Excimer laser light path adjusting structure capable of improving laser pointing stability
By designing an excimer laser optical path adjustment structure including adjustment frame, optical lens and tie rod, the problems of air pressure changes caused by heat in the laser cavity and laser pointing instability are solved, and the stability of laser pointing and industrial processing quality are achieved.
Patent Information
- Application Number
- CN202411969480.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-30
- Publication Date
- 2025-02-28
AI Technical Summary
In fine and precise processing, existing excimer lasers have increased the gas temperature in the laser cavity due to the heat generated by the discharge electrode and the circulating fan. The air pressure changes make the laser pointing unstable, affecting the processing quality.
An excimer laser optical path adjustment structure is designed, including a laser cavity, a discharge electrode, a circulating fan and a lens assembly. The lens assembly consists of an adjustment frame, optical lens, tie rod and lock nut. Through the cooperation of the tie rod and lock nut, the adjustment frame can be adjusted smoothly to the appropriate position, and ensures the position stability through bidirectional clamping to avoid the influence of air pressure.
Through this structure, the stability of laser pointing is improved, the quality of industrial processing is stable, and the occurrence of defective products during processing is reduced.
Smart Images
Figure CN119542886A_ABST
Abstract
Description
[Technical field]
[0001] The invention relates to an excimer laser optical path adjustment structure capable of improving laser pointing stability. [Background technology]
[0002] Excimer laser is a type of gas laser device that uses excimer as the working material. The laser cavity is filled with 2 bar to 5 bar of working gas, and the discharge electrode is used to achieve excitation to emit excimer laser. At present, excimer lasers are widely used in fine and precise processing in industrial production, such as fiber grating engraving. For such processing, the pointing stability of the laser emitted by the excimer laser is very important. Unstable laser pointing may cause unstable or failed fiber grating engraving. When the current excimer laser is working, the discharge of the discharge electrode and the rotation of the circulating fan will continuously generate heat. Part of the generated heat is taken away by the heat dissipation structure, but some heat still accumulates in the laser cavity. This part of heat causes the working gas temperature in the laser cavity to rise. The temperature increase causes the working gas pressure to rise, causing the adjustment frame position of the laser outlet position on the laser cavity to be affected by the gas pressure. The optical lens installed on the adjustment frame will have a slight offset, which will cause the laser pointing to change, and ultimately lead to unstable processing quality or defective products. Therefore, there is still room for improvement in the current excimer laser in fine and precise processing.
[0003] Therefore, the present invention is just produced based on the above shortcomings. [Summary of the invention]
[0004] The purpose of the present invention is to overcome the shortcomings of the prior art and provide an excimer laser optical path adjustment structure that can improve the laser pointing stability, thereby ensuring the stability of fine and precise machining.
[0005] The present invention is achieved through the following technical solutions:
[0006] A quasi-molecular laser optical path adjustment structure capable of improving laser pointing stability comprises a laser cavity, wherein a discharge electrode and a circulating fan are arranged in the laser cavity, a laser emission outlet is opened on the laser cavity, and a lens assembly is arranged at the laser emission outlet position, characterized in that: the lens assembly comprises an adjustment frame connected to the laser cavity, the adjustment frame has a laser emission hole, an optical lens is arranged on the adjustment frame and at the laser emission hole position, the laser cavity is provided with a first pull rod, a second pull rod and a third pull rod spaced from each other, the adjustment frame is provided with a first connecting hole, a second connecting hole and a third connecting hole sleeved on the first pull rod, the second pull rod and the third pull rod, The first pull rod is provided with an abutting portion abutting against one side of the adjustment frame, the other side of the adjustment frame is provided with a first locking nut connected to the first pull rod, the second pull rod is provided with a first anti-loosening nut that can move relative to the second pull rod and is located between the adjustment frame and the laser cavity, the second pull rod is also provided with a second locking nut that is threadedly connected to the second pull rod and can clamp and lock the adjustment frame with the first anti-loosening nut, the third pull rod is provided with a second anti-loosening nut that can move relative to the third pull rod and is located between the adjustment frame and the laser cavity, the third pull rod is also provided with a third locking nut that is threadedly connected to the third pull rod and can clamp and lock the adjustment frame with the second anti-loosening nut, and a compression spring that can push the adjustment frame outward is provided between the adjustment frame and the laser cavity.
[0007] A bellows is also provided between the adjustment frame and the laser cavity. The bellows includes a left connecting seat and a right connecting seat. A tube body is provided between the left connecting seat and the right connecting seat. The left connecting seat is abutted against the laser cavity, and the right connecting seat is abutted against the adjustment frame.
[0008] A first sealing ring is arranged between the left connecting seat and the laser cavity, and a second sealing ring is arranged between the right connecting seat and the adjusting frame.
[0009] The adjustment frame is provided with a step, one side of the optical lens rests on the step, and the other side of the optical lens is provided with a lens pressing plate for pressing the optical lens onto the adjustment frame.
[0010] A third sealing ring is provided between the optical lens and the step surface.
[0011] A buffer gasket is provided between the optical lens and the lens pressing plate.
[0012] The optical lens is a resonant lens.
[0013] The contact surfaces of the first locking nut, the second locking nut and the third locking nut with the adjustment frame are spherical or conical, and the contact surface of the abutting portion with the adjustment frame is spherical or conical.
[0014] The contact between the first anti-loosening nut and the adjustment frame is a spherical contact with a plane; the contact between the second anti-loosening nut and the adjustment frame is a spherical contact with a plane.
[0015] Compared with the prior art, the present invention has the following advantages: the laser cavity of the present invention is provided with a first pull rod, a second pull rod and a third pull rod, the adjustment frame is sleeved on the first pull rod, the second pull rod and the third pull rod, the abutting portion of the first pull rod directly abuts against the adjustment frame, the compression spring is arranged between the adjustment frame and the laser cavity, the adjustment frame and the first pull rod can be locked by the first locking nut cooperating with the first pull rod, and then the deflection position of the adjustment frame can be adjusted by the second locking nut cooperating with the second pull rod and the third locking nut cooperating with the third pull rod, during the adjustment process, the adjustment frame applies pressure to the compression spring, and the compression spring applies pressure outward to the adjustment frame. The reverse thrust makes the other side of the adjustment frame have a reaction force opposite thereto when the second locking nut and the third locking nut push the adjustment frame, so that the adjustment frame can be smoothly adjusted to a suitable position. When the adjustment frame is adjusted to a suitable position, the first anti-loosening nut and the second anti-loosening nut are finally screwed, so that the first anti-loosening nut and the second locking nut clamp the adjustment frame, and the second anti-loosening nut and the third locking nut also clamp the adjustment frame. The adjustment frame is clamped in both directions, ensuring that the position of the adjustment frame will not be affected by the air pressure in the laser cavity, thereby improving the laser pointing stability of the traditional excimer laser and ensuring the stable quality of industrial processing.
Brief Description of the Drawings
[0016] Figure 1 is a cross-sectional view of the present invention;
[0017] Figure 2 yes Figure 1 Enlarged view at center C;
[0018] Figure 3 is a side view of the present invention;
[0019] Figure 4 is along Figure 3 Sectional view along line AA;
[0020] Figure 5 is along Figure 3 Sectional view along line BB. [Specific implementation method]
[0021] The present invention will be further described below in conjunction with the accompanying drawings:
[0022] like Figures 1 to 5As shown, an excimer laser optical path adjustment structure capable of improving laser pointing stability comprises a laser cavity 1, wherein a discharge electrode 2 and a circulating fan are arranged in the laser cavity 1, a laser emission port 3 is provided on the laser cavity 1, and a lens assembly 4 is arranged at the position of the laser emission port 3. After the laser cavity 1 is filled with working gas, the discharge electrode discharges to excite the working gas, and when the unstable molecular bonds of the excited excimer molecules are broken and dissociated into ground state atoms, the energy of the excited state is released in the form of laser radiation, so that the laser is emitted from the laser emission port 3 and then emitted through the lens assembly 4. The emitted excimer laser can be used in industrial production after subsequent shaping and focusing, such as fiber grating writing, etc.
[0023] like Figures 1 to 5 As shown, the lens assembly 4 includes an adjustment frame 41 connected to the laser cavity 1, the adjustment frame 41 has a laser emission hole 42, and an optical lens 43 is provided on the adjustment frame 41 and located at the laser emission hole 41. In this embodiment, the optical lens 43 is a resonant lens. A step 44 is provided on the adjustment frame 41, one side of the optical lens 43 abuts against the step 44, and the other side of the optical lens 43 is provided with a lens pressing plate 45 for pressing it on the adjustment frame 41, and the lens pressing plate 45 can be fixedly connected to the adjustment frame 41 by bolts. A third sealing ring 46 is provided between the optical lens 43 and the surface of the step 44, and a buffer gasket 47 is provided between the optical lens 43 and the lens pressing plate 45, which can protect the optical lens 43.
[0024] like Figures 1 to 5As shown, the laser cavity 1 is provided with a first tie rod 51, a second tie rod 52 and a third tie rod 53 spaced from each other, the adjustment frame 41 is provided with a first connection hole 61, a second connection hole 62 and a third connection hole 63 sleeved on the first tie rod 51, the second tie rod 52 and the third tie rod 53, the first tie rod 51 is provided with a supporting portion 511 that abuts against one side of the adjustment frame 51, the other side of the adjustment frame 41 is provided with a first locking nut 71 connected to the first tie rod 51, and the second tie rod 52 is provided between the adjustment frame 41 and the laser cavity 1. A first anti-loosening nut 81 that can move relative to it, the second pull rod 52 is also provided with a second locking nut 72 that is threadedly connected to it and can clamp and lock the adjustment frame 41 with the first anti-loosening nut 81, the third pull rod 53 is provided with a second anti-loosening nut 82 that can move relative to it and is located between the adjustment frame 41 and the laser cavity 1, the third pull rod 53 is also provided with a third locking nut 73 that is threadedly connected to it and can clamp and lock the adjustment frame 41 with the second anti-loosening nut 82, and a compression spring 9 that can push the adjustment frame 41 outward is provided between the adjustment frame 41 and the laser cavity 1. When the adjustment frame 41 is installed, the first connecting hole 61, the second connecting hole 62 and the third connecting hole 63 are respectively sleeved on the first pull rod 51, the second pull rod 52 and the third pull rod 53, and the compression spring 9 is pressed between the adjustment frame 41 and the laser cavity 1. The abutting portion 511 on the first pull rod 51 directly abuts against the adjustment frame 41 and locks the first locking nut 71. The abutting position between the abutting portion 511 and the adjustment frame 41 is the fulcrum for adjusting the deflection position of the adjustment frame 41. The second locking nut 72 and the third locking nut 73 are rotated to push the adjustment frame 41 to move. The adjustment frame 41 also moves at its abutting position with the abutting portion 511. At this time, the compression spring 9 is compressed. When the second locking nut 72 and the third locking nut 73 push the adjustment frame 41, the compression spring 9 is adjusted. The entire frame 41 applies thrust in opposite directions so that the adjustment frame 41 can be smoothly moved to the desired appropriate position. When the adjustment frame 41 is in the appropriate position, the first anti-loosening nut 81 and the second anti-loosening nut 82 are screwed in the opposite direction, and the first anti-loosening nut 81 and the second locking nut 72 clamp the adjustment frame 41. At the same time, the second anti-loosening nut 82 and the third locking nut 73 also clamp the adjustment frame 41. Combined with the adjustment frame 41 being clamped by the abutment portion 511 and the first locking nut 71, the adjustment frame 41 is clamped in both directions to keep the position fixed, ensuring that the position of the adjustment frame 41 will not be affected by the air pressure in the laser cavity 1, thereby ensuring that the resonant lens does not have a slight offset, thereby improving the laser pointing stability of the traditional excimer laser and ensuring the stable quality of industrial processing.
[0025] like Figure 1 and Figure 2As shown, a bellows 10 is further provided between the adjustment frame 41 and the laser cavity 1, and the bellows 10 includes a left connection seat 101 and a right connection seat 102, a tube body 103 is provided between the left connection seat 101 and the right connection seat 102, the left connection seat 101 is abutted against the laser cavity 1, and the right connection seat 102 is abutted against the adjustment frame 41. The bellows 10 has a certain flexibility, and the bellows 10 is provided to facilitate the adjustment of structural parts on the laser optical path.
[0026] like Figure 1 and Figure 2 As shown, a first sealing ring 104 is provided between the left connecting seat 101 and the laser cavity 1, and a second sealing ring 105 is provided between the right connecting seat 102 and the adjustment frame 41 to ensure good air tightness.
[0027] like Figure 4 and Figure 5 As shown, the contact surfaces of the first locking nut 71, the second locking nut 72 and the third locking nut 73 with the adjustment frame 41 are spherical or conical, and the contact surface of the abutment portion 511 with the adjustment frame 41 is spherical or conical, so that the position of the adjustment frame 41 can be easily adjusted when being adjusted.
[0028] like Figure 4 and Figure 5 As shown, the contact between the first locknut 81 and the adjustment frame 41 is a spherical contact with a flat surface; the contact between the second locknut 82 and the adjustment frame 41 is a spherical contact with a flat surface, ensuring that the contact surface between the first locknut 81 and the second locknut 82 and the adjustment frame 41 is as small as possible, thereby ensuring that the first locknut 81 and the second locknut 82 do not affect the change of the adjusted optical path position. Of course, the contact between the first locknut 81 and the second locknut 82 and the adjustment frame 41 can also adopt the contact cooperation between a small plane and a large plane.
[0029] The present embodiment is described in detail above in conjunction with the accompanying drawings, but the invention is not limited to the above embodiment, and various changes can be made within the knowledge scope of ordinary technicians in the technical field without departing from the present purpose.
Claims
1. An excimer laser optical path adjustment structure capable of improving laser pointing stability, comprising a laser cavity (1), wherein a discharge electrode (2) and a circulation fan are arranged in the laser cavity (1), a laser emission port (3) is opened on the laser cavity (1), and a lens assembly (4) is arranged at the position of the laser emission port (3), characterized in that: The lens assembly (4) comprises an adjustment frame (41) connected to the laser cavity (1), the adjustment frame (41) having a laser emission hole (42), an optical lens (43) being arranged on the adjustment frame (41) and located at the position of the laser emission hole (41), the laser cavity (1) being provided with a first tie rod (51), a second tie rod (52) and a third tie rod (53) spaced apart from each other, the adjustment frame (41) being provided with a first connecting hole (61), a second connecting hole (62) and a third connecting hole (63) sleeved on the first tie rod (51), the second tie rod (52) and the third tie rod (53), the first tie rod (51) being provided with a supporting portion (511) abutting against one side of the adjustment frame (51), and the other side of the adjustment frame (41) being provided with a connecting portion (511) connected to the first tie rod (51) The first locking nut (71) is provided on the second pull rod (52) and is located between the adjustment frame (41) and the laser cavity (1). A first anti-loosening nut (81) capable of moving relative to the second pull rod (52) is provided. The second pull rod (52) is also provided with a second locking nut (72) threadedly connected to the second pull rod and capable of clamping and locking the adjustment frame (41) with the first anti-loosening nut (81). The third pull rod (53) is also provided with a second anti-loosening nut (82) capable of moving relative to the third pull rod and is located between the adjustment frame (41) and the laser cavity (1). The third pull rod (53) is also provided with a third locking nut (73) threadedly connected to the third pull rod and capable of clamping and locking the adjustment frame (41) with the second anti-loosening nut (82). A compression spring (9) capable of pushing the adjustment frame (41) outward is provided between the adjustment frame (41) and the laser cavity (1).
2. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 1, characterized in that: A bellows (10) is further provided between the adjustment frame (41) and the laser cavity (1), the bellows (10) comprising a left connecting seat (101) and a right connecting seat (102), a tube body (103) is provided between the left connecting seat (101) and the right connecting seat (102), the left connecting seat (101) is abutted against the laser cavity (1), and the right connecting seat (102) is abutted against the adjustment frame (41).
3. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 2, characterized in that: A first sealing ring (104) is provided between the left connecting seat (101) and the laser cavity (1), and a second sealing ring (105) is provided between the right connecting seat (102) and the adjustment frame (41).
4. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 1, characterized in that: The adjustment frame (41) is provided with a step (44), one side of the optical lens (43) is against the step (44), and the other side of the optical lens (43) is provided with a lens pressing plate (45) for pressing the optical lens (43) onto the adjustment frame (41).
5. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 4, characterized in that: A third sealing ring (46) is provided between the optical lens (43) and the surface of the step (44).
6. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 4, characterized in that: A buffer gasket (47) is provided between the optical lens (43) and the lens pressing plate (45).
7. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 1, characterized in that: The optical lens (43) is a resonant lens.
8. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 1, characterized in that: The contact surfaces of the first locking nut (71), the second locking nut (72) and the third locking nut (73) with the adjustment frame (41) are spherical or conical, and the contact surface of the abutting portion (511) with the adjustment frame (41) is spherical or conical.
9. The excimer laser optical path adjustment structure capable of improving laser pointing stability according to claim 1, characterized in that: The contact between the first anti-loosening nut (81) and the adjustment frame (41) is a spherical contact with a flat surface; and the contact between the second anti-loosening nut (82) and the adjustment frame (41) is a spherical contact with a flat surface.