A fixing fixture for mask production

Abstract

This invention relates to the field of photomask production technology and discloses a photomask production fixture, including a fixture base for loading photomask bodies. By activating an air pump, high-pressure air enters through the bottom of a fixing cylinder. Simultaneously, with the assistance of a cleaning component, multiple fixture bodies can be raised. A sleeve rotates and blows air onto the top of the fixture base, thereby removing dust. The self-cleaning function ensures that the photomask fixture is effectively cleaned after each use, helping to maintain the cleanliness of the photomask and preventing contaminants from polluting it. The self-cleaning function reduces additional cleaning steps and costs. Because the fixture can clean itself, there is no need to use additional cleaning agents or equipment to remove contaminants from the fixture. This simplifies the cleaning process, reduces cleaning costs, and avoids potential damage to the photomask caused by improper cleaning.

Description

Technical Field

[0001] This invention relates to the field of photomask production technology, specifically to a fixing fixture for photomask production. Background Technology

[0002] A photomask, also known as a lithography mask, is a pattern master used in the photolithography process of microelectronics manufacturing. Its function is to transfer the designer's circuit pattern onto the substrate or wafer of downstream industries through exposure, thereby enabling mass production. As the benchmark and blueprint for photolithographic pattern replication, the precision and quality level of the photomask directly affect the yield rate of the final downstream products. A photomask mainly consists of a substrate, a light-shielding layer, and a protective film. The substrate accounts for up to 90% of the direct raw material cost and is the main component of the photomask. Substrates are divided into resin substrates and glass substrates, with quartz substrates and soda ash substrates being the mainstream products. The light-shielding layer is divided into latex and rigid light-shielding films, used to form the mask pattern on the substrate. The protective film protects the surface of the photomask from contamination by dust, dirt, particles, etc.

[0003] The patent application with publication number CN220543252U includes multiple fixed drying clamps for clamping and fixing a mask plate and drying it after cleaning. An adjusting connecting mechanism is located on one side of the multiple fixed drying clamps and is used to adjust the spacing between them and fix the adjusted spacing. This utility model, through the fixed drying clamps, enables the equipment to quickly dry the cleaned mask plate without disassembling it during use. This reduces the need for self-drying and eliminates the need to disassemble the mask plate during drying, making the equipment simpler to use, increasing its convenience, achieving good results, and enhancing its applicability and practicality.

[0004] In the prior art, including the aforementioned patents, the photomask needs to be held by a fixture during manufacturing. However, the presence of particulate contaminants on the surface of the fixture can damage the photomask. As a key tool for pattern transfer, the cleanliness of the photomask is crucial. Fixtures are not easy to clean themselves, and residues on the fixtures can contaminate the photomask. These residues include airborne particles, organic residues, metal ions, etc., which can affect the light transmittance and pattern accuracy of the photomask, thereby causing defects in the photolithography process, such as changes in line width, pattern distortion, or missing parts. Summary of the Invention

[0005] The problem this invention aims to solve is that existing mask holders are difficult to automatically clean the dust on their tops.

[0006] To solve the above technical problems, the technical solution of the present invention is: a fixing fixture for mask production, including a fixture seat for loading the mask body, a cleaning component is provided inside the fixture seat, a clamping component is provided on the fixture seat, and the clamping component is located above the cleaning component;

[0007] The cleaning assembly includes a fixed cylinder fixed to the inner wall of a clamping seat, with the bottom of the fixed cylinder extending below the inner wall of the clamping seat. A reciprocating cylinder is slidably connected to the arc-shaped outer wall of the fixed cylinder, and a sleeve is rotatably connected to the reciprocating cylinder. A guide cylinder is fixedly connected to the inner wall of the clamping seat, and the guide cylinder is sleeved on the outer wall of the sleeve. Multiple guide blocks are fixedly connected to the arc-shaped outer wall of the sleeve, and each guide block is slidably connected to the inner wall of the guide cylinder. The inner wall of the guide cylinder has multiple main guides that match the multiple guide blocks. The fixture seat has a sliding top cylinder inside, which is located above the guide cylinder. A snap-fit ​​block is fixedly connected to the top of the sleeve. A snap-fit ​​groove matching the snap-fit ​​block is opened at the bottom of the top cylinder. Multiple air-blocking plates are fixedly installed on the inner wall of the sleeve. Multiple internal air outlets are opened on the periphery of the sleeve. Multiple external air outlets matching the multiple internal air outlets are opened on the periphery of the top cylinder. An air pump is installed inside the fixture seat, and the bottom of the fixed cylinder is connected to the output end of the air pump through an air guide pipe.

[0008] Multiple connecting rods are rotatably mounted on the arc-shaped outer wall of the fixed cylinder. Each connecting rod is rotatably connected to a slide block at its top. Each slide block has two side guide bars that are fixedly connected to the clamping seat on both sides. Each slide block is slidably connected to a clamping seat at its top, and the clamping seat is slidably connected to the clamping seat. An inclined bar is fixedly connected to one side of each clamping seat on the clamping seat.

[0009] Preferably, the bottom end of the sleeve is provided with an annular groove that matches the reciprocating cylinder, a plurality of guide blocks are distributed in an annular array on the periphery of the sleeve, a plurality of main guide grooves are distributed in an annular array on the arc-shaped inner wall of the guide cylinder, and a plurality of air baffles are distributed in an annular array on the inner wall of the sleeve.

[0010] Preferably, each of the total guide grooves includes a straight slide groove formed in the inner wall of the guide cylinder, and the inner wall of the guide cylinder is provided with an inclined slide groove that communicates with the straight slide groove.

[0011] Preferably, the clamping seat has an ejection hole that matches the top cylinder, and the top cylinder slides on the inner wall of the ejection hole, with the top cylinder located at the center of the multiple clamping seats.

[0012] Preferably, the multiple connecting rods are arranged in a ring array on the arc-shaped outer wall of the fixed cylinder, each of the side guide bars is provided with a movable groove that matches the slide, and each of the clamping seats is provided with a telescopic groove that matches the slide at the bottom.

[0013] Preferably, each of the clamping seats is fixed with a guide rod, the clamping seat is provided with a transverse guide groove that matches the multiple guide rods, and each of the inclined bars is provided with an inclined groove that matches the guide rod.

[0014] Preferably, each of the clamping seats has a clamp body that slides on it, a telescopic rod is fixedly connected to the top of the clamping seat, one end of the telescopic rod is fixedly connected to the clamp body, and a rubber seat that contacts the top of the mask body is fixed to the bottom of each clamp body.

[0015] Preferably, a mounting bracket is fixedly provided at the bottom of the clamp seat, and the air pump is mounted on the mounting bracket.

[0016] Compared with the prior art, the technical solution of the present invention has the following advantages:

[0017] (1) By starting the air pump, the high-pressure air can enter through the bottom of the fixed cylinder. At the same time, with the cooperation of the cleaning component, multiple clamp bodies can be raised. Meanwhile, the sleeve can rotate and blow air onto the top of the clamp seat, thereby achieving the effect of removing dust. The self-cleaning function can ensure that the mask plate fixing clamp can be effectively cleaned after each use. This helps to maintain the cleanliness of the mask plate and prevent contaminants from contaminating the mask plate. The self-cleaning function of the mask plate fixing clamp can reduce additional cleaning steps and costs. Since the clamp can clean itself, there is no need to use additional cleaning agents or equipment to remove contaminants on the clamp. This not only simplifies the cleaning process but also reduces cleaning costs and avoids potential damage to the mask plate caused by improper cleaning.

[0018] (2) By starting the air pump, the air pump draws air from the inside of the fixed cylinder. With the cooperation of the clamping components, multiple clamping seats slide towards the mask body at the same time. When the telescopic rod contacts the mask body, it can push the mask body to fit tightly against the top of the clamping seat. When the mask body contacts the clamping body, each clamping body can slide on the top of the clamping seat and compress the telescopic rod, thus achieving the function of clamping the mask body. The automatic clamping system can quickly and accurately complete the clamping work of the mask plate without the need for manual adjustment by the operator, thereby greatly shortening the operation time. This not only improves work efficiency, but also makes the production line run more smoothly. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the present invention;

[0020] Figure 2 This is a partial structural diagram of the fixing clamp of the present invention;

[0021] Figure 3 This is a schematic diagram of the capping cylinder structure of the present invention;

[0022] Figure 4 This is a schematic diagram of the cross-sectional structure of the clamp seat of the present invention;

[0023] Figure 5 For the present invention Figure 4 A magnified view of part A in the image;

[0024] Figure 6 This is a schematic diagram of the clamping component structure of the present invention;

[0025] Figure 7 This is a schematic diagram of the guide cylinder structure of the present invention;

[0026] Figure 8 This is a schematic diagram of the cross-sectional structure of the capping cylinder of the present invention;

[0027] Figure 9 For the present invention Figure 8 A magnified view of part B in the image;

[0028] Figure 10 This is a bottom view of the guide tube of the present invention;

[0029] Figure 11 This is a schematic diagram of the connection structure between the sleeve and the guide block.

[0030] In the diagram: 1. Fixture base; 11. Mask version body; 12. Mounting bracket;

[0031] 2. Cleaning components; 21. Fixed cylinder; 22. Reciprocating cylinder; 23. Sleeve; 231. Air baffle; 232. Snap-fit ​​block; 24. Guide block; 241. Main guide groove; 25. Guide cylinder; 26. Top cap cylinder; 261. Snap-fit ​​groove;

[0032] 3. Clamping assembly; 31. Connecting rotating rod; 32. Slide; 321. Side guide bar; 33. Clamping seat; 331. Guide rod; 332. Transverse guide groove; 333. Inclined bar; 34. Clamping body; 35. Telescopic rod; 36. Rubber seat. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are within the scope of protection of this disclosure.

[0034] Unless otherwise defined, the technical or scientific terms used in this disclosure shall have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms "comprising" or "including," and similar terms used in this disclosure, mean that an element or object preceding the term encompasses the elements or objects listed following the term and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but may also include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; these relative positional relationships may change accordingly when the absolute position of the described objects changes.

[0035] like Figures 1 to 11 As shown, the present invention provides a fixing fixture for mask production, including a fixture base 1 for loading a mask body 11, a cleaning component 2 is provided inside the fixture base 1, a clamping component 3 is provided on the fixture base 1, and the clamping component 3 is located above the cleaning component 2.

[0036] The cleaning component 2 includes a fixed cylinder 21 fixed to the inner wall of the clamp base 1, with the bottom of the fixed cylinder 21 extending below the inner wall of the clamp base 1. A reciprocating cylinder 22 is slidably connected to the arc-shaped outer wall of the fixed cylinder 21, and a sleeve 23 is rotatably connected to the reciprocating cylinder 22. A guide cylinder 25 is fixedly connected to the inner wall of the clamp base 1, and the guide cylinder 25 is sleeved on the outer wall of the sleeve 23. Multiple guide blocks 24 are fixedly connected to the arc-shaped outer wall of the sleeve 23, and each guide block 24 is slidably connected to the inner wall of the guide cylinder 25. The inner wall of the guide cylinder 25 has multiple slots that match the multiple guide blocks 24. The guide groove 241, the clamp seat 1 has a sliding top cylinder 26 inside, and the top cylinder 26 is located above the guide cylinder 25. The top of the sleeve 23 is fixedly connected to the snap block 232. The bottom of the top cylinder 26 is provided with a snap groove 261 that matches the snap block 232. Multiple air blocking plates 231 are fixedly provided on the inner wall of the sleeve 23. Multiple internal air outlets are provided on the periphery of the sleeve 23. Multiple external air outlets are provided on the periphery of the top cylinder 26 that match the multiple internal air outlets. An air pump is installed inside the clamp seat 1, and the bottom of the fixed cylinder 21 is connected to the output end of the air pump through an air guide pipe.

[0037] Multiple connecting rods 31 are rotatably mounted on the arc-shaped outer wall of the fixed cylinder 21. Each connecting rod 31 is rotatably connected to a slide block 32 at its top. Each slide block 32 has two side guide bars 321 that are fixedly connected to the clamp seat 1 on both sides. Each slide block 32 is slidably connected to a clamping seat 33 at its top, and the clamping seat 33 is slidably connected to the clamp seat 1. An inclined bar 333 is fixedly connected to one side of each clamping seat 33 on the clamp seat 1.

[0038] The bottom end of the sleeve 23 is provided with an annular groove that matches the reciprocating cylinder 22. Multiple guide blocks 24 are arranged in an annular array around the sleeve 23. Multiple guide grooves 241 are arranged in an annular array on the arc-shaped inner wall of the guide cylinder 25. Multiple air baffles 231 are arranged in an annular array on the inner wall of the sleeve 23.

[0039] Each general guide groove 241 includes a straight slide groove formed on the inner wall of the guide cylinder 25, and an inclined slide groove connected to the straight slide groove is formed on the inner wall of the guide cylinder 25.

[0040] The clamp seat 1 has an ejection hole that matches the top cylinder 26, and the top cylinder 26 slides on the inner wall of the ejection hole. The top cylinder 26 is located at the center of multiple clamp seats 33.

[0041] Multiple connecting rods 31 are arranged in a ring array on the arc-shaped outer wall of the fixed cylinder 21. Each side guide bar 321 has a movable groove that matches the slide 32, and each clamping seat 33 has a telescopic groove that matches the slide 32 at its bottom.

[0042] Each clamping seat 33 is fixed with a guide rod 331, and the clamping seat 1 is provided with a transverse guide groove 332 that matches the multiple guide rods 331. Each inclined bar 333 is provided with an inclined groove that matches the guide rod 331.

[0043] Each clamping seat 33 has a slidable clamping body 34. A telescopic rod 35 is fixedly connected to the top of the clamping seat 33. One end of the telescopic rod 35 is fixedly connected to the clamping body 34. Each clamping body 34 has a rubber seat 36 fixed at the bottom, which contacts the top of the mask version body 11.

[0044] A mounting bracket 12 is fixedly installed at the bottom of the clamp base 1, and the air pump is installed on the mounting bracket 12.

[0045] When the mask version 11 is released, the air pump can be started, and high-pressure air can enter through the bottom of the fixed cylinder 21 via the air guide pipe. At this time, the air pressure inside the sleeve 23 and the reciprocating cylinder 22 increases, which pushes the reciprocating cylinder 22 to slide against the outer wall of the fixed cylinder 21 and rise under the action of air pressure, and then it is fixed to the sleeve 23. The multiple guide blocks 24 on the outer wall slide in the multiple straight grooves respectively, and the sleeve 23 can rise simultaneously with the reciprocating cylinder 22.

[0046] During this process, the raising of the sleeve 23 can drive the connecting rod 31, which is rotatably connected to it, to rotate around the position connected to the slide 32. This can push multiple slides 32 to slide inside multiple sets of side guide bars 321 respectively, while driving the clamping seat 33, which is slidably connected to the slide 32, to move. The guide rod 331, which is fixed on the clamping seat 33, can slide inside the transverse guide groove 332, thereby driving multiple clamp bodies 34 to separate from the mask version body 11. At this time, the mask version body 11 can be taken out.

[0047] When the multiple guide blocks 24 slide to the top of the straight slide groove, the sleeve 23 can be inserted into the top cap 26. The locking block 232 fixed to the top of the sleeve 23 can engage with the locking groove 261 at the bottom of the top cap 26. At this time, the multiple internal air outlets on the periphery of the sleeve 23 can cooperate with the external air outlets on the periphery of the top cap 26. With the continuous injection of high-pressure air, the sleeve 23 pushes the top cap 26 to slide inside the clamp seat 1 and rise. Simultaneously, the multiple guide blocks 24 fixed to the outer wall of the sleeve 23 can enter the inclined slide groove from the straight slide groove. At this time, each guide block 24 slides along the inclined slide groove, pushing the sleeve 23 to rotate around the connection point with the reciprocating cylinder 22. Because the locking block 232 engages with the locking groove 261, the sleeve... The rotation of the sleeve 23 directly drives the top sleeve 26 to rotate synchronously. When the inner air outlet on the sleeve 23 rises above the clamp seat 1, the high-pressure air inside the sleeve 23 can be discharged through the inner air outlet. At this time, the high-pressure air inside the sleeve 23 can contact multiple air baffles 231, which can push the sleeve 23 to slide upward continuously. At the same time, the sleeve 23 can rotate to blow air onto the top of the clamp seat 1, thereby cleaning the dust on the clamp seat 1. Meanwhile, the guide rod 331 fixed on the clamp seat 33 can slide from the inside of the transverse guide groove 332 to the inside of the inclined groove. At this time, multiple clamp bodies 34 can be separated from the clamp seat 1 at the same time, which can prevent the clamp seat 33 from rising to blow air onto the top of the clamp seat 1, causing dust to remain on the clamp body 34.

[0048] When it is necessary to clamp the mask version 11, the mask version 11 can be placed on the top of the clamp seat 1, and then the air pump can be started to evacuate the air inside the fixed cylinder 21. At this time, the sleeve 23 can slide downward under the action of the capping cylinder 26 and its own gravity. When the capping cylinder 26 is completely inside the top outlet, a negative pressure is generated inside the sleeve 23, which can drive the reciprocating cylinder 22 to slide downward. With the cooperation of the clamping assembly 3, multiple clamping seats 33 slide towards the mask version 11 at the same time. When the telescopic rod 35 contacts the mask version 11, it can push the mask version 11 to be tightly attached to the top of the clamp seat 1. When the mask version 11 contacts the clamp body 34, each clamp body 34 can slide on the top of the clamping seat 33 and compress the telescopic rod 35, thereby achieving the function of clamping the mask version 11.

[0049] The working principle and usage process of this invention are as follows: When the mask version body 11 is loosened, the air pump can be started to allow high-pressure air to enter through the bottom end of the fixed cylinder 21. At the same time, with the cooperation of the cleaning component 2, multiple clamp bodies 34 can be separated from the mask version body 11. Simultaneously, the sleeve 23 can be raised, which in turn pushes the top capping cylinder 26 to rise. At this time, the mask version body 11 can be removed. When the guide block 24 slides into the inclined groove, multiple clamp bodies 34 can be raised, and the sleeve 23 can drive the top capping cylinder 26 to rise to the top of the clamp seat 1. At this time, the sleeve 23 can rotate and blow air onto the top of the clamp seat 1, thereby achieving the function of removing dust.

[0050] The above embodiments are merely exemplary embodiments of the present invention and are not intended to limit the present invention. The scope of protection of the present invention is defined by the claims. Those skilled in the art can make various modifications or equivalent substitutions to the present invention within its spirit and scope of protection, and such modifications or equivalent substitutions should also be considered to fall within the scope of protection of the present invention.

Claims

1. A fixing fixture for mask production, comprising a fixture base (1) for loading a mask body (11), characterized in that: The clamp base (1) is provided with a cleaning component (2) inside, and a clamping component (3) is provided on the clamp base (1), and the clamping component (3) is located above the cleaning component (2); The cleaning component (2) includes a fixed cylinder (21) fixed to the inner wall of the clamp seat (1), and the bottom of the fixed cylinder (21) extends from the inner wall of the clamp seat (1) to its lower part. A reciprocating cylinder (22) is slidably connected to the arc-shaped outer wall of the fixed cylinder (21), and a sleeve (23) is rotatably connected to the reciprocating cylinder (22). A guide cylinder (25) is fixedly connected to the inner wall of the clamp seat (1), and the guide cylinder (25) is sleeved on the outer wall of the sleeve (23). A plurality of guide blocks (24) are fixedly connected to the arc-shaped outer wall of the sleeve (23), and each guide block (24) is slidably connected to the inner wall of the guide cylinder (25). The inner wall of the guide cylinder (25) has multiple openings that match the plurality of guide blocks (24). A guide groove (241) is provided. A top cylinder (26) slides inside the fixture seat (1) and the top cylinder (26) is located above the guide cylinder (25). A snap-fit ​​block (232) is fixedly connected to the top of the sleeve (23). A snap-fit ​​groove (261) matching the snap-fit ​​block (232) is opened at the bottom of the top cylinder (26). Multiple air-blocking plates (231) are fixedly provided on the inner wall of the sleeve (23). Multiple internal air outlets are opened on the periphery of the sleeve (23). Multiple external air outlets matching the multiple internal air outlets are opened on the periphery of the top cylinder (26). An air pump is installed inside the fixture seat (1), and the bottom of the fixed cylinder (21) is connected to the output end of the air pump through an air guide pipe. The reciprocating cylinder (22) has multiple connecting rods (31) rotating on its arc-shaped outer wall. Each connecting rod (31) is rotatably connected to a slide (32) at its top. Each slide (32) has two side guide strips (321) that are fixedly connected to the clamp seat (1) on both sides. Each slide (32) has a clamping seat (33) slidably connected to its top. The clamping seat (33) is slidably connected to the clamp seat (1). An inclined strip (333) is fixedly connected to one side of each clamping seat (33) on the clamp seat (1). Each of the clamping seats (33) is fixed with a guide rod (331), and the clamping seat (1) is provided with a transverse guide groove (332) that matches the multiple guide rods (331). Each of the inclined bars (333) is provided with an inclined groove that matches the guide rod (331).

2. The photomask production fixture according to claim 1, characterized in that: The bottom end of the sleeve (23) is provided with an annular groove that matches the reciprocating cylinder (22). Multiple guide blocks (24) are arranged in an annular array on the periphery of the sleeve (23). Multiple total guide grooves (241) are arranged in an annular array on the arc-shaped inner wall of the guide cylinder (25). Multiple air baffles (231) are arranged in an annular array on the inner wall of the sleeve (23).

3. The photomask production fixture according to claim 1, characterized in that: Each of the total guide grooves (241) includes a straight slide groove formed on the inner wall of the guide cylinder (25), and the inner wall of the guide cylinder (25) is provided with an inclined slide groove that communicates with the straight slide groove.

4. A photomask production fixture according to claim 1, characterized in that: The clamp seat (1) has an ejection hole that matches the top cylinder (26), and the top cylinder (26) slides on the inner wall of the ejection hole. The top cylinder (26) is located at the center of multiple clamp seats (33).

5. A photomask production fixture according to claim 1, characterized in that: Multiple connecting rods (31) are arranged in a ring array on the arc-shaped outer wall of the reciprocating cylinder (22). Each side guide bar (321) has a movable groove that matches the slide (32), and each clamping seat (33) has a telescopic groove that matches the slide (32) at its bottom.

6. A photomask production fixture according to claim 1, characterized in that: Each of the clamping seats (33) has a clamp body (34) sliding on it. A telescopic rod (35) is fixedly connected to the top of the clamping seat (33). One end of the telescopic rod (35) is fixedly connected to the clamp body (34). Each of the clamping bodies (34) has a rubber seat (36) fixed at the bottom end that contacts the top of the mask version body (11).

7. A photomask production fixture according to claim 1, characterized in that: The bottom end of the clamp seat (1) is fixedly provided with a mounting frame (12), and the air pump is installed on the mounting frame (12).

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