Aberration compensation device for optical system

Abstract

The invention relates to the technical field of aberration compensation, and discloses an aberration compensation device for an optical system, the aberration compensation device has a first direction, a second direction and a third direction which are vertically intersected pairwise, the aberration compensation device comprises two optical devices, the two optical devices are oppositely arranged along the third direction, and the curved surface profiles of the two optical devices are T (x, y); in the intersecting plane of the first direction and the second direction, the relative displacement distance of the two optical devices is delta l, the included angle between the relative displacement direction of the two optical devices and the first direction is alpha, the included angle between the relative position direction of the two optical devices and the second direction is beta, and cos2alpha + cos2beta = 1; the equivalent surface type of the two optical devices is # imgabs0 # imgabs1 #, so that aberration of different types and different amplitudes can be compensated, and meanwhile, the two optical devices are well compatible with an existing optical system.

Description

Technical Field

[0001] The present invention relates to the technical field of aberration compensation, and in particular to an aberration compensation device for an optical system. Background Art

[0002] At present, there is a widespread demand for aberration compensation in optical systems. Aberration compensation refers to the use of a series of technical means to reduce or eliminate the deviation caused by light passing through optical elements during the imaging process to improve the clarity and accuracy of the image.

[0003] There are two main methods for aberration compensation in the prior art. Method 1: Design a static optical element with a specific curved surface according to the aberration parameters in the optical system, and place the static optical element in the optical system to compensate for the original optical path. However, the shape of the curved surface for compensating aberrations will change with the change of the optical system, and optical devices with different curved surfaces are required for compensation. Method 2: Use a dynamic phase device for aberration compensation, but the phase continuity and efficiency of the optical device using this method are low, and the aberration compensation ability is limited.

[0004] Therefore, whether it is a static optical device or a dynamic phase device, it is difficult to compensate for aberrations of different types and magnitudes and achieve a good aberration compensation effect. At the same time, there is a problem of poor compatibility with existing optical systems. Summary of the invention

[0005] The technical problem to be solved by the present invention is that, whether it is a static optical device or a dynamic phase device, it is difficult to compensate for aberrations of different types and amplitudes and achieve a good aberration compensation effect, and there is also a problem of poor compatibility with existing optical systems.

[0006] In order to solve the above technical problems, the present invention provides a technical solution for an aberration compensation device for an optical system:

[0007] An aberration compensation device for an optical system, having a first direction, a second direction and a third direction that intersect each other perpendicularly, comprising two optical devices, the two optical devices are arranged opposite to each other along the third direction, and the curved surface profiles of the two optical devices are: T(x, y);

[0008] In the intersection plane of the first direction and the second direction, the relative displacement distance of the two optical devices is Δl, the angle between the relative displacement direction of the two optical devices and the first direction is α, the angle between the relative position direction of the two optical devices and the second direction is β, and cos 2 α+cos 2 β = 1;

[0009] The equivalent surface shape of the two optical devices is: W(x,y);

[0010] T(x+Δx,y+Δy)-T(x,y)=dT=W(x,y)

[0011] Substituting (Δx, Δy) = (Δl·cosα, Δl·cosβ), we get

[0012]

[0013] Furthermore, when compensating for astigmatism and defocus of the optical system, the curved surface of the two optical devices is T(x, y) = A(x 3 ,y 3 );

[0014] The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 2 +cosβ·y 2 )·Δl.

[0015] Furthermore, when compensating for the linear coma of the optical system, the curved surface of the two optical devices is: T(x, y) = x 4 +y 4 ;

[0016] The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 3 +cosβ·y 3 )·Δl.

[0017] Furthermore, the two optical devices are optical lenses respectively.

[0018] Furthermore, the two optical devices are optical diffraction optical elements respectively.

[0019] Furthermore, the two optical devices are optical meta-optical elements respectively.

[0020] Furthermore, the two optical devices are respectively optical holographic optical elements.

[0021] Furthermore, the two optical devices are respectively optical free-form surface reflectors.

[0022] Compared with the prior art, the aberration compensation device for an optical system of the present invention has the following beneficial effects: the aberration compensation device for an optical system selects the relative displacement vector of two optical devices. The relative displacement vector It combines the relative displacement distance Δl and the relative displacement direction (cosα, cosβ) of the two optical devices. It is based on the fact that the aberration has amplitude and type and that when the two optical devices slide relative to each other, the equivalent surface shape W(x, y) of the two optical devices is determined by the curved surface shape T(x, y) and the relative displacement direction (cosα, cosβ) and the relative displacement distance Δl. Combined with the formula

[0023] It can be obtained that the relative displacement distance Δl determines the amplitude of the equivalent surface W(x,y), and the relative displacement direction (cosα, cosβ) will also affect the surface shape of the equivalent surface W(x,y). Let W(x,y) be the expression of the system aberration to be corrected, and the surface shape T(x,y) of the optical device can be obtained.

[0024] When two optical devices slide relative to each other, the equivalent surface shape W(x, y) of the two optical devices is the directional derivative of the curved surface shape T(x, y) along the relative displacement direction (cosα, cosβ), and its size is proportional to the relative displacement distance Δl of the two optical devices. By designing the surface shape of the optical devices so that the equivalent surface shape of the two optical devices when sliding relative to each other is consistent with the aberration expression to be compensated, the corresponding aberration of the optical system can be compensated.

[0025] When the aberration type of the optical system remains unchanged but the aberration amplitude changes, adaptation can be performed by changing the relative displacement distance Δl; and different types of aberrations can be adapted by changing the relative displacement direction (cosα, cosβ). Therefore, the aberration compensation device for the optical system can effectively compensate for aberrations of different types and amplitudes, and is well compatible with the existing optical system. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 is a schematic plan view of two optical devices used in an aberration compensation device for an optical system in an embodiment of the present invention;

[0027] Figure 2 is a side view schematic diagram of two optical devices in another embodiment 1 of the aberration compensation device for an optical system of the present invention;

[0028] Figure 3 is a side view schematic diagram of two optical devices in another embodiment 2 of the aberration compensation device for an optical system of the present invention;

[0029] In the figure: 1-optical device, 10-curved surface, X-first direction, Y-second direction, Z-third direction. DETAILED DESCRIPTION

[0030] The specific implementation of the present invention is further described in detail below in conjunction with the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0031] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise" and the like used in the present invention to indicate the orientation or position relationship are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0032] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0033] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0034] like Figure 1 As shown, an aberration compensation device for an optical system according to an embodiment of the present invention has a first direction X, a second direction Y and a third direction Z that intersect each other perpendicularly, and includes two optical devices 1. The two optical devices 1 are arranged relatively along the third direction Z, and the curved surface shapes of the two optical devices 1 are: T(x, y); specifically, the curved surface shape refers to the surface shape of the curved surface 10 of the optical device 1.

[0035] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and 2 2

[0036] cosα+cosβ=1.

[0037] The equivalent surface shapes of the two optical devices 1 are: W(x,y);

[0038] T(x+Δx,y+Δy)-T(x,y)=dT=W(x,y)

[0039] Substituting (Δx, Δy) = (Δl·cosα, Δl·cosβ), we get

[0040]

[0041] The aberration compensation device for an optical system selects the relative displacement vectors of two optical devices 1 The relative displacement vector The relative displacement distance Δl and the relative displacement direction (cosα, cosβ) of the two optical devices 1 are combined. It is based on the fact that the aberration has amplitude and type and that when the two optical devices 1 slide relative to each other, the equivalent surface shape W(x, y) of the two optical devices 1 is determined by the curved surface shape T(x, y) and the relative displacement direction (cosα, cosβ) and the relative displacement distance Δl. Combined with the formula

[0042] It can be obtained that the relative displacement distance Δl determines the amplitude of the equivalent surface W(x,y), and the relative displacement direction (cosα, cosβ) will also affect the surface shape of the equivalent surface W(x,y). Let W(x,y) be the expression of the system aberration to be corrected, and the surface shape T(x,y) of the optical device 1 can be obtained.

[0043] When the two optical devices 1 slide relative to each other, the equivalent surface shape W(x, y) of the two optical devices 1 is the directional derivative of the curved surface shape T(x, y) along the relative displacement direction (cosα, cosβ), and its size is proportional to the relative displacement distance Δl of the two optical devices 1. By designing the surface shape of the optical device 1 so that the equivalent surface shape of the two optical devices 1 when sliding relative to each other is consistent with the aberration expression to be compensated, the corresponding aberration of the optical system can be compensated.

[0044] When the aberration type of the optical system remains unchanged but the aberration amplitude changes, adaptation can be performed by changing the relative displacement distance Δl; and different types of aberrations can be adapted by changing the relative displacement direction (cosα, cosβ). Therefore, the aberration compensation device for the optical system can effectively compensate for aberrations of different types and amplitudes, and is well compatible with the existing optical system.

[0045] Another embodiment of the aberration compensation device for an optical system of the present invention is as follows: Figure 2As shown, the aberration compensation device for the optical system has a first direction X, a second direction Y and a third direction Z that intersect each other perpendicularly, and includes two optical devices 1. The two optical devices 1 are arranged relatively along the third direction Z, and the curved surface shapes of the two optical devices 1 are: T(x, y); specifically, the curved surface shape refers to the surface shape of the curved surface 10 of the optical device 1.

[0046] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and cos 2 α+cos 2 β=1. When compensating for astigmatism and defocus of the optical system, based on the above specific embodiment, the curved surface of the two optical devices 1 is T(x, y)=A(x 3 +y 3 ); The equivalent surface shape of the two optical devices 1 is: W(x,y)=(cosα·x 2 +cosβ·y 2 )·Δl.

[0047] At this time, the aberration compensation device for the optical system can compensate for the astigmatism in the first direction X and the second direction Y by changing the relative displacement direction (cosα, cosβ), and can also compensate for the defocus aberration, and can compensate for astigmatism and defocus of any magnitude by changing the relative displacement distance Δl.

[0048] Another embodiment 2 of the aberration compensation device for an optical system of the present invention is as follows: Figure 3 As shown, the aberration compensation device for the optical system has a first direction X, a second direction Y and a third direction Z that intersect each other perpendicularly, and includes two optical devices 1. The two optical devices 1 are arranged relatively along the third direction Z, and the curved surface shapes of the two optical devices 1 are: T(x, y); specifically, the curved surface shape refers to the surface shape of the curved surface 10 of the optical device 1.

[0049] In the intersection plane of the first direction X and the second direction Y, the relative displacement distance of the two optical devices 1 is Δl, the angle between the relative displacement direction of the two optical devices 1 and the first direction X is α, the angle between the relative position direction of the two optical devices 1 and the second direction Y is β, and cos 2 α+cos 2 β=1. When compensating the linear coma of the optical system, based on the above specific embodiment, the curved surface of the two optical devices 1 is: T(x, y)=x 4 +y 4 ; The equivalent surface shape of the two optical devices 1 is: W(x,y)=(cosα·x3 +cosβ·y 3 )·Δl.

[0050] At this time, the aberration compensation device for the optical system compensates for the linear coma and other third-order aberrations in the first direction X and the second direction Y by changing the relative displacement direction (cosα, cosβ), and can compensate for the linear coma and other third-order aberrations of any amplitude by changing the relative displacement distance Δl.

[0051] As a further preferred embodiment, the two optical devices 1 are optical lenses respectively; or, the two optical devices 1 are optical diffraction optical elements respectively; or, the two optical devices 1 are optical meta-optical elements respectively; or, the two optical devices 1 are optical holographic optical elements respectively; or, the two optical devices 1 are optical free-form surface mirrors respectively.

[0052] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and substitutions can be made without departing from the technical principles of the present invention. These improvements and substitutions should also be regarded as the scope of protection of the present invention.

Claims

1. An aberration compensation device for an optical system, having a first direction, a second direction and a third direction which are perpendicular to each other, characterized in that: Comprising two optical devices, the two optical devices are arranged opposite to each other along the third direction, and the curved surface profiles of the two optical devices are: T(x, y); In the intersection plane of the first direction and the second direction, the relative displacement distance of the two optical devices is Δl, the angle between the relative displacement direction of the two optical devices and the first direction is α, the angle between the relative position direction of the two optical devices and the second direction is β, and cos 2 α+cos 2 β = 1; The equivalent surface shape of the two optical devices is: W(x,y); T(x+Δx,y+Δy)-T(x,y)=dT=W(x,y) Substituting (Δx, Δy) = (Δl·cosα, Δl·cosβ), we get 2. The aberration compensation device for an optical system according to claim 1, characterized in that: When compensating for astigmatism and defocus of the optical system, the curved surface of the two optical devices is T(x, y) = A(x 3 +y 3 ); The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 2 +cosβ·y 2 )·Δl.

3. The aberration compensation device for an optical system according to claim 1, characterized in that: When compensating for the linear coma of the optical system, the curved surface of the two optical devices is: T(x, y) = x 4 +y 4 ; The equivalent surface shape of the two optical devices is: W(x,y)=(cosα·x 3 +cosβ·y 3 )·Δl.

4. The aberration compensation device for an optical system according to claim 1, characterized in that: The two optical devices are optical lenses respectively.

5. The aberration compensation device for an optical system according to claim 1, characterized in that: The two optical devices are respectively diffractive optical elements.

6. The aberration compensation device for an optical system according to claim 1, characterized in that: The two optical devices are optical meta-optical elements respectively.

7. The aberration compensation device for an optical system according to claim 1, characterized in that: The two optical devices are respectively optical holographic optical elements.

8. The aberration compensation device for an optical system according to claim 1, characterized in that: The two optical devices are respectively optical free-form surface reflectors.

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