A fluid processing device

Abstract

This invention discloses a fluid handling apparatus, relating to the field of semiconductor fluid transport technology, comprising: a fluid control body having a temporary storage cavity for storing fluid; an adjusting member movably connected within the temporary storage cavity, with a movable gap formed between the fluid control body and the adjusting member, the adjusting member being used to adjust the internal volume of the temporary storage cavity; and a deformable member having one edge connected to the side wall of the fluid control body, and the other edge connected to one end of the adjusting member extending into the temporary storage cavity, the deformable member sealing the movable gap between the adjusting member and the fluid control body as the adjusting member moves; wherein the fluid control body further comprises an inlet flow channel and an outlet flow channel, the inlet flow channel communicating with the temporary storage cavity, and the outlet flow channel communicating with the movable gap. This invention can optimize the fluid transport process in semiconductor manufacturing, reduce photoresist waste, and suppress or improve the phenomenon of wet particulate matter.

Description

Technical Field

[0001] This invention relates to the field of semiconductor fluid transport technology, and more particularly to a fluid handling device. Background Technology

[0002] In the semiconductor industry, fluid transport devices are a key technology for achieving precise fluid distribution. Given the high cost of many photochemicals used in the semiconductor industry, optimizing fluid transport and coating processes to reduce material waste and improve production efficiency is particularly important.

[0003] To avoid sealing issues during fluid transport and to prevent particle generation from contact friction, existing technologies typically employ a rolling diaphragm. One side of the rolling diaphragm contacts the fluid, while the other side remains uncontacted; the uncontacted side is used to mount the valve stem. The side of the rolling diaphragm in contact with the fluid is located at the connection structure with the pump chamber. However, since the fluid primarily enters and exits through the pump chamber, the poor fluid flow in the U-shaped gap between the rolling diaphragm and the pump chamber wall leads to residue buildup and deterioration over time, resulting in wet particles.

[0004] During the photoresist coating process, wet particles in the fluid adhere to the wafer surface, which not only affects the quality and uniformity of the photoresist but may also damage semiconductor devices.

[0005] Therefore, it is necessary to provide a fluid processing device to solve the aforementioned problems existing in the prior art. Summary of the Invention

[0006] The purpose of this invention is to provide a fluid handling device to optimize the semiconductor fluid transport process, reduce material waste, and avoid the adhesion of wet particles.

[0007] To achieve the above objectives, the technical solution of the present invention is as follows:

[0008] This invention provides a fluid processing apparatus, comprising:

[0009] The fluid control body has a temporary storage chamber for storing fluid;

[0010] An adjusting component is movably connected within the temporary storage chamber, and a movable gap is formed between the fluid control body and the adjusting component. The adjusting component is used to adjust the internal volume of the temporary storage chamber.

[0011] The deformable component has one edge connected to the side wall of the fluid control body, and the other edge connected to one end of the adjusting component that extends into the temporary storage cavity. The deformable component, along with the movement of the adjusting component, blocks the movable gap between the adjusting component and the fluid control body.

[0012] The fluid control body is further provided with an inlet flow channel and an outlet flow channel. The inlet flow channel is connected to the temporary storage cavity, and the outlet flow channel is connected to the movable gap. A first flow channel is also provided between the outlet flow channel and the temporary storage cavity. The first flow channel is located between the fluid control body and the adjustment component and is used to connect the outlet flow channel and the temporary storage cavity.

[0013] By adopting the above technical solution, after the fluid enters the inlet channel, it enters the connected temporary storage chamber, and then flows through the movable gap and out from the end of the movable gap. Compared with the prior art, where the fluid flows directly from the inlet to the temporary storage chamber and then to the outlet, and the movable gap has a large area of ​​poor flowability, the present invention allows the dynamic flow of the fluid to continuously impact the movable gap during the process of the fluid flowing into the movable gap through the outlet channel, thereby effectively reducing the risk of wet particulate matter precipitation.

[0014] Furthermore, the temporary storage cavity is distributed horizontally, and the adjusting member moves horizontally along the extension direction of the temporary storage cavity.

[0015] By adopting the above technical solution, the present invention moves the adjustment component horizontally. Compared with the prior art where the adjustment component is set vertically, the horizontal movement of the adjustment component in the present invention can prevent the fluid from accumulating at the bottom of the temporary storage cavity due to gravity. The movement of the adjustment component increases the fluidity inside the temporary storage cavity, thereby reducing the risk of wet particulate matter precipitation.

[0016] Furthermore, the fluid control body has a circulation channel, which is connected to the temporary storage cavity.

[0017] By adopting the above technical solution, the fluid control body, through the opening of a circulation channel, can achieve fluid circulation while simultaneously pumping in and out. Furthermore, the design of the circulation channel allows the fluid to flow repeatedly within the temporary storage chamber, helping to maintain fluid stability and preventing fluid from condensing or settling due to prolonged stasis. This reduces the possibility of fluid stagnation or accumulation in specific locations, thereby preventing the precipitation of wet particles.

[0018] Furthermore, the fluid control body also includes a first on / off section, a second on / off section, and a third on / off section. The outlet of the first on / off section is connected to one end of the temporary storage cavity to control the inflow of fluid into the temporary storage cavity. The inlet of the second on / off section is connected to the other end of the temporary storage cavity to control the outflow of fluid from the temporary storage cavity. The third on / off section is disposed between the temporary storage cavity and the circulation channel, and the third on / off section is used to control the on / off connection between the temporary storage cavity and the circulation channel.

[0019] By adopting the above technical solution and setting up three on / off sections, the fluid processing device can achieve flexible fluid control. The linkage of the first, second, and third on / off sections allows for precise adjustment of fluid inflow, outflow, and circulation. Under different operating conditions, the fluid flow path can be adjusted as needed to ensure the efficient operation of the fluid system.

[0020] Furthermore, a second flow channel is provided between the circulation channel and the temporary storage cavity. The second flow channel is located between the fluid control body and the adjustment component, and is used to connect the circulation channel and the temporary storage cavity.

[0021] Furthermore, the temporary storage cavity has an axis, the inlet channel and the outlet channel are located on the side of the axis of the temporary storage cavity closer to the ground, and the circulation channel is located on the side of the axis of the temporary storage cavity away from the ground.

[0022] By adopting the above technical solution, when the fluid, especially the photoresist, passes through the circulation channel, the gas in the photoresist is much lower than the photoresist itself due to its gravity. At this time, the air bubbles will escape to the surface of the photoresist in the circulation channel due to buoyancy, thereby removing the air bubbles from the fluid in the fluid processing device and optimizing the subsequent coating process.

[0023] Furthermore, the adjusting component includes a driving part, and the first on / off part, the second on / off part, and the third on / off part are diaphragm valves.

[0024] Furthermore, the diaphragm valve includes a valve body, a diaphragm disposed within the valve body, and an actuator. The diaphragm is connected to the actuator, and the actuator is connected to the drive unit. The drive unit is used to drive the actuator to perform reciprocating motion, thereby causing the diaphragm to perform synchronous reciprocating motion, thus enabling the valve body to form a flow or cut-off state.

[0025] Furthermore, the valve body is provided with a first flow channel hole and a second flow channel hole, the first flow channel hole and the second flow channel hole being used for fluid outflow and inflow in the temporary storage cavity, respectively.

[0026] Furthermore, the drive unit includes a frame and a drive source, the drive source is mounted on the frame, the drive end of the drive source is connected to the adjustment member, and the drive source is used to drive the adjustment member to move horizontally within the temporary storage cavity.

[0027] Furthermore, a flow guide ring is provided inside the temporary storage cavity. One port of the flow guide ring is connected to the first flow channel, and the other port is connected to the temporary storage cavity.

[0028] The beneficial effect of the fluid processing device provided by the present invention is that, during the process of fluid flowing into the active gap through the outlet channel, the dynamic flow of the fluid can continuously impact the active gap, thereby effectively reducing the risk of wet particulate matter precipitation. Attached Figure Description

[0029] Figure 1 This is a schematic diagram of the overall structure of the fluid processing device according to an embodiment of the present invention;

[0030] Figure 2 This is a cross-sectional view of the overall structure of the fluid processing device according to an embodiment of the present invention;

[0031] Figure 3 This is a three-dimensional internal structure diagram of the fluid control body according to an embodiment of the present invention;

[0032] Figure 4 This is a cross-sectional view of the fluid control body according to an embodiment of the present invention;

[0033] Figure 5 This is a front view of the fluid control body according to an embodiment of the present invention;

[0034] Figure 6 This is an overall structural diagram of the deformable and adjusting parts according to an embodiment of the present invention;

[0035] Figure 7 This is a partial cross-sectional view of the fluid control body according to an embodiment of the present invention;

[0036] Figure 8 This is a cross-sectional view of the deformable and adjusting parts according to an embodiment of the present invention.

[0037] Reference numerals: 1. Fluid control body; 11. Temporary storage chamber; 111. Inlet flow channel; 1111. First vertical section; 112. Outlet flow channel; 1121. First horizontal section; 1122. Second vertical section; 113. Circulation flow channel; 1131. Third vertical section; 1132. Second horizontal section; 114. First flow channel; 115. Second flow channel; 116. Guide ring; 12. First on / off part; 121. Valve body; 122. Actuator; 123. First flow channel circular hole; 124. Second flow channel circular hole; 13. Second on / off part; 14. Third on / off part; 2. Adjusting component; 21. Movement clearance; 22. Drive unit; 221. Frame; 222. Drive source; 3. Deformation component; 4. Gas connector; 5. Solenoid valve. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0039] This invention is applicable to the semiconductor equipment industry, and embodiments of the invention deliver, for example, a fluid such as photoresist in an outflow manner to supply to a wafer.

[0040] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0041] like Figures 1-8 As shown, a fluid processing device includes a fluid control body 1, an adjusting component 2, and a deforming component 3.

[0042] The fluid control body 1 has a temporary storage chamber 11 inside for storing fluid. The temporary storage chamber 11 is cylindrical and extends horizontally along the fluid control body 1. The adjusting member 2 is cylindrical and movably connected within the temporary storage chamber 11. Please refer to... Figure 7 The adjusting component 2 moves left and right within the temporary storage chamber 11, thereby changing the volume of the temporary storage chamber 11 to achieve the pumping out and intake of fluid. Figure 7 and Figure 8 For example, the adjusting component 2 can move within the temporary storage cavity 11. Figure 7 The middle adjustment component 2 is located at the left end of the temporary storage cavity 11. Figure 8 The adjusting member 2 is located at the right end of the temporary storage cavity 11. In this embodiment, the movable connection is a sliding connection. An annular movable gap 21 is formed between the fluid control body 1 and the adjusting member 2, and the adjusting member 2 is used to adjust the internal volume of the temporary storage cavity 11. The adjusting member 2 moves horizontally along the extension direction of the temporary storage cavity 11, that is, the axial direction.

[0043] Reference Figures 4-6As shown, one edge of the deformable element 3 is connected to the side wall of the fluid control body 1, and the other edge of the deformable element 3 is connected to the end of the adjusting element 2 that extends into the temporary storage cavity 11. The deformable element 3, along with the movement of the adjusting element 2, seals the movable gap 21 between the adjusting element 2 and the fluid control body 1. In other embodiments of the present invention, the deformable element 3 is a columnar diaphragm or a rolling diaphragm. Taking the rolling diaphragm as an example, the connection between the rolling diaphragm and the fluid control body 1 can be fixed or detachable. In this embodiment, the deformable element 3 is preferably fixed to the side wall of the fluid processing device by a fixed setting, and its fixing method can be snap-fit ​​or integral molding, etc. In this embodiment, the rolling diaphragm is preferably fixed to the side wall of the fluid processing device by integral molding. By placing the temporary storage cavity 11 and the moving direction of the rolling diaphragm on a horizontal plane rather than a vertical plane, fluid accumulation in the U-shaped movable gap 21 due to gravity is avoided. Fluid accumulation in the movable gap 21 will reduce the fluid flow in the movable gap 21, resulting in wet particles.

[0044] The fluid control body 1 has an inlet channel 111, an outlet channel 112, and a circulation channel 113. The circulation channel 113 is interconnected with the temporary storage chamber 11. The circulation channel 113 includes a third vertical section 1131 and a second horizontal section 1132. The inlet channel 111 includes a first vertical section 1111, which is connected to the temporary storage chamber 11, allowing fluid to enter the temporary storage chamber 11. The outlet channel 112 includes a second vertical section 1122 and a first horizontal section 1121. The outlet channel 112 connects to the movable gap 21 of the fluid control body 1 via the second vertical section 1122, the first horizontal section 1121, and the first channel 114, allowing fluid to flow smoothly out after passing through the temporary storage chamber 11. During the process of fluid passing through the outlet channel 112 or the circulation channel 113, the dynamically flowing fluid continuously impacts the movable gap 21. This design ensures that the fluid remains in motion within the movable gap 21, reducing the static residence time of the fluid. Compared with existing technologies, the present invention can effectively reduce the risk of wet particulate matter precipitation.

[0045] In some embodiments of the present invention, a first flow channel 114 is also designed between the outlet flow channel 112 and the temporary storage cavity 11. This first flow channel 114 is located between the fluid control body 1 and the adjusting member 2, and its function is to connect the outlet flow channel 112 and the temporary storage cavity 11. An inlet connector is provided at the lower end of the inlet flow channel 111, and an outlet connector is provided at the lower end of the outlet flow channel 112. A circulation port connector is provided at the upper end of the circulation flow channel 113. It should be noted that, because the figure is a cross-sectional view, the temporary storage cavity 11 and the inlet flow channel 111 are not visually connected; in reality, they are interconnected. Similarly, the first horizontal section 1121 and the second vertical section 1122 are actually interconnected.

[0046] Reference Figure 3 In some embodiments of the present invention, the fluid control body 1 further includes a first switching part 12, a second switching part 13, and a third switching part 14. The inlet of the second switching part 13 is connected to the first vertical section 1111, and the outlet is connected to the temporary storage cavity 11, for controlling the outflow of fluid in the temporary storage cavity 11. The inlet of the first switching part 12 is sequentially connected to the temporary storage cavity 11, the first flow channel 114, and the first horizontal section 1121. The outlet of the first switching part 12 is connected to the second vertical section 1122. The third switching part 14 is disposed between the temporary storage cavity 11 and the circulation flow channel 113. The inlet of the third switching part 14 is connected to the temporary storage cavity 11, the outlet of the second flow channel 115 is connected to the third vertical section 1131, and the third switching part 14 is used to control the connection and disconnection between the temporary storage cavity 11 and the circulation flow channel 113.

[0047] Reference Figure 2 In some embodiments of the present invention, the inlet channel 111 and the outlet channel 112 are located below the temporary storage cavity 11, and the circulation channel 113 is located above the temporary storage cavity 11.

[0048] It is important to note that micro-bubbles may exist in the photoresist during the coating process due to various reasons. The presence of these bubbles can lead to several adverse effects, such as depressions or uneven areas on the coating surface, which can affect the overall thickness of the photoresist. Reducing bubbles ensures coating uniformity, thereby improving the quality of subsequent exposure and development. Therefore, minimizing bubbles is crucial for subsequent processes.

[0049] Specifically, this invention establishes a circulation channel 113 above the temporary storage chamber 11, thereby positioning the outlet of the circulation channel 113 above the fluid control body 1. By closing the first on / off section 12 and the second on / off section 13, the entry and exit of fluid in the fluid control body are stopped. At this time, the reciprocating adjustment member 2 causes the fluid to reciprocate between the temporary storage chamber 11, the circulation channel 113, and the second channel 115. When the fluid, especially photoresist, passes through the circulation channel 113, because the gravity of the gas in the photoresist is much lower than that of the photoresist itself, bubbles will escape to the surface of the photoresist in the circulation channel 113 due to buoyancy, thereby removing bubbles from the fluid in the fluid processing device and optimizing the subsequent coating process.

[0050] In some embodiments of the present invention, the adjusting member 2 includes a drive unit 22, and the first on / off part 12, the second on / off part 13, and the third on / off part 14 are diaphragm valves. The diaphragm valve includes a valve body 121, a diaphragm disposed within the valve body 121, and an actuator 122. The diaphragm switches the flow state inside the valve body 121. That is, the reciprocating motion of the diaphragm changes the gap variation in the flow area of ​​the valve body 121, thereby changing the fluid flow rate. In other embodiments, a sealing ring is fitted onto the diaphragm. The drive unit 22 is used to connect the adjusting member 2 to perform reciprocating linear motion, thereby realizing the intake and pumping of fluid in the temporary storage chamber 11. The actuator 122 is used to inflate or vent the air chamber, thereby switching the diaphragm and the fluid control body 1 between contact and separation.

[0051] In other embodiments of the present invention, the valve body 121 is provided with a first flow channel hole 123 and a second flow channel hole 124, the first flow channel hole 123 and the second flow channel hole 124 being used for fluid outflow and inflow in the temporary storage chamber 11, respectively; wherein, when the gas chamber is filled with gas, the diaphragm moves and adheres to seal the first flow channel hole 123 and the second flow channel hole 124; when the gas chamber is not filled with gas, the diaphragm moves away from the first flow channel hole 123.

[0052] like Figure 1 As shown, in some embodiments of the present invention, the actuator 122 includes a solenoid valve 5, an air pipe, and a gas connector 4. It should be noted that any other drive mechanism capable of driving the first on / off section 12, the second on / off section 13, or the third on / off section 14 to form a flow or cut-off state can be used, and the present invention is not limited thereto. The solenoid valve 5 is disposed on the air pipe connected to the valve body 121, and the solenoid valve 5 is used to control the flow of gas. The gas connector 4 is connected to an external gas source; when the solenoid valve 5 is opened, gas enters the air pipe.

[0053] In other embodiments of the present invention, the first on / off part 12 and the second on / off part 13 are both ball valves or baffle valves. The advantages of using a ball valve are its simple structure, small size, ease of installation and maintenance, and wide applicability. The advantages of using a baffle valve are its good sealing performance, high durability, and convenient operation.

[0054] It should be noted that the specific construction of the first switching part 12, the second switching part 13, and the third switching part 14 is not specifically limited.

[0055] In some embodiments of the present invention, the drive unit 22 includes a frame 221 and a drive source 222. The drive source 222 is mounted on the frame 221, and its drive end is connected to the adjusting member 2. The drive source 222 is used to drive the adjusting member 2 to move horizontally within the temporary storage cavity 11. In some embodiments of the present invention, the drive source 222 is an electric cylinder, an electric push rod, or other drive device capable of moving the adjusting member 2 left and right within the temporary storage cavity 11. An electric cylinder is preferred in the present invention because it offers high control precision, up to the micrometer level.

[0056] In the fluid processing device of this invention, the electric cylinder serves as a drive source, enabling precise horizontal movement of the adjusting member 2 within the temporary storage chamber 11 via an electric mechanism. The electric cylinder comprises an electric motor, a lead screw, a valve stem, and a cylinder body. The electric motor is the core component of the electric cylinder, providing power to rotate the lead screw. The lead screw is connected to the valve stem via a thread; the rotation of the electric motor causes linear movement of the lead screw, thereby pushing the valve stem to move axially. One end of the valve stem is connected to the adjusting member 2, whose direction of movement is horizontal. When the system receives a control signal, the electric motor starts operating. Depending on the required direction of movement, the rotation direction of the electric motor is set to clockwise or counterclockwise to ensure that the rotation of the lead screw can drive the valve stem to move in the desired direction. The electric motor drives the lead screw to rotate via its output shaft, and the rotation of the lead screw causes the valve stem to move linearly horizontally under the action of its thread. The movement of the valve stem directly affects the position of the adjusting member 2. By adjusting the rotation speed and angle of the electric motor, the horizontal position of the adjusting member 2 within the temporary storage chamber 11 can be precisely controlled. This precision is crucial for fluid storage and release, especially given the high precision and stability requirements of fluid handling in the semiconductor industry. Furthermore, the small size of the electric cylinder contributes to a smaller overall size of the fluid handling device.

[0057] Meanwhile, a control system is also provided to ensure accurate horizontal movement of the adjusting component 2. This control system monitors the position of the adjusting component 2 in real time and adjusts the motor's operating state through a feedback mechanism. The application of electric cylinders in fluid handling devices offers several advantages. First, they have high drive efficiency and can quickly respond to control signals, enabling dynamic adjustment. Second, electric cylinders have a relatively compact structure, facilitating integration into equipment and reducing space requirements. Furthermore, the durability and reliability of electric cylinders allow for long-term stable operation in industrial applications, reducing maintenance costs.

[0058] In other embodiments of the present invention, a flow guide ring 116 is provided in the temporary storage cavity 11. One side of the flow guide ring 116 is connected to the first flow channel 114, and the other side is connected to the temporary storage cavity 11. The flow guide ring 116 can effectively guide the flow of fluid, reduce the generation of eddies, and improve the uniformity of fluid flow. By optimizing the flow path of the fluid, the flow guide ring 116 reduces the residence time of the fluid in the temporary storage cavity 11, further reducing the risk of wet particulate matter precipitation.

[0059] In summary, the beneficial effects of the fluid processing device provided by the present invention are as follows:

[0060] Firstly, the fluid processing device forms a seal between the fluid control body 1 and the adjustment member 2 by sealing the movable gap 21 formed between the temporary storage chamber 11 and the rolling diaphragm through the deformation member 3, i.e., the rolling diaphragm moving with the adjustment member 2, thus preventing fluid leakage and maintaining appropriate pressure. After the fluid enters the inlet channel 111, it enters the connected temporary storage chamber 11, and then flows out from the outlet after passing through the movable gap 21. Compared with the prior art, where the fluid flows directly from the inlet channel 111 to the temporary storage chamber 11 and then to the outlet, in this invention, the dynamic flow of the fluid continuously impacts the movable gap 21 during the process of the fluid flowing into the movable gap 21 through the outlet channel 112. This ensures continuous movement of the fluid within the movable gap 21, reduces static residence time, effectively improves the flow displacement effect of the photoresist, and thus effectively reduces the risk of wet particulate matter precipitation. During high-precision coating, if the photoresist remains static for a long time, bubbles and deposits may be generated due to temperature changes or external environmental influences, which will affect the uniformity of coating and the coating thickness. By improving the dynamic flowability of the fluid, this device effectively suppresses the precipitation of wet particulate matter, thereby enhancing the reliability and accuracy of the coating process.

[0061] Secondly, the present invention eliminates the need for a separate chamber for separating bubbles. Instead, the bubbles are guided to the circulation connector in the circulation channel 113 for discharge, thus preventing the fluid containing bubbles from flowing into the wafer from the outlet. This improves the yield of the process and ensures the overall quality of the photoresist coating.

[0062] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0063] Unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and connections within two components or interactions between two components. Those skilled in the art can understand the specific meaning of these terms in this invention based on the specific circumstances.

[0064] Unless otherwise expressly specified and limited, "above" or "below" a second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of a second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" of a second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0065] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A fluid processing apparatus for processing fluids that are prone to deterioration or particle precipitation, characterized in that, include: The fluid control body has a temporary storage chamber for storing fluid; An adjusting component is movably connected within the temporary storage chamber, and a movable gap is formed between the fluid control body and the adjusting component. The adjusting component is used to adjust the internal volume of the temporary storage chamber. The deformable component has one edge connected to the side wall of the fluid control body, and the other edge connected to one end of the adjusting component that extends into the temporary storage cavity. The deformable component, along with the movement of the adjusting component, blocks the movable gap between the adjusting component and the fluid control body. The fluid control body is further provided with an inlet flow channel and an outlet flow channel. The inlet flow channel is connected to the temporary storage cavity, and the outlet flow channel is connected to the movable gap. A first flow channel is also provided between the outlet flow channel and the temporary storage cavity. The first flow channel is located between the fluid control body and the adjusting member. The first flow channel is used to connect the outlet flow channel and the temporary storage cavity. The first flow channel is provided on the adjusting member. The temporary storage cavity is distributed in a horizontal direction, and the adjusting member moves horizontally along the extension direction of the temporary storage cavity; The fluid control body is provided with a circulation channel, which is connected to the temporary storage cavity. A second flow channel is also provided between the circulation flow channel and the temporary storage cavity. The second flow channel is located between the fluid control body and the adjustment component. The second flow channel is used to connect the circulation flow channel and the temporary storage cavity. The second flow channel is opened on the adjustment component. The temporary storage cavity has an axis, the inlet flow channel and the outlet flow channel are located on the side of the axis of the temporary storage cavity closer to the ground, and the circulation flow channel is located on the side of the axis of the temporary storage cavity away from the ground. A flow guide ring is provided in the temporary storage cavity. One port of the flow guide ring is connected to the first flow channel, and the other port is connected to the temporary storage cavity. When the fluid flows out of the temporary storage cavity, it passes through the movable gap, the first flow channel, and the outlet flow channel in sequence.

2. The fluid processing apparatus according to claim 1, characterized in that, The fluid control body further includes a first switching part, a second switching part, and a third switching part. The outlet of the first switching part is connected to one end of the temporary storage cavity and is used to control the inflow of fluid into the temporary storage cavity. The inlet of the second switching part is connected to the other end of the temporary storage cavity and is used to control the outflow of fluid from the temporary storage cavity. The third switching part is disposed between the temporary storage cavity and the circulation channel and is used to control the connection and disconnection between the temporary storage cavity and the circulation channel.

3. The fluid processing apparatus according to claim 2, characterized in that, The adjusting component includes a driving part, and the first on / off part, the second on / off part, and the third on / off part are diaphragm valves.

4. The fluid processing apparatus according to claim 3, characterized in that, The diaphragm valve includes a valve body, a diaphragm disposed in the valve body, and an actuator. The diaphragm is connected to the actuator, and the actuator is connected to the drive unit. The drive unit is used to drive the actuator to perform reciprocating motion, so as to drive the diaphragm to perform synchronous reciprocating motion, thereby enabling the valve body to form a flow or cut-off state.

5. The fluid processing apparatus according to claim 4, characterized in that, The valve body has a first flow channel hole and a second flow channel hole, which are used for the fluid to flow out and flow in the temporary storage chamber, respectively.

6. The fluid processing apparatus according to claim 3, characterized in that, The drive unit includes a frame and a drive source. The drive source is mounted on the frame, and the drive end of the drive source is connected to the adjustment member. The drive source is used to drive the adjustment member to move horizontally within the temporary storage cavity.

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