driving member and a third bearing plate connected to a driving end of the third lifting driving member, the third bearing plate is used to support and adsorb a first corner of one end of a second side of the stretcher; the fourth lifting support comprises a fourth lifting driving member and a fourth bearing plate connected to a driving end of the fourth lifting driving member, the fourth bearing plate is used to support and adsorb a second corner of the other end of the second side of the stretcher; the first lifting driving member, the second lifting driving member, the third lifting driving member and the fourth lifting driving member are configured to synchronously drive the first bearing plate, the second bearing plate, the third bearing plate and the fourth bearing plate to lift.

[0012] In some embodiments, the first lifting driving member, the second lifting driving member, the third lifting driving member and the fourth lifting driving member are configured to be connected with the same PLC controller, the PLC controller controls the first lifting driving member, the second lifting driving member, the third lifting driving member and the fourth lifting driving member to be synchronously driven.

[0013] In some embodiments, the first bearing plate has a first limiting slot, a positionally adjustable first positioning member is arranged in the first limiting slot, the first limiting slot is used to support the first corner of the stretcher, and the first positioning member is used to abut against the first corner of the stretcher; the second bearing plate has a second limiting slot, a positionally adjustable second positioning member is arranged in the second limiting slot, the second limiting slot is used to support the second corner of the stretcher, and the second positioning member is used to abut against the second corner of the stretcher; the third bearing plate has a third limiting slot, the third limiting slot is used to support a third corner of the stretcher, and the third corner of the stretcher abuts against an inner wall of the third limiting slot; the fourth bearing plate has a fourth limiting slot, the fourth limiting slot is used to support a fourth corner of the stretcher, and the fourth corner of the stretcher abuts against an inner wall of the fourth limiting slot.

[0014] In some embodiments, the first positioning member comprises a first waist hole arranged in the first limiting slot, and a first positioning pin installed in the first waist hole and capable of sliding in the first waist hole, the first positioning pin abutting against a first corner of the stretcher when sliding into position; and the second positioning member comprises a second waist hole arranged in the second limiting slot, and a second positioning pin installed in the second waist hole and capable of sliding in the second waist hole, the second positioning pin abutting against a second corner of the stretcher when sliding into position.

[0015] In some embodiments, the inner side edges of the first, second, third and fourth bearing plates are each formed with a gap for avoiding the suction cup.

[0016] In some embodiments, the bottom of each of the first, second, third and fourth bearing plates is provided with a magnet for adsorbing the stretcher.

[0017] The feeding and discharging mechanism provided by the present application can support and position the stretcher, so that the stretcher and the workpiece carried on the bearing film are kept in a suspended state above the predetermined feeding and discharging station. When the suction cup translates to the feeding and discharging station, the feeding and discharging mechanism can drive the stretcher to descend, so that the stretcher is accurately adsorbed on the magnetic adsorption area of the suction cup, and the workpiece is accurately adsorbed on the vacuum adsorption area of the suction cup. In addition, when the suction cup carrying the stretcher and the workpiece after scribing translates back to the feeding and discharging station, the feeding and discharging mechanism can automatically suck the stretcher from the suction cup, thereby completing the automatic discharging of the stretcher and the workpiece after scribing. The feeding and discharging mechanism provided by the present application improves the feeding and discharging efficiency of the workpiece, and ultimately improves the scribing efficiency.

[0018] The present application also provides a scribing device comprising the feeding and discharging mechanism, the suction cup and the scribing mechanism as described in any one of the above embodiments, wherein: the feeding and discharging mechanism is configured to support the stretcher, the stretcher is tightly stretched with a bearing film, and the bearing film carries a workpiece; the suction cup is configured to translate to below the stretcher, the feeding and discharging mechanism is configured to drive the stretcher to descend, so that the stretcher is adsorbed by the magnetic adsorption area of the suction cup, and the workpiece is adsorbed by the vacuum adsorption area of the suction cup; the suction cup is further configured to translate to below the scribing mechanism, the scribing mechanism is configured to scribe the workpiece, the suction cup is further configured to translate back to below the stretcher, and the feeding and discharging mechanism is further configured to suck the stretcher from the suction cup.

[0019] In some embodiments, the scribing device further comprises a translation module, the suction cup is connected to a movable component of the translation module, and the translation module is used to drive the suction cup to translate and switch between the feeding and discharging mechanism and the scribing mechanism.

[0020] Through the cooperation of the feeding and discharging mechanism, the suction cup and the scribing mechanism, the scribing device of the present application realizes the automatic scribing of the workpiece and improves the feeding and discharging efficiency of the workpiece. BRIEF DESCRIPTION OF DRAWINGS

[0021] Figure 1 A schematic diagram of the process of loading the stretcher carrying the workpiece onto the suction cup in the prior art;

[0022] Figure 2 A schematic diagram of the structure of the suction cup;

[0023] Figure 3 A schematic diagram of the three-dimensional structure of the feeding and discharging mechanism in the embodiment of the present application in one working state;

[0024] Figure 4 A schematic diagram of the side view structure of the feeding and discharging mechanism in the embodiment of the present application in one working state;

[0025] Figure 5 A schematic diagram of the top view structure of the feeding and discharging mechanism in the embodiment of the present application in one working state;

[0026] Figure 6 A schematic diagram of the three-dimensional structure of the feeding and discharging mechanism in the embodiment of the present application in another working state;

[0027] Figure 7 A schematic diagram of the side view structure of the feeding and discharging mechanism in the embodiment of the present application in another working state.

[0028] Figures 1 to 7 Comprise:

[0029] The first mounting seat 1;

[0030] The second mounting seat 2;

[0031] The first lifting support part 3: the first lifting driving part 31, the first bearing plate 32, the first limiting groove 33, the first positioning part 34, the avoiding notch 35, the magnet 36;

[0032] The second lifting support part 4: the second lifting driving part 41, the second bearing plate 42, the second limiting groove 43, the second positioning part 44;

[0033] The third lifting support part 5: the third lifting driving part 51, the third bearing plate 52, the third limiting groove 53;

[0034] The fourth lifting support part 6: the fourth lifting driving part 61, the fourth bearing plate 62, the fourth limiting groove 63;

[0035] The suction cup 100, the magnet 101, the stretcher 200, the bearing film 300, the workpiece 400. DETAILED DESCRIPTION

[0036] The technical solutions of the present application will be described clearly and completely in the description below in conjunction with the drawings. Obviously, the described embodiments are some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0037] In the description of the present application, it should be noted that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second", "third" are only for the purpose of description and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication inside two elements. For those skilled in the art, the specific meanings of the above terms in the present application can be understood according to the specific circumstances.

[0039] In addition, the technical features involved in the different embodiments of the present application described below can be combined with each other as long as they do not conflict with each other.

[0040] As shown in Figures 3 to 7 The feeding and discharging structure in the embodiments of the present application comprises:

[0041] The first mounting seat 1 and the second mounting seat 2 are arranged at intervals along the first direction (for example, the X direction), and the length direction of the first mounting seat 1 and the second mounting seat 2 is parallel to the second direction (for example, the Y direction), wherein the second direction is perpendicular to the first direction.

[0042] The first lifting support part 3 and the second lifting support part 4 are mounted at intervals on the first mounting seat 1 along the second direction, and the first lifting support part 3 and the second lifting support part 4 are used to cooperate to support or adsorb the first side edge of the stretcher 200. The stretcher 200 has a bearing film (not shown in the figure) tightly stretched therein, and a workpiece (not shown in the figure) carried on the bearing film.

[0043] A third lifting support part 5 and a fourth lifting support part 6 are installed on the second mounting seat 2 at intervals along the second direction, and the third lifting support part 5 and the fourth lifting support part 6 are used to support or adsorb the second side edge of the stretcher frame 200, which is opposite to the first side edge.

[0044] The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are also configured to be synchronously lifted.

[0045] The working process of the feeding and discharging mechanism in the embodiment of the present application is as follows:

[0046] According to the size of the stretcher frame 200 to be carried, the interval between the first mounting seat 1 and the second mounting seat 2, the interval between the first lifting support part 3 and the second lifting support part 4, and the interval between the third lifting support part 5 and the fourth lifting support part 6 are adjusted to ensure that the stretcher frame 200 placed on the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 is directly above the predetermined feeding and discharging station.

[0047] The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are all lifted to the high position. Figures 3 to 5 The stretcher frame 200 is placed and fixed on the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6.

[0048] The suction cup 100 is translated to the feeding and discharging station. Then, as shown in Figures 6 to 7 The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are synchronously lowered until the stretcher frame 200 contacts and is adsorbed on the magnetic adsorption area of the suction cup 100, and the workpiece on the carrying film is adsorbed on the vacuum adsorption area of the suction cup 100. At this time, the automatic feeding of the stretcher frame 200 is completed.

[0049] The suction cup 100 leaves the feeding and discharging station and is translated to the scribing station to implement scribing, while the first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are synchronously lifted to the home position.

[0050] The suction cup 100 drives the stretcher frame 200 and the workpiece after scribing to be translated to the feeding and discharging station again. The first lifting support part 3, the second lifting support part 4, the third lifting support part 5 and the fourth lifting support part 6 are synchronously lowered, and the stretcher frame 200 is sucked from the suction cup 100, so that the automatic discharging of the stretcher frame 200 is completed.

[0051] It can be seen that the feeding and discharging mechanism provided by the embodiment of the present application realizes the support and positioning of the stretcher 200, so that the stretcher 200 and the workpiece carried on the carrier film are kept in a suspended state above the feeding and discharging station. When the suction cup 100 is translated to the feeding and discharging station, the feeding and discharging mechanism can drive the stretcher 200 to descend, so that the stretcher 200 is accurately adsorbed on the magnetic adsorption area of the suction cup 100, and the workpiece is accurately adsorbed on the vacuum adsorption area of the suction cup 100.

[0052] In addition, when the suction cup 100 drives the stretcher 200 and the workpiece on which the scribing is completed to be translated back to the feeding and discharging station, the feeding and discharging mechanism sucks the stretcher 200 from the suction cup 100, thereby completing the automatic feeding and discharging of the stretcher 200 and the workpiece on which the scribing is completed.

[0053] The feeding and discharging mechanism provided by the embodiment of the present application improves the feeding and discharging efficiency of the workpiece, and ultimately improves the scribing efficiency.

[0054] Optionally, in order to be able to adjust the distance between the first lifting support part 3 and the second lifting support part 4, the first lifting support part 3 and the second lifting support part 4 are both adjustably installed on the first mounting seat 1 along the second direction. For example, the first mounting seat 1 is provided with a first slot and a second slot extending along the second direction, wherein the first lifting support part 3 is adjustably installed on the first mounting seat 1 through a first bolt inserted in the first slot, and when the first lifting support part 3 is slid to the position along the second direction, the first lifting support part 3 can be fixed on the first mounting seat 1 through the first bolt. The second lifting support part 4 is adjustably installed on the first mounting seat 1 through a second bolt inserted in the second slot, and when the second lifting support part 4 is slid to the position along the second direction, the second lifting support part 4 can be fixed on the first mounting seat 1 through the second bolt.

[0055] Similarly, in order to adjust the distance between the third lifting support part 5 and the fourth lifting support part 6, the third lifting support part 5 and the fourth lifting support part 6 are adjustably installed on the second mounting seat 2 along the second direction. For example, the second mounting seat 2 is provided with a third slot and a fourth slot extending along the second direction, wherein the third lifting support part 5 is adjustably installed on the second mounting seat 2 through a third bolt inserted in the third slot, and when the third lifting support part 5 is slid to the position along the second direction, the third lifting support part 5 can be fixed on the second mounting seat 2 through the third bolt. The fourth lifting support part 6 is adjustably installed on the second mounting seat 2 through a fourth bolt inserted in the fourth slot, and when the fourth lifting support part 6 is slid to the position along the second direction, the fourth lifting support part 6 can be fixed on the second mounting seat 2 through the fourth bolt.

[0056] Optionally, the first lifting support part 3 comprises a first lifting driving member 31 and a first bearing plate 32 connected to the driving end of the first lifting driving member 31, the first bearing plate 32 is used to support and adsorb the first corner of the first side of the stretcher 200. The second lifting support part 4 comprises a second lifting driving member 41 and a second bearing plate 42 connected to the driving end of the second lifting driving member 41, the second bearing plate 42 is used to support and adsorb the second corner of the other end of the first side of the stretcher 200. The third lifting support part 5 comprises a third lifting driving member 51 and a third bearing plate 52 connected to the driving end of the third lifting driving member 51, the third bearing plate 52 is used to support and adsorb the first corner of the one end of the second side of the stretcher 200. The fourth lifting support part 6 comprises a fourth lifting driving member 61 and a fourth bearing plate 62 connected to the driving end of the fourth lifting driving member 61, the fourth bearing plate 62 is used to support and adsorb the second corner of the other end of the second side of the stretcher 200.

[0057] In this way, after adjusting the distance between the first mounting seat 1 and the second mounting seat 2, the distance between the first lifting support part 3 and the second lifting support part 4, and the distance between the third lifting support part 5 and the fourth lifting support part 6, the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 can cooperate to support the four corners of the stretcher 200, thereby ensuring the stability of the support of the stretcher 200. In addition, the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 can cooperate to suck the four corners of the stretcher 200 from the suction cup 100, thereby ensuring that the stretcher 200 can be smoothly unloaded from the suction cup 100.

[0058] Optionally, the first lifting driving member 31, the second lifting driving member 41, the third lifting driving member 51 and the fourth lifting driving member 61 are configured to synchronously drive the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 to lift, thereby ensuring that the stretcher 200 can be stably placed on the suction cup 100 in a horizontal state and adsorbed by the suction cup 100. In addition, the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 are ensured to be lowered synchronously to implement synchronous suction and unloading of the stretcher 200 on the suction cup 100.

[0059] Optionally, the first lifting driving member 31, the second lifting driving member 41, the third lifting driving member 51 and the fourth lifting driving member 61 are configured to be connected with the same PLC controller, and the PLC controller controls the first lifting driving member 31, the second lifting driving member 41, the third lifting driving member 51 and the fourth lifting driving member 61 to be driven synchronously, thereby ensuring the synchronization of the lifting of the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62.

[0060] AsFigure 5 As shown, optionally, the first bearing plate 32 has a first limiting slot 33, and a first position-adjustable positioning member 34 is arranged in the first limiting slot 33. The first limiting slot 33 is used to support the first corner of the stretcher 200, and the first positioning member 34 is used to abut against the first corner of the stretcher 200. The second bearing plate 42 has a second limiting slot 43, and a second position-adjustable positioning member 44 is arranged in the second limiting slot 43. The second limiting slot 43 is used to support the second corner of the stretcher 200, and the second positioning member 44 is used to abut against the second corner of the stretcher 200. The third bearing plate 52 has a third limiting slot 53, which is used to support the third corner of the stretcher 200. The third corner of the stretcher 200 abuts against the inner wall of the third limiting slot 53. The fourth bearing plate 62 has a fourth limiting slot 63, which is used to support the fourth corner of the stretcher 200. The fourth corner of the stretcher 200 abuts against the inner wall of the fourth limiting slot 63.

[0061] After the four corners of the stretcher 200 are respectively placed into the first limiting slot 33, the second limiting slot 43, the third limiting slot 53, and the fourth limiting slot 63, the stretcher 200 is pushed first to ensure that the third corner of the stretcher 200 abuts against the inner wall of the third limiting slot 53, and the fourth corner of the stretcher 200 abuts against the inner wall of the fourth limiting slot 63. Then, the first positioning member 34 and the second positioning member 44 respectively abut against and fix the first corner and the second corner of the stretcher 200. In this way, the fixing and positioning of the stretcher 200 can be ensured, the position deviation of the stretcher 200 can be prevented, and finally the stretcher 200 can be accurately adsorbed to the magnetic adsorption area of the suction plate 100, and the workpiece can be accurately adsorbed to the vacuum adsorption area of the suction plate 100.

[0062] Optionally, the first positioning member 34 includes a first waist hole arranged in the first limiting slot 33, and a first positioning pin installed in the first waist hole and capable of sliding along the first waist hole. When the first positioning pin is slid into position, it abuts against the first corner of the stretcher 200. Similarly, the second positioning member 44 includes a second waist hole arranged in the second limiting slot 43, and a second positioning pin installed in the second waist hole and capable of sliding along the second waist hole. When the second positioning pin is slid into position, it abuts against the second corner of the stretcher 200.

[0063] As shown in the drawings, Figure 5 Optionally, the inner side edges of the first bearing plate 32, the second bearing plate 42, the third bearing plate 52, and the fourth bearing plate 62 are all formed with avoiding notches 35 for avoiding the suction plate 100.

[0064] As shown in the drawings, Figure 4 Optionally, the bottoms of the first bearing plate 32, the second bearing plate 42, the third bearing plate 52, and the fourth bearing plate 62 are all provided with magnets 36 for adsorbing the stretcher 200.

[0065] When the chuck 100 carries the stretcher 20 and the workpiece after scribing is translated back to the loading and unloading station, the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 are synchronously lowered under the driving of the corresponding lifting driving members, and the first bearing plate 32, the second bearing plate 42, the third bearing plate 52 and the fourth bearing plate 62 respectively suck the stretcher 200 from the chuck 100 through the magnets 36 thereon, so as to complete the automatic unloading of the stretcher 200.

[0066] Based on the same inventive concept, the embodiment of the present application also provides a scribing device, which comprises the loading and unloading mechanism, the chuck and the scribing mechanism provided by any of the above embodiments, wherein: the loading and unloading mechanism is configured to support the stretcher, the stretcher is tightly stretched with a bearing film, and the bearing film carries the workpiece. The chuck is configured to be translated to below the stretcher, and the loading and unloading mechanism is configured to drive the stretcher to descend, so that the stretcher is adsorbed by the magnetic adsorption area of the chuck, and the workpiece is adsorbed by the vacuum adsorption area of the chuck. The chuck is further configured to be translated to below the scribing mechanism, the scribing mechanism is configured to scribe the workpiece, and the chuck is further configured to be translated back to below the stretcher, and the loading and unloading mechanism is further configured to suck the stretcher from the chuck.

[0067] It can be seen that through the cooperation of the loading and unloading mechanism, the chuck and the scribing mechanism, the scribing device in the embodiment of the present application realizes the automatic scribing of the workpiece and improves the loading and unloading efficiency of the workpiece.

[0068] Optionally, the scribing device in the embodiment of the present application further comprises a translation module, the chuck is connected to a moving part of the translation module, and the translation module is used to drive the chuck to translate and switch between the loading and unloading mechanism and the scribing mechanism. The translation module can adopt various linear driving mechanisms capable of driving the chuck to translate, such as a lead screw module, a synchronous belt driving module, etc.

[0069] The above has described the present application in sufficient detail with certain particularity. It should be understood by those skilled in the art that the description in the embodiments is only exemplary, and all changes made without departing from the true spirit and scope of the present application should belong to the protection scope of the present application. The scope of protection claimed by the present application is defined by the claims, rather than the above description of the embodiments.

Claims

1. A loading and unloading mechanism, characterized in that, The feeding and discharging mechanism comprises: a first mounting seat and a second mounting seat arranged in a first direction, the length direction of the first mounting seat and the second mounting seat being parallel to a second direction, wherein the second direction is perpendicular to the first direction; a first lifting support and a second lifting support arranged in the second direction on the first mounting seat, the first lifting support and the second lifting support being used for cooperatively supporting or adsorbing a first side edge of a stretcher, the stretcher being tightly stretched with a load-bearing film, and the load-bearing film carrying workpieces; a third lifting support and a fourth lifting support arranged in the second direction on the second mounting seat, the third lifting support and the fourth lifting support being used for cooperatively supporting or adsorbing a second side edge of the stretcher, the second side edge being opposite to the first side edge; the first lifting support, the second lifting support, the third lifting support and the fourth lifting support are further configured to be synchronously lifted; the first lifting support comprises a first lifting driver and a first bearing plate connected to the driving end of the first lifting driver, the first bearing plate being used for supporting and adsorbing a first corner of one end of the first side edge of the stretcher; the second lifting support comprises a second lifting driver and a second bearing plate connected to the driving end of the second lifting driver, the second bearing plate being used for supporting and adsorbing a second corner of the other end of the first side edge of the stretcher; the third lifting support comprises a third lifting driver and a third bearing plate connected to the driving end of the third lifting driver, the third bearing plate being used for supporting and adsorbing a first corner of one end of the second side edge of the stretcher; the fourth lifting support comprises a fourth lifting driver and a fourth bearing plate connected to the driving end of the fourth lifting driver, the fourth bearing plate being used for supporting and adsorbing a second corner of the other end of the second side edge of the stretcher; the first lifting driver, the second lifting driver, the third lifting driver and the fourth lifting driver are configured to synchronously drive the first bearing plate, the second bearing plate, the third bearing plate and the fourth bearing plate to lift; the first bearing plate has a first limiting groove, a first positioning member with adjustable position being arranged in the first limiting groove, the first limiting groove being used for supporting the first corner of the stretcher, and the first positioning member being used for abutting against the first corner of the stretcher; the second bearing plate has a second limiting groove, a second positioning member with adjustable position being arranged in the second limiting groove, the second limiting groove being used for supporting the second corner of the stretcher, and the second positioning member being used for abutting against the second corner of the stretcher; the third bearing plate has a third limiting groove, the third limiting groove being used for supporting a third corner of the stretcher, and the third corner of the stretcher abutting against the inner wall of the third limiting groove; the fourth bearing plate has a fourth limiting groove, the fourth limiting groove being used for supporting a fourth corner of the stretcher, and the fourth corner of the stretcher abutting against the inner wall of the fourth limiting groove; The first positioning member comprises a first waist hole arranged in the first limiting slot, and a first positioning pin arranged in the first waist hole and capable of sliding along the first waist hole, and the first positioning pin abuts against a first corner of the stretcher when sliding to a position; The second positioning member comprises a second waist hole arranged in the second limiting slot, and a second positioning pin arranged in the second waist hole and capable of sliding along the second waist hole, and the second positioning pin abuts against a second corner of the stretcher when sliding to a position.

2. The feeding and discharging mechanism according to claim 1, characterized in that: The first lifting support part and the second lifting support part are adjustably installed on the first mounting seat in the second direction; The third lifting support part and the fourth lifting support part are adjustably installed on the second mounting seat in the second direction.

3. The loading and unloading mechanism according to claim 1, characterized in that, The first lifting driving member, the second lifting driving member, the third lifting driving member and the fourth lifting driving member are configured to be connected with the same PLC controller, and the PLC controller controls the first lifting driving member, the second lifting driving member, the third lifting driving member and the fourth lifting driving member to be synchronously driven.

4. The loading and unloading mechanism according to claim 1, characterized in that: The first bearing plate, the second bearing plate, the third bearing plate and the fourth bearing plate are each formed with a avoiding gap at an inner side edge for avoiding the suction cup.

5. The loading and unloading mechanism according to claim 1, characterized in that: The first bearing plate, the second bearing plate, the third bearing plate and the fourth bearing plate are each provided with a magnet at a bottom for adsorbing the stretcher.

6. A scribing apparatus characterized by comprising: The wafer slicing device comprises the feeding and discharging mechanism, the suction cup and the wafer slicing mechanism according to any one of claims 1 to 5, wherein: The feeding and discharging mechanism is configured to support a stretcher, the stretcher is tightly arranged with a bearing film, and the bearing film is arranged with a workpiece; The suction cup is configured to be translated to below the stretcher, the feeding and discharging mechanism is configured to drive the stretcher to be lowered, so that the stretcher is adsorbed by a magnetic adsorption area of the suction cup, and the workpiece is adsorbed by a vacuum adsorption area of the suction cup; The suction cup is further configured to be translated to below the wafer slicing mechanism, the wafer slicing mechanism is configured to slice the workpiece, and the suction cup is further configured to be translated back to below the stretcher, and the feeding and discharging mechanism is further configured to suck the stretcher from the suction cup.

7. The dicing apparatus of claim 6, wherein The wafer slicing device further comprises a translation module, the suction cup is connected to a movable part of the translation module, and the translation module is used to drive the suction cup to be translated and switched between the feeding and discharging mechanism and the wafer slicing mechanism.

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