Radiation detection system for adjusting measurement

By sending excitation and controlling radiation beams in the radiation detection system and measuring radiation intensity with a detector, the problem of measuring the normalized intensity of X-ray fluorescence radiation and controlling the radiation beam intensity in the prior art is solved, and the accuracy and reliability of the system are improved.

CN119546984APending Publication Date: 2025-02-28SHENZHEN XPECTVISION TECH CO LTD
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Patent Information

Application Number
CN202280098160.7
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2022-08-12
Publication Date
2025-02-28

AI Technical Summary

Technical Problem

The prior art is difficult to accurately measure the normalized intensity of X-ray fluorescence radiation, and it is difficult to effectively control and monitor the intensity of the radiation beam.

Method used

By sending an excited radiation beam to the object from the radiation source, the object causes the object to emit X-ray fluorescent radiation and sends a controlled radiation beam from the radiation source. The apparent intensity of X-ray fluorescent radiation is measured using the main radiation detector, and the control intensity of the control radiation beam is measured using the monitoring radiation detector, and the normalized intensity of X-ray fluorescent radiation is determined based on these two.

Benefits of technology

Accurate measurement of the normalized intensity of X-ray fluorescence radiation is achieved, effective control of controlling the intensity of the radiation beam and improved the accuracy and reliability of the radiation detection system.

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Abstract

A system (500) includes a radiation source (520) configured to transmit an excitation radiation beam (525e) from the radiation source (520) to an object (540), resulting in emission of X-ray fluorescence radiation (545) from the object (520), and configured to transmit a control radiation beam (525c) from the radiation source (520). The system (500) is configured to determine an apparent intensity of the X-ray fluorescence radiation (545), determine a control intensity of the control radiation beam (525c), and determine a normalized intensity of the X-ray fluorescence radiation based on the apparent intensity of the X-ray fluorescence radiation (545) and the control intensity of the control radiation beam (525c).
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Description

[Background technology]

[0001] A radiation detector is a device that measures a property of radiation. Examples of such properties may include the spatial distribution of intensity, phase, polarization of the radiation. The radiation measured by the radiation detector may be radiation that has passed through an object. Alternatively, the radiation measured by the radiation detector may be characteristic X-rays emitted by elements in an object through X-ray fluorescence (XRF). X-ray fluorescence is a characteristic X-ray emitted from elements that have been excited, for example, by exposure to high-energy X-rays or gamma rays. The radiation measured by the radiation detector may be electromagnetic radiation, such as infrared light, visible light, ultraviolet light, X-rays, or gamma rays. The radiation may be of other types, such as alpha rays and beta rays. An imaging system may include one or more image sensors, each of which may have one or more radiation detectors. [Summary of the invention]

[0002] A system is disclosed herein, comprising a radiation source, the radiation source being configured to send an excitation radiation beam from the radiation source to an object, thereby causing X-ray fluorescence radiation to be emitted from the object, and being configured to send a control radiation beam from the radiation source. The system is configured to determine an apparent intensity of the X-ray fluorescence radiation, determine a control intensity of the control radiation beam, and determine a normalized intensity of the X-ray fluorescence radiation based on the apparent intensity of the X-ray fluorescence radiation and the control intensity of the control radiation beam.

[0003] In one aspect, the intensity of the excitation radiation beam is related to the intensity of the control radiation beam.

[0004] In one aspect, the intensity of the excitation radiation beam is equal to the intensity of the control radiation beam.

[0005] In one aspect, the apparent intensity of the X-ray fluorescence radiation and the control intensity of the control radiation beam are determined for a first point in time and a second point in time, respectively, and the first point in time is temporally related to the second point in time.

[0006] In one aspect, the first point in time and the second point in time are the same.

[0007] In one aspect, the system further comprises a primary radiation detector configured to measure the apparent intensity of the X-ray fluorescence radiation.

[0008] In one aspect, the primary radiation detector does not receive any radiation particles from the radiation source.

[0009] In one aspect, the system further comprises a blocking device configured to prevent all radiation particles from the radiation source and aimed at the primary radiation detector from reaching the primary radiation detector.

[0010] In one aspect, the system further comprises a monitoring radiation detector configured to measure the control intensity of the control radiation beam.

[0011] In one aspect, no radiation particles from the radiation source and aimed at the object strike the monitoring radiation detector.

[0012] In one aspect, the monitoring radiation detector is stationary relative to the radiation source.

[0013] On the one hand, the system also includes: an attenuation device configured to attenuate the control radiation beam according to an attenuation ratio to obtain an attenuated control radiation beam; a monitoring radiation detector configured to measure the intensity of the attenuated control radiation beam; and a controller configured to calculate the control intensity of the control radiation beam based on (A) the intensity of the attenuated control radiation beam and (B) the attenuation ratio.

[0014] In one aspect, the normalized intensity of the X-ray fluorescent radiation divided by the apparent intensity of the X-ray fluorescent radiation is equal to a predetermined base intensity of the control radiation beam divided by the control intensity of the control radiation beam.

[0015] In one aspect, the excitation radiation beam comprises X-rays and the control radiation beam comprises X-rays.

[0016] A method is disclosed herein, comprising: sending an excitation radiation beam from a radiation source to an object, thereby causing X-ray fluorescence radiation to be emitted from the object; sending a control radiation beam from the radiation source; determining an apparent intensity of the X-ray fluorescence radiation; determining a control intensity of the control radiation beam; and determining a normalized intensity of the X-ray fluorescence radiation based on (a) the apparent intensity of the X-ray fluorescence radiation and (b) the control intensity of the control radiation beam.

[0017] In one aspect, the intensity of the excitation radiation beam is related to the intensity of the control radiation beam.

[0018] In one aspect, the intensity of the excitation radiation beam is equal to the intensity of the control radiation beam.

[0019] In one aspect, the apparent intensity of the X-ray fluorescence radiation and the control intensity of the control radiation beam are determined for a first point in time and a second point in time, respectively, and the first point in time is temporally related to the second point in time.

[0020] In one aspect, the first point in time and the second point in time are the same.

[0021] In one aspect, said determining the apparent intensity of the X-ray fluorescence radiation comprises measuring the apparent intensity using a primary radiation detector.

[0022] In one aspect, the primary radiation detector does not receive any radiation particles from the radiation source.

[0023] In one aspect, all radiation particles from the radiation source and aimed at the primary radiation detector are blocked from reaching the primary radiation detector.

[0024] In an aspect, said determining the control intensity of the control radiation beam comprises measuring the control intensity using a monitoring radiation detector.

[0025] In one aspect, no radiation particles from the radiation source and aimed at the object strike the monitoring radiation detector.

[0026] In one aspect, the monitoring radiation detector is stationary relative to the radiation source.

[0027] On the one hand, determining the control intensity of the control radiation beam includes: causing the control radiation beam to attenuate according to an attenuation ratio to obtain an attenuated control radiation beam; measuring the intensity of the attenuated control radiation beam using a monitoring radiation detector; and calculating the control intensity of the control radiation beam based on (A) the intensity of the attenuated control radiation beam and (B) the attenuation ratio.

[0028] In one aspect, the normalized intensity of the X-ray fluorescent radiation divided by the apparent intensity of the X-ray fluorescent radiation is equal to a predetermined base intensity of the control radiation beam divided by the control intensity of the control radiation beam.

[0029] In one aspect, the excitation radiation beam comprises X-rays and the control radiation beam comprises X-rays.

Brief Description of the Drawings

[0030] Figure 1 A radiation detector according to an embodiment is schematically illustrated.

[0031] Figure 2 A simplified cross-sectional view of a radiation detector according to an embodiment is schematically shown.

[0032] Figure 3 A detailed cross-sectional view of a radiation detector according to an embodiment is schematically shown.

[0033] Figure 4 A detailed cross-sectional view of a radiation detector according to an alternative embodiment is schematically shown.

[0034] Figure 5 A radiation detection system according to an embodiment is schematically illustrated.

[0035] Figure 6 A flow chart outlining the operation of a radiation detection system according to an embodiment is shown.

[0036] Figure 7 A radiation detection system according to an alternative embodiment is schematically illustrated. [Specific implementation method]

[0037] Radiation Detectors

[0038] Figure 1 A radiation detector 100 is schematically shown as an example. The radiation detector 100 may include an array of pixels 150 (also referred to as sensing elements 150). The array may be a rectangular array (e.g. Figure 1 as shown), a honeycomb array, a hexagonal array, or any other suitable array. Figure 1 The array of pixels 150 in the example of FIG. 4 has 4 rows and 7 columns; however, in general, the array of pixels 150 may have any number of rows and any number of columns.

[0039] Each pixel 150 can be configured to detect radiation from a radiation source (not shown) incident thereon, and can be configured to measure the characteristics of the radiation (e.g., the energy, wavelength, and frequency of the particles). Radiation may include radiation particles such as photons (X-rays, gamma rays, etc.) and subatomic particles (alpha particles, beta particles, etc.). Each pixel 150 can be configured to count the number of radiation particles incident thereon and whose energy falls into multiple energy bins over a period of time. All pixels 150 can be configured to count the number of radiation particles incident thereon and falling into multiple energy bins over the same period of time. When the incident radiation particles have similar energies, the pixel 150 can be configured only to count the number of radiation particles incident thereon over a period of time without measuring the energy of a single radiation particle.

[0040] Each pixel 150 may have its own analog-to-digital converter (ADC) configured to digitize an analog signal representing the energy of an incident radiation particle into a digital signal, or to digitize an analog signal representing the total energy of multiple incident radiation particles into a digital signal. Pixels 150 may be configured to operate in parallel. For example, when one pixel 150 measures an incident radiation particle, another pixel 150 may be waiting for the radiation particle to arrive. Pixels 150 may not necessarily be individually addressable.

[0041] The radiation detector 100 described herein may have applications such as X-ray telescopes, X-ray mammography, industrial X-ray defect detection, X-ray microscopy or microradiography, X-ray casting inspection, X-ray nondestructive testing, X-ray weld inspection, X-ray digital subtraction angiography, etc. It may be appropriate to use the radiation detector 100 instead of a photographic plate, photographic film, a photo-stimulated phosphor plate (PSP plate), an X-ray image intensifier, a scintillator, or other semiconductor X-ray detector.

[0042] Figure 2 Schematically shows a Figure 1 2-2. Specifically, the radiation detector 100 may include a radiation absorbing layer 110 and an electronic circuit layer 120 (which may include one or more ASICs or application specific integrated circuits) for processing and analyzing electrical signals generated in the radiation absorbing layer 110 by incident radiation. The radiation detector 100 may or may not include a scintillator (not shown). The radiation absorbing layer 110 may include a semiconductor material such as silicon, germanium, GaAs, CdTe, CdZnTe, or a combination thereof. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest.

[0043] As an example, Figure 3 Schematically shows Figure 1 Detailed cross-sectional view of the radiation detector 100 along line 2-2. Specifically, the radiation absorbing layer 110 may include one or more diodes (e.g., pin or pn) formed by one or more discrete regions 114 of the first doping region 111, the second doping region 113. The second doping region 113 may be separated from the first doping region 111 by an optional intrinsic region 112. The discrete regions 114 may be separated from each other by the first doping region 111 or the intrinsic region 112. The first doping region 111 and the second doping region 113 may have opposite types of doping (e.g., the first doping region 111 is p-type and the second doping region 113 is n-type, or the first doping region 111 is n-type and the second doping region 113 is p-type). Figure 3 In the example of , each discrete region 114 of the second doped region 113 forms a diode with the first doped region 111 and the optional intrinsic region 112. That is, in Figure 3 In the example of FIG. 1 , the radiation absorbing layer 110 has a plurality of diodes (more specifically, 7 diodes corresponding to Figure 1 The array has 7 pixels in a row of 150, for simplicity, Figure 3 Only two pixels 150 are marked in FIG. 1 . The plurality of diodes may have an electrical contact 119A as a common electrode. The first doped region 111 may also have a plurality of discrete portions.

[0044] The electronic circuit layer 120 may include an electronic system 121 suitable for processing or interpreting signals generated by radiation incident on the radiation absorption layer 110. The electronic system 121 may include analog circuits such as filter networks, amplifiers, integrators, and comparators, or digital circuits such as microprocessors and memories. The electronic system 121 may include one or more analog-to-digital converters. The electronic system 121 may include components shared by multiple pixels 150 or components dedicated to a single pixel 150. For example, the electronic system 121 may include an amplifier dedicated to each pixel 150 and a microprocessor shared between all pixels 150. The electronic system 121 may be electrically connected to the pixel 150 through the through hole 131. The space between the through holes may be filled with a filling material 130, which may increase the mechanical stability of the connection between the electronic circuit layer 120 and the radiation absorption layer 110. Other bonding techniques may connect the electronic system 121 to the pixel 150 without using the through hole 131.

[0045] When radiation from a radiation source (not shown) strikes the radiation absorbing layer 110 including a diode, the radiation particles may be absorbed and generate one or more carriers (e.g., electrons, holes) through a variety of mechanisms. The carriers may drift to one of the electrodes of the diodes under an electric field. The electric field may be an external electric field. The electrical contact 119B may include a plurality of discrete portions, each of which is in electrical contact with the discrete region 114. The term "electrical contact" may be used interchangeably with the term "electrode". In one embodiment, the carriers may drift in a plurality of directions, and the carriers generated by a single radiation particle are not substantially shared by two different discrete regions 114 (here "substantially not shared by..." means that less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these carriers flow to a discrete region different from the discrete region to which the remaining carriers flow in the plurality of discrete regions 114). The charge carriers generated by radiation particles incident around the footprint of one of the discrete regions 114 are substantially not shared by another of the discrete regions 114. A pixel 150 associated with a discrete region 114 may be an area around the discrete region 114 in which substantially all (more than 98%, more than 99.5%, more than 99.9%, or more than 99.99%) of the charge carriers generated by radiation particles incident therein flow toward the discrete region 114. That is, less than 2%, less than 1%, less than 0.1%, or less than 0.01% of the charge carriers flow out of the pixel 150.

[0046] Figure 4 Schematically shows a Figure 1Detailed cross-sectional view of radiation detector 100 along line 2-2. More specifically, radiation absorbing layer 110 may include resistors of semiconductor materials such as silicon, germanium, GaAs, CdTe, CdZnTe, or combinations thereof, but not diodes. The semiconductor material may have a high mass attenuation coefficient for the radiation of interest. In one embodiment, Figure 4 The electronic circuit layer 120 is similar in structure and function to Figure 3 The electronic circuit layer 120 is provided.

[0047] When radiation strikes the radiation absorbing layer 110, which includes a resistor but does not include a diode, it can be absorbed and generate one or more carriers through a variety of mechanisms. The radiation particles can generate 10 to 100,000 carriers. The carriers can drift to the electrical contacts 119A and 119B under an electric field. The electric field can be an external electric field. The electrical contact 119B may include multiple discrete portions. In one embodiment, the carriers can drift in multiple directions, and the carriers generated by a single radiation particle are substantially not shared by two different discrete portions of the electrical contact 119B (here "substantially not shared by..." means that less than 2%, less than 0.5%, less than 0.1% or less than 0.01% of these carriers flow to a discrete portion different from the discrete portion to which the remaining carriers flow). The carriers generated by the radiation particles incident on the occupied space of one of the discrete portions of the electrical contact 119B are substantially not shared by another discrete portion of the discrete portions of the electrical contact 119B. A pixel 150 associated with a discrete portion of electrical contact 119B may be a region around the discrete portion in which substantially all (more than 98%, more than 99.5%, more than 99.9%, or more than 99.99%) of the charge carriers generated by radiation particles incident therein flow toward the discrete portion of electrical contact 119B. That is, less than 2%, less than 0.5%, less than 0.1%, or less than 0.01% of these charge carriers flow out of the pixel associated with the discrete portion of electrical contact 119B.

[0048] Radiation detection systems and operations

[0049] Figure 5A radiation detection system 500 according to an embodiment is schematically shown. In one embodiment, the radiation detection system 500 may include a main radiation detector 510Ma, a monitoring radiation detector 510Mo, a radiation source 520, and a controller 530. The monitoring radiation detector 510Mo and the main radiation detector 510Ma may be separate and different from each other. The monitoring radiation detector 510Mo and the main radiation detector 510Ma may be the same radiation detector. The monitoring radiation detector 510Mo may be a part of the main radiation detector 510Ma, and vice versa. The monitoring radiation detector 510Mo and the main radiation detector 510Ma may be different parts of the same detector.

[0050] In one embodiment, one or both of the main radiation detector 510Ma and the monitoring radiation detector 510Mo may be similar in structure and function to Figures 1 to 4 A radiation detector 100 is provided.

[0051] In one embodiment, radiation source 520 may send an excitation radiation beam 525e from radiation source 520 to object 540. In one embodiment, excitation radiation beam 525e may include X-rays. In one embodiment, in response to object 540 being struck by excitation radiation beam 525e, object 540 may generate X-ray fluorescence radiation 545 from object 540 toward primary radiation detector 510Ma.

[0052] In one embodiment, the radiation source 520 may also send a control radiation beam 525c from the radiation source 520 to the monitoring radiation detector 510Mo. In one embodiment, the control radiation beam 525c may include X-rays.

[0053] In one embodiment, monitoring radiation detector 510Mo may be stationary relative to radiation source 520 .

[0054] In one embodiment, at any point in time, the intensity of the excitation radiation beam 525e may be related to the intensity of the control radiation beam 525c. That is, the intensity of the excitation radiation beam 525e may have a known relationship to the intensity of the control radiation beam 525c. For example, at any point in time, the intensity of the excitation radiation beam 525e may be 3 times the intensity of the control radiation beam 525c. In one embodiment, at any point in time, the intensity of the excitation radiation beam 525e may be the same as the intensity of the control radiation beam 525c.

[0055] Apparent intensity of X-ray fluorescence radiation

[0056] In one embodiment, the apparent intensity of the X-ray fluorescence radiation 545 may be determined. In one embodiment, the apparent intensity of the X-ray fluorescence radiation 545 may be determined by the primary radiation detector 510Ma. In one embodiment, the primary radiation detector 510Ma may determine the apparent intensity of the X-ray fluorescence radiation 545 by measuring the apparent intensity of the X-ray fluorescence radiation 545.

[0057] Specifically, in one embodiment, the main radiation detector 510Ma can measure the apparent intensity of the X-ray fluorescence radiation 545 by: (A) capturing a first image of the object 540 based on the X-ray fluorescence radiation 545 from the object 540, then (B) determining a first sum of the values ​​of all picture elements of the first image, and then (C) calculating the apparent intensity of the X-ray fluorescence radiation 545 based on the first sum.

[0058] Please note that the terms "first", "second" and other ordinal numbers in this patent application are only used for convenient reference and do not imply any chronological order.

[0059] Please note that the term "image" in this patent application is not limited to the spatial distribution of a property (eg, intensity) of radiation. For example, the term "image" may also include the spatial distribution of the density of a substance or element.

[0060] Control the intensity of the radiation beam

[0061] In one embodiment, the control intensity of the control radiation beam 525c may be determined. In one embodiment, the control intensity of the control radiation beam 525c may be determined by the monitoring radiation detector 510Mo. In one embodiment, the monitoring radiation detector 510Mo may determine the control intensity of the control radiation beam 525c by measuring the control intensity of the control radiation beam 525c.

[0062] Specifically, in one embodiment, the monitoring radiation detector 510Mo can measure the control intensity of the control radiation beam 525c by: (A) capturing a second image based on the control radiation beam 525c from the radiation source 520, and then (B) determining a second sum of the values ​​of all pixels of the second image, and then (C) calculating the control intensity of the control radiation beam 525c based on the second sum.

[0063] Determine the time point of intensity

[0064] In one embodiment, the apparent intensity of the X-ray fluorescence radiation 545 and the controlled intensity of the control radiation beam 525c can be determined for a first time point and a second time point, respectively, and the first time point is temporally related to the second time point. That is, the time difference between the first time point and the second time point is known. For example, the first time point can be 10 ms after the second time point.

[0065] In one embodiment, the first time point and the second time point may be the same. In other words, the apparent intensity of the X-ray fluorescence radiation 545 and the controlled intensity of the control radiation beam 525c are determined for the same time point.

[0066] Normalized intensity of X-ray fluorescence radiation

[0067] In one embodiment, the normalized intensity of the X-ray fluorescence radiation 545 may be determined based on (A) the apparent intensity of the X-ray fluorescence radiation 545 and (B) the controlled intensity of the control radiation beam 525c. In one embodiment, the controller 530 may be electrically connected to the main radiation detector 510Ma and the monitoring radiation detector 510Mo. In one embodiment, the controller 530 may determine the normalized intensity of the X-ray fluorescence radiation 545 based on (A) the apparent intensity of the X-ray fluorescence radiation 545 and (B) the controlled intensity of the control radiation beam 525c.

[0068] In one embodiment, the normalized intensity of the X-ray fluorescence radiation 545 divided by the apparent intensity of the X-ray fluorescence radiation 545 may be equal to the predetermined base intensity of the control radiation beam 525c divided by the control intensity of the control radiation beam 525c.

[0069] For example, assume that the control radiation beam 525c from the radiation source 520 is determined to have a base intensity of 100 units. Further assume that the apparent intensity of the X-ray fluorescence radiation 545 at a particular point in time measured by the primary radiation detector 510Ma is 30 units, and that the control intensity of the control radiation beam 525c at that particular point in time measured by the monitoring radiation detector 510Mo is 120 units. Then, the normalized intensity I of the X-ray fluorescence radiation 545 can be determined using the above relationship: N :I N / 30=100 / 120. According to this formula, the normalized intensity of the X-ray fluorescence radiation 545 at a specific time point can be calculated as follows: N =(100 / 120)×30=25 units.

[0070] Flowchart outlining the operation of a radiation detection system

[0071] Figure 6 shows a summary according to an embodiment Figure 5600 of the operation of the radiation detection system 500. Specifically, in step 610a, the operation may include sending an excitation radiation beam from a radiation source to an object, thereby causing X-ray fluorescence radiation to be sent from the object. For example, in the above embodiment, referring to Figure 5 , the radiation source 520 transmits an excitation radiation beam 525 e from the radiation source 520 to the object 540 , thereby causing X-ray fluorescence radiation 545 to be emitted from the object 540 .

[0072] In step 610b, the operation may include determining the apparent intensity of the X-ray fluorescence radiation. For example, in the above embodiment, reference is made to Figure 5 , the primary radiation detector 510Ma determines the apparent intensity of the X-ray fluorescence radiation 545 .

[0073] In step 620a, the operation may include sending a control radiation beam from a radiation source. For example, in the above embodiment, referring to Figure 5 , the radiation source 520 sends a control radiation beam 525c from the radiation source 520 to the monitoring radiation detector 510Mo.

[0074] In step 620b, the operation may include determining a control intensity of the control radiation beam. For example, in the above embodiment, referring to Figure 5 , monitoring radiation detector 510Mo determines the control intensity of control radiation beam 525c.

[0075] In step 630, the operation may include determining a normalized intensity of the X-ray fluorescence radiation based on (a) the apparent intensity of the X-ray fluorescence radiation and (b) the controlled intensity of the control radiation beam. Figure 5 , the controller 530 determines the normalized intensity of the X-ray fluorescence radiation 545 based on (a) the apparent intensity of the X-ray fluorescence radiation 545 and (b) the controlled intensity of the control radiation beam 525c.

[0076] Other embodiments

[0077] The primary radiation detector does not face the radiation source

[0078] In one embodiment, referring to Figure 5 , the primary radiation detector 510Ma may not receive any radiation particles from the radiation source 520. Specifically, in one embodiment, the radiation detection system 500 may include a blocking device 550 that blocks all radiation particles from the radiation source 520 and aimed at the primary radiation detector 510Ma. In one embodiment, the blocking device 550 may close the radiation source 520 but allow the excitation radiation beam 525e from the radiation source 520 to reach the object 540 through the window 550w as shown.

[0079] In one embodiment, the blocking device 550 may contain a heavy metal, such as lead. As a result, all radiation particles from the radiation source 520 and aimed at the primary radiation detector 510Ma are blocked by the blocking device 550 from reaching the primary radiation detector 510Ma.

[0080] The relative positions of radiation sources, objects, and monitoring radiation detectors

[0081] In one embodiment, referring to Figure 5 , the relative positions of the radiation source 520, the object 540, and the monitoring radiation detector 510Mo can be such that no radiation particles from the radiation source 520 and aimed at the object 540 hit the monitoring radiation detector 510Mo. For example, in one embodiment, the radiation particles of the excitation radiation beam 525e are unlikely to hit the monitoring radiation detector 510Mo. Figure 5 shown.

[0082] Alternative Embodiments

[0083] Device for controlling the attenuation of a radiation beam

[0084] In the above embodiment, referring to Figure 5 , the monitoring radiation detector 510Mo directly measures the control intensity of the control radiation beam 525c. Alternatively, refer to Figure 7 , the monitoring radiation detector 510Mo can indirectly measure the control intensity of the control radiation beam 525c as follows.

[0085] First, in one embodiment, the attenuation device 710 can attenuate the control radiation beam 525c according to the attenuation ratio, thereby obtaining the attenuated control radiation beam 712. In one embodiment, the attenuation device 710 can be positioned between the radiation source 520 and the monitoring radiation detector 510Mo as shown in the figure. In one embodiment, the attenuation device 710 can include a metal film.

[0086] Then, in one embodiment, the monitoring radiation detector 510Mo may receive the attenuated control radiation beam 712 and measure the intensity of the attenuated control radiation beam 712 .

[0087] Then, in one embodiment, the controller 530 may calculate the control intensity of the control radiation beam 525c based on (A) the intensity of the attenuated control radiation beam 712 measured by the monitoring radiation detector 510Mo and (B) the attenuation ratio.

[0088] For example, assuming that the attenuation ratio is 0.5 and the intensity of the attenuated control radiation beam 712 measured by the monitoring radiation detector 510Mo is 100 units, then the control intensity of the control radiation beam 525c can be calculated as: 100 units / 0.5=200 units.

[0089] Although various aspects and embodiments have been disclosed herein, other aspects and embodiments will be apparent to those skilled in the art. The various aspects and embodiments disclosed herein are for purposes of illustration and are not intended to be limiting, with the true scope and spirit being indicated by the appended claims.

Claims

1. A system comprising a radiation source, the radiation source being configured to send an excitation radiation beam from the radiation source to an object, thereby causing X-ray fluorescence radiation to be emitted from the object, and, being configured to send a control radiation beam from the radiation source, in, The system is configured to determine an apparent intensity of the X-ray fluorescent radiation, determine a control intensity of the control radiation beam, and determine a normalized intensity of the X-ray fluorescent radiation based on the apparent intensity of the X-ray fluorescent radiation and the control intensity of the control radiation beam.

2. The system according to claim 1, wherein: The intensity of the excitation radiation beam is related to the intensity of the control radiation beam.

3. The system according to claim 2, wherein: The intensity of the excitation radiation beam is equal to the intensity of the control radiation beam.

4. The system according to claim 1, in, determining the apparent intensity of the X-ray fluorescence radiation and the control intensity of the control radiation beam for a first time point and a second time point, respectively, and The first time point is temporally related to the second time point.

5. The system according to claim 4, wherein: The first time point and the second time point are the same.

6. The system of claim 1, further comprising a primary radiation detector configured to measure the apparent intensity of the X-ray fluorescence radiation.

7. The system according to claim 6, wherein: The primary radiation detector does not receive any radiation particles from the radiation source.

8. The system of claim 7, further comprising a blocking device configured to prevent all radiation particles from the radiation source and aimed at the primary radiation detector from reaching the primary radiation detector.

9. The system of claim 1, further comprising a monitoring radiation detector configured to measure the control intensity of the control radiation beam.

10. The system according to claim 9, wherein: None of the radiation particles from the radiation source and aimed at the object strikes the monitoring radiation detector.

11. The system according to claim 9, wherein: The monitoring radiation detector is stationary relative to the radiation source.

12. The system of claim 1, further comprising: an attenuation device configured to attenuate the control radiation beam according to an attenuation ratio, thereby obtaining an attenuated control radiation beam; a monitoring radiation detector configured to measure an intensity of the attenuated control radiation beam; as well as A controller is configured to calculate the control intensity of the control radiation beam based on (A) the intensity of the attenuated control radiation beam and (B) the attenuation ratio.

13. The system of claim 1, wherein: The normalized intensity of the X-ray fluorescence radiation divided by the apparent intensity of the X-ray fluorescence radiation is equal to a predetermined base intensity of the control radiation beam divided by the control intensity of the control radiation beam.

14. The system according to claim 1, in, The excitation radiation beam comprises X-rays, and Wherein, the control radiation beam includes X-rays.

15. A method comprising: sending an excitation radiation beam from a radiation source to an object, thereby causing emission of X-ray fluorescence radiation from the object; transmitting a control radiation beam from said radiation source; determining an apparent intensity of the X-ray fluorescence radiation; determining a control intensity of the control radiation beam; as well as A normalized intensity of the X-ray fluorescence radiation is determined based on (a) the apparent intensity of the X-ray fluorescence radiation and (b) the control intensity of the control radiation beam.

16. The method according to claim 15, wherein: The intensity of the excitation radiation beam is related to the intensity of the control radiation beam.

17. The method according to claim 16, wherein: The intensity of the excitation radiation beam is equal to the intensity of the control radiation beam.

18. The method according to claim 15, in, determining the apparent intensity of the X-ray fluorescence radiation and the control intensity of the control radiation beam for a first time point and a second time point, respectively, and The first time point is temporally related to the second time point.

19. The method according to claim 18, wherein: The first time point and the second time point are the same.

20. The method according to claim 15, wherein: Said determining the apparent intensity of the X-ray fluorescence radiation comprises measuring the apparent intensity using a primary radiation detector.

21. The method according to claim 20, wherein: The primary radiation detector does not receive any radiation particles from the radiation source.

22. The method according to claim 21, wherein: All radiation particles from the radiation source and aimed at the primary radiation detector are blocked from reaching the primary radiation detector.

23. The method according to claim 15, wherein: The determining the control intensity of the control radiation beam comprises measuring the control intensity using a monitoring radiation detector.

24. The method according to claim 23, wherein: None of the radiation particles from the radiation source and aimed at the object strikes the monitoring radiation detector.

25. The method according to claim 23, wherein: The monitoring radiation detector is stationary relative to the radiation source.

26. The method of claim 15, wherein: Determining the control intensity of the control radiation beam comprises: causing the control radiation beam to attenuate according to an attenuation ratio, thereby obtaining an attenuated control radiation beam; measuring the intensity of the attenuated control radiation beam using a monitoring radiation detector; and The control intensity of the control radiation beam is calculated based on (A) the intensity of the attenuated control radiation beam and (B) the attenuation ratio.

27. The method of claim 15, wherein: The normalized intensity of the X-ray fluorescence radiation divided by the apparent intensity of the X-ray fluorescence radiation is equal to a predetermined base intensity of the control radiation beam divided by the control intensity of the control radiation beam.

28. The method according to claim 15, in, The excitation radiation beam comprises X-rays, and Wherein, the control radiation beam includes X-rays.