Robot, system, control method, and computer program product

Abstract

A robot, a system, a control method, and a computer program product. The robot is arranged in a frame body, and the frame body is provided with a front surface wall which is provided with a plurality of opening parts used for entering a box for storing wafers; and a rear wall that faces the front wall and has an opening, the robot including: a first movable part; a second movable part having a third arm and a hand part; an information storage unit that stores coordinated operation-related information; a coordinated operation selection unit that selects, on the basis of the position of the object to be entered by the hand and the coordinated operation-related information stored in the information storage unit, whether the hand is entered into the object to be entered by the coordinated operation of the third arm and the hand, or the hand is entered into the object to be entered by the coordinated operation of the third arm, the hand, and the first movable unit; and a control unit that controls the first movable unit and the second movable unit so as to cause the hand to enter the entry target in a state in which the hand is parallel to the horizontal plane by means of the coordinated operation of the robot selected by the coordinated operation selection unit.

Description

Technical Field

[0001] The present invention relates to a robot, a system, a control method and a computer program product. Background Art

[0002] Patent Document 1 describes a transfer system, a robot, and a method for controlling the robot that enable efficient transfer without increasing costs.

[0003] Patent Document 1: Japanese Patent No. 6492271 Summary of the invention

[0004] According to one embodiment of the present invention, there is provided a robot, which is arranged in a frame, and the frame has: a front wall having a plurality of openings for entering a box for storing wafers; and a back wall, which is opposite to the front wall and has an opening. The robot may have a first base. The robot may have a first movable part, which has a first arm and a second arm, the base end side of the first arm is connected to the first base in such a manner that the first arm can rotate in a vertical plane around a first rotation axis, and the base end side of the second arm is connected to the tip side of the first arm in such a manner that the second arm can rotate in a vertical plane around a second rotation axis. The robot may include a second movable part, the second movable part having a second base, a third arm, and a hand, the base end side of the second base is connected to the tip side of the second arm in such a manner that the second base can rotate in a vertical plane around a third rotation axis, the base end side of the third arm is connected to the tip side of the second base in such a manner that the third arm can rotate around a fourth rotation axis, the base end side of the hand is connected to the tip side of the third arm in such a manner that the hand can rotate around a fifth rotation axis, and the hand holds the wafer. The robot may include an information storage unit that stores coordinated action related information that associates the positions of the plurality of openings of the front wall and the positions of the openings of the back wall, and the types of coordinated actions of the robot when the hand enters the positions of the plurality of openings of the front wall and the positions of the openings of the back wall. The robot may include a coordinated action selection unit that selects whether to make the hand enter the entry object through a coordinated action of the third arm and the hand, or to make the hand enter the entry object through a coordinated action of the third arm, the hand, and the first movable unit, based on the position of the entry object that the hand enters and the coordinated action related information stored in the information storage unit. The robot may include a control unit that controls the first movable unit and the second movable unit in such a manner that the hand enters the entry object in a state where the hand is parallel to a horizontal plane through the coordinated action of the robot selected by the coordinated action selection unit.

[0005] In the robot, when the hand is caused to enter each of the plurality of openings of the front wall, the coordinated action selection unit may select to cause the hand to enter the entry object through the coordinated action of the third arm and the hand.

[0006] In any of the robots, when the hand is caused to enter the opening of the back wall, the coordinated action selection unit may select to cause the hand to enter the entry object through coordinated actions of the third arm, the hand, and the first movable unit.

[0007] In any of the robots, the control unit may control the first movable unit and the second movable unit in the following manner: the hand is caused to enter the entry object while maintaining a first angle that satisfies a predetermined first angle condition, wherein the first angle is an angle between a vector parallel to a straight line passing through the fourth rotation axis and the fifth rotation axis and perpendicular to the fourth rotation axis and the fifth rotation axis and a vector parallel to a center line of the hand perpendicular to the fifth rotation axis and passing through the fifth rotation axis.

[0008] Any of the robots may further include: a condition storing unit, which stores the first angle condition including a first candidate condition and a second candidate condition, the first candidate condition being conditioned on the first angle being included in a first angle range, and the second candidate condition being conditioned on the first angle being included in a second angle range; and a condition selecting unit, which selects the first angle condition for entry processing that causes the hand to enter the entry object from the first candidate condition and the second candidate condition based on the position of the entry object, the control unit controlling the first movable unit and the second movable unit in the following manner: while maintaining a state that satisfies the first angle condition selected by the condition selecting unit, the hand is caused to enter the entry object.

[0009] In any of the robots, the condition selection unit may select the first candidate condition as the first angle condition for the entry processing when the entry object is located on the side wall of the frame and the hand can enter only when the first angle is included in the first angle range.

[0010] In any of the robots, the condition selection unit may select the first candidate condition as the first angle condition for the entry process when the entry target is a PA (Pre-Aligner).

[0011] In any of the robots, it may also be that when the first candidate condition is selected as the first angle condition of the first entry processing, when the hand can enter the entry object of the second entry processing, which is the next entry processing of the first entry processing, when the first angle is included in the first angle range, the condition selection unit selects the first candidate condition as the first angle condition of the second entry processing, and when the hand cannot enter the entry object of the second entry processing when the first angle is included in the first angle range, the condition selection unit selects the second candidate condition as the first angle condition of the second entry processing.

[0012] In any of the robots, it may be that when the condition selection unit selects the second candidate condition as the first angle condition for the second entry processing, the control unit controls the first movable part and the second movable part in a manner that changes the first angle from the first angle range to the second angle range.

[0013] In any of the robots, it may be that when the hand is able to enter the entry object of the next entry processing of the second entry processing, that is, the third entry processing, when the first angle is included in the first angle range, the condition selection unit selects the first candidate condition as the first angle condition of the third entry processing.

[0014] In any of the robots, it may be that when the hand is able to enter the entry object of the next entry processing of the second entry processing, that is, the third entry processing, when the first angle is included in the second angle range, the condition selection unit selects the second candidate condition as the first angle condition of the third entry processing.

[0015] In any of the robots, the first angle range may be an angle from 0° to 180°, and the second angle range may be an angle from -180° to 0°.

[0016] In any of the robots, it may also be that the control unit controls the first movable part and the second movable part in the following manner: while maintaining the second angle in a state that further satisfies a predetermined second angle condition, the hand is caused to enter the entry object, the second angle being the angle between a vector parallel to the direction of transporting the chip within the action area and a vector parallel to a center line of the hand perpendicular to the fifth rotation axis and passing through the fifth rotation axis, the action area being defined in the space between the front wall and the back wall in a manner that does not overlap with an opening and closing area, and the opening and closing area being an area for a box opener arranged at a position corresponding to each of the multiple openings of the front wall to open and close the box.

[0017] Any of the robots may further include: a condition storing unit, which stores the second angle condition including a third candidate condition and a fourth candidate condition, the third candidate condition being conditioned on the second angle being included in a third angle range, and the fourth candidate condition being conditioned on the second angle being included in a fourth angle range; and a condition selecting unit, which selects the second angle condition for entry processing that causes the hand to enter the entry object from the third candidate condition and the fourth candidate condition based on the position of the entry object, and the control unit may control the first movable unit and the second movable unit in the following manner: while maintaining a state that satisfies the second angle condition selected by the condition selecting unit, the hand is caused to enter the entry object.

[0018] In any of the robots, the third angle range may correspond to a state in which the distal end side of the hand is located to the right of the base end side of the hand, and the fourth angle range may correspond to a state in which the distal end side of the hand is located to the left of the base end side of the hand.

[0019] According to one aspect of the present invention, a system is provided. The system may include any of the robots described above. The system may include the frame described above.

[0020] According to one embodiment of the present invention, a control method is provided, which is performed by a robot, wherein the robot is arranged in a frame, the frame having: a front wall having a plurality of openings for entering a box for storing wafers; and a back wall, which is opposite to the front wall and has an opening, the robot comprising: a first base; a first movable part having a first arm and a second arm, the base end side of the first arm being connected to the first base in the following manner: so that the first arm can rotate in a vertical plane around a first rotation axis, and the base end side of the second arm being connected to the tip side of the first arm in the following manner: so that the second arm can rotate in a vertical plane around a second rotation axis; a second movable part having a second base, a third arm and a hand, the base end side of the second base being connected in the following manner At the end side of the second arm: the second base is capable of rotating within a vertical plane around a third rotation axis, the base end side of the third arm is connected to the end side of the second base in the following manner: the third arm is capable of rotating around a fourth rotation axis, the base end side of the hand is connected to the end side of the third arm in the following manner: the hand is capable of rotating around a fifth rotation axis, and the hand holds the chip; an information storage unit, which stores coordinated action related information, the coordinated action related information corresponds the positions of the respective openings of the front wall and the positions of the openings of the back wall, and the category of coordinated action of the robot when the hand enters the respective positions of the plurality of openings of the front wall and the positions of the openings of the back wall. The control method may include a coordinated action selection stage, in which, based on the position of the entry object entered by the hand and the coordinated action related information stored in the information storage unit, it is selected whether to make the hand enter the entry object through the coordinated action of the third arm and the hand, or to make the hand enter the entry object through the coordinated action of the third arm, the hand, and the first movable part. The control method may include a control stage, in which the first movable part and the second movable part are controlled in such a manner that the hand enters the entry object in a state where the hand is parallel to a horizontal plane through the coordinated action of the robot selected in the coordinated action selection stage.

[0021] According to one embodiment of the present invention, there is provided a program for causing a computer to execute the control method.

[0022] In addition, the above summary of the invention does not list all the necessary features of the present invention. In addition, sub-combinations of these feature groups may also constitute inventions. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a perspective view schematically showing an example of the robot 100 .

[0024] Figure 2 It is a side view schematically showing an example of the robot 100 .

[0025] Figure 3 An example of the bottom surface portion 116 is schematically shown.

[0026] Figure 4 This is a perspective view schematically showing an example of the robot 100 in a state where the robot arm is extended.

[0027] Figure 5 This is a plan view schematically showing an example of the robot 100 in a state where the robot arm is extended.

[0028] Figure 6 This is a front view schematically showing an example of the robot 100 .

[0029] Figure 7 It is an explanatory diagram for explaining the movable range of the first arm 122 .

[0030] Figure 8 It is an explanatory diagram for explaining the movable range of the second arm 124 .

[0031] Fig. 9 It is an explanatory diagram for explaining the movable range of the second base portion 132 .

[0032] Fig.10 An example of a hand 136 is schematically shown.

[0033] Fig.11 It is an explanatory diagram for explaining the movable range of the hand 136.

[0034] Fig.12 It is a perspective view schematically showing another example of the robot 100 .

[0035] Fig.13 An example of the system 10 is schematically shown.

[0036] Fig.14 This is an explanatory diagram for explaining an example of coordinated operation of the third arm 134 and the hand 136 .

[0037] Fig.15 This is an explanatory diagram for explaining an example of cooperative operation of the third arm 134 , the hand 136 , and the first movable unit 120 .

[0038] Fig.16 An example of the second movable section 130 is schematically shown in a state where the hand 136 holds the wafer 50 in the operation area 250 .

[0039] Fig.17Another example of the second movable portion 130 is schematically shown in a state where the hand 136 holds the wafer 50 in the operation area 250 .

[0040] Fig.18 This is an explanatory diagram for explaining an example of the operating range of the third rotation axis 105 .

[0041] Fig.19 This is an explanatory diagram for explaining another example of the operating range of the third rotation axis 105 .

[0042] Fig. 20 This is an explanatory diagram for explaining an example of the maximum motion range of the third rotation axis 105 and an example of the maximum enterable region of the hand 136 .

[0043] Fig.21 This is an explanatory diagram for explaining an example of the relationship between the maximum enterable area of ​​the hand 136 and the entry object.

[0044] Fig. 22 This is an explanatory diagram for explaining an example of the operation of the robot 100 disposed in the housing 200 .

[0045] Fig.23 This is an explanatory diagram for explaining another example of the operation of the robot 100 disposed in the housing 200 .

[0046] Fig.24 This is an explanatory diagram for explaining another example of the operation of the robot 100 disposed in the housing 200 .

[0047] Fig.25 An example of the functional configuration of the robot 100 is schematically shown.

[0048] Fig.26 This is an explanatory diagram for explaining an example of the processing flow of the robot 100 .

[0049] Fig. 27 An example of the hardware configuration of a computer 1200 that functions as the robot 100 is schematically shown.

[0050] Description of symbols

[0051] 10 system; 50 wafer; 100 robot; 101 first rotation axis; 103 second rotation axis; 105 third rotation axis; 107 fourth rotation axis; 109 fifth rotation axis; 110 first base; 112 first side surface; 113 cavity; 114 second side surface; 116 bottom surface; 120 first movable portion; 122 first arm; 123 gap; 124 second arm; 125 gap; 130 second movable portion; 132 second base; 134 third arm; 136 hand; 140 first a movable part; 142 a first arm; 143 a gap; 144 a second arm; 151 an acquisition part; 152 a control part; 154 an information storage part; 156 a coordinated action selection part; 158 a condition storage part; 160 a condition selection part; 200 a frame; 210 a front wall; 212 a part; 214 a part; 220 a box; 221 a box; 222 a box; 223 a box; 224 a box; 225 a box; 227 an opening and closing area; 230 a rear wall; 240 a loading lock chamber; 241 a loading lock chamber; 242 a loading lock Fixed chamber; 243 Loading lock chamber; 250 Action area; 261 Area; 263 Area; 265 Area; 267 Area; 269 Area; 270 First side wall; 284 Area; 290 Second side wall; 300PA; 1121 Inner surface; 1123 Outer surface; 1141 Inner surface; 1143 Outer surface; 1147 Second side; 1148 Connector part; 1160 Central part; 1162 First protrusion; 1164 Second protrusion; 1166 Hole; 120 0 computer; 1210 host controller; 1212 CPU; 1214 RAM; 1216 graphic controller; 1218 display device; 1220 input / output controller; 1222 communication interface; 1224 storage device; 1230 ROM, 1240 input / output chip; 2210 opening; 2220 opening; 2230 opening; 2240 opening; 2250 opening; 2410 opening; 2420 opening; 2430 opening; 2850 opening. DETAILED DESCRIPTION

[0052] Hereinafter, the present invention will be described by way of the embodiments of the invention, but the following embodiments do not limit the invention according to the claims. In addition, the combination of features described in the embodiments is not necessarily all essential to the solution of the invention.

[0053] In the embodiments shown below, expressions such as "parallel", "vertical", and "horizontal" are sometimes used, but these conditions do not need to be strictly met. That is, the above expressions allow for deviations in manufacturing accuracy, setting accuracy, processing accuracy, detection accuracy, etc.

[0054] In the embodiments described below, the expression "vector" may be used. The expression "vector" is not a mathematical expression that specifies a magnitude and a direction, but is an expression that specifies only a direction.

[0055] Figure 1 1 is a perspective view schematically showing an example of a robot 100. The robot 100 is used to move a moving object. The moving object is, for example, a substrate such as a wafer or a liquid crystal. Figure 1 , an example in which the object to be moved is a wafer 50 is illustrated.

[0056] The robot 100 may be disposed in a housing related to semiconductor manufacturing. Semiconductor manufacturing includes processes such as etching, ashing, exposure, and inspection.

[0057] The housing is, for example, a so-called EFEM (Equipment Front End Module). The housing may be a sorter. The sorter is a housing for rearranging the wafers 50 .

[0058] The robot 100 may include a first base 110, a first movable part 120, and a second movable part 130. The robot 100 may further include a control unit 152 for controlling the movement of the robot 100. Figure 1 , an example in which the control unit 152 is external to the robot 100 is illustrated. However, the control unit 152 may be housed inside the first base 110, or fixed to the first base 110. In addition, the first movable unit 120 and the second movable unit 130 are sometimes collectively referred to as a robot arm.

[0059] The first base portion 110 may include a first side surface portion 112 and a second side surface portion 114 facing the first side surface portion 112. The first base portion 110 may further include a bottom surface portion 116.

[0060] The first side surface portion 112 may include an inner surface 1121 and an outer surface. The first side surface portion 112 supports the first movable portion 120 , for example. The first side surface portion 112 supports the first movable portion 120 , for example, by being coupled to the first arm 122 .

[0061] The first base 110 supports the first movable portion 120 only by the first side surface portion 112 , for example. The first base 110 may support the first movable portion 120 by both the first side surface portion 112 and the second side surface portion 114 .

[0062] The first side surface portion 112 has, for example, a cavity 113. Thus, the robot can be made lighter in weight.

[0063] The second side surface 114 may include an inner surface, an outer surface 1143, a first side surface, and a second side surface 1147. A connector portion 1148 is provided on the second side surface 1147, for example. By providing the connector portion 1148 on the side of the second side surface 114, cables and the like will not protrude outward from the outer surface 1143. Thus, a robot that can be configured in an area with a narrower width can be realized. In addition, the "width" here refers to Figure 1 Therefore, the "narrow width area" refers to Figure 1 The area with short length in the y-axis direction is shown.

[0064] The second side surface portion 114 further includes a hollow portion that can accommodate cables, for example. Thus, the cables can be accommodated in the hollow portion, so that a robot that can be arranged in a narrower space can be realized.

[0065] The first side surface portion 112 and the bottom surface portion 116 may be integrated. The second side surface portion 114 and the bottom surface portion 116 may be integrated. The first side surface portion 112, the second side surface portion 114, and the bottom surface portion 116 may be integrated.

[0066] The first base 110 can be detachably arranged on the configuration surface, for example. The first base 110 can be detachably arranged on the bottom of the frame in which the robot 100 is configured, for example. The first base 110 can be detachably arranged on the bottom of the frame, for example, by being fixed to a fixing portion such as a frame at the bottom of the frame. Thus, a robot with high ease of configuration, maintenance, etc. can be realized.

[0067] The first movable part 120 may include a first arm 122 and a second arm 124. The first movable part 120 may be movable in a vertical plane. Figure 1 , an example in which the first movable portion 120 is movable within the xz plane is illustrated.

[0068] The base end side of the first arm 122 can be connected to the first base 110 in the following manner: the first arm 122 can rotate in a vertical plane around the first rotation axis 101. The first arm 122 includes, for example, a connecting rod and a connecting portion. The first arm 122 includes, for example, connecting portions on the base end side and the terminal side. The connecting portion on the base end side can correspond to the first rotation axis 101, and the connecting portion on the terminal side can correspond to the second rotation axis 103.

[0069] The base end side of the second arm 124 can be connected to the terminal side of the first arm 122 in the following manner: the second arm 124 rotates in a vertical plane around the second rotation axis 103. The second arm 124 includes, for example, a connecting rod and a connecting portion. The second arm 124 includes, for example, connecting portions on the base end side and the terminal side. The connecting portion on the base end side can correspond to the second rotation axis 103, and the connecting portion on the terminal side can correspond to the third rotation axis 105.

[0070] The second movable part 130 may include a second base 132, a third arm 134, and a hand 136. Figure 1 , an example is shown in which the robot 100 includes one hand 136. The number of hands 136 included in the robot 100 is not limited to one, and may be two or more.

[0071] The second base 132 may be movable in a vertical plane. For example, the base end of the second base 132 is connected to the tip end of the second arm 124 in such a manner that the second base 132 can rotate in a vertical plane around the third rotation axis 105. Figure 1 , an example in which the second base portion 132 is rotatable in the xz plane is illustrated.

[0072] The third arm 134 can be movable in a plane perpendicular to the fourth rotation axis 107. Figure 1 , an example is shown in which the fourth rotation axis 107 is parallel to the z-axis and the third arm 134 is movable in an xy plane that is perpendicular to the fourth rotation axis 107 .

[0073] For example, the base end side of the third arm 134 is connected to the tip side of the second base 132 in such a manner that the third arm 134 can rotate around the fourth rotation axis 107. The third arm 134 includes, for example, a link portion and a connection portion. The third arm 134 includes, for example, connection portions on the base end side and the tip side. The connection portion on the base end side may correspond to the fourth rotation axis 107, and the connection portion on the tip side may correspond to the fifth rotation axis 109.

[0074] The hand 136 holds a moving object such as the wafer 50. The hand 136 can hold the moving object by any method.

[0075] The hand 136 holds the moving object, for example, by vacuuming the back side of the moving object. The hand 136 holds the moving object, for example, by means of the friction force generated between the hand 136 and the moving object. In this case, in order to further increase the friction force, a material with a high friction coefficient such as rubber can be used for the contact surface of the hand 136 that contacts the moving object. The hand 136 holds the moving object, for example, by gripping the moving object. The hand 136 grips the moving object, for example, by physically clamping the surroundings of the moving object. The hand 136 can also hold the moving object in a non-contact manner. The hand 136 holds the moving object in a non-contact manner, for example, by using the Bernoulli effect in which the pressure around the ejected fluid decreases when a fluid such as a gas or liquid is ejected violently. In this case, the hand 136 is a Bernoulli suction cup.

[0076] The hand 136 can be movable in a plane perpendicular to the fifth rotation axis 109. For example, the base end of the hand 136 is connected to the tip end of the third arm 134 in such a manner that the hand 136 can rotate around the fifth rotation axis 109. Figure 1 , an example is shown in which the fifth rotation axis 109 is parallel to the z-axis and the hand 136 is rotatable within an xy plane that is perpendicular to the fifth rotation axis 109 .

[0077] The first rotation axis 101, the second rotation axis 103, and the third rotation axis 105 may be parallel to each other. The fourth rotation axis 107 may be perpendicular to the third rotation axis 105. The fourth rotation axis 107 and the fifth rotation axis 109 may be parallel to each other. Figure 1 In the example shown, the first rotation axis 101 , the second rotation axis 103 , and the third rotation axis 105 are parallel to the y-axis, and the fourth rotation axis 107 and the fifth rotation axis 109 are parallel to the z-axis.

[0078] The shape of the projection of the first base 110 onto the vertical plane perpendicular to the first rotation axis 101 is, for example, a shape in which the width of the support side supporting the first movable part 120 is narrower than the width of the configuration surface side of the first base 110. The shape of the projection of the first base 110 onto the vertical plane is, for example, a tapered shape that gradually tapers from the configuration surface side of the first base 110 toward the side supporting the first movable part 120. The shape of the projection of the first base 110 onto the vertical plane is, for example, a trapezoid. The shape of the projection of the first side surface portion 112 onto the vertical plane is, for example, a triangle. The shape of the projection of the first side surface portion 112 onto the vertical plane may also be a convex shape. Figure 1 In the example shown, the shape of the projection of the first base portion 110 onto a vertical plane perpendicular to the first rotation axis 101 is the shape of the projection onto the xz plane.

[0079] The shape of the projection of the first side surface portion 112 onto the vertical plane perpendicular to the first rotation axis 101 is, for example, a shape in which the width of the side supporting the first movable portion 120 is narrower than the width of the side of the configuration surface of the first base portion 110. The shape of the projection of the first side surface portion 112 onto the vertical plane is, for example, a tapered shape that gradually tapers from the configuration surface side of the first base portion 110 toward the side supporting the first movable portion 120. The shape of the projection of the first side surface portion 112 onto the vertical plane is, for example, a triangle. The shape of the projection of the first side surface portion 112 onto the vertical plane is, for example, a trapezoid. The shape of the projection of the first side surface portion 112 onto the vertical plane may also be a convex shape.

[0080] The shape of the projection of the second side surface portion 114 onto the vertical plane perpendicular to the first rotation axis 101 is, for example, a shape in which the width of the side supporting the first movable portion 120 is narrower than the width of the side of the configuration surface of the first base portion 110. The shape of the projection of the second side surface portion 114 onto the vertical plane is, for example, a tapered shape that gradually tapers from the configuration surface side of the first base portion 110 toward the side supporting the first movable portion 120. The shape of the projection of the second side surface portion 114 onto the vertical plane is, for example, a trapezoid. The shape of the projection of the second side surface portion 114 onto the vertical plane is, for example, a triangle. The shape of the projection of the second side surface portion 114 onto the vertical plane may also be a convex shape.

[0081] The first base 110 has a structure in which the width of the support side supporting the first movable part 120 is narrower than the width of the arrangement surface side of the first base 110 in the shape of the projection of the first base 110 on the vertical plane, so that even if the robot arm rotates, the first base 110 can stably support the robot arm. In addition, in the shape of the projection of the first base 110 on the vertical plane, the width of the support side supporting the first movable part 120 is narrow, so that even when the robot arm is located near the first base 110, the third arm 134 and the hand 136 can be prevented from interfering with the first base 110. As a result, a robot that can move a moving object over a wider range can be realized.

[0082] The first arm 122 and the second arm 124 have, for example, a structure in which, when the first arm 122 and the second arm 124 rotate, the trajectory of the first arm 122 overlaps with the trajectory of the second arm 124. In addition, "a structure in which two trajectories overlap" does not mean a structure in which two trajectories necessarily overlap, but means a structure in which two trajectories overlap.

[0083] For example, the width of the trajectory of the first arm 122 in the direction perpendicular to the vertical plane is accommodated by the width of the trajectory of the second arm 124 in the direction perpendicular to the vertical plane. Figure 1 , an example of the robot 100 is shown in which the width of the trajectory of the first arm 122 in the y-axis direction is accommodated within the width of the trajectory of the second arm 124 in the y-axis direction.

[0084] For example, at the connection portion between the first arm 122 and the second arm 124, the connection portion on the base end side of the second arm 124 is connected to the connection portion on the tip side of the first arm 122 in such a manner that the width between the outer side surfaces of the first arm 122 in the direction parallel to the second rotation axis 103 is accommodated in the width between the inner side surfaces of the second arm 124 in the direction parallel to the second rotation axis 103. For example, at the connection portion between the first arm 122 and the second arm 124, the connection portion on the base end side of the second arm 124 is connected to the connection portion on the tip side of the first arm 122 in such a manner that the outer side surface of the first arm 122 is sandwiched.

[0085] By having a structure in which the trajectory of the first arm 122 overlaps with the trajectory of the second arm 124 when the first arm 122 and the second arm 124 rotate, the width of the trajectory can be made narrower compared to a robot in which the trajectories of the two arms do not overlap when the two arms rotate. As a result, a robot that can be arranged in a narrower area can be realized.

[0086] At least one of the first arm 122 and the second arm 124 has, for example, a structure that can avoid interference between the first arm 122 and the second arm 124 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the link portion of the second arm 124 onto the vertical plane. For example, at the connection portion between the first arm 122 and the second arm 124, the connection portion on the base end side of the second arm 124 is connected to the connection portion on the tip end side of the first arm 122 with a gap 123 therebetween.

[0087] By having a structure that can avoid interference between the first arm 122 and the second arm 124 when the projection of the first arm 122 onto the vertical plane of the link portion overlaps with the projection of the second arm 124 onto the vertical plane of the link portion, it is possible to avoid interference between the first arm 122 and the second arm 124 and further bend the first movable portion 120. Thus, it is possible to realize a robot that can move a moving object over a wider range.

[0088] For example, the second arm 124 has a structure that can avoid interference between the second arm 124 and the second base 132 when the second base 132 rotates. For example, at the connection portion between the second arm 124 and the second base 132, the connection portion on the tip side of the second arm 124 is connected to the connection portion on the base side of the second base 132 in such a manner that the width between the outer side surfaces of the second base 132 in the direction parallel to the third rotation axis 105 is accommodated in the width between the inner side surfaces of the second arm 124 in the direction parallel to the third rotation axis 105, and there is a gap 125. For example, at the connection portion between the second arm 124 and the second base 132, the connection portion on the tip side of the second arm 124 is connected to the connection portion on the base side of the second base 132 in such a manner that the outer side surface of the second base 132 is sandwiched and the gap 125 is present. This can avoid interference between the second arm 124 and the second base 132 , and can expand the movable range of the second base 132 , thereby realizing a robot capable of moving a moving object over a wider range.

[0089] For example, the first movable portion 120 has a structure that can avoid interference between the first movable portion 120 and the first base portion 110 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base portion 110 onto the vertical plane. The first movable portion 120 has a structure that can avoid interference between the first movable portion 120 and the first base portion 110 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the link portion of the second arm 124 onto the vertical plane and the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base portion 110 onto the vertical plane. The specific structure that can avoid interference between the first movable portion 120 and the first base portion 110 will be described later.

[0090] By having a structure that can avoid interference between the first movable part 120 and the first base 110 in a state where the projection of the link part of the first arm 122 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane, the robot arm can avoid interference with the first base 110, and the moving object can be moved near the first base 110. In particular, by having a structure that can avoid interference between the first movable part 120 and the first base 110 in a state where the projection of the link part of the first arm 122 onto the vertical plane overlaps with the projection of the link part of the second arm 124 onto the vertical plane, and the projection of the link part of the first arm 122 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane, the moving object can be moved near the first base 110 while the first movable part 120 is bent, so that the robot arm can avoid interference with the first base 110, and the moving object can be moved further near the first base 110. As a result, a robot that can move a moving object over a wider range can be realized.

[0091] The first movable portion 120 and the second movable portion 130 have a structure in which, when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base portion 110 onto the vertical plane, at least one of the projection of the fourth rotation axis 107 onto the vertical plane and the projection of the fifth rotation axis 109 onto the vertical plane does not overlap with the projection of the first base portion 110 onto the vertical plane. The first movable portion 120 and the second movable portion 130, for example, have a structure in which the projection of the fourth rotation axis 107 onto the vertical plane does not overlap with the projection of the first base portion 110 onto the vertical plane. The first movable portion 120 and the second movable portion 130, for example, have a structure in which the projection of the fifth rotation axis 109 onto the vertical plane does not overlap with the projection of the first base portion 110 onto the vertical plane. The first movable portion 120 and the second movable portion 130, for example, have a structure in which both the projection of the fourth rotation axis 107 onto the vertical plane and the projection of the fifth rotation axis 109 onto the vertical plane do not overlap with the projection of the first base portion 110 onto the vertical plane.

[0092] The first movable portion 120 and the second movable portion 130 have, for example, a structure in which the third rotation axis 105 is higher than the upper end of the first base 110 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane. The first movable portion 120 and the second movable portion 130 have, for example, a structure in which the lower end of the fourth rotation axis 107 is higher than the upper end of the first base 110 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane. The first movable portion 120 and the second movable portion 130 have, for example, a structure in which the lower end of the fifth rotation axis 109 is higher than the upper end of the first base 110 when the projection of the link portion of the first arm 122 onto the vertical plane overlaps with the projection of the first base 110 onto the vertical plane.

[0093] By having a structure in which at least one of the projection of the fourth rotation axis 107 and the projection of the fifth rotation axis 109 on the vertical plane does not overlap with the projection of the first base 110 on the vertical plane when the projection of the link portion of the first arm 122 on the vertical plane overlaps with the projection of the first base 110 on the vertical plane, it is possible to avoid interference between the third arm 134 and the hand 136 and the first base 110, and to move the moving object near the first base 110. Thus, a robot that can move the moving object over a wider range can be realized.

[0094] Figure 2 FIG. 1 is a side view schematically showing an example of the robot 100. Figure 2 , an example of the robot 100 is shown in a state where the first movable portion 120 is located between the inner surface 1121 of the first side surface portion 112 and the inner surface 1141 of the second side surface portion 114 .

[0095] The inner surface 1121 and the inner surface 1141 may be perpendicular to the first rotation axis 101. Figure 2 , an example in which the inner surface 1121 and the inner surface 1141 are perpendicular to the y-axis parallel to the first rotation axis 101 is shown.

[0096] For example, the width of the first movable portion 120 in the direction perpendicular to the vertical plane is accommodated within the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane. The structure in which the width of the first movable portion 120 in the direction perpendicular to the vertical plane is accommodated within the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane may be an example of a structure that can avoid interference between the first movable portion 120 and the first base portion 110.

[0097] For example, the width of the first movable portion 120 in the direction perpendicular to the vertical plane is accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane, including: the width of the first arm 122 in the direction perpendicular to the vertical plane is accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane. For example, the width of the first movable portion 120 in the direction perpendicular to the vertical plane is accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane, including: the width of the second arm 124 in the direction perpendicular to the vertical plane is accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane. For example, the width of the first movable portion 120 in the direction perpendicular to the vertical plane is accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane, including: the width of the first arm 122 in the direction perpendicular to the vertical plane and the width of the second arm 124 in the direction perpendicular to the vertical plane are both accommodated in the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane. Figure 2 , an example is illustrated in which the vertical plane of the first movable part 120 is the xz plane, the vertical plane between the inner surface 1121 and the inner surface 1141 is the xz plane, and the width of the first movable part 120 in the y-axis direction is accommodated in the width W between the inner surface 1121 and the inner surface 1141 in the y-axis direction.

[0098] By making the width of the first movable part 120 accommodate the width between the inner surface 1121 and the inner surface 1141, the robot arm can avoid interference between the first movable part 120 and the first base 110 and pass through the space between the inner surface 1121 and the inner surface 1141. Thus, a robot with a larger movable range of the robot arm can be realized.

[0099] The second movable portion 130 has a structure that can avoid interference between the second movable portion 130 and the first base portion 110. For example, the second base portion 132 does not protrude beyond the inner surface 1141 in a direction perpendicular to the vertical plane of the second movable portion 130. Figure 2 , an example of the robot 100 is shown in which the vertical plane of the second movable portion 130 is the xz plane and the left end of the second base portion 132 does not protrude beyond the inner surface 1141 in the negative direction of the y-axis.

[0100] By having a structure that can avoid interference between the second movable part 130 and the first base 110, the robot arm can avoid interference between the second movable part 130 and the first base 110 and pass through the space between the inner surface 1121 and the inner surface 1141. Thus, a robot with a larger movable range of the robot arm can be realized.

[0101] The fourth rotation axis 107 is, for example, a center line l of the width between the inner surface 1121 and the inner surface 1141. Bc The fourth rotation axis 107 is offset from the center line l Bc The fourth rotation axis 107 may be offset from the center line 1 Bc The second side surface portion 114 is offset. Figure 2 In FIG. 1 , a straight line l parallel to the fourth rotation axis 107 and passing through the fourth rotation axis 107 is shown. 4p From the center line BC An example of the robot 100 that is offset toward the first side surface portion 112 by ΔD.

[0102] When the fourth rotation axis 107 is offset from the center line of the width between the inner surface 1121 and the inner surface 1141 toward the first side surface 112, the length of the third arm 134 can be made longer, for example, within the range of the width in the y-axis direction between the outer surface 1123 and the outer surface 1143, compared with a robot in which the fourth rotation axis is located on the center line of the width between the inner surfaces of the side surface, so that a robot with high ease of entry of the hand 136 to the first side surface 112 can be realized. In addition, when the fourth rotation axis 107 is offset from the center line of the width between the inner surface 1121 and the inner surface 1141 toward the second side surface 114, the length of the third arm 134 can be made longer, for example, within the range of the width in the y-axis direction between the outer surface 1123 and the outer surface 1143, compared with a robot in which the fourth rotation axis is located on the center line of the width between the inner surfaces of the side surface, so that a robot with high ease of entry of the hand 136 to the second side surface 114 can be realized.

[0103] The bottom surface portion 116 includes, for example, a first protrusion 1162 that protrudes from the outer surface 1123 of the first side surface portion 112 and a second protrusion 1164 that protrudes from the outer surface 1143 of the second side surface portion 114. Thus, the robot 100 can be moved in and out of the housing using a forklift, thereby realizing a robot that is easy to configure and maintain.

[0104] Figure 3 An example of the bottom surface portion 116 is schematically shown. Figure 3 116 is a top view schematically showing an example of the bottom portion 116. Figure 3 In the figure, the first movable portion 120 and the second movable portion 130 are omitted.

[0105] The bottom surface portion 116 includes, for example, a central portion 1160, a first protruding portion 1162, and a second protruding portion 1164. Figure 3, an example of a bottom portion 116 is shown in which a first protrusion 1162 protrudes from a first side surface of a central portion 1160 toward the negative direction of the y-axis, and a second protrusion 1164 protrudes from a second side surface of the central portion 1160 opposite to the first side surface toward the positive direction of the y-axis.

[0106] For example, the bottom surface portion 116 has a structure that can avoid interference between the first movable portion 120 and the bottom surface portion 116 when the first movable portion 120 is located above the bottom surface portion 116. Here, this structure will be mainly described.

[0107] The case where the first movable portion 120 is located above the bottom surface portion 116 includes, for example, the case where the second rotation axis 103 is located above the bottom surface portion 116. The case where the second rotation axis 103 is located above the bottom surface portion 116 includes, for example, the case where the second rotation axis 103 is located above the bottom surface portion 116 when the height of the second rotation axis 103 is lower than the height of the first rotation axis 101.

[0108] The central portion 1160 has, for example, a hole 1166. The hole 1166, for example, passes through the central portion 1160. In this case, the hole 1166 is a through hole. The hole 1166 may not pass through the central portion 1160 but may form a recess in the central portion 1160. In this case, the hole 1166 is a blind hole.

[0109] The hole 1166 is provided in the central portion 1160, for example, in such a manner that when the first movable portion 120 is located above the bottom surface portion 116, the first movable portion 120 is included in the space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160, for example, in such a manner that when the first movable portion 120 is located above the bottom surface portion 116, the tip portion of the first arm 122 is included in the space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160, for example, in such a manner that when the first movable portion 120 is located above the bottom surface portion 116, the base end portion of the second arm 124 is included in the space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160, for example, in such a manner that when the first movable portion 120 is located above the bottom surface portion 116, the tip portion of the first arm 122 and the base end portion of the second arm 124 are included in the space surrounded by the inner wall of the hole 1166. The hole 1166 is provided in the central portion 1160, for example, in such a manner that when the first movable portion 120 is located above the bottom surface portion 116, the second rotation axis 103 is contained in a space surrounded by the inner wall of the hole 1166. The hole 1166 may be an example of a structure of the bottom surface portion 116 that can avoid interference between the first movable portion 120 and the bottom surface portion 116 when the first movable portion 120 is located above the bottom surface portion 116.

[0110] When the hole 1166 is a through hole, the shape of the central portion 1160 is, for example, an O-shape. When the hole 1166 is a through hole, the shape of the central portion 1160 is, for example, a U-shape. Figure 3 , an example of the bottom surface portion 116 having an O-shaped central portion 1160 is shown.

[0111] Since the bottom surface portion 116 has a structure capable of avoiding interference between the first movable portion 120 and the bottom surface portion 116, a longer robot arm can pass through the space between the inner surface 1121 and the inner surface 1141 without interfering with the first base portion 110. Thus, a robot having a larger movable range and capable of moving a moving object to a farther position can be realized.

[0112] Figure 4 1 is a perspective view schematically showing an example of the robot 100 in a state where the robot arm is extended. Here, matters related to the control of the robot arm will be mainly described.

[0113] The control unit 152 controls the first movable unit 120, for example, to extend the robot arm. The control unit 152 controls the second movable unit 130, for example, to extend the robot arm. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, to extend the robot arm.

[0114] The control unit 152 controls the first movable unit 120 by, for example, rotating the first rotating shaft 101 using a motor. The motor that rotates the first rotating shaft 101 is, for example, a servo motor. When the motor that rotates the first rotating shaft 101 is a servo motor, the servo motor can be combined with a speed reducer or a speed reduction mechanism such as a belt and a pulley to rotate the first rotating shaft 101. In this case, the control unit 152 may control the speed reduction mechanism in addition to controlling the servo motor. The motor that rotates the first rotating shaft 101 may also be any other motor.

[0115] The control unit 152 controls the first movable unit 120 by, for example, rotating the second rotating shaft 103 using a motor. The motor that rotates the second rotating shaft 103 is, for example, a servo motor. When the motor that rotates the second rotating shaft 103 is a servo motor, the second rotating shaft 103 can be rotated by combining the servo motor and a speed reduction mechanism. In this case, the control unit 152 may control the speed reduction mechanism in addition to controlling the servo motor. The motor that rotates the second rotating shaft 103 may also be any other motor.

[0116] The control unit 152 controls the second movable unit 130 by, for example, rotating the third rotating shaft 105 using a motor. The motor that rotates the third rotating shaft 105 is, for example, a servo motor. When the motor that rotates the third rotating shaft 105 is a servo motor, the servo motor and a speed reduction mechanism may be combined to rotate the third rotating shaft 105. In this case, the control unit 152 may control the speed reduction mechanism in addition to controlling the servo motor. The motor that rotates the third rotating shaft 105 may also be any other motor.

[0117] The control unit 152 controls the second movable unit 130 by, for example, rotating the fourth rotating shaft 107 using a motor. The motor that rotates the fourth rotating shaft 107 is, for example, a DD (Direct Drive) motor. A DD motor refers to a motor such as a servo motor that directly rotates a rotating object without passing through a reduction mechanism. A DD motor is, for example, an axial gap motor. The motor that rotates the fourth rotating shaft 107 may also be any other motor.

[0118] The control unit 152 controls the second movable unit 130 by, for example, using a motor to rotate the fifth rotating shaft 109. The motor that rotates the fifth rotating shaft 109 is, for example, a DD motor. The motor that rotates the fifth rotating shaft 109 may be any other motor.

[0119] Unlike a servo motor and a speed reduction mechanism combined to rotate a rotating object, a DD motor can rotate a rotating object without using a speed reduction mechanism, and thus can rotate a rotating object with low vibration. Therefore, by using a DD motor to control the second movable part 130 in the robot 100, a robot can be realized that can adjust the end position of the hand with high precision.

[0120] Figure 5 This is a plan view schematically showing an example of the robot 100 in a state where the robot arm is extended. Figure 5 yes Figure 4 Here, matters related to the length of the robot arm will be mainly described.

[0121] l 1p is a straight line parallel to the first rotation axis 101 and passing through the first rotation axis 101. 2p is a straight line parallel to the second rotation axis 103 and passing through the second rotation axis 103. 3p is a straight line parallel to the third rotation axis 105 and passing through the third rotation axis 105. 5v is a straight line perpendicular to the fifth rotation axis 109 and passing through the fifth rotation axis 109. Ht is a straight line passing through the distal end of the hand 136 .

[0122] LR is the length of the robot arm. L R For example, based on the distance D between the first rotation axis 101 and the second rotation axis 103 12 , the distance D between the second rotation axis 103 and the fourth rotation axis 107 24 , the distance D between the fourth rotation axis 107 and the fifth rotation axis 109 45 , and the length L from the fifth rotation axis 109 to the end of the hand 136 5t To confirm. 24 Based on the distance D between the second rotation axis 103 and the third rotation axis 105 23 and the distance D between the third rotation axis 105 and the fourth rotation axis 107 34 To determine. Figure 5 , an example of the robot 100 is shown in the figure in a state where the third rotation axis 105 and the fourth rotation axis 107 are located in the same yz plane.

[0123] For example, D 12 Defined as the length of the first arm 122. The length from the base end of the first arm 122 to the tip end of the first arm 122 may also be defined as the length of the first arm 122.

[0124] For example, D 23 Defined as the length of the second arm 124. The length from the base end of the second arm 124 to the tip end of the second arm 124 may also be defined as the length of the second arm 124.

[0125] For example, D 34 It is defined as the length of the second base portion 132. The length from the base end of the second base portion 132 to the tip end of the second base portion 132 may also be defined as the length of the second base portion 132.

[0126] For example, D 45 Defined as the length of the third arm 134. The length from the base end of the third arm 134 to the tip end of the third arm 134 may also be defined as the length of the third arm 134.

[0127] For example, L 5t The length of the hand 136 may be defined as the length from the base end of the hand 136 to the tip end of the hand 136 .

[0128] Figure 6 1 is a front view schematically showing an example of the robot 100. Figure 6 In the example shown, the third arm 134 and the hand 136 are parallel to the xy plane which is a horizontal plane.

[0129] p B1It is a plane perpendicular to the arrangement surface of the first base 110 and including the first rotation axis 101. Figure 6 In the example shown, the configuration surface of the first base portion 110 is the xy plane. B1 is the yz plane.

[0130] L 4t is the length from the fourth rotation axis 107 to the end of the hand 136. Figure 6 , the third arm 134 and the hand 136 are shown in a state where the third arm 134 and the hand 136 are maximally extended in the negative direction of the x-axis. 4p An example of the length to the end of the hand 136. Figure 6 In the example shown, l 4p is a straight line parallel to the z-axis.

[0131] l 23 is a straight line passing through the second rotation axis 103 and the third rotation axis 105 and being perpendicular to the second rotation axis 103 and the third rotation axis 105. Figure 6 In the example shown, l 23 is a straight line parallel to the z-axis.

[0132] In addition, Figure 6 In the figure, the inclusion of l 23 The yz plane and the one containing l 4p An example of a case where the yz plane is the same plane. 23 The yz plane and the one containing l 4p The yz planes can also be different planes.

[0133] L 2u It is the length from the third rotating shaft 105 to the upper end of the second movable part 130. Figure 6 In the figure, the 23 When the parallel vector is perpendicular to the arrangement surface of the first base 110 and parallel to the fourth rotation axis 107, L 2u An example of.

[0134] Figure 7 1 is an explanatory diagram for explaining the movable range of the first arm 122. The movable range of the first arm 122 can be based on the straight line l B1 The parallel upward vector and the line l 12 The angle θ between parallel vectors B1 The angle range is determined, where the straight line l B1 The straight line l is perpendicular to the configuration surface of the first base 110. 12 Passes through the first rotation axis 101 and the second rotation axis 103 and is perpendicular to the first rotation axis 101 and the second rotation axis 103. B1The angle range of may be determined by the length of the first arm 122, the shape of the first base 110, etc. In addition, the counterclockwise rotation direction is the positive rotation direction, and the clockwise rotation direction is the negative rotation direction.

[0135] The arm system of the robot 100 is based on θ B1 In addition, sometimes θ B1 The angle range is recorded as the arm system angle range.

[0136] The arm system angle range includes, for example, a first arm system angle range and a second arm system angle range. For example, the first arm system angle range is an angle from 0° to 220°, and the second arm system angle range is an angle from -220° to 0°. In this case, θ B1 The angle range is from -220° to 220°. B1 The angle range may also be any other angle range. Figure 7 In the figure, θ B1 An example of the robot 100 included in the first arm system angle range.

[0137] Figure 8 FIG. 1 is an explanatory diagram for explaining the movable range of the second arm 124. The movable range of the second arm 124 can be based on the 12 Parallel vector sum and l 23 The angle θ between parallel vectors 12 The angle range is determined by 12 The angle range can be determined by the length, shape, etc. of the first arm 122 and the second arm 124.

[0138] The elbow system of the robot 100 is based on θ 12 In addition, sometimes θ 12 The angle range is recorded as the elbow system angle range.

[0139] The elbow system angle range includes, for example, a first elbow system angle range and a second elbow system angle range. For example, the first elbow system angle range corresponds to the case where the first movable part 120 is extended in the positive rotation direction, and the second elbow system angle range corresponds to the case where the first movable part 120 is extended in the negative rotation direction. Figure 8 In the figure, θ 12 An example of the robot 100 included in the first elbow system angle range.

[0140] Fig. 9 FIG. 1 is an explanatory diagram for explaining the movable range of the second base portion 132. The movable range of the second base portion 132 can be based on the 23 Parallel vector sum and l 4pThe angle θ between parallel vectors 2B The angle range is determined by 2B The angle range may be determined by the shapes of the second arm 124 and the second base 132 .

[0141] The wrist system of the robot 100 is based on, for example, θ 2B In addition, sometimes θ 2B The angle range is recorded as the wrist system angle range.

[0142] The wrist system angle range includes, for example, a first wrist system angle range and a second wrist system angle range. For example, the first wrist system angle range corresponds to making the second base 132 larger than l 23 The direction of the vector parallel to l 4p When the directions of the parallel vectors are aligned and the second wrist system is rotated in the positive rotation direction, the second wrist system angle range corresponds to making the second base 132 larger than l 23 The direction of the vector parallel to l 4p When the parallel vectors are in the same direction, they rotate in the negative direction. Fig. 9 In the figure, θ 2B An example of the robot 100 included in the second wrist system angle range.

[0143] Fig.10 An example of a hand 136 is schematically shown. Fig.10 It is a top view schematically showing an example of the hand 136 .

[0144] l Hc is the center line of the hand 136 which is perpendicular to the fifth rotation axis 109 and passes through the fifth rotation axis 109. Fig.10 In the figure, the hand 136 is shown with l Hc Through the center point c of the wafer 50 w In addition, it is assumed that the reach of the robot arm is from the first rotation axis 101 to the center point c of the wafer 50. w Length.

[0145] L 5w It is the length from the fifth rotation axis 109 to the end of the wafer 50 when the hand 136 holds the wafer 50. For example, L 5w L 5t Length. 5w It can also be compared to L 5t Short. 5w With L 5t The size relationship between them can be determined according to the method of holding the wafer 50 by the hand 136 and the shape of the hand 136. Fig.10In the figure, L 5w L 5t An example of a long situation.

[0146] Fig.11 1 is an explanatory diagram for explaining the movable range of the hand 136. The movable range of the hand 136 can be based on the straight line l 45 Parallel vector sum and l Hc The angle θ between parallel vectors 3H The angle range is determined by the straight line l 45 Passes through the fourth rotation axis 107 and the fifth rotation axis 109 and is perpendicular to the fourth rotation axis 107 and the fifth rotation axis 109 .

[0147] The hand system of the robot 100 is based on θ 3H In addition, sometimes θ 3H The angle range is recorded as the hand system angle range.

[0148] The hand system angle range includes a first hand system angle range and a second hand system angle range. 3H When the first hand system angle range is included, the end of the hand 136 is located at a position greater than l 45 On the right side, at θ 3H When the second hand system angle range is included, the end of the hand 136 is located at a position greater than l 45 For example, the first hand system angle range corresponds to making the hand 136 closer to the left. 45 The direction of the vector parallel to l Hc When the directions of the parallel vectors are consistent and the hand 136 rotates in the positive direction, the second hand system angle range corresponds to making the hand 136 larger than l 45 The direction of the vector parallel to l Hc The parallel vectors are in the same direction and rotate in the negative direction. For example, the first hand system angle range is from 0° to 180°, and the second hand system angle range is from -180° to 0°. In this case, θ 3H The angle range is from -180° to 180°. 3H The angle range may also be any other angle range. Fig.11 In the figure, θ 3H An example of the robot 100 included in the first hand system angle range.

[0149] Fig.12 1 is a perspective view schematically showing another example of the robot 100. Figure 1 The robot has 100 different points.

[0150] The robot 100 may include a first movable part 140. The first movable part 140 may include a first arm 142 and a second arm 144. The first movable part 140 may be movable in a vertical plane. Fig.12 In the example shown, the first movable portion 140 is movable in the xz plane.

[0151] The base end side of the first arm 142 can be connected to the first base 110 in such a manner that the first arm 142 can rotate in a vertical plane around the first rotation axis 101. The base end side of the second arm 144 can be connected to the tip side of the first arm 142 in such a manner that the second arm 144 can rotate in a vertical plane around the second rotation axis 103.

[0152] The first arm 142 and the second arm 144 have, for example, a structure such that when the first arm 142 and the second arm 144 rotate, the trajectory of the first arm 142 overlaps the trajectory of the second arm 144. For example, the width of the trajectory of the second arm 144 in the direction perpendicular to the vertical plane is contained within the width of the trajectory of the first arm 142 in the direction perpendicular to the vertical plane. Fig.12 , an example of the robot 100 is shown in which the width of the trajectory of the second arm 144 in the y-axis direction is accommodated within the width of the trajectory of the first arm 142 in the y-axis direction.

[0153] For example, at the connection portion between the first arm 142 and the second arm 144, the connection portion on the distal end side of the first arm 142 is connected to the connection portion on the proximal end side of the second arm 144 in such a manner that the width between the outer side surfaces of the second arm 144 in the direction parallel to the second rotation axis 103 is accommodated within the width between the inner side surfaces of the first arm 142 in the direction parallel to the second rotation axis 103. For example, at the connection portion between the first arm 142 and the second arm 144, the connection portion on the distal end side of the first arm 122 is connected to the connection portion on the proximal end side of the second arm 124 in such a manner that the outer side surface of the second arm 144 is sandwiched.

[0154] By having a structure in which the trajectory of the first arm 142 overlaps with the trajectory of the second arm 144 when the first arm 142 and the second arm 144 rotate, the width of the trajectory can be made narrower compared to a robot in which the trajectories of the two arms do not overlap when the two arms rotate. As a result, a robot that can be arranged in a narrower area can be realized.

[0155] At least one of the first arm 142 and the second arm 144 has, for example, a structure that can avoid interference between the first arm 142 and the second arm 144 when the projection of the link portion of the first arm 142 onto the vertical plane overlaps the projection of the link portion of the second arm 144 onto the vertical plane. For example, at the connection portion between the first arm 142 and the second arm 144, the connection portion on the distal end side of the first arm 142 is connected to the connection portion on the proximal end side of the second arm 144 with a gap 143 therebetween.

[0156] By having a structure that can avoid interference between the first arm 142 and the second arm 144 when the projection of the link portion of the first arm 142 onto the vertical plane overlaps with the projection of the link portion of the second arm 144 onto the vertical plane, the first arm 142 and the second arm 144 can be prevented from interfering with each other, and the first movable portion 140 can be further bent. As a result, a robot that can move a moving object over a wider range can be realized.

[0157] Fig.13 An example of the system 10 is schematically shown. Fig.13 It is a plan view schematically showing an example of the system 10 .

[0158] The system 10 may include a robot 100 and a housing 200 . The system 10 may further include a PA 300 .

[0159] The frame 200 is, for example, an EFEM. The EFEM has, for example, a front wall 210, and the front wall 210 has one or more openings. The EFEM has, for example, a back wall 230 opposite to the front wall 210, and the back wall 230 has one or more openings. In addition, the openings of the front wall 210 of the frame 200 and the openings of the back wall 230 of the frame 200 are sometimes collectively referred to and recorded as the openings of the frame 200.

[0160] One or more openings of the front wall 210 of the EFEM are openings for accessing a cassette storing wafers 50. The cassette is, for example, a FOUP (Front-Opening Unified Pod).

[0161] The FOUP stores a plurality of wafers 50 in multiple layers, for example, and has a sealing cover on the side that can be opened and closed. The FOUP is based on the SEMI standard (Semiconductor Equipment and Materials International standards), for example. The sealing cover is opened and closed by a box opener. The specific structure of the box opener will be described later.

[0162] One or more openings of the back wall 230 of the EFEM are openings for entering the processing chamber side. For example, when the opening of the back wall 230 of the EFEM is an opening corresponding to a load lock chamber between the EFEM and the processing chamber, the opening is an opening for entering the load lock chamber. In addition, in the processing chamber connected to the EFEM via the load lock chamber, etching, ashing, CVD (Chemical Vapor Deposition) and the like are performed on the wafer 50.

[0163] The load lock chamber is a chamber between the EFEM and the processing chamber or vacuum transfer chamber. The processing of the wafer 50 in the processing chamber, such as etching, is usually performed under a reduced pressure environment. Therefore, the load lock chamber is provided between the EFEM and the processing chamber or vacuum transfer chamber.

[0164] The load lock chamber has opening and closing doors that can seal the interior of the chamber and open and close the chamber, for example, on both sides of the EFEM side and the processing chamber side or the vacuum transfer chamber side. The opening and closing doors are also called gate valves.

[0165] The load lock chamber is adjusted to a state where the movable object can move between the EFEM and the processing chamber, for example, by appropriately adjusting the pressure state in the load lock chamber to a reduced pressure state or an atmospheric pressure state. For example, by adjusting the pressure state in the load lock chamber to a substantially atmospheric pressure state, the load lock chamber is adjusted to a state where the movable object can move between the EFEM and the load lock chamber. For example, by adjusting the pressure state in the load lock chamber to a reduced pressure state substantially the same as that of the processing chamber or the vacuum transfer chamber, the load lock chamber is adjusted to a state where the movable object can move between the load lock chamber and the processing chamber or the vacuum transfer chamber.

[0166] When the opening of the back wall 230 of the EFEM corresponds to a processing chamber directly connected to the EFEM without passing through a load lock chamber, the opening may be an opening for entering the processing chamber. In the processing chamber, the wafer 50 is processed such as cleaning under atmospheric pressure.

[0167] The robot 100 enters, for example, an opening of the front wall 210 of the EFEM to place the wafer 50 in and out of the box. The robot 100 places, for example, a portion of the hand 136 in and out of the opening of the front wall 210 of the EFEM to place the wafer 50 in and out of the box. The robot 100 places, for example, a portion of the third arm 134 in and out of the opening of the front wall 210 of the EFEM to place the wafer 50 in and out of the box.

[0168] The robot 100, for example, enters the opening of the back wall 230 of the EFEM to place the wafer 50 in and out of the load lock chamber or the processing chamber. The robot 100, for example, places the wafer 50 in and out of the load lock chamber or the processing chamber by moving at least a portion of the hand 136 in and out of the opening of the back wall 230 of the EFEM. The robot 100, for example, places the wafer 50 in and out of the load lock chamber or the processing chamber by further moving at least a portion of the third arm 134 in and out of the opening of the back wall 230.

[0169] The frame 200 may be a sorter. The frame 200 may be, for example, a sorter having one or more openings for entering a box on both sides of the front wall 210 and the back wall 230. The frame 200 may also be a sorter having a plurality of openings for entering a box only on the front wall 210. For example, the robot 100 enters the plurality of openings of the sorter, takes out the wafers 50 from one box, and puts the taken-out wafers 50 into other boxes, thereby rearranging the wafers 50 between the plurality of boxes. The robot 100 may also enter a single opening of the sorter, take out the wafers 50 from one layer of a box, and put the taken-out wafers 50 into other layers of the one box, thereby rearranging the wafers 50 between the layers of a single box.

[0170] exist Fig.13 , an example of a case where the frame 200 is an EFEM having a front wall 210 and a back wall 230 is illustrated, wherein the front wall 210 has five openings, namely, an opening 2210 for entering a box 221, an opening 2220 for entering a box 222, an opening 2230 for entering a box 223, an opening 2240 for entering a box 224, and an opening 2250 for entering a box 225, and the back wall 230 has three openings, namely, an opening 2410 for entering a loading lock chamber 241, an opening 2420 for entering a loading lock chamber 242, and an opening 2430 for entering a loading lock chamber 243. The number of openings of the front wall 210 is not limited to five, and may be four or less, or six or more. In addition, the number of openings of the back wall 230 is not limited to three, and may be two or less, or four or more. In addition, the cassette 221 , cassette 222 , cassette 223 , cassette 224 , and cassette 225 may be collectively referred to as cassette 220 , and the load lock chamber 241 , load lock chamber 242 , and load lock chamber 243 may be collectively referred to as load lock chamber 240 .

[0171] The object that the robot 100 enters is, for example, an opening of the frame 200. The object that the robot 100 enters is, for example, a box 220. The object that the robot 100 enters is, for example, a loading lock chamber 240. The object that the robot 100 enters is, for example, a processing chamber. The object that the robot 100 enters is, for example, a PA 300. The PA 300 is a device that rotates a rotating table with a wafer 50 mounted thereon, detects a notch or recess formed around the wafer 50 using a sensor, and rotates the wafer 50 in a desired direction by adjusting the direction of the recess. The object that the robot 100 enters is, for example, a storage device that temporarily stores the wafer 50. The object that the robot 100 enters is, for example, an inspection device such as a camera unit that inspects whether the wafer 50 has any abnormality. The object that the robot 100 enters may also be any other device related to the manufacture of semiconductors.

[0172] The object to be entered is, for example, located outside the housing 200. In this case, the housing 200 has an opening in the wall for allowing the object to be entered located outside the housing 200. The object to be entered may also be located inside the housing 200.

[0173] The object of entry is located, for example, on the front wall 210 side of the housing 200. Fig.13 , an example of a case where the box 220 is located on the front wall 210 side is illustrated.

[0174] In addition to the box 220, another entry object may also be located on the front wall 210 side of the frame 200. For example, the other entry object is located above the box 220. For example, the other entry object is located below the box 220. For example, the other entry object is located on the left side of the box 221. For example, the other entry object is located on the right side of the box 225.

[0175] The object of entry is located, for example, on the back wall 230 side of the housing 200. Fig.13 , an example in which the load lock chamber 240 is located on the rear wall 230 side is shown.

[0176] In addition to the load lock chamber 240 when the frame 200 is an EFEM and the box 220 when the frame 200 is a sorter, another entry object may be located on the back wall 230 side of the frame 200. For example, the other entry object is located above the load lock chamber 240 or the box 220. For example, the other entry object is located below the load lock chamber 240 or the box 220. For example, the other entry object is located on the left side of the load lock chamber 241 or the box 220 at the left end. For example, the other entry object is located on the right side of the load lock chamber 243 or the box 220 at the right end.

[0177] The object of entry is located, for example, on the first side wall 270 side of the frame body 200. Fig.13 , an example in which the PA 300 is located on the first side wall 270 side is shown.

[0178] The object of entry may be located on the second side wall 290 side of the housing 200 that is opposite to the first side wall 270. In addition, the first side wall 270 and the second side wall 290 may be collectively referred to as the side wall of the housing 200.

[0179] The box 220 can be opened and closed by a box opener. The box opener is also called a loading port.

[0180] The cassette opener can open and close the sealing cover of the FOUP mounted on a predetermined mounting portion of the cassette opener. By opening and closing the sealing cover of the FOUP by the cassette opener, it is possible to prevent the air outside the EFEM from flowing into the EFEM. Thus, the robot 100 can perform the insertion and removal of the wafer 50 with respect to the FOUP while keeping the inside of the EFEM partially cleaner than the outside of the EFEM.

[0181] The cartridge opener is provided, for example, at a position corresponding to the opening of the front wall 210. The cartridge opener is provided, for example, at positions corresponding to the plurality of openings of the front wall 210, respectively.

[0182] When the frame 200 is a sorter having an opening for accessing the box 220 on the back wall 230, the box opener may be provided at a position corresponding to the opening of the back wall 230. When the frame 200 is a sorter having a plurality of openings for accessing the box 220 on the back wall 230, the box opener may be provided at positions corresponding to the plurality of openings of the back wall 230, respectively.

[0183] The opening and closing area 227 is an area for the cartridge opener to open and close the sealing cover of the cartridge 220. The opening and closing area 227 is an area defined according to the SEMI standard, for example.

[0184] The action area 250 is an area for the robot 100 to carry the moving object. Here, "carrying" means that the robot 100 moves the moving object within the action area 250. Therefore, the robot 100 moves the moving object from within the action area 250 to outside the action area 250, and the robot 100 moves the moving object from outside the action area 250 to within the action area 250 is not included in "carrying".

[0185] The operation area 250 is an area defined in the housing 200. The operation area 250 is an area defined by the space between the front wall 210 and the rear wall 230, for example.

[0186] The operation area 250 is defined, for example, so as not to overlap with the opening and closing area 227 on the front wall 210 side. The operation area 250 is defined, for example, so as to be separated from the opening and closing area 227 on the front wall 210 side by a predetermined distance d1. d1 is, for example, 10 mm.

[0187] By defining the motion area 250 so as not to overlap with the opening and closing area 227, the system 10 becomes a system that further complies with the SEMI standard. In addition, the robot 100 that can be arranged in a narrow area can carry a moving object within the motion area 250. Thus, a system that achieves both high versatility and a thin housing can be realized.

[0188] The operation area 250 is also defined as not overlapping with an area whose distance from the opening of the rear wall 230 is less than a predetermined distance. Fig.13 As shown, when the frame 200 is an EFEM, the operation area 250 is further defined as not overlapping with an area that is less than a predetermined distance d2 from the back wall 230. When the frame 200 is a sorter having an opening for entering the box 220 in the back wall 230, the operation area 250 may also be defined as not overlapping with the opening and closing area on the back wall 230 side. In this case, the operation area 250 is defined as being separated from the opening and closing area on the back wall 230 side by d1, for example.

[0189] The operation area 250 is further defined as not overlapping with an area whose distance from the opening of the back wall 230 is less than a predetermined distance, and thus, the operation area 250 is defined as not overlapping with the opening and closing area 227 on the front wall 210 side, and is defined as not overlapping with the opening and closing door provided in the load lock chamber 240 or the opening and closing area of ​​the box 220 on the back wall 230 side. Thus, a system that achieves both higher versatility and further thinning of the frame can be realized.

[0190] The robot 100 can move the moving object within the housing 200. For example, the robot 100 can move the moving object from one entry object to another entry object. Fig.13 The cassette 225 shown in the front wall 210 is moved to the load lock chamber 242 of the rear wall 230. The hand 136 does not hold the wafer 50 and is located in the operation area 250 that can enter the opening 2250 for entering the cassette 225 as the start state.

[0191] First, the control unit 152 controls the second movable unit 130 in such a manner that the hand 136 moves from the inside of the operation area 250 to the outside of the operation area 250, thereby allowing the hand 136 to enter the opening 2250 for entering the box 225. The control unit 152 controls the second movable unit 130 in such a manner that the hand 136 enters the opening 2250 through the coordinated operation of the third arm 134 and the hand 136, for example.

[0192] The coordinated operation of the third arm 134 and the hand 136 is, for example, a coordinated operation of only the third arm 134 and the hand 136. The coordinated operation of the third arm 134 and the hand 136 may be a coordinated operation of the third arm 134 and the hand 136 and other components of the robot 100.

[0193] Next, the control unit 152 controls the second movable unit 130 to remove the wafer 50 from the cassette 225 in response to the hand 136 entering the opening 2250. The control unit 152 controls the second movable unit 130 to remove the wafer 50 from the cassette 225 by, for example, coordinating the third arm 134 and the hand 136.

[0194] Next, the control unit 152 controls the second movable unit 130 so that the hand 136 holding the wafer 50 moves from outside the operation area 250 to inside the operation area 250. The control unit 152 controls the second movable unit 130, for example, in the following manner: the hand 136 holding the wafer 50 moves from outside the operation area 250 to inside the operation area 250 through the coordinated operation of the third arm 134 and the hand 136.

[0195] Next, the control unit 152 controls the first movable unit 120 and the second movable unit 130 in the following manner: the wafer 50 is transported while the wafer 50 held by the hand 136 is contained in the action area 250. The state in which the wafer 50 held by the hand 136 is contained in the action area 250 includes, for example, a state in which the width of the wafer 50 in a direction perpendicular to the direction in which the wafer 50 is transported is contained within the width of the action area 250 in a direction perpendicular to the direction in which the wafer 50 is transported. For example, in the case where the shape of the wafer 50 is a disk shape, the width in the direction perpendicular to the direction in which the wafer 50 is transported is the diameter of the wafer 50. Fig.13 In the figure, the direction of conveying the wafer 50 is the x-axis direction, and the width r of the wafer 50 in the y-axis direction is shown. w The width w of the action area 250 in the y-axis direction is accommodated m In addition, the width of the operation area 250 in the direction perpendicular to the direction in which the wafer 50 is conveyed is sometimes described as the width of the operation area 250.

[0196] The width of the operating region 250 is determined, for example, based on the size of the wafer 50. For example, when the shape of the wafer 50 is a disk, the width of the operating region 250 is determined based on the diameter of the wafer 50. For example, the width of the operating region 250 is determined in such a manner that the width of the operating region 250 is smaller than a predetermined ratio relative to the diameter of the wafer 50. For example, when the diameter of the wafer 50 is 300 mm, the width of the operating region 250 is 330 mm.

[0197] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: the wafer 50 is transported in a state where the wafer 50 held by the hand 136 is accommodated in the operation area 250 through the coordinated operation of the third arm 134, the hand 136, and the first movable unit 120. The coordinated operation of the third arm 134, the hand 136, and the first movable unit 120 includes, for example, the coordinated operation of the third arm 134, the hand 136, and the first arm 122. The coordinated operation of the third arm 134, the hand 136, and the first movable unit 120 includes, for example, the coordinated operation of the third arm 134, the hand 136, and the second arm 124. The coordinated operation of the third arm 134, the hand 136, and the first movable unit 120 may also include the coordinated operation of the third arm 134, the hand 136, the first arm 122, and the second arm 124.

[0198] Next, in response to the wafer 50 being transported to a predetermined position while the wafer 50 is accommodated in the operation area 250, the control unit 152 controls the second movable unit 130 so that the hand 136 moves from the operation area 250 to the outside of the operation area 250 and enters the opening 2420 for entering the load lock chamber 242. The control unit 152 controls the second movable unit 130 in the following manner, for example, by coordinated operation of the third arm 134 and the hand 136 so that the hand 136 enters the opening 2420.

[0199] Then, in response to the hand 136 entering the opening, the control unit 152 controls the second movable unit 130 so as to place the wafer 50 in the load lock chamber 242. For example, the control unit 152 controls the second movable unit 130 in such a manner that the wafer 50 is placed in the load lock chamber 242 through the coordinated operation of the third arm 134 and the hand 136. Thus, the operation of the robot 100 to move the wafer 50 from the cassette 225 to the load lock chamber 242 is completed.

[0200] In an example of moving the wafer 50 from the cassette 225 of the front wall 210 to the load lock chamber 242 of the rear wall 230, the robot 100 causes the hand 136 to enter the opening 2420 through the coordinated action of the third arm 134 and the hand 136. However, the load lock chamber 240 is different from the cassette 220 and does not conform to the SEMI standard in many cases. Therefore, when the hand 136 is intended to enter the opening for entering the load lock chamber 240 through the coordinated action of the third arm 134 and the hand 136, the load lock chamber 240 may interfere with the third arm 134, the wafer 50, or the hand 136 depending on the size and position of the load lock chamber 240, and therefore, the robot 100 may be unable to perform the placement and removal of the wafer 50 relative to the load lock chamber 240. In this case, the robot 100 enables the hand 136 to enter the opening through the coordinated action of the third arm 134, the hand 136 and the first movable part 120, thereby being able to perform the placement and removal of the chip 50 relative to the loading lock chamber 240 without causing interference between the loading lock chamber 240 and the third arm 134, the chip 50 and the hand 136.

[0201] As described above, the robot 100 can have a structure capable of transporting a movable object such as a wafer 50 held by the hand 136 while being contained in the operation area 250. As a result, a robot that can contribute to a thinner housing can be realized.

[0202] For example, the control unit 152 causes the hand 136 to enter the object in a state where the hand 136 is parallel to the horizontal plane. Fig.13 In the example shown, the control unit 152 causes the hand 136 to enter the object in a state where the hand 136 is parallel to the xy plane.

[0203] By entering the object in a state parallel to the horizontal plane, the risk of the moving object falling from the hand can be reduced during the robot 100 taking out the moving object or the robot 100 putting in the moving object. As a result, a robot can be realized that can move the moving object more safely. As a result, a robot can be realized that can contribute to the realization of a system with a high yield in the manufacture of semiconductors.

[0204] For example, the width of the trajectory of the first movable part 120 in the direction perpendicular to the vertical plane when the wafer 50 is transported in the action area 250 is contained in the width of the trajectory of the transported wafer 50 in the direction perpendicular to the vertical plane. The trajectory of the first movable part 120 when transporting the wafer 50 includes, for example, the trajectory of the first arm 122 when transporting the wafer 50. The trajectory of the first movable part 120 when transporting the wafer 50 includes, for example, the trajectory of the second arm 124 when transporting the wafer 50. Fig.13In the figure, an example is shown in which the vertical plane of the trajectory of the first movable part 120 when conveying the chip 50 is the xz plane, the vertical plane of the trajectory of the chip 50 is the xz plane, and the width of the trajectory of the first movable part 120 in the y-axis direction when conveying the chip 50 is accommodated within the width of the trajectory of the chip 50 in the y-axis direction.

[0205] As described above, the robot 100 may have a structure in which the width of the trajectory of the first movable part 120 in the direction perpendicular to the vertical plane when conveying the wafer 50 is accommodated within the width of the trajectory of the conveyed wafer 50 in the direction perpendicular to the vertical plane.

[0206] For example, when the wafer 50 is transported in the action area 250, the width of the trajectory of the first movable part 120 in the direction perpendicular to the vertical plane is contained within the width between the inner surface 1121 of the first side surface part 112 and the inner surface 1141 of the second side surface part 114 in the direction perpendicular to the vertical plane. Fig.13 In the figure, an example is shown in which the vertical plane of the trajectory of the first movable part 120 when conveying the chip 50 is the xz plane, the vertical plane between the inner surface 1121 and the inner surface 1141 is the xz plane, and the width of the trajectory of the first movable part 120 when conveying the chip 50 in the y-axis direction is accommodated within the width between the inner surface 1121 and the inner surface 1141 of the second side part 114 in the y-axis direction.

[0207] As described above, the robot 100 may have a structure in which the width of the trajectory of the first movable portion 120 in the direction perpendicular to the vertical plane when conveying the wafer 50 is contained within the width between the inner surface 1121 and the inner surface 1141 in the direction perpendicular to the vertical plane. Thus, the robot can be made thinner.

[0208] For example, the width of the trajectory of the second movable part 130 in the direction perpendicular to the vertical plane when transporting the wafer 50 within the action area 250 is accommodated by the width of the trajectory of the transported wafer 50 in the direction perpendicular to the vertical plane. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the second base 132 when transporting the wafer 50. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the third arm 134 when transporting the wafer 50. The trajectory of the second movable part 130 when transporting the wafer 50 includes, for example, the trajectory of the hand 136 when transporting the wafer 50. Fig.13 In the figure, an example is shown in which the vertical plane of the trajectory of the second movable part 130 when conveying the chip 50 is the xz plane, the vertical plane of the trajectory of the chip 50 is the xz plane, and the width of the trajectory of the second movable part 130 in the y-axis direction when conveying the chip 50 is accommodated within the width of the trajectory of the chip 50 in the y-axis direction.

[0209] As described above, the robot 100 may have a structure in which the width of the trajectory of the second movable part 130 in the direction perpendicular to the vertical plane when conveying the wafer 50 is accommodated within the width of the trajectory of the conveyed wafer 50 in the direction perpendicular to the vertical plane.

[0210] For example, the trajectory of the fourth rotation axis 107 when conveying the wafer 50 may be offset from the center line of the width of the trajectory of the second movable portion 130 when conveying the wafer 50 in the direction perpendicular to the vertical plane. For example, the trajectory of the fourth rotation axis 107 when conveying the wafer 50 may be offset from the center line of the width of the trajectory of the second movable portion 130 when conveying the wafer 50 in the direction perpendicular to the vertical plane toward the back wall 230. The trajectory of the fourth rotation axis 107 when conveying the wafer 50 may also be offset from the center line of the width of the trajectory of the second movable portion 130 when conveying the wafer 50 in the direction perpendicular to the vertical plane toward the front wall 210. Fig.13 , an example is shown in which the trajectory of the fourth rotation axis 107 when the wafer 50 is transferred is offset toward the back wall 230 from the center line of the width of the trajectory of the second movable portion 130 in the y-axis direction when the wafer 50 is transferred.

[0211] As described above, for example, the robot 100 has a structure in which the trajectory of the fourth rotation axis 107 when conveying the wafer 50 is offset from the center line of the width of the trajectory of the second movable portion 130 in the direction perpendicular to the vertical plane when conveying the wafer 50. As a result, the length of the third arm 134 can be made longer within the range in which the third arm 134 can rotate within the action area 250. As a result, a robot that can enter an entry object farther from the installation position of the robot can be realized.

[0212] As described above, for example, the robot 100 has a structure in which the trajectory of the fourth rotation axis 107 when conveying the wafer 50 is offset from the center line of the width of the trajectory of the second movable part 130 in the direction perpendicular to the vertical plane when conveying the wafer 50 to the back wall 230 side. As a result, a robot that can easily enter an entry object located on the back wall 230 side can be realized. In particular, when the housing 200 is an EFEM, the load lock chamber 240 whose size is not determined by the SEMI standard in many cases, unlike the cassette 220 whose size is determined by the SEMI standard, is located on the back wall 230 side. Therefore, by having this structure in the robot 100, the hand 136 can enter the opening of the back wall 230 and reach the processing chamber side located farther away, so that the robot that can easily enter the load lock chamber 240 that can be various sizes can be realized. As a result, a robot that can contribute to the realization of a system with a high degree of freedom in design can be realized.

[0213] As described above, the robot 100 may have a structure in which the trajectory of the fourth rotation axis 107 when conveying the wafer 50 is offset toward the front wall 210 from the center line of the width of the trajectory of the second movable portion 130 in the direction perpendicular to the vertical plane when conveying the wafer 50. Thus, a robot that can easily enter the opening of the cassette 220 located on the front wall 210 side can be realized.

[0214] For example, the length of the third arm 134 is shorter than the width of the action area 250 in the direction perpendicular to the vertical plane. Fig.13 , the length of the third arm 134 is shown to be greater than the width w of the operating region 250 in the y-axis direction. m An example of a short situation.

[0215] As described above, the robot 100 has a structure in which the length of the third arm 134 is shorter than the width of the operation area 250. Thus, a robot having high mobility of the robot arm when conveying a moving object in the operation area 250 can be realized.

[0216] For example, the length of the hand 136 and the wafer 50 when the hand 136 holds the wafer 50 is longer than the width of the action area 250 in the direction perpendicular to the vertical plane. The length of the hand 136 and the wafer 50 may be L 5w and L 5t For example, in L 5w L 5t In the case of long, the length between the hand 136 and the wafer 50 is L 5w For example, in L 5t L 5w In the case of long, the length between the hand 136 and the wafer 50 is L 5t The length of the hand 136 and the wafer 50 may be the longer of the length from the base end of the hand 136 to the end of the wafer 50 and the length from the base end of the hand 136 to the end of the hand 136. Fig.13 , the length of the hand 136 and the wafer 50 is shown to be greater than the width w of the operating area 250 in the y-axis direction. m An example of a long situation.

[0217] As described above, the robot 100 has a structure in which the length of the hand 136 and the wafer 50 when the hand 136 holds the wafer 50 is longer than the width of the operation area 250. This enables a robot that can enter an entry target located farther from the operation area 250.

[0218] For example, the maximum value of the width between the outer surface 1123 and the outer surface 1143 in the direction perpendicular to the vertical plane is contained within the width of the action area 250 in the direction perpendicular to the vertical plane. Fig.13 In the figure, the vertical plane between the outer surface 1123 and the outer surface 1143 is the xz plane, and the maximum width between the outer surface 1123 and the outer surface 1143 in the y-axis direction is contained in the width w of the action area 250 in the y-axis direction. m An example of the situation.

[0219] Since the maximum value of the width between the outer surface 1123 and the outer surface 1143 in the direction perpendicular to the vertical plane is accommodated in the width in the direction perpendicular to the vertical plane of the action region 250, the robot 100 can be arranged in the frame 200 in a state where the first side surface 112 and the second side surface 114 of the first base 110 are accommodated in the action region 250. Thus, a robot can be realized that can contribute to the realization of a system that achieves both high versatility and a thin frame.

[0220] Fig.14 134 and the hand 136. Here, the robot 100 mainly describes the coordinated operation of the third arm 134 and the hand 136 to move the wafer 50 at the c position. w The center c of the setting position of the box 223 p This is an example of a process of placing the wafer 50 into the cassette 223 in the aligned state.

[0221] At time t1, the wafer 50 is contained in the operation area 250. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t1 is moved out of the operation area 250.

[0222] At time t2, a part of the wafer 50 is located outside the operation area 250. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t2 is contained in the space in the cassette 223.

[0223] At time t3, at c of the wafer 50 w Located in via box 223 c p In the state of being on a straight line parallel to the y-axis, a part of the wafer 50 is contained in the space in the cassette 223. The control unit 152 controls the second movable unit 130 so that the wafer 50 in the state at time t3 moves in the positive direction of the y-axis.

[0224] At time t4, the wafer 50 is located outside the operation area 250. The control unit 152 controls the second movable unit 130 so as to further move the wafer 50 in the positive direction of the y-axis.

[0225] At time t5, the c of the wafer 50 w With box 223 c pBy placing the wafer 50 in the state at time t5 on the cassette 223 , the robot 100 completes the process of placing the wafer 50 into the cassette 223 .

[0226] exist Fig.14 In the example of wafer 50 placement processing performed by the robot 100 shown in FIG. 1 , the robot 100 places the wafer 50 into the cassette 223 by coordinated actions of the third arm 134 and the hand 136. Fig.14 In the example of the wafer 50 placement process performed by the robot 100 shown, the position of the fourth rotation axis 107 does not change during the entire placement process.

[0227] In the above description, an example of the coordinated operation of the third arm 134 and the hand 136 when the robot 100 puts the wafer 50 into the cassette 223 is described. The robot 100 can also take out the wafer 50 from the cassette 223 by the coordinated operation of the third arm 134 and the hand 136. For example, the control unit 152 controls the second movable unit 130 so that the state of the wafer 50 changes in the order of the state at time t5, the state at time t4, the state at time t3, the state at time t2, and the state at time t1, thereby the robot 100 takes out the wafer 50 from the cassette 223.

[0228] Fig.15 134, the hand 136, and the first movable part 120. Here, the robot 100 mainly describes the coordinated operation of the third arm 134, the hand 136, and the first movable part 120 to move the wafer 50 at the c position. w The center c of the installation position of the load lock chamber 241 p This is an example of a loading process of loading the wafer 50 into the load lock chamber 241 in the aligned state.

[0229] At time t1, the wafer 50 is contained in the operation area 250. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 in the state at time t1 moves out of the operation area 250.

[0230] At time t2, a portion of the wafer 50 is outside the operation area 250. When the state of the wafer 50 changes from the state at time t1 to the state at time t2, the position of the fourth rotation axis 107 moves in the positive direction of the x-axis. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 at the state at time t2 is contained in the space in the load lock chamber 241.

[0231] At time t3, a portion of the wafer 50 is contained in the space in the load lock chamber 241. When the state of the wafer 50 changes from the state at time t2 to the state at time t3, the position of the fourth rotation axis 107 moves in the positive direction of the x-axis. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 at time t3 moves in the negative direction of the x-axis and in the negative direction of the y-axis.

[0232] At time t4, the wafer 50 is located outside the operation area 250. When the state of the wafer 50 changes from the state at time t3 to the state at time t4, the position of the fourth rotation axis 107 moves in the negative direction of the x-axis. The control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the wafer 50 at time t4 moves further in the negative direction of the x-axis and further in the negative direction of the y-axis.

[0233] At time t5, the c of the wafer 50 w The center c of the load lock chamber 241 p When the state of the wafer 50 changes from the state at time t4 to the state at time t5, the position of the fourth rotation axis 107 moves in the negative direction of the x-axis. By placing the wafer 50 at the state at time t5 in the load lock chamber 241, the robot 100 completes the process of placing the wafer 50 into the load lock chamber 241.

[0234] exist Fig.15 In the example of the wafer 50 placement process performed by the robot 100 shown in FIG. 1 , the robot 100 places the wafer 50 in the load lock chamber 241 through the coordinated operation of the third arm 134, the hand 136, and the first movable part 120. Fig.15 In the example of the wafer 50 placement process performed by the robot 100 shown in FIG. 1 , the position of the fourth rotation axis 107 changes during the entire placement process. Specifically, while the state of the wafer 50 changes from the state at time t1 to the state at time t2 and the state at time t3 in that order, the position of the fourth rotation axis 107 moves in the positive direction of the x-axis, and while the state of the wafer 50 changes from the state at time t3 to the state at time t4 and the state at time t5 in that order, the position of the fourth rotation axis 107 moves in the negative direction of the x-axis.

[0235] In the above description, an example of the coordinated operation of the third arm 134, the hand 136, and the first movable part 120 when the robot 100 puts the wafer 50 into the load lock chamber 241 is described. The robot 100 can also take out the wafer 50 from the load lock chamber 241 through the coordinated operation of the third arm 134, the hand 136, and the first movable part 120. For example, the control unit 152 controls the first movable part 120 and the second movable part 130 so that the state of the wafer 50 is sequentially shifted to the state at time t5, the state at time t4, the state at time t3, the state at time t2, and the state at time t1, thereby the robot 100 takes out the wafer 50 from the load lock chamber 241.

[0236] Fig.16 An example of the second movable portion 130 is schematically shown in a state where the hand 136 holds the wafer 50 in the operation region 250. Here, matters related to the third arm 134 will be mainly described.

[0237] l d is a straight line parallel to the direction in which the wafer 50 is conveyed within the operation area 250. The robot 100 maintains contact with the d Parallel vector sum and l 45 The angle θ between parallel vectors 3d The wafer 50 is conveyed while being in a state of a predetermined offset angle. In addition, the offset angle may be described as α.

[0238] For example, α≠0°. Alternatively, α=0°.

[0239] The system at hand of the robot 100 is based on θ 3d In addition, sometimes θ 3d The angular range is recorded as the angular range of the system at hand.

[0240] The hand system angle range includes a first hand system angle range and a second hand system angle range. For example, the first hand system angle range corresponds to a state where the tip side of the third arm 134 is located to the right of the base side of the third arm 134, and the second hand system angle range corresponds to a state where the tip side of the third arm 134 is located to the left of the base side of the third arm 134. For example, the first hand system angle range is an angle from -90° to 90°, and the second hand system angle range is an angle from -180° to -90° and an angle from 90° to 180°. In this case, θ 3d The angle range is from -180° to 180°. 3d The angle range may also be any other angle range. Fig.16 In the figure, θ 3dAn example of the robot 100 included in the second hand system angle range.

[0241] l mc is the center line of the width of the action area 250. The fourth rotation axis 107 can be from l mc The fourth rotation axis 107 is, for example, offset from l mc The fourth rotation axis 107 may be offset from the rear wall 230. mc Offset to the front wall 210 side. Fig.16 , the fourth rotation axis 107 is shown from l mc An example of the robot 100 that is offset toward the rear wall 230 side.

[0242] Fig.17 Another example of the second movable unit 130 is schematically shown in a state where the hand 136 holds the wafer 50 in the operation area 250. Here, matters related to the hand 136 will be mainly described.

[0243] The robot 100 maintains the d Parallel vector sum and l Hc The angle θ between parallel vectors Hd The wafer 50 is conveyed while being in a state of a predetermined angle. In addition, the predetermined angle may be expressed as β.

[0244] For example, β≠0°. Fig.17 In the figure, while maintaining θ Hd An example of the robot 100 that transfers the wafer 50 while maintaining a state of β =β≠0°.

[0245] β=0° is also possible. Fig.16 In the figure, while maintaining θ Hd An example of the robot 100 that transfers the wafer 50 while keeping the state of β = 0°.

[0246] The fingertip system of the robot 100 is based on θ Hd In addition, sometimes θ Hd The angle range is recorded as the fingertip system angle range.

[0247] The fingertip system angle range includes a first fingertip system angle range and a second fingertip system angle range. For example, the first fingertip system angle range corresponds to a state where the tip side of the hand 136 is located to the right of the base side of the hand 136, and the second fingertip system angle range corresponds to a state where the tip side of the hand 136 is located to the left of the base side of the hand 136. For example, the first fingertip system angle range is an angle from -90° to 90°, and the second fingertip system angle range is an angle from -180° to -90° and an angle from 90° to 180°. In this case, θ Hd The angle range is from -180° to 180°. Hd The angle range may also be any other angle range. Fig.17 In the figure, θ Hd An example of the robot 100 included in the first fingertip system angle range.

[0248] Fig.18 This is an explanatory diagram for explaining an example of the operating range of the third rotation axis 105 . Fig.18 The robot 100 shown is θ B1 The robot 100 is included in the second arm system angle range.

[0249] D 13max is the distance between the first rotation axis 101 and the third rotation axis 105 when the first movable part 120 is maximally extended. 13max The length of the first movable part 120 when the first movable part 120 is maximally extended may be defined as the length of the first movable part 120 when the first movable part 120 is maximally extended. The length from the base end of the first arm 122 to the tip end of the second arm 124 when the first movable part 120 is maximally extended may also be defined as the length of the first movable part 120 when the first movable part 120 is maximally extended.

[0250] Region 261 is at θ B1 The area that the third rotation axis 105 can reach when it is included in the angle range of the second arm system. B1 The motion range of the third rotation axis 105 when it is included in the second arm system angle range corresponds to the motion range of the third rotation axis 105. Fig.18 The relationship between the robot 100 in the state 1 and the robot 100 in the state 2 and the third rotation axis 105 will be described.

[0251] Fig.18 The robot 100 in the illustrated state 1 is the robot 100 in a state where the height of the third rotation axis 105 is at the highest. Fig.18 The robot 100 in the illustrated state 2 is the robot 100 in a state where the height of the third rotation axis 105 is at the lowest.

[0252] Fig.19 This is an explanatory diagram for explaining another example of the operating range of the third rotation axis 105 . Fig.19 The robot 100 shown is θ B1 The robot 100 is included in the first arm system angle range. Fig.18 The difference.

[0253] Region 263 is at θ B1 The area that the third rotation axis 105 can reach when it is included in the first arm system angle range. B1 The motion range of the third rotation axis 105 when it is included in the first arm system angle range corresponds to the motion range of the third rotation axis 105. Fig.19 The relationship between the robot 100 in the state 1 and the robot 100 in the state 2 and the third rotation axis 105 will be described.

[0254] Fig.19 The robot 100 in the illustrated state 1 is the robot 100 in a state where the height of the third rotation axis 105 is at the highest. Fig.19 The robot 100 in the illustrated state 2 is the robot 100 in a state where the height of the third rotation axis 105 is at the lowest.

[0255] Fig. 20 105 and the maximum accessible region of the hand 136. First, an example of the maximum movable range of the third rotating shaft 105 will be described. Fig.18 The range of motion of the third rotating shaft 105 is shown as Fig.19 The range of motion of the third rotation axis 105 is shown as follows. Fig. 20 An example of the maximum motion range of the third rotation axis 105 is shown.

[0256] Region 265 is the region that the third rotation axis 105 can reach regardless of the arm system angular range. Region 267 is the region that is only within θ B1 The area 269 is the area that the third rotation axis 105 can reach when it is included in the angle range of the second arm system. B1 The area that the third rotation axis 105 can reach when the first arm system angle range is included. The maximum motion range of the third rotation axis 105 corresponds to the area that is the sum of the area 265 , the area 267 , and the area 269 .

[0257] The region 261 is the sum of the region 265 and the region 267. The region 263 is the sum of the region 265 and the region 269.

[0258] Next, an example of the maximum accessible area of ​​the hand 136 is described. Here, the maximum accessible area of ​​the hand 136 refers to the maximum area that the hand 136 can enter. In addition, the area that the hand 136 can enter refers to the area of ​​the wafer 50 held by the hand 136. w Able to enter.

[0259] The hand 136 being able to enter includes, for example, the hand 136 being able to enter without interfering with components of the robot 100 . The hand 136 being able to enter includes, for example, the hand 136 being able to enter without interfering with the robot 100 and the housing 200 .

[0260] The maximum accessible area of ​​the hand 136 is determined based on, for example, the position where the robot 100 is arranged in the housing 200 . The maximum accessible area of ​​the hand 136 is determined based on, for example, the width of the operation area 250 .

[0261] The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state where the first movable part 120 is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state where the second movable part 130 is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the posture of the robot 100 in a state where the first movable part 120 and the second movable part 130 are maximally extended.

[0262] The maximum enterable area of ​​the hand 136 is determined based on, for example, the length of the first movable portion 120 in a state in which the first movable portion 120 is maximally extended.

[0263] The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the second movable part 130 when the third rotation axis 105 is rotated in a state where the first movable part 120 is maximally extended. The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the second movable part 130 when the third rotation axis 105 is rotated in a state where the first movable part 120 is maximally bent.

[0264] The movable range of the second movable part 130 is determined based on, for example, the movable range of the second base 132. The movable range of the second movable part 130 is determined based on, for example, the movable range of the third arm 134. The movable range of the second movable part 130 is determined based on, for example, the movable range of the hand 136.

[0265] The movable range of the second movable part 130 is, for example, the movable range of the second movable part 130 when the third arm 134 and the hand 136 are coordinated. The movable range of the second movable part 130 is, for example, the movable range of the second movable part 130 when the second base 132, the third arm 134 and the hand 136 are coordinated.

[0266] The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the third arm 134 and the hand 136 when the fourth rotation axis 107 is rotated with the first movable portion 120 maximally extended. The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the third arm 134 and the hand 136 when the fourth rotation axis 107 is rotated with the first movable portion 120 maximally bent.

[0267] The movable ranges of the third arm 134 and the hand 136 are determined, for example, based on the movable ranges of the third arm 134. The movable ranges of the third arm 134 and the hand 136 are determined, for example, based on the movable ranges of the hand 136. The movable ranges of the third arm 134 and the hand 136 are, for example, the movable ranges of the third arm 134 and the hand 136 when the third arm 134 and the hand 136 are coordinated in motion.

[0268] The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the hand 136 when the fifth rotation axis 109 is rotated with the first movable portion 120 maximally extended. The maximum accessible area of ​​the hand 136 is determined based on, for example, the movable range of the hand 136 when the fifth rotation axis 109 is rotated with the first movable portion 120 maximally bent.

[0269] The maximum accessible area of ​​the hand 136 is determined, for example, based on the length of the second movable part 130 in a state where the second movable part 130 is maximally extended. The maximum accessible area of ​​the hand 136 is determined, for example, based on the length from the fourth rotation axis 107 to the end of the hand 136 when the second movable part 130 is maximally extended in a state where the third arm 134 and the hand 136 are parallel to the horizontal plane.

[0270] The maximum accessible area of ​​the hand 136 is determined based on, for example, the height of the first rotation axis 101. The maximum accessible area of ​​the hand 136 includes, for example, an upper accessible area of ​​the hand 136 when the height of the third rotation axis 105 is higher than the height of the first rotation axis 101, and a lower accessible area of ​​the hand 136 when the height of the third rotation axis 105 is lower than the height of the first rotation axis 101. Fig. 20 In the example shown, the upper accessible area of ​​the hand 136 is a plane p whose height is higher than the third rotation axis 105 and is parallel to the first rotation axis 101 and includes the first rotation axis 101. 1pThe lower accessible area of ​​the hand 136 is the area where the height of the third rotation axis 105 is higher than p. 1p The accessible area of ​​the hand 136 in the state of being at a low height. Fig. 20 In the example shown, p 1p is the xy plane.

[0271] The maximum accessible area of ​​the hand 136 is also based on, for example, 23 The length L from the third rotation axis 105 to the upper end of the second movable portion 130 when the parallel vector is perpendicular to the arrangement surface of the first base portion 110 and parallel to the fourth rotation axis 107 is 2u In the accessible area above the hand 136, L 2u This helps expand the entry area for the hand 136. On the other hand, within the entry area below the hand 136, L 2u It does not contribute to the expansion of the entry area of ​​the hand 136 .

[0272] The maximum accessible area of ​​the hand 136 is also based on, for example, θ B1 The maximum accessible area of ​​the hand 136 includes, for example, θ B1 The first accessible area of ​​the hand 136 included in the first arm system angle range, and θ B1 A second accessible region for hand 136 is included within the second arm system angle range.

[0273] The maximum accessible area of ​​hand 136 is determined based on the maximum motion range of third rotation axis 105. The maximum accessible area of ​​hand 136 includes, for example, an area within the maximum motion range of third rotation axis 105 and an area 284 outside the maximum motion range of third rotation axis 105. Fig. 20 In FIG. 5 , the c of the wafer 50 is shown. w An example of an outer boundary that can be entered is represented by a two-dot chain line indicating the outer boundary of the area 284.

[0274] The object of entry may be located within the maximum accessible area of ​​the hand 136. For example, one or more openings of the front wall 210 of the frame 200 are located within the maximum accessible area of ​​the hand 136. For example, one or more openings of the back wall 230 of the frame 200 are located within the maximum accessible area of ​​the hand 136. The PA 300 may also be located on the side wall of the frame 200 and within the maximum accessible area of ​​the hand 136.

[0275] according to Fig. 20The system 10 in one embodiment shown can maximize the use of the accessible area of ​​the hand 136 to configure the entry object. Fig. 20 The system 10 in the illustrated embodiment can increase the number of objects that can be placed in the housing 200 , and as a result, can realize a system with a high degree of freedom in the design of the housing.

[0276] Fig.21 1 is an explanatory diagram for explaining an example of the relationship between the maximum accessible area of ​​the hand 136 and the opening of the frame 200. Fig.21 In the figure, θ 12 An example of the robot 100 included in the first elbow system angle range.

[0277] The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the components of the robot 100. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the first movable part 120 and the third arm 134. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the second arm 124 and the third arm 134. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the first movable part 120 and the hand 136. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the second arm 124 and the hand 136.

[0278] The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the frame 200. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the front wall 210. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the rear wall 230. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the first side wall 270. The multiple openings of the frame 200 are, for example, located at positions where the hand 136 can enter without interfering with the second side wall 290.

[0279] At least one of the multiple openings of the frame 200 is, for example, located in an area within the range of the maximum movement range of the third rotation axis 105. At least one of the multiple openings of the frame 200 is, for example, located in area 265. At least one of the multiple openings of the frame 200 is, for example, located in area 267. At least one of the multiple openings of the frame 200 is, for example, located in area 269. Fig.21 In the example shown, three openings of the front wall 210, namely, the opening 2220, the opening 2230, and the opening 2240, are located in the region 265. The openings being located in the region include not only all of the openings being located in the region but also a portion of the openings being located in the region.

[0280] At least one of the plurality of openings of the frame 200 is located, for example, in the region 284 outside the maximum range of motion of the third rotation axis 105. At least one of the plurality of openings of the frame 200 is located, for example, within the trajectory of the third arm 134 and the hand 136 when the first movable portion 120 is rotated in a state where the first movable portion 120 is maximally extended and the third arm 134 and the hand 136 are parallel to the horizontal plane. Fig.21 In the example shown, two openings, namely, the opening 2210 and the opening 2250 included in the front wall 210 are located in the region 284 .

[0281] according to Fig.21 In the system 10 of one embodiment shown, the frame 200 has an opening located in the region 284. Thus, the length from the third rotation axis 105 to the upper end of the second movable portion 130 can be used to the maximum extent to arrange the entry object, so the number of entry objects that can be arranged in the frame 200 can be further increased, resulting in a system with a higher degree of freedom in the design of the frame.

[0282] One of the plurality of openings included in the front wall 210 is located, for example, at a position where, when the first movable portion 120 is bent to the maximum, the hand 136 can enter the wafer storage portion of the bottom layer of the box 220 that is arranged at a position corresponding to the one opening. Thus, as long as the wafer storage portion of the bottom layer of the box 220 can be entered, the space near the boundary of the maximum accessible area can also be used, so the number of accessible objects that can be arranged in the frame 200 can be further increased, resulting in a system with a higher degree of freedom in the design of the frame. In addition, in Fig.21 In the example shown, the opening 2230 of the front wall 210 is located at a position where the hand 136 can enter the lowermost wafer storage portion of the cassette 223 corresponding to the opening 2230 when the first movable portion 120 is maximally bent.

[0283] The plurality of openings of the frame 200 are, for example, located at a position higher than the first rotation axis 101. The plurality of openings of the frame 200 are, for example, located in the upper accessible region. Fig.21 In the example shown, five openings of the front wall 210 , namely, the opening 2210 , the opening 2220 , the opening 2230 , the opening 2240 , and the opening 2250 , are located in the upward accessible region.

[0284] The frame 200 further includes an opening 2850, for example, in the maximum accessible area of ​​the hand 136 and at a position lower than the first rotation axis 101. The frame 200 further includes an opening 2850, for example, in the lower accessible area. Thus, the number of accessible objects that can be configured in the frame 200 can be further increased, and as a result, a system with a higher degree of freedom in the design of the frame can be realized.

[0285] The housing 200 has an opening 2850 on the front wall 210, for example. The housing 200 may also have an opening 2850 on the rear wall 230. Fig.21 , an example of a housing 200 in which the front wall 210 has an opening 2850 is shown.

[0286] The opening 2850 is located, for example, at a position where the hand 136 can enter without interfering with the third arm 134 and the first base 110. The opening 2850 is located, for example, at a position where the hand 136 can enter without interfering with the first base 110. Thus, as long as the third arm 134 and the first base 110 do not interfere with each other, the space near the first base 110 can be used, so the number of objects that can be placed in the housing 200 can be further increased, and as a result, a system with a higher degree of freedom in the design of the housing can be realized.

[0287] At least one of the plurality of openings included in the housing 200 is located, for example, within the first accessible region of the hand 136 . The at least one opening is located, for example, within the second accessible region of the hand 136 .

[0288] At least one of the plurality of openings of the frame 200 is located, for example, within the first accessible region of the hand 136 and within the second accessible region of the hand 136. The hand 136 can access the at least one opening regardless of the arm system angle range.

[0289] according to Fig.21In the system 10 in one embodiment shown, the robot 100 can enter the opening without changing the arm system by configuring the opening of the frame 200 at a position where the hand 136 can enter regardless of the angle range of the arm system of the robot 100. As a result, a system with high throughput can be achieved as a whole. In particular, by configuring the opening with the highest entry frequency of the hand 136, such as the most frequent opening, in the opening of the frame 200, where the hand 136 can enter regardless of the angle range of the arm system, a system with higher throughput can be achieved.

[0290] Fig. 22 1 is an explanatory diagram for explaining an example of the operation of the robot 100 disposed in the housing 200. Here, an example of the operation of changing the fingertip system of the robot 100 will be mainly described.

[0291] The frame 200 has, for example, a Hd The portion is, for example, a hole. For example, the hole does not penetrate the wall of the frame 200 but forms a recess in the wall of the frame 200. In this case, the hole is a blind hole. The hole may also penetrate the wall of the frame 200. In this case, the hole is a through hole. The portion may be an example of an entry object.

[0292] This portion is, for example, located on the side of the front wall 210. This portion is, for example, located above the box 220. This portion is, for example, located below the box 220. This portion is, for example, located on the left side of the box 221. This portion may also be located on the right side of the box 225. This portion may also be located on the side of the back wall 230. This portion is, for example, located above the loading lock chamber 240 or the box 220. This portion is, for example, located below the loading lock chamber 240 or the box 220. This portion is, for example, located on the left side of the loading lock chamber 241 or the box 220 at the left end. This portion may also be located on the right side of the loading lock chamber 243 or the box 220 at the right end. Fig. 22 In the figure, the front wall 210 side has a Hd An example of the portion 212 of the frame body 200.

[0293] The robot 100 changes θ at the portion 212, for example. Hd The robot 100, for example, moves θ at the portion 212 Hd The angle range of the fingertip system is changed between the first fingertip system angle range and the second fingertip system angle range. The robot 100 changes θ Hd The angle range of the fingertip system is changed from the first fingertip system angle range to the second fingertip system angle range. The robot 100, for example, changes θ Hd From 0° to -180°, θ HdThe angle range of the fingertip system is changed from the first fingertip system angle range to the second fingertip system angle range. The robot 100, for example, changes θ Hd The angle range of the second fingertip system is changed to the first fingertip system angle range. The robot 100 changes θ Hd From -180° to 0°, θ Hd The angle range is changed from the second fingertip system angle range to the first fingertip system angle range.

[0294] The portion 212 has a space that allows the robot 100 to change the fingertip system by rotating only the hand 136, for example. The robot 100 changes the fingertip system by rotating only the hand 136 at the portion 212. Thus, the robot 100 can change the fingertip system in a short time, and thus, as a whole, a system with high throughput can be realized.

[0295] Fig.23 2 is an explanatory diagram for explaining another example of the operation of the robot 100 disposed in the frame 200. Fig. 22 The difference.

[0296] The front wall 210 of the frame body 200 has a Hd The robot 100, for example, moves θ at the portion 214. Hd The angle range of the fingertip system is changed between the first fingertip system angle range and the second fingertip system angle range.

[0297] The portion 214 has, for example, a space that enables the fingertip system to be changed by the robot 100 coordinating the hand 136 and the first movable part 120. The coordinated operation of the hand 136 and the first movable part 120 includes, for example, the coordinated operation of the hand 136 and the first arm 122. The coordinated operation of the hand 136 and the first movable part 120 includes, for example, the coordinated operation of the hand 136 and the second arm 124. The coordinated operation of the hand 136 and the first movable part 120 may also include the coordinated operation of the hand 136, the first arm 122, and the second arm 124.

[0298] The space required to change the fingertip system of the robot 100 by the coordinated operation of the hand 136 and the first movable part 120 is smaller than the space required to change the fingertip system of the robot 100 by only rotating the hand 136. Therefore, the space of the frame 200 required to change the fingertip system of the robot 100 can be saved, and the object of entry can be arranged in the space. As a result, a system with a high degree of freedom in the design of the frame can be realized.

[0299] Fig.24 2 is an explanatory diagram for explaining another example of the operation of the robot 100 disposed in the frame 200. Fig. 22 and Fig.23 The difference.

[0300] The robot 100 changes the fingertip system in the opening for entering the box 220 provided in the front wall 210, for example. The opening for entering the box 220 may be a portion for changing the θ Hd An example of part of .

[0301] By changing the fingertip system in the opening for entering the box 220, the robot 100 can change the fingertip system even if the frame 200 does not have the portion 212 or the portion 214. This can further save the space of the frame 200, resulting in a system with a higher degree of freedom in the design of the frame.

[0302] Fig.25 An example of the functional configuration of the robot 100 is schematically shown. The robot 100 includes an acquisition unit 151, a control unit 152, an information storage unit 154, a cooperative action selection unit 156, a condition storage unit 158, and a condition selection unit 160. The robot 100 does not necessarily have to include all of these configurations.

[0303] The acquisition unit 151 acquires various information. The acquisition unit 151 acquires various information by, for example, receiving various information from an external device. The acquisition unit 151 may also acquire various information by accepting input from a user of the robot 100 via an input unit provided in the robot 100. The user of the robot 100 is, for example, an administrator of the system 10.

[0304] The acquisition unit 151 acquires, for example, entry processing information indicating an entry processing of causing the hand 136 to enter an entry object. The entry processing information includes, for example, entry object information indicating an entry object. The entry processing information includes, for example, entry object position information indicating the position of the entry object.

[0305] The control unit 152 controls a control object. The control unit 152 controls the robot 100, for example.

[0306] The control unit 152 controls the control object, for example, by sending a control signal to the control object. The control unit 152 sends the control signal to the control object, for example, via a network. The control unit 152 sends the control signal to the control object, for example, via a wired network. For example, when the control object of the control unit 152 is the robot 100, the control unit 152 sends the control signal to the robot 100 via the cable and connector unit 1148. The control unit 152 sends the control signal to the control object, for example, via a wireless network. The control unit 152 sends the control signal to the control object, for example, via a wireless network based on a short-range wireless communication method such as Wi-Fi (registered trademark), Bluetooth (registered trademark) and Zigbee (registered trademark). The control unit 152 can also send the control signal to the control object via the Internet.

[0307] The control unit 152 is, for example, external to the robot 100 . The control unit 152 may also be built in the robot 100 . The control unit 152 is, for example, built in the first side surface portion 112 . The control unit 152 is built in the second side surface portion 114 . The control unit 152 may also be built in any other part of the robot 100 .

[0308] The control unit 152 controls, for example, a robot arm. The control unit 152 controls, for example, the robot arm to extend the robot arm. The control unit 152 may control the robot arm to bend the robot arm.

[0309] The control unit 152 controls, for example, the first movable unit 120. The control unit 152 controls, for example, the second movable unit 130. The control unit 152 controls, for example, the first movable unit 120 and the second movable unit 130.

[0310] The control unit 152 controls the first movable unit 120, for example, by controlling the motor that rotates the first rotating shaft 101. The control unit 152 controls the motor that rotates the first rotating shaft 101, for example, by driving the motor that rotates the first rotating shaft 101. For example, when the motor that rotates the first rotating shaft 101 is a servo motor, the control unit 152 controls the speed reduction mechanism in addition to controlling the servo motor. The control unit 152 controls the first movable unit 120, for example, by controlling the motor that rotates the second rotating shaft 103. The control unit 152 controls the motor that rotates the second rotating shaft 103, for example, by driving the motor that rotates the second rotating shaft 103. For example, when the motor that rotates the second rotating shaft 103 is a servo motor, the control unit 152 controls the speed reduction mechanism in addition to controlling the servo motor.

[0311] The control unit 152 controls the second movable unit 130, for example, by controlling the motor that rotates the third rotating shaft 105. The control unit 152 controls the motor that rotates the third rotating shaft 105, for example, by driving the motor that rotates the third rotating shaft 105. For example, when the motor that rotates the third rotating shaft 105 is a servo motor, the control unit 152 controls the speed reduction mechanism in addition to controlling the servo motor. The control unit 152 controls the second movable unit 130, for example, by controlling the motor that rotates the fourth rotating shaft 107. The control unit 152 controls the motor that rotates the fourth rotating shaft 107, for example, by driving the motor that rotates the fourth rotating shaft 107. The control unit 152 controls the second movable unit 130, for example, by controlling the motor that rotates the fifth rotating shaft 109. The control unit 152 controls the motor that rotates the fifth rotating shaft 109, for example, by driving the motor that rotates the fifth rotating shaft 109.

[0312] The control unit 152 controls, for example, the posture of the robot 100. The control unit 152 controls, for example, the motion of the robot 100.

[0313] The control unit 152 controls the robot 100 so as to enter the entry target, for example. The control unit 152 controls the robot 100 so as to enter the entry target, for example, based on the entry processing information acquired by the acquisition unit 151 .

[0314] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so as to enter one opening or each of the plurality of openings of the housing 200. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so as to enter one opening or each of the plurality of openings of the housing 200 while the hand 136 is parallel to the horizontal plane.

[0315] The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: B1 The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ 12 The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ 2B The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ 3HThe control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ 3d The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ Hd The control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: while maintaining θ B1 ,θ 12 ,θ 2B ,θ 3H ,θ 3d and θ Hd In the state where two or more angles in the angle condition satisfy the angle condition, the hand 136 is moved into the object. B1 The angle condition is recorded as the arm system angle condition, and sometimes θ 12 The angle condition is recorded as the elbow system angle condition, sometimes θ 2B The angle condition is recorded as the wrist system angle condition, and sometimes θ 3H The angle condition of is recorded as the hand system angle condition, and sometimes θ 3d The angle condition is recorded as the angle condition of the system at hand, and sometimes θ Hd The angle condition is recorded as the fingertip system angle condition.

[0316] The control unit 152 controls the robot 100 to remove a wafer 50 as an example of a moving object from the entering object. The control unit 152 controls the first movable unit 120 and the second movable unit 130 to remove the wafer 50 from the entering object while the hand 136 is parallel to the horizontal plane.

[0317] The control unit 152 controls the robot 100 to hold the wafer 50, for example. The control unit 152 controls the first movable unit 120 and the second movable unit 130 to hold the wafer 50 in a state where the hand 136 is parallel to the horizontal plane, for example.

[0318] The control unit 152 controls the robot 100, for example, in such a manner as to transport the wafer 50 held by the hand 136. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in such a manner as to transport the wafer 50 while the wafer 50 held by the hand 136 is contained in the operation area 250. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in such a manner as to transport the wafer 50 while the wafer 50 held by the hand 136 is contained in the operation area 250, and to make the hand 136 enter the opening of the frame 200 while the hand 136 is parallel to the horizontal plane.

[0319] The control unit 152 controls the second movable unit, for example, in such a manner that the width of the trajectory of the second movable unit 130 in the direction perpendicular to the vertical plane when conveying the wafer 50 is accommodated within the width of the trajectory of the conveyed wafer 50 in the direction perpendicular to the vertical plane. The control unit 152 controls the second movable unit, for example, in such a manner that the width of the trajectory of the third arm 134 and the hand 136 in the direction perpendicular to the vertical plane when conveying the wafer 50 is accommodated within the width of the trajectory of the conveyed wafer 50 in the direction perpendicular to the vertical plane. Thus, a robot capable of conveying the wafer 50 in a space having a narrower width of the action region 250 can be realized. As a result, a robot capable of contributing to the thinning of the housing can be realized.

[0320] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: the wafer 50 held by the hand 136 is kept within the operation area 250 and the c of the wafer 50 is kept constant. w Located in mc The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: while maintaining the wafer 50 held by the hand 136 within the operation area 250 and the wafer 50 c w Located in mc While maintaining the state above, the chip 50 is advanced.

[0321] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: while the wafer 50 held by the hand 136 is kept within the operation area 250 and the 3d The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, as follows: while the wafer 50 held by the hand 136 is kept within the operation area 250 and θ HdThe control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: while the wafer 50 held by the hand 136 is kept within the operation area 250, θ 3d is the offset angle and θ Hd The wafer 50 is conveyed while being kept at a predetermined angle.

[0322] The robot 100 maintains θ 3d is the state of the bias angle or θ Hd By controlling the first movable part 120 and the second movable part 130 so as to transfer the wafer 50 at a predetermined angle, the wafer 50 can be transferred within the operation area 250 while the third arm 134 or the hand 136 is tilted relative to the direction in which the wafer 50 is transferred. As a result, a robot can be realized that can transfer the wafer 50 in a space with a narrower width of the operation area 250. As a result, a robot that can contribute to a thinner housing can be realized.

[0323] The control unit 152 controls the robot 100 to place the wafer 50 into the entry target, for example. The control unit 152 controls the first movable unit 120 and the second movable unit 130 to place the wafer 50 into the entry target with the hand 136 parallel to the horizontal plane, for example.

[0324] The information storage unit 154 stores various information. For example, the information storage unit 154 stores coordinated action related information, which associates the position of the object to be entered with the type of coordinated action of the robot 100 when entering the position of the object. The coordinated action related information, for example, associates the position of each of the one or more openings of the front wall 210 and the position of each of the one or more openings of the back wall 230, and the type of coordinated action of the robot 100 when the hand 136 enters the position of each of the one or more openings of the front wall 210 and the position of each of the one or more openings of the back wall 230. The acquisition unit 151 can acquire the coordinated action related information and store the acquired coordinated action related information in the information storage unit 154.

[0325] The coordinated operation of the robot 100, for example, includes only the coordinated operation of the third arm 134 and the hand 136. The coordinated operation of the robot 100, for example, includes the coordinated operation of the third arm 134, the hand 136, and the first movable part 120. The coordinated operation of the robot 100 includes the coordinated operation of the hand 136 and the first movable part 120.

[0326] The coordinated operation selection unit 156 selects a coordinated operation of the robot 100 when the robot 100 enters the entry target.

[0327] The coordinated action selection unit 156 selects a coordinated action of the robot 100 based on, for example, the position of the entry object entered by the hand 136 indicated by the entry processing information acquired by the acquisition unit 151 and the coordinated action related information stored in the information storage unit 154. The coordinated action selection unit 156 selects, for example, whether to make the hand 136 enter the entry object only through the coordinated action of the third arm 134 and the hand 136, or to make the hand 136 enter the entry object through the coordinated action of the third arm 134, the hand 136, and the first movable unit 120. The control unit 152 can control the first movable unit 120 and the second movable unit 130 in the following manner: through the coordinated action of the robot 100 selected by the coordinated action selection unit 156, the hand 136 enters the entry object in a state where the hand 136 is parallel to the horizontal plane.

[0328] In a case where the hand 136 can enter the entry object by the coordinated action of only the third arm 134 and the hand 136 as a coordinated action that can enter the entry object in a short time, the robot 100 selects the coordinated action of only the third arm 134 and the hand 136 to enter the entry object. On the other hand, in a case where the hand 136 cannot enter the entry object only by the coordinated action of the third arm 134 and the hand 136, the robot 100 selects the coordinated action of the third arm 134, the hand 136, and the first movable part 120 to enter the entry object. Thus, as a whole, a robot that takes into account both high processing volume and a wide accessible area can be realized. As a result, a robot that can contribute to a system that can manufacture more semiconductors per unit time can be realized.

[0329] In addition, the third arm 134 and the hand 136 are components of the end portion of the robot 100 compared to the first movable part 120, so the coordinated operation of only the third arm 134 and the hand 136 causes less vibration to the robot 100 than the coordinated operation of the third arm 134, the hand 136, and the first movable part 120. Therefore, when the hand 136 can enter the entry object only by the coordinated operation of the third arm 134 and the hand 136, the coordinated operation of only the third arm 134 and the hand 136 is selected to enter the entry object, and when the hand 13 cannot enter the entry object only by the coordinated operation of the third arm 134 and the hand 136, the coordinated operation of the third arm 134, the hand 136, and the first movable part 120 is selected to enter the entry object, thereby realizing a robot that takes into account both safe entry to the entry object and a wide accessible area as a whole. As a result, it is possible to realize a robot that can contribute to the realization of a system with a high yield in the manufacture of semiconductors.

[0330] Furthermore, when a motor capable of controlling the position with high precision, such as a DD motor, is used in the control of the third arm 134 and the hand 136, when the hand 136 can enter the entry object only by the coordinated action of the third arm 134 and the hand 136, the coordinated action of the third arm 134 and the hand 136 is selected to enter the entry object, and when the hand 136 cannot enter the entry object only by the coordinated action of the third arm 134 and the hand 136, the coordinated action of the third arm 134, the hand 136 and the first movable part 120 is selected to enter the entry object, thereby realizing a robot that takes into account both high-precision entry into the entry object and a wide accessible area as a whole. As a result, it is possible to realize a robot that can contribute to the realization of a system capable of manufacturing semiconductors of higher quality.

[0331] For example, when the hand 136 is made to enter each of the plurality of openings of the front wall 210, the coordinated action selection unit 156 selects to make the hand 136 enter the entry object only through the coordinated action of the third arm 134 and the hand 136. For example, when the hand 136 is made to enter one of the one or more openings of the rear wall 230, the coordinated action selection unit 156 selects to make the hand 136 enter the entry object through the coordinated action of the third arm 134, the hand 136, and the first movable unit 120. For example, when the hand 136 is made to enter the other of the one or more openings of the rear wall 230, the coordinated action selection unit 156 selects to make the hand 136 enter the entry object only through the coordinated action of the third arm 134 and the hand 136.

[0332] The condition storage unit 158 ​​stores the angle condition. For example, the condition storage unit 158 ​​stores the angle condition including a first candidate condition and a second candidate condition, wherein the first candidate condition is that the angle is included in the first angle range, and the second candidate condition is that the angle is included in the second angle range. The acquisition unit 151 can acquire the angle condition and store the acquired angle condition in the condition storage unit 158.

[0333] The condition storage unit 158 ​​stores, for example, arm system angle conditions. The condition storage unit 158 ​​stores, for example, arm system angle conditions including a first arm system candidate condition and a second arm system candidate condition, wherein the first arm system candidate condition is expressed in terms of θ. B1 The second arm system candidate condition is contained in the first arm system angle range. B1 The condition is that it is included in the angle range of the second arm system.

[0334] The condition storage unit 158 ​​stores, for example, elbow system angle conditions. The condition storage unit 158 ​​stores, for example, elbow system angle conditions including a first elbow system candidate condition and a second elbow system candidate condition, wherein the first elbow system candidate condition is based on θ 12The second elbow system candidate condition is θ 12 The condition is that it is included in the angle range of the second elbow system.

[0335] The condition storage unit 158 ​​stores, for example, wrist system angle conditions. The condition storage unit 158 ​​stores, for example, wrist system angle conditions including a first wrist system candidate condition and a second wrist system candidate condition, wherein the first wrist system candidate condition is in the form of θ 2B The second wrist system candidate condition is θ 2B The condition is that it is included in the angle range of the second wrist system.

[0336] The condition storage unit 158 ​​stores, for example, the hand system angle condition. The condition storage unit 158 ​​stores, for example, the hand system angle condition including the first hand system candidate condition and the second hand system candidate condition, wherein the first hand system candidate condition is θ 3H The second hand system candidate condition is θ 3H Conditional on being included in the angle range of the second hand system.

[0337] The condition storage unit 158 ​​stores, for example, the system angle condition at hand. The condition storage unit 158 ​​stores, for example, the system angle condition at hand including the first system candidate condition at hand and the second system candidate condition at hand, wherein the first system candidate condition is θ 3d The condition that the first hand system angle range is included is that the second hand system candidate condition is θ 3d Conditional on being included in the angular range of the second hand system.

[0338] The condition storage unit 158 ​​stores, for example, the fingertip system angle condition. The condition storage unit 158 ​​stores, for example, the fingertip system angle condition including the first fingertip system candidate condition and the second fingertip system candidate condition, wherein the first fingertip system candidate condition is θ Hd The second fingertip system candidate condition is θ Hd The condition is included in the angle range of the second fingertip system.

[0339] The condition storage unit 158 ​​may also store PA entry conditions that must be satisfied when the hand 136 enters the PA 300. The PA entry conditions include, for example, when the hand 136 enters the PA 300. B1 The PA entry conditions of the arm system must be satisfied. The PA entry conditions include, for example, when the hand 136 enters the PA 300 12 The PA entry conditions of the elbow system must be met. The PA entry conditions include, for example, when the hand 136 enters the PA 300 2BThe wrist system PA entry conditions must be satisfied. The PA entry conditions include, for example, when the hand 136 enters the PA 300 3H The PA entry conditions of the hand system must be satisfied. The PA entry conditions include, for example, when the hand 136 enters the PA 300 3d The PA entry conditions of the hand system must be met. The PA entry conditions include, for example, when the hand 136 enters the PA 300 Hd The PA entry conditions of the fingertip system must be satisfied. The PA entry conditions include, for example, two or more of the arm system PA entry conditions, elbow system PA entry conditions, wrist system PA entry conditions, hand system PA entry conditions, hand side system PA entry conditions, and fingertip system PA entry conditions. The PA entry conditions may be an example of an angle condition.

[0340] The most frequent opening is, for example, located at the position θ when the hand 136 enters the most frequent opening. B1 The position that satisfies the arm system PA entry condition. The most frequent opening is, for example, located at θ when the hand 136 enters the most frequent opening. 12 The position that satisfies the elbow system PA entry condition. The most frequent opening is, for example, located at θ when the hand 136 enters the most frequent opening. 2B The position that satisfies the wrist system PA entry condition. The most frequent opening is, for example, located at θ when the hand 136 enters the most frequent opening. 3H The position that satisfies the entry condition of the hand system PA. The most frequent opening is, for example, located at θ when the hand 136 enters the most frequent opening. 3d The position that satisfies the entry condition of the hand system PA. The most frequent opening is, for example, located at θ when the hand 136 enters the most frequent opening. Hd The position that satisfies the fingertip system PA entry condition. As a result, the hand 136 can continuously enter the most frequent opening and PA 300 without changing the angle condition, thereby realizing a robot with high processing capacity. As a result, it is possible to realize a robot that can contribute to the realization of a system that can manufacture more semiconductors per unit time.

[0341] The most frequent opening is, for example, an opening of the front wall 210 . The most frequent opening may also be an opening of the rear wall 230 .

[0342] The condition selection unit 160 selects an angle condition for the entry process. For example, the condition selection unit 160 selects an angle condition for the entry process indicated by the entry process information from the first candidate condition and the second candidate condition included in the angle conditions stored in the condition storage unit 158, based on the position of the entry object entered by the hand 136 indicated by the entry process information acquired by the acquisition unit 151. The control unit 152 controls the first movable unit 120 and the second movable unit 130 in such a manner that the hand 136 enters the entry object while maintaining a state that satisfies the angle condition selected by the condition selection unit 160.

[0343] The condition selection unit 160 selects the arm system angle condition to be processed, for example, from the first arm system candidate condition and the second arm system candidate condition included in the arm system angle conditions stored in the condition storage unit 158. The condition selection unit 160 selects the elbow system angle condition to be processed, for example, from the first elbow system candidate condition and the second elbow system candidate condition included in the elbow system angle conditions stored in the condition storage unit 158. The condition selection unit 160 selects the wrist system angle condition to be processed, for example, from the first wrist system candidate condition and the second wrist system candidate condition included in the wrist system angle conditions stored in the condition storage unit 158. The condition selection unit 160 selects the hand system angle condition to be processed, for example, from the first hand system candidate condition and the second hand system candidate condition included in the hand system angle conditions stored in the condition storage unit 158. The condition selection unit 160 selects the hand system angle condition to be processed, for example, from the first hand system candidate condition and the second hand system candidate condition included in the hand system angle conditions stored in the condition storage unit 158. The condition selection unit 160 selects the fingertip system angle condition to be processed, for example, from the first fingertip system candidate condition and the second fingertip system candidate condition included in the fingertip system angle condition stored in the condition storage unit 158. The condition selection unit 160 selects, for example, two or more of the arm system angle condition to be processed, the elbow system angle condition to be processed, the wrist system angle condition to be processed, the hand system angle condition to be processed, the hand system angle condition to be processed, and the fingertip system angle condition to be processed as the angle condition to be processed.

[0344] For example, when the object is located on the side wall of the frame 200 and only at θ B1 When the hand 136 can enter when it is included in the first arm system angle range, the condition selection unit 160 selects the first arm system candidate condition as the arm system angle condition for the entry process. The entry target is, for example, the PA 300 .

[0345] For example, when the object is located on the side wall of the frame 200 and only at θ 12When the hand 136 can enter within the first elbow system angle range, the condition selection unit 160 selects the first elbow system candidate condition as the elbow system angle condition for the entry process. The entry target is, for example, the PA 300 .

[0346] For example, when the object is located on the side wall of the frame 200 and only at θ 2B When the hand 136 can enter within the first wrist system angle range, the condition selection unit 160 selects the first wrist system candidate condition as the wrist system angle condition for the entry process. The entry target is, for example, the PA 300 .

[0347] For example, when the object is located on the side wall of the frame 200 and only at θ 3H When the hand 136 can enter within the first hand system angle range, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition for the entry process. The entry object is, for example, PA300.

[0348] For example, when the object is located on the side wall of the frame 200 and only at θ 3d If the hand 136 can enter when it is included in the first system-at-hand angle range, the condition selection unit 160 selects the first system-at-hand candidate condition as the system-at-hand angle condition for the entry process. The entry object is, for example, the PA 300 .

[0349] For example, when the object is located on the side wall of the frame 200 and only at θ Hd When the hand 136 can enter when it is included in the first fingertip system angle range, the condition selection unit 160 selects the first fingertip system candidate condition as the fingertip system angle condition for the entry process. The entry target is, for example, PA300.

[0350] For example, when the first arm system candidate condition is selected as the arm system angle condition for the first entry process, B1 When the hand 136 can enter the entry target of the second entry process, which is the next entry process of the first entry process, in the state included in the first arm system angle range, the condition selection unit 160 selects the first arm system candidate condition as the arm system angle condition of the second entry process, and B1 When the hand 136 cannot enter the entry target of the second entry process in a state included in the first arm system angle range, the condition selection unit 160 selects the second arm system candidate condition as the arm system angle condition of the second entry process. When the condition selection unit 160 selects the second arm system candidate condition as the arm system angle condition of the second entry process, the control unit 152 may set θ B1The first movable unit 120 and the second movable unit 130 are controlled so as to change from the first arm system angle range to the second arm system angle range. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, in the following manner: the angle θ is changed to the second arm system angle range without causing interference between the third arm 134, the hand 136 and the surrounding objects of the robot 100 such as the frame 200. B1 From an angle greater than 0° to an angle less than 0°, θ B1 Change from the first arm system angle range to the second arm system angle range.

[0351] For example, in θ B1 When the hand 136 can enter the entry target of the third entry process, which is the next entry process of the second entry process, in the state included in the first arm system angle range, the condition selection unit 160 selects the first arm system candidate condition as the arm system angle condition of the third entry process. B1 When the hand 136 can enter the entry target of the third entry process in a state included in the second arm system angle range, the condition selection unit 160 selects the second arm system candidate condition as the arm system angle condition of the third entry process.

[0352] For example, when the elbow system candidate condition is selected as the elbow system angle condition for the first entry process, in θ 12 When the hand 136 can enter the entry process that follows the first entry process, that is, the entry target of the second entry process, in the state included in the first elbow system angle range, the condition selection unit 160 selects the first elbow system candidate condition as the elbow system angle condition of the second entry process, and 12 When the hand 136 cannot enter the entry object of the second entry process in the state contained in the first elbow system angle range, the condition selection unit 160 selects the second elbow system candidate condition as the elbow system angle condition of the second entry process. When the condition selection unit 160 selects the second elbow system candidate condition as the elbow system angle condition of the second entry process, the control unit 152 may set θ 12 The first movable part 120 and the second movable part 130 are controlled in such a manner as to change from the first elbow system angle range to the second elbow system angle range. The control unit 152 controls the first movable part 120 and the second movable part 130, for example, in the following manner: in the space inside the frame 200 where the first movable part 120 can be extended to the maximum without causing interference between the third arm 134, the hand 136, and the surrounding objects of the robot 100 such as the frame 200, the state in which the first movable part 120 is extended in the positive rotation direction is changed to the state in which the first movable part 120 is extended in the negative rotation direction, thereby changing θ 12 Change from the first arm system angle range to the second arm system angle range.

[0353] For example, in θ 12 When the hand 136 can enter the entry process that follows the second entry process, that is, the entry target of the third entry process, in the state included in the first elbow system angle range, the condition selection unit 160 selects the first elbow system candidate condition as the elbow system angle condition of the third entry process. 12 When the hand 136 can enter the entry target of the third entry process in a state included in the second elbow system angle range, the condition selection unit 160 selects the second elbow system candidate condition as the elbow system angle condition of the third entry process.

[0354] For example, when the first wrist system candidate condition is selected as the wrist system angle condition for the first entry process, in θ 2B When the hand 136 can enter the entry process that follows the first entry process, that is, the entry target of the second entry process, in the state included in the first wrist system angle range, the condition selection unit 160 selects the first wrist system candidate condition as the wrist system angle condition of the second entry process, and 2B When the hand 136 cannot enter the entry target of the second entry process in the state included in the first wrist system angle range, the condition selection unit 160 selects the second wrist system candidate condition as the wrist system angle condition of the second entry process. When the condition selection unit 160 selects the second wrist system candidate condition as the wrist system angle condition of the second entry process, the control unit 152 may set θ 2B The first movable part 120 and the second movable part 130 are controlled so as to change from the first wrist system angle range to the second wrist system angle range. The control unit 152 controls the first movable part 120 and the second movable part 130, for example, in the following manner: the second base 132 is made smaller than the first base 132 so as not to interfere with the third arm 134, the hand 136, and the frame 200 and other objects around the robot 100. 23 The direction of the vector parallel to l 4p The state where the directions of the parallel vectors are aligned is changed from the state where the second base portion 132 is rotated in the positive rotation direction to the state where the second base portion 132 is rotated in the negative rotation direction. 2B Change from the first wrist system angle range to the second wrist system angle range.

[0355] For example, in θ 2B When the hand 136 can enter the entry process that follows the second entry process, that is, the entry target of the third entry process, in the state included in the first wrist system angle range, the condition selection unit 160 selects the first wrist system candidate condition as the wrist system angle condition of the third entry process. 2BWhen the hand 136 can enter the entry target of the third entry process in a state included in the second wrist system angle range, the condition selection unit 160 selects the second wrist system candidate condition as the wrist system angle condition of the third entry process.

[0356] For example, when the first hand system candidate condition is selected as the first hand system angle condition for the first entry process, in θ 3H When the hand 136 can enter the entry process that follows the first entry process, that is, the entry target of the second entry process, in the state included in the first hand system angle range, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition of the second entry process, and selects the first hand system candidate condition as the hand system angle condition of the second entry process. 3H When the hand 136 cannot enter the entry object of the second entry process in the state contained in the first hand system angle range, the condition selection unit 160 selects the second hand system candidate condition as the hand system angle condition of the second entry process. When the condition selection unit 160 selects the second hand system candidate condition as the hand system angle condition of the second entry process, the control unit 152 may set θ 3H The first movable unit 120 and the second movable unit 130 are controlled so as to change from the first hand system angle range to the second hand system angle range.

[0357] For example, when the frame 200 has the portion 212, the control unit 152 controls the hand 136 as follows: only the hand 136 is rotated, thereby changing the angle θ at the portion 212. 3H For example, when the frame 200 has the portion 214, the control unit 152 controls the hand 136 and the first movable unit 120 as follows: by making the hand 136 and the first movable unit 120 coordinate their movements, θ is changed at the portion 214. 3H The control unit 152 may also control the hand 136 and the first movable unit 120 in the following manner: by making the hand 136 and the first movable unit 120 coordinate their actions, the θ 3H Change from the first hand system angle range to the second hand system angle range.

[0358] The control unit 152 may also control the third arm 134, the hand 136, and the first movable unit 120 in the following manner: 3HThe control unit 152, for example, coordinates the third arm 134, the hand 136, and the first movable unit 120 to extend the robot arm toward the side wall of the frame 200 in the action area 250, and then bends the extended robot arm in the action area 250, thereby changing θ in the action area 250. 3H Change from the first hand system angle range to the second hand system angle range.

[0359] For example, in θ 3H When the hand 136 can enter the entry process that follows the second entry process, that is, the entry target of the third entry process, in the state included in the first hand system angle range, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition of the third entry process. 3H When the hand 136 can enter the entry target of the third entry process while being included in the second hand system angle range, the condition selection unit 160 selects the second hand system candidate condition as the hand system angle condition of the third entry process.

[0360] For example, when the first system-at-hand candidate condition is selected as the first system-at-hand angle condition for entering the process, in θ 3d When the hand 136 can enter the entry process that follows the first entry process, that is, the entry target of the second entry process, in the state included in the first hand system angle range, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition of the second entry process, and 3d When the hand 136 cannot enter the entry target of the second entry process in a state included in the first hand system angle range, the condition selection unit 160 selects the second hand system candidate condition as the hand system angle condition of the second entry process. When the second hand system candidate condition is selected as the hand system angle condition of the second entry process, the control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: in the frame 200 for changing the angle of θ 3d , 3d Change from the first hand system angle range to the second hand system angle range.

[0361] For example, when the frame 200 has the portion 212, the control unit 152 controls the third arm 134 in the following manner: by rotating only the third arm 134, the θ 3d The control unit 152 controls the third arm 134, for example, by changing the θ 3d From 0° to -180°, θ3d The angle range of the first hand system is changed to the second hand system angle range. For example, when the frame 200 has the portion 214, the control unit 152 controls the third arm 134 and the first movable unit 120 as follows: by making the third arm 134 and the first movable unit 120 coordinate their actions, θ is changed at the portion 214. 3d The control unit 152 may also control the third arm 134 and the first movable unit 120 in the following manner: by making the third arm 134 and the first movable unit 120 coordinate their actions, the θ 3d Change from the first hand system angle range to the second hand system angle range.

[0362] For example, in θ 3d When the hand 136 can enter the entry process that follows the second entry process, that is, the entry target of the third entry process, in the state included in the first hand system angle range, the condition selection unit 160 selects the first hand system candidate condition as the hand system angle condition of the third entry process. 3d When the hand 136 can enter the entry target of the third entry process in a state included in the second-hand system angle range, the condition selection unit 160 selects the second-hand system candidate condition as the hand system angle condition of the third entry process.

[0363] For example, when the first fingertip system candidate condition is selected as the fingertip system angle condition for the first entry process, in θ Hd When the hand 136 is within the first fingertip system angle range and can enter the entry target of the second entry process, which is the next entry process of the first entry process, the condition selection unit 160 selects the first fingertip system candidate condition as the fingertip system angle condition of the second entry process, and Hd When the hand 136 cannot enter the entry target of the second entry process in a state included in the first fingertip system angle range, the condition selection unit 160 selects the second fingertip system candidate condition as the fingertip system angle condition of the second entry process. When the second fingertip system candidate condition is selected as the fingertip system angle condition of the second entry process, the control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: in the frame 200 for changing the angle of θ Hd , Hd Change from the first fingertip system angle range to the second fingertip system angle range.

[0364] For example, when the housing 200 has the portion 212, the control unit 152 controls the hand 136 in such a manner that only the hand 136 rotates so that θ is adjusted at the portion 212.Hd For example, when the frame 200 has the portion 214, the control unit 152 controls the hand 136 and the first movable unit 120 as follows: by making the hand 136 and the first movable unit 120 coordinate their movements, θ is changed at the portion 214. Hd The control unit 152 may also control the hand 136 and the first movable unit 120 in the following manner: by making the hand 136 and the first movable unit 120 coordinate their actions, the θ Hd Change from the first fingertip system angle range to the second fingertip system angle range.

[0365] For example, in θ Hd When the hand 136 can enter the entry process that follows the second entry process, that is, the entry target of the third entry process, in the state of being included in the first fingertip system angle range, the condition selection unit 160 selects the first fingertip system candidate condition as the fingertip system angle condition of the third entry process. Hd When the hand 136 can enter the entry target of the third entry process while being included in the second fingertip system angle range, the condition selection unit 160 selects the second fingertip system candidate condition as the fingertip system angle condition of the third entry process.

[0366] When the robot 100 can enter the entry object of the second entry process without changing the angle condition of the first entry process, the robot 100 enters the entry object of the second entry process without changing the angle condition so as to enter the entry object of the second entry process in a short time, and when the robot 100 cannot enter the entry object of the second entry process without changing the angle condition of the first entry process, the robot 100 enters the entry object of the second entry process after changing the angle condition. As a result, as a whole, a robot that has both high processing capacity and a wide accessible area can be realized.

[0367] Furthermore, when the robot 100 changes the angle condition and enters the entry object of the second entry process, when the robot 100 enters the entry object of the third entry process, for example, if the robot 100 can enter the entry object of the third entry process with the angle condition before the change, the robot 100 enters the entry object of the third entry process after returning to the angle condition before the change. Thus, the robot 100 can enter the entry object with the angle condition that serves as a reference for entering the entry object as much as possible. In particular, by locating a plurality of openings with a high entry frequency such as the most frequent opening at positions that can be entered with the angle condition that serves as a reference, a robot that can contribute to a system with a high throughput can be realized as a whole.

[0368] In addition, when the robot 100 has entered the entry object of the second entry process after changing the angle condition, when the robot 100 enters the entry object of the third entry process, if the robot 100 can enter the entry object of the third entry process with the changed angle condition, the robot 100 enters the entry object of the third entry process while maintaining the changed angle condition. As a result, the robot 100 can enter the entry object with greater priority without changing the angle condition as much as possible. In particular, by locating an opening portion with a high entry frequency such as the most frequent opening portion at a position that can be entered regardless of the angle condition, a robot that can contribute to the realization of a system with a high throughput can be realized as a whole.

[0369] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so that the first movable unit 120 passes through the space between the inner surface 1121 of the first side surface 112 and the inner surface 1141 of the second side surface 114. For example, when the height of the second rotation axis 103 is lower than the height of the first rotation axis 101, the control unit 152 controls the first movable unit 120 and the second movable unit 130 as follows: the third rotation axis 105 and the second movable unit 130 do not pass through the space between the first side surface 1121 and the inner surface 1141 of the second side surface 114. B1 The second rotation axis 103 passes through p B1 .

[0370] The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so that the hand 136 enters the PA 300. The control unit 152 controls the first movable unit 120 and the second movable unit 130, for example, so that the hand 136 enters the PA 300 in a state where the hand 136 is parallel to the horizontal plane. For example, the control unit 152 controls the first movable unit 120 and the second movable unit 130 in a state where the hand 136 enters the PA 300 in a state where the wafer 50 held by the hand 136 is accommodated in the operation area 250 and the hand 136 is parallel to the horizontal plane.

[0371] The control unit 152 may also have a function of controlling the entire system 10. For example, the control unit 152 controls the box opener. For example, the control unit 152 controls the opening and closing of the box opener.

[0372] The control unit 152 controls, for example, the load lock chamber 240. The control unit 152 controls, for example, the load lock chamber 240 by controlling a gate valve included in the load lock chamber 240.

[0373] For example, the control unit 152 controls the gate valve on the EFEM side to open the gate valve on the EFEM side in order to move the wafer 50 between the EFEM and the load lock chamber 240 when both the gate valve on the EFEM side and the gate valve on the processing chamber side are sealed. Thereafter, the control unit 152 may control the gate valve on the EFEM side to seal the gate valve on the EFEM side in the opened state in response to the wafer 50 being placed in the load lock chamber 240 from the EFEM or being taken out of the load lock chamber 240.

[0374] For example, the control unit 152 controls the gate valve on the processing chamber side to open the gate valve on the processing chamber side in order to move the wafer 50 between the load lock chamber 240 and the processing chamber when both the gate valve on the EFEM side and the gate valve on the processing chamber side are sealed. Thereafter, the control unit 152 may control the gate valve on the processing chamber side to seal the gate valve on the processing chamber side in the opened state in response to the wafer 50 being placed in the load lock chamber 240 from the processing chamber or being taken out of the load lock chamber 240.

[0375] The control unit 152 controls the load lock chamber 240 by controlling the pressure in the load lock chamber 240. The control unit 152 controls the pressure state in the load lock chamber 240 to the atmospheric pressure state. The control unit 152 controls the pressure state in the load lock chamber 240 to the reduced pressure state.

[0376] The control unit 152 may also control the PA 300. For example, the control unit 152 controls a rotating table of the PA 300. For example, the control unit 152 controls the rotating table of the PA 300 so as to rotate the wafer 50 in a desired direction.

[0377] Fig.26 1 is an explanatory diagram for explaining an example of the process flow of the robot 100. Here, a state in which the robot 100 has not acquired the entry process information is described as a start state.

[0378] In step (step is sometimes abbreviated and recorded as S) 102, the acquisition unit 151 acquires the entry processing information. In S104, the coordinated action selection unit 156 selects the coordinated action of the robot 100 based on the entry processing information acquired by the acquisition unit 151 in S102 and the coordinated action related information stored in the information storage unit 154. Here, the description is continued assuming that the entry object indicated by the entry processing information is the opening of the frame 200.

[0379] In S106, the control unit 152 determines whether the coordinated action of the robot 100 selected by the coordinated action selection unit 156 in S104 is a coordinated action of only the third arm 134 and the hand 136. If the control unit 152 determines that it is a coordinated action of only the third arm 134 and the hand 136, the process proceeds to S108. If the control unit 152 determines that it is not a coordinated action of only the third arm 134 and the hand 136, the process proceeds to S110.

[0380] In S108 , the control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the hand 136 enters the entry target while being parallel to the horizontal plane only through the coordinated operation of the third arm 134 and the hand 136 . Thereafter, the processing of the robot 100 ends.

[0381] In S110 , the control unit 152 controls the first movable unit 120 and the second movable unit 130 so that the hand 136 enters the object while being parallel to the horizontal plane through the coordinated operation of the third arm 134 , the hand 136 , and the first movable unit 120 .

[0382] Fig. 27 An example of the hardware structure of a computer 1200 that functions as the robot 100 is schematically shown. The program installed in the computer 1200 can cause the computer 1200 to function as one or more "units" of the apparatus of the above-mentioned embodiment, or can cause the computer 1200 to perform operations associated with the apparatus of the above-mentioned embodiment or the one or more "units", and / or can cause the computer 1200 to perform the process of the above-mentioned embodiment or the stage of the process. Such a program can be executed by the CPU 1212 to cause the computer 1200 to perform specific operations associated with some or all of the blocks in the flowcharts and block diagrams described in this specification.

[0383] The computer 1200 of this embodiment includes a CPU 1212, a RAM 1214, and a graphics controller 1216, which are connected to each other through a host controller 1210. The computer 1200 also includes a communication interface 1222, a storage device 1224, an input / output unit such as a DVD drive and an IC card drive, which are connected to the host controller 1210 via an input / output controller 1220. The DVD drive may be a DVD-ROM drive and a DVD-RAM drive, etc. The storage device 1224 may be a hard disk drive and a solid state drive, etc. The computer 1200 also includes a ROM 1230 and a conventional input / output unit such as a keyboard, which are connected to the input / output controller 1220 via an input / output chip 1240.

[0384] The CPU 1212 operates according to the programs stored in the ROM 1230 and the RAM 1214 to control each unit. The graphic controller 1216 obtains image data generated by the CPU 1212 from a frame buffer or the like provided in the RAM 1214 or itself, and causes the display device 1218 to display the image data.

[0385] The communication interface 1222 communicates with other electronic devices via a network. The storage device 1224 stores programs and data used by the CPU 1212 in the computer 1200. The DVD drive reads programs or data from a DVD-ROM or the like and provides them to the storage device 1224. The IC card drive reads programs and data from an IC card and / or writes programs and data to an IC card.

[0386] The ROM 1230 stores a boot program executed by the computer 1200 when activated and / or a program that depends on the hardware of the computer 1200. The input / output chip 1240 can also connect various input / output units to the input / output controller 1220 via a USB port, a parallel port, a serial port, a keyboard port, a mouse port, and the like.

[0387] The program is provided by a computer-readable storage medium such as a DVD-ROM or an IC card. The program is read from the computer-readable storage medium, installed in the storage device 1224, RAM 1214, or ROM 1230, which is also an example of a computer-readable storage medium, and executed by the CPU 1212. The information processing described in these programs is read by the computer 1200, resulting in cooperation between the program and the various types of hardware resources described above. The device or method can be constructed by implementing the operation or processing of information according to the use of the computer 1200.

[0388] For example, when the computer 1200 performs communication with an external device, the CPU 1212 can execute a communication program loaded into the RAM 1214, and based on the process described in the communication program, instruct the communication interface 1222 to perform communication processing. Under the control of the CPU 1212, the communication interface 1222 reads transmission data stored in a transmission buffer area provided in the RAM 1214, the storage device 1224, a recording medium such as a DVD-ROM or an IC card, and transmits the read transmission data to the network, or writes reception data received from the network to a reception buffer area provided on the recording medium, etc.

[0389] In addition, the CPU 1212 can read all or a necessary part of a file or database stored in an external recording medium such as the storage device 1224, a DVD drive (DVD-ROM), an IC card, etc. into the RAM 1214, and perform various types of processing on the data on the RAM 1214. Then, the CPU 1212 can write the processed data back to the external recording medium.

[0390] Various types of information such as various types of programs, data, tables, and databases can be stored in the recording medium and subjected to information processing. The CPU 1212 can perform various types of processing on the data read from the RAM 1214 and write the results back to the RAM 1214, and the various types of processing include various types of operations, information processing, conditional judgment, conditional branching, unconditional branching, information retrieval / replacement, etc., which are recorded anywhere in the present disclosure and specified by the instruction sequence of the program. In addition, the CPU 1212 can retrieve information in files, databases, etc. in the recording medium. For example, in the case where a plurality of entries each having an attribute value of a first attribute associated with an attribute value of a second attribute are stored in the recording medium, the CPU 1212 can retrieve an entry that is consistent with the condition specified with the attribute value of the first attribute from the plurality of entries, read the attribute value of the second attribute stored in the entry, and thereby obtain the attribute value of the second attribute associated with the first attribute that satisfies the predetermined condition.

[0391] The program or software module described above may be stored in a computer-readable storage medium on or near the computer 1200. In addition, a recording medium such as a hard disk or RAM provided in a server system connected to a dedicated communication network or the Internet can be used as a computer-readable storage medium, thereby providing the program to the computer 1200 via the network.

[0392] The flowcharts and boxes in the block diagrams in this embodiment may represent the stages of the process of performing an operation or the "part" of a device having the function of performing an operation. Specific stages and "parts" may be implemented by dedicated circuits, programmable circuits provided together with computer-readable instructions stored on a computer-readable storage medium, and / or processors provided together with computer-readable instructions stored on a computer-readable storage medium. Dedicated circuits may include digital and / or analog hardware circuits, and may also include integrated circuits (ICs) and / or discrete circuits. Programmable circuits may include reconfigurable hardware circuits such as field programmable gate arrays (FPGAs) and programmable logic arrays (PLAs), which include logical products, logical sums, exclusive ors, and-nots, or-nots, and other logical operations, triggers, registers, and memory elements.

[0393] A computer-readable storage medium may include any tangible device capable of storing instructions to be executed by an appropriate device, with the result that a computer-readable storage medium having stored instructions therein has a product including instructions executable to generate a unit for performing the operations specified in a flowchart or block diagram. Examples of computer-readable storage media include electronic storage media, magnetic storage media, optical storage media, electromagnetic storage media, semiconductor storage media, and the like. More specific examples of computer-readable storage media include floppy disks (registered trademarks), magnetic disks, hard disks, random access memories (RAMs), read-only memories (ROMs), erasable programmable read-only memories (EPROMs or flash memories), electrically erasable programmable read-only memories (EEPROMs), static random access memories (SRAMs), compact disk read-only memories (CD-ROMs), digital versatile disks (DVDs), Blu-ray (registered trademarks) disks, memory sticks, integrated circuit cards, and the like.

[0394] Computer readable instructions may include assembly instructions, instruction set architecture (ISA) instructions, machine instructions, machine-dependent instructions, microcode, firmware instructions, state setting data, or any of source code or object code described in any combination of one or more programming languages, wherein the programming languages ​​include object-oriented programming languages ​​such as Smalltalk (registered trademark), JAVA (registered trademark), C++, etc., and previous procedural programming languages ​​such as the "C" programming language or similar programming languages.

[0395] The computer-readable instructions may be provided to a processor or programmable circuit of a general-purpose computer, a special-purpose computer or other programmable data processing device locally or via a wide area network (WAN) such as a local area network (LAN), the Internet, etc., so that the processor or programmable circuit of the general-purpose computer, special-purpose computer or other programmable data processing device executes the computer-readable instructions to generate a unit for performing the operations specified in the flowchart or block diagram. Examples of processors include computer processors, processing units, microprocessors, digital signal processors, controllers, microcontrollers, etc.

[0396] The present invention has been described above using the embodiments, but the technical scope of the present invention is not limited to the scope described in the above embodiments. It is obvious to those skilled in the art that various changes or improvements can be made to the above embodiments. It is clear from the description of the claims that the method to which such changes or improvements are made is also included in the technical scope of the present invention.

[0397] It should be noted that the execution order of each process such as actions, sequences, steps and stages in the apparatus, system, program and method shown in the claims, specifications and drawings can be implemented in any order unless it is specifically stated as "before", "before", etc., and as long as the output of the previous process is not used in the subsequent process. Even if the action flow in the claims, specifications and drawings is described using "first", "next", etc. for convenience, it does not mean that it must be implemented in this order.

Claims

1. A robot, arranged in a frame, the frame comprising: a front wall having a plurality of openings for accessing a box storing wafers; and a back wall, which is opposite to the front wall and has an opening, wherein: The robot has: first base; A first movable portion having a first arm and a second arm, wherein a base end side of the first arm is connected to the first base portion in such a manner that the first arm can rotate in a vertical plane around a first rotation axis, and a base end side of the second arm is connected to a tip end side of the first arm in such a manner that the second arm can rotate in a vertical plane around a second rotation axis; A second movable part, comprising a second base, a third arm and a hand, wherein the base end side of the second base is connected to the tip side of the second arm in such a manner that the second base can rotate in a vertical plane around a third rotation axis, the base end side of the third arm is connected to the tip side of the second base in such a manner that the third arm can rotate around a fourth rotation axis, the base end side of the hand is connected to the tip side of the third arm in such a manner that the hand can rotate around a fifth rotation axis, and the hand holds the wafer; an information storage unit that stores coordinated action related information that associates positions of each of the plurality of openings of the front wall and the opening of the back wall with the type of coordinated action of the robot when the hand enters the positions of each of the plurality of openings of the front wall and the opening of the back wall; a coordinated action selection unit that selects whether to make the hand enter the entry object through a coordinated action of the third arm and the hand, or to make the hand enter the entry object through a coordinated action of the third arm, the hand, and the first movable unit, based on the position of the entry object that the hand enters and the coordinated action associated information stored in the information storage unit; and A control unit controls the first movable unit and the second movable unit in such a manner that the hand enters the entry object in a state where the hand is parallel to a horizontal plane through the coordinated operation of the robot selected by the coordinated operation selection unit.

2. The robot according to claim 1, wherein: When the hand is caused to enter each of the plurality of openings of the front wall, the coordinated action selection unit selects to cause the hand to enter the entry target through the coordinated action of the third arm and the hand.

3. The robot according to claim 2, wherein: When the hand is caused to enter the opening of the rear wall, the cooperative operation selection unit selects to cause the hand to enter the entry target through the cooperative operation of the third arm, the hand, and the first movable unit.

4. The robot according to claim 1, wherein: The control unit controls the first movable unit and the second movable unit in the following manner: the hand is caused to enter the entry object while maintaining a first angle that satisfies a predetermined first angle condition, wherein the first angle is an angle between a vector parallel to a straight line passing through the fourth rotation axis and the fifth rotation axis and perpendicular to the fourth rotation axis and the fifth rotation axis and a vector parallel to a center line of the hand perpendicular to the fifth rotation axis and passing through the fifth rotation axis.

5. The robot according to claim 4, wherein: The robot also has: a condition storage unit storing the first angle condition including a first candidate condition and a second candidate condition, wherein the first candidate condition is conditioned on the first angle being included in a first angle range, and the second candidate condition is conditioned on the first angle being included in a second angle range; as well as a condition selection unit that selects the first angle condition for entering the entry object from the first candidate condition and the second candidate condition based on the position of the entry object, The control unit controls the first movable unit and the second movable unit so as to cause the hand to enter the entry target while maintaining a state in which the first angle condition selected by the condition selection unit is satisfied.

6. The robot according to claim 5, wherein: The condition selection unit selects the first candidate condition as the first angle condition for the entry process when the entry target is located on the side wall of the housing and the hand can enter only when the first angle is included in the first angle range.

7. The robot according to claim 6, wherein: When the entry object is a pre-alignment device, the condition selection unit selects the first candidate condition as the first angle condition of the entry process.

8. The robot according to claim 5, wherein: When the first candidate condition is selected as the first angle condition of the first entry processing, when the hand can enter the entry object of the second entry processing, which is the next entry processing of the first entry processing, while the first angle is included in the first angle range, the condition selection unit selects the first candidate condition as the first angle condition of the second entry processing; when the hand cannot enter the entry object of the second entry processing while the first angle is included in the first angle range, the condition selection unit selects the second candidate condition as the first angle condition of the second entry processing.

9. The robot according to claim 8, wherein: When the condition selection unit selects the second candidate condition as the first angle condition of the second entry process, the control unit controls the first movable unit and the second movable unit so as to change the first angle from the first angle range to the second angle range.

10. The robot according to claim 9, wherein: When the hand can enter an entry target of a third entry process that is the next entry process of the second entry process while the first angle is included in the first angle range, the condition selection unit selects the first candidate condition as the first angle condition of the third entry process.

11. The robot according to claim 9, wherein: When the hand can enter an entry target of a third entry process that is the next entry process of the second entry process while the first angle is included in the second angle range, the condition selection unit selects the second candidate condition as the first angle condition of the third entry process.

12. The robot according to claim 5, wherein: The first angle range is an angle from 0° to 180°, and the second angle range is an angle from -180° to 0°.

13. The robot according to claim 4, wherein: The control unit controls the first movable unit and the second movable unit in the following manner: while maintaining a state in which the second angle further satisfies a predetermined second angle condition, the hand is caused to enter the entry object, the second angle being an angle between a vector parallel to a direction in which the wafer is transported within an action area and a vector parallel to a center line of the hand perpendicular to the fifth rotation axis and passing through the fifth rotation axis, the action area being defined in the space between the front wall and the back wall in a manner that does not overlap with an opening and closing area, the opening and closing area being an area for a box opener disposed at a position corresponding to each of the plurality of openings of the front wall to open and close the box.

14. The robot according to claim 13, wherein: The robot also has: a condition storage unit storing the second angle condition including a third candidate condition and a fourth candidate condition, wherein the third candidate condition is based on the condition that the second angle is included in a third angle range, and the fourth candidate condition is based on the condition that the second angle is included in a fourth angle range; as well as a condition selection unit that selects the second angle condition for entering the entry object from the third candidate condition and the fourth candidate condition based on the position of the entry object, The control unit controls the first movable unit and the second movable unit so as to cause the hand to enter the entry target while maintaining a state in which the second angle condition selected by the condition selection unit is satisfied.

15. The robot according to claim 14, wherein: The third angle range corresponds to a state in which the distal end side of the hand is located to the right of the proximal end side of the hand, and the fourth angle range corresponds to a state in which the distal end side of the hand is located to the left of the proximal end side of the hand.

16. A system comprising: The robot according to any one of claims 1 to 15; and Frame.

17. A control method performed by a robot, wherein the robot is arranged in a frame, the frame comprising: a front wall having a plurality of openings for entering a box for storing wafers; and a back wall, which is opposite to the front wall and has an opening, the robot comprising: a first base; a first movable part having a first arm and a second arm, the base end side of the first arm being connected to the first base in the following manner: so that the first arm can rotate in a vertical plane around a first rotation axis, and the base end side of the second arm being connected to the tip side of the first arm in the following manner: so that the second arm can rotate in a vertical plane around a second rotation axis; a second movable part having a second base, a third arm and a hand, the base end side of the second base being connected to the tip side of the second arm in the following manner The end side: enables the second base to rotate in a vertical plane around a third rotation axis, the base end side of the third arm is connected to the end side of the second base in the following manner: enables the third arm to rotate around a fourth rotation axis, the base end side of the hand is connected to the end side of the third arm in the following manner: enables the hand to rotate around a fifth rotation axis, and the hand holds the chip; an information storage unit, which stores coordinated action related information, the coordinated action related information corresponds the respective positions of the multiple openings of the front wall and the positions of the openings of the back wall, and the category of coordinated action of the robot when the hand enters the respective positions of the multiple openings of the front wall and the positions of the openings of the back wall, wherein The control method comprises: a coordinated action selection stage, in which, based on the position of the entry object entered by the hand and the coordinated action associated information stored in the information storage unit, it is selected whether to make the hand enter the entry object through the coordinated action of the third arm and the hand, or to make the hand enter the entry object through the coordinated action of the third arm, the hand, and the first movable unit; as well as A control stage, in which the first movable part and the second movable part are controlled in the following manner: through the coordinated action of the robot selected in the coordinated action selection stage, the hand is made to enter the entry object in a state where the hand is parallel to a horizontal plane.

18. A computer program product, configured to cause a computer to execute the control method according to claim 17.

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