Remote computer access locking system and method for substrate processing system

Abstract

Substrate processing systems and methods include selectively activatable remote computer access with lock and / or listing control and / or features. The substrate processing system may include: (a) a first network switch including an input port and an output port; (b) a second network switch comprising an input / output port directly or indirectly connected to the first switch output port; (c) a lockable key switch disposed in the power supply line and movable between open and closed positions; and (d) a key for moving the key switch between ON and OFF. When turned on, circuitry for powering the first network switch and / or the second network switch is turned on, enabling remote computer control of the substrate processing system. When disconnected, circuitry for powering the first network switch and / or the second network switch is interrupted, thereby disabling remote computer control. The key can be removed only when in the open position.

Description

Technical Field

[0001] The present disclosure generally relates to systems and methods for controlling remote access to substrate processing systems. Some more specific aspects of the present technology relate to substrate processing systems and methods in which an incoming remote computer signal can be enabled and disabled. Some aspects of the present technology relate to substrate processing systems and methods in which a lockout and / or tagout (e.g., "LOTO") control and / or feature can be used to enable and disable an incoming remote computer signal. Background Art

[0002] During the manufacture of semiconductor devices, such as integrated circuits and electronic devices, material layers are typically deposited onto a substrate. Material layer deposition is typically accomplished by supporting the substrate within a substrate processing chamber apparatus, heating the substrate to a desired deposition temperature, and flowing one or more material layer precursors through the chamber apparatus and across the substrate. As the precursors flow through the substrate, the material layer is gradually formed onto the substrate surface, typically based on the temperature of the substrate and the environmental conditions within the chamber apparatus.

[0003] Existing substrate processing systems include "cluster-type" systems in which a single substrate handling chamber is operably connected to two to four substrate processing chambers via gate valves. Each substrate processing chamber is equipped to receive a substrate on a substrate support that holds the substrate during processing (e.g., during deposition of a material layer as described above). The substrate handling chamber includes a robotic arm that is used to move substrates into and out of the various substrate processing chambers via gate valves.

[0004] This type of substrate processing system typically has remote access and remote operation capabilities, allowing the system to be at least partially controlled by a party away from the location of the substrate processing system. However, this remote access and operation capability can increase potential safety hazards. For example, sometimes, one or more of the substrate handling chamber, substrate processing chamber, and / or other equipment may not be powered off during maintenance or repair, such as when other components are being maintained or repaired. At this point, a technician may need to access one or more of the interior chambers of the substrate handling chamber, substrate processing chamber, and / or other equipment to complete the necessary work. When repairs or maintenance are in progress, for example, remote activation of certain parts of the substrate processing system by a remotely located party may risk harming anyone involved in the repairs or maintenance.

[0005] Sometimes, a maintenance technician may need to calibrate sensors, such as sensors associated with one or more robotic arms (e.g., automatic wafer centering (or "AWC") sensors included in robots used in substrate handling chambers). If a remote operator activates the robotic arm before calibration is complete and data is saved, the unsaved data will be lost. This results in the need to restart calibration (at least from the last saved point), which increases costs and wastes the maintenance technician's time.

[0006] To avoid these types of problems, during repair or maintenance, a technician can prevent undesired remote activation of a substrate processing system, such as by physically disconnecting the Ethernet connection of a remote computer from an input port of a processing computer of the substrate processing system. Although this arrangement is generally acceptable and effective for the intended purpose of preventing a remote user from undesirably starting a substrate processing system via an Ethernet connection, this arrangement has some disadvantages. For example, when finished, a technician may forget to reconnect the Ethernet cable and / or reconnect the cable to an incorrect port, such as resulting in a longer system "downtime" than expected and / or necessary. Additionally or alternatively, a "passerby" may notice an unplugged cable and plug it back in while repair or maintenance continues. Therefore, there is room for improvement in remotely controlling and accessing such substrate processing systems. Summary of the invention

[0007] Various aspects of the present technology relate to systems and methods for controlling remote access to substrate processing systems. Some more specific aspects of the present technology relate to substrate processing systems and methods, wherein incoming remote computer control signals can be enabled and disabled. Additionally or alternatively, some aspects of the present technology relate to substrate processing systems and methods, wherein locking and / or tagout controls and / or features can be used to enable and disable incoming remote computer control signals (for controlling any portion of the substrate processing system). The locking controls and / or features may include a locking system that can be moved between an "enabled" or "on" position and a "disabled" or "off" position to allow: (a) control of power to one or more components within a remote data transmission system or method, and / or (b) control of one or more data transmission lines or systems within a remote data transmission system or method.

[0008] Substrate processing systems according to at least some examples of the present technology include one or more of the following: (a) a first switch including a first input port, a first power input, and a first output port; (b) a second switch including a first input / output port and a second power input; (c) a first electrical connector electrically connecting the first power input and the second power input; (d) a lockable key switch disposed in the first electrical connector, the lockable key switch being movable between an off position and an on position; (e) a power source connected to the first electrical connector; and / or (f) a key configured to be received by the lockable key switch and configured to move the lockable key switch between an on position and an off position when received by the lockable key switch. In the on position, the power source supplies power to the first switch and the second switch. In the off position, at least the first switch is not supplied with power.

[0009] In addition to or as an alternative to one or more of the features described above, in at least some examples of the present technology, a key may be removed from a lockable key switch only when the lockable key switch is in the off position.

[0010] In addition to or instead of one or more of the features described above, in at least some examples of the present technology, the first input port will be configured to receive substrate processing commands from a remote computing system, and / or the first output port will be connected (directly or indirectly) to a first input / output port of a second switch to transmit substrate processing commands from the remote computing system through the first switch and to the second switch only when the lockable key switch is in the on position.

[0011] In addition to one or more of the features described above, or as an alternative, a substrate processing system according to some examples of the present technology may also include one or more substrate processing chambers in electronic communication with a second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on a substrate processing command received from a remote computing system only when the lockable key switch is in an on position.

[0012] In addition to or instead of one or more of the features described above, a substrate processing system according to some examples of the present technology may further include a substrate processing system host, wherein the first input port is configured to receive a substrate processing command from a remote computing system, wherein the first output port is connected to the substrate processing system host and transmits the substrate processing command from the remote computing system through the first switch and is transmitted to the substrate processing system host only when the lockable key switch is in the on position, and wherein the substrate processing system host transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

[0013] In addition to one or more of the features described above, or as an alternative, a substrate processing system according to some examples of the present technology may also include one or more substrate processing chambers in electronic communication with a second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on a substrate processing command received from a remote computing system only when the lockable key switch is in an on position.

[0014] In addition to or as an alternative to one or more of the features described above, in at least some examples of the present technology, the first input port includes an Ethernet port.

[0015] In addition to or in lieu of one or more of the features described above, in at least some examples of the present technology, the power source is a DC power source.

[0016] A substrate processing system according to at least some examples of the present technology includes one or more of the following: (a) a first switch including a first input port, a first power input, and a first output port; (b) a second switch including a first input / output port and a second power input, wherein the first output port is directly or indirectly connected to the first input / output port of the second switch; (c) a lockable key switch movable between an off position and an on position, the lockable key switch being disposed in a power supply line connected to supply power to at least one of the first power input or the second power input; and / or (d) a key configured to be received by the lockable key switch. The key is configured to move the lockable key switch between an on position and an off position when received by the lockable key switch. In the on position, a circuit including a power supply line for supplying power to at least one of the first power input or the second power input is connected. In the off position, a circuit including a power supply line for supplying power to at least one of the first power input or the second power input is interrupted.

[0017] In addition to or as an alternative to one or more of the features described above, in at least some examples of the present technology, a key may be removed from a lockable key switch only when the lockable key switch is in the off position.

[0018] In addition to or instead of one or more of the features described above, in at least some examples of the present technology, the first input port will be configured to receive substrate processing commands from a remote computing system, and / or the first output port will be directly connected to a first input / output port of a second switch to transmit substrate processing commands from the remote computing system through the first switch and to the second switch only when the lockable key switch is in the on position.

[0019] In addition to one or more of the features described above, or as an alternative, a substrate processing system according to some examples of the present technology may also include one or more substrate processing chambers in electronic communication with a second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on a substrate processing command received from a remote computing system only when the lockable key switch is in an on position.

[0020] In addition to or instead of one or more of the features described above, a substrate processing system according to some examples of the present technology may further include a substrate processing system host, wherein the first input port is configured to receive a substrate processing command from a remote computing system, wherein the first output port is connected to an input of the substrate processing system host and the substrate processing command from the remote computing system is transmitted through the first switch and is transmitted to the substrate processing system host only when the lockable key switch is in the on position, and wherein the substrate processing system host transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

[0021] In addition to one or more of the features described above, or as an alternative, a substrate processing system according to some examples of the present technology may also include one or more substrate processing chambers in electronic communication with a second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on a substrate processing command received from a remote computing system only when the lockable key switch is in an on position.

[0022] According to at least some examples of the present technology, a method of connecting a substrate processing system to a remote computing system may include one or more of the following: (a) connecting the remote computing system to a first input port of a first switch, the first switch also including a first power input and a first output port; (b) directly or indirectly connecting the first output port of the first switch to a first input / output port of a second switch, the second switch also including a second power input; (c) electrically connecting the first power input and the second power input to an electrical connector including a lockable key switch, the lockable key switch being movable between an off position and an on position using a key; and / or (d) connecting a power source to the electrical connector. The lockable key switch is disposed in the electrical connector such that: (i) when the lockable key switch is in the on position, the power source supplies power to the first switch and the second switch, and (ii) when the lockable key switch is in the off position, the power source does not supply power to at least one of the first switch or the second switch.

[0023] In addition to or in lieu of one or more of the features described above, methods according to some examples of the present technology may further include disabling operation of the substrate processing system by using a key to turn a lockable key switch from an on position to an off position; and / or removing the key from the lockable key switch.

[0024] In addition to one or more of the features described above, or as an alternative, methods according to some examples of the present technology may also include enabling operation of the substrate processing system by engaging a key with the lockable key switch when the lockable key switch is in the off position; and / or using the key to turn the lockable key switch from the off position to the on position.

[0025] According to at least some examples of the present technology, a method of connecting a substrate processing system to a remote computing system may include one or more of the following: (a) connecting the remote computing system to a first input port of a first switch, the first switch also including a first power input and a first output port; (b) directly or indirectly connecting the first output port of the first switch to a first input / output port of a second switch, the second switch also including a second power input; (c) electrically connecting at least one of the first power input or the second power input to an electrical connector including a lockable key switch, the lockable key switch being movable between an off position and an on position using a key; and / or (d) connecting a power source to the electrical connector. The lockable key switch is disposed in the electrical connector such that: (i) when the lockable key switch is in the on position, the power source supplies power to at least one of the first switch or the second switch, and (ii) when the lockable key switch is in the off position, the power source does not supply power to at least one of the first switch or the second switch.

[0026] In addition to or in lieu of one or more of the features described above, methods according to some examples of the present technology may further include disabling operation of the substrate processing system by using a key to turn a lockable key switch from an on position to an off position; and / or removing the key from the lockable key switch.

[0027] In addition to one or more of the features described above, or as an alternative, methods according to some examples of the present technology may also include enabling operation of the substrate processing system by engaging a key with the lockable key switch when the lockable key switch is in the off position; and / or using the key to turn the lockable key switch from the off position to the on position.

[0028] The purpose of providing this disclosure is to introduce some concepts related to the present technology in a simplified form. These concepts will be further described in detail in the detailed description below. This disclosure is not intended to identify the key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] These and other features, aspects and advantages of the invention disclosed herein are described below with reference to the accompanying drawings of certain embodiments, which are intended to illustrate and not to limit the invention.

[0030] Figure 1 schematically illustrates a top view of a "cluster-type" substrate processing system according to some examples of the present technology;

[0031] Figure 2 schematically illustrates the connection of a substrate processing system with a remote computer system according to some examples of the present technology;

[0032] Figure 3 illustrates example features of a control panel with locking capabilities for enabling and disabling remote computer operations of substrate processing systems and methods according to some examples of the present technology;

[0033] Figure 4 schematically illustrates a top view of another "cluster-type" substrate processing system according to some examples of the present technology;

[0034] Figure 5 schematically illustrates another connection of a substrate processing system to a remote computer system according to some examples of the present technology; and

[0035] Figure 6 Method features and aspects of remote access in substrate processing systems and methods according to some examples of the present technology are shown.

[0036] It should be understood that the elements in the drawings are shown for simplicity and clarity and are not necessarily drawn to scale and / or all details. For example, the relative sizes of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the illustrated embodiments of the present disclosure. DETAILED DESCRIPTION

[0037] Reference will now be made to the drawings, wherein like reference numerals represent similar structural features or aspects of the subject disclosure.

[0038] The terms "input port" and "output port", when used herein to refer to ports for receiving and / or transmitting data, include within their scope data and / or communication ports for receiving input and transmitting output (e.g., "input / output ports"). Therefore, although the term "input port" may be used herein to describe a specific portion of a component, the hardware providing the "port" may actually be configured and capable of receiving input from one or more other components and transmitting output to one or more other components. Similarly, although the term "output port" may be used herein to describe a specific portion of a component, the hardware providing the "port" may actually be configured and capable of receiving input from one or more other components and transmitting output to one or more other components.

[0039] As mentioned above, during the fabrication of semiconductor devices, such as integrated circuits and electronic devices, layers of material are typically deposited onto a substrate. Figure 1A "cluster-type" substrate processing system 100 according to some examples of the present technology is shown. The example substrate processing system 100 includes a substrate handling chamber 102, which is operably connected to one to four substrate processing chambers 104 through gate valves 106. Each substrate processing chamber 104 includes one or more substrate supports and is equipped to receive a substrate on a substrate support 108 and hold the substrate during processing (e.g., during deposition of a material layer as described above, during an etching process, etc.). Figure 1 Each substrate processing chamber 104 is shown to include four substrate supports 108, onto which substrates may be placed during processing. More or fewer substrate supports 108 may be provided in each substrate processing chamber 104 (e.g., the substrate processing chamber 104 may be a dual chamber module (DCM) or a quad chamber module (QCM)). The substrate processing chamber 104 according to some examples of the present technology may include an additional four substrate supports 108, which are located Figure 1 1. The four substrate supports 108 are shown vertically below the top view of FIG. 1. Each substrate processing chamber 104 may have the same structure, or one or more substrate processing chambers 104 may have a different structure than the other substrate processing chambers 104.

[0040] The substrate handling chamber 102 includes a robot 110 for moving substrates into and out of various substrate processing chambers 104 through gate valves 106. In use, the gate valves 106 are opened, and the end effector 110A of the robot 110 extends through the open gate valves 106 to insert or remove a substrate into or from the interior chamber of the substrate processing chamber 104 (e.g., place a substrate on or remove a substrate from a substrate support 108 within the substrate processing chamber 104). Once the robot 110 is retracted from the substrate processing chamber 104, the gate valves 106 are closed, thereby sealing and isolating the substrate processing chamber 104 from the substrate handling chamber 102. Other desired actions (e.g., material layer deposition, etching, etc.) may then be performed in the substrate processing chamber 104 and / or the substrate handling chamber 102.

[0041] Figure 1The example substrate processing system 100 is further shown to include a load lock module 112. The load lock module 112 is connected to the substrate handling chamber 102 through one or more gate valves 116. The load lock module 112 includes a substrate holding component 114 for holding the substrate on its way into the substrate handling chamber 102 for further processing and on its way out of the substrate handling chamber 102 (after processing is completed). The end effector 110A of the robot 110 moves through the gate valve 116 (when open) to move the substrate from the load lock module 112 into the substrate handling chamber 102 (for layer deposition, etching and / or other processing), and from the substrate handling chamber 102 into the load lock module 112 (after processing is completed). The load lock module 112 and the gate valve 116 keep the substrate isolated from the environment of the substrate handling chamber 102 until the conditions (e.g., temperature, pressure, atmosphere content, etc.) within the substrate handling chamber 102 are ready for the insertion of the substrate, for example, while waiting for all gate valves 106 to close.

[0042] The load lock module 112 is further coupled to the equipment front end module 120 through one or more additional gate valves 118. The equipment front end module 120 includes a robot 122. The end effector 122A of the robot 122 moves through the gate valve 118 (when open) to move substrates from the equipment front end module 120 into the load lock module 112 (for layer deposition, etching, and / or other processing), and from the load lock module 112 into the equipment front end module 120 (after processing is completed). The robot 122 of the equipment front end module 120 also picks up a new substrate for processing from one of the load ports 124A-124D, and returns a processed substrate to one of the load ports 124A-124D, such as to be transported to another location for further processing or other actions.

[0043] Figure 1 Also shown is a general purpose processing computer 130 (also referred to herein as a "substrate processing system main computer"). The general purpose processing computer 130 may be used to control and coordinate the operation of the substrate handling chamber 102, substrate processing chamber 104, load lock module 112, equipment front end module 120, load ports 124A-124D, robotic arms 110, 122, gate valves 106, 116, 118, and any equipment contained within any of these components (e.g., "scheduling" various functions and operations). The general purpose processing computer 130 may also have data logging capabilities (e.g., performing equipment data acquisition ("EDA") functions). Although Figure 1 The general purpose processing computer 130 is shown housed within the equipment front end module 120, but it may be provided as part of any other component (e.g., the substrate handling chamber 102, one or more substrate processing chambers 104, the load lock module 112, etc.) and / or it may be provided as a separate stand-alone component or separate workstation. Figure 1 Also shown is a remote computer 140 connected to the general processing computer 130 via an input port 142, which may include, at least in part, an Ethernet port and an Ethernet cable 142C connection, although any other desired type of wired and / or wireless connection and / or communication may be used in other examples of the present technology. The remote computer 140 may be located at any desired location and may be connected via the Internet and / or other desired network connection (via Figure 1 The “cloud” 150 in FIG. 1 is connected to the substrate processing system 100. Figure 1 An input port 142 is shown disposed at the control panel 300 (example features of which are described in more detail below), but the input port 142 may be directly connected to the general purpose processing computer 130 and / or otherwise connected to communicate with the substrate processing system 100 and provide data for operating the substrate processing system 100. Figure 1 The control panel 300 is shown disposed on the tool front end module 120, but in other specific examples of the present technology, the location of the control panel 300 may vary, including on the load lock module 112, on one of the substrate processing chambers 104, at a stand-alone or separate workstation, and / or at other desired locations.

[0044] At least some aspects of the present technology relate to the manner in which the remote computer 140 is connected to the substrate processing system 100 and / or the manner in which the connection operates, such as providing data and information to the general purpose processing computer 130 for remote control and operation of the substrate processing system 100. Figure 2 Schematically illustrates at least a portion of a connection system 200 according to an example of the present technology. Figure 2 As shown, the connection system 200 includes a network switching system 202 (eg, an 8-port Ethernet switch in this example). An input / output port (in Figure 2 The four other input / output ports of the network switching system 202 (in Figure 22, Port-3, Port-4, and Port-8) are connected to the various substrate processing chambers 104 to transfer data (e.g., signals for controlling heaters, pumps, gate valves, processing conditions, etc.) between the general processing computer 130 and the substrate processing chambers 104. Other input / output ports are provided to communicate with the transfer module computer 204 (via Port-6), such as for controlling the transfer of substrates through various components of the substrate processing system 100, including the scheduling of substrate movement, and the equipment data acquisition ("EDA") computer system 206 (via Port-7), such as software tools that assist in data recording. The LAN input port of the network switching system 202 of this example is connected to a host computer 230, such as controlled by the manufacturer of the equipment in which the substrate processing system 100 is located.

[0045] Figure 2 The connection system 200 also includes another network switching system 210, which includes a dual-port Ethernet port in the specifically shown example. The additional network switching system 210 includes the above-mentioned input port 142, which receives incoming data (e.g., substrate processing commands to be executed in one or more substrate processing chambers 104 and / or other commands for controlling some parts of the substrate processing system 100) from the remote computer 140 via a network connection. The output port 212 of the network switching system 210 is connected to the input / output port ("Port-1") of the network switching system 202 (e.g., via a communication line 214), such as to transmit data from the remote computer 140 to the network switching system 202 (which in turn can transmit data to the general processing computer 130 via the network switching system 202). Alternatively, if desired, the remote computer 140 data can be transmitted from the output port 212 to another input location, such as an input port directly provided on the general processing computer 130. The network switching system 210 is also referred to as the "first switch" or "first switching system" here, and the switching system 202 is also referred to as the "second switch" or "second switching system" here.

[0046] Now combine Figure 2 and 3 Describe the power control features of the connection system 200. Figure 2As shown, the connection system 200 of this example also includes a DC power supply 220 for supplying power to each of the network switching system 202 and the network switching system 210 via a power line 222. The power line 222 of this example includes an electrical connector electrically connected to a power input (e.g., a 24 volt DC power input port) of the network switching system 202 and a power input (e.g., a 24 volt DC power input port) of the network switching system 210. The power line 222 of this example also includes a key switch 224. The key switch 224 turns at least the network switching system 210 on and off. When the key switch 224 is closed ("on"), power from the power supply 220 makes the network switching system 210 operable so that data can be moved from the remote computer 140 through the network switching system 210, through the output port 212, into the network switching system 202 (or otherwise routed) to the general processing computer 130. When the key switch 224 is turned on (“off”), no power from the power supply 220 reaches the network switch system 210, rendering the network switch system 210 inoperable and no data is moved from the remote computer 140 through the network switch system 210. In this manner, the key switch 224 can be used to control whether the remote computer 140 is able to operate the substrate processing system 100.

[0047] Figure 3 A portion of the control panel 300 is shown, including a portion of the key switch 224 with which the user may interact. Figure 3 As shown on the left side of the figure, the key 302 can be inserted into the key slot 306 of the locking system 304. See arrow 308. In this example locking system 304, the key 302 can only be inserted into and removed from the key slot 306 when the locking system 304 is in the off position. Once the key 302 is inserted into the key slot 306 (e.g., as shown in FIG. 1 ), the key 302 can be inserted into the key slot 306. Figure 3 ), the key 302 may then be turned to the on position (which activates the network switching system 210 and enables the remote computer 140 to access and control the substrate processing system 100). Figure 3 The right side of the lock system 304 can be turned by key 302 to open or disconnect position (such as Figure 2 and Figure 3 ) and the closed or on position (as shown in the middle of Figure 3 ) between physically moving the switch member 224A (see Figure 2224B). When off, the movable switch member 224A opens the circuit of the power line 222 so that no power reaches the network switching system 210 (i.e., the network switching system 210 is in an "unpowered" state). This prohibits the remote computer 140 from accessing and controlling the substrate processing system 100. When "on", the movable switch member 224A closes the circuit of the power line 222 and provides power to operate the network switching system 210.

[0048] Figure 3 The locking system 304 shown may include Figure 2 The movable switch member 224A shown or directly connected thereto to physically and directly move the switch member 224A between the open and closed positions. Alternatively, if desired, some mechanical connector and / or linkage device can be provided to physically move the switch member 224A in response to the locking system 304 with the movement of the key. Other types of physical arrangements, linkages, connections and / or components (including electronic, wired and / or wireless connections) can be used to change the key switch 224 between the open and closed positions in response to the locking system 304 moving between its on and off positions.

[0049] As above combined Figure 3 As shown and described, the key switch 224 and the locking system 304 can have various features or characteristics. For example, the key switch 224 can be lockable, such as when the key 302 engages the locking system 304. Additionally, the key 302 can be removed from the locking system 304 only when the key switch 224 and the locking system 304 are in the off position. Additionally, when the key switch 224 and the locking system 304 are in the off position, the network switching system 210 will be in a "power off" state. Thus, if a user turns the locking system 304 to the off position and removes the key 302, the network switching system 210 cannot receive power—and therefore the remote computer 140 cannot control the substrate processing system 100—unless and until the locking system 304 is moved to the on position using the appropriate key 302. Thus, the substrate processing chamber 104 and / or other components of the substrate processing system 100 can only receive commands from the remote computer 140 when the lockable key switch 224 is in the on position. In this way, a technician can disable remote access (by turning the locking system 304 to the off position and removing the key 302 ), and then they can perform repairs or maintenance on a portion of the substrate processing system 100 without much concern that the substrate processing system 100 may be activated by the remote computer 140 .

[0050] Although not a requirement in all examples of this technique, Figure 3It is further shown that the control panel 300 can have additional features. As some more specific examples, the control panel 300 can include an input port 142 (e.g., an Ethernet port) for a remote computer 140 on the network switching system 210; an output port 212 from the network switching system 210; one or more ports 202P for the network switching system 202; one or more USB or other input ports (e.g., port 312); and / or one or more power outlets 314. Although in Figure 3 Not shown, the control panel may also include one or more interfaces for user input devices, such as a touch screen, a computer pointing device (such as a mouse, joystick, eraser, etc.), a keyboard (hard or soft), etc.

[0051] In at least some examples of the present technology, the overall locking system 304 may include some way of informing other users who has locked the locking system 304 when the key 302 is removed. As some more specific examples, when the key 302 is removed, the party removing the key 302 may (and may be required to) place some kind of removable "tag" 320 on or near the substrate processing system 100. Additionally or alternatively, the tag 320 may be provided on the control panel 300 (e.g., clipped on, attached by magnets, attached by hook and loop fasteners, snapped on, glued on, etc.); in the key slot 306 (e.g., a "non-working" key 322 may fit in the key slot 306, not move the switch member 224A of the key switch 224, and include the user's identification information on the tag 320); on a plate or sheet located near the substrate processing system 100, etc. In this manner, the lockable key switch 224 and the locking system 304 may have and / or provide a "lockout / tagout" or "LOTO" feature. Additionally or alternatively, other types of “lockout / tagout” or “LOTO” features, systems and / or components may be provided for the locking system 304 for use with other specific examples of the present technology (e.g., a locking component for physically locking the locking system 304 in a disconnected position).

[0052] Figure 4 A top view of another example substrate processing system 400 (another "cluster" type semiconductor processing system) according to some examples of the present technology is schematically shown. The substrate processing system 400 can be of the type described in U.S. Provisional Patent Application No. 63 / 524,272, entitled "Extended Substrate Processing Systems and Methods with Additional Processing Chamber Connectivity," filed on June 30, 2023. U.S. Provisional Patent Application No. 63 / 524,272 is incorporated herein by reference in its entirety.

[0053] Figure 4 The illustrated substrate processing system 400 includes: (a) a first substrate handling chamber 402 (the "inside" substrate handling chamber) including a first robot 404 having an end effector 404A; (b) a first load lock module 410 (the "inside" load lock module) connected to one edge or face of the first substrate handling chamber 402; (c) a second load lock module 420 (the "outside" load lock module) connected to the opposite edge or face of the first substrate handling chamber 402; and (d) a second substrate handling chamber 430 (the "outside" substrate handling chamber) including a second robot 432 having an end effector 432A. The second load lock module 420 extends between and connects the first substrate handling chamber 402 and the second substrate handling chamber 430. The first load lock module 410 of this example is also connected to an equipment front end module 440, which includes a third robot 442 having an end effector 442A. The equipment front end module 440 may include or be connected to a nitrogen source for providing a nitrogen atmosphere within the equipment front end module 440. The equipment front end module 440 receives new substrates for processing into the substrate processing system 400 and discharges processed substrates from the substrate processing system 400 via one or more load ports 450A-450D (using a robot 442 to move substrates between the load ports 450A-450D and the first load lock module 410). Figure 4 Four load ports 450A-450D are shown in the example of FIG. 4 , but more or fewer load ports may be provided in other examples of the present technology.

[0054] Each of the first substrate handling chamber 402 and the second substrate handling chamber 430 is connected (or connectable) to a plurality of substrate processing chambers 460. Substrates are transferred into the substrate processing chambers 460 where one or more layers of material are deposited onto the substrate surface and / or other desired substrate processing is performed. Figure 4 Each substrate processing chamber 460 is shown to include four substrate supports 462, on which substrates can be placed during processing. More or fewer substrate supports 462 may be provided in each substrate processing chamber 460 (e.g., the substrate processing chamber 460 may be a dual chamber module (DCM) or a quad chamber module (QCM)). A substrate processing chamber 460 according to some examples of the present technology may include an additional four substrate supports 462, which are located Figure 4 4. The substrate processing chamber 460 is vertically below the four substrate supports 462 shown in the top view of FIG. Each substrate processing chamber 460 may have the same structure, or one or more substrate processing chambers 460 may have a different structure than other substrate processing chambers 460.

[0055] Each of the first substrate handling chamber 402 and the second substrate handling chamber 430 is connected to its corresponding substrate processing chamber 460 through one or more gate valves 470. Although two gate valves 470 are shown to connect the substrate handling chambers 402, 430 to each of their corresponding substrate processing chambers 460, in other examples of the present technology, each substrate processing chamber 460 may be provided with more or fewer gate valves 470. The substrate processing chamber 460 according to some examples of the present technology may be connected to its corresponding substrate handling chamber 402, 430 through two additional gate valves 470, for example, located at Figure 4 430. When closed, the gate valves 470 sealably separate the substrate handling chambers 402, 430 from their corresponding substrate processing chambers 460 (so that independent atmosphere conditions can be maintained in each chamber). When open, the gate valves 470 provide openings (e.g., substrate transfer slots) through which the end effectors 404A, 432A of the robotic arms 404, 432 can extend to move substrates into and out of the substrate processing chambers 460. The openings through the gate valves 470 are aligned with the substrate transfer slots provided in the substrate processing chambers 460 and the substrate handling chambers 402, 430 so that the substrates can be moved between the substrate processing chambers 460 and the substrate handling chambers 402, 430 through the gate valves 470. Each gate valve 470 can have the same structure, or one or more gate valves 470 can have a different structure than the other gate valves 470.

[0056] One face of the first load lock module 410 is provided with one or more gate valves 480A ( Figure 4 Two are shown in the figure) are connected to the equipment front end module 440, and the opposite side of the first load lock module 410 is connected through one or more gate valves 480B ( Figure 4 The first load lock module 410 also includes one or more substrate supports 412 (two are shown in FIG. 1 ). Figure 4402). The gate valves 480A, 480B are used to hold substrates while they are waiting to be moved into the equipment front end module 440 or the first substrate handling chamber 402. When closed, the gate valves 480A, 480B sealably separate the load lock module 410 from the equipment front end module 440 and the substrate handling chamber 402 (so that independent atmosphere conditions can be maintained in each chamber). When opened, the gate valve 480A provides an opening (e.g., a substrate transfer slot) through which the end effector 442A of the robot 442 can extend to move the substrate into and out of the equipment front end module 440. The opening through the gate valve 480A is aligned with the substrate transfer slot provided in the equipment front end module 440 and the first load lock module 410 so that the substrate can be moved between the equipment front end module 440 and the first load lock module 410 through the gate valve 480A. When opened, the gate valve 480B provides an opening (e.g., a substrate transfer slot) through which the end effector 404A of the robot 404 can extend to move the substrate into and out of the substrate handling chamber 402. The opening through the gate valve 480B is aligned with the substrate transfer slot provided in the substrate handling chamber 402 and the first load lock module 410 to enable the substrate to be moved between the substrate handling chamber 402 and the first load lock module 410 through the gate valve 480B. Each gate valve 480A, 480B may have the same structure, or one or more gate valves 480A, 480B may have a different structure than the other gate valves 470, 480A, 480B.

[0057] exist Figure 4 In the substrate processing system 400, one side of the second load lock module 420 is connected by one or more gate valves 490A ( Figure 4 Two are shown in FIG. 4 ) are connected to the first substrate handling chamber 402, and the opposite side of the second load lock module 420 is connected to the first substrate handling chamber 402 through one or more gate valves 490B ( Figure 4 The second load lock module 420 also includes one or more substrate supports 422 (two are shown in FIG. 1 ). Figure 2402, 430). When closed, the gate valves 490A, 490B sealably separate the second load lock module 420 from the two substrate handling chambers 402, 430 (so that independent atmosphere conditions can be maintained in each chamber). When opened, the gate valve 490A provides an opening (e.g., a substrate transfer slot) through which the end effector 404A of the robot 404 can extend to move substrates into and out of the first substrate handling chamber 402. The opening through the gate valve 490A is aligned with the substrate transfer slots provided in the first substrate handling chamber 402 and the second load lock module 420 so that the substrate can be moved between the substrate handling chamber 402 and the second load lock module 420 through the gate valve 490A. When opened, the gate valve 490B provides an opening (e.g., a substrate transfer slot) through which the end effector 432A of the robot 432 can extend to move substrates into and out of the second substrate handling chamber 430. The opening through the gate valve 490B is aligned with the substrate transfer slot provided in the second substrate handling chamber 430 and the second load lock module 420 so that the substrate can be moved between the second substrate handling chamber 430 and the second load lock module 420 through the gate valve 490B. Each of the gate valves 490A, 490B may have the same structure, or one or more of the gate valves 490A, 490B may have a different structure from the other gate valves 490A, 490B. The gate valves 490A and / or 490B may also have the same or different structure as the gate valves 470, 480A, and / or 480B.

[0058] The first load lock module 410 can have the same structure as the second load lock module 420, and / or the first and second load lock modules 410, 420 can be interchangeable (e.g., such that the load lock modules 410, 420 can switch positions and / or have a modular structure). In other examples, the first load lock module 410 and the second load lock module 420 can have different structures and / or be non-interchangeable (e.g., such that the load lock modules 410, 420 cannot switch positions in the substrate processing system 400). Either or both of the load lock modules 410, 420 can be a multi-station cooling type and / or a path-through type.

[0059] like Figure 4 As shown by the dashed lines in FIG. 4 , the two smaller faces of the first substrate handling chamber 402 may be equipped with at least one substrate transfer slot 252. When present, the substrate transfer slot 252 may be sealed (e.g., by a removable sealing plate) at Figure 4In the illustrated type of substrate processing system 400 arrangement, there are no substrate processing chambers 460 attached to those faces. The substrate transfer slots 252 in these faces may also be smaller than the corresponding slots in other faces of the first substrate handling chamber 402 and / or the second substrate handling chamber 430 (although in all examples of the present technology, the transfer slots 252 need not be smaller). Therefore, if desired, these smaller faces can be connected to substrate processing chambers (optionally, smaller substrate processing chambers) through additional gate valves.

[0060] Figure 4 The example substrate processing system 400 is further shown to include a general purpose processing computer 130 and a control panel 300, the general purpose processing computer 130 being connected to a remote computer 140 via an appropriate communication connection (eg, a connection cable 142C, an input port 142, and a network connection). Figure 4 These components in the substrate processing system 400 may have the above combination Figure 1-3 Any structure, function, option and / or replacement of these components described. In some examples of the present technology, Figure 4 The substrate processing system 400 may also include the above-mentioned Figure 1-3 A remote computer 140 of the type described is connected to the system 200 .

[0061] In other examples of the present technology, Figure 4 The substrate processing system 400 may include different types of remote computer 140 connection systems, such as Figure 5 The connection system 500 is shown. Figure 5 Use with Figure 1-4 In the case of any of the same reference numerals, the same or similar components are referenced (with any options, substitutions or features of the above components), and many overlapping descriptions may be omitted. The following discussion will focus primarily on Figure 5 The difference between the connection system 500 and the connection system 200 discussed above. In at least some examples of the present technology, Figure 5 The connection system 500 can also be used Figure 1 In the substrate processing system 100.

[0062] like Figure 5 As shown, six ports (labeled as port-3 to port-8) of the network switching system 202 (e.g., an 8-port Ethernet switch) of this example are connected to provide Figure 4The network switching system 202 is shown as a plurality of substrate processing chambers 460. In addition, an input / output port (via port-2) is provided for communication with the transfer module computer 204, for example, for controlling the transfer of substrates through various components of the substrate processing system 400. Any type of connection may be provided, such as a connection using an Ethernet cable extending between the network switching system 202 and the input / output ports of the substrate processing chambers 460 and / or the transfer module computer 204. Figure 5 The connection system 500 also includes a DC power supply 220, which is connected to the above-mentioned power supply 220 through a power line 222. Figure 1-3 The DC input ports of network switching system 202 and network switching system 210 are connected in the same manner as discussed above. Figure 5 The connection system 500 can be combined with the above Figure 1-3 The control panel 300 and / or lockout / tagout features described herein are used in conjunction with each other.

[0063] exist Figure 5 In the connection system 500, the remote computer 140 is connected to the input port 142 of the network switching system 210, such as via an Ethernet cable 142C and / or other appropriate connection system (using any desired network communication protocol). The output port 212 of the network switching system 210 of this example is connected to the input / output port 130A of the general processing computer 130. In this manner, when the key switch 224 is closed, signals will be transferred between the remote computer 140 and the general processing computer 130 through the network switching system 210. When the key switch 224 is turned on, the power to the network switching system 210 will be disconnected, and therefore, no signals will be transferred between the remote computer 140 and the general processing computer 130 through the network switching system 210. Figure 5 In the example of FIG. 1 , the general purpose processing computer 130 is configured to perform EDA functions (rather than having the arrangement include a separate EDA computer connected to the network switching system 202). However, if desired, the EDA function may be performed in the embodiment of FIG. Figure 5 In the arrangement shown, a separate EDA computer is provided.

[0064] The input / output port 130B of the general purpose processing computer 130 in the exemplary connection system 500 is connected to the input / output port 202A of the network switching system 202 (in Figure 5The remote computer 140 may be used to control one or more of the substrate processing chamber 460, the substrate handling chambers 402, 430, the load lock modules 410, 420, the equipment front end module 440, and / or any other component parts of the substrate processing system 400 via communications transmitted through the network switching system 210, the general processing computer 130, and the network switching system 202.

[0065] In other examples of the present technology, other connection system arrangements are also possible. For example, the connection systems 200 and 500 described above show the DC input ports of the network switching system 202 and the network switching system 210 connected by a power line 222, wherein a key switch 224 is disposed in the power line 222 (between the DC power source 220 and the DC input port of the network switching system 210). In this way, power to the network switching system 210 can be controlled based on the position of the key switch 224, as described above. Other structures and options are also possible. For example, if desired, separate power lines can be provided: (i) one between the DC power source 220 and the network switching system 202, and (ii) another between the DC power source 220 (or another DC power source) and the network switching system 210, and a key switch 224 can be disposed in either or both of these separate power lines to control power to the network switching system 202 and / or the network switching system 210. As another example, Figure 2 and 5 The key switch 224 shown may be disposed at a location in the power line 222 to control the power provided to the network switching system 202 (rather than the network switching system 210). Note that, for example Figure 2 and 5 As another example, Figure 2 and 5 The key switch 224 shown in FIG. 2 may be disposed before the power line 222 to control the power provided to the network switching system 202 and the network switching system 210. Note that, for example, Figure 2 and Figure 5 The position indicated by arrow B. Therefore, according to aspects of the present technology, various different arrangements of the key switch 224 in the connection system 200, 500 are possible.

[0066] Figure 6 A general explanation of a process 600 for establishing and / or using a connection system 200, 500 of the type described above is provided (see also Figure 1-5In such a process 600, the remote computer 140 is connected to the input port 142 of the first switching system 210, for example, via an Ethernet cable 142C and / or other suitable network connection and / or communication protocol. Note step S602. In step S604, the output port 212 of the first switching system 210 is connected to the input port of the second switching system 202. Figure 2 In the connection system 200, this is a direct connection between the output port 212 of the first switching system 210 and the port-1 of the second switching system 202. Figure 5 In the connection system 500, this is an indirect connection, the output port 212 of the first switching system 210 is connected to the input / output port 130A of the general processing computer 130, and the input / output port 130B of the general processing computer 130 is connected to the port-1 of the second switching system 202. These connections can be made using Ethernet connections and / or any other desired type of connector and / or communication protocol. In these ways, the remote computer 140 can be connected through the first switching system 210 and the second switching system 202 to control the substrate processing system 100, 400.

[0067] At step S606, the process 600 further includes providing a lockable key switch 224 in the power line 222 for supplying power to at least one of the first switching system 210 and / or the second switching system 202. Figure 1-5 In the specific example of FIG. 2 , the lockable key switch 224 is disposed in a portion of the power line 222 that supplies power to the first switching system 210. However, as described above with respect to Figure 2 and 5 As discussed with arrows A and B in FIG. 2 , other positions of the lockable key switch 224 are possible in other specific examples of the present technology.

[0068] At step S608, the power line 222 to the first switching system 210 and / or the second switching system 202 is connected to the power source 220 (eg, a DC power source). The operation of the process 600 depends on the position of the lockable key switch 224. Figure 2 and Figure 5In the specific example shown, at step S608, a single power line 222 extends between the DC inputs of the first switching system 210 and the second switching system 202, and the output of the power supply 220 is connected to the power line 222 (to provide power). When the lockable key switch 224 is in the "on" position (see step S610), power is supplied to the first switching system 210 (and / or the second switching system 202), which enables the remote computer 140 to control the substrate processing system 100, 400 (e.g., control one or more substrate processing chambers 104, 460; control one or more substrate handling chambers 102, 402, 430; and / or control other devices of the substrate processing system 100, 400). When the lockable key switch 224 is in the "off" position (see step S612), power is disconnected from at least one of the first switching system 210 and / or the second switching system 202, which prevents the remote computer 140 from controlling the substrate processing system 100, 400 and / or components thereof. Figure 2 and 5 In the example of: (a) when the lockable key switch 224 is in the "on" position (see step S610), power is supplied to the first switching system 210 and the second switching system 202 via the power line 222, and (b) when the lockable key switch 224 is in the "off" position (see step S612), power is disconnected from the first switching system 210. In these specifically illustrated examples, the second switching system 202 receives power from the DC power source 220 even when the key switch 224 is in the off position (although other arrangements are possible as described above).

[0069] According to other specific examples of the present technology, other types of systems and / or methods for controlling remote access to operate a substrate processing system may be provided. For example, if desired, a key switch of the type described above (e.g., having a physical key 302 and a lock) may be provided to control the operation of the cable 142C (e.g., transmitting signals through the cable 142C) (and optionally, the network switching system 210 may be omitted). Other types of locking hardware and / or software (e.g., for locking the key switch 224 in an off position) may be provided to inhibit signals from the remote computer 140 from reaching the network switching system 202 and / or the general processing computer 130. Additionally or alternatively, other types of locking and / or tagging hardware and / or software may be provided to inhibit signals from the remote computer 140 from reaching the network switching system 202 and / or the general processing computer 130, and to notify others that a lockout situation has been created.

[0070] Substrate processing systems and methods according to some examples of the present technology may include other types of selectively activatable remote computer access, such as using lockout and / or tagout controls and / or features. Such a substrate processing system may include a lockable key switch (e.g., 224) of the type described above, which is disposed in a power supply line for transmitting data from a remote computer 140 to any component required for the substrate processing system equipment. Additionally or alternatively, a lockable key switch (e.g., 224) of the type described above may be disposed in a data transmission line or connection for transmitting data from a remote computer 140 to any component required for the substrate processing system equipment (e.g., in an Ethernet cable, such as cable 142C, operably connected to a wireless data transmission system, etc.). In such a system and method, a lockable key switch (e.g., 224) may be moved between an "enable" or on position and a "disable" or off position using a key (e.g., 302). When enabled or turned on: (a) one or more circuits (including power for supplying power to all components required for control by the remote computer 140) will be turned on, and / or (b) a data transmission line providing data to all components required for control by the remote computer 140 will be turned on, thereby enabling the remote computer 140 to control the substrate processing system 100, 400. When disabled or turned off: (a) at least one circuit including power for supplying power to at least one component required for control by the remote computer 140 will be interrupted, and / or (b) a data transmission line providing data to at least one component controlled by the remote computer 140 will be interrupted, thereby disabling the remote computer 140 from controlling the substrate processing system 100, 400.

[0071] Thus, substrate processing systems and methods according to some examples of the present technology need not include the specific two network switch systems 202 and 210 configuration described herein (e.g., if the key switch 224 is placed in a different position to interrupt power to different components, the network switch system 210 may be omitted). However, the two network switch systems 202 and 210 configuration described herein may be advantageous in some examples of the present technology because it disables remote computer 140 access while still allowing power and / or communication between local components (e.g., between the general processing computer 130 and the substrate processing chamber 104, 460 and / or other computers), which may be necessary and / or useful to complete desired repair or maintenance work.

[0072] Although the present disclosure has been provided in the context of certain embodiments and examples, it will be understood by those skilled in the art that the present disclosure extends to other alternative embodiments and / or uses of embodiments beyond the specifically described embodiments and obvious modifications and equivalents thereof. In addition, although various variations of the embodiments of the present disclosure have been shown and described in detail, other modifications within the scope of the present disclosure will be apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or sub-combinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It should be understood that the various features and aspects of the disclosed embodiments may be combined or replaced with one another to form different modes of embodiments of the present disclosure. Therefore, the scope of the present disclosure should not be limited by the specific embodiments described above.

[0073] The headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the apparatus and methods disclosed herein.

Claims

1. A substrate processing system, comprising: a first switch comprising a first input port, a first power input, and a first output port; a second switch including a first input / output port and a second power input; a first electrical connector electrically connecting the first power input and the second power input; a lockable key switch disposed in the first electrical connector, the lockable key switch being movable between an off position and an on position; a power source connected to the first electrical connector; as well as A key configured to be received by a lockable key switch and configured to move the lockable key switch between an on position and an off position when received by the lockable key switch, wherein: (i) in the on position, power is supplied to the first switch and the second switch, and (ii) in the off position, power is not supplied to at least the first switch.

2. The substrate processing system according to claim 1, wherein: The key may be removed from the lockable key switch only when the lockable key switch is in the off position.

3. The substrate processing system according to claim 1, wherein: The first input port is configured to receive substrate processing commands from a remote computing system, and wherein the first output port is connected to a first input / output port of the second switch to transmit substrate processing commands from the remote computing system through the first switch and to the second switch only when the lockable key switch is in the on position.

4. The substrate processing system according to claim 3, further comprising: One or more substrate processing chambers in electronic communication with the second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

5. The substrate processing system according to claim 1, further comprising a substrate processing system host, wherein: The first input port is configured to receive substrate processing commands from a remote computing system, wherein the first output port is connected to a substrate processing system host and transmits substrate processing commands from the remote computing system through the first switch and to the substrate processing system host only when the lockable key switch is in the on position, and wherein the substrate processing system host transmits a signal to the first input / output port of the second switch based on the substrate processing command received from the remote computing system.

6. The substrate processing system according to claim 5, further comprising: One or more substrate processing chambers in electronic communication with the second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from a remote computing system only when the lockable key switch is in the on position.

7. The substrate processing system according to claim 1, wherein: The first input port comprises an Ethernet port.

8. The substrate processing system according to claim 1, wherein: The power source is a DC power source.

9. A substrate processing system comprising: a first switch comprising a first input port, a first power input, and a first output port; a second switch comprising a first input / output port and a second power input, wherein the first output port is directly or indirectly connected to the first input / output port of the second switch; a lockable key switch movable between an off position and an on position, the lockable key switch disposed in a power supply line connected to supply power to at least one of the first power input or the second power input; as well as A key configured to be received by a lockable key switch and configured to move the lockable key switch between an on position and an off position when received by the lockable key switch, wherein: (i) in the on position, a circuit including a power supply line for supplying power to at least one of the first power input or the second power input is connected, and (ii) in the off position, a circuit including a power supply line for supplying power to at least one of the first power input or the second power input is interrupted.

10. The substrate processing system according to claim 9, wherein: The key can be removed from the lockable key switch only when the lockable key switch is in the off position.

11. The substrate processing system according to claim 9, wherein: The first input port is configured to receive substrate processing commands from a remote computing system, and wherein the first output port is directly connected to the first input / output port of the second switch to transmit the substrate processing commands from the remote computing system through the first switch and to the second switch only when the lockable key switch is in the on position.

12. The substrate processing system according to claim 11, further comprising: One or more substrate processing chambers in electronic communication with the second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from the remote computing system only when the lockable key switch is in the on position.

13. The substrate processing system according to claim 9, further comprising a substrate processing system host, wherein: The first input port is configured to receive substrate processing commands from a remote computing system, wherein the first output port is connected to an input of a substrate processing system host and transmits substrate processing commands from the remote computing system through the first switch and to the substrate processing system host only when the lockable key switch is in the on position, and wherein the substrate processing system host transmits a signal to the first input / output port of the second switch based on the substrate processing commands received from the remote computing system.

14. The substrate processing system according to claim 13, further comprising: One or more substrate processing chambers in electronic communication with the second switch, wherein at least one of the one or more substrate processing chambers receives input data transmitted through the second switch based on substrate processing commands received from a remote computing system only when the lockable key switch is in the on position.

15. A method of connecting a substrate processing system to a remote computing system, comprising: connecting the remote computing system to a first input port of a first switch, the first switch also including a first power input and a first output port; directly or indirectly connecting a first output port of the first switch to a first input / output port of a second switch, the second switch further comprising a second power input; electrically connecting the first power input and the second power input to an electrical connector including a lockable key switch movable between an off position and an on position using a key; as well as A power source is connected to the electrical connector, wherein a lockable key switch is disposed in the electrical connector such that: (i) when the lockable key switch is in an on position, the power source supplies power to the first switch and the second switch, and (ii) when the lockable key switch is in an off position, the power source does not supply power to at least one of the first switch or the second switch.

16. The method according to claim 15, further comprising: disabling operation of the substrate processing system by turning the lockable key switch from an on position to an off position using the key; as well as Remove the key from the lockable key switch.

17. The method according to claim 15, further comprising: enabling operation of the substrate handling system by engaging the key with the lockable key switch when the lockable key switch is in the off position; as well as Use the key to turn the lockable key switch from the OFF position to the ON position.

18. A method of connecting a substrate processing system to a remote computing system, comprising: connecting the remote computing system to a first input port of a first switch, the first switch also including a first power input and a first output port; directly or indirectly connecting a first output port of the first switch to a first input / output port of a second switch, the second switch further comprising a second power input; electrically connecting at least one of the first power input or the second power input to an electrical connector including a lockable key switch movable between an off position and an on position using a key; as well as A power source is connected to the electrical connector, wherein a lockable key switch is disposed in the electrical connector such that: (i) when the lockable key switch is in an on position, the power source supplies power to at least one of the first switch or the second switch, and (ii) when the lockable key switch is in an off position, the power source does not supply power to at least one of the first switch or the second switch.

19. The method according to claim 18, further comprising: disabling operation of the substrate processing system by turning the lockable key switch from an on position to an off position using the key; as well as Remove the key from the lockable key switch.

20. The method of claim 18, further comprising: enabling operation of the substrate handling system by engaging the key with the lockable key switch when the lockable key switch is in the off position; as well as Use the key to turn the lockable key switch from the OFF position to the ON position.

Images